uSF2,DE,002,01,0000001,568989,277409,17275,19077,19348,11393,6007,3254,3281,9634,17419,20121,23329,23391,20612,18935,15337,5217,7206,4751,7245,10427,7558,4330,2262,291580,16388,18135,18290,10480,5841,3286,3641,9758,17817,20372,23930,23889,21398,19993,16652,5771,8149,5232,7996,12371,10494,6780,4917
uSF2,DE,002,01,0000002,445245,217140,14152,15480,15549,9044,4831,2728,2790,8078,14551,16660,18927,18761,16219,14567,11301,3658,4887,3230,4762,6951,5244,3090,1680,228105,13382,14751,14630,8418,4696,2768,3155,8242,14716,16761,19316,19155,16923,15369,12206,3955,5569,3567,5423,8599,7690,5057,3757
uSF2,DE,002,01,0000003,353801,172703,11065,12082,12049,7113,3769,2254,2255,6507,11787,13366,15047,15028,13156,11694,8998,2884,3778,2471,3674,5556,4271,2515,1384,181098,10416,11518,11168,6445,3623,2252,2641,6620,11720,13391,15283,15290,13694,12401,9769,3094,4282,2798,4298,6903,6266,4132,3094
uSF2,DE,002,01,0000004,91444,44437,3087,3398,3500,1931,1062,474,535,1571,2764,3294,3880,3733,3063,2873,2303,774,1109,759,1088,1395,973,575,296,47007,2966,3233,3462,1973,1073,516,514,1622,2996,3370,4033,3865,3229,2968,2437,861,1287,769,1125,1696,1424,925,663
uSF2,DE,002,01,0000005,59273,28186,1348,1448,1442,890,616,680,923,1950,2557,2312,2062,2094,1909,1873,1463,423,616,428,600,909,767,548,328,31087,1298,1271,1382,842,640,834,1239,1830,2434,2150,2062,2029,2075,2026,1618,499,735,486,760,1374,1470,1130,903
uSF2,DE,002,01,0000006,42897,20481,910,934,981,629,442,594,812,1594,2003,1702,1442,1476,1404,1328,1037,308,413,275,389,616,549,400,243,22416,854,834,889,558,493,749,1119,1473,1869,1565,1391,1383,1466,1445,1117,347,475,329,535,969,1035,855,666
uSF2,DE,002,01,0000007,16376,7705,438,514,461,261,174,86,111,356,554,610,620,618,505,545,426,115,203,153,211,293,218,148,85,8671,444,437,493,284,147,85,120,357,565,585,671,646,609,581,501,152,260,157,225,405,435,275,237
uSF2,DE,002,01,0000008,385972,188954,12804,14032,14107,8154,4215,2048,1867,6128,11994,14348,16865,16667,14310,12694,9838,3235,4271,2802,4162,6042,4477,2542,1352,197018,12084,13480,13248,7576,4056,1934,1916,6412,12282,14611,17254,17126,14848,13343,10588,3456,4834,3081,4663,7225,6220,3927,2854
uSF2,DE,002,01,0000009,310904,152222,10155,11148,11068,6484,3327,1660,1443,4913,9784,11664,13605,13552,11752,10366,7961,2576,3365,2196,3285,4940,3722,2115,1141,158682,9562,10684,10279,5887,3130,1503,1522,5147,9851,11826,13892,13907,12228,10956,8652,2747,3807,2469,3763,5934,5231,3277,2428
uSF2,DE,002,01,0000010,75068,36732,2649,2884,3039,1670,888,388,424,1215,2210,2684,3260,3115,2558,2328,1877,659,906,606,877,1102,755,427,211,38336,2522,2796,2969,1689,926,431,394,1265,2431,2785,3362,3219,2620,2387,1936,709,1027,612,900,1291,989,650,426
uSF2,DE,002,01,0000011,123744,60269,3123,3597,3799,2349,1176,526,491,1556,2868,3461,4402,4630,4393,4368,4036,1559,2319,1521,2483,3476,2314,1240,582,63475,3006,3384,3660,2062,1145,518,486,1516,3101,3611,4614,4734,4475,4624,4446,1816,2580,1665,2573,3772,2804,1723,1160
uSF2,DE,002,01,0000012,19638,9593,373,453,524,302,128,68,42,161,304,431,594,630,667,708,712,324,535,346,586,842,520,240,103,10045,349,409,466,263,130,57,58,168,362,488,657,700,640,788,844,371,621,352,602,756,541,267,156
uSF2,DE,002,01,0000013,91444,44437,3087,3398,3500,1931,1062,474,535,1571,2764,3294,3880,3733,3063,2873,2303,774,1109,759,1088,1395,973,575,296,47007,2966,3233,3462,1973,1073,516,514,1622,2996,3370,4033,3865,3229,2968,2437,861,1287,769,1125,1696,1424,925,663
uSF2,DE,002,01,0000014,14667,7214,534,572,625,335,172,74,93,238,405,547,729,650,486,481,349,110,157,101,174,178,110,68,26,7453,529,602,609,364,188,79,81,254,462,539,699,685,482,447,359,136,182,108,153,205,141,89,60
uSF2,DE,002,01,0000015,193,104,9,7,11,6,0,0,0,5,11,5,7,7,10,3,7,2,2,0,3,4,2,3,0,89,4,5,8,4,2,0,1,4,8,6,8,11,4,6,2,0,3,0,1,3,6,2,1
uSF2,DE,002,01,0000016,193,104,9,7,11,6,0,0,0,5,11,5,7,7,10,3,7,2,2,0,3,4,2,3,0,89,4,5,8,4,2,0,1,4,8,6,8,11,4,6,2,0,3,0,1,3,6,2,1
uSF2,DE,002,01,0000017,1640,797,88,88,74,30,13,11,23,53,76,79,94,49,24,27,20,4,7,4,13,9,6,2,3,843,96,69,80,44,20,11,17,62,80,81,84,53,29,28,25,6,10,5,12,10,10,6,5
uSF2,DE,002,01,0000018,1640,797,88,88,74,30,13,11,23,53,76,79,94,49,24,27,20,4,7,4,13,9,6,2,3,843,96,69,80,44,20,11,17,62,80,81,84,53,29,28,25,6,10,5,12,10,10,6,5
uSF2,DE,002,01,0000019,1400,700,47,46,63,40,14,5,8,21,38,54,69,65,63,65,28,7,13,7,12,18,10,3,4,700,34,51,67,37,20,11,4,22,45,52,63,73,60,56,35,8,13,5,13,13,13,3,2
uSF2,DE,002,01,0000020,1400,700,47,46,63,40,14,5,8,21,38,54,69,65,63,65,28,7,13,7,12,18,10,3,4,700,34,51,67,37,20,11,4,22,45,52,63,73,60,56,35,8,13,5,13,13,13,3,2
uSF2,DE,002,01,0000021,146,77,3,3,9,3,3,1,1,4,3,4,8,7,6,7,4,2,2,3,2,1,0,1,0,69,1,2,4,6,2,0,0,1,1,4,7,4,9,6,9,1,3,0,0,1,2,5,1
uSF2,DE,002,01,0000022,146,77,3,3,9,3,3,1,1,4,3,4,8,7,6,7,4,2,2,3,2,1,0,1,0,69,1,2,4,6,2,0,0,1,1,4,7,4,9,6,9,1,3,0,0,1,2,5,1
uSF2,DE,002,01,0000023,177,82,3,4,7,6,2,0,0,2,6,3,10,9,6,11,3,2,0,2,3,0,1,2,0,95,3,4,8,4,2,1,1,4,4,6,13,9,5,5,3,3,6,1,2,6,1,3,1
uSF2,DE,002,01,0000024,177,82,3,4,7,6,2,0,0,2,6,3,10,9,6,11,3,2,0,2,3,0,1,2,0,95,3,4,8,4,2,1,1,4,4,6,13,9,5,5,3,3,6,1,2,6,1,3,1
uSF2,DE,002,01,0000025,1442,689,53,65,62,36,17,6,7,24,39,55,74,52,45,40,39,7,13,9,17,12,7,8,2,753,55,67,64,40,25,9,15,18,51,59,85,65,35,32,32,18,22,10,16,16,10,5,4
uSF2,DE,002,01,0000026,1442,689,53,65,62,36,17,6,7,24,39,55,74,52,45,40,39,7,13,9,17,12,7,8,2,753,55,67,64,40,25,9,15,18,51,59,85,65,35,32,32,18,22,10,16,16,10,5,4
uSF2,DE,002,01,0000027,9669,4765,331,359,399,214,123,51,54,129,232,347,467,461,332,328,248,86,120,76,124,134,84,49,17,4904,336,404,378,229,117,47,43,143,273,331,439,470,340,314,253,100,125,87,109,156,99,65,46
uSF2,DE,002,01,0000028,2715,1326,93,98,126,62,40,15,17,36,57,97,140,117,102,88,68,17,32,22,36,33,19,5,6,1389,97,116,117,76,30,20,12,52,71,97,114,128,90,99,77,21,34,18,29,37,24,20,10
uSF2,DE,002,01,0000029,2403,1190,69,81,84,54,37,18,19,43,56,78,98,108,103,85,63,30,29,22,39,31,23,17,3,1213,64,94,80,62,35,7,13,35,60,64,93,120,119,78,63,37,32,36,22,38,27,21,13
uSF2,DE,002,01,0000030,1334,657,54,64,52,25,14,4,8,10,31,44,69,64,28,49,42,13,16,13,17,23,7,8,2,677,48,53,54,28,14,4,5,18,45,47,69,63,31,39,47,13,17,13,18,22,15,4,10
uSF2,DE,002,01,0000031,3217,1592,115,116,137,73,32,14,10,40,88,128,160,172,99,106,75,26,43,19,32,47,35,19,6,1625,127,141,127,63,38,16,13,38,97,123,163,159,100,98,66,29,42,20,40,59,33,20,13
uSF2,DE,002,01,0000032,42676,20670,1475,1573,1520,867,472,211,265,835,1369,1538,1759,1705,1377,1323,1051,357,517,366,527,663,459,291,150,22006,1368,1434,1516,879,485,248,266,836,1463,1523,1849,1721,1526,1397,1158,408,625,384,513,820,755,463,369
uSF2,DE,002,01,0000033,1610,768,48,61,66,46,24,5,7,24,50,45,69,73,47,51,40,13,17,12,21,25,12,8,4,842,40,40,67,38,20,9,11,43,57,55,69,78,67,58,35,17,25,20,21,27,17,14,14
uSF2,DE,002,01,0000034,1610,768,48,61,66,46,24,5,7,24,50,45,69,73,47,51,40,13,17,12,21,25,12,8,4,842,40,40,67,38,20,9,11,43,57,55,69,78,67,58,35,17,25,20,21,27,17,14,14
uSF2,DE,002,01,0000035,224,119,11,10,10,7,3,2,3,6,11,8,12,7,8,1,4,1,2,2,4,2,4,1,0,105,6,6,10,8,1,1,2,1,8,13,8,13,6,5,2,1,0,2,3,4,1,2,2
uSF2,DE,002,01,0000036,224,119,11,10,10,7,3,2,3,6,11,8,12,7,8,1,4,1,2,2,4,2,4,1,0,105,6,6,10,8,1,1,2,1,8,13,8,13,6,5,2,1,0,2,3,4,1,2,2
uSF2,DE,002,01,0000037,16376,7705,438,514,461,261,174,86,111,356,554,610,620,618,505,545,426,115,203,153,211,293,218,148,85,8671,444,437,493,284,147,85,120,357,565,585,671,646,609,581,501,152,260,157,225,405,435,275,237
uSF2,DE,002,01,0000038,2799,1339,78,101,81,51,37,16,26,64,104,121,121,93,76,73,50,18,35,32,46,53,37,19,7,1460,80,89,77,44,33,7,31,76,127,106,135,98,93,88,70,21,53,37,40,60,52,27,16
uSF2,DE,002,01,0000039,425,216,25,12,9,1,1,1,2,11,19,33,27,14,9,21,5,1,4,3,4,5,5,3,1,209,19,13,7,7,6,1,2,15,25,25,16,9,12,8,9,3,3,5,4,6,9,3,2
uSF2,DE,002,01,0000040,2789,1292,73,101,119,54,25,6,12,30,55,70,95,108,107,128,114,23,43,15,21,42,21,15,15,1497,80,94,121,73,19,9,14,38,62,95,115,122,141,152,107,25,26,17,24,49,35,30,49
uSF2,DE,002,01,0000041,1367,630,39,31,33,19,23,15,7,33,42,32,57,51,30,39,26,12,23,17,19,22,28,18,14,737,34,32,35,22,19,9,13,28,43,48,47,45,40,38,38,15,26,14,20,40,59,41,31
uSF2,DE,002,01,0000042,1394,590,18,28,22,17,10,9,11,28,50,54,36,36,45,49,42,9,14,17,11,26,26,18,14,804,20,15,27,11,5,6,9,23,50,41,33,39,44,59,49,8,32,17,24,76,84,78,54
uSF2,DE,002,01,0000043,2021,998,65,71,51,25,28,6,19,53,79,105,71,85,64,55,50,15,27,17,27,42,24,18,1,1023,64,57,37,31,23,22,13,47,76,84,84,93,63,51,65,18,24,23,24,41,58,13,12
uSF2,DE,002,01,0000044,56,26,1,5,1,2,0,1,0,1,1,2,6,1,3,0,0,0,0,0,0,1,1,0,0,30,2,3,5,1,0,0,1,1,4,2,1,3,2,1,1,0,0,0,1,1,1,0,0
uSF2,DE,002,01,0000045,338,154,9,6,10,7,5,4,1,12,7,9,10,18,12,11,5,1,8,7,6,3,1,1,1,184,8,4,11,7,3,4,5,12,10,13,13,15,15,8,11,7,6,7,7,4,4,8,2
uSF2,DE,002,01,0000046,1153,535,25,35,23,13,6,9,5,35,54,37,43,41,38,32,25,7,10,12,16,18,16,20,15,618,15,22,32,10,8,9,10,36,53,35,46,46,41,39,27,15,19,8,18,30,47,24,28
uSF2,DE,002,01,0000047,1097,529,33,31,21,16,13,4,9,36,46,53,47,48,29,31,19,9,6,4,21,15,20,9,9,568,25,26,24,12,8,9,8,38,46,48,41,50,36,30,25,15,12,7,24,25,20,26,13
uSF2,DE,002,01,0000048,1470,707,16,49,55,32,14,8,6,22,21,34,45,64,47,48,54,16,25,25,29,46,27,19,5,763,21,30,75,48,7,4,5,12,13,26,54,68,54,56,64,16,50,17,30,49,37,14,13
uSF2,DE,002,01,0000049,1308,610,52,41,30,20,12,6,11,27,63,56,54,52,41,51,31,4,8,3,9,18,11,8,2,698,71,49,34,17,12,5,9,23,50,59,80,49,56,47,32,8,9,4,9,23,27,8,17
uSF2,DE,002,01,0000050,159,79,4,3,6,4,0,1,2,4,13,4,8,7,4,7,5,0,0,1,2,2,1,0,1,80,5,3,8,1,4,0,0,8,6,3,6,9,12,4,3,1,0,1,0,1,2,3,0
uSF2,DE,002,01,0000051,2463,1268,231,139,104,27,18,23,34,129,194,169,117,66,11,3,3,0,0,0,0,0,0,0,0,1195,190,146,75,37,36,43,34,114,206,142,99,48,15,5,2,0,2,0,0,1,0,0,0
uSF2,DE,002,01,0000052,2463,1268,231,139,104,27,18,23,34,129,194,169,117,66,11,3,3,0,0,0,0,0,0,0,0,1195,190,146,75,37,36,43,34,114,206,142,99,48,15,5,2,0,2,0,0,1,0,0,0
uSF2,DE,002,01,0000053,2799,1348,60,81,101,72,34,13,9,31,51,61,93,120,107,126,95,41,53,43,47,46,39,19,6,1451,67,88,98,72,27,14,15,37,57,48,114,113,126,125,106,57,61,43,40,53,53,21,16
uSF2,DE,002,01,0000054,1472,693,31,39,47,36,15,5,5,11,31,28,44,60,45,52,51,19,35,30,34,32,23,16,4,779,29,49,44,36,15,12,3,20,26,26,56,49,63,59,55,38,45,25,32,36,35,17,9
uSF2,DE,002,01,0000055,1327,655,29,42,54,36,19,8,4,20,20,33,49,60,62,74,44,22,18,13,13,14,16,3,2,672,38,39,54,36,12,2,12,17,31,22,58,64,63,66,51,19,16,18,8,17,18,4,7
uSF2,DE,002,01,0000056,1204,571,32,50,45,21,10,1,3,12,32,47,53,49,39,34,29,12,14,11,21,21,20,14,1,633,32,38,52,19,12,6,1,16,40,47,51,48,42,37,42,9,28,14,20,33,23,14,9
uSF2,DE,002,01,0000057,734,346,19,34,27,10,5,1,3,7,16,35,36,28,24,21,17,5,10,6,13,10,13,5,1,388,20,28,39,12,5,5,0,11,25,32,38,23,22,28,28,4,17,7,14,13,11,4,2
uSF2,DE,002,01,0000058,470,225,13,16,18,11,5,0,0,5,16,12,17,21,15,13,12,7,4,5,8,11,7,9,0,245,12,10,13,7,7,1,1,5,15,15,13,25,20,9,14,5,11,7,6,20,12,10,7
uSF2,DE,002,01,0000059,185,84,4,7,4,4,0,2,1,2,6,4,11,5,6,8,5,0,4,1,0,6,2,0,2,101,7,5,12,6,1,3,2,3,5,7,10,3,10,3,8,2,3,1,3,2,5,0,0
uSF2,DE,002,01,0000060,185,84,4,7,4,4,0,2,1,2,6,4,11,5,6,8,5,0,4,1,0,6,2,0,2,101,7,5,12,6,1,3,2,3,5,7,10,3,10,3,8,2,3,1,3,2,5,0,0
uSF2,DE,002,01,0000061,178,79,7,7,4,5,1,1,1,0,3,6,8,6,7,3,3,1,0,2,4,7,3,0,0,99,9,13,8,4,1,2,1,4,5,5,9,7,4,5,3,0,3,3,1,6,1,3,2
uSF2,DE,002,01,0000062,100,42,2,3,1,4,0,0,0,0,2,3,6,3,6,1,2,0,0,1,2,4,2,0,0,58,5,6,6,4,1,1,1,0,3,3,6,4,2,2,2,0,1,2,1,3,1,3,1
uSF2,DE,002,01,0000063,221,114,11,8,8,6,4,0,0,6,7,6,8,11,3,8,6,3,3,5,2,6,1,2,0,107,6,6,7,7,2,1,0,1,4,8,13,10,4,10,5,1,7,1,4,3,5,0,2
uSF2,DE,002,01,0000064,221,114,11,8,8,6,4,0,0,6,7,6,8,11,3,8,6,3,3,5,2,6,1,2,0,107,6,6,7,7,2,1,0,1,4,8,13,10,4,10,5,1,7,1,4,3,5,0,2
uSF2,DE,002,01,0000065,768,387,16,23,23,21,23,7,8,23,21,16,26,32,25,27,18,8,9,9,13,17,14,7,1,381,13,13,26,16,15,5,3,10,21,14,27,27,28,28,24,10,12,10,15,25,17,13,9
uSF2,DE,002,01,0000066,760,382,15,22,23,19,23,7,8,23,21,15,26,32,25,27,18,8,9,9,13,17,14,7,1,378,13,13,26,16,15,5,3,10,21,14,27,25,28,28,24,10,12,10,15,25,17,12,9
uSF2,DE,002,01,0000067,907,446,36,22,35,19,11,4,5,18,23,38,31,50,34,21,22,10,12,9,15,12,8,8,3,461,22,24,29,21,9,9,5,12,33,33,40,42,32,32,18,14,14,11,12,17,17,9,6
uSF2,DE,002,01,0000068,151,70,6,1,7,2,4,1,1,1,3,12,7,9,8,1,3,1,0,0,1,0,2,0,0,81,6,6,8,4,1,2,0,0,5,6,11,14,4,3,3,1,0,3,1,1,2,0,0
uSF2,DE,002,01,0000069,756,376,30,21,28,17,7,3,4,17,20,26,24,41,26,20,19,9,12,9,14,12,6,8,3,380,16,18,21,17,8,7,5,12,28,27,29,28,28,29,15,13,14,8,11,16,15,9,6
uSF2,DE,002,01,0000070,15670,7752,578,647,656,375,170,67,82,227,414,526,710,665,584,494,399,153,200,119,189,228,138,83,48,7918,528,616,636,365,212,68,72,238,458,562,731,681,581,506,411,145,209,122,168,244,181,112,72
uSF2,DE,002,01,0000071,596,298,16,22,15,13,4,4,2,13,23,25,33,25,14,20,12,10,6,6,11,14,7,3,0,298,15,20,19,8,9,2,3,13,20,17,26,25,15,22,25,7,12,4,7,11,13,3,2
uSF2,DE,002,01,0000072,2020,1011,74,63,57,37,22,9,13,21,63,79,96,60,79,73,58,21,38,23,38,38,27,11,11,1009,48,52,55,37,19,9,5,35,77,73,87,79,93,69,69,27,32,21,26,40,30,14,12
uSF2,DE,002,01,0000074,249,116,4,7,6,4,1,0,1,4,6,7,12,15,11,5,7,4,3,3,4,5,5,2,0,133,6,12,6,4,3,1,3,9,7,8,6,9,12,8,4,5,3,5,3,4,9,5,1
uSF2,DE,002,01,0000075,848,414,23,33,27,18,6,2,8,25,23,26,36,26,33,29,28,16,14,5,6,14,9,6,1,434,21,31,35,25,10,7,9,11,24,28,26,42,34,28,34,5,17,4,5,25,6,6,1
uSF2,DE,002,01,0000076,574,277,16,16,20,14,9,2,2,6,14,11,29,27,24,19,16,7,13,9,9,8,3,3,0,297,9,17,31,17,5,4,3,10,14,14,18,29,22,20,21,8,10,7,11,10,8,5,4
uSF2,DE,002,01,0000077,745,372,20,38,52,27,8,4,1,2,9,28,37,46,35,25,15,5,4,5,2,3,3,3,0,373,26,32,44,19,11,3,6,3,12,26,42,52,32,16,19,4,6,2,2,7,3,2,4
uSF2,DE,002,01,0000078,4102,2044,175,188,186,109,46,19,23,55,109,145,187,183,141,107,90,36,44,27,41,55,39,25,14,2058,149,171,160,99,60,16,14,64,124,145,223,168,130,137,84,28,44,37,48,56,55,31,15
uSF2,DE,002,01,0000079,2110,1022,93,93,98,54,28,8,11,22,37,51,92,94,93,71,57,12,21,9,29,20,14,7,8,1088,70,112,106,71,33,9,7,30,38,77,103,90,92,62,56,17,18,13,14,24,20,15,11
uSF2,DE,002,01,0000080,4368,2173,157,186,194,99,46,17,21,79,129,152,186,188,153,143,112,42,55,31,48,69,29,23,14,2195,183,167,178,83,61,17,22,63,141,173,198,186,151,141,94,44,63,28,51,65,35,31,20
uSF2,DE,002,01,0000081,4726,2319,153,163,217,102,49,21,19,49,161,172,196,217,175,154,125,52,65,40,51,67,41,19,11,2407,125,174,192,119,50,22,14,84,166,196,198,226,184,160,120,42,65,34,58,82,39,38,19
uSF2,DE,002,01,0000082,643,300,24,22,27,13,15,1,4,9,27,22,34,21,20,13,10,5,10,2,6,4,3,5,3,343,12,28,32,18,7,3,0,14,30,33,32,36,25,18,8,8,4,3,6,10,9,2,5
uSF2,DE,002,01,0000083,643,300,24,22,27,13,15,1,4,9,27,22,34,21,20,13,10,5,10,2,6,4,3,5,3,343,12,28,32,18,7,3,0,14,30,33,32,36,25,18,8,8,4,3,6,10,9,2,5
uSF2,DE,002,01,0000084,4083,2019,129,141,190,89,34,20,15,40,134,150,162,196,155,141,115,47,55,38,45,63,38,14,8,2064,113,146,160,101,43,19,14,70,136,163,166,190,159,142,112,34,61,31,52,72,30,36,14
uSF2,DE,002,01,0000085,4083,2019,129,141,190,89,34,20,15,40,134,150,162,196,155,141,115,47,55,38,45,63,38,14,8,2064,113,146,160,101,43,19,14,70,136,163,166,190,159,142,112,34,61,31,52,72,30,36,14
uSF2,DE,002,01,0000086,8595,4176,282,321,330,192,110,45,38,118,274,284,337,344,311,276,237,70,110,72,90,150,99,54,32,4419,304,323,335,180,87,42,47,126,268,340,360,367,308,286,222,64,114,76,115,161,144,101,49
uSF2,DE,002,01,0000087,2386,1122,74,102,88,51,36,18,12,48,79,82,74,92,77,62,46,17,27,17,23,38,31,16,12,1264,88,91,109,46,32,10,17,42,75,86,92,87,100,66,49,12,31,20,40,55,53,42,21
uSF2,DE,002,01,0000088,2386,1122,74,102,88,51,36,18,12,48,79,82,74,92,77,62,46,17,27,17,23,38,31,16,12,1264,88,91,109,46,32,10,17,42,75,86,92,87,100,66,49,12,31,20,40,55,53,42,21
uSF2,DE,002,01,0000089,384,194,11,25,20,6,8,4,1,5,15,12,15,13,15,12,5,1,2,1,2,10,3,4,4,190,14,15,14,4,4,1,0,6,13,21,16,18,10,10,9,2,4,2,8,8,3,5,3
uSF2,DE,002,01,0000090,384,194,11,25,20,6,8,4,1,5,15,12,15,13,15,12,5,1,2,1,2,10,3,4,4,190,14,15,14,4,4,1,0,6,13,21,16,18,10,10,9,2,4,2,8,8,3,5,3
uSF2,DE,002,01,0000091,5750,2819,195,192,220,134,66,23,25,64,178,183,246,235,215,199,184,51,81,52,64,99,63,34,16,2931,202,214,210,127,51,30,29,78,179,232,247,260,195,206,163,49,79,54,65,97,86,53,25
uSF2,DE,002,01,0000092,2407,1178,76,88,89,48,29,10,10,30,75,79,100,97,102,81,85,27,26,16,20,47,20,17,6,1229,82,92,84,60,27,15,13,26,77,100,101,109,94,87,61,20,35,13,26,42,32,22,11
uSF2,DE,002,01,0000093,1184,572,39,34,37,31,11,6,4,15,39,28,46,53,41,46,32,7,23,13,20,20,15,7,5,612,39,44,37,31,10,4,4,16,35,41,48,61,37,45,31,15,14,16,18,27,20,16,3
