uSF2,DE,003,01,0000001,578444,282152,18231,19843,19882,11671,6151,3332,3362,9848,17705,20414,23572,23623,20778,19082,15440,5256,7250,4777,7272,10464,7579,4345,2275,296292,17385,18806,18792,10746,6012,3345,3719,9956,18120,20648,24187,24110,21571,20158,16746,5803,8206,5261,8028,12424,10521,6804,4944
uSF2,DE,003,01,0000002,453164,221127,14967,16103,15997,9278,4953,2793,2862,8269,14793,16912,19138,18955,16353,14696,11380,3689,4923,3252,4780,6981,5261,3102,1690,232037,14174,15302,15052,8637,4841,2819,3225,8414,14981,17006,19541,19349,17053,15513,12282,3981,5611,3589,5454,8642,7712,5077,3782
uSF2,DE,003,01,0000003,359697,175694,11660,12539,12369,7287,3856,2301,2309,6655,11985,13561,15215,15177,13261,11792,9058,2909,3803,2487,3690,5580,4283,2526,1391,184003,10992,11910,11465,6607,3717,2287,2695,6757,11928,13591,15452,15436,13795,12501,9831,3111,4316,2814,4321,6934,6283,4149,3111
uSF2,DE,003,01,0000004,93467,45433,3307,3564,3628,1991,1097,492,553,1614,2808,3351,3923,3778,3092,2904,2322,780,1120,765,1090,1401,978,576,299,48034,3182,3392,3587,2030,1124,532,530,1657,3053,3415,4089,3913,3258,3012,2451,870,1295,775,1133,1708,1429,928,671
uSF2,DE,003,01,0000005,60910,29000,1514,1581,1531,933,636,699,948,1995,2608,2355,2101,2132,1939,1894,1477,433,622,431,605,916,770,549,331,31910,1430,1385,1466,877,665,853,1263,1871,2495,2207,2108,2069,2102,2066,1636,507,746,493,767,1387,1474,1134,909
uSF2,DE,003,01,0000006,44005,21034,1018,1020,1035,658,454,607,832,1624,2045,1732,1468,1505,1424,1341,1047,318,417,277,394,620,551,401,246,22971,931,900,940,583,513,761,1139,1502,1917,1605,1419,1413,1490,1471,1133,354,484,335,538,977,1037,858,671
uSF2,DE,003,01,0000007,16905,7966,496,561,496,275,182,92,116,371,563,623,633,627,515,553,430,115,205,154,211,296,219,148,85,8939,499,485,526,294,152,92,124,369,578,602,689,656,612,595,503,153,262,158,229,410,437,276,238
uSF2,DE,003,01,0000008,392254,192127,13453,14522,14466,8345,4317,2094,1914,6274,12185,14557,17037,16823,14414,12802,9903,3256,4301,2821,4175,6065,4491,2553,1359,200127,12744,13917,13586,7760,4176,1966,1962,6543,12486,14799,17433,17280,14951,13447,10646,3474,4865,3096,4687,7255,6238,3943,2873
uSF2,DE,003,01,0000009,315692,154660,10642,11519,11334,6629,3402,1694,1477,5031,9940,11829,13747,13672,11837,10451,8011,2591,3386,2210,3296,4960,3732,2125,1145,161032,10061,11010,10525,6024,3204,1526,1556,5255,10011,11986,14033,14023,12305,11030,8698,2757,3832,2479,3783,5957,5246,3291,2440
uSF2,DE,003,01,0000010,76562,37467,2811,3003,3132,1716,915,400,437,1243,2245,2728,3290,3151,2577,2351,1892,665,915,611,879,1105,759,428,214,39095,2683,2907,3061,1736,972,440,406,1288,2475,2813,3400,3257,2646,2417,1948,717,1033,617,904,1298,992,652,433
uSF2,DE,003,01,0000011,125280,61025,3264,3740,3885,2393,1198,539,500,1579,2912,3502,4434,4668,4425,4386,4060,1567,2327,1525,2492,3483,2318,1243,585,64255,3211,3504,3740,2109,1171,526,494,1542,3139,3642,4646,4761,4518,4645,4464,1822,2595,1672,2574,3782,2809,1727,1162
uSF2,DE,003,01,0000012,19835,9692,388,471,536,312,129,68,42,161,305,435,597,637,673,712,718,324,537,347,591,844,522,240,103,10143,373,423,470,270,136,58,59,169,367,491,661,709,645,793,846,371,625,354,602,757,541,267,156
uSF2,DE,003,01,0000013,93467,45433,3307,3564,3628,1991,1097,492,553,1614,2808,3351,3923,3778,3092,2904,2322,780,1120,765,1090,1401,978,576,299,48034,3182,3392,3587,2030,1124,532,530,1657,3053,3415,4089,3913,3258,3012,2451,870,1295,775,1133,1708,1429,928,671
uSF2,DE,003,01,0000014,14994,7384,568,605,646,344,179,77,96,246,419,555,735,659,492,486,350,110,159,101,174,179,110,68,26,7610,553,630,635,371,203,81,81,259,471,542,704,697,490,452,361,137,183,108,154,207,142,89,60
uSF2,DE,003,01,0000015,196,105,9,8,11,6,0,0,0,5,11,5,7,7,10,3,7,2,2,0,3,4,2,3,0,91,4,5,8,5,3,0,1,4,8,6,8,11,4,6,2,0,3,0,1,3,6,2,1
uSF2,DE,003,01,0000016,196,105,9,8,11,6,0,0,0,5,11,5,7,7,10,3,7,2,2,0,3,4,2,3,0,91,4,5,8,5,3,0,1,4,8,6,8,11,4,6,2,0,3,0,1,3,6,2,1
uSF2,DE,003,01,0000017,1700,831,94,93,79,33,15,12,23,56,79,79,96,52,24,27,21,4,7,4,13,9,6,2,3,869,99,73,88,44,22,11,17,63,83,82,86,53,30,29,25,6,10,5,12,10,10,6,5
uSF2,DE,003,01,0000018,1700,831,94,93,79,33,15,12,23,56,79,79,96,52,24,27,21,4,7,4,13,9,6,2,3,869,99,73,88,44,22,11,17,63,83,82,86,53,30,29,25,6,10,5,12,10,10,6,5
uSF2,DE,003,01,0000019,1419,711,49,48,65,41,14,5,8,22,39,55,70,65,63,65,28,7,13,7,12,18,10,3,4,708,34,52,67,37,21,11,4,22,47,53,64,73,60,57,35,8,13,5,13,13,14,3,2
uSF2,DE,003,01,0000020,1419,711,49,48,65,41,14,5,8,22,39,55,70,65,63,65,28,7,13,7,12,18,10,3,4,708,34,52,67,37,21,11,4,22,47,53,64,73,60,57,35,8,13,5,13,13,14,3,2
uSF2,DE,003,01,0000021,146,77,3,3,9,3,3,1,1,4,3,4,8,7,6,7,4,2,2,3,2,1,0,1,0,69,1,2,4,6,2,0,0,1,1,4,7,4,9,6,9,1,3,0,0,1,2,5,1
uSF2,DE,003,01,0000022,146,77,3,3,9,3,3,1,1,4,3,4,8,7,6,7,4,2,2,3,2,1,0,1,0,69,1,2,4,6,2,0,0,1,1,4,7,4,9,6,9,1,3,0,0,1,2,5,1
uSF2,DE,003,01,0000023,180,84,3,5,8,6,2,0,0,2,6,3,10,9,6,11,3,2,0,2,3,0,1,2,0,96,3,4,8,4,2,1,1,4,4,6,13,9,5,5,3,3,6,1,3,6,1,3,1
uSF2,DE,003,01,0000024,180,84,3,5,8,6,2,0,0,2,6,3,10,9,6,11,3,2,0,2,3,0,1,2,0,96,3,4,8,4,2,1,1,4,4,6,13,9,5,5,3,3,6,1,3,6,1,3,1
uSF2,DE,003,01,0000025,1491,715,61,72,64,37,19,6,7,25,41,55,75,52,46,40,39,7,14,9,17,12,7,8,2,776,57,74,68,42,26,10,15,20,52,59,85,66,35,33,32,18,22,10,16,17,10,5,4
uSF2,DE,003,01,0000026,1491,715,61,72,64,37,19,6,7,25,41,55,75,52,46,40,39,7,14,9,17,12,7,8,2,776,57,74,68,42,26,10,15,20,52,59,85,66,35,33,32,18,22,10,16,17,10,5,4
uSF2,DE,003,01,0000027,9862,4861,349,376,410,218,126,53,57,132,240,354,469,467,337,333,248,86,121,76,124,135,84,49,17,5001,355,420,392,233,127,48,43,145,276,332,441,481,347,316,255,101,126,87,109,157,99,65,46
uSF2,DE,003,01,0000028,2746,1340,93,100,128,62,41,15,18,37,58,100,140,120,102,88,68,17,32,22,36,33,19,5,6,1406,100,120,119,78,31,20,12,53,71,97,114,129,92,99,78,21,34,18,29,37,24,20,10
uSF2,DE,003,01,0000029,2443,1208,71,81,86,54,37,19,19,45,59,79,98,109,104,88,63,30,30,22,39,32,23,17,3,1235,70,95,81,64,36,7,13,36,61,64,95,124,120,79,63,37,33,36,22,38,27,21,13
uSF2,DE,003,01,0000030,1361,670,57,70,54,25,14,4,8,10,31,44,70,64,29,49,42,13,16,13,17,23,7,8,2,691,49,58,58,28,15,4,5,18,45,47,69,65,31,39,48,13,17,13,18,22,15,4,10
uSF2,DE,003,01,0000031,3312,1643,128,125,142,77,34,15,12,40,92,131,161,174,102,108,75,26,43,19,32,47,35,19,6,1669,136,147,134,63,45,17,13,38,99,124,163,163,104,99,66,30,42,20,40,60,33,20,13
uSF2,DE,003,01,0000032,43871,21242,1601,1678,1598,899,491,221,276,862,1383,1576,1781,1733,1393,1336,1062,360,523,370,528,666,463,291,151,22629,1510,1532,1588,915,510,260,279,860,1495,1557,1885,1743,1537,1428,1163,411,629,386,519,828,758,464,372
uSF2,DE,003,01,0000033,1641,784,49,62,69,46,25,7,7,24,50,49,69,76,47,51,41,13,17,12,21,25,12,8,4,857,44,41,69,40,21,9,11,43,57,55,70,79,67,60,35,17,25,20,22,27,17,14,14
uSF2,DE,003,01,0000034,1641,784,49,62,69,46,25,7,7,24,50,49,69,76,47,51,41,13,17,12,21,25,12,8,4,857,44,41,69,40,21,9,11,43,57,55,70,79,67,60,35,17,25,20,22,27,17,14,14
uSF2,DE,003,01,0000035,235,124,12,11,10,8,3,2,3,6,11,8,13,7,9,1,4,1,2,2,4,2,4,1,0,111,6,6,11,9,2,1,2,1,9,13,8,13,7,6,2,1,0,2,3,4,1,2,2
uSF2,DE,003,01,0000036,235,124,12,11,10,8,3,2,3,6,11,8,13,7,9,1,4,1,2,2,4,2,4,1,0,111,6,6,11,9,2,1,2,1,9,13,8,13,7,6,2,1,0,2,3,4,1,2,2
uSF2,DE,003,01,0000037,16905,7966,496,561,496,275,182,92,116,371,563,623,633,627,515,553,430,115,205,154,211,296,219,148,85,8939,499,485,526,294,152,92,124,369,578,602,689,656,612,595,503,153,262,158,229,410,437,276,238
uSF2,DE,003,01,0000038,2933,1407,98,114,88,53,37,17,27,68,106,125,127,94,77,75,52,18,35,32,46,55,37,19,7,1526,97,101,86,47,34,10,32,81,128,112,136,100,93,90,70,21,53,37,41,62,52,27,16
uSF2,DE,003,01,0000039,435,222,28,13,10,2,1,1,2,11,19,33,27,14,9,21,5,1,4,3,4,5,5,3,1,213,19,13,8,7,6,1,2,15,25,25,18,9,12,9,9,3,3,5,4,6,9,3,2
uSF2,DE,003,01,0000040,2865,1321,78,106,125,58,25,8,13,31,55,70,95,110,109,129,114,23,43,15,21,42,21,15,15,1544,86,101,132,77,21,9,14,38,63,97,119,122,142,156,108,25,27,17,24,50,37,30,49
uSF2,DE,003,01,0000041,1392,640,39,31,36,19,23,15,7,34,42,32,58,53,32,40,26,12,23,17,19,22,28,18,14,752,36,34,35,22,19,9,13,30,44,48,48,46,40,40,38,16,27,15,21,40,59,41,31
uSF2,DE,003,01,0000042,1412,599,20,29,24,18,10,9,11,28,50,54,36,37,45,50,42,9,14,17,11,27,26,18,14,813,22,16,27,12,5,6,9,23,50,41,33,40,44,60,49,8,32,17,25,76,84,79,55
uSF2,DE,003,01,0000043,2114,1043,70,80,54,28,33,9,19,58,79,109,74,86,65,55,51,15,28,17,27,42,25,18,1,1071,72,72,44,31,23,23,14,49,78,85,90,95,63,52,66,18,24,23,24,42,58,13,12
uSF2,DE,003,01,0000044,61,31,1,7,3,2,0,1,0,1,2,2,6,1,3,0,0,0,0,0,0,1,1,0,0,30,2,3,5,1,0,0,1,1,4,2,1,3,2,1,1,0,0,0,1,1,1,0,0
uSF2,DE,003,01,0000045,362,168,12,9,12,7,5,4,2,13,7,11,10,18,13,12,5,1,8,7,6,3,1,1,1,194,10,8,11,7,3,5,5,12,11,14,13,16,15,8,11,7,6,7,7,4,4,8,2
uSF2,DE,003,01,0000046,1181,550,31,38,24,13,6,9,5,35,55,38,44,42,39,32,25,7,10,12,16,18,16,20,15,631,22,22,33,10,8,9,10,37,56,36,46,46,41,39,27,15,19,8,18,30,47,24,28
uSF2,DE,003,01,0000047,1139,549,37,36,25,16,14,4,10,37,46,54,47,48,30,32,19,9,6,5,21,15,20,9,9,590,31,30,24,13,9,10,9,38,48,50,42,50,38,30,25,15,12,7,25,25,20,26,13
uSF2,DE,003,01,0000048,1498,723,19,51,59,33,15,8,7,22,22,34,46,64,48,48,54,16,26,25,29,46,27,19,5,775,21,31,78,48,8,5,5,12,13,29,55,68,54,57,64,16,50,17,30,50,37,14,13
uSF2,DE,003,01,0000049,1346,631,59,44,30,22,13,6,11,27,67,57,55,53,41,51,32,4,8,3,9,18,11,8,2,715,74,51,35,18,12,5,10,24,52,60,82,50,56,49,32,8,9,4,9,23,27,8,17
uSF2,DE,003,01,0000050,167,82,4,3,6,4,0,1,2,6,13,4,8,7,4,8,5,0,0,1,2,2,1,0,1,85,7,3,8,1,4,0,0,9,6,3,6,11,12,4,3,1,0,1,0,1,2,3,0
uSF2,DE,003,01,0000051,2605,1331,255,155,111,29,18,23,35,133,195,173,119,68,11,3,3,0,0,0,0,0,0,0,0,1274,216,160,83,42,37,44,39,117,212,147,100,51,15,5,2,0,2,0,0,2,0,0,0
uSF2,DE,003,01,0000052,2605,1331,255,155,111,29,18,23,35,133,195,173,119,68,11,3,3,0,0,0,0,0,0,0,0,1274,216,160,83,42,37,44,39,117,212,147,100,51,15,5,2,0,2,0,0,2,0,0,0
uSF2,DE,003,01,0000053,2859,1374,62,88,107,76,35,14,9,31,52,62,93,121,107,127,95,41,53,43,48,46,39,19,6,1485,75,91,103,77,28,14,16,40,61,49,115,114,126,125,106,57,61,44,40,53,53,21,16
uSF2,DE,003,01,0000054,1500,703,32,40,50,39,16,5,5,11,31,29,44,60,45,52,51,19,35,30,34,32,23,16,4,797,33,50,47,39,15,12,4,22,27,27,57,49,63,59,55,38,45,26,32,36,35,17,9
uSF2,DE,003,01,0000055,1359,671,30,48,57,37,19,9,4,20,21,33,49,61,62,75,44,22,18,13,14,14,16,3,2,688,42,41,56,38,13,2,12,18,34,22,58,65,63,66,51,19,16,18,8,17,18,4,7
uSF2,DE,003,01,0000056,1244,593,40,52,46,23,10,2,3,12,32,49,53,51,39,34,30,12,15,12,21,21,21,14,1,651,36,41,53,20,12,6,2,17,41,48,52,48,42,40,43,9,28,14,20,33,23,14,9
uSF2,DE,003,01,0000057,766,362,26,35,28,11,5,1,3,7,16,36,36,30,24,21,18,5,11,6,13,10,14,5,1,404,24,29,40,13,5,5,1,12,26,33,39,23,22,31,29,4,17,7,14,13,11,4,2
uSF2,DE,003,01,0000058,478,231,14,17,18,12,5,1,0,5,16,13,17,21,15,13,12,7,4,6,8,11,7,9,0,247,12,12,13,7,7,1,1,5,15,15,13,25,20,9,14,5,11,7,6,20,12,10,7
uSF2,DE,003,01,0000059,192,89,6,7,6,4,0,2,1,2,7,4,11,5,6,8,5,0,4,1,0,6,2,0,2,103,7,6,12,6,1,3,2,3,5,7,10,3,11,3,8,2,3,1,3,2,5,0,0
uSF2,DE,003,01,0000060,192,89,6,7,6,4,0,2,1,2,7,4,11,5,6,8,5,0,4,1,0,6,2,0,2,103,7,6,12,6,1,3,2,3,5,7,10,3,11,3,8,2,3,1,3,2,5,0,0
uSF2,DE,003,01,0000061,180,81,8,7,4,5,1,1,1,0,4,6,8,6,7,3,3,1,0,2,4,7,3,0,0,99,9,13,8,4,1,2,1,4,5,5,9,7,4,5,3,0,3,3,1,6,1,3,2
uSF2,DE,003,01,0000062,100,42,2,3,1,4,0,0,0,0,2,3,6,3,6,1,2,0,0,1,2,4,2,0,0,58,5,6,6,4,1,1,1,0,3,3,6,4,2,2,2,0,1,2,1,3,1,3,1
uSF2,DE,003,01,0000063,222,115,11,8,8,6,4,0,0,6,7,7,8,11,3,8,6,3,3,5,2,6,1,2,0,107,6,6,7,7,2,1,0,1,4,8,13,10,4,10,5,1,7,1,4,3,5,0,2
uSF2,DE,003,01,0000064,222,115,11,8,8,6,4,0,0,6,7,7,8,11,3,8,6,3,3,5,2,6,1,2,0,107,6,6,7,7,2,1,0,1,4,8,13,10,4,10,5,1,7,1,4,3,5,0,2
uSF2,DE,003,01,0000065,815,415,22,26,25,24,26,7,12,26,21,17,26,33,25,27,19,8,10,9,13,17,14,7,1,400,15,16,28,19,20,6,3,11,21,14,27,27,28,29,24,10,12,10,15,25,17,13,10
uSF2,DE,003,01,0000066,803,408,21,25,25,22,26,7,10,26,21,16,26,33,25,27,19,8,10,9,13,17,14,7,1,395,15,15,27,19,20,6,3,11,21,14,27,25,28,29,24,10,12,10,15,25,17,12,10
uSF2,DE,003,01,0000067,929,459,38,24,36,20,12,4,5,18,24,39,32,53,34,21,22,10,12,9,15,12,8,8,3,470,24,28,29,21,9,9,5,12,33,34,41,42,32,32,18,14,14,11,13,17,17,9,6
uSF2,DE,003,01,0000068,154,71,6,1,8,2,4,1,1,1,3,12,7,9,8,1,3,1,0,0,1,0,2,0,0,83,6,7,8,4,1,2,0,0,5,6,12,14,4,3,3,1,0,3,1,1,2,0,0
uSF2,DE,003,01,0000069,775,388,32,23,28,18,8,3,4,17,21,27,25,44,26,20,19,9,12,9,14,12,6,8,3,387,18,21,21,17,8,7,5,12,28,28,29,28,28,29,15,13,14,8,12,16,15,9,6
uSF2,DE,003,01,0000070,15970,7880,599,673,676,380,174,67,83,232,414,537,715,672,589,498,403,156,202,121,189,228,140,83,49,8090,569,637,656,374,223,71,74,242,465,571,744,687,587,516,413,147,211,122,168,246,182,112,73
uSF2,DE,003,01,0000071,615,307,18,24,15,14,4,4,2,13,23,25,34,26,14,21,12,10,7,6,11,14,7,3,0,308,17,20,21,9,10,2,3,13,20,17,28,26,15,22,25,7,13,4,7,11,13,3,2
uSF2,DE,003,01,0000072,2070,1036,82,65,60,38,22,9,14,22,63,83,98,60,80,73,58,22,38,23,38,38,28,11,11,1034,58,54,56,39,22,9,6,36,78,73,87,80,94,71,69,27,32,21,26,40,30,14,12
uSF2,DE,003,01,0000074,253,116,4,7,6,4,1,0,1,4,6,7,12,15,11,5,7,4,3,3,4,5,5,2,0,137,7,12,6,4,3,1,3,9,7,9,6,10,13,8,4,5,3,5,3,4,9,5,1
uSF2,DE,003,01,0000075,888,425,23,33,29,19,7,2,8,25,23,27,36,27,34,29,29,17,15,6,6,14,9,6,1,463,29,32,39,27,12,7,9,12,29,29,28,43,35,28,34,5,17,4,5,26,6,6,1
uSF2,DE,003,01,0000076,581,278,16,17,20,14,9,2,2,6,14,11,29,27,24,19,16,7,13,9,9,8,3,3,0,303,13,18,31,17,5,4,3,10,14,14,18,29,22,21,21,8,10,7,11,10,8,5,4
uSF2,DE,003,01,0000077,763,380,22,40,54,27,8,4,1,2,9,29,38,46,35,25,15,5,4,5,2,3,3,3,0,383,29,36,45,19,11,3,6,3,12,26,43,52,32,17,19,4,6,2,2,7,3,2,4
uSF2,DE,003,01,0000078,4176,2075,177,197,193,109,46,19,23,58,109,147,187,184,142,109,93,36,44,27,41,55,39,25,15,2101,158,177,166,101,62,18,15,66,124,148,226,168,132,138,84,29,45,37,48,57,56,31,15
uSF2,DE,003,01,0000079,2132,1033,94,96,99,56,29,8,11,22,37,51,92,94,94,71,57,12,21,10,29,20,15,7,8,1099,70,116,107,73,33,9,7,30,38,78,105,90,92,62,56,17,18,13,14,24,20,15,12
uSF2,DE,003,01,0000080,4433,2204,163,193,198,99,48,17,21,80,129,155,187,192,154,144,112,43,55,31,48,69,29,23,14,2229,187,170,183,83,64,18,22,63,142,176,201,188,152,146,96,45,63,28,51,65,35,31,20
uSF2,DE,003,01,0000081,4795,2353,159,168,222,105,51,21,20,49,164,173,198,218,177,155,125,53,65,41,51,67,41,19,11,2442,127,178,193,122,51,22,14,85,168,199,204,230,187,162,121,42,65,35,58,82,40,38,19
uSF2,DE,003,01,0000082,660,308,26,23,28,14,16,1,4,9,27,22,35,21,20,13,10,6,10,2,6,4,3,5,3,352,13,30,32,19,7,3,0,14,30,33,35,36,26,18,8,8,4,3,6,10,10,2,5
uSF2,DE,003,01,0000083,660,308,26,23,28,14,16,1,4,9,27,22,35,21,20,13,10,6,10,2,6,4,3,5,3,352,13,30,32,19,7,3,0,14,30,33,35,36,26,18,8,8,4,3,6,10,10,2,5
uSF2,DE,003,01,0000084,4135,2045,133,145,194,91,35,20,16,40,137,151,163,197,157,142,115,47,55,39,45,63,38,14,8,2090,114,148,161,103,44,19,14,71,138,166,169,194,161,144,113,34,61,32,52,72,30,36,14
uSF2,DE,003,01,0000085,4135,2045,133,145,194,91,35,20,16,40,137,151,163,197,157,142,115,47,55,39,45,63,38,14,8,2090,114,148,161,103,44,19,14,71,138,166,169,194,161,144,113,34,61,32,52,72,30,36,14
uSF2,DE,003,01,0000086,8728,4249,299,327,338,198,113,46,39,122,278,286,343,346,312,279,240,71,111,73,90,152,99,55,32,4479,321,333,342,186,88,42,47,127,272,341,362,369,310,286,223,66,115,77,116,161,144,102,49
uSF2,DE,003,01,0000087,2424,1140,79,103,92,51,37,18,12,50,79,83,75,92,77,62,47,17,27,17,23,39,31,17,12,1284,97,92,112,47,33,10,17,43,76,87,93,87,100,66,49,12,31,20,41,55,53,42,21
uSF2,DE,003,01,0000088,2424,1140,79,103,92,51,37,18,12,50,79,83,75,92,77,62,47,17,27,17,23,39,31,17,12,1284,97,92,112,47,33,10,17,43,76,87,93,87,100,66,49,12,31,20,41,55,53,42,21
uSF2,DE,003,01,0000089,389,197,12,25,20,7,8,4,1,5,15,12,16,13,15,12,5,1,2,1,2,10,3,4,4,192,14,15,16,4,4,1,0,6,13,21,16,18,10,10,9,2,4,2,8,8,3,5,3
uSF2,DE,003,01,0000090,389,197,12,25,20,7,8,4,1,5,15,12,16,13,15,12,5,1,2,1,2,10,3,4,4,192,14,15,16,4,4,1,0,6,13,21,16,18,10,10,9,2,4,2,8,8,3,5,3
uSF2,DE,003,01,0000091,5840,2871,206,197,224,139,68,24,26,66,182,184,250,237,216,202,186,52,82,53,64,100,63,34,16,2969,210,223,212,132,51,30,29,78,182,232,248,262,197,206,164,51,80,55,65,97,86,54,25
uSF2,DE,003,01,0000092,2443,1200,81,90,90,50,30,10,10,30,77,80,101,99,103,81,87,28,27,16,20,47,20,17,6,1243,87,96,84,61,27,15,13,26,78,100,101,111,94,87,61,20,36,13,26,42,32,22,11
uSF2,DE,003,01,0000093,1201,580,41,34,37,31,11,6,5,16,40,28,48,53,41,47,32,7,23,13,20,20,15,7,5,621,39,44,37,34,10,4,4,16,36,41,49,61,38,45,32,17,14,16,18,27,20,16,3
uSF2,DE,003,01,0000094,2196,1091,84,73,97,58,27,8,11,20,65,76,101,85,72,74,67,17,32,24,24,33,28,10,5,1105,84,83,91,37,14,11,12,36,68,91,98,90,65,74,71,14,30,26,21,28,34,16,11
uSF2,DE,003,01,0000095,4881,2477,172,233,222,132,78,36,28,97,123,163,207,223,172,143,149,39,65,27,44,50,41,29,4,2404,165,179,205,116,68,32,20,66,154,180,218,212,177,142,136,37,61,33,50,63,46,30,14
uSF2,DE,003,01,0000096,226,109,4,10,11,8,2,2,0,4,6,8,10,9,7,5,11,1,4,1,1,2,1,2,0,117,7,7,13,5,5,1,3,3,3,11,12,10,4,6,9,4,3,1,1,3,2,2,2
uSF2,DE,003,01,0000097,226,109,4,10,11,8,2,2,0,4,6,8,10,9,7,5,11,1,4,1,1,2,1,2,0,117,7,7,13,5,5,1,3,3,3,11,12,10,4,6,9,4,3,1,1,3,2,2,2
uSF2,DE,003,01,0000098,4655,2368,168,223,211,124,76,34,28,93,117,155,197,214,165,138,138,38,61,26,43,48,40,27,4,2287,158,172,192,111,63,31,17,63,151,169,206,202,173,136,127,33,58,32,49,60,44,28,12
uSF2,DE,003,01,0000099,4655,2368,168,223,211,124,76,34,28,93,117,155,197,214,165,138,138,38,61,26,43,48,40,27,4,2287,158,172,192,111,63,31,17,63,151,169,206,202,173,136,127,33,58,32,49,60,44,28,12
uSF2,DE,003,01,0000100,6563,3130,176,217,224,109,71,40,34,101,162,240,254,238,213,229,167,65,115,78,79,119,105,57,37,3433,195,187,256,112,81,38,35,109,164,226,275,251,224,243,195,72,106,72,91,161,158,103,79
uSF2,DE,003,01,0000101,279,137,5,6,14,2,1,0,3,7,8,12,11,16,9,10,7,1,4,5,6,3,4,2,1,142,6,5,8,3,1,2,1,6,7,20,7,8,5,14,8,8,5,2,5,3,6,9,3
uSF2,DE,003,01,0000102,279,137,5,6,14,2,1,0,3,7,8,12,11,16,9,10,7,1,4,5,6,3,4,2,1,142,6,5,8,3,1,2,1,6,7,20,7,8,5,14,8,8,5,2,5,3,6,9,3
uSF2,DE,003,01,0000103,467,222,17,20,23,8,3,3,4,4,10,25,23,17,13,17,7,1,4,2,1,2,9,5,4,245,17,27,21,7,7,2,5,6,18,11,29,19,16,14,5,3,5,4,2,8,12,4,3
uSF2,DE,003,01,0000104,467,222,17,20,23,8,3,3,4,4,10,25,23,17,13,17,7,1,4,2,1,2,9,5,4,245,17,27,21,7,7,2,5,6,18,11,29,19,16,14,5,3,5,4,2,8,12,4,3
uSF2,DE,003,01,0000105,1422,610,33,44,34,20,8,14,11,39,44,49,44,37,28,48,26,9,18,8,13,34,22,15,12,812,49,46,43,18,15,12,8,41,45,45,59,34,44,45,41,9,16,16,21,61,59,49,36
uSF2,DE,003,01,0000106,1213,533,25,42,32,20,7,12,7,33,41,42,42,37,24,45,22,8,14,7,10,26,18,9,10,680,43,39,37,15,10,10,6,37,40,42,53,30,39,40,37,8,14,10,15,44,42,37,32
uSF2,DE,003,01,0000107,209,77,8,2,2,0,1,2,4,6,3,7,2,0,4,3,4,1,4,1,3,8,4,6,2,132,6,7,6,3,5,2,2,4,5,3,6,4,5,5,4,1,2,6,6,17,17,12,4
uSF2,DE,003,01,0000108,4395,2161,121,147,153,79,59,23,16,51,100,154,176,168,163,154,127,54,89,63,59,80,70,35,20,2234,123,109,184,84,58,22,21,56,94,150,180,190,159,170,141,52,80,50,63,89,81,41,37
uSF2,DE,003,01,0000109,2085,1029,66,66,82,35,30,14,10,33,58,72,89,86,72,69,56,21,33,28,20,34,32,17,6,1056,57,56,84,37,35,12,9,30,48,80,88,93,71,68,59,19,41,20,37,45,34,21,12
uSF2,DE,003,01,0000110,361,166,7,11,9,11,2,0,0,4,5,12,14,13,13,17,9,6,8,3,7,8,5,2,0,195,8,11,16,5,3,0,4,5,4,14,14,23,10,24,13,6,3,5,6,5,9,3,4
uSF2,DE,003,01,0000111,1554,774,34,61,55,29,17,9,5,12,22,55,59,54,58,56,47,22,44,25,25,32,29,11,13,780,44,30,64,34,16,8,6,15,25,44,63,60,61,58,58,22,31,22,16,34,37,14,18
uSF2,DE,003,01,0000112,395,192,14,9,7,4,10,0,1,2,15,15,14,15,20,12,15,5,4,7,7,6,4,5,1,203,14,12,20,8,4,2,2,6,17,12,15,14,17,20,11,5,5,3,4,5,1,3,3
uSF2,DE,003,01,0000113,9635,4598,332,336,378,204,114,51,60,137,279,358,405,361,333,276,229,82,82,75,124,168,119,57,38,5037,311,353,368,208,123,57,54,151,329,370,441,411,333,299,252,105,136,64,145,206,141,102,78
uSF2,DE,003,01,0000114,1157,536,45,41,64,16,14,3,9,18,26,48,48,44,41,31,11,5,6,8,6,21,14,9,8,621,30,40,49,31,12,6,6,17,40,46,54,52,44,43,25,13,12,5,12,36,11,20,17
uSF2,DE,003,01,0000115,1157,536,45,41,64,16,14,3,9,18,26,48,48,44,41,31,11,5,6,8,6,21,14,9,8,621,30,40,49,31,12,6,6,17,40,46,54,52,44,43,25,13,12,5,12,36,11,20,17
uSF2,DE,003,01,0000116,3982,1853,128,129,156,93,52,25,33,57,131,137,168,128,130,108,76,30,32,24,49,66,58,22,21,2129,138,134,164,83,63,25,27,79,144,152,174,157,156,114,80,46,47,25,59,94,79,46,43
uSF2,DE,003,01,0000117,1313,622,53,45,44,33,18,11,17,27,55,47,53,40,43,36,21,12,9,5,10,21,15,3,4,691,54,40,60,18,28,5,7,35,56,60,57,46,58,36,29,15,9,7,12,24,13,9,13
uSF2,DE,003,01,0000118,1821,859,41,56,73,42,24,9,9,20,48,53,86,60,65,54,41,14,19,15,33,31,32,17,17,962,46,55,70,41,20,11,11,29,43,56,79,73,69,57,40,27,30,14,39,48,50,29,25
uSF2,DE,003,01,0000119,848,372,34,28,39,18,10,5,7,10,28,37,29,28,22,18,14,4,4,4,6,14,11,2,0,476,38,39,34,24,15,9,9,15,45,36,38,38,29,21,11,4,8,4,8,22,16,8,5
uSF2,DE,003,01,0000120,4492,2208,159,166,158,95,47,23,18,62,122,173,189,189,162,137,142,47,44,43,69,81,47,26,9,2284,141,179,155,94,48,26,20,55,145,172,213,202,133,142,147,46,77,34,74,76,51,36,18
uSF2,DE,003,01,0000121,350,175,10,16,15,6,5,0,0,2,11,14,21,29,10,8,7,7,2,2,4,3,0,2,1,175,13,18,13,9,4,3,1,4,12,21,13,17,7,4,7,6,4,3,5,5,1,3,2
uSF2,DE,003,01,0000122,2601,1262,99,96,81,55,25,16,9,37,63,107,104,87,95,84,79,31,26,27,49,44,27,16,5,1339,78,103,87,52,23,18,14,33,82,95,116,120,80,92,99,19,50,20,43,50,32,23,10
