uSF2,DE,001,01,0000001,759017,367346,26217,28656,28204,16397,8841,4589,4559,13489,24283,27297,30549,29935,25887,23395,18529,6333,8678,5610,8317,11736,8499,4811,2535,391671,25201,27053,26889,15292,8698,4703,5068,14072,25525,28945,32626,31792,28123,25295,20405,7032,9836,6307,9389,14236,11927,7607,5650
uSF2,DE,001,01,0000002,605818,292976,21653,23528,23024,13179,7180,3841,3860,11381,20456,22810,25081,24295,20668,18398,13995,4615,6116,3946,5644,7984,5980,3444,1898,312842,20775,22236,21838,12436,7048,3945,4374,11927,21428,24191,26764,25921,22676,19936,15386,4992,7015,4462,6548,10083,8809,5687,4365
uSF2,DE,001,01,0000003,482751,233684,17047,18531,17978,10421,5646,3144,3097,9161,16695,18432,20049,19500,16770,14765,11146,3651,4744,3007,4328,6363,4855,2800,1554,249067,16257,17547,16857,9646,5484,3145,3595,9555,17170,19571,21324,20744,18365,16060,12306,3927,5415,3479,5156,8074,7161,4650,3579
uSF2,DE,001,01,0000004,123067,59292,4606,4997,5046,2758,1534,697,763,2220,3761,4378,5032,4795,3898,3633,2849,964,1372,939,1316,1621,1125,644,344,63775,4518,4689,4981,2790,1564,800,779,2372,4258,4620,5440,5177,4311,3876,3080,1065,1600,983,1392,2009,1648,1037,786
uSF2,DE,001,01,0000005,119273,55698,4073,4425,4245,2425,1548,1155,1375,3217,4537,4285,4059,3957,3524,3195,2415,767,1089,742,1017,1402,1115,702,429,63575,3812,4062,4185,2417,1581,1376,1764,3309,4803,4718,4737,4573,4166,3725,2911,951,1368,940,1333,2107,2047,1468,1222
uSF2,DE,001,01,0000006,90256,42175,3005,3296,3216,1867,1200,973,1163,2547,3546,3259,2990,2941,2721,2349,1782,580,789,519,708,1019,853,522,330,48081,2746,3090,3106,1836,1250,1151,1520,2562,3665,3606,3512,3403,3123,2786,2146,722,986,692,997,1577,1519,1143,943
uSF2,DE,001,01,0000007,29017,13523,1068,1129,1029,558,348,182,212,670,991,1026,1069,1016,803,846,633,187,300,223,309,383,262,180,99,15494,1066,972,1079,581,331,225,244,747,1138,1112,1225,1170,1043,939,765,229,382,248,336,530,528,325,279
uSF2,DE,001,01,0000008,486545,237278,17580,19103,18779,10754,5632,2686,2485,8164,15919,18525,21022,20338,17144,15203,11580,3848,5027,3204,4627,6582,4865,2742,1469,249267,16963,18174,17653,10019,5467,2569,2610,8618,16625,19473,22027,21348,18510,16211,12475,4041,5647,3522,5215,7976,6762,4219,3143
uSF2,DE,001,01,0000009,392495,191509,14042,15235,14762,8554,4446,2171,1934,6614,13149,15173,17059,16559,14049,12416,9364,3071,3955,2488,3620,5344,4002,2278,1224,200986,13511,14457,13751,7810,4234,1994,2075,6993,13505,15965,17812,17341,15242,13274,10160,3205,4429,2787,4159,6497,5642,3507,2636
uSF2,DE,001,01,0000010,94050,45769,3538,3868,4017,2200,1186,515,551,1550,2770,3352,3963,3779,3095,2787,2216,777,1072,716,1007,1238,863,464,245,48281,3452,3717,3902,2209,1233,575,535,1625,3120,3508,4215,4007,3268,2937,2315,836,1218,735,1056,1479,1120,712,507
uSF2,DE,001,01,0000011,153199,74370,4564,5128,5180,3218,1661,748,699,2108,3827,4487,5468,5640,5219,4997,4534,1718,2562,1664,2673,3752,2519,1367,637,78829,4426,4817,5051,2856,1650,758,694,2145,4097,4754,5862,5871,5447,5359,5019,2040,2821,1845,2841,4153,3118,1920,1285
uSF2,DE,001,01,0000012,22679,11106,478,598,656,383,173,85,59,208,386,543,702,764,759,791,797,344,581,368,620,888,541,265,117,11573,470,525,581,334,174,72,79,206,446,586,793,836,737,882,925,388,674,375,646,800,576,297,171
uSF2,DE,001,01,0000013,123067,59292,4606,4997,5046,2758,1534,697,763,2220,3761,4378,5032,4795,3898,3633,2849,964,1372,939,1316,1621,1125,644,344,63775,4518,4689,4981,2790,1564,800,779,2372,4258,4620,5440,5177,4311,3876,3080,1065,1600,983,1392,2009,1648,1037,786
uSF2,DE,001,01,0000014,18267,8928,721,765,824,457,233,92,117,300,512,667,866,781,596,541,405,129,189,122,200,191,118,70,32,9339,692,796,826,476,268,99,100,317,575,690,881,824,587,531,434,162,214,128,186,226,161,94,72
uSF2,DE,001,01,0000015,226,121,10,9,17,7,1,0,0,5,14,5,7,9,10,3,8,2,2,0,3,4,2,3,0,105,4,8,10,5,4,0,1,5,8,6,13,11,5,7,2,0,3,0,1,3,6,2,1
uSF2,DE,001,01,0000016,226,121,10,9,17,7,1,0,0,5,14,5,7,9,10,3,8,2,2,0,3,4,2,3,0,105,4,8,10,5,4,0,1,5,8,6,13,11,5,7,2,0,3,0,1,3,6,2,1
uSF2,DE,001,01,0000017,2189,1071,115,124,103,47,25,13,27,67,99,102,116,68,45,34,28,5,9,6,15,10,7,2,4,1118,118,97,118,62,27,17,19,72,104,112,110,69,45,36,29,17,10,7,16,10,10,6,7
uSF2,DE,001,01,0000018,2189,1071,115,124,103,47,25,13,27,67,99,102,116,68,45,34,28,5,9,6,15,10,7,2,4,1118,118,97,118,62,27,17,19,72,104,112,110,69,45,36,29,17,10,7,16,10,10,6,7
uSF2,DE,001,01,0000019,1583,784,55,56,74,46,14,6,8,24,42,59,78,75,67,69,30,7,14,9,14,19,11,3,4,799,37,58,75,44,21,12,5,27,49,59,75,86,65,68,39,10,13,6,14,16,15,3,2
uSF2,DE,001,01,0000020,1583,784,55,56,74,46,14,6,8,24,42,59,78,75,67,69,30,7,14,9,14,19,11,3,4,799,37,58,75,44,21,12,5,27,49,59,75,86,65,68,39,10,13,6,14,16,15,3,2
uSF2,DE,001,01,0000021,156,82,3,4,10,3,3,1,1,4,3,6,8,7,6,7,5,2,2,3,2,1,0,1,0,74,1,2,4,6,2,0,0,2,1,5,7,4,9,6,9,1,4,0,1,1,3,5,1
uSF2,DE,001,01,0000022,156,82,3,4,10,3,3,1,1,4,3,6,8,7,6,7,5,2,2,3,2,1,0,1,0,74,1,2,4,6,2,0,0,2,1,5,7,4,9,6,9,1,4,0,1,1,3,5,1
uSF2,DE,001,01,0000023,184,86,3,5,8,6,2,0,0,2,6,3,10,10,6,12,3,2,0,2,3,0,1,2,0,98,3,4,8,4,2,1,1,4,5,6,13,9,5,5,3,3,7,1,3,6,1,3,1
uSF2,DE,001,01,0000024,184,86,3,5,8,6,2,0,0,2,6,3,10,10,6,12,3,2,0,2,3,0,1,2,0,98,3,4,8,4,2,1,1,4,5,6,13,9,5,5,3,3,7,1,3,6,1,3,1
uSF2,DE,001,01,0000025,2174,1032,100,105,103,66,33,8,13,33,55,67,106,71,70,49,55,13,20,10,20,14,8,8,5,1142,92,125,106,58,46,13,20,35,69,93,124,85,56,47,44,19,30,15,20,22,12,5,6
uSF2,DE,001,01,0000026,2174,1032,100,105,103,66,33,8,13,33,55,67,106,71,70,49,55,13,20,10,20,14,8,8,5,1142,92,125,106,58,46,13,20,35,69,93,124,85,56,47,44,19,30,15,20,22,12,5,6
uSF2,DE,001,01,0000027,11755,5752,435,462,509,282,155,64,68,165,293,425,541,541,392,367,276,98,142,92,143,143,89,51,19,6003,437,502,505,297,166,56,54,172,339,409,539,560,402,362,308,112,147,99,131,168,114,70,54
uSF2,DE,001,01,0000028,2995,1474,106,113,143,69,45,15,20,45,68,114,151,126,108,93,71,17,35,25,41,34,23,5,7,1521,108,137,132,83,34,21,14,55,77,105,122,136,98,107,83,24,36,18,33,39,27,21,11
uSF2,DE,001,01,0000029,2876,1406,83,92,100,68,43,24,20,50,69,90,111,134,121,97,71,34,41,30,46,36,23,19,4,1470,87,105,109,81,43,9,14,37,69,74,112,140,133,89,83,42,44,43,34,43,35,25,19
uSF2,DE,001,01,0000030,1716,824,73,87,77,43,22,7,8,14,34,50,85,74,41,55,45,15,19,16,17,24,8,8,2,892,70,82,83,42,23,5,5,25,58,66,87,80,45,44,55,14,19,15,20,23,16,4,11
uSF2,DE,001,01,0000031,4168,2048,173,170,189,102,45,18,20,56,122,171,194,207,122,122,89,32,47,21,39,49,35,19,6,2120,172,178,181,91,66,21,21,55,135,164,218,204,126,122,87,32,48,23,44,63,36,20,13
uSF2,DE,001,01,0000032,63326,30381,2440,2614,2488,1375,778,372,430,1314,2057,2254,2508,2380,1910,1858,1402,486,687,483,685,799,540,342,179,32945,2353,2329,2465,1395,792,455,448,1392,2319,2348,2731,2604,2272,1992,1591,541,828,522,686,1017,894,536,435
uSF2,DE,001,01,0000033,2100,1000,60,88,94,62,35,10,7,30,66,64,82,95,57,63,49,16,21,15,23,31,17,10,5,1100,55,66,89,54,29,15,12,53,73,68,87,109,81,74,41,21,30,24,30,34,22,16,17
uSF2,DE,001,01,0000034,2100,1000,60,88,94,62,35,10,7,30,66,64,82,95,57,63,49,16,21,15,23,31,17,10,5,1100,55,66,89,54,29,15,12,53,73,68,87,109,81,74,41,21,30,24,30,34,22,16,17
uSF2,DE,001,01,0000035,313,163,15,16,14,8,5,2,3,10,14,12,15,9,11,4,5,1,3,4,5,2,4,1,0,150,11,8,14,10,2,1,6,3,11,14,11,15,10,9,3,2,1,3,6,4,2,2,2
uSF2,DE,001,01,0000036,313,163,15,16,14,8,5,2,3,10,14,12,15,9,11,4,5,1,3,4,5,2,4,1,0,150,11,8,14,10,2,1,6,3,11,14,11,15,10,9,3,2,1,3,6,4,2,2,2
uSF2,DE,001,01,0000037,29017,13523,1068,1129,1029,558,348,182,212,670,991,1026,1069,1016,803,846,633,187,300,223,309,383,262,180,99,15494,1066,972,1079,581,331,225,244,747,1138,1112,1225,1170,1043,939,765,229,382,248,336,530,528,325,279
uSF2,DE,001,01,0000038,5581,2676,219,236,208,118,79,40,44,143,197,206,255,169,137,151,111,35,62,51,73,70,42,21,9,2905,200,197,204,93,70,42,53,167,234,223,273,206,188,174,132,38,87,57,63,84,62,35,23
uSF2,DE,001,01,0000039,655,336,36,21,18,3,2,4,3,16,32,40,49,23,21,26,7,3,4,3,8,6,6,3,2,319,25,24,17,7,8,2,3,18,32,37,34,15,21,16,14,4,4,9,6,7,9,3,4
uSF2,DE,001,01,0000040,4348,1979,149,201,199,101,40,14,24,46,85,105,143,155,148,167,149,37,53,23,31,49,25,16,19,2369,156,167,220,130,48,25,24,76,113,160,180,189,201,208,148,37,42,26,33,58,44,32,52
uSF2,DE,001,01,0000041,2652,1209,80,70,78,52,43,26,23,69,71,67,104,98,65,77,46,22,40,26,36,39,37,25,15,1443,82,73,95,56,39,23,21,57,85,89,103,110,87,78,74,28,36,32,35,64,80,55,41
uSF2,DE,001,01,0000042,1797,762,41,43,34,22,14,10,12,39,61,66,47,47,53,59,53,11,15,18,15,31,31,23,17,1035,42,36,33,17,9,9,14,38,74,56,46,60,48,66,59,8,39,21,35,87,94,85,59
uSF2,DE,001,01,0000043,4087,1964,181,191,150,64,68,19,35,113,174,189,126,145,109,96,78,25,41,26,36,50,28,19,1,2123,173,151,124,70,54,48,39,131,200,178,152,169,126,111,111,31,37,32,38,53,66,16,13
uSF2,DE,001,01,0000044,64,32,1,7,3,2,0,1,0,1,2,3,6,1,3,0,0,0,0,0,0,1,1,0,0,32,2,3,5,1,0,0,1,1,4,2,3,3,2,1,1,0,0,0,1,1,1,0,0
uSF2,DE,001,01,0000045,546,248,27,19,29,12,7,6,3,18,15,16,11,19,16,12,8,1,9,8,6,3,1,1,1,298,21,18,19,12,4,8,10,19,23,28,22,21,19,9,14,8,7,7,8,5,6,8,2
uSF2,DE,001,01,0000046,2074,934,99,89,53,32,21,13,14,55,90,67,69,65,49,43,29,9,16,16,22,25,20,22,16,1140,96,76,71,30,25,19,23,81,113,69,73,80,67,51,37,18,25,13,28,36,51,25,33
uSF2,DE,001,01,0000047,2875,1336,104,117,108,52,33,23,22,71,103,126,112,113,66,61,46,16,17,17,36,31,30,21,11,1539,116,96,106,63,27,24,24,73,132,123,134,121,103,75,52,23,37,19,40,48,41,41,21
uSF2,DE,001,01,0000048,1960,947,42,66,80,54,20,12,9,33,37,44,58,85,61,67,59,20,32,29,35,53,27,19,5,1013,39,43,103,63,16,13,6,18,27,44,72,92,71,73,75,22,53,22,35,58,40,14,14
uSF2,DE,001,01,0000049,2116,978,84,66,56,40,21,12,19,56,108,88,79,87,68,75,42,8,9,4,9,23,13,9,2,1138,102,80,72,36,25,12,25,55,87,92,123,93,97,66,42,11,13,8,14,28,32,8,17
uSF2,DE,001,01,0000050,257,121,5,3,12,6,0,2,4,10,16,9,10,9,7,12,5,0,2,2,2,2,1,1,1,136,12,7,9,3,6,0,1,13,13,11,10,11,13,10,6,1,2,2,0,1,2,3,0
uSF2,DE,001,01,0000051,3394,1722,304,216,157,43,22,29,44,161,258,226,155,87,13,4,3,0,0,0,0,0,0,0,0,1672,274,202,117,51,44,50,49,160,264,204,141,74,23,9,2,0,3,0,1,2,1,1,0
uSF2,DE,001,01,0000052,3394,1722,304,216,157,43,22,29,44,161,258,226,155,87,13,4,3,0,0,0,0,0,0,0,0,1672,274,202,117,51,44,50,49,160,264,204,141,74,23,9,2,0,3,0,1,2,1,1,0
uSF2,DE,001,01,0000053,3379,1627,74,121,129,88,42,21,11,39,66,76,108,142,126,148,108,47,59,49,57,48,40,21,7,1752,90,109,127,85,34,18,22,50,75,62,132,143,158,143,121,62,70,51,46,57,56,22,19
uSF2,DE,001,01,0000054,1647,771,34,48,55,42,17,6,5,15,34,33,49,67,51,57,53,19,38,33,37,33,23,17,5,876,36,55,55,39,18,13,5,27,29,31,62,60,70,64,59,40,48,29,34,37,36,18,11
uSF2,DE,001,01,0000055,1732,856,40,73,74,46,25,15,6,24,32,43,59,75,75,91,55,28,21,16,20,15,17,4,2,876,54,54,72,46,16,5,17,23,46,31,70,83,88,79,62,22,22,22,12,20,20,4,8
uSF2,DE,001,01,0000056,1637,784,55,70,61,40,21,7,4,16,43,62,72,69,50,46,35,16,17,15,24,23,22,14,2,853,47,60,70,35,15,9,5,23,60,59,68,68,58,60,52,11,32,16,21,36,24,14,10
uSF2,DE,001,01,0000057,1014,481,37,46,36,18,11,5,3,9,26,48,46,41,30,29,21,6,13,8,15,12,15,5,1,533,31,42,51,19,5,7,3,17,42,42,50,37,33,41,33,5,20,7,15,15,11,4,3
uSF2,DE,001,01,0000058,623,303,18,24,25,22,10,2,1,7,17,14,26,28,20,17,14,10,4,7,9,11,7,9,1,320,16,18,19,16,10,2,2,6,18,17,18,31,25,19,19,6,12,9,6,21,13,10,7
uSF2,DE,001,01,0000059,199,91,6,7,6,4,0,2,1,2,8,4,11,5,6,8,5,0,4,1,1,6,2,0,2,108,7,9,12,6,1,3,2,4,5,7,10,3,12,3,8,2,3,1,3,2,5,0,0
uSF2,DE,001,01,0000060,199,91,6,7,6,4,0,2,1,2,8,4,11,5,6,8,5,0,4,1,1,6,2,0,2,108,7,9,12,6,1,3,2,4,5,7,10,3,12,3,8,2,3,1,3,2,5,0,0
uSF2,DE,001,01,0000061,195,91,9,8,8,5,1,1,1,0,5,7,9,7,7,3,3,1,0,2,4,7,3,0,0,104,9,13,9,5,1,2,1,4,6,6,9,8,4,5,3,0,3,3,1,6,1,3,2
uSF2,DE,001,01,0000062,115,52,3,4,5,4,0,0,0,0,3,4,7,4,6,1,2,0,0,1,2,4,2,0,0,63,5,6,7,5,1,1,1,0,4,4,6,5,2,2,2,0,1,2,1,3,1,3,1
uSF2,DE,001,01,0000063,269,139,14,9,8,9,4,0,0,6,9,8,13,13,4,9,6,5,3,6,2,8,1,2,0,130,8,8,13,8,2,1,0,1,5,11,18,11,4,10,5,2,7,1,5,3,5,0,2
uSF2,DE,001,01,0000064,269,139,14,9,8,9,4,0,0,6,9,8,13,13,4,9,6,5,3,6,2,8,1,2,0,130,8,8,13,8,2,1,0,1,5,11,18,11,4,10,5,2,7,1,5,3,5,0,2
uSF2,DE,001,01,0000065,1562,779,54,60,61,42,47,16,26,53,44,39,54,54,57,46,28,12,17,12,13,21,14,8,1,783,43,42,68,46,31,12,7,27,50,43,54,74,60,41,43,15,17,14,23,29,20,14,10
uSF2,DE,001,01,0000066,1538,769,52,59,61,39,47,16,24,53,44,38,53,54,57,46,28,12,17,12,13,21,14,8,1,769,42,41,67,44,31,11,7,27,50,42,54,70,59,41,43,15,17,14,23,28,20,13,10
uSF2,DE,001,01,0000067,1141,568,44,35,48,29,17,5,6,21,26,44,44,59,47,30,26,11,14,11,15,14,9,9,4,573,27,36,41,25,12,11,5,13,40,46,48,51,41,36,19,16,20,12,14,22,18,11,9
uSF2,DE,001,01,0000068,224,104,7,4,13,5,6,2,1,2,3,13,12,11,16,2,3,1,0,0,1,0,2,0,0,120,7,11,15,5,2,4,0,0,5,11,16,19,9,4,3,2,0,3,1,1,2,0,0
uSF2,DE,001,01,0000069,917,464,37,31,35,24,11,3,5,19,23,31,32,48,31,28,23,10,14,11,14,14,7,9,4,453,20,25,26,20,10,7,5,13,35,35,32,32,32,32,16,14,20,9,13,21,16,11,9
uSF2,DE,001,01,0000070,20042,9859,734,850,868,484,235,97,114,305,524,684,875,820,728,648,500,190,249,145,232,256,166,96,59,10183,712,802,823,487,288,106,95,307,588,712,921,872,776,661,528,181,259,149,199,292,212,128,85
uSF2,DE,001,01,0000071,705,346,23,30,19,15,5,5,2,14,26,28,36,26,16,25,17,10,7,6,11,14,7,3,1,359,23,23,24,10,11,3,3,20,22,24,30,29,22,25,28,7,13,4,8,11,14,3,2
uSF2,DE,001,01,0000072,2637,1324,95,90,78,56,32,12,19,35,85,109,119,82,102,92,78,28,46,28,40,43,30,14,11,1313,85,74,73,48,27,14,11,46,101,92,105,109,119,94,82,35,35,23,32,44,36,15,13
uSF2,DE,001,01,0000073,40,18,1,2,0,0,0,0,0,1,0,1,1,3,0,1,3,0,4,0,0,0,0,1,0,22,0,2,1,1,0,0,0,2,0,2,1,4,0,1,2,0,0,4,0,0,0,0,2
uSF2,DE,001,01,0000074,330,152,6,10,8,4,3,1,1,4,9,11,15,18,15,6,8,5,5,3,5,6,7,2,0,178,9,16,9,7,5,2,3,9,11,12,7,16,14,11,7,8,3,6,3,4,10,5,1
uSF2,DE,001,01,0000075,1851,896,77,93,78,40,22,11,15,46,47,64,68,59,56,58,44,25,26,13,13,16,13,9,3,955,72,75,80,59,32,18,12,28,73,62,71,80,69,57,61,8,28,11,10,31,8,7,3
uSF2,DE,001,01,0000076,772,376,22,20,27,23,13,6,3,11,19,16,36,36,32,29,17,7,17,9,14,11,3,3,2,396,15,23,39,21,6,6,3,14,17,20,24,38,32,29,30,11,12,11,11,11,9,9,5
uSF2,DE,001,01,0000077,1342,660,32,58,91,50,18,5,11,12,22,52,69,61,53,40,30,11,9,5,10,8,8,4,1,682,43,62,71,41,18,7,7,8,19,43,79,76,59,37,37,8,14,7,8,21,7,4,6
uSF2,DE,001,01,0000078,5204,2557,207,235,240,130,59,26,28,73,143,181,231,221,175,149,116,45,53,35,56,64,48,26,16,2647,193,219,217,127,84,28,26,82,145,190,267,222,182,170,110,36,63,41,56,74,64,34,17
uSF2,DE,001,01,0000079,2355,1138,99,105,106,61,30,9,13,25,40,56,99,105,105,83,63,14,24,14,31,21,16,9,10,1217,78,125,116,81,34,9,7,34,43,81,118,95,110,69,64,18,23,13,18,26,22,19,14
uSF2,DE,001,01,0000080,4759,2370,172,207,219,105,53,20,22,84,132,164,199,209,173,162,122,45,57,31,51,71,32,25,15,2389,193,181,192,91,70,19,23,64,156,185,217,203,169,166,103,50,64,29,52,68,40,32,22
uSF2,DE,001,01,0000081,5485,2684,187,200,258,128,55,24,21,55,185,200,225,245,195,182,139,61,74,47,53,72,45,21,12,2801,161,207,228,139,60,27,17,94,198,225,238,253,210,192,139,44,72,39,64,85,45,42,22
uSF2,DE,001,01,0000082,780,357,27,29,38,15,18,2,4,10,33,26,42,27,20,14,11,6,10,2,6,4,3,6,4,423,30,34,38,19,8,5,1,17,42,37,40,42,28,19,9,8,6,4,6,10,13,2,5
uSF2,DE,001,01,0000083,780,357,27,29,38,15,18,2,4,10,33,26,42,27,20,14,11,6,10,2,6,4,3,6,4,423,30,34,38,19,8,5,1,17,42,37,40,42,28,19,9,8,6,4,6,10,13,2,5
uSF2,DE,001,01,0000084,4705,2327,160,171,220,113,37,22,17,45,152,174,183,218,175,168,128,55,64,45,47,68,42,15,8,2378,131,173,190,120,52,22,16,77,156,188,198,211,182,173,130,36,66,35,58,75,32,40,17
uSF2,DE,001,01,0000085,4705,2327,160,171,220,113,37,22,17,45,152,174,183,218,175,168,128,55,64,45,47,68,42,15,8,2378,131,173,190,120,52,22,16,77,156,188,198,211,182,173,130,36,66,35,58,75,32,40,17
uSF2,DE,001,01,0000086,10352,4975,373,410,406,243,139,58,44,143,308,339,399,394,349,323,283,79,124,83,98,168,119,60,33,5377,415,412,435,228,110,54,59,155,337,402,446,439,359,339,250,82,128,90,129,183,164,109,52
uSF2,DE,001,01,0000087,3174,1455,123,148,133,70,47,23,15,59,87,107,95,116,87,70,57,22,35,22,26,44,37,19,13,1719,159,130,160,71,43,15,26,58,107,115,135,118,121,78,55,22,38,28,42,64,66,45,23
uSF2,DE,001,01,0000088,3174,1455,123,148,133,70,47,23,15,59,87,107,95,116,87,70,57,22,35,22,26,44,37,19,13,1719,159,130,160,71,43,15,26,58,107,115,135,118,121,78,55,22,38,28,42,64,66,45,23
uSF2,DE,001,01,0000089,430,219,15,29,22,8,8,5,1,5,16,13,21,13,18,12,5,1,2,1,2,11,3,4,4,211,17,18,17,5,4,2,0,6,15,23,19,20,10,10,10,2,4,2,8,8,3,5,3
uSF2,DE,001,01,0000090,430,219,15,29,22,8,8,5,1,5,16,13,21,13,18,12,5,1,2,1,2,11,3,4,4,211,17,18,17,5,4,2,0,6,15,23,19,20,10,10,10,2,4,2,8,8,3,5,3
uSF2,DE,001,01,0000091,6673,3260,233,231,249,164,84,30,28,78,203,212,281,261,240,238,219,55,87,58,69,110,77,37,16,3413,239,261,256,149,63,36,32,91,214,263,287,299,225,247,184,57,86,60,77,110,93,58,26
uSF2,DE,001,01,0000092,3004,1465,102,113,107,69,40,12,11,35,93,99,124,114,120,105,104,29,31,19,25,56,32,19,6,1539,104,121,115,71,34,17,14,31,104,124,130,138,110,113,74,24,40,17,35,52,36,23,12
uSF2,DE,001,01,0000093,1316,631,44,38,38,33,15,8,5,20,42,30,51,57,45,52,38,7,24,15,20,21,15,8,5,685,44,48,42,40,12,5,5,20,38,44,54,65,45,51,35,17,16,17,19,27,22,16,3
uSF2,DE,001,01,0000094,2353,1164,87,80,104,62,29,10,12,23,68,83,106,90,75,81,77,19,32,24,24,33,30,10,5,1189,91,92,99,38,17,14,13,40,72,95,103,96,70,83,75,16,30,26,23,31,35,19,11
uSF2,DE,001,01,0000095,5337,2691,178,247,244,142,83,39,31,100,130,177,226,238,189,168,162,49,70,35,48,57,43,29,6,2646,183,195,218,128,73,34,24,69,168,204,230,223,198,169,160,39,71,36,55,69,51,32,17
uSF2,DE,001,01,0000096,237,115,4,10,12,8,2,2,1,4,6,8,12,9,7,7,11,1,4,1,1,2,1,2,0,122,7,7,13,5,5,1,3,4,3,12,12,10,4,8,10,4,3,1,1,3,2,2,2
uSF2,DE,001,01,0000097,237,115,4,10,12,8,2,2,1,4,6,8,12,9,7,7,11,1,4,1,1,2,1,2,0,122,7,7,13,5,5,1,3,4,3,12,12,10,4,8,10,4,3,1,1,3,2,2,2
uSF2,DE,001,01,0000098,5100,2576,174,237,232,134,81,37,30,96,124,169,214,229,182,161,151,48,66,34,47,55,42,27,6,2524,176,188,205,123,68,33,21,65,165,192,218,213,194,161,150,35,68,35,54,66,49,30,15
uSF2,DE,001,01,0000099,5100,2576,174,237,232,134,81,37,30,96,124,169,214,229,182,161,151,48,66,34,47,55,42,27,6,2524,176,188,205,123,68,33,21,65,165,192,218,213,194,161,150,35,68,35,54,66,49,30,15
uSF2,DE,001,01,0000100,8724,4125,280,317,350,168,109,50,51,133,230,311,331,315,261,251,201,74,133,88,92,149,127,64,40,4599,303,303,362,160,119,58,54,157,245,312,372,339,285,296,228,84,134,87,110,202,178,111,100
uSF2,DE,001,01,0000101,305,150,6,9,17,4,2,0,3,7,9,12,11,17,9,10,7,1,4,5,6,4,4,2,1,155,6,7,11,3,2,2,1,6,8,21,10,9,5,14,8,8,5,3,5,3,6,9,3
uSF2,DE,001,01,0000102,305,150,6,9,17,4,2,0,3,7,9,12,11,17,9,10,7,1,4,5,6,4,4,2,1,155,6,7,11,3,2,2,1,6,8,21,10,9,5,14,8,8,5,3,5,3,6,9,3
uSF2,DE,001,01,0000103,648,303,19,27,30,11,7,3,5,6,13,30,33,25,23,17,13,2,4,2,2,8,12,6,5,345,27,34,29,14,9,2,7,6,21,18,36,32,21,20,6,5,7,5,8,15,13,6,4
uSF2,DE,001,01,0000104,648,303,19,27,30,11,7,3,5,6,13,30,33,25,23,17,13,2,4,2,2,8,12,6,5,345,27,34,29,14,9,2,7,6,21,18,36,32,21,20,6,5,7,5,8,15,13,6,4
uSF2,DE,001,01,0000105,2873,1255,104,110,123,59,37,22,23,59,89,101,92,83,52,62,39,15,29,14,19,52,38,21,12,1618,128,127,118,52,45,27,24,80,105,106,119,90,87,73,63,17,39,26,31,86,71,55,49
uSF2,DE,001,01,0000106,2478,1107,88,101,108,52,32,20,19,49,82,88,86,78,48,59,34,14,22,13,15,42,32,15,10,1371,112,102,93,46,36,24,19,72,92,89,103,80,81,65,59,16,33,20,25,67,49,43,45
uSF2,DE,001,01,0000107,395,148,16,9,15,7,5,2,4,10,7,13,6,5,4,3,5,1,7,1,4,10,6,6,2,247,16,25,25,6,9,3,5,8,13,17,16,10,6,8,4,1,6,6,6,19,22,12,4
uSF2,DE,001,01,0000108,4898,2417,151,171,180,94,63,25,20,61,119,168,195,190,177,162,142,56,96,67,65,85,73,35,22,2481,142,135,204,91,63,27,22,65,111,167,207,208,172,189,151,54,83,53,66,98,88,41,44
uSF2,DE,001,01,0000109,2297,1144,82,78,92,40,33,15,11,37,70,79,97,96,79,71,60,21,39,28,24,37,32,17,6,1153,66,67,91,39,39,14,9,33,56,88,95,101,76,75,61,19,43,21,39,49,36,21,15
uSF2,DE,001,01,0000110,377,173,7,11,9,11,2,0,1,4,5,12,14,14,13,18,11,6,8,4,7,8,6,2,0,204,8,12,16,5,3,0,4,5,4,14,14,24,11,26,14,6,3,5,6,6,10,3,5
uSF2,DE,001,01,0000111,1713,851,45,70,68,34,18,9,7,16,27,56,67,60,59,59,47,23,44,28,25,33,30,11,15,862,54,40,72,36,17,10,6,21,31,51,77,63,64,62,58,22,31,23,16,35,40,14,19
uSF2,DE,001,01,0000112,511,249,17,12,11,9,10,1,1,4,17,21,17,20,26,14,24,6,5,7,9,7,5,5,1,262,14,16,25,11,4,3,3,6,20,14,21,20,21,26,18,7,6,4,5,8,2,3,5
uSF2,DE,001,01,0000113,11576,5508,427,444,476,245,137,62,69,175,339,430,477,442,398,310,257,86,95,81,140,185,133,58,42,6068,411,447,447,264,142,73,77,188,416,439,542,495,400,357,278,113,153,81,162,227,155,113,88
uSF2,DE,001,01,0000114,1273,600,46,51,70,18,15,3,10,20,30,51,54,54,46,34,14,5,9,8,7,21,16,9,9,673,32,43,54,32,13,8,7,17,44,49,56,59,49,47,26,14,15,6,12,39,12,21,18
uSF2,DE,001,01,0000115,1273,600,46,51,70,18,15,3,10,20,30,51,54,54,46,34,14,5,9,8,7,21,16,9,9,673,32,43,54,32,13,8,7,17,44,49,56,59,49,47,26,14,15,6,12,39,12,21,18
uSF2,DE,001,01,0000116,5404,2503,208,210,229,122,69,33,41,87,176,194,211,175,173,131,92,34,38,29,58,79,68,23,23,2901,213,210,222,123,78,35,44,109,218,208,247,214,205,149,99,52,60,36,75,108,90,54,52
uSF2,DE,001,01,0000117,1825,870,79,67,70,39,25,12,23,41,71,77,70,54,60,54,30,14,11,7,11,28,18,3,6,955,75,58,74,32,34,9,9,47,80,80,81,65,74,53,39,18,14,10,20,31,20,15,17
uSF2,DE,001,01,0000118,2011,944,51,63,84,44,24,9,9,22,56,61,92,70,74,55,45,14,20,16,34,32,35,17,17,1067,51,72,76,43,20,11,13,34,50,61,94,81,81,59,44,27,32,15,42,51,52,30,28
uSF2,DE,001,01,0000119,1568,689,78,80,75,39,20,12,9,24,49,56,49,51,39,22,17,6,7,6,13,19,15,3,0,879,87,80,72,48,24,15,22,28,88,67,72,68,50,37,16,7,14,11,13,26,18,9,7
uSF2,DE,001,01,0000120,4895,2404,173,183,177,105,52,26,18,68,133,185,212,213,179,145,151,47,48,44,75,85,49,26,10,2491,164,194,171,109,51,30,25,62,154,182,239,222,146,161,153,47,78,39,75,80,53,38,18
uSF2,DE,001,01,0000121,379,192,11,19,18,7,5,0,0,2,12,15,24,29,11,8,8,7,2,2,4,4,1,2,1,187,13,19,15,9,4,3,1,4,14,22,14,18,7,5,7,6,4,4,5,6,2,3,2
uSF2,DE,001,01,0000122,2847,1383,108,103,93,59,28,19,9,41,71,113,117,104,103,90,86,31,29,28,55,47,27,16,6,1464,97,115,92,61,25,21,17,37,87,102,132,129,89,100,104,19,51,22,44,53,33,24,10
uSF2,DE,001,01,0000123,1501,741,50,56,58,34,18,5,8,24,41,49,68,69,61,40,50,9,15,13,16,31,19,5,2,760,50,51,57,34,22,6,7,16,47,53,90,67,45,49,39,20,19,13,23,21,15,11,5
uSF2,DE,001,01,0000124,168,88,4,5,8,5,1,2,1,1,9,8,3,11,4,7,7,0,2,1,0,3,2,3,1,80,4,9,7,5,0,0,0,5,6,5,3,8,5,7,3,2,4,0,3,0,3,0,1