uSF2,DE,002,01,0000094,2159,1069,80,70,94,55,26,7,11,19,64,76,100,85,72,72,67,17,32,23,24,32,28,10,5,1090,81,78,89,36,14,11,12,36,67,91,98,90,64,74,71,14,30,25,21,28,34,15,11
uSF2,DE,002,01,0000095,4824,2448,162,232,219,129,78,36,28,96,123,162,205,222,170,141,147,39,65,27,44,50,41,29,3,2376,161,173,203,115,67,31,20,65,153,179,216,208,176,142,135,37,60,33,50,62,46,30,14
uSF2,DE,002,01,0000096,224,108,3,10,11,8,2,2,0,4,6,8,10,9,7,5,11,1,4,1,1,2,1,2,0,116,7,7,13,5,4,1,3,3,3,11,12,10,4,6,9,4,3,1,1,3,2,2,2
uSF2,DE,002,01,0000097,224,108,3,10,11,8,2,2,0,4,6,8,10,9,7,5,11,1,4,1,1,2,1,2,0,116,7,7,13,5,4,1,3,3,3,11,12,10,4,6,9,4,3,1,1,3,2,2,2
uSF2,DE,002,01,0000098,4600,2340,159,222,208,121,76,34,28,92,117,154,195,213,163,136,136,38,61,26,43,48,40,27,3,2260,154,166,190,110,63,30,17,62,150,168,204,198,172,136,126,33,57,32,49,59,44,28,12
uSF2,DE,002,01,0000099,4600,2340,159,222,208,121,76,34,28,92,117,154,195,213,163,136,136,38,61,26,43,48,40,27,3,2260,154,166,190,110,63,30,17,62,150,168,204,198,172,136,126,33,57,32,49,59,44,28,12
uSF2,DE,002,01,0000100,6446,3078,165,211,220,105,67,38,33,100,160,237,253,235,211,225,167,64,114,78,79,119,104,57,36,3368,189,179,248,109,77,37,33,106,157,224,273,249,221,239,192,72,105,70,91,161,158,102,76
uSF2,DE,002,01,0000101,279,137,5,6,14,2,1,0,3,7,8,12,11,16,9,10,7,1,4,5,6,3,4,2,1,142,6,5,8,3,1,2,1,6,7,20,7,8,5,14,8,8,5,2,5,3,6,9,3
uSF2,DE,002,01,0000102,279,137,5,6,14,2,1,0,3,7,8,12,11,16,9,10,7,1,4,5,6,3,4,2,1,142,6,5,8,3,1,2,1,6,7,20,7,8,5,14,8,8,5,2,5,3,6,9,3
uSF2,DE,002,01,0000103,455,217,16,18,23,8,3,3,4,4,10,24,23,17,13,17,7,1,3,2,1,2,9,5,4,238,16,26,20,7,7,2,5,6,16,11,29,19,16,13,5,3,5,4,2,8,12,4,2
uSF2,DE,002,01,0000104,455,217,16,18,23,8,3,3,4,4,10,24,23,17,13,17,7,1,3,2,1,2,9,5,4,238,16,26,20,7,7,2,5,6,16,11,29,19,16,13,5,3,5,4,2,8,12,4,2
uSF2,DE,002,01,0000105,1368,588,28,40,32,19,8,13,11,39,42,48,43,36,26,47,26,8,18,8,13,34,22,15,12,780,46,40,39,16,13,12,7,40,43,44,58,32,42,43,39,9,16,16,21,61,59,48,36
uSF2,DE,002,01,0000106,1180,520,24,40,31,19,7,11,7,33,39,41,42,36,22,44,22,8,14,7,10,26,18,9,10,660,41,35,34,15,9,10,5,37,38,41,53,30,37,38,36,8,14,10,15,44,42,36,32
uSF2,DE,002,01,0000107,188,68,4,0,1,0,1,2,4,6,3,7,1,0,4,3,4,0,4,1,3,8,4,6,2,120,5,5,5,1,4,2,2,3,5,3,5,2,5,5,3,1,2,6,6,17,17,12,4
uSF2,DE,002,01,0000108,4344,2136,116,147,151,76,55,22,15,50,100,153,176,166,163,151,127,54,89,63,59,80,69,35,19,2208,121,108,181,83,56,21,20,54,91,149,179,190,158,169,140,52,79,48,63,89,81,41,35
uSF2,DE,002,01,0000109,2056,1016,64,66,81,32,29,13,10,32,58,72,89,84,72,68,56,21,33,28,20,34,32,17,5,1040,56,55,81,37,33,11,9,29,47,79,87,93,71,67,58,19,40,20,37,45,34,21,11
uSF2,DE,002,01,0000110,358,165,7,11,9,11,2,0,0,4,5,12,14,13,13,16,9,6,8,3,7,8,5,2,0,193,8,11,16,5,3,0,3,5,4,14,14,23,10,24,13,6,3,4,6,5,9,3,4
uSF2,DE,002,01,0000111,1547,771,33,61,55,29,17,9,5,12,22,55,59,54,58,55,47,22,44,25,25,32,28,11,13,776,44,30,64,34,16,8,6,15,24,44,63,60,60,58,58,22,31,21,16,34,37,14,17
uSF2,DE,002,01,0000112,383,184,12,9,6,4,7,0,0,2,15,14,14,15,20,12,15,5,4,7,7,6,4,5,1,199,13,12,20,7,4,2,2,5,16,12,15,14,17,20,11,5,5,3,4,5,1,3,3
uSF2,DE,002,01,0000113,9510,4532,316,326,369,201,114,49,59,135,272,354,401,360,333,273,227,82,81,75,123,168,119,57,38,4978,290,348,359,207,119,57,53,151,327,369,438,409,332,297,251,102,136,64,145,205,141,102,76
uSF2,DE,002,01,0000114,1149,531,44,41,62,16,14,3,8,18,26,48,48,44,41,30,11,5,6,8,6,21,14,9,8,618,30,40,47,31,12,6,6,17,40,46,53,52,44,43,25,13,12,5,12,36,11,20,17
uSF2,DE,002,01,0000115,1149,531,44,41,62,16,14,3,8,18,26,48,48,44,41,30,11,5,6,8,6,21,14,9,8,618,30,40,47,31,12,6,6,17,40,46,53,52,44,43,25,13,12,5,12,36,11,20,17
uSF2,DE,002,01,0000116,3905,1808,116,121,150,90,52,24,33,56,125,135,166,127,130,106,75,30,32,24,49,66,58,22,21,2097,124,130,161,83,60,25,26,79,143,151,174,157,155,114,79,45,47,25,59,93,79,46,42
uSF2,DE,002,01,0000117,1282,602,49,40,41,31,18,10,17,27,52,47,53,40,43,35,20,12,9,5,10,21,15,3,4,680,49,39,58,18,27,5,7,35,56,60,57,46,58,36,29,14,9,7,12,23,13,9,13
uSF2,DE,002,01,0000118,1808,854,39,56,73,42,24,9,9,20,47,52,86,59,65,54,41,14,19,15,33,31,32,17,17,954,41,55,70,41,19,11,11,29,43,56,79,73,69,57,39,27,30,14,39,48,50,29,24
uSF2,DE,002,01,0000119,815,352,28,25,36,17,10,5,7,9,26,36,27,28,22,17,14,4,4,4,6,14,11,2,0,463,34,36,33,24,14,9,8,15,44,35,38,38,28,21,11,4,8,4,8,22,16,8,5
uSF2,DE,002,01,0000120,4452,2192,156,164,157,95,47,22,18,61,121,171,187,189,162,137,141,47,43,43,68,81,47,26,9,2260,134,178,151,93,47,26,20,55,144,172,211,200,133,140,147,44,77,34,74,76,51,36,17
uSF2,DE,002,01,0000121,350,175,10,16,15,6,5,0,0,2,11,14,21,29,10,8,7,7,2,2,4,3,0,2,1,175,13,18,13,9,4,3,1,4,12,21,13,17,7,4,7,6,4,3,5,5,1,3,2
uSF2,DE,002,01,0000122,2581,1257,96,96,81,55,25,16,9,36,63,107,104,87,95,84,79,31,25,27,49,44,27,16,5,1324,75,102,84,51,23,18,14,33,81,95,115,119,80,91,99,17,50,20,43,50,32,23,9
uSF2,DE,002,01,0000123,1359,675,46,47,54,29,16,5,8,22,38,42,59,62,54,38,48,9,14,13,15,31,18,5,2,684,42,49,48,28,20,5,5,13,45,51,80,57,41,39,38,19,19,11,23,21,15,10,5
uSF2,DE,002,01,0000124,162,85,4,5,7,5,1,1,1,1,9,8,3,11,3,7,7,0,2,1,0,3,2,3,1,77,4,9,6,5,0,0,0,5,6,5,3,7,5,6,3,2,4,0,3,0,3,0,1
uSF2,DE,002,01,0000125,4824,2448,162,232,219,129,78,36,28,96,123,162,205,222,170,141,147,39,65,27,44,50,41,29,3,2376,161,173,203,115,67,31,20,65,153,179,216,208,176,142,135,37,60,33,50,62,46,30,14
uSF2,DE,002,01,0000126,2781,1308,103,97,118,53,37,13,25,47,89,109,122,113,94,73,38,24,17,15,20,45,29,14,13,1473,92,97,118,58,43,14,14,56,108,127,123,115,109,83,61,33,25,15,29,64,25,32,32
uSF2,DE,002,01,0000127,4389,2111,135,152,154,97,49,25,18,56,110,159,190,146,160,138,120,45,44,42,82,75,59,33,22,2278,116,157,154,92,42,29,25,62,124,151,194,192,149,148,138,44,80,34,82,98,82,52,33
uSF2,DE,002,01,0000128,2174,1027,74,72,90,46,26,10,15,31,64,78,86,90,76,55,62,13,18,17,21,45,29,7,2,1147,76,85,81,52,34,14,13,28,89,86,118,95,69,60,49,23,27,15,31,43,31,18,10
uSF2,DE,002,01,0000129,1025,505,29,38,29,23,7,8,5,16,39,40,49,44,24,37,25,11,12,9,13,26,12,6,3,520,32,41,39,19,10,6,6,25,33,31,42,38,32,34,37,11,21,6,13,16,21,3,4
uSF2,DE,002,01,0000130,4819,2350,152,164,138,88,59,25,39,85,167,200,217,153,155,146,108,39,73,55,84,91,64,30,18,2469,128,141,132,81,52,16,36,111,204,179,222,177,186,157,139,48,85,58,66,100,82,41,28
uSF2,DE,002,01,0000131,438,221,25,13,9,1,1,1,2,11,19,33,27,15,9,21,7,1,5,3,4,5,5,3,1,217,19,13,8,8,6,1,2,15,25,25,16,10,12,9,10,3,3,6,4,6,9,3,4
uSF2,DE,002,01,0000132,2789,1292,73,101,119,54,25,6,12,30,55,70,95,108,107,128,114,23,43,15,21,42,21,15,15,1497,80,94,121,73,19,9,14,38,62,95,115,122,141,152,107,25,26,17,24,49,35,30,49
uSF2,DE,002,01,0000133,1367,630,39,31,33,19,23,15,7,33,42,32,57,51,30,39,26,12,23,17,19,22,28,18,14,737,34,32,35,22,19,9,13,28,43,48,47,45,40,38,38,15,26,14,20,40,59,41,31
uSF2,DE,002,01,0000134,1394,590,18,28,22,17,10,9,11,28,50,54,36,36,45,49,42,9,14,17,11,26,26,18,14,804,20,15,27,11,5,6,9,23,50,41,33,39,44,59,49,8,32,17,24,76,84,78,54
uSF2,DE,002,01,0000135,2370,1156,71,81,58,33,29,6,20,57,87,115,89,103,81,61,59,19,30,21,33,51,31,20,1,1214,75,75,49,39,27,24,17,56,86,95,96,106,77,61,71,23,28,30,28,48,68,21,14
uSF2,DE,002,01,0000136,2529,1301,232,144,105,29,18,26,34,130,195,172,124,67,15,5,3,0,0,0,0,1,1,0,0,1228,192,149,80,38,36,43,35,115,210,144,100,51,17,7,3,0,4,0,1,2,1,0,0
uSF2,DE,002,01,0000137,1920,914,51,73,64,35,16,7,12,44,46,70,82,72,69,61,50,22,32,18,25,27,23,12,3,1006,49,63,85,44,18,16,14,34,59,73,77,80,71,64,73,16,40,18,26,42,21,18,5
uSF2,DE,002,01,0000138,1163,538,25,35,23,13,6,9,5,35,54,38,43,41,38,32,25,7,10,12,16,19,17,20,15,625,15,22,33,11,8,9,10,36,53,35,47,46,41,39,29,15,19,8,18,31,48,24,28
uSF2,DE,002,01,0000139,1097,529,33,31,21,16,13,4,9,36,46,53,47,48,29,31,19,9,6,4,21,15,20,9,9,568,25,26,24,12,8,9,8,38,46,48,41,50,36,30,25,15,12,7,24,25,20,26,13
uSF2,DE,002,01,0000140,2406,1169,37,72,86,53,41,16,15,46,46,61,79,105,80,76,77,25,35,35,44,64,44,26,6,1237,41,51,109,68,24,11,8,22,40,47,93,107,86,88,93,27,64,30,47,76,57,26,22
uSF2,DE,002,01,0000141,1950,923,45,56,65,49,20,5,5,16,47,41,61,81,60,65,63,26,39,35,42,43,30,25,4,1027,41,59,57,43,22,13,4,25,41,41,69,76,83,68,69,43,56,32,38,56,47,28,16
uSF2,DE,002,01,0000142,2940,1421,94,98,114,77,40,10,13,47,84,82,122,141,97,90,75,29,42,30,44,45,21,19,7,1519,65,75,119,72,33,20,19,65,99,96,116,135,117,107,71,38,49,35,43,53,40,28,24
uSF2,DE,002,01,0000143,2293,1141,60,88,114,69,31,12,5,28,36,67,94,117,100,107,65,30,25,23,17,23,20,8,2,1152,70,77,105,62,25,6,18,21,47,56,113,126,99,92,75,24,29,21,14,27,26,6,13
uSF2,DE,002,01,0000144,5634,2773,238,239,226,136,61,27,37,88,183,209,253,242,190,159,125,41,54,32,54,75,54,34,16,2861,226,226,204,124,73,22,25,88,182,217,311,230,192,189,118,37,53,43,60,83,83,41,34
uSF2,DE,002,01,0000145,2269,1101,97,96,104,58,28,9,13,26,50,55,100,101,97,78,62,12,21,10,31,22,15,7,9,1168,75,115,114,72,37,9,7,38,44,80,109,99,104,66,59,18,18,14,14,25,22,18,11
uSF2,DE,002,01,0000146,4439,2202,160,190,197,102,46,17,22,80,132,154,187,191,154,145,113,42,55,31,48,69,29,24,14,2237,187,169,181,85,63,19,22,63,145,177,205,191,153,143,95,44,64,28,52,65,35,31,20
uSF2,DE,002,01,0000147,2715,1326,93,98,126,62,40,15,17,36,57,97,140,117,102,88,68,17,32,22,36,33,19,5,6,1389,97,116,117,76,30,20,12,52,71,97,114,128,90,99,77,21,34,18,29,37,24,20,10
uSF2,DE,002,01,0000148,2726,1349,75,88,100,63,42,19,20,49,65,85,116,124,115,103,70,34,31,27,44,32,24,20,3,1377,68,100,92,72,39,8,14,40,65,74,113,133,133,89,75,41,41,37,24,45,30,29,15
uSF2,DE,002,01,0000149,4416,2143,195,217,188,91,44,21,38,87,146,178,237,165,97,116,101,24,36,26,47,44,20,18,7,2273,199,189,198,112,59,24,37,98,176,187,238,181,95,99,104,37,49,28,46,48,35,15,19
uSF2,DE,002,01,0000150,4810,2396,171,169,211,119,46,19,18,66,137,187,236,244,172,174,110,35,58,26,47,69,47,25,10,2414,165,197,202,104,60,27,18,64,150,181,234,243,164,160,103,37,58,25,54,75,52,25,16
uSF2,DE,002,01,0000151,2335,1153,69,72,95,34,30,13,13,39,66,84,100,100,81,78,63,22,37,33,26,37,36,19,6,1182,62,60,89,40,34,13,10,35,54,99,94,101,76,81,66,27,45,22,42,48,40,30,14
uSF2,DE,002,01,0000152,1538,685,31,51,40,30,9,11,7,37,44,53,56,49,35,60,31,14,22,10,17,34,23,11,10,853,49,46,50,20,12,10,8,42,42,55,67,53,47,62,49,14,17,14,21,49,51,39,36
uSF2,DE,002,01,0000153,1735,839,37,61,56,29,18,11,9,18,25,62,60,54,62,58,51,22,48,26,28,40,32,17,15,896,49,35,69,35,20,10,8,18,29,47,68,62,65,63,61,23,33,27,22,51,54,26,21
uSF2,DE,002,01,0000154,838,401,28,27,29,12,10,3,4,6,25,38,37,32,33,29,22,6,7,9,8,8,13,10,5,437,29,38,40,14,11,4,7,11,32,23,44,33,33,33,16,8,10,7,6,13,13,7,5
uSF2,DE,002,01,0000155,4726,2319,153,163,217,102,49,21,19,49,161,172,196,217,175,154,125,52,65,40,51,67,41,19,11,2407,125,174,192,119,50,22,14,84,166,196,198,226,184,160,120,42,65,34,58,82,39,38,19
uSF2,DE,002,01,0000156,2791,1372,87,113,109,54,37,14,11,35,90,91,115,110,117,93,90,28,28,17,22,57,23,21,10,1419,96,107,98,64,31,16,13,32,90,121,117,127,104,97,70,22,39,15,34,50,35,27,14
uSF2,DE,002,01,0000157,3570,1694,113,136,125,82,47,24,16,63,118,110,120,145,118,108,78,24,50,30,43,58,46,23,17,1876,127,135,146,77,42,14,21,58,110,127,140,148,137,111,80,27,45,36,58,82,73,58,24
uSF2,DE,002,01,0000158,2234,1110,82,72,96,56,26,7,11,20,66,83,102,89,76,75,69,18,32,25,25,35,30,10,5,1124,81,81,91,39,14,12,13,36,68,92,103,92,67,78,72,15,30,25,23,29,36,16,11
uSF2,DE,002,01,0000159,353801,172703,11065,12082,12049,7113,3769,2254,2255,6507,11787,13366,15047,15028,13156,11694,8998,2884,3778,2471,3674,5556,4271,2515,1384,181098,10416,11518,11168,6445,3623,2252,2641,6620,11720,13391,15283,15290,13694,12401,9769,3094,4282,2798,4298,6903,6266,4132,3094
uSF2,DE,002,01,0000160,64319,30954,1747,1967,2097,1246,530,233,203,798,1563,2051,2520,2634,2492,2321,1849,591,855,549,848,1511,1244,713,392,33365,1651,1900,1863,1156,500,208,204,811,1633,2137,2506,2771,2710,2425,2099,698,973,710,981,1808,1682,1036,903
uSF2,DE,002,01,0000161,451,222,9,10,17,10,3,1,1,4,4,11,11,20,30,26,13,3,6,3,8,14,8,8,2,229,4,16,8,7,2,1,1,2,7,15,12,25,26,24,18,8,7,6,6,4,13,5,12
uSF2,DE,002,01,0000162,451,222,9,10,17,10,3,1,1,4,4,11,11,20,30,26,13,3,6,3,8,14,8,8,2,229,4,16,8,7,2,1,1,2,7,15,12,25,26,24,18,8,7,6,6,4,13,5,12
uSF2,DE,002,01,0000163,215,100,3,6,7,1,2,0,0,3,6,9,2,10,9,11,11,2,4,3,5,2,2,1,1,115,7,10,5,4,3,0,1,2,9,5,7,9,16,7,14,6,0,2,1,2,3,1,1
uSF2,DE,002,01,0000164,215,100,3,6,7,1,2,0,0,3,6,9,2,10,9,11,11,2,4,3,5,2,2,1,1,115,7,10,5,4,3,0,1,2,9,5,7,9,16,7,14,6,0,2,1,2,3,1,1
uSF2,DE,002,01,0000165,265,123,2,3,11,6,3,0,0,1,7,7,11,8,9,16,9,5,4,3,7,5,4,1,1,142,2,6,6,3,1,1,0,1,9,10,7,10,23,12,17,1,4,1,5,7,7,4,5
uSF2,DE,002,01,0000166,259,120,2,3,11,6,3,0,0,1,7,6,11,8,8,16,9,5,3,3,7,5,4,1,1,139,1,6,6,3,1,1,0,1,9,10,7,9,23,12,16,1,4,1,5,7,7,4,5
uSF2,DE,002,01,0000167,1198,574,32,42,43,23,10,7,2,10,44,47,63,53,48,32,25,5,12,8,11,17,22,11,7,624,40,36,40,20,7,6,4,15,48,44,59,60,61,32,22,2,16,5,14,25,30,19,19
uSF2,DE,002,01,0000168,1198,574,32,42,43,23,10,7,2,10,44,47,63,53,48,32,25,5,12,8,11,17,22,11,7,624,40,36,40,20,7,6,4,15,48,44,59,60,61,32,22,2,16,5,14,25,30,19,19
uSF2,DE,002,01,0000169,6521,3115,195,212,222,133,68,30,40,89,195,249,299,309,216,189,144,50,77,50,67,125,86,42,28,3406,180,212,221,124,71,35,31,103,204,269,303,318,209,211,161,49,81,61,86,151,147,91,88
uSF2,DE,002,01,0000170,627,322,24,28,28,13,9,4,6,13,22,23,33,25,33,15,16,2,8,6,1,4,5,2,2,305,21,28,34,15,4,7,2,8,26,25,29,32,19,14,10,5,2,6,5,5,6,2,0
uSF2,DE,002,01,0000171,1588,744,34,38,53,25,12,7,10,26,56,68,70,82,63,47,35,7,19,10,14,28,18,10,12,844,28,43,44,27,17,8,8,36,66,63,72,64,57,61,38,11,12,12,25,36,36,28,52
uSF2,DE,002,01,0000172,2820,1326,104,96,90,61,26,15,15,36,86,107,118,127,69,73,63,25,30,21,29,62,44,20,9,1494,85,99,95,49,39,16,17,44,70,126,137,148,86,85,65,22,42,22,40,75,69,38,25
uSF2,DE,002,01,0000173,1486,723,33,50,51,34,21,4,9,14,31,51,78,75,51,54,30,16,20,13,23,31,19,10,5,763,46,42,48,33,11,4,4,15,42,55,65,74,47,51,48,11,25,21,16,35,36,23,11
uSF2,DE,002,01,0000174,3716,1760,108,104,119,66,27,19,11,51,120,158,176,174,142,120,81,24,36,19,30,60,60,33,22,1956,114,113,121,53,31,14,9,62,108,159,176,166,175,126,109,35,41,37,46,81,76,60,44
uSF2,DE,002,01,0000175,683,332,24,19,37,12,1,4,2,5,16,21,37,28,33,22,17,4,5,3,6,16,8,7,5,351,28,23,20,6,4,1,1,6,13,27,46,25,30,17,19,6,6,6,6,22,14,11,14
uSF2,DE,002,01,0000176,3033,1428,84,85,82,54,26,15,9,46,104,137,139,146,109,98,64,20,31,16,24,44,52,26,17,1605,86,90,101,47,27,13,8,56,95,132,130,141,145,109,90,29,35,31,40,59,62,49,30
uSF2,DE,002,01,0000177,51953,25060,1398,1590,1678,1007,417,176,149,640,1187,1570,1958,2060,2038,1927,1566,502,716,463,720,1288,1062,617,331,26893,1304,1507,1462,945,385,151,158,626,1248,1635,1942,2183,2200,2013,1758,597,824,598,823,1538,1406,856,734
uSF2,DE,002,01,0000178,1807,803,42,42,37,25,17,10,13,29,70,65,61,73,53,48,35,12,28,22,15,25,37,25,19,1004,38,49,27,17,19,11,12,28,91,65,53,46,45,63,57,17,27,23,31,60,79,63,83
uSF2,DE,002,01,0000179,452,222,8,14,10,14,3,2,1,7,13,20,17,22,18,16,6,2,8,5,6,12,11,5,2,230,16,11,11,5,1,2,1,4,14,10,18,17,22,15,10,7,4,5,13,19,10,9,6
uSF2,DE,002,01,0000180,1735,840,49,55,51,36,14,10,5,20,32,73,73,71,63,46,45,19,24,10,25,66,36,16,1,895,49,54,53,38,27,6,6,32,35,80,57,79,57,38,52,24,34,16,26,56,48,19,9
uSF2,DE,002,01,0000181,2483,1221,69,65,80,55,23,11,4,50,119,110,114,114,92,65,68,21,27,16,25,38,28,22,5,1262,61,70,80,37,23,10,8,63,106,115,95,121,81,78,66,23,28,23,21,44,44,40,25
uSF2,DE,002,01,0000182,2839,1379,79,65,78,45,19,13,9,59,107,105,135,118,121,107,66,19,36,25,27,49,50,29,18,1460,74,74,49,35,14,9,15,69,110,110,113,114,132,105,87,23,45,34,36,74,74,30,34
uSF2,DE,002,01,0000183,3701,1733,91,130,103,49,23,11,7,37,72,93,133,160,137,153,140,34,47,31,45,84,79,49,25,1968,93,109,112,64,20,11,11,34,70,104,138,169,168,166,131,36,61,47,64,97,116,90,57
uSF2,DE,002,01,0000184,2536,1204,69,88,56,35,20,6,9,23,29,61,97,111,117,99,68,23,20,16,34,71,79,43,30,1332,79,69,67,47,24,5,5,15,34,70,116,110,126,102,60,28,34,23,57,92,77,55,37
uSF2,DE,002,01,0000185,2842,1342,70,87,84,60,18,9,9,23,47,79,109,103,109,106,82,22,35,34,48,73,73,36,26,1500,67,94,98,56,23,9,12,30,45,89,113,106,131,110,88,32,51,24,34,100,94,44,50
uSF2,DE,002,01,0000186,1591,777,52,43,58,28,14,4,4,9,23,58,49,62,67,67,47,13,14,24,21,48,40,21,11,814,46,42,43,25,6,2,4,5,29,59,60,79,76,55,44,18,32,17,17,64,50,22,19
uSF2,DE,002,01,0000187,1764,889,49,71,63,35,26,3,11,38,53,46,65,62,78,82,58,15,20,4,17,49,34,5,5,875,45,53,46,36,16,5,7,29,53,46,65,69,75,76,55,18,23,16,25,52,35,14,16