uSF2,DE,003,01,0000123,1375,684,46,49,54,29,16,5,8,22,39,44,61,62,54,38,49,9,14,13,16,31,18,5,2,691,46,49,48,28,21,5,5,13,45,51,81,58,41,39,38,19,19,11,23,21,15,10,5
uSF2,DE,003,01,0000124,166,87,4,5,8,5,1,2,1,1,9,8,3,11,3,7,7,0,2,1,0,3,2,3,1,79,4,9,7,5,0,0,0,5,6,5,3,7,5,7,3,2,4,0,3,0,3,0,1
uSF2,DE,003,01,0000125,4881,2477,172,233,222,132,78,36,28,97,123,163,207,223,172,143,149,39,65,27,44,50,41,29,4,2404,165,179,205,116,68,32,20,66,154,180,218,212,177,142,136,37,61,33,50,63,46,30,14
uSF2,DE,003,01,0000126,2820,1333,108,102,123,55,37,14,26,47,92,109,122,113,94,75,39,24,17,15,20,45,29,14,13,1487,97,98,122,58,44,14,14,56,108,127,124,115,109,83,61,34,25,15,29,65,25,32,32
uSF2,DE,003,01,0000127,4422,2121,140,152,154,97,49,25,18,57,111,160,190,147,160,138,120,45,45,42,82,75,59,33,22,2301,124,158,157,93,43,29,25,62,125,151,195,193,149,149,139,46,80,34,82,98,82,52,35
uSF2,DE,003,01,0000128,2223,1056,80,77,93,47,26,10,15,32,67,81,90,90,76,56,63,13,18,17,22,45,29,7,2,1167,84,88,82,52,36,14,14,28,90,87,119,96,70,60,49,23,27,15,31,43,31,18,10
uSF2,DE,003,01,0000129,1057,523,34,40,32,24,7,9,5,16,41,40,50,45,24,38,25,11,13,9,13,26,12,6,3,534,34,42,42,20,11,6,6,25,33,31,44,39,33,35,37,11,22,6,13,16,21,3,4
uSF2,DE,003,01,0000130,5003,2443,180,179,148,91,59,26,41,90,169,208,225,154,157,148,110,40,73,55,84,93,65,30,18,2560,155,155,142,86,56,19,38,117,206,185,223,180,187,161,139,48,85,58,67,102,82,41,28
uSF2,DE,003,01,0000131,448,227,28,14,10,2,1,1,2,11,19,33,27,15,9,21,7,1,5,3,4,5,5,3,1,221,19,13,9,8,6,1,2,15,25,25,18,10,12,10,10,3,3,6,4,6,9,3,4
uSF2,DE,003,01,0000132,2865,1321,78,106,125,58,25,8,13,31,55,70,95,110,109,129,114,23,43,15,21,42,21,15,15,1544,86,101,132,77,21,9,14,38,63,97,119,122,142,156,108,25,27,17,24,50,37,30,49
uSF2,DE,003,01,0000133,1392,640,39,31,36,19,23,15,7,34,42,32,58,53,32,40,26,12,23,17,19,22,28,18,14,752,36,34,35,22,19,9,13,30,44,48,48,46,40,40,38,16,27,15,21,40,59,41,31
uSF2,DE,003,01,0000134,1412,599,20,29,24,18,10,9,11,28,50,54,36,37,45,50,42,9,14,17,11,27,26,18,14,813,22,16,27,12,5,6,9,23,50,41,33,40,44,60,49,8,32,17,25,76,84,79,55
uSF2,DE,003,01,0000135,2467,1201,76,90,61,36,34,9,20,62,87,119,92,104,82,61,60,19,31,21,33,51,32,20,1,1266,84,90,56,39,27,25,18,58,88,97,102,109,78,62,72,23,28,30,28,49,68,21,14
uSF2,DE,003,01,0000136,2676,1369,256,162,114,31,18,26,35,134,197,176,126,69,15,5,3,0,0,0,0,1,1,0,0,1307,218,163,88,43,37,44,40,118,216,149,101,54,17,7,3,0,4,0,1,3,1,0,0
uSF2,DE,003,01,0000137,2016,955,61,77,69,37,17,7,13,45,46,74,82,75,71,62,52,23,34,19,25,27,24,12,3,1061,63,69,90,47,20,17,15,36,66,76,80,82,72,67,74,16,40,18,26,43,21,18,5
uSF2,DE,003,01,0000138,1191,553,31,38,24,13,6,9,5,35,55,39,44,42,39,32,25,7,10,12,16,19,17,20,15,638,22,22,34,11,8,9,10,37,56,36,47,46,41,39,29,15,19,8,18,31,48,24,28
uSF2,DE,003,01,0000139,1139,549,37,36,25,16,14,4,10,37,46,54,47,48,30,32,19,9,6,5,21,15,20,9,9,590,31,30,24,13,9,10,9,38,48,50,42,50,38,30,25,15,12,7,25,25,20,26,13
uSF2,DE,003,01,0000140,2481,1213,46,77,94,57,45,16,18,49,47,62,80,106,81,76,78,25,37,35,44,64,44,26,6,1268,43,55,113,71,30,13,8,23,40,50,95,107,86,90,93,27,64,30,47,77,57,26,23
uSF2,DE,003,01,0000141,1990,941,47,58,68,53,21,6,7,16,47,43,61,81,60,65,63,26,39,36,42,43,30,25,4,1049,45,63,61,46,22,13,5,27,42,42,70,76,83,68,69,43,56,33,38,56,47,28,16
uSF2,DE,003,01,0000142,2997,1450,97,102,117,78,42,12,13,47,85,87,123,147,97,90,76,29,42,30,44,45,21,19,7,1547,75,80,121,74,34,20,19,65,99,97,117,136,117,110,71,38,49,35,45,53,40,28,24
uSF2,DE,003,01,0000143,2344,1166,63,96,119,70,31,13,5,28,37,69,95,118,100,108,65,30,25,23,18,23,20,8,2,1178,77,83,108,64,26,6,18,22,50,56,114,127,99,93,75,24,29,21,14,27,26,6,13
uSF2,DE,003,01,0000144,5757,2830,248,252,233,139,62,27,37,91,187,212,255,244,192,161,129,41,54,32,54,75,54,34,17,2927,238,234,212,128,76,24,27,91,185,221,316,231,195,193,118,38,54,43,60,84,84,41,34
uSF2,DE,003,01,0000145,2299,1115,98,99,105,60,29,9,13,28,50,55,100,101,98,79,62,12,21,11,31,22,16,7,9,1184,77,119,115,74,37,9,7,39,44,81,111,101,104,66,59,18,18,14,14,25,22,18,12
uSF2,DE,003,01,0000146,4507,2235,166,197,202,102,49,17,22,81,132,157,188,195,155,146,113,43,55,31,48,69,29,24,14,2272,191,172,186,85,66,20,22,63,146,180,208,194,154,148,97,45,64,28,52,65,35,31,20
uSF2,DE,003,01,0000147,2746,1340,93,100,128,62,41,15,18,37,58,100,140,120,102,88,68,17,32,22,36,33,19,5,6,1406,100,120,119,78,31,20,12,53,71,97,114,129,92,99,78,21,34,18,29,37,24,20,10
uSF2,DE,003,01,0000148,2769,1369,77,89,103,63,42,20,20,51,68,86,116,125,116,106,70,34,32,27,44,33,24,20,3,1400,74,101,93,74,40,8,14,41,66,74,115,137,134,90,75,41,42,37,25,45,30,29,15
uSF2,DE,003,01,0000149,4552,2216,212,235,197,95,48,22,38,91,151,178,241,168,99,116,102,24,37,26,47,44,20,18,7,2336,205,205,214,114,63,25,37,101,180,188,240,184,96,101,105,37,49,28,46,49,35,15,19
uSF2,DE,003,01,0000150,4927,2459,186,181,218,124,48,20,20,67,142,191,238,246,175,176,110,35,58,26,47,69,47,25,10,2468,174,204,209,105,69,28,18,64,154,183,235,247,168,162,103,38,58,25,54,76,53,25,16
uSF2,DE,003,01,0000151,2364,1166,71,72,96,37,31,14,13,40,66,84,100,102,81,79,63,22,37,33,26,37,36,19,7,1198,63,61,92,40,36,14,10,36,55,100,95,101,76,82,67,27,46,22,42,48,40,30,15
uSF2,DE,003,01,0000152,1574,699,32,53,41,31,9,12,7,37,46,54,56,50,37,62,31,14,22,10,17,34,23,11,10,875,51,50,53,20,13,10,10,42,44,56,67,53,49,64,50,14,17,15,21,49,51,40,36
uSF2,DE,003,01,0000153,1763,851,42,63,57,29,18,11,9,18,25,62,61,54,62,59,51,23,48,26,28,40,33,17,15,912,50,37,70,37,21,10,8,19,30,47,69,64,66,63,62,23,33,28,22,51,54,26,22
uSF2,DE,003,01,0000154,862,414,31,29,30,12,13,3,5,6,25,40,37,32,33,29,22,6,8,9,8,8,13,10,5,448,31,39,41,15,11,4,7,12,35,23,44,33,33,34,16,8,10,7,6,13,13,7,6
uSF2,DE,003,01,0000155,4795,2353,159,168,222,105,51,21,20,49,164,173,198,218,177,155,125,53,65,41,51,67,41,19,11,2442,127,178,193,122,51,22,14,85,168,199,204,230,187,162,121,42,65,35,58,82,40,38,19
uSF2,DE,003,01,0000156,2832,1397,93,115,110,57,38,14,11,35,92,92,117,112,118,93,92,29,29,17,22,57,23,21,10,1435,101,111,100,65,31,16,13,32,91,121,117,129,104,97,70,22,40,15,34,50,35,27,14
uSF2,DE,003,01,0000157,3625,1720,120,137,129,82,48,24,17,66,119,111,123,145,118,109,79,24,50,30,43,59,46,24,17,1905,136,136,149,81,43,14,21,59,112,128,142,148,138,111,81,29,45,36,59,82,73,58,24
uSF2,DE,003,01,0000158,2271,1132,86,75,99,59,27,8,11,21,67,83,103,89,76,77,69,18,32,26,25,36,30,10,5,1139,84,86,93,40,14,12,13,36,69,92,103,92,68,78,72,15,30,26,23,29,36,17,11
uSF2,DE,003,01,0000159,359697,175694,11660,12539,12369,7287,3856,2301,2309,6655,11985,13561,15215,15177,13261,11792,9058,2909,3803,2487,3690,5580,4283,2526,1391,184003,10992,11910,11465,6607,3717,2287,2695,6757,11928,13591,15452,15436,13795,12501,9831,3111,4316,2814,4321,6934,6283,4149,3111
uSF2,DE,003,01,0000160,65087,31323,1816,2014,2135,1278,535,236,212,820,1592,2073,2547,2657,2502,2336,1856,592,858,549,848,1515,1244,716,392,33764,1723,1944,1909,1183,511,211,211,826,1657,2172,2529,2791,2725,2448,2106,702,975,711,987,1811,1684,1043,905
uSF2,DE,003,01,0000161,460,225,10,10,17,10,3,1,1,4,5,11,11,21,30,26,13,3,6,3,8,14,8,8,2,235,4,16,9,7,2,1,1,2,8,15,12,26,26,25,18,10,7,6,6,4,13,5,12
uSF2,DE,003,01,0000162,460,225,10,10,17,10,3,1,1,4,5,11,11,21,30,26,13,3,6,3,8,14,8,8,2,235,4,16,9,7,2,1,1,2,8,15,12,26,26,25,18,10,7,6,6,4,13,5,12
uSF2,DE,003,01,0000163,218,102,5,6,7,1,2,0,0,3,6,9,2,10,9,11,11,2,4,3,5,2,2,1,1,116,7,10,6,4,3,0,1,2,9,5,7,9,16,7,14,6,0,2,1,2,3,1,1
uSF2,DE,003,01,0000164,218,102,5,6,7,1,2,0,0,3,6,9,2,10,9,11,11,2,4,3,5,2,2,1,1,116,7,10,6,4,3,0,1,2,9,5,7,9,16,7,14,6,0,2,1,2,3,1,1
uSF2,DE,003,01,0000165,268,124,2,4,11,6,3,0,0,1,7,7,11,8,9,16,9,5,4,3,7,5,4,1,1,144,3,6,6,3,1,1,0,1,9,10,7,10,23,13,17,1,4,1,5,7,7,4,5
uSF2,DE,003,01,0000166,262,121,2,4,11,6,3,0,0,1,7,6,11,8,8,16,9,5,3,3,7,5,4,1,1,141,2,6,6,3,1,1,0,1,9,10,7,9,23,13,16,1,4,1,5,7,7,4,5
uSF2,DE,003,01,0000167,1204,577,33,42,43,23,10,7,2,11,44,47,63,54,48,32,25,5,12,8,11,17,22,11,7,627,40,36,40,20,7,6,4,15,48,45,60,60,61,32,22,2,16,5,14,25,30,20,19
uSF2,DE,003,01,0000168,1204,577,33,42,43,23,10,7,2,11,44,47,63,54,48,32,25,5,12,8,11,17,22,11,7,627,40,36,40,20,7,6,4,15,48,45,60,60,61,32,22,2,16,5,14,25,30,20,19
uSF2,DE,003,01,0000169,6675,3196,213,227,230,135,69,31,42,97,201,254,303,313,218,192,145,50,77,50,67,126,86,42,28,3479,191,223,228,128,74,36,33,106,208,274,309,322,210,214,162,49,82,62,88,152,147,93,88
uSF2,DE,003,01,0000170,644,329,24,30,29,13,9,4,7,14,22,24,33,25,34,15,16,2,8,6,1,4,5,2,2,315,22,28,36,16,4,7,3,9,26,27,30,32,19,14,10,5,2,6,5,5,6,3,0
uSF2,DE,003,01,0000171,1631,766,43,39,53,25,12,7,10,28,59,70,73,83,63,47,36,7,19,10,14,28,18,10,12,865,31,47,44,27,18,8,9,37,69,64,74,65,58,62,39,11,12,13,25,36,36,28,52
uSF2,DE,003,01,0000172,2900,1369,111,106,96,63,27,15,16,41,89,107,119,130,70,76,63,25,30,21,29,62,44,20,9,1531,91,105,100,52,41,17,17,45,71,128,139,151,86,86,65,22,42,22,42,76,69,39,25
uSF2,DE,003,01,0000173,1500,732,35,52,52,34,21,5,9,14,31,53,78,75,51,54,30,16,20,13,23,32,19,10,5,768,47,43,48,33,11,4,4,15,42,55,66,74,47,52,48,11,26,21,16,35,36,23,11
uSF2,DE,003,01,0000174,3799,1794,113,109,122,69,27,19,12,54,123,160,178,176,142,123,82,24,36,19,30,61,60,33,22,2005,119,120,130,56,33,14,10,63,113,162,178,168,177,128,111,36,41,37,47,81,76,61,44
uSF2,DE,003,01,0000175,687,333,24,20,37,12,1,4,2,5,16,21,37,28,33,22,17,4,5,3,6,16,8,7,5,354,28,23,22,6,4,1,1,6,13,27,46,25,31,17,19,6,6,6,6,22,14,11,14
uSF2,DE,003,01,0000176,3112,1461,89,89,85,57,26,15,10,49,107,139,141,148,109,101,65,20,31,16,24,45,52,26,17,1651,91,97,108,50,29,13,9,57,100,135,132,143,146,111,92,30,35,31,41,59,62,50,30
uSF2,DE,003,01,0000177,52463,25305,1440,1616,1705,1034,421,178,155,650,1206,1585,1979,2075,2046,1936,1571,503,719,463,720,1290,1062,620,331,27158,1359,1533,1490,965,391,153,162,637,1262,1661,1956,2196,2212,2029,1762,598,825,598,826,1540,1408,859,736
uSF2,DE,003,01,0000178,1889,844,53,46,40,32,19,10,14,30,74,69,62,74,53,49,35,12,29,22,15,25,37,25,19,1045,45,51,32,22,20,11,12,29,94,73,57,48,46,63,58,17,27,23,32,60,79,63,83
uSF2,DE,003,01,0000179,452,222,8,14,10,14,3,2,1,7,13,20,17,22,18,16,6,2,8,5,6,12,11,5,2,230,16,11,11,5,1,2,1,4,14,10,18,17,22,15,10,7,4,5,13,19,10,9,6
uSF2,DE,003,01,0000180,1759,856,51,56,54,38,14,10,5,20,33,73,75,74,64,47,45,19,24,10,25,66,36,16,1,903,50,55,54,39,28,6,6,32,35,80,57,81,58,38,52,24,34,16,26,56,48,19,9
uSF2,DE,003,01,0000181,2517,1241,71,65,83,56,23,12,4,53,120,111,116,114,95,67,68,21,27,16,25,39,28,22,5,1276,63,71,82,39,24,10,8,63,106,115,96,122,82,80,66,23,28,23,21,45,44,40,25
uSF2,DE,003,01,0000182,2864,1391,83,65,79,45,19,13,9,60,107,106,137,119,121,109,66,19,36,25,27,49,50,29,18,1473,79,75,49,36,14,9,15,71,110,112,113,114,134,105,87,23,45,34,36,74,74,30,34
uSF2,DE,003,01,0000183,3740,1757,93,132,104,52,24,12,7,39,74,95,138,162,138,153,140,34,47,31,45,84,79,49,25,1983,96,110,113,64,20,11,11,34,74,105,138,171,168,168,131,36,61,47,64,97,117,90,57
uSF2,DE,003,01,0000184,2560,1212,71,89,59,36,20,6,9,23,30,61,97,111,117,99,68,23,20,16,34,71,79,43,30,1348,84,71,69,49,24,5,5,15,35,71,119,110,126,102,60,28,34,23,57,92,77,55,37
uSF2,DE,003,01,0000185,2856,1348,71,87,85,61,18,9,9,23,47,80,109,104,109,106,82,22,35,34,48,73,73,37,26,1508,67,94,99,57,23,9,12,30,45,91,113,107,133,110,88,32,51,24,34,100,94,45,50
uSF2,DE,003,01,0000186,1604,781,52,44,58,28,14,4,4,9,23,59,49,62,67,67,47,13,14,24,21,49,40,22,11,823,47,42,44,25,8,2,4,6,29,59,60,79,76,57,44,18,32,17,17,65,50,22,20
uSF2,DE,003,01,0000187,1784,897,51,72,63,36,26,3,11,38,55,46,65,62,79,82,59,15,20,4,17,49,34,5,5,887,48,53,47,36,16,5,8,30,54,46,66,69,75,79,55,18,24,16,25,52,35,14,16
uSF2,DE,003,01,0000188,3208,1564,92,105,119,68,32,11,14,44,58,96,107,134,130,141,122,38,48,28,43,67,35,24,8,1644,93,99,85,61,28,8,11,33,75,94,119,141,162,145,126,39,59,39,50,61,67,31,18
uSF2,DE,003,01,0000189,3558,1766,104,106,105,57,29,11,11,94,147,149,149,145,119,106,115,50,62,28,46,71,33,19,10,1792,82,84,86,53,24,11,17,115,160,118,147,133,120,132,148,49,61,33,48,68,57,26,20
uSF2,DE,003,01,0000190,3031,1511,76,96,103,49,25,18,8,43,81,83,121,114,122,117,100,41,59,34,47,66,62,33,13,1520,59,81,87,58,20,12,7,31,58,85,127,117,129,105,133,42,51,47,51,96,69,33,22
uSF2,DE,003,01,0000191,1975,990,62,76,100,48,19,9,4,22,35,57,69,81,68,82,65,25,27,14,27,60,26,13,1,985,57,65,64,46,15,5,10,13,35,62,74,88,86,79,72,24,30,24,40,36,37,11,12
uSF2,DE,003,01,0000192,3897,1868,102,112,141,99,28,11,8,34,53,78,139,137,160,146,143,37,62,38,75,108,95,37,25,2029,91,134,123,106,24,10,6,27,59,96,118,162,177,171,154,55,63,63,69,110,108,54,49
uSF2,DE,003,01,0000193,2084,955,52,60,75,39,17,10,9,14,24,55,90,82,86,70,52,8,22,14,28,43,38,41,26,1129,53,87,61,42,18,5,3,19,27,62,86,109,88,64,61,19,34,18,27,71,51,55,69
uSF2,DE,003,01,0000194,3193,1542,78,97,112,88,26,7,8,21,31,64,93,133,141,123,80,35,46,37,44,98,90,56,34,1651,82,81,118,51,19,7,6,15,39,71,107,140,141,125,97,30,59,30,55,121,101,68,88
uSF2,DE,003,01,0000195,2778,1343,68,96,90,54,20,6,7,23,91,106,102,109,106,91,78,23,32,15,39,75,62,35,15,1435,80,74,84,40,20,8,8,27,87,115,110,122,108,87,85,30,27,35,36,88,82,47,35
uSF2,DE,003,01,0000196,2995,1399,115,72,101,51,17,7,5,32,73,125,117,109,101,108,59,31,33,19,36,64,55,41,28,1596,92,95,74,66,17,12,8,23,91,135,125,111,123,111,92,29,32,30,41,87,91,63,48
uSF2,DE,003,01,0000197,3719,1818,87,126,124,83,28,7,8,21,37,52,127,127,152,157,141,35,68,49,72,121,99,68,29,1901,75,100,108,70,28,5,4,20,35,61,106,155,158,193,143,55,69,51,84,142,117,84,38
uSF2,DE,003,01,0000198,25559,12697,1180,1131,1008,563,242,143,111,467,1080,1250,1280,1192,933,795,525,110,160,92,131,165,78,38,23,12862,1088,1118,918,510,282,160,154,554,1093,1292,1333,1228,1003,790,444,100,168,77,128,189,106,74,53
uSF2,DE,003,01,0000199,2758,1289,114,115,85,49,28,21,14,60,143,138,132,109,82,71,49,10,20,11,10,16,7,4,1,1469,119,127,102,60,34,32,23,80,117,137,152,137,106,97,42,26,12,6,18,26,9,6,1
uSF2,DE,003,01,0000200,2718,1273,113,115,85,48,27,21,14,60,143,138,132,107,80,67,47,9,19,11,9,16,7,4,1,1445,116,124,102,58,34,32,23,80,116,137,146,137,106,94,40,25,11,6,18,26,8,5,1
uSF2,DE,003,01,0000201,10140,5014,427,413,388,243,98,56,44,200,472,502,474,425,399,342,229,40,57,35,53,60,27,21,9,5126,408,421,367,210,124,57,65,263,490,503,477,455,429,330,189,31,65,25,49,66,44,32,26
uSF2,DE,003,01,0000202,2813,1422,136,113,79,60,22,10,13,41,141,160,136,118,109,96,82,15,23,15,16,18,9,10,0,1391,112,99,94,54,19,12,10,50,149,157,133,114,106,101,70,11,26,6,11,20,12,13,12
uSF2,DE,003,01,0000203,5759,2781,214,214,241,158,56,37,23,144,261,255,247,238,235,200,118,19,25,13,25,33,14,7,4,2978,234,238,217,122,94,36,53,188,274,255,255,284,260,198,102,15,29,10,29,39,23,12,11
uSF2,DE,003,01,0000204,1177,613,68,70,51,11,11,5,8,14,61,78,78,51,25,32,16,1,6,4,8,5,3,3,4,564,56,68,38,20,6,4,0,20,64,81,75,29,33,21,8,3,5,6,7,5,6,6,3
uSF2,DE,003,01,0000205,391,198,9,16,17,14,9,4,0,1,9,9,13,18,30,14,13,5,3,3,4,4,1,1,1,193,6,16,18,14,5,5,2,5,3,10,14,28,30,10,9,2,5,3,2,2,3,1,0
uSF2,DE,003,01,0000206,12649,6388,639,603,533,271,116,66,53,207,465,609,674,658,452,381,246,60,82,46,68,89,44,13,13,6261,561,570,449,240,124,71,65,211,486,652,703,636,468,363,212,43,90,45,61,97,53,36,25
uSF2,DE,003,01,0000207,2856,1423,181,167,118,47,18,7,6,28,102,189,170,137,86,75,41,15,13,9,6,3,2,3,0,1433,159,175,108,57,15,8,14,27,112,199,186,130,92,59,37,4,18,3,9,5,10,3,3
uSF2,DE,003,01,0000208,4174,2125,171,194,222,108,38,21,17,32,93,149,214,253,193,144,96,19,39,19,32,39,21,6,5,2049,152,180,175,87,45,15,12,39,119,176,234,237,177,132,82,15,31,19,31,43,20,14,14
uSF2,DE,003,01,0000209,3876,1950,202,169,129,73,38,23,17,117,186,187,208,180,113,112,75,16,18,16,14,33,14,3,7,1926,187,149,115,67,45,37,32,112,165,210,206,171,133,115,55,13,21,17,14,29,16,14,3
uSF2,DE,003,01,0000210,1743,890,85,73,64,43,22,15,13,30,84,84,82,88,60,50,34,10,12,2,16,14,7,1,1,853,63,66,51,29,19,11,7,33,90,67,77,98,66,57,38,11,20,6,7,20,7,5,5
uSF2,DE,003,01,0000211,49855,24584,1488,1592,1571,922,648,733,931,1764,1911,1749,1821,1904,1625,1576,1197,377,497,330,468,638,488,239,115,25271,1392,1467,1387,860,622,867,1227,1589,1693,1638,1877,1828,1718,1720,1264,372,543,381,546,827,686,446,321
uSF2,DE,003,01,0000212,11637,5760,398,449,457,269,169,81,75,226,451,445,531,498,368,369,262,80,110,60,115,151,126,48,22,5877,385,404,365,240,121,75,66,240,434,440,522,513,395,445,279,76,126,92,134,201,177,97,50
uSF2,DE,003,01,0000213,3698,1828,121,167,147,87,54,30,23,52,148,128,169,149,102,112,90,24,39,31,39,51,44,16,5,1870,115,137,118,66,36,24,21,76,145,123,175,161,117,140,100,21,45,32,57,65,59,20,17
uSF2,DE,003,01,0000214,3295,1667,99,116,127,79,51,20,29,63,136,107,149,159,127,92,66,21,39,17,40,49,49,22,10,1628,100,115,92,76,28,24,23,66,89,126,104,147,117,120,72,29,38,32,36,84,65,34,11
uSF2,DE,003,01,0000215,4644,2265,178,166,183,103,64,31,23,111,167,210,213,190,139,165,106,35,32,12,36,51,33,10,7,2379,170,152,155,98,57,27,22,98,200,191,243,205,161,185,107,26,43,28,41,52,53,43,22
uSF2,DE,003,01,0000216,19147,9297,374,448,464,280,264,503,723,1139,727,591,491,560,574,546,414,141,180,112,165,232,212,108,49,9850,350,383,424,247,298,669,1028,920,605,513,509,531,586,585,449,134,202,143,209,343,309,240,173
uSF2,DE,003,01,0000217,1701,835,69,59,43,29,23,16,25,78,63,70,73,63,70,67,42,11,5,9,5,3,8,3,1,866,53,57,52,30,31,30,32,85,68,83,58,58,80,59,40,7,9,7,5,7,8,4,3
uSF2,DE,003,01,0000218,546,280,18,16,12,10,7,2,6,11,19,26,19,24,25,24,9,6,7,11,3,9,9,6,1,266,14,8,17,7,8,2,1,5,16,25,22,22,27,19,11,5,4,5,9,14,12,9,4
uSF2,DE,003,01,0000219,2523,1265,42,88,103,68,42,36,40,55,29,61,69,99,118,132,81,23,34,18,23,40,42,17,5,1258,38,76,92,67,16,24,42,50,29,59,82,102,125,117,73,27,25,22,38,56,40,35,23
uSF2,DE,003,01,0000220,2767,1377,45,32,60,38,41,61,133,200,124,68,64,77,70,87,72,21,37,14,28,35,39,21,10,1390,38,49,55,31,36,57,143,192,107,51,56,58,69,95,82,20,35,29,30,48,57,24,28
uSF2,DE,003,01,0000221,2941,1480,49,53,68,36,44,77,115,226,149,89,66,72,76,61,58,25,22,18,35,53,49,32,7,1461,60,57,62,32,50,86,133,141,100,67,70,76,74,74,73,22,29,26,40,59,60,52,18
uSF2,DE,003,01,0000222,2972,1460,88,118,100,57,30,20,12,80,143,135,103,133,108,90,78,31,31,17,28,35,17,5,1,1512,80,89,93,50,30,14,16,77,141,120,125,134,117,122,90,33,38,21,36,39,28,10,9
uSF2,DE,003,01,0000223,1650,684,6,10,6,6,21,89,145,182,65,35,17,16,21,9,8,4,3,5,7,10,9,4,6,966,6,1,6,3,33,151,294,174,43,15,15,10,15,14,1,2,11,2,8,38,42,46,36
uSF2,DE,003,01,0000224,2371,1132,20,22,19,9,48,195,239,285,73,46,26,20,32,27,15,1,16,4,7,7,15,5,1,1239,16,9,12,4,78,300,359,171,42,37,24,17,24,27,18,2,13,5,10,23,20,11,17
uSF2,DE,003,01,0000225,413,214,12,21,12,7,1,1,3,4,17,29,17,16,13,12,17,4,5,2,1,10,5,5,0,199,11,8,14,6,3,2,2,5,18,19,14,10,13,17,17,3,13,1,5,11,4,3,0
uSF2,DE,003,01,0000226,312,122,3,10,11,6,4,1,1,5,11,6,7,5,11,7,5,2,0,0,3,2,3,7,12,190,7,5,11,3,3,2,3,5,6,4,14,8,7,9,3,1,3,5,7,12,18,28,26
uSF2,DE,003,01,0000227,951,448,22,19,30,14,3,5,4,13,34,26,30,35,30,30,29,13,20,14,25,28,16,3,5,503,27,24,10,14,10,1,3,15,35,33,29,36,35,32,41,12,22,20,21,36,20,18,9
uSF2,DE,003,01,0000228,5207,2619,180,197,177,100,41,29,23,128,242,238,229,247,184,167,156,43,55,41,44,57,25,10,6,2588,147,169,160,92,34,33,30,151,240,208,251,221,209,198,150,50,52,30,45,54,33,19,12
uSF2,DE,003,01,0000229,5207,2619,180,197,177,100,41,29,23,128,242,238,229,247,184,167,156,43,55,41,44,57,25,10,6,2588,147,169,160,92,34,33,30,151,240,208,251,221,209,198,150,50,52,30,45,54,33,19,12
uSF2,DE,003,01,0000230,13864,6908,536,498,473,273,174,120,110,271,491,475,570,599,499,494,365,113,152,117,144,198,125,73,38,6956,510,511,438,281,169,90,103,278,414,477,595,563,528,492,386,112,163,116,158,229,167,90,86
uSF2,DE,003,01,0000231,2954,1431,118,133,132,63,27,6,6,20,39,98,156,132,135,113,78,18,22,22,20,35,22,17,19,1523,117,128,123,56,27,9,12,32,49,118,159,146,136,104,60,20,32,19,30,31,32,38,45
uSF2,DE,003,01,0000232,3269,1676,145,86,93,70,43,41,42,88,198,142,110,126,95,109,66,28,33,29,35,45,30,13,9,1593,141,122,75,76,45,23,21,100,158,99,94,109,115,97,83,25,39,30,33,55,33,10,10
uSF2,DE,003,01,0000233,997,490,36,35,25,17,15,6,6,14,34,43,38,47,35,26,29,6,13,11,18,20,8,5,3,507,36,30,24,22,12,3,4,10,30,38,42,40,44,38,23,14,15,11,13,27,13,7,11
uSF2,DE,003,01,0000234,1125,586,23,36,41,21,15,7,0,14,13,9,27,49,56,71,59,26,17,17,18,33,27,4,3,539,21,27,33,21,8,2,6,9,5,12,41,38,53,67,59,14,21,15,20,38,16,5,8
uSF2,DE,003,01,0000235,232,134,1,2,0,0,11,27,24,32,19,5,5,2,2,2,0,0,1,0,1,0,0,0,0,98,2,2,1,1,16,18,22,20,7,4,1,0,1,1,1,0,0,1,0,0,0,0,0
uSF2,DE,003,01,0000236,239,116,2,5,5,5,1,0,0,1,8,11,8,15,8,6,10,1,6,1,5,4,6,8,0,123,6,5,9,2,2,3,0,5,1,7,9,13,6,10,11,3,4,2,3,5,8,5,4
uSF2,DE,003,01,0000237,1212,587,55,42,57,25,12,2,7,27,33,36,45,43,36,34,27,11,23,16,18,23,10,5,0,625,37,51,47,31,10,6,12,10,39,44,46,57,30,34,65,6,19,13,24,22,16,3,3
uSF2,DE,003,01,0000238,1681,826,84,88,75,44,24,11,9,32,45,64,95,88,58,49,22,3,6,5,7,6,5,5,1,855,93,79,75,37,24,18,12,34,44,83,103,84,58,44,17,6,3,8,6,11,7,7,2
uSF2,DE,003,01,0000239,2155,1062,72,71,45,28,26,20,16,43,102,67,86,97,74,84,74,20,31,16,22,32,17,16,3,1093,57,67,51,35,25,8,14,58,81,72,100,76,85,97,67,24,30,17,29,40,42,15,3
uSF2,DE,003,01,0000240,30132,14628,928,1030,982,609,344,182,148,464,927,1102,1276,1261,1070,818,651,231,364,239,406,655,526,272,143,15504,860,934,906,528,354,151,148,456,878,1039,1256,1317,1031,927,763,290,438,296,517,823,785,483,324