uSF2,DE,001,01,0000125,5337,2691,178,247,244,142,83,39,31,100,130,177,226,238,189,168,162,49,70,35,48,57,43,29,6,2646,183,195,218,128,73,34,24,69,168,204,230,223,198,169,160,39,71,36,55,69,51,32,17
uSF2,DE,001,01,0000126,3477,1662,136,137,158,64,45,15,33,63,113,143,148,137,117,96,52,26,22,17,22,53,35,14,16,1815,120,120,143,73,51,20,17,68,138,151,151,142,130,105,72,38,33,20,37,76,34,39,37
uSF2,DE,001,01,0000127,4858,2327,159,166,177,103,52,28,18,63,127,174,209,174,177,145,131,45,49,44,89,79,62,33,23,2531,148,187,168,104,45,32,30,71,137,163,226,210,170,159,148,46,83,37,86,104,85,54,38
uSF2,DE,001,01,0000128,3069,1430,128,136,133,73,38,17,17,48,90,105,117,120,100,62,67,15,22,19,29,50,34,8,2,1639,137,131,129,82,46,21,29,44,135,120,162,135,95,86,55,27,33,24,36,47,33,20,12
uSF2,DE,001,01,0000129,1156,565,39,46,36,25,8,10,5,17,45,43,52,45,27,42,30,11,13,9,14,26,12,6,4,591,40,48,45,21,12,7,6,33,35,38,46,43,41,38,40,11,22,6,14,16,22,3,4
uSF2,DE,001,01,0000130,8218,4000,314,326,286,174,111,52,63,178,282,315,374,251,239,243,189,63,108,79,113,113,72,35,20,4218,285,271,277,141,97,56,64,213,335,315,378,315,307,268,214,73,122,80,95,128,98,50,36
uSF2,DE,001,01,0000131,695,354,37,23,18,3,2,4,3,17,32,41,50,26,21,27,10,3,8,3,8,6,6,4,2,341,25,26,18,8,8,2,3,20,32,39,35,19,21,17,16,4,4,13,6,7,9,3,6
uSF2,DE,001,01,0000132,4348,1979,149,201,199,101,40,14,24,46,85,105,143,155,148,167,149,37,53,23,31,49,25,16,19,2369,156,167,220,130,48,25,24,76,113,160,180,189,201,208,148,37,42,26,33,58,44,32,52
uSF2,DE,001,01,0000133,2652,1209,80,70,78,52,43,26,23,69,71,67,104,98,65,77,46,22,40,26,36,39,37,25,15,1443,82,73,95,56,39,23,21,57,85,89,103,110,87,78,74,28,36,32,35,64,80,55,41
uSF2,DE,001,01,0000134,1797,762,41,43,34,22,14,10,12,39,61,66,47,47,53,59,53,11,15,18,15,31,31,23,17,1035,42,36,33,17,9,9,14,38,74,56,46,60,48,66,59,8,39,21,35,87,94,85,59
uSF2,DE,001,01,0000135,4532,2168,190,205,163,72,71,20,36,117,186,204,148,167,130,103,88,30,46,30,43,60,37,21,1,2364,187,173,140,82,60,51,43,140,215,194,165,190,142,124,120,39,41,40,42,60,77,24,15
uSF2,DE,001,01,0000136,3468,1761,305,223,160,45,22,32,44,162,260,230,162,88,17,6,3,0,0,0,0,1,1,0,0,1707,276,205,122,52,44,50,50,161,268,206,144,77,25,11,3,0,5,0,2,3,2,1,0
uSF2,DE,001,01,0000137,3411,1625,141,158,143,70,40,22,21,73,88,128,125,119,102,99,73,32,48,29,34,31,29,15,5,1786,124,135,150,90,41,33,25,64,138,132,143,138,121,107,108,21,55,25,33,51,25,19,8
uSF2,DE,001,01,0000138,2084,937,99,89,53,32,21,13,14,55,90,68,69,65,49,43,29,9,16,16,22,26,21,22,16,1147,96,76,72,31,25,19,23,81,113,69,74,80,67,51,39,18,25,13,28,37,52,25,33
uSF2,DE,001,01,0000139,2875,1336,104,117,108,52,33,23,22,71,103,126,112,113,66,61,46,16,17,17,36,31,30,21,11,1539,116,96,106,63,27,24,24,73,132,123,134,121,103,75,52,23,37,19,40,48,41,41,21
uSF2,DE,001,01,0000140,3749,1832,101,129,156,98,73,30,34,88,85,95,124,150,134,116,92,33,50,42,50,75,44,27,6,1917,89,97,185,112,50,28,13,45,83,98,143,181,139,119,123,39,72,39,60,88,63,27,24
uSF2,DE,001,01,0000141,2299,1085,54,73,81,67,27,8,8,22,51,48,76,95,71,74,67,29,42,40,46,44,30,26,6,1214,53,75,76,57,28,16,7,33,48,49,80,95,96,84,78,46,60,38,40,59,49,29,18
uSF2,DE,001,01,0000142,3789,1840,119,139,156,109,59,19,15,60,108,111,150,179,120,120,89,33,52,35,51,56,27,22,11,1949,90,114,154,95,45,28,20,80,125,123,143,179,145,135,87,46,62,44,54,66,47,36,31
uSF2,DE,001,01,0000143,3343,1655,86,140,173,105,47,20,17,42,63,103,141,149,132,140,91,44,33,27,32,31,26,10,3,1688,105,124,156,95,36,13,24,32,70,85,167,170,151,126,104,32,43,30,25,44,32,8,16
uSF2,DE,001,01,0000144,7633,3698,306,317,310,178,85,40,50,139,265,281,325,317,254,228,163,54,65,43,70,89,65,36,18,3935,306,307,303,173,111,41,57,140,243,296,401,330,289,245,155,49,77,52,76,106,98,44,36
uSF2,DE,001,01,0000145,2612,1259,104,108,118,67,30,11,17,35,56,65,109,114,112,95,68,14,26,16,33,23,17,10,11,1353,90,132,125,84,40,9,8,47,56,92,128,106,123,79,70,19,25,15,18,27,24,22,14
uSF2,DE,001,01,0000146,4837,2405,175,212,224,108,54,20,23,85,135,166,200,213,174,165,123,45,57,31,51,71,32,26,15,2432,197,183,195,93,72,21,23,64,160,189,224,209,171,168,104,50,65,29,53,68,40,32,22
uSF2,DE,001,01,0000147,2995,1474,106,113,143,69,45,15,20,45,68,114,151,126,108,93,71,17,35,25,41,34,23,5,7,1521,108,137,132,83,34,21,14,55,77,105,122,136,98,107,83,24,36,18,33,39,27,21,11
uSF2,DE,001,01,0000148,3216,1574,89,101,118,77,48,25,21,56,78,99,129,151,133,116,79,38,43,35,51,37,24,22,4,1642,91,111,121,91,47,10,15,43,75,85,132,153,147,100,95,46,55,44,38,50,39,33,21
uSF2,DE,001,01,0000149,6079,2927,288,316,283,156,80,28,48,114,188,219,307,213,156,138,128,33,48,32,52,48,23,18,11,3152,280,304,307,162,96,35,44,132,231,271,321,234,146,127,128,50,59,37,56,55,38,15,24
uSF2,DE,001,01,0000150,5977,2953,238,235,280,155,60,24,28,85,178,235,279,291,199,194,127,41,63,30,56,72,48,25,10,3024,213,244,266,140,91,33,27,87,192,229,306,301,196,197,128,42,64,29,59,82,57,25,16
uSF2,DE,001,01,0000151,2602,1294,88,87,109,44,35,15,14,44,79,91,108,113,88,81,67,22,43,33,30,41,36,19,7,1308,72,74,102,42,41,16,10,39,64,109,105,110,81,89,69,27,48,24,44,52,42,30,18
uSF2,DE,001,01,0000152,2855,1280,95,112,117,63,34,20,20,53,87,100,100,92,61,77,45,20,30,17,22,50,38,17,10,1575,120,114,109,51,39,24,23,77,96,103,117,104,92,91,73,22,36,25,31,73,59,46,50
uSF2,DE,001,01,0000153,2108,999,61,79,83,41,23,11,11,26,34,69,73,65,63,62,52,24,51,29,29,43,36,17,17,1109,70,65,97,42,26,13,11,29,44,68,93,73,70,70,62,23,37,29,22,54,62,26,23
uSF2,DE,001,01,0000154,1159,552,36,39,41,20,17,4,6,10,30,51,50,45,49,31,37,8,9,9,11,15,17,11,6,607,41,50,54,25,13,5,10,12,41,32,57,52,42,46,24,12,13,9,13,23,15,9,9
uSF2,DE,001,01,0000155,5485,2684,187,200,258,128,55,24,21,55,185,200,225,245,195,182,139,61,74,47,53,72,45,21,12,2801,161,207,228,139,60,27,17,94,198,225,238,253,210,192,139,44,72,39,64,85,45,42,22
uSF2,DE,001,01,0000156,3434,1684,117,142,129,77,48,17,12,40,109,112,145,127,138,117,109,30,33,20,27,67,35,23,10,1750,121,139,132,76,38,19,14,37,119,147,149,158,120,123,84,26,44,19,43,60,39,28,15
uSF2,DE,001,01,0000157,4490,2086,167,186,171,103,62,31,20,79,129,137,146,173,132,122,95,29,59,37,46,65,52,27,18,2404,203,178,202,111,55,20,31,78,145,159,189,183,166,129,90,39,54,45,61,91,88,61,26
uSF2,DE,001,01,0000158,2428,1205,89,82,106,63,29,10,12,24,70,90,108,94,79,84,79,20,32,26,25,36,32,10,5,1223,91,95,101,41,17,15,14,40,73,96,108,98,73,87,76,17,30,26,25,32,37,20,11
uSF2,DE,001,01,0000159,482751,233684,17047,18531,17978,10421,5646,3144,3097,9161,16695,18432,20049,19500,16770,14765,11146,3651,4744,3007,4328,6363,4855,2800,1554,249067,16257,17547,16857,9646,5484,3145,3595,9555,17170,19571,21324,20744,18365,16060,12306,3927,5415,3479,5156,8074,7161,4650,3579
uSF2,DE,001,01,0000160,77650,37145,2382,2630,2661,1586,658,306,284,1028,2112,2564,3055,3105,2868,2651,2079,683,963,599,901,1587,1293,745,405,40505,2300,2503,2474,1471,674,290,303,1094,2335,2841,3124,3333,3237,2843,2364,787,1071,762,1056,1888,1751,1067,937
uSF2,DE,001,01,0000161,474,232,11,11,17,10,3,1,1,4,5,13,11,21,31,28,13,3,6,3,8,14,8,8,2,242,4,16,10,7,2,1,1,2,9,16,12,27,27,26,18,11,7,6,6,4,13,5,12
uSF2,DE,001,01,0000162,474,232,11,11,17,10,3,1,1,4,5,13,11,21,31,28,13,3,6,3,8,14,8,8,2,242,4,16,10,7,2,1,1,2,9,16,12,27,27,26,18,11,7,6,6,4,13,5,12
uSF2,DE,001,01,0000163,267,128,5,7,7,3,2,1,1,3,7,12,4,10,11,15,12,4,4,3,6,4,3,3,1,139,7,11,7,4,3,0,1,3,12,8,7,11,17,10,16,7,0,2,1,6,4,1,1
uSF2,DE,001,01,0000164,267,128,5,7,7,3,2,1,1,3,7,12,4,10,11,15,12,4,4,3,6,4,3,3,1,139,7,11,7,4,3,0,1,3,12,8,7,11,17,10,16,7,0,2,1,6,4,1,1
uSF2,DE,001,01,0000165,283,132,4,4,11,7,3,0,0,1,7,7,13,9,9,16,9,6,4,3,8,5,4,1,1,151,4,6,6,3,1,1,0,1,10,11,9,10,23,14,17,1,4,1,5,7,8,4,5
uSF2,DE,001,01,0000166,277,129,4,4,11,7,3,0,0,1,7,6,13,9,8,16,9,6,3,3,8,5,4,1,1,148,3,6,6,3,1,1,0,1,10,11,9,9,23,14,16,1,4,1,5,7,8,4,5
uSF2,DE,001,01,0000167,1249,604,33,47,46,25,10,7,2,12,47,50,65,54,50,32,28,5,13,9,11,17,23,11,7,645,44,37,41,20,7,6,4,15,48,46,65,62,62,33,22,2,16,7,14,25,30,20,19
uSF2,DE,001,01,0000168,1249,604,33,47,46,25,10,7,2,12,47,50,65,54,50,32,28,5,13,9,11,17,23,11,7,645,44,37,41,20,7,6,4,15,48,46,65,62,62,33,22,2,16,7,14,25,30,20,19
uSF2,DE,001,01,0000169,9185,4342,327,343,344,192,103,47,69,155,318,356,412,412,276,237,172,58,94,54,72,133,94,44,30,4843,337,338,353,191,113,60,58,177,348,425,423,435,289,275,193,57,93,70,100,159,158,96,95
uSF2,DE,001,01,0000170,871,441,34,45,42,22,14,5,9,16,27,36,43,33,41,19,16,3,9,6,3,4,8,3,3,430,38,37,46,20,9,7,3,13,34,45,39,42,27,17,10,7,5,7,7,5,7,4,1
uSF2,DE,001,01,0000171,2568,1187,83,73,88,46,26,9,19,42,110,120,118,122,88,60,48,7,25,10,16,32,22,10,13,1381,74,87,83,49,25,12,16,65,142,124,123,108,94,89,53,13,14,18,31,38,40,29,54
uSF2,DE,001,01,0000172,4094,1914,174,165,155,84,42,28,31,79,147,143,168,173,91,100,74,30,37,24,30,64,45,21,9,2180,174,162,167,85,65,37,34,82,128,196,186,203,114,108,77,25,44,23,46,81,74,40,29
uSF2,DE,001,01,0000173,1652,800,36,60,59,40,21,5,10,18,34,57,83,84,56,58,34,18,23,14,23,33,19,10,5,852,51,52,57,37,14,4,5,17,44,60,75,82,54,61,53,12,30,22,16,35,37,23,11
uSF2,DE,001,01,0000174,5977,2752,243,241,236,131,47,28,19,75,187,225,246,237,199,170,112,36,52,25,41,72,68,38,24,3225,233,249,241,114,69,33,40,102,251,267,265,268,264,188,150,53,56,47,51,91,86,62,45
uSF2,DE,001,01,0000175,724,351,24,22,42,12,2,4,2,5,17,21,40,29,35,23,19,4,5,3,6,16,8,7,5,373,30,25,24,7,4,1,2,6,13,29,49,27,34,18,19,6,6,6,6,22,14,11,14
uSF2,DE,001,01,0000176,5253,2401,219,219,194,119,45,24,17,70,170,204,206,208,164,147,93,32,47,22,35,56,60,31,19,2852,203,224,217,107,65,32,38,96,238,238,216,241,230,170,131,47,50,41,45,69,72,51,31
uSF2,DE,001,01,0000177,60215,28955,1759,1977,2000,1218,490,222,192,778,1541,1901,2304,2362,2292,2153,1733,571,790,502,755,1342,1093,640,340,31260,1671,1846,1816,1132,479,189,199,794,1657,2068,2343,2520,2555,2297,1948,656,895,629,879,1596,1452,879,760
uSF2,DE,001,01,0000178,3521,1562,149,149,110,67,36,20,26,53,148,142,124,111,81,73,51,15,35,27,19,33,47,27,19,1959,137,135,111,65,49,23,23,74,210,160,139,109,106,92,83,21,34,26,41,77,90,68,86
uSF2,DE,001,01,0000179,478,236,8,16,11,14,3,2,1,7,14,21,19,22,20,20,6,2,8,5,7,12,11,5,2,242,16,13,11,5,2,2,1,4,14,12,20,19,22,16,10,7,5,5,14,19,10,9,6
uSF2,DE,001,01,0000180,2055,1005,60,75,75,50,18,10,5,26,36,80,89,87,80,55,52,22,26,12,26,67,36,17,1,1050,54,71,72,47,32,8,6,33,38,94,79,93,71,48,58,25,38,17,28,59,49,21,9
uSF2,DE,001,01,0000181,2997,1478,90,89,99,67,28,13,6,61,164,137,145,133,107,77,70,23,30,18,25,40,28,22,6,1519,84,94,99,48,24,13,9,75,137,157,122,140,99,88,72,24,32,23,22,45,45,42,25
uSF2,DE,001,01,0000182,3666,1770,119,102,116,58,23,17,15,82,159,158,168,139,142,124,77,21,40,30,29,51,50,31,19,1896,115,112,66,48,22,12,20,91,176,157,156,146,166,132,101,28,51,34,39,79,78,32,35
uSF2,DE,001,01,0000183,4324,2039,110,152,124,64,26,14,8,48,90,114,161,193,164,183,158,40,54,37,50,89,81,54,25,2285,121,127,129,76,26,12,14,45,98,128,164,191,202,195,152,42,69,51,71,101,120,92,59
uSF2,DE,001,01,0000184,2685,1275,77,93,62,38,21,7,9,25,32,68,102,114,123,107,72,26,21,17,35,73,80,43,30,1410,87,73,75,51,24,6,6,17,38,78,127,117,131,105,64,29,37,23,58,93,78,55,38
uSF2,DE,001,01,0000185,3192,1508,79,101,99,70,24,11,10,27,54,86,118,119,126,118,95,26,37,38,51,79,76,38,26,1684,80,101,112,69,29,10,13,33,51,104,123,118,155,132,98,38,53,30,37,104,96,46,52
uSF2,DE,001,01,0000186,1686,818,54,48,60,31,14,4,4,10,24,59,57,67,68,67,48,15,15,24,24,52,40,22,11,868,49,44,49,28,9,2,4,6,29,64,66,81,78,59,51,19,33,19,19,66,50,23,20
uSF2,DE,001,01,0000187,2098,1046,64,88,70,44,28,6,13,41,76,60,84,74,90,87,63,17,21,5,19,50,35,6,5,1052,58,63,64,46,18,6,11,37,75,60,84,81,90,89,59,21,25,18,27,53,36,14,17
uSF2,DE,001,01,0000188,3508,1709,94,119,128,83,36,12,17,48,62,103,114,149,146,153,135,44,53,29,45,71,36,24,8,1799,99,108,102,66,28,9,12,36,77,106,133,166,178,161,143,40,59,41,51,65,70,31,18
uSF2,DE,001,01,0000189,4652,2273,157,148,139,72,39,14,14,117,221,209,207,189,146,135,128,54,67,30,49,74,33,20,11,2379,138,127,133,71,39,16,22,144,233,201,218,166,160,163,162,55,71,33,52,69,58,27,21
uSF2,DE,001,01,0000190,3400,1687,91,107,117,65,26,20,10,46,89,97,131,129,135,135,110,45,70,36,48,68,64,35,13,1713,63,91,110,67,23,12,8,36,73,102,136,143,151,122,144,45,58,48,54,99,73,33,22
uSF2,DE,001,01,0000191,2108,1055,65,81,107,53,20,10,4,24,36,61,74,89,77,86,67,25,30,15,27,61,29,13,1,1053,62,70,66,48,16,5,11,14,40,67,84,95,96,85,75,24,32,25,40,37,38,11,12
uSF2,DE,001,01,0000192,4191,2004,116,121,155,106,29,12,8,38,56,87,147,152,166,155,156,43,68,39,78,112,98,37,25,2187,102,147,136,114,30,14,6,33,61,107,132,175,192,182,164,59,67,64,71,114,111,54,52
uSF2,DE,001,01,0000193,2276,1039,58,69,81,43,20,12,10,16,27,58,96,92,92,75,61,10,25,14,28,45,39,41,27,1237,60,95,72,48,19,5,3,23,32,68,93,122,93,76,68,23,37,19,30,74,52,55,70
uSF2,DE,001,01,0000194,3404,1643,86,105,117,91,27,8,9,25,35,69,101,141,150,131,88,39,51,40,45,100,90,59,36,1761,89,89,127,53,20,8,8,16,47,77,115,149,150,133,108,34,61,34,56,122,104,70,91
uSF2,DE,001,01,0000195,2905,1410,71,102,95,60,21,7,9,25,98,110,112,115,110,95,79,23,33,16,40,77,62,35,15,1495,83,83,89,41,22,9,9,27,91,118,115,127,114,90,87,31,28,37,41,89,82,47,35
uSF2,DE,001,01,0000196,3199,1507,122,83,109,54,20,11,5,36,82,130,126,116,109,113,71,34,34,20,36,65,58,43,30,1692,97,99,80,69,19,12,9,27,101,146,128,121,133,119,99,30,33,31,42,87,94,65,51
uSF2,DE,001,01,0000197,3870,1891,89,129,126,88,31,12,9,23,38,52,129,131,160,164,146,47,72,50,74,123,100,68,30,1979,77,104,113,72,28,5,4,23,36,62,109,161,168,210,150,61,72,51,86,144,118,84,41
uSF2,DE,001,01,0000198,32047,15917,1495,1458,1320,749,325,181,138,557,1341,1597,1611,1478,1139,959,624,137,196,110,158,185,89,43,27,16130,1374,1405,1192,633,358,184,186,658,1386,1686,1693,1550,1229,974,538,131,216,91,146,223,125,85,67
uSF2,DE,001,01,0000199,3867,1843,169,169,132,84,41,29,21,87,192,201,196,158,109,100,62,12,22,12,10,22,9,4,2,2024,179,165,149,72,47,40,29,99,167,204,210,195,139,134,58,32,18,7,19,38,13,6,4
uSF2,DE,001,01,0000200,3827,1827,168,169,132,83,40,29,21,87,192,201,196,156,107,96,60,11,21,12,9,22,9,4,2,2000,176,162,149,70,47,40,29,99,166,204,204,195,139,131,56,31,17,7,19,38,12,5,4
uSF2,DE,001,01,0000201,12827,6354,565,557,535,318,137,67,59,225,562,644,610,542,479,415,268,53,75,44,67,67,31,23,11,6473,518,537,466,264,154,64,77,310,612,671,636,581,527,414,224,42,87,35,60,75,48,37,34
uSF2,DE,001,01,0000202,3459,1753,170,150,117,85,35,13,15,47,161,196,163,146,126,113,90,16,28,17,22,21,10,11,1,1706,137,127,114,64,27,16,12,56,179,195,173,146,129,119,79,15,30,10,12,23,14,14,15
uSF2,DE,001,01,0000203,7395,3590,301,295,326,200,80,45,34,160,321,337,334,311,284,246,138,28,35,19,31,37,16,8,4,3805,306,309,277,153,113,38,60,224,353,355,342,366,319,253,124,21,45,16,36,43,23,14,15
uSF2,DE,001,01,0000204,1506,775,83,95,69,15,12,5,10,16,70,100,96,64,34,42,22,2,8,5,10,5,4,3,5,731,69,85,53,31,9,5,3,21,75,107,100,40,43,28,11,4,6,6,10,6,7,8,4
uSF2,DE,001,01,0000205,467,236,11,17,23,18,10,4,0,2,10,11,17,21,35,14,18,7,4,3,4,4,1,1,1,231,6,16,22,16,5,5,2,9,5,14,21,29,36,14,10,2,6,3,2,3,4,1,0
uSF2,DE,001,01,0000206,15341,7714,761,732,651,347,147,85,58,245,587,751,805,778,551,443,293,72,98,54,81,96,49,16,14,7627,677,703,577,297,157,80,79,249,607,811,846,774,563,426,255,57,110,48,67,110,64,42,28
uSF2,DE,001,01,0000207,3308,1637,202,187,140,60,19,9,6,30,121,215,196,160,105,82,48,16,14,11,6,4,2,3,1,1671,183,204,131,63,18,9,16,33,129,235,216,158,103,70,40,4,18,5,10,6,11,5,4
uSF2,DE,001,01,0000208,4989,2527,198,234,262,136,47,29,18,37,105,178,256,299,222,175,120,22,49,23,38,43,23,8,5,2462,180,216,211,107,56,17,15,45,133,210,288,286,216,159,102,24,40,19,35,49,23,16,15
uSF2,DE,001,01,0000209,5003,2517,266,222,172,101,52,29,20,144,268,252,263,216,154,131,85,22,22,18,18,34,17,4,7,2486,242,197,167,93,62,43,40,134,236,282,253,212,168,130,73,16,29,18,15,34,22,16,4
uSF2,DE,001,01,0000210,2041,1033,95,89,77,50,29,18,14,34,93,106,90,103,70,55,40,12,13,2,19,15,7,1,1,1008,72,86,68,34,21,11,8,37,109,84,89,118,76,67,40,13,23,6,7,21,8,5,5
uSF2,DE,001,01,0000211,59442,29384,1892,1993,1938,1105,771,843,1052,2129,2529,2207,2234,2275,1885,1792,1346,425,547,356,506,673,515,249,122,30058,1799,1855,1758,1073,763,938,1330,1889,2199,2087,2317,2185,2031,1942,1429,406,616,414,598,893,720,471,345
uSF2,DE,001,01,0000212,14673,7226,540,596,581,336,207,102,100,314,603,576,661,620,459,446,305,95,124,65,126,164,135,48,23,7447,540,539,495,310,176,102,94,321,595,564,657,636,512,524,335,84,144,102,147,224,188,105,53
uSF2,DE,001,01,0000213,4881,2360,193,234,215,119,69,36,29,72,182,160,214,198,136,133,97,30,46,33,43,53,47,16,5,2521,194,202,175,91,60,43,41,115,200,180,224,204,157,170,116,23,53,33,61,72,64,24,19
uSF2,DE,001,01,0000214,4151,2124,140,153,146,92,66,30,39,108,206,154,190,192,155,112,79,23,42,17,42,54,51,22,11,2027,133,143,119,91,45,29,27,93,140,158,137,181,143,142,89,33,42,35,38,95,66,37,11
uSF2,DE,001,01,0000215,5641,2742,207,209,220,125,72,36,32,134,215,262,257,230,168,201,129,42,36,15,41,57,37,10,7,2899,213,194,201,128,71,30,26,113,255,226,296,251,212,212,130,28,49,34,48,57,58,44,23
uSF2,DE,001,01,0000216,21808,10616,441,533,552,324,292,548,769,1281,938,724,587,639,637,599,459,156,199,122,178,248,222,115,53,11192,416,470,518,308,332,689,1069,1023,773,651,620,616,672,643,508,143,224,156,231,370,321,251,188
uSF2,DE,001,01,0000217,1989,980,71,70,52,37,25,20,29,95,89,83,82,76,81,75,46,11,5,9,7,4,9,3,1,1009,61,65,63,39,32,31,37,99,86,96,72,68,94,66,45,7,12,8,6,7,8,4,3
uSF2,DE,001,01,0000218,602,310,21,21,14,12,7,3,9,12,20,29,21,27,28,24,9,6,8,11,3,9,9,6,1,292,17,12,19,7,8,2,1,8,19,26,26,25,29,20,11,5,4,5,9,14,12,9,4
uSF2,DE,001,01,0000219,2879,1432,47,103,115,79,44,38,40,60,35,74,80,107,130,151,97,26,43,20,24,46,47,20,6,1447,42,86,104,77,22,26,43,53,37,69,98,117,143,131,90,30,29,24,42,68,45,40,31
uSF2,DE,001,01,0000220,3228,1621,58,38,67,38,44,70,142,252,185,101,83,85,75,92,75,24,39,16,31,36,39,21,10,1607,46,59,57,35,45,59,150,227,169,75,72,65,79,99,92,20,37,30,32,48,57,25,29
uSF2,DE,001,01,0000221,3440,1753,66,65,90,41,53,86,126,266,201,118,90,83,89,68,60,26,23,18,37,56,50,33,8,1687,67,77,83,38,54,90,142,157,127,104,94,86,85,83,78,23,32,31,43,60,62,53,18
uSF2,DE,001,01,0000222,3286,1608,100,127,112,61,35,22,12,84,164,148,117,152,117,96,85,32,34,21,29,35,17,7,1,1678,94,104,103,58,32,15,18,85,155,138,139,151,132,131,97,34,42,24,38,40,28,10,10
uSF2,DE,001,01,0000223,1876,765,11,23,14,8,22,94,149,191,82,38,20,17,22,9,12,4,4,6,7,12,9,4,7,1111,15,10,22,12,38,155,300,185,63,28,24,15,17,16,2,2,15,2,14,45,44,47,40
uSF2,DE,001,01,0000224,2539,1224,21,30,20,14,51,206,254,296,85,54,31,24,34,27,17,1,17,4,7,9,15,6,1,1315,17,13,19,9,80,306,368,179,46,43,27,21,25,31,22,2,14,5,13,26,20,12,17
uSF2,DE,001,01,0000225,509,261,14,21,18,9,2,1,3,5,20,34,22,20,16,14,22,7,5,3,3,11,6,5,0,248,14,10,17,6,4,2,2,8,20,23,19,14,20,19,21,6,13,2,5,12,7,3,1
uSF2,DE,001,01,0000226,434,177,10,14,18,10,5,3,1,7,15,12,9,8,13,10,6,4,1,0,4,2,5,7,13,257,13,8,19,11,5,2,5,6,12,8,19,14,9,12,8,2,4,5,8,14,18,29,26
uSF2,DE,001,01,0000227,1026,485,22,21,32,15,4,5,4,13,42,33,32,40,32,33,30,15,20,14,26,28,16,3,5,541,30,26,12,16,12,1,3,16,39,41,30,40,39,35,42,12,22,20,21,36,20,19,9
uSF2,DE,001,01,0000228,5883,2954,198,223,205,112,47,33,27,145,281,270,273,280,207,184,170,50,58,44,45,58,26,12,6,2929,172,193,181,98,42,35,35,168,273,254,290,247,241,217,161,57,64,31,47,57,34,20,12
uSF2,DE,001,01,0000229,5883,2954,198,223,205,112,47,33,27,145,281,270,273,280,207,184,170,50,58,44,45,58,26,12,6,2929,172,193,181,98,42,35,35,168,273,254,290,247,241,217,161,57,64,31,47,57,34,20,12
uSF2,DE,001,01,0000230,17078,8588,713,641,600,333,225,160,156,389,707,637,713,736,582,563,412,124,166,125,157,203,132,74,40,8490,671,653,564,357,213,112,132,377,558,618,750,686,606,558,425,122,184,125,173,242,177,95,92
uSF2,DE,001,01,0000231,3267,1589,139,156,145,72,30,6,7,22,40,108,176,152,144,129,82,20,23,23,20,35,23,17,20,1678,129,138,137,60,33,9,15,35,57,133,185,161,151,110,66,21,35,20,31,33,34,39,46
uSF2,DE,001,01,0000232,4650,2452,234,140,138,88,80,68,65,163,345,225,168,166,124,132,75,31,41,31,38,45,32,13,10,2198,225,178,123,107,61,29,35,164,227,162,146,139,138,113,93,30,43,34,35,59,34,11,12
uSF2,DE,001,01,0000233,1079,534,37,37,32,17,15,7,8,16,37,52,41,50,39,27,31,6,13,13,19,20,8,6,3,545,40,32,25,25,13,3,5,12,31,41,43,49,47,40,23,14,17,11,15,28,13,7,11
uSF2,DE,001,01,0000234,1182,610,26,38,44,21,15,7,0,16,13,12,27,51,59,73,61,27,17,17,18,33,28,4,3,572,23,27,38,24,8,4,6,11,5,14,41,41,55,76,60,14,21,15,21,39,16,5,8
uSF2,DE,001,01,0000235,302,176,2,5,2,0,11,29,31,41,31,8,8,2,2,2,0,0,1,0,1,0,0,0,0,126,3,2,2,2,19,18,24,27,13,7,3,0,2,2,1,0,0,1,0,0,0,0,0
uSF2,DE,001,01,0000236,264,130,4,7,5,5,2,0,0,1,9,11,10,15,9,6,12,1,6,3,6,4,6,8,0,134,7,5,10,2,2,3,0,6,3,7,9,14,7,11,12,3,5,2,4,5,8,5,4
uSF2,DE,001,01,0000237,1388,668,58,49,66,27,13,2,8,28,41,40,51,58,41,40,32,12,24,16,19,26,12,5,0,720,40,58,55,36,12,6,15,12,47,51,52,68,36,39,72,8,23,14,26,23,18,4,5
uSF2,DE,001,01,0000238,2512,1220,124,133,115,71,32,18,18,54,76,98,128,128,77,59,38,6,8,6,12,7,6,5,1,1292,139,125,117,62,35,30,17,50,83,110,151,125,83,62,29,8,8,9,12,14,11,9,3
uSF2,DE,001,01,0000239,2434,1209,89,76,53,32,27,23,19,48,115,83,104,114,87,95,81,21,33,16,24,33,17,16,3,1225,65,88,57,39,30,10,15,60,92,93,120,89,87,105,69,24,32,19,29,41,43,15,3
uSF2,DE,001,01,0000240,35974,17451,1215,1327,1249,748,449,238,191,635,1200,1355,1518,1438,1204,936,726,262,401,264,430,681,544,289,151,18523,1153,1206,1148,670,450,188,195,653,1155,1322,1507,1549,1225,1065,846,321,477,322,548,854,816,505,348
uSF2,DE,001,01,0000241,5791,2838,211,231,184,134,76,35,33,128,208,212,246,251,165,154,122,38,53,37,79,90,82,49,20,2953,211,194,184,104,70,45,52,112,182,221,225,257,174,168,137,51,76,43,92,116,122,71,46
uSF2,DE,001,01,0000242,2232,1073,76,83,67,47,25,14,12,46,83,75,81,100,65,66,55,11,20,10,31,33,34,28,11,1159,84,74,70,41,24,23,15,44,71,68,82,104,85,57,63,15,32,14,31,47,56,38,21
uSF2,DE,001,01,0000243,3559,1765,135,148,117,87,51,21,21,82,125,137,165,151,100,88,67,27,33,27,48,57,48,21,9,1794,127,120,114,63,46,22,37,68,111,153,143,153,89,111,74,36,44,29,61,69,66,33,25
uSF2,DE,001,01,0000244,1122,565,49,37,46,26,22,14,9,22,44,49,53,51,47,37,13,6,5,6,12,7,4,6,0,557,50,31,36,17,23,8,6,25,48,58,61,46,37,27,16,2,6,10,6,11,14,11,8