uSF2,DE,002,01,0000188,3171,1548,89,104,116,65,32,11,13,44,57,96,105,133,130,141,121,38,48,28,43,67,35,24,8,1623,85,98,84,61,28,8,10,31,74,94,118,140,162,142,126,39,59,39,48,61,67,31,18
uSF2,DE,002,01,0000189,3514,1743,102,101,102,56,29,11,11,93,145,148,147,142,119,106,114,49,61,28,46,71,33,19,10,1771,79,82,84,52,24,11,15,114,157,114,147,133,120,131,148,48,61,33,48,68,57,26,19
uSF2,DE,002,01,0000190,3010,1502,75,95,103,47,25,18,7,42,81,82,121,114,121,117,99,41,59,34,47,66,62,33,13,1508,58,79,87,57,20,11,7,31,57,84,127,117,126,104,132,42,51,47,51,96,69,33,22
uSF2,DE,002,01,0000191,1956,979,62,75,97,48,19,9,3,22,35,57,67,80,68,80,65,25,27,14,27,60,26,12,1,977,55,64,64,45,14,5,10,13,35,62,73,86,86,79,72,24,30,24,40,36,37,11,12
uSF2,DE,002,01,0000192,3866,1856,98,110,140,97,28,11,8,34,52,78,139,136,160,145,143,37,62,38,75,108,95,37,25,2010,88,129,121,104,24,10,6,26,59,96,115,161,177,170,154,55,63,63,69,110,108,53,49
uSF2,DE,002,01,0000193,2067,947,51,59,75,38,17,10,8,14,24,54,89,81,86,70,51,8,22,14,28,43,38,41,26,1120,52,86,60,41,18,4,3,18,27,62,86,109,87,64,60,19,34,18,27,71,51,54,69
uSF2,DE,002,01,0000194,3185,1539,78,96,111,88,26,7,8,21,31,64,93,133,141,123,80,35,45,37,44,98,90,56,34,1646,80,81,117,51,19,7,6,15,39,69,107,140,141,125,97,30,59,30,55,121,101,68,88
uSF2,DE,002,01,0000195,2751,1329,67,92,89,54,20,6,6,23,88,105,100,109,105,91,78,23,32,15,39,75,62,35,15,1422,76,71,82,40,20,8,8,27,87,113,110,121,108,86,85,30,27,35,36,88,82,47,35
uSF2,DE,002,01,0000196,2983,1395,114,72,101,50,17,7,5,31,72,125,117,109,101,108,59,31,33,19,36,64,55,41,28,1588,90,92,73,66,17,12,8,23,91,134,125,111,123,111,92,29,32,30,41,87,90,63,48
uSF2,DE,002,01,0000197,3700,1812,84,126,124,82,27,7,8,21,37,51,127,127,152,157,141,35,68,49,72,121,99,68,29,1888,73,100,104,68,28,5,4,19,35,59,106,155,157,193,142,55,69,51,84,142,117,84,38
uSF2,DE,002,01,0000198,25142,12489,1134,1093,979,551,240,141,110,454,1065,1235,1269,1186,931,791,520,109,159,90,130,164,77,38,23,12653,1025,1088,898,505,273,158,151,540,1080,1279,1316,1221,996,789,444,99,168,77,127,187,106,74,52
uSF2,DE,002,01,0000199,2678,1248,109,110,78,48,26,21,14,57,135,137,130,109,82,69,47,10,19,10,10,16,6,4,1,1430,108,121,96,59,33,32,23,77,115,136,150,134,105,97,42,25,12,6,18,25,9,6,1
uSF2,DE,002,01,0000200,2638,1232,108,110,78,47,25,21,14,57,135,137,130,107,80,65,45,9,18,10,9,16,6,4,1,1406,105,118,96,57,33,32,23,77,114,136,144,134,105,94,40,24,11,6,18,25,8,5,1
uSF2,DE,002,01,0000201,10003,4938,406,396,378,238,98,56,44,197,468,493,471,423,398,342,229,40,57,35,52,60,27,21,9,5065,391,415,359,208,120,57,65,256,485,498,475,455,426,329,189,31,65,25,48,66,44,32,26
uSF2,DE,002,01,0000202,2777,1398,126,109,76,58,22,10,13,41,141,157,135,117,109,96,82,15,23,15,16,18,9,10,0,1379,110,97,91,54,19,12,10,50,147,154,133,114,106,101,70,11,26,6,11,20,12,13,12
uSF2,DE,002,01,0000203,5672,2734,204,202,236,155,56,37,23,141,257,249,246,237,234,200,118,19,25,13,24,33,14,7,4,2938,222,236,213,121,91,36,53,182,271,253,253,284,257,197,102,15,29,10,28,39,23,12,11
uSF2,DE,002,01,0000204,1167,611,68,69,51,11,11,5,8,14,61,78,77,51,25,32,16,1,6,4,8,5,3,3,4,556,53,67,37,19,5,4,0,19,64,81,75,29,33,21,8,3,5,6,7,5,6,6,3
uSF2,DE,002,01,0000205,387,195,8,16,15,14,9,4,0,1,9,9,13,18,30,14,13,5,3,3,4,4,1,1,1,192,6,15,18,14,5,5,2,5,3,10,14,28,30,10,9,2,5,3,2,2,3,1,0
uSF2,DE,002,01,0000206,12449,6297,619,587,521,265,116,64,52,200,462,604,668,654,451,379,243,59,82,45,68,88,44,13,13,6152,526,552,443,238,120,69,62,207,480,645,690,632,465,363,212,43,90,45,61,96,53,36,24
uSF2,DE,002,01,0000207,2822,1408,180,164,112,47,18,7,6,28,102,188,169,136,86,73,41,15,13,9,6,3,2,3,0,1414,153,173,106,57,15,8,14,26,111,198,182,128,92,59,37,4,18,3,9,5,10,3,3
uSF2,DE,002,01,0000208,4137,2111,166,191,221,108,38,21,17,32,92,149,212,252,193,144,96,18,39,19,32,39,21,6,5,2026,145,175,175,87,44,15,11,38,118,175,230,237,177,132,82,15,31,19,31,42,20,14,13
uSF2,DE,002,01,0000209,3772,1900,188,162,126,69,38,22,17,110,184,184,205,179,113,112,72,16,18,15,14,32,14,3,7,1872,168,139,111,65,44,35,30,111,162,206,203,170,131,115,55,13,21,17,14,29,16,14,3
uSF2,DE,002,01,0000210,1718,878,85,70,62,41,22,14,12,30,84,83,82,87,59,50,34,10,12,2,16,14,7,1,1,840,60,65,51,29,17,11,7,32,89,66,75,97,65,57,38,11,20,6,7,20,7,5,5
uSF2,DE,002,01,0000211,48908,24083,1389,1517,1528,893,631,714,913,1731,1869,1722,1795,1890,1605,1564,1192,369,497,328,464,632,488,237,115,24825,1295,1407,1350,845,606,856,1217,1560,1649,1617,1857,1810,1705,1705,1256,370,536,379,543,821,683,445,313
uSF2,DE,002,01,0000212,11343,5607,363,425,438,256,162,78,73,223,438,436,527,493,362,364,262,77,110,60,115,150,126,47,22,5736,352,380,352,235,115,72,66,233,427,435,514,505,392,439,279,76,123,92,133,199,174,96,47
uSF2,DE,002,01,0000213,3575,1770,103,153,140,84,51,29,22,51,146,126,169,148,99,111,90,24,39,31,39,51,44,15,5,1805,98,125,110,64,34,24,21,72,144,122,171,160,116,139,100,21,43,32,56,63,57,19,14
uSF2,DE,002,01,0000214,3224,1631,92,110,123,75,49,20,28,63,134,103,147,159,126,90,66,20,39,17,40,49,49,22,10,1593,93,109,91,74,27,22,23,64,88,124,102,142,116,118,72,29,37,32,36,84,65,34,11
uSF2,DE,002,01,0000215,4544,2206,168,162,175,97,62,29,23,109,158,207,211,186,137,163,106,33,32,12,36,50,33,10,7,2338,161,146,151,97,54,26,22,97,195,189,241,203,160,182,107,26,43,28,41,52,52,43,22
uSF2,DE,002,01,0000216,18826,9130,351,424,448,273,257,492,709,1125,711,581,484,558,570,544,411,137,180,111,164,232,212,107,49,9696,327,369,414,245,291,664,1020,907,584,502,503,526,580,578,443,133,201,142,208,340,309,240,170
uSF2,DE,002,01,0000217,1664,814,66,53,42,26,23,16,23,76,62,70,70,63,70,67,42,11,5,9,5,3,8,3,1,850,51,54,49,30,31,30,30,84,68,81,57,57,80,58,40,7,9,7,5,7,8,4,3
uSF2,DE,002,01,0000218,542,277,18,14,11,10,7,2,6,11,19,26,19,24,25,24,9,6,7,11,3,9,9,6,1,265,14,8,17,6,8,2,1,5,16,25,22,22,27,19,11,5,4,5,9,14,12,9,4
uSF2,DE,002,01,0000219,2513,1258,41,88,103,68,42,36,40,53,27,61,69,99,118,132,79,23,34,18,23,40,42,17,5,1255,38,76,92,67,16,24,41,50,29,59,82,102,125,117,72,27,25,22,38,56,40,35,22
uSF2,DE,002,01,0000220,2714,1351,41,29,57,38,39,60,131,197,121,67,62,77,69,86,72,21,37,14,28,35,39,21,10,1363,33,48,54,31,35,56,141,187,102,50,56,56,68,94,81,20,35,29,30,48,57,24,28
uSF2,DE,002,01,0000221,2882,1450,48,50,64,36,42,71,111,223,148,88,65,72,75,61,57,24,22,18,35,53,49,31,7,1432,52,54,58,32,47,85,133,139,98,67,68,75,74,73,72,22,29,26,40,59,60,52,17
uSF2,DE,002,01,0000222,2923,1441,82,116,100,56,30,19,11,80,142,132,102,133,108,90,78,29,31,17,27,35,17,5,1,1482,75,85,93,49,29,14,16,75,135,117,124,134,116,121,88,32,37,21,36,38,28,10,9
uSF2,DE,002,01,0000223,1625,672,5,10,6,5,21,88,145,180,60,34,17,16,21,9,8,4,3,4,7,10,9,4,6,953,6,1,6,3,31,150,294,173,40,14,15,10,14,13,1,2,11,1,8,37,42,46,35
uSF2,DE,002,01,0000224,2334,1112,18,20,17,8,46,193,236,283,73,44,26,19,31,27,15,1,16,4,7,7,15,5,1,1222,16,7,11,4,78,298,357,170,39,36,23,16,23,26,18,2,13,5,10,22,20,11,17
uSF2,DE,002,01,0000225,392,199,9,18,11,7,1,1,1,4,15,27,17,16,12,12,17,3,5,2,1,10,5,5,0,193,11,8,14,6,3,2,1,5,17,19,14,10,12,16,16,3,13,1,4,11,4,3,0
uSF2,DE,002,01,0000226,302,117,2,9,10,6,3,1,1,5,10,6,7,5,11,7,5,2,0,0,3,2,3,7,12,185,6,4,10,3,3,2,3,4,6,4,13,8,7,9,3,1,3,5,7,12,18,28,26
uSF2,DE,002,01,0000227,935,439,21,17,27,13,3,5,4,13,34,26,30,34,30,29,29,13,20,14,25,28,16,3,5,496,25,24,10,14,10,1,3,15,34,30,29,36,34,32,41,12,22,20,21,36,20,18,9
uSF2,DE,002,01,0000228,5130,2576,174,190,173,98,41,29,23,124,239,237,228,243,178,166,154,43,55,40,44,56,25,10,6,2554,142,166,155,88,33,32,30,151,236,206,249,220,207,198,149,50,50,29,45,54,33,19,12
uSF2,DE,002,01,0000229,5130,2576,174,190,173,98,41,29,23,124,239,237,228,243,178,166,154,43,55,40,44,56,25,10,6,2554,142,166,155,88,33,32,30,151,236,206,249,220,207,198,149,50,50,29,45,54,33,19,12
uSF2,DE,002,01,0000230,13609,6770,501,478,469,266,171,115,108,259,481,468,556,596,495,490,365,112,152,117,141,194,125,73,38,6839,474,492,429,277,167,88,101,269,402,474,591,559,526,490,385,111,162,116,157,228,167,90,84
uSF2,DE,002,01,0000231,2932,1424,116,133,132,62,27,6,6,20,38,98,154,132,134,113,78,18,22,22,20,35,22,17,19,1508,112,124,121,55,27,9,12,30,49,118,158,146,136,104,60,20,32,19,30,31,32,38,45
uSF2,DE,002,01,0000232,3159,1604,127,72,91,66,41,38,41,83,192,137,104,124,94,108,66,28,33,29,33,45,30,13,9,1555,128,116,75,76,44,23,19,97,154,98,93,109,113,97,83,24,38,30,32,55,33,10,8
uSF2,DE,002,01,0000233,984,483,32,34,25,17,15,6,6,14,34,43,37,47,35,26,29,6,13,11,18,19,8,5,3,501,35,30,21,22,12,3,4,10,29,38,42,39,44,38,23,14,15,11,13,27,13,7,11
uSF2,DE,002,01,0000234,1117,581,23,35,41,21,15,7,0,13,13,9,27,49,56,70,59,25,17,17,18,32,27,4,3,536,21,27,33,20,8,2,6,9,5,12,41,37,53,67,59,14,21,15,20,37,16,5,8
uSF2,DE,002,01,0000235,220,126,1,2,0,0,11,26,24,28,17,5,5,2,2,1,0,0,1,0,1,0,0,0,0,94,1,2,1,1,16,17,22,20,6,4,1,0,1,0,1,0,0,1,0,0,0,0,0
uSF2,DE,002,01,0000236,234,113,1,5,5,5,1,0,0,1,8,11,7,15,7,6,10,1,6,1,5,4,6,8,0,121,6,5,9,1,2,3,0,5,1,7,9,12,6,10,11,3,4,2,3,5,8,5,4
uSF2,DE,002,01,0000237,1202,582,54,41,56,25,12,2,7,27,33,36,45,43,36,34,27,11,23,16,18,21,10,5,0,620,37,48,46,31,9,6,12,10,39,44,46,57,30,34,65,6,19,13,24,22,16,3,3
uSF2,DE,002,01,0000238,1637,809,78,87,75,42,23,10,8,31,44,63,94,88,57,49,22,3,6,5,7,6,5,5,1,828,80,75,73,37,24,17,12,32,42,83,102,84,58,43,16,6,3,8,6,11,7,7,2
uSF2,DE,002,01,0000239,2124,1048,69,69,44,28,26,20,16,42,102,66,83,96,74,83,74,20,31,16,21,32,17,16,3,1076,54,65,50,34,25,8,14,56,77,70,99,75,85,97,67,24,30,17,29,40,42,15,3
uSF2,DE,002,01,0000240,29631,14373,878,992,958,600,336,178,144,458,912,1078,1257,1249,1055,807,644,231,363,239,404,654,524,270,142,15258,814,896,882,510,347,149,144,440,861,1015,1245,1300,1024,921,762,290,437,296,516,822,783,481,323
uSF2,DE,002,01,0000241,4771,2299,140,166,142,107,54,28,22,82,155,178,199,216,141,125,109,34,52,36,77,89,81,47,19,2472,172,148,143,75,51,36,42,83,136,166,189,211,141,148,124,47,75,41,92,116,120,70,46
uSF2,DE,002,01,0000242,1841,860,44,58,54,34,16,10,8,29,66,61,68,85,52,54,50,10,19,10,29,32,34,27,10,981,69,58,56,30,18,20,11,34,50,52,66,86,69,52,58,14,32,13,31,47,56,38,21
uSF2,DE,002,01,0000243,2930,1439,96,108,88,73,38,18,14,53,89,117,131,131,89,71,59,24,33,26,48,57,47,20,9,1491,103,90,87,45,33,16,31,49,86,114,123,125,72,96,66,33,43,28,61,69,64,32,25
uSF2,DE,002,01,0000244,850,430,34,27,40,15,15,8,6,12,29,38,40,41,39,31,9,6,5,6,12,7,4,6,0,420,26,24,27,11,18,5,5,13,34,40,46,39,32,20,14,2,5,10,6,11,13,11,8
uSF2,DE,002,01,0000245,504,259,22,15,22,9,9,5,5,7,22,24,26,21,22,16,4,3,4,6,7,4,4,2,0,245,16,9,12,7,11,5,5,10,27,21,22,24,18,9,6,2,3,7,5,6,6,9,5
uSF2,DE,002,01,0000246,346,171,12,12,18,6,6,3,1,5,7,14,14,20,17,15,5,3,1,0,5,3,0,4,0,175,10,15,15,4,7,0,0,3,7,19,24,15,14,11,8,0,2,3,1,5,7,2,3
uSF2,DE,002,01,0000247,24010,11644,704,799,776,478,267,142,116,364,728,862,1018,992,875,651,526,191,306,197,315,558,439,217,123,12366,616,724,712,424,278,108,97,344,691,809,1010,1050,851,753,624,241,357,245,418,695,650,400,269
uSF2,DE,002,01,0000248,3301,1664,93,103,114,74,38,22,15,38,93,110,129,148,124,83,80,30,64,36,61,98,74,26,11,1637,77,90,89,45,43,11,14,46,83,87,149,113,116,127,99,36,75,55,55,90,79,31,27
uSF2,DE,002,01,0000249,2550,1290,90,81,89,55,27,8,11,49,84,78,109,94,96,77,67,26,37,18,39,74,42,23,16,1260,59,66,66,51,28,9,5,34,67,80,105,102,102,79,67,32,36,18,57,76,71,27,23
uSF2,DE,002,01,0000250,3601,1754,103,116,127,73,41,25,26,58,115,147,162,164,138,104,85,24,30,29,39,54,62,18,14,1847,102,106,126,79,42,19,21,52,103,124,172,163,146,107,92,36,42,34,44,71,78,53,35
uSF2,DE,002,01,0000251,999,494,22,38,33,27,16,8,4,16,39,38,51,35,47,29,22,5,12,3,12,12,9,10,6,505,36,26,17,15,12,7,2,18,26,46,40,60,36,33,20,6,14,4,11,23,26,17,10
uSF2,DE,002,01,0000252,4574,2184,143,146,150,77,41,27,24,75,146,176,215,198,183,130,67,26,36,32,49,108,73,37,25,2390,123,162,153,67,60,27,19,70,157,183,185,215,156,124,94,44,50,36,69,121,126,85,64
uSF2,DE,002,01,0000253,2608,1256,82,96,93,52,32,6,7,26,62,100,104,114,89,67,68,14,28,9,25,48,72,38,24,1352,64,95,84,58,24,8,12,24,58,87,113,124,95,68,63,17,27,19,46,74,87,65,40
uSF2,DE,002,01,0000254,3760,1765,94,120,95,67,36,25,14,55,88,133,148,147,113,98,74,45,62,45,58,115,74,41,18,1995,85,112,97,61,43,15,13,42,99,120,140,171,115,132,129,45,71,50,97,147,118,59,34
uSF2,DE,002,01,0000255,2617,1237,77,99,75,53,36,21,15,47,101,80,100,92,85,63,63,21,37,25,32,49,33,24,9,1380,70,67,80,48,26,12,11,58,98,82,106,102,85,83,60,25,42,29,39,93,65,63,36
uSF2,DE,002,01,0000256,24746,12471,964,1137,1094,602,285,126,115,303,552,990,1324,1246,1008,823,614,234,237,134,169,233,157,72,52,12275,843,1109,1043,493,229,99,99,306,694,1018,1379,1171,922,803,617,197,217,132,177,273,210,137,107
uSF2,DE,002,01,0000257,4578,2194,200,193,166,105,50,27,33,94,170,232,193,182,137,113,84,33,40,16,21,45,39,10,11,2384,189,201,187,77,51,28,27,106,226,202,207,181,151,129,89,50,35,33,33,64,51,29,38
uSF2,DE,002,01,0000258,1356,651,51,54,39,28,19,10,12,33,57,68,50,49,50,26,23,6,11,6,10,21,20,3,5,705,48,56,57,17,14,8,8,41,50,60,59,46,45,32,28,14,8,10,18,32,18,10,26
uSF2,DE,002,01,0000259,3143,1501,146,138,122,77,29,16,21,61,108,161,138,130,87,85,60,25,26,8,10,22,19,6,6,1642,137,144,130,59,37,20,19,61,174,137,145,133,105,94,58,34,26,20,15,31,33,18,12
uSF2,DE,002,01,0000260,269,131,10,6,8,6,3,2,1,4,7,10,12,5,8,9,13,3,2,4,2,1,7,3,5,138,9,9,7,1,3,1,1,2,8,13,7,10,12,16,9,0,6,2,2,8,6,5,1
uSF2,DE,002,01,0000261,269,131,10,6,8,6,3,2,1,4,7,10,12,5,8,9,13,3,2,4,2,1,7,3,5,138,9,9,7,1,3,1,1,2,8,13,7,10,12,16,9,0,6,2,2,8,6,5,1
uSF2,DE,002,01,0000262,291,139,4,12,13,5,3,1,4,3,5,11,15,17,12,9,5,2,2,2,6,3,2,2,1,152,8,9,13,9,3,0,2,7,5,14,17,10,18,5,7,0,3,2,4,4,4,5,3
uSF2,DE,002,01,0000263,291,139,4,12,13,5,3,1,4,3,5,11,15,17,12,9,5,2,2,2,6,3,2,2,1,152,8,9,13,9,3,0,2,7,5,14,17,10,18,5,7,0,3,2,4,4,4,5,3
uSF2,DE,002,01,0000264,19608,10007,750,926,907,486,229,96,77,202,370,737,1104,1042,851,692,512,196,193,112,140,184,109,57,35,9601,637,890,836,406,172,70,69,191,455,789,1148,970,741,653,512,147,173,95,138,197,149,98,65
uSF2,DE,002,01,0000265,3756,1919,184,221,179,80,38,18,13,26,72,154,260,213,140,117,77,28,35,11,18,15,10,5,5,1837,152,196,167,67,32,8,12,29,105,187,259,181,127,98,89,20,22,13,19,21,16,10,7
uSF2,DE,002,01,0000266,4077,2061,171,202,196,84,55,24,14,41,68,160,246,224,194,135,91,32,35,11,26,28,17,4,3,2016,151,230,156,103,40,19,18,40,82,163,255,210,164,134,81,18,31,21,27,33,15,15,10
uSF2,DE,002,01,0000267,3610,1850,149,177,187,110,41,12,16,37,43,117,189,210,171,156,73,34,26,21,17,31,20,8,5,1760,104,164,170,92,35,12,8,37,57,140,213,200,149,109,84,28,26,14,20,37,38,14,9
uSF2,DE,002,01,0000268,216,111,11,9,2,3,1,1,2,3,8,8,7,5,6,6,8,0,2,4,2,8,6,6,3,105,8,4,6,1,0,3,0,1,7,6,6,10,5,8,6,4,3,2,1,12,3,5,4
uSF2,DE,002,01,0000269,2366,1202,64,104,113,69,30,10,8,21,42,85,118,119,113,83,64,33,22,19,19,32,17,12,5,1164,55,95,116,51,19,10,12,23,54,84,115,118,95,88,64,21,27,11,23,31,24,16,12
uSF2,DE,002,01,0000270,2164,1076,66,88,88,46,18,12,5,26,66,101,119,94,89,67,74,20,29,18,13,16,10,10,1,1088,84,92,96,37,18,4,12,29,75,104,133,84,65,79,69,27,17,9,19,13,7,7,8
uSF2,DE,002,01,0000271,2114,1103,59,78,93,62,31,11,9,29,45,62,89,124,79,78,78,32,26,14,29,41,19,9,6,1011,52,64,76,32,16,8,4,16,49,63,95,114,89,87,71,20,29,15,18,36,33,18,6
uSF2,DE,002,01,0000272,1305,685,46,47,49,32,15,8,10,19,26,50,76,53,59,50,47,17,18,14,16,13,10,3,7,620,31,45,49,23,12,6,3,16,26,42,72,53,47,50,48,9,18,10,11,14,13,13,9
uSF2,DE,002,01,0000273,51349,25184,1678,1894,1830,1017,608,338,287,1033,2051,2226,2351,2144,1771,1532,1169,390,483,339,470,642,486,315,130,26165,1677,1783,1700,966,559,315,309,1091,2058,2146,2355,2142,1918,1678,1312,435,603,344,543,833,740,434,224
uSF2,DE,002,01,0000274,9091,4482,393,455,381,198,128,60,49,157,319,422,457,390,300,245,183,52,56,41,57,76,39,18,6,4609,389,386,373,209,111,58,55,151,360,462,475,384,341,270,185,58,77,24,60,79,56,30,16
uSF2,DE,002,01,0000275,3773,1867,172,200,168,93,52,24,20,90,164,194,195,160,99,77,54,19,21,10,16,22,12,3,2,1906,172,179,153,101,51,33,30,70,172,198,199,154,121,94,65,22,27,4,16,18,18,5,4
uSF2,DE,002,01,0000276,3449,1667,132,155,144,61,43,23,22,47,96,116,159,161,135,108,80,26,26,27,33,42,20,9,2,1782,116,132,139,78,43,17,18,68,106,152,172,154,142,117,91,32,41,15,37,50,33,20,9
uSF2,DE,002,01,0000277,1869,948,89,100,69,44,33,13,7,20,59,112,103,69,66,60,49,7,9,4,8,12,7,6,2,921,101,75,81,30,17,8,7,13,82,112,104,76,78,59,29,4,9,5,7,11,5,5,3
uSF2,DE,002,01,0000278,3767,1781,93,85,112,66,34,22,16,63,133,106,143,149,153,154,111,32,53,34,46,75,51,33,17,1986,97,91,112,64,42,21,16,74,112,118,162,130,166,160,146,61,53,40,65,80,83,60,33