uSF2,DE,003,01,0000241,4867,2354,156,175,144,108,55,28,23,83,159,182,202,218,144,129,111,34,52,36,77,89,81,48,20,2513,176,159,147,79,51,37,43,85,138,168,190,216,143,148,125,47,75,41,92,116,121,70,46
uSF2,DE,003,01,0000242,1877,883,49,61,56,34,17,10,8,30,67,63,70,86,54,55,51,10,19,10,29,32,34,27,11,994,69,63,56,33,18,20,12,35,50,53,66,87,70,52,58,14,32,13,31,47,56,38,21
uSF2,DE,003,01,0000243,2990,1471,107,114,88,74,38,18,15,53,92,119,132,132,90,74,60,24,33,26,48,57,47,21,9,1519,107,96,91,46,33,17,31,50,88,115,124,129,73,96,67,33,43,28,61,69,65,32,25
uSF2,DE,003,01,0000244,901,452,41,30,40,15,16,9,7,12,34,38,41,41,41,32,9,6,5,6,12,7,4,6,0,449,36,24,27,11,22,5,6,16,38,43,46,43,32,20,14,2,5,10,6,11,13,11,8
uSF2,DE,003,01,0000245,543,274,26,17,22,9,10,6,5,7,26,24,27,21,23,17,4,3,4,6,7,4,4,2,0,269,24,9,12,7,15,5,6,12,30,23,22,28,18,9,6,2,3,7,5,6,6,9,5
uSF2,DE,003,01,0000246,358,178,15,13,18,6,6,3,2,5,8,14,14,20,18,15,5,3,1,0,5,3,0,4,0,180,12,15,15,4,7,0,0,4,8,20,24,15,14,11,8,0,2,3,1,5,7,2,3
uSF2,DE,003,01,0000247,24364,11822,731,825,798,486,273,145,118,369,734,882,1033,1002,885,657,531,191,307,197,317,559,441,218,123,12542,648,751,732,438,281,109,99,355,702,828,1020,1058,856,759,624,241,358,245,419,696,651,402,270
uSF2,DE,003,01,0000248,3360,1698,100,105,118,76,40,23,15,38,93,113,135,151,124,84,81,30,64,36,62,99,74,26,11,1662,81,92,91,46,43,12,14,48,83,91,152,115,118,128,99,36,75,55,55,90,79,32,27
uSF2,DE,003,01,0000249,2578,1304,91,85,93,56,27,8,11,49,84,79,110,96,96,77,67,26,37,18,39,74,42,23,16,1274,63,69,68,51,28,9,5,35,69,81,105,102,102,79,67,32,36,18,57,77,71,27,23
uSF2,DE,003,01,0000250,3644,1776,105,119,130,74,43,25,27,59,118,148,162,164,141,104,86,24,31,29,39,54,62,18,14,1868,104,111,128,82,44,19,21,52,106,124,173,165,146,107,92,36,42,34,44,71,78,53,36
uSF2,DE,003,01,0000251,1020,502,23,39,34,28,17,8,4,16,39,39,51,36,48,29,22,5,12,3,12,12,9,10,6,518,38,30,17,17,12,7,3,18,26,47,40,62,36,33,20,6,14,4,12,23,26,17,10
uSF2,DE,003,01,0000252,4627,2214,147,151,152,79,42,27,25,75,147,178,217,200,185,133,69,26,36,32,50,108,73,37,25,2413,125,165,156,72,61,27,19,71,159,184,186,215,157,125,94,44,51,36,69,121,126,86,64
uSF2,DE,003,01,0000253,2623,1263,82,97,95,52,32,6,7,26,62,101,107,114,89,67,68,14,28,9,25,48,72,38,24,1360,65,97,84,59,24,8,12,24,58,89,115,124,95,68,63,17,27,19,46,74,87,65,40
uSF2,DE,003,01,0000254,3809,1793,98,127,98,68,36,25,14,58,88,139,149,148,113,100,74,45,62,45,58,115,74,41,18,2016,88,116,99,61,43,15,13,43,101,124,142,171,116,133,129,45,71,50,97,147,119,59,34
uSF2,DE,003,01,0000255,2703,1272,85,102,78,53,36,23,15,48,103,85,102,93,89,63,64,21,37,25,32,49,35,25,9,1431,84,71,89,50,26,12,12,64,100,88,107,104,86,86,60,25,42,29,39,93,65,63,36
uSF2,DE,003,01,0000256,24961,12593,995,1151,1104,605,289,128,117,309,557,995,1332,1255,1018,829,616,236,238,136,169,233,157,72,52,12368,863,1119,1051,500,233,100,100,306,702,1024,1387,1174,929,804,618,199,218,133,178,273,211,139,107
uSF2,DE,003,01,0000257,4649,2233,218,196,170,105,50,27,33,97,173,234,195,183,137,115,84,34,40,16,21,45,39,10,11,2416,197,205,188,80,52,28,28,106,231,204,210,182,151,129,90,50,35,34,33,64,52,29,38
uSF2,DE,003,01,0000258,1376,665,55,55,40,28,19,10,12,35,59,69,51,50,50,27,23,6,11,6,10,21,20,3,5,711,50,56,57,17,14,8,8,41,52,61,60,46,45,32,28,14,8,10,18,32,18,10,26
uSF2,DE,003,01,0000259,3192,1525,159,140,125,77,29,16,21,62,109,162,139,130,87,86,60,26,26,8,10,22,19,6,6,1667,143,148,131,62,38,20,20,61,177,138,147,134,105,94,59,34,26,20,15,31,34,18,12
uSF2,DE,003,01,0000260,270,132,10,6,8,6,3,2,1,4,7,10,12,5,9,9,13,3,2,4,2,1,7,3,5,138,9,9,7,1,3,1,1,2,8,13,7,10,12,16,9,0,6,2,2,8,6,5,1
uSF2,DE,003,01,0000261,270,132,10,6,8,6,3,2,1,4,7,10,12,5,9,9,13,3,2,4,2,1,7,3,5,138,9,9,7,1,3,1,1,2,8,13,7,10,12,16,9,0,6,2,2,8,6,5,1
uSF2,DE,003,01,0000262,291,139,4,12,13,5,3,1,4,3,5,11,15,17,12,9,5,2,2,2,6,3,2,2,1,152,8,9,13,9,3,0,2,7,5,14,17,10,18,5,7,0,3,2,4,4,4,5,3
uSF2,DE,003,01,0000263,291,139,4,12,13,5,3,1,4,3,5,11,15,17,12,9,5,2,2,2,6,3,2,2,1,152,8,9,13,9,3,0,2,7,5,14,17,10,18,5,7,0,3,2,4,4,4,5,3
uSF2,DE,003,01,0000264,19751,10089,763,937,913,489,233,98,79,205,372,740,1110,1050,860,696,514,197,194,114,140,184,109,57,35,9662,649,896,843,410,175,71,69,191,458,793,1153,972,748,654,512,149,174,95,139,197,149,100,65
uSF2,DE,003,01,0000265,3786,1937,186,224,180,80,40,18,13,27,73,155,263,215,141,117,78,28,35,11,18,15,10,5,5,1849,155,196,169,69,32,8,12,29,106,188,259,182,129,98,89,20,22,13,19,21,16,10,7
uSF2,DE,003,01,0000266,4102,2072,175,202,197,86,55,24,14,42,68,160,246,224,196,136,91,32,35,11,26,28,17,4,3,2030,152,234,159,103,41,19,18,40,82,164,255,210,167,134,81,19,31,21,27,33,15,15,10
uSF2,DE,003,01,0000267,3637,1871,151,179,187,111,42,13,18,38,44,119,191,212,173,156,73,35,26,22,17,31,20,8,5,1766,105,164,170,92,36,12,8,37,58,140,215,200,150,109,84,28,26,14,20,37,38,14,9
uSF2,DE,003,01,0000268,217,112,11,9,2,3,1,1,2,3,8,8,7,6,6,6,8,0,2,4,2,8,6,6,3,105,8,4,6,1,0,3,0,1,7,6,6,10,5,8,6,4,3,2,1,12,3,5,4
uSF2,DE,003,01,0000269,2390,1216,67,106,115,69,31,10,8,21,42,85,119,121,114,84,64,33,22,20,19,32,17,12,5,1174,57,95,118,51,19,11,12,23,54,85,117,118,95,88,64,21,27,11,24,31,24,17,12
uSF2,DE,003,01,0000270,2184,1087,67,92,89,46,18,13,5,26,66,101,119,95,91,67,75,20,29,18,13,16,10,10,1,1097,87,93,96,38,18,4,12,29,75,104,133,85,66,80,69,27,17,9,19,13,7,8,8
uSF2,DE,003,01,0000271,2124,1107,60,78,94,62,31,11,9,29,45,62,89,124,80,79,78,32,26,14,29,41,19,9,6,1017,54,65,76,32,16,8,4,16,50,64,96,114,89,87,71,20,29,15,18,36,33,18,6
uSF2,DE,003,01,0000272,1311,687,46,47,49,32,15,8,10,19,26,50,76,53,59,51,47,17,19,14,16,13,10,3,7,624,31,45,49,24,13,6,3,16,26,42,72,53,47,50,48,10,19,10,11,14,13,13,9
uSF2,DE,003,01,0000273,52500,25756,1794,1993,1889,1041,630,345,293,1059,2088,2272,2379,2171,1789,1551,1180,395,488,346,470,646,490,316,131,26744,1807,1859,1761,1006,577,320,321,1115,2106,2180,2388,2162,1929,1694,1327,436,610,349,548,844,743,435,227
uSF2,DE,003,01,0000274,9302,4590,422,485,395,201,131,61,49,160,321,430,465,391,301,246,185,53,57,41,57,76,39,18,6,4712,420,397,383,218,114,59,58,154,367,467,483,388,341,272,187,58,79,25,60,80,56,30,16
uSF2,DE,003,01,0000275,3911,1939,195,220,177,96,54,24,20,92,165,197,200,160,100,77,55,20,22,10,16,22,12,3,2,1972,193,188,157,105,53,34,32,73,178,202,203,154,121,96,67,22,29,4,16,18,18,5,4
uSF2,DE,003,01,0000276,3494,1689,136,163,147,61,43,24,22,47,97,118,160,162,135,109,80,26,26,27,33,42,20,9,2,1805,119,133,143,82,44,17,19,68,107,153,174,157,142,117,91,32,41,16,37,51,33,20,9
uSF2,DE,003,01,0000277,1897,962,91,102,71,44,34,13,7,21,59,115,105,69,66,60,50,7,9,4,8,12,7,6,2,935,108,76,83,31,17,8,7,13,82,112,106,77,78,59,29,4,9,5,7,11,5,5,3
uSF2,DE,003,01,0000278,3803,1796,96,86,114,67,34,22,16,63,135,106,144,150,154,154,113,32,53,34,46,76,51,33,17,2007,103,92,115,67,43,21,16,74,113,118,163,130,167,161,146,61,53,41,66,80,84,60,33
uSF2,DE,003,01,0000281,1670,764,29,36,52,20,14,9,8,22,44,39,61,59,66,74,62,20,25,13,21,35,27,20,8,906,38,40,58,25,22,8,2,24,43,45,70,58,79,78,82,32,20,24,27,38,44,25,24
uSF2,DE,003,01,0000282,2014,975,60,46,58,44,20,13,8,38,80,62,76,87,88,77,50,12,27,20,24,39,24,13,9,1039,57,45,56,42,20,12,14,49,59,67,88,64,87,82,60,28,30,16,38,42,39,35,9
uSF2,DE,003,01,0000283,6677,3341,184,220,241,153,82,54,31,134,235,253,262,280,232,208,178,55,66,64,78,117,107,80,27,3336,215,208,213,114,63,35,46,107,200,211,254,265,239,202,187,53,112,58,94,170,161,90,39
uSF2,DE,003,01,0000284,3077,1498,78,102,111,66,33,20,14,42,74,104,113,109,95,96,96,29,38,40,42,78,61,47,10,1579,83,99,94,48,21,20,17,50,72,98,105,115,121,112,100,34,55,34,51,99,78,47,26
uSF2,DE,003,01,0000285,3600,1843,106,118,130,87,49,34,17,92,161,149,149,171,137,112,82,26,28,24,36,39,46,33,17,1757,132,109,119,66,42,15,29,57,128,113,149,150,118,90,87,19,57,24,43,71,83,43,13
uSF2,DE,003,01,0000286,32718,16029,1092,1202,1139,620,383,208,197,702,1397,1483,1508,1350,1102,943,704,255,312,207,289,377,293,185,81,16689,1069,1162,1050,607,357,205,201,780,1426,1384,1488,1379,1182,1059,807,264,366,225,328,514,442,255,139
uSF2,DE,003,01,0000287,5827,2821,257,242,189,99,59,36,32,156,338,352,296,233,174,156,72,19,25,7,17,27,21,9,5,3006,214,212,188,95,58,52,43,186,393,335,302,252,233,156,83,25,36,14,24,37,32,28,8
uSF2,DE,003,01,0000288,332,173,8,18,11,10,7,6,5,8,8,7,17,14,21,20,3,1,2,0,1,1,3,1,1,159,8,15,21,7,8,3,3,3,2,11,18,19,15,9,7,2,1,1,1,1,3,1,0
uSF2,DE,003,01,0000289,3399,1660,96,112,116,56,38,13,16,78,162,167,167,141,122,108,100,18,24,19,30,29,20,20,8,1739,110,112,103,59,30,16,19,109,156,161,160,135,125,151,91,20,31,19,20,44,36,21,11
uSF2,DE,003,01,0000290,4740,2219,153,144,154,75,39,24,24,107,273,261,213,185,137,106,82,34,43,28,37,47,31,16,6,2521,200,173,123,69,46,32,29,161,268,226,209,195,158,128,120,36,64,46,31,67,68,41,31
uSF2,DE,003,01,0000291,4124,2074,123,142,145,94,58,30,31,86,130,173,190,195,127,107,129,65,45,33,47,59,36,23,6,2050,125,153,127,81,58,24,21,77,135,143,179,153,132,144,157,46,57,28,46,68,62,27,7
uSF2,DE,003,01,0000292,493,231,18,15,20,12,4,6,3,6,11,16,24,21,12,13,7,3,7,6,6,6,4,6,5,262,15,23,15,15,9,0,0,7,10,25,22,21,19,12,12,5,7,5,9,9,7,9,6
uSF2,DE,003,01,0000293,220,98,9,9,6,3,1,0,2,4,6,4,6,5,7,6,9,1,1,0,3,6,6,2,2,122,3,8,18,5,2,1,2,2,7,5,10,10,3,8,4,1,4,2,4,7,8,5,3
uSF2,DE,003,01,0000294,1061,530,21,37,43,27,11,16,5,19,28,42,56,45,39,30,23,7,16,8,9,15,17,9,7,531,25,34,36,26,15,7,5,15,40,34,54,46,34,27,28,12,10,2,12,20,23,13,13
uSF2,DE,003,01,0000295,1013,491,21,31,48,15,10,7,7,16,28,35,35,35,29,25,26,14,17,21,19,18,15,15,4,522,22,27,33,17,10,8,7,15,23,34,38,36,30,44,28,13,15,15,18,36,31,15,7
uSF2,DE,003,01,0000296,1906,955,55,88,97,46,28,9,15,40,57,56,90,77,71,39,33,17,21,11,19,23,32,17,14,951,52,75,63,40,26,15,7,37,50,73,78,91,65,52,42,15,21,17,22,44,41,16,9
uSF2,DE,003,01,0000297,2442,1186,55,101,88,56,27,16,21,35,79,74,92,97,87,68,47,17,23,20,44,69,41,19,10,1256,64,73,84,53,20,7,14,24,76,77,101,106,98,68,52,20,45,27,65,83,52,29,18
uSF2,DE,003,01,0000298,1455,722,45,50,35,20,33,10,5,32,52,50,61,44,46,54,47,21,28,21,20,16,19,10,3,733,42,46,50,30,15,7,7,27,43,41,54,47,54,67,57,30,22,13,25,30,14,8,4
uSF2,DE,003,01,0000299,128,59,3,5,5,3,1,0,0,2,3,3,1,9,10,6,3,0,2,0,0,1,1,1,0,69,3,8,4,4,2,0,2,2,3,3,9,10,8,4,1,1,0,1,0,1,1,2,0
uSF2,DE,003,01,0000300,2495,1264,132,103,83,46,22,15,6,44,114,137,139,108,91,88,41,11,19,11,10,21,10,10,3,1231,106,104,77,52,20,11,13,49,127,124,139,112,81,77,45,13,11,11,17,19,9,7,7
uSF2,DE,003,01,0000301,3083,1546,96,105,99,58,45,20,25,69,108,106,121,141,129,117,82,27,39,22,27,39,37,27,7,1537,80,99,108,54,38,22,29,66,93,92,115,146,127,112,80,25,42,24,34,48,55,33,15
uSF2,DE,003,01,0000302,26446,12974,795,978,1029,684,262,98,67,216,356,588,949,1229,1216,1192,960,282,331,218,318,441,319,264,182,13472,816,985,1008,593,213,70,80,221,349,699,1055,1317,1237,1191,910,275,315,191,317,460,423,379,368
uSF2,DE,003,01,0000303,2148,980,36,36,44,30,7,4,4,22,55,66,61,76,58,76,77,36,44,31,30,59,48,41,39,1168,51,45,49,31,9,4,4,34,76,63,68,63,79,85,81,39,46,18,41,50,67,67,98
uSF2,DE,003,01,0000304,1181,508,16,13,20,12,4,3,4,18,50,46,38,47,26,38,30,16,9,4,8,20,26,26,34,673,25,23,26,14,5,3,4,32,71,41,37,39,35,36,26,16,11,6,16,19,46,50,92
uSF2,DE,003,01,0000305,967,472,20,23,24,18,3,1,0,4,5,20,23,29,32,38,47,20,35,27,22,39,22,15,5,495,26,22,23,17,4,1,0,2,5,22,31,24,44,49,55,23,35,12,25,31,21,17,6
uSF2,DE,003,01,0000306,10311,5116,289,398,423,296,120,39,31,84,129,210,355,472,499,473,366,97,114,84,138,182,135,107,75,5195,287,368,400,232,75,20,38,84,107,245,398,516,518,460,341,102,124,73,137,181,186,173,130
uSF2,DE,003,01,0000307,3656,1768,88,111,120,87,35,12,8,16,32,54,81,150,170,146,130,35,45,34,67,104,93,82,68,1888,81,110,119,71,17,2,12,22,28,62,106,169,163,157,121,36,53,39,73,111,137,114,85
uSF2,DE,003,01,0000308,6655,3348,201,287,303,209,85,27,23,68,97,156,274,322,329,327,236,62,69,50,71,78,42,25,7,3307,206,258,281,161,58,18,26,62,79,183,292,347,355,303,220,66,71,34,64,70,49,59,45
uSF2,DE,003,01,0000309,7480,3735,278,341,350,216,80,31,20,69,75,155,312,421,377,388,262,79,78,34,45,63,29,24,8,3745,270,369,343,200,69,24,22,45,72,208,365,455,374,354,251,56,55,34,45,64,33,22,15
uSF2,DE,003,01,0000310,7480,3735,278,341,350,216,80,31,20,69,75,155,312,421,377,388,262,79,78,34,45,63,29,24,8,3745,270,369,343,200,69,24,22,45,72,208,365,455,374,354,251,56,55,34,45,64,33,22,15
uSF2,DE,003,01,0000311,6507,3143,192,203,212,142,55,24,12,41,97,157,221,260,282,255,255,70,95,69,105,137,107,92,60,3364,208,203,216,130,60,22,16,58,94,183,224,283,266,292,237,78,90,66,94,165,137,117,125
uSF2,DE,003,01,0000312,2647,1254,71,77,86,45,15,10,3,11,32,59,84,112,121,103,102,36,42,30,38,53,45,42,37,1393,81,81,89,53,20,6,8,29,39,67,77,114,101,122,96,32,39,19,37,66,61,67,89
uSF2,DE,003,01,0000313,1652,806,52,42,49,36,18,2,1,8,33,35,53,48,79,68,83,18,28,13,29,39,26,30,16,846,53,49,50,31,14,2,1,7,22,49,56,67,76,82,68,28,24,20,25,40,42,21,19
uSF2,DE,003,01,0000314,2208,1083,69,84,77,61,22,12,8,22,32,63,84,100,82,84,70,16,25,26,38,45,36,20,7,1125,74,73,77,46,26,14,7,22,33,67,91,102,89,88,73,18,27,27,32,59,34,29,17
uSF2,DE,003,01,0000315,37599,18095,1165,1218,1225,741,423,174,179,554,1133,1355,1614,1592,1438,1184,965,342,418,286,477,715,516,260,121,19504,1117,1153,1254,673,396,150,174,541,1134,1460,1648,1745,1497,1317,1147,339,564,344,601,863,747,424,216
uSF2,DE,003,01,0000316,1011,501,61,67,40,22,5,2,0,6,6,35,68,62,42,30,22,9,6,3,4,6,3,1,1,510,46,69,48,23,13,1,2,4,8,51,72,52,51,22,21,6,3,2,5,5,3,2,1
uSF2,DE,003,01,0000317,1011,501,61,67,40,22,5,2,0,6,6,35,68,62,42,30,22,9,6,3,4,6,3,1,1,510,46,69,48,23,13,1,2,4,8,51,72,52,51,22,21,6,3,2,5,5,3,2,1
uSF2,DE,003,01,0000318,12132,5717,388,376,386,226,135,39,46,169,447,509,519,550,495,421,317,102,107,77,114,131,92,46,25,6415,387,345,425,251,115,52,46,176,478,551,575,623,541,488,395,92,157,91,142,162,162,108,53
uSF2,DE,003,01,0000319,982,474,38,28,20,28,8,3,4,5,16,28,42,34,41,36,23,18,20,16,25,22,11,5,3,508,35,25,34,17,9,5,1,10,17,34,41,44,44,30,40,10,28,15,22,26,11,7,3
uSF2,DE,003,01,0000320,5064,2330,140,122,111,56,42,10,22,102,285,251,242,193,138,156,136,42,43,34,49,65,52,27,12,2734,153,110,109,83,36,16,24,104,288,261,244,214,178,222,163,44,66,51,74,89,91,76,38
uSF2,DE,003,01,0000321,4048,1945,132,155,174,91,61,17,13,34,86,128,147,203,219,159,121,33,38,19,29,36,27,13,10,2103,114,138,203,104,44,22,15,41,85,156,175,240,220,155,146,29,43,16,40,37,53,19,8
uSF2,DE,003,01,0000322,2038,968,78,71,81,51,24,9,7,28,60,102,88,120,97,70,37,9,6,8,11,8,2,1,0,1070,85,72,79,47,26,9,6,21,88,100,115,125,99,81,46,9,20,9,6,10,7,6,4
uSF2,DE,003,01,0000323,24456,11877,716,775,799,493,283,133,133,379,680,811,1027,980,901,733,626,231,305,206,359,578,421,213,95,12579,684,739,781,399,268,97,126,361,648,858,1001,1070,905,807,731,241,404,251,454,696,582,314,162
uSF2,DE,003,01,0000324,1849,908,64,57,53,36,22,14,10,32,60,65,69,74,68,45,53,14,16,9,40,58,29,17,3,941,43,55,69,29,18,8,9,21,52,73,68,87,57,55,55,17,33,18,32,59,47,24,12
uSF2,DE,003,01,0000325,2224,1121,69,74,82,49,29,10,15,39,70,95,93,82,80,62,53,24,18,26,39,52,28,20,12,1103,63,60,61,34,26,10,12,40,75,82,92,102,69,65,63,20,28,23,46,43,50,22,17
uSF2,DE,003,01,0000326,2343,1143,71,85,67,53,32,13,10,29,71,71,106,101,92,74,53,19,22,13,29,52,50,20,10,1200,73,79,90,46,31,10,12,34,70,70,94,108,77,72,57,21,24,18,35,68,55,41,15
uSF2,DE,003,01,0000327,1810,849,42,42,47,30,18,11,11,19,41,52,63,64,70,61,37,18,27,25,25,61,52,25,8,961,46,47,53,23,26,8,4,15,34,66,62,68,79,65,59,20,35,21,41,77,63,36,13
uSF2,DE,003,01,0000328,2623,1274,67,80,89,62,29,18,16,37,52,58,126,110,99,84,76,25,29,24,37,60,58,24,14,1349,79,77,89,53,34,15,17,42,36,71,112,122,98,79,83,20,32,31,58,92,65,28,16
uSF2,DE,003,01,0000329,2837,1376,78,125,105,62,36,15,12,43,70,96,122,118,123,80,62,24,27,20,35,69,39,11,4,1461,69,112,110,48,34,13,9,45,79,105,124,139,128,89,72,19,43,21,50,68,46,24,14
uSF2,DE,003,01,0000330,1697,849,69,54,63,30,27,14,15,45,48,61,76,78,69,40,30,13,14,5,26,44,19,6,3,848,66,43,53,28,15,9,14,30,53,57,84,69,51,48,39,11,21,23,36,47,30,9,12
uSF2,DE,003,01,0000331,6086,2868,155,147,186,106,58,29,30,98,207,245,260,227,191,182,161,61,87,54,87,106,100,63,28,3218,162,178,161,75,59,15,28,100,202,241,249,250,217,222,199,71,135,68,103,166,173,97,47
uSF2,DE,003,01,0000332,2987,1489,101,111,107,65,32,9,14,37,61,68,112,126,109,105,101,33,65,30,41,76,46,27,13,1498,83,88,95,63,25,9,21,34,47,93,116,125,129,112,104,42,53,28,53,76,53,33,16
uSF2,DE,003,01,0000333,4521,2325,192,185,184,91,56,37,26,80,152,202,220,198,158,168,125,31,50,35,39,42,31,11,12,2196,133,151,173,70,58,14,23,71,162,198,194,195,172,153,125,40,52,27,40,57,38,23,27
uSF2,DE,003,01,0000334,1279,652,45,44,54,27,17,9,5,20,48,42,52,47,58,48,38,11,16,19,19,18,7,3,5,627,23,40,55,30,13,6,8,17,44,38,37,60,56,42,41,16,26,10,15,22,10,8,10
uSF2,DE,003,01,0000335,1279,652,45,44,54,27,17,9,5,20,48,42,52,47,58,48,38,11,16,19,19,18,7,3,5,627,23,40,55,30,13,6,8,17,44,38,37,60,56,42,41,16,26,10,15,22,10,8,10
uSF2,DE,003,01,0000336,3242,1673,147,141,130,64,39,28,21,60,104,160,168,151,100,120,87,20,34,16,20,24,24,8,7,1569,110,111,118,40,45,8,15,54,118,160,157,135,116,111,84,24,26,17,25,35,28,15,17
uSF2,DE,003,01,0000337,2608,1338,111,110,113,51,28,26,18,51,72,121,136,124,84,99,75,14,27,11,17,18,18,8,6,1270,87,92,97,37,42,8,14,49,78,127,120,113,94,95,68,21,20,15,20,28,19,13,13
uSF2,DE,003,01,0000338,634,335,36,31,17,13,11,2,3,9,32,39,32,27,16,21,12,6,7,5,3,6,6,0,1,299,23,19,21,3,3,0,1,5,40,33,37,22,22,16,16,3,6,2,5,7,9,2,4
uSF2,DE,003,01,0000339,18191,8988,663,675,673,375,237,121,116,437,871,835,820,773,662,549,351,136,163,91,135,142,95,45,23,9203,612,663,582,348,256,152,147,496,842,797,876,797,650,571,444,138,152,114,130,153,132,85,66
uSF2,DE,003,01,0000340,18191,8988,663,675,673,375,237,121,116,437,871,835,820,773,662,549,351,136,163,91,135,142,95,45,23,9203,612,663,582,348,256,152,147,496,842,797,876,797,650,571,444,138,152,114,130,153,132,85,66
uSF2,DE,003,01,0000341,4330,2125,103,141,139,81,57,28,24,103,189,175,190,197,153,139,115,51,48,29,41,53,40,15,14,2205,120,130,147,77,60,40,35,103,150,153,209,186,146,161,147,48,62,33,35,43,53,35,32
uSF2,DE,003,01,0000342,2541,1271,77,88,100,63,35,22,22,63,110,97,105,76,121,91,65,22,38,10,24,24,11,5,2,1270,58,86,85,65,51,25,15,71,98,79,97,103,100,90,88,21,21,17,35,30,15,10,10
uSF2,DE,003,01,0000343,7634,3799,352,333,327,176,102,37,39,154,369,369,373,368,287,223,110,37,34,22,26,26,24,7,4,3835,299,329,255,149,86,54,47,197,401,401,411,360,284,220,124,31,29,19,32,41,31,22,13
uSF2,DE,003,01,0000344,3686,1793,131,113,107,55,43,34,31,117,203,194,152,132,101,96,61,26,43,30,44,39,20,18,3,1893,135,118,95,57,59,33,50,125,193,164,159,148,120,100,85,38,40,45,28,39,33,18,11
uSF2,DE,003,01,0000345,24846,11731,644,572,569,378,190,104,109,485,1318,1140,977,945,850,794,632,177,236,165,229,388,339,293,197,13115,581,517,516,336,215,92,110,582,1312,1092,909,882,904,886,683,220,281,191,329,634,728,618,497
uSF2,DE,003,01,0000346,24846,11731,644,572,569,378,190,104,109,485,1318,1140,977,945,850,794,632,177,236,165,229,388,339,293,197,13115,581,517,516,336,215,92,110,582,1312,1092,909,882,904,886,683,220,281,191,329,634,728,618,497
uSF2,DE,003,01,0000347,138,56,4,5,1,0,1,2,1,4,7,5,4,2,1,6,4,3,2,3,0,0,0,1,0,82,7,2,0,2,16,4,2,5,5,10,3,5,1,5,8,1,2,0,0,0,3,0,1
uSF2,DE,003,01,0000348,1256,601,33,33,36,17,12,5,6,18,34,42,35,59,56,61,41,7,11,8,7,22,22,18,18,655,29,29,25,20,15,4,3,14,41,45,41,50,55,63,44,11,13,5,8,34,38,41,27
uSF2,DE,003,01,0000349,666,305,17,22,21,14,4,2,1,12,23,21,21,26,34,22,19,4,5,5,6,7,10,5,4,361,15,19,20,13,5,2,2,10,26,32,22,36,32,28,21,5,7,3,9,11,16,13,14
uSF2,DE,003,01,0000350,1444,666,40,22,35,25,12,3,9,14,77,67,53,56,54,49,40,13,20,8,10,23,16,14,6,778,47,27,37,24,10,3,5,34,85,64,57,60,69,58,47,9,17,10,18,36,28,22,11
uSF2,DE,003,01,0000351,384,178,5,7,16,2,2,2,0,4,15,21,19,18,13,20,10,1,2,1,4,7,5,3,1,206,12,10,5,7,4,4,2,8,23,13,24,15,15,13,12,2,5,3,3,8,8,7,3
uSF2,DE,003,01,0000352,127,56,4,8,2,0,2,1,0,0,1,5,4,9,0,3,4,2,0,0,1,6,0,4,0,71,7,5,3,0,1,0,1,3,6,6,5,3,3,1,6,0,1,1,2,3,5,4,5
uSF2,DE,003,01,0000353,281,132,2,4,0,2,1,0,2,5,11,12,8,14,17,6,10,2,3,6,6,12,6,2,1,149,3,3,6,1,1,0,1,3,8,9,10,15,13,15,10,5,3,5,10,11,9,3,5
uSF2,DE,003,01,0000355,26,15,0,1,0,1,1,0,0,2,1,1,0,2,2,1,0,0,1,0,1,0,0,1,0,11,0,0,0,0,0,0,0,0,1,0,0,1,4,2,0,0,0,0,1,1,0,1,0
uSF2,DE,003,01,0000356,94,47,3,2,7,1,1,2,2,6,5,3,4,3,1,1,0,1,0,0,1,2,1,1,0,47,1,2,4,4,1,0,3,4,5,4,4,5,1,3,2,1,0,0,0,0,1,1,1
uSF2,DE,003,01,0000357,381,188,9,3,1,1,1,1,0,8,28,34,24,17,15,17,13,3,2,2,2,4,1,2,0,193,6,4,8,0,5,0,0,8,31,31,12,14,16,20,17,3,2,1,4,5,3,2,1
uSF2,DE,003,01,0000358,2791,1268,16,8,16,10,3,4,7,95,294,174,118,80,72,76,71,20,20,13,19,43,35,45,29,1523,14,12,14,8,3,1,10,134,278,157,73,58,77,82,75,24,26,31,47,116,116,83,84
uSF2,DE,003,01,0000359,1378,638,17,15,13,14,4,0,3,41,158,104,59,44,47,30,25,5,13,3,9,11,12,6,5,740,21,23,19,12,8,7,8,48,158,97,54,52,48,36,27,9,18,5,13,20,22,24,11
uSF2,DE,003,01,0000360,3431,1566,92,65,85,54,23,4,4,30,75,135,124,113,112,152,131,39,53,37,40,72,65,44,17,1865,86,66,77,47,17,6,4,30,104,144,139,123,120,205,134,50,64,36,67,107,111,81,47
uSF2,DE,003,01,0000361,1243,564,37,16,22,12,13,2,7,18,60,54,48,39,42,35,20,11,9,7,22,34,23,12,21,679,29,17,20,12,7,4,1,24,65,47,39,43,45,41,31,8,13,16,29,49,55,42,42
uSF2,DE,003,01,0000362,1008,464,14,15,11,8,2,3,2,28,69,49,41,35,30,34,20,6,7,3,14,9,17,20,27,544,13,13,16,11,8,2,11,36,62,37,31,20,40,17,20,11,8,8,7,16,44,46,67
