uSF2,DE,004,01,0000001,142611,65841,6111,7029,6827,3826,2077,899,859,2460,4308,4951,5249,4975,4106,3478,2524,876,1146,700,899,1103,813,402,223,76770,5971,6652,6640,3719,2153,1108,1082,3108,5394,6426,6786,6382,5442,4220,3027,1035,1345,882,1178,1588,1256,724,652
uSF2,DE,004,01,0000002,120554,55659,5106,5942,5745,3156,1727,762,728,2143,3801,4272,4462,4210,3479,2991,2132,749,957,583,740,869,631,295,179,64895,5087,5598,5538,3088,1775,919,927,2656,4733,5528,5799,5437,4651,3607,2567,846,1157,739,945,1244,971,546,537
uSF2,DE,004,01,0000003,96210,44227,4062,4718,4556,2507,1366,596,549,1663,3073,3462,3585,3386,2788,2373,1676,594,747,439,542,675,497,236,137,51983,3991,4529,4360,2442,1406,688,717,2076,3787,4558,4723,4397,3788,2903,2061,682,919,564,739,999,779,446,429
uSF2,DE,004,01,0000004,24344,11432,1044,1224,1189,649,361,166,179,480,728,810,877,824,691,618,456,155,210,144,198,194,134,59,42,12912,1096,1069,1178,646,369,231,210,580,946,970,1076,1040,863,704,506,164,238,175,206,245,192,100,108
uSF2,DE,004,01,0000005,50229,22615,2151,2457,2361,1289,760,363,348,908,1461,1552,1627,1592,1392,1139,833,301,416,286,377,451,325,138,88,27614,2040,2297,2382,1350,782,458,432,1216,1822,2114,2281,2258,1848,1491,1138,416,558,404,528,658,536,306,299
uSF2,DE,004,01,0000006,39981,17937,1683,1964,1907,1038,625,284,267,662,1114,1228,1279,1275,1144,883,654,238,332,231,287,371,285,111,75,22044,1545,1891,1902,1092,629,336,325,886,1372,1698,1846,1819,1469,1197,918,347,463,328,441,563,457,260,260
uSF2,DE,004,01,0000007,10248,4678,468,493,454,251,135,79,81,246,347,324,348,317,248,256,179,63,84,55,90,80,40,27,13,5570,495,406,480,258,153,122,107,330,450,416,435,439,379,294,220,69,95,76,87,95,79,46,39
uSF2,DE,004,01,0000008,70325,33044,2955,3485,3384,1867,967,399,380,1235,2340,2720,2835,2618,2087,1852,1299,448,541,297,363,418,306,157,91,37281,3047,3301,3156,1738,993,461,495,1440,2911,3414,3518,3179,2803,2116,1429,430,599,335,417,586,435,240,238
uSF2,DE,004,01,0000009,56229,26290,2379,2754,2649,1469,741,312,282,1001,1959,2234,2306,2111,1644,1490,1022,356,415,208,255,304,212,125,62,29939,2446,2638,2458,1350,777,352,392,1190,2415,2860,2877,2578,2319,1706,1143,335,456,236,298,436,322,186,169
uSF2,DE,004,01,0000010,14096,6754,576,731,735,398,226,87,98,234,381,486,529,507,443,362,277,92,126,89,108,114,94,32,29,7342,601,663,698,388,216,109,103,250,496,554,641,601,484,410,286,95,143,99,119,150,113,54,69
uSF2,DE,004,01,0000011,22057,10182,1005,1087,1082,670,350,137,131,317,507,679,787,765,627,487,392,127,189,117,159,234,182,107,44,11875,884,1054,1102,631,378,189,155,452,661,898,987,945,791,613,460,189,188,143,233,344,285,178,115
uSF2,DE,004,01,0000012,2052,1004,63,88,89,52,35,8,9,31,53,79,71,93,63,60,62,15,26,15,20,31,14,18,9,1048,70,79,87,50,28,9,15,28,46,80,92,98,70,74,54,13,30,9,24,34,25,20,13
uSF2,DE,004,01,0000013,24344,11432,1044,1224,1189,649,361,166,179,480,728,810,877,824,691,618,456,155,210,144,198,194,134,59,42,12912,1096,1069,1178,646,369,231,210,580,946,970,1076,1040,863,704,506,164,238,175,206,245,192,100,108
uSF2,DE,004,01,0000014,2637,1269,125,136,141,94,47,13,18,37,66,94,105,99,90,48,47,17,25,17,24,12,6,2,6,1368,112,135,162,88,56,15,14,42,79,114,133,103,72,58,54,18,22,18,23,16,17,5,12
uSF2,DE,004,01,0000017,356,183,15,24,18,9,9,1,3,6,13,18,17,15,18,7,3,0,1,1,2,1,1,0,1,173,12,21,25,12,3,4,2,4,12,19,15,13,11,6,3,6,0,1,2,0,0,0,2
uSF2,DE,004,01,0000018,356,183,15,24,18,9,9,1,3,6,13,18,17,15,18,7,3,0,1,1,2,1,1,0,1,173,12,21,25,12,3,4,2,4,12,19,15,13,11,6,3,6,0,1,2,0,0,0,2
uSF2,DE,004,01,0000019,115,53,4,8,5,5,0,0,0,1,1,3,6,7,4,3,2,0,0,1,2,1,0,0,0,62,2,5,6,5,0,1,0,3,2,5,9,9,3,6,1,0,0,1,1,2,1,0,0
uSF2,DE,004,01,0000020,115,53,4,8,5,5,0,0,0,1,1,3,6,7,4,3,2,0,0,1,2,1,0,0,0,62,2,5,6,5,0,1,0,3,2,5,9,9,3,6,1,0,0,1,1,2,1,0,0
uSF2,DE,004,01,0000025,614,287,37,30,37,26,13,2,5,6,13,11,25,18,19,7,16,6,6,1,3,2,1,0,3,327,33,46,34,14,19,3,4,13,17,29,34,18,18,12,11,1,6,4,2,5,2,0,2
uSF2,DE,004,01,0000026,614,287,37,30,37,26,13,2,5,6,13,11,25,18,19,7,16,6,6,1,3,2,1,0,3,327,33,46,34,14,19,3,4,13,17,29,34,18,18,12,11,1,6,4,2,5,2,0,2
uSF2,DE,004,01,0000027,1521,730,68,72,76,54,24,10,10,24,38,60,57,57,49,31,24,11,18,14,17,8,4,2,2,791,65,60,95,57,33,7,8,20,48,60,71,63,40,33,39,11,16,12,17,9,14,5,8
uSF2,DE,004,01,0000028,199,114,10,11,10,6,3,0,2,5,10,14,11,4,5,5,2,0,3,3,5,1,3,0,1,85,7,9,10,3,3,1,1,2,3,7,6,7,5,3,5,3,1,0,2,2,3,1,1
uSF2,DE,004,01,0000029,364,156,8,9,11,11,4,4,0,4,5,8,10,18,13,8,8,3,10,8,7,4,0,2,1,208,16,7,26,16,7,2,0,1,8,9,14,15,8,8,16,5,10,7,11,5,7,4,6
uSF2,DE,004,01,0000030,282,124,14,13,18,17,8,3,0,3,3,4,11,7,11,5,1,2,1,1,0,1,1,0,0,158,17,21,17,14,7,1,0,6,9,14,15,13,10,3,3,1,1,2,2,0,1,0,1
uSF2,DE,004,01,0000031,676,336,36,39,37,20,9,3,8,12,20,34,25,28,20,13,13,6,4,2,5,2,0,0,0,340,25,23,42,24,16,3,7,11,28,30,36,28,17,19,15,2,4,3,2,2,3,0,0
uSF2,DE,004,01,0000032,16045,7574,683,800,753,413,237,125,135,373,531,527,575,527,440,440,296,103,138,90,137,114,68,43,26,8471,713,654,732,411,236,171,143,444,655,636,678,698,611,459,344,107,153,113,127,145,117,66,58
uSF2,DE,004,01,0000033,378,174,9,25,20,11,7,2,0,4,11,9,7,18,9,11,8,3,3,2,2,5,5,2,1,204,8,21,18,11,6,5,0,6,15,10,17,21,13,10,6,4,4,4,8,7,5,2,3
uSF2,DE,004,01,0000034,378,174,9,25,20,11,7,2,0,4,11,9,7,18,9,11,8,3,3,2,2,5,5,2,1,204,8,21,18,11,6,5,0,6,15,10,17,21,13,10,6,4,4,4,8,7,5,2,3
uSF2,DE,004,01,0000037,10248,4678,468,493,454,251,135,79,81,246,347,324,348,317,248,256,179,63,84,55,90,80,40,27,13,5570,495,406,480,258,153,122,107,330,450,416,435,439,379,294,220,69,95,76,87,95,79,46,39
uSF2,DE,004,01,0000038,2318,1129,107,109,110,62,34,21,14,62,83,68,108,65,51,72,56,16,27,16,25,14,5,2,2,1189,90,78,105,43,31,31,18,80,87,93,110,96,79,77,52,15,29,19,17,17,9,6,7
uSF2,DE,004,01,0000039,168,87,5,6,7,0,0,2,1,5,8,5,14,7,11,5,2,2,0,0,4,1,1,0,1,81,4,9,6,0,2,1,0,2,6,9,10,4,7,6,4,1,1,4,2,1,0,0,2
uSF2,DE,004,01,0000040,1260,547,58,83,68,37,15,6,9,12,24,28,38,36,34,33,25,9,7,4,7,7,3,1,3,713,62,55,77,45,26,16,10,32,44,56,51,58,51,40,35,11,11,8,8,7,6,1,3
uSF2,DE,004,01,0000041,1173,529,38,38,38,33,17,10,16,30,26,34,43,38,31,35,19,10,15,8,17,17,9,6,1,644,42,38,60,34,19,9,6,26,36,35,53,59,44,36,33,11,9,16,13,21,21,14,9
uSF2,DE,004,01,0000042,301,130,14,12,7,2,2,1,1,9,9,12,9,7,8,8,8,2,1,1,4,2,5,3,3,171,18,16,5,5,3,3,4,14,21,11,9,11,2,5,5,0,3,3,7,9,8,6,3
uSF2,DE,004,01,0000043,1631,752,85,96,79,33,30,9,13,44,70,67,42,44,35,33,26,10,10,7,8,7,3,1,0,879,91,66,71,34,23,22,25,71,92,71,54,62,59,48,37,12,9,6,13,5,4,3,1
uSF2,DE,004,01,0000045,163,69,14,10,15,2,2,2,1,5,6,5,1,0,3,0,2,0,1,0,0,0,0,0,0,94,11,10,8,3,1,3,5,7,11,14,6,4,4,1,2,1,1,0,0,0,2,0,0
uSF2,DE,004,01,0000046,769,325,60,43,25,17,10,4,8,15,27,21,22,20,9,11,4,2,6,4,5,6,4,1,1,444,67,46,35,18,16,9,11,40,46,26,25,28,24,11,9,2,4,3,9,5,4,1,5
uSF2,DE,004,01,0000047,1436,637,46,70,62,30,16,17,10,29,47,49,48,57,31,25,24,5,9,10,15,15,9,11,2,799,72,56,69,45,14,13,13,25,61,56,77,61,58,41,22,8,20,10,13,22,20,15,8
uSF2,DE,004,01,0000048,393,193,21,15,17,18,4,3,2,10,12,8,8,21,10,14,5,4,5,4,5,7,0,0,0,200,16,9,20,15,8,8,1,5,10,14,15,20,16,11,9,5,3,4,3,5,2,0,1
uSF2,DE,004,01,0000049,554,246,19,11,21,15,5,3,5,21,32,23,13,22,22,16,8,3,1,0,0,4,1,1,0,308,19,19,22,14,8,7,13,24,28,25,22,36,34,11,9,3,3,3,2,3,3,0,0
uSF2,DE,004,01,0000051,563,303,34,46,38,11,3,1,8,22,50,43,30,14,2,1,0,0,0,0,0,0,0,0,0,260,43,29,19,5,3,3,7,27,34,44,29,11,4,0,0,0,0,0,0,0,1,1,0
uSF2,DE,004,01,0000052,563,303,34,46,38,11,3,1,8,22,50,43,30,14,2,1,0,0,0,0,0,0,0,0,0,260,43,29,19,5,3,3,7,27,34,44,29,11,4,0,0,0,0,0,0,0,1,1,0
uSF2,DE,004,01,0000053,387,197,7,24,19,12,7,4,2,7,8,7,10,18,17,17,12,5,4,4,9,0,1,2,1,190,11,14,19,7,5,4,4,9,10,9,12,22,20,11,9,4,4,4,4,2,3,1,2
uSF2,DE,004,01,0000054,109,56,1,8,4,3,1,1,0,3,2,3,4,6,5,3,2,0,2,3,3,0,0,1,1,53,2,4,6,0,3,1,1,4,1,3,5,6,4,2,2,2,2,0,2,0,1,1,1
uSF2,DE,004,01,0000055,278,141,6,16,15,9,6,3,2,4,6,4,6,12,12,14,10,5,2,1,6,0,1,1,0,137,9,10,13,7,2,3,3,5,9,6,7,16,16,9,7,2,2,4,2,2,2,0,1
uSF2,DE,004,01,0000056,325,159,14,15,13,14,10,5,1,4,6,6,14,15,11,11,5,4,2,3,3,2,0,0,1,166,8,15,16,14,2,3,3,6,15,8,14,18,14,17,5,1,3,1,0,1,1,0,1
uSF2,DE,004,01,0000057,203,93,10,9,6,6,5,4,0,2,5,6,7,8,6,7,3,1,2,2,2,2,0,0,0,110,5,9,11,6,0,2,2,5,13,7,11,13,9,8,4,1,2,0,0,1,0,0,1
uSF2,DE,004,01,0000058,122,66,4,6,7,8,5,1,1,2,1,0,7,7,5,4,2,3,0,1,1,0,0,0,1,56,3,6,5,8,2,1,1,1,2,1,3,5,5,9,1,0,1,1,0,0,1,0,0
uSF2,DE,004,01,0000065,605,304,25,30,29,16,17,9,13,24,19,14,22,19,25,18,6,3,7,3,0,4,0,1,0,301,20,22,30,21,10,5,3,13,24,24,24,39,26,8,11,4,4,2,5,2,3,1,0
uSF2,DE,004,01,0000066,595,301,24,30,29,15,17,9,13,24,19,14,21,19,25,18,6,3,7,3,0,4,0,1,0,294,19,22,30,19,10,4,3,13,24,24,24,37,25,8,11,4,4,2,5,2,3,1,0
uSF2,DE,004,01,0000067,152,81,5,9,5,7,4,1,1,2,1,2,10,6,11,9,2,0,1,2,0,0,1,1,1,71,2,4,9,4,1,2,0,0,4,7,6,6,6,4,0,1,3,1,0,5,1,2,3
uSF2,DE,004,01,0000069,104,55,4,7,2,5,3,0,1,1,1,1,6,4,4,8,2,0,1,2,0,0,1,1,1,49,2,4,3,3,1,0,0,0,4,5,2,3,3,3,0,1,3,1,0,5,1,2,3
uSF2,DE,004,01,0000070,3306,1633,117,152,167,90,54,24,29,63,86,119,129,114,116,114,84,25,36,20,33,21,21,10,9,1673,122,141,135,89,56,27,18,52,101,114,137,140,147,114,92,22,40,25,21,33,24,13,10
uSF2,DE,004,01,0000072,431,228,11,20,16,14,7,2,4,9,17,21,19,17,18,12,19,3,5,5,2,4,1,2,0,203,24,15,10,4,3,4,5,4,17,14,12,21,20,17,12,4,1,2,4,3,5,1,1
uSF2,DE,004,01,0000075,872,430,52,56,47,18,14,8,7,17,22,35,28,28,22,24,14,6,9,6,7,2,4,2,2,442,39,42,37,28,19,9,3,16,42,26,38,32,30,24,23,2,11,7,4,5,2,1,2
uSF2,DE,004,01,0000076,182,94,6,3,7,9,4,3,1,5,5,5,7,8,8,9,1,0,3,0,5,3,0,0,2,88,2,5,8,4,1,2,0,4,3,6,6,8,8,7,8,3,2,4,0,1,1,4,1
uSF2,DE,004,01,0000077,526,254,8,17,33,22,9,1,9,10,9,21,26,15,17,15,15,5,4,0,6,5,5,1,1,272,11,22,26,21,7,2,1,4,6,16,30,22,25,19,16,3,8,5,6,14,4,2,2
uSF2,DE,004,01,0000078,752,361,25,30,39,17,12,5,5,14,24,24,31,28,24,25,18,7,7,5,9,5,6,1,0,391,30,34,38,20,17,7,8,12,14,36,29,40,34,20,16,5,12,3,3,6,5,1,1
uSF2,DE,004,01,0000079,147,69,3,7,3,4,0,1,2,2,2,1,4,6,7,9,5,1,2,4,2,0,1,1,2,78,5,6,5,4,1,0,0,2,4,2,8,3,11,5,7,0,5,0,2,2,1,3,2
uSF2,DE,004,01,0000080,227,122,4,9,16,5,5,3,1,4,2,7,8,8,16,13,8,2,1,0,2,2,3,2,1,105,3,9,5,5,5,1,1,1,9,3,10,7,12,16,4,3,1,1,1,2,4,1,1
uSF2,DE,004,01,0000081,570,272,21,23,30,18,3,2,0,5,16,24,19,21,18,26,13,8,7,6,1,5,4,1,1,298,26,24,32,16,7,4,3,6,21,24,23,20,21,26,13,2,5,4,6,3,5,4,3
uSF2,DE,004,01,0000084,479,237,20,19,23,17,1,2,0,4,13,20,15,17,18,25,12,8,7,6,1,5,4,0,0,242,12,23,26,16,6,2,2,4,12,20,21,15,19,25,12,2,4,3,6,3,2,4,3
uSF2,DE,004,01,0000085,479,237,20,19,23,17,1,2,0,4,13,20,15,17,18,25,12,8,7,6,1,5,4,0,0,242,12,23,26,16,6,2,2,4,12,20,21,15,19,25,12,2,4,3,6,3,2,4,3
uSF2,DE,004,01,0000086,1439,645,69,79,62,35,25,9,5,16,26,44,49,41,32,39,36,8,13,10,7,14,20,5,1,794,82,72,87,39,18,12,11,23,54,54,75,63,42,41,25,15,13,11,11,18,19,6,3
uSF2,DE,004,01,0000087,687,290,42,44,38,16,10,4,3,8,7,18,20,22,9,7,9,5,8,5,2,4,6,2,1,397,56,34,46,24,10,5,9,13,27,25,38,28,19,9,6,9,7,7,1,8,12,2,2