uSF2,DE,001,01,0000245,697,348,32,19,24,16,15,8,5,16,34,32,37,24,27,22,7,3,4,6,7,4,4,2,0,349,36,14,20,11,15,8,6,18,40,34,31,29,20,14,8,2,4,7,5,6,7,9,5
uSF2,DE,001,01,0000246,425,217,17,18,22,10,7,6,4,6,10,17,16,27,20,15,6,3,1,0,5,3,0,4,0,208,14,17,16,6,8,0,0,7,8,24,30,17,17,13,8,0,2,3,1,5,7,2,3
uSF2,DE,001,01,0000247,29061,14048,955,1059,1019,588,351,189,149,485,948,1094,1219,1136,992,745,591,218,343,221,339,584,458,234,131,15013,892,981,928,549,357,135,137,516,925,1043,1221,1246,1014,870,693,268,395,269,450,727,680,423,294
uSF2,DE,001,01,0000248,4119,2074,127,132,145,89,50,29,19,53,121,144,177,180,147,107,91,44,78,42,68,105,79,34,13,2045,104,120,121,58,48,14,18,63,106,114,193,148,149,145,117,47,92,62,67,96,90,37,36
uSF2,DE,001,01,0000249,2938,1481,103,106,106,59,33,15,13,59,114,96,126,106,107,81,69,27,39,21,42,77,42,23,17,1457,88,81,83,56,35,12,8,53,88,96,126,113,109,84,73,33,38,20,59,79,71,29,23
uSF2,DE,001,01,0000250,4662,2271,148,178,203,103,57,31,36,80,168,198,201,194,157,122,99,27,37,30,40,58,69,19,16,2391,158,158,181,98,62,26,26,88,160,176,213,210,176,135,110,39,47,37,45,73,81,55,37
uSF2,DE,001,01,0000251,1072,526,24,41,36,28,18,9,4,18,40,43,54,39,48,30,22,5,13,3,13,13,9,10,6,546,40,31,20,18,13,7,3,21,29,48,42,66,38,35,21,7,14,5,12,23,26,17,10
uSF2,DE,001,01,0000252,5112,2441,166,172,174,92,51,31,27,89,171,207,236,215,198,139,77,27,38,33,52,110,74,37,25,2671,150,184,173,85,74,31,28,91,182,212,205,238,174,136,100,44,53,39,70,123,129,86,64
uSF2,DE,001,01,0000253,2754,1323,88,99,104,55,32,7,7,27,68,109,110,119,95,72,70,14,28,10,26,48,72,39,24,1431,73,101,89,63,28,8,13,25,66,100,117,128,104,70,65,19,27,19,46,75,88,66,41
uSF2,DE,001,01,0000254,4357,2041,111,152,119,80,48,29,17,72,102,159,169,156,126,112,89,48,67,54,64,122,78,46,21,2316,110,142,120,76,50,16,17,51,117,145,159,189,139,152,142,51,79,55,101,161,129,70,45
uSF2,DE,001,01,0000255,4047,1891,188,179,132,82,62,38,26,87,164,138,146,127,114,82,74,26,43,28,34,51,35,26,9,2156,169,164,141,95,47,21,24,124,177,152,166,154,125,113,65,28,45,32,50,97,66,63,38
uSF2,DE,001,01,0000256,28002,14041,1129,1292,1259,684,337,144,128,357,639,1090,1449,1385,1105,924,680,263,266,151,188,258,176,78,59,13961,996,1252,1174,577,272,125,123,357,783,1155,1537,1304,1072,902,687,223,250,148,198,310,236,154,126
uSF2,DE,001,01,0000257,6152,2922,296,272,246,143,77,39,42,129,217,280,245,240,175,151,102,38,51,22,24,58,50,12,13,3230,274,288,254,121,74,45,40,138,272,271,289,249,215,174,116,56,49,39,44,81,63,36,42
uSF2,DE,001,01,0000258,1591,773,69,65,52,34,25,11,13,42,71,79,64,56,51,31,24,6,14,6,10,21,20,3,6,818,65,65,68,18,18,12,9,50,59,74,69,52,55,35,28,14,9,11,18,34,19,10,26
uSF2,DE,001,01,0000259,4469,2100,223,206,189,109,50,27,28,86,141,197,176,181,123,117,76,30,34,14,13,35,30,8,7,2369,205,222,186,101,56,33,31,84,210,192,217,194,158,136,84,40,39,24,26,46,44,25,16
uSF2,DE,001,01,0000260,286,140,10,6,9,6,3,2,1,4,7,11,13,7,9,10,15,3,2,4,2,1,7,3,5,146,9,9,7,1,3,1,1,2,8,14,7,10,13,16,10,0,6,2,2,13,6,5,1
uSF2,DE,001,01,0000261,286,140,10,6,9,6,3,2,1,4,7,11,13,7,9,10,15,3,2,4,2,1,7,3,5,146,9,9,7,1,3,1,1,2,8,14,7,10,13,16,10,0,6,2,2,13,6,5,1
uSF2,DE,001,01,0000262,346,166,6,15,18,8,3,1,4,4,7,11,19,19,13,10,5,2,3,2,7,3,2,3,1,180,8,12,17,9,5,0,2,8,6,16,21,12,22,5,8,0,3,3,4,5,5,5,4
uSF2,DE,001,01,0000263,346,166,6,15,18,8,3,1,4,4,7,11,19,19,13,10,5,2,3,2,7,3,2,3,1,180,8,12,17,9,5,0,2,8,6,16,21,12,22,5,8,0,3,3,4,5,5,5,4
uSF2,DE,001,01,0000264,21218,10813,817,999,986,527,254,102,81,220,408,788,1172,1119,908,753,558,220,210,123,155,196,117,60,40,10405,705,943,896,446,190,79,80,209,497,854,1220,1033,822,707,553,167,192,104,148,211,162,108,79
uSF2,DE,001,01,0000265,4116,2091,199,240,199,90,40,20,13,29,78,168,285,227,148,133,88,30,36,11,20,15,12,5,5,2025,169,210,182,82,37,10,14,33,114,206,276,194,148,109,100,21,24,14,19,23,21,10,9
uSF2,DE,001,01,0000266,4435,2242,187,220,216,100,62,25,15,45,74,164,262,251,210,146,95,37,38,11,27,31,19,4,3,2193,170,249,169,111,42,22,21,45,85,177,277,230,178,145,85,24,33,23,30,35,16,15,11
uSF2,DE,001,01,0000267,3849,1987,156,192,197,117,51,13,19,41,51,126,198,219,182,166,84,37,29,22,18,34,21,8,6,1862,111,168,181,93,38,13,9,39,64,151,223,205,163,120,92,31,26,15,21,37,38,14,10
uSF2,DE,001,01,0000268,231,119,12,9,3,4,1,1,2,3,9,8,7,6,7,7,8,0,2,4,2,8,6,6,4,112,8,4,7,1,0,4,0,1,8,7,6,10,6,8,6,4,4,2,1,12,3,6,4
uSF2,DE,001,01,0000269,2552,1297,73,108,126,70,31,10,8,21,50,91,125,126,116,90,70,37,25,24,26,32,18,13,7,1255,61,99,121,52,19,11,14,23,57,86,126,122,102,91,72,24,35,15,26,35,26,21,17
uSF2,DE,001,01,0000270,2480,1222,77,100,98,51,21,13,5,32,70,113,127,107,102,78,85,27,33,21,16,22,12,11,1,1258,96,101,107,48,23,5,13,36,87,117,140,97,83,94,75,32,21,10,21,19,9,11,13
uSF2,DE,001,01,0000271,2202,1147,65,82,97,63,32,11,9,30,49,67,92,127,82,81,80,35,27,14,29,41,19,9,6,1055,58,67,80,32,18,8,5,16,54,67,100,121,91,88,72,21,29,15,19,36,34,18,6
uSF2,DE,001,01,0000272,1353,708,48,48,50,32,16,9,10,19,27,51,76,56,61,52,48,17,20,16,17,13,10,4,8,645,32,45,49,27,13,6,4,16,28,43,72,54,51,52,51,10,20,10,11,14,15,13,9
uSF2,DE,001,01,0000273,80879,39162,3008,3439,3241,1812,1050,500,451,1583,3148,3477,3558,3131,2568,2223,1682,579,700,453,599,813,599,387,161,41717,3037,3227,3022,1696,954,498,505,1705,3305,3710,3802,3369,3034,2499,1904,605,826,481,709,1087,914,525,303
uSF2,DE,001,01,0000274,13717,6734,645,779,657,337,195,79,69,215,476,658,671,544,417,344,242,63,74,49,68,79,46,20,7,6983,655,663,619,327,167,88,73,212,522,757,718,586,510,370,243,72,92,34,68,90,62,34,21
uSF2,DE,001,01,0000275,6834,3365,355,430,373,185,89,36,33,134,286,345,324,246,166,132,91,27,28,14,26,24,14,5,2,3469,344,365,320,188,90,54,43,114,286,404,349,279,230,152,96,30,34,9,22,26,20,6,8
uSF2,DE,001,01,0000276,4051,1963,158,194,166,84,54,26,28,54,109,142,184,192,159,121,86,28,35,30,34,43,24,9,3,2088,139,169,170,89,51,19,20,75,120,177,204,191,172,129,105,36,46,19,37,51,37,22,10
uSF2,DE,001,01,0000277,2832,1406,132,155,118,68,52,17,8,27,81,171,163,106,92,91,65,8,11,5,8,12,8,6,2,1426,172,129,129,50,26,15,10,23,116,176,165,116,108,89,42,6,12,6,9,13,5,6,3
uSF2,DE,001,01,0000278,4862,2280,136,131,163,96,50,27,23,80,165,133,194,187,182,192,133,40,63,41,50,83,55,37,19,2582,137,134,167,96,56,26,24,91,151,161,223,177,215,201,174,74,61,46,74,89,96,64,45
uSF2,DE,001,01,0000279,120,58,2,8,4,2,3,0,0,3,4,2,5,3,1,9,4,0,2,1,0,3,1,0,1,62,2,7,3,2,0,0,0,2,6,3,7,5,4,4,6,0,1,1,1,1,2,1,4
uSF2,DE,001,01,0000280,364,176,23,15,16,11,4,1,1,2,19,12,23,16,12,7,4,1,3,4,1,1,0,0,0,188,18,18,12,9,3,1,0,4,21,17,26,20,11,4,7,3,6,2,1,1,3,0,1
uSF2,DE,001,01,0000281,2137,966,43,56,74,32,20,12,14,33,54,52,80,73,76,86,71,25,29,15,24,37,30,21,9,1171,54,57,82,40,28,10,8,32,60,68,88,79,103,103,93,40,22,25,33,44,47,25,30
uSF2,DE,001,01,0000282,2241,1080,68,52,69,51,23,14,8,42,88,67,86,95,93,90,54,14,29,21,25,42,24,16,9,1161,63,52,70,45,25,15,16,53,64,73,102,73,97,90,68,31,32,18,39,43,44,38,10
uSF2,DE,001,01,0000283,8254,4174,256,286,309,206,123,70,53,190,317,334,332,332,275,241,205,64,83,72,82,123,108,84,29,4080,283,289,266,151,96,48,55,145,262,284,315,317,297,236,216,57,117,64,103,175,169,93,42
uSF2,DE,001,01,0000284,3498,1691,94,117,129,78,37,21,17,51,90,114,126,124,109,111,107,32,44,43,45,80,61,51,10,1807,98,122,107,59,33,23,17,59,89,118,123,129,143,127,114,37,57,34,55,101,86,48,28
uSF2,DE,001,01,0000285,4756,2483,162,169,180,128,86,49,36,139,227,220,206,208,166,130,98,32,39,29,37,43,47,33,19,2273,185,167,159,92,63,25,38,86,173,166,192,188,154,109,102,20,60,30,48,74,83,45,14
uSF2,DE,001,01,0000286,54046,25974,1971,2243,2112,1173,682,324,306,1098,2190,2352,2361,2068,1694,1446,1102,412,480,291,399,528,390,246,106,28072,1962,2141,1970,1122,635,336,353,1257,2370,2508,2546,2289,2012,1692,1271,402,556,337,464,733,587,334,195
uSF2,DE,001,01,0000287,9144,4337,446,433,345,167,96,51,51,228,483,518,455,334,242,216,102,31,38,8,22,31,24,11,5,4807,401,399,321,166,90,71,76,285,571,556,491,393,357,227,127,34,58,23,33,50,38,32,8
uSF2,DE,001,01,0000288,371,194,8,19,12,12,8,7,5,9,10,7,18,15,22,22,8,1,3,0,1,1,3,1,2,177,9,17,21,7,8,3,3,3,3,14,19,21,16,11,11,3,1,1,1,1,3,1,0
uSF2,DE,001,01,0000289,4706,2285,147,169,168,88,59,16,23,98,201,224,243,196,169,140,127,28,33,24,37,40,24,22,9,2421,162,166,155,86,42,20,27,143,205,228,235,204,174,199,119,25,39,29,30,55,42,24,12
uSF2,DE,001,01,0000290,8456,3850,322,346,322,154,83,41,45,172,456,471,362,293,204,161,117,45,55,36,44,59,35,20,7,4606,399,359,310,144,94,50,55,258,521,480,435,354,287,207,172,51,81,62,42,86,79,46,34
uSF2,DE,001,01,0000291,5670,2795,179,215,214,125,78,42,42,134,189,220,249,262,172,162,155,74,60,36,52,61,42,26,6,2875,200,217,193,129,86,33,33,125,203,223,260,222,192,198,179,55,66,31,50,73,69,30,8
uSF2,DE,001,01,0000292,555,261,25,17,23,12,4,7,3,7,14,20,26,25,13,13,7,3,8,7,6,6,4,6,5,294,18,28,20,17,9,0,0,7,13,28,25,24,22,12,12,5,7,5,10,10,7,9,6
uSF2,DE,001,01,0000293,3121,1439,100,136,155,95,53,15,9,45,76,72,104,70,102,60,83,30,33,15,34,58,47,30,17,1682,68,133,148,83,40,21,24,38,93,102,126,133,114,91,83,34,44,29,48,89,72,43,26
uSF2,DE,001,01,0000294,2719,1321,83,133,118,76,36,24,8,46,69,103,105,85,87,75,64,25,36,24,27,41,28,19,9,1398,81,106,113,64,36,20,10,43,95,93,119,105,106,77,77,30,40,16,29,54,41,21,22
uSF2,DE,001,01,0000295,2411,1159,60,94,112,60,31,20,17,40,57,74,81,89,68,81,66,35,35,26,34,33,21,19,6,1252,62,81,96,55,39,18,17,32,55,88,85,98,101,107,83,28,28,27,28,52,42,16,14
uSF2,DE,001,01,0000296,2118,1063,63,97,107,56,31,11,16,45,60,67,98,87,79,45,38,17,22,13,19,26,34,18,14,1055,66,84,74,53,31,17,8,40,55,80,84,104,70,55,45,15,22,17,22,45,42,16,10
uSF2,DE,001,01,0000297,2900,1413,68,118,121,68,37,21,24,48,90,89,106,116,106,79,52,20,29,24,49,74,45,19,10,1487,84,99,97,64,29,10,15,29,87,93,124,132,112,81,63,26,51,29,69,87,56,32,18
uSF2,DE,001,01,0000298,2699,1328,96,96,99,61,55,16,9,52,90,99,100,96,88,91,82,38,43,27,27,22,25,11,5,1371,82,107,92,61,28,14,18,56,78,94,114,95,94,124,107,34,36,18,34,46,19,12,8
uSF2,DE,001,01,0000299,170,83,6,7,7,4,1,0,0,2,6,7,4,12,10,6,5,0,2,1,0,1,1,1,0,87,3,11,4,5,3,0,2,2,3,9,11,12,8,4,4,1,0,1,0,1,1,2,0
uSF2,DE,001,01,0000300,3695,1803,175,166,139,84,37,18,15,55,149,196,197,156,130,112,56,19,24,13,10,23,14,12,3,1892,160,157,144,82,43,20,17,67,183,213,213,174,129,103,61,20,13,15,21,23,12,13,9
uSF2,DE,001,01,0000301,5311,2643,193,197,170,111,73,35,39,117,240,185,213,232,202,183,140,46,59,37,37,52,43,31,8,2668,167,177,182,106,57,39,48,129,205,207,205,218,230,196,128,41,70,34,47,61,64,37,20
uSF2,DE,001,01,0000302,28996,14188,881,1070,1137,749,292,102,79,256,395,648,1047,1337,1328,1325,1054,311,368,231,337,452,332,270,187,14808,917,1069,1110,665,235,83,86,251,402,806,1167,1447,1381,1328,987,299,349,206,324,486,437,392,381
uSF2,DE,001,01,0000303,2329,1059,43,40,47,33,7,4,4,25,62,73,73,80,67,79,80,42,47,34,30,60,49,41,39,1270,57,50,55,34,9,4,4,37,82,85,79,69,85,92,86,46,50,22,41,50,68,67,98
uSF2,DE,001,01,0000304,1308,562,21,15,23,14,4,3,4,18,56,53,50,50,32,40,31,16,10,7,8,21,26,26,34,746,30,27,29,16,5,3,4,34,77,61,47,44,38,38,28,21,15,6,16,19,46,50,92
uSF2,DE,001,01,0000305,1021,497,22,25,24,19,3,1,0,7,6,20,23,30,35,39,49,26,37,27,22,39,23,15,5,524,27,23,26,18,4,1,0,3,5,24,32,25,47,54,58,25,35,16,25,31,22,17,6
uSF2,DE,001,01,0000306,11459,5662,322,440,477,325,134,41,37,102,139,231,403,522,549,541,408,107,128,91,147,189,142,110,77,5797,335,409,452,262,89,29,39,95,129,277,448,583,584,522,368,107,145,78,140,198,191,180,137
uSF2,DE,001,01,0000307,3968,1912,93,119,137,93,37,12,10,21,34,58,91,158,181,170,147,41,49,37,72,106,95,82,69,2056,91,118,132,81,21,6,12,26,33,69,115,182,183,181,132,39,61,39,76,117,138,117,87
uSF2,DE,001,01,0000308,7491,3750,229,321,340,232,97,29,27,81,105,173,312,364,368,371,261,66,79,54,75,83,47,28,8,3741,244,291,320,181,68,23,27,69,96,208,333,401,401,341,236,68,84,39,64,81,53,63,50
uSF2,DE,001,01,0000309,8277,4124,311,364,389,241,94,32,26,78,89,171,337,456,417,426,299,89,88,36,48,66,33,26,8,4153,300,396,373,227,74,26,26,59,84,240,400,494,419,403,278,62,59,39,48,69,37,22,18
uSF2,DE,001,01,0000310,8277,4124,311,364,389,241,94,32,26,78,89,171,337,456,417,426,299,89,88,36,48,66,33,26,8,4153,300,396,373,227,74,26,26,59,84,240,400,494,419,403,278,62,59,39,48,69,37,22,18
uSF2,DE,001,01,0000311,6931,3343,205,226,224,150,57,25,12,51,105,173,234,279,295,279,267,73,105,70,112,137,108,93,63,3588,225,214,230,142,63,24,17,60,107,204,240,301,293,311,255,84,95,67,95,169,141,123,128
uSF2,DE,001,01,0000312,2778,1313,74,79,89,48,15,10,3,17,34,62,85,115,124,113,110,37,47,31,40,53,45,42,40,1465,83,85,93,55,21,8,8,29,39,72,80,123,116,128,102,34,40,19,37,67,62,72,92
uSF2,DE,001,01,0000313,1829,890,57,57,53,38,19,3,1,11,37,43,58,59,85,78,85,20,30,13,32,39,26,30,16,939,62,51,57,35,16,2,2,8,32,58,64,71,87,92,74,31,27,21,26,40,43,21,19
uSF2,DE,001,01,0000314,2324,1140,74,90,82,64,23,12,8,23,34,68,91,105,86,88,72,16,28,26,40,45,37,21,7,1184,80,78,80,52,26,14,7,23,36,74,96,107,90,91,79,19,28,27,32,62,36,30,17
uSF2,DE,001,01,0000315,41721,20130,1332,1380,1377,827,485,202,207,668,1328,1559,1808,1782,1559,1310,1046,361,452,303,489,734,530,267,124,21591,1321,1314,1393,763,452,169,198,651,1319,1645,1849,1928,1660,1447,1227,369,594,365,620,884,770,434,219
uSF2,DE,001,01,0000316,1195,589,74,76,51,23,5,2,0,6,7,44,81,74,49,33,22,10,7,4,4,9,4,3,1,606,60,82,54,26,13,1,2,5,12,63,85,61,57,23,25,7,4,3,7,7,5,3,1
uSF2,DE,001,01,0000317,1195,589,74,76,51,23,5,2,0,6,7,44,81,74,49,33,22,10,7,4,4,9,4,3,1,606,60,82,54,26,13,1,2,5,12,63,85,61,57,23,25,7,4,3,7,7,5,3,1
uSF2,DE,001,01,0000318,13480,6366,441,428,438,249,154,48,51,194,493,575,581,611,539,472,351,106,123,86,118,135,99,47,27,7114,431,389,468,287,136,60,55,202,533,615,651,684,601,541,430,106,173,99,146,170,172,111,54
uSF2,DE,001,01,0000319,1033,496,39,31,21,28,8,5,4,5,18,28,44,37,42,37,26,18,22,17,25,22,11,5,3,537,36,29,36,19,11,5,1,11,18,36,42,45,46,34,41,11,31,15,22,26,12,7,3
uSF2,DE,001,01,0000320,5737,2664,168,144,133,68,52,11,22,115,321,293,273,218,163,182,154,44,51,38,51,67,55,28,13,3073,174,129,128,99,43,18,29,119,319,296,278,240,208,253,179,51,73,57,77,92,96,77,38
uSF2,DE,001,01,0000321,4374,2096,139,167,191,97,68,21,16,40,90,143,157,220,229,170,130,34,39,22,31,38,30,13,11,2278,128,149,216,113,50,26,17,47,95,170,190,259,236,162,156,33,47,18,41,40,57,20,8
uSF2,DE,001,01,0000322,2336,1110,95,86,93,56,26,11,9,34,64,111,107,136,105,83,41,10,11,9,11,8,3,1,0,1226,93,82,88,56,32,11,8,25,101,113,141,140,111,92,54,11,22,9,6,12,7,7,5
uSF2,DE,001,01,0000323,27046,13175,817,876,888,555,326,152,156,468,828,940,1146,1097,971,805,673,245,322,213,367,590,427,217,96,13871,830,843,871,450,303,108,141,444,774,967,1113,1183,1002,883,772,256,417,263,467,707,593,320,164
uSF2,DE,001,01,0000324,1946,951,68,59,53,36,24,14,12,35,63,70,75,78,70,48,58,14,16,9,40,60,29,17,3,995,51,61,77,30,18,9,11,24,55,77,70,91,58,59,57,17,34,19,33,59,49,24,12
uSF2,DE,001,01,0000325,2532,1277,84,93,90,53,33,13,18,53,102,104,101,98,87,71,55,26,19,26,39,52,28,20,12,1255,81,69,71,41,33,11,13,56,98,91,109,112,79,72,64,21,28,23,48,43,53,22,17
uSF2,DE,001,01,0000326,2701,1342,90,105,86,62,46,18,15,42,86,92,124,115,98,85,57,20,24,14,30,52,51,20,10,1359,96,103,102,51,31,11,12,43,76,93,109,116,90,80,62,23,26,20,36,68,55,41,15
uSF2,DE,001,01,0000327,1895,888,45,46,48,33,19,12,12,21,43,54,64,69,71,64,39,19,28,25,26,62,54,26,8,1007,50,50,61,27,27,8,5,15,35,67,64,73,81,71,61,22,36,21,43,77,63,36,14
uSF2,DE,001,01,0000328,2742,1333,70,82,96,70,33,18,16,38,56,64,129,117,103,88,78,25,30,24,38,62,58,24,14,1409,81,82,91,59,38,17,19,42,40,77,115,131,105,81,85,21,32,33,58,93,65,28,16
uSF2,DE,001,01,0000329,3104,1504,89,131,113,68,37,16,14,51,84,106,146,125,132,88,66,24,29,23,38,70,39,11,4,1600,81,123,119,54,41,13,11,53,91,116,132,156,144,97,76,20,44,23,51,69,47,25,14
uSF2,DE,001,01,0000330,1976,994,76,58,71,37,33,16,21,62,64,73,90,97,74,48,35,15,16,6,26,46,20,7,3,982,83,53,62,33,22,9,16,41,67,69,97,78,56,54,45,12,23,24,36,49,31,10,12
uSF2,DE,001,01,0000331,6865,3260,185,182,210,124,67,35,34,121,255,294,288,267,220,201,173,68,91,55,87,109,101,65,28,3605,207,203,185,83,64,19,31,129,247,272,288,291,247,248,209,74,139,71,106,170,176,98,48
uSF2,DE,001,01,0000332,3285,1626,110,120,121,72,34,10,14,45,75,83,129,131,116,112,112,34,69,31,43,77,47,27,14,1659,100,99,103,72,29,11,23,41,65,105,129,135,142,121,113,46,55,29,56,79,54,36,16
uSF2,DE,001,01,0000333,5368,2750,236,237,233,115,66,39,26,90,167,239,271,248,180,182,138,42,56,36,41,48,34,12,14,2618,172,192,212,100,70,18,23,75,174,247,250,235,201,172,134,48,58,28,44,63,43,27,32
uSF2,DE,001,01,0000334,1445,732,49,48,62,31,21,10,5,22,52,49,58,54,61,51,40,17,20,20,19,23,9,4,7,713,26,45,64,35,13,7,8,17,46,42,41,69,64,48,44,22,29,10,17,25,14,12,15
uSF2,DE,001,01,0000335,1445,732,49,48,62,31,21,10,5,22,52,49,58,54,61,51,40,17,20,20,19,23,9,4,7,713,26,45,64,35,13,7,8,17,46,42,41,69,64,48,44,22,29,10,17,25,14,12,15
uSF2,DE,001,01,0000336,3923,2018,187,189,171,84,45,29,21,68,115,190,213,194,119,131,98,25,36,16,22,25,25,8,7,1905,146,147,148,65,57,11,15,58,128,205,209,166,137,124,90,26,29,18,27,38,29,15,17
uSF2,DE,001,01,0000337,3232,1658,151,156,152,68,34,27,18,57,83,148,177,162,102,109,85,19,29,11,19,18,19,8,6,1574,121,123,123,59,53,11,14,53,87,167,169,143,114,105,72,23,23,16,22,30,20,13,13
uSF2,DE,001,01,0000338,691,360,36,33,19,16,11,2,3,11,32,42,36,32,17,22,13,6,7,5,3,7,6,0,1,331,25,24,25,6,4,0,1,5,41,38,40,23,23,19,18,3,6,2,5,8,9,2,4
uSF2,DE,001,01,0000339,24236,11963,913,942,901,503,305,164,147,592,1228,1162,1095,1019,850,714,449,164,206,107,149,161,112,53,27,12273,858,904,786,470,338,190,196,683,1220,1117,1187,1057,844,745,553,159,197,127,147,179,151,98,67
uSF2,DE,001,01,0000340,24236,11963,913,942,901,503,305,164,147,592,1228,1162,1095,1019,850,714,449,164,206,107,149,161,112,53,27,12273,858,904,786,470,338,190,196,683,1220,1117,1187,1057,844,745,553,159,197,127,147,179,151,98,67
uSF2,DE,001,01,0000341,5456,2696,156,184,177,106,63,33,26,128,281,250,246,239,180,173,128,58,62,30,43,58,43,16,16,2760,167,159,174,97,69,44,45,139,234,217,272,229,180,187,170,55,70,34,39,49,57,40,33
uSF2,DE,001,01,0000342,3324,1648,104,120,127,76,42,27,26,81,157,140,137,108,144,118,89,26,42,13,26,26,12,5,2,1676,94,117,112,77,65,30,20,93,158,119,127,129,129,128,107,23,26,18,35,30,18,11,10
uSF2,DE,001,01,0000343,10284,5085,453,467,438,245,139,56,58,204,480,485,501,490,369,305,153,48,50,31,32,33,32,12,4,5199,409,446,359,222,121,67,62,256,531,536,558,500,370,299,172,37,51,27,41,54,40,28,13
uSF2,DE,001,01,0000344,5172,2534,200,171,159,76,61,48,37,179,310,287,211,182,157,118,79,32,52,33,48,44,25,20,5,2638,188,182,141,74,83,49,69,195,297,245,230,199,165,131,104,44,50,48,32,46,36,19,11
uSF2,DE,001,01,0000345,68436,31553,2564,2763,2662,1543,908,425,394,1266,2608,2534,2403,2302,2084,1749,1322,424,589,397,530,771,631,407,277,36883,2330,2620,2588,1528,918,462,450,1539,2892,2955,2891,2787,2451,2143,1637,579,761,535,766,1207,1198,892,754
uSF2,DE,001,01,0000346,68436,31553,2564,2763,2662,1543,908,425,394,1266,2608,2534,2403,2302,2084,1749,1322,424,589,397,530,771,631,407,277,36883,2330,2620,2588,1528,918,462,450,1539,2892,2955,2891,2787,2451,2143,1637,579,761,535,766,1207,1198,892,754
uSF2,DE,001,01,0000347,565,284,22,27,9,6,5,4,5,17,36,35,31,27,12,17,13,5,5,3,0,3,1,1,0,281,21,16,5,4,22,6,4,21,25,33,21,26,25,14,9,5,6,2,1,4,6,3,2
uSF2,DE,001,01,0000348,5557,2566,168,219,239,129,90,21,34,71,128,187,181,208,209,197,152,31,57,37,41,61,55,30,21,2991,164,200,212,146,67,36,24,85,173,239,250,274,242,253,181,55,59,37,41,82,75,55,41
uSF2,DE,001,01,0000349,3359,1551,94,146,176,80,57,27,17,60,99,110,112,110,129,109,75,20,27,20,17,24,20,17,5,1808,95,148,145,95,43,24,14,60,103,142,157,169,133,142,90,36,34,28,35,32,37,25,21
uSF2,DE,001,01,0000350,2965,1355,92,83,91,51,38,11,20,41,115,124,106,98,97,73,66,32,52,22,26,50,34,25,8,1610,104,65,96,61,33,15,15,63,141,128,125,123,125,103,88,23,43,34,43,68,51,40,23
uSF2,DE,001,01,0000351,3736,1729,177,175,162,85,50,20,17,64,105,137,132,129,112,115,76,30,31,20,30,34,17,8,3,2007,157,162,158,95,68,36,33,81,129,125,173,160,145,128,123,36,41,29,26,42,31,17,12
uSF2,DE,001,01,0000352,2427,1082,78,128,111,53,43,24,13,30,55,66,71,100,54,56,37,22,28,17,23,33,24,11,5,1345,97,117,136,51,29,16,12,42,75,87,114,95,80,73,65,23,41,29,43,45,40,16,19
uSF2,DE,001,01,0000353,3129,1391,110,110,115,69,29,18,22,58,66,84,116,108,114,72,66,27,33,26,40,49,37,14,8,1738,87,131,128,77,56,22,22,57,81,103,136,146,119,84,85,35,71,42,57,70,60,38,31
uSF2,DE,001,01,0000354,1668,688,133,160,106,38,20,14,13,23,26,20,32,27,19,11,14,2,8,3,6,7,4,1,1,980,122,116,106,61,26,16,14,66,62,87,66,82,47,27,16,6,14,11,6,11,4,7,7
uSF2,DE,001,01,0000355,504,232,37,21,18,8,9,2,2,5,12,14,24,20,22,10,6,3,4,1,2,8,3,1,0,272,23,27,22,14,12,1,4,11,19,22,26,27,16,16,5,4,1,4,5,7,1,2,3
uSF2,DE,001,01,0000356,2171,967,74,101,97,77,36,18,14,40,74,62,72,77,76,38,22,12,12,10,12,14,16,9,4,1204,75,102,107,69,27,20,23,46,73,103,122,98,90,54,32,22,16,11,19,21,37,20,17
uSF2,DE,001,01,0000357,613,301,14,15,9,5,4,4,1,15,37,47,32,27,21,24,16,4,3,3,5,7,4,3,1,312,12,9,12,5,8,1,2,18,40,43,22,28,24,29,22,3,2,1,9,7,5,4,6
uSF2,DE,001,01,0000358,3132,1419,18,10,17,12,3,5,7,98,316,200,133,86,87,90,77,23,25,17,27,52,40,46,30,1713,17,13,15,10,4,2,10,138,302,174,81,69,91,99,86,31,34,34,56,138,125,91,93
uSF2,DE,001,01,0000359,1518,702,21,19,21,18,4,1,4,41,171,108,64,50,49,30,27,5,13,3,15,13,14,6,5,816,21,34,20,12,8,7,8,49,167,108,60,54,52,41,33,11,22,9,15,24,24,25,12
uSF2,DE,001,01,0000360,3535,1617,97,65,88,54,24,5,4,32,80,139,128,120,115,153,135,40,56,40,41,73,66,44,18,1918,89,73,80,53,18,6,4,32,109,147,140,127,124,210,136,51,65,37,67,109,112,82,47
uSF2,DE,001,01,0000361,2012,911,75,49,52,39,26,8,12,36,87,68,74,62,59,53,35,16,12,12,25,42,34,13,22,1101,58,48,60,31,25,7,12,38,95,86,76,72,70,57,47,13,27,19,40,63,65,46,46
uSF2,DE,001,01,0000362,2259,1042,71,66,68,39,24,10,15,61,115,90,84,70,70,63,44,11,14,10,25,19,23,20,30,1217,62,74,85,44,31,6,24,66,116,100,83,74,79,51,44,16,22,8,16,34,56,51,75
uSF2,DE,001,01,0000363,2339,1108,99,111,92,64,29,23,25,60,114,89,82,78,73,55,44,11,12,7,9,13,8,5,5,1231,87,132,101,47,39,21,21,75,141,107,104,102,86,47,44,9,10,8,10,23,10,6,1
uSF2,DE,001,01,0000364,2947,1238,154,139,125,90,47,10,12,43,51,47,64,61,72,52,32,21,36,18,31,51,42,13,27,1709,108,145,132,74,45,25,26,64,95,92,102,103,93,83,79,28,40,48,55,88,77,42,65