uSF2,DE,003,01,0000363,445,244,18,13,8,7,3,4,3,15,39,32,23,14,14,13,13,4,4,2,3,6,3,0,3,201,11,13,3,2,3,2,5,18,37,24,10,10,15,12,13,1,2,0,3,10,3,3,1
uSF2,DE,003,01,0000364,145,82,2,4,2,5,2,0,0,3,2,4,5,10,6,9,7,1,2,2,1,9,3,2,1,63,0,2,3,4,1,1,0,1,2,4,3,6,5,7,4,2,1,4,1,1,5,1,5
uSF2,DE,003,01,0000365,106,59,9,10,9,5,2,0,1,1,3,4,3,2,4,2,1,1,1,0,0,0,1,0,0,47,4,6,4,2,1,0,1,2,8,4,4,3,0,3,1,0,0,0,0,0,2,0,2
uSF2,DE,003,01,0000367,254,117,9,8,4,2,1,1,3,5,7,11,7,11,12,9,4,1,4,3,3,7,3,2,0,137,9,7,6,4,3,1,1,3,11,8,4,8,11,8,7,0,5,2,6,8,10,7,8
uSF2,DE,003,01,0000368,588,322,31,18,31,19,15,7,5,13,31,24,24,32,16,15,14,2,7,2,5,1,3,3,4,266,19,22,15,21,8,9,5,17,19,22,10,23,17,16,13,1,4,2,2,8,5,5,3
uSF2,DE,003,01,0000369,908,451,39,40,34,36,14,9,11,26,30,29,35,35,22,25,23,5,8,7,5,5,5,5,3,457,39,32,34,21,17,5,7,27,37,23,28,34,31,26,17,6,9,6,8,15,13,11,11
uSF2,DE,003,01,0000370,2635,1256,83,71,69,55,15,16,20,47,151,131,112,99,91,75,47,16,17,16,24,30,25,25,21,1379,67,52,53,34,24,14,16,57,124,124,126,96,105,82,64,22,25,15,26,54,80,65,54
uSF2,DE,003,01,0000371,2037,935,56,61,53,37,18,14,8,31,72,65,68,84,73,55,48,8,21,20,15,31,39,41,17,1102,49,54,60,43,22,12,9,46,87,76,70,68,78,64,47,15,39,14,24,58,59,63,45
uSF2,DE,003,01,0000372,1824,896,55,67,52,31,20,12,11,37,66,60,77,93,61,47,50,16,12,6,17,33,35,22,16,928,47,55,48,23,18,7,9,23,57,60,71,76,65,53,40,16,12,9,25,45,73,67,29
uSF2,DE,003,01,0000373,1192,599,47,51,37,19,13,8,3,21,56,53,60,47,53,31,16,6,12,11,14,14,9,15,3,593,39,37,33,21,16,3,3,25,30,49,65,52,37,25,23,18,5,15,16,17,19,25,20
uSF2,DE,003,01,0000374,138,56,4,5,1,0,1,2,1,4,7,5,4,2,1,6,4,3,2,3,0,0,0,1,0,82,7,2,0,2,16,4,2,5,5,10,3,5,1,5,8,1,2,0,0,0,3,0,1
uSF2,DE,003,01,0000375,1256,601,33,33,36,17,12,5,6,18,34,42,35,59,56,61,41,7,11,8,7,22,22,18,18,655,29,29,25,20,15,4,3,14,41,45,41,50,55,63,44,11,13,5,8,34,38,41,27
uSF2,DE,003,01,0000376,666,305,17,22,21,14,4,2,1,12,23,21,21,26,34,22,19,4,5,5,6,7,10,5,4,361,15,19,20,13,5,2,2,10,26,32,22,36,32,28,21,5,7,3,9,11,16,13,14
uSF2,DE,003,01,0000377,1444,666,40,22,35,25,12,3,9,14,77,67,53,56,54,49,40,13,20,8,10,23,16,14,6,778,47,27,37,24,10,3,5,34,85,64,57,60,69,58,47,9,17,10,18,36,28,22,11
uSF2,DE,003,01,0000378,384,178,5,7,16,2,2,2,0,4,15,21,19,18,13,20,10,1,2,1,4,7,5,3,1,206,12,10,5,7,4,4,2,8,23,13,24,15,15,13,12,2,5,3,3,8,8,7,3
uSF2,DE,003,01,0000379,127,56,4,8,2,0,2,1,0,0,1,5,4,9,0,3,4,2,0,0,1,6,0,4,0,71,7,5,3,0,1,0,1,3,6,6,5,3,3,1,6,0,1,1,2,3,5,4,5
uSF2,DE,003,01,0000380,281,132,2,4,0,2,1,0,2,5,11,12,8,14,17,6,10,2,3,6,6,12,6,2,1,149,3,3,6,1,1,0,1,3,8,9,10,15,13,15,10,5,3,5,10,11,9,3,5
uSF2,DE,003,01,0000382,26,15,0,1,0,1,1,0,0,2,1,1,0,2,2,1,0,0,1,0,1,0,0,1,0,11,0,0,0,0,0,0,0,0,1,0,0,1,4,2,0,0,0,0,1,1,0,1,0
uSF2,DE,003,01,0000383,94,47,3,2,7,1,1,2,2,6,5,3,4,3,1,1,0,1,0,0,1,2,1,1,0,47,1,2,4,4,1,0,3,4,5,4,4,5,1,3,2,1,0,0,0,0,1,1,1
uSF2,DE,003,01,0000384,381,188,9,3,1,1,1,1,0,8,28,34,24,17,15,17,13,3,2,2,2,4,1,2,0,193,6,4,8,0,5,0,0,8,31,31,12,14,16,20,17,3,2,1,4,5,3,2,1
uSF2,DE,003,01,0000385,2791,1268,16,8,16,10,3,4,7,95,294,174,118,80,72,76,71,20,20,13,19,43,35,45,29,1523,14,12,14,8,3,1,10,134,278,157,73,58,77,82,75,24,26,31,47,116,116,83,84
uSF2,DE,003,01,0000386,1378,638,17,15,13,14,4,0,3,41,158,104,59,44,47,30,25,5,13,3,9,11,12,6,5,740,21,23,19,12,8,7,8,48,158,97,54,52,48,36,27,9,18,5,13,20,22,24,11
uSF2,DE,003,01,0000387,3431,1566,92,65,85,54,23,4,4,30,75,135,124,113,112,152,131,39,53,37,40,72,65,44,17,1865,86,66,77,47,17,6,4,30,104,144,139,123,120,205,134,50,64,36,67,107,111,81,47
uSF2,DE,003,01,0000388,1243,564,37,16,22,12,13,2,7,18,60,54,48,39,42,35,20,11,9,7,22,34,23,12,21,679,29,17,20,12,7,4,1,24,65,47,39,43,45,41,31,8,13,16,29,49,55,42,42
uSF2,DE,003,01,0000389,1008,464,14,15,11,8,2,3,2,28,69,49,41,35,30,34,20,6,7,3,14,9,17,20,27,544,13,13,16,11,8,2,11,36,62,37,31,20,40,17,20,11,8,8,7,16,44,46,67
uSF2,DE,003,01,0000390,445,244,18,13,8,7,3,4,3,15,39,32,23,14,14,13,13,4,4,2,3,6,3,0,3,201,11,13,3,2,3,2,5,18,37,24,10,10,15,12,13,1,2,0,3,10,3,3,1
uSF2,DE,003,01,0000391,145,82,2,4,2,5,2,0,0,3,2,4,5,10,6,9,7,1,2,2,1,9,3,2,1,63,0,2,3,4,1,1,0,1,2,4,3,6,5,7,4,2,1,4,1,1,5,1,5
uSF2,DE,003,01,0000392,106,59,9,10,9,5,2,0,1,1,3,4,3,2,4,2,1,1,1,0,0,0,1,0,0,47,4,6,4,2,1,0,1,2,8,4,4,3,0,3,1,0,0,0,0,0,2,0,2
uSF2,DE,003,01,0000394,254,117,9,8,4,2,1,1,3,5,7,11,7,11,12,9,4,1,4,3,3,7,3,2,0,137,9,7,6,4,3,1,1,3,11,8,4,8,11,8,7,0,5,2,6,8,10,7,8
uSF2,DE,003,01,0000395,588,322,31,18,31,19,15,7,5,13,31,24,24,32,16,15,14,2,7,2,5,1,3,3,4,266,19,22,15,21,8,9,5,17,19,22,10,23,17,16,13,1,4,2,2,8,5,5,3
uSF2,DE,003,01,0000396,908,451,39,40,34,36,14,9,11,26,30,29,35,35,22,25,23,5,8,7,5,5,5,5,3,457,39,32,34,21,17,5,7,27,37,23,28,34,31,26,17,6,9,6,8,15,13,11,11
uSF2,DE,003,01,0000397,2635,1256,83,71,69,55,15,16,20,47,151,131,112,99,91,75,47,16,17,16,24,30,25,25,21,1379,67,52,53,34,24,14,16,57,124,124,126,96,105,82,64,22,25,15,26,54,80,65,54
uSF2,DE,003,01,0000398,2037,935,56,61,53,37,18,14,8,31,72,65,68,84,73,55,48,8,21,20,15,31,39,41,17,1102,49,54,60,43,22,12,9,46,87,76,70,68,78,64,47,15,39,14,24,58,59,63,45
uSF2,DE,003,01,0000399,1824,896,55,67,52,31,20,12,11,37,66,60,77,93,61,47,50,16,12,6,17,33,35,22,16,928,47,55,48,23,18,7,9,23,57,60,71,76,65,53,40,16,12,9,25,45,73,67,29
uSF2,DE,003,01,0000400,1192,599,47,51,37,19,13,8,3,21,56,53,60,47,53,31,16,6,12,11,14,14,9,15,3,593,39,37,33,21,16,3,3,25,30,49,65,52,37,25,23,18,5,15,16,17,19,25,20
uSF2,DE,003,01,0000401,2533,1173,77,76,69,45,28,14,21,44,96,93,95,99,87,64,51,14,37,28,16,29,42,27,21,1360,67,79,68,38,24,18,15,38,120,100,87,80,65,77,68,22,29,29,37,65,85,66,83
uSF2,DE,003,01,0000402,2083,988,51,53,63,39,15,9,11,35,72,90,90,105,81,63,42,9,27,15,20,40,29,15,14,1095,47,58,55,32,19,10,10,41,83,74,92,82,80,77,49,18,16,18,38,55,46,37,58
uSF2,DE,003,01,0000403,1759,856,51,56,54,38,14,10,5,20,33,73,75,74,64,47,45,19,24,10,25,66,36,16,1,903,50,55,54,39,28,6,6,32,35,80,57,81,58,38,52,24,34,16,26,56,48,19,9
uSF2,DE,003,01,0000404,2900,1369,111,106,96,63,27,15,16,41,89,107,119,130,70,76,63,25,30,21,29,62,44,20,9,1531,91,105,100,52,41,17,17,45,71,128,139,151,86,86,65,22,42,22,42,76,69,39,25
uSF2,DE,003,01,0000405,4017,1973,106,117,135,90,44,17,13,67,151,164,194,189,146,121,98,37,47,29,48,71,47,32,10,2044,110,114,130,72,35,14,12,78,148,170,162,196,129,132,114,34,54,44,37,80,80,63,36
uSF2,DE,003,01,0000406,4755,2301,140,127,159,80,30,24,13,76,167,174,237,201,202,163,108,28,53,36,44,82,80,47,30,2454,147,134,111,62,25,16,20,92,171,184,219,199,226,154,128,31,67,45,56,121,118,61,67
uSF2,DE,003,01,0000407,3112,1461,89,89,85,57,26,15,10,49,107,139,141,148,109,101,65,20,31,16,24,45,52,26,17,1651,91,97,108,50,29,13,9,57,100,135,132,143,146,111,92,30,35,31,41,59,62,50,30
uSF2,DE,003,01,0000408,3740,1757,93,132,104,52,24,12,7,39,74,95,138,162,138,153,140,34,47,31,45,84,79,49,25,1983,96,110,113,64,20,11,11,34,74,105,138,171,168,168,131,36,61,47,64,97,117,90,57
uSF2,DE,003,01,0000409,2560,1212,71,89,59,36,20,6,9,23,30,61,97,111,117,99,68,23,20,16,34,71,79,43,30,1348,84,71,69,49,24,5,5,15,35,71,119,110,126,102,60,28,34,23,57,92,77,55,37
uSF2,DE,003,01,0000410,2856,1348,71,87,85,61,18,9,9,23,47,80,109,104,109,106,82,22,35,34,48,73,73,37,26,1508,67,94,99,57,23,9,12,30,45,91,113,107,133,110,88,32,51,24,34,100,94,45,50
uSF2,DE,003,01,0000411,2544,1229,69,64,93,45,22,5,5,17,41,85,73,101,114,120,80,23,27,33,41,70,54,32,15,1315,60,74,65,39,14,4,6,11,55,89,86,123,141,102,92,35,43,26,29,78,73,32,38
uSF2,DE,003,01,0000412,1784,897,51,72,63,36,26,3,11,38,55,46,65,62,79,82,59,15,20,4,17,49,34,5,5,887,48,53,47,36,16,5,8,30,54,46,66,69,75,79,55,18,24,16,25,52,35,14,16
uSF2,DE,003,01,0000413,3208,1564,92,105,119,68,32,11,14,44,58,96,107,134,130,141,122,38,48,28,43,67,35,24,8,1644,93,99,85,61,28,8,11,33,75,94,119,141,162,145,126,39,59,39,50,61,67,31,18
uSF2,DE,003,01,0000414,3558,1766,104,106,105,57,29,11,11,94,147,149,149,145,119,106,115,50,62,28,46,71,33,19,10,1792,82,84,86,53,24,11,17,115,160,118,147,133,120,132,148,49,61,33,48,68,57,26,20
uSF2,DE,003,01,0000415,3037,1514,76,96,103,49,25,18,8,43,81,84,121,114,123,117,100,41,60,34,47,66,62,33,13,1523,60,81,87,58,20,12,7,31,58,85,127,118,129,105,134,42,51,47,51,96,69,33,22
uSF2,DE,003,01,0000416,1975,990,62,76,100,48,19,9,4,22,35,57,69,81,68,82,65,25,27,14,27,60,26,13,1,985,57,65,64,46,15,5,10,13,35,62,74,88,86,79,72,24,30,24,40,36,37,11,12
uSF2,DE,003,01,0000417,3897,1868,102,112,141,99,28,11,8,34,53,78,139,137,160,146,143,37,62,38,75,108,95,37,25,2029,91,134,123,106,24,10,6,27,59,96,118,162,177,171,154,55,63,63,69,110,108,54,49
uSF2,DE,003,01,0000418,2084,955,52,60,75,39,17,10,9,14,24,55,90,82,86,70,52,8,22,14,28,43,38,41,26,1129,53,87,61,42,18,5,3,19,27,62,86,109,88,64,61,19,34,18,27,71,51,55,69
uSF2,DE,003,01,0000419,3193,1542,78,97,112,88,26,7,8,21,31,64,93,133,141,123,80,35,46,37,44,98,90,56,34,1651,82,81,118,51,19,7,6,15,39,71,107,140,141,125,97,30,59,30,55,121,101,68,88
uSF2,DE,003,01,0000420,2778,1343,68,96,90,54,20,6,7,23,91,106,102,109,106,91,78,23,32,15,39,75,62,35,15,1435,80,74,84,40,20,8,8,27,87,115,110,122,108,87,85,30,27,35,36,88,82,47,35
uSF2,DE,003,01,0000421,2995,1399,115,72,101,51,17,7,5,32,73,125,117,109,101,108,59,31,33,19,36,64,55,41,28,1596,92,95,74,66,17,12,8,23,91,135,125,111,123,111,92,29,32,30,41,87,91,63,48
uSF2,DE,003,01,0000422,3719,1818,87,126,124,83,28,7,8,21,37,52,127,127,152,157,141,35,68,49,72,121,99,68,29,1901,75,100,108,70,28,5,4,20,35,61,106,155,158,193,143,55,69,51,84,142,117,84,38
uSF2,DE,003,01,0000423,3828,1762,87,90,106,57,19,13,7,29,82,105,122,159,147,141,132,52,51,34,46,73,71,68,71,2066,106,104,115,67,25,9,12,61,110,108,114,153,136,158,122,48,50,25,53,85,107,117,181
uSF2,DE,003,01,0000424,2619,1278,72,65,73,54,21,3,1,12,38,55,76,77,111,106,130,38,63,40,51,78,48,45,21,1341,79,71,73,48,18,3,1,9,27,71,87,91,120,131,123,51,59,32,50,71,63,38,25
uSF2,DE,003,01,0000425,3360,1698,100,105,118,76,40,23,15,38,93,113,135,151,124,84,81,30,64,36,62,99,74,26,11,1662,81,92,91,46,43,12,14,48,83,91,152,115,118,128,99,36,75,55,55,90,79,32,27
uSF2,DE,003,01,0000426,2578,1304,91,85,93,56,27,8,11,49,84,79,110,96,96,77,67,26,37,18,39,74,42,23,16,1274,63,69,68,51,28,9,5,35,69,81,105,102,102,79,67,32,36,18,57,77,71,27,23
uSF2,DE,003,01,0000427,3644,1776,105,119,130,74,43,25,27,59,118,148,162,164,141,104,86,24,31,29,39,54,62,18,14,1868,104,111,128,82,44,19,21,52,106,124,173,165,146,107,92,36,42,34,44,71,78,53,36
uSF2,DE,003,01,0000428,1877,883,49,61,56,34,17,10,8,30,67,63,70,86,54,55,51,10,19,10,29,32,34,27,11,994,69,63,56,33,18,20,12,35,50,53,66,87,70,52,58,14,32,13,31,47,56,38,21
uSF2,DE,003,01,0000429,4010,1973,130,153,122,102,55,26,19,69,131,158,183,168,138,103,82,29,45,29,60,69,56,31,15,2037,145,126,108,63,45,24,34,68,114,162,164,191,109,129,87,39,57,32,73,92,91,49,35
uSF2,DE,003,01,0000430,4627,2214,147,151,152,79,42,27,25,75,147,178,217,200,185,133,69,26,36,32,50,108,73,37,25,2413,125,165,156,72,61,27,19,71,159,184,186,215,157,125,94,44,51,36,69,121,126,86,64
uSF2,DE,003,01,0000431,2623,1263,82,97,95,52,32,6,7,26,62,101,107,114,89,67,68,14,28,9,25,48,72,38,24,1360,65,97,84,59,24,8,12,24,58,89,115,124,95,68,63,17,27,19,46,74,87,65,40
uSF2,DE,003,01,0000432,4352,2067,124,144,120,77,46,31,19,65,114,163,176,169,136,117,78,48,66,51,65,119,78,43,18,2285,112,125,111,68,58,20,19,55,131,147,164,199,134,142,135,47,74,57,102,153,125,68,39
uSF2,DE,003,01,0000433,3061,1450,100,115,96,59,42,26,17,53,111,99,116,113,107,78,69,24,38,25,37,52,35,29,9,1611,96,86,104,54,33,12,12,68,108,108,131,119,100,97,68,25,44,32,40,98,72,65,39
uSF2,DE,003,01,0000434,1849,908,64,57,53,36,22,14,10,32,60,65,69,74,68,45,53,14,16,9,40,58,29,17,3,941,43,55,69,29,18,8,9,21,52,73,68,87,57,55,55,17,33,18,32,59,47,24,12
uSF2,DE,003,01,0000435,2224,1121,69,74,82,49,29,10,15,39,70,95,93,82,80,62,53,24,18,26,39,52,28,20,12,1103,63,60,61,34,26,10,12,40,75,82,92,102,69,65,63,20,28,23,46,43,50,22,17
uSF2,DE,003,01,0000436,2343,1143,71,85,67,53,32,13,10,29,71,71,106,101,92,74,53,19,22,13,29,52,50,20,10,1200,73,79,90,46,31,10,12,34,70,70,94,108,77,72,57,21,24,18,35,68,55,41,15
uSF2,DE,003,01,0000437,1810,849,42,42,47,30,18,11,11,19,41,52,63,64,70,61,37,18,27,25,25,61,52,25,8,961,46,47,53,23,26,8,4,15,34,66,62,68,79,65,59,20,35,21,41,77,63,36,13
uSF2,DE,003,01,0000438,2623,1274,67,80,89,62,29,18,16,37,52,58,126,110,99,84,76,25,29,24,37,60,58,24,14,1349,79,77,89,53,34,15,17,42,36,71,112,122,98,79,83,20,32,31,58,92,65,28,16
uSF2,DE,003,01,0000439,5864,2851,157,195,197,148,57,24,16,38,64,117,165,250,252,230,200,51,70,60,105,149,129,102,75,3013,155,183,196,117,43,16,19,44,61,129,197,271,252,245,194,54,80,66,105,170,171,143,102
uSF2,DE,003,01,0000440,6655,3348,201,287,303,209,85,27,23,68,97,156,274,322,329,327,236,62,69,50,71,78,42,25,7,3307,206,258,281,161,58,18,26,62,79,183,292,347,355,303,220,66,71,34,64,70,49,59,45
uSF2,DE,003,01,0000441,7480,3735,278,341,350,216,80,31,20,69,75,155,312,421,377,388,262,79,78,34,45,63,29,24,8,3745,270,369,343,200,69,24,22,45,72,208,365,455,374,354,251,56,55,34,45,64,33,22,15
uSF2,DE,003,01,0000442,3819,1850,116,153,125,90,44,18,16,48,86,124,164,152,164,116,85,42,47,36,60,91,50,16,7,1969,104,137,144,65,43,18,10,55,96,139,165,183,172,119,112,29,71,36,72,94,57,31,17
uSF2,DE,003,01,0000443,5064,2330,140,122,111,56,42,10,22,102,285,251,242,193,138,156,136,42,43,34,49,65,52,27,12,2734,153,110,109,83,36,16,24,104,288,261,244,214,178,222,163,44,66,51,74,89,91,76,38
uSF2,DE,003,01,0000444,1697,849,69,54,63,30,27,14,15,45,48,61,76,78,69,40,30,13,14,5,26,44,19,6,3,848,66,43,53,28,15,9,14,30,53,57,84,69,51,48,39,11,21,23,36,47,30,9,12
uSF2,DE,003,01,0000445,6086,2868,155,147,186,106,58,29,30,98,207,245,260,227,191,182,161,61,87,54,87,106,100,63,28,3218,162,178,161,75,59,15,28,100,202,241,249,250,217,222,199,71,135,68,103,166,173,97,47
uSF2,DE,003,01,0000446,4655,2266,187,192,175,92,50,22,31,98,102,168,229,195,205,180,120,29,27,31,25,38,30,20,20,2389,170,185,175,86,58,39,44,117,117,201,217,204,216,163,100,27,41,26,35,38,40,42,48
uSF2,DE,003,01,0000447,5207,2619,180,197,177,100,41,29,23,128,242,238,229,247,184,167,156,43,55,41,44,57,25,10,6,2588,147,169,160,92,34,33,30,151,240,208,251,221,209,198,150,50,52,30,45,54,33,19,12
uSF2,DE,003,01,0000448,5059,2446,193,222,214,113,66,19,13,40,92,163,215,265,261,189,143,42,44,22,33,42,30,14,11,2613,160,207,251,127,57,23,17,45,93,207,247,292,271,177,167,35,46,18,45,42,56,21,9
uSF2,DE,003,01,0000449,5025,2457,179,182,188,116,56,18,21,65,121,170,200,246,206,175,138,42,71,38,52,84,48,28,13,2568,168,160,174,110,51,18,27,55,135,193,231,250,228,193,150,51,73,37,59,86,60,39,20
uSF2,DE,003,01,0000450,3269,1676,145,86,93,70,43,41,42,88,198,142,110,126,95,109,66,28,33,29,35,45,30,13,9,1593,141,122,75,76,45,23,21,100,158,99,94,109,115,97,83,25,39,30,33,55,33,10,10
uSF2,DE,003,01,0000451,4330,2125,103,141,139,81,57,28,24,103,189,175,190,197,153,139,115,51,48,29,41,53,40,15,14,2205,120,130,147,77,60,40,35,103,150,153,209,186,146,161,147,48,62,33,35,43,53,35,32
uSF2,DE,003,01,0000452,2541,1271,77,88,100,63,35,22,22,63,110,97,105,76,121,91,65,22,38,10,24,24,11,5,2,1270,58,86,85,65,51,25,15,71,98,79,97,103,100,90,88,21,21,17,35,30,15,10,10
uSF2,DE,003,01,0000453,7634,3799,352,333,327,176,102,37,39,154,369,369,373,368,287,223,110,37,34,22,26,26,24,7,4,3835,299,329,255,149,86,54,47,197,401,401,411,360,284,220,124,31,29,19,32,41,31,22,13
uSF2,DE,003,01,0000454,3686,1793,131,113,107,55,43,34,31,117,203,194,152,132,101,96,61,26,43,30,44,39,20,18,3,1893,135,118,95,57,59,33,50,125,193,164,159,148,120,100,85,38,40,45,28,39,33,18,11
uSF2,DE,003,01,0000455,3698,1828,121,167,147,87,54,30,23,52,148,128,169,149,102,112,90,24,39,31,39,51,44,16,5,1870,115,137,118,66,36,24,21,76,145,123,175,161,117,140,100,21,45,32,57,65,59,20,17
uSF2,DE,003,01,0000456,1543,770,54,51,37,27,22,8,12,25,53,69,57,71,60,50,38,12,20,22,21,29,17,11,4,773,50,38,41,29,20,5,5,15,46,63,64,62,71,57,34,19,19,16,22,41,25,16,15
uSF2,DE,003,01,0000457,3648,1851,65,124,144,89,57,43,40,69,42,70,96,148,174,203,140,49,51,35,41,73,69,21,8,1797,59,103,125,88,24,26,48,59,34,71,123,140,178,184,132,41,46,37,58,94,56,40,31
uSF2,DE,003,01,0000458,2767,1377,45,32,60,38,41,61,133,200,124,68,64,77,70,87,72,21,37,14,28,35,39,21,10,1390,38,49,55,31,36,57,143,192,107,51,56,58,69,95,82,20,35,29,30,48,57,24,28
uSF2,DE,003,01,0000459,3173,1614,50,55,68,36,55,104,139,258,168,94,71,74,78,63,58,25,23,18,36,53,49,32,7,1559,62,59,63,33,66,104,155,161,107,71,71,76,75,75,74,22,29,27,40,59,60,52,18
uSF2,DE,003,01,0000460,3211,1576,90,123,105,62,31,20,12,81,151,146,111,148,116,96,88,32,37,18,33,39,23,13,1,1635,86,94,102,52,32,17,16,82,142,127,134,147,123,132,101,36,42,23,39,44,36,15,13
uSF2,DE,003,01,0000461,1650,684,6,10,6,6,21,89,145,182,65,35,17,16,21,9,8,4,3,5,7,10,9,4,6,966,6,1,6,3,33,151,294,174,43,15,15,10,15,14,1,2,11,2,8,38,42,46,36
uSF2,DE,003,01,0000462,2371,1132,20,22,19,9,48,195,239,285,73,46,26,20,32,27,15,1,16,4,7,7,15,5,1,1239,16,9,12,4,78,300,359,171,42,37,24,17,24,27,18,2,13,5,10,23,20,11,17
uSF2,DE,003,01,0000463,1625,801,67,63,69,32,13,3,10,31,50,65,62,59,49,46,44,15,28,18,19,33,15,10,0,824,48,59,61,37,13,8,14,15,57,63,60,67,43,51,82,9,32,14,29,33,20,6,3
uSF2,DE,003,01,0000464,3607,1789,102,126,138,85,55,21,30,68,147,113,156,164,138,99,71,23,39,17,43,51,52,29,22,1818,107,120,103,79,31,26,26,71,95,130,118,155,124,129,75,30,41,37,43,96,83,62,37
uSF2,DE,003,01,0000465,4644,2265,178,166,183,103,64,31,23,111,167,210,213,190,139,165,106,35,32,12,36,51,33,10,7,2379,170,152,155,98,57,27,22,98,200,191,243,205,161,185,107,26,43,28,41,52,53,43,22
uSF2,DE,003,01,0000466,1681,826,84,88,75,44,24,11,9,32,45,64,95,88,58,49,22,3,6,5,7,6,5,5,1,855,93,79,75,37,24,18,12,34,44,83,103,84,58,44,17,6,3,8,6,11,7,7,2
uSF2,DE,003,01,0000467,3106,1510,94,90,75,42,29,25,20,56,136,93,116,132,104,114,103,33,51,30,47,60,33,19,8,1596,84,91,61,49,35,9,17,73,116,105,129,112,120,129,108,36,52,37,50,76,62,33,12
uSF2,DE,003,01,0000468,5669,2845,317,280,197,107,40,17,19,69,243,349,306,255,195,171,123,30,36,24,22,21,11,13,0,2824,271,274,202,111,34,20,24,77,261,356,319,244,198,160,107,15,44,9,20,25,22,16,15
uSF2,DE,003,01,0000469,9973,4922,386,408,463,267,95,58,40,176,354,404,461,493,430,348,216,39,65,32,58,72,35,13,9,5051,389,421,392,211,139,51,65,227,394,431,495,521,437,333,186,31,61,29,60,82,44,27,25
uSF2,DE,003,01,0000470,5065,2569,270,239,182,84,49,28,25,131,247,266,286,231,138,145,92,17,25,20,22,38,17,6,11,2496,243,217,153,87,51,41,33,132,229,291,282,200,166,136,64,16,27,24,21,34,22,20,7
uSF2,DE,003,01,0000471,4852,2361,207,204,166,105,58,40,27,91,236,231,227,213,170,131,94,24,34,16,29,34,15,6,3,2491,185,206,171,101,58,48,32,118,209,214,237,263,202,161,87,38,36,15,27,48,18,11,6
uSF2,DE,003,01,0000472,5827,2821,257,242,189,99,59,36,32,156,338,352,296,233,174,156,72,19,25,7,17,27,21,9,5,3006,214,212,188,95,58,52,43,186,393,335,302,252,233,156,83,25,36,14,24,37,32,28,8
uSF2,DE,003,01,0000473,4243,2112,203,238,188,106,61,30,25,100,173,204,217,174,121,97,58,21,24,10,17,23,15,4,3,2131,201,203,178,112,61,37,35,76,180,213,221,173,136,105,74,24,30,5,17,19,21,6,4
uSF2,DE,003,01,0000474,3399,1660,96,112,116,56,38,13,16,78,162,167,167,141,122,108,100,18,24,19,30,29,20,20,8,1739,110,112,103,59,30,16,19,109,156,161,160,135,125,151,91,20,31,19,20,44,36,21,11
uSF2,DE,003,01,0000475,4740,2219,153,144,154,75,39,24,24,107,273,261,213,185,137,106,82,34,43,28,37,47,31,16,6,2521,200,173,123,69,46,32,29,161,268,226,209,195,158,128,120,36,64,46,31,67,68,41,31
uSF2,DE,003,01,0000476,4124,2074,123,142,145,94,58,30,31,86,130,173,190,195,127,107,129,65,45,33,47,59,36,23,6,2050,125,153,127,81,58,24,21,77,135,143,179,153,132,144,157,46,57,28,46,68,62,27,7
uSF2,DE,003,01,0000477,3077,1498,78,102,111,66,33,20,14,42,74,104,113,109,95,96,96,29,38,40,42,78,61,47,10,1579,83,99,94,48,21,20,17,50,72,98,105,115,121,112,100,34,55,34,51,99,78,47,26
uSF2,DE,003,01,0000478,4093,2074,124,133,150,99,53,40,20,98,172,165,173,192,149,125,89,29,35,30,42,45,50,39,22,2019,147,132,134,81,51,15,29,64,138,138,171,171,137,102,99,24,64,29,52,80,90,52,19
uSF2,DE,003,01,0000479,220,98,9,9,6,3,1,0,2,4,6,4,6,5,7,6,9,1,1,0,3,6,6,2,2,122,3,8,18,5,2,1,2,2,7,5,10,10,3,8,4,1,4,2,4,7,8,5,3
uSF2,DE,003,01,0000480,1061,530,21,37,43,27,11,16,5,19,28,42,56,45,39,30,23,7,16,8,9,15,17,9,7,531,25,34,36,26,15,7,5,15,40,34,54,46,34,27,28,12,10,2,12,20,23,13,13
uSF2,DE,003,01,0000481,1013,491,21,31,48,15,10,7,7,16,28,35,35,35,29,25,26,14,17,21,19,18,15,15,4,522,22,27,33,17,10,8,7,15,23,34,38,36,30,44,28,13,15,15,18,36,31,15,7
uSF2,DE,003,01,0000482,1927,966,55,89,97,47,28,9,15,42,60,56,91,77,71,40,33,17,22,11,19,24,32,17,14,961,53,76,63,40,26,15,7,37,53,73,78,93,65,52,43,15,21,18,23,44,41,16,9
uSF2,DE,003,01,0000483,2540,1232,62,104,92,58,27,16,21,36,87,79,98,101,87,70,48,17,23,21,45,70,41,19,10,1308,71,79,85,53,21,8,14,25,84,83,106,112,99,69,55,21,48,27,65,83,53,29,18
uSF2,DE,003,01,0000484,1455,722,45,50,35,20,33,10,5,32,52,50,61,44,46,54,47,21,28,21,20,16,19,10,3,733,42,46,50,30,15,7,7,27,43,41,54,47,54,67,57,30,22,13,25,30,14,8,4
uSF2,DE,003,01,0000485,1670,764,29,36,52,20,14,9,8,22,44,39,61,59,66,74,62,20,25,13,21,35,27,20,8,906,38,40,58,25,22,8,2,24,43,45,70,58,79,78,82,32,20,24,27,38,44,25,24
uSF2,DE,003,01,0000486,2014,975,60,46,58,44,20,13,8,38,80,62,76,87,88,77,50,12,27,20,24,39,24,13,9,1039,57,45,56,42,20,12,14,49,59,67,88,64,87,82,60,28,30,16,38,42,39,35,9