uSF2,DE,002,01,0000281,1663,763,29,36,52,20,14,9,8,22,43,39,61,59,66,74,62,20,25,13,21,35,27,20,8,900,36,40,57,24,21,8,2,24,43,45,70,58,78,78,82,32,20,24,27,38,44,25,24
uSF2,DE,002,01,0000282,1993,966,57,45,58,44,20,13,8,38,80,62,75,86,87,77,48,12,27,20,24,39,24,13,9,1027,53,44,55,40,20,12,14,49,58,67,87,64,87,81,60,28,30,15,38,42,39,35,9
uSF2,DE,002,01,0000283,6548,3278,173,213,238,149,80,54,31,131,226,248,259,276,228,207,176,52,66,64,78,116,107,79,27,3270,198,198,204,113,61,34,44,106,195,208,250,264,237,200,184,53,112,58,94,168,160,90,39
uSF2,DE,002,01,0000284,3041,1482,76,100,111,64,33,20,14,41,73,103,112,109,94,96,94,27,38,40,42,77,61,47,10,1559,80,98,90,47,20,19,17,49,70,98,103,115,121,111,98,34,55,34,51,99,77,47,26
uSF2,DE,002,01,0000285,3507,1796,97,113,127,85,47,34,17,90,153,145,147,167,134,111,82,25,28,24,36,39,46,32,17,1711,118,100,114,66,41,15,27,57,125,110,147,149,116,89,86,19,57,24,43,69,83,43,13
uSF2,DE,002,01,0000286,31943,15643,1019,1141,1099,604,366,202,191,682,1373,1450,1492,1329,1090,926,699,254,308,200,289,375,289,185,80,16300,993,1108,1011,580,345,202,194,760,1391,1358,1468,1364,1174,1048,797,263,361,222,324,506,441,254,136
uSF2,DE,002,01,0000287,5638,2729,240,226,178,96,56,33,31,150,333,340,294,228,172,152,71,19,24,7,17,27,21,9,5,2909,198,200,173,92,55,51,43,179,380,328,298,246,232,154,78,25,35,14,24,36,32,28,8
uSF2,DE,002,01,0000288,327,170,7,18,11,10,7,6,5,7,8,7,17,13,21,20,3,1,2,0,1,1,3,1,1,157,8,15,21,7,7,3,3,3,2,11,18,19,15,9,7,2,1,1,0,1,3,1,0
uSF2,DE,002,01,0000289,3341,1632,92,108,113,54,35,13,16,77,162,165,166,140,120,106,98,18,24,18,30,29,20,20,8,1709,109,108,100,54,29,15,18,108,154,161,159,134,124,149,89,20,30,19,20,43,35,20,11
uSF2,DE,002,01,0000290,4593,2158,138,137,148,74,37,23,23,105,270,255,210,181,134,104,82,34,43,27,37,46,29,16,5,2435,177,156,116,68,44,32,28,158,258,221,206,194,156,127,120,36,62,44,30,63,68,41,30
uSF2,DE,002,01,0000291,4012,2012,109,133,139,91,55,29,31,81,125,171,184,194,124,105,129,65,45,32,47,59,35,23,6,2000,111,149,124,76,57,23,20,72,131,139,178,150,131,142,156,46,57,28,46,68,62,27,7
uSF2,DE,002,01,0000292,483,225,18,14,20,12,3,6,3,6,9,16,24,21,12,13,7,3,7,5,6,6,3,6,5,258,15,23,15,15,9,0,0,7,9,24,22,21,19,12,12,4,7,4,9,9,7,9,6
uSF2,DE,002,01,0000293,213,97,9,9,6,3,1,0,2,4,6,4,6,5,6,6,9,1,1,0,3,6,6,2,2,116,2,6,18,5,1,1,1,2,7,4,10,10,3,8,4,1,4,2,4,7,8,5,3
uSF2,DE,002,01,0000294,1048,523,21,36,42,26,11,16,5,19,27,42,55,44,39,30,23,7,16,7,9,15,17,9,7,525,22,34,35,25,15,7,5,15,39,34,54,46,34,27,28,12,10,2,12,20,23,13,13
uSF2,DE,002,01,0000295,989,480,17,31,45,15,10,7,6,16,28,34,35,35,29,25,26,14,16,20,19,18,15,15,4,509,20,26,33,15,9,8,6,15,23,34,34,35,30,44,27,13,15,15,18,36,31,15,7
uSF2,DE,002,01,0000296,1887,944,53,88,96,45,28,8,15,40,57,55,90,77,70,39,33,16,19,11,19,22,32,17,14,943,52,73,63,38,25,15,7,37,48,73,78,91,65,51,42,15,21,17,22,44,41,16,9
uSF2,DE,002,01,0000297,2413,1173,53,95,88,55,26,16,21,35,79,73,92,95,87,68,47,17,23,20,44,69,41,19,10,1240,63,72,82,50,20,7,14,24,74,76,99,106,97,68,52,20,45,27,64,82,52,29,17
uSF2,DE,002,01,0000298,1423,704,40,48,32,20,31,10,5,31,50,50,61,43,46,53,46,21,28,21,20,16,19,10,3,719,41,43,48,28,15,7,7,27,43,40,51,47,54,66,57,30,22,13,25,29,14,8,4
uSF2,DE,002,01,0000299,126,57,3,5,5,3,1,0,0,2,2,3,1,8,10,6,3,0,2,0,0,1,1,1,0,69,3,8,4,4,2,0,2,2,3,3,9,10,8,4,1,1,0,1,0,1,1,2,0
uSF2,DE,002,01,0000300,2443,1240,127,97,80,44,22,15,5,43,114,134,139,106,91,87,41,11,19,11,10,21,10,10,3,1203,99,100,74,50,19,11,13,49,127,119,138,111,80,75,45,13,11,11,16,19,9,7,7
uSF2,DE,002,01,0000301,3007,1499,92,96,96,56,43,20,23,66,103,101,118,139,129,112,81,27,39,21,27,39,37,27,7,1508,73,95,105,53,38,22,27,62,93,91,114,144,126,112,79,25,41,24,34,48,55,33,14
uSF2,DE,002,01,0000302,26252,12870,777,956,1009,671,260,96,67,215,354,586,947,1229,1214,1189,953,282,328,216,316,440,319,264,182,13382,802,970,995,586,211,70,80,219,347,695,1045,1312,1231,1190,905,274,313,191,316,460,423,379,368
uSF2,DE,002,01,0000303,2131,972,34,35,43,28,7,4,4,22,55,64,61,76,58,76,77,36,44,31,30,59,48,41,39,1159,49,43,48,31,9,4,4,34,76,61,68,63,78,85,81,38,46,18,41,50,67,67,98
uSF2,DE,002,01,0000304,1170,503,14,13,19,12,4,3,4,18,50,44,38,47,26,38,30,16,9,4,8,20,26,26,34,667,24,22,26,14,5,3,4,32,71,39,37,39,34,36,26,15,11,6,16,19,46,50,92
uSF2,DE,002,01,0000305,961,469,20,22,24,16,3,1,0,4,5,20,23,29,32,38,47,20,35,27,22,39,22,15,5,492,25,21,22,17,4,1,0,2,5,22,31,24,44,49,55,23,35,12,25,31,21,17,6
uSF2,DE,002,01,0000306,10238,5072,281,387,415,292,120,39,31,84,128,210,353,472,498,472,362,97,112,84,136,182,135,107,75,5166,280,362,396,229,75,20,38,84,106,245,395,514,518,460,338,102,124,73,137,181,186,173,130
uSF2,DE,002,01,0000307,3637,1753,86,109,117,87,35,12,8,16,32,54,81,150,169,145,127,35,43,34,66,104,93,82,68,1884,81,109,119,71,17,2,12,22,28,62,106,168,163,157,119,36,53,39,73,111,137,114,85
uSF2,DE,002,01,0000308,6601,3319,195,278,298,205,85,27,23,68,96,156,272,322,329,327,235,62,69,50,70,78,42,25,7,3282,199,253,277,158,58,18,26,62,78,183,289,346,355,303,219,66,71,34,64,70,49,59,45
uSF2,DE,002,01,0000309,7416,3703,272,333,342,212,79,31,20,69,74,155,312,421,376,388,260,79,78,33,45,63,29,24,8,3713,267,363,337,197,68,24,22,45,72,206,360,454,371,353,251,56,55,34,44,64,33,22,15
uSF2,DE,002,01,0000310,7416,3703,272,333,342,212,79,31,20,69,74,155,312,421,376,388,260,79,78,33,45,63,29,24,8,3713,267,363,337,197,68,24,22,45,72,206,360,454,371,353,251,56,55,34,44,64,33,22,15
uSF2,DE,002,01,0000311,6467,3123,190,201,209,139,54,22,12,40,97,157,221,260,282,253,254,70,94,68,105,136,107,92,60,3344,206,202,214,129,59,22,16,56,93,183,222,281,264,292,235,78,88,66,94,165,137,117,125
uSF2,DE,002,01,0000312,2633,1249,69,77,86,44,15,9,3,11,32,59,84,112,121,102,102,36,42,30,38,53,45,42,37,1384,79,81,88,53,20,6,8,27,38,67,77,114,101,122,95,32,37,19,37,66,61,67,89
uSF2,DE,002,01,0000313,1644,802,52,41,49,36,17,2,1,8,33,35,53,48,79,68,82,18,27,13,29,39,26,30,16,842,53,49,50,31,14,2,1,7,22,49,55,66,75,82,67,28,24,20,25,40,42,21,19
uSF2,DE,002,01,0000314,2190,1072,69,83,74,59,22,11,8,21,32,63,84,100,82,83,70,16,25,25,38,44,36,20,7,1118,74,72,76,45,25,14,7,22,33,67,90,101,88,88,73,18,27,27,32,59,34,29,17
uSF2,DE,002,01,0000315,37140,17855,1127,1185,1200,728,414,172,174,541,1121,1335,1594,1576,1433,1172,959,342,414,286,474,715,514,260,119,19285,1078,1118,1228,664,390,150,173,532,1120,1443,1635,1727,1489,1311,1142,339,560,343,598,862,744,423,216
uSF2,DE,002,01,0000316,995,493,60,65,39,21,5,2,0,6,6,34,68,60,42,30,22,9,6,3,4,6,3,1,1,502,45,68,47,22,12,1,1,4,8,51,71,52,51,22,21,6,3,2,4,5,3,2,1
uSF2,DE,002,01,0000317,995,493,60,65,39,21,5,2,0,6,6,34,68,60,42,30,22,9,6,3,4,6,3,1,1,502,45,68,47,22,12,1,1,4,8,51,71,52,51,22,21,6,3,2,4,5,3,2,1
uSF2,DE,002,01,0000318,12017,5663,381,366,378,223,132,39,46,166,446,504,516,547,494,420,316,102,105,77,113,131,90,46,25,6354,380,339,415,248,112,52,46,175,475,546,568,618,540,485,394,92,156,90,141,162,159,108,53
uSF2,DE,002,01,0000319,974,469,36,26,20,28,8,3,4,5,16,28,42,34,41,36,23,18,20,16,24,22,11,5,3,505,34,24,34,17,9,5,1,10,17,34,40,44,44,30,40,10,28,15,22,26,11,7,3
uSF2,DE,002,01,0000320,4994,2300,137,117,107,54,42,10,22,100,284,248,240,191,137,155,136,42,41,34,49,65,50,27,12,2694,147,108,105,80,35,16,24,103,285,257,238,212,177,220,163,44,65,50,74,89,88,76,38
uSF2,DE,002,01,0000321,4026,1934,132,152,173,91,59,17,13,33,86,127,146,202,219,159,120,33,38,19,29,36,27,13,10,2092,114,137,200,104,42,22,15,41,85,156,175,238,220,154,145,29,43,16,39,37,53,19,8
uSF2,DE,002,01,0000322,2023,960,76,71,78,50,23,9,7,28,60,101,88,120,97,70,37,9,6,8,11,8,2,1,0,1063,85,70,76,47,26,9,6,21,88,99,115,124,99,81,46,9,20,9,6,10,7,6,4
uSF2,DE,002,01,0000323,24128,11699,686,754,783,484,277,131,128,369,669,797,1010,969,897,722,621,231,303,206,357,578,421,213,93,12429,653,711,766,394,266,97,126,353,637,846,996,1057,898,804,727,241,401,251,453,695,582,313,162
uSF2,DE,002,01,0000324,1825,891,59,56,52,36,22,13,10,31,58,63,68,73,68,44,52,14,16,9,40,58,29,17,3,934,43,54,68,29,17,8,9,21,52,72,67,87,55,55,55,17,33,18,32,59,47,24,12
uSF2,DE,002,01,0000325,2196,1103,65,70,80,48,29,10,15,37,68,95,91,81,80,62,53,24,18,26,39,52,28,20,12,1093,61,56,60,34,26,10,12,38,75,82,92,102,69,65,63,20,28,23,46,43,50,21,17
uSF2,DE,002,01,0000326,2310,1126,71,82,66,51,31,13,10,29,70,70,102,98,92,73,53,19,22,13,29,52,50,20,10,1184,67,77,90,45,31,10,12,33,68,69,94,105,77,72,57,21,24,18,35,68,55,41,15
uSF2,DE,002,01,0000327,1806,849,42,42,47,30,18,11,11,19,41,52,63,64,70,61,37,18,27,25,25,61,52,25,8,957,45,46,53,23,26,8,4,15,34,65,62,68,78,65,59,20,35,21,41,77,63,36,13
uSF2,DE,002,01,0000328,2600,1261,65,77,89,60,29,18,16,37,51,57,126,110,99,81,76,25,29,24,36,60,58,24,14,1339,75,77,86,53,34,15,17,41,36,70,112,122,98,79,82,20,32,31,58,92,65,28,16
uSF2,DE,002,01,0000329,2788,1354,75,121,100,61,36,15,12,43,70,96,118,118,122,77,62,24,27,20,34,69,39,11,4,1434,63,107,107,47,33,13,9,44,78,104,124,137,126,89,71,19,41,21,50,67,46,24,14
uSF2,DE,002,01,0000330,1664,829,64,54,61,30,27,14,12,43,46,61,74,76,69,40,29,13,13,5,26,44,19,6,3,835,64,41,52,28,15,9,14,28,51,56,84,69,49,47,39,11,21,23,36,47,30,9,12
uSF2,DE,002,01,0000331,5981,2815,150,142,182,103,56,29,29,94,204,235,256,224,191,179,158,61,86,54,87,106,100,63,26,3166,153,168,157,72,59,15,28,99,196,236,247,244,217,220,197,71,134,68,102,166,173,97,47
uSF2,DE,002,01,0000332,2958,1471,95,110,106,65,29,8,13,36,61,68,112,125,106,105,101,33,65,30,41,76,46,27,13,1487,82,85,93,63,25,9,21,34,47,92,114,123,129,112,104,42,53,28,53,76,53,33,16
uSF2,DE,002,01,0000333,4461,2295,183,180,182,90,55,37,23,79,151,201,217,198,157,168,125,31,50,35,39,41,31,10,12,2166,126,146,172,66,58,14,21,71,161,193,193,195,172,151,124,40,52,27,40,57,37,23,27
uSF2,DE,002,01,0000334,1267,646,44,44,54,27,16,9,3,20,48,42,52,47,58,48,38,11,16,19,19,17,7,2,5,621,20,39,55,30,13,6,7,17,44,38,37,60,56,42,41,16,26,10,15,22,9,8,10
uSF2,DE,002,01,0000335,1267,646,44,44,54,27,16,9,3,20,48,42,52,47,58,48,38,11,16,19,19,17,7,2,5,621,20,39,55,30,13,6,7,17,44,38,37,60,56,42,41,16,26,10,15,22,9,8,10
uSF2,DE,002,01,0000336,3194,1649,139,136,128,63,39,28,20,59,103,159,165,151,99,120,87,20,34,16,20,24,24,8,7,1545,106,107,117,36,45,8,14,54,117,155,156,135,116,109,83,24,26,17,25,35,28,15,17
uSF2,DE,002,01,0000337,2565,1317,106,105,111,50,28,26,17,50,71,120,133,124,83,99,75,14,27,11,17,18,18,8,6,1248,83,89,96,33,42,8,13,49,77,123,119,113,94,93,67,21,20,15,20,28,19,13,13
uSF2,DE,002,01,0000338,629,332,33,31,17,13,11,2,3,9,32,39,32,27,16,21,12,6,7,5,3,6,6,0,1,297,23,18,21,3,3,0,1,5,40,32,37,22,22,16,16,3,6,2,5,7,9,2,4
uSF2,DE,002,01,0000339,17794,8784,629,651,641,359,225,117,116,426,857,822,815,758,656,544,348,134,160,91,135,140,94,43,23,9010,578,636,562,341,248,148,145,484,832,785,865,784,641,561,435,138,150,113,130,151,132,85,66
uSF2,DE,002,01,0000340,17794,8784,629,651,641,359,225,117,116,426,857,822,815,758,656,544,348,134,160,91,135,140,94,43,23,9010,578,636,562,341,248,148,145,484,832,785,865,784,641,561,435,138,150,113,130,151,132,85,66
uSF2,DE,002,01,0000341,4267,2092,97,131,135,79,56,28,24,101,185,173,190,195,153,139,115,51,48,29,41,53,40,15,14,2175,115,127,143,77,58,38,34,100,148,150,208,186,145,161,145,48,61,33,35,43,53,35,32
uSF2,DE,002,01,0000342,2462,1232,72,81,91,61,33,21,22,61,108,96,104,76,120,91,64,21,35,10,24,24,11,4,2,1230,53,74,79,63,50,25,15,69,98,78,94,101,98,88,86,21,21,17,35,30,15,10,10
uSF2,DE,002,01,0000343,7473,3712,343,326,310,164,95,35,39,152,367,365,370,358,283,218,108,36,34,22,26,26,24,7,4,3761,286,321,248,147,84,52,46,195,396,395,409,353,279,214,119,31,29,19,32,40,31,22,13
uSF2,DE,002,01,0000344,3592,1748,117,113,105,55,41,33,31,112,197,188,151,129,100,96,61,26,43,30,44,37,19,17,3,1844,124,114,92,54,56,33,50,120,190,162,154,144,119,98,85,38,39,44,28,38,33,18,11
uSF2,DE,002,01,0000345,24059,11345,559,510,531,356,185,102,103,469,1292,1120,958,918,834,783,625,171,232,164,225,384,337,293,194,12714,527,465,475,313,202,85,98,566,1285,1063,887,857,886,867,673,214,273,186,327,629,726,615,495
uSF2,DE,002,01,0000346,24059,11345,559,510,531,356,185,102,103,469,1292,1120,958,918,834,783,625,171,232,164,225,384,337,293,194,12714,527,465,475,313,202,85,98,566,1285,1063,887,857,886,867,673,214,273,186,327,629,726,615,495
uSF2,DE,002,01,0000347,126,52,4,3,1,0,1,2,1,3,6,5,4,2,1,6,4,3,2,3,0,0,0,1,0,74,3,1,0,2,16,4,2,5,5,9,3,4,1,4,8,1,2,0,0,0,3,0,1
uSF2,DE,002,01,0000348,1196,574,30,27,29,16,12,5,6,17,32,41,34,58,53,61,41,7,11,8,7,22,22,18,17,622,24,22,19,20,14,3,3,13,37,44,39,49,54,62,44,11,13,4,8,34,38,40,27
uSF2,DE,002,01,0000349,631,287,11,20,19,13,3,2,0,11,22,20,21,26,34,22,19,2,5,5,6,7,10,5,4,344,14,17,18,10,5,2,2,8,25,30,20,35,32,28,21,4,7,3,9,11,16,13,14
uSF2,DE,002,01,0000350,1421,654,39,20,35,23,12,3,9,14,74,67,53,55,54,49,40,12,20,8,9,22,16,14,6,767,47,26,36,24,10,3,5,34,84,62,57,58,69,57,46,8,16,10,18,36,28,22,11
uSF2,DE,002,01,0000351,355,168,5,6,15,2,2,2,0,3,14,20,17,18,13,20,8,1,2,1,3,7,5,3,1,187,11,6,3,5,3,4,2,8,22,12,21,13,15,12,12,2,4,3,3,8,8,7,3
uSF2,DE,002,01,0000352,107,46,3,5,2,0,2,1,0,0,0,4,3,8,0,3,3,1,0,0,1,6,0,4,0,61,4,3,3,0,1,0,1,3,5,4,5,3,3,1,5,0,1,0,2,3,5,4,5
uSF2,DE,002,01,0000353,264,126,1,3,0,2,1,0,2,5,11,12,6,14,16,6,10,2,3,6,6,12,5,2,1,138,1,2,5,1,1,0,1,3,7,9,10,14,13,13,8,5,3,5,10,11,9,2,5
uSF2,DE,002,01,0000355,26,15,0,1,0,1,1,0,0,2,1,1,0,2,2,1,0,0,1,0,1,0,0,1,0,11,0,0,0,0,0,0,0,0,1,0,0,1,4,2,0,0,0,0,1,1,0,1,0
uSF2,DE,002,01,0000357,371,184,6,3,1,1,1,1,0,8,28,34,24,17,15,16,13,3,2,2,2,4,1,2,0,187,6,3,6,0,5,0,0,8,30,30,12,13,16,20,17,3,2,1,4,5,3,2,1
uSF2,DE,002,01,0000358,2765,1252,12,7,15,10,3,4,7,94,292,174,115,78,71,76,71,19,20,13,19,43,35,45,29,1513,14,12,14,8,3,1,9,133,276,156,71,57,75,82,75,24,26,31,47,116,116,83,84
uSF2,DE,002,01,0000359,1363,634,17,13,12,14,4,0,3,41,158,104,58,44,47,30,25,5,13,3,9,11,12,6,5,729,21,21,18,9,7,7,8,47,158,97,54,51,47,36,27,9,18,5,13,20,22,24,10
uSF2,DE,002,01,0000360,3416,1563,92,64,85,54,23,4,4,30,75,135,124,113,112,152,130,39,53,37,40,71,65,44,17,1853,85,65,77,46,17,6,3,30,102,143,139,121,118,205,133,50,64,36,67,107,111,81,47
uSF2,DE,002,01,0000361,1217,548,33,14,21,12,12,2,7,17,60,53,46,38,41,34,20,11,9,7,22,34,23,12,20,669,25,16,20,12,7,4,1,24,64,47,38,42,45,41,30,8,12,16,29,49,55,42,42
uSF2,DE,002,01,0000362,997,461,14,15,11,6,2,3,2,28,68,49,41,35,30,34,20,6,7,3,14,9,17,20,27,536,13,13,16,11,6,1,11,36,60,36,31,19,39,17,20,11,8,8,7,16,44,46,67
uSF2,DE,002,01,0000363,422,232,15,13,6,6,3,4,3,15,38,30,22,13,13,13,13,4,4,2,3,6,3,0,3,190,11,11,3,1,3,1,5,18,35,24,10,10,15,9,13,1,2,0,3,8,3,3,1
uSF2,DE,002,01,0000364,117,66,2,0,2,3,2,0,0,2,2,2,5,8,6,6,6,1,1,2,1,9,3,2,1,51,0,1,1,4,1,0,0,0,2,2,2,6,3,7,4,2,0,3,1,1,5,1,5
uSF2,DE,002,01,0000367,231,107,6,5,4,2,1,1,3,4,5,11,7,10,12,9,4,1,4,3,3,7,3,2,0,124,7,6,5,2,3,1,1,2,10,8,3,8,10,6,7,0,5,2,6,8,10,6,8
uSF2,DE,002,01,0000368,516,280,20,14,28,12,14,7,5,12,29,23,23,27,13,13,14,2,7,2,4,1,3,3,4,236,18,17,14,19,6,8,3,16,18,19,8,22,16,14,13,1,3,2,1,6,5,5,2
uSF2,DE,002,01,0000369,818,412,28,32,32,34,14,7,9,26,29,28,34,32,21,24,21,5,7,7,4,5,5,5,3,406,33,23,30,18,15,3,4,23,35,23,26,32,27,24,16,5,7,4,8,15,13,11,11
uSF2,DE,002,01,0000370,2578,1222,72,66,65,53,15,16,20,45,149,131,111,95,89,75,47,16,17,16,24,30,25,25,20,1356,63,51,51,32,22,14,14,55,124,122,125,95,104,81,63,22,25,15,26,54,79,65,54
uSF2,DE,002,01,0000371,1985,913,50,57,50,37,18,14,8,31,71,63,67,83,73,54,48,8,19,19,15,31,39,41,17,1072,44,50,54,43,21,12,8,44,86,73,70,68,76,62,47,14,39,14,24,57,58,63,45
uSF2,DE,002,01,0000372,1762,865,46,64,50,29,19,12,11,34,64,58,77,91,59,46,50,15,12,6,17,32,35,22,16,897,39,51,43,21,18,7,7,23,56,55,70,76,65,53,40,14,12,9,24,45,73,67,29
uSF2,DE,002,01,0000373,1157,576,41,46,34,19,13,8,3,21,53,51,58,46,52,31,16,6,12,11,14,14,9,15,3,581,36,36,32,21,16,3,3,25,29,49,62,51,37,25,22,18,4,15,16,17,19,25,20
uSF2,DE,002,01,0000374,126,52,4,3,1,0,1,2,1,3,6,5,4,2,1,6,4,3,2,3,0,0,0,1,0,74,3,1,0,2,16,4,2,5,5,9,3,4,1,4,8,1,2,0,0,0,3,0,1
uSF2,DE,002,01,0000375,1196,574,30,27,29,16,12,5,6,17,32,41,34,58,53,61,41,7,11,8,7,22,22,18,17,622,24,22,19,20,14,3,3,13,37,44,39,49,54,62,44,11,13,4,8,34,38,40,27
uSF2,DE,002,01,0000376,631,287,11,20,19,13,3,2,0,11,22,20,21,26,34,22,19,2,5,5,6,7,10,5,4,344,14,17,18,10,5,2,2,8,25,30,20,35,32,28,21,4,7,3,9,11,16,13,14
uSF2,DE,002,01,0000377,1421,654,39,20,35,23,12,3,9,14,74,67,53,55,54,49,40,12,20,8,9,22,16,14,6,767,47,26,36,24,10,3,5,34,84,62,57,58,69,57,46,8,16,10,18,36,28,22,11