uSF2,DE,004,01,0000088,687,290,42,44,38,16,10,4,3,8,7,18,20,22,9,7,9,5,8,5,2,4,6,2,1,397,56,34,46,24,10,5,9,13,27,25,38,28,19,9,6,9,7,7,1,8,12,2,2
uSF2,DE,004,01,0000091,716,337,24,31,23,18,15,4,2,8,18,26,25,19,21,32,27,3,5,5,5,9,14,3,0,379,23,35,40,14,8,6,2,10,25,27,34,33,23,32,19,6,6,4,10,10,7,4,1
uSF2,DE,004,01,0000092,508,241,18,22,17,16,9,2,1,5,14,18,19,14,15,20,16,1,4,3,5,8,12,2,0,267,16,24,30,8,6,2,1,4,22,21,27,25,15,19,13,4,4,4,8,8,4,1,1
uSF2,DE,004,01,0000094,114,52,3,5,5,1,2,0,1,1,2,6,3,2,3,7,7,2,0,0,0,0,2,0,0,62,3,8,6,1,0,3,0,3,1,3,4,5,4,8,4,2,0,0,1,2,1,3,0
uSF2,DE,004,01,0000095,348,167,4,13,16,7,5,2,2,2,6,12,11,13,14,21,11,8,3,7,3,5,1,0,1,181,16,10,9,8,3,2,1,3,7,19,11,8,17,21,19,2,6,1,5,5,3,2,3
uSF2,DE,004,01,0000098,340,163,4,13,15,7,5,2,1,2,6,12,10,13,14,20,11,8,3,7,3,5,1,0,1,177,16,10,9,8,3,2,1,2,7,18,11,8,17,20,18,2,6,1,5,5,3,2,3
uSF2,DE,004,01,0000099,340,163,4,13,15,7,5,2,1,2,6,12,10,13,14,20,11,8,3,7,3,5,1,0,1,177,16,10,9,8,3,2,1,2,7,18,11,8,17,20,18,2,6,1,5,5,3,2,3
uSF2,DE,004,01,0000100,1699,764,65,81,106,50,27,6,10,20,34,48,61,61,46,15,31,8,14,9,11,29,22,7,3,935,70,94,94,38,32,12,15,31,56,64,77,78,47,48,28,12,23,13,18,39,19,8,19
uSF2,DE,004,01,0000103,174,78,1,7,7,3,4,0,1,2,3,4,10,8,10,0,5,1,0,0,1,6,3,1,1,96,10,7,8,7,2,0,2,0,2,7,6,12,5,6,1,2,2,1,6,6,1,2,1
uSF2,DE,004,01,0000104,174,78,1,7,7,3,4,0,1,2,3,4,10,8,10,0,5,1,0,0,1,6,3,1,1,96,10,7,8,7,2,0,2,0,2,7,6,12,5,6,1,2,2,1,6,6,1,2,1
uSF2,DE,004,01,0000105,1148,497,47,54,76,37,21,5,8,11,24,32,36,35,24,10,12,5,10,6,5,17,16,6,0,651,53,66,68,26,24,9,12,26,41,49,47,52,33,25,19,8,20,9,10,24,12,6,12
uSF2,DE,004,01,0000106,982,434,41,47,64,30,17,5,8,8,22,28,32,30,24,10,11,5,7,6,4,15,14,6,0,548,45,49,50,23,21,8,11,22,34,37,38,46,32,22,19,8,17,9,10,22,7,6,12
uSF2,DE,004,01,0000107,166,63,6,7,12,7,4,0,0,3,2,4,4,5,0,0,1,0,3,0,1,2,2,0,0,103,8,17,18,3,3,1,1,4,7,12,9,6,1,3,0,0,3,0,0,2,5,0,0
uSF2,DE,004,01,0000108,361,182,17,18,20,10,1,1,1,7,7,12,15,18,12,5,14,2,4,3,5,5,3,0,2,179,7,20,16,5,5,3,1,5,12,8,22,13,9,17,8,2,1,2,2,9,6,0,6
uSF2,DE,004,01,0000109,130,69,7,7,5,3,0,0,0,2,5,7,6,8,5,2,3,0,3,0,3,3,0,0,0,61,2,8,5,1,4,1,0,2,4,3,6,5,4,6,0,0,1,0,2,4,1,0,2
uSF2,DE,004,01,0000111,115,56,7,8,11,4,1,0,1,4,0,0,7,4,1,0,0,1,0,3,0,1,1,0,2,59,5,7,6,2,1,1,0,3,6,3,11,2,2,4,0,0,0,1,0,1,3,0,1
uSF2,DE,004,01,0000112,105,52,3,3,4,3,0,1,0,1,2,5,2,5,6,2,9,1,1,0,2,1,1,0,0,53,0,4,5,2,0,1,1,0,2,2,5,6,3,6,7,2,0,1,0,3,1,0,2
uSF2,DE,004,01,0000113,1606,741,77,92,81,32,17,9,9,27,49,61,57,62,51,29,22,3,10,5,15,15,13,1,4,865,77,80,62,46,17,15,23,31,74,59,79,70,53,51,23,8,16,15,16,19,12,9,10
uSF2,DE,004,01,0000114,103,55,1,8,4,2,1,0,1,2,4,3,5,9,3,3,2,0,3,0,1,0,2,0,1,48,2,3,4,0,1,2,1,0,4,1,2,7,5,4,1,1,3,1,0,3,1,1,1
uSF2,DE,004,01,0000115,103,55,1,8,4,2,1,0,1,2,4,3,5,9,3,3,2,0,3,0,1,0,2,0,1,48,2,3,4,0,1,2,1,0,4,1,2,7,5,4,1,1,3,1,0,3,1,1,1
uSF2,DE,004,01,0000116,1233,554,68,69,62,25,13,8,8,23,38,49,36,38,37,19,16,3,5,4,9,11,10,1,2,679,63,66,48,35,14,9,17,27,66,49,60,52,39,35,17,6,12,9,15,13,10,8,9
uSF2,DE,004,01,0000117,429,204,20,18,19,5,4,1,6,9,14,27,13,11,15,15,9,2,2,2,1,6,3,0,2,225,17,14,9,12,6,3,2,10,22,15,20,16,11,17,10,3,5,2,8,7,6,6,4
uSF2,DE,004,01,0000118,133,57,7,5,9,1,0,0,0,1,3,6,5,6,5,1,4,0,0,0,1,0,3,0,0,76,2,14,4,1,0,0,2,4,4,4,9,7,9,2,2,0,1,0,3,2,2,1,3
uSF2,DE,004,01,0000119,671,293,41,46,34,19,9,7,2,13,21,16,18,21,17,3,3,1,3,2,7,5,4,1,0,378,44,38,35,22,8,6,13,13,40,30,31,29,19,16,5,3,6,7,4,4,2,1,2
uSF2,DE,004,01,0000120,270,132,8,15,15,5,3,1,0,2,7,9,16,15,11,7,4,0,2,1,5,4,1,0,1,138,12,11,10,11,2,4,5,4,4,9,17,11,9,12,5,1,1,5,1,3,1,0,0
uSF2,DE,004,01,0000122,178,89,6,6,11,3,2,1,0,2,4,6,12,11,6,5,3,0,1,1,5,3,0,0,1,89,11,8,3,7,1,3,3,4,4,6,12,4,6,6,5,0,1,2,1,2,0,0,0
uSF2,DE,004,01,0000125,348,167,4,13,16,7,5,2,2,2,6,12,11,13,14,21,11,8,3,7,3,5,1,0,1,181,16,10,9,8,3,2,1,3,7,19,11,8,17,21,19,2,6,1,5,5,3,2,3
uSF2,DE,004,01,0000126,553,271,21,29,24,8,5,1,7,11,19,31,19,20,19,18,12,2,5,2,2,7,6,0,3,282,19,18,14,12,7,5,3,10,26,17,23,24,16,22,11,4,8,4,8,11,8,7,5
uSF2,DE,004,01,0000127,311,146,13,11,20,4,2,1,0,3,7,12,17,17,11,6,7,0,1,1,6,3,3,0,1,165,13,22,7,8,1,3,5,8,8,10,21,11,15,8,7,0,2,2,4,4,2,1,3
uSF2,DE,004,01,0000128,742,324,43,52,37,20,10,7,2,13,23,18,21,25,21,5,3,1,4,2,7,5,4,1,0,418,45,40,41,26,9,7,15,13,40,32,35,35,22,21,5,4,6,9,4,4,2,1,2
uSF2,DE,004,01,0000130,2749,1357,118,129,126,76,41,23,18,71,100,89,127,82,69,84,75,19,32,21,27,18,6,4,2,1392,114,93,115,47,34,35,23,84,104,107,122,117,99,94,64,19,30,21,21,20,14,7,8
uSF2,DE,004,01,0000131,192,99,6,7,7,0,0,2,1,6,8,6,15,9,11,6,2,2,3,0,4,1,1,1,1,93,4,10,6,0,2,1,0,4,6,11,11,6,7,6,5,1,1,7,2,1,0,0,2
uSF2,DE,004,01,0000132,1260,547,58,83,68,37,15,6,9,12,24,28,38,36,34,33,25,9,7,4,7,7,3,1,3,713,62,55,77,45,26,16,10,32,44,56,51,58,51,40,35,11,11,8,8,7,6,1,3
uSF2,DE,004,01,0000133,1173,529,38,38,38,33,17,10,16,30,26,34,43,38,31,35,19,10,15,8,17,17,9,6,1,644,42,38,60,34,19,9,6,26,36,35,53,59,44,36,33,11,9,16,13,21,21,14,9
uSF2,DE,004,01,0000134,301,130,14,12,7,2,2,1,1,9,9,12,9,7,8,8,8,2,1,1,4,2,5,3,3,171,18,16,5,5,3,3,4,14,21,11,9,11,2,5,5,0,3,3,7,9,8,6,3
uSF2,DE,004,01,0000135,1705,788,88,100,85,33,32,9,13,44,74,69,46,47,37,34,27,11,12,7,8,7,4,1,0,917,93,70,75,37,25,23,25,71,97,75,55,64,60,51,40,14,9,6,13,5,5,3,1
uSF2,DE,004,01,0000136,563,303,34,46,38,11,3,1,8,22,50,43,30,14,2,1,0,0,0,0,0,0,0,0,0,260,43,29,19,5,3,3,7,27,34,44,29,11,4,0,0,0,0,0,0,0,1,1,0
uSF2,DE,004,01,0000137,1238,592,76,75,68,26,21,14,8,24,33,46,36,36,31,31,19,7,12,8,9,4,4,2,2,646,55,61,56,37,20,14,10,28,66,47,55,49,43,33,29,4,14,7,4,6,4,1,3
uSF2,DE,004,01,0000138,769,325,60,43,25,17,10,4,8,15,27,21,22,20,9,11,4,2,6,4,5,6,4,1,1,444,67,46,35,18,16,9,11,40,46,26,25,28,24,11,9,2,4,3,9,5,4,1,5
uSF2,DE,004,01,0000139,1436,637,46,70,62,30,16,17,10,29,47,49,48,57,31,25,24,5,9,10,15,15,9,11,2,799,72,56,69,45,14,13,13,25,61,56,77,61,58,41,22,8,20,10,13,22,20,15,8
uSF2,DE,004,01,0000140,1037,521,46,47,49,35,22,13,15,35,31,23,33,42,42,34,11,7,12,7,5,11,0,1,0,516,35,31,56,35,18,14,4,18,34,40,43,60,44,20,20,9,7,6,8,7,5,1,1
uSF2,DE,004,01,0000141,246,126,6,14,12,12,6,2,1,5,3,3,12,13,10,7,4,3,2,4,4,0,0,1,2,120,6,11,12,10,5,3,2,5,4,4,8,13,10,12,3,2,3,1,2,0,2,1,1
uSF2,DE,004,01,0000142,664,323,19,35,29,25,14,5,2,10,17,15,20,30,21,28,11,3,7,4,7,8,6,3,4,341,12,30,29,18,8,7,0,10,22,21,25,32,24,20,14,8,9,9,8,13,7,8,7
uSF2,DE,004,01,0000143,831,410,16,33,48,32,15,4,11,14,17,25,36,29,30,30,25,10,6,1,12,7,6,2,1,421,22,33,41,28,9,5,4,9,16,24,39,39,41,28,23,6,10,9,8,16,6,2,3
uSF2,DE,004,01,0000144,1344,625,45,45,63,32,17,8,10,36,56,50,44,52,46,43,26,10,9,6,9,9,7,2,0,719,51,54,63,35,25,14,22,37,42,62,53,77,70,32,26,9,15,6,7,9,8,1,1
uSF2,DE,004,01,0000145,224,102,4,7,7,6,0,2,3,6,5,5,6,6,10,13,5,1,4,5,2,0,1,2,2,122,8,9,6,6,3,0,1,6,11,8,11,3,12,11,10,0,7,0,2,2,1,3,2
uSF2,DE,004,01,0000146,230,125,4,10,17,5,5,3,1,4,2,7,8,9,16,13,8,2,1,0,2,2,3,2,1,105,3,9,5,5,5,1,1,1,9,3,10,7,12,16,4,3,1,1,1,2,4,1,1
uSF2,DE,004,01,0000147,199,114,10,11,10,6,3,0,2,5,10,14,11,4,5,5,2,0,3,3,5,1,3,0,1,85,7,9,10,3,3,1,1,2,3,7,6,7,5,3,5,3,1,0,2,2,3,1,1
uSF2,DE,004,01,0000148,372,161,8,10,11,11,4,4,0,4,5,10,10,19,13,8,9,3,10,8,7,4,0,2,1,211,16,7,26,16,7,2,0,2,8,10,14,15,8,8,16,5,10,7,12,5,7,4,6
uSF2,DE,004,01,0000149,1252,594,66,67,73,52,30,6,8,15,29,33,53,40,48,19,20,8,8,3,5,4,3,0,4,658,62,88,76,40,29,8,6,23,38,62,64,44,39,21,17,8,7,7,6,5,3,0,5
uSF2,DE,004,01,0000150,814,400,41,48,47,25,10,3,8,13,22,37,31,36,24,16,16,6,4,3,7,3,0,0,0,414,27,31,50,29,17,4,7,15,30,35,49,37,20,26,16,2,4,4,3,4,4,0,0
uSF2,DE,004,01,0000151,146,76,7,9,8,3,1,0,0,2,5,7,6,8,5,2,3,0,3,0,3,4,0,0,0,70,2,9,7,1,5,1,0,2,5,3,8,6,4,6,0,0,1,1,2,4,1,0,2
uSF2,DE,004,01,0000152,993,439,41,47,64,30,17,5,8,8,22,28,32,31,24,11,13,5,7,6,4,15,15,6,0,554,45,50,50,23,21,8,11,22,34,37,38,46,32,23,20,8,17,9,10,23,8,6,13
uSF2,DE,004,01,0000153,281,119,13,15,23,11,5,0,1,7,2,4,11,9,1,0,1,1,3,3,1,3,3,0,2,162,13,24,24,5,4,2,1,7,13,15,20,8,3,7,0,0,3,1,0,3,8,0,1
uSF2,DE,004,01,0000154,279,130,4,10,11,6,4,1,1,3,5,9,12,13,16,2,14,2,1,0,3,7,4,1,1,149,10,11,13,9,2,1,3,0,4,9,11,18,8,12,8,4,2,2,6,9,2,2,3
uSF2,DE,004,01,0000155,570,272,21,23,30,18,3,2,0,5,16,24,19,21,18,26,13,8,7,6,1,5,4,1,1,298,26,24,32,16,7,4,3,6,21,24,23,20,21,26,13,2,5,4,6,3,5,4,3
uSF2,DE,004,01,0000156,544,259,21,26,18,17,9,3,1,5,15,18,23,14,17,20,16,1,4,3,5,9,12,2,0,285,19,27,31,9,6,3,1,4,24,23,30,27,15,19,13,4,4,4,8,8,4,1,1
uSF2,DE,004,01,0000157,781,334,45,48,39,17,14,6,3,10,9,20,23,25,12,12,13,5,9,7,2,5,6,3,1,447,60,37,50,29,12,6,10,16,29,28,41,31,23,14,8,9,9,7,2,8,14,2,2
uSF2,DE,004,01,0000158,114,52,3,5,5,1,2,0,1,1,2,6,3,2,3,7,7,2,0,0,0,0,2,0,0,62,3,8,6,1,0,3,0,3,1,3,4,5,4,8,4,2,0,0,1,2,1,3,0
uSF2,DE,004,01,0000159,96210,44227,4062,4718,4556,2507,1366,596,549,1663,3073,3462,3585,3386,2788,2373,1676,594,747,439,542,675,497,236,137,51983,3991,4529,4360,2442,1406,688,717,2076,3787,4558,4723,4397,3788,2903,2061,682,919,564,739,999,779,446,429
uSF2,DE,004,01,0000160,9410,4242,435,484,416,242,97,51,53,152,333,336,338,326,251,244,166,59,71,35,37,48,36,23,9,5168,451,461,433,229,137,63,73,196,525,478,438,408,422,293,197,55,69,34,47,60,56,18,25
uSF2,DE,004,01,0000169,2146,960,100,101,100,50,27,14,21,45,83,86,87,93,46,41,23,6,14,3,3,7,6,2,2,1186,126,105,109,58,36,20,21,57,120,127,101,103,72,51,22,6,9,7,12,5,10,3,6
uSF2,DE,004,01,0000170,208,102,9,13,11,8,5,1,1,2,5,11,8,8,7,4,0,1,1,0,2,0,3,1,1,106,13,9,9,4,5,0,0,4,7,16,9,9,8,3,0,1,3,1,2,0,1,1,1
uSF2,DE,004,01,0000171,819,361,37,29,33,16,11,2,8,13,38,44,39,35,20,12,10,0,5,0,1,4,3,0,1,458,38,39,34,21,6,3,3,21,62,53,47,40,33,22,12,2,2,5,6,2,4,1,2
uSF2,DE,004,01,0000172,1012,448,54,54,52,20,11,11,11,27,38,30,37,42,16,21,10,3,5,3,0,2,0,1,0,564,74,51,58,30,22,17,17,31,50,55,40,47,27,19,7,2,2,0,4,3,4,1,3
uSF2,DE,004,01,0000173,107,49,0,5,4,6,0,0,1,3,2,1,3,8,3,4,3,2,3,0,0,1,0,0,0,58,1,6,8,3,3,0,1,1,1,3,5,7,4,7,3,1,2,1,0,0,1,0,0
uSF2,DE,004,01,0000174,2012,888,125,128,108,58,17,8,4,19,58,59,57,58,50,43,27,12,15,6,11,11,7,5,2,1124,109,121,101,49,32,19,28,37,128,93,78,92,82,55,35,15,15,10,3,10,10,1,1
uSF2,DE,004,01,0000176,1994,877,125,127,104,58,16,8,4,19,58,59,57,57,49,42,25,12,15,6,11,11,7,5,2,1117,109,121,100,49,32,19,27,37,128,93,77,91,79,55,35,15,15,10,3,10,10,1,1
uSF2,DE,004,01,0000177,5182,2356,210,250,206,132,53,28,27,88,192,185,192,174,152,157,113,40,41,25,22,29,21,14,5,2826,212,233,222,122,69,24,24,102,275,256,254,212,266,183,138,32,45,15,32,43,35,14,18
uSF2,DE,004,01,0000178,1389,586,79,88,55,30,14,7,9,21,61,56,50,29,20,21,15,3,4,5,4,6,8,1,0,803,83,74,70,37,24,10,9,43,97,69,71,53,56,29,22,4,7,1,8,17,11,5,3
uSF2,DE,004,01,0000180,271,138,8,18,20,11,4,0,0,5,3,7,13,13,14,7,5,3,2,2,1,1,0,1,0,133,4,15,18,6,4,2,0,1,2,12,20,11,10,8,6,1,4,1,2,3,1,2,0
uSF2,DE,004,01,0000181,210,90,10,11,8,6,4,1,1,4,10,4,9,3,6,6,2,1,1,2,0,0,0,0,1,120,6,14,9,6,0,3,1,3,12,15,11,12,13,5,4,0,3,0,0,0,1,2,0
uSF2,DE,004,01,0000182,665,306,29,33,29,12,3,3,4,19,40,38,25,16,19,14,7,2,4,4,1,1,0,2,1,359,28,36,12,11,7,2,4,13,55,39,37,27,30,26,13,4,5,0,1,4,4,1,0