uSF2,DE,003,01,0000487,3622,1748,139,168,152,64,44,24,22,49,100,121,161,171,145,115,83,26,28,27,33,43,21,10,2,1874,122,141,147,86,46,17,21,70,110,156,183,167,150,121,92,33,41,17,37,52,34,22,9
uSF2,DE,003,01,0000488,4392,2226,223,205,154,90,56,28,13,65,173,252,244,177,157,148,91,18,28,15,18,33,17,16,5,2166,214,180,160,83,37,19,20,62,209,236,245,189,159,136,74,17,20,16,24,30,14,12,10
uSF2,DE,003,01,0000489,3083,1546,96,105,99,58,45,20,25,69,108,106,121,141,129,117,82,27,39,22,27,39,37,27,7,1537,80,99,108,54,38,22,29,66,93,92,115,146,127,112,80,25,42,24,34,48,55,33,15
uSF2,DE,003,01,0000490,2608,1338,111,110,113,51,28,26,18,51,72,121,136,124,84,99,75,14,27,11,17,18,18,8,6,1270,87,92,97,37,42,8,14,49,78,127,120,113,94,95,68,21,20,15,20,28,19,13,13
uSF2,DE,003,01,0000491,1913,987,81,75,71,40,28,11,8,29,80,81,84,74,74,69,50,17,23,24,22,24,13,3,6,926,46,59,76,33,16,6,9,22,84,71,74,82,78,58,57,19,32,12,20,29,19,10,14
uSF2,DE,003,01,0000492,5162,2602,241,279,220,108,59,28,25,62,132,224,314,265,191,144,101,34,46,17,28,36,30,8,10,2560,205,252,226,86,46,16,20,70,158,249,319,228,174,130,117,34,30,23,37,53,34,20,33
uSF2,DE,003,01,0000493,4108,2075,175,202,199,86,55,24,14,42,68,160,246,225,196,136,91,32,35,11,26,28,17,4,3,2033,152,234,159,103,41,19,18,40,82,164,256,211,167,134,81,20,31,21,27,33,15,15,10
uSF2,DE,003,01,0000494,3637,1871,151,179,187,111,42,13,18,38,44,119,191,212,173,156,73,35,26,22,17,31,20,8,5,1766,105,164,170,92,36,12,8,37,58,140,215,200,150,109,84,28,26,14,20,37,38,14,9
uSF2,DE,003,01,0000495,3679,1769,180,155,135,86,33,19,24,69,124,180,158,141,102,101,81,29,30,16,14,31,32,15,14,1910,160,161,144,64,41,24,21,64,192,157,160,154,122,118,74,38,35,24,18,51,43,28,17
uSF2,DE,003,01,0000496,2756,1395,75,119,131,74,36,12,12,24,52,99,139,140,126,95,70,37,27,24,26,37,19,15,6,1361,69,105,131,61,22,11,14,34,61,104,136,129,114,96,74,22,31,17,28,36,28,23,15
uSF2,DE,003,01,0000497,2184,1087,67,92,89,46,18,13,5,26,66,101,119,95,91,67,75,20,29,18,13,16,10,10,1,1097,87,93,96,38,18,4,12,29,75,104,133,85,66,80,69,27,17,9,19,13,7,8,8
uSF2,DE,003,01,0000498,2124,1107,60,78,94,62,31,11,9,29,45,62,89,124,80,79,78,32,26,14,29,41,19,9,6,1017,54,65,76,32,16,8,4,16,50,64,96,114,89,87,71,20,29,15,18,36,33,18,6
uSF2,DE,003,01,0000499,1311,687,46,47,49,32,15,8,10,19,26,50,76,53,59,51,47,17,19,14,16,13,10,3,7,624,31,45,49,24,13,6,3,16,26,42,72,53,47,50,48,10,19,10,11,14,13,13,9
uSF2,DE,003,01,0000500,125280,61025,3264,3740,3885,2393,1198,539,500,1579,2912,3502,4434,4668,4425,4386,4060,1567,2327,1525,2492,3483,2318,1243,585,64255,3211,3504,3740,2109,1171,526,494,1542,3139,3642,4646,4761,4518,4645,4464,1822,2595,1672,2574,3782,2809,1727,1162
uSF2,DE,003,01,0000501,7183,3504,266,283,252,134,87,38,27,122,215,244,285,279,245,224,208,73,84,58,93,121,84,49,33,3679,229,275,305,166,82,41,36,130,228,245,305,258,248,233,208,65,94,62,88,155,96,68,62
uSF2,DE,003,01,0000502,835,401,37,29,21,15,8,8,2,12,24,32,26,26,21,28,30,5,9,9,15,24,12,3,5,434,29,31,24,14,10,3,3,14,31,27,30,17,22,40,20,9,13,10,15,23,14,23,12
uSF2,DE,003,01,0000503,835,401,37,29,21,15,8,8,2,12,24,32,26,26,21,28,30,5,9,9,15,24,12,3,5,434,29,31,24,14,10,3,3,14,31,27,30,17,22,40,20,9,13,10,15,23,14,23,12
uSF2,DE,003,01,0000504,632,309,31,39,29,6,5,6,3,16,22,28,22,23,13,18,14,5,5,1,3,4,9,4,3,323,26,22,31,14,7,2,7,13,29,30,18,17,17,14,9,6,4,3,6,20,16,4,8
uSF2,DE,003,01,0000505,629,308,31,39,29,6,5,6,3,16,22,28,22,23,13,17,14,5,5,1,3,4,9,4,3,321,26,22,30,14,7,2,7,13,29,30,18,16,17,14,9,6,4,3,6,20,16,4,8
uSF2,DE,003,01,0000506,5716,2794,198,215,202,113,74,24,22,94,169,184,237,230,211,178,164,63,70,48,75,93,63,42,25,2922,174,222,250,138,65,36,26,103,168,188,257,224,209,179,179,50,77,49,67,112,66,41,42
uSF2,DE,003,01,0000507,2657,1292,91,105,87,47,36,11,6,44,70,82,113,120,93,71,83,26,25,30,40,47,29,22,14,1365,83,105,118,70,30,14,10,46,78,90,122,103,93,77,85,24,35,23,29,54,34,23,19
uSF2,DE,003,01,0000508,3059,1502,107,110,115,66,38,13,16,50,99,102,124,110,118,107,81,37,45,18,35,46,34,20,11,1557,91,117,132,68,35,22,16,57,90,98,135,121,116,102,94,26,42,26,38,58,32,18,23
uSF2,DE,003,01,0000509,7323,3720,237,264,249,174,106,59,50,168,251,260,280,298,256,240,215,68,81,58,91,130,95,62,28,3603,239,238,212,138,99,40,33,123,213,238,286,277,267,232,193,78,88,69,94,165,130,84,67
uSF2,DE,003,01,0000510,2513,1275,76,88,72,55,56,24,18,72,112,99,84,95,81,64,60,20,22,16,33,40,45,26,17,1238,91,70,71,41,36,13,15,53,86,62,88,80,79,73,59,26,30,24,39,63,60,45,34
uSF2,DE,003,01,0000511,2431,1242,76,88,70,55,54,24,18,71,111,97,83,90,78,63,60,16,21,16,33,35,44,24,15,1189,89,69,71,38,34,13,14,52,86,61,84,79,74,70,55,26,29,22,37,59,55,40,32
uSF2,DE,003,01,0000512,4810,2445,161,176,177,119,50,35,32,96,139,161,196,203,175,176,155,48,59,42,58,90,50,36,11,2365,148,168,141,97,63,27,18,70,127,176,198,197,188,159,134,52,58,45,55,102,70,39,33
uSF2,DE,003,01,0000513,2379,1184,63,85,80,56,21,13,13,42,61,78,89,116,90,88,88,23,28,23,33,43,25,21,5,1195,63,82,68,51,36,15,9,32,58,72,105,99,100,80,72,30,37,25,30,51,33,20,27
uSF2,DE,003,01,0000514,2431,1261,98,91,97,63,29,22,19,54,78,83,107,87,85,88,67,25,31,19,25,47,25,15,6,1170,85,86,73,46,27,12,9,38,69,104,93,98,88,79,62,22,21,20,25,51,37,19,6
uSF2,DE,003,01,0000515,17067,8338,562,609,610,376,191,90,86,247,485,557,656,739,638,562,494,151,222,154,222,288,221,123,55,8729,564,570,597,342,222,102,77,260,535,590,709,690,622,552,519,182,230,154,234,365,281,196,136
uSF2,DE,003,01,0000516,177,83,6,6,6,1,1,0,1,2,3,6,4,10,5,11,7,0,2,0,4,3,3,2,0,94,3,6,7,2,3,2,0,3,3,4,5,7,11,9,4,1,1,0,2,6,2,6,7
uSF2,DE,003,01,0000517,177,83,6,6,6,1,1,0,1,2,3,6,4,10,5,11,7,0,2,0,4,3,3,2,0,94,3,6,7,2,3,2,0,3,3,4,5,7,11,9,4,1,1,0,2,6,2,6,7
uSF2,DE,003,01,0000518,998,446,37,37,36,14,8,6,4,13,19,29,41,25,33,26,32,9,10,8,18,13,18,8,2,552,37,32,38,23,12,6,2,14,42,37,39,33,30,29,41,5,15,10,14,27,34,20,12
uSF2,DE,003,01,0000519,988,441,37,37,36,14,8,6,4,13,18,28,40,24,33,26,32,8,10,8,18,13,18,8,2,547,37,32,38,23,12,5,2,14,41,37,38,32,30,29,40,5,15,10,14,27,34,20,12
uSF2,DE,003,01,0000520,2090,984,96,85,82,43,23,15,11,38,74,52,70,65,75,62,51,8,11,27,21,24,23,20,8,1106,91,63,64,49,32,12,13,43,77,62,73,86,65,65,66,16,23,19,31,49,46,41,20
uSF2,DE,003,01,0000521,231,89,16,8,11,3,4,2,0,2,8,3,5,2,5,7,8,0,0,0,0,1,2,2,0,142,20,7,9,3,8,1,3,10,7,4,9,11,4,7,6,0,3,4,0,9,6,8,3
uSF2,DE,003,01,0000522,1859,895,80,77,71,40,19,13,11,36,66,49,65,63,70,55,43,8,11,27,21,23,21,18,8,964,71,56,55,46,24,11,10,33,70,58,64,75,61,58,60,16,20,15,31,40,40,33,17
uSF2,DE,003,01,0000523,13802,6825,423,481,486,318,159,69,70,194,389,470,541,639,525,463,404,134,199,119,179,248,177,93,45,6977,433,469,488,268,175,82,62,200,413,487,592,564,516,449,408,160,191,125,187,283,199,129,97
uSF2,DE,003,01,0000524,3145,1579,105,110,105,79,41,18,19,43,95,98,119,156,128,113,82,31,48,28,44,51,44,14,8,1566,103,107,127,61,38,14,7,44,96,128,122,128,119,88,88,33,47,37,40,60,38,21,20
uSF2,DE,003,01,0000525,4474,2179,112,145,163,106,61,10,17,61,121,164,179,208,184,143,144,46,54,42,42,80,63,23,11,2295,142,166,169,99,56,34,27,59,133,153,217,185,159,148,138,49,53,34,63,85,62,33,31
uSF2,DE,003,01,0000526,3150,1547,106,121,108,62,27,26,14,55,96,116,118,139,106,96,83,27,50,22,44,57,37,22,15,1603,103,94,109,44,45,23,18,56,103,111,139,123,105,99,89,44,51,28,43,78,49,27,22
uSF2,DE,003,01,0000527,865,428,24,18,25,23,6,5,6,14,21,18,29,35,31,25,29,12,16,7,24,27,17,13,3,437,18,20,21,15,11,0,2,15,18,23,26,31,39,29,29,13,12,16,21,25,25,19,9
uSF2,DE,003,01,0000528,2168,1092,76,87,85,48,24,10,14,21,56,74,96,101,76,86,66,18,31,20,25,33,16,21,8,1076,67,82,62,49,25,11,8,26,63,72,88,97,94,85,64,21,28,10,20,35,25,29,15
uSF2,DE,003,01,0000529,19438,9346,378,373,464,296,117,59,47,155,322,465,610,653,749,741,707,321,470,293,503,716,521,265,121,10092,358,378,397,246,107,50,48,194,386,442,627,703,705,804,879,332,549,353,506,773,634,390,231
uSF2,DE,003,01,0000530,280,147,4,2,0,2,2,0,1,7,14,6,14,9,18,7,14,3,7,8,5,8,11,2,3,133,5,1,3,0,0,1,3,0,9,6,2,9,11,6,15,6,10,5,6,11,9,9,6
uSF2,DE,003,01,0000531,280,147,4,2,0,2,2,0,1,7,14,6,14,9,18,7,14,3,7,8,5,8,11,2,3,133,5,1,3,0,0,1,3,0,9,6,2,9,11,6,15,6,10,5,6,11,9,9,6
uSF2,DE,003,01,0000532,134,59,1,2,1,2,0,0,0,1,0,1,0,5,5,4,4,5,3,3,3,5,9,5,0,75,3,1,2,2,1,0,1,0,2,1,2,3,4,2,9,2,6,5,1,14,5,6,3
uSF2,DE,003,01,0000533,134,59,1,2,1,2,0,0,0,1,0,1,0,5,5,4,4,5,3,3,3,5,9,5,0,75,3,1,2,2,1,0,1,0,2,1,2,3,4,2,9,2,6,5,1,14,5,6,3
uSF2,DE,003,01,0000534,2339,1080,30,29,48,32,13,4,2,17,40,40,59,62,105,86,103,40,62,34,68,89,66,33,18,1259,31,36,51,37,15,3,2,14,36,48,74,73,97,104,131,59,64,55,73,103,75,54,24
uSF2,DE,003,01,0000535,2339,1080,30,29,48,32,13,4,2,17,40,40,59,62,105,86,103,40,62,34,68,89,66,33,18,1259,31,36,51,37,15,3,2,14,36,48,74,73,97,104,131,59,64,55,73,103,75,54,24
uSF2,DE,003,01,0000536,1425,687,17,12,24,8,4,3,5,12,27,31,44,42,75,65,58,18,28,20,32,57,55,28,22,738,10,6,15,12,3,2,1,22,21,34,34,34,53,70,62,20,40,22,36,69,71,61,40
uSF2,DE,003,01,0000537,1425,687,17,12,24,8,4,3,5,12,27,31,44,42,75,65,58,18,28,20,32,57,55,28,22,738,10,6,15,12,3,2,1,22,21,34,34,34,53,70,62,20,40,22,36,69,71,61,40
uSF2,DE,003,01,0000538,15260,7373,326,328,391,252,98,52,39,118,241,387,493,535,546,579,528,255,370,228,395,557,380,197,78,7887,309,334,326,195,88,44,41,158,318,353,515,584,540,622,662,245,429,266,390,576,474,260,158
uSF2,DE,003,01,0000539,2090,961,33,37,56,36,15,4,8,9,40,44,64,77,83,87,71,31,43,32,30,73,46,31,11,1129,32,43,46,38,14,5,6,26,56,37,65,91,102,82,77,30,44,34,42,88,84,56,31
uSF2,DE,003,01,0000540,4751,2257,107,110,143,85,29,24,11,31,58,122,175,142,137,146,123,51,115,72,157,203,127,67,22,2494,108,119,114,59,30,11,15,42,92,120,173,189,155,179,179,74,157,92,137,196,140,65,48
uSF2,DE,003,01,0000541,4997,2454,107,91,101,71,30,14,10,39,61,124,142,178,191,211,205,102,136,84,146,193,137,58,23,2543,99,92,86,56,24,14,7,46,95,112,167,162,171,217,268,86,146,94,145,188,150,66,52
uSF2,DE,003,01,0000542,2549,1248,68,80,74,52,21,8,9,27,58,73,84,98,98,90,83,53,49,30,41,68,48,26,10,1301,59,70,67,36,17,13,11,35,56,63,86,113,81,99,96,42,56,30,51,79,69,52,20
uSF2,DE,003,01,0000543,873,453,11,10,17,8,3,2,1,12,24,24,28,40,37,45,46,18,27,10,21,20,22,15,12,420,11,10,13,6,3,1,2,9,19,21,24,29,31,45,42,13,26,16,15,25,31,21,7
uSF2,DE,003,01,0000544,12776,6285,353,440,493,311,150,57,58,160,317,381,531,553,473,475,373,126,169,107,175,225,194,89,75,6491,345,460,467,249,120,58,61,167,353,369,526,541,483,498,345,162,180,124,178,312,225,154,114
uSF2,DE,003,01,0000545,181,83,4,5,7,4,5,0,1,1,6,4,3,9,7,2,8,1,2,2,1,3,4,0,4,98,7,9,6,3,4,0,2,2,3,5,8,6,11,8,5,0,1,1,6,3,6,2,0
uSF2,DE,003,01,0000546,181,83,4,5,7,4,5,0,1,1,6,4,3,9,7,2,8,1,2,2,1,3,4,0,4,98,7,9,6,3,4,0,2,2,3,5,8,6,11,8,5,0,1,1,6,3,6,2,0
uSF2,DE,003,01,0000547,3099,1508,95,115,118,77,34,15,12,56,80,114,120,120,112,92,73,23,32,22,35,52,51,26,34,1591,83,120,104,69,31,22,28,45,104,88,111,125,106,111,63,23,37,32,44,78,73,48,46
uSF2,DE,003,01,0000548,99,48,7,3,5,2,2,0,1,1,2,3,2,4,3,4,1,0,1,0,0,2,2,1,2,51,3,6,3,2,1,0,1,1,3,4,3,4,1,4,1,0,1,1,1,3,4,2,2
uSF2,DE,003,01,0000549,3000,1460,88,112,113,75,32,15,11,55,78,111,118,116,109,88,72,23,31,22,35,50,49,25,32,1540,80,114,101,67,30,22,27,44,101,84,108,121,105,107,62,23,36,31,43,75,69,46,44
uSF2,DE,003,01,0000550,198,93,3,1,0,1,0,1,0,1,0,2,4,10,7,10,16,7,8,7,4,4,5,1,1,105,0,1,2,0,1,0,0,0,3,5,4,6,10,6,19,6,10,7,4,7,3,8,3
uSF2,DE,003,01,0000551,198,93,3,1,0,1,0,1,0,1,0,2,4,10,7,10,16,7,8,7,4,4,5,1,1,105,0,1,2,0,1,0,0,0,3,5,4,6,10,6,19,6,10,7,4,7,3,8,3
uSF2,DE,003,01,0000552,9298,4601,251,319,368,229,111,41,45,102,231,261,404,414,347,371,276,95,127,76,135,166,134,62,36,4697,255,330,355,177,84,36,31,120,243,271,403,404,356,373,258,133,132,84,124,224,143,96,65
uSF2,DE,003,01,0000553,2888,1407,88,96,111,69,42,19,13,29,70,84,115,124,112,104,77,28,41,20,39,54,41,19,12,1481,78,96,118,52,29,11,7,46,78,72,124,137,102,122,87,37,44,20,35,78,44,35,29
uSF2,DE,003,01,0000554,2908,1444,85,106,124,76,25,11,14,30,66,86,126,139,104,118,87,27,44,26,44,41,34,20,11,1464,79,120,119,63,25,11,10,32,68,97,125,117,120,98,82,39,34,34,44,58,46,22,21
uSF2,DE,003,01,0000555,1973,995,40,63,65,48,22,5,9,21,52,44,68,84,77,94,71,27,29,17,30,51,50,18,10,978,50,51,56,35,16,3,4,20,51,52,78,75,77,109,58,38,29,17,24,57,41,27,10
uSF2,DE,003,01,0000556,1529,755,38,54,68,36,22,6,9,22,43,47,95,67,54,55,41,13,13,13,22,20,9,5,3,774,48,63,62,27,14,11,10,22,46,50,76,75,57,44,31,19,25,13,21,31,12,12,5
uSF2,DE,003,01,0000557,15783,7590,353,444,420,272,123,42,47,172,315,366,506,502,487,511,535,208,367,266,414,625,366,173,76,8193,343,382,429,232,138,61,64,162,365,431,580,553,543,584,601,283,454,257,432,583,385,203,128
uSF2,DE,003,01,0000558,1606,775,20,21,31,19,7,5,3,12,20,13,27,41,34,37,65,27,63,37,62,112,67,31,21,831,21,14,25,11,9,2,3,9,17,25,28,43,32,62,75,38,87,38,54,109,69,40,20
uSF2,DE,003,01,0000559,1606,775,20,21,31,19,7,5,3,12,20,13,27,41,34,37,65,27,63,37,62,112,67,31,21,831,21,14,25,11,9,2,3,9,17,25,28,43,32,62,75,38,87,38,54,109,69,40,20
uSF2,DE,003,01,0000560,1643,713,34,35,34,26,10,2,5,26,38,47,59,47,50,42,41,19,23,22,37,44,41,24,7,930,53,45,48,15,11,4,6,29,54,39,59,60,63,48,70,18,32,24,44,82,63,28,35
uSF2,DE,003,01,0000561,1643,713,34,35,34,26,10,2,5,26,38,47,59,47,50,42,41,19,23,22,37,44,41,24,7,930,53,45,48,15,11,4,6,29,54,39,59,60,63,48,70,18,32,24,44,82,63,28,35
uSF2,DE,003,01,0000562,12534,6102,299,388,355,227,106,35,39,134,257,306,420,414,403,432,429,162,281,207,315,469,258,118,48,6432,269,323,356,206,118,55,55,124,294,367,493,450,448,474,456,227,335,195,334,392,253,135,73
uSF2,DE,003,01,0000563,2954,1459,106,114,94,63,30,14,16,47,102,97,126,127,96,100,96,17,31,29,45,65,25,14,5,1495,91,93,101,51,38,18,19,50,89,117,151,103,130,105,92,36,43,31,38,47,22,19,11
uSF2,DE,003,01,0000564,1094,513,28,42,33,27,17,3,3,19,16,29,39,45,43,43,31,4,13,11,19,19,16,7,6,581,27,41,41,34,13,5,3,8,40,32,50,55,36,49,22,13,25,14,12,30,14,9,8
uSF2,DE,003,01,0000565,1786,889,28,70,63,46,16,6,5,13,33,42,69,80,69,60,55,17,30,27,38,53,39,18,12,897,45,52,57,32,16,7,10,12,36,53,83,88,66,49,59,24,37,20,37,49,38,18,9
uSF2,DE,003,01,0000566,6700,3241,137,162,165,91,43,12,15,55,106,138,186,162,195,229,247,124,207,140,213,332,178,79,25,3459,106,137,157,89,51,25,23,54,129,165,209,204,216,271,283,154,230,130,247,266,179,89,45
uSF2,DE,003,01,0000567,8665,4147,222,269,254,168,82,44,29,110,189,245,293,330,303,317,271,84,152,90,176,248,147,87,37,4518,251,245,266,154,76,29,28,109,238,261,330,382,317,328,281,127,158,113,180,263,190,108,84
uSF2,DE,003,01,0000568,1122,482,37,33,29,16,7,7,8,20,30,30,35,39,32,44,19,6,13,4,16,21,18,7,11,640,44,29,30,13,14,6,7,27,47,30,47,46,39,47,32,10,18,12,20,38,40,28,16
uSF2,DE,003,01,0000569,874,366,31,29,23,12,5,4,8,18,25,24,27,27,24,28,14,4,11,3,5,16,14,5,9,508,40,22,22,8,10,5,6,24,38,26,34,36,31,32,25,9,13,9,15,32,33,23,15
uSF2,DE,003,01,0000570,230,106,6,3,5,3,0,3,0,2,5,5,8,11,7,16,5,2,1,1,11,5,3,2,2,124,4,6,8,5,4,1,1,2,8,2,13,10,8,14,7,1,5,3,5,4,7,5,1
uSF2,DE,003,01,0000571,7543,3665,185,236,225,152,75,37,21,90,159,215,258,291,271,273,252,78,139,86,160,227,129,80,26,3878,207,216,236,141,62,23,21,82,191,231,283,336,278,281,249,117,140,101,160,225,150,80,68
uSF2,DE,003,01,0000572,1161,575,39,48,38,20,13,3,4,17,31,31,51,52,37,40,33,10,16,9,29,24,20,8,2,586,31,32,45,22,10,4,2,16,33,39,54,48,44,34,37,17,31,10,18,27,18,7,7
uSF2,DE,003,01,0000573,2329,1131,51,81,80,55,23,14,7,28,62,69,87,95,104,85,75,25,33,18,38,44,32,18,7,1198,61,84,85,56,22,7,6,25,56,80,87,124,87,85,74,33,26,22,41,52,40,22,23
uSF2,DE,003,01,0000574,4053,1959,95,107,107,77,39,20,10,45,66,115,120,144,130,148,144,43,90,59,93,159,77,54,17,2094,115,100,106,63,30,12,13,41,102,112,142,164,147,162,138,67,83,69,101,146,92,51,38
uSF2,DE,003,01,0000575,15571,7541,453,566,571,339,175,88,83,202,411,471,569,595,587,554,446,157,212,125,178,289,231,164,75,8030,459,479,562,312,197,74,80,210,420,520,629,644,569,576,458,175,210,132,242,364,320,249,149
uSF2,DE,003,01,0000576,684,315,26,31,25,16,6,4,3,11,22,30,25,30,20,17,11,6,12,3,3,10,3,1,0,369,22,21,36,17,18,6,5,8,21,24,37,36,24,26,18,5,8,3,7,15,1,7,4
uSF2,DE,003,01,0000577,684,315,26,31,25,16,6,4,3,11,22,30,25,30,20,17,11,6,12,3,3,10,3,1,0,369,22,21,36,17,18,6,5,8,21,24,37,36,24,26,18,5,8,3,7,15,1,7,4
uSF2,DE,003,01,0000578,3958,1812,106,126,107,74,49,21,24,71,125,110,143,105,105,141,73,35,48,38,47,84,79,64,37,2146,126,97,116,57,52,21,26,71,125,131,118,120,153,134,96,49,68,43,77,136,132,128,70
uSF2,DE,003,01,0000579,153,55,10,7,8,1,4,1,1,1,1,1,2,2,6,3,0,0,0,0,2,4,1,0,0,98,18,12,4,0,1,2,0,7,3,15,4,2,6,2,4,0,0,1,1,8,4,1,3
uSF2,DE,003,01,0000580,3805,1757,96,119,99,73,45,20,23,70,124,109,141,103,99,138,73,35,48,38,45,80,78,64,37,2048,108,85,112,57,51,19,26,64,122,116,114,118,147,132,92,49,68,42,76,128,128,127,67
uSF2,DE,003,01,0000581,10929,5414,321,409,439,249,120,63,56,120,264,331,401,460,462,396,362,116,152,84,128,195,149,99,38,5515,311,361,410,238,127,47,49,131,274,365,474,488,392,416,344,121,134,86,158,213,187,114,75
uSF2,DE,003,01,0000582,2575,1319,76,113,103,57,22,14,11,30,56,87,107,112,113,101,92,30,37,17,29,54,32,18,8,1256,68,87,76,43,26,9,12,29,58,103,120,108,85,109,91,28,27,21,38,39,40,24,15
uSF2,DE,003,01,0000583,1616,782,33,52,72,42,18,11,8,18,23,38,42,67,73,65,51,18,19,18,21,33,37,17,6,834,35,41,75,40,20,5,5,17,35,45,62,82,62,53,48,19,31,10,24,44,37,24,20
uSF2,DE,003,01,0000584,1518,726,49,53,50,32,21,11,7,14,49,54,49,55,50,71,48,12,8,10,14,29,17,12,11,792,47,46,70,42,24,8,8,25,38,56,68,52,62,63,37,7,15,13,24,37,25,16,9
uSF2,DE,003,01,0000585,5220,2587,163,191,214,118,59,27,30,58,136,152,203,226,226,159,171,56,88,39,64,79,63,52,13,2633,161,187,189,113,57,25,24,60,143,161,224,246,183,191,168,67,61,42,72,93,85,50,31
uSF2,DE,003,01,0000586,21474,10554,440,492,572,323,167,62,73,243,407,513,704,719,687,762,811,379,570,374,640,841,459,231,85,10920,423,477,505,270,130,71,67,187,401,546,654,713,764,838,980,418,632,408,620,802,548,275,191
uSF2,DE,003,01,0000587,891,421,5,9,19,11,4,1,1,7,10,15,9,32,28,28,36,10,24,17,40,58,27,22,8,470,8,18,11,8,2,2,3,7,11,16,14,32,30,33,43,18,32,25,35,55,41,14,12
uSF2,DE,003,01,0000588,891,421,5,9,19,11,4,1,1,7,10,15,9,32,28,28,36,10,24,17,40,58,27,22,8,470,8,18,11,8,2,2,3,7,11,16,14,32,30,33,43,18,32,25,35,55,41,14,12
uSF2,DE,003,01,0000589,484,225,17,12,12,13,3,1,3,13,12,20,19,14,16,20,15,4,5,6,2,11,2,5,0,259,13,11,18,11,4,3,1,7,19,17,17,19,12,31,14,3,5,3,9,13,13,12,4
uSF2,DE,003,01,0000590,484,225,17,12,12,13,3,1,3,13,12,20,19,14,16,20,15,4,5,6,2,11,2,5,0,259,13,11,18,11,4,3,1,7,19,17,17,19,12,31,14,3,5,3,9,13,13,12,4
uSF2,DE,003,01,0000591,342,161,1,2,7,2,1,0,0,0,6,3,4,6,13,13,19,5,17,7,10,22,15,6,2,181,3,3,1,2,1,4,1,2,3,4,6,6,11,16,24,10,11,5,16,24,13,12,3
uSF2,DE,003,01,0000592,342,161,1,2,7,2,1,0,0,0,6,3,4,6,13,13,19,5,17,7,10,22,15,6,2,181,3,3,1,2,1,4,1,2,3,4,6,6,11,16,24,10,11,5,16,24,13,12,3
uSF2,DE,003,01,0000593,335,163,15,13,12,4,4,3,2,4,15,11,14,8,7,14,7,1,3,2,4,14,2,4,0,172,8,10,17,4,3,3,2,4,11,13,13,15,11,6,5,3,3,2,6,14,5,10,4
uSF2,DE,003,01,0000594,335,163,15,13,12,4,4,3,2,4,15,11,14,8,7,14,7,1,3,2,4,14,2,4,0,172,8,10,17,4,3,3,2,4,11,13,13,15,11,6,5,3,3,2,6,14,5,10,4
uSF2,DE,003,01,0000595,254,127,9,4,7,2,6,1,2,2,13,9,12,8,7,10,6,5,3,2,4,7,8,0,0,127,7,8,3,5,3,1,2,2,7,9,7,11,9,8,11,3,3,3,1,11,8,2,3
uSF2,DE,003,01,0000596,244,120,8,3,7,2,6,1,2,2,12,9,10,7,7,10,6,4,3,2,4,7,8,0,0,124,7,8,3,5,3,1,2,2,7,8,6,11,9,8,11,3,3,3,1,10,8,2,3
uSF2,DE,003,01,0000597,986,474,28,21,30,12,10,4,2,14,12,24,34,28,32,21,35,13,31,19,28,33,28,11,4,512,17,23,19,8,5,1,2,9,19,22,40,31,39,26,53,18,26,23,37,44,23,14,13
uSF2,DE,003,01,0000598,986,474,28,21,30,12,10,4,2,14,12,24,34,28,32,21,35,13,31,19,28,33,28,11,4,512,17,23,19,8,5,1,2,9,19,22,40,31,39,26,53,18,26,23,37,44,23,14,13
uSF2,DE,003,01,0000599,1206,624,46,46,37,19,11,11,4,30,44,42,38,57,36,41,38,15,12,15,20,18,24,11,9,582,39,29,27,15,9,2,3,16,38,44,44,29,43,40,34,14,19,14,25,26,25,27,20
uSF2,DE,003,01,0000600,1206,624,46,46,37,19,11,11,4,30,44,42,38,57,36,41,38,15,12,15,20,18,24,11,9,582,39,29,27,15,9,2,3,16,38,44,44,29,43,40,34,14,19,14,25,26,25,27,20
uSF2,DE,003,01,0000601,491,239,2,3,3,4,2,1,0,2,5,5,11,16,14,16,30,14,23,17,20,27,13,9,2,252,3,14,10,4,1,2,1,1,3,7,8,13,20,16,30,12,22,13,25,18,12,12,5
uSF2,DE,003,01,0000602,491,239,2,3,3,4,2,1,0,2,5,5,11,16,14,16,30,14,23,17,20,27,13,9,2,252,3,14,10,4,1,2,1,1,3,7,8,13,20,16,30,12,22,13,25,18,12,12,5
uSF2,DE,003,01,0000603,16485,8120,317,382,445,256,126,40,59,171,290,384,563,550,534,599,625,312,452,289,512,651,340,163,60,8365,325,361,399,213,102,53,52,139,290,414,505,557,589,662,766,337,511,320,466,597,408,172,127
uSF2,DE,003,01,0000604,2382,1167,30,41,44,18,9,5,3,12,28,45,52,68,70,98,118,72,92,59,96,112,61,27,7,1215,31,34,49,18,6,5,7,13,22,41,55,64,84,120,147,78,81,55,87,94,72,29,23
uSF2,DE,003,01,0000605,3807,1835,68,76,103,52,27,6,12,29,55,85,126,118,112,133,144,78,112,73,128,151,91,39,17,1972,89,87,93,46,29,14,10,24,70,76,111,131,134,154,211,88,119,82,103,152,99,28,22
uSF2,DE,003,01,0000606,2200,1109,57,62,86,54,19,6,14,32,45,63,83,81,119,76,63,25,43,28,41,60,33,15,4,1091,58,63,67,39,19,8,8,23,45,72,84,89,82,77,65,23,46,22,54,59,52,16,20
uSF2,DE,003,01,0000607,1500,735,41,36,35,23,8,3,4,22,39,26,61,48,39,66,52,26,39,28,41,53,24,14,7,765,27,32,31,25,11,1,2,22,35,33,45,51,66,57,70,36,41,33,45,40,35,21,6