uSF2,DE,001,01,0000365,1839,833,108,115,118,53,38,23,13,21,39,45,68,44,46,23,21,9,13,8,6,10,10,2,0,1006,96,86,96,56,40,24,22,25,72,81,81,81,69,40,35,16,9,14,11,22,13,5,12
uSF2,DE,001,01,0000366,535,235,35,34,26,8,11,8,5,14,19,19,8,12,7,6,9,2,4,2,2,3,0,1,0,300,24,33,21,15,7,10,9,23,24,23,18,30,15,13,12,4,3,2,0,4,2,6,2
uSF2,DE,001,01,0000367,2138,891,100,105,74,47,32,15,12,33,66,74,52,65,50,51,31,5,15,11,7,20,11,9,6,1247,104,113,102,44,30,22,25,61,89,99,83,82,70,66,50,16,29,11,36,29,43,25,18
uSF2,DE,001,01,0000368,3176,1589,123,154,193,102,65,27,28,83,141,114,103,109,99,70,51,12,26,11,20,26,18,8,6,1587,139,173,142,95,65,36,28,66,102,115,125,98,108,68,60,14,23,25,20,36,20,17,12
uSF2,DE,001,01,0000369,3407,1654,164,169,160,120,65,31,29,77,108,121,111,123,93,73,60,15,24,20,25,26,22,8,10,1753,135,148,168,101,55,28,22,81,115,125,138,134,109,90,55,24,34,26,33,43,40,28,21
uSF2,DE,001,01,0000370,4411,2077,156,157,136,94,39,29,35,86,227,211,175,163,128,115,70,22,23,32,35,49,38,33,24,2334,138,122,109,78,51,27,35,102,199,196,216,196,163,135,95,36,48,21,40,76,102,76,73
uSF2,DE,001,01,0000371,3075,1429,98,119,103,75,35,25,14,55,110,109,102,119,103,81,63,14,23,22,20,35,45,42,17,1646,98,102,112,76,36,19,12,69,129,128,121,122,107,102,59,21,43,17,34,63,64,67,45
uSF2,DE,001,01,0000372,3577,1752,166,181,173,96,65,31,14,64,127,127,147,138,102,73,63,22,19,10,25,34,36,22,17,1825,124,155,147,78,50,22,21,65,147,162,154,130,117,87,58,23,18,13,28,49,76,71,30
uSF2,DE,001,01,0000373,1842,910,80,85,83,31,20,11,7,38,84,87,99,71,66,39,17,8,14,12,15,15,9,15,4,932,73,76,71,36,23,7,4,35,69,100,97,85,52,31,28,18,6,15,20,17,22,27,20
uSF2,DE,001,01,0000374,565,284,22,27,9,6,5,4,5,17,36,35,31,27,12,17,13,5,5,3,0,3,1,1,0,281,21,16,5,4,22,6,4,21,25,33,21,26,25,14,9,5,6,2,1,4,6,3,2
uSF2,DE,001,01,0000375,5557,2566,168,219,239,129,90,21,34,71,128,187,181,208,209,197,152,31,57,37,41,61,55,30,21,2991,164,200,212,146,67,36,24,85,173,239,250,274,242,253,181,55,59,37,41,82,75,55,41
uSF2,DE,001,01,0000376,3359,1551,94,146,176,80,57,27,17,60,99,110,112,110,129,109,75,20,27,20,17,24,20,17,5,1808,95,148,145,95,43,24,14,60,103,142,157,169,133,142,90,36,34,28,35,32,37,25,21
uSF2,DE,001,01,0000377,2965,1355,92,83,91,51,38,11,20,41,115,124,106,98,97,73,66,32,52,22,26,50,34,25,8,1610,104,65,96,61,33,15,15,63,141,128,125,123,125,103,88,23,43,34,43,68,51,40,23
uSF2,DE,001,01,0000378,3736,1729,177,175,162,85,50,20,17,64,105,137,132,129,112,115,76,30,31,20,30,34,17,8,3,2007,157,162,158,95,68,36,33,81,129,125,173,160,145,128,123,36,41,29,26,42,31,17,12
uSF2,DE,001,01,0000379,2427,1082,78,128,111,53,43,24,13,30,55,66,71,100,54,56,37,22,28,17,23,33,24,11,5,1345,97,117,136,51,29,16,12,42,75,87,114,95,80,73,65,23,41,29,43,45,40,16,19
uSF2,DE,001,01,0000380,3129,1391,110,110,115,69,29,18,22,58,66,84,116,108,114,72,66,27,33,26,40,49,37,14,8,1738,87,131,128,77,56,22,22,57,81,103,136,146,119,84,85,35,71,42,57,70,60,38,31
uSF2,DE,001,01,0000381,1668,688,133,160,106,38,20,14,13,23,26,20,32,27,19,11,14,2,8,3,6,7,4,1,1,980,122,116,106,61,26,16,14,66,62,87,66,82,47,27,16,6,14,11,6,11,4,7,7
uSF2,DE,001,01,0000382,504,232,37,21,18,8,9,2,2,5,12,14,24,20,22,10,6,3,4,1,2,8,3,1,0,272,23,27,22,14,12,1,4,11,19,22,26,27,16,16,5,4,1,4,5,7,1,2,3
uSF2,DE,001,01,0000383,2171,967,74,101,97,77,36,18,14,40,74,62,72,77,76,38,22,12,12,10,12,14,16,9,4,1204,75,102,107,69,27,20,23,46,73,103,122,98,90,54,32,22,16,11,19,21,37,20,17
uSF2,DE,001,01,0000384,613,301,14,15,9,5,4,4,1,15,37,47,32,27,21,24,16,4,3,3,5,7,4,3,1,312,12,9,12,5,8,1,2,18,40,43,22,28,24,29,22,3,2,1,9,7,5,4,6
uSF2,DE,001,01,0000385,3132,1419,18,10,17,12,3,5,7,98,316,200,133,86,87,90,77,23,25,17,27,52,40,46,30,1713,17,13,15,10,4,2,10,138,302,174,81,69,91,99,86,31,34,34,56,138,125,91,93
uSF2,DE,001,01,0000386,1518,702,21,19,21,18,4,1,4,41,171,108,64,50,49,30,27,5,13,3,15,13,14,6,5,816,21,34,20,12,8,7,8,49,167,108,60,54,52,41,33,11,22,9,15,24,24,25,12
uSF2,DE,001,01,0000387,3535,1617,97,65,88,54,24,5,4,32,80,139,128,120,115,153,135,40,56,40,41,73,66,44,18,1918,89,73,80,53,18,6,4,32,109,147,140,127,124,210,136,51,65,37,67,109,112,82,47
uSF2,DE,001,01,0000388,2012,911,75,49,52,39,26,8,12,36,87,68,74,62,59,53,35,16,12,12,25,42,34,13,22,1101,58,48,60,31,25,7,12,38,95,86,76,72,70,57,47,13,27,19,40,63,65,46,46
uSF2,DE,001,01,0000389,2259,1042,71,66,68,39,24,10,15,61,115,90,84,70,70,63,44,11,14,10,25,19,23,20,30,1217,62,74,85,44,31,6,24,66,116,100,83,74,79,51,44,16,22,8,16,34,56,51,75
uSF2,DE,001,01,0000390,2339,1108,99,111,92,64,29,23,25,60,114,89,82,78,73,55,44,11,12,7,9,13,8,5,5,1231,87,132,101,47,39,21,21,75,141,107,104,102,86,47,44,9,10,8,10,23,10,6,1
uSF2,DE,001,01,0000391,2947,1238,154,139,125,90,47,10,12,43,51,47,64,61,72,52,32,21,36,18,31,51,42,13,27,1709,108,145,132,74,45,25,26,64,95,92,102,103,93,83,79,28,40,48,55,88,77,42,65
uSF2,DE,001,01,0000392,1839,833,108,115,118,53,38,23,13,21,39,45,68,44,46,23,21,9,13,8,6,10,10,2,0,1006,96,86,96,56,40,24,22,25,72,81,81,81,69,40,35,16,9,14,11,22,13,5,12
uSF2,DE,001,01,0000393,535,235,35,34,26,8,11,8,5,14,19,19,8,12,7,6,9,2,4,2,2,3,0,1,0,300,24,33,21,15,7,10,9,23,24,23,18,30,15,13,12,4,3,2,0,4,2,6,2
uSF2,DE,001,01,0000394,2138,891,100,105,74,47,32,15,12,33,66,74,52,65,50,51,31,5,15,11,7,20,11,9,6,1247,104,113,102,44,30,22,25,61,89,99,83,82,70,66,50,16,29,11,36,29,43,25,18
uSF2,DE,001,01,0000395,3176,1589,123,154,193,102,65,27,28,83,141,114,103,109,99,70,51,12,26,11,20,26,18,8,6,1587,139,173,142,95,65,36,28,66,102,115,125,98,108,68,60,14,23,25,20,36,20,17,12
uSF2,DE,001,01,0000396,3407,1654,164,169,160,120,65,31,29,77,108,121,111,123,93,73,60,15,24,20,25,26,22,8,10,1753,135,148,168,101,55,28,22,81,115,125,138,134,109,90,55,24,34,26,33,43,40,28,21
uSF2,DE,001,01,0000397,4411,2077,156,157,136,94,39,29,35,86,227,211,175,163,128,115,70,22,23,32,35,49,38,33,24,2334,138,122,109,78,51,27,35,102,199,196,216,196,163,135,95,36,48,21,40,76,102,76,73
uSF2,DE,001,01,0000398,3075,1429,98,119,103,75,35,25,14,55,110,109,102,119,103,81,63,14,23,22,20,35,45,42,17,1646,98,102,112,76,36,19,12,69,129,128,121,122,107,102,59,21,43,17,34,63,64,67,45
uSF2,DE,001,01,0000399,3577,1752,166,181,173,96,65,31,14,64,127,127,147,138,102,73,63,22,19,10,25,34,36,22,17,1825,124,155,147,78,50,22,21,65,147,162,154,130,117,87,58,23,18,13,28,49,76,71,30
uSF2,DE,001,01,0000400,1842,910,80,85,83,31,20,11,7,38,84,87,99,71,66,39,17,8,14,12,15,15,9,15,4,932,73,76,71,36,23,7,4,35,69,100,97,85,52,31,28,18,6,15,20,17,22,27,20
uSF2,DE,001,01,0000401,4392,2003,183,194,152,89,50,25,35,69,175,178,167,144,122,92,67,18,44,33,22,37,55,30,22,2389,175,172,157,85,58,30,26,87,244,205,178,151,133,109,93,28,39,33,48,82,97,72,87
uSF2,DE,001,01,0000402,3046,1423,91,89,99,60,29,11,20,49,124,141,137,144,108,80,54,9,33,15,23,44,33,15,15,1623,90,100,94,54,27,14,17,69,156,136,143,127,116,105,63,20,19,23,45,57,50,38,60
uSF2,DE,001,01,0000403,2055,1005,60,75,75,50,18,10,5,26,36,80,89,87,80,55,52,22,26,12,26,67,36,17,1,1050,54,71,72,47,32,8,6,33,38,94,79,93,71,48,58,25,38,17,28,59,49,21,9
uSF2,DE,001,01,0000404,4094,1914,174,165,155,84,42,28,31,79,147,143,168,173,91,100,74,30,37,24,30,64,45,21,9,2180,174,162,167,85,65,37,34,82,128,196,186,203,114,108,77,25,44,23,46,81,74,40,29
uSF2,DE,001,01,0000405,4649,2278,126,149,158,107,49,18,16,79,198,194,228,217,163,135,104,41,53,32,48,73,47,32,11,2371,135,146,156,85,38,17,14,92,181,217,197,222,153,149,125,36,62,45,38,80,82,65,36
uSF2,DE,001,01,0000406,5639,2725,176,171,204,95,35,28,19,99,223,229,273,222,227,179,124,30,58,42,46,84,81,49,31,2914,189,174,131,75,33,19,26,112,237,232,270,235,262,183,142,36,73,47,59,126,122,63,68
uSF2,DE,001,01,0000407,5253,2401,219,219,194,119,45,24,17,70,170,204,206,208,164,147,93,32,47,22,35,56,60,31,19,2852,203,224,217,107,65,32,38,96,238,238,216,241,230,170,131,47,50,41,45,69,72,51,31
uSF2,DE,001,01,0000408,4324,2039,110,152,124,64,26,14,8,48,90,114,161,193,164,183,158,40,54,37,50,89,81,54,25,2285,121,127,129,76,26,12,14,45,98,128,164,191,202,195,152,42,69,51,71,101,120,92,59
uSF2,DE,001,01,0000409,2685,1275,77,93,62,38,21,7,9,25,32,68,102,114,123,107,72,26,21,17,35,73,80,43,30,1410,87,73,75,51,24,6,6,17,38,78,127,117,131,105,64,29,37,23,58,93,78,55,38
uSF2,DE,001,01,0000410,3192,1508,79,101,99,70,24,11,10,27,54,86,118,119,126,118,95,26,37,38,51,79,76,38,26,1684,80,101,112,69,29,10,13,33,51,104,123,118,155,132,98,38,53,30,37,104,96,46,52
uSF2,DE,001,01,0000411,2704,1307,74,70,95,51,22,6,6,18,43,90,85,107,118,126,82,28,28,33,46,75,55,34,15,1397,63,77,72,42,15,4,6,12,60,99,94,128,145,109,101,38,44,28,31,83,75,33,38
uSF2,DE,001,01,0000412,2098,1046,64,88,70,44,28,6,13,41,76,60,84,74,90,87,63,17,21,5,19,50,35,6,5,1052,58,63,64,46,18,6,11,37,75,60,84,81,90,89,59,21,25,18,27,53,36,14,17
uSF2,DE,001,01,0000413,3508,1709,94,119,128,83,36,12,17,48,62,103,114,149,146,153,135,44,53,29,45,71,36,24,8,1799,99,108,102,66,28,9,12,36,77,106,133,166,178,161,143,40,59,41,51,65,70,31,18
uSF2,DE,001,01,0000414,4652,2273,157,148,139,72,39,14,14,117,221,209,207,189,146,135,128,54,67,30,49,74,33,20,11,2379,138,127,133,71,39,16,22,144,233,201,218,166,160,163,162,55,71,33,52,69,58,27,21
uSF2,DE,001,01,0000415,3406,1690,91,107,117,65,26,20,10,46,89,98,131,129,136,135,110,45,71,36,48,68,64,35,13,1716,64,91,110,67,23,12,8,36,73,102,136,144,151,122,145,45,58,48,54,99,73,33,22
uSF2,DE,001,01,0000416,2108,1055,65,81,107,53,20,10,4,24,36,61,74,89,77,86,67,25,30,15,27,61,29,13,1,1053,62,70,66,48,16,5,11,14,40,67,84,95,96,85,75,24,32,25,40,37,38,11,12
uSF2,DE,001,01,0000417,4191,2004,116,121,155,106,29,12,8,38,56,87,147,152,166,155,156,43,68,39,78,112,98,37,25,2187,102,147,136,114,30,14,6,33,61,107,132,175,192,182,164,59,67,64,71,114,111,54,52
uSF2,DE,001,01,0000418,2276,1039,58,69,81,43,20,12,10,16,27,58,96,92,92,75,61,10,25,14,28,45,39,41,27,1237,60,95,72,48,19,5,3,23,32,68,93,122,93,76,68,23,37,19,30,74,52,55,70
uSF2,DE,001,01,0000419,3404,1643,86,105,117,91,27,8,9,25,35,69,101,141,150,131,88,39,51,40,45,100,90,59,36,1761,89,89,127,53,20,8,8,16,47,77,115,149,150,133,108,34,61,34,56,122,104,70,91
uSF2,DE,001,01,0000420,2905,1410,71,102,95,60,21,7,9,25,98,110,112,115,110,95,79,23,33,16,40,77,62,35,15,1495,83,83,89,41,22,9,9,27,91,118,115,127,114,90,87,31,28,37,41,89,82,47,35
uSF2,DE,001,01,0000421,3199,1507,122,83,109,54,20,11,5,36,82,130,126,116,109,113,71,34,34,20,36,65,58,43,30,1692,97,99,80,69,19,12,9,27,101,146,128,121,133,119,99,30,33,31,42,87,94,65,51
uSF2,DE,001,01,0000422,3870,1891,89,129,126,88,31,12,9,23,38,52,129,131,160,164,146,47,72,50,74,123,100,68,30,1979,77,104,113,72,28,5,4,23,36,62,109,161,168,210,150,61,72,51,86,144,118,84,41
uSF2,DE,001,01,0000423,4086,1875,95,94,112,62,19,13,7,35,90,115,135,165,156,153,141,53,57,38,48,74,71,68,74,2211,113,112,122,71,26,11,12,63,116,133,127,167,154,166,130,55,55,25,53,86,108,122,184
uSF2,DE,001,01,0000424,2850,1387,79,82,77,57,22,4,1,18,43,63,81,89,120,117,134,46,67,40,54,78,49,45,21,1463,89,74,83,53,20,3,2,11,37,82,96,96,134,146,132,56,62,37,51,71,65,38,25
uSF2,DE,001,01,0000425,4119,2074,127,132,145,89,50,29,19,53,121,144,177,180,147,107,91,44,78,42,68,105,79,34,13,2045,104,120,121,58,48,14,18,63,106,114,193,148,149,145,117,47,92,62,67,96,90,37,36
uSF2,DE,001,01,0000426,2938,1481,103,106,106,59,33,15,13,59,114,96,126,106,107,81,69,27,39,21,42,77,42,23,17,1457,88,81,83,56,35,12,8,53,88,96,126,113,109,84,73,33,38,20,59,79,71,29,23
uSF2,DE,001,01,0000427,4662,2271,148,178,203,103,57,31,36,80,168,198,201,194,157,122,99,27,37,30,40,58,69,19,16,2391,158,158,181,98,62,26,26,88,160,176,213,210,176,135,110,39,47,37,45,73,81,55,37
uSF2,DE,001,01,0000428,2232,1073,76,83,67,47,25,14,12,46,83,75,81,100,65,66,55,11,20,10,31,33,34,28,11,1159,84,74,70,41,24,23,15,44,71,68,82,104,85,57,63,15,32,14,31,47,56,38,21
uSF2,DE,001,01,0000429,4631,2291,159,189,153,115,69,30,25,100,165,180,219,190,148,118,89,32,46,30,61,70,57,31,15,2340,167,151,134,81,59,29,40,89,140,201,185,219,127,146,95,43,58,34,73,92,92,50,35
uSF2,DE,001,01,0000430,5112,2441,166,172,174,92,51,31,27,89,171,207,236,215,198,139,77,27,38,33,52,110,74,37,25,2671,150,184,173,85,74,31,28,91,182,212,205,238,174,136,100,44,53,39,70,123,129,86,64
uSF2,DE,001,01,0000431,2754,1323,88,99,104,55,32,7,7,27,68,109,110,119,95,72,70,14,28,10,26,48,72,39,24,1431,73,101,89,63,28,8,13,25,66,100,117,128,104,70,65,19,27,19,46,75,88,66,41
uSF2,DE,001,01,0000432,5054,2389,143,171,143,96,63,37,22,88,136,191,206,180,153,134,96,51,71,60,71,126,82,48,21,2665,146,156,140,87,65,24,23,69,157,179,190,218,159,166,150,53,83,62,106,167,136,79,50
uSF2,DE,001,01,0000433,4472,2108,205,197,154,92,69,44,30,93,174,155,162,154,134,97,80,29,44,28,39,54,35,30,9,2364,183,181,157,101,55,21,24,131,185,176,196,171,142,126,73,28,47,35,51,102,73,65,41
uSF2,DE,001,01,0000434,1946,951,68,59,53,36,24,14,12,35,63,70,75,78,70,48,58,14,16,9,40,60,29,17,3,995,51,61,77,30,18,9,11,24,55,77,70,91,58,59,57,17,34,19,33,59,49,24,12
uSF2,DE,001,01,0000435,2532,1277,84,93,90,53,33,13,18,53,102,104,101,98,87,71,55,26,19,26,39,52,28,20,12,1255,81,69,71,41,33,11,13,56,98,91,109,112,79,72,64,21,28,23,48,43,53,22,17
uSF2,DE,001,01,0000436,2701,1342,90,105,86,62,46,18,15,42,86,92,124,115,98,85,57,20,24,14,30,52,51,20,10,1359,96,103,102,51,31,11,12,43,76,93,109,116,90,80,62,23,26,20,36,68,55,41,15
uSF2,DE,001,01,0000437,1895,888,45,46,48,33,19,12,12,21,43,54,64,69,71,64,39,19,28,25,26,62,54,26,8,1007,50,50,61,27,27,8,5,15,35,67,64,73,81,71,61,22,36,21,43,77,63,36,14
uSF2,DE,001,01,0000438,2742,1333,70,82,96,70,33,18,16,38,56,64,129,117,103,88,78,25,30,24,38,62,58,24,14,1409,81,82,91,59,38,17,19,42,40,77,115,131,105,81,85,21,32,33,58,93,65,28,16
uSF2,DE,001,01,0000439,6292,3052,167,209,219,157,60,24,18,44,68,126,182,263,267,258,219,57,77,63,112,151,132,103,76,3240,171,196,212,133,47,20,19,49,69,143,211,289,273,272,211,58,89,66,108,179,174,147,104
uSF2,DE,001,01,0000440,7491,3750,229,321,340,232,97,29,27,81,105,173,312,364,368,371,261,66,79,54,75,83,47,28,8,3741,244,291,320,181,68,23,27,69,96,208,333,401,401,341,236,68,84,39,64,81,53,63,50
uSF2,DE,001,01,0000441,8277,4124,311,364,389,241,94,32,26,78,89,171,337,456,417,426,299,89,88,36,48,66,33,26,8,4153,300,396,373,227,74,26,26,59,84,240,400,494,419,403,278,62,59,39,48,69,37,22,18
uSF2,DE,001,01,0000442,4137,2000,128,162,134,96,45,21,18,56,102,134,190,162,174,125,92,42,51,40,63,92,50,16,7,2137,117,152,155,73,52,18,12,64,109,152,174,201,190,131,117,31,75,38,73,95,59,32,17
uSF2,DE,001,01,0000443,5737,2664,168,144,133,68,52,11,22,115,321,293,273,218,163,182,154,44,51,38,51,67,55,28,13,3073,174,129,128,99,43,18,29,119,319,296,278,240,208,253,179,51,73,57,77,92,96,77,38
uSF2,DE,001,01,0000444,1976,994,76,58,71,37,33,16,21,62,64,73,90,97,74,48,35,15,16,6,26,46,20,7,3,982,83,53,62,33,22,9,16,41,67,69,97,78,56,54,45,12,23,24,36,49,31,10,12
uSF2,DE,001,01,0000445,6865,3260,185,182,210,124,67,35,34,121,255,294,288,267,220,201,173,68,91,55,87,109,101,65,28,3605,207,203,185,83,64,19,31,129,247,272,288,291,247,248,209,74,139,71,106,170,176,98,48
uSF2,DE,001,01,0000446,5256,2569,210,226,197,109,55,26,36,117,129,191,258,228,225,204,128,31,28,32,27,39,32,20,21,2687,190,203,200,99,65,40,52,134,143,229,257,229,245,176,111,28,47,28,37,40,42,43,49
uSF2,DE,001,01,0000447,5883,2954,198,223,205,112,47,33,27,145,281,270,273,280,207,184,170,50,58,44,45,58,26,12,6,2929,172,193,181,98,42,35,35,168,273,254,290,247,241,217,161,57,64,31,47,57,34,20,12
uSF2,DE,001,01,0000448,5569,2685,213,243,242,120,73,23,16,46,97,187,238,294,278,203,152,44,46,26,35,47,34,16,12,2884,188,231,270,139,63,27,19,52,107,233,275,320,293,185,181,40,51,21,48,47,62,23,9
uSF2,DE,001,01,0000449,5621,2736,205,206,214,128,60,21,23,79,139,194,236,267,221,195,153,44,80,40,54,85,50,28,14,2885,193,181,191,128,61,22,31,66,166,218,270,275,253,213,167,57,77,38,62,91,61,43,21
uSF2,DE,001,01,0000450,4650,2452,234,140,138,88,80,68,65,163,345,225,168,166,124,132,75,31,41,31,38,45,32,13,10,2198,225,178,123,107,61,29,35,164,227,162,146,139,138,113,93,30,43,34,35,59,34,11,12
uSF2,DE,001,01,0000451,5456,2696,156,184,177,106,63,33,26,128,281,250,246,239,180,173,128,58,62,30,43,58,43,16,16,2760,167,159,174,97,69,44,45,139,234,217,272,229,180,187,170,55,70,34,39,49,57,40,33
uSF2,DE,001,01,0000452,3324,1648,104,120,127,76,42,27,26,81,157,140,137,108,144,118,89,26,42,13,26,26,12,5,2,1676,94,117,112,77,65,30,20,93,158,119,127,129,129,128,107,23,26,18,35,30,18,11,10
uSF2,DE,001,01,0000453,10284,5085,453,467,438,245,139,56,58,204,480,485,501,490,369,305,153,48,50,31,32,33,32,12,4,5199,409,446,359,222,121,67,62,256,531,536,558,500,370,299,172,37,51,27,41,54,40,28,13
uSF2,DE,001,01,0000454,5172,2534,200,171,159,76,61,48,37,179,310,287,211,182,157,118,79,32,52,33,48,44,25,20,5,2638,188,182,141,74,83,49,69,195,297,245,230,199,165,131,104,44,50,48,32,46,36,19,11
uSF2,DE,001,01,0000455,4881,2360,193,234,215,119,69,36,29,72,182,160,214,198,136,133,97,30,46,33,43,53,47,16,5,2521,194,202,175,91,60,43,41,115,200,180,224,204,157,170,116,23,53,33,61,72,64,24,19
uSF2,DE,001,01,0000456,1681,844,58,58,46,29,22,10,17,28,57,81,62,77,67,51,40,12,21,24,22,29,17,12,4,837,57,44,44,32,21,5,6,20,50,67,69,74,76,60,34,19,21,16,24,42,25,16,15
uSF2,DE,001,01,0000457,4061,2042,73,141,159,100,59,45,40,76,48,86,107,158,189,224,158,53,60,37,42,79,75,24,9,2019,65,113,142,101,30,30,49,64,42,83,139,158,198,207,150,44,50,39,63,107,61,45,39
uSF2,DE,001,01,0000458,3228,1621,58,38,67,38,44,70,142,252,185,101,83,85,75,92,75,24,39,16,31,36,39,21,10,1607,46,59,57,35,45,59,150,227,169,75,72,65,79,99,92,20,37,30,32,48,57,25,29
uSF2,DE,001,01,0000459,3742,1929,68,70,92,41,64,115,157,307,232,126,98,85,91,70,60,26,24,18,38,56,50,33,8,1813,70,79,85,40,73,108,166,184,140,111,97,86,87,85,79,23,32,32,43,60,62,53,18
uSF2,DE,001,01,0000460,3550,1738,104,134,117,66,37,22,12,85,173,159,127,167,126,102,97,33,40,24,35,39,23,15,1,1812,101,109,113,60,34,18,18,91,158,145,148,165,139,142,109,37,47,26,42,45,36,15,14
uSF2,DE,001,01,0000461,1876,765,11,23,14,8,22,94,149,191,82,38,20,17,22,9,12,4,4,6,7,12,9,4,7,1111,15,10,22,12,38,155,300,185,63,28,24,15,17,16,2,2,15,2,14,45,44,47,40
uSF2,DE,001,01,0000462,2539,1224,21,30,20,14,51,206,254,296,85,54,31,24,34,27,17,1,17,4,7,9,15,6,1,1315,17,13,19,9,80,306,368,179,46,43,27,21,25,31,22,2,14,5,13,26,20,12,17
uSF2,DE,001,01,0000463,1897,929,72,70,84,36,15,3,11,33,61,74,73,78,57,54,54,19,29,19,22,37,18,10,0,968,54,68,72,42,16,8,17,20,67,74,71,82,56,58,93,14,36,16,31,35,25,7,6
uSF2,DE,001,01,0000464,4585,2301,150,167,164,102,71,33,40,115,221,166,199,200,168,122,85,27,43,17,46,56,56,29,24,2284,146,151,138,102,50,31,32,99,152,166,156,195,152,154,97,35,46,40,46,109,84,66,37
uSF2,DE,001,01,0000465,5641,2742,207,209,220,125,72,36,32,134,215,262,257,230,168,201,129,42,36,15,41,57,37,10,7,2899,213,194,201,128,71,30,26,113,255,226,296,251,212,212,130,28,49,34,48,57,58,44,23
uSF2,DE,001,01,0000466,2512,1220,124,133,115,71,32,18,18,54,76,98,128,128,77,59,38,6,8,6,12,7,6,5,1,1292,139,125,117,62,35,30,17,50,83,110,151,125,83,62,29,8,8,9,12,14,11,9,3
uSF2,DE,001,01,0000467,3460,1694,111,97,85,47,31,28,23,61,157,116,136,154,119,128,111,36,53,30,50,61,33,19,8,1766,95,114,69,55,42,11,18,76,131,134,150,129,126,140,111,36,54,39,50,77,63,34,12
uSF2,DE,001,01,0000468,6767,3390,372,337,257,145,54,22,21,77,282,411,359,306,231,195,138,32,42,28,28,25,12,14,2,3377,320,331,245,127,45,25,28,89,308,430,389,304,232,189,119,19,48,15,22,29,25,19,19
uSF2,DE,001,01,0000469,12424,6133,500,529,588,337,128,74,52,197,426,515,590,612,508,425,260,51,85,42,70,80,39,16,9,6291,489,528,488,262,169,55,75,269,487,565,636,652,535,415,228,46,86,35,71,92,47,31,30
uSF2,DE,001,01,0000470,6521,3298,349,317,243,116,64,34,30,160,338,353,359,280,188,174,108,24,31,23,28,39,21,7,12,3223,311,282,220,124,71,48,44,155,311,389,354,252,211,158,85,20,36,25,25,40,29,24,9
uSF2,DE,001,01,0000471,6335,3096,274,275,232,151,79,51,35,123,295,318,303,280,212,165,118,30,38,17,32,41,17,6,4,3239,254,264,239,120,73,56,39,145,280,302,314,342,251,212,106,46,46,16,28,62,24,11,9
uSF2,DE,001,01,0000472,9144,4337,446,433,345,167,96,51,51,228,483,518,455,334,242,216,102,31,38,8,22,31,24,11,5,4807,401,399,321,166,90,71,76,285,571,556,491,393,357,227,127,34,58,23,33,50,38,32,8
uSF2,DE,001,01,0000473,7205,3559,363,449,385,197,97,43,38,143,296,352,342,261,188,154,99,28,31,14,27,25,17,6,4,3646,353,382,341,195,98,57,46,117,289,418,368,300,246,163,107,33,35,10,23,27,23,7,8
uSF2,DE,001,01,0000474,4706,2285,147,169,168,88,59,16,23,98,201,224,243,196,169,140,127,28,33,24,37,40,24,22,9,2421,162,166,155,86,42,20,27,143,205,228,235,204,174,199,119,25,39,29,30,55,42,24,12
uSF2,DE,001,01,0000475,8456,3850,322,346,322,154,83,41,45,172,456,471,362,293,204,161,117,45,55,36,44,59,35,20,7,4606,399,359,310,144,94,50,55,258,521,480,435,354,287,207,172,51,81,62,42,86,79,46,34
uSF2,DE,001,01,0000476,5670,2795,179,215,214,125,78,42,42,134,189,220,249,262,172,162,155,74,60,36,52,61,42,26,6,2875,200,217,193,129,86,33,33,125,203,223,260,222,192,198,179,55,66,31,50,73,69,30,8
uSF2,DE,001,01,0000477,3498,1691,94,117,129,78,37,21,17,51,90,114,126,124,109,111,107,32,44,43,45,80,61,51,10,1807,98,122,107,59,33,23,17,59,89,118,123,129,143,127,114,37,57,34,55,101,86,48,28
uSF2,DE,001,01,0000478,5311,2744,187,186,203,140,90,56,39,146,241,240,232,233,179,143,105,35,47,36,43,49,51,39,24,2567,203,195,179,109,72,25,38,93,186,194,217,212,176,121,114,25,67,35,58,84,90,54,20
uSF2,DE,001,01,0000479,3121,1439,100,136,155,95,53,15,9,45,76,72,104,70,102,60,83,30,33,15,34,58,47,30,17,1682,68,133,148,83,40,21,24,38,93,102,126,133,114,91,83,34,44,29,48,89,72,43,26
uSF2,DE,001,01,0000480,2719,1321,83,133,118,76,36,24,8,46,69,103,105,85,87,75,64,25,36,24,27,41,28,19,9,1398,81,106,113,64,36,20,10,43,95,93,119,105,106,77,77,30,40,16,29,54,41,21,22
uSF2,DE,001,01,0000481,2411,1159,60,94,112,60,31,20,17,40,57,74,81,89,68,81,66,35,35,26,34,33,21,19,6,1252,62,81,96,55,39,18,17,32,55,88,85,98,101,107,83,28,28,27,28,52,42,16,14
uSF2,DE,001,01,0000482,2238,1121,65,105,111,58,34,11,16,48,64,69,103,90,80,54,42,17,24,14,19,29,35,18,15,1117,68,91,77,55,31,17,8,42,61,83,91,109,74,59,51,15,23,18,23,46,44,17,14
uSF2,DE,001,01,0000483,3264,1589,91,133,137,79,41,22,25,50,109,101,129,132,118,86,56,21,32,28,50,75,45,19,10,1675,102,117,109,73,32,11,15,33,108,110,150,152,123,85,70,29,57,31,70,88,59,32,19