uSF2,DE,004,01,0000183,362,167,10,13,11,5,2,2,1,3,11,8,14,20,14,25,8,3,4,1,4,3,2,3,0,195,15,14,12,9,3,0,1,6,14,13,15,11,29,16,13,4,5,3,3,3,3,1,2
uSF2,DE,004,01,0000185,238,113,3,9,10,8,6,2,1,2,5,2,5,12,11,8,11,4,2,3,2,4,2,1,0,125,7,6,10,8,5,1,1,2,2,10,5,8,18,16,9,4,1,3,2,3,2,1,1
uSF2,DE,004,01,0000187,135,57,3,7,3,4,1,2,1,2,3,6,7,2,5,4,2,0,1,1,1,0,1,1,0,78,4,3,8,6,2,1,3,2,11,6,6,3,9,6,3,1,0,1,0,1,1,0,1
uSF2,DE,004,01,0000188,192,95,1,7,6,12,4,1,2,2,1,5,4,8,12,8,8,4,3,1,2,3,1,0,0,97,3,5,9,5,0,1,0,1,2,6,4,16,15,10,11,1,0,2,1,2,3,0,0
uSF2,DE,004,01,0000189,713,314,32,26,27,10,8,0,3,17,39,34,31,24,20,19,11,3,4,1,1,2,0,1,1,399,36,30,35,12,11,1,3,17,51,53,48,23,31,21,13,3,6,0,4,0,0,0,1
uSF2,DE,004,01,0000190,278,133,11,9,12,12,0,2,2,3,7,9,7,13,9,15,9,2,5,2,1,0,2,1,0,145,3,9,18,8,3,0,1,4,12,9,5,17,20,13,8,2,4,1,3,2,3,0,0
uSF2,DE,004,01,0000192,141,67,8,4,7,4,1,1,0,1,1,3,2,8,2,5,10,1,2,1,1,2,3,0,0,74,6,6,3,3,5,2,0,3,1,3,6,9,5,4,6,1,2,0,2,3,3,0,1
uSF2,DE,004,01,0000193,105,45,2,2,4,2,2,2,1,2,2,1,2,5,3,3,7,2,2,0,0,0,0,0,1,60,5,3,2,5,1,0,0,3,4,2,3,7,3,8,6,2,2,0,1,1,1,0,1
uSF2,DE,004,01,0000194,103,52,4,3,0,0,0,1,0,3,4,3,4,3,2,5,6,4,3,2,1,1,0,2,1,51,4,3,4,0,1,0,0,0,5,4,4,1,4,5,6,2,1,2,1,0,1,0,3
uSF2,DE,004,01,0000198,5087,2520,228,258,264,159,71,33,20,68,182,251,250,219,170,140,85,22,31,13,22,17,10,4,3,2567,216,221,221,107,59,20,27,74,202,299,290,267,184,151,80,27,35,12,14,25,14,9,13
uSF2,DE,004,01,0000199,881,425,44,36,40,31,12,7,4,19,38,39,47,39,23,22,13,1,1,1,0,5,2,0,1,456,47,28,43,11,12,6,6,14,35,54,47,53,29,30,13,5,5,0,1,10,4,0,3
uSF2,DE,004,01,0000200,881,425,44,36,40,31,12,7,4,19,38,39,47,39,23,22,13,1,1,1,0,5,2,0,1,456,47,28,43,11,12,6,6,14,35,54,47,53,29,30,13,5,5,0,1,10,4,0,3
uSF2,DE,004,01,0000201,2182,1092,100,121,121,65,34,10,11,21,71,113,109,93,68,63,33,11,17,6,11,6,4,2,2,1090,85,92,79,46,21,6,10,34,96,134,130,108,84,72,28,10,17,9,9,7,2,4,7
uSF2,DE,004,01,0000202,566,293,25,34,33,24,12,3,0,6,20,31,23,27,15,14,8,1,5,1,5,3,1,1,1,273,23,24,15,9,6,3,2,4,27,32,37,27,21,16,8,4,3,4,1,3,2,0,2
uSF2,DE,004,01,0000203,1291,639,63,67,69,33,20,7,9,12,46,64,70,51,41,40,16,8,9,4,4,3,2,1,0,652,52,54,49,25,14,2,5,27,58,82,66,70,49,47,17,5,12,5,5,2,0,2,4
uSF2,DE,004,01,0000204,266,129,10,19,16,4,1,0,2,2,4,16,13,12,9,9,4,1,2,1,2,0,1,0,1,137,10,14,12,11,1,1,3,0,9,17,22,10,10,6,2,1,1,0,3,1,0,2,1
uSF2,DE,004,01,0000206,2024,1003,84,101,103,63,25,16,5,28,73,99,94,87,79,55,39,10,13,6,11,6,4,2,0,1021,84,101,99,50,26,8,11,26,71,111,113,106,71,49,39,12,13,3,4,8,8,5,3
uSF2,DE,004,01,0000207,310,155,12,12,18,12,1,2,0,2,13,17,16,16,17,6,6,1,1,2,0,1,0,0,0,155,14,18,15,5,3,1,2,4,5,23,22,20,10,5,2,0,0,2,1,1,0,1,1
uSF2,DE,004,01,0000208,666,333,21,36,36,24,7,6,1,3,10,23,34,33,28,27,20,3,8,2,5,3,2,1,0,333,23,30,29,16,7,2,3,6,10,28,44,37,30,24,20,7,5,0,3,4,2,2,1
uSF2,DE,004,01,0000209,812,401,43,40,36,22,12,6,3,20,44,43,39,24,27,18,8,4,3,2,3,1,2,1,0,411,40,38,43,25,15,5,6,13,43,47,37,31,23,11,15,3,5,1,0,2,5,2,1
uSF2,DE,004,01,0000210,236,114,8,13,13,5,5,2,1,3,6,16,5,14,7,4,5,2,1,0,3,1,0,0,0,122,7,15,12,4,1,0,0,3,13,13,10,18,8,9,2,2,3,0,0,1,1,0,0
uSF2,DE,004,01,0000211,5549,2623,219,237,231,119,62,55,60,170,261,216,187,231,168,152,101,31,33,17,22,23,19,7,2,2926,240,240,244,148,96,41,60,161,250,240,258,226,212,156,113,19,45,24,36,49,26,21,21
uSF2,DE,004,01,0000212,2210,1014,97,105,99,47,23,14,15,57,92,80,78,94,68,61,32,11,13,3,9,10,6,0,0,1196,123,98,96,59,41,22,24,61,118,90,102,87,97,60,45,6,13,8,9,18,10,7,2
uSF2,DE,004,01,0000213,985,428,60,53,61,26,14,6,4,16,27,19,27,43,29,19,5,5,7,0,3,2,2,0,0,557,73,50,49,22,21,17,19,35,44,46,42,35,37,26,14,2,6,1,3,4,5,4,2
uSF2,DE,004,01,0000214,518,260,22,21,12,7,4,4,6,26,40,24,25,21,18,13,7,2,3,0,2,3,0,0,0,258,21,21,13,9,10,3,3,14,37,22,24,18,19,13,13,3,2,2,0,9,0,2,0
uSF2,DE,004,01,0000215,707,326,15,31,26,14,5,4,5,15,25,37,26,30,21,29,20,4,3,3,4,5,4,0,0,381,29,27,34,28,10,2,2,12,37,22,36,34,41,21,18,1,5,5,6,5,5,1,0
uSF2,DE,004,01,0000216,1392,651,39,55,55,29,16,23,21,53,65,57,34,43,34,34,31,12,11,8,5,10,8,6,2,741,35,58,68,42,23,5,20,41,45,64,58,46,54,42,36,6,16,7,18,23,10,9,15
uSF2,DE,004,01,0000217,110,52,2,4,1,5,1,3,2,6,9,2,3,4,5,3,1,0,0,0,0,0,1,0,0,58,3,1,7,4,1,0,5,6,1,8,2,3,8,6,2,0,1,0,0,0,0,0,0
uSF2,DE,004,01,0000219,234,102,4,9,5,5,0,2,0,3,2,8,5,3,7,15,13,2,4,2,1,5,4,3,0,132,2,8,8,7,4,1,1,2,3,5,11,7,14,11,8,3,3,2,4,10,5,5,8
uSF2,DE,004,01,0000220,146,74,4,2,3,0,1,0,3,17,11,11,4,3,1,4,2,3,1,2,1,1,0,0,0,72,3,4,1,1,4,1,4,15,9,3,7,3,4,2,6,0,1,0,2,0,0,1,1
uSF2,DE,004,01,0000221,241,129,9,8,18,3,7,6,7,14,22,9,5,7,8,3,1,1,1,0,0,0,0,0,0,112,4,15,11,2,2,1,6,5,8,16,11,6,6,7,4,1,2,3,2,0,0,0,0
uSF2,DE,004,01,0000222,155,75,4,6,7,2,3,2,0,3,7,6,4,12,5,2,4,1,2,3,0,0,0,2,0,80,7,10,6,5,2,1,0,1,5,3,6,9,9,5,4,0,3,1,1,1,0,0,1
uSF2,DE,004,01,0000223,152,46,5,11,7,2,1,2,0,4,2,2,2,1,1,0,3,0,1,0,0,1,0,0,1,106,6,9,16,9,5,1,2,3,6,9,8,4,2,2,1,0,4,0,6,6,2,1,4
uSF2,DE,004,01,0000224,94,47,1,8,1,5,0,6,6,2,2,6,2,3,0,0,1,0,1,0,0,2,0,1,0,47,1,2,7,5,2,0,0,3,3,5,3,3,1,3,2,0,1,0,3,3,0,0,0
uSF2,DE,004,01,0000226,100,46,6,4,5,3,1,1,0,2,4,4,2,2,1,3,1,2,1,0,1,0,2,0,1,54,4,3,6,7,1,0,2,1,6,3,5,4,1,2,5,0,1,0,0,2,0,1,0
uSF2,DE,004,01,0000228,260,132,7,11,9,8,2,0,1,9,13,6,13,16,13,13,4,3,1,1,0,0,1,1,0,128,5,9,7,2,2,0,2,6,11,17,11,15,14,8,9,2,5,1,1,0,0,1,0
uSF2,DE,004,01,0000229,260,132,7,11,9,8,2,0,1,9,13,6,13,16,13,13,4,3,1,1,0,0,1,1,0,128,5,9,7,2,2,0,2,6,11,17,11,15,14,8,9,2,5,1,1,0,0,1,0
uSF2,DE,004,01,0000230,1687,826,76,66,68,35,21,18,23,51,91,73,62,78,53,44,34,5,8,5,8,3,4,0,0,861,77,75,73,45,30,14,14,53,76,69,87,78,47,46,23,5,11,8,8,8,6,4,4
uSF2,DE,004,01,0000232,575,295,32,16,14,5,13,9,7,26,55,27,23,20,20,13,3,1,5,2,3,0,1,0,0,280,35,17,16,14,8,3,7,33,35,23,27,15,14,9,5,4,3,4,2,2,1,1,2
uSF2,DE,004,01,0000234,26,13,1,2,1,0,0,0,0,1,0,3,0,1,1,1,2,0,0,0,0,0,0,0,0,13,0,0,1,0,0,1,0,2,0,0,0,2,0,6,1,0,0,0,0,0,0,0,0
uSF2,DE,004,01,0000237,146,70,3,7,6,2,1,0,1,1,8,4,5,11,5,5,3,1,1,0,1,3,2,0,0,76,2,4,8,5,2,0,3,2,4,4,6,8,6,4,6,1,3,1,2,1,2,1,1
uSF2,DE,004,01,0000238,586,263,24,33,30,21,6,4,7,11,16,21,19,29,13,7,14,2,1,1,3,0,1,0,0,323,31,33,34,18,9,8,3,12,26,20,37,32,19,17,9,0,3,1,3,3,2,2,1
uSF2,DE,004,01,0000239,180,90,13,2,7,2,1,2,3,2,7,9,7,8,10,8,6,1,1,0,1,0,0,0,0,90,5,15,4,4,4,2,0,0,4,15,13,11,1,6,2,0,1,2,0,1,0,0,0
uSF2,DE,004,01,0000240,3721,1724,166,181,184,84,59,25,24,73,128,141,159,130,92,79,51,22,28,20,19,22,14,15,8,1997,160,173,174,85,58,23,25,110,148,182,190,172,141,103,63,21,30,21,28,24,24,21,21
uSF2,DE,004,01,0000241,548,273,25,29,28,17,14,1,7,20,24,18,29,22,12,15,4,3,0,0,2,1,1,1,0,275,21,19,29,12,11,4,3,14,22,36,28,29,19,11,10,3,1,2,0,0,0,1,0
uSF2,DE,004,01,0000242,215,113,15,13,8,8,7,1,3,10,8,8,5,8,6,7,2,0,0,0,2,1,0,1,0,102,10,5,9,3,4,2,1,6,11,9,13,12,10,2,4,0,0,1,0,0,0,0,0
uSF2,DE,004,01,0000243,333,160,10,16,20,9,7,0,4,10,16,10,24,14,6,8,2,3,0,0,0,0,1,0,0,173,11,14,20,9,7,2,2,8,11,27,15,17,9,9,6,3,1,1,0,0,0,1,0
uSF2,DE,004,01,0000244,119,61,6,4,5,3,1,4,1,4,2,1,9,8,6,3,4,0,0,0,0,0,0,0,0,58,2,4,8,5,1,0,0,2,2,9,11,2,3,5,2,0,1,0,0,0,1,0,0
uSF2,DE,004,01,0000247,3054,1390,135,148,151,64,44,20,16,49,102,122,121,100,74,61,43,19,28,20,17,21,13,14,8,1664,137,150,137,68,46,19,22,94,124,137,151,141,119,87,51,18,28,19,28,24,23,20,21
uSF2,DE,004,01,0000248,577,280,19,22,20,9,9,2,3,5,20,21,30,23,19,16,9,11,12,6,6,6,4,6,2,297,14,23,22,8,4,1,4,11,13,13,33,26,26,14,15,10,13,6,12,5,10,5,9
uSF2,DE,004,01,0000249,145,71,6,11,7,1,4,3,0,3,2,6,7,9,5,2,0,1,1,2,0,0,0,0,1,74,2,7,9,2,5,1,1,4,7,7,12,3,5,3,2,0,1,0,2,0,0,1,0
uSF2,DE,004,01,0000250,695,334,29,40,49,20,9,4,5,11,30,33,28,24,12,12,9,1,4,1,1,4,5,1,2,361,32,29,40,10,8,5,3,25,31,36,32,38,22,21,15,2,5,2,1,2,0,2,0
uSF2,DE,004,01,0000252,285,120,10,10,16,6,2,1,0,6,9,18,10,9,6,4,6,1,2,1,2,1,0,0,0,165,19,12,11,7,10,4,5,9,12,19,11,14,13,8,4,0,1,2,1,1,2,0,0
uSF2,DE,004,01,0000254,430,179,7,13,17,8,7,1,1,7,6,13,15,7,12,11,14,2,5,9,5,7,4,5,3,251,15,19,20,14,5,1,2,6,8,15,13,17,23,16,10,5,7,5,4,14,10,11,11
uSF2,DE,004,01,0000255,842,365,60,50,34,18,13,9,7,16,32,25,28,25,17,13,5,3,4,1,2,2,0,1,0,477,54,57,32,26,12,7,7,39,50,42,46,37,26,23,4,0,1,3,8,2,0,0,1
uSF2,DE,004,01,0000256,2521,1184,98,115,133,70,40,11,8,32,64,72,93,105,75,86,58,21,22,14,17,22,16,6,6,1337,102,117,104,68,29,20,20,41,56,100,127,108,130,85,59,17,31,14,19,35,22,15,18
uSF2,DE,004,01,0000257,1310,579,61,66,69,36,23,8,7,18,33,38,42,46,35,35,16,4,10,5,2,11,10,2,2,731,66,77,61,37,17,16,11,25,31,59,73,60,61,41,24,6,14,4,10,16,11,7,4
uSF2,DE,004,01,0000258,175,83,11,6,9,6,5,0,1,3,8,10,10,4,1,4,1,0,3,0,0,0,0,0,1,92,15,8,10,1,4,4,1,8,4,12,6,4,9,3,0,0,1,0,0,1,1,0,0
uSF2,DE,004,01,0000259,1125,491,50,60,60,30,18,8,5,15,25,27,32,42,33,30,14,4,7,5,2,11,10,2,1,634,51,69,51,35,13,12,10,17,26,47,67,55,51,38,23,6,13,4,10,15,10,7,4
uSF2,DE,004,01,0000264,1156,578,37,46,58,33,17,3,1,14,30,33,47,56,39,49,40,17,11,9,14,11,6,3,4,578,36,37,40,31,11,4,9,16,25,38,51,47,65,44,33,11,17,9,9,13,11,8,13
uSF2,DE,004,01,0000265,250,118,10,11,13,9,0,1,0,2,5,11,15,7,6,13,10,2,1,0,1,0,1,0,0,132,8,9,11,11,4,2,2,3,6,11,12,7,17,9,8,1,2,1,0,2,4,0,2
uSF2,DE,004,01,0000266,237,123,9,11,14,11,3,1,0,2,4,3,10,24,10,9,3,2,2,0,1,2,2,0,0,114,12,15,6,5,0,0,2,4,2,8,15,13,9,8,3,2,2,2,3,2,0,0,1
uSF2,DE,004,01,0000267,165,98,5,11,9,5,9,0,1,3,6,6,6,5,7,8,10,2,1,0,1,3,0,0,0,67,4,1,6,1,1,0,1,2,6,6,5,4,12,9,6,1,0,1,1,0,0,0,0
uSF2,DE,004,01,0000269,140,68,2,2,9,1,0,0,0,0,8,3,5,5,2,6,6,2,2,4,7,0,1,1,2,72,4,2,3,1,0,0,2,0,1,0,9,3,7,3,7,2,7,4,2,4,2,4,5
uSF2,DE,004,01,0000270,269,123,8,8,9,5,3,0,0,6,3,8,8,11,10,11,8,6,4,3,3,6,2,1,0,146,7,8,11,10,5,1,1,7,7,11,7,12,14,13,5,5,4,1,2,5,2,3,5
uSF2,DE,004,01,0000272,35,17,0,1,1,0,1,1,0,0,0,1,0,3,2,1,1,0,0,2,1,0,0,1,1,18,0,0,0,3,0,0,1,0,1,1,0,1,3,2,3,0,1,0,0,0,2,0,0
uSF2,DE,004,01,0000273,24056,11135,988,1219,1178,662,343,118,105,392,747,960,995,791,685,585,455,163,188,93,117,150,105,68,28,12921,1025,1183,1095,599,319,152,160,468,944,1298,1240,1077,988,709,518,154,195,114,146,221,158,86,72
uSF2,DE,004,01,0000274,3828,1857,186,250,229,126,58,15,17,45,124,195,190,130,101,87,51,10,15,7,10,3,6,2,0,1971,198,234,204,103,46,25,11,47,130,251,216,176,147,81,48,13,11,5,6,7,5,4,3
uSF2,DE,004,01,0000275,2585,1262,135,184,180,86,33,11,12,35,94,127,118,78,57,49,32,7,6,3,9,2,2,2,0,1323,127,163,142,79,31,17,7,32,95,180,136,115,93,49,26,8,4,3,5,5,2,1,3
uSF2,DE,004,01,0000276,438,215,16,23,12,18,9,1,4,6,11,18,21,22,21,9,6,2,8,3,1,1,3,0,0,223,19,26,21,6,7,2,1,5,8,18,26,25,27,7,9,4,5,2,0,0,3,2,0
uSF2,DE,004,01,0000277,805,380,35,43,37,22,16,3,1,4,19,50,51,30,23,29,13,1,1,1,0,0,1,0,0,425,52,45,41,18,8,6,3,10,27,53,54,36,27,25,13,1,2,0,1,2,0,1,0
uSF2,DE,004,01,0000278,982,448,37,42,48,28,15,4,6,15,24,24,46,34,26,37,19,8,8,6,4,7,4,4,2,534,31,41,47,27,12,4,8,11,37,43,54,42,46,37,28,11,6,5,8,8,12,4,12
uSF2,DE,004,01,0000280,234,116,15,12,12,8,4,0,0,1,10,6,15,11,11,4,2,1,1,3,0,0,0,0,0,118,10,11,9,8,2,0,0,1,13,11,18,11,9,2,4,1,1,2,1,1,2,0,1