uSF2,DE,003,01,0000608,3677,1817,59,63,67,44,27,6,10,33,55,87,114,116,93,127,143,76,117,71,154,204,98,42,11,1860,50,58,66,23,13,11,9,23,59,89,92,101,116,157,162,73,164,99,134,187,90,50,34
uSF2,DE,003,01,0000609,732,361,19,32,38,17,7,3,1,10,16,17,30,32,28,25,23,8,5,5,9,12,13,4,7,371,22,25,27,14,5,1,3,10,15,38,33,28,25,31,19,4,11,6,7,21,14,6,6
uSF2,DE,003,01,0000610,2187,1096,43,72,72,48,29,11,15,33,52,61,97,87,73,74,82,27,44,25,43,59,20,22,7,1091,48,62,66,48,19,13,13,24,44,65,85,93,82,66,92,35,49,23,36,44,46,22,16
uSF2,DE,003,01,0000611,2987,1455,95,99,116,71,44,19,14,30,72,87,117,128,115,108,78,28,42,20,39,56,43,20,14,1532,81,102,121,54,30,11,8,47,81,76,127,141,103,126,88,37,45,21,36,81,48,37,31
uSF2,DE,003,01,0000612,5908,2904,173,218,237,151,57,26,25,85,144,197,244,255,213,206,159,50,75,48,79,91,83,45,43,3004,159,234,220,130,55,33,37,76,169,181,233,238,225,205,144,62,70,65,87,133,115,68,65
uSF2,DE,003,01,0000613,2171,1088,43,64,65,49,22,6,9,22,52,46,72,94,84,104,87,34,37,24,34,55,55,19,11,1083,50,52,58,35,17,3,4,20,54,57,82,81,87,115,77,44,39,24,28,64,44,35,13
uSF2,DE,003,01,0000614,1710,838,42,59,75,40,27,6,10,23,49,51,98,76,61,57,49,14,15,15,23,23,13,5,7,872,55,72,68,30,18,11,12,24,49,55,84,81,68,52,36,19,26,14,27,34,18,14,5
uSF2,DE,003,01,0000615,4121,2001,159,173,137,68,49,25,11,72,116,142,161,169,127,116,127,36,39,40,58,75,50,29,22,2120,138,158,172,98,47,19,20,73,138,147,170,136,132,131,114,39,52,36,50,97,64,50,39
uSF2,DE,003,01,0000616,3062,1503,107,110,115,66,38,13,16,50,99,102,124,110,118,108,81,37,45,18,35,46,34,20,11,1559,91,117,133,68,35,22,16,57,90,98,135,122,116,102,94,26,42,26,38,58,32,18,23
uSF2,DE,003,01,0000617,2728,1374,86,120,111,58,26,15,12,31,57,88,109,114,119,104,92,30,37,17,31,58,33,18,8,1354,86,99,80,43,27,11,12,36,61,118,124,110,91,111,95,28,27,22,39,47,44,25,18
uSF2,DE,003,01,0000618,5421,2539,129,171,171,115,63,31,31,88,147,147,183,170,172,203,124,53,67,56,66,113,115,81,43,2882,143,126,187,97,71,24,31,81,157,161,176,200,209,185,140,68,99,52,100,172,165,151,87
uSF2,DE,003,01,0000619,2202,1041,75,84,75,48,27,15,10,25,71,84,74,85,70,88,59,18,20,13,17,39,20,13,11,1161,69,67,106,59,42,14,13,33,59,80,105,88,86,89,55,12,23,16,31,52,26,23,13
uSF2,DE,003,01,0000620,5220,2587,163,191,214,118,59,27,30,58,136,152,203,226,226,159,171,56,88,39,64,79,63,52,13,2633,161,187,189,113,57,25,24,60,143,161,224,246,183,191,168,67,61,42,72,93,85,50,31
uSF2,DE,003,01,0000621,2461,1217,63,85,82,56,23,13,13,43,62,80,90,121,93,89,88,27,29,23,33,48,26,23,7,1244,65,83,68,54,38,15,10,33,58,73,109,100,105,83,76,30,38,27,32,55,38,25,29
uSF2,DE,003,01,0000622,4862,2503,174,179,167,118,83,46,37,125,189,180,190,177,163,151,127,41,52,35,58,82,69,39,21,2359,174,155,144,84,61,25,23,90,155,165,177,177,162,149,117,48,50,42,62,110,92,59,38
uSF2,DE,003,01,0000623,2954,1459,106,114,94,63,30,14,16,47,102,97,126,127,96,100,96,17,31,29,45,65,25,14,5,1495,91,93,101,51,38,18,19,50,89,117,151,103,130,105,92,36,43,31,38,47,22,19,11
uSF2,DE,003,01,0000624,2737,1226,62,77,67,53,27,5,8,45,54,76,98,92,93,85,72,23,36,33,56,63,57,31,13,1511,80,86,89,49,24,9,9,37,94,71,109,115,99,97,92,31,57,38,56,112,77,37,43
uSF2,DE,003,01,0000625,1786,889,28,70,63,46,16,6,5,13,33,42,69,80,69,60,55,17,30,27,38,53,39,18,12,897,45,52,57,32,16,7,10,12,36,53,83,88,66,49,59,24,37,20,37,49,38,18,9
uSF2,DE,003,01,0000626,1786,889,28,70,63,46,16,6,5,13,33,42,69,80,69,60,55,17,30,27,38,53,39,18,12,897,45,52,57,32,16,7,10,12,36,53,83,88,66,49,59,24,37,20,37,49,38,18,9
uSF2,DE,003,01,0000627,8306,4016,157,183,196,110,50,17,18,67,126,151,213,203,229,266,312,151,270,177,275,444,245,110,46,4290,127,151,182,100,60,27,26,63,146,190,237,247,248,333,358,192,317,168,301,375,248,129,65
uSF2,DE,003,01,0000628,8306,4016,157,183,196,110,50,17,18,67,126,151,213,203,229,266,312,151,270,177,275,444,245,110,46,4290,127,151,182,100,60,27,26,63,146,190,237,247,248,333,358,192,317,168,301,375,248,129,65
uSF2,DE,003,01,0000629,2035,941,70,77,61,32,18,7,12,35,56,55,78,79,61,68,47,14,27,12,34,40,34,13,11,1094,71,54,67,30,20,9,8,40,71,65,88,84,75,66,62,26,44,19,33,59,51,30,22
uSF2,DE,003,01,0000630,2559,1237,57,84,85,58,23,17,7,30,67,74,95,106,111,101,80,27,34,19,49,49,35,20,9,1322,65,90,93,61,26,8,7,27,64,82,100,134,95,99,81,34,31,25,46,56,47,27,24
uSF2,DE,003,01,0000631,1421,683,27,51,60,32,13,11,3,15,36,36,56,58,70,52,37,9,18,8,24,28,21,14,4,738,42,54,58,33,13,5,5,18,35,50,57,77,50,53,44,19,10,15,28,29,27,9,7
uSF2,DE,003,01,0000632,4071,1969,95,108,108,78,41,20,10,45,66,116,120,145,131,148,144,43,91,59,93,159,78,54,17,2102,115,101,106,63,30,12,13,42,103,114,142,164,147,163,138,67,83,69,101,148,92,51,38
uSF2,DE,003,01,0000633,4429,2041,63,66,104,68,28,8,10,26,80,84,123,139,188,173,174,71,105,66,98,162,112,64,29,2388,63,79,97,75,29,8,8,40,92,85,139,164,199,186,208,89,108,89,115,191,159,110,55
uSF2,DE,003,01,0000634,4751,2257,107,110,143,85,29,24,11,31,58,122,175,142,137,146,123,51,115,72,157,203,127,67,22,2494,108,119,114,59,30,11,15,42,92,120,173,189,155,179,179,74,157,92,137,196,140,65,48
uSF2,DE,003,01,0000635,2761,1357,63,70,104,49,18,18,5,18,33,63,98,94,91,95,76,34,65,43,93,115,67,33,12,1404,54,67,79,43,21,4,9,25,40,71,103,114,91,109,90,44,97,45,81,106,62,30,19
uSF2,DE,003,01,0000636,4997,2454,107,91,101,71,30,14,10,39,61,124,142,178,191,211,205,102,136,84,146,193,137,58,23,2543,99,92,86,56,24,14,7,46,95,112,167,162,171,217,268,86,146,94,145,188,150,66,52
uSF2,DE,003,01,0000637,4997,2454,107,91,101,71,30,14,10,39,61,124,142,178,191,211,205,102,136,84,146,193,137,58,23,2543,99,92,86,56,24,14,7,46,95,112,167,162,171,217,268,86,146,94,145,188,150,66,52
uSF2,DE,003,01,0000638,2549,1248,68,80,74,52,21,8,9,27,58,73,84,98,98,90,83,53,49,30,41,68,48,26,10,1301,59,70,67,36,17,13,11,35,56,63,86,113,81,99,96,42,56,30,51,79,69,52,20
uSF2,DE,003,01,0000639,2712,1346,33,26,42,20,9,5,7,32,65,62,86,96,135,121,122,44,65,41,61,90,97,50,37,1366,29,18,33,20,7,4,7,31,51,62,62,75,99,123,128,41,82,48,58,119,116,97,56
uSF2,DE,003,01,0000640,564,293,6,6,12,4,2,2,1,9,16,19,19,24,23,28,33,11,18,8,15,11,13,7,6,271,6,7,8,6,2,1,2,5,15,15,14,21,19,32,27,6,18,12,10,10,16,15,4
uSF2,DE,003,01,0000641,4106,1988,38,55,73,35,16,7,4,21,49,68,76,122,125,155,203,101,156,100,166,219,116,64,19,2118,45,69,71,32,10,13,12,23,39,68,83,115,145,185,244,118,146,98,163,191,138,67,43
uSF2,DE,003,01,0000642,3817,1842,69,77,103,52,27,6,12,29,56,85,128,119,112,133,144,79,112,73,128,151,91,39,17,1975,89,87,93,46,29,14,10,24,70,77,112,131,134,154,211,88,119,82,103,153,99,28,22
uSF2,DE,003,01,0000643,2200,1109,57,62,86,54,19,6,14,32,45,63,83,81,119,76,63,25,43,28,41,60,33,15,4,1091,58,63,67,39,19,8,8,23,45,72,84,89,82,77,65,23,46,22,54,59,52,16,20
uSF2,DE,003,01,0000644,2730,1329,77,60,72,37,24,8,8,38,63,59,105,83,78,97,93,43,73,49,73,93,60,25,11,1401,51,63,53,38,19,3,6,33,61,63,91,93,114,91,134,57,70,59,83,94,66,37,22
uSF2,DE,003,01,0000645,3677,1817,59,63,67,44,27,6,10,33,55,87,114,116,93,127,143,76,117,71,154,204,98,42,11,1860,50,58,66,23,13,11,9,23,59,89,92,101,116,157,162,73,164,99,134,187,90,50,34
uSF2,DE,003,01,0000646,1938,985,65,78,75,36,18,14,5,40,60,59,68,89,64,66,61,23,17,20,29,30,37,15,16,953,61,54,54,29,14,3,6,26,53,82,77,57,68,71,53,18,30,20,32,47,39,33,26
uSF2,DE,003,01,0000647,3006,1484,75,97,96,65,36,15,20,50,79,92,130,109,96,108,104,32,52,33,49,84,24,31,7,1522,69,83,101,63,26,19,16,35,74,95,115,127,105,103,111,41,57,28,51,71,64,44,24
uSF2,DE,003,01,0000648,3145,1579,105,110,105,79,41,18,19,43,95,98,119,156,128,113,82,31,48,28,44,51,44,14,8,1566,103,107,127,61,38,14,7,44,96,128,122,128,119,88,88,33,47,37,40,60,38,21,20
uSF2,DE,003,01,0000649,4484,2184,112,145,163,106,61,10,17,61,122,165,180,209,184,143,144,47,54,42,42,80,63,23,11,2300,142,166,169,99,56,35,27,59,134,153,218,186,159,148,139,49,53,34,63,85,62,33,31
uSF2,DE,003,01,0000650,3558,1719,128,135,125,66,32,28,15,59,107,125,127,151,116,114,98,27,52,22,48,61,42,26,15,1839,126,107,125,49,56,26,21,69,113,119,153,141,120,115,99,45,55,32,45,93,57,41,32
uSF2,DE,003,01,0000651,2724,1323,104,95,96,63,25,18,17,50,87,67,94,98,101,80,72,20,27,34,45,50,38,31,11,1401,89,76,76,61,35,11,12,48,88,81,90,106,100,87,89,29,32,31,52,65,65,52,26
uSF2,DE,003,01,0000652,3156,1533,113,124,121,62,32,16,18,34,74,102,136,125,109,112,98,26,41,28,43,46,34,29,10,1623,104,114,100,72,37,16,10,40,104,109,126,129,124,114,104,26,43,20,34,62,59,49,27
uSF2,DE,003,01,0000653,460,225,10,10,17,10,3,1,1,4,5,11,11,21,30,26,13,3,6,3,8,14,8,8,2,235,4,16,9,7,2,1,1,2,8,15,12,26,26,25,18,10,7,6,6,4,13,5,12
uSF2,DE,003,01,0000654,460,225,10,10,17,10,3,1,1,4,5,11,11,21,30,26,13,3,6,3,8,14,8,8,2,235,4,16,9,7,2,1,1,2,8,15,12,26,26,25,18,10,7,6,6,4,13,5,12
uSF2,DE,003,01,0000655,460,225,10,10,17,10,3,1,1,4,5,11,11,21,30,26,13,3,6,3,8,14,8,8,2,235,4,16,9,7,2,1,1,2,8,15,12,26,26,25,18,10,7,6,6,4,13,5,12
uSF2,DE,003,01,0000656,218,102,5,6,7,1,2,0,0,3,6,9,2,10,9,11,11,2,4,3,5,2,2,1,1,116,7,10,6,4,3,0,1,2,9,5,7,9,16,7,14,6,0,2,1,2,3,1,1
uSF2,DE,003,01,0000657,218,102,5,6,7,1,2,0,0,3,6,9,2,10,9,11,11,2,4,3,5,2,2,1,1,116,7,10,6,4,3,0,1,2,9,5,7,9,16,7,14,6,0,2,1,2,3,1,1
uSF2,DE,003,01,0000658,218,102,5,6,7,1,2,0,0,3,6,9,2,10,9,11,11,2,4,3,5,2,2,1,1,116,7,10,6,4,3,0,1,2,9,5,7,9,16,7,14,6,0,2,1,2,3,1,1
uSF2,DE,003,01,0000659,268,124,2,4,11,6,3,0,0,1,7,7,11,8,9,16,9,5,4,3,7,5,4,1,1,144,3,6,6,3,1,1,0,1,9,10,7,10,23,13,17,1,4,1,5,7,7,4,5
uSF2,DE,003,01,0000660,268,124,2,4,11,6,3,0,0,1,7,7,11,8,9,16,9,5,4,3,7,5,4,1,1,144,3,6,6,3,1,1,0,1,9,10,7,10,23,13,17,1,4,1,5,7,7,4,5
uSF2,DE,003,01,0000661,262,121,2,4,11,6,3,0,0,1,7,6,11,8,8,16,9,5,3,3,7,5,4,1,1,141,2,6,6,3,1,1,0,1,9,10,7,9,23,13,16,1,4,1,5,7,7,4,5
uSF2,DE,003,01,0000662,12060,5879,536,600,480,250,159,82,63,220,464,568,597,500,383,317,234,63,77,52,67,92,46,22,7,6181,539,524,485,278,148,91,81,234,484,604,635,525,447,369,229,84,91,31,78,106,65,36,17
uSF2,DE,003,01,0000663,12060,5879,536,600,480,250,159,82,63,220,464,568,597,500,383,317,234,63,77,52,67,92,46,22,7,6181,539,524,485,278,148,91,81,234,484,604,635,525,447,369,229,84,91,31,78,106,65,36,17
uSF2,DE,003,01,0000664,2718,1273,113,115,85,48,27,21,14,60,143,138,132,107,80,67,47,9,19,11,9,16,7,4,1,1445,116,124,102,58,34,32,23,80,116,137,146,137,106,94,40,25,11,6,18,26,8,5,1
uSF2,DE,003,01,0000665,3911,1939,195,220,177,96,54,24,20,92,165,197,200,160,100,77,55,20,22,10,16,22,12,3,2,1972,193,188,157,105,53,34,32,73,178,202,203,154,121,96,67,22,29,4,16,18,18,5,4
uSF2,DE,003,01,0000666,3494,1689,136,163,147,61,43,24,22,47,97,118,160,162,135,109,80,26,26,27,33,42,20,9,2,1805,119,133,143,82,44,17,19,68,107,153,174,157,142,117,91,32,41,16,37,51,33,20,9
uSF2,DE,003,01,0000667,1897,962,91,102,71,44,34,13,7,21,59,115,105,69,66,60,50,7,9,4,8,12,7,6,2,935,108,76,83,31,17,8,7,13,82,112,106,77,78,59,29,4,9,5,7,11,5,5,3
uSF2,DE,003,01,0000668,1204,577,33,42,43,23,10,7,2,11,44,47,63,54,48,32,25,5,12,8,11,17,22,11,7,627,40,36,40,20,7,6,4,15,48,45,60,60,61,32,22,2,16,5,14,25,30,20,19
uSF2,DE,003,01,0000669,1204,577,33,42,43,23,10,7,2,11,44,47,63,54,48,32,25,5,12,8,11,17,22,11,7,627,40,36,40,20,7,6,4,15,48,45,60,60,61,32,22,2,16,5,14,25,30,20,19
uSF2,DE,003,01,0000670,1204,577,33,42,43,23,10,7,2,11,44,47,63,54,48,32,25,5,12,8,11,17,22,11,7,627,40,36,40,20,7,6,4,15,48,45,60,60,61,32,22,2,16,5,14,25,30,20,19
uSF2,DE,003,01,0000671,891,421,5,9,19,11,4,1,1,7,10,15,9,32,28,28,36,10,24,17,40,58,27,22,8,470,8,18,11,8,2,2,3,7,11,16,14,32,30,33,43,18,32,25,35,55,41,14,12
uSF2,DE,003,01,0000672,891,421,5,9,19,11,4,1,1,7,10,15,9,32,28,28,36,10,24,17,40,58,27,22,8,470,8,18,11,8,2,2,3,7,11,16,14,32,30,33,43,18,32,25,35,55,41,14,12
uSF2,DE,003,01,0000673,891,421,5,9,19,11,4,1,1,7,10,15,9,32,28,28,36,10,24,17,40,58,27,22,8,470,8,18,11,8,2,2,3,7,11,16,14,32,30,33,43,18,32,25,35,55,41,14,12
uSF2,DE,003,01,0000674,177,83,6,6,6,1,1,0,1,2,3,6,4,10,5,11,7,0,2,0,4,3,3,2,0,94,3,6,7,2,3,2,0,3,3,4,5,7,11,9,4,1,1,0,2,6,2,6,7
uSF2,DE,003,01,0000675,177,83,6,6,6,1,1,0,1,2,3,6,4,10,5,11,7,0,2,0,4,3,3,2,0,94,3,6,7,2,3,2,0,3,3,4,5,7,11,9,4,1,1,0,2,6,2,6,7
uSF2,DE,003,01,0000676,177,83,6,6,6,1,1,0,1,2,3,6,4,10,5,11,7,0,2,0,4,3,3,2,0,94,3,6,7,2,3,2,0,3,3,4,5,7,11,9,4,1,1,0,2,6,2,6,7
uSF2,DE,003,01,0000677,684,315,26,31,25,16,6,4,3,11,22,30,25,30,20,17,11,6,12,3,3,10,3,1,0,369,22,21,36,17,18,6,5,8,21,24,37,36,24,26,18,5,8,3,7,15,1,7,4
uSF2,DE,003,01,0000678,684,315,26,31,25,16,6,4,3,11,22,30,25,30,20,17,11,6,12,3,3,10,3,1,0,369,22,21,36,17,18,6,5,8,21,24,37,36,24,26,18,5,8,3,7,15,1,7,4
uSF2,DE,003,01,0000679,684,315,26,31,25,16,6,4,3,11,22,30,25,30,20,17,11,6,12,3,3,10,3,1,0,369,22,21,36,17,18,6,5,8,21,24,37,36,24,26,18,5,8,3,7,15,1,7,4
uSF2,DE,003,01,0000680,279,137,5,6,14,2,1,0,3,7,8,12,11,16,9,10,7,1,4,5,6,3,4,2,1,142,6,5,8,3,1,2,1,6,7,20,7,8,5,14,8,8,5,2,5,3,6,9,3
uSF2,DE,003,01,0000681,279,137,5,6,14,2,1,0,3,7,8,12,11,16,9,10,7,1,4,5,6,3,4,2,1,142,6,5,8,3,1,2,1,6,7,20,7,8,5,14,8,8,5,2,5,3,6,9,3
uSF2,DE,003,01,0000682,279,137,5,6,14,2,1,0,3,7,8,12,11,16,9,10,7,1,4,5,6,3,4,2,1,142,6,5,8,3,1,2,1,6,7,20,7,8,5,14,8,8,5,2,5,3,6,9,3
uSF2,DE,003,01,0000683,835,401,37,29,21,15,8,8,2,12,24,32,26,26,21,28,30,5,9,9,15,24,12,3,5,434,29,31,24,14,10,3,3,14,31,27,30,17,22,40,20,9,13,10,15,23,14,23,12
uSF2,DE,003,01,0000684,835,401,37,29,21,15,8,8,2,12,24,32,26,26,21,28,30,5,9,9,15,24,12,3,5,434,29,31,24,14,10,3,3,14,31,27,30,17,22,40,20,9,13,10,15,23,14,23,12
uSF2,DE,003,01,0000685,835,401,37,29,21,15,8,8,2,12,24,32,26,26,21,28,30,5,9,9,15,24,12,3,5,434,29,31,24,14,10,3,3,14,31,27,30,17,22,40,20,9,13,10,15,23,14,23,12
uSF2,DE,003,01,0000686,11637,5760,398,449,457,269,169,81,75,226,451,445,531,498,368,369,262,80,110,60,115,151,126,48,22,5877,385,404,365,240,121,75,66,240,434,440,522,513,395,445,279,76,126,92,134,201,177,97,50
uSF2,DE,003,01,0000687,11637,5760,398,449,457,269,169,81,75,226,451,445,531,498,368,369,262,80,110,60,115,151,126,48,22,5877,385,404,365,240,121,75,66,240,434,440,522,513,395,445,279,76,126,92,134,201,177,97,50
uSF2,DE,003,01,0000688,3698,1828,121,167,147,87,54,30,23,52,148,128,169,149,102,112,90,24,39,31,39,51,44,16,5,1870,115,137,118,66,36,24,21,76,145,123,175,161,117,140,100,21,45,32,57,65,59,20,17
uSF2,DE,003,01,0000689,3295,1667,99,116,127,79,51,20,29,63,136,107,149,159,127,92,66,21,39,17,40,49,49,22,10,1628,100,115,92,76,28,24,23,66,89,126,104,147,117,120,72,29,38,32,36,84,65,34,11
uSF2,DE,003,01,0000690,4644,2265,178,166,183,103,64,31,23,111,167,210,213,190,139,165,106,35,32,12,36,51,33,10,7,2379,170,152,155,98,57,27,22,98,200,191,243,205,161,185,107,26,43,28,41,52,53,43,22
uSF2,DE,003,01,0000691,1641,784,49,62,69,46,25,7,7,24,50,49,69,76,47,51,41,13,17,12,21,25,12,8,4,857,44,41,69,40,21,9,11,43,57,55,70,79,67,60,35,17,25,20,22,27,17,14,14
uSF2,DE,003,01,0000692,1641,784,49,62,69,46,25,7,7,24,50,49,69,76,47,51,41,13,17,12,21,25,12,8,4,857,44,41,69,40,21,9,11,43,57,55,70,79,67,60,35,17,25,20,22,27,17,14,14
uSF2,DE,003,01,0000693,1641,784,49,62,69,46,25,7,7,24,50,49,69,76,47,51,41,13,17,12,21,25,12,8,4,857,44,41,69,40,21,9,11,43,57,55,70,79,67,60,35,17,25,20,22,27,17,14,14
uSF2,DE,003,01,0000694,235,124,12,11,10,8,3,2,3,6,11,8,13,7,9,1,4,1,2,2,4,2,4,1,0,111,6,6,11,9,2,1,2,1,9,13,8,13,7,6,2,1,0,2,3,4,1,2,2
uSF2,DE,003,01,0000695,235,124,12,11,10,8,3,2,3,6,11,8,13,7,9,1,4,1,2,2,4,2,4,1,0,111,6,6,11,9,2,1,2,1,9,13,8,13,7,6,2,1,0,2,3,4,1,2,2
uSF2,DE,003,01,0000696,235,124,12,11,10,8,3,2,3,6,11,8,13,7,9,1,4,1,2,2,4,2,4,1,0,111,6,6,11,9,2,1,2,1,9,13,8,13,7,6,2,1,0,2,3,4,1,2,2
uSF2,DE,003,01,0000697,6675,3196,213,227,230,135,69,31,42,97,201,254,303,313,218,192,145,50,77,50,67,126,86,42,28,3479,191,223,228,128,74,36,33,106,208,274,309,322,210,214,162,49,82,62,88,152,147,93,88
uSF2,DE,003,01,0000698,6675,3196,213,227,230,135,69,31,42,97,201,254,303,313,218,192,145,50,77,50,67,126,86,42,28,3479,191,223,228,128,74,36,33,106,208,274,309,322,210,214,162,49,82,62,88,152,147,93,88
uSF2,DE,003,01,0000699,644,329,24,30,29,13,9,4,7,14,22,24,33,25,34,15,16,2,8,6,1,4,5,2,2,315,22,28,36,16,4,7,3,9,26,27,30,32,19,14,10,5,2,6,5,5,6,3,0
uSF2,DE,003,01,0000700,1631,766,43,39,53,25,12,7,10,28,59,70,73,83,63,47,36,7,19,10,14,28,18,10,12,865,31,47,44,27,18,8,9,37,69,64,74,65,58,62,39,11,12,13,25,36,36,28,52
uSF2,DE,003,01,0000701,2900,1369,111,106,96,63,27,15,16,41,89,107,119,130,70,76,63,25,30,21,29,62,44,20,9,1531,91,105,100,52,41,17,17,45,71,128,139,151,86,86,65,22,42,22,42,76,69,39,25
uSF2,DE,003,01,0000702,1500,732,35,52,52,34,21,5,9,14,31,53,78,75,51,54,30,16,20,13,23,32,19,10,5,768,47,43,48,33,11,4,4,15,42,55,66,74,47,52,48,11,26,21,16,35,36,23,11
uSF2,DE,003,01,0000703,1157,536,45,41,64,16,14,3,9,18,26,48,48,44,41,31,11,5,6,8,6,21,14,9,8,621,30,40,49,31,12,6,6,17,40,46,54,52,44,43,25,13,12,5,12,36,11,20,17
uSF2,DE,003,01,0000704,1157,536,45,41,64,16,14,3,9,18,26,48,48,44,41,31,11,5,6,8,6,21,14,9,8,621,30,40,49,31,12,6,6,17,40,46,54,52,44,43,25,13,12,5,12,36,11,20,17
uSF2,DE,003,01,0000705,1157,536,45,41,64,16,14,3,9,18,26,48,48,44,41,31,11,5,6,8,6,21,14,9,8,621,30,40,49,31,12,6,6,17,40,46,54,52,44,43,25,13,12,5,12,36,11,20,17
uSF2,DE,003,01,0000706,484,225,17,12,12,13,3,1,3,13,12,20,19,14,16,20,15,4,5,6,2,11,2,5,0,259,13,11,18,11,4,3,1,7,19,17,17,19,12,31,14,3,5,3,9,13,13,12,4
uSF2,DE,003,01,0000707,484,225,17,12,12,13,3,1,3,13,12,20,19,14,16,20,15,4,5,6,2,11,2,5,0,259,13,11,18,11,4,3,1,7,19,17,17,19,12,31,14,3,5,3,9,13,13,12,4
uSF2,DE,003,01,0000708,484,225,17,12,12,13,3,1,3,13,12,20,19,14,16,20,15,4,5,6,2,11,2,5,0,259,13,11,18,11,4,3,1,7,19,17,17,19,12,31,14,3,5,3,9,13,13,12,4
uSF2,DE,003,01,0000709,1279,652,45,44,54,27,17,9,5,20,48,42,52,47,58,48,38,11,16,19,19,18,7,3,5,627,23,40,55,30,13,6,8,17,44,38,37,60,56,42,41,16,26,10,15,22,10,8,10
uSF2,DE,003,01,0000710,1279,652,45,44,54,27,17,9,5,20,48,42,52,47,58,48,38,11,16,19,19,18,7,3,5,627,23,40,55,30,13,6,8,17,44,38,37,60,56,42,41,16,26,10,15,22,10,8,10
uSF2,DE,003,01,0000711,1279,652,45,44,54,27,17,9,5,20,48,42,52,47,58,48,38,11,16,19,19,18,7,3,5,627,23,40,55,30,13,6,8,17,44,38,37,60,56,42,41,16,26,10,15,22,10,8,10
uSF2,DE,003,01,0000712,998,446,37,37,36,14,8,6,4,13,19,29,41,25,33,26,32,9,10,8,18,13,18,8,2,552,37,32,38,23,12,6,2,14,42,37,39,33,30,29,41,5,15,10,14,27,34,20,12
uSF2,DE,003,01,0000713,998,446,37,37,36,14,8,6,4,13,19,29,41,25,33,26,32,9,10,8,18,13,18,8,2,552,37,32,38,23,12,6,2,14,42,37,39,33,30,29,41,5,15,10,14,27,34,20,12
uSF2,DE,003,01,0000714,988,441,37,37,36,14,8,6,4,13,18,28,40,24,33,26,32,8,10,8,18,13,18,8,2,547,37,32,38,23,12,5,2,14,41,37,38,32,30,29,40,5,15,10,14,27,34,20,12
uSF2,DE,003,01,0000715,280,147,4,2,0,2,2,0,1,7,14,6,14,9,18,7,14,3,7,8,5,8,11,2,3,133,5,1,3,0,0,1,3,0,9,6,2,9,11,6,15,6,10,5,6,11,9,9,6
uSF2,DE,003,01,0000716,280,147,4,2,0,2,2,0,1,7,14,6,14,9,18,7,14,3,7,8,5,8,11,2,3,133,5,1,3,0,0,1,3,0,9,6,2,9,11,6,15,6,10,5,6,11,9,9,6
uSF2,DE,003,01,0000717,280,147,4,2,0,2,2,0,1,7,14,6,14,9,18,7,14,3,7,8,5,8,11,2,3,133,5,1,3,0,0,1,3,0,9,6,2,9,11,6,15,6,10,5,6,11,9,9,6
uSF2,DE,003,01,0000718,16905,7966,496,561,496,275,182,92,116,371,563,623,633,627,515,553,430,115,205,154,211,296,219,148,85,8939,499,485,526,294,152,92,124,369,578,602,689,656,612,595,503,153,262,158,229,410,437,276,238
uSF2,DE,003,01,0000719,16905,7966,496,561,496,275,182,92,116,371,563,623,633,627,515,553,430,115,205,154,211,296,219,148,85,8939,499,485,526,294,152,92,124,369,578,602,689,656,612,595,503,153,262,158,229,410,437,276,238
uSF2,DE,003,01,0000720,2933,1407,98,114,88,53,37,17,27,68,106,125,127,94,77,75,52,18,35,32,46,55,37,19,7,1526,97,101,86,47,34,10,32,81,128,112,136,100,93,90,70,21,53,37,41,62,52,27,16
uSF2,DE,003,01,0000721,435,222,28,13,10,2,1,1,2,11,19,33,27,14,9,21,5,1,4,3,4,5,5,3,1,213,19,13,8,7,6,1,2,15,25,25,18,9,12,9,9,3,3,5,4,6,9,3,2
uSF2,DE,003,01,0000722,2865,1321,78,106,125,58,25,8,13,31,55,70,95,110,109,129,114,23,43,15,21,42,21,15,15,1544,86,101,132,77,21,9,14,38,63,97,119,122,142,156,108,25,27,17,24,50,37,30,49
uSF2,DE,003,01,0000723,1392,640,39,31,36,19,23,15,7,34,42,32,58,53,32,40,26,12,23,17,19,22,28,18,14,752,36,34,35,22,19,9,13,30,44,48,48,46,40,40,38,16,27,15,21,40,59,41,31
uSF2,DE,003,01,0000724,1412,599,20,29,24,18,10,9,11,28,50,54,36,37,45,50,42,9,14,17,11,27,26,18,14,813,22,16,27,12,5,6,9,23,50,41,33,40,44,60,49,8,32,17,25,76,84,79,55
uSF2,DE,003,01,0000725,2114,1043,70,80,54,28,33,9,19,58,79,109,74,86,65,55,51,15,28,17,27,42,25,18,1,1071,72,72,44,31,23,23,14,49,78,85,90,95,63,52,66,18,24,23,24,42,58,13,12
uSF2,DE,003,01,0000726,61,31,1,7,3,2,0,1,0,1,2,2,6,1,3,0,0,0,0,0,0,1,1,0,0,30,2,3,5,1,0,0,1,1,4,2,1,3,2,1,1,0,0,0,1,1,1,0,0
uSF2,DE,003,01,0000727,362,168,12,9,12,7,5,4,2,13,7,11,10,18,13,12,5,1,8,7,6,3,1,1,1,194,10,8,11,7,3,5,5,12,11,14,13,16,15,8,11,7,6,7,7,4,4,8,2
uSF2,DE,003,01,0000728,1181,550,31,38,24,13,6,9,5,35,55,38,44,42,39,32,25,7,10,12,16,18,16,20,15,631,22,22,33,10,8,9,10,37,56,36,46,46,41,39,27,15,19,8,18,30,47,24,28
uSF2,DE,003,01,0000729,1139,549,37,36,25,16,14,4,10,37,46,54,47,48,30,32,19,9,6,5,21,15,20,9,9,590,31,30,24,13,9,10,9,38,48,50,42,50,38,30,25,15,12,7,25,25,20,26,13
uSF2,DE,003,01,0000730,1498,723,19,51,59,33,15,8,7,22,22,34,46,64,48,48,54,16,26,25,29,46,27,19,5,775,21,31,78,48,8,5,5,12,13,29,55,68,54,57,64,16,50,17,30,50,37,14,13
uSF2,DE,003,01,0000731,1346,631,59,44,30,22,13,6,11,27,67,57,55,53,41,51,32,4,8,3,9,18,11,8,2,715,74,51,35,18,12,5,10,24,52,60,82,50,56,49,32,8,9,4,9,23,27,8,17
uSF2,DE,003,01,0000732,167,82,4,3,6,4,0,1,2,6,13,4,8,7,4,8,5,0,0,1,2,2,1,0,1,85,7,3,8,1,4,0,0,9,6,3,6,11,12,4,3,1,0,1,0,1,2,3,0