uSF2,DE,001,01,0000484,2699,1328,96,96,99,61,55,16,9,52,90,99,100,96,88,91,82,38,43,27,27,22,25,11,5,1371,82,107,92,61,28,14,18,56,78,94,114,95,94,124,107,34,36,18,34,46,19,12,8
uSF2,DE,001,01,0000485,2137,966,43,56,74,32,20,12,14,33,54,52,80,73,76,86,71,25,29,15,24,37,30,21,9,1171,54,57,82,40,28,10,8,32,60,68,88,79,103,103,93,40,22,25,33,44,47,25,30
uSF2,DE,001,01,0000486,2241,1080,68,52,69,51,23,14,8,42,88,67,86,95,93,90,54,14,29,21,25,42,24,16,9,1161,63,52,70,45,25,15,16,53,64,73,102,73,97,90,68,31,32,18,39,43,44,38,10
uSF2,DE,001,01,0000487,4221,2046,164,201,173,88,55,26,28,56,115,149,188,204,169,127,91,28,37,31,34,44,25,10,3,2175,142,180,174,94,54,19,22,77,123,186,215,203,180,133,109,37,46,20,37,52,38,24,10
uSF2,DE,001,01,0000488,6527,3209,307,321,257,152,89,35,23,82,230,367,360,262,222,203,121,27,35,18,18,35,22,18,5,3318,332,286,273,132,69,35,27,90,299,389,378,290,237,192,103,26,25,21,30,36,17,19,12
uSF2,DE,001,01,0000489,5311,2643,193,197,170,111,73,35,39,117,240,185,213,232,202,183,140,46,59,37,37,52,43,31,8,2668,167,177,182,106,57,39,48,129,205,207,205,218,230,196,128,41,70,34,47,61,64,37,20
uSF2,DE,001,01,0000490,3232,1658,151,156,152,68,34,27,18,57,83,148,177,162,102,109,85,19,29,11,19,18,19,8,6,1574,121,123,123,59,53,11,14,53,87,167,169,143,114,105,72,23,23,16,22,30,20,13,13
uSF2,DE,001,01,0000491,2136,1092,85,81,81,47,32,12,8,33,84,91,94,86,78,73,53,23,27,25,22,30,15,4,8,1044,51,69,89,41,17,7,9,22,87,80,81,92,87,67,62,25,35,12,22,33,23,14,19
uSF2,DE,001,01,0000492,5707,2864,268,305,251,124,65,31,26,71,149,247,349,283,199,164,112,36,50,17,30,36,32,8,11,2843,234,275,250,100,55,22,23,83,173,280,345,246,203,144,128,35,33,25,37,57,40,20,35
uSF2,DE,001,01,0000493,4442,2246,187,220,218,100,62,25,15,46,74,164,262,252,210,146,95,37,38,11,27,31,19,4,3,2196,170,249,169,111,42,22,21,45,85,177,278,231,178,145,85,25,33,23,30,35,16,15,11
uSF2,DE,001,01,0000494,3849,1987,156,192,197,117,51,13,19,41,51,126,198,219,182,166,84,37,29,22,18,34,21,8,6,1862,111,168,181,93,38,13,9,39,64,151,223,205,163,120,92,31,26,15,21,37,38,14,10
uSF2,DE,001,01,0000495,4986,2359,245,221,201,119,54,30,31,93,157,216,196,194,139,134,99,33,38,22,17,44,43,17,16,2627,222,235,200,103,59,38,32,87,226,213,230,214,177,160,100,44,49,28,29,71,53,36,21
uSF2,DE,001,01,0000496,2983,1508,83,124,147,78,36,12,13,25,62,106,149,147,130,103,77,41,31,28,34,37,20,17,8,1475,73,112,138,63,24,11,16,35,66,107,149,136,126,99,84,25,39,22,30,41,31,27,21
uSF2,DE,001,01,0000497,2480,1222,77,100,98,51,21,13,5,32,70,113,127,107,102,78,85,27,33,21,16,22,12,11,1,1258,96,101,107,48,23,5,13,36,87,117,140,97,83,94,75,32,21,10,21,19,9,11,13
uSF2,DE,001,01,0000498,2202,1147,65,82,97,63,32,11,9,30,49,67,92,127,82,81,80,35,27,14,29,41,19,9,6,1055,58,67,80,32,18,8,5,16,54,67,100,121,91,88,72,21,29,15,19,36,34,18,6
uSF2,DE,001,01,0000499,1353,708,48,48,50,32,16,9,10,19,27,51,76,56,61,52,48,17,20,16,17,13,10,4,8,645,32,45,49,27,13,6,4,16,28,43,72,54,51,52,51,10,20,10,11,14,15,13,9
uSF2,DE,001,01,0000500,153199,74370,4564,5128,5180,3218,1661,748,699,2108,3827,4487,5468,5640,5219,4997,4534,1718,2562,1664,2673,3752,2519,1367,637,78829,4426,4817,5051,2856,1650,758,694,2145,4097,4754,5862,5871,5447,5359,5019,2040,2821,1845,2841,4153,3118,1920,1285
uSF2,DE,001,01,0000501,9388,4555,384,395,367,188,118,51,38,159,279,334,376,351,303,280,239,85,94,72,103,141,104,57,37,4833,336,390,410,224,117,57,51,177,299,357,396,329,306,292,235,83,108,81,110,183,128,86,78
uSF2,DE,001,01,0000502,1434,681,80,62,39,29,18,10,6,20,48,56,46,45,34,41,40,7,11,14,19,31,15,5,5,753,68,67,43,24,22,7,9,35,56,56,54,27,39,53,26,11,16,17,21,34,24,27,17
uSF2,DE,001,01,0000503,1434,681,80,62,39,29,18,10,6,20,48,56,46,45,34,41,40,7,11,14,19,31,15,5,5,753,68,67,43,24,22,7,9,35,56,56,54,27,39,53,26,11,16,17,21,34,24,27,17
uSF2,DE,001,01,0000504,837,407,41,50,37,10,7,8,6,24,25,35,30,30,21,21,15,5,6,4,3,6,13,7,3,430,37,30,42,19,11,6,9,18,35,41,29,20,21,17,12,6,5,6,6,23,20,6,11
uSF2,DE,001,01,0000505,834,406,41,50,37,10,7,8,6,24,25,35,30,30,21,20,15,5,6,4,3,6,13,7,3,428,37,30,41,19,11,6,9,18,35,41,29,19,21,17,12,6,5,6,6,23,20,6,11
uSF2,DE,001,01,0000506,7117,3467,263,283,291,149,93,33,26,115,206,243,300,276,248,218,184,73,77,54,81,104,76,45,29,3650,231,293,325,181,84,44,33,124,208,260,313,282,246,222,197,66,87,58,83,126,84,53,50
uSF2,DE,001,01,0000507,3319,1604,112,127,122,69,43,16,9,54,88,98,138,145,115,92,97,31,29,35,45,57,41,24,17,1715,107,128,157,87,40,20,14,54,86,116,143,124,116,99,97,38,42,32,42,68,45,33,27
uSF2,DE,001,01,0000508,3798,1863,151,156,169,80,50,17,17,61,118,145,162,131,133,126,87,42,48,19,36,47,35,21,12,1935,124,165,168,94,44,24,19,70,122,144,170,158,130,123,100,28,45,26,41,58,39,20,23
uSF2,DE,001,01,0000509,10053,5156,364,391,346,264,181,100,79,288,444,407,374,374,336,277,239,75,105,67,100,139,105,71,30,4897,383,377,316,202,166,61,53,205,342,340,375,354,325,290,230,87,99,83,113,181,148,95,72
uSF2,DE,001,01,0000510,4420,2300,173,167,128,118,112,60,41,175,272,203,150,145,127,86,73,24,35,22,39,46,52,34,18,2120,205,168,131,69,85,30,30,119,188,124,139,132,105,111,85,31,37,36,50,77,75,55,38
uSF2,DE,001,01,0000511,4329,2262,173,167,126,118,109,59,41,174,270,200,149,140,124,84,73,20,34,22,39,41,51,32,16,2067,203,166,131,66,83,29,29,118,188,122,135,131,99,108,81,31,36,34,48,73,70,50,36
uSF2,DE,001,01,0000512,5633,2856,191,224,218,146,69,40,38,113,172,204,224,229,209,191,166,51,70,45,61,93,53,37,12,2777,178,209,185,133,81,31,23,86,154,216,236,222,220,179,145,56,62,47,63,104,73,40,34
uSF2,DE,001,01,0000513,2767,1374,77,102,104,66,29,15,15,50,76,94,101,129,109,97,93,24,36,24,34,45,26,22,6,1393,72,98,89,72,46,17,11,38,72,90,123,108,121,91,79,33,39,27,35,51,33,21,27
uSF2,DE,001,01,0000514,2866,1482,114,122,114,80,40,25,23,63,96,110,123,100,100,94,73,27,34,21,27,48,27,15,6,1384,106,111,96,61,35,14,12,48,82,126,113,114,99,88,66,23,23,20,28,53,40,19,7
uSF2,DE,001,01,0000515,20307,9809,748,766,768,471,248,102,117,287,581,664,770,840,716,623,532,169,242,173,240,316,236,140,60,10498,729,727,765,438,293,142,104,320,648,722,861,813,725,619,579,205,252,181,266,420,316,225,148
uSF2,DE,001,01,0000516,184,87,7,6,6,1,2,0,1,2,4,6,4,10,5,12,7,0,2,0,4,3,3,2,0,97,3,6,7,2,3,3,0,3,4,4,5,7,11,10,4,1,1,0,2,6,2,6,7
uSF2,DE,001,01,0000517,184,87,7,6,6,1,2,0,1,2,4,6,4,10,5,12,7,0,2,0,4,3,3,2,0,97,3,6,7,2,3,3,0,3,4,4,5,7,11,10,4,1,1,0,2,6,2,6,7
uSF2,DE,001,01,0000518,1305,595,59,55,50,26,13,7,7,22,33,36,51,35,40,29,36,11,10,12,18,14,18,11,2,710,61,49,45,29,18,8,2,23,60,51,50,50,36,31,47,6,15,11,16,32,34,22,14
uSF2,DE,001,01,0000519,1295,590,59,55,50,26,13,7,7,22,32,35,50,34,40,29,36,10,10,12,18,14,18,11,2,705,61,49,45,29,18,7,2,23,59,51,49,49,36,31,46,6,15,11,16,32,34,22,14
uSF2,DE,001,01,0000520,3668,1665,212,158,165,97,51,20,24,56,114,109,109,102,104,85,61,13,18,33,28,40,29,27,10,2003,185,152,161,88,79,43,38,77,134,123,148,134,105,86,84,25,33,33,49,80,62,57,27
uSF2,DE,001,01,0000521,632,245,61,31,38,11,12,3,6,6,16,12,5,7,7,11,11,0,0,0,0,2,2,4,0,387,50,26,33,10,33,18,18,23,18,17,27,23,8,10,11,0,8,7,3,17,9,14,4
uSF2,DE,001,01,0000522,3036,1420,151,127,127,86,39,17,18,50,98,97,104,95,97,74,50,13,18,33,28,38,27,23,10,1616,135,126,128,78,46,25,20,54,116,106,121,111,97,76,73,25,25,26,46,63,53,43,23
uSF2,DE,001,01,0000523,15150,7462,470,547,547,347,182,75,85,207,430,513,606,693,567,497,428,145,212,128,190,259,186,100,48,7688,480,520,552,319,193,88,64,217,450,544,658,622,573,492,444,173,203,137,199,302,218,140,100
uSF2,DE,001,01,0000524,3434,1712,117,124,118,88,44,19,22,44,104,108,141,172,134,118,83,31,50,29,47,53,44,14,8,1722,116,125,146,72,41,15,8,49,107,148,139,142,128,92,92,33,49,39,40,60,38,23,20
uSF2,DE,001,01,0000525,4820,2360,117,159,186,113,66,12,22,68,133,178,196,223,198,153,152,51,56,49,45,83,64,24,12,2460,151,177,184,107,57,35,28,65,140,164,235,198,174,160,149,53,57,37,69,88,65,36,31
uSF2,DE,001,01,0000526,3335,1634,114,131,109,64,32,27,15,57,104,123,130,145,112,103,86,27,54,22,45,58,38,23,15,1701,112,100,113,51,48,24,18,58,110,122,147,132,114,106,94,47,52,28,45,79,51,28,22
uSF2,DE,001,01,0000527,955,471,29,25,27,25,11,6,6,14,23,19,34,38,32,27,31,13,16,7,24,28,19,14,3,484,22,22,26,16,12,0,2,17,23,24,35,33,44,30,32,13,12,17,22,25,29,19,9
uSF2,DE,001,01,0000528,2606,1285,93,108,107,57,29,11,20,24,66,85,105,115,91,96,76,23,36,21,29,37,21,25,10,1321,79,96,83,73,35,14,8,28,70,86,102,117,113,104,77,27,33,16,23,50,35,34,18
uSF2,DE,001,01,0000529,21193,10177,457,458,529,350,141,64,59,179,368,530,670,726,799,785,740,337,486,306,519,737,535,276,126,11016,435,456,460,296,129,57,61,230,448,517,695,783,752,862,915,341,569,358,528,810,669,401,244
uSF2,DE,001,01,0000530,301,155,5,2,1,2,2,0,1,8,14,6,15,9,20,8,14,3,7,8,5,8,12,2,3,146,6,3,3,3,1,1,4,0,9,6,2,9,13,8,15,6,10,5,6,11,10,9,6
uSF2,DE,001,01,0000531,301,155,5,2,1,2,2,0,1,8,14,6,15,9,20,8,14,3,7,8,5,8,12,2,3,146,6,3,3,3,1,1,4,0,9,6,2,9,13,8,15,6,10,5,6,11,10,9,6
uSF2,DE,001,01,0000532,139,63,1,2,1,3,0,0,0,1,0,2,0,5,5,5,4,5,3,3,3,5,9,6,0,76,3,1,2,3,1,0,1,0,2,1,2,3,4,2,9,2,6,5,1,14,5,6,3
uSF2,DE,001,01,0000533,139,63,1,2,1,3,0,0,0,1,0,2,0,5,5,5,4,5,3,3,3,5,9,6,0,76,3,1,2,3,1,0,1,0,2,1,2,3,4,2,9,2,6,5,1,14,5,6,3
uSF2,DE,001,01,0000534,2661,1219,44,45,61,43,16,4,5,21,44,45,73,75,117,88,108,42,63,35,72,95,70,33,20,1442,46,52,60,49,17,3,5,24,51,57,87,89,100,118,141,59,69,58,77,114,82,58,26
uSF2,DE,001,01,0000535,2661,1219,44,45,61,43,16,4,5,21,44,45,73,75,117,88,108,42,63,35,72,95,70,33,20,1442,46,52,60,49,17,3,5,24,51,57,87,89,100,118,141,59,69,58,77,114,82,58,26
uSF2,DE,001,01,0000536,1448,701,17,12,24,8,5,3,5,12,28,34,45,44,77,68,58,18,28,21,32,57,55,28,22,747,10,6,15,12,3,3,1,24,22,34,34,35,54,70,62,21,40,22,36,70,72,61,40
uSF2,DE,001,01,0000537,1448,701,17,12,24,8,5,3,5,12,28,34,45,44,77,68,58,18,28,21,32,57,55,28,22,747,10,6,15,12,3,3,1,24,22,34,34,35,54,70,62,21,40,22,36,70,72,61,40
uSF2,DE,001,01,0000538,16644,8039,390,397,442,294,118,57,48,137,282,443,537,593,580,616,556,269,385,239,407,572,389,207,81,8605,370,394,380,229,107,50,50,182,364,419,570,647,581,664,688,253,444,268,408,601,500,267,169
uSF2,DE,001,01,0000539,2180,1003,35,41,58,39,16,5,8,9,43,49,67,80,85,89,73,33,44,32,32,76,47,31,11,1177,35,43,48,39,16,5,6,27,58,41,72,95,105,84,80,30,47,34,45,89,86,56,36
uSF2,DE,001,01,0000540,5236,2513,131,131,166,96,41,24,13,37,66,141,191,174,150,161,139,55,122,76,164,210,129,72,24,2723,125,135,123,66,39,14,20,47,103,140,189,214,175,197,185,75,164,92,146,204,153,68,49
uSF2,DE,001,01,0000541,5173,2541,114,102,106,75,33,14,11,41,69,131,147,185,197,222,207,102,139,86,147,193,138,59,23,2632,105,99,92,61,25,14,8,48,102,118,177,171,175,224,272,86,147,95,149,191,151,68,54
uSF2,DE,001,01,0000542,3146,1510,99,113,95,75,24,11,15,37,78,93,104,113,109,97,91,60,53,34,42,73,53,30,11,1636,94,106,104,55,24,16,13,50,79,97,108,138,93,112,108,49,59,31,53,92,78,54,23
uSF2,DE,001,01,0000543,909,472,11,10,17,9,4,3,1,13,26,29,28,41,39,47,46,19,27,11,22,20,22,15,12,437,11,11,13,8,3,1,3,10,22,23,24,29,33,47,43,13,27,16,15,25,32,21,7
uSF2,DE,001,01,0000544,16314,7967,506,629,655,420,212,91,90,216,394,494,697,680,565,550,438,144,196,126,195,262,227,99,81,8347,482,628,649,354,173,82,95,234,464,498,699,699,597,599,417,195,211,141,213,360,258,172,127
uSF2,DE,001,01,0000545,320,152,8,16,16,6,5,0,3,3,9,11,10,13,8,7,11,2,4,2,3,4,7,0,4,168,9,12,14,6,6,2,3,4,6,11,16,11,16,13,9,3,3,3,9,3,7,2,0
uSF2,DE,001,01,0000546,320,152,8,16,16,6,5,0,3,3,9,11,10,13,8,7,11,2,4,2,3,4,7,0,4,168,9,12,14,6,6,2,3,4,6,11,16,11,16,13,9,3,3,3,9,3,7,2,0
uSF2,DE,001,01,0000547,3619,1765,129,139,143,87,43,18,18,67,99,133,149,144,126,102,82,24,36,23,36,55,51,27,34,1854,108,139,120,86,41,28,39,63,132,109,130,148,117,125,70,23,40,34,46,81,78,51,46
uSF2,DE,001,01,0000548,122,60,8,6,10,2,2,0,1,1,2,3,4,5,3,4,1,0,1,0,0,2,2,1,2,62,4,8,4,4,1,1,1,1,3,5,4,5,1,4,1,0,1,1,1,3,4,3,2
uSF2,DE,001,01,0000549,3497,1705,121,133,133,85,41,18,17,66,97,130,145,139,123,98,81,24,35,23,36,53,49,26,32,1792,104,131,116,82,40,27,38,62,129,104,126,143,116,121,69,23,39,33,45,78,74,48,44
uSF2,DE,001,01,0000550,198,93,3,1,0,1,0,1,0,1,0,2,4,10,7,10,16,7,8,7,4,4,5,1,1,105,0,1,2,0,1,0,0,0,3,5,4,6,10,6,19,6,10,7,4,7,3,8,3
uSF2,DE,001,01,0000551,198,93,3,1,0,1,0,1,0,1,0,2,4,10,7,10,16,7,8,7,4,4,5,1,1,105,0,1,2,0,1,0,0,0,3,5,4,6,10,6,19,6,10,7,4,7,3,8,3
uSF2,DE,001,01,0000552,12177,5957,366,473,496,326,164,72,69,145,286,348,534,513,424,431,329,111,148,94,152,199,164,71,42,6220,365,476,513,262,125,52,53,167,323,373,549,534,454,455,319,163,158,97,154,269,170,111,78
uSF2,DE,001,01,0000553,3139,1533,95,109,124,78,54,22,14,32,74,88,128,136,122,106,83,29,43,23,39,58,44,20,12,1606,92,102,133,58,31,13,9,47,81,81,134,146,116,137,92,39,45,21,37,83,44,35,30
uSF2,DE,001,01,0000554,4403,2143,136,192,200,121,47,27,28,51,88,138,195,193,143,145,114,36,57,34,51,56,53,25,13,2260,131,213,196,109,43,14,18,61,105,156,195,190,165,135,113,56,51,42,57,84,62,34,30
uSF2,DE,001,01,0000555,2153,1087,46,77,70,52,25,6,13,25,56,50,75,89,85,103,76,29,29,17,31,53,51,19,10,1066,57,56,63,42,24,3,4,20,59,60,83,80,88,115,62,38,30,17,28,59,41,27,10
uSF2,DE,001,01,0000556,2482,1194,89,95,102,75,38,17,14,37,68,72,136,95,74,77,56,17,19,20,31,32,16,7,7,1288,85,105,121,53,27,22,22,39,78,76,137,118,85,68,52,30,32,17,32,43,23,15,8
uSF2,DE,001,01,0000557,19165,9200,467,601,545,361,165,63,66,233,425,493,631,637,588,596,611,228,413,280,440,675,390,205,87,9965,485,523,584,320,182,77,87,231,470,547,736,707,653,677,685,312,490,282,484,624,423,238,148
uSF2,DE,001,01,0000558,1629,784,20,22,32,19,7,6,3,12,20,14,28,42,36,37,66,27,63,37,62,112,67,31,21,845,22,15,27,12,9,2,3,10,18,25,30,45,32,63,76,38,88,38,54,109,69,40,20
uSF2,DE,001,01,0000559,1629,784,20,22,32,19,7,6,3,12,20,14,28,42,36,37,66,27,63,37,62,112,67,31,21,845,22,15,27,12,9,2,3,10,18,25,30,45,32,63,76,38,88,38,54,109,69,40,20
uSF2,DE,001,01,0000560,2227,951,58,77,52,38,16,4,7,35,58,64,76,57,61,55,50,22,29,24,38,49,44,30,7,1276,95,75,82,29,15,7,11,51,80,66,87,84,76,70,80,25,33,25,52,89,70,32,42
uSF2,DE,001,01,0000561,2227,951,58,77,52,38,16,4,7,35,58,64,76,57,61,55,50,22,29,24,38,49,44,30,7,1276,95,75,82,29,15,7,11,51,80,66,87,84,76,70,80,25,33,25,52,89,70,32,42
uSF2,DE,001,01,0000562,15309,7465,389,502,461,304,142,53,56,186,347,415,527,538,491,504,495,179,321,219,340,514,279,144,59,7844,368,433,475,279,158,68,73,170,372,456,619,578,545,544,529,249,369,219,378,426,284,166,86
uSF2,DE,001,01,0000563,3443,1696,130,125,106,81,37,18,19,58,120,120,150,151,110,112,106,19,37,29,49,70,28,16,5,1747,110,117,127,66,44,19,23,66,102,135,170,132,161,111,101,39,44,32,41,49,25,21,12
uSF2,DE,001,01,0000564,1478,696,37,58,47,35,26,5,4,26,33,41,57,58,60,52,39,5,15,13,26,24,19,10,6,782,45,56,55,49,18,8,4,15,50,46,63,74,48,60,27,19,31,19,21,32,16,16,10
uSF2,DE,001,01,0000565,2758,1374,66,109,108,72,26,12,13,24,58,70,103,119,100,90,83,28,45,33,42,76,48,29,20,1384,71,82,93,52,34,10,18,24,61,80,123,132,99,83,86,33,53,29,55,66,52,33,15
uSF2,DE,001,01,0000566,7630,3699,156,210,200,116,53,18,20,78,136,184,217,210,221,250,267,127,224,144,223,344,184,89,28,3931,142,178,200,112,62,31,28,65,159,195,263,240,237,290,315,158,241,139,261,279,191,96,49
uSF2,DE,001,01,0000567,10585,5106,306,362,342,219,113,65,40,140,267,313,375,393,366,358,315,96,174,104,196,264,168,90,40,5479,341,319,342,188,102,46,37,153,306,323,402,458,394,379,325,138,186,128,194,288,208,126,96
uSF2,DE,001,01,0000568,1631,722,64,67,48,27,12,15,12,28,54,50,41,50,47,63,25,8,15,7,20,25,25,7,12,909,82,47,49,21,23,15,11,47,71,44,61,59,59,63,43,13,23,13,25,44,45,33,18
uSF2,DE,001,01,0000569,1280,548,55,56,37,21,10,9,11,26,43,40,30,34,36,36,18,6,13,6,8,20,19,5,9,732,77,37,38,15,17,14,9,42,62,37,45,46,45,43,34,11,16,10,18,37,37,27,15
uSF2,DE,001,01,0000570,324,158,7,10,10,5,0,6,1,2,11,9,9,15,10,27,7,2,1,1,12,5,3,2,3,166,5,9,11,6,5,1,2,4,8,5,16,13,14,19,9,2,6,3,7,5,7,6,3
uSF2,DE,001,01,0000571,8954,4384,242,295,294,192,101,50,28,112,213,263,334,343,319,295,290,88,159,97,176,239,143,83,28,4570,259,272,293,167,79,31,26,106,235,279,341,399,335,316,282,125,163,115,169,244,163,93,78
uSF2,DE,001,01,0000572,1331,672,49,59,52,25,14,4,7,21,36,40,63,59,44,42,35,10,18,10,29,24,21,8,2,659,38,38,52,24,14,5,2,19,40,46,60,54,50,35,39,17,32,12,18,29,19,8,8
uSF2,DE,001,01,0000573,3003,1468,75,110,112,69,41,21,9,38,90,88,117,117,123,93,98,30,46,25,49,51,39,19,8,1535,87,111,111,66,26,11,10,40,77,106,113,154,116,104,91,37,41,24,45,63,45,29,28
uSF2,DE,001,01,0000574,4620,2244,118,126,130,98,46,25,12,53,87,135,154,167,152,160,157,48,95,62,98,164,83,56,18,2376,134,123,130,77,39,15,14,47,118,127,168,191,169,177,152,71,90,79,106,152,99,56,42
uSF2,DE,001,01,0000575,21949,10518,774,910,922,528,283,132,120,311,568,664,790,828,758,699,550,190,247,144,217,339,276,184,84,11431,729,789,890,491,313,136,128,353,626,799,925,904,840,732,579,225,245,166,286,441,380,286,168
uSF2,DE,001,01,0000576,952,449,35,47,42,20,13,7,4,15,32,51,32,44,27,21,18,6,14,3,4,10,3,1,0,503,31,37,45,22,23,8,6,12,32,37,51,43,35,36,22,6,11,5,9,16,2,9,5
uSF2,DE,001,01,0000577,952,449,35,47,42,20,13,7,4,15,32,51,32,44,27,21,18,6,14,3,4,10,3,1,0,503,31,37,45,22,23,8,6,12,32,37,51,43,35,36,22,6,11,5,9,16,2,9,5
uSF2,DE,001,01,0000578,6194,2782,268,250,224,125,82,34,36,109,183,156,215,174,153,179,93,41,57,44,57,100,91,68,43,3412,253,217,234,116,107,51,55,148,203,233,220,197,243,171,134,70,82,51,95,162,150,142,78
uSF2,DE,001,01,0000579,553,201,44,31,34,11,8,3,3,4,9,10,16,6,6,3,1,0,0,0,5,6,1,0,0,352,45,38,33,9,13,13,8,21,19,44,31,9,26,6,9,1,0,3,5,11,4,1,3
uSF2,DE,001,01,0000580,5641,2581,224,219,190,114,74,31,33,105,174,146,199,168,147,176,92,41,57,44,52,94,90,68,43,3060,208,179,201,107,94,38,47,127,184,189,189,188,217,165,125,69,82,48,90,151,146,141,75
uSF2,DE,001,01,0000581,14803,7287,471,613,656,383,188,91,80,187,353,457,543,610,578,499,439,143,176,97,156,229,182,115,41,7516,445,535,611,353,183,77,67,193,391,529,654,664,562,525,423,149,152,110,182,263,228,135,85
uSF2,DE,001,01,0000582,2788,1434,86,126,113,66,27,14,13,35,59,96,118,121,122,104,98,31,38,18,33,55,33,18,10,1354,71,98,88,46,28,12,12,32,65,110,128,118,96,110,95,28,27,23,42,40,44,25,16
uSF2,DE,001,01,0000583,1901,929,48,76,90,47,21,13,11,24,31,52,54,72,81,76,53,19,21,22,22,33,39,18,6,972,44,56,87,46,21,6,5,19,44,62,79,94,72,59,55,21,34,13,24,45,42,24,20
uSF2,DE,001,01,0000584,2015,961,74,76,74,39,32,16,10,24,66,80,59,75,70,80,55,15,10,10,17,36,19,13,11,1054,71,66,96,57,36,16,14,39,55,82,82,79,72,81,44,10,17,17,26,43,25,17,9
uSF2,DE,001,01,0000585,8099,3963,263,335,379,231,108,48,46,104,197,229,312,342,305,239,233,78,107,47,84,105,91,66,14,4136,259,315,340,204,98,43,36,103,227,275,365,373,322,275,229,90,74,57,90,135,117,69,40
uSF2,DE,001,01,0000586,24245,11882,558,616,706,417,200,80,90,295,501,588,785,811,788,829,870,394,605,392,663,879,478,245,92,12363,506,608,635,343,175,100,78,242,494,651,773,824,855,909,1054,454,661,425,647,846,588,291,204
uSF2,DE,001,01,0000587,903,426,6,9,19,11,4,1,1,9,10,15,9,33,28,28,37,10,24,17,40,58,27,22,8,477,8,19,12,9,3,2,3,8,11,16,15,32,30,33,43,19,32,25,35,55,41,14,12
uSF2,DE,001,01,0000588,903,426,6,9,19,11,4,1,1,9,10,15,9,33,28,28,37,10,24,17,40,58,27,22,8,477,8,19,12,9,3,2,3,8,11,16,15,32,30,33,43,19,32,25,35,55,41,14,12
uSF2,DE,001,01,0000589,519,244,20,13,13,13,3,1,3,16,15,22,20,14,16,20,16,4,9,6,2,11,2,5,0,275,13,11,19,13,4,4,1,7,22,20,17,20,12,34,15,3,6,3,9,13,13,12,4
uSF2,DE,001,01,0000590,519,244,20,13,13,13,3,1,3,16,15,22,20,14,16,20,16,4,9,6,2,11,2,5,0,275,13,11,19,13,4,4,1,7,22,20,17,20,12,34,15,3,6,3,9,13,13,12,4
uSF2,DE,001,01,0000591,342,161,1,2,7,2,1,0,0,0,6,3,4,6,13,13,19,5,17,7,10,22,15,6,2,181,3,3,1,2,1,4,1,2,3,4,6,6,11,16,24,10,11,5,16,24,13,12,3
uSF2,DE,001,01,0000592,342,161,1,2,7,2,1,0,0,0,6,3,4,6,13,13,19,5,17,7,10,22,15,6,2,181,3,3,1,2,1,4,1,2,3,4,6,6,11,16,24,10,11,5,16,24,13,12,3
uSF2,DE,001,01,0000593,714,336,28,29,31,22,10,6,8,12,29,17,21,16,20,21,19,3,6,3,6,21,3,4,1,378,29,39,39,15,7,5,5,15,22,24,24,28,22,15,18,8,6,4,8,15,14,12,4
uSF2,DE,001,01,0000594,714,336,28,29,31,22,10,6,8,12,29,17,21,16,20,21,19,3,6,3,6,21,3,4,1,378,29,39,39,15,7,5,5,15,22,24,24,28,22,15,18,8,6,4,8,15,14,12,4
uSF2,DE,001,01,0000595,259,129,10,4,7,2,6,1,2,2,13,9,12,9,7,10,6,5,3,2,4,7,8,0,0,130,8,9,3,5,3,1,2,2,8,9,7,11,9,8,11,3,3,3,1,11,8,2,3
uSF2,DE,001,01,0000596,249,122,9,3,7,2,6,1,2,2,12,9,10,8,7,10,6,4,3,2,4,7,8,0,0,127,8,9,3,5,3,1,2,2,8,8,6,11,9,8,11,3,3,3,1,10,8,2,3
uSF2,DE,001,01,0000597,1006,481,29,21,31,12,10,4,3,14,13,24,34,28,33,22,35,13,31,19,28,34,28,11,4,525,17,24,19,8,6,1,2,11,20,23,42,32,39,27,55,18,26,23,38,44,23,14,13
uSF2,DE,001,01,0000598,1006,481,29,21,31,12,10,4,3,14,13,24,34,28,33,22,35,13,31,19,28,34,28,11,4,525,17,24,19,8,6,1,2,11,20,23,42,32,39,27,55,18,26,23,38,44,23,14,13
uSF2,DE,001,01,0000599,1645,839,77,62,58,33,16,14,4,39,67,57,56,70,45,48,43,15,15,22,24,23,26,13,12,806,52,48,49,21,18,6,5,25,60,59,59,44,56,46,40,24,25,16,29,36,32,33,23
uSF2,DE,001,01,0000600,1645,839,77,62,58,33,16,14,4,39,67,57,56,70,45,48,43,15,15,22,24,23,26,13,12,806,52,48,49,21,18,6,5,25,60,59,59,44,56,46,40,24,25,16,29,36,32,33,23
uSF2,DE,001,01,0000601,492,240,2,3,3,4,2,1,0,2,5,6,11,16,14,16,30,14,23,17,20,27,13,9,2,252,3,14,10,4,1,2,1,1,3,7,8,13,20,16,30,12,22,13,25,18,12,12,5
uSF2,DE,001,01,0000602,492,240,2,3,3,4,2,1,0,2,5,6,11,16,14,16,30,14,23,17,20,27,13,9,2,252,3,14,10,4,1,2,1,1,3,7,8,13,20,16,30,12,22,13,25,18,12,12,5
uSF2,DE,001,01,0000603,18365,9026,385,473,537,318,148,52,69,201,343,435,618,619,612,651,665,325,477,299,529,676,356,175,63,9339,373,441,483,266,132,75,58,171,345,489,595,638,656,714,818,357,530,333,486,630,432,180,137
uSF2,DE,001,01,0000604,2430,1191,30,44,45,19,9,5,3,13,33,46,54,70,72,99,118,72,94,60,97,113,61,27,7,1239,32,35,51,18,6,5,8,13,24,44,57,67,87,121,151,78,81,55,87,95,72,29,23
uSF2,DE,001,01,0000605,3875,1867,73,79,105,54,27,6,12,29,56,88,128,118,117,136,144,78,112,73,128,152,95,39,18,2008,90,90,95,47,30,14,10,24,72,79,115,136,136,158,212,88,120,82,105,152,103,28,22
uSF2,DE,001,01,0000606,2455,1224,63,70,93,61,21,6,16,35,50,70,92,93,132,84,71,26,46,30,44,65,34,17,5,1231,65,75,78,48,26,13,8,25,56,80,96,96,93,85,71,25,49,24,59,63,56,17,23
uSF2,DE,001,01,0000607,1531,751,42,36,35,23,8,3,5,23,40,28,64,50,40,68,53,26,39,28,41,54,24,14,7,780,28,33,32,25,12,1,2,23,35,33,48,52,66,58,72,36,43,34,45,40,35,21,6