uSF2,DE,002,01,0000378,355,168,5,6,15,2,2,2,0,3,14,20,17,18,13,20,8,1,2,1,3,7,5,3,1,187,11,6,3,5,3,4,2,8,22,12,21,13,15,12,12,2,4,3,3,8,8,7,3
uSF2,DE,002,01,0000379,107,46,3,5,2,0,2,1,0,0,0,4,3,8,0,3,3,1,0,0,1,6,0,4,0,61,4,3,3,0,1,0,1,3,5,4,5,3,3,1,5,0,1,0,2,3,5,4,5
uSF2,DE,002,01,0000380,264,126,1,3,0,2,1,0,2,5,11,12,6,14,16,6,10,2,3,6,6,12,5,2,1,138,1,2,5,1,1,0,1,3,7,9,10,14,13,13,8,5,3,5,10,11,9,2,5
uSF2,DE,002,01,0000382,26,15,0,1,0,1,1,0,0,2,1,1,0,2,2,1,0,0,1,0,1,0,0,1,0,11,0,0,0,0,0,0,0,0,1,0,0,1,4,2,0,0,0,0,1,1,0,1,0
uSF2,DE,002,01,0000384,371,184,6,3,1,1,1,1,0,8,28,34,24,17,15,16,13,3,2,2,2,4,1,2,0,187,6,3,6,0,5,0,0,8,30,30,12,13,16,20,17,3,2,1,4,5,3,2,1
uSF2,DE,002,01,0000385,2765,1252,12,7,15,10,3,4,7,94,292,174,115,78,71,76,71,19,20,13,19,43,35,45,29,1513,14,12,14,8,3,1,9,133,276,156,71,57,75,82,75,24,26,31,47,116,116,83,84
uSF2,DE,002,01,0000386,1363,634,17,13,12,14,4,0,3,41,158,104,58,44,47,30,25,5,13,3,9,11,12,6,5,729,21,21,18,9,7,7,8,47,158,97,54,51,47,36,27,9,18,5,13,20,22,24,10
uSF2,DE,002,01,0000387,3416,1563,92,64,85,54,23,4,4,30,75,135,124,113,112,152,130,39,53,37,40,71,65,44,17,1853,85,65,77,46,17,6,3,30,102,143,139,121,118,205,133,50,64,36,67,107,111,81,47
uSF2,DE,002,01,0000388,1217,548,33,14,21,12,12,2,7,17,60,53,46,38,41,34,20,11,9,7,22,34,23,12,20,669,25,16,20,12,7,4,1,24,64,47,38,42,45,41,30,8,12,16,29,49,55,42,42
uSF2,DE,002,01,0000389,997,461,14,15,11,6,2,3,2,28,68,49,41,35,30,34,20,6,7,3,14,9,17,20,27,536,13,13,16,11,6,1,11,36,60,36,31,19,39,17,20,11,8,8,7,16,44,46,67
uSF2,DE,002,01,0000390,422,232,15,13,6,6,3,4,3,15,38,30,22,13,13,13,13,4,4,2,3,6,3,0,3,190,11,11,3,1,3,1,5,18,35,24,10,10,15,9,13,1,2,0,3,8,3,3,1
uSF2,DE,002,01,0000391,117,66,2,0,2,3,2,0,0,2,2,2,5,8,6,6,6,1,1,2,1,9,3,2,1,51,0,1,1,4,1,0,0,0,2,2,2,6,3,7,4,2,0,3,1,1,5,1,5
uSF2,DE,002,01,0000394,231,107,6,5,4,2,1,1,3,4,5,11,7,10,12,9,4,1,4,3,3,7,3,2,0,124,7,6,5,2,3,1,1,2,10,8,3,8,10,6,7,0,5,2,6,8,10,6,8
uSF2,DE,002,01,0000395,516,280,20,14,28,12,14,7,5,12,29,23,23,27,13,13,14,2,7,2,4,1,3,3,4,236,18,17,14,19,6,8,3,16,18,19,8,22,16,14,13,1,3,2,1,6,5,5,2
uSF2,DE,002,01,0000396,818,412,28,32,32,34,14,7,9,26,29,28,34,32,21,24,21,5,7,7,4,5,5,5,3,406,33,23,30,18,15,3,4,23,35,23,26,32,27,24,16,5,7,4,8,15,13,11,11
uSF2,DE,002,01,0000397,2578,1222,72,66,65,53,15,16,20,45,149,131,111,95,89,75,47,16,17,16,24,30,25,25,20,1356,63,51,51,32,22,14,14,55,124,122,125,95,104,81,63,22,25,15,26,54,79,65,54
uSF2,DE,002,01,0000398,1985,913,50,57,50,37,18,14,8,31,71,63,67,83,73,54,48,8,19,19,15,31,39,41,17,1072,44,50,54,43,21,12,8,44,86,73,70,68,76,62,47,14,39,14,24,57,58,63,45
uSF2,DE,002,01,0000399,1762,865,46,64,50,29,19,12,11,34,64,58,77,91,59,46,50,15,12,6,17,32,35,22,16,897,39,51,43,21,18,7,7,23,56,55,70,76,65,53,40,14,12,9,24,45,73,67,29
uSF2,DE,002,01,0000400,1157,576,41,46,34,19,13,8,3,21,53,51,58,46,52,31,16,6,12,11,14,14,9,15,3,581,36,36,32,21,16,3,3,25,29,49,62,51,37,25,22,18,4,15,16,17,19,25,20
uSF2,DE,002,01,0000401,2434,1125,66,70,65,38,26,14,19,42,92,88,94,98,86,63,51,14,36,28,16,29,42,27,21,1309,59,77,61,32,23,18,14,36,117,90,82,78,64,77,67,22,29,29,36,65,85,65,83
uSF2,DE,002,01,0000402,2040,966,42,52,63,39,15,9,11,33,69,88,87,104,81,63,41,9,27,15,20,40,29,15,14,1074,44,54,55,32,18,10,9,40,80,73,90,81,79,76,48,18,16,17,38,55,46,37,58
uSF2,DE,002,01,0000403,1735,840,49,55,51,36,14,10,5,20,32,73,73,71,63,46,45,19,24,10,25,66,36,16,1,895,49,54,53,38,27,6,6,32,35,80,57,79,57,38,52,24,34,16,26,56,48,19,9
uSF2,DE,002,01,0000404,2820,1326,104,96,90,61,26,15,15,36,86,107,118,127,69,73,63,25,30,21,29,62,44,20,9,1494,85,99,95,49,39,16,17,44,70,126,137,148,86,85,65,22,42,22,40,75,69,38,25
uSF2,DE,002,01,0000405,3969,1944,102,115,131,89,44,15,13,64,150,161,192,189,143,119,98,37,47,29,48,69,47,32,10,2025,107,112,128,70,34,14,12,78,148,170,160,195,128,129,114,34,53,44,37,79,80,63,36
uSF2,DE,002,01,0000406,4720,2285,135,126,158,80,30,24,13,74,167,173,235,199,202,161,108,28,53,36,44,82,80,47,30,2435,142,133,109,61,25,16,20,90,171,181,218,199,223,154,128,31,67,45,56,121,118,60,67
uSF2,DE,002,01,0000407,3033,1428,84,85,82,54,26,15,9,46,104,137,139,146,109,98,64,20,31,16,24,44,52,26,17,1605,86,90,101,47,27,13,8,56,95,132,130,141,145,109,90,29,35,31,40,59,62,49,30
uSF2,DE,002,01,0000408,3701,1733,91,130,103,49,23,11,7,37,72,93,133,160,137,153,140,34,47,31,45,84,79,49,25,1968,93,109,112,64,20,11,11,34,70,104,138,169,168,166,131,36,61,47,64,97,116,90,57
uSF2,DE,002,01,0000409,2536,1204,69,88,56,35,20,6,9,23,29,61,97,111,117,99,68,23,20,16,34,71,79,43,30,1332,79,69,67,47,24,5,5,15,34,70,116,110,126,102,60,28,34,23,57,92,77,55,37
uSF2,DE,002,01,0000410,2842,1342,70,87,84,60,18,9,9,23,47,79,109,103,109,106,82,22,35,34,48,73,73,36,26,1500,67,94,98,56,23,9,12,30,45,89,113,106,131,110,88,32,51,24,34,100,94,44,50
uSF2,DE,002,01,0000411,2516,1219,66,62,93,45,22,5,5,17,40,84,73,100,114,120,80,23,27,33,41,69,54,31,15,1297,58,74,62,39,12,4,6,10,54,89,86,122,141,98,92,33,43,26,29,77,73,32,37
uSF2,DE,002,01,0000412,1764,889,49,71,63,35,26,3,11,38,53,46,65,62,78,82,58,15,20,4,17,49,34,5,5,875,45,53,46,36,16,5,7,29,53,46,65,69,75,76,55,18,23,16,25,52,35,14,16
uSF2,DE,002,01,0000413,3171,1548,89,104,116,65,32,11,13,44,57,96,105,133,130,141,121,38,48,28,43,67,35,24,8,1623,85,98,84,61,28,8,10,31,74,94,118,140,162,142,126,39,59,39,48,61,67,31,18
uSF2,DE,002,01,0000414,3514,1743,102,101,102,56,29,11,11,93,145,148,147,142,119,106,114,49,61,28,46,71,33,19,10,1771,79,82,84,52,24,11,15,114,157,114,147,133,120,131,148,48,61,33,48,68,57,26,19
uSF2,DE,002,01,0000415,3016,1505,75,95,103,47,25,18,7,42,81,83,121,114,122,117,99,41,60,34,47,66,62,33,13,1511,59,79,87,57,20,11,7,31,57,84,127,118,126,104,133,42,51,47,51,96,69,33,22
uSF2,DE,002,01,0000416,1956,979,62,75,97,48,19,9,3,22,35,57,67,80,68,80,65,25,27,14,27,60,26,12,1,977,55,64,64,45,14,5,10,13,35,62,73,86,86,79,72,24,30,24,40,36,37,11,12
uSF2,DE,002,01,0000417,3866,1856,98,110,140,97,28,11,8,34,52,78,139,136,160,145,143,37,62,38,75,108,95,37,25,2010,88,129,121,104,24,10,6,26,59,96,115,161,177,170,154,55,63,63,69,110,108,53,49
uSF2,DE,002,01,0000418,2067,947,51,59,75,38,17,10,8,14,24,54,89,81,86,70,51,8,22,14,28,43,38,41,26,1120,52,86,60,41,18,4,3,18,27,62,86,109,87,64,60,19,34,18,27,71,51,54,69
uSF2,DE,002,01,0000419,3185,1539,78,96,111,88,26,7,8,21,31,64,93,133,141,123,80,35,45,37,44,98,90,56,34,1646,80,81,117,51,19,7,6,15,39,69,107,140,141,125,97,30,59,30,55,121,101,68,88
uSF2,DE,002,01,0000420,2751,1329,67,92,89,54,20,6,6,23,88,105,100,109,105,91,78,23,32,15,39,75,62,35,15,1422,76,71,82,40,20,8,8,27,87,113,110,121,108,86,85,30,27,35,36,88,82,47,35
uSF2,DE,002,01,0000421,2983,1395,114,72,101,50,17,7,5,31,72,125,117,109,101,108,59,31,33,19,36,64,55,41,28,1588,90,92,73,66,17,12,8,23,91,134,125,111,123,111,92,29,32,30,41,87,90,63,48
uSF2,DE,002,01,0000422,3700,1812,84,126,124,82,27,7,8,21,37,51,127,127,152,157,141,35,68,49,72,121,99,68,29,1888,73,100,104,68,28,5,4,19,35,59,106,155,157,193,142,55,69,51,84,142,117,84,38
uSF2,DE,002,01,0000423,3803,1752,83,90,105,56,19,12,7,29,82,103,122,159,147,140,132,52,51,34,46,73,71,68,71,2051,103,103,114,67,25,9,12,59,109,106,114,153,135,158,121,47,48,25,53,85,107,117,181
uSF2,DE,002,01,0000424,2605,1271,72,63,73,52,20,3,1,12,38,55,76,77,111,106,129,38,62,40,51,78,48,45,21,1334,78,70,72,48,18,3,1,9,27,71,86,90,119,131,122,51,59,32,50,71,63,38,25
uSF2,DE,002,01,0000425,3301,1664,93,103,114,74,38,22,15,38,93,110,129,148,124,83,80,30,64,36,61,98,74,26,11,1637,77,90,89,45,43,11,14,46,83,87,149,113,116,127,99,36,75,55,55,90,79,31,27
uSF2,DE,002,01,0000426,2550,1290,90,81,89,55,27,8,11,49,84,78,109,94,96,77,67,26,37,18,39,74,42,23,16,1260,59,66,66,51,28,9,5,34,67,80,105,102,102,79,67,32,36,18,57,76,71,27,23
uSF2,DE,002,01,0000427,3601,1754,103,116,127,73,41,25,26,58,115,147,162,164,138,104,85,24,30,29,39,54,62,18,14,1847,102,106,126,79,42,19,21,52,103,124,172,163,146,107,92,36,42,34,44,71,78,53,35
uSF2,DE,002,01,0000428,1841,860,44,58,54,34,16,10,8,29,66,61,68,85,52,54,50,10,19,10,29,32,34,27,10,981,69,58,56,30,18,20,11,34,50,52,66,86,69,52,58,14,32,13,31,47,56,38,21
uSF2,DE,002,01,0000429,3929,1933,118,146,121,100,54,26,18,69,128,155,182,166,136,100,81,29,45,29,60,69,56,30,15,1996,139,116,104,60,45,23,33,67,112,160,163,185,108,129,86,39,57,32,72,92,90,49,35
uSF2,DE,002,01,0000430,4574,2184,143,146,150,77,41,27,24,75,146,176,215,198,183,130,67,26,36,32,49,108,73,37,25,2390,123,162,153,67,60,27,19,70,157,183,185,215,156,124,94,44,50,36,69,121,126,85,64
uSF2,DE,002,01,0000431,2608,1256,82,96,93,52,32,6,7,26,62,100,104,114,89,67,68,14,28,9,25,48,72,38,24,1352,64,95,84,58,24,8,12,24,58,87,113,124,95,68,63,17,27,19,46,74,87,65,40
uSF2,DE,002,01,0000432,4264,2024,116,135,117,76,45,30,19,62,110,157,174,168,135,114,78,48,66,51,65,119,78,43,18,2240,101,121,109,68,54,20,18,52,126,141,162,195,133,141,135,47,74,57,102,153,124,68,39
uSF2,DE,002,01,0000433,2963,1408,89,111,93,59,42,24,16,52,108,94,114,112,102,78,68,24,38,25,37,52,33,28,9,1555,80,82,95,52,33,12,11,61,105,101,130,117,99,94,68,25,44,32,40,98,72,65,39
uSF2,DE,002,01,0000434,1825,891,59,56,52,36,22,13,10,31,58,63,68,73,68,44,52,14,16,9,40,58,29,17,3,934,43,54,68,29,17,8,9,21,52,72,67,87,55,55,55,17,33,18,32,59,47,24,12
uSF2,DE,002,01,0000435,2196,1103,65,70,80,48,29,10,15,37,68,95,91,81,80,62,53,24,18,26,39,52,28,20,12,1093,61,56,60,34,26,10,12,38,75,82,92,102,69,65,63,20,28,23,46,43,50,21,17
uSF2,DE,002,01,0000436,2310,1126,71,82,66,51,31,13,10,29,70,70,102,98,92,73,53,19,22,13,29,52,50,20,10,1184,67,77,90,45,31,10,12,33,68,69,94,105,77,72,57,21,24,18,35,68,55,41,15
uSF2,DE,002,01,0000437,1806,849,42,42,47,30,18,11,11,19,41,52,63,64,70,61,37,18,27,25,25,61,52,25,8,957,45,46,53,23,26,8,4,15,34,65,62,68,78,65,59,20,35,21,41,77,63,36,13
uSF2,DE,002,01,0000438,2600,1261,65,77,89,60,29,18,16,37,51,57,126,110,99,81,76,25,29,24,36,60,58,24,14,1339,75,77,86,53,34,15,17,41,36,70,112,122,98,79,82,20,32,31,58,92,65,28,16
uSF2,DE,002,01,0000439,5827,2825,155,192,191,146,57,23,16,37,64,117,165,250,251,228,197,51,68,59,104,148,129,102,75,3002,155,181,195,116,42,16,19,44,61,129,196,269,251,245,192,54,80,66,105,170,171,143,102
uSF2,DE,002,01,0000440,6601,3319,195,278,298,205,85,27,23,68,96,156,272,322,329,327,235,62,69,50,70,78,42,25,7,3282,199,253,277,158,58,18,26,62,78,183,289,346,355,303,219,66,71,34,64,70,49,59,45
uSF2,DE,002,01,0000441,7416,3703,272,333,342,212,79,31,20,69,74,155,312,421,376,388,260,79,78,33,45,63,29,24,8,3713,267,363,337,197,68,24,22,45,72,206,360,454,371,353,251,56,55,34,44,64,33,22,15
uSF2,DE,002,01,0000442,3762,1823,111,147,120,89,44,18,16,48,86,124,160,152,163,113,85,42,47,36,58,91,50,16,7,1939,97,131,141,64,42,18,10,54,95,138,164,181,170,119,111,29,69,36,72,93,57,31,17
uSF2,DE,002,01,0000443,4994,2300,137,117,107,54,42,10,22,100,284,248,240,191,137,155,136,42,41,34,49,65,50,27,12,2694,147,108,105,80,35,16,24,103,285,257,238,212,177,220,163,44,65,50,74,89,88,76,38
uSF2,DE,002,01,0000444,1664,829,64,54,61,30,27,14,12,43,46,61,74,76,69,40,29,13,13,5,26,44,19,6,3,835,64,41,52,28,15,9,14,28,51,56,84,69,49,47,39,11,21,23,36,47,30,9,12
uSF2,DE,002,01,0000445,5981,2815,150,142,182,103,56,29,29,94,204,235,256,224,191,179,158,61,86,54,87,106,100,63,26,3166,153,168,157,72,59,15,28,99,196,236,247,244,217,220,197,71,134,68,102,166,173,97,47
uSF2,DE,002,01,0000446,4596,2238,182,186,174,88,50,22,29,96,100,168,224,195,204,180,120,29,27,31,25,38,30,20,20,2358,163,178,170,85,58,39,42,114,117,199,215,203,216,162,100,27,41,26,35,38,40,42,48
uSF2,DE,002,01,0000447,5130,2576,174,190,173,98,41,29,23,124,239,237,228,243,178,166,154,43,55,40,44,56,25,10,6,2554,142,166,155,88,33,32,30,151,236,206,249,220,207,198,149,50,50,29,45,54,33,19,12
uSF2,DE,002,01,0000448,5021,2427,192,217,212,112,64,19,13,39,92,161,214,262,261,189,142,42,44,22,33,42,30,14,11,2594,159,205,247,126,54,23,16,45,93,207,246,290,271,176,166,35,46,18,43,42,56,21,9
uSF2,DE,002,01,0000449,4981,2431,171,181,184,115,52,17,20,64,121,169,200,245,203,175,138,42,71,38,52,84,48,28,13,2550,167,155,169,110,51,18,27,55,135,191,229,247,228,193,150,51,73,37,59,86,60,39,20
uSF2,DE,002,01,0000450,3159,1604,127,72,91,66,41,38,41,83,192,137,104,124,94,108,66,28,33,29,33,45,30,13,9,1555,128,116,75,76,44,23,19,97,154,98,93,109,113,97,83,24,38,30,32,55,33,10,8
uSF2,DE,002,01,0000451,4267,2092,97,131,135,79,56,28,24,101,185,173,190,195,153,139,115,51,48,29,41,53,40,15,14,2175,115,127,143,77,58,38,34,100,148,150,208,186,145,161,145,48,61,33,35,43,53,35,32
uSF2,DE,002,01,0000452,2462,1232,72,81,91,61,33,21,22,61,108,96,104,76,120,91,64,21,35,10,24,24,11,4,2,1230,53,74,79,63,50,25,15,69,98,78,94,101,98,88,86,21,21,17,35,30,15,10,10
uSF2,DE,002,01,0000453,7473,3712,343,326,310,164,95,35,39,152,367,365,370,358,283,218,108,36,34,22,26,26,24,7,4,3761,286,321,248,147,84,52,46,195,396,395,409,353,279,214,119,31,29,19,32,40,31,22,13
uSF2,DE,002,01,0000454,3592,1748,117,113,105,55,41,33,31,112,197,188,151,129,100,96,61,26,43,30,44,37,19,17,3,1844,124,114,92,54,56,33,50,120,190,162,154,144,119,98,85,38,39,44,28,38,33,18,11
uSF2,DE,002,01,0000455,3575,1770,103,153,140,84,51,29,22,51,146,126,169,148,99,111,90,24,39,31,39,51,44,15,5,1805,98,125,110,64,34,24,21,72,144,122,171,160,116,139,100,21,43,32,56,63,57,19,14
uSF2,DE,002,01,0000456,1526,760,50,48,36,27,22,8,12,25,53,69,56,71,60,50,38,12,20,22,21,28,17,11,4,766,49,38,38,28,20,5,5,15,45,63,64,61,71,57,34,19,19,16,22,41,25,16,15
uSF2,DE,002,01,0000457,3630,1839,64,123,144,89,57,43,40,66,40,70,96,148,174,202,138,48,51,35,41,72,69,21,8,1791,59,103,125,87,24,26,47,59,34,71,123,139,178,184,131,41,46,37,58,93,56,40,30
uSF2,DE,002,01,0000458,2714,1351,41,29,57,38,39,60,131,197,121,67,62,77,69,86,72,21,37,14,28,35,39,21,10,1363,33,48,54,31,35,56,141,187,102,50,56,56,68,94,81,20,35,29,30,48,57,24,28
uSF2,DE,002,01,0000459,3102,1576,49,52,64,36,53,97,135,251,165,93,70,74,77,62,57,24,23,18,36,53,49,31,7,1526,53,56,59,33,63,102,155,159,104,71,69,75,75,73,73,22,29,27,40,59,60,52,17
uSF2,DE,002,01,0000460,3157,1554,83,121,105,61,31,19,11,81,150,143,109,148,115,96,88,30,37,18,32,39,23,13,1,1603,81,90,102,50,31,17,16,80,136,124,133,146,122,131,99,35,41,23,39,43,36,15,13
uSF2,DE,002,01,0000461,1625,672,5,10,6,5,21,88,145,180,60,34,17,16,21,9,8,4,3,4,7,10,9,4,6,953,6,1,6,3,31,150,294,173,40,14,15,10,14,13,1,2,11,1,8,37,42,46,35
uSF2,DE,002,01,0000462,2334,1112,18,20,17,8,46,193,236,283,73,44,26,19,31,27,15,1,16,4,7,7,15,5,1,1222,16,7,11,4,78,298,357,170,39,36,23,16,23,26,18,2,13,5,10,22,20,11,17
uSF2,DE,002,01,0000463,1594,781,63,59,67,32,13,3,8,31,48,63,62,59,48,46,44,14,28,18,19,31,15,10,0,813,48,56,60,37,12,8,13,15,56,63,60,67,42,50,81,9,32,14,28,33,20,6,3
uSF2,DE,002,01,0000464,3526,1748,94,119,133,81,52,21,29,68,144,109,154,164,137,97,71,22,39,17,43,51,52,29,22,1778,99,113,101,77,30,24,26,68,94,128,115,150,123,127,75,30,40,37,43,96,83,62,37
uSF2,DE,002,01,0000465,4544,2206,168,162,175,97,62,29,23,109,158,207,211,186,137,163,106,33,32,12,36,50,33,10,7,2338,161,146,151,97,54,26,22,97,195,189,241,203,160,182,107,26,43,28,41,52,52,43,22
uSF2,DE,002,01,0000466,1637,809,78,87,75,42,23,10,8,31,44,63,94,88,57,49,22,3,6,5,7,6,5,5,1,828,80,75,73,37,24,17,12,32,42,83,102,84,58,43,16,6,3,8,6,11,7,7,2
uSF2,DE,002,01,0000467,3059,1487,90,86,71,41,29,25,20,55,136,92,113,130,104,112,103,33,51,30,46,60,33,19,8,1572,79,89,60,48,35,9,17,71,111,100,128,111,119,129,108,36,52,37,50,76,62,33,12
uSF2,DE,002,01,0000468,5599,2806,306,273,188,105,40,17,19,69,243,345,304,253,195,169,123,30,36,24,22,21,11,13,0,2793,263,270,197,111,34,20,24,76,258,352,315,242,198,160,107,15,44,9,20,25,22,16,15
uSF2,DE,002,01,0000469,9849,4861,371,393,457,264,95,58,40,173,349,398,458,491,429,348,216,38,65,32,57,72,35,13,9,4988,370,414,388,210,135,51,64,220,390,428,489,521,434,332,186,31,61,29,59,81,44,27,24
uSF2,DE,002,01,0000470,4951,2517,256,231,179,80,49,27,25,124,245,263,282,230,138,145,89,17,25,19,22,37,17,6,11,2434,221,206,148,84,49,39,31,130,226,287,279,199,164,136,64,16,27,24,21,34,22,20,7
uSF2,DE,002,01,0000471,4743,2305,201,196,155,102,56,39,26,88,228,229,225,212,169,129,92,24,33,15,29,34,14,6,3,2438,171,198,165,100,55,48,32,114,206,212,233,259,200,161,87,37,36,15,27,47,18,11,6
uSF2,DE,002,01,0000472,5638,2729,240,226,178,96,56,33,31,150,333,340,294,228,172,152,71,19,24,7,17,27,21,9,5,2909,198,200,173,92,55,51,43,179,380,328,298,246,232,154,78,25,35,14,24,36,32,28,8
uSF2,DE,002,01,0000473,4100,2037,179,218,179,103,59,30,25,97,172,201,212,173,120,97,57,20,23,10,17,23,15,4,3,2063,180,194,174,108,58,36,33,73,174,209,217,173,136,103,72,24,28,5,16,19,21,6,4