uSF2,DE,004,01,0000281,448,194,14,18,22,12,5,3,6,10,9,13,19,12,10,12,9,5,4,1,3,2,3,1,1,254,15,17,23,14,6,1,6,6,17,23,17,20,24,24,11,7,2,1,6,5,3,0,6
uSF2,DE,004,01,0000282,202,91,6,5,10,7,3,1,0,3,4,3,8,8,4,13,4,2,2,1,1,3,0,3,0,111,5,7,12,3,4,3,2,2,4,6,12,8,9,8,8,3,2,2,1,1,5,3,1
uSF2,DE,004,01,0000283,905,427,41,32,40,22,16,4,3,17,29,40,38,32,28,22,22,7,15,6,4,4,1,3,1,478,39,46,32,21,22,9,5,19,29,43,41,43,46,25,22,4,2,4,8,4,8,3,3
uSF2,DE,004,01,0000284,347,155,12,8,16,10,4,0,2,8,10,9,11,12,10,14,10,3,6,2,3,2,0,3,0,192,13,17,9,10,10,2,0,8,10,16,15,12,21,15,13,3,1,0,4,2,8,1,2
uSF2,DE,004,01,0000285,558,272,29,24,24,12,12,4,1,9,19,31,27,20,18,8,12,4,9,4,1,2,1,0,1,286,26,29,23,11,12,7,5,11,19,27,26,31,25,10,9,1,1,4,4,2,0,2,1
uSF2,DE,004,01,0000286,18341,8403,724,895,861,486,254,95,79,315,570,701,721,595,530,439,363,138,150,74,99,136,94,59,25,9938,757,862,812,448,239,114,136,391,748,961,929,816,749,566,420,126,176,100,124,202,133,75,54
uSF2,DE,004,01,0000287,2855,1287,161,165,138,57,31,12,18,59,120,143,131,81,60,52,27,10,10,1,4,3,3,1,0,1568,165,170,111,61,28,19,31,83,154,196,159,125,106,64,39,8,15,7,8,11,4,4,0
uSF2,DE,004,01,0000289,1024,476,37,41,42,30,18,2,5,13,24,39,57,44,37,28,22,9,8,2,3,8,4,2,1,548,43,42,49,23,9,4,7,26,29,51,62,58,42,40,19,5,7,9,6,9,5,2,1
uSF2,DE,004,01,0000290,3155,1361,140,180,152,72,39,15,11,54,127,160,134,89,54,49,31,9,12,7,6,11,4,4,1,1794,172,170,163,65,40,13,26,83,188,207,208,146,116,68,45,13,15,14,10,15,10,4,3
uSF2,DE,004,01,0000291,1256,568,43,55,60,28,15,9,8,40,36,39,50,51,38,37,23,7,15,2,4,1,5,2,0,688,60,53,54,42,20,6,10,40,57,71,66,56,52,48,17,8,9,3,3,4,6,2,1
uSF2,DE,004,01,0000292,34,13,3,1,2,0,0,1,0,0,2,1,1,1,1,0,0,0,0,0,0,0,0,0,0,21,2,2,3,2,0,0,0,0,2,2,2,3,1,0,0,0,0,0,1,1,0,0,0
uSF2,DE,004,01,0000293,2794,1288,85,116,141,88,49,14,7,38,68,66,93,64,95,52,72,28,31,15,31,51,41,28,15,1506,61,123,120,77,36,20,21,35,79,96,107,119,110,80,77,33,40,25,43,81,62,38,23
uSF2,DE,004,01,0000294,1577,755,60,92,67,46,24,8,3,25,38,58,45,39,47,43,40,18,20,16,17,26,11,10,2,822,53,67,74,36,18,12,5,27,49,55,59,55,69,48,48,18,30,14,17,33,18,8,9
uSF2,DE,004,01,0000295,1220,565,30,54,51,36,18,10,9,20,24,29,40,41,35,50,34,19,18,5,15,15,6,4,2,655,35,47,56,32,26,9,10,15,29,47,37,56,64,58,53,13,13,11,10,16,10,1,7
uSF2,DE,004,01,0000297,355,174,8,12,30,12,10,2,2,7,4,8,12,14,15,11,5,2,5,4,5,3,3,0,0,181,11,20,12,8,9,2,0,1,7,12,20,23,13,12,8,5,5,0,4,2,4,3,0
uSF2,DE,004,01,0000298,1111,534,44,38,59,36,19,6,2,15,29,43,35,47,42,35,33,16,9,6,6,5,6,1,2,577,37,50,41,28,13,4,9,25,25,45,59,47,39,48,48,4,14,5,8,16,4,4,4
uSF2,DE,004,01,0000300,1042,460,37,62,49,26,8,1,6,8,30,52,49,41,35,23,13,6,4,2,0,2,4,2,0,582,48,46,64,26,21,7,4,14,46,78,72,56,36,21,15,5,1,4,3,4,3,6,2
uSF2,DE,004,01,0000301,1761,841,69,74,64,46,20,13,8,34,63,57,66,76,69,56,53,14,17,13,8,10,6,4,1,920,65,64,59,41,16,16,13,41,80,91,71,65,95,77,44,13,27,8,11,10,6,3,4
uSF2,DE,004,01,0000302,725,343,22,33,20,17,13,2,2,13,11,18,22,44,36,39,20,4,4,6,6,4,3,1,3,382,26,30,23,20,6,1,2,10,14,28,32,38,42,42,17,7,11,4,1,10,4,7,7
uSF2,DE,004,01,0000306,297,145,11,10,10,5,6,1,1,5,3,6,14,15,15,12,12,3,2,2,4,3,3,1,1,152,8,10,9,6,3,1,1,4,4,8,12,16,13,21,7,2,5,2,0,7,3,5,5
uSF2,DE,004,01,0000308,245,117,9,7,6,5,6,1,0,5,3,5,11,12,12,8,9,3,2,2,3,3,3,1,1,128,7,8,8,4,3,1,1,4,4,6,10,14,10,15,7,1,5,2,0,6,3,4,5
uSF2,DE,004,01,0000309,207,97,6,8,5,6,6,0,1,5,2,5,5,11,12,17,5,1,0,1,1,0,0,0,0,110,9,10,3,10,2,0,1,5,2,8,8,12,18,12,4,0,0,2,1,3,0,0,0
uSF2,DE,004,01,0000310,207,97,6,8,5,6,6,0,1,5,2,5,5,11,12,17,5,1,0,1,1,0,0,0,0,110,9,10,3,10,2,0,1,5,2,8,8,12,18,12,4,0,0,2,1,3,0,0,0
uSF2,DE,004,01,0000311,174,85,3,15,5,6,1,1,0,3,3,7,3,15,7,9,1,0,2,1,1,0,0,0,2,89,8,7,8,4,1,0,0,0,7,8,7,10,9,7,5,0,3,0,0,0,1,2,2
uSF2,DE,004,01,0000315,1817,884,67,64,71,38,16,12,11,49,88,88,79,97,48,64,38,13,13,7,5,9,3,3,1,933,75,57,53,26,29,7,15,55,85,74,93,99,82,64,41,16,14,10,11,11,9,5,2
uSF2,DE,004,01,0000318,481,231,16,12,18,6,4,5,2,8,20,27,20,27,12,26,15,1,4,3,1,2,1,0,1,250,19,12,7,6,7,4,5,9,19,22,27,24,25,20,16,8,8,4,2,3,2,0,1
uSF2,DE,004,01,0000320,284,140,9,5,11,5,3,0,0,4,16,20,13,12,10,17,8,0,2,2,1,1,0,0,1,144,12,6,2,4,3,2,4,6,13,13,15,12,16,13,8,6,3,4,1,1,0,0,0
uSF2,DE,004,01,0000321,68,30,1,1,3,0,0,3,2,0,2,4,2,5,1,1,3,1,0,0,0,1,0,0,0,38,4,0,1,0,2,1,0,2,3,4,5,4,3,2,2,0,2,0,1,1,1,0,0
uSF2,DE,004,01,0000322,100,49,5,3,3,1,1,2,0,4,1,3,4,8,1,8,3,0,1,0,0,0,1,0,0,51,2,2,3,2,2,1,1,1,3,3,6,7,5,4,5,1,1,0,0,1,0,0,1
uSF2,DE,004,01,0000323,1310,642,51,51,52,32,12,7,9,41,67,60,58,68,36,37,23,11,9,4,4,6,2,2,0,668,54,44,46,19,22,3,10,46,65,52,66,73,56,43,24,8,6,5,9,7,5,4,1
uSF2,DE,004,01,0000325,198,99,11,12,5,3,2,1,3,10,18,6,8,9,4,5,0,2,0,0,0,0,0,0,0,99,13,3,5,3,5,1,0,11,15,7,15,6,6,4,1,1,0,0,1,0,2,0,0
uSF2,DE,004,01,0000326,138,73,6,9,15,4,3,0,0,2,5,7,6,8,2,0,2,1,1,1,1,0,0,0,0,65,2,10,7,2,0,0,0,2,5,9,6,6,7,3,2,2,1,1,0,0,0,0,0
uSF2,DE,004,01,0000329,122,58,2,3,3,2,1,0,2,5,7,5,14,3,3,4,2,0,0,1,1,0,0,0,0,64,5,4,5,2,4,0,1,6,5,4,5,11,5,4,1,1,0,0,0,0,1,0,0
uSF2,DE,004,01,0000330,149,84,6,2,4,2,3,2,3,10,7,4,6,15,3,7,4,1,2,1,0,1,0,1,0,65,4,2,4,3,3,0,2,3,7,6,7,7,4,3,5,1,0,1,0,2,0,1,0
uSF2,DE,004,01,0000331,476,220,17,17,15,12,3,3,1,12,24,30,15,25,19,10,5,5,2,1,0,2,1,1,0,256,24,17,15,4,5,2,2,20,27,21,27,30,21,20,9,1,3,2,3,2,1,0,0
uSF2,DE,004,01,0000333,698,356,37,46,42,17,8,1,0,7,12,29,45,39,19,14,10,10,6,1,2,6,3,1,1,342,25,35,27,20,11,3,0,4,11,38,47,35,24,14,9,8,6,1,4,6,5,4,5
uSF2,DE,004,01,0000334,147,69,3,4,8,2,3,1,0,1,3,4,6,6,3,3,2,6,4,1,0,5,2,1,1,78,2,5,7,5,0,1,0,0,2,4,4,8,6,4,3,6,3,0,2,3,4,4,5
uSF2,DE,004,01,0000335,147,69,3,4,8,2,3,1,0,1,3,4,6,6,3,3,2,6,4,1,0,5,2,1,1,78,2,5,7,5,0,1,0,0,2,4,4,8,6,4,3,6,3,0,2,3,4,4,5
uSF2,DE,004,01,0000336,551,287,34,42,34,15,5,0,0,6,9,25,39,33,16,11,8,4,2,0,2,1,1,0,0,264,23,30,20,15,11,2,0,4,9,34,43,27,18,10,6,2,3,1,2,3,1,0,0
uSF2,DE,004,01,0000337,501,266,34,40,32,13,5,0,0,5,9,22,35,29,16,10,7,4,2,0,2,0,1,0,0,235,21,25,17,13,10,2,0,4,8,29,41,26,17,7,4,2,3,1,2,2,1,0,0
uSF2,DE,004,01,0000338,50,21,0,2,2,2,0,0,0,1,0,3,4,4,0,1,1,0,0,0,0,1,0,0,0,29,2,5,3,2,1,0,0,0,1,5,2,1,1,3,2,0,0,0,0,1,0,0,0
uSF2,DE,004,01,0000339,4037,1930,158,172,165,90,48,27,20,98,198,180,172,172,134,121,69,23,30,10,13,13,11,3,3,2107,161,179,152,90,56,27,30,112,225,187,220,194,148,131,82,17,36,9,10,18,14,9,0
uSF2,DE,004,01,0000340,4037,1930,158,172,165,90,48,27,20,98,198,180,172,172,134,121,69,23,30,10,13,13,11,3,3,2107,161,179,152,90,56,27,30,112,225,187,220,194,148,131,82,17,36,9,10,18,14,9,0
uSF2,DE,004,01,0000341,576,278,22,20,23,17,2,3,0,12,34,22,22,27,14,25,10,7,8,1,2,3,2,1,1,298,23,15,17,14,4,1,4,11,35,22,32,28,26,22,17,4,7,1,2,5,3,5,0
uSF2,DE,004,01,0000342,596,285,21,24,22,8,5,2,2,9,30,35,26,26,19,23,19,4,4,2,2,1,1,0,0,311,29,24,22,11,9,4,0,16,48,29,23,21,21,28,16,1,5,1,0,0,2,1,0
uSF2,DE,004,01,0000343,1874,890,71,87,78,53,28,12,14,40,68,79,86,87,60,59,27,9,11,5,5,5,5,1,0,984,78,88,79,54,24,10,12,35,77,93,111,107,68,57,37,6,17,5,8,9,7,2,0
uSF2,DE,004,01,0000344,991,477,44,41,42,12,13,10,4,37,66,44,38,32,41,14,13,3,7,2,4,4,3,1,2,514,31,52,34,11,19,12,14,50,65,43,54,38,33,24,12,6,7,2,0,4,2,1,0
uSF2,DE,004,01,0000345,38589,17286,1644,1909,1852,1009,609,261,246,609,1049,1171,1245,1232,1110,849,623,226,321,223,282,361,277,105,73,21303,1510,1833,1834,1050,606,331,305,845,1327,1634,1788,1773,1415,1155,882,341,447,321,423,540,447,251,245
uSF2,DE,004,01,0000346,38589,17286,1644,1909,1852,1009,609,261,246,609,1049,1171,1245,1232,1110,849,623,226,321,223,282,361,277,105,73,21303,1510,1833,1834,1050,606,331,305,845,1327,1634,1788,1773,1415,1155,882,341,447,321,423,540,447,251,245
uSF2,DE,004,01,0000347,381,201,14,21,6,5,2,1,4,12,26,28,26,23,11,10,4,2,2,0,0,3,1,0,0,180,14,13,5,1,5,2,2,13,19,19,17,19,20,9,1,4,3,2,1,4,3,3,1
uSF2,DE,004,01,0000348,4176,1911,133,181,199,110,77,16,27,51,89,140,141,147,147,130,109,22,44,28,34,39,33,12,2,2265,128,167,177,125,49,32,20,68,129,189,204,217,180,180,136,43,45,31,33,48,36,14,14
uSF2,DE,004,01,0000349,2605,1208,74,121,149,64,53,25,16,43,72,87,88,81,95,85,54,16,22,15,10,17,10,11,0,1397,78,126,118,77,37,21,12,48,75,108,129,128,99,109,64,31,26,25,26,21,20,12,7
uSF2,DE,004,01,0000350,1408,640,48,56,55,21,26,8,11,23,34,48,52,41,41,24,24,17,31,13,14,26,16,10,1,768,47,36,56,32,21,12,9,27,49,60,61,61,53,44,40,13,26,23,22,28,21,17,10
uSF2,DE,004,01,0000351,3208,1476,158,158,145,81,45,16,17,51,83,111,109,108,94,92,65,28,28,19,24,26,11,5,2,1732,136,141,151,86,62,31,29,66,101,108,146,135,130,112,106,34,35,26,23,34,21,10,9
uSF2,DE,004,01,0000352,2205,986,71,115,106,51,33,19,13,29,54,60,65,87,53,48,33,20,27,17,22,27,24,7,5,1219,83,108,123,45,27,16,11,37,65,79,106,86,75,71,56,22,39,26,41,42,35,12,14
uSF2,DE,004,01,0000353,2720,1203,104,100,107,63,26,17,18,50,51,69,105,92,92,63,54,24,30,19,34,37,30,11,7,1517,78,119,116,73,52,22,21,51,68,88,122,123,102,68,73,30,67,36,47,55,48,34,24
uSF2,DE,004,01,0000354,1547,640,127,148,98,37,19,11,13,23,20,19,29,25,15,11,13,2,8,3,6,7,4,1,1,907,106,106,101,58,24,16,13,61,56,81,58,76,44,26,16,6,14,11,6,11,4,6,7
uSF2,DE,004,01,0000355,467,213,36,20,18,7,7,2,2,3,11,13,23,17,20,9,6,3,3,1,1,8,3,0,0,254,23,24,22,13,12,1,4,11,17,22,26,24,12,14,5,4,1,4,4,6,1,1,3
uSF2,DE,004,01,0000356,2032,897,68,96,88,76,34,14,12,32,66,57,67,72,75,36,22,11,12,10,11,12,15,7,4,1135,72,96,103,63,26,20,20,42,64,97,114,92,89,51,30,20,16,11,18,21,36,18,16
uSF2,DE,004,01,0000357,213,104,5,10,8,4,3,3,1,5,8,12,6,10,6,7,3,1,1,1,2,3,3,1,1,109,4,5,4,5,3,1,1,9,8,11,9,13,8,9,4,0,0,0,5,2,2,1,5
uSF2,DE,004,01,0000358,253,107,1,2,0,2,0,0,0,1,11,17,10,4,14,12,3,2,5,4,7,6,4,1,1,146,2,0,0,2,1,1,0,3,8,9,6,8,14,14,11,6,6,3,8,20,9,7,8
uSF2,DE,004,01,0000359,115,50,3,3,7,3,0,1,1,0,8,2,3,6,1,0,2,0,0,0,6,2,2,0,0,65,0,10,1,0,0,0,0,1,5,10,5,1,4,5,6,2,3,4,2,3,2,0,1
uSF2,DE,004,01,0000361,627,275,33,23,23,20,9,6,1,12,20,12,24,19,13,13,12,4,3,5,2,8,11,1,1,352,21,23,34,14,15,2,9,10,23,36,32,25,22,14,12,4,11,3,11,14,9,4,4
uSF2,DE,004,01,0000362,1093,504,47,43,52,26,19,6,12,29,40,33,37,31,36,26,24,2,6,7,10,10,6,0,2,589,46,53,57,26,19,4,13,25,40,49,47,50,35,32,24,5,13,0,9,18,11,5,8
uSF2,DE,004,01,0000363,1693,761,71,90,77,48,20,15,19,37,68,48,54,58,52,38,26,7,4,4,6,7,5,5,2,932,68,111,93,41,33,12,14,52,94,74,82,88,63,30,27,8,7,7,6,12,7,3,0
uSF2,DE,004,01,0000364,2712,1122,150,129,118,82,43,10,12,40,47,42,59,46,64,43,23,20,32,16,30,41,38,11,26,1590,104,139,120,69,43,23,26,62,92,82,97,95,86,73,71,24,39,41,53,82,69,40,60
uSF2,DE,004,01,0000365,1620,715,86,98,97,46,32,21,12,18,35,35,62,40,40,21,19,7,11,8,6,10,9,2,0,905,83,72,84,53,38,23,20,21,56,74,74,75,67,37,31,16,9,13,11,22,11,5,10
uSF2,DE,004,01,0000366,497,215,32,33,25,8,7,8,5,11,16,19,6,11,7,6,9,2,4,2,1,2,0,1,0,282,23,32,20,14,6,8,9,21,22,23,15,28,15,12,12,4,3,2,0,3,2,6,2
uSF2,DE,004,01,0000367,1739,707,85,88,63,38,27,9,9,26,59,59,43,50,35,39,26,4,9,7,2,12,7,6,4,1032,91,98,93,37,27,18,24,58,70,80,75,72,54,55,42,15,19,8,28,18,28,15,7