uSF2,DE,001,01,0000608,3822,1896,61,70,72,45,27,7,10,37,65,93,120,126,100,133,146,76,120,72,155,208,99,43,11,1926,55,61,72,24,13,13,9,25,63,97,98,107,122,161,166,73,165,99,136,191,92,50,34
uSF2,DE,001,01,0000609,1307,641,44,69,83,41,16,6,3,20,28,28,45,49,44,39,33,15,12,6,14,17,16,5,8,666,36,58,60,29,14,8,5,22,35,64,59,52,46,39,30,12,19,8,11,29,15,7,8
uSF2,DE,001,01,0000610,2945,1456,72,105,104,75,40,19,20,44,71,82,115,113,107,92,100,32,54,30,50,67,27,30,7,1489,67,89,95,75,31,21,16,39,60,92,122,128,106,92,116,45,53,31,43,60,59,28,21
uSF2,DE,001,01,0000611,3261,1593,103,115,134,80,56,22,15,33,76,91,132,141,125,110,84,29,44,23,39,60,46,21,14,1668,96,110,137,62,32,14,10,48,84,86,138,151,117,141,93,39,46,22,38,86,48,38,32
uSF2,DE,001,01,0000612,7900,3848,257,325,333,206,88,45,45,117,185,268,340,332,266,243,195,60,92,57,87,109,102,51,45,4052,235,344,312,191,83,41,56,123,234,260,321,333,281,256,182,79,90,75,102,162,136,82,74
uSF2,DE,001,01,0000613,2351,1180,49,78,70,53,25,7,13,26,56,52,79,99,92,113,92,36,37,24,35,57,56,20,11,1171,57,57,65,42,25,3,4,20,62,65,87,86,98,121,81,44,40,24,32,66,44,35,13
uSF2,DE,001,01,0000614,2802,1346,97,111,118,81,43,17,17,40,77,83,146,108,82,84,67,19,23,22,34,36,23,7,11,1456,94,117,135,59,33,24,25,43,84,87,153,129,101,81,61,33,35,20,41,46,30,17,8
uSF2,DE,001,01,0000615,5587,2691,233,239,198,108,68,34,21,98,161,189,214,220,170,153,152,43,46,53,67,94,69,36,25,2896,212,225,241,130,73,33,32,107,177,213,226,170,176,169,135,55,63,55,69,125,89,66,55
uSF2,DE,001,01,0000616,3801,1864,151,156,169,80,50,17,17,61,118,145,162,131,133,127,87,42,48,19,36,47,35,21,12,1937,124,165,169,94,44,24,19,70,122,144,170,159,130,123,100,28,45,26,41,58,39,20,23
uSF2,DE,001,01,0000617,3341,1635,130,157,147,77,35,17,16,39,68,106,134,127,128,107,99,31,38,18,38,61,34,18,10,1706,116,136,121,55,41,25,20,53,84,154,159,127,122,116,104,29,27,26,47,51,48,26,19
uSF2,DE,001,01,0000618,7542,3510,272,295,280,161,95,44,44,129,205,198,253,240,228,252,145,60,78,66,74,127,129,86,49,4032,252,235,288,153,115,44,52,146,228,251,268,282,289,224,180,90,116,61,114,196,188,165,95
uSF2,DE,001,01,0000619,2967,1410,109,123,116,59,45,23,14,39,98,131,91,119,97,101,73,21,24,13,21,46,22,14,11,1557,102,103,141,79,59,24,20,51,87,119,133,122,107,117,66,16,28,22,35,59,27,26,14
uSF2,DE,001,01,0000620,8099,3963,263,335,379,231,108,48,46,104,197,229,312,342,305,239,233,78,107,47,84,105,91,66,14,4136,259,315,340,204,98,43,36,103,227,275,365,373,322,275,229,90,74,57,90,135,117,69,40
uSF2,DE,001,01,0000621,2858,1412,77,102,106,66,32,16,15,51,78,97,102,134,112,99,93,28,37,24,34,50,27,24,8,1446,74,100,89,75,48,18,12,39,72,92,127,109,127,94,83,33,40,29,37,55,38,26,29
uSF2,DE,001,01,0000622,7195,3744,287,289,240,198,149,84,64,237,366,310,272,240,224,178,146,47,68,43,66,89,78,47,22,3451,309,277,227,127,118,43,41,166,270,248,248,245,198,196,147,54,59,54,76,126,110,69,43
uSF2,DE,001,01,0000623,3443,1696,130,125,106,81,37,18,19,58,120,120,150,151,110,112,106,19,37,29,49,70,28,16,5,1747,110,117,127,66,44,19,23,66,102,135,170,132,161,111,101,39,44,32,41,49,25,21,12
uSF2,DE,001,01,0000624,3705,1647,95,135,99,73,42,9,11,61,91,105,133,115,121,107,89,27,44,37,64,73,63,40,13,2058,140,131,137,78,33,15,15,66,130,112,150,158,124,130,107,44,64,44,73,121,86,48,52
uSF2,DE,001,01,0000625,2758,1374,66,109,108,72,26,12,13,24,58,70,103,119,100,90,83,28,45,33,42,76,48,29,20,1384,71,82,93,52,34,10,18,24,61,80,123,132,99,83,86,33,53,29,55,66,52,33,15
uSF2,DE,001,01,0000626,2758,1374,66,109,108,72,26,12,13,24,58,70,103,119,100,90,83,28,45,33,42,76,48,29,20,1384,71,82,93,52,34,10,18,24,61,80,123,132,99,83,86,33,53,29,55,66,52,33,15
uSF2,DE,001,01,0000627,9259,4483,176,232,232,135,60,24,23,90,156,198,245,252,257,287,333,154,287,181,285,456,251,120,49,4776,164,193,227,124,71,33,31,75,177,220,293,285,269,353,391,196,329,177,315,388,260,136,69
uSF2,DE,001,01,0000628,9259,4483,176,232,232,135,60,24,23,90,156,198,245,252,257,287,333,154,287,181,285,456,251,120,49,4776,164,193,227,124,71,33,31,75,177,220,293,285,269,353,391,196,329,177,315,388,260,136,69
uSF2,DE,001,01,0000629,2611,1220,104,115,89,46,24,13,18,47,79,80,93,93,80,78,53,16,31,16,37,44,40,13,11,1391,115,75,90,39,31,19,11,61,102,83,105,100,95,78,73,28,48,22,36,66,56,35,23
uSF2,DE,001,01,0000630,3327,1626,82,120,122,74,41,27,10,40,101,97,126,132,133,120,105,32,47,26,61,56,42,21,11,1701,92,120,122,72,31,12,12,44,85,111,129,167,130,123,100,39,47,27,52,68,52,35,31
uSF2,DE,001,01,0000631,1874,901,40,69,84,40,24,14,4,22,50,50,80,73,82,58,55,11,23,13,33,33,23,15,5,973,60,72,77,43,16,7,8,26,46,70,77,99,68,67,56,22,23,17,31,35,29,14,10
uSF2,DE,001,01,0000632,4647,2260,120,127,131,99,48,25,12,53,87,136,156,168,153,160,157,48,96,62,98,164,86,56,18,2387,134,124,130,77,40,15,14,48,119,129,168,191,169,178,152,71,91,79,106,154,100,56,42
uSF2,DE,001,01,0000633,4841,2222,79,86,119,82,32,9,13,30,87,94,140,155,202,177,181,75,107,67,104,171,117,64,31,2619,81,95,108,88,33,8,11,51,109,98,159,184,205,202,221,89,116,92,122,203,168,114,62
uSF2,DE,001,01,0000634,5236,2513,131,131,166,96,41,24,13,37,66,141,191,174,150,161,139,55,122,76,164,210,129,72,24,2723,125,135,123,66,39,14,20,47,103,140,189,214,175,197,185,75,164,92,146,204,153,68,49
uSF2,DE,001,01,0000635,3023,1499,76,80,114,56,27,18,7,21,36,71,108,111,98,104,86,37,69,47,97,119,68,35,14,1524,64,71,84,47,26,7,11,27,44,82,109,128,105,121,92,45,103,45,86,110,67,31,19
uSF2,DE,001,01,0000636,5173,2541,114,102,106,75,33,14,11,41,69,131,147,185,197,222,207,102,139,86,147,193,138,59,23,2632,105,99,92,61,25,14,8,48,102,118,177,171,175,224,272,86,147,95,149,191,151,68,54
uSF2,DE,001,01,0000637,5173,2541,114,102,106,75,33,14,11,41,69,131,147,185,197,222,207,102,139,86,147,193,138,59,23,2632,105,99,92,61,25,14,8,48,102,118,177,171,175,224,272,86,147,95,149,191,151,68,54
uSF2,DE,001,01,0000638,3146,1510,99,113,95,75,24,11,15,37,78,93,104,113,109,97,91,60,53,34,42,73,53,30,11,1636,94,106,104,55,24,16,13,50,79,97,108,138,93,112,108,49,59,31,53,92,78,54,23
uSF2,DE,001,01,0000639,2797,1391,34,26,43,22,11,6,7,34,68,71,88,99,141,128,122,45,65,43,62,90,98,51,37,1406,30,21,33,26,8,5,9,34,55,64,62,76,104,127,129,42,83,48,58,120,119,97,56
uSF2,DE,001,01,0000640,592,308,6,6,12,5,3,3,1,10,17,23,19,24,25,30,33,12,18,8,16,11,13,7,6,284,6,8,8,7,2,1,3,6,16,16,14,21,21,34,28,6,19,12,10,10,17,15,4
uSF2,DE,001,01,0000641,4167,2018,39,58,74,36,16,7,4,24,54,70,78,125,127,156,204,101,158,101,167,220,116,64,19,2149,46,71,74,33,11,13,13,24,41,71,86,118,148,186,248,119,146,98,163,192,138,67,43
uSF2,DE,001,01,0000642,3885,1874,74,80,105,54,27,6,12,29,57,88,130,119,117,136,144,79,112,73,128,152,95,39,18,2011,90,90,95,47,30,14,10,24,72,80,116,136,136,158,212,88,120,82,105,153,103,28,22
uSF2,DE,001,01,0000643,2455,1224,63,70,93,61,21,6,16,35,50,70,92,93,132,84,71,26,46,30,44,65,34,17,5,1231,65,75,78,48,26,13,8,25,56,80,96,96,93,85,71,25,49,24,59,63,56,17,23
uSF2,DE,001,01,0000644,2786,1354,80,60,73,37,24,8,10,39,65,61,108,86,80,100,94,43,73,49,73,95,60,25,11,1432,53,66,54,38,21,3,6,36,63,64,96,95,114,93,138,57,72,60,84,94,66,37,22
uSF2,DE,001,01,0000645,3822,1896,61,70,72,45,27,7,10,37,65,93,120,126,100,133,146,76,120,72,155,208,99,43,11,1926,55,61,72,24,13,13,9,25,63,97,98,107,122,161,166,73,165,99,136,191,92,50,34
uSF2,DE,001,01,0000646,2952,1480,121,131,141,74,32,20,7,59,95,85,101,119,89,87,76,30,27,28,38,40,42,18,20,1472,88,106,109,50,32,14,10,47,95,123,118,96,102,85,70,36,44,24,40,65,47,40,31
uSF2,DE,001,01,0000647,4178,2036,120,147,148,110,53,26,31,72,115,121,156,143,143,133,135,39,69,39,58,99,32,39,8,2142,109,139,153,103,42,30,22,61,104,136,163,176,140,141,149,56,65,38,60,88,86,52,29
uSF2,DE,001,01,0000648,3434,1712,117,124,118,88,44,19,22,44,104,108,141,172,134,118,83,31,50,29,47,53,44,14,8,1722,116,125,146,72,41,15,8,49,107,148,139,142,128,92,92,33,49,39,40,60,38,23,20
uSF2,DE,001,01,0000649,4830,2365,117,159,186,113,66,12,22,68,134,179,197,224,198,153,152,52,56,49,45,83,64,24,12,2465,151,177,184,107,57,36,28,65,141,164,236,199,174,160,150,53,57,37,69,88,65,36,31
uSF2,DE,001,01,0000650,4151,1966,182,168,153,76,46,30,22,65,124,141,139,162,124,126,104,27,56,22,49,63,43,29,15,2185,165,132,153,63,84,45,36,84,132,143,179,162,133,126,109,48,61,35,50,102,62,48,33
uSF2,DE,001,01,0000651,3991,1891,180,152,154,111,50,23,24,64,121,116,138,133,129,101,81,26,34,40,52,66,46,37,13,2100,157,148,154,94,58,25,22,71,139,130,156,144,141,106,105,38,37,43,68,88,82,62,32
uSF2,DE,001,01,0000652,3901,1875,152,163,157,83,42,18,27,46,98,120,155,149,131,125,112,33,46,33,47,51,39,36,12,2026,140,145,128,102,53,21,10,51,129,137,151,166,149,135,123,33,48,27,39,82,69,56,32
uSF2,DE,001,01,0000653,474,232,11,11,17,10,3,1,1,4,5,13,11,21,31,28,13,3,6,3,8,14,8,8,2,242,4,16,10,7,2,1,1,2,9,16,12,27,27,26,18,11,7,6,6,4,13,5,12
uSF2,DE,001,01,0000654,474,232,11,11,17,10,3,1,1,4,5,13,11,21,31,28,13,3,6,3,8,14,8,8,2,242,4,16,10,7,2,1,1,2,9,16,12,27,27,26,18,11,7,6,6,4,13,5,12
uSF2,DE,001,01,0000655,474,232,11,11,17,10,3,1,1,4,5,13,11,21,31,28,13,3,6,3,8,14,8,8,2,242,4,16,10,7,2,1,1,2,9,16,12,27,27,26,18,11,7,6,6,4,13,5,12
uSF2,DE,001,01,0000656,267,128,5,7,7,3,2,1,1,3,7,12,4,10,11,15,12,4,4,3,6,4,3,3,1,139,7,11,7,4,3,0,1,3,12,8,7,11,17,10,16,7,0,2,1,6,4,1,1
uSF2,DE,001,01,0000657,267,128,5,7,7,3,2,1,1,3,7,12,4,10,11,15,12,4,4,3,6,4,3,3,1,139,7,11,7,4,3,0,1,3,12,8,7,11,17,10,16,7,0,2,1,6,4,1,1
uSF2,DE,001,01,0000658,267,128,5,7,7,3,2,1,1,3,7,12,4,10,11,15,12,4,4,3,6,4,3,3,1,139,7,11,7,4,3,0,1,3,12,8,7,11,17,10,16,7,0,2,1,6,4,1,1
uSF2,DE,001,01,0000659,283,132,4,4,11,7,3,0,0,1,7,7,13,9,9,16,9,6,4,3,8,5,4,1,1,151,4,6,6,3,1,1,0,1,10,11,9,10,23,14,17,1,4,1,5,7,8,4,5
uSF2,DE,001,01,0000660,283,132,4,4,11,7,3,0,0,1,7,7,13,9,9,16,9,6,4,3,8,5,4,1,1,151,4,6,6,3,1,1,0,1,10,11,9,10,23,14,17,1,4,1,5,7,8,4,5
uSF2,DE,001,01,0000661,277,129,4,4,11,7,3,0,0,1,7,6,13,9,8,16,9,6,3,3,8,5,4,1,1,148,3,6,6,3,1,1,0,1,10,11,9,9,23,14,16,1,4,1,5,7,8,4,5
uSF2,DE,001,01,0000662,17584,8577,814,948,789,421,236,108,90,302,668,859,867,702,526,444,304,75,96,61,78,101,55,24,9,9007,834,828,768,399,214,128,102,311,689,961,928,781,649,504,301,104,110,41,87,128,75,40,25
uSF2,DE,001,01,0000663,17584,8577,814,948,789,421,236,108,90,302,668,859,867,702,526,444,304,75,96,61,78,101,55,24,9,9007,834,828,768,399,214,128,102,311,689,961,928,781,649,504,301,104,110,41,87,128,75,40,25
uSF2,DE,001,01,0000664,3827,1827,168,169,132,83,40,29,21,87,192,201,196,156,107,96,60,11,21,12,9,22,9,4,2,2000,176,162,149,70,47,40,29,99,166,204,204,195,139,131,56,31,17,7,19,38,12,5,4
uSF2,DE,001,01,0000665,6834,3365,355,430,373,185,89,36,33,134,286,345,324,246,166,132,91,27,28,14,26,24,14,5,2,3469,344,365,320,188,90,54,43,114,286,404,349,279,230,152,96,30,34,9,22,26,20,6,8
uSF2,DE,001,01,0000666,4051,1963,158,194,166,84,54,26,28,54,109,142,184,192,159,121,86,28,35,30,34,43,24,9,3,2088,139,169,170,89,51,19,20,75,120,177,204,191,172,129,105,36,46,19,37,51,37,22,10
uSF2,DE,001,01,0000667,2832,1406,132,155,118,68,52,17,8,27,81,171,163,106,92,91,65,8,11,5,8,12,8,6,2,1426,172,129,129,50,26,15,10,23,116,176,165,116,108,89,42,6,12,6,9,13,5,6,3
uSF2,DE,001,01,0000668,1249,604,33,47,46,25,10,7,2,12,47,50,65,54,50,32,28,5,13,9,11,17,23,11,7,645,44,37,41,20,7,6,4,15,48,46,65,62,62,33,22,2,16,7,14,25,30,20,19
uSF2,DE,001,01,0000669,1249,604,33,47,46,25,10,7,2,12,47,50,65,54,50,32,28,5,13,9,11,17,23,11,7,645,44,37,41,20,7,6,4,15,48,46,65,62,62,33,22,2,16,7,14,25,30,20,19
uSF2,DE,001,01,0000670,1249,604,33,47,46,25,10,7,2,12,47,50,65,54,50,32,28,5,13,9,11,17,23,11,7,645,44,37,41,20,7,6,4,15,48,46,65,62,62,33,22,2,16,7,14,25,30,20,19
uSF2,DE,001,01,0000671,903,426,6,9,19,11,4,1,1,9,10,15,9,33,28,28,37,10,24,17,40,58,27,22,8,477,8,19,12,9,3,2,3,8,11,16,15,32,30,33,43,19,32,25,35,55,41,14,12
uSF2,DE,001,01,0000672,903,426,6,9,19,11,4,1,1,9,10,15,9,33,28,28,37,10,24,17,40,58,27,22,8,477,8,19,12,9,3,2,3,8,11,16,15,32,30,33,43,19,32,25,35,55,41,14,12
uSF2,DE,001,01,0000673,903,426,6,9,19,11,4,1,1,9,10,15,9,33,28,28,37,10,24,17,40,58,27,22,8,477,8,19,12,9,3,2,3,8,11,16,15,32,30,33,43,19,32,25,35,55,41,14,12
uSF2,DE,001,01,0000674,184,87,7,6,6,1,2,0,1,2,4,6,4,10,5,12,7,0,2,0,4,3,3,2,0,97,3,6,7,2,3,3,0,3,4,4,5,7,11,10,4,1,1,0,2,6,2,6,7
uSF2,DE,001,01,0000675,184,87,7,6,6,1,2,0,1,2,4,6,4,10,5,12,7,0,2,0,4,3,3,2,0,97,3,6,7,2,3,3,0,3,4,4,5,7,11,10,4,1,1,0,2,6,2,6,7
uSF2,DE,001,01,0000676,184,87,7,6,6,1,2,0,1,2,4,6,4,10,5,12,7,0,2,0,4,3,3,2,0,97,3,6,7,2,3,3,0,3,4,4,5,7,11,10,4,1,1,0,2,6,2,6,7
uSF2,DE,001,01,0000677,952,449,35,47,42,20,13,7,4,15,32,51,32,44,27,21,18,6,14,3,4,10,3,1,0,503,31,37,45,22,23,8,6,12,32,37,51,43,35,36,22,6,11,5,9,16,2,9,5
uSF2,DE,001,01,0000678,952,449,35,47,42,20,13,7,4,15,32,51,32,44,27,21,18,6,14,3,4,10,3,1,0,503,31,37,45,22,23,8,6,12,32,37,51,43,35,36,22,6,11,5,9,16,2,9,5
uSF2,DE,001,01,0000679,952,449,35,47,42,20,13,7,4,15,32,51,32,44,27,21,18,6,14,3,4,10,3,1,0,503,31,37,45,22,23,8,6,12,32,37,51,43,35,36,22,6,11,5,9,16,2,9,5
uSF2,DE,001,01,0000680,305,150,6,9,17,4,2,0,3,7,9,12,11,17,9,10,7,1,4,5,6,4,4,2,1,155,6,7,11,3,2,2,1,6,8,21,10,9,5,14,8,8,5,3,5,3,6,9,3
uSF2,DE,001,01,0000681,305,150,6,9,17,4,2,0,3,7,9,12,11,17,9,10,7,1,4,5,6,4,4,2,1,155,6,7,11,3,2,2,1,6,8,21,10,9,5,14,8,8,5,3,5,3,6,9,3
uSF2,DE,001,01,0000682,305,150,6,9,17,4,2,0,3,7,9,12,11,17,9,10,7,1,4,5,6,4,4,2,1,155,6,7,11,3,2,2,1,6,8,21,10,9,5,14,8,8,5,3,5,3,6,9,3
uSF2,DE,001,01,0000683,1434,681,80,62,39,29,18,10,6,20,48,56,46,45,34,41,40,7,11,14,19,31,15,5,5,753,68,67,43,24,22,7,9,35,56,56,54,27,39,53,26,11,16,17,21,34,24,27,17
uSF2,DE,001,01,0000684,1434,681,80,62,39,29,18,10,6,20,48,56,46,45,34,41,40,7,11,14,19,31,15,5,5,753,68,67,43,24,22,7,9,35,56,56,54,27,39,53,26,11,16,17,21,34,24,27,17
uSF2,DE,001,01,0000685,1434,681,80,62,39,29,18,10,6,20,48,56,46,45,34,41,40,7,11,14,19,31,15,5,5,753,68,67,43,24,22,7,9,35,56,56,54,27,39,53,26,11,16,17,21,34,24,27,17
uSF2,DE,001,01,0000686,14673,7226,540,596,581,336,207,102,100,314,603,576,661,620,459,446,305,95,124,65,126,164,135,48,23,7447,540,539,495,310,176,102,94,321,595,564,657,636,512,524,335,84,144,102,147,224,188,105,53
uSF2,DE,001,01,0000687,14673,7226,540,596,581,336,207,102,100,314,603,576,661,620,459,446,305,95,124,65,126,164,135,48,23,7447,540,539,495,310,176,102,94,321,595,564,657,636,512,524,335,84,144,102,147,224,188,105,53
uSF2,DE,001,01,0000688,4881,2360,193,234,215,119,69,36,29,72,182,160,214,198,136,133,97,30,46,33,43,53,47,16,5,2521,194,202,175,91,60,43,41,115,200,180,224,204,157,170,116,23,53,33,61,72,64,24,19
uSF2,DE,001,01,0000689,4151,2124,140,153,146,92,66,30,39,108,206,154,190,192,155,112,79,23,42,17,42,54,51,22,11,2027,133,143,119,91,45,29,27,93,140,158,137,181,143,142,89,33,42,35,38,95,66,37,11
uSF2,DE,001,01,0000690,5641,2742,207,209,220,125,72,36,32,134,215,262,257,230,168,201,129,42,36,15,41,57,37,10,7,2899,213,194,201,128,71,30,26,113,255,226,296,251,212,212,130,28,49,34,48,57,58,44,23
uSF2,DE,001,01,0000691,2100,1000,60,88,94,62,35,10,7,30,66,64,82,95,57,63,49,16,21,15,23,31,17,10,5,1100,55,66,89,54,29,15,12,53,73,68,87,109,81,74,41,21,30,24,30,34,22,16,17
uSF2,DE,001,01,0000692,2100,1000,60,88,94,62,35,10,7,30,66,64,82,95,57,63,49,16,21,15,23,31,17,10,5,1100,55,66,89,54,29,15,12,53,73,68,87,109,81,74,41,21,30,24,30,34,22,16,17
uSF2,DE,001,01,0000693,2100,1000,60,88,94,62,35,10,7,30,66,64,82,95,57,63,49,16,21,15,23,31,17,10,5,1100,55,66,89,54,29,15,12,53,73,68,87,109,81,74,41,21,30,24,30,34,22,16,17
uSF2,DE,001,01,0000694,313,163,15,16,14,8,5,2,3,10,14,12,15,9,11,4,5,1,3,4,5,2,4,1,0,150,11,8,14,10,2,1,6,3,11,14,11,15,10,9,3,2,1,3,6,4,2,2,2
uSF2,DE,001,01,0000695,313,163,15,16,14,8,5,2,3,10,14,12,15,9,11,4,5,1,3,4,5,2,4,1,0,150,11,8,14,10,2,1,6,3,11,14,11,15,10,9,3,2,1,3,6,4,2,2,2
uSF2,DE,001,01,0000696,313,163,15,16,14,8,5,2,3,10,14,12,15,9,11,4,5,1,3,4,5,2,4,1,0,150,11,8,14,10,2,1,6,3,11,14,11,15,10,9,3,2,1,3,6,4,2,2,2
uSF2,DE,001,01,0000697,9185,4342,327,343,344,192,103,47,69,155,318,356,412,412,276,237,172,58,94,54,72,133,94,44,30,4843,337,338,353,191,113,60,58,177,348,425,423,435,289,275,193,57,93,70,100,159,158,96,95
uSF2,DE,001,01,0000698,9185,4342,327,343,344,192,103,47,69,155,318,356,412,412,276,237,172,58,94,54,72,133,94,44,30,4843,337,338,353,191,113,60,58,177,348,425,423,435,289,275,193,57,93,70,100,159,158,96,95
uSF2,DE,001,01,0000699,871,441,34,45,42,22,14,5,9,16,27,36,43,33,41,19,16,3,9,6,3,4,8,3,3,430,38,37,46,20,9,7,3,13,34,45,39,42,27,17,10,7,5,7,7,5,7,4,1
uSF2,DE,001,01,0000700,2568,1187,83,73,88,46,26,9,19,42,110,120,118,122,88,60,48,7,25,10,16,32,22,10,13,1381,74,87,83,49,25,12,16,65,142,124,123,108,94,89,53,13,14,18,31,38,40,29,54
uSF2,DE,001,01,0000701,4094,1914,174,165,155,84,42,28,31,79,147,143,168,173,91,100,74,30,37,24,30,64,45,21,9,2180,174,162,167,85,65,37,34,82,128,196,186,203,114,108,77,25,44,23,46,81,74,40,29
uSF2,DE,001,01,0000702,1652,800,36,60,59,40,21,5,10,18,34,57,83,84,56,58,34,18,23,14,23,33,19,10,5,852,51,52,57,37,14,4,5,17,44,60,75,82,54,61,53,12,30,22,16,35,37,23,11
uSF2,DE,001,01,0000703,1273,600,46,51,70,18,15,3,10,20,30,51,54,54,46,34,14,5,9,8,7,21,16,9,9,673,32,43,54,32,13,8,7,17,44,49,56,59,49,47,26,14,15,6,12,39,12,21,18
uSF2,DE,001,01,0000704,1273,600,46,51,70,18,15,3,10,20,30,51,54,54,46,34,14,5,9,8,7,21,16,9,9,673,32,43,54,32,13,8,7,17,44,49,56,59,49,47,26,14,15,6,12,39,12,21,18
uSF2,DE,001,01,0000705,1273,600,46,51,70,18,15,3,10,20,30,51,54,54,46,34,14,5,9,8,7,21,16,9,9,673,32,43,54,32,13,8,7,17,44,49,56,59,49,47,26,14,15,6,12,39,12,21,18
uSF2,DE,001,01,0000706,519,244,20,13,13,13,3,1,3,16,15,22,20,14,16,20,16,4,9,6,2,11,2,5,0,275,13,11,19,13,4,4,1,7,22,20,17,20,12,34,15,3,6,3,9,13,13,12,4
uSF2,DE,001,01,0000707,519,244,20,13,13,13,3,1,3,16,15,22,20,14,16,20,16,4,9,6,2,11,2,5,0,275,13,11,19,13,4,4,1,7,22,20,17,20,12,34,15,3,6,3,9,13,13,12,4
uSF2,DE,001,01,0000708,519,244,20,13,13,13,3,1,3,16,15,22,20,14,16,20,16,4,9,6,2,11,2,5,0,275,13,11,19,13,4,4,1,7,22,20,17,20,12,34,15,3,6,3,9,13,13,12,4
uSF2,DE,001,01,0000709,1445,732,49,48,62,31,21,10,5,22,52,49,58,54,61,51,40,17,20,20,19,23,9,4,7,713,26,45,64,35,13,7,8,17,46,42,41,69,64,48,44,22,29,10,17,25,14,12,15
uSF2,DE,001,01,0000710,1445,732,49,48,62,31,21,10,5,22,52,49,58,54,61,51,40,17,20,20,19,23,9,4,7,713,26,45,64,35,13,7,8,17,46,42,41,69,64,48,44,22,29,10,17,25,14,12,15
uSF2,DE,001,01,0000711,1445,732,49,48,62,31,21,10,5,22,52,49,58,54,61,51,40,17,20,20,19,23,9,4,7,713,26,45,64,35,13,7,8,17,46,42,41,69,64,48,44,22,29,10,17,25,14,12,15
uSF2,DE,001,01,0000712,1305,595,59,55,50,26,13,7,7,22,33,36,51,35,40,29,36,11,10,12,18,14,18,11,2,710,61,49,45,29,18,8,2,23,60,51,50,50,36,31,47,6,15,11,16,32,34,22,14
uSF2,DE,001,01,0000713,1305,595,59,55,50,26,13,7,7,22,33,36,51,35,40,29,36,11,10,12,18,14,18,11,2,710,61,49,45,29,18,8,2,23,60,51,50,50,36,31,47,6,15,11,16,32,34,22,14
uSF2,DE,001,01,0000714,1295,590,59,55,50,26,13,7,7,22,32,35,50,34,40,29,36,10,10,12,18,14,18,11,2,705,61,49,45,29,18,7,2,23,59,51,49,49,36,31,46,6,15,11,16,32,34,22,14
uSF2,DE,001,01,0000715,301,155,5,2,1,2,2,0,1,8,14,6,15,9,20,8,14,3,7,8,5,8,12,2,3,146,6,3,3,3,1,1,4,0,9,6,2,9,13,8,15,6,10,5,6,11,10,9,6
uSF2,DE,001,01,0000716,301,155,5,2,1,2,2,0,1,8,14,6,15,9,20,8,14,3,7,8,5,8,12,2,3,146,6,3,3,3,1,1,4,0,9,6,2,9,13,8,15,6,10,5,6,11,10,9,6
uSF2,DE,001,01,0000717,301,155,5,2,1,2,2,0,1,8,14,6,15,9,20,8,14,3,7,8,5,8,12,2,3,146,6,3,3,3,1,1,4,0,9,6,2,9,13,8,15,6,10,5,6,11,10,9,6
uSF2,DE,001,01,0000718,29017,13523,1068,1129,1029,558,348,182,212,670,991,1026,1069,1016,803,846,633,187,300,223,309,383,262,180,99,15494,1066,972,1079,581,331,225,244,747,1138,1112,1225,1170,1043,939,765,229,382,248,336,530,528,325,279
uSF2,DE,001,01,0000719,29017,13523,1068,1129,1029,558,348,182,212,670,991,1026,1069,1016,803,846,633,187,300,223,309,383,262,180,99,15494,1066,972,1079,581,331,225,244,747,1138,1112,1225,1170,1043,939,765,229,382,248,336,530,528,325,279
uSF2,DE,001,01,0000720,5581,2676,219,236,208,118,79,40,44,143,197,206,255,169,137,151,111,35,62,51,73,70,42,21,9,2905,200,197,204,93,70,42,53,167,234,223,273,206,188,174,132,38,87,57,63,84,62,35,23
uSF2,DE,001,01,0000721,655,336,36,21,18,3,2,4,3,16,32,40,49,23,21,26,7,3,4,3,8,6,6,3,2,319,25,24,17,7,8,2,3,18,32,37,34,15,21,16,14,4,4,9,6,7,9,3,4
uSF2,DE,001,01,0000722,4348,1979,149,201,199,101,40,14,24,46,85,105,143,155,148,167,149,37,53,23,31,49,25,16,19,2369,156,167,220,130,48,25,24,76,113,160,180,189,201,208,148,37,42,26,33,58,44,32,52
uSF2,DE,001,01,0000723,2652,1209,80,70,78,52,43,26,23,69,71,67,104,98,65,77,46,22,40,26,36,39,37,25,15,1443,82,73,95,56,39,23,21,57,85,89,103,110,87,78,74,28,36,32,35,64,80,55,41
uSF2,DE,001,01,0000724,1797,762,41,43,34,22,14,10,12,39,61,66,47,47,53,59,53,11,15,18,15,31,31,23,17,1035,42,36,33,17,9,9,14,38,74,56,46,60,48,66,59,8,39,21,35,87,94,85,59
uSF2,DE,001,01,0000725,4087,1964,181,191,150,64,68,19,35,113,174,189,126,145,109,96,78,25,41,26,36,50,28,19,1,2123,173,151,124,70,54,48,39,131,200,178,152,169,126,111,111,31,37,32,38,53,66,16,13
uSF2,DE,001,01,0000726,64,32,1,7,3,2,0,1,0,1,2,3,6,1,3,0,0,0,0,0,0,1,1,0,0,32,2,3,5,1,0,0,1,1,4,2,3,3,2,1,1,0,0,0,1,1,1,0,0
uSF2,DE,001,01,0000727,546,248,27,19,29,12,7,6,3,18,15,16,11,19,16,12,8,1,9,8,6,3,1,1,1,298,21,18,19,12,4,8,10,19,23,28,22,21,19,9,14,8,7,7,8,5,6,8,2
uSF2,DE,001,01,0000728,2074,934,99,89,53,32,21,13,14,55,90,67,69,65,49,43,29,9,16,16,22,25,20,22,16,1140,96,76,71,30,25,19,23,81,113,69,73,80,67,51,37,18,25,13,28,36,51,25,33
uSF2,DE,001,01,0000729,2875,1336,104,117,108,52,33,23,22,71,103,126,112,113,66,61,46,16,17,17,36,31,30,21,11,1539,116,96,106,63,27,24,24,73,132,123,134,121,103,75,52,23,37,19,40,48,41,41,21
uSF2,DE,001,01,0000730,1960,947,42,66,80,54,20,12,9,33,37,44,58,85,61,67,59,20,32,29,35,53,27,19,5,1013,39,43,103,63,16,13,6,18,27,44,72,92,71,73,75,22,53,22,35,58,40,14,14
uSF2,DE,001,01,0000731,2116,978,84,66,56,40,21,12,19,56,108,88,79,87,68,75,42,8,9,4,9,23,13,9,2,1138,102,80,72,36,25,12,25,55,87,92,123,93,97,66,42,11,13,8,14,28,32,8,17
uSF2,DE,001,01,0000732,257,121,5,3,12,6,0,2,4,10,16,9,10,9,7,12,5,0,2,2,2,2,1,1,1,136,12,7,9,3,6,0,1,13,13,11,10,11,13,10,6,1,2,2,0,1,2,3,0
uSF2,DE,001,01,0000733,3394,1722,304,216,157,43,22,29,44,161,258,226,155,87,13,4,3,0,0,0,0,0,0,0,0,1672,274,202,117,51,44,50,49,160,264,204,141,74,23,9,2,0,3,0,1,2,1,1,0
uSF2,DE,001,01,0000734,3394,1722,304,216,157,43,22,29,44,161,258,226,155,87,13,4,3,0,0,0,0,0,0,0,0,1672,274,202,117,51,44,50,49,160,264,204,141,74,23,9,2,0,3,0,1,2,1,1,0