uSF2,DE,002,01,0000474,3341,1632,92,108,113,54,35,13,16,77,162,165,166,140,120,106,98,18,24,18,30,29,20,20,8,1709,109,108,100,54,29,15,18,108,154,161,159,134,124,149,89,20,30,19,20,43,35,20,11
uSF2,DE,002,01,0000475,4593,2158,138,137,148,74,37,23,23,105,270,255,210,181,134,104,82,34,43,27,37,46,29,16,5,2435,177,156,116,68,44,32,28,158,258,221,206,194,156,127,120,36,62,44,30,63,68,41,30
uSF2,DE,002,01,0000476,4012,2012,109,133,139,91,55,29,31,81,125,171,184,194,124,105,129,65,45,32,47,59,35,23,6,2000,111,149,124,76,57,23,20,72,131,139,178,150,131,142,156,46,57,28,46,68,62,27,7
uSF2,DE,002,01,0000477,3041,1482,76,100,111,64,33,20,14,41,73,103,112,109,94,96,94,27,38,40,42,77,61,47,10,1559,80,98,90,47,20,19,17,49,70,98,103,115,121,111,98,34,55,34,51,99,77,47,26
uSF2,DE,002,01,0000478,3990,2021,115,127,147,97,50,40,20,96,162,161,171,188,146,124,89,28,35,29,42,45,49,38,22,1969,133,123,129,81,50,15,27,64,134,134,169,170,135,101,98,23,64,28,52,78,90,52,19
uSF2,DE,002,01,0000479,213,97,9,9,6,3,1,0,2,4,6,4,6,5,6,6,9,1,1,0,3,6,6,2,2,116,2,6,18,5,1,1,1,2,7,4,10,10,3,8,4,1,4,2,4,7,8,5,3
uSF2,DE,002,01,0000480,1048,523,21,36,42,26,11,16,5,19,27,42,55,44,39,30,23,7,16,7,9,15,17,9,7,525,22,34,35,25,15,7,5,15,39,34,54,46,34,27,28,12,10,2,12,20,23,13,13
uSF2,DE,002,01,0000481,989,480,17,31,45,15,10,7,6,16,28,34,35,35,29,25,26,14,16,20,19,18,15,15,4,509,20,26,33,15,9,8,6,15,23,34,34,35,30,44,27,13,15,15,18,36,31,15,7
uSF2,DE,002,01,0000482,1904,952,53,89,96,45,28,8,15,42,59,55,91,77,70,40,33,16,20,11,19,22,32,17,14,952,53,74,63,38,25,15,7,37,51,73,78,93,65,51,43,15,21,18,22,44,41,16,9
uSF2,DE,002,01,0000483,2507,1217,60,98,90,57,26,16,21,36,87,78,98,99,87,70,48,17,23,21,45,70,41,19,10,1290,70,78,82,50,21,8,14,25,82,82,104,112,98,69,55,21,48,27,64,82,52,29,17
uSF2,DE,002,01,0000484,1423,704,40,48,32,20,31,10,5,31,50,50,61,43,46,53,46,21,28,21,20,16,19,10,3,719,41,43,48,28,15,7,7,27,43,40,51,47,54,66,57,30,22,13,25,29,14,8,4
uSF2,DE,002,01,0000485,1663,763,29,36,52,20,14,9,8,22,43,39,61,59,66,74,62,20,25,13,21,35,27,20,8,900,36,40,57,24,21,8,2,24,43,45,70,58,78,78,82,32,20,24,27,38,44,25,24
uSF2,DE,002,01,0000486,1993,966,57,45,58,44,20,13,8,38,80,62,75,86,87,77,48,12,27,20,24,39,24,13,9,1027,53,44,55,40,20,12,14,49,58,67,87,64,87,81,60,28,30,15,38,42,39,35,9
uSF2,DE,002,01,0000487,3575,1724,135,160,149,64,44,23,22,49,98,119,160,169,145,114,83,26,28,27,33,43,21,10,2,1851,119,140,143,82,45,17,20,70,109,155,181,164,150,121,92,33,41,16,37,51,34,22,9
uSF2,DE,002,01,0000488,4312,2188,216,197,149,88,55,28,12,63,173,246,242,175,157,147,90,18,28,15,18,33,17,16,5,2124,200,175,155,80,36,19,20,62,209,231,242,187,158,134,74,17,20,16,23,30,14,12,10
uSF2,DE,002,01,0000489,3007,1499,92,96,96,56,43,20,23,66,103,101,118,139,129,112,81,27,39,21,27,39,37,27,7,1508,73,95,105,53,38,22,27,62,93,91,114,144,126,112,79,25,41,24,34,48,55,33,14
uSF2,DE,002,01,0000490,2565,1317,106,105,111,50,28,26,17,50,71,120,133,124,83,99,75,14,27,11,17,18,18,8,6,1248,83,89,96,33,42,8,13,49,77,123,119,113,94,93,67,21,20,15,20,28,19,13,13
uSF2,DE,002,01,0000491,1896,978,77,75,71,40,27,11,6,29,80,81,84,74,74,69,50,17,23,24,22,23,13,2,6,918,43,57,76,33,16,6,8,22,84,70,74,82,78,58,57,19,32,12,20,29,18,10,14
uSF2,DE,002,01,0000492,5112,2570,235,275,218,108,57,28,25,59,129,222,310,262,190,143,100,34,46,17,28,36,30,8,10,2542,200,252,224,84,46,16,20,70,155,247,318,227,172,130,117,34,30,23,37,53,34,20,33
uSF2,DE,002,01,0000493,4083,2064,171,202,198,84,55,24,14,41,68,160,246,225,194,135,91,32,35,11,26,28,17,4,3,2019,151,230,156,103,40,19,18,40,82,163,256,211,164,134,81,19,31,21,27,33,15,15,10
uSF2,DE,002,01,0000494,3610,1850,149,177,187,110,41,12,16,37,43,117,189,210,171,156,73,34,26,21,17,31,20,8,5,1760,104,164,170,92,35,12,8,37,57,140,213,200,149,109,84,28,26,14,20,37,38,14,9
uSF2,DE,002,01,0000495,3628,1743,167,153,132,86,33,19,24,68,123,179,157,140,101,100,81,28,30,16,14,31,32,15,14,1885,154,157,143,61,40,24,20,64,189,156,158,153,122,118,73,38,35,24,18,51,42,28,17
uSF2,DE,002,01,0000496,2730,1380,71,117,129,74,35,12,12,24,52,99,138,138,125,94,70,37,27,23,26,37,19,15,6,1350,67,105,129,61,22,10,14,34,61,103,134,129,114,96,74,22,31,16,27,36,28,22,15
uSF2,DE,002,01,0000497,2164,1076,66,88,88,46,18,12,5,26,66,101,119,94,89,67,74,20,29,18,13,16,10,10,1,1088,84,92,96,37,18,4,12,29,75,104,133,84,65,79,69,27,17,9,19,13,7,7,8
uSF2,DE,002,01,0000498,2114,1103,59,78,93,62,31,11,9,29,45,62,89,124,79,78,78,32,26,14,29,41,19,9,6,1011,52,64,76,32,16,8,4,16,49,63,95,114,89,87,71,20,29,15,18,36,33,18,6
uSF2,DE,002,01,0000499,1305,685,46,47,49,32,15,8,10,19,26,50,76,53,59,50,47,17,18,14,16,13,10,3,7,620,31,45,49,23,12,6,3,16,26,42,72,53,47,50,48,9,18,10,11,14,13,13,9
uSF2,DE,002,01,0000500,123744,60269,3123,3597,3799,2349,1176,526,491,1556,2868,3461,4402,4630,4393,4368,4036,1559,2319,1521,2483,3476,2314,1240,582,63475,3006,3384,3660,2062,1145,518,486,1516,3101,3611,4614,4734,4475,4624,4446,1816,2580,1665,2573,3772,2804,1723,1160
uSF2,DE,002,01,0000501,7059,3434,253,272,247,131,83,35,27,119,210,235,284,273,243,223,207,73,82,58,92,121,84,49,33,3625,219,263,299,164,82,40,35,126,227,240,304,255,246,229,207,65,93,62,88,155,96,68,62
uSF2,DE,002,01,0000502,800,379,34,29,21,12,5,6,2,12,22,26,26,23,21,28,30,5,9,9,15,24,12,3,5,421,25,28,22,13,10,3,3,14,31,25,30,17,22,39,20,9,13,10,15,23,14,23,12
uSF2,DE,002,01,0000503,800,379,34,29,21,12,5,6,2,12,22,26,26,23,21,28,30,5,9,9,15,24,12,3,5,421,25,28,22,13,10,3,3,14,31,25,30,17,22,39,20,9,13,10,15,23,14,23,12
uSF2,DE,002,01,0000504,627,305,30,38,28,6,5,6,3,16,22,28,22,22,13,18,14,5,5,1,3,4,9,4,3,322,26,22,30,14,7,2,7,13,29,30,18,17,17,14,9,6,4,3,6,20,16,4,8
uSF2,DE,002,01,0000505,624,304,30,38,28,6,5,6,3,16,22,28,22,22,13,17,14,5,5,1,3,4,9,4,3,320,26,22,29,14,7,2,7,13,29,30,18,16,17,14,9,6,4,3,6,20,16,4,8
uSF2,DE,002,01,0000506,5632,2750,189,205,198,113,73,23,22,91,166,181,236,228,209,177,163,63,68,48,74,93,63,42,25,2882,168,213,247,137,65,35,25,99,167,185,256,221,207,176,178,50,76,49,67,112,66,41,42
uSF2,DE,002,01,0000507,2610,1267,85,100,84,47,35,11,6,42,67,80,112,120,93,70,82,26,25,30,40,47,29,22,14,1343,79,98,115,69,30,14,9,45,77,88,121,102,93,77,85,24,35,23,29,54,34,23,19
uSF2,DE,002,01,0000508,3022,1483,104,105,114,66,38,12,16,49,99,101,124,108,116,107,81,37,43,18,34,46,34,20,11,1539,89,115,132,68,35,21,16,54,90,97,135,119,114,99,93,26,41,26,38,58,32,18,23
uSF2,DE,002,01,0000509,7194,3659,229,254,242,171,102,58,49,168,246,258,277,294,251,238,211,68,80,58,91,129,95,62,28,3535,219,228,205,135,98,40,30,122,204,237,286,275,263,231,193,77,88,69,93,163,129,83,67
uSF2,DE,002,01,0000510,2451,1245,71,81,70,54,55,24,18,72,108,99,83,92,77,63,59,20,22,16,33,40,45,26,17,1206,79,66,68,41,35,13,13,52,82,61,88,80,79,73,59,25,30,24,38,61,60,45,34
uSF2,DE,002,01,0000511,2370,1212,71,81,68,54,53,24,18,71,107,97,82,87,74,62,59,16,21,16,33,35,44,24,15,1158,77,66,68,38,33,13,12,51,82,60,84,79,74,70,55,25,29,22,36,57,55,40,32
uSF2,DE,002,01,0000512,4743,2414,158,173,172,117,47,34,31,96,138,159,194,202,174,175,152,48,58,42,58,89,50,36,11,2329,140,162,137,94,63,27,17,70,122,176,198,195,184,158,134,52,58,45,55,102,69,38,33
uSF2,DE,002,01,0000513,2345,1168,62,84,77,54,20,13,13,42,60,77,89,116,89,87,86,23,27,23,33,42,25,21,5,1177,60,77,66,50,36,15,9,32,55,72,105,98,98,80,72,30,37,25,30,51,32,20,27
uSF2,DE,002,01,0000514,2398,1246,96,89,95,63,27,21,18,54,78,82,105,86,85,88,66,25,31,19,25,47,25,15,6,1152,80,85,71,44,27,12,8,38,67,104,93,97,86,78,62,22,21,20,25,51,37,18,6
uSF2,DE,002,01,0000515,16857,8242,541,592,597,369,188,88,83,242,481,552,653,734,634,561,494,149,222,154,222,288,221,122,55,8615,526,553,584,331,219,100,77,259,532,584,703,689,617,550,518,182,228,154,234,365,280,195,135
uSF2,DE,002,01,0000516,177,83,6,6,6,1,1,0,1,2,3,6,4,10,5,11,7,0,2,0,4,3,3,2,0,94,3,6,7,2,3,2,0,3,3,4,5,7,11,9,4,1,1,0,2,6,2,6,7
uSF2,DE,002,01,0000517,177,83,6,6,6,1,1,0,1,2,3,6,4,10,5,11,7,0,2,0,4,3,3,2,0,94,3,6,7,2,3,2,0,3,3,4,5,7,11,9,4,1,1,0,2,6,2,6,7
uSF2,DE,002,01,0000518,971,435,36,36,32,14,8,5,4,13,17,28,41,25,32,26,32,9,10,8,18,13,18,8,2,536,30,29,37,22,12,6,2,14,42,36,39,32,29,29,41,5,14,10,14,27,34,20,12
uSF2,DE,002,01,0000519,961,430,36,36,32,14,8,5,4,13,16,27,40,24,32,26,32,8,10,8,18,13,18,8,2,531,30,29,37,22,12,5,2,14,41,36,38,31,29,29,40,5,14,10,14,27,34,20,12
uSF2,DE,002,01,0000520,2038,964,90,77,79,43,21,15,11,37,74,52,70,65,75,62,51,8,11,27,21,24,23,20,8,1074,76,57,59,47,31,12,13,43,77,62,72,86,64,65,65,16,23,19,31,49,46,41,20
uSF2,DE,002,01,0000521,220,85,14,7,10,3,4,2,0,2,8,3,5,2,5,7,8,0,0,0,0,1,2,2,0,135,15,7,8,3,7,1,3,10,7,4,9,11,4,7,6,0,3,4,0,9,6,8,3
uSF2,DE,002,01,0000522,1818,879,76,70,69,40,17,13,11,35,66,49,65,63,70,55,43,8,11,27,21,23,21,18,8,939,61,50,51,44,24,11,10,33,70,58,63,75,60,58,59,16,20,15,31,40,40,33,17
uSF2,DE,002,01,0000523,13671,6760,409,473,480,311,158,68,67,190,387,466,538,634,522,462,404,132,199,119,179,248,177,92,45,6911,417,461,481,260,173,80,62,199,410,482,587,564,513,447,408,160,190,125,187,283,198,128,96
uSF2,DE,002,01,0000524,3134,1573,105,109,104,78,41,17,19,43,95,97,119,155,128,113,82,31,48,28,44,51,44,14,8,1561,103,106,126,60,38,14,7,44,96,127,121,128,119,88,88,33,47,37,40,60,38,21,20
uSF2,DE,002,01,0000525,4422,2153,104,143,162,102,60,10,16,59,120,163,178,208,182,143,144,45,54,42,42,80,63,22,11,2269,135,162,164,97,56,33,27,59,132,151,215,185,157,148,138,49,53,34,63,85,62,33,31
uSF2,DE,002,01,0000526,3119,1534,103,119,107,61,27,26,13,55,96,114,118,136,106,96,83,27,50,22,44,57,37,22,15,1585,100,92,108,42,44,22,18,55,102,111,137,123,104,99,89,44,50,28,43,78,49,26,21
uSF2,DE,002,01,0000527,852,421,23,15,24,23,6,5,6,14,21,18,28,35,31,25,29,11,16,7,24,27,17,13,3,431,16,20,21,14,10,0,2,15,18,22,26,31,39,28,29,13,12,16,21,25,25,19,9
uSF2,DE,002,01,0000528,2144,1079,74,87,83,47,24,10,13,19,55,74,95,100,75,85,66,18,31,20,25,33,16,21,8,1065,63,81,62,47,25,11,8,26,62,71,88,97,94,84,64,21,28,10,20,35,24,29,15
uSF2,DE,002,01,0000529,19272,9262,366,361,454,291,117,56,46,155,319,460,605,650,745,736,702,321,466,292,500,715,521,264,120,10010,342,366,391,243,105,50,48,189,384,438,623,699,698,801,875,331,543,353,506,772,634,389,230
uSF2,DE,002,01,0000530,276,147,4,2,0,2,2,0,1,7,14,6,14,9,18,7,14,3,7,8,5,8,11,2,3,129,5,1,2,0,0,1,3,0,9,6,2,9,10,6,14,6,10,5,6,11,9,9,5
uSF2,DE,002,01,0000531,276,147,4,2,0,2,2,0,1,7,14,6,14,9,18,7,14,3,7,8,5,8,11,2,3,129,5,1,2,0,0,1,3,0,9,6,2,9,10,6,14,6,10,5,6,11,9,9,5
uSF2,DE,002,01,0000532,134,59,1,2,1,2,0,0,0,1,0,1,0,5,5,4,4,5,3,3,3,5,9,5,0,75,3,1,2,2,1,0,1,0,2,1,2,3,4,2,9,2,6,5,1,14,5,6,3
uSF2,DE,002,01,0000533,134,59,1,2,1,2,0,0,0,1,0,1,0,5,5,4,4,5,3,3,3,5,9,5,0,75,3,1,2,2,1,0,1,0,2,1,2,3,4,2,9,2,6,5,1,14,5,6,3
uSF2,DE,002,01,0000534,2317,1070,30,29,48,30,13,3,2,17,39,40,57,62,105,84,101,40,62,34,68,89,66,33,18,1247,28,34,51,36,14,3,2,13,35,48,73,72,97,104,131,59,63,55,73,103,75,54,24
uSF2,DE,002,01,0000535,2317,1070,30,29,48,30,13,3,2,17,39,40,57,62,105,84,101,40,62,34,68,89,66,33,18,1247,28,34,51,36,14,3,2,13,35,48,73,72,97,104,131,59,63,55,73,103,75,54,24
uSF2,DE,002,01,0000536,1421,684,17,12,24,8,4,3,5,12,27,31,43,41,75,65,57,18,28,20,32,57,55,28,22,737,10,6,15,12,3,2,1,22,21,33,34,34,53,70,62,20,40,22,36,69,71,61,40
uSF2,DE,002,01,0000537,1421,684,17,12,24,8,4,3,5,12,27,31,43,41,75,65,57,18,28,20,32,57,55,28,22,737,10,6,15,12,3,2,1,22,21,33,34,34,53,70,62,20,40,22,36,69,71,61,40
uSF2,DE,002,01,0000538,15124,7302,314,316,381,249,98,50,38,118,239,382,491,533,542,576,526,255,366,227,392,556,380,196,77,7822,296,324,321,193,87,44,41,154,317,350,512,581,534,619,659,244,424,266,390,575,474,259,158
uSF2,DE,002,01,0000539,2064,951,33,34,55,36,15,3,8,9,40,44,64,77,82,86,70,31,42,32,30,73,46,30,11,1113,29,42,44,38,14,5,6,26,55,37,63,90,101,81,76,29,44,34,42,87,84,55,31
uSF2,DE,002,01,0000540,4697,2223,99,106,137,83,29,23,11,31,58,117,175,140,137,145,122,51,113,72,155,203,127,67,22,2474,104,117,112,58,30,11,15,41,92,120,172,188,153,177,178,74,154,92,137,196,140,65,48
uSF2,DE,002,01,0000541,4975,2441,107,88,100,70,30,14,10,39,60,124,141,178,189,210,205,102,135,83,145,193,137,58,23,2534,99,90,86,55,23,14,7,45,95,111,167,161,170,217,268,86,145,94,145,188,150,66,52
uSF2,DE,002,01,0000542,2518,1235,64,78,72,52,21,8,8,27,57,73,83,98,98,90,83,53,49,30,41,67,48,26,9,1283,53,65,66,36,17,13,11,33,56,61,86,113,80,99,95,42,56,30,51,79,69,52,20
uSF2,DE,002,01,0000543,870,452,11,10,17,8,3,2,1,12,24,24,28,40,36,45,46,18,27,10,21,20,22,15,12,418,11,10,13,6,3,1,2,9,19,21,24,29,30,45,42,13,25,16,15,25,31,21,7
uSF2,DE,002,01,0000544,12614,6195,333,425,480,307,148,57,57,155,310,379,528,551,470,473,370,122,169,106,173,225,194,89,74,6419,329,447,454,248,118,57,61,162,349,369,521,538,481,497,342,162,180,124,178,310,224,154,114
uSF2,DE,002,01,0000545,177,81,3,5,7,4,5,0,1,1,6,4,3,9,7,2,8,1,2,2,1,3,4,0,3,96,6,8,6,3,4,0,2,2,3,5,8,6,11,8,5,0,1,1,6,3,6,2,0
uSF2,DE,002,01,0000546,177,81,3,5,7,4,5,0,1,1,6,4,3,9,7,2,8,1,2,2,1,3,4,0,3,96,6,8,6,3,4,0,2,2,3,5,8,6,11,8,5,0,1,1,6,3,6,2,0
uSF2,DE,002,01,0000547,3044,1474,87,108,115,76,34,15,11,52,79,114,117,118,110,92,71,23,32,22,35,52,51,26,34,1570,77,115,101,69,30,22,28,41,102,88,111,125,106,111,63,23,37,32,44,78,73,48,46
uSF2,DE,002,01,0000548,99,48,7,3,5,2,2,0,1,1,2,3,2,4,3,4,1,0,1,0,0,2,2,1,2,51,3,6,3,2,1,0,1,1,3,4,3,4,1,4,1,0,1,1,1,3,4,2,2
uSF2,DE,002,01,0000549,2945,1426,80,105,110,74,32,15,10,51,77,111,115,114,107,88,70,23,31,22,35,50,49,25,32,1519,74,109,98,67,29,22,27,40,99,84,108,121,105,107,62,23,36,31,43,75,69,46,44
uSF2,DE,002,01,0000550,197,92,3,1,0,1,0,1,0,1,0,2,4,10,7,9,16,7,8,7,4,4,5,1,1,105,0,1,2,0,1,0,0,0,3,5,4,6,10,6,19,6,10,7,4,7,3,8,3
uSF2,DE,002,01,0000551,197,92,3,1,0,1,0,1,0,1,0,2,4,10,7,9,16,7,8,7,4,4,5,1,1,105,0,1,2,0,1,0,0,0,3,5,4,6,10,6,19,6,10,7,4,7,3,8,3
uSF2,DE,002,01,0000552,9196,4548,240,311,358,226,109,41,45,101,225,259,404,414,346,370,275,91,127,75,133,166,134,62,36,4648,246,323,345,176,83,35,31,119,241,271,398,401,354,372,255,133,132,84,124,222,142,96,65
uSF2,DE,002,01,0000553,2866,1396,86,93,109,68,42,19,13,28,69,83,115,124,112,104,77,28,41,20,39,54,41,19,12,1470,76,94,116,52,29,11,7,46,78,72,119,137,102,122,87,37,44,20,35,78,44,35,29
uSF2,DE,002,01,0000554,2868,1418,79,101,117,75,25,11,14,30,64,85,126,139,104,117,87,25,44,26,43,41,34,20,11,1450,79,118,112,62,25,11,10,32,67,97,125,117,119,97,81,39,34,34,44,58,46,22,21
uSF2,DE,002,01,0000555,1954,987,39,63,64,48,20,5,9,21,50,44,68,84,77,94,71,26,29,17,29,51,50,18,10,967,46,50,56,35,15,3,4,19,50,52,78,75,77,109,57,38,29,17,24,55,41,27,10
uSF2,DE,002,01,0000556,1508,747,36,54,68,35,22,6,9,22,42,47,95,67,53,55,40,12,13,12,22,20,9,5,3,761,45,61,61,27,14,10,10,22,46,50,76,72,56,44,30,19,25,13,21,31,11,12,5
uSF2,DE,002,01,0000557,15582,7501,337,425,410,265,121,42,47,170,314,363,504,497,483,508,528,207,367,266,412,623,363,173,76,8081,311,365,422,226,133,60,62,159,359,425,575,546,537,580,601,283,453,255,432,582,384,203,128
uSF2,DE,002,01,0000558,1601,774,20,21,30,19,7,5,3,12,20,13,27,41,34,37,65,27,63,37,62,112,67,31,21,827,19,14,24,11,9,2,3,9,17,25,28,43,32,61,75,38,87,38,54,109,69,40,20
uSF2,DE,002,01,0000559,1601,774,20,21,30,19,7,5,3,12,20,13,27,41,34,37,65,27,63,37,62,112,67,31,21,827,19,14,24,11,9,2,3,9,17,25,28,43,32,61,75,38,87,38,54,109,69,40,20
uSF2,DE,002,01,0000560,1622,703,33,31,34,26,9,2,5,26,38,46,59,47,49,42,40,19,23,22,37,44,40,24,7,919,49,43,48,15,11,4,6,28,53,39,59,59,62,48,70,18,32,24,44,82,62,28,35
uSF2,DE,002,01,0000561,1622,703,33,31,34,26,9,2,5,26,38,46,59,47,49,42,40,19,23,22,37,44,40,24,7,919,49,43,48,15,11,4,6,28,53,39,59,59,62,48,70,18,32,24,44,82,62,28,35
uSF2,DE,002,01,0000562,12359,6024,284,373,346,220,105,35,39,132,256,304,418,409,400,429,423,161,281,207,313,467,256,118,48,6335,243,308,350,200,113,54,53,122,289,361,488,444,443,471,456,227,334,193,334,391,253,135,73
uSF2,DE,002,01,0000563,2909,1441,101,110,91,62,30,14,16,46,101,97,126,127,96,99,95,16,31,29,45,65,25,14,5,1468,84,90,97,50,38,18,19,48,88,113,148,103,129,104,92,36,43,31,38,47,22,19,11
uSF2,DE,002,01,0000564,1085,509,27,41,33,27,17,3,3,18,16,28,39,45,43,43,31,4,13,11,19,19,16,7,6,576,26,39,40,34,13,5,2,8,40,32,50,55,36,49,22,13,25,14,12,30,14,9,8
uSF2,DE,002,01,0000565,1744,867,28,65,60,42,16,6,5,13,33,42,69,77,68,60,54,17,30,27,37,51,37,18,12,877,41,46,57,31,15,7,9,12,35,52,82,86,65,48,59,24,37,20,37,49,38,18,9