uSF2,DE,004,01,0000368,1492,676,39,68,101,46,27,7,9,25,48,45,42,54,41,31,18,7,12,8,15,17,11,3,2,816,67,85,77,48,31,14,15,27,36,57,75,61,56,32,31,10,16,16,14,21,13,7,7
uSF2,DE,004,01,0000369,1741,795,72,86,89,58,32,15,11,26,39,50,48,65,57,29,28,8,13,11,18,17,15,2,6,946,68,78,92,53,22,20,9,39,48,68,80,82,61,47,29,16,17,16,25,25,27,15,9
uSF2,DE,004,01,0000370,1556,717,57,75,62,35,22,12,12,29,64,68,58,60,32,31,21,6,6,16,11,17,12,8,3,839,57,55,49,41,22,10,14,38,65,64,80,91,50,50,28,13,22,6,14,21,21,9,19
uSF2,DE,004,01,0000371,688,320,28,37,30,26,10,6,5,8,21,28,19,28,22,20,11,4,2,2,4,4,5,0,0,368,26,34,30,14,8,4,0,14,25,38,36,50,21,30,9,4,2,2,9,4,5,3,0
uSF2,DE,004,01,0000372,1209,570,74,76,88,44,28,11,1,13,39,42,41,32,32,17,11,5,4,4,5,1,1,0,1,639,54,64,73,44,18,14,9,32,57,63,66,40,41,22,13,6,6,4,3,4,3,3,0
uSF2,DE,004,01,0000373,527,239,25,32,39,8,7,2,3,10,18,24,26,20,13,7,1,1,0,0,1,1,0,0,1,288,29,35,33,14,5,4,1,8,31,43,26,29,13,6,4,0,1,0,4,0,2,0,0
uSF2,DE,004,01,0000374,381,201,14,21,6,5,2,1,4,12,26,28,26,23,11,10,4,2,2,0,0,3,1,0,0,180,14,13,5,1,5,2,2,13,19,19,17,19,20,9,1,4,3,2,1,4,3,3,1
uSF2,DE,004,01,0000375,4176,1911,133,181,199,110,77,16,27,51,89,140,141,147,147,130,109,22,44,28,34,39,33,12,2,2265,128,167,177,125,49,32,20,68,129,189,204,217,180,180,136,43,45,31,33,48,36,14,14
uSF2,DE,004,01,0000376,2605,1208,74,121,149,64,53,25,16,43,72,87,88,81,95,85,54,16,22,15,10,17,10,11,0,1397,78,126,118,77,37,21,12,48,75,108,129,128,99,109,64,31,26,25,26,21,20,12,7
uSF2,DE,004,01,0000377,1408,640,48,56,55,21,26,8,11,23,34,48,52,41,41,24,24,17,31,13,14,26,16,10,1,768,47,36,56,32,21,12,9,27,49,60,61,61,53,44,40,13,26,23,22,28,21,17,10
uSF2,DE,004,01,0000378,3208,1476,158,158,145,81,45,16,17,51,83,111,109,108,94,92,65,28,28,19,24,26,11,5,2,1732,136,141,151,86,62,31,29,66,101,108,146,135,130,112,106,34,35,26,23,34,21,10,9
uSF2,DE,004,01,0000379,2205,986,71,115,106,51,33,19,13,29,54,60,65,87,53,48,33,20,27,17,22,27,24,7,5,1219,83,108,123,45,27,16,11,37,65,79,106,86,75,71,56,22,39,26,41,42,35,12,14
uSF2,DE,004,01,0000380,2720,1203,104,100,107,63,26,17,18,50,51,69,105,92,92,63,54,24,30,19,34,37,30,11,7,1517,78,119,116,73,52,22,21,51,68,88,122,123,102,68,73,30,67,36,47,55,48,34,24
uSF2,DE,004,01,0000381,1547,640,127,148,98,37,19,11,13,23,20,19,29,25,15,11,13,2,8,3,6,7,4,1,1,907,106,106,101,58,24,16,13,61,56,81,58,76,44,26,16,6,14,11,6,11,4,6,7
uSF2,DE,004,01,0000382,467,213,36,20,18,7,7,2,2,3,11,13,23,17,20,9,6,3,3,1,1,8,3,0,0,254,23,24,22,13,12,1,4,11,17,22,26,24,12,14,5,4,1,4,4,6,1,1,3
uSF2,DE,004,01,0000383,2032,897,68,96,88,76,34,14,12,32,66,57,67,72,75,36,22,11,12,10,11,12,15,7,4,1135,72,96,103,63,26,20,20,42,64,97,114,92,89,51,30,20,16,11,18,21,36,18,16
uSF2,DE,004,01,0000384,213,104,5,10,8,4,3,3,1,5,8,12,6,10,6,7,3,1,1,1,2,3,3,1,1,109,4,5,4,5,3,1,1,9,8,11,9,13,8,9,4,0,0,0,5,2,2,1,5
uSF2,DE,004,01,0000385,253,107,1,2,0,2,0,0,0,1,11,17,10,4,14,12,3,2,5,4,7,6,4,1,1,146,2,0,0,2,1,1,0,3,8,9,6,8,14,14,11,6,6,3,8,20,9,7,8
uSF2,DE,004,01,0000386,115,50,3,3,7,3,0,1,1,0,8,2,3,6,1,0,2,0,0,0,6,2,2,0,0,65,0,10,1,0,0,0,0,1,5,10,5,1,4,5,6,2,3,4,2,3,2,0,1
uSF2,DE,004,01,0000388,627,275,33,23,23,20,9,6,1,12,20,12,24,19,13,13,12,4,3,5,2,8,11,1,1,352,21,23,34,14,15,2,9,10,23,36,32,25,22,14,12,4,11,3,11,14,9,4,4
uSF2,DE,004,01,0000389,1093,504,47,43,52,26,19,6,12,29,40,33,37,31,36,26,24,2,6,7,10,10,6,0,2,589,46,53,57,26,19,4,13,25,40,49,47,50,35,32,24,5,13,0,9,18,11,5,8
uSF2,DE,004,01,0000390,1693,761,71,90,77,48,20,15,19,37,68,48,54,58,52,38,26,7,4,4,6,7,5,5,2,932,68,111,93,41,33,12,14,52,94,74,82,88,63,30,27,8,7,7,6,12,7,3,0
uSF2,DE,004,01,0000391,2712,1122,150,129,118,82,43,10,12,40,47,42,59,46,64,43,23,20,32,16,30,41,38,11,26,1590,104,139,120,69,43,23,26,62,92,82,97,95,86,73,71,24,39,41,53,82,69,40,60
uSF2,DE,004,01,0000392,1620,715,86,98,97,46,32,21,12,18,35,35,62,40,40,21,19,7,11,8,6,10,9,2,0,905,83,72,84,53,38,23,20,21,56,74,74,75,67,37,31,16,9,13,11,22,11,5,10
uSF2,DE,004,01,0000393,497,215,32,33,25,8,7,8,5,11,16,19,6,11,7,6,9,2,4,2,1,2,0,1,0,282,23,32,20,14,6,8,9,21,22,23,15,28,15,12,12,4,3,2,0,3,2,6,2
uSF2,DE,004,01,0000394,1739,707,85,88,63,38,27,9,9,26,59,59,43,50,35,39,26,4,9,7,2,12,7,6,4,1032,91,98,93,37,27,18,24,58,70,80,75,72,54,55,42,15,19,8,28,18,28,15,7
uSF2,DE,004,01,0000395,1492,676,39,68,101,46,27,7,9,25,48,45,42,54,41,31,18,7,12,8,15,17,11,3,2,816,67,85,77,48,31,14,15,27,36,57,75,61,56,32,31,10,16,16,14,21,13,7,7
uSF2,DE,004,01,0000396,1741,795,72,86,89,58,32,15,11,26,39,50,48,65,57,29,28,8,13,11,18,17,15,2,6,946,68,78,92,53,22,20,9,39,48,68,80,82,61,47,29,16,17,16,25,25,27,15,9
uSF2,DE,004,01,0000397,1556,717,57,75,62,35,22,12,12,29,64,68,58,60,32,31,21,6,6,16,11,17,12,8,3,839,57,55,49,41,22,10,14,38,65,64,80,91,50,50,28,13,22,6,14,21,21,9,19
uSF2,DE,004,01,0000398,688,320,28,37,30,26,10,6,5,8,21,28,19,28,22,20,11,4,2,2,4,4,5,0,0,368,26,34,30,14,8,4,0,14,25,38,36,50,21,30,9,4,2,2,9,4,5,3,0
uSF2,DE,004,01,0000399,1209,570,74,76,88,44,28,11,1,13,39,42,41,32,32,17,11,5,4,4,5,1,1,0,1,639,54,64,73,44,18,14,9,32,57,63,66,40,41,22,13,6,6,4,3,4,3,3,0
uSF2,DE,004,01,0000400,527,239,25,32,39,8,7,2,3,10,18,24,26,20,13,7,1,1,0,0,1,1,0,0,1,288,29,35,33,14,5,4,1,8,31,43,26,29,13,6,4,0,1,0,4,0,2,0,0
uSF2,DE,004,01,0000401,1597,688,88,101,66,38,19,8,10,23,66,67,58,37,27,25,15,4,5,5,6,6,11,2,1,909,96,83,79,41,29,10,9,47,104,85,80,62,64,32,22,5,10,2,10,17,12,6,4
uSF2,DE,004,01,0000402,837,372,37,31,34,16,11,2,8,13,38,45,41,35,21,15,10,0,5,0,2,4,3,0,1,465,38,39,34,21,6,3,3,21,62,55,48,42,33,23,12,2,2,5,7,2,4,1,2
uSF2,DE,004,01,0000403,271,138,8,18,20,11,4,0,0,5,3,7,13,13,14,7,5,3,2,2,1,1,0,1,0,133,4,15,18,6,4,2,0,1,2,12,20,11,10,8,6,1,4,1,2,3,1,2,0
uSF2,DE,004,01,0000404,1012,448,54,54,52,20,11,11,11,27,38,30,37,42,16,21,10,3,5,3,0,2,0,1,0,564,74,51,58,30,22,17,17,31,50,55,40,47,27,19,7,2,2,0,4,3,4,1,3
uSF2,DE,004,01,0000405,317,139,10,16,12,12,4,1,2,7,12,5,12,11,9,10,5,3,4,2,0,1,0,0,1,178,7,20,17,9,3,3,2,4,13,18,16,19,17,12,7,1,5,1,0,0,2,2,0
uSF2,DE,004,01,0000406,713,332,29,38,35,12,4,3,4,19,40,39,26,17,22,15,11,2,5,5,1,1,1,2,1,381,32,37,14,11,7,2,5,13,55,39,43,29,34,26,13,4,5,2,1,4,4,1,0
uSF2,DE,004,01,0000407,1994,877,125,127,104,58,16,8,4,19,58,59,57,57,49,42,25,12,15,6,11,11,7,5,2,1117,109,121,100,49,32,19,27,37,128,93,77,91,79,55,35,15,15,10,3,10,10,1,1
uSF2,DE,004,01,0000408,362,167,10,13,11,5,2,2,1,3,11,8,14,20,14,25,8,3,4,1,4,3,2,3,0,195,15,14,12,9,3,0,1,6,14,13,15,11,29,16,13,4,5,3,3,3,3,1,2
uSF2,DE,004,01,0000410,238,113,3,9,10,8,6,2,1,2,5,2,5,12,11,8,11,4,2,3,2,4,2,1,0,125,7,6,10,8,5,1,1,2,2,10,5,8,18,16,9,4,1,3,2,3,2,1,1
uSF2,DE,004,01,0000412,135,57,3,7,3,4,1,2,1,2,3,6,7,2,5,4,2,0,1,1,1,0,1,1,0,78,4,3,8,6,2,1,3,2,11,6,6,3,9,6,3,1,0,1,0,1,1,0,1
uSF2,DE,004,01,0000413,192,95,1,7,6,12,4,1,2,2,1,5,4,8,12,8,8,4,3,1,2,3,1,0,0,97,3,5,9,5,0,1,0,1,2,6,4,16,15,10,11,1,0,2,1,2,3,0,0
uSF2,DE,004,01,0000414,713,314,32,26,27,10,8,0,3,17,39,34,31,24,20,19,11,3,4,1,1,2,0,1,1,399,36,30,35,12,11,1,3,17,51,53,48,23,31,21,13,3,6,0,4,0,0,0,1
uSF2,DE,004,01,0000415,278,133,11,9,12,12,0,2,2,3,7,9,7,13,9,15,9,2,5,2,1,0,2,1,0,145,3,9,18,8,3,0,1,4,12,9,5,17,20,13,8,2,4,1,3,2,3,0,0
uSF2,DE,004,01,0000417,141,67,8,4,7,4,1,1,0,1,1,3,2,8,2,5,10,1,2,1,1,2,3,0,0,74,6,6,3,3,5,2,0,3,1,3,6,9,5,4,6,1,2,0,2,3,3,0,1
uSF2,DE,004,01,0000418,105,45,2,2,4,2,2,2,1,2,2,1,2,5,3,3,7,2,2,0,0,0,0,0,1,60,5,3,2,5,1,0,0,3,4,2,3,7,3,8,6,2,2,0,1,1,1,0,1
uSF2,DE,004,01,0000419,103,52,4,3,0,0,0,1,0,3,4,3,4,3,2,5,6,4,3,2,1,1,0,2,1,51,4,3,4,0,1,0,0,0,5,4,4,1,4,5,6,2,1,2,1,0,1,0,3
uSF2,DE,004,01,0000425,577,280,19,22,20,9,9,2,3,5,20,21,30,23,19,16,9,11,12,6,6,6,4,6,2,297,14,23,22,8,4,1,4,11,13,13,33,26,26,14,15,10,13,6,12,5,10,5,9
uSF2,DE,004,01,0000426,145,71,6,11,7,1,4,3,0,3,2,6,7,9,5,2,0,1,1,2,0,0,0,0,1,74,2,7,9,2,5,1,1,4,7,7,12,3,5,3,2,0,1,0,2,0,0,1,0
uSF2,DE,004,01,0000427,695,334,29,40,49,20,9,4,5,11,30,33,28,24,12,12,9,1,4,1,1,4,5,1,2,361,32,29,40,10,8,5,3,25,31,36,32,38,22,21,15,2,5,2,1,2,0,2,0
uSF2,DE,004,01,0000428,215,113,15,13,8,8,7,1,3,10,8,8,5,8,6,7,2,0,0,0,2,1,0,1,0,102,10,5,9,3,4,2,1,6,11,9,13,12,10,2,4,0,0,1,0,0,0,0,0
uSF2,DE,004,01,0000429,358,172,11,17,22,9,7,0,4,11,17,12,25,16,6,8,2,3,0,0,0,1,1,0,0,186,11,14,22,10,8,2,2,8,12,28,17,20,9,10,6,3,1,2,0,0,0,1,0
uSF2,DE,004,01,0000430,285,120,10,10,16,6,2,1,0,6,9,18,10,9,6,4,6,1,2,1,2,1,0,0,0,165,19,12,11,7,10,4,5,9,12,19,11,14,13,8,4,0,1,2,1,1,2,0,0
uSF2,DE,004,01,0000432,494,209,11,13,18,8,7,2,1,11,8,13,22,8,16,14,17,2,5,9,5,7,4,5,3,285,15,22,27,17,5,1,2,6,10,20,18,17,23,21,12,5,8,5,4,14,11,11,11
uSF2,DE,004,01,0000433,897,396,62,54,38,21,14,12,8,16,32,26,30,32,19,13,6,3,4,1,2,2,0,1,0,501,56,58,33,28,13,7,7,41,50,46,52,39,29,23,4,0,1,3,8,2,0,0,1
uSF2,DE,004,01,0000435,198,99,11,12,5,3,2,1,3,10,18,6,8,9,4,5,0,2,0,0,0,0,0,0,0,99,13,3,5,3,5,1,0,11,15,7,15,6,6,4,1,1,0,0,1,0,2,0,0
uSF2,DE,004,01,0000436,138,73,6,9,15,4,3,0,0,2,5,7,6,8,2,0,2,1,1,1,1,0,0,0,0,65,2,10,7,2,0,0,0,2,5,9,6,6,7,3,2,2,1,1,0,0,0,0,0
uSF2,DE,004,01,0000439,97,51,2,8,5,3,1,0,1,0,1,3,5,8,4,6,3,0,0,0,1,0,0,0,0,46,1,4,4,6,0,0,0,0,1,3,6,4,3,8,2,1,0,0,0,1,0,2,0
uSF2,DE,004,01,0000440,245,117,9,7,6,5,6,1,0,5,3,5,11,12,12,8,9,3,2,2,3,3,3,1,1,128,7,8,8,4,3,1,1,4,4,6,10,14,10,15,7,1,5,2,0,6,3,4,5
uSF2,DE,004,01,0000441,207,97,6,8,5,6,6,0,1,5,2,5,5,11,12,17,5,1,0,1,1,0,0,0,0,110,9,10,3,10,2,0,1,5,2,8,8,12,18,12,4,0,0,2,1,3,0,0,0
uSF2,DE,004,01,0000442,151,70,3,6,4,2,1,0,2,5,8,5,15,5,3,4,3,0,1,2,1,0,0,0,0,81,6,8,6,2,4,0,1,6,5,6,6,12,6,5,2,2,2,0,0,0,2,0,0
uSF2,DE,004,01,0000443,284,140,9,5,11,5,3,0,0,4,16,20,13,12,10,17,8,0,2,2,1,1,0,0,1,144,12,6,2,4,3,2,4,6,13,13,15,12,16,13,8,6,3,4,1,1,0,0,0
uSF2,DE,004,01,0000444,149,84,6,2,4,2,3,2,3,10,7,4,6,15,3,7,4,1,2,1,0,1,0,1,0,65,4,2,4,3,3,0,2,3,7,6,7,7,4,3,5,1,0,1,0,2,0,1,0
uSF2,DE,004,01,0000445,476,220,17,17,15,12,3,3,1,12,24,30,15,25,19,10,5,5,2,1,0,2,1,1,0,256,24,17,15,4,5,2,2,20,27,21,27,30,21,20,9,1,3,2,3,2,1,0,0
uSF2,DE,004,01,0000446,182,88,3,5,4,10,1,3,2,7,9,4,6,11,7,12,3,0,0,0,0,0,1,0,0,94,3,6,14,6,4,0,5,7,1,12,4,8,13,7,2,0,1,0,0,0,1,0,0
uSF2,DE,004,01,0000447,260,132,7,11,9,8,2,0,1,9,13,6,13,16,13,13,4,3,1,1,0,0,1,1,0,128,5,9,7,2,2,0,2,6,11,17,11,15,14,8,9,2,5,1,1,0,0,1,0
uSF2,DE,004,01,0000448,94,41,1,2,4,0,0,3,2,0,3,5,3,7,1,2,3,2,0,0,0,2,0,1,0,53,6,1,1,1,2,1,0,2,4,4,5,6,4,3,3,0,2,1,1,2,3,1,0
uSF2,DE,004,01,0000449,197,94,10,8,10,3,1,3,0,4,4,6,7,11,2,11,6,1,4,0,1,1,1,0,0,103,6,6,6,2,3,1,3,4,7,6,9,11,10,7,8,2,2,0,3,3,0,3,1
uSF2,DE,004,01,0000450,575,295,32,16,14,5,13,9,7,26,55,27,23,20,20,13,3,1,5,2,3,0,1,0,0,280,35,17,16,14,8,3,7,33,35,23,27,15,14,9,5,4,3,4,2,2,1,1,2
uSF2,DE,004,01,0000451,576,278,22,20,23,17,2,3,0,12,34,22,22,27,14,25,10,7,8,1,2,3,2,1,1,298,23,15,17,14,4,1,4,11,35,22,32,28,26,22,17,4,7,1,2,5,3,5,0
uSF2,DE,004,01,0000452,596,285,21,24,22,8,5,2,2,9,30,35,26,26,19,23,19,4,4,2,2,1,1,0,0,311,29,24,22,11,9,4,0,16,48,29,23,21,21,28,16,1,5,1,0,0,2,1,0