uSF2,DE,001,01,0000735,3394,1722,304,216,157,43,22,29,44,161,258,226,155,87,13,4,3,0,0,0,0,0,0,0,0,1672,274,202,117,51,44,50,49,160,264,204,141,74,23,9,2,0,3,0,1,2,1,1,0
uSF2,DE,001,01,0000736,5977,2752,243,241,236,131,47,28,19,75,187,225,246,237,199,170,112,36,52,25,41,72,68,38,24,3225,233,249,241,114,69,33,40,102,251,267,265,268,264,188,150,53,56,47,51,91,86,62,45
uSF2,DE,001,01,0000737,5977,2752,243,241,236,131,47,28,19,75,187,225,246,237,199,170,112,36,52,25,41,72,68,38,24,3225,233,249,241,114,69,33,40,102,251,267,265,268,264,188,150,53,56,47,51,91,86,62,45
uSF2,DE,001,01,0000738,724,351,24,22,42,12,2,4,2,5,17,21,40,29,35,23,19,4,5,3,6,16,8,7,5,373,30,25,24,7,4,1,2,6,13,29,49,27,34,18,19,6,6,6,6,22,14,11,14
uSF2,DE,001,01,0000739,5253,2401,219,219,194,119,45,24,17,70,170,204,206,208,164,147,93,32,47,22,35,56,60,31,19,2852,203,224,217,107,65,32,38,96,238,238,216,241,230,170,131,47,50,41,45,69,72,51,31
uSF2,DE,001,01,0000740,320,152,8,16,16,6,5,0,3,3,9,11,10,13,8,7,11,2,4,2,3,4,7,0,4,168,9,12,14,6,6,2,3,4,6,11,16,11,16,13,9,3,3,3,9,3,7,2,0
uSF2,DE,001,01,0000741,320,152,8,16,16,6,5,0,3,3,9,11,10,13,8,7,11,2,4,2,3,4,7,0,4,168,9,12,14,6,6,2,3,4,6,11,16,11,16,13,9,3,3,3,9,3,7,2,0
uSF2,DE,001,01,0000742,320,152,8,16,16,6,5,0,3,3,9,11,10,13,8,7,11,2,4,2,3,4,7,0,4,168,9,12,14,6,6,2,3,4,6,11,16,11,16,13,9,3,3,3,9,3,7,2,0
uSF2,DE,001,01,0000743,5791,2838,211,231,184,134,76,35,33,128,208,212,246,251,165,154,122,38,53,37,79,90,82,49,20,2953,211,194,184,104,70,45,52,112,182,221,225,257,174,168,137,51,76,43,92,116,122,71,46
uSF2,DE,001,01,0000744,5791,2838,211,231,184,134,76,35,33,128,208,212,246,251,165,154,122,38,53,37,79,90,82,49,20,2953,211,194,184,104,70,45,52,112,182,221,225,257,174,168,137,51,76,43,92,116,122,71,46
uSF2,DE,001,01,0000745,2232,1073,76,83,67,47,25,14,12,46,83,75,81,100,65,66,55,11,20,10,31,33,34,28,11,1159,84,74,70,41,24,23,15,44,71,68,82,104,85,57,63,15,32,14,31,47,56,38,21
uSF2,DE,001,01,0000746,3559,1765,135,148,117,87,51,21,21,82,125,137,165,151,100,88,67,27,33,27,48,57,48,21,9,1794,127,120,114,63,46,22,37,68,111,153,143,153,89,111,74,36,44,29,61,69,66,33,25
uSF2,DE,001,01,0000747,780,357,27,29,38,15,18,2,4,10,33,26,42,27,20,14,11,6,10,2,6,4,3,6,4,423,30,34,38,19,8,5,1,17,42,37,40,42,28,19,9,8,6,4,6,10,13,2,5
uSF2,DE,001,01,0000748,780,357,27,29,38,15,18,2,4,10,33,26,42,27,20,14,11,6,10,2,6,4,3,6,4,423,30,34,38,19,8,5,1,17,42,37,40,42,28,19,9,8,6,4,6,10,13,2,5
uSF2,DE,001,01,0000749,780,357,27,29,38,15,18,2,4,10,33,26,42,27,20,14,11,6,10,2,6,4,3,6,4,423,30,34,38,19,8,5,1,17,42,37,40,42,28,19,9,8,6,4,6,10,13,2,5
uSF2,DE,001,01,0000750,342,161,1,2,7,2,1,0,0,0,6,3,4,6,13,13,19,5,17,7,10,22,15,6,2,181,3,3,1,2,1,4,1,2,3,4,6,6,11,16,24,10,11,5,16,24,13,12,3
uSF2,DE,001,01,0000751,342,161,1,2,7,2,1,0,0,0,6,3,4,6,13,13,19,5,17,7,10,22,15,6,2,181,3,3,1,2,1,4,1,2,3,4,6,6,11,16,24,10,11,5,16,24,13,12,3
uSF2,DE,001,01,0000752,342,161,1,2,7,2,1,0,0,0,6,3,4,6,13,13,19,5,17,7,10,22,15,6,2,181,3,3,1,2,1,4,1,2,3,4,6,6,11,16,24,10,11,5,16,24,13,12,3
uSF2,DE,001,01,0000753,714,336,28,29,31,22,10,6,8,12,29,17,21,16,20,21,19,3,6,3,6,21,3,4,1,378,29,39,39,15,7,5,5,15,22,24,24,28,22,15,18,8,6,4,8,15,14,12,4
uSF2,DE,001,01,0000754,714,336,28,29,31,22,10,6,8,12,29,17,21,16,20,21,19,3,6,3,6,21,3,4,1,378,29,39,39,15,7,5,5,15,22,24,24,28,22,15,18,8,6,4,8,15,14,12,4
uSF2,DE,001,01,0000755,714,336,28,29,31,22,10,6,8,12,29,17,21,16,20,21,19,3,6,3,6,21,3,4,1,378,29,39,39,15,7,5,5,15,22,24,24,28,22,15,18,8,6,4,8,15,14,12,4
uSF2,DE,001,01,0000756,648,303,19,27,30,11,7,3,5,6,13,30,33,25,23,17,13,2,4,2,2,8,12,6,5,345,27,34,29,14,9,2,7,6,21,18,36,32,21,20,6,5,7,5,8,15,13,6,4
uSF2,DE,001,01,0000757,648,303,19,27,30,11,7,3,5,6,13,30,33,25,23,17,13,2,4,2,2,8,12,6,5,345,27,34,29,14,9,2,7,6,21,18,36,32,21,20,6,5,7,5,8,15,13,6,4
uSF2,DE,001,01,0000758,648,303,19,27,30,11,7,3,5,6,13,30,33,25,23,17,13,2,4,2,2,8,12,6,5,345,27,34,29,14,9,2,7,6,21,18,36,32,21,20,6,5,7,5,8,15,13,6,4
uSF2,DE,001,01,0000759,4420,2300,173,167,128,118,112,60,41,175,272,203,150,145,127,86,73,24,35,22,39,46,52,34,18,2120,205,168,131,69,85,30,30,119,188,124,139,132,105,111,85,31,37,36,50,77,75,55,38
uSF2,DE,001,01,0000760,4420,2300,173,167,128,118,112,60,41,175,272,203,150,145,127,86,73,24,35,22,39,46,52,34,18,2120,205,168,131,69,85,30,30,119,188,124,139,132,105,111,85,31,37,36,50,77,75,55,38
uSF2,DE,001,01,0000761,4329,2262,173,167,126,118,109,59,41,174,270,200,149,140,124,84,73,20,34,22,39,41,51,32,16,2067,203,166,131,66,83,29,29,118,188,122,135,131,99,108,81,31,36,34,48,73,70,50,36
uSF2,DE,001,01,0000762,12827,6354,565,557,535,318,137,67,59,225,562,644,610,542,479,415,268,53,75,44,67,67,31,23,11,6473,518,537,466,264,154,64,77,310,612,671,636,581,527,414,224,42,87,35,60,75,48,37,34
uSF2,DE,001,01,0000763,12827,6354,565,557,535,318,137,67,59,225,562,644,610,542,479,415,268,53,75,44,67,67,31,23,11,6473,518,537,466,264,154,64,77,310,612,671,636,581,527,414,224,42,87,35,60,75,48,37,34
uSF2,DE,001,01,0000764,3459,1753,170,150,117,85,35,13,15,47,161,196,163,146,126,113,90,16,28,17,22,21,10,11,1,1706,137,127,114,64,27,16,12,56,179,195,173,146,129,119,79,15,30,10,12,23,14,14,15
uSF2,DE,001,01,0000765,7395,3590,301,295,326,200,80,45,34,160,321,337,334,311,284,246,138,28,35,19,31,37,16,8,4,3805,306,309,277,153,113,38,60,224,353,355,342,366,319,253,124,21,45,16,36,43,23,14,15
uSF2,DE,001,01,0000766,1506,775,83,95,69,15,12,5,10,16,70,100,96,64,34,42,22,2,8,5,10,5,4,3,5,731,69,85,53,31,9,5,3,21,75,107,100,40,43,28,11,4,6,6,10,6,7,8,4
uSF2,DE,001,01,0000767,467,236,11,17,23,18,10,4,0,2,10,11,17,21,35,14,18,7,4,3,4,4,1,1,1,231,6,16,22,16,5,5,2,9,5,14,21,29,36,14,10,2,6,3,2,3,4,1,0
uSF2,DE,001,01,0000768,2329,1059,43,40,47,33,7,4,4,25,62,73,73,80,67,79,80,42,47,34,30,60,49,41,39,1270,57,50,55,34,9,4,4,37,82,85,79,69,85,92,86,46,50,22,41,50,68,67,98
uSF2,DE,001,01,0000769,2329,1059,43,40,47,33,7,4,4,25,62,73,73,80,67,79,80,42,47,34,30,60,49,41,39,1270,57,50,55,34,9,4,4,37,82,85,79,69,85,92,86,46,50,22,41,50,68,67,98
uSF2,DE,001,01,0000770,1308,562,21,15,23,14,4,3,4,18,56,53,50,50,32,40,31,16,10,7,8,21,26,26,34,746,30,27,29,16,5,3,4,34,77,61,47,44,38,38,28,21,15,6,16,19,46,50,92
uSF2,DE,001,01,0000771,1021,497,22,25,24,19,3,1,0,7,6,20,23,30,35,39,49,26,37,27,22,39,23,15,5,524,27,23,26,18,4,1,0,3,5,24,32,25,47,54,58,25,35,16,25,31,22,17,6
uSF2,DE,001,01,0000772,837,407,41,50,37,10,7,8,6,24,25,35,30,30,21,21,15,5,6,4,3,6,13,7,3,430,37,30,42,19,11,6,9,18,35,41,29,20,21,17,12,6,5,6,6,23,20,6,11
uSF2,DE,001,01,0000773,837,407,41,50,37,10,7,8,6,24,25,35,30,30,21,21,15,5,6,4,3,6,13,7,3,430,37,30,42,19,11,6,9,18,35,41,29,20,21,17,12,6,5,6,6,23,20,6,11
uSF2,DE,001,01,0000774,834,406,41,50,37,10,7,8,6,24,25,35,30,30,21,20,15,5,6,4,3,6,13,7,3,428,37,30,41,19,11,6,9,18,35,41,29,19,21,17,12,6,5,6,6,23,20,6,11
uSF2,DE,001,01,0000775,3174,1455,123,148,133,70,47,23,15,59,87,107,95,116,87,70,57,22,35,22,26,44,37,19,13,1719,159,130,160,71,43,15,26,58,107,115,135,118,121,78,55,22,38,28,42,64,66,45,23
uSF2,DE,001,01,0000776,3174,1455,123,148,133,70,47,23,15,59,87,107,95,116,87,70,57,22,35,22,26,44,37,19,13,1719,159,130,160,71,43,15,26,58,107,115,135,118,121,78,55,22,38,28,42,64,66,45,23
uSF2,DE,001,01,0000777,3174,1455,123,148,133,70,47,23,15,59,87,107,95,116,87,70,57,22,35,22,26,44,37,19,13,1719,159,130,160,71,43,15,26,58,107,115,135,118,121,78,55,22,38,28,42,64,66,45,23
uSF2,DE,001,01,0000778,139,63,1,2,1,3,0,0,0,1,0,2,0,5,5,5,4,5,3,3,3,5,9,6,0,76,3,1,2,3,1,0,1,0,2,1,2,3,4,2,9,2,6,5,1,14,5,6,3
uSF2,DE,001,01,0000779,139,63,1,2,1,3,0,0,0,1,0,2,0,5,5,5,4,5,3,3,3,5,9,6,0,76,3,1,2,3,1,0,1,0,2,1,2,3,4,2,9,2,6,5,1,14,5,6,3
uSF2,DE,001,01,0000780,139,63,1,2,1,3,0,0,0,1,0,2,0,5,5,5,4,5,3,3,3,5,9,6,0,76,3,1,2,3,1,0,1,0,2,1,2,3,4,2,9,2,6,5,1,14,5,6,3
uSF2,DE,001,01,0000781,3379,1627,74,121,129,88,42,21,11,39,66,76,108,142,126,148,108,47,59,49,57,48,40,21,7,1752,90,109,127,85,34,18,22,50,75,62,132,143,158,143,121,62,70,51,46,57,56,22,19
uSF2,DE,001,01,0000782,3379,1627,74,121,129,88,42,21,11,39,66,76,108,142,126,148,108,47,59,49,57,48,40,21,7,1752,90,109,127,85,34,18,22,50,75,62,132,143,158,143,121,62,70,51,46,57,56,22,19
uSF2,DE,001,01,0000783,1647,771,34,48,55,42,17,6,5,15,34,33,49,67,51,57,53,19,38,33,37,33,23,17,5,876,36,55,55,39,18,13,5,27,29,31,62,60,70,64,59,40,48,29,34,37,36,18,11
uSF2,DE,001,01,0000784,1732,856,40,73,74,46,25,15,6,24,32,43,59,75,75,91,55,28,21,16,20,15,17,4,2,876,54,54,72,46,16,5,17,23,46,31,70,83,88,79,62,22,22,22,12,20,20,4,8
uSF2,DE,001,01,0000785,12654,6251,396,516,528,348,139,43,37,108,146,275,484,596,598,574,430,117,135,95,151,198,146,113,78,6403,395,491,506,288,102,30,41,100,141,340,533,644,641,545,393,114,149,81,147,205,196,183,138
uSF2,DE,001,01,0000786,12654,6251,396,516,528,348,139,43,37,108,146,275,484,596,598,574,430,117,135,95,151,198,146,113,78,6403,395,491,506,288,102,30,41,100,141,340,533,644,641,545,393,114,149,81,147,205,196,183,138
uSF2,DE,001,01,0000787,3968,1912,93,119,137,93,37,12,10,21,34,58,91,158,181,170,147,41,49,37,72,106,95,82,69,2056,91,118,132,81,21,6,12,26,33,69,115,182,183,181,132,39,61,39,76,117,138,117,87
uSF2,DE,001,01,0000788,7491,3750,229,321,340,232,97,29,27,81,105,173,312,364,368,371,261,66,79,54,75,83,47,28,8,3741,244,291,320,181,68,23,27,69,96,208,333,401,401,341,236,68,84,39,64,81,53,63,50
uSF2,DE,001,01,0000789,1195,589,74,76,51,23,5,2,0,6,7,44,81,74,49,33,22,10,7,4,4,9,4,3,1,606,60,82,54,26,13,1,2,5,12,63,85,61,57,23,25,7,4,3,7,7,5,3,1
uSF2,DE,001,01,0000790,430,219,15,29,22,8,8,5,1,5,16,13,21,13,18,12,5,1,2,1,2,11,3,4,4,211,17,18,17,5,4,2,0,6,15,23,19,20,10,10,10,2,4,2,8,8,3,5,3
uSF2,DE,001,01,0000791,430,219,15,29,22,8,8,5,1,5,16,13,21,13,18,12,5,1,2,1,2,11,3,4,4,211,17,18,17,5,4,2,0,6,15,23,19,20,10,10,10,2,4,2,8,8,3,5,3
uSF2,DE,001,01,0000792,430,219,15,29,22,8,8,5,1,5,16,13,21,13,18,12,5,1,2,1,2,11,3,4,4,211,17,18,17,5,4,2,0,6,15,23,19,20,10,10,10,2,4,2,8,8,3,5,3
uSF2,DE,001,01,0000793,1637,784,55,70,61,40,21,7,4,16,43,62,72,69,50,46,35,16,17,15,24,23,22,14,2,853,47,60,70,35,15,9,5,23,60,59,68,68,58,60,52,11,32,16,21,36,24,14,10
uSF2,DE,001,01,0000794,1637,784,55,70,61,40,21,7,4,16,43,62,72,69,50,46,35,16,17,15,24,23,22,14,2,853,47,60,70,35,15,9,5,23,60,59,68,68,58,60,52,11,32,16,21,36,24,14,10
uSF2,DE,001,01,0000795,1014,481,37,46,36,18,11,5,3,9,26,48,46,41,30,29,21,6,13,8,15,12,15,5,1,533,31,42,51,19,5,7,3,17,42,42,50,37,33,41,33,5,20,7,15,15,11,4,3
uSF2,DE,001,01,0000796,623,303,18,24,25,22,10,2,1,7,17,14,26,28,20,17,14,10,4,7,9,11,7,9,1,320,16,18,19,16,10,2,2,6,18,17,18,31,25,19,19,6,12,9,6,21,13,10,7
uSF2,DE,001,01,0000797,237,115,4,10,12,8,2,2,1,4,6,8,12,9,7,7,11,1,4,1,1,2,1,2,0,122,7,7,13,5,5,1,3,4,3,12,12,10,4,8,10,4,3,1,1,3,2,2,2
uSF2,DE,001,01,0000798,237,115,4,10,12,8,2,2,1,4,6,8,12,9,7,7,11,1,4,1,1,2,1,2,0,122,7,7,13,5,5,1,3,4,3,12,12,10,4,8,10,4,3,1,1,3,2,2,2
uSF2,DE,001,01,0000799,237,115,4,10,12,8,2,2,1,4,6,8,12,9,7,7,11,1,4,1,1,2,1,2,0,122,7,7,13,5,5,1,3,4,3,12,12,10,4,8,10,4,3,1,1,3,2,2,2
uSF2,DE,001,01,0000800,3668,1665,212,158,165,97,51,20,24,56,114,109,109,102,104,85,61,13,18,33,28,40,29,27,10,2003,185,152,161,88,79,43,38,77,134,123,148,134,105,86,84,25,33,33,49,80,62,57,27
uSF2,DE,001,01,0000801,3668,1665,212,158,165,97,51,20,24,56,114,109,109,102,104,85,61,13,18,33,28,40,29,27,10,2003,185,152,161,88,79,43,38,77,134,123,148,134,105,86,84,25,33,33,49,80,62,57,27
uSF2,DE,001,01,0000802,632,245,61,31,38,11,12,3,6,6,16,12,5,7,7,11,11,0,0,0,0,2,2,4,0,387,50,26,33,10,33,18,18,23,18,17,27,23,8,10,11,0,8,7,3,17,9,14,4
uSF2,DE,001,01,0000803,3036,1420,151,127,127,86,39,17,18,50,98,97,104,95,97,74,50,13,18,33,28,38,27,23,10,1616,135,126,128,78,46,25,20,54,116,106,121,111,97,76,73,25,25,26,46,63,53,43,23
uSF2,DE,001,01,0000804,203,92,6,7,6,4,1,2,1,2,8,4,11,5,6,8,5,0,4,1,1,6,2,0,2,111,9,9,12,6,1,3,3,4,5,7,10,3,12,3,8,2,3,1,3,2,5,0,0
uSF2,DE,001,01,0000805,203,92,6,7,6,4,1,2,1,2,8,4,11,5,6,8,5,0,4,1,1,6,2,0,2,111,9,9,12,6,1,3,3,4,5,7,10,3,12,3,8,2,3,1,3,2,5,0,0
uSF2,DE,001,01,0000806,203,92,6,7,6,4,1,2,1,2,8,4,11,5,6,8,5,0,4,1,1,6,2,0,2,111,9,9,12,6,1,3,3,4,5,7,10,3,12,3,8,2,3,1,3,2,5,0,0
uSF2,DE,001,01,0000807,2661,1219,44,45,61,43,16,4,5,21,44,45,73,75,117,88,108,42,63,35,72,95,70,33,20,1442,46,52,60,49,17,3,5,24,51,57,87,89,100,118,141,59,69,58,77,114,82,58,26
uSF2,DE,001,01,0000808,2661,1219,44,45,61,43,16,4,5,21,44,45,73,75,117,88,108,42,63,35,72,95,70,33,20,1442,46,52,60,49,17,3,5,24,51,57,87,89,100,118,141,59,69,58,77,114,82,58,26
uSF2,DE,001,01,0000809,2661,1219,44,45,61,43,16,4,5,21,44,45,73,75,117,88,108,42,63,35,72,95,70,33,20,1442,46,52,60,49,17,3,5,24,51,57,87,89,100,118,141,59,69,58,77,114,82,58,26
uSF2,DE,001,01,0000810,195,91,9,8,8,5,1,1,1,0,5,7,9,7,7,3,3,1,0,2,4,7,3,0,0,104,9,13,9,5,1,2,1,4,6,6,9,8,4,5,3,0,3,3,1,6,1,3,2
uSF2,DE,001,01,0000811,195,91,9,8,8,5,1,1,1,0,5,7,9,7,7,3,3,1,0,2,4,7,3,0,0,104,9,13,9,5,1,2,1,4,6,6,9,8,4,5,3,0,3,3,1,6,1,3,2
uSF2,DE,001,01,0000812,115,52,3,4,5,4,0,0,0,0,3,4,7,4,6,1,2,0,0,1,2,4,2,0,0,63,5,6,7,5,1,1,1,0,4,4,6,5,2,2,2,0,1,2,1,3,1,3,1
uSF2,DE,001,01,0000813,1629,784,20,22,32,19,7,6,3,12,20,14,28,42,36,37,66,27,63,37,62,112,67,31,21,845,22,15,27,12,9,2,3,10,18,25,30,45,32,63,76,38,88,38,54,109,69,40,20
uSF2,DE,001,01,0000814,1629,784,20,22,32,19,7,6,3,12,20,14,28,42,36,37,66,27,63,37,62,112,67,31,21,845,22,15,27,12,9,2,3,10,18,25,30,45,32,63,76,38,88,38,54,109,69,40,20
uSF2,DE,001,01,0000815,1629,784,20,22,32,19,7,6,3,12,20,14,28,42,36,37,66,27,63,37,62,112,67,31,21,845,22,15,27,12,9,2,3,10,18,25,30,45,32,63,76,38,88,38,54,109,69,40,20
uSF2,DE,001,01,0000816,226,121,10,9,17,7,1,0,0,5,14,5,7,9,10,3,8,2,2,0,3,4,2,3,0,105,4,8,10,5,4,0,1,5,8,6,13,11,5,7,2,0,3,0,1,3,6,2,1
uSF2,DE,001,01,0000817,226,121,10,9,17,7,1,0,0,5,14,5,7,9,10,3,8,2,2,0,3,4,2,3,0,105,4,8,10,5,4,0,1,5,8,6,13,11,5,7,2,0,3,0,1,3,6,2,1
uSF2,DE,001,01,0000818,226,121,10,9,17,7,1,0,0,5,14,5,7,9,10,3,8,2,2,0,3,4,2,3,0,105,4,8,10,5,4,0,1,5,8,6,13,11,5,7,2,0,3,0,1,3,6,2,1
uSF2,DE,001,01,0000819,6152,2922,296,272,246,143,77,39,42,129,217,280,245,240,175,151,102,38,51,22,24,58,50,12,13,3230,274,288,254,121,74,45,40,138,272,271,289,249,215,174,116,56,49,39,44,81,63,36,42
uSF2,DE,001,01,0000820,6152,2922,296,272,246,143,77,39,42,129,217,280,245,240,175,151,102,38,51,22,24,58,50,12,13,3230,274,288,254,121,74,45,40,138,272,271,289,249,215,174,116,56,49,39,44,81,63,36,42
uSF2,DE,001,01,0000821,1591,773,69,65,52,34,25,11,13,42,71,79,64,56,51,31,24,6,14,6,10,21,20,3,6,818,65,65,68,18,18,12,9,50,59,74,69,52,55,35,28,14,9,11,18,34,19,10,26
uSF2,DE,001,01,0000822,4469,2100,223,206,189,109,50,27,28,86,141,197,176,181,123,117,76,30,34,14,13,35,30,8,7,2369,205,222,186,101,56,33,31,84,210,192,217,194,158,136,84,40,39,24,26,46,44,25,16
uSF2,DE,001,01,0000823,6492,3020,233,249,266,146,80,40,41,126,188,234,241,227,178,164,121,39,65,37,55,107,89,48,46,3472,236,266,238,138,86,55,63,143,237,215,249,238,204,198,133,40,79,60,77,167,149,106,95
uSF2,DE,001,01,0000824,2873,1255,104,110,123,59,37,22,23,59,89,101,92,83,52,62,39,15,29,14,19,52,38,21,12,1618,128,127,118,52,45,27,24,80,105,106,119,90,87,73,63,17,39,26,31,86,71,55,49
uSF2,DE,001,01,0000825,2478,1107,88,101,108,52,32,20,19,49,82,88,86,78,48,59,34,14,22,13,15,42,32,15,10,1371,112,102,93,46,36,24,19,72,92,89,103,80,81,65,59,16,33,20,25,67,49,43,45
uSF2,DE,001,01,0000826,395,148,16,9,15,7,5,2,4,10,7,13,6,5,4,3,5,1,7,1,4,10,6,6,2,247,16,25,25,6,9,3,5,8,13,17,16,10,6,8,4,1,6,6,6,19,22,12,4
uSF2,DE,001,01,0000827,3619,1765,129,139,143,87,43,18,18,67,99,133,149,144,126,102,82,24,36,23,36,55,51,27,34,1854,108,139,120,86,41,28,39,63,132,109,130,148,117,125,70,23,40,34,46,81,78,51,46
uSF2,DE,001,01,0000828,122,60,8,6,10,2,2,0,1,1,2,3,4,5,3,4,1,0,1,0,0,2,2,1,2,62,4,8,4,4,1,1,1,1,3,5,4,5,1,4,1,0,1,1,1,3,4,3,2
uSF2,DE,001,01,0000829,3497,1705,121,133,133,85,41,18,17,66,97,130,145,139,123,98,81,24,35,23,36,53,49,26,32,1792,104,131,116,82,40,27,38,62,129,104,126,143,116,121,69,23,39,33,45,78,74,48,44
uSF2,DE,001,01,0000830,2227,951,58,77,52,38,16,4,7,35,58,64,76,57,61,55,50,22,29,24,38,49,44,30,7,1276,95,75,82,29,15,7,11,51,80,66,87,84,76,70,80,25,33,25,52,89,70,32,42
uSF2,DE,001,01,0000831,2227,951,58,77,52,38,16,4,7,35,58,64,76,57,61,55,50,22,29,24,38,49,44,30,7,1276,95,75,82,29,15,7,11,51,80,66,87,84,76,70,80,25,33,25,52,89,70,32,42
uSF2,DE,001,01,0000832,2227,951,58,77,52,38,16,4,7,35,58,64,76,57,61,55,50,22,29,24,38,49,44,30,7,1276,95,75,82,29,15,7,11,51,80,66,87,84,76,70,80,25,33,25,52,89,70,32,42
uSF2,DE,001,01,0000833,259,129,10,4,7,2,6,1,2,2,13,9,12,9,7,10,6,5,3,2,4,7,8,0,0,130,8,9,3,5,3,1,2,2,8,9,7,11,9,8,11,3,3,3,1,11,8,2,3
uSF2,DE,001,01,0000834,259,129,10,4,7,2,6,1,2,2,13,9,12,9,7,10,6,5,3,2,4,7,8,0,0,130,8,9,3,5,3,1,2,2,8,9,7,11,9,8,11,3,3,3,1,11,8,2,3
uSF2,DE,001,01,0000835,249,122,9,3,7,2,6,1,2,2,12,9,10,8,7,10,6,4,3,2,4,7,8,0,0,127,8,9,3,5,3,1,2,2,8,8,6,11,9,8,11,3,3,3,1,10,8,2,3
uSF2,DE,001,01,0000836,1631,722,64,67,48,27,12,15,12,28,54,50,41,50,47,63,25,8,15,7,20,25,25,7,12,909,82,47,49,21,23,15,11,47,71,44,61,59,59,63,43,13,23,13,25,44,45,33,18
uSF2,DE,001,01,0000837,1631,722,64,67,48,27,12,15,12,28,54,50,41,50,47,63,25,8,15,7,20,25,25,7,12,909,82,47,49,21,23,15,11,47,71,44,61,59,59,63,43,13,23,13,25,44,45,33,18
uSF2,DE,001,01,0000838,1280,548,55,56,37,21,10,9,11,26,43,40,30,34,36,36,18,6,13,6,8,20,19,5,9,732,77,37,38,15,17,14,9,42,62,37,45,46,45,43,34,11,16,10,18,37,37,27,15
uSF2,DE,001,01,0000839,324,158,7,10,10,5,0,6,1,2,11,9,9,15,10,27,7,2,1,1,12,5,3,2,3,166,5,9,11,6,5,1,2,4,8,5,16,13,14,19,9,2,6,3,7,5,7,6,3
uSF2,DE,001,01,0000840,21820,10622,441,533,554,324,292,548,769,1281,938,725,587,639,637,600,460,156,200,122,178,248,222,115,53,11198,416,470,518,308,332,689,1070,1023,773,651,621,616,672,643,509,143,225,157,231,370,321,251,189
uSF2,DE,001,01,0000841,21820,10622,441,533,554,324,292,548,769,1281,938,725,587,639,637,600,460,156,200,122,178,248,222,115,53,11198,416,470,518,308,332,689,1070,1023,773,651,621,616,672,643,509,143,225,157,231,370,321,251,189
uSF2,DE,001,01,0000842,1989,980,71,70,52,37,25,20,29,95,89,83,82,76,81,75,46,11,5,9,7,4,9,3,1,1009,61,65,63,39,32,31,37,99,86,96,72,68,94,66,45,7,12,8,6,7,8,4,3
uSF2,DE,001,01,0000843,602,310,21,21,14,12,7,3,9,12,20,29,21,27,28,24,9,6,8,11,3,9,9,6,1,292,17,12,19,7,8,2,1,8,19,26,26,25,29,20,11,5,4,5,9,14,12,9,4
uSF2,DE,001,01,0000844,2879,1432,47,103,115,79,44,38,40,60,35,74,80,107,130,151,97,26,43,20,24,46,47,20,6,1447,42,86,104,77,22,26,43,53,37,69,98,117,143,131,90,30,29,24,42,68,45,40,31
uSF2,DE,001,01,0000845,3228,1621,58,38,67,38,44,70,142,252,185,101,83,85,75,92,75,24,39,16,31,36,39,21,10,1607,46,59,57,35,45,59,150,227,169,75,72,65,79,99,92,20,37,30,32,48,57,25,29
uSF2,DE,001,01,0000846,3440,1753,66,65,90,41,53,86,126,266,201,118,90,83,89,68,60,26,23,18,37,56,50,33,8,1687,67,77,83,38,54,90,142,157,127,104,94,86,85,83,78,23,32,31,43,60,62,53,18
uSF2,DE,001,01,0000847,3286,1608,100,127,112,61,35,22,12,84,164,148,117,152,117,96,85,32,34,21,29,35,17,7,1,1678,94,104,103,58,32,15,18,85,155,138,139,151,132,131,97,34,42,24,38,40,28,10,10
uSF2,DE,001,01,0000848,1876,765,11,23,14,8,22,94,149,191,82,38,20,17,22,9,12,4,4,6,7,12,9,4,7,1111,15,10,22,12,38,155,300,185,63,28,24,15,17,16,2,2,15,2,14,45,44,47,40
uSF2,DE,001,01,0000849,2539,1224,21,30,20,14,51,206,254,296,85,54,31,24,34,27,17,1,17,4,7,9,15,6,1,1315,17,13,19,9,80,306,368,179,46,43,27,21,25,31,22,2,14,5,13,26,20,12,17
uSF2,DE,001,01,0000850,509,261,14,21,18,9,2,1,3,5,20,34,22,20,16,14,22,7,5,3,3,11,6,5,0,248,14,10,17,6,4,2,2,8,20,23,19,14,20,19,21,6,13,2,5,12,7,3,1
uSF2,DE,001,01,0000851,434,177,10,14,18,10,5,3,1,7,15,12,9,8,13,10,6,4,1,0,4,2,5,7,13,257,13,8,19,11,5,2,5,6,12,8,19,14,9,12,8,2,4,5,8,14,18,29,26
uSF2,DE,001,01,0000852,1026,485,22,21,32,15,4,5,4,13,42,33,32,40,32,33,30,15,20,14,26,28,16,3,5,541,30,26,12,16,12,1,3,16,39,41,30,40,39,35,42,12,22,20,21,36,20,19,9
uSF2,DE,001,01,0000853,4862,2280,136,131,163,96,50,27,23,80,165,133,194,187,182,192,133,40,63,41,50,83,55,37,19,2582,137,134,167,96,56,26,24,91,151,161,223,177,215,201,174,74,61,46,74,89,96,64,45
uSF2,DE,001,01,0000854,4862,2280,136,131,163,96,50,27,23,80,165,133,194,187,182,192,133,40,63,41,50,83,55,37,19,2582,137,134,167,96,56,26,24,91,151,161,223,177,215,201,174,74,61,46,74,89,96,64,45
uSF2,DE,001,01,0000855,120,58,2,8,4,2,3,0,0,3,4,2,5,3,1,9,4,0,2,1,0,3,1,0,1,62,2,7,3,2,0,0,0,2,6,3,7,5,4,4,6,0,1,1,1,1,2,1,4
uSF2,DE,001,01,0000856,364,176,23,15,16,11,4,1,1,2,19,12,23,16,12,7,4,1,3,4,1,1,0,0,0,188,18,18,12,9,3,1,0,4,21,17,26,20,11,4,7,3,6,2,1,1,3,0,1
uSF2,DE,001,01,0000857,2137,966,43,56,74,32,20,12,14,33,54,52,80,73,76,86,71,25,29,15,24,37,30,21,9,1171,54,57,82,40,28,10,8,32,60,68,88,79,103,103,93,40,22,25,33,44,47,25,30
uSF2,DE,001,01,0000858,2241,1080,68,52,69,51,23,14,8,42,88,67,86,95,93,90,54,14,29,21,25,42,24,16,9,1161,63,52,70,45,25,15,16,53,64,73,102,73,97,90,68,31,32,18,39,43,44,38,10
uSF2,DE,001,01,0000859,1122,565,49,37,46,26,22,14,9,22,44,49,53,51,47,37,13,6,5,6,12,7,4,6,0,557,50,31,36,17,23,8,6,25,48,58,61,46,37,27,16,2,6,10,6,11,14,11,8
uSF2,DE,001,01,0000860,1122,565,49,37,46,26,22,14,9,22,44,49,53,51,47,37,13,6,5,6,12,7,4,6,0,557,50,31,36,17,23,8,6,25,48,58,61,46,37,27,16,2,6,10,6,11,14,11,8
uSF2,DE,001,01,0000861,697,348,32,19,24,16,15,8,5,16,34,32,37,24,27,22,7,3,4,6,7,4,4,2,0,349,36,14,20,11,15,8,6,18,40,34,31,29,20,14,8,2,4,7,5,6,7,9,5
uSF2,DE,001,01,0000862,425,217,17,18,22,10,7,6,4,6,10,17,16,27,20,15,6,3,1,0,5,3,0,4,0,208,14,17,16,6,8,0,0,7,8,24,30,17,17,13,8,0,2,3,1,5,7,2,3
uSF2,DE,001,01,0000863,8277,4124,311,364,389,241,94,32,26,78,89,171,337,456,417,426,299,89,88,36,48,66,33,26,8,4153,300,396,373,227,74,26,26,59,84,240,400,494,419,403,278,62,59,39,48,69,37,22,18
uSF2,DE,001,01,0000864,8277,4124,311,364,389,241,94,32,26,78,89,171,337,456,417,426,299,89,88,36,48,66,33,26,8,4153,300,396,373,227,74,26,26,59,84,240,400,494,419,403,278,62,59,39,48,69,37,22,18
uSF2,DE,001,01,0000865,8277,4124,311,364,389,241,94,32,26,78,89,171,337,456,417,426,299,89,88,36,48,66,33,26,8,4153,300,396,373,227,74,26,26,59,84,240,400,494,419,403,278,62,59,39,48,69,37,22,18
uSF2,DE,001,01,0000866,1006,481,29,21,31,12,10,4,3,14,13,24,34,28,33,22,35,13,31,19,28,34,28,11,4,525,17,24,19,8,6,1,2,11,20,23,42,32,39,27,55,18,26,23,38,44,23,14,13