uSF2,DE,002,01,0000566,6621,3207,128,157,162,89,42,12,15,55,106,137,184,160,193,227,243,124,207,140,212,332,178,79,25,3414,92,133,156,85,47,24,23,54,126,164,208,200,213,270,283,154,229,128,247,265,179,89,45
uSF2,DE,002,01,0000567,8555,4089,210,252,252,163,80,43,29,107,187,242,289,327,301,315,271,84,152,90,176,248,147,87,37,4466,232,238,262,152,76,29,27,107,234,260,327,381,314,327,280,127,156,113,180,262,190,108,84
uSF2,DE,002,01,0000568,1101,470,32,29,29,15,7,7,8,20,29,30,35,38,32,44,19,6,13,4,16,21,18,7,11,631,39,29,30,13,14,6,7,26,45,30,47,46,39,47,32,10,18,12,20,37,40,28,16
uSF2,DE,002,01,0000569,856,354,26,25,23,11,5,4,8,18,24,24,27,26,24,28,14,4,11,3,5,16,14,5,9,502,36,22,22,8,10,5,6,23,37,26,34,36,31,32,25,9,13,9,15,32,33,23,15
uSF2,DE,002,01,0000570,227,106,6,3,5,3,0,3,0,2,5,5,8,11,7,16,5,2,1,1,11,5,3,2,2,121,3,6,8,5,4,1,1,2,7,2,13,10,8,14,7,1,5,3,5,3,7,5,1
uSF2,DE,002,01,0000571,7454,3619,178,223,223,148,73,36,21,87,158,212,254,289,269,271,252,78,139,86,160,227,129,80,26,3835,193,209,232,139,62,23,20,81,189,230,280,335,275,280,248,117,138,101,160,225,150,80,68
uSF2,DE,002,01,0000572,1155,574,39,48,38,20,13,3,4,17,31,31,50,52,37,40,33,10,16,9,29,24,20,8,2,581,29,32,45,22,10,4,2,16,33,39,54,48,43,34,37,17,29,10,18,27,18,7,7
uSF2,DE,002,01,0000573,2297,1118,50,78,79,51,23,14,7,26,61,69,86,95,104,85,75,25,33,18,38,44,32,18,7,1179,56,81,82,55,22,7,6,24,55,79,86,123,87,84,73,33,26,22,41,52,40,22,23
uSF2,DE,002,01,0000574,4002,1927,89,97,106,77,37,19,10,44,66,112,118,142,128,146,144,43,90,59,93,159,77,54,17,2075,108,96,105,62,30,12,12,41,101,112,140,164,145,162,138,67,83,69,101,146,92,51,38
uSF2,DE,002,01,0000575,15313,7423,424,534,555,335,174,88,81,199,406,463,564,592,582,554,445,156,212,125,177,289,231,163,74,7890,419,458,550,299,187,73,79,206,417,516,624,642,561,573,455,173,209,128,242,362,320,248,149
uSF2,DE,002,01,0000576,663,305,21,28,25,16,6,4,3,10,22,30,24,30,20,17,11,6,12,3,3,10,3,1,0,358,17,18,35,17,18,6,5,8,20,23,37,36,24,26,18,5,8,3,7,15,1,7,4
uSF2,DE,002,01,0000577,663,305,21,28,25,16,6,4,3,10,22,30,24,30,20,17,11,6,12,3,3,10,3,1,0,358,17,18,35,17,18,6,5,8,20,23,37,36,24,26,18,5,8,3,7,15,1,7,4
uSF2,DE,002,01,0000578,3867,1774,92,114,106,74,49,21,23,71,125,105,141,103,104,141,73,35,48,38,47,84,79,64,37,2093,109,90,112,53,49,20,26,68,124,130,113,118,151,132,96,49,68,42,77,136,132,128,70
uSF2,DE,002,01,0000579,137,50,5,7,8,1,4,1,1,1,1,1,2,2,6,3,0,0,0,0,2,4,1,0,0,87,9,10,4,0,1,2,0,7,3,15,4,2,6,2,4,0,0,1,1,8,4,1,3
uSF2,DE,002,01,0000580,3730,1724,87,107,98,73,45,20,22,70,124,104,139,101,98,138,73,35,48,38,45,80,78,64,37,2006,100,80,108,53,48,18,26,61,121,115,109,116,145,130,92,49,68,41,76,128,128,127,67
uSF2,DE,002,01,0000581,10783,5344,311,392,424,245,119,63,55,118,259,328,399,459,458,396,361,115,152,84,127,195,149,98,37,5439,293,350,403,229,120,47,48,130,273,363,474,488,386,415,341,119,133,83,158,211,187,113,75
uSF2,DE,002,01,0000582,2565,1313,76,112,101,56,22,14,11,30,55,87,107,112,113,101,92,30,37,17,29,54,32,18,7,1252,66,87,75,43,26,9,12,29,58,103,120,108,84,109,91,28,27,21,38,39,40,24,15
uSF2,DE,002,01,0000583,1584,769,33,49,68,41,18,11,8,18,23,38,42,66,69,65,51,18,19,18,21,33,37,17,6,815,32,39,72,37,17,5,4,17,35,44,62,82,60,53,48,18,31,10,24,44,37,24,20
uSF2,DE,002,01,0000584,1490,713,47,51,49,32,21,11,7,13,45,53,49,55,50,71,48,11,8,10,13,29,17,12,11,777,45,45,70,41,21,8,8,24,38,55,68,52,61,63,36,7,14,12,24,36,25,15,9
uSF2,DE,002,01,0000585,5144,2549,155,180,206,116,58,27,29,57,136,150,201,226,226,159,170,56,88,39,64,79,63,51,13,2595,150,179,186,108,56,25,24,60,142,161,224,246,181,190,166,66,61,40,72,92,85,50,31
uSF2,DE,002,01,0000586,21298,10464,430,482,562,317,163,59,72,241,395,509,698,712,684,760,808,379,569,372,640,838,458,231,85,10834,409,466,493,264,127,69,67,186,395,542,651,709,758,836,975,416,630,407,620,801,547,275,191
uSF2,DE,002,01,0000587,884,415,5,8,18,11,4,1,1,7,10,14,9,31,28,27,36,10,24,17,40,57,27,22,8,469,8,18,11,8,2,2,3,7,11,16,14,32,30,33,42,18,32,25,35,55,41,14,12
uSF2,DE,002,01,0000588,884,415,5,8,18,11,4,1,1,7,10,14,9,31,28,27,36,10,24,17,40,57,27,22,8,469,8,18,11,8,2,2,3,7,11,16,14,32,30,33,42,18,32,25,35,55,41,14,12
uSF2,DE,002,01,0000589,479,222,17,12,12,13,3,1,3,13,10,20,18,14,16,20,15,4,5,6,2,11,2,5,0,257,13,11,17,10,4,3,1,7,19,17,17,19,12,31,14,3,5,3,9,13,13,12,4
uSF2,DE,002,01,0000590,479,222,17,12,12,13,3,1,3,13,10,20,18,14,16,20,15,4,5,6,2,11,2,5,0,257,13,11,17,10,4,3,1,7,19,17,17,19,12,31,14,3,5,3,9,13,13,12,4
uSF2,DE,002,01,0000591,340,160,0,2,7,2,1,0,0,0,6,3,4,6,13,13,19,5,17,7,10,22,15,6,2,180,2,3,1,2,1,4,1,2,3,4,6,6,11,16,24,10,11,5,16,24,13,12,3
uSF2,DE,002,01,0000592,340,160,0,2,7,2,1,0,0,0,6,3,4,6,13,13,19,5,17,7,10,22,15,6,2,180,2,3,1,2,1,4,1,2,3,4,6,6,11,16,24,10,11,5,16,24,13,12,3
uSF2,DE,002,01,0000593,323,155,14,11,11,4,3,2,2,4,15,11,13,7,7,14,7,1,3,2,4,14,2,4,0,168,7,10,17,4,3,3,2,4,11,12,13,13,11,6,5,3,3,2,6,14,5,10,4
uSF2,DE,002,01,0000594,323,155,14,11,11,4,3,2,2,4,15,11,13,7,7,14,7,1,3,2,4,14,2,4,0,168,7,10,17,4,3,3,2,4,11,12,13,13,11,6,5,3,3,2,6,14,5,10,4
uSF2,DE,002,01,0000595,251,125,9,4,7,2,6,1,2,2,11,9,12,8,7,10,6,5,3,2,4,7,8,0,0,126,6,8,3,5,3,1,2,2,7,9,7,11,9,8,11,3,3,3,1,11,8,2,3
uSF2,DE,002,01,0000596,242,119,8,3,7,2,6,1,2,2,11,9,10,7,7,10,6,4,3,2,4,7,8,0,0,123,6,8,3,5,3,1,2,2,7,8,6,11,9,8,11,3,3,3,1,10,8,2,3
uSF2,DE,002,01,0000597,980,472,27,21,29,12,10,4,2,14,12,24,34,28,32,21,35,13,31,19,28,33,28,11,4,508,16,22,19,7,5,1,2,9,18,22,40,31,39,26,53,18,26,23,37,44,23,14,13
uSF2,DE,002,01,0000598,980,472,27,21,29,12,10,4,2,14,12,24,34,28,32,21,35,13,31,19,28,33,28,11,4,508,16,22,19,7,5,1,2,9,18,22,40,31,39,26,53,18,26,23,37,44,23,14,13
uSF2,DE,002,01,0000599,1199,622,46,46,37,19,11,10,4,30,43,42,38,57,36,41,38,15,12,15,20,18,24,11,9,577,38,29,27,15,9,2,3,16,38,44,43,28,41,40,34,14,19,14,25,26,25,27,20
uSF2,DE,002,01,0000600,1199,622,46,46,37,19,11,10,4,30,43,42,38,57,36,41,38,15,12,15,20,18,24,11,9,577,38,29,27,15,9,2,3,16,38,44,43,28,41,40,34,14,19,14,25,26,25,27,20
uSF2,DE,002,01,0000601,488,238,2,3,3,4,2,1,0,2,5,5,11,16,14,16,30,14,22,17,20,27,13,9,2,250,3,13,10,4,1,2,1,1,3,7,8,13,20,16,30,11,22,13,25,18,12,12,5
uSF2,DE,002,01,0000602,488,238,2,3,3,4,2,1,0,2,5,5,11,16,14,16,30,14,22,17,20,27,13,9,2,250,3,13,10,4,1,2,1,1,3,7,8,13,20,16,30,11,22,13,25,18,12,12,5
uSF2,DE,002,01,0000603,16354,8055,310,375,438,250,123,39,58,169,283,381,559,545,531,598,622,312,452,287,512,649,339,163,60,8299,316,352,388,209,99,51,52,138,285,411,503,556,585,660,762,336,509,319,466,596,407,172,127
uSF2,DE,002,01,0000604,2376,1162,30,41,43,17,9,5,3,12,27,45,52,67,70,98,117,72,92,59,96,112,61,27,7,1214,31,34,49,18,6,4,7,13,22,41,55,64,84,120,147,78,81,55,87,94,72,29,23
uSF2,DE,002,01,0000605,3783,1823,67,73,102,51,27,5,12,28,54,85,125,118,111,133,144,78,112,72,128,151,91,39,17,1960,87,86,91,45,27,14,10,24,70,76,110,131,133,154,211,88,118,81,103,152,99,28,22
uSF2,DE,002,01,0000606,2175,1099,56,61,84,53,19,6,14,32,45,63,81,81,119,76,63,25,43,28,41,58,32,15,4,1076,57,62,61,38,19,7,8,23,45,72,84,88,82,77,62,23,46,22,54,59,51,16,20
uSF2,DE,002,01,0000607,1487,729,40,35,35,23,8,3,4,22,38,25,61,47,39,65,52,26,39,28,41,53,24,14,7,758,26,31,31,25,11,1,2,22,34,32,45,51,64,57,70,36,40,33,45,40,35,21,6
uSF2,DE,002,01,0000608,3648,1801,58,62,66,44,25,6,9,33,53,85,113,114,91,127,142,76,117,71,154,204,98,42,11,1847,49,55,66,23,12,11,9,23,57,87,92,101,115,157,161,72,164,99,134,186,90,50,34
uSF2,DE,002,01,0000609,719,355,17,32,36,16,6,3,1,10,16,17,30,32,28,25,23,8,5,5,9,12,13,4,7,364,20,24,25,13,5,1,3,10,15,38,32,28,25,31,19,4,11,6,7,21,14,6,6
uSF2,DE,002,01,0000610,2166,1086,42,71,72,46,29,11,15,32,50,61,97,86,73,74,81,27,44,24,43,59,20,22,7,1080,46,60,65,47,19,13,13,23,42,65,85,93,82,64,92,35,49,23,36,44,46,22,16
uSF2,DE,002,01,0000611,2965,1444,93,96,114,70,44,19,14,29,71,86,117,128,115,108,78,28,42,20,39,56,43,20,14,1521,79,100,119,54,30,11,8,47,81,76,122,141,103,126,88,37,45,21,36,81,48,37,31
uSF2,DE,002,01,0000612,5813,2844,159,206,227,149,57,26,24,81,141,196,241,253,211,205,157,48,75,48,78,91,83,45,43,2969,153,227,210,129,54,33,37,72,166,181,233,238,224,204,143,62,70,65,87,133,115,68,65
uSF2,DE,002,01,0000613,2151,1079,42,64,64,49,20,6,9,22,50,46,72,94,84,103,87,33,37,24,33,55,55,19,11,1072,46,51,58,35,16,3,4,19,53,57,82,81,87,115,76,44,39,24,28,62,44,35,13
uSF2,DE,002,01,0000614,1685,828,39,59,75,39,27,6,10,23,48,51,98,76,60,57,48,13,15,14,23,23,13,5,6,857,51,69,67,30,18,10,12,24,49,55,84,78,67,52,35,19,26,14,27,34,17,14,5
uSF2,DE,002,01,0000615,4034,1950,149,167,133,65,45,23,11,70,111,134,160,165,127,115,126,36,39,40,58,75,50,29,22,2084,130,148,166,96,47,19,19,72,137,143,169,135,132,130,114,39,52,36,50,97,64,50,39
uSF2,DE,002,01,0000616,3025,1484,104,105,114,66,38,12,16,49,99,101,124,108,116,108,81,37,43,18,34,46,34,20,11,1541,89,115,133,68,35,21,16,54,90,97,135,120,114,99,93,26,41,26,38,58,32,18,23
uSF2,DE,002,01,0000617,2702,1363,81,119,109,57,26,15,12,31,56,88,109,114,119,104,92,30,37,17,31,58,33,18,7,1339,75,97,79,43,27,11,12,36,61,118,124,110,90,111,95,28,27,22,39,47,44,25,18
uSF2,DE,002,01,0000618,5314,2493,120,156,166,114,63,31,30,88,147,142,181,167,167,203,124,53,67,56,66,113,115,81,43,2821,132,119,180,90,65,23,30,78,156,159,171,198,205,183,140,67,99,51,100,172,165,151,87
uSF2,DE,002,01,0000619,2153,1018,68,79,74,48,27,15,10,23,67,83,73,85,70,88,59,17,20,13,16,39,20,13,11,1135,62,63,105,58,39,14,13,32,58,78,105,88,85,89,54,12,22,15,31,51,26,22,13
uSF2,DE,002,01,0000620,5144,2549,155,180,206,116,58,27,29,57,136,150,201,226,226,159,170,56,88,39,64,79,63,51,13,2595,150,179,186,108,56,25,24,60,142,161,224,246,181,190,166,66,61,40,72,92,85,50,31
uSF2,DE,002,01,0000621,2426,1201,62,84,79,54,22,13,13,43,61,79,90,121,92,88,86,27,28,23,33,47,26,23,7,1225,62,77,66,53,38,15,10,33,55,73,109,99,103,83,76,30,38,27,32,55,37,25,29
uSF2,DE,002,01,0000622,4768,2458,167,170,163,117,80,45,36,125,185,179,187,173,159,150,125,41,52,35,58,82,69,39,21,2310,157,151,139,82,60,25,20,89,149,164,177,176,160,148,117,47,50,42,61,108,92,58,38
uSF2,DE,002,01,0000623,2909,1441,101,110,91,62,30,14,16,46,101,97,126,127,96,99,95,16,31,29,45,65,25,14,5,1468,84,90,97,50,38,18,19,48,88,113,148,103,129,104,92,36,43,31,38,47,22,19,11
uSF2,DE,002,01,0000624,2707,1212,60,72,67,53,26,5,8,44,54,74,98,92,92,85,71,23,36,33,56,63,56,31,13,1495,75,82,88,49,24,9,8,36,93,71,109,114,98,97,92,31,57,38,56,112,76,37,43
uSF2,DE,002,01,0000625,1744,867,28,65,60,42,16,6,5,13,33,42,69,77,68,60,54,17,30,27,37,51,37,18,12,877,41,46,57,31,15,7,9,12,35,52,82,86,65,48,59,24,37,20,37,49,38,18,9
uSF2,DE,002,01,0000626,1744,867,28,65,60,42,16,6,5,13,33,42,69,77,68,60,54,17,30,27,37,51,37,18,12,877,41,46,57,31,15,7,9,12,35,52,82,86,65,48,59,24,37,20,37,49,38,18,9
uSF2,DE,002,01,0000627,8222,3981,148,178,192,108,49,17,18,67,126,150,211,201,227,264,308,151,270,177,274,444,245,110,46,4241,111,147,180,96,56,26,26,63,143,189,236,243,245,331,358,192,316,166,301,374,248,129,65
uSF2,DE,002,01,0000628,8222,3981,148,178,192,108,49,17,18,67,126,150,211,201,227,264,308,151,270,177,274,444,245,110,46,4241,111,147,180,96,56,26,26,63,143,189,236,243,245,331,358,192,316,166,301,374,248,129,65
uSF2,DE,002,01,0000629,2011,928,65,73,61,31,18,7,12,35,55,55,77,78,61,68,47,14,27,12,34,40,34,13,11,1083,65,54,67,30,20,9,8,39,70,65,88,84,74,66,62,26,42,19,33,59,51,30,22
uSF2,DE,002,01,0000630,2524,1224,56,81,84,54,23,17,7,28,66,74,94,106,111,101,80,27,34,19,49,49,35,20,9,1300,59,87,90,60,26,8,7,26,62,81,99,133,95,98,80,34,31,25,46,55,47,27,24
uSF2,DE,002,01,0000631,1403,677,27,48,59,30,13,11,3,15,36,36,56,58,70,52,37,9,18,8,24,28,21,14,4,726,38,52,57,33,13,5,5,18,34,50,56,76,50,52,43,19,10,15,28,29,27,9,7
uSF2,DE,002,01,0000632,4020,1937,89,98,107,78,39,19,10,44,66,113,118,143,129,146,144,43,91,59,93,159,78,54,17,2083,108,97,105,62,30,12,12,42,102,114,140,164,145,163,138,67,83,69,101,148,92,51,38
uSF2,DE,002,01,0000633,4381,2021,63,63,103,66,28,6,10,26,79,84,121,139,187,170,171,71,104,66,98,162,112,63,29,2360,57,76,95,74,28,8,8,39,90,85,136,162,198,185,207,88,107,89,115,190,159,109,55
uSF2,DE,002,01,0000634,4697,2223,99,106,137,83,29,23,11,31,58,117,175,140,137,145,122,51,113,72,155,203,127,67,22,2474,104,117,112,58,30,11,15,41,92,120,172,188,153,177,178,74,154,92,137,196,140,65,48
uSF2,DE,002,01,0000635,2731,1335,57,68,101,48,18,18,5,18,33,60,98,92,91,94,75,34,64,43,91,115,67,33,12,1396,54,67,78,42,21,4,9,25,40,71,102,113,91,108,89,44,95,45,81,106,62,30,19
uSF2,DE,002,01,0000636,4975,2441,107,88,100,70,30,14,10,39,60,124,141,178,189,210,205,102,135,83,145,193,137,58,23,2534,99,90,86,55,23,14,7,45,95,111,167,161,170,217,268,86,145,94,145,188,150,66,52
uSF2,DE,002,01,0000637,4975,2441,107,88,100,70,30,14,10,39,60,124,141,178,189,210,205,102,135,83,145,193,137,58,23,2534,99,90,86,55,23,14,7,45,95,111,167,161,170,217,268,86,145,94,145,188,150,66,52
uSF2,DE,002,01,0000638,2518,1235,64,78,72,52,21,8,8,27,57,73,83,98,98,90,83,53,49,30,41,67,48,26,9,1283,53,65,66,36,17,13,11,33,56,61,86,113,80,99,95,42,56,30,51,79,69,52,20
uSF2,DE,002,01,0000639,2701,1342,33,26,42,20,9,5,7,32,65,62,85,95,134,121,121,44,65,41,61,90,97,50,37,1359,29,18,32,20,7,4,7,31,51,61,62,75,97,123,127,41,81,48,58,119,116,97,55
uSF2,DE,002,01,0000640,563,292,6,6,12,4,2,2,1,9,16,19,19,24,22,28,33,11,18,8,15,11,13,7,6,271,6,7,8,6,2,1,2,5,15,15,14,21,19,32,27,6,18,12,10,10,16,15,4
uSF2,DE,002,01,0000641,4088,1975,37,54,71,34,16,7,4,21,48,67,76,120,125,154,202,101,155,100,166,218,116,64,19,2113,44,68,71,32,10,12,12,23,39,68,83,115,145,185,243,117,146,98,163,191,138,67,43
uSF2,DE,002,01,0000642,3792,1829,68,74,102,51,27,5,12,28,54,85,127,119,111,133,144,79,112,72,128,151,91,39,17,1963,87,86,91,45,27,14,10,24,70,77,111,131,133,154,211,88,118,81,103,153,99,28,22
uSF2,DE,002,01,0000643,2175,1099,56,61,84,53,19,6,14,32,45,63,81,81,119,76,63,25,43,28,41,58,32,15,4,1076,57,62,61,38,19,7,8,23,45,72,84,88,82,77,62,23,46,22,54,59,51,16,20
uSF2,DE,002,01,0000644,2709,1320,75,59,71,37,24,8,8,38,61,58,105,82,78,96,93,43,73,49,73,93,60,25,11,1389,48,61,53,37,19,3,6,33,59,62,91,93,112,91,134,57,69,59,83,94,66,37,22
uSF2,DE,002,01,0000645,3648,1801,58,62,66,44,25,6,9,33,53,85,113,114,91,127,142,76,117,71,154,204,98,42,11,1847,49,55,66,23,12,11,9,23,57,87,92,101,115,157,161,72,164,99,134,186,90,50,34
uSF2,DE,002,01,0000646,1918,977,63,78,73,35,17,13,5,40,59,59,68,89,64,66,61,23,17,20,29,30,37,15,16,941,58,53,52,28,14,3,6,26,53,82,75,56,66,71,53,18,30,20,32,47,39,33,26
uSF2,DE,002,01,0000647,2968,1463,73,94,95,63,35,14,20,49,75,92,128,107,96,108,103,32,52,32,49,84,24,31,7,1505,66,81,99,61,26,19,16,34,72,94,115,125,105,101,111,41,57,28,51,71,64,44,24
uSF2,DE,002,01,0000648,3134,1573,105,109,104,78,41,17,19,43,95,97,119,155,128,113,82,31,48,28,44,51,44,14,8,1561,103,106,126,60,38,14,7,44,96,127,121,128,119,88,88,33,47,37,40,60,38,21,20
uSF2,DE,002,01,0000649,4432,2158,104,143,162,102,60,10,16,59,121,164,179,209,182,143,144,46,54,42,42,80,63,22,11,2274,135,162,164,97,56,34,27,59,133,151,216,186,157,148,139,49,53,34,63,85,62,33,31
uSF2,DE,002,01,0000650,3516,1702,123,132,123,65,32,28,14,59,107,123,127,148,116,114,98,27,52,22,48,61,42,26,15,1814,118,105,123,47,54,25,21,68,112,119,151,141,119,115,99,45,54,32,45,93,57,40,31
uSF2,DE,002,01,0000651,2670,1300,99,85,93,63,23,18,17,49,87,67,93,98,101,80,72,19,27,34,45,50,38,31,11,1370,77,70,72,58,34,11,12,48,88,80,89,106,99,86,88,29,32,31,52,65,65,52,26
uSF2,DE,002,01,0000652,3105,1509,110,123,115,61,32,15,17,32,71,101,135,124,107,111,98,26,41,28,43,46,34,29,10,1596,93,110,99,69,37,16,10,40,103,107,126,128,123,113,104,26,42,20,34,62,58,49,27
uSF2,DE,002,01,0000653,451,222,9,10,17,10,3,1,1,4,4,11,11,20,30,26,13,3,6,3,8,14,8,8,2,229,4,16,8,7,2,1,1,2,7,15,12,25,26,24,18,8,7,6,6,4,13,5,12
uSF2,DE,002,01,0000654,451,222,9,10,17,10,3,1,1,4,4,11,11,20,30,26,13,3,6,3,8,14,8,8,2,229,4,16,8,7,2,1,1,2,7,15,12,25,26,24,18,8,7,6,6,4,13,5,12
uSF2,DE,002,01,0000655,451,222,9,10,17,10,3,1,1,4,4,11,11,20,30,26,13,3,6,3,8,14,8,8,2,229,4,16,8,7,2,1,1,2,7,15,12,25,26,24,18,8,7,6,6,4,13,5,12
uSF2,DE,002,01,0000656,215,100,3,6,7,1,2,0,0,3,6,9,2,10,9,11,11,2,4,3,5,2,2,1,1,115,7,10,5,4,3,0,1,2,9,5,7,9,16,7,14,6,0,2,1,2,3,1,1
uSF2,DE,002,01,0000657,215,100,3,6,7,1,2,0,0,3,6,9,2,10,9,11,11,2,4,3,5,2,2,1,1,115,7,10,5,4,3,0,1,2,9,5,7,9,16,7,14,6,0,2,1,2,3,1,1
uSF2,DE,002,01,0000658,215,100,3,6,7,1,2,0,0,3,6,9,2,10,9,11,11,2,4,3,5,2,2,1,1,115,7,10,5,4,3,0,1,2,9,5,7,9,16,7,14,6,0,2,1,2,3,1,1
uSF2,DE,002,01,0000659,265,123,2,3,11,6,3,0,0,1,7,7,11,8,9,16,9,5,4,3,7,5,4,1,1,142,2,6,6,3,1,1,0,1,9,10,7,10,23,12,17,1,4,1,5,7,7,4,5