uSF2,DE,004,01,0000453,1874,890,71,87,78,53,28,12,14,40,68,79,86,87,60,59,27,9,11,5,5,5,5,1,0,984,78,88,79,54,24,10,12,35,77,93,111,107,68,57,37,6,17,5,8,9,7,2,0
uSF2,DE,004,01,0000454,991,477,44,41,42,12,13,10,4,37,66,44,38,32,41,14,13,3,7,2,4,4,3,1,2,514,31,52,34,11,19,12,14,50,65,43,54,38,33,24,12,6,7,2,0,4,2,1,0
uSF2,DE,004,01,0000455,985,428,60,53,61,26,14,6,4,16,27,19,27,43,29,19,5,5,7,0,3,2,2,0,0,557,73,50,49,22,21,17,19,35,44,46,42,35,37,26,14,2,6,1,3,4,5,4,2
uSF2,DE,004,01,0000457,260,115,5,11,6,5,0,2,0,4,2,11,5,4,8,16,15,2,4,2,1,5,4,3,0,145,2,8,9,7,4,2,1,4,3,5,11,9,14,17,9,3,3,2,4,10,5,5,8
uSF2,DE,004,01,0000458,146,74,4,2,3,0,1,0,3,17,11,11,4,3,1,4,2,3,1,2,1,1,0,0,0,72,3,4,1,1,4,1,4,15,9,3,7,3,4,2,6,0,1,0,2,0,0,1,1
uSF2,DE,004,01,0000459,281,155,10,11,20,3,7,8,10,21,26,10,8,7,8,3,1,1,1,0,0,0,0,0,0,126,5,15,12,2,5,1,6,6,13,17,13,6,6,7,4,1,2,3,2,0,0,0,0
uSF2,DE,004,01,0000460,161,77,4,6,7,2,3,2,0,3,7,6,4,12,5,2,6,1,2,3,0,0,0,2,0,84,7,10,7,5,2,1,0,2,6,3,6,9,9,6,4,0,3,1,1,1,0,0,1
uSF2,DE,004,01,0000461,152,46,5,11,7,2,1,2,0,4,2,2,2,1,1,0,3,0,1,0,0,1,0,0,1,106,6,9,16,9,5,1,2,3,6,9,8,4,2,2,1,0,4,0,6,6,2,1,4
uSF2,DE,004,01,0000462,94,47,1,8,1,5,0,6,6,2,2,6,2,3,0,0,1,0,1,0,0,2,0,1,0,47,1,2,7,5,2,0,0,3,3,5,3,3,1,3,2,0,1,0,3,3,0,0,0
uSF2,DE,004,01,0000463,217,106,4,7,11,4,2,0,1,2,10,6,9,14,7,7,8,3,1,1,2,4,3,0,0,111,3,6,11,5,2,0,3,4,4,8,7,12,11,6,9,3,3,2,2,2,5,1,2
uSF2,DE,004,01,0000464,618,306,28,25,17,10,5,5,6,28,44,28,27,23,19,16,8,4,4,0,3,3,2,0,1,312,25,24,19,16,11,3,5,15,43,25,29,22,20,15,18,3,3,2,0,11,0,3,0
uSF2,DE,004,01,0000465,707,326,15,31,26,14,5,4,5,15,25,37,26,30,21,29,20,4,3,3,4,5,4,0,0,381,29,27,34,28,10,2,2,12,37,22,36,34,41,21,18,1,5,5,6,5,5,1,0
uSF2,DE,004,01,0000466,586,263,24,33,30,21,6,4,7,11,16,21,19,29,13,7,14,2,1,1,3,0,1,0,0,323,31,33,34,18,9,8,3,12,26,20,37,32,19,17,9,0,3,1,3,3,2,2,1
uSF2,DE,004,01,0000467,232,114,13,2,8,3,2,2,3,2,11,14,9,12,12,10,6,2,1,0,2,0,0,0,0,118,6,16,6,6,6,2,0,0,6,22,14,14,4,8,3,0,1,2,0,1,0,1,0
uSF2,DE,004,01,0000468,876,448,37,46,51,36,13,5,0,8,33,48,39,43,32,20,14,2,6,3,5,4,1,1,1,428,37,42,30,14,9,4,4,8,32,55,59,47,31,21,10,4,3,6,2,4,2,1,3
uSF2,DE,004,01,0000469,1957,972,84,103,105,57,27,13,10,15,56,87,104,84,69,67,36,11,17,6,9,6,4,2,0,985,75,84,78,41,21,4,8,33,68,110,110,107,79,71,37,12,17,5,8,6,2,4,5
uSF2,DE,004,01,0000470,1078,530,53,59,52,26,13,6,5,22,48,59,52,36,36,27,12,5,5,3,5,1,3,1,1,548,50,52,55,36,16,6,9,13,52,64,59,41,33,17,17,4,6,1,3,3,5,4,2
uSF2,DE,004,01,0000471,1176,570,54,50,56,40,18,9,5,23,45,57,55,56,33,26,23,4,3,1,3,6,2,0,1,606,54,43,58,16,13,6,6,20,50,70,62,72,41,42,16,7,9,0,1,12,5,0,3
uSF2,DE,004,01,0000472,2855,1287,161,165,138,57,31,12,18,59,120,143,131,81,60,52,27,10,10,1,4,3,3,1,0,1568,165,170,111,61,28,19,31,83,154,196,159,125,106,64,39,8,15,7,8,11,4,4,0
uSF2,DE,004,01,0000473,2617,1280,135,185,181,88,34,12,12,36,95,127,119,79,57,51,36,7,7,3,9,2,2,2,1,1337,127,164,142,79,31,17,7,32,96,182,136,117,94,51,30,9,4,3,5,5,2,1,3
uSF2,DE,004,01,0000474,1024,476,37,41,42,30,18,2,5,13,24,39,57,44,37,28,22,9,8,2,3,8,4,2,1,548,43,42,49,23,9,4,7,26,29,51,62,58,42,40,19,5,7,9,6,9,5,2,1
uSF2,DE,004,01,0000475,3155,1361,140,180,152,72,39,15,11,54,127,160,134,89,54,49,31,9,12,7,6,11,4,4,1,1794,172,170,163,65,40,13,26,83,188,207,208,146,116,68,45,13,15,14,10,15,10,4,3
uSF2,DE,004,01,0000476,1256,568,43,55,60,28,15,9,8,40,36,39,50,51,38,37,23,7,15,2,4,1,5,2,0,688,60,53,54,42,20,6,10,40,57,71,66,56,52,48,17,8,9,3,3,4,6,2,1
uSF2,DE,004,01,0000477,347,155,12,8,16,10,4,0,2,8,10,9,11,12,10,14,10,3,6,2,3,2,0,3,0,192,13,17,9,10,10,2,0,8,10,16,15,12,21,15,13,3,1,0,4,2,8,1,2
uSF2,DE,004,01,0000478,592,285,32,25,26,12,12,5,1,9,21,32,28,21,19,8,12,4,9,4,1,2,1,0,1,307,28,31,26,13,12,7,5,11,21,29,28,34,26,10,9,1,1,4,5,3,0,2,1
uSF2,DE,004,01,0000479,2794,1288,85,116,141,88,49,14,7,38,68,66,93,64,95,52,72,28,31,15,31,51,41,28,15,1506,61,123,120,77,36,20,21,35,79,96,107,119,110,80,77,33,40,25,43,81,62,38,23
uSF2,DE,004,01,0000480,1577,755,60,92,67,46,24,8,3,25,38,58,45,39,47,43,40,18,20,16,17,26,11,10,2,822,53,67,74,36,18,12,5,27,49,55,59,55,69,48,48,18,30,14,17,33,18,8,9
uSF2,DE,004,01,0000481,1220,565,30,54,51,36,18,10,9,20,24,29,40,41,35,50,34,19,18,5,15,15,6,4,2,655,35,47,56,32,26,9,10,15,29,47,37,56,64,58,53,13,13,11,10,16,10,1,7
uSF2,DE,004,01,0000482,185,89,6,11,7,7,5,1,0,2,2,4,8,6,3,9,8,0,1,2,0,3,2,1,1,96,6,10,9,8,2,2,0,3,5,5,12,6,9,3,6,0,1,0,0,1,3,1,4
uSF2,DE,004,01,0000483,589,290,23,24,42,20,14,2,2,8,14,14,27,25,26,15,7,3,6,7,5,3,3,0,0,299,21,31,21,16,11,2,0,2,20,23,38,34,22,14,12,6,6,2,5,3,6,3,1
uSF2,DE,004,01,0000484,1111,534,44,38,59,36,19,6,2,15,29,43,35,47,42,35,33,16,9,6,6,5,6,1,2,577,37,50,41,28,13,4,9,25,25,45,59,47,39,48,48,4,14,5,8,16,4,4,4
uSF2,DE,004,01,0000485,448,194,14,18,22,12,5,3,6,10,9,13,19,12,10,12,9,5,4,1,3,2,3,1,1,254,15,17,23,14,6,1,6,6,17,23,17,20,24,24,11,7,2,1,6,5,3,0,6
uSF2,DE,004,01,0000486,202,91,6,5,10,7,3,1,0,3,4,3,8,8,4,13,4,2,2,1,1,3,0,3,0,111,5,7,12,3,4,3,2,2,4,6,12,8,9,8,8,3,2,2,1,1,5,3,1
uSF2,DE,004,01,0000487,476,236,19,23,14,19,9,1,4,6,14,22,24,25,21,9,8,2,8,3,1,1,3,0,0,240,19,29,21,7,8,2,1,5,8,24,28,27,27,7,11,4,5,2,0,0,3,2,0
uSF2,DE,004,01,0000488,1847,840,72,105,86,48,24,4,7,12,49,102,100,71,58,52,26,7,5,3,0,2,5,2,0,1007,100,91,105,44,29,13,7,24,73,131,126,92,63,46,28,6,3,4,4,6,3,7,2
uSF2,DE,004,01,0000489,1761,841,69,74,64,46,20,13,8,34,63,57,66,76,69,56,53,14,17,13,8,10,6,4,1,920,65,64,59,41,16,16,13,41,80,91,71,65,95,77,44,13,27,8,11,10,6,3,4
uSF2,DE,004,01,0000490,501,266,34,40,32,13,5,0,0,5,9,22,35,29,16,10,7,4,2,0,2,0,1,0,0,235,21,25,17,13,10,2,0,4,8,29,41,26,17,7,4,2,3,1,2,2,1,0,0
uSF2,DE,004,01,0000491,197,90,3,6,10,4,3,1,0,2,3,7,10,10,3,4,3,6,4,1,0,6,2,1,1,107,4,10,10,7,1,1,0,0,3,9,6,9,7,7,5,6,3,0,2,4,4,4,5
uSF2,DE,004,01,0000492,425,201,21,17,22,15,5,1,1,5,13,21,25,11,7,17,11,2,4,0,1,0,1,0,1,224,23,17,21,12,8,6,3,11,10,23,18,11,26,12,8,1,3,1,0,3,5,0,2
uSF2,DE,004,01,0000493,237,123,9,11,14,11,3,1,0,2,4,3,10,24,10,9,3,2,2,0,1,2,2,0,0,114,12,15,6,5,0,0,2,4,2,8,15,13,9,8,3,2,2,2,3,2,0,0,1
uSF2,DE,004,01,0000494,165,98,5,11,9,5,9,0,1,3,6,6,6,5,7,8,10,2,1,0,1,3,0,0,0,67,4,1,6,1,1,0,1,2,6,6,5,4,12,9,6,1,0,1,1,0,0,0,0
uSF2,DE,004,01,0000495,1150,503,50,60,62,31,18,8,5,15,25,28,32,44,34,32,16,4,7,5,2,11,10,2,2,647,51,69,52,35,13,13,10,17,26,48,67,55,53,38,24,6,14,4,10,20,10,8,4
uSF2,DE,004,01,0000496,190,93,2,5,14,2,0,0,1,0,9,4,9,6,4,8,7,2,3,4,8,0,1,2,2,97,4,5,6,2,1,0,2,0,2,2,12,5,11,3,9,2,7,5,2,5,2,4,6
uSF2,DE,004,01,0000497,269,123,8,8,9,5,3,0,0,6,3,8,8,11,10,11,8,6,4,3,3,6,2,1,0,146,7,8,11,10,5,1,1,7,7,11,7,12,14,13,5,5,4,1,2,5,2,3,5
uSF2,DE,004,01,0000499,35,17,0,1,1,0,1,1,0,0,0,1,0,3,2,1,1,0,0,2,1,0,0,1,1,18,0,0,0,3,0,0,1,0,1,1,0,1,3,2,3,0,1,0,0,0,2,0,0
uSF2,DE,004,01,0000500,22057,10182,1005,1087,1082,670,350,137,131,317,507,679,787,765,627,487,392,127,189,117,159,234,182,107,44,11875,884,1054,1102,631,378,189,155,452,661,898,987,945,791,613,460,189,188,143,233,344,285,178,115
uSF2,DE,004,01,0000501,1827,844,92,88,97,46,28,9,5,25,44,61,74,62,51,44,28,11,8,10,10,19,20,8,4,983,84,99,85,49,29,15,11,36,54,95,76,64,48,55,25,16,13,18,20,27,32,17,15
uSF2,DE,004,01,0000502,453,195,33,25,16,11,8,1,1,2,9,11,10,16,12,9,9,2,1,3,4,7,3,2,0,258,27,29,16,9,9,4,4,14,18,22,21,10,13,12,5,1,3,6,5,11,10,4,5
uSF2,DE,004,01,0000503,453,195,33,25,16,11,8,1,1,2,9,11,10,16,12,9,9,2,1,3,4,7,3,2,0,258,27,29,16,9,9,4,4,14,18,22,21,10,13,12,5,1,3,6,5,11,10,4,5
uSF2,DE,004,01,0000504,189,89,10,10,8,4,2,1,2,7,3,7,7,6,7,3,1,0,1,1,0,2,4,3,0,100,8,8,10,5,4,4,2,5,6,10,11,3,3,2,3,0,1,3,0,3,4,2,3
uSF2,DE,004,01,0000505,189,89,10,10,8,4,2,1,2,7,3,7,7,6,7,3,1,0,1,1,0,2,4,3,0,100,8,8,10,5,4,4,2,5,6,10,11,3,3,2,3,0,1,3,0,3,4,2,3
uSF2,DE,004,01,0000506,1185,560,49,53,73,31,18,7,2,16,32,43,57,40,32,32,18,9,6,6,6,10,13,3,4,625,49,62,59,35,16,7,5,17,30,63,44,51,32,41,17,15,9,9,15,13,18,11,7
uSF2,DE,004,01,0000507,574,276,19,18,30,19,7,5,2,8,15,14,23,21,20,18,14,4,3,5,5,9,12,2,3,298,22,21,29,12,7,5,3,7,5,23,17,15,19,21,12,13,6,9,12,13,11,9,7
uSF2,DE,004,01,0000508,611,284,30,35,43,12,11,2,0,8,17,29,34,19,12,14,4,5,3,1,1,1,1,1,1,327,27,41,30,23,9,2,2,10,25,40,27,36,13,20,5,2,3,0,3,0,7,2,0
uSF2,DE,004,01,0000509,1451,667,64,79,60,50,37,13,7,25,34,53,46,46,48,25,12,5,19,8,9,7,9,9,2,784,57,87,75,43,42,15,9,29,40,58,58,57,49,45,28,5,9,14,19,14,15,11,5
uSF2,DE,004,01,0000510,912,407,46,49,32,32,26,11,4,16,22,29,25,28,28,12,4,3,10,5,6,4,6,8,1,505,45,60,44,17,27,12,6,21,28,32,32,37,22,30,21,4,5,12,11,13,12,10,4
uSF2,DE,004,01,0000511,903,402,46,49,32,32,25,10,4,16,21,28,25,28,28,11,4,3,10,5,6,4,6,8,1,501,45,59,44,17,27,11,6,21,28,31,32,37,21,30,21,4,5,12,11,13,12,10,4
uSF2,DE,004,01,0000512,539,260,18,30,28,18,11,2,3,9,12,24,21,18,20,13,8,2,9,3,3,3,3,1,1,279,12,27,31,26,15,3,3,8,12,26,26,20,27,15,7,1,4,2,8,1,3,1,1
uSF2,DE,004,01,0000513,281,132,9,10,16,6,6,1,1,6,9,9,9,10,13,8,3,1,8,1,1,2,1,1,1,149,6,12,18,17,8,2,1,3,8,12,13,9,17,8,4,1,2,2,5,0,0,1,0
uSF2,DE,004,01,0000514,258,128,9,20,12,12,5,1,2,3,3,15,12,8,7,5,5,1,1,2,2,1,2,0,0,130,6,15,13,9,7,1,2,5,4,14,13,11,10,7,3,0,2,0,3,1,3,0,1
uSF2,DE,004,01,0000515,2779,1255,167,132,144,86,50,10,27,31,73,90,85,77,66,52,34,17,18,18,17,25,15,16,5,1524,135,128,145,81,63,36,26,56,92,112,125,109,87,56,53,22,18,23,29,53,35,28,12
uSF2,DE,004,01,0000518,273,125,19,16,14,11,5,1,3,7,9,6,6,7,5,2,4,2,0,4,0,1,0,3,0,148,21,17,7,6,4,2,0,9,16,14,11,17,4,2,6,1,0,0,2,5,0,2,2
uSF2,DE,004,01,0000519,273,125,19,16,14,11,5,1,3,7,9,6,6,7,5,2,4,2,0,4,0,1,0,3,0,148,21,17,7,6,4,2,0,9,16,14,11,17,4,2,6,1,0,0,2,5,0,2,2
uSF2,DE,004,01,0000520,1446,624,109,64,79,53,27,5,12,14,36,50,32,32,26,21,9,5,7,6,7,15,6,7,2,822,83,77,88,34,44,29,25,33,50,54,67,43,39,21,17,9,10,13,17,30,16,16,7
uSF2,DE,004,01,0000521,388,153,44,23,27,7,8,1,6,3,8,9,0,5,2,4,3,0,0,0,0,1,0,2,0,235,28,19,23,6,25,16,15,13,8,13,16,12,4,3,5,0,5,3,3,8,3,6,1
uSF2,DE,004,01,0000522,1058,471,65,41,52,46,19,4,6,11,28,41,32,27,24,17,6,5,7,6,7,14,6,5,2,587,55,58,65,28,19,13,10,20,42,41,51,31,35,18,12,9,5,10,14,22,13,10,6
uSF2,DE,004,01,0000523,1055,503,38,52,51,22,17,4,12,10,27,34,47,38,35,29,21,10,11,8,10,9,9,6,3,552,31,34,50,41,15,4,1,14,25,44,47,49,44,33,30,12,8,10,10,18,19,10,3
uSF2,DE,004,01,0000524,200,97,11,10,8,6,3,1,3,0,7,6,15,10,4,5,1,0,2,1,3,1,0,0,0,103,9,9,13,6,2,1,1,4,7,13,9,11,6,3,4,0,2,1,0,0,0,2,0
uSF2,DE,004,01,0000525,268,138,4,9,20,6,3,1,3,5,7,13,12,9,10,10,6,5,1,6,2,3,1,1,1,130,6,7,13,7,1,0,0,6,5,10,11,9,14,10,8,4,3,2,5,3,3,3,0
uSF2,DE,004,01,0000526,112,57,5,9,0,0,3,0,0,2,5,4,9,4,5,3,2,0,3,0,1,1,1,0,0,55,4,4,1,4,3,1,0,1,4,6,6,7,3,1,4,2,0,0,1,0,2,1,0
uSF2,DE,004,01,0000528,411,180,14,20,21,9,4,1,6,3,7,11,8,12,15,9,10,5,5,1,4,4,5,4,2,231,10,13,20,24,9,2,0,2,5,14,14,20,17,18,13,6,3,6,3,15,10,4,3
uSF2,DE,004,01,0000529,1296,594,64,57,49,39,20,4,9,13,27,47,43,48,34,31,23,12,9,11,12,20,12,7,3,702,58,56,54,40,17,6,9,25,49,55,44,59,35,47,28,6,17,3,15,30,28,9,12
uSF2,DE,004,01,0000534,263,104,14,6,9,7,3,0,2,3,2,4,11,9,10,1,4,2,1,1,4,6,4,0,1,159,14,13,7,10,2,0,3,9,15,6,9,13,3,13,8,0,5,2,4,10,7,4,2