uSF2,DE,003,01,0000733,2605,1331,255,155,111,29,18,23,35,133,195,173,119,68,11,3,3,0,0,0,0,0,0,0,0,1274,216,160,83,42,37,44,39,117,212,147,100,51,15,5,2,0,2,0,0,2,0,0,0
uSF2,DE,003,01,0000734,2605,1331,255,155,111,29,18,23,35,133,195,173,119,68,11,3,3,0,0,0,0,0,0,0,0,1274,216,160,83,42,37,44,39,117,212,147,100,51,15,5,2,0,2,0,0,2,0,0,0
uSF2,DE,003,01,0000735,2605,1331,255,155,111,29,18,23,35,133,195,173,119,68,11,3,3,0,0,0,0,0,0,0,0,1274,216,160,83,42,37,44,39,117,212,147,100,51,15,5,2,0,2,0,0,2,0,0,0
uSF2,DE,003,01,0000736,3799,1794,113,109,122,69,27,19,12,54,123,160,178,176,142,123,82,24,36,19,30,61,60,33,22,2005,119,120,130,56,33,14,10,63,113,162,178,168,177,128,111,36,41,37,47,81,76,61,44
uSF2,DE,003,01,0000737,3799,1794,113,109,122,69,27,19,12,54,123,160,178,176,142,123,82,24,36,19,30,61,60,33,22,2005,119,120,130,56,33,14,10,63,113,162,178,168,177,128,111,36,41,37,47,81,76,61,44
uSF2,DE,003,01,0000738,687,333,24,20,37,12,1,4,2,5,16,21,37,28,33,22,17,4,5,3,6,16,8,7,5,354,28,23,22,6,4,1,1,6,13,27,46,25,31,17,19,6,6,6,6,22,14,11,14
uSF2,DE,003,01,0000739,3112,1461,89,89,85,57,26,15,10,49,107,139,141,148,109,101,65,20,31,16,24,45,52,26,17,1651,91,97,108,50,29,13,9,57,100,135,132,143,146,111,92,30,35,31,41,59,62,50,30
uSF2,DE,003,01,0000740,181,83,4,5,7,4,5,0,1,1,6,4,3,9,7,2,8,1,2,2,1,3,4,0,4,98,7,9,6,3,4,0,2,2,3,5,8,6,11,8,5,0,1,1,6,3,6,2,0
uSF2,DE,003,01,0000741,181,83,4,5,7,4,5,0,1,1,6,4,3,9,7,2,8,1,2,2,1,3,4,0,4,98,7,9,6,3,4,0,2,2,3,5,8,6,11,8,5,0,1,1,6,3,6,2,0
uSF2,DE,003,01,0000742,181,83,4,5,7,4,5,0,1,1,6,4,3,9,7,2,8,1,2,2,1,3,4,0,4,98,7,9,6,3,4,0,2,2,3,5,8,6,11,8,5,0,1,1,6,3,6,2,0
uSF2,DE,003,01,0000743,4867,2354,156,175,144,108,55,28,23,83,159,182,202,218,144,129,111,34,52,36,77,89,81,48,20,2513,176,159,147,79,51,37,43,85,138,168,190,216,143,148,125,47,75,41,92,116,121,70,46
uSF2,DE,003,01,0000744,4867,2354,156,175,144,108,55,28,23,83,159,182,202,218,144,129,111,34,52,36,77,89,81,48,20,2513,176,159,147,79,51,37,43,85,138,168,190,216,143,148,125,47,75,41,92,116,121,70,46
uSF2,DE,003,01,0000745,1877,883,49,61,56,34,17,10,8,30,67,63,70,86,54,55,51,10,19,10,29,32,34,27,11,994,69,63,56,33,18,20,12,35,50,53,66,87,70,52,58,14,32,13,31,47,56,38,21
uSF2,DE,003,01,0000746,2990,1471,107,114,88,74,38,18,15,53,92,119,132,132,90,74,60,24,33,26,48,57,47,21,9,1519,107,96,91,46,33,17,31,50,88,115,124,129,73,96,67,33,43,28,61,69,65,32,25
uSF2,DE,003,01,0000747,660,308,26,23,28,14,16,1,4,9,27,22,35,21,20,13,10,6,10,2,6,4,3,5,3,352,13,30,32,19,7,3,0,14,30,33,35,36,26,18,8,8,4,3,6,10,10,2,5
uSF2,DE,003,01,0000748,660,308,26,23,28,14,16,1,4,9,27,22,35,21,20,13,10,6,10,2,6,4,3,5,3,352,13,30,32,19,7,3,0,14,30,33,35,36,26,18,8,8,4,3,6,10,10,2,5
uSF2,DE,003,01,0000749,660,308,26,23,28,14,16,1,4,9,27,22,35,21,20,13,10,6,10,2,6,4,3,5,3,352,13,30,32,19,7,3,0,14,30,33,35,36,26,18,8,8,4,3,6,10,10,2,5
uSF2,DE,003,01,0000750,342,161,1,2,7,2,1,0,0,0,6,3,4,6,13,13,19,5,17,7,10,22,15,6,2,181,3,3,1,2,1,4,1,2,3,4,6,6,11,16,24,10,11,5,16,24,13,12,3
uSF2,DE,003,01,0000751,342,161,1,2,7,2,1,0,0,0,6,3,4,6,13,13,19,5,17,7,10,22,15,6,2,181,3,3,1,2,1,4,1,2,3,4,6,6,11,16,24,10,11,5,16,24,13,12,3
uSF2,DE,003,01,0000752,342,161,1,2,7,2,1,0,0,0,6,3,4,6,13,13,19,5,17,7,10,22,15,6,2,181,3,3,1,2,1,4,1,2,3,4,6,6,11,16,24,10,11,5,16,24,13,12,3
uSF2,DE,003,01,0000753,335,163,15,13,12,4,4,3,2,4,15,11,14,8,7,14,7,1,3,2,4,14,2,4,0,172,8,10,17,4,3,3,2,4,11,13,13,15,11,6,5,3,3,2,6,14,5,10,4
uSF2,DE,003,01,0000754,335,163,15,13,12,4,4,3,2,4,15,11,14,8,7,14,7,1,3,2,4,14,2,4,0,172,8,10,17,4,3,3,2,4,11,13,13,15,11,6,5,3,3,2,6,14,5,10,4
uSF2,DE,003,01,0000755,335,163,15,13,12,4,4,3,2,4,15,11,14,8,7,14,7,1,3,2,4,14,2,4,0,172,8,10,17,4,3,3,2,4,11,13,13,15,11,6,5,3,3,2,6,14,5,10,4
uSF2,DE,003,01,0000756,467,222,17,20,23,8,3,3,4,4,10,25,23,17,13,17,7,1,4,2,1,2,9,5,4,245,17,27,21,7,7,2,5,6,18,11,29,19,16,14,5,3,5,4,2,8,12,4,3
uSF2,DE,003,01,0000757,467,222,17,20,23,8,3,3,4,4,10,25,23,17,13,17,7,1,4,2,1,2,9,5,4,245,17,27,21,7,7,2,5,6,18,11,29,19,16,14,5,3,5,4,2,8,12,4,3
uSF2,DE,003,01,0000758,467,222,17,20,23,8,3,3,4,4,10,25,23,17,13,17,7,1,4,2,1,2,9,5,4,245,17,27,21,7,7,2,5,6,18,11,29,19,16,14,5,3,5,4,2,8,12,4,3
uSF2,DE,003,01,0000759,2513,1275,76,88,72,55,56,24,18,72,112,99,84,95,81,64,60,20,22,16,33,40,45,26,17,1238,91,70,71,41,36,13,15,53,86,62,88,80,79,73,59,26,30,24,39,63,60,45,34
uSF2,DE,003,01,0000760,2513,1275,76,88,72,55,56,24,18,72,112,99,84,95,81,64,60,20,22,16,33,40,45,26,17,1238,91,70,71,41,36,13,15,53,86,62,88,80,79,73,59,26,30,24,39,63,60,45,34
uSF2,DE,003,01,0000761,2431,1242,76,88,70,55,54,24,18,71,111,97,83,90,78,63,60,16,21,16,33,35,44,24,15,1189,89,69,71,38,34,13,14,52,86,61,84,79,74,70,55,26,29,22,37,59,55,40,32
uSF2,DE,003,01,0000762,10140,5014,427,413,388,243,98,56,44,200,472,502,474,425,399,342,229,40,57,35,53,60,27,21,9,5126,408,421,367,210,124,57,65,263,490,503,477,455,429,330,189,31,65,25,49,66,44,32,26
uSF2,DE,003,01,0000763,10140,5014,427,413,388,243,98,56,44,200,472,502,474,425,399,342,229,40,57,35,53,60,27,21,9,5126,408,421,367,210,124,57,65,263,490,503,477,455,429,330,189,31,65,25,49,66,44,32,26
uSF2,DE,003,01,0000764,2813,1422,136,113,79,60,22,10,13,41,141,160,136,118,109,96,82,15,23,15,16,18,9,10,0,1391,112,99,94,54,19,12,10,50,149,157,133,114,106,101,70,11,26,6,11,20,12,13,12
uSF2,DE,003,01,0000765,5759,2781,214,214,241,158,56,37,23,144,261,255,247,238,235,200,118,19,25,13,25,33,14,7,4,2978,234,238,217,122,94,36,53,188,274,255,255,284,260,198,102,15,29,10,29,39,23,12,11
uSF2,DE,003,01,0000766,1177,613,68,70,51,11,11,5,8,14,61,78,78,51,25,32,16,1,6,4,8,5,3,3,4,564,56,68,38,20,6,4,0,20,64,81,75,29,33,21,8,3,5,6,7,5,6,6,3
uSF2,DE,003,01,0000767,391,198,9,16,17,14,9,4,0,1,9,9,13,18,30,14,13,5,3,3,4,4,1,1,1,193,6,16,18,14,5,5,2,5,3,10,14,28,30,10,9,2,5,3,2,2,3,1,0
uSF2,DE,003,01,0000768,2148,980,36,36,44,30,7,4,4,22,55,66,61,76,58,76,77,36,44,31,30,59,48,41,39,1168,51,45,49,31,9,4,4,34,76,63,68,63,79,85,81,39,46,18,41,50,67,67,98
uSF2,DE,003,01,0000769,2148,980,36,36,44,30,7,4,4,22,55,66,61,76,58,76,77,36,44,31,30,59,48,41,39,1168,51,45,49,31,9,4,4,34,76,63,68,63,79,85,81,39,46,18,41,50,67,67,98
uSF2,DE,003,01,0000770,1181,508,16,13,20,12,4,3,4,18,50,46,38,47,26,38,30,16,9,4,8,20,26,26,34,673,25,23,26,14,5,3,4,32,71,41,37,39,35,36,26,16,11,6,16,19,46,50,92
uSF2,DE,003,01,0000771,967,472,20,23,24,18,3,1,0,4,5,20,23,29,32,38,47,20,35,27,22,39,22,15,5,495,26,22,23,17,4,1,0,2,5,22,31,24,44,49,55,23,35,12,25,31,21,17,6
uSF2,DE,003,01,0000772,632,309,31,39,29,6,5,6,3,16,22,28,22,23,13,18,14,5,5,1,3,4,9,4,3,323,26,22,31,14,7,2,7,13,29,30,18,17,17,14,9,6,4,3,6,20,16,4,8
uSF2,DE,003,01,0000773,632,309,31,39,29,6,5,6,3,16,22,28,22,23,13,18,14,5,5,1,3,4,9,4,3,323,26,22,31,14,7,2,7,13,29,30,18,17,17,14,9,6,4,3,6,20,16,4,8
uSF2,DE,003,01,0000774,629,308,31,39,29,6,5,6,3,16,22,28,22,23,13,17,14,5,5,1,3,4,9,4,3,321,26,22,30,14,7,2,7,13,29,30,18,16,17,14,9,6,4,3,6,20,16,4,8
uSF2,DE,003,01,0000775,2424,1140,79,103,92,51,37,18,12,50,79,83,75,92,77,62,47,17,27,17,23,39,31,17,12,1284,97,92,112,47,33,10,17,43,76,87,93,87,100,66,49,12,31,20,41,55,53,42,21
uSF2,DE,003,01,0000776,2424,1140,79,103,92,51,37,18,12,50,79,83,75,92,77,62,47,17,27,17,23,39,31,17,12,1284,97,92,112,47,33,10,17,43,76,87,93,87,100,66,49,12,31,20,41,55,53,42,21
uSF2,DE,003,01,0000777,2424,1140,79,103,92,51,37,18,12,50,79,83,75,92,77,62,47,17,27,17,23,39,31,17,12,1284,97,92,112,47,33,10,17,43,76,87,93,87,100,66,49,12,31,20,41,55,53,42,21
uSF2,DE,003,01,0000778,134,59,1,2,1,2,0,0,0,1,0,1,0,5,5,4,4,5,3,3,3,5,9,5,0,75,3,1,2,2,1,0,1,0,2,1,2,3,4,2,9,2,6,5,1,14,5,6,3
uSF2,DE,003,01,0000779,134,59,1,2,1,2,0,0,0,1,0,1,0,5,5,4,4,5,3,3,3,5,9,5,0,75,3,1,2,2,1,0,1,0,2,1,2,3,4,2,9,2,6,5,1,14,5,6,3
uSF2,DE,003,01,0000780,134,59,1,2,1,2,0,0,0,1,0,1,0,5,5,4,4,5,3,3,3,5,9,5,0,75,3,1,2,2,1,0,1,0,2,1,2,3,4,2,9,2,6,5,1,14,5,6,3
uSF2,DE,003,01,0000781,2859,1374,62,88,107,76,35,14,9,31,52,62,93,121,107,127,95,41,53,43,48,46,39,19,6,1485,75,91,103,77,28,14,16,40,61,49,115,114,126,125,106,57,61,44,40,53,53,21,16
uSF2,DE,003,01,0000782,2859,1374,62,88,107,76,35,14,9,31,52,62,93,121,107,127,95,41,53,43,48,46,39,19,6,1485,75,91,103,77,28,14,16,40,61,49,115,114,126,125,106,57,61,44,40,53,53,21,16
uSF2,DE,003,01,0000783,1500,703,32,40,50,39,16,5,5,11,31,29,44,60,45,52,51,19,35,30,34,32,23,16,4,797,33,50,47,39,15,12,4,22,27,27,57,49,63,59,55,38,45,26,32,36,35,17,9
uSF2,DE,003,01,0000784,1359,671,30,48,57,37,19,9,4,20,21,33,49,61,62,75,44,22,18,13,14,14,16,3,2,688,42,41,56,38,13,2,12,18,34,22,58,65,63,66,51,19,16,18,8,17,18,4,7
uSF2,DE,003,01,0000785,11322,5617,350,465,463,318,125,41,31,90,135,245,423,534,541,503,388,106,120,87,142,188,138,108,76,5705,333,437,448,255,88,21,40,88,115,296,470,568,569,482,362,108,127,75,142,186,189,175,131
uSF2,DE,003,01,0000786,11322,5617,350,465,463,318,125,41,31,90,135,245,423,534,541,503,388,106,120,87,142,188,138,108,76,5705,333,437,448,255,88,21,40,88,115,296,470,568,569,482,362,108,127,75,142,186,189,175,131
uSF2,DE,003,01,0000787,3656,1768,88,111,120,87,35,12,8,16,32,54,81,150,170,146,130,35,45,34,67,104,93,82,68,1888,81,110,119,71,17,2,12,22,28,62,106,169,163,157,121,36,53,39,73,111,137,114,85
uSF2,DE,003,01,0000788,6655,3348,201,287,303,209,85,27,23,68,97,156,274,322,329,327,236,62,69,50,71,78,42,25,7,3307,206,258,281,161,58,18,26,62,79,183,292,347,355,303,220,66,71,34,64,70,49,59,45
uSF2,DE,003,01,0000789,1011,501,61,67,40,22,5,2,0,6,6,35,68,62,42,30,22,9,6,3,4,6,3,1,1,510,46,69,48,23,13,1,2,4,8,51,72,52,51,22,21,6,3,2,5,5,3,2,1
uSF2,DE,003,01,0000790,389,197,12,25,20,7,8,4,1,5,15,12,16,13,15,12,5,1,2,1,2,10,3,4,4,192,14,15,16,4,4,1,0,6,13,21,16,18,10,10,9,2,4,2,8,8,3,5,3
uSF2,DE,003,01,0000791,389,197,12,25,20,7,8,4,1,5,15,12,16,13,15,12,5,1,2,1,2,10,3,4,4,192,14,15,16,4,4,1,0,6,13,21,16,18,10,10,9,2,4,2,8,8,3,5,3
uSF2,DE,003,01,0000792,389,197,12,25,20,7,8,4,1,5,15,12,16,13,15,12,5,1,2,1,2,10,3,4,4,192,14,15,16,4,4,1,0,6,13,21,16,18,10,10,9,2,4,2,8,8,3,5,3
uSF2,DE,003,01,0000793,1244,593,40,52,46,23,10,2,3,12,32,49,53,51,39,34,30,12,15,12,21,21,21,14,1,651,36,41,53,20,12,6,2,17,41,48,52,48,42,40,43,9,28,14,20,33,23,14,9
uSF2,DE,003,01,0000794,1244,593,40,52,46,23,10,2,3,12,32,49,53,51,39,34,30,12,15,12,21,21,21,14,1,651,36,41,53,20,12,6,2,17,41,48,52,48,42,40,43,9,28,14,20,33,23,14,9
uSF2,DE,003,01,0000795,766,362,26,35,28,11,5,1,3,7,16,36,36,30,24,21,18,5,11,6,13,10,14,5,1,404,24,29,40,13,5,5,1,12,26,33,39,23,22,31,29,4,17,7,14,13,11,4,2
uSF2,DE,003,01,0000796,478,231,14,17,18,12,5,1,0,5,16,13,17,21,15,13,12,7,4,6,8,11,7,9,0,247,12,12,13,7,7,1,1,5,15,15,13,25,20,9,14,5,11,7,6,20,12,10,7
uSF2,DE,003,01,0000797,226,109,4,10,11,8,2,2,0,4,6,8,10,9,7,5,11,1,4,1,1,2,1,2,0,117,7,7,13,5,5,1,3,3,3,11,12,10,4,6,9,4,3,1,1,3,2,2,2
uSF2,DE,003,01,0000798,226,109,4,10,11,8,2,2,0,4,6,8,10,9,7,5,11,1,4,1,1,2,1,2,0,117,7,7,13,5,5,1,3,3,3,11,12,10,4,6,9,4,3,1,1,3,2,2,2
uSF2,DE,003,01,0000799,226,109,4,10,11,8,2,2,0,4,6,8,10,9,7,5,11,1,4,1,1,2,1,2,0,117,7,7,13,5,5,1,3,3,3,11,12,10,4,6,9,4,3,1,1,3,2,2,2
uSF2,DE,003,01,0000800,2090,984,96,85,82,43,23,15,11,38,74,52,70,65,75,62,51,8,11,27,21,24,23,20,8,1106,91,63,64,49,32,12,13,43,77,62,73,86,65,65,66,16,23,19,31,49,46,41,20
uSF2,DE,003,01,0000801,2090,984,96,85,82,43,23,15,11,38,74,52,70,65,75,62,51,8,11,27,21,24,23,20,8,1106,91,63,64,49,32,12,13,43,77,62,73,86,65,65,66,16,23,19,31,49,46,41,20
uSF2,DE,003,01,0000802,231,89,16,8,11,3,4,2,0,2,8,3,5,2,5,7,8,0,0,0,0,1,2,2,0,142,20,7,9,3,8,1,3,10,7,4,9,11,4,7,6,0,3,4,0,9,6,8,3
uSF2,DE,003,01,0000803,1859,895,80,77,71,40,19,13,11,36,66,49,65,63,70,55,43,8,11,27,21,23,21,18,8,964,71,56,55,46,24,11,10,33,70,58,64,75,61,58,60,16,20,15,31,40,40,33,17
uSF2,DE,003,01,0000804,196,90,6,7,6,4,1,2,1,2,7,4,11,5,6,8,5,0,4,1,0,6,2,0,2,106,9,6,12,6,1,3,3,3,5,7,10,3,11,3,8,2,3,1,3,2,5,0,0
uSF2,DE,003,01,0000805,196,90,6,7,6,4,1,2,1,2,7,4,11,5,6,8,5,0,4,1,0,6,2,0,2,106,9,6,12,6,1,3,3,3,5,7,10,3,11,3,8,2,3,1,3,2,5,0,0
uSF2,DE,003,01,0000806,196,90,6,7,6,4,1,2,1,2,7,4,11,5,6,8,5,0,4,1,0,6,2,0,2,106,9,6,12,6,1,3,3,3,5,7,10,3,11,3,8,2,3,1,3,2,5,0,0
uSF2,DE,003,01,0000807,2339,1080,30,29,48,32,13,4,2,17,40,40,59,62,105,86,103,40,62,34,68,89,66,33,18,1259,31,36,51,37,15,3,2,14,36,48,74,73,97,104,131,59,64,55,73,103,75,54,24
uSF2,DE,003,01,0000808,2339,1080,30,29,48,32,13,4,2,17,40,40,59,62,105,86,103,40,62,34,68,89,66,33,18,1259,31,36,51,37,15,3,2,14,36,48,74,73,97,104,131,59,64,55,73,103,75,54,24
uSF2,DE,003,01,0000809,2339,1080,30,29,48,32,13,4,2,17,40,40,59,62,105,86,103,40,62,34,68,89,66,33,18,1259,31,36,51,37,15,3,2,14,36,48,74,73,97,104,131,59,64,55,73,103,75,54,24
uSF2,DE,003,01,0000810,180,81,8,7,4,5,1,1,1,0,4,6,8,6,7,3,3,1,0,2,4,7,3,0,0,99,9,13,8,4,1,2,1,4,5,5,9,7,4,5,3,0,3,3,1,6,1,3,2
uSF2,DE,003,01,0000811,180,81,8,7,4,5,1,1,1,0,4,6,8,6,7,3,3,1,0,2,4,7,3,0,0,99,9,13,8,4,1,2,1,4,5,5,9,7,4,5,3,0,3,3,1,6,1,3,2
uSF2,DE,003,01,0000812,100,42,2,3,1,4,0,0,0,0,2,3,6,3,6,1,2,0,0,1,2,4,2,0,0,58,5,6,6,4,1,1,1,0,3,3,6,4,2,2,2,0,1,2,1,3,1,3,1
uSF2,DE,003,01,0000813,1606,775,20,21,31,19,7,5,3,12,20,13,27,41,34,37,65,27,63,37,62,112,67,31,21,831,21,14,25,11,9,2,3,9,17,25,28,43,32,62,75,38,87,38,54,109,69,40,20
uSF2,DE,003,01,0000814,1606,775,20,21,31,19,7,5,3,12,20,13,27,41,34,37,65,27,63,37,62,112,67,31,21,831,21,14,25,11,9,2,3,9,17,25,28,43,32,62,75,38,87,38,54,109,69,40,20
uSF2,DE,003,01,0000815,1606,775,20,21,31,19,7,5,3,12,20,13,27,41,34,37,65,27,63,37,62,112,67,31,21,831,21,14,25,11,9,2,3,9,17,25,28,43,32,62,75,38,87,38,54,109,69,40,20
uSF2,DE,003,01,0000816,196,105,9,8,11,6,0,0,0,5,11,5,7,7,10,3,7,2,2,0,3,4,2,3,0,91,4,5,8,5,3,0,1,4,8,6,8,11,4,6,2,0,3,0,1,3,6,2,1
uSF2,DE,003,01,0000817,196,105,9,8,11,6,0,0,0,5,11,5,7,7,10,3,7,2,2,0,3,4,2,3,0,91,4,5,8,5,3,0,1,4,8,6,8,11,4,6,2,0,3,0,1,3,6,2,1
uSF2,DE,003,01,0000818,196,105,9,8,11,6,0,0,0,5,11,5,7,7,10,3,7,2,2,0,3,4,2,3,0,91,4,5,8,5,3,0,1,4,8,6,8,11,4,6,2,0,3,0,1,3,6,2,1
uSF2,DE,003,01,0000819,4649,2233,218,196,170,105,50,27,33,97,173,234,195,183,137,115,84,34,40,16,21,45,39,10,11,2416,197,205,188,80,52,28,28,106,231,204,210,182,151,129,90,50,35,34,33,64,52,29,38
uSF2,DE,003,01,0000820,4649,2233,218,196,170,105,50,27,33,97,173,234,195,183,137,115,84,34,40,16,21,45,39,10,11,2416,197,205,188,80,52,28,28,106,231,204,210,182,151,129,90,50,35,34,33,64,52,29,38
uSF2,DE,003,01,0000821,1376,665,55,55,40,28,19,10,12,35,59,69,51,50,50,27,23,6,11,6,10,21,20,3,5,711,50,56,57,17,14,8,8,41,52,61,60,46,45,32,28,14,8,10,18,32,18,10,26
uSF2,DE,003,01,0000822,3192,1525,159,140,125,77,29,16,21,62,109,162,139,130,87,86,60,26,26,8,10,22,19,6,6,1667,143,148,131,62,38,20,20,61,177,138,147,134,105,94,59,34,26,20,15,31,34,18,12
uSF2,DE,003,01,0000823,4521,2118,128,159,152,97,42,29,23,95,124,163,164,157,140,140,99,32,50,30,48,86,73,41,46,2403,132,166,147,87,46,34,36,86,149,133,170,159,150,156,104,32,53,48,65,139,132,97,82
uSF2,DE,003,01,0000824,1422,610,33,44,34,20,8,14,11,39,44,49,44,37,28,48,26,9,18,8,13,34,22,15,12,812,49,46,43,18,15,12,8,41,45,45,59,34,44,45,41,9,16,16,21,61,59,49,36
uSF2,DE,003,01,0000825,1213,533,25,42,32,20,7,12,7,33,41,42,42,37,24,45,22,8,14,7,10,26,18,9,10,680,43,39,37,15,10,10,6,37,40,42,53,30,39,40,37,8,14,10,15,44,42,37,32
uSF2,DE,003,01,0000826,209,77,8,2,2,0,1,2,4,6,3,7,2,0,4,3,4,1,4,1,3,8,4,6,2,132,6,7,6,3,5,2,2,4,5,3,6,4,5,5,4,1,2,6,6,17,17,12,4
uSF2,DE,003,01,0000827,3099,1508,95,115,118,77,34,15,12,56,80,114,120,120,112,92,73,23,32,22,35,52,51,26,34,1591,83,120,104,69,31,22,28,45,104,88,111,125,106,111,63,23,37,32,44,78,73,48,46
uSF2,DE,003,01,0000828,99,48,7,3,5,2,2,0,1,1,2,3,2,4,3,4,1,0,1,0,0,2,2,1,2,51,3,6,3,2,1,0,1,1,3,4,3,4,1,4,1,0,1,1,1,3,4,2,2
uSF2,DE,003,01,0000829,3000,1460,88,112,113,75,32,15,11,55,78,111,118,116,109,88,72,23,31,22,35,50,49,25,32,1540,80,114,101,67,30,22,27,44,101,84,108,121,105,107,62,23,36,31,43,75,69,46,44
uSF2,DE,003,01,0000830,1643,713,34,35,34,26,10,2,5,26,38,47,59,47,50,42,41,19,23,22,37,44,41,24,7,930,53,45,48,15,11,4,6,29,54,39,59,60,63,48,70,18,32,24,44,82,63,28,35
uSF2,DE,003,01,0000831,1643,713,34,35,34,26,10,2,5,26,38,47,59,47,50,42,41,19,23,22,37,44,41,24,7,930,53,45,48,15,11,4,6,29,54,39,59,60,63,48,70,18,32,24,44,82,63,28,35
uSF2,DE,003,01,0000832,1643,713,34,35,34,26,10,2,5,26,38,47,59,47,50,42,41,19,23,22,37,44,41,24,7,930,53,45,48,15,11,4,6,29,54,39,59,60,63,48,70,18,32,24,44,82,63,28,35
uSF2,DE,003,01,0000833,254,127,9,4,7,2,6,1,2,2,13,9,12,8,7,10,6,5,3,2,4,7,8,0,0,127,7,8,3,5,3,1,2,2,7,9,7,11,9,8,11,3,3,3,1,11,8,2,3
uSF2,DE,003,01,0000834,254,127,9,4,7,2,6,1,2,2,13,9,12,8,7,10,6,5,3,2,4,7,8,0,0,127,7,8,3,5,3,1,2,2,7,9,7,11,9,8,11,3,3,3,1,11,8,2,3
uSF2,DE,003,01,0000835,244,120,8,3,7,2,6,1,2,2,12,9,10,7,7,10,6,4,3,2,4,7,8,0,0,124,7,8,3,5,3,1,2,2,7,8,6,11,9,8,11,3,3,3,1,10,8,2,3
uSF2,DE,003,01,0000836,1122,482,37,33,29,16,7,7,8,20,30,30,35,39,32,44,19,6,13,4,16,21,18,7,11,640,44,29,30,13,14,6,7,27,47,30,47,46,39,47,32,10,18,12,20,38,40,28,16
uSF2,DE,003,01,0000837,1122,482,37,33,29,16,7,7,8,20,30,30,35,39,32,44,19,6,13,4,16,21,18,7,11,640,44,29,30,13,14,6,7,27,47,30,47,46,39,47,32,10,18,12,20,38,40,28,16
uSF2,DE,003,01,0000838,874,366,31,29,23,12,5,4,8,18,25,24,27,27,24,28,14,4,11,3,5,16,14,5,9,508,40,22,22,8,10,5,6,24,38,26,34,36,31,32,25,9,13,9,15,32,33,23,15
uSF2,DE,003,01,0000839,230,106,6,3,5,3,0,3,0,2,5,5,8,11,7,16,5,2,1,1,11,5,3,2,2,124,4,6,8,5,4,1,1,2,8,2,13,10,8,14,7,1,5,3,5,4,7,5,1
uSF2,DE,003,01,0000840,19159,9303,374,448,466,280,264,503,723,1139,727,592,491,560,574,547,415,141,181,112,165,232,212,108,49,9856,350,383,424,247,298,669,1029,920,605,513,510,531,586,585,450,134,203,144,209,343,309,240,174
uSF2,DE,003,01,0000841,19159,9303,374,448,466,280,264,503,723,1139,727,592,491,560,574,547,415,141,181,112,165,232,212,108,49,9856,350,383,424,247,298,669,1029,920,605,513,510,531,586,585,450,134,203,144,209,343,309,240,174
uSF2,DE,003,01,0000842,1701,835,69,59,43,29,23,16,25,78,63,70,73,63,70,67,42,11,5,9,5,3,8,3,1,866,53,57,52,30,31,30,32,85,68,83,58,58,80,59,40,7,9,7,5,7,8,4,3
uSF2,DE,003,01,0000843,546,280,18,16,12,10,7,2,6,11,19,26,19,24,25,24,9,6,7,11,3,9,9,6,1,266,14,8,17,7,8,2,1,5,16,25,22,22,27,19,11,5,4,5,9,14,12,9,4
uSF2,DE,003,01,0000844,2523,1265,42,88,103,68,42,36,40,55,29,61,69,99,118,132,81,23,34,18,23,40,42,17,5,1258,38,76,92,67,16,24,42,50,29,59,82,102,125,117,73,27,25,22,38,56,40,35,23
uSF2,DE,003,01,0000845,2767,1377,45,32,60,38,41,61,133,200,124,68,64,77,70,87,72,21,37,14,28,35,39,21,10,1390,38,49,55,31,36,57,143,192,107,51,56,58,69,95,82,20,35,29,30,48,57,24,28
uSF2,DE,003,01,0000846,2941,1480,49,53,68,36,44,77,115,226,149,89,66,72,76,61,58,25,22,18,35,53,49,32,7,1461,60,57,62,32,50,86,133,141,100,67,70,76,74,74,73,22,29,26,40,59,60,52,18
uSF2,DE,003,01,0000847,2972,1460,88,118,100,57,30,20,12,80,143,135,103,133,108,90,78,31,31,17,28,35,17,5,1,1512,80,89,93,50,30,14,16,77,141,120,125,134,117,122,90,33,38,21,36,39,28,10,9
uSF2,DE,003,01,0000848,1650,684,6,10,6,6,21,89,145,182,65,35,17,16,21,9,8,4,3,5,7,10,9,4,6,966,6,1,6,3,33,151,294,174,43,15,15,10,15,14,1,2,11,2,8,38,42,46,36
uSF2,DE,003,01,0000849,2371,1132,20,22,19,9,48,195,239,285,73,46,26,20,32,27,15,1,16,4,7,7,15,5,1,1239,16,9,12,4,78,300,359,171,42,37,24,17,24,27,18,2,13,5,10,23,20,11,17
uSF2,DE,003,01,0000850,413,214,12,21,12,7,1,1,3,4,17,29,17,16,13,12,17,4,5,2,1,10,5,5,0,199,11,8,14,6,3,2,2,5,18,19,14,10,13,17,17,3,13,1,5,11,4,3,0
uSF2,DE,003,01,0000851,312,122,3,10,11,6,4,1,1,5,11,6,7,5,11,7,5,2,0,0,3,2,3,7,12,190,7,5,11,3,3,2,3,5,6,4,14,8,7,9,3,1,3,5,7,12,18,28,26
uSF2,DE,003,01,0000852,951,448,22,19,30,14,3,5,4,13,34,26,30,35,30,30,29,13,20,14,25,28,16,3,5,503,27,24,10,14,10,1,3,15,35,33,29,36,35,32,41,12,22,20,21,36,20,18,9
uSF2,DE,003,01,0000853,3803,1796,96,86,114,67,34,22,16,63,135,106,144,150,154,154,113,32,53,34,46,76,51,33,17,2007,103,92,115,67,43,21,16,74,113,118,163,130,167,161,146,61,53,41,66,80,84,60,33
uSF2,DE,003,01,0000854,3803,1796,96,86,114,67,34,22,16,63,135,106,144,150,154,154,113,32,53,34,46,76,51,33,17,2007,103,92,115,67,43,21,16,74,113,118,163,130,167,161,146,61,53,41,66,80,84,60,33
uSF2,DE,003,01,0000857,1670,764,29,36,52,20,14,9,8,22,44,39,61,59,66,74,62,20,25,13,21,35,27,20,8,906,38,40,58,25,22,8,2,24,43,45,70,58,79,78,82,32,20,24,27,38,44,25,24
uSF2,DE,003,01,0000858,2014,975,60,46,58,44,20,13,8,38,80,62,76,87,88,77,50,12,27,20,24,39,24,13,9,1039,57,45,56,42,20,12,14,49,59,67,88,64,87,82,60,28,30,16,38,42,39,35,9
uSF2,DE,003,01,0000859,901,452,41,30,40,15,16,9,7,12,34,38,41,41,41,32,9,6,5,6,12,7,4,6,0,449,36,24,27,11,22,5,6,16,38,43,46,43,32,20,14,2,5,10,6,11,13,11,8
uSF2,DE,003,01,0000860,901,452,41,30,40,15,16,9,7,12,34,38,41,41,41,32,9,6,5,6,12,7,4,6,0,449,36,24,27,11,22,5,6,16,38,43,46,43,32,20,14,2,5,10,6,11,13,11,8
uSF2,DE,003,01,0000861,543,274,26,17,22,9,10,6,5,7,26,24,27,21,23,17,4,3,4,6,7,4,4,2,0,269,24,9,12,7,15,5,6,12,30,23,22,28,18,9,6,2,3,7,5,6,6,9,5
uSF2,DE,003,01,0000862,358,178,15,13,18,6,6,3,2,5,8,14,14,20,18,15,5,3,1,0,5,3,0,4,0,180,12,15,15,4,7,0,0,4,8,20,24,15,14,11,8,0,2,3,1,5,7,2,3
uSF2,DE,003,01,0000863,7480,3735,278,341,350,216,80,31,20,69,75,155,312,421,377,388,262,79,78,34,45,63,29,24,8,3745,270,369,343,200,69,24,22,45,72,208,365,455,374,354,251,56,55,34,45,64,33,22,15
uSF2,DE,003,01,0000864,7480,3735,278,341,350,216,80,31,20,69,75,155,312,421,377,388,262,79,78,34,45,63,29,24,8,3745,270,369,343,200,69,24,22,45,72,208,365,455,374,354,251,56,55,34,45,64,33,22,15