uSF2,DE,002,01,0000660,265,123,2,3,11,6,3,0,0,1,7,7,11,8,9,16,9,5,4,3,7,5,4,1,1,142,2,6,6,3,1,1,0,1,9,10,7,10,23,12,17,1,4,1,5,7,7,4,5
uSF2,DE,002,01,0000661,259,120,2,3,11,6,3,0,0,1,7,6,11,8,8,16,9,5,3,3,7,5,4,1,1,139,1,6,6,3,1,1,0,1,9,10,7,9,23,12,16,1,4,1,5,7,7,4,5
uSF2,DE,002,01,0000662,11769,5730,502,565,459,246,154,81,63,214,454,559,587,499,382,314,230,62,75,51,67,92,45,22,7,6039,497,507,469,268,144,90,78,228,475,598,625,518,446,367,227,83,89,30,78,104,65,36,17
uSF2,DE,002,01,0000663,11769,5730,502,565,459,246,154,81,63,214,454,559,587,499,382,314,230,62,75,51,67,92,45,22,7,6039,497,507,469,268,144,90,78,228,475,598,625,518,446,367,227,83,89,30,78,104,65,36,17
uSF2,DE,002,01,0000664,2638,1232,108,110,78,47,25,21,14,57,135,137,130,107,80,65,45,9,18,10,9,16,6,4,1,1406,105,118,96,57,33,32,23,77,114,136,144,134,105,94,40,24,11,6,18,25,8,5,1
uSF2,DE,002,01,0000665,3773,1867,172,200,168,93,52,24,20,90,164,194,195,160,99,77,54,19,21,10,16,22,12,3,2,1906,172,179,153,101,51,33,30,70,172,198,199,154,121,94,65,22,27,4,16,18,18,5,4
uSF2,DE,002,01,0000666,3449,1667,132,155,144,61,43,23,22,47,96,116,159,161,135,108,80,26,26,27,33,42,20,9,2,1782,116,132,139,78,43,17,18,68,106,152,172,154,142,117,91,32,41,15,37,50,33,20,9
uSF2,DE,002,01,0000667,1869,948,89,100,69,44,33,13,7,20,59,112,103,69,66,60,49,7,9,4,8,12,7,6,2,921,101,75,81,30,17,8,7,13,82,112,104,76,78,59,29,4,9,5,7,11,5,5,3
uSF2,DE,002,01,0000668,1198,574,32,42,43,23,10,7,2,10,44,47,63,53,48,32,25,5,12,8,11,17,22,11,7,624,40,36,40,20,7,6,4,15,48,44,59,60,61,32,22,2,16,5,14,25,30,19,19
uSF2,DE,002,01,0000669,1198,574,32,42,43,23,10,7,2,10,44,47,63,53,48,32,25,5,12,8,11,17,22,11,7,624,40,36,40,20,7,6,4,15,48,44,59,60,61,32,22,2,16,5,14,25,30,19,19
uSF2,DE,002,01,0000670,1198,574,32,42,43,23,10,7,2,10,44,47,63,53,48,32,25,5,12,8,11,17,22,11,7,624,40,36,40,20,7,6,4,15,48,44,59,60,61,32,22,2,16,5,14,25,30,19,19
uSF2,DE,002,01,0000671,884,415,5,8,18,11,4,1,1,7,10,14,9,31,28,27,36,10,24,17,40,57,27,22,8,469,8,18,11,8,2,2,3,7,11,16,14,32,30,33,42,18,32,25,35,55,41,14,12
uSF2,DE,002,01,0000672,884,415,5,8,18,11,4,1,1,7,10,14,9,31,28,27,36,10,24,17,40,57,27,22,8,469,8,18,11,8,2,2,3,7,11,16,14,32,30,33,42,18,32,25,35,55,41,14,12
uSF2,DE,002,01,0000673,884,415,5,8,18,11,4,1,1,7,10,14,9,31,28,27,36,10,24,17,40,57,27,22,8,469,8,18,11,8,2,2,3,7,11,16,14,32,30,33,42,18,32,25,35,55,41,14,12
uSF2,DE,002,01,0000674,177,83,6,6,6,1,1,0,1,2,3,6,4,10,5,11,7,0,2,0,4,3,3,2,0,94,3,6,7,2,3,2,0,3,3,4,5,7,11,9,4,1,1,0,2,6,2,6,7
uSF2,DE,002,01,0000675,177,83,6,6,6,1,1,0,1,2,3,6,4,10,5,11,7,0,2,0,4,3,3,2,0,94,3,6,7,2,3,2,0,3,3,4,5,7,11,9,4,1,1,0,2,6,2,6,7
uSF2,DE,002,01,0000676,177,83,6,6,6,1,1,0,1,2,3,6,4,10,5,11,7,0,2,0,4,3,3,2,0,94,3,6,7,2,3,2,0,3,3,4,5,7,11,9,4,1,1,0,2,6,2,6,7
uSF2,DE,002,01,0000677,663,305,21,28,25,16,6,4,3,10,22,30,24,30,20,17,11,6,12,3,3,10,3,1,0,358,17,18,35,17,18,6,5,8,20,23,37,36,24,26,18,5,8,3,7,15,1,7,4
uSF2,DE,002,01,0000678,663,305,21,28,25,16,6,4,3,10,22,30,24,30,20,17,11,6,12,3,3,10,3,1,0,358,17,18,35,17,18,6,5,8,20,23,37,36,24,26,18,5,8,3,7,15,1,7,4
uSF2,DE,002,01,0000679,663,305,21,28,25,16,6,4,3,10,22,30,24,30,20,17,11,6,12,3,3,10,3,1,0,358,17,18,35,17,18,6,5,8,20,23,37,36,24,26,18,5,8,3,7,15,1,7,4
uSF2,DE,002,01,0000680,279,137,5,6,14,2,1,0,3,7,8,12,11,16,9,10,7,1,4,5,6,3,4,2,1,142,6,5,8,3,1,2,1,6,7,20,7,8,5,14,8,8,5,2,5,3,6,9,3
uSF2,DE,002,01,0000681,279,137,5,6,14,2,1,0,3,7,8,12,11,16,9,10,7,1,4,5,6,3,4,2,1,142,6,5,8,3,1,2,1,6,7,20,7,8,5,14,8,8,5,2,5,3,6,9,3
uSF2,DE,002,01,0000682,279,137,5,6,14,2,1,0,3,7,8,12,11,16,9,10,7,1,4,5,6,3,4,2,1,142,6,5,8,3,1,2,1,6,7,20,7,8,5,14,8,8,5,2,5,3,6,9,3
uSF2,DE,002,01,0000683,800,379,34,29,21,12,5,6,2,12,22,26,26,23,21,28,30,5,9,9,15,24,12,3,5,421,25,28,22,13,10,3,3,14,31,25,30,17,22,39,20,9,13,10,15,23,14,23,12
uSF2,DE,002,01,0000684,800,379,34,29,21,12,5,6,2,12,22,26,26,23,21,28,30,5,9,9,15,24,12,3,5,421,25,28,22,13,10,3,3,14,31,25,30,17,22,39,20,9,13,10,15,23,14,23,12
uSF2,DE,002,01,0000685,800,379,34,29,21,12,5,6,2,12,22,26,26,23,21,28,30,5,9,9,15,24,12,3,5,421,25,28,22,13,10,3,3,14,31,25,30,17,22,39,20,9,13,10,15,23,14,23,12
uSF2,DE,002,01,0000686,11343,5607,363,425,438,256,162,78,73,223,438,436,527,493,362,364,262,77,110,60,115,150,126,47,22,5736,352,380,352,235,115,72,66,233,427,435,514,505,392,439,279,76,123,92,133,199,174,96,47
uSF2,DE,002,01,0000687,11343,5607,363,425,438,256,162,78,73,223,438,436,527,493,362,364,262,77,110,60,115,150,126,47,22,5736,352,380,352,235,115,72,66,233,427,435,514,505,392,439,279,76,123,92,133,199,174,96,47
uSF2,DE,002,01,0000688,3575,1770,103,153,140,84,51,29,22,51,146,126,169,148,99,111,90,24,39,31,39,51,44,15,5,1805,98,125,110,64,34,24,21,72,144,122,171,160,116,139,100,21,43,32,56,63,57,19,14
uSF2,DE,002,01,0000689,3224,1631,92,110,123,75,49,20,28,63,134,103,147,159,126,90,66,20,39,17,40,49,49,22,10,1593,93,109,91,74,27,22,23,64,88,124,102,142,116,118,72,29,37,32,36,84,65,34,11
uSF2,DE,002,01,0000690,4544,2206,168,162,175,97,62,29,23,109,158,207,211,186,137,163,106,33,32,12,36,50,33,10,7,2338,161,146,151,97,54,26,22,97,195,189,241,203,160,182,107,26,43,28,41,52,52,43,22
uSF2,DE,002,01,0000691,1610,768,48,61,66,46,24,5,7,24,50,45,69,73,47,51,40,13,17,12,21,25,12,8,4,842,40,40,67,38,20,9,11,43,57,55,69,78,67,58,35,17,25,20,21,27,17,14,14
uSF2,DE,002,01,0000692,1610,768,48,61,66,46,24,5,7,24,50,45,69,73,47,51,40,13,17,12,21,25,12,8,4,842,40,40,67,38,20,9,11,43,57,55,69,78,67,58,35,17,25,20,21,27,17,14,14
uSF2,DE,002,01,0000693,1610,768,48,61,66,46,24,5,7,24,50,45,69,73,47,51,40,13,17,12,21,25,12,8,4,842,40,40,67,38,20,9,11,43,57,55,69,78,67,58,35,17,25,20,21,27,17,14,14
uSF2,DE,002,01,0000694,224,119,11,10,10,7,3,2,3,6,11,8,12,7,8,1,4,1,2,2,4,2,4,1,0,105,6,6,10,8,1,1,2,1,8,13,8,13,6,5,2,1,0,2,3,4,1,2,2
uSF2,DE,002,01,0000695,224,119,11,10,10,7,3,2,3,6,11,8,12,7,8,1,4,1,2,2,4,2,4,1,0,105,6,6,10,8,1,1,2,1,8,13,8,13,6,5,2,1,0,2,3,4,1,2,2
uSF2,DE,002,01,0000696,224,119,11,10,10,7,3,2,3,6,11,8,12,7,8,1,4,1,2,2,4,2,4,1,0,105,6,6,10,8,1,1,2,1,8,13,8,13,6,5,2,1,0,2,3,4,1,2,2
uSF2,DE,002,01,0000697,6521,3115,195,212,222,133,68,30,40,89,195,249,299,309,216,189,144,50,77,50,67,125,86,42,28,3406,180,212,221,124,71,35,31,103,204,269,303,318,209,211,161,49,81,61,86,151,147,91,88
uSF2,DE,002,01,0000698,6521,3115,195,212,222,133,68,30,40,89,195,249,299,309,216,189,144,50,77,50,67,125,86,42,28,3406,180,212,221,124,71,35,31,103,204,269,303,318,209,211,161,49,81,61,86,151,147,91,88
uSF2,DE,002,01,0000699,627,322,24,28,28,13,9,4,6,13,22,23,33,25,33,15,16,2,8,6,1,4,5,2,2,305,21,28,34,15,4,7,2,8,26,25,29,32,19,14,10,5,2,6,5,5,6,2,0
uSF2,DE,002,01,0000700,1588,744,34,38,53,25,12,7,10,26,56,68,70,82,63,47,35,7,19,10,14,28,18,10,12,844,28,43,44,27,17,8,8,36,66,63,72,64,57,61,38,11,12,12,25,36,36,28,52
uSF2,DE,002,01,0000701,2820,1326,104,96,90,61,26,15,15,36,86,107,118,127,69,73,63,25,30,21,29,62,44,20,9,1494,85,99,95,49,39,16,17,44,70,126,137,148,86,85,65,22,42,22,40,75,69,38,25
uSF2,DE,002,01,0000702,1486,723,33,50,51,34,21,4,9,14,31,51,78,75,51,54,30,16,20,13,23,31,19,10,5,763,46,42,48,33,11,4,4,15,42,55,65,74,47,51,48,11,25,21,16,35,36,23,11
uSF2,DE,002,01,0000703,1149,531,44,41,62,16,14,3,8,18,26,48,48,44,41,30,11,5,6,8,6,21,14,9,8,618,30,40,47,31,12,6,6,17,40,46,53,52,44,43,25,13,12,5,12,36,11,20,17
uSF2,DE,002,01,0000704,1149,531,44,41,62,16,14,3,8,18,26,48,48,44,41,30,11,5,6,8,6,21,14,9,8,618,30,40,47,31,12,6,6,17,40,46,53,52,44,43,25,13,12,5,12,36,11,20,17
uSF2,DE,002,01,0000705,1149,531,44,41,62,16,14,3,8,18,26,48,48,44,41,30,11,5,6,8,6,21,14,9,8,618,30,40,47,31,12,6,6,17,40,46,53,52,44,43,25,13,12,5,12,36,11,20,17
uSF2,DE,002,01,0000706,479,222,17,12,12,13,3,1,3,13,10,20,18,14,16,20,15,4,5,6,2,11,2,5,0,257,13,11,17,10,4,3,1,7,19,17,17,19,12,31,14,3,5,3,9,13,13,12,4
uSF2,DE,002,01,0000707,479,222,17,12,12,13,3,1,3,13,10,20,18,14,16,20,15,4,5,6,2,11,2,5,0,257,13,11,17,10,4,3,1,7,19,17,17,19,12,31,14,3,5,3,9,13,13,12,4
uSF2,DE,002,01,0000708,479,222,17,12,12,13,3,1,3,13,10,20,18,14,16,20,15,4,5,6,2,11,2,5,0,257,13,11,17,10,4,3,1,7,19,17,17,19,12,31,14,3,5,3,9,13,13,12,4
uSF2,DE,002,01,0000709,1267,646,44,44,54,27,16,9,3,20,48,42,52,47,58,48,38,11,16,19,19,17,7,2,5,621,20,39,55,30,13,6,7,17,44,38,37,60,56,42,41,16,26,10,15,22,9,8,10
uSF2,DE,002,01,0000710,1267,646,44,44,54,27,16,9,3,20,48,42,52,47,58,48,38,11,16,19,19,17,7,2,5,621,20,39,55,30,13,6,7,17,44,38,37,60,56,42,41,16,26,10,15,22,9,8,10
uSF2,DE,002,01,0000711,1267,646,44,44,54,27,16,9,3,20,48,42,52,47,58,48,38,11,16,19,19,17,7,2,5,621,20,39,55,30,13,6,7,17,44,38,37,60,56,42,41,16,26,10,15,22,9,8,10
uSF2,DE,002,01,0000712,971,435,36,36,32,14,8,5,4,13,17,28,41,25,32,26,32,9,10,8,18,13,18,8,2,536,30,29,37,22,12,6,2,14,42,36,39,32,29,29,41,5,14,10,14,27,34,20,12
uSF2,DE,002,01,0000713,971,435,36,36,32,14,8,5,4,13,17,28,41,25,32,26,32,9,10,8,18,13,18,8,2,536,30,29,37,22,12,6,2,14,42,36,39,32,29,29,41,5,14,10,14,27,34,20,12
uSF2,DE,002,01,0000714,961,430,36,36,32,14,8,5,4,13,16,27,40,24,32,26,32,8,10,8,18,13,18,8,2,531,30,29,37,22,12,5,2,14,41,36,38,31,29,29,40,5,14,10,14,27,34,20,12
uSF2,DE,002,01,0000715,276,147,4,2,0,2,2,0,1,7,14,6,14,9,18,7,14,3,7,8,5,8,11,2,3,129,5,1,2,0,0,1,3,0,9,6,2,9,10,6,14,6,10,5,6,11,9,9,5
uSF2,DE,002,01,0000716,276,147,4,2,0,2,2,0,1,7,14,6,14,9,18,7,14,3,7,8,5,8,11,2,3,129,5,1,2,0,0,1,3,0,9,6,2,9,10,6,14,6,10,5,6,11,9,9,5
uSF2,DE,002,01,0000717,276,147,4,2,0,2,2,0,1,7,14,6,14,9,18,7,14,3,7,8,5,8,11,2,3,129,5,1,2,0,0,1,3,0,9,6,2,9,10,6,14,6,10,5,6,11,9,9,5
uSF2,DE,002,01,0000718,16376,7705,438,514,461,261,174,86,111,356,554,610,620,618,505,545,426,115,203,153,211,293,218,148,85,8671,444,437,493,284,147,85,120,357,565,585,671,646,609,581,501,152,260,157,225,405,435,275,237
uSF2,DE,002,01,0000719,16376,7705,438,514,461,261,174,86,111,356,554,610,620,618,505,545,426,115,203,153,211,293,218,148,85,8671,444,437,493,284,147,85,120,357,565,585,671,646,609,581,501,152,260,157,225,405,435,275,237
uSF2,DE,002,01,0000720,2799,1339,78,101,81,51,37,16,26,64,104,121,121,93,76,73,50,18,35,32,46,53,37,19,7,1460,80,89,77,44,33,7,31,76,127,106,135,98,93,88,70,21,53,37,40,60,52,27,16
uSF2,DE,002,01,0000721,425,216,25,12,9,1,1,1,2,11,19,33,27,14,9,21,5,1,4,3,4,5,5,3,1,209,19,13,7,7,6,1,2,15,25,25,16,9,12,8,9,3,3,5,4,6,9,3,2
uSF2,DE,002,01,0000722,2789,1292,73,101,119,54,25,6,12,30,55,70,95,108,107,128,114,23,43,15,21,42,21,15,15,1497,80,94,121,73,19,9,14,38,62,95,115,122,141,152,107,25,26,17,24,49,35,30,49
uSF2,DE,002,01,0000723,1367,630,39,31,33,19,23,15,7,33,42,32,57,51,30,39,26,12,23,17,19,22,28,18,14,737,34,32,35,22,19,9,13,28,43,48,47,45,40,38,38,15,26,14,20,40,59,41,31
uSF2,DE,002,01,0000724,1394,590,18,28,22,17,10,9,11,28,50,54,36,36,45,49,42,9,14,17,11,26,26,18,14,804,20,15,27,11,5,6,9,23,50,41,33,39,44,59,49,8,32,17,24,76,84,78,54
uSF2,DE,002,01,0000725,2021,998,65,71,51,25,28,6,19,53,79,105,71,85,64,55,50,15,27,17,27,42,24,18,1,1023,64,57,37,31,23,22,13,47,76,84,84,93,63,51,65,18,24,23,24,41,58,13,12
uSF2,DE,002,01,0000726,56,26,1,5,1,2,0,1,0,1,1,2,6,1,3,0,0,0,0,0,0,1,1,0,0,30,2,3,5,1,0,0,1,1,4,2,1,3,2,1,1,0,0,0,1,1,1,0,0
uSF2,DE,002,01,0000727,338,154,9,6,10,7,5,4,1,12,7,9,10,18,12,11,5,1,8,7,6,3,1,1,1,184,8,4,11,7,3,4,5,12,10,13,13,15,15,8,11,7,6,7,7,4,4,8,2
uSF2,DE,002,01,0000728,1153,535,25,35,23,13,6,9,5,35,54,37,43,41,38,32,25,7,10,12,16,18,16,20,15,618,15,22,32,10,8,9,10,36,53,35,46,46,41,39,27,15,19,8,18,30,47,24,28
uSF2,DE,002,01,0000729,1097,529,33,31,21,16,13,4,9,36,46,53,47,48,29,31,19,9,6,4,21,15,20,9,9,568,25,26,24,12,8,9,8,38,46,48,41,50,36,30,25,15,12,7,24,25,20,26,13
uSF2,DE,002,01,0000730,1470,707,16,49,55,32,14,8,6,22,21,34,45,64,47,48,54,16,25,25,29,46,27,19,5,763,21,30,75,48,7,4,5,12,13,26,54,68,54,56,64,16,50,17,30,49,37,14,13
uSF2,DE,002,01,0000731,1308,610,52,41,30,20,12,6,11,27,63,56,54,52,41,51,31,4,8,3,9,18,11,8,2,698,71,49,34,17,12,5,9,23,50,59,80,49,56,47,32,8,9,4,9,23,27,8,17
uSF2,DE,002,01,0000732,159,79,4,3,6,4,0,1,2,4,13,4,8,7,4,7,5,0,0,1,2,2,1,0,1,80,5,3,8,1,4,0,0,8,6,3,6,9,12,4,3,1,0,1,0,1,2,3,0
uSF2,DE,002,01,0000733,2463,1268,231,139,104,27,18,23,34,129,194,169,117,66,11,3,3,0,0,0,0,0,0,0,0,1195,190,146,75,37,36,43,34,114,206,142,99,48,15,5,2,0,2,0,0,1,0,0,0
uSF2,DE,002,01,0000734,2463,1268,231,139,104,27,18,23,34,129,194,169,117,66,11,3,3,0,0,0,0,0,0,0,0,1195,190,146,75,37,36,43,34,114,206,142,99,48,15,5,2,0,2,0,0,1,0,0,0
uSF2,DE,002,01,0000735,2463,1268,231,139,104,27,18,23,34,129,194,169,117,66,11,3,3,0,0,0,0,0,0,0,0,1195,190,146,75,37,36,43,34,114,206,142,99,48,15,5,2,0,2,0,0,1,0,0,0
uSF2,DE,002,01,0000736,3716,1760,108,104,119,66,27,19,11,51,120,158,176,174,142,120,81,24,36,19,30,60,60,33,22,1956,114,113,121,53,31,14,9,62,108,159,176,166,175,126,109,35,41,37,46,81,76,60,44
uSF2,DE,002,01,0000737,3716,1760,108,104,119,66,27,19,11,51,120,158,176,174,142,120,81,24,36,19,30,60,60,33,22,1956,114,113,121,53,31,14,9,62,108,159,176,166,175,126,109,35,41,37,46,81,76,60,44
uSF2,DE,002,01,0000738,683,332,24,19,37,12,1,4,2,5,16,21,37,28,33,22,17,4,5,3,6,16,8,7,5,351,28,23,20,6,4,1,1,6,13,27,46,25,30,17,19,6,6,6,6,22,14,11,14
uSF2,DE,002,01,0000739,3033,1428,84,85,82,54,26,15,9,46,104,137,139,146,109,98,64,20,31,16,24,44,52,26,17,1605,86,90,101,47,27,13,8,56,95,132,130,141,145,109,90,29,35,31,40,59,62,49,30
uSF2,DE,002,01,0000740,177,81,3,5,7,4,5,0,1,1,6,4,3,9,7,2,8,1,2,2,1,3,4,0,3,96,6,8,6,3,4,0,2,2,3,5,8,6,11,8,5,0,1,1,6,3,6,2,0
uSF2,DE,002,01,0000741,177,81,3,5,7,4,5,0,1,1,6,4,3,9,7,2,8,1,2,2,1,3,4,0,3,96,6,8,6,3,4,0,2,2,3,5,8,6,11,8,5,0,1,1,6,3,6,2,0
uSF2,DE,002,01,0000742,177,81,3,5,7,4,5,0,1,1,6,4,3,9,7,2,8,1,2,2,1,3,4,0,3,96,6,8,6,3,4,0,2,2,3,5,8,6,11,8,5,0,1,1,6,3,6,2,0
uSF2,DE,002,01,0000743,4771,2299,140,166,142,107,54,28,22,82,155,178,199,216,141,125,109,34,52,36,77,89,81,47,19,2472,172,148,143,75,51,36,42,83,136,166,189,211,141,148,124,47,75,41,92,116,120,70,46
uSF2,DE,002,01,0000744,4771,2299,140,166,142,107,54,28,22,82,155,178,199,216,141,125,109,34,52,36,77,89,81,47,19,2472,172,148,143,75,51,36,42,83,136,166,189,211,141,148,124,47,75,41,92,116,120,70,46
uSF2,DE,002,01,0000745,1841,860,44,58,54,34,16,10,8,29,66,61,68,85,52,54,50,10,19,10,29,32,34,27,10,981,69,58,56,30,18,20,11,34,50,52,66,86,69,52,58,14,32,13,31,47,56,38,21
uSF2,DE,002,01,0000746,2930,1439,96,108,88,73,38,18,14,53,89,117,131,131,89,71,59,24,33,26,48,57,47,20,9,1491,103,90,87,45,33,16,31,49,86,114,123,125,72,96,66,33,43,28,61,69,64,32,25
uSF2,DE,002,01,0000747,643,300,24,22,27,13,15,1,4,9,27,22,34,21,20,13,10,5,10,2,6,4,3,5,3,343,12,28,32,18,7,3,0,14,30,33,32,36,25,18,8,8,4,3,6,10,9,2,5
uSF2,DE,002,01,0000748,643,300,24,22,27,13,15,1,4,9,27,22,34,21,20,13,10,5,10,2,6,4,3,5,3,343,12,28,32,18,7,3,0,14,30,33,32,36,25,18,8,8,4,3,6,10,9,2,5
uSF2,DE,002,01,0000749,643,300,24,22,27,13,15,1,4,9,27,22,34,21,20,13,10,5,10,2,6,4,3,5,3,343,12,28,32,18,7,3,0,14,30,33,32,36,25,18,8,8,4,3,6,10,9,2,5
uSF2,DE,002,01,0000750,340,160,0,2,7,2,1,0,0,0,6,3,4,6,13,13,19,5,17,7,10,22,15,6,2,180,2,3,1,2,1,4,1,2,3,4,6,6,11,16,24,10,11,5,16,24,13,12,3
uSF2,DE,002,01,0000751,340,160,0,2,7,2,1,0,0,0,6,3,4,6,13,13,19,5,17,7,10,22,15,6,2,180,2,3,1,2,1,4,1,2,3,4,6,6,11,16,24,10,11,5,16,24,13,12,3
uSF2,DE,002,01,0000752,340,160,0,2,7,2,1,0,0,0,6,3,4,6,13,13,19,5,17,7,10,22,15,6,2,180,2,3,1,2,1,4,1,2,3,4,6,6,11,16,24,10,11,5,16,24,13,12,3
uSF2,DE,002,01,0000753,323,155,14,11,11,4,3,2,2,4,15,11,13,7,7,14,7,1,3,2,4,14,2,4,0,168,7,10,17,4,3,3,2,4,11,12,13,13,11,6,5,3,3,2,6,14,5,10,4
uSF2,DE,002,01,0000754,323,155,14,11,11,4,3,2,2,4,15,11,13,7,7,14,7,1,3,2,4,14,2,4,0,168,7,10,17,4,3,3,2,4,11,12,13,13,11,6,5,3,3,2,6,14,5,10,4
uSF2,DE,002,01,0000755,323,155,14,11,11,4,3,2,2,4,15,11,13,7,7,14,7,1,3,2,4,14,2,4,0,168,7,10,17,4,3,3,2,4,11,12,13,13,11,6,5,3,3,2,6,14,5,10,4
uSF2,DE,002,01,0000756,455,217,16,18,23,8,3,3,4,4,10,24,23,17,13,17,7,1,3,2,1,2,9,5,4,238,16,26,20,7,7,2,5,6,16,11,29,19,16,13,5,3,5,4,2,8,12,4,2
uSF2,DE,002,01,0000757,455,217,16,18,23,8,3,3,4,4,10,24,23,17,13,17,7,1,3,2,1,2,9,5,4,238,16,26,20,7,7,2,5,6,16,11,29,19,16,13,5,3,5,4,2,8,12,4,2
uSF2,DE,002,01,0000758,455,217,16,18,23,8,3,3,4,4,10,24,23,17,13,17,7,1,3,2,1,2,9,5,4,238,16,26,20,7,7,2,5,6,16,11,29,19,16,13,5,3,5,4,2,8,12,4,2
uSF2,DE,002,01,0000759,2451,1245,71,81,70,54,55,24,18,72,108,99,83,92,77,63,59,20,22,16,33,40,45,26,17,1206,79,66,68,41,35,13,13,52,82,61,88,80,79,73,59,25,30,24,38,61,60,45,34
uSF2,DE,002,01,0000760,2451,1245,71,81,70,54,55,24,18,72,108,99,83,92,77,63,59,20,22,16,33,40,45,26,17,120