uSF2,DE,004,01,0000535,263,104,14,6,9,7,3,0,2,3,2,4,11,9,10,1,4,2,1,1,4,6,4,0,1,159,14,13,7,10,2,0,3,9,15,6,9,13,3,13,8,0,5,2,4,10,7,4,2
uSF2,DE,004,01,0000538,1024,484,50,51,40,31,17,4,7,10,24,42,31,39,24,29,19,10,8,9,8,14,8,7,2,540,44,43,47,29,15,6,6,16,33,49,35,46,32,34,20,5,12,1,11,20,21,5,10
uSF2,DE,004,01,0000540,364,192,20,16,21,8,9,0,1,5,5,15,10,23,7,13,13,2,4,4,5,6,2,2,1,172,10,12,9,7,7,3,5,4,7,18,6,18,18,14,4,0,6,0,7,7,9,1,0
uSF2,DE,004,01,0000542,504,217,27,29,17,20,3,3,5,5,14,19,15,12,10,5,5,5,4,4,1,5,4,4,1,287,30,27,31,17,7,3,1,10,21,27,20,22,10,13,12,5,3,1,2,11,9,2,3
uSF2,DE,004,01,0000544,2972,1387,124,148,143,97,49,27,26,47,50,85,143,109,75,62,54,17,21,16,17,32,32,8,5,1585,94,157,156,92,45,20,29,57,75,109,157,135,98,83,62,30,29,16,33,47,32,17,12
uSF2,DE,004,01,0000545,122,61,4,10,8,2,0,0,2,2,1,4,7,4,1,4,3,1,2,0,2,1,3,0,0,61,2,3,8,2,2,0,1,1,3,4,6,4,5,5,4,3,2,2,3,0,1,0,0
uSF2,DE,004,01,0000546,122,61,4,10,8,2,0,0,2,2,1,4,7,4,1,4,3,1,2,0,2,1,3,0,0,61,2,3,8,2,2,0,1,1,3,4,6,4,5,5,4,3,2,2,3,0,1,0,0
uSF2,DE,004,01,0000547,345,169,23,16,15,9,6,3,5,8,8,9,20,19,10,8,5,1,0,1,0,2,0,1,0,176,12,17,11,10,8,5,8,16,14,13,14,11,7,11,6,0,1,1,1,3,5,2,0
uSF2,DE,004,01,0000549,328,160,22,14,11,9,6,3,5,8,8,9,18,19,10,8,5,1,0,1,0,2,0,1,0,168,12,15,10,8,8,4,8,16,14,12,13,11,7,11,6,0,1,1,1,3,5,2,0
uSF2,DE,004,01,0000552,2505,1157,97,122,120,86,43,24,19,37,41,72,116,86,64,50,46,15,19,15,15,29,29,7,5,1348,80,137,137,80,35,15,20,40,58,92,137,120,86,67,52,27,26,13,29,44,26,15,12
uSF2,DE,004,01,0000553,176,90,5,7,10,6,7,2,1,2,1,4,11,10,7,1,4,1,2,2,0,4,3,0,0,86,3,5,8,6,2,2,2,1,1,6,10,7,10,10,4,1,1,1,2,4,0,0,0
uSF2,DE,004,01,0000554,1326,612,47,71,73,40,20,11,11,17,17,45,61,48,33,23,25,9,11,6,6,13,19,4,2,714,45,86,67,42,13,3,6,25,26,55,67,66,40,31,27,15,17,8,13,26,15,12,9
uSF2,DE,004,01,0000555,135,64,5,7,4,4,3,0,2,4,3,5,6,1,7,6,3,1,0,0,0,1,1,1,0,71,4,5,7,7,8,0,0,0,5,6,4,4,9,3,3,0,1,0,3,2,0,0,0
uSF2,DE,004,01,0000556,868,391,40,37,33,36,13,11,5,14,20,18,38,27,17,20,14,4,6,7,9,11,6,2,3,477,28,41,55,25,12,10,12,14,26,25,56,43,27,23,18,11,7,4,11,12,11,3,3
uSF2,DE,004,01,0000557,2538,1170,82,116,90,69,31,14,9,40,68,94,88,104,81,60,58,14,34,11,19,35,19,27,7,1368,112,107,123,72,31,10,21,54,67,95,112,132,92,78,59,25,22,12,37,34,30,26,17
uSF2,DE,004,01,0000560,442,171,23,29,12,7,4,1,2,6,15,12,9,8,8,6,5,2,6,2,1,4,3,6,0,271,33,22,25,12,3,2,5,18,20,18,18,22,11,16,8,5,1,0,8,7,7,4,6
uSF2,DE,004,01,0000561,442,171,23,29,12,7,4,1,2,6,15,12,9,8,8,6,5,2,6,2,1,4,3,6,0,271,33,22,25,12,3,2,5,18,20,18,18,22,11,16,8,5,1,0,8,7,7,4,6
uSF2,DE,004,01,0000562,2089,997,59,87,78,62,27,13,7,34,53,82,79,96,72,54,52,12,28,9,18,31,16,21,7,1092,79,84,97,60,28,8,16,36,47,77,93,109,81,61,51,20,21,12,29,27,23,22,11
uSF2,DE,004,01,0000563,381,173,13,8,8,16,7,3,0,6,6,17,19,19,14,12,7,1,6,0,3,3,3,2,0,208,16,16,23,14,3,1,3,13,6,16,15,25,31,5,7,3,1,0,3,2,2,2,1
uSF2,DE,004,01,0000564,342,157,5,16,10,8,7,2,0,6,12,11,16,12,15,7,8,0,2,2,7,5,3,3,0,185,15,14,14,12,4,3,1,7,9,13,11,18,10,11,4,6,6,5,9,2,2,7,2
uSF2,DE,004,01,0000565,779,383,30,33,38,18,7,5,5,10,20,21,27,34,23,21,23,8,12,6,4,19,7,7,5,396,21,26,31,18,13,2,7,11,19,23,30,39,27,29,21,9,9,6,12,13,13,11,6
uSF2,DE,004,01,0000566,587,284,11,30,22,20,6,3,2,12,15,33,17,31,20,14,14,3,8,1,4,4,3,9,2,303,27,28,29,16,8,2,5,5,13,25,37,27,13,16,19,2,5,1,5,10,6,2,2
uSF2,DE,004,01,0000567,1496,710,61,72,67,40,24,9,5,17,45,43,64,50,45,32,39,9,19,11,18,15,19,3,3,786,70,63,58,29,20,10,4,33,50,54,57,62,62,44,40,9,24,13,13,23,18,18,12
uSF2,DE,004,01,0000568,391,172,22,29,12,8,5,4,2,4,13,12,4,6,9,14,5,2,2,3,4,4,7,0,1,219,29,15,16,7,7,7,1,14,18,12,11,11,16,15,11,2,5,1,4,5,5,5,2
uSF2,DE,004,01,0000569,321,136,19,24,10,8,5,3,1,4,10,10,2,5,7,6,3,2,2,3,3,4,5,0,0,185,28,13,14,6,5,7,0,14,18,10,10,8,12,10,9,1,3,1,3,5,4,4,0
uSF2,DE,004,01,0000571,1105,538,39,43,55,32,19,5,3,13,32,31,60,44,36,18,34,7,17,8,14,11,12,3,2,567,41,48,42,22,13,3,3,19,32,42,46,51,46,29,29,7,19,12,9,18,13,13,10
uSF2,DE,004,01,0000573,569,276,17,25,29,13,13,1,1,6,17,17,25,21,16,8,21,3,12,5,10,7,7,1,1,293,20,25,23,8,4,2,2,11,18,26,22,24,26,16,16,3,13,2,4,11,5,7,5
uSF2,DE,004,01,0000574,441,213,17,15,17,16,5,4,1,4,13,11,29,19,16,8,12,4,4,2,4,4,5,2,1,228,16,19,15,12,7,1,1,5,11,12,22,23,15,13,11,4,6,8,5,6,7,5,4
uSF2,DE,004,01,0000575,5609,2585,283,306,324,166,90,36,33,89,116,156,191,208,147,126,93,28,28,15,35,47,41,18,9,3024,229,270,305,164,96,55,39,127,175,240,269,236,244,143,103,45,30,27,44,73,57,36,17
uSF2,DE,004,01,0000576,208,99,8,12,16,3,5,1,1,3,5,14,6,9,5,2,7,0,2,0,0,0,0,0,0,109,8,13,8,3,4,2,1,3,6,9,12,6,9,10,3,1,2,2,2,1,1,2,1
uSF2,DE,004,01,0000577,208,99,8,12,16,3,5,1,1,3,5,14,6,9,5,2,7,0,2,0,0,0,0,0,0,109,8,13,8,3,4,2,1,3,6,9,12,6,9,10,3,1,2,2,2,1,1,2,1
uSF2,DE,004,01,0000578,1947,826,139,118,107,42,23,10,10,30,43,36,60,59,39,31,19,3,6,5,10,15,11,4,6,1121,109,107,104,52,41,27,24,70,69,88,96,70,81,30,33,19,13,6,18,26,17,14,7
uSF2,DE,004,01,0000579,383,137,32,22,25,9,3,1,2,3,7,9,14,4,0,0,1,0,0,0,3,2,0,0,0,246,24,26,27,9,12,11,8,14,16,26,27,7,20,4,5,1,0,2,4,3,0,0,0
uSF2,DE,004,01,0000580,1564,689,107,96,82,33,20,9,8,27,36,27,46,55,39,31,18,3,6,5,7,13,11,4,6,875,85,81,77,43,29,16,16,56,53,62,69,63,61,26,28,18,13,4,14,23,17,14,7
uSF2,DE,004,01,0000581,3454,1660,136,176,201,121,62,25,22,56,68,106,125,140,103,93,67,25,20,10,25,32,30,14,3,1794,112,150,193,109,51,26,14,54,100,143,161,160,154,103,67,25,15,19,24,46,39,20,9
uSF2,DE,004,01,0000582,185,99,8,13,9,6,4,0,1,4,2,7,9,9,9,2,6,0,1,1,4,1,1,0,2,86,3,9,11,3,2,3,0,3,5,5,6,10,9,1,4,0,0,2,4,1,4,0,1
uSF2,DE,004,01,0000583,178,91,9,18,15,3,1,1,2,2,6,8,7,3,5,6,1,1,0,2,0,0,0,1,0,87,4,10,10,5,0,1,0,1,6,11,9,8,5,3,4,2,1,2,0,0,5,0,0
uSF2,DE,004,01,0000584,420,192,23,18,19,6,11,5,3,9,8,18,10,16,18,8,2,3,2,0,3,7,2,1,0,228,19,17,24,14,12,8,4,12,13,21,13,26,10,17,4,3,1,3,2,4,0,1,0
uSF2,DE,004,01,0000585,2671,1278,96,127,158,106,46,19,16,41,52,73,99,112,71,77,58,21,17,7,18,24,27,12,1,1393,86,114,148,87,37,14,10,38,76,106,133,116,130,82,55,20,13,12,18,41,30,19,8
uSF2,DE,004,01,0000586,2089,970,68,89,108,77,21,15,10,30,50,50,53,61,80,55,51,14,33,17,22,34,15,11,6,1119,45,87,101,61,35,22,7,35,59,80,89,91,76,62,62,31,26,17,23,43,38,16,13
uSF2,DE,004,01,0000593,250,111,4,6,10,14,3,2,3,3,9,4,5,4,9,7,11,2,3,1,2,7,1,0,1,139,4,16,15,7,4,1,1,6,7,7,8,8,11,8,12,5,3,2,2,1,9,2,0
uSF2,DE,004,01,0000594,250,111,4,6,10,14,3,2,3,3,9,4,5,4,9,7,11,2,3,1,2,7,1,0,1,139,4,16,15,7,4,1,1,6,7,7,8,8,11,8,12,5,3,2,2,1,9,2,0
uSF2,DE,004,01,0000599,253,116,10,10,17,10,1,1,0,2,2,7,9,6,7,5,3,0,3,7,4,5,2,2,3,137,4,7,13,6,5,2,1,4,4,4,9,13,10,5,5,9,5,2,4,10,6,6,3
uSF2,DE,004,01,0000600,253,116,10,10,17,10,1,1,0,2,2,7,9,6,7,5,3,0,3,7,4,5,2,2,3,137,4,7,13,6,5,2,1,4,4,4,9,13,10,5,5,9,5,2,4,10,6,6,3
uSF2,DE,004,01,0000603,1535,720,50,72,79,53,17,12,7,22,36,38,38,50,63,43,36,12,23,9,16,21,12,9,2,815,37,62,71,45,25,18,5,24,44,65,70,68,55,46,43,17,17,13,17,32,23,8,10
uSF2,DE,004,01,0000606,209,92,5,5,6,6,1,0,2,2,2,5,6,11,10,7,8,1,3,1,2,5,1,2,1,117,4,9,7,7,6,3,0,2,8,8,10,6,9,8,6,2,3,2,5,4,4,1,3
uSF2,DE,004,01,0000609,458,216,16,34,36,19,6,3,1,8,8,7,11,11,11,9,9,6,7,1,5,4,2,1,1,242,13,25,28,10,6,5,2,9,17,24,20,17,17,7,11,6,8,2,4,7,1,1,2
uSF2,DE,004,01,0000610,705,328,27,28,32,27,10,8,4,9,18,19,15,22,32,16,16,5,9,5,7,7,6,6,0,377,17,24,28,27,12,8,3,13,15,26,34,34,22,24,22,9,4,8,7,16,13,6,5
uSF2,DE,004,01,0000611,193,99,6,9,14,6,7,2,1,2,1,4,13,10,7,1,4,1,2,2,0,4,3,0,0,94,3,7,9,8,2,3,2,1,1,7,11,7,10,10,4,1,1,1,2,4,0,0,0
uSF2,DE,004,01,0000612,1654,772,69,85,84,49,26,14,16,25,25,54,79,67,43,31,30,10,11,7,6,15,19,5,2,882,57,101,77,50,21,7,14,41,40,67,80,77,47,42,33,15,18,9,14,29,20,14,9
uSF2,DE,004,01,0000613,135,64,5,7,4,4,3,0,2,4,3,5,6,1,7,6,3,1,0,0,0,1,1,1,0,71,4,5,7,7,8,0,0,0,5,6,4,4,9,3,3,0,1,0,3,2,0,0,0
uSF2,DE,004,01,0000614,990,452,44,47,41,38,13,11,7,16,21,22,45,31,18,24,17,5,8,7,11,12,9,2,3,538,30,44,63,27,14,10,13,15,29,29,62,47,32,28,22,14,9,6,14,12,12,3,3
uSF2,DE,004,01,0000615,1216,560,62,53,54,34,17,7,5,17,27,32,40,43,39,30,24,6,5,9,9,18,19,7,3,656,57,58,55,26,20,13,9,26,29,55,49,28,35,35,20,14,10,18,17,27,25,15,15
uSF2,DE,004,01,0000616,611,284,30,35,43,12,11,2,0,8,17,29,34,19,12,14,4,5,3,1,1,1,1,1,1,327,27,41,30,23,9,2,2,10,25,40,27,36,13,20,5,2,3,0,3,0,7,2,0
uSF2,DE,004,01,0000617,568,236,40,35,34,15,7,1,3,7,9,16,23,13,9,2,7,0,1,1,7,3,1,0,2,332,27,35,38,12,14,14,8,17,21,31,33,17,29,5,9,1,0,4,8,4,4,0,1
uSF2,DE,004,01,0000618,1742,780,116,114,97,36,21,10,10,29,42,35,53,58,44,37,19,4,6,7,7,13,11,5,6,962,89,91,87,48,29,17,16,57,59,73,78,71,66,29,32,20,14,6,14,23,22,14,7
uSF2,DE,004,01,0000619,628,291,31,30,35,9,16,6,4,12,13,32,16,25,23,10,9,3,4,0,3,7,2,1,0,337,27,30,32,17,16,10,5,15,19,30,25,32,19,27,7,4,3,5,4,5,1,3,1
uSF2,DE,004,01,0000620,2671,1278,96,127,158,106,46,19,16,41,52,73,99,112,71,77,58,21,17,7,18,24,27,12,1,1393,86,114,148,87,37,14,10,38,76,106,133,116,130,82,55,20,13,12,18,41,30,19,8
uSF2,DE,004,01,0000621,290,137,9,10,16,6,7,2,1,6,10,10,9,10,13,9,3,1,8,1,1,2,1,1,1,153,6,13,18,17,8,3,1,3,8,13,13,9,18,8,4,1,2,2,5,0,0,1,0
uSF2,DE,004,01,0000622,1161,530,55,69,44,44,30,11,6,19,24,43,37,36,35,16,9,4,11,7,8,5,8,8,1,631,51,74,57,26,34,12,8,26,32,45,45,48,31,37,24,4,7,12,14,14,15,10,5
uSF2,DE,004,01,0000623,381,173,13,8,8,16,7,3,0,6,6,17,19,19,14,12,7,1,6,0,3,3,3,2,0,208,16,16,23,14,3,1,3,13,6,16,15,25,31,5,7,3,1,0,3,2,2,2,1
uSF2,DE,004,01,0000624,784,328,28,45,22,15,11,3,2,12,27,23,25,20,23,13,13,2,8,4,8,9,6,9,0,456,48,36,39,24,7,5,6,25,29,31,29,40,21,27,12,11,7,5,17,9,9,11,8
uSF2,DE,004,01,0000625,779,383,30,33,38,18,7,5,5,10,20,21,27,34,23,21,23,8,12,6,4,19,7,7,5,396,21,26,31,18,13,2,7,11,19,23,30,39,27,29,21,9,9,6,12,13,13,11,6
uSF2,DE,004,01,0000626,779,383,30,33,38,18,7,5,5,10,20,21,27,34,23,21,23,8,12,6,4,19,7,7,5,396,21,26,31,18,13,2,7,11,19,23,30,39,27,29,21,9,9,6,12,13,13,11,6
uSF2,DE,004,01,0000627,594,286,11,30,22,20,6,3,2,12,15,33,17,31,21,14,15,3,8,1,4,4,3,9,2,308,27,29,30,16,8,2,5,5,13,25,38,28,13,17,19,2,5,1,5,10,6,2,2
uSF2,DE,004,01,0000628,594,286,11,30,22,20,6,3,2,12,15,33,17,31,21,14,15,3,8,1,4,4,3,9,2,308,27,29,30,16,8,2,5,5,13,25,38,28,13,17,19,2,5,1,5,10,6,2,2
uSF2,DE,004,01,0000629,416,185,24,27,19,11,6,3,2,7,12,13,8,9,11,8,4,2,3,4,3,4,5,0,0,231,33,17,18,8,7,7,0,17,21,14,12,12,17,10,11,1,3,3,3,6,5,5,1
uSF2,DE,004,01,0000630,630,306,18,30,31,13,13,2,2,6,20,19,25,22,18,16,23,3,12,5,11,7,7,1,2,324,21,27,25,9,5,2,3,11,18,28,23,27,30,21,18,4,14,2,5,11,5,8,7
uSF2,DE,004,01,0000631,401,192,10,16,21,8,11,0,0,6,13,14,19,15,11,6,16,1,4,3,9,5,2,1,1,209,16,18,16,8,3,2,1,8,9,20,17,19,15,12,11,2,11,2,3,6,2,5,3
uSF2,DE,004,01,0000632,450,219,19,15,17,16,5,4,1,4,13,11,31,19,16,8,12,4,4,2,4,4,7,2,1,231,16,19,15,12,8,1,1,5,11,12,22,23,15,13,11,4,7,8,5,6,8,5,4
uSF2,DE,004,01,0000633,330,136,16,10,11,9,4,1,2,3,2,8,14,11,12,1,5,4,1,1,6,9,5,0,1,194,16,13,9,11,3,0,3,9,17,8,14,16,4,14,10,0,8,2,6,11,9,4,7