uSF2,DE,003,01,0000865,7480,3735,278,341,350,216,80,31,20,69,75,155,312,421,377,388,262,79,78,34,45,63,29,24,8,3745,270,369,343,200,69,24,22,45,72,208,365,455,374,354,251,56,55,34,45,64,33,22,15
uSF2,DE,003,01,0000866,986,474,28,21,30,12,10,4,2,14,12,24,34,28,32,21,35,13,31,19,28,33,28,11,4,512,17,23,19,8,5,1,2,9,19,22,40,31,39,26,53,18,26,23,37,44,23,14,13
uSF2,DE,003,01,0000867,986,474,28,21,30,12,10,4,2,14,12,24,34,28,32,21,35,13,31,19,28,33,28,11,4,512,17,23,19,8,5,1,2,9,19,22,40,31,39,26,53,18,26,23,37,44,23,14,13
uSF2,DE,003,01,0000868,986,474,28,21,30,12,10,4,2,14,12,24,34,28,32,21,35,13,31,19,28,33,28,11,4,512,17,23,19,8,5,1,2,9,19,22,40,31,39,26,53,18,26,23,37,44,23,14,13
uSF2,DE,003,01,0000869,270,132,10,6,8,6,3,2,1,4,7,10,12,5,9,9,13,3,2,4,2,1,7,3,5,138,9,9,7,1,3,1,1,2,8,13,7,10,12,16,9,0,6,2,2,8,6,5,1
uSF2,DE,003,01,0000870,270,132,10,6,8,6,3,2,1,4,7,10,12,5,9,9,13,3,2,4,2,1,7,3,5,138,9,9,7,1,3,1,1,2,8,13,7,10,12,16,9,0,6,2,2,8,6,5,1
uSF2,DE,003,01,0000871,270,132,10,6,8,6,3,2,1,4,7,10,12,5,9,9,13,3,2,4,2,1,7,3,5,138,9,9,7,1,3,1,1,2,8,13,7,10,12,16,9,0,6,2,2,8,6,5,1
uSF2,DE,003,01,0000872,17339,8336,568,573,563,326,176,68,69,297,689,747,748,797,679,588,473,145,162,118,158,188,117,56,31,9003,534,514,585,343,149,85,76,327,718,759,826,844,750,686,545,142,209,121,187,216,195,127,65
uSF2,DE,003,01,0000873,17339,8336,568,573,563,326,176,68,69,297,689,747,748,797,679,588,473,145,162,118,158,188,117,56,31,9003,534,514,585,343,149,85,76,327,718,759,826,844,750,686,545,142,209,121,187,216,195,127,65
uSF2,DE,003,01,0000874,982,474,38,28,20,28,8,3,4,5,16,28,42,34,41,36,23,18,20,16,25,22,11,5,3,508,35,25,34,17,9,5,1,10,17,34,41,44,44,30,40,10,28,15,22,26,11,7,3
uSF2,DE,003,01,0000875,5064,2330,140,122,111,56,42,10,22,102,285,251,242,193,138,156,136,42,43,34,49,65,52,27,12,2734,153,110,109,83,36,16,24,104,288,261,244,214,178,222,163,44,66,51,74,89,91,76,38
uSF2,DE,003,01,0000876,5207,2619,180,197,177,100,41,29,23,128,242,238,229,247,184,167,156,43,55,41,44,57,25,10,6,2588,147,169,160,92,34,33,30,151,240,208,251,221,209,198,150,50,52,30,45,54,33,19,12
uSF2,DE,003,01,0000877,4048,1945,132,155,174,91,61,17,13,34,86,128,147,203,219,159,121,33,38,19,29,36,27,13,10,2103,114,138,203,104,44,22,15,41,85,156,175,240,220,155,146,29,43,16,40,37,53,19,8
uSF2,DE,003,01,0000878,2038,968,78,71,81,51,24,9,7,28,60,102,88,120,97,70,37,9,6,8,11,8,2,1,0,1070,85,72,79,47,26,9,6,21,88,100,115,125,99,81,46,9,20,9,6,10,7,6,4
uSF2,DE,003,01,0000879,1425,687,17,12,24,8,4,3,5,12,27,31,44,42,75,65,58,18,28,20,32,57,55,28,22,738,10,6,15,12,3,2,1,22,21,34,34,34,53,70,62,20,40,22,36,69,71,61,40
uSF2,DE,003,01,0000880,1425,687,17,12,24,8,4,3,5,12,27,31,44,42,75,65,58,18,28,20,32,57,55,28,22,738,10,6,15,12,3,2,1,22,21,34,34,34,53,70,62,20,40,22,36,69,71,61,40
uSF2,DE,003,01,0000881,1425,687,17,12,24,8,4,3,5,12,27,31,44,42,75,65,58,18,28,20,32,57,55,28,22,738,10,6,15,12,3,2,1,22,21,34,34,34,53,70,62,20,40,22,36,69,71,61,40
uSF2,DE,003,01,0000882,1922,946,105,101,87,39,19,12,23,62,86,86,104,63,27,35,27,7,10,9,15,15,7,4,3,976,105,79,95,51,24,12,17,64,87,90,99,63,34,39,30,7,17,6,16,13,15,6,7
uSF2,DE,003,01,0000883,1922,946,105,101,87,39,19,12,23,62,86,86,104,63,27,35,27,7,10,9,15,15,7,4,3,976,105,79,95,51,24,12,17,64,87,90,99,63,34,39,30,7,17,6,16,13,15,6,7
uSF2,DE,003,01,0000884,222,115,11,8,8,6,4,0,0,6,7,7,8,11,3,8,6,3,3,5,2,6,1,2,0,107,6,6,7,7,2,1,0,1,4,8,13,10,4,10,5,1,7,1,4,3,5,0,2
uSF2,DE,003,01,0000885,1700,831,94,93,79,33,15,12,23,56,79,79,96,52,24,27,21,4,7,4,13,9,6,2,3,869,99,73,88,44,22,11,17,63,83,82,86,53,30,29,25,6,10,5,12,10,10,6,5
uSF2,DE,003,01,0000886,1419,711,49,48,65,41,14,5,8,22,39,55,70,65,63,65,28,7,13,7,12,18,10,3,4,708,34,52,67,37,21,11,4,22,47,53,64,73,60,57,35,8,13,5,13,13,14,3,2
uSF2,DE,003,01,0000887,1419,711,49,48,65,41,14,5,8,22,39,55,70,65,63,65,28,7,13,7,12,18,10,3,4,708,34,52,67,37,21,11,4,22,47,53,64,73,60,57,35,8,13,5,13,13,14,3,2
uSF2,DE,003,01,0000888,1419,711,49,48,65,41,14,5,8,22,39,55,70,65,63,65,28,7,13,7,12,18,10,3,4,708,34,52,67,37,21,11,4,22,47,53,64,73,60,57,35,8,13,5,13,13,14,3,2
uSF2,DE,003,01,0000889,815,415,22,26,25,24,26,7,12,26,21,17,26,33,25,27,19,8,10,9,13,17,14,7,1,400,15,16,28,19,20,6,3,11,21,14,27,27,28,29,24,10,12,10,15,25,17,13,10
uSF2,DE,003,01,0000890,815,415,22,26,25,24,26,7,12,26,21,17,26,33,25,27,19,8,10,9,13,17,14,7,1,400,15,16,28,19,20,6,3,11,21,14,27,27,28,29,24,10,12,10,15,25,17,13,10
uSF2,DE,003,01,0000891,803,408,21,25,25,22,26,7,10,26,21,16,26,33,25,27,19,8,10,9,13,17,14,7,1,395,15,15,27,19,20,6,3,11,21,14,27,25,28,29,24,10,12,10,15,25,17,12,10
uSF2,DE,003,01,0000892,3958,1812,106,126,107,74,49,21,24,71,125,110,143,105,105,141,73,35,48,38,47,84,79,64,37,2146,126,97,116,57,52,21,26,71,125,131,118,120,153,134,96,49,68,43,77,136,132,128,70
uSF2,DE,003,01,0000893,3958,1812,106,126,107,74,49,21,24,71,125,110,143,105,105,141,73,35,48,38,47,84,79,64,37,2146,126,97,116,57,52,21,26,71,125,131,118,120,153,134,96,49,68,43,77,136,132,128,70
uSF2,DE,003,01,0000894,153,55,10,7,8,1,4,1,1,1,1,1,2,2,6,3,0,0,0,0,2,4,1,0,0,98,18,12,4,0,1,2,0,7,3,15,4,2,6,2,4,0,0,1,1,8,4,1,3
uSF2,DE,003,01,0000895,3805,1757,96,119,99,73,45,20,23,70,124,109,141,103,99,138,73,35,48,38,45,80,78,64,37,2048,108,85,112,57,51,19,26,64,122,116,114,118,147,132,92,49,68,42,76,128,128,127,67
uSF2,DE,003,01,0000896,1206,624,46,46,37,19,11,11,4,30,44,42,38,57,36,41,38,15,12,15,20,18,24,11,9,582,39,29,27,15,9,2,3,16,38,44,44,29,43,40,34,14,19,14,25,26,25,27,20
uSF2,DE,003,01,0000897,1206,624,46,46,37,19,11,11,4,30,44,42,38,57,36,41,38,15,12,15,20,18,24,11,9,582,39,29,27,15,9,2,3,16,38,44,44,29,43,40,34,14,19,14,25,26,25,27,20
uSF2,DE,003,01,0000898,1206,624,46,46,37,19,11,11,4,30,44,42,38,57,36,41,38,15,12,15,20,18,24,11,9,582,39,29,27,15,9,2,3,16,38,44,44,29,43,40,34,14,19,14,25,26,25,27,20
uSF2,DE,003,01,0000899,198,93,3,1,0,1,0,1,0,1,0,2,4,10,7,10,16,7,8,7,4,4,5,1,1,105,0,1,2,0,1,0,0,0,3,5,4,6,10,6,19,6,10,7,4,7,3,8,3
uSF2,DE,003,01,0000900,198,93,3,1,0,1,0,1,0,1,0,2,4,10,7,10,16,7,8,7,4,4,5,1,1,105,0,1,2,0,1,0,0,0,3,5,4,6,10,6,19,6,10,7,4,7,3,8,3
uSF2,DE,003,01,0000901,198,93,3,1,0,1,0,1,0,1,0,2,4,10,7,10,16,7,8,7,4,4,5,1,1,105,0,1,2,0,1,0,0,0,3,5,4,6,10,6,19,6,10,7,4,7,3,8,3
uSF2,DE,003,01,0000902,3982,1853,128,129,156,93,52,25,33,57,131,137,168,128,130,108,76,30,32,24,49,66,58,22,21,2129,138,134,164,83,63,25,27,79,144,152,174,157,156,114,80,46,47,25,59,94,79,46,43
uSF2,DE,003,01,0000903,3982,1853,128,129,156,93,52,25,33,57,131,137,168,128,130,108,76,30,32,24,49,66,58,22,21,2129,138,134,164,83,63,25,27,79,144,152,174,157,156,114,80,46,47,25,59,94,79,46,43
uSF2,DE,003,01,0000904,1313,622,53,45,44,33,18,11,17,27,55,47,53,40,43,36,21,12,9,5,10,21,15,3,4,691,54,40,60,18,28,5,7,35,56,60,57,46,58,36,29,15,9,7,12,24,13,9,13
uSF2,DE,003,01,0000905,1821,859,41,56,73,42,24,9,9,20,48,53,86,60,65,54,41,14,19,15,33,31,32,17,17,962,46,55,70,41,20,11,11,29,43,56,79,73,69,57,40,27,30,14,39,48,50,29,25
uSF2,DE,003,01,0000906,848,372,34,28,39,18,10,5,7,10,28,37,29,28,22,18,14,4,4,4,6,14,11,2,0,476,38,39,34,24,15,9,9,15,45,36,38,38,29,21,11,4,8,4,8,22,16,8,5
uSF2,DE,003,01,0000907,491,239,2,3,3,4,2,1,0,2,5,5,11,16,14,16,30,14,23,17,20,27,13,9,2,252,3,14,10,4,1,2,1,1,3,7,8,13,20,16,30,12,22,13,25,18,12,12,5
uSF2,DE,003,01,0000908,491,239,2,3,3,4,2,1,0,2,5,5,11,16,14,16,30,14,23,17,20,27,13,9,2,252,3,14,10,4,1,2,1,1,3,7,8,13,20,16,30,12,22,13,25,18,12,12,5
uSF2,DE,003,01,0000909,491,239,2,3,3,4,2,1,0,2,5,5,11,16,14,16,30,14,23,17,20,27,13,9,2,252,3,14,10,4,1,2,1,1,3,7,8,13,20,16,30,12,22,13,25,18,12,12,5
uSF2,DE,003,01,0000910,291,139,4,12,13,5,3,1,4,3,5,11,15,17,12,9,5,2,2,2,6,3,2,2,1,152,8,9,13,9,3,0,2,7,5,14,17,10,18,5,7,0,3,2,4,4,4,5,3
uSF2,DE,003,01,0000911,291,139,4,12,13,5,3,1,4,3,5,11,15,17,12,9,5,2,2,2,6,3,2,2,1,152,8,9,13,9,3,0,2,7,5,14,17,10,18,5,7,0,3,2,4,4,4,5,3
uSF2,DE,003,01,0000912,291,139,4,12,13,5,3,1,4,3,5,11,15,17,12,9,5,2,2,2,6,3,2,2,1,152,8,9,13,9,3,0,2,7,5,14,17,10,18,5,7,0,3,2,4,4,4,5,3
uSF2,DE,003,01,0000913,146,77,3,3,9,3,3,1,1,4,3,4,8,7,6,7,4,2,2,3,2,1,0,1,0,69,1,2,4,6,2,0,0,1,1,4,7,4,9,6,9,1,3,0,0,1,2,5,1
uSF2,DE,003,01,0000914,146,77,3,3,9,3,3,1,1,4,3,4,8,7,6,7,4,2,2,3,2,1,0,1,0,69,1,2,4,6,2,0,0,1,1,4,7,4,9,6,9,1,3,0,0,1,2,5,1
uSF2,DE,003,01,0000915,146,77,3,3,9,3,3,1,1,4,3,4,8,7,6,7,4,2,2,3,2,1,0,1,0,69,1,2,4,6,2,0,0,1,1,4,7,4,9,6,9,1,3,0,0,1,2,5,1
uSF2,DE,003,01,0000916,24846,11731,644,572,569,378,190,104,109,485,1318,1140,977,945,850,794,632,177,236,165,229,388,339,293,197,13115,581,517,516,336,215,92,110,582,1312,1092,909,882,904,886,683,220,281,191,329,634,728,618,497
uSF2,DE,003,01,0000917,24846,11731,644,572,569,378,190,104,109,485,1318,1140,977,945,850,794,632,177,236,165,229,388,339,293,197,13115,581,517,516,336,215,92,110,582,1312,1092,909,882,904,886,683,220,281,191,329,634,728,618,497
uSF2,DE,003,01,0000918,138,56,4,5,1,0,1,2,1,4,7,5,4,2,1,6,4,3,2,3,0,0,0,1,0,82,7,2,0,2,16,4,2,5,5,10,3,5,1,5,8,1,2,0,0,0,3,0,1
uSF2,DE,003,01,0000919,1256,601,33,33,36,17,12,5,6,18,34,42,35,59,56,61,41,7,11,8,7,22,22,18,18,655,29,29,25,20,15,4,3,14,41,45,41,50,55,63,44,11,13,5,8,34,38,41,27
uSF2,DE,003,01,0000920,666,305,17,22,21,14,4,2,1,12,23,21,21,26,34,22,19,4,5,5,6,7,10,5,4,361,15,19,20,13,5,2,2,10,26,32,22,36,32,28,21,5,7,3,9,11,16,13,14
uSF2,DE,003,01,0000921,1444,666,40,22,35,25,12,3,9,14,77,67,53,56,54,49,40,13,20,8,10,23,16,14,6,778,47,27,37,24,10,3,5,34,85,64,57,60,69,58,47,9,17,10,18,36,28,22,11
uSF2,DE,003,01,0000922,384,178,5,7,16,2,2,2,0,4,15,21,19,18,13,20,10,1,2,1,4,7,5,3,1,206,12,10,5,7,4,4,2,8,23,13,24,15,15,13,12,2,5,3,3,8,8,7,3
uSF2,DE,003,01,0000923,127,56,4,8,2,0,2,1,0,0,1,5,4,9,0,3,4,2,0,0,1,6,0,4,0,71,7,5,3,0,1,0,1,3,6,6,5,3,3,1,6,0,1,1,2,3,5,4,5
uSF2,DE,003,01,0000924,281,132,2,4,0,2,1,0,2,5,11,12,8,14,17,6,10,2,3,6,6,12,6,2,1,149,3,3,6,1,1,0,1,3,8,9,10,15,13,15,10,5,3,5,10,11,9,3,5
uSF2,DE,003,01,0000926,26,15,0,1,0,1,1,0,0,2,1,1,0,2,2,1,0,0,1,0,1,0,0,1,0,11,0,0,0,0,0,0,0,0,1,0,0,1,4,2,0,0,0,0,1,1,0,1,0
uSF2,DE,003,01,0000927,94,47,3,2,7,1,1,2,2,6,5,3,4,3,1,1,0,1,0,0,1,2,1,1,0,47,1,2,4,4,1,0,3,4,5,4,4,5,1,3,2,1,0,0,0,0,1,1,1
uSF2,DE,003,01,0000928,381,188,9,3,1,1,1,1,0,8,28,34,24,17,15,17,13,3,2,2,2,4,1,2,0,193,6,4,8,0,5,0,0,8,31,31,12,14,16,20,17,3,2,1,4,5,3,2,1
uSF2,DE,003,01,0000929,2791,1268,16,8,16,10,3,4,7,95,294,174,118,80,72,76,71,20,20,13,19,43,35,45,29,1523,14,12,14,8,3,1,10,134,278,157,73,58,77,82,75,24,26,31,47,116,116,83,84
uSF2,DE,003,01,0000930,1378,638,17,15,13,14,4,0,3,41,158,104,59,44,47,30,25,5,13,3,9,11,12,6,5,740,21,23,19,12,8,7,8,48,158,97,54,52,48,36,27,9,18,5,13,20,22,24,11
uSF2,DE,003,01,0000931,3431,1566,92,65,85,54,23,4,4,30,75,135,124,113,112,152,131,39,53,37,40,72,65,44,17,1865,86,66,77,47,17,6,4,30,104,144,139,123,120,205,134,50,64,36,67,107,111,81,47
uSF2,DE,003,01,0000932,1243,564,37,16,22,12,13,2,7,18,60,54,48,39,42,35,20,11,9,7,22,34,23,12,21,679,29,17,20,12,7,4,1,24,65,47,39,43,45,41,31,8,13,16,29,49,55,42,42
uSF2,DE,003,01,0000933,1008,464,14,15,11,8,2,3,2,28,69,49,41,35,30,34,20,6,7,3,14,9,17,20,27,544,13,13,16,11,8,2,11,36,62,37,31,20,40,17,20,11,8,8,7,16,44,46,67
uSF2,DE,003,01,0000934,445,244,18,13,8,7,3,4,3,15,39,32,23,14,14,13,13,4,4,2,3,6,3,0,3,201,11,13,3,2,3,2,5,18,37,24,10,10,15,12,13,1,2,0,3,10,3,3,1
uSF2,DE,003,01,0000935,145,82,2,4,2,5,2,0,0,3,2,4,5,10,6,9,7,1,2,2,1,9,3,2,1,63,0,2,3,4,1,1,0,1,2,4,3,6,5,7,4,2,1,4,1,1,5,1,5
uSF2,DE,003,01,0000936,106,59,9,10,9,5,2,0,1,1,3,4,3,2,4,2,1,1,1,0,0,0,1,0,0,47,4,6,4,2,1,0,1,2,8,4,4,3,0,3,1,0,0,0,0,0,2,0,2
uSF2,DE,003,01,0000938,254,117,9,8,4,2,1,1,3,5,7,11,7,11,12,9,4,1,4,3,3,7,3,2,0,137,9,7,6,4,3,1,1,3,11,8,4,8,11,8,7,0,5,2,6,8,10,7,8
uSF2,DE,003,01,0000939,588,322,31,18,31,19,15,7,5,13,31,24,24,32,16,15,14,2,7,2,5,1,3,3,4,266,19,22,15,21,8,9,5,17,19,22,10,23,17,16,13,1,4,2,2,8,5,5,3
uSF2,DE,003,01,0000940,908,451,39,40,34,36,14,9,11,26,30,29,35,35,22,25,23,5,8,7,5,5,5,5,3,457,39,32,34,21,17,5,7,27,37,23,28,34,31,26,17,6,9,6,8,15,13,11,11
uSF2,DE,003,01,0000941,2635,1256,83,71,69,55,15,16,20,47,151,131,112,99,91,75,47,16,17,16,24,30,25,25,21,1379,67,52,53,34,24,14,16,57,124,124,126,96,105,82,64,22,25,15,26,54,80,65,54
uSF2,DE,003,01,0000942,2037,935,56,61,53,37,18,14,8,31,72,65,68,84,73,55,48,8,21,20,15,31,39,41,17,1102,49,54,60,43,22,12,9,46,87,76,70,68,78,64,47,15,39,14,24,58,59,63,45
uSF2,DE,003,01,0000943,1824,896,55,67,52,31,20,12,11,37,66,60,77,93,61,47,50,16,12,6,17,33,35,22,16,928,47,55,48,23,18,7,9,23,57,60,71,76,65,53,40,16,12,9,25,45,73,67,29
uSF2,DE,003,01,0000944,1192,599,47,51,37,19,13,8,3,21,56,53,60,47,53,31,16,6,12,11,14,14,9,15,3,593,39,37,33,21,16,3,3,25,30,49,65,52,37,25,23,18,5,15,16,17,19,25,20
uSF2,DE,003,01,0000945,6677,3341,184,220,241,153,82,54,31,134,235,253,262,280,232,208,178,55,66,64,78,117,107,80,27,3336,215,208,213,114,63,35,46,107,200,211,254,265,239,202,187,53,112,58,94,170,161,90,39
uSF2,DE,003,01,0000946,6677,3341,184,220,241,153,82,54,31,134,235,253,262,280,232,208,178,55,66,64,78,117,107,80,27,3336,215,208,213,114,63,35,46,107,200,211,254,265,239,202,187,53,112,58,94,170,161,90,39
uSF2,DE,003,01,0000947,3077,1498,78,102,111,66,33,20,14,42,74,104,113,109,95,96,96,29,38,40,42,78,61,47,10,1579,83,99,94,48,21,20,17,50,72,98,105,115,121,112,100,34,55,34,51,99,78,47,26
uSF2,DE,003,01,0000948,3600,1843,106,118,130,87,49,34,17,92,161,149,149,171,137,112,82,26,28,24,36,39,46,33,17,1757,132,109,119,66,42,15,29,57,128,113,149,150,118,90,87,19,57,24,43,71,83,43,13
uSF2,DE,003,01,0000949,180,84,3,5,8,6,2,0,0,2,6,3,10,9,6,11,3,2,0,2,3,0,1,2,0,96,3,4,8,4,2,1,1,4,4,6,13,9,5,5,3,3,6,1,3,6,1,3,1
uSF2,DE,003,01,0000950,180,84,3,5,8,6,2,0,0,2,6,3,10,9,6,11,3,2,0,2,3,0,1,2,0,96,3,4,8,4,2,1,1,4,4,6,13,9,5,5,3,3,6,1,3,6,1,3,1
uSF2,DE,003,01,0000951,180,84,3,5,8,6,2,0,0,2,6,3,10,9,6,11,3,2,0,2,3,0,1,2,0,96,3,4,8,4,2,1,1,4,4,6,13,9,5,5,3,3,6,1,3,6,1,3,1
uSF2,DE,003,01,0000952,1491,715,61,72,64,37,19,6,7,25,41,55,75,52,46,40,39,7,14,9,17,12,7,8,2,776,57,74,68,42,26,10,15,20,52,59,85,66,35,33,32,18,22,10,16,17,10,5,4
uSF2,DE,003,01,0000953,1491,715,61,72,64,37,19,6,7,25,41,55,75,52,46,40,39,7,14,9,17,12,7,8,2,776,57,74,68,42,26,10,15,20,52,59,85,66,35,33,32,18,22,10,16,17,10,5,4
uSF2,DE,003,01,0000954,1491,715,61,72,64,37,19,6,7,25,41,55,75,52,46,40,39,7,14,9,17,12,7,8,2,776,57,74,68,42,26,10,15,20,52,59,85,66,35,33,32,18,22,10,16,17,10,5,4
uSF2,DE,003,01,0000955,929,459,38,24,36,20,12,4,5,18,24,39,32,53,34,21,22,10,12,9,15,12,8,8,3,470,24,28,29,21,9,9,5,12,33,34,41,42,32,32,18,14,14,11,13,17,17,9,6
uSF2,DE,003,01,0000956,929,459,38,24,36,20,12,4,5,18,24,39,32,53,34,21,22,10,12,9,15,12,8,8,3,470,24,28,29,21,9,9,5,12,33,34,41,42,32,32,18,14,14,11,13,17,17,9,6
uSF2,DE,003,01,0000957,154,71,6,1,8,2,4,1,1,1,3,12,7,9,8,1,3,1,0,0,1,0,2,0,0,83,6,7,8,4,1,2,0,0,5,6,12,14,4,3,3,1,0,3,1,1,2,0,0
uSF2,DE,003,01,0000958,775,388,32,23,28,18,8,3,4,17,21,27,25,44,26,20,19,9,12,9,14,12,6,8,3,387,18,21,21,17,8,7,5,12,28,28,29,28,28,29,15,13,14,8,12,16,15,9,6
uSF2,DE,003,01,0000959,19835,9692,388,471,536,312,129,68,42,161,305,435,597,637,673,712,718,324,537,347,591,844,522,240,103,10143,373,423,470,270,136,58,59,169,367,491,661,709,645,793,846,371,625,354,602,757,541,267,156
uSF2,DE,003,01,0000960,19835,9692,388,471,536,312,129,68,42,161,305,435,597,637,673,712,718,324,537,347,591,844,522,240,103,10143,373,423,470,270,136,58,59,169,367,491,661,709,645,793,846,371,625,354,602,757,541,267,156
uSF2,DE,003,01,0000961,8322,4104,176,167,217,124,50,34,16,66,110,206,259,296,305,334,314,147,219,135,254,319,217,98,41,4218,159,166,173,105,47,19,18,76,150,198,284,297,281,358,385,136,261,151,236,304,228,111,75
uSF2,DE,003,01,0000962,8322,4104,176,167,217,124,50,34,16,66,110,206,259,296,305,334,314,147,219,135,254,319,217,98,41,4218,159,166,173,105,47,19,18,76,150,198,284,297,281,358,385,136,261,151,236,304,228,111,75
uSF2,DE,003,01,0000963,10092,4905,185,253,259,156,66,23,23,80,159,193,282,283,298,326,367,168,300,204,313,497,284,128,58,5187,172,203,239,132,76,34,36,75,182,243,320,335,314,382,417,216,354,188,338,424,286,147,74
uSF2,DE,003,01,0000964,1606,775,20,21,31,19,7,5,3,12,20,13,27,41,34,37,65,27,63,37,62,112,67,31,21,831,21,14,25,11,9,2,3,9,17,25,28,43,32,62,75,38,87,38,54,109,69,40,20
uSF2,DE,003,01,0000965,8486,4130,165,232,228,137,59,18,20,68,139,180,255,242,264,289,302,141,237,167,251,385,217,97,37,4356,151,189,214,121,67,32,33,66,165,218,292,292,282,320,342,178,267,150,284,315,217,107,54
uSF2,DE,003,01,0000966,1421,683,27,51,60,32,13,11,3,15,36,36,56,58,70,52,37,9,18,8,24,28,21,14,4,738,42,54,58,33,13,5,5,18,35,50,57,77,50,53,44,19,10,15,28,29,27,9,7
uSF2,DE,003,01,0000967,1421,683,27,51,60,32,13,11,3,15,36,36,56,58,70,52,37,9,18,8,24,28,21,14,4,738,42,54,58,33,13,5,5,18,35,50,57,77,50,53,44,19,10,15,28,29,27,9,7
uSF2,DE,003,01,0000968,19835,9692,388,471,536,312,129,68,42,161,305,435,597,637,673,712,718,324,537,347,591,844,522,240,103,10143,373,423,470,270,136,58,59,169,367,491,661,709,645,793,846,371,625,354,602,757,541,267,156
uSF2,DE,003,01,0000969,19835,9692,388,471,536,312,129,68,42,161,305,435,597,637,673,712,718,324,537,347,591,844,522,240,103,10143,373,423,470,270,136,58,59,169,367,491,661,709,645,793,846,371,625,354,602,757,541,267,156
uSF2,DE,003,01,0000970,8322,4104,176,167,217,124,50,34,16,66,110,206,259,296,305,334,314,147,219,135,254,319,217,98,41,4218,159,166,173,105,47,19,18,76,150,198,284,297,281,358,385,136,261,151,236,304,228,111,75
uSF2,DE,003,01,0000971,8322,4104,176,167,217,124,50,34,16,66,110,206,259,296,305,334,314,147,219,135,254,319,217,98,41,4218,159,166,173,105,47,19,18,76,150,198,284,297,281,358,385,136,261,151,236,304,228,111,75
uSF2,DE,003,01,0000972,10092,4905,185,253,259,156,66,23,23,80,159,193,282,283,298,326,367,168,300,204,313,497,284,128,58,5187,172,203,239,132,76,34,36,75,182,243,320,335,314,382,417,216,354,188,338,424,286,147,74
uSF2,DE,003,01,0000973,1606,775,20,21,31,19,7,5,3,12,20,13,27,41,34,37,65,27,63,37,62,112,67,31,21,831,21,14,25,11,9,2,3,9,17,25,28,43,32,62,75,38,87,38,54,109,69,40,20
uSF2,DE,003,01,0000974,8486,4130,165,232,228,137,59,18,20,68,139,180,255,242,264,289,302,141,237,167,251,385,217,97,37,4356,151,189,214,121,67,32,33,66,165,218,292,292,282,320,342,178,267,150,284,315,217,107,54
uSF2,DE,003,01,0000975,1421,683,27,51,60,32,13,11,3,15,36,36,56,58,70,52,37,9,18,8,24,28,21,14,4,738,42,54,58,33,13,5,5,18,35,50,57,77,50,53,44,19,10,15,28,29,27,9,7
uSF2,DE,003,01,0000976,1421,683,27,51,60,32,13,11,3,15,36,36,56,58,70,52,37,9,18,8,24,28,21,14,4,738,42,54,58,33,13,5,5,18,35,50,57,77,50,53,44,19,10,15,28,29,27,9,7
uSF2,DE,003,01,0000977,19835,9692,388,471,536,312,129,68,42,161,305,435,597,637,673,712,718,324,537,347,591,844,522,240,103,10143,373,423,470,270,136,58,59,169,367,491,661,709,645,793,846,371,625,354,602,757,541,267,156
uSF2,DE,003,01,0000978,19835,9692,388,471,536,312,129,68,42,161,305,435,597,637,673,712,718,324,537,347,591,844,522,240,103,10143,373,423,470,270,136,58,59,169,367,491,661,709,645,793,846,371,625,354,602,757,541,267,156
uSF2,DE,003,01,0000979,93467,45433,3307,3564,3628,1991,1097,492,553,1614,2808,3351,3923,3778,3092,2904,2322,780,1120,765,1090,1401,978,576,299,48034,3182,3392,3587,2030,1124,532,530,1657,3053,3415,4089,3913,3258,3012,2451,870,1295,775,1133,1708,1429,928,671
uSF2,DE,003,01,0000980,16905,7966,496,561,496,275,182,92,116,371,563,623,633,627,515,553,430,115,205,154,211,296,219,148,85,8939,499,485,526,294,152,92,124,369,578,602,689,656,612,595,503,153,262,158,229,410,437,276,238
uSF2,DE,003,01,0000981,93467,45433,3307,3564,3628,1991,1097,492,553,1614,2808,3351,3923,3778,3092,2904,2322,780,1120,765,1090,1401,978,576,299,48034,3182,3392,3587,2030,1124,532,530,1657,3053,3415,4089,3913,3258,3012,2451,870,1295,775,1133,1708,1429,928,671
uSF2,DE,003,01,0000982,359697,175694,11660,12539,12369,7287,3856,2301,2309,6655,11985,13561,15215,15177,13261,11792,9058,2909,3803,2487,3690,5580,4283,2526,1391,184003,10992,11910,11465,6607,3717,2287,2695,6757,11928,13591,15452,15436,13795,12501,9831,3111,4316,2814,4321,6934,6283,4149,3111
uSF2,DE,003,01,0000983,19159,9303,374,448,466,280,264,503,723,1139,727,592,491,560,574,547,415,141,181,112,165,232,212,108,49,9856,350,383,424,247,298,669,1029,920,605,513,510,531,586,585,450,134,203,144,209,343,309,240,174
uSF2,DE,003,01,0000984,24846,11731,644,572,569,378,190,104,109,485,1318,1140,977,945,850,794,632,177,236,165,229,388,339,293,197,13115,581,517,516,336,215,92,110,582,1312,1092,909,882,904,886,683,220,281,191,329,634,728,618,497
uSF2,DE,003,01,0000985,359697,175694,11660,12539,12369,7287,3856,2301,2309,6655,11985,13561,15215,15177,13261,11792,9058,2909,3803,2487,3690,5580,4283,2526,1391,184003,10992,11910,11465,6607,3717,2287,2695,6757,11928,13591,15452,15436,13795,12501,9831,3111,4316,2814,4321,6934,6283,4149,3111
uSF2,DE,003,01,0000986,359697,175694,11660,12539,12369,7287,3856,2301,2309,6655,11985,13561,15215,15177,13261,11792,9058,2909,3803,2487,3690,5580,4283,2526,1391,184003,10992,11910,11465,6607,3717,2287,2695,6757,11928,13591,15452,15436,13795,12501,9831,3111,4316,2814,4321,6934,6283,4149,3111
uSF2,DE,003,01,0000987,359697,175694,11660,12539,12369,7287,3856,2301,2309,6655,11985,13561,15215,15177,13261,11792,9058,2909,3803,2487,3690,5580,4283,2526,1391,184003,10992,11910,11465,6607,3717,2287,2695,6757,11928,13591,15452,15436,13795,12501,9831,3111,4316,2814,4321,6934,6283,4149,3111