uSF2,DE,001,01,0000867,1006,481,29,21,31,12,10,4,3,14,13,24,34,28,33,22,35,13,31,19,28,34,28,11,4,525,17,24,19,8,6,1,2,11,20,23,42,32,39,27,55,18,26,23,38,44,23,14,13
uSF2,DE,001,01,0000868,1006,481,29,21,31,12,10,4,3,14,13,24,34,28,33,22,35,13,31,19,28,34,28,11,4,525,17,24,19,8,6,1,2,11,20,23,42,32,39,27,55,18,26,23,38,44,23,14,13
uSF2,DE,001,01,0000869,286,140,10,6,9,6,3,2,1,4,7,11,13,7,9,10,15,3,2,4,2,1,7,3,5,146,9,9,7,1,3,1,1,2,8,14,7,10,13,16,10,0,6,2,2,13,6,5,1
uSF2,DE,001,01,0000870,286,140,10,6,9,6,3,2,1,4,7,11,13,7,9,10,15,3,2,4,2,1,7,3,5,146,9,9,7,1,3,1,1,2,8,14,7,10,13,16,10,0,6,2,2,13,6,5,1
uSF2,DE,001,01,0000871,286,140,10,6,9,6,3,2,1,4,7,11,13,7,9,10,15,3,2,4,2,1,7,3,5,146,9,9,7,1,3,1,1,2,8,14,7,10,13,16,10,0,6,2,2,13,6,5,1
uSF2,DE,001,01,0000872,19363,9320,639,651,643,361,201,81,78,339,774,845,854,891,746,656,521,156,181,130,163,193,125,59,33,10043,603,582,649,385,178,95,90,370,806,869,941,931,842,758,591,163,237,130,193,227,206,131,66
uSF2,DE,001,01,0000873,19363,9320,639,651,643,361,201,81,78,339,774,845,854,891,746,656,521,156,181,130,163,193,125,59,33,10043,603,582,649,385,178,95,90,370,806,869,941,931,842,758,591,163,237,130,193,227,206,131,66
uSF2,DE,001,01,0000874,1033,496,39,31,21,28,8,5,4,5,18,28,44,37,42,37,26,18,22,17,25,22,11,5,3,537,36,29,36,19,11,5,1,11,18,36,42,45,46,34,41,11,31,15,22,26,12,7,3
uSF2,DE,001,01,0000875,5737,2664,168,144,133,68,52,11,22,115,321,293,273,218,163,182,154,44,51,38,51,67,55,28,13,3073,174,129,128,99,43,18,29,119,319,296,278,240,208,253,179,51,73,57,77,92,96,77,38
uSF2,DE,001,01,0000876,5883,2954,198,223,205,112,47,33,27,145,281,270,273,280,207,184,170,50,58,44,45,58,26,12,6,2929,172,193,181,98,42,35,35,168,273,254,290,247,241,217,161,57,64,31,47,57,34,20,12
uSF2,DE,001,01,0000877,4374,2096,139,167,191,97,68,21,16,40,90,143,157,220,229,170,130,34,39,22,31,38,30,13,11,2278,128,149,216,113,50,26,17,47,95,170,190,259,236,162,156,33,47,18,41,40,57,20,8
uSF2,DE,001,01,0000878,2336,1110,95,86,93,56,26,11,9,34,64,111,107,136,105,83,41,10,11,9,11,8,3,1,0,1226,93,82,88,56,32,11,8,25,101,113,141,140,111,92,54,11,22,9,6,12,7,7,5
uSF2,DE,001,01,0000879,1448,701,17,12,24,8,5,3,5,12,28,34,45,44,77,68,58,18,28,21,32,57,55,28,22,747,10,6,15,12,3,3,1,24,22,34,34,35,54,70,62,21,40,22,36,70,72,61,40
uSF2,DE,001,01,0000880,1448,701,17,12,24,8,5,3,5,12,28,34,45,44,77,68,58,18,28,21,32,57,55,28,22,747,10,6,15,12,3,3,1,24,22,34,34,35,54,70,62,21,40,22,36,70,72,61,40
uSF2,DE,001,01,0000881,1448,701,17,12,24,8,5,3,5,12,28,34,45,44,77,68,58,18,28,21,32,57,55,28,22,747,10,6,15,12,3,3,1,24,22,34,34,35,54,70,62,21,40,22,36,70,72,61,40
uSF2,DE,001,01,0000882,2458,1210,129,133,111,56,29,13,27,73,108,110,129,81,49,43,34,10,12,12,17,18,8,4,4,1248,126,105,131,70,29,18,19,73,109,123,128,80,49,46,34,19,17,8,21,13,15,6,9
uSF2,DE,001,01,0000883,2458,1210,129,133,111,56,29,13,27,73,108,110,129,81,49,43,34,10,12,12,17,18,8,4,4,1248,126,105,131,70,29,18,19,73,109,123,128,80,49,46,34,19,17,8,21,13,15,6,9
uSF2,DE,001,01,0000884,269,139,14,9,8,9,4,0,0,6,9,8,13,13,4,9,6,5,3,6,2,8,1,2,0,130,8,8,13,8,2,1,0,1,5,11,18,11,4,10,5,2,7,1,5,3,5,0,2
uSF2,DE,001,01,0000885,2189,1071,115,124,103,47,25,13,27,67,99,102,116,68,45,34,28,5,9,6,15,10,7,2,4,1118,118,97,118,62,27,17,19,72,104,112,110,69,45,36,29,17,10,7,16,10,10,6,7
uSF2,DE,001,01,0000886,1583,784,55,56,74,46,14,6,8,24,42,59,78,75,67,69,30,7,14,9,14,19,11,3,4,799,37,58,75,44,21,12,5,27,49,59,75,86,65,68,39,10,13,6,14,16,15,3,2
uSF2,DE,001,01,0000887,1583,784,55,56,74,46,14,6,8,24,42,59,78,75,67,69,30,7,14,9,14,19,11,3,4,799,37,58,75,44,21,12,5,27,49,59,75,86,65,68,39,10,13,6,14,16,15,3,2
uSF2,DE,001,01,0000888,1583,784,55,56,74,46,14,6,8,24,42,59,78,75,67,69,30,7,14,9,14,19,11,3,4,799,37,58,75,44,21,12,5,27,49,59,75,86,65,68,39,10,13,6,14,16,15,3,2
uSF2,DE,001,01,0000889,1562,779,54,60,61,42,47,16,26,53,44,39,54,54,57,46,28,12,17,12,13,21,14,8,1,783,43,42,68,46,31,12,7,27,50,43,54,74,60,41,43,15,17,14,23,29,20,14,10
uSF2,DE,001,01,0000890,1562,779,54,60,61,42,47,16,26,53,44,39,54,54,57,46,28,12,17,12,13,21,14,8,1,783,43,42,68,46,31,12,7,27,50,43,54,74,60,41,43,15,17,14,23,29,20,14,10
uSF2,DE,001,01,0000891,1538,769,52,59,61,39,47,16,24,53,44,38,53,54,57,46,28,12,17,12,13,21,14,8,1,769,42,41,67,44,31,11,7,27,50,42,54,70,59,41,43,15,17,14,23,28,20,13,10
uSF2,DE,001,01,0000892,6194,2782,268,250,224,125,82,34,36,109,183,156,215,174,153,179,93,41,57,44,57,100,91,68,43,3412,253,217,234,116,107,51,55,148,203,233,220,197,243,171,134,70,82,51,95,162,150,142,78
uSF2,DE,001,01,0000893,6194,2782,268,250,224,125,82,34,36,109,183,156,215,174,153,179,93,41,57,44,57,100,91,68,43,3412,253,217,234,116,107,51,55,148,203,233,220,197,243,171,134,70,82,51,95,162,150,142,78
uSF2,DE,001,01,0000894,553,201,44,31,34,11,8,3,3,4,9,10,16,6,6,3,1,0,0,0,5,6,1,0,0,352,45,38,33,9,13,13,8,21,19,44,31,9,26,6,9,1,0,3,5,11,4,1,3
uSF2,DE,001,01,0000895,5641,2581,224,219,190,114,74,31,33,105,174,146,199,168,147,176,92,41,57,44,52,94,90,68,43,3060,208,179,201,107,94,38,47,127,184,189,189,188,217,165,125,69,82,48,90,151,146,141,75
uSF2,DE,001,01,0000896,1645,839,77,62,58,33,16,14,4,39,67,57,56,70,45,48,43,15,15,22,24,23,26,13,12,806,52,48,49,21,18,6,5,25,60,59,59,44,56,46,40,24,25,16,29,36,32,33,23
uSF2,DE,001,01,0000897,1645,839,77,62,58,33,16,14,4,39,67,57,56,70,45,48,43,15,15,22,24,23,26,13,12,806,52,48,49,21,18,6,5,25,60,59,59,44,56,46,40,24,25,16,29,36,32,33,23
uSF2,DE,001,01,0000898,1645,839,77,62,58,33,16,14,4,39,67,57,56,70,45,48,43,15,15,22,24,23,26,13,12,806,52,48,49,21,18,6,5,25,60,59,59,44,56,46,40,24,25,16,29,36,32,33,23
uSF2,DE,001,01,0000899,198,93,3,1,0,1,0,1,0,1,0,2,4,10,7,10,16,7,8,7,4,4,5,1,1,105,0,1,2,0,1,0,0,0,3,5,4,6,10,6,19,6,10,7,4,7,3,8,3
uSF2,DE,001,01,0000900,198,93,3,1,0,1,0,1,0,1,0,2,4,10,7,10,16,7,8,7,4,4,5,1,1,105,0,1,2,0,1,0,0,0,3,5,4,6,10,6,19,6,10,7,4,7,3,8,3
uSF2,DE,001,01,0000901,198,93,3,1,0,1,0,1,0,1,0,2,4,10,7,10,16,7,8,7,4,4,5,1,1,105,0,1,2,0,1,0,0,0,3,5,4,6,10,6,19,6,10,7,4,7,3,8,3
uSF2,DE,001,01,0000902,5404,2503,208,210,229,122,69,33,41,87,176,194,211,175,173,131,92,34,38,29,58,79,68,23,23,2901,213,210,222,123,78,35,44,109,218,208,247,214,205,149,99,52,60,36,75,108,90,54,52
uSF2,DE,001,01,0000903,5404,2503,208,210,229,122,69,33,41,87,176,194,211,175,173,131,92,34,38,29,58,79,68,23,23,2901,213,210,222,123,78,35,44,109,218,208,247,214,205,149,99,52,60,36,75,108,90,54,52
uSF2,DE,001,01,0000904,1825,870,79,67,70,39,25,12,23,41,71,77,70,54,60,54,30,14,11,7,11,28,18,3,6,955,75,58,74,32,34,9,9,47,80,80,81,65,74,53,39,18,14,10,20,31,20,15,17
uSF2,DE,001,01,0000905,2011,944,51,63,84,44,24,9,9,22,56,61,92,70,74,55,45,14,20,16,34,32,35,17,17,1067,51,72,76,43,20,11,13,34,50,61,94,81,81,59,44,27,32,15,42,51,52,30,28
uSF2,DE,001,01,0000906,1568,689,78,80,75,39,20,12,9,24,49,56,49,51,39,22,17,6,7,6,13,19,15,3,0,879,87,80,72,48,24,15,22,28,88,67,72,68,50,37,16,7,14,11,13,26,18,9,7
uSF2,DE,001,01,0000907,492,240,2,3,3,4,2,1,0,2,5,6,11,16,14,16,30,14,23,17,20,27,13,9,2,252,3,14,10,4,1,2,1,1,3,7,8,13,20,16,30,12,22,13,25,18,12,12,5
uSF2,DE,001,01,0000908,492,240,2,3,3,4,2,1,0,2,5,6,11,16,14,16,30,14,23,17,20,27,13,9,2,252,3,14,10,4,1,2,1,1,3,7,8,13,20,16,30,12,22,13,25,18,12,12,5
uSF2,DE,001,01,0000909,492,240,2,3,3,4,2,1,0,2,5,6,11,16,14,16,30,14,23,17,20,27,13,9,2,252,3,14,10,4,1,2,1,1,3,7,8,13,20,16,30,12,22,13,25,18,12,12,5
uSF2,DE,001,01,0000910,346,166,6,15,18,8,3,1,4,4,7,11,19,19,13,10,5,2,3,2,7,3,2,3,1,180,8,12,17,9,5,0,2,8,6,16,21,12,22,5,8,0,3,3,4,5,5,5,4
uSF2,DE,001,01,0000911,346,166,6,15,18,8,3,1,4,4,7,11,19,19,13,10,5,2,3,2,7,3,2,3,1,180,8,12,17,9,5,0,2,8,6,16,21,12,22,5,8,0,3,3,4,5,5,5,4
uSF2,DE,001,01,0000912,346,166,6,15,18,8,3,1,4,4,7,11,19,19,13,10,5,2,3,2,7,3,2,3,1,180,8,12,17,9,5,0,2,8,6,16,21,12,22,5,8,0,3,3,4,5,5,5,4
uSF2,DE,001,01,0000913,156,82,3,4,10,3,3,1,1,4,3,6,8,7,6,7,5,2,2,3,2,1,0,1,0,74,1,2,4,6,2,0,0,2,1,5,7,4,9,6,9,1,4,0,1,1,3,5,1
uSF2,DE,001,01,0000914,156,82,3,4,10,3,3,1,1,4,3,6,8,7,6,7,5,2,2,3,2,1,0,1,0,74,1,2,4,6,2,0,0,2,1,5,7,4,9,6,9,1,4,0,1,1,3,5,1
uSF2,DE,001,01,0000915,156,82,3,4,10,3,3,1,1,4,3,6,8,7,6,7,5,2,2,3,2,1,0,1,0,74,1,2,4,6,2,0,0,2,1,5,7,4,9,6,9,1,4,0,1,1,3,5,1
uSF2,DE,001,01,0000916,68436,31553,2564,2763,2662,1543,908,425,394,1266,2608,2534,2403,2302,2084,1749,1322,424,589,397,530,771,631,407,277,36883,2330,2620,2588,1528,918,462,450,1539,2892,2955,2891,2787,2451,2143,1637,579,761,535,766,1207,1198,892,754
uSF2,DE,001,01,0000917,68436,31553,2564,2763,2662,1543,908,425,394,1266,2608,2534,2403,2302,2084,1749,1322,424,589,397,530,771,631,407,277,36883,2330,2620,2588,1528,918,462,450,1539,2892,2955,2891,2787,2451,2143,1637,579,761,535,766,1207,1198,892,754
uSF2,DE,001,01,0000918,565,284,22,27,9,6,5,4,5,17,36,35,31,27,12,17,13,5,5,3,0,3,1,1,0,281,21,16,5,4,22,6,4,21,25,33,21,26,25,14,9,5,6,2,1,4,6,3,2
uSF2,DE,001,01,0000919,5557,2566,168,219,239,129,90,21,34,71,128,187,181,208,209,197,152,31,57,37,41,61,55,30,21,2991,164,200,212,146,67,36,24,85,173,239,250,274,242,253,181,55,59,37,41,82,75,55,41
uSF2,DE,001,01,0000920,3359,1551,94,146,176,80,57,27,17,60,99,110,112,110,129,109,75,20,27,20,17,24,20,17,5,1808,95,148,145,95,43,24,14,60,103,142,157,169,133,142,90,36,34,28,35,32,37,25,21
uSF2,DE,001,01,0000921,2965,1355,92,83,91,51,38,11,20,41,115,124,106,98,97,73,66,32,52,22,26,50,34,25,8,1610,104,65,96,61,33,15,15,63,141,128,125,123,125,103,88,23,43,34,43,68,51,40,23
uSF2,DE,001,01,0000922,3736,1729,177,175,162,85,50,20,17,64,105,137,132,129,112,115,76,30,31,20,30,34,17,8,3,2007,157,162,158,95,68,36,33,81,129,125,173,160,145,128,123,36,41,29,26,42,31,17,12
uSF2,DE,001,01,0000923,2427,1082,78,128,111,53,43,24,13,30,55,66,71,100,54,56,37,22,28,17,23,33,24,11,5,1345,97,117,136,51,29,16,12,42,75,87,114,95,80,73,65,23,41,29,43,45,40,16,19
uSF2,DE,001,01,0000924,3129,1391,110,110,115,69,29,18,22,58,66,84,116,108,114,72,66,27,33,26,40,49,37,14,8,1738,87,131,128,77,56,22,22,57,81,103,136,146,119,84,85,35,71,42,57,70,60,38,31
uSF2,DE,001,01,0000925,1668,688,133,160,106,38,20,14,13,23,26,20,32,27,19,11,14,2,8,3,6,7,4,1,1,980,122,116,106,61,26,16,14,66,62,87,66,82,47,27,16,6,14,11,6,11,4,7,7
uSF2,DE,001,01,0000926,504,232,37,21,18,8,9,2,2,5,12,14,24,20,22,10,6,3,4,1,2,8,3,1,0,272,23,27,22,14,12,1,4,11,19,22,26,27,16,16,5,4,1,4,5,7,1,2,3
uSF2,DE,001,01,0000927,2171,967,74,101,97,77,36,18,14,40,74,62,72,77,76,38,22,12,12,10,12,14,16,9,4,1204,75,102,107,69,27,20,23,46,73,103,122,98,90,54,32,22,16,11,19,21,37,20,17
uSF2,DE,001,01,0000928,613,301,14,15,9,5,4,4,1,15,37,47,32,27,21,24,16,4,3,3,5,7,4,3,1,312,12,9,12,5,8,1,2,18,40,43,22,28,24,29,22,3,2,1,9,7,5,4,6
uSF2,DE,001,01,0000929,3132,1419,18,10,17,12,3,5,7,98,316,200,133,86,87,90,77,23,25,17,27,52,40,46,30,1713,17,13,15,10,4,2,10,138,302,174,81,69,91,99,86,31,34,34,56,138,125,91,93
uSF2,DE,001,01,0000930,1518,702,21,19,21,18,4,1,4,41,171,108,64,50,49,30,27,5,13,3,15,13,14,6,5,816,21,34,20,12,8,7,8,49,167,108,60,54,52,41,33,11,22,9,15,24,24,25,12
uSF2,DE,001,01,0000931,3535,1617,97,65,88,54,24,5,4,32,80,139,128,120,115,153,135,40,56,40,41,73,66,44,18,1918,89,73,80,53,18,6,4,32,109,147,140,127,124,210,136,51,65,37,67,109,112,82,47
uSF2,DE,001,01,0000932,2012,911,75,49,52,39,26,8,12,36,87,68,74,62,59,53,35,16,12,12,25,42,34,13,22,1101,58,48,60,31,25,7,12,38,95,86,76,72,70,57,47,13,27,19,40,63,65,46,46
uSF2,DE,001,01,0000933,2259,1042,71,66,68,39,24,10,15,61,115,90,84,70,70,63,44,11,14,10,25,19,23,20,30,1217,62,74,85,44,31,6,24,66,116,100,83,74,79,51,44,16,22,8,16,34,56,51,75
uSF2,DE,001,01,0000934,2339,1108,99,111,92,64,29,23,25,60,114,89,82,78,73,55,44,11,12,7,9,13,8,5,5,1231,87,132,101,47,39,21,21,75,141,107,104,102,86,47,44,9,10,8,10,23,10,6,1
uSF2,DE,001,01,0000935,2947,1238,154,139,125,90,47,10,12,43,51,47,64,61,72,52,32,21,36,18,31,51,42,13,27,1709,108,145,132,74,45,25,26,64,95,92,102,103,93,83,79,28,40,48,55,88,77,42,65
uSF2,DE,001,01,0000936,1839,833,108,115,118,53,38,23,13,21,39,45,68,44,46,23,21,9,13,8,6,10,10,2,0,1006,96,86,96,56,40,24,22,25,72,81,81,81,69,40,35,16,9,14,11,22,13,5,12
uSF2,DE,001,01,0000937,535,235,35,34,26,8,11,8,5,14,19,19,8,12,7,6,9,2,4,2,2,3,0,1,0,300,24,33,21,15,7,10,9,23,24,23,18,30,15,13,12,4,3,2,0,4,2,6,2
uSF2,DE,001,01,0000938,2138,891,100,105,74,47,32,15,12,33,66,74,52,65,50,51,31,5,15,11,7,20,11,9,6,1247,104,113,102,44,30,22,25,61,89,99,83,82,70,66,50,16,29,11,36,29,43,25,18
uSF2,DE,001,01,0000939,3176,1589,123,154,193,102,65,27,28,83,141,114,103,109,99,70,51,12,26,11,20,26,18,8,6,1587,139,173,142,95,65,36,28,66,102,115,125,98,108,68,60,14,23,25,20,36,20,17,12
uSF2,DE,001,01,0000940,3407,1654,164,169,160,120,65,31,29,77,108,121,111,123,93,73,60,15,24,20,25,26,22,8,10,1753,135,148,168,101,55,28,22,81,115,125,138,134,109,90,55,24,34,26,33,43,40,28,21
uSF2,DE,001,01,0000941,4411,2077,156,157,136,94,39,29,35,86,227,211,175,163,128,115,70,22,23,32,35,49,38,33,24,2334,138,122,109,78,51,27,35,102,199,196,216,196,163,135,95,36,48,21,40,76,102,76,73
uSF2,DE,001,01,0000942,3075,1429,98,119,103,75,35,25,14,55,110,109,102,119,103,81,63,14,23,22,20,35,45,42,17,1646,98,102,112,76,36,19,12,69,129,128,121,122,107,102,59,21,43,17,34,63,64,67,45
uSF2,DE,001,01,0000943,3577,1752,166,181,173,96,65,31,14,64,127,127,147,138,102,73,63,22,19,10,25,34,36,22,17,1825,124,155,147,78,50,22,21,65,147,162,154,130,117,87,58,23,18,13,28,49,76,71,30
uSF2,DE,001,01,0000944,1842,910,80,85,83,31,20,11,7,38,84,87,99,71,66,39,17,8,14,12,15,15,9,15,4,932,73,76,71,36,23,7,4,35,69,100,97,85,52,31,28,18,6,15,20,17,22,27,20
uSF2,DE,001,01,0000945,8254,4174,256,286,309,206,123,70,53,190,317,334,332,332,275,241,205,64,83,72,82,123,108,84,29,4080,283,289,266,151,96,48,55,145,262,284,315,317,297,236,216,57,117,64,103,175,169,93,42
uSF2,DE,001,01,0000946,8254,4174,256,286,309,206,123,70,53,190,317,334,332,332,275,241,205,64,83,72,82,123,108,84,29,4080,283,289,266,151,96,48,55,145,262,284,315,317,297,236,216,57,117,64,103,175,169,93,42
uSF2,DE,001,01,0000947,3498,1691,94,117,129,78,37,21,17,51,90,114,126,124,109,111,107,32,44,43,45,80,61,51,10,1807,98,122,107,59,33,23,17,59,89,118,123,129,143,127,114,37,57,34,55,101,86,48,28
uSF2,DE,001,01,0000948,4756,2483,162,169,180,128,86,49,36,139,227,220,206,208,166,130,98,32,39,29,37,43,47,33,19,2273,185,167,159,92,63,25,38,86,173,166,192,188,154,109,102,20,60,30,48,74,83,45,14
uSF2,DE,001,01,0000949,184,86,3,5,8,6,2,0,0,2,6,3,10,10,6,12,3,2,0,2,3,0,1,2,0,98,3,4,8,4,2,1,1,4,5,6,13,9,5,5,3,3,7,1,3,6,1,3,1
uSF2,DE,001,01,0000950,184,86,3,5,8,6,2,0,0,2,6,3,10,10,6,12,3,2,0,2,3,0,1,2,0,98,3,4,8,4,2,1,1,4,5,6,13,9,5,5,3,3,7,1,3,6,1,3,1
uSF2,DE,001,01,0000951,184,86,3,5,8,6,2,0,0,2,6,3,10,10,6,12,3,2,0,2,3,0,1,2,0,98,3,4,8,4,2,1,1,4,5,6,13,9,5,5,3,3,7,1,3,6,1,3,1
uSF2,DE,001,01,0000952,2174,1032,100,105,103,66,33,8,13,33,55,67,106,71,70,49,55,13,20,10,20,14,8,8,5,1142,92,125,106,58,46,13,20,35,69,93,124,85,56,47,44,19,30,15,20,22,12,5,6
uSF2,DE,001,01,0000953,2174,1032,100,105,103,66,33,8,13,33,55,67,106,71,70,49,55,13,20,10,20,14,8,8,5,1142,92,125,106,58,46,13,20,35,69,93,124,85,56,47,44,19,30,15,20,22,12,5,6
uSF2,DE,001,01,0000954,2174,1032,100,105,103,66,33,8,13,33,55,67,106,71,70,49,55,13,20,10,20,14,8,8,5,1142,92,125,106,58,46,13,20,35,69,93,124,85,56,47,44,19,30,15,20,22,12,5,6
uSF2,DE,001,01,0000955,1141,568,44,35,48,29,17,5,6,21,26,44,44,59,47,30,26,11,14,11,15,14,9,9,4,573,27,36,41,25,12,11,5,13,40,46,48,51,41,36,19,16,20,12,14,22,18,11,9
uSF2,DE,001,01,0000956,1141,568,44,35,48,29,17,5,6,21,26,44,44,59,47,30,26,11,14,11,15,14,9,9,4,573,27,36,41,25,12,11,5,13,40,46,48,51,41,36,19,16,20,12,14,22,18,11,9
uSF2,DE,001,01,0000957,224,104,7,4,13,5,6,2,1,2,3,13,12,11,16,2,3,1,0,0,1,0,2,0,0,120,7,11,15,5,2,4,0,0,5,11,16,19,9,4,3,2,0,3,1,1,2,0,0
uSF2,DE,001,01,0000958,917,464,37,31,35,24,11,3,5,19,23,31,32,48,31,28,23,10,14,11,14,14,7,9,4,453,20,25,26,20,10,7,5,13,35,35,32,32,32,32,16,14,20,9,13,21,16,11,9
uSF2,DE,001,01,0000959,22679,11106,478,598,656,383,173,85,59,208,386,543,702,764,759,791,797,344,581,368,620,888,541,265,117,11573,470,525,581,334,174,72,79,206,446,586,793,836,737,882,925,388,674,375,646,800,576,297,171
uSF2,DE,001,01,0000960,22679,11106,478,598,656,383,173,85,59,208,386,543,702,764,759,791,797,344,581,368,620,888,541,265,117,11573,470,525,581,334,174,72,79,206,446,586,793,836,737,882,925,388,674,375,646,800,576,297,171
uSF2,DE,001,01,0000961,8788,4348,196,188,232,136,63,35,19,72,122,225,274,320,320,356,326,151,226,141,260,323,219,101,43,4440,175,178,184,115,53,22,22,81,162,216,300,320,301,379,392,137,269,152,245,311,235,114,77
uSF2,DE,001,01,0000962,8788,4348,196,188,232,136,63,35,19,72,122,225,274,320,320,356,326,151,226,141,260,323,219,101,43,4440,175,178,184,115,53,22,22,81,162,216,300,320,301,379,392,137,269,152,245,311,235,114,77
uSF2,DE,001,01,0000963,12017,5857,242,341,340,207,86,36,36,114,214,268,348,371,357,377,416,182,332,214,327,532,299,149,69,6160,235,275,320,176,105,43,49,99,238,300,416,417,368,436,477,229,382,206,370,454,312,169,84
uSF2,DE,001,01,0000964,1629,784,20,22,32,19,7,6,3,12,20,14,28,42,36,37,66,27,63,37,62,112,67,31,21,845,22,15,27,12,9,2,3,10,18,25,30,45,32,63,76,38,88,38,54,109,69,40,20
uSF2,DE,001,01,0000965,10388,5073,222,319,308,188,79,30,33,102,194,254,320,329,321,340,350,155,269,177,265,420,232,118,48,5315,213,260,293,164,96,41,46,89,220,275,386,372,336,373,401,191,294,168,316,345,243,129,64
uSF2,DE,001,01,0000966,1874,901,40,69,84,40,24,14,4,22,50,50,80,73,82,58,55,11,23,13,33,33,23,15,5,973,60,72,77,43,16,7,8,26,46,70,77,99,68,67,56,22,23,17,31,35,29,14,10
uSF2,DE,001,01,0000967,1874,901,40,69,84,40,24,14,4,22,50,50,80,73,82,58,55,11,23,13,33,33,23,15,5,973,60,72,77,43,16,7,8,26,46,70,77,99,68,67,56,22,23,17,31,35,29,14,10
uSF2,DE,001,01,0000968,22679,11106,478,598,656,383,173,85,59,208,386,543,702,764,759,791,797,344,581,368,620,888,541,265,117,11573,470,525,581,334,174,72,79,206,446,586,793,836,737,882,925,388,674,375,646,800,576,297,171
uSF2,DE,001,01,0000969,22679,11106,478,598,656,383,173,85,59,208,386,543,702,764,759,791,797,344,581,368,620,888,541,265,117,11573,470,525,581,334,174,72,79,206,446,586,793,836,737,882,925,388,674,375,646,800,576,297,171
uSF2,DE,001,01,0000970,8788,4348,196,188,232,136,63,35,19,72,122,225,274,320,320,356,326,151,226,141,260,323,219,101,43,4440,175,178,184,115,53,22,22,81,162,216,300,320,301,379,392,137,269,152,245,311,235,114,77
uSF2,DE,001,01,0000971,8788,4348,196,188,232,136,63,35,19,72,122,225,274,320,320,356,326,151,226,141,260,323,219,101,43,4440,175,178,184,115,53,22,22,81,162,216,300,320,301,379,392,137,269,152,245,311,235,114,77
uSF2,DE,001,01,0000972,12017,5857,242,341,340,207,86,36,36,114,214,268,348,371,357,377,416,182,332,214,327,532,299,149,69,6160,235,275,320,176,105,43,49,99,238,300,416,417,368,436,477,229,382,206,370,454,312,169,84
uSF2,DE,001,01,0000973,1629,784,20,22,32,19,7,6,3,12,20,14,28,42,36,37,66,27,63,37,62,112,67,31,21,845,22,15,27,12,9,2,3,10,18,25,30,45,32,63,76,38,88,38,54,109,69,40,20
uSF2,DE,001,01,0000974,10388,5073,222,319,308,188,79,30,33,102,194,254,320,329,321,340,350,155,269,177,265,420,232,118,48,5315,213,260,293,164,96,41,46,89,220,275,386,372,336,373,401,191,294,168,316,345,243,129,64
uSF2,DE,001,01,0000975,1874,901,40,69,84,40,24,14,4,22,50,50,80,73,82,58,55,11,23,13,33,33,23,15,5,973,60,72,77,43,16,7,8,26,46,70,77,99,68,67,56,22,23,17,31,35,29,14,10
uSF2,DE,001,01,0000976,1874,901,40,69,84,40,24,14,4,22,50,50,80,73,82,58,55,11,23,13,33,33,23,15,5,973,60,72,77,43,16,7,8,26,46,70,77,99,68,67,56,22,23,17,31,35,29,14,10
uSF2,DE,001,01,0000977,22679,11106,478,598,656,383,173,85,59,208,386,543,702,764,759,791,797,344,581,368,620,888,541,265,117,11573,470,525,581,334,174,72,79,206,446,586,793,836,737,882,925,388,674,375,646,800,576,297,171
uSF2,DE,001,01,0000978,22679,11106,478,598,656,383,173,85,59,208,386,543,702,764,759,791,797,344,581,368,620,888,541,265,117,11573,470,525,581,334,174,72,79,206,446,586,793,836,737,882,925,388,674,375,646,800,576,297,171
uSF2,DE,001,01,0000979,123067,59292,4606,4997,5046,2758,1534,697,763,2220,3761,4378,5032,4795,3898,3633,2849,964,1372,939,1316,1621,1125,644,344,63775,4518,4689,4981,2790,1564,800,779,2372,4258,4620,5440,5177,4311,3876,3080,1065,1600,983,1392,2009,1648,1037,786
uSF2,DE,001,01,0000980,29017,13523,1068,1129,1029,558,348,182,212,670,991,1026,1069,1016,803,846,633,187,300,223,309,383,262,180,99,15494,1066,972,1079,581,331,225,244,747,1138,1112,1225,1170,1043,939,765,229,382,248,336,530,528,325,279
uSF2,DE,001,01,0000981,123067,59292,4606,4997,5046,2758,1534,697,763,2220,3761,4378,5032,4795,3898,3633,2849,964,1372,939,1316,1621,1125,644,344,63775,4518,4689,4981,2790,1564,800,779,2372,4258,4620,5440,5177,4311,3876,3080,1065,1600,983,1392,2009,1648,1037,786
uSF2,DE,001,01,0000982,482751,233684,17047,18531,17978,10421,5646,3144,3097,9161,16695,18432,20049,19500,16770,14765,11146,3651,4744,3007,4328,6363,4855,2800,1554,249067,16257,17547,16857,9646,5484,3145,3595,9555,17170,19571,21324,20744,18365,16060,12306,3927,5415,3479,5156,8074,7161,4650,3579
uSF2,DE,001,01,0000983,21820,10622,441,533,554,324,292,548,769,1281,938,725,587,639,637,600,460,156,200,122,178,248,222,115,53,11198,416,470,518,308,332,689,1070,1023,773,651,621,616,672,643,509,143,225,157,231,370,321,251,189
uSF2,DE,001,01,0000984,68436,31553,2564,2763,2662,1543,908,425,394,1266,2608,2534,2403,2302,2084,1749,1322,424,589,397,530,771,631,407,277,36883,2330,2620,2588,1528,918,462,450,1539,2892,2955,2891,2787,2451,2143,1637,579,761,535,766,1207,1198,892,754
uSF2,DE,001,01,0000985,482751,233684,17047,18531,17978,10421,5646,3144,3097,9161,16695,18432,20049,19500,16770,14765,11146,3651,4744,3007,4328,6363,4855,2800,1554,249067,16257,17547,16857,9646,5484,3145,3595,9555,17170,19571,21324,20744,18365,16060,12306,3927,5415,3479,5156,8074,7161,4650,3579
uSF2,DE,001,01,0000986,482751,233684,17047,18531,17978,10421,5646,3144,3097,9161,16695,18432,20049,19500,16770,14765,11146,3651,4744,3007,4328,6363,4855,2800,1554,249067,16257,17547,16857,9646,5484,3145,3595,9555,17170,19571,21324,20744,18365,16060,12306,3927,5415,3479,5156,8074,7161,4650,3579
uSF2,DE,001,01,0000987,482751,233684,17047,18531,17978,10421,5646,3144,3097,9161,16695,18432,20049,19500,16770,14765,11146,3651,4744,3007,4328,6363,4855,2800,1554,249067,16257,17547,16857,9646,5484,3145,3595,9555,17170,19571,21324,20744,18365,16060,12306,3927,5415,3479,5156,8074,7161,4650,3579