uSF2,DE,004,01,0000634,364,192,20,16,21,8,9,0,1,5,5,15,10,23,7,13,13,2,4,4,5,6,2,2,1,172,10,12,9,7,7,3,5,4,7,18,6,18,18,14,4,0,6,0,7,7,9,1,0
uSF2,DE,004,01,0000635,190,101,11,7,8,5,7,0,1,3,1,7,5,11,3,8,8,2,2,4,3,3,1,0,1,89,4,2,5,4,4,3,2,2,2,10,3,9,12,10,1,0,5,0,4,4,3,0,0
uSF2,DE,004,01,0000638,504,217,27,29,17,20,3,3,5,5,14,19,15,12,10,5,5,5,4,4,1,5,4,4,1,287,30,27,31,17,7,3,1,10,21,27,20,22,10,13,12,5,3,1,2,11,9,2,3
uSF2,DE,004,01,0000643,209,92,5,5,6,6,1,0,2,2,2,5,6,11,10,7,8,1,3,1,2,5,1,2,1,117,4,9,7,7,6,3,0,2,8,8,10,6,9,8,6,2,3,2,5,4,4,1,3
uSF2,DE,004,01,0000646,711,332,26,44,53,29,7,4,1,10,10,14,20,17,18,14,12,6,10,8,9,9,4,3,4,379,17,32,41,16,11,7,3,13,21,28,29,30,27,12,16,15,13,4,8,17,7,7,5
uSF2,DE,004,01,0000647,988,457,34,35,43,41,13,10,7,15,30,24,21,26,41,23,28,7,16,6,9,14,7,6,1,531,21,40,44,36,16,10,4,19,25,36,42,43,33,34,35,14,8,10,9,17,22,8,5
uSF2,DE,004,01,0000648,200,97,11,10,8,6,3,1,3,0,7,6,15,10,4,5,1,0,2,1,3,1,0,0,0,103,9,9,13,6,2,1,1,4,7,13,9,11,6,3,4,0,2,1,0,0,0,2,0
uSF2,DE,004,01,0000649,268,138,4,9,20,6,3,1,3,5,7,13,12,9,10,10,6,5,1,6,2,3,1,1,1,130,6,7,13,7,1,0,0,6,5,10,11,9,14,10,8,4,3,2,5,3,3,3,0
uSF2,DE,004,01,0000650,505,213,50,32,27,7,12,1,6,5,14,13,9,9,7,7,5,0,3,0,1,2,1,2,0,292,32,23,24,10,28,18,15,14,13,19,22,19,7,4,9,2,5,3,4,8,5,7,1
uSF2,DE,004,01,0000651,1122,502,69,45,54,47,23,5,6,11,29,41,35,30,25,19,8,5,7,6,7,14,8,6,2,620,57,59,68,28,19,13,10,21,46,42,58,33,39,19,13,9,5,11,15,22,17,10,6
uSF2,DE,004,01,0000652,684,305,33,36,35,20,9,2,9,10,16,17,14,19,20,11,14,7,5,5,4,5,5,7,2,379,31,30,27,30,13,4,0,11,21,28,25,37,21,20,19,7,3,6,5,20,10,6,5
uSF2,DE,004,01,0000662,4709,2282,230,286,269,157,70,22,21,64,162,234,237,169,124,109,64,11,16,8,10,8,8,2,1,2427,245,262,247,114,58,31,17,61,165,305,263,229,176,111,61,18,16,5,7,17,9,4,6
uSF2,DE,004,01,0000663,4709,2282,230,286,269,157,70,22,21,64,162,234,237,169,124,109,64,11,16,8,10,8,8,2,1,2427,245,262,247,114,58,31,17,61,165,305,263,229,176,111,61,18,16,5,7,17,9,4,6
uSF2,DE,004,01,0000664,881,425,44,36,40,31,12,7,4,19,38,39,47,39,23,22,13,1,1,1,0,5,2,0,1,456,47,28,43,11,12,6,6,14,35,54,47,53,29,30,13,5,5,0,1,10,4,0,3
uSF2,DE,004,01,0000665,2585,1262,135,184,180,86,33,11,12,35,94,127,118,78,57,49,32,7,6,3,9,2,2,2,0,1323,127,163,142,79,31,17,7,32,95,180,136,115,93,49,26,8,4,3,5,5,2,1,3
uSF2,DE,004,01,0000666,438,215,16,23,12,18,9,1,4,6,11,18,21,22,21,9,6,2,8,3,1,1,3,0,0,223,19,26,21,6,7,2,1,5,8,18,26,25,27,7,9,4,5,2,0,0,3,2,0
uSF2,DE,004,01,0000667,805,380,35,43,37,22,16,3,1,4,19,50,51,30,23,29,13,1,1,1,0,0,1,0,0,425,52,45,41,18,8,6,3,10,27,53,54,36,27,25,13,1,2,0,1,2,0,1,0
uSF2,DE,004,01,0000677,208,99,8,12,16,3,5,1,1,3,5,14,6,9,5,2,7,0,2,0,0,0,0,0,0,109,8,13,8,3,4,2,1,3,6,9,12,6,9,10,3,1,2,2,2,1,1,2,1
uSF2,DE,004,01,0000678,208,99,8,12,16,3,5,1,1,3,5,14,6,9,5,2,7,0,2,0,0,0,0,0,0,109,8,13,8,3,4,2,1,3,6,9,12,6,9,10,3,1,2,2,2,1,1,2,1
uSF2,DE,004,01,0000679,208,99,8,12,16,3,5,1,1,3,5,14,6,9,5,2,7,0,2,0,0,0,0,0,0,109,8,13,8,3,4,2,1,3,6,9,12,6,9,10,3,1,2,2,2,1,1,2,1
uSF2,DE,004,01,0000683,453,195,33,25,16,11,8,1,1,2,9,11,10,16,12,9,9,2,1,3,4,7,3,2,0,258,27,29,16,9,9,4,4,14,18,22,21,10,13,12,5,1,3,6,5,11,10,4,5
uSF2,DE,004,01,0000684,453,195,33,25,16,11,8,1,1,2,9,11,10,16,12,9,9,2,1,3,4,7,3,2,0,258,27,29,16,9,9,4,4,14,18,22,21,10,13,12,5,1,3,6,5,11,10,4,5
uSF2,DE,004,01,0000685,453,195,33,25,16,11,8,1,1,2,9,11,10,16,12,9,9,2,1,3,4,7,3,2,0,258,27,29,16,9,9,4,4,14,18,22,21,10,13,12,5,1,3,6,5,11,10,4,5
uSF2,DE,004,01,0000686,2210,1014,97,105,99,47,23,14,15,57,92,80,78,94,68,61,32,11,13,3,9,10,6,0,0,1196,123,98,96,59,41,22,24,61,118,90,102,87,97,60,45,6,13,8,9,18,10,7,2
uSF2,DE,004,01,0000687,2210,1014,97,105,99,47,23,14,15,57,92,80,78,94,68,61,32,11,13,3,9,10,6,0,0,1196,123,98,96,59,41,22,24,61,118,90,102,87,97,60,45,6,13,8,9,18,10,7,2
uSF2,DE,004,01,0000688,985,428,60,53,61,26,14,6,4,16,27,19,27,43,29,19,5,5,7,0,3,2,2,0,0,557,73,50,49,22,21,17,19,35,44,46,42,35,37,26,14,2,6,1,3,4,5,4,2
uSF2,DE,004,01,0000689,518,260,22,21,12,7,4,4,6,26,40,24,25,21,18,13,7,2,3,0,2,3,0,0,0,258,21,21,13,9,10,3,3,14,37,22,24,18,19,13,13,3,2,2,0,9,0,2,0
uSF2,DE,004,01,0000690,707,326,15,31,26,14,5,4,5,15,25,37,26,30,21,29,20,4,3,3,4,5,4,0,0,381,29,27,34,28,10,2,2,12,37,22,36,34,41,21,18,1,5,5,6,5,5,1,0
uSF2,DE,004,01,0000691,378,174,9,25,20,11,7,2,0,4,11,9,7,18,9,11,8,3,3,2,2,5,5,2,1,204,8,21,18,11,6,5,0,6,15,10,17,21,13,10,6,4,4,4,8,7,5,2,3
uSF2,DE,004,01,0000692,378,174,9,25,20,11,7,2,0,4,11,9,7,18,9,11,8,3,3,2,2,5,5,2,1,204,8,21,18,11,6,5,0,6,15,10,17,21,13,10,6,4,4,4,8,7,5,2,3
uSF2,DE,004,01,0000693,378,174,9,25,20,11,7,2,0,4,11,9,7,18,9,11,8,3,3,2,2,5,5,2,1,204,8,21,18,11,6,5,0,6,15,10,17,21,13,10,6,4,4,4,8,7,5,2,3
uSF2,DE,004,01,0000697,2146,960,100,101,100,50,27,14,21,45,83,86,87,93,46,41,23,6,14,3,3,7,6,2,2,1186,126,105,109,58,36,20,21,57,120,127,101,103,72,51,22,6,9,7,12,5,10,3,6
uSF2,DE,004,01,0000698,2146,960,100,101,100,50,27,14,21,45,83,86,87,93,46,41,23,6,14,3,3,7,6,2,2,1186,126,105,109,58,36,20,21,57,120,127,101,103,72,51,22,6,9,7,12,5,10,3,6
uSF2,DE,004,01,0000699,208,102,9,13,11,8,5,1,1,2,5,11,8,8,7,4,0,1,1,0,2,0,3,1,1,106,13,9,9,4,5,0,0,4,7,16,9,9,8,3,0,1,3,1,2,0,1,1,1
uSF2,DE,004,01,0000700,819,361,37,29,33,16,11,2,8,13,38,44,39,35,20,12,10,0,5,0,1,4,3,0,1,458,38,39,34,21,6,3,3,21,62,53,47,40,33,22,12,2,2,5,6,2,4,1,2
uSF2,DE,004,01,0000701,1012,448,54,54,52,20,11,11,11,27,38,30,37,42,16,21,10,3,5,3,0,2,0,1,0,564,74,51,58,30,22,17,17,31,50,55,40,47,27,19,7,2,2,0,4,3,4,1,3
uSF2,DE,004,01,0000702,107,49,0,5,4,6,0,0,1,3,2,1,3,8,3,4,3,2,3,0,0,1,0,0,0,58,1,6,8,3,3,0,1,1,1,3,5,7,4,7,3,1,2,1,0,0,1,0,0
uSF2,DE,004,01,0000703,103,55,1,8,4,2,1,0,1,2,4,3,5,9,3,3,2,0,3,0,1,0,2,0,1,48,2,3,4,0,1,2,1,0,4,1,2,7,5,4,1,1,3,1,0,3,1,1,1
uSF2,DE,004,01,0000704,103,55,1,8,4,2,1,0,1,2,4,3,5,9,3,3,2,0,3,0,1,0,2,0,1,48,2,3,4,0,1,2,1,0,4,1,2,7,5,4,1,1,3,1,0,3,1,1,1
uSF2,DE,004,01,0000705,103,55,1,8,4,2,1,0,1,2,4,3,5,9,3,3,2,0,3,0,1,0,2,0,1,48,2,3,4,0,1,2,1,0,4,1,2,7,5,4,1,1,3,1,0,3,1,1,1
uSF2,DE,004,01,0000709,147,69,3,4,8,2,3,1,0,1,3,4,6,6,3,3,2,6,4,1,0,5,2,1,1,78,2,5,7,5,0,1,0,0,2,4,4,8,6,4,3,6,3,0,2,3,4,4,5
uSF2,DE,004,01,0000710,147,69,3,4,8,2,3,1,0,1,3,4,6,6,3,3,2,6,4,1,0,5,2,1,1,78,2,5,7,5,0,1,0,0,2,4,4,8,6,4,3,6,3,0,2,3,4,4,5
uSF2,DE,004,01,0000711,147,69,3,4,8,2,3,1,0,1,3,4,6,6,3,3,2,6,4,1,0,5,2,1,1,78,2,5,7,5,0,1,0,0,2,4,4,8,6,4,3,6,3,0,2,3,4,4,5
uSF2,DE,004,01,0000712,273,125,19,16,14,11,5,1,3,7,9,6,6,7,5,2,4,2,0,4,0,1,0,3,0,148,21,17,7,6,4,2,0,9,16,14,11,17,4,2,6,1,0,0,2,5,0,2,2
uSF2,DE,004,01,0000713,273,125,19,16,14,11,5,1,3,7,9,6,6,7,5,2,4,2,0,4,0,1,0,3,0,148,21,17,7,6,4,2,0,9,16,14,11,17,4,2,6,1,0,0,2,5,0,2,2
uSF2,DE,004,01,0000714,273,125,19,16,14,11,5,1,3,7,9,6,6,7,5,2,4,2,0,4,0,1,0,3,0,148,21,17,7,6,4,2,0,9,16,14,11,17,4,2,6,1,0,0,2,5,0,2,2
uSF2,DE,004,01,0000718,10248,4678,468,493,454,251,135,79,81,246,347,324,348,317,248,256,179,63,84,55,90,80,40,27,13,5570,495,406,480,258,153,122,107,330,450,416,435,439,379,294,220,69,95,76,87,95,79,46,39
uSF2,DE,004,01,0000719,10248,4678,468,493,454,251,135,79,81,246,347,324,348,317,248,256,179,63,84,55,90,80,40,27,13,5570,495,406,480,258,153,122,107,330,450,416,435,439,379,294,220,69,95,76,87,95,79,46,39
uSF2,DE,004,01,0000720,2318,1129,107,109,110,62,34,21,14,62,83,68,108,65,51,72,56,16,27,16,25,14,5,2,2,1189,90,78,105,43,31,31,18,80,87,93,110,96,79,77,52,15,29,19,17,17,9,6,7
uSF2,DE,004,01,0000721,168,87,5,6,7,0,0,2,1,5,8,5,14,7,11,5,2,2,0,0,4,1,1,0,1,81,4,9,6,0,2,1,0,2,6,9,10,4,7,6,4,1,1,4,2,1,0,0,2
uSF2,DE,004,01,0000722,1260,547,58,83,68,37,15,6,9,12,24,28,38,36,34,33,25,9,7,4,7,7,3,1,3,713,62,55,77,45,26,16,10,32,44,56,51,58,51,40,35,11,11,8,8,7,6,1,3
uSF2,DE,004,01,0000723,1173,529,38,38,38,33,17,10,16,30,26,34,43,38,31,35,19,10,15,8,17,17,9,6,1,644,42,38,60,34,19,9,6,26,36,35,53,59,44,36,33,11,9,16,13,21,21,14,9
uSF2,DE,004,01,0000724,301,130,14,12,7,2,2,1,1,9,9,12,9,7,8,8,8,2,1,1,4,2,5,3,3,171,18,16,5,5,3,3,4,14,21,11,9,11,2,5,5,0,3,3,7,9,8,6,3
uSF2,DE,004,01,0000725,1631,752,85,96,79,33,30,9,13,44,70,67,42,44,35,33,26,10,10,7,8,7,3,1,0,879,91,66,71,34,23,22,25,71,92,71,54,62,59,48,37,12,9,6,13,5,4,3,1
uSF2,DE,004,01,0000727,163,69,14,10,15,2,2,2,1,5,6,5,1,0,3,0,2,0,1,0,0,0,0,0,0,94,11,10,8,3,1,3,5,7,11,14,6,4,4,1,2,1,1,0,0,0,2,0,0
uSF2,DE,004,01,0000728,769,325,60,43,25,17,10,4,8,15,27,21,22,20,9,11,4,2,6,4,5,6,4,1,1,444,67,46,35,18,16,9,11,40,46,26,25,28,24,11,9,2,4,3,9,5,4,1,5
uSF2,DE,004,01,0000729,1436,637,46,70,62,30,16,17,10,29,47,49,48,57,31,25,24,5,9,10,15,15,9,11,2,799,72,56,69,45,14,13,13,25,61,56,77,61,58,41,22,8,20,10,13,22,20,15,8
uSF2,DE,004,01,0000730,393,193,21,15,17,18,4,3,2,10,12,8,8,21,10,14,5,4,5,4,5,7,0,0,0,200,16,9,20,15,8,8,1,5,10,14,15,20,16,11,9,5,3,4,3,5,2,0,1
uSF2,DE,004,01,0000731,554,246,19,11,21,15,5,3,5,21,32,23,13,22,22,16,8,3,1,0,0,4,1,1,0,308,19,19,22,14,8,7,13,24,28,25,22,36,34,11,9,3,3,3,2,3,3,0,0
uSF2,DE,004,01,0000733,563,303,34,46,38,11,3,1,8,22,50,43,30,14,2,1,0,0,0,0,0,0,0,0,0,260,43,29,19,5,3,3,7,27,34,44,29,11,4,0,0,0,0,0,0,0,1,1,0
uSF2,DE,004,01,0000734,563,303,34,46,38,11,3,1,8,22,50,43,30,14,2,1,0,0,0,0,0,0,0,0,0,260,43,29,19,5,3,3,7,27,34,44,29,11,4,0,0,0,0,0,0,0,1,1,0
uSF2,DE,004,01,0000735,563,303,34,46,38,11,3,1,8,22,50,43,30,14,2,1,0,0,0,0,0,0,0,0,0,260,43,29,19,5,3,3,7,27,34,44,29,11,4,0,0,0,0,0,0,0,1,1,0
uSF2,DE,004,01,0000736,2012,888,125,128,108,58,17,8,4,19,58,59,57,58,50,43,27,12,15,6,11,11,7,5,2,1124,109,121,101,49,32,19,28,37,128,93,78,92,82,55,35,15,15,10,3,10,10,1,1
uSF2,DE,004,01,0000737,2012,888,125,128,108,58,17,8,4,19,58,59,57,58,50,43,27,12,15,6,11,11,7,5,2,1124,109,121,101,49,32,19,28,37,128,93,78,92,82,55,35,15,15,10,3,10,10,1,1
uSF2,DE,004,01,0000739,1994,877,125,127,104,58,16,8,4,19,58,59,57,57,49,42,25,12,15,6,11,11,7,5,2,1117,109,121,100,49,32,19,27,37,128,93,77,91,79,55,35,15,15,10,3,10,10,1,1
uSF2,DE,004,01,0000740,122,61,4,10,8,2,0,0,2,2,1,4,7,4,1,4,3,1,2,0,2,1,3,0,0,61,2,3,8,2,2,0,1,1,3,4,6,4,5,5,4,3,2,2,3,0,1,0,0
uSF2,DE,004,01,0000741,122,61,4,10,8,2,0,0,2,2,1,4,7,4,1,4,3,1,2,0,2,1,3,0,0,61,2,3,8,2,2,0,1,1,3,4,6,4,5,5,4,3,2,2,3,0,1,0,0
uSF2,DE,004,01,0000742,122,61,4,10,8,2,0,0,2,2,1,4,7,4,1,4,3,1,2,0,2,1,3,0,0,61,2,3,8,2,2,0,1,1,3,4,6,4,5,5,4,3,2,2,3,0,1,0,0
uSF2,DE,004,01,0000743,548,273,25,29,28,17,14,1,7,20,24,18,29,22,12,15,4,3,0,0,2,1,1,1,0,275,21,19,29,12,11,4,3,14,22,36,28,29,19,11,10,3,1,2,0,0,0,1,0
uSF2,DE,004,01,0000744,548,273,25,29,28,17,14,1,7,20,24,18,29,22,12,15,4,3,0,0,2,1,1,1,0,275,21,19,29,12,11,4,3,14,22,36,28,29,19,11,10,3,1,2,0,0,0,1,0
uSF2,DE,004,01,0000745,215,113,15,13,8,8,7,1,3,10,8,8,5,8,6,7,2,0,0,0,2,1,0,1,0,102,10,5,9,3,4,2,1,6,11,9,13,12,10,2,4,0,0,1,0,0,0,0,0
uSF2,DE,004,01,0000746,333,160,10,16,20,9,7,0,4,10,16,10,24,14,6,8,2,3,0,0,0,0,1,0,0,173,11,14,20,9,7,2,2,8,11,27,15,17,9,9,6,3,1,1,0,0,0,1,0
uSF2,DE,004,01,0000753,250,111,4,6,10,14,3,2,3,3,9,4,5,4,9,7,11,2,3,1,2,7,1,0,1,139,4,16,15,7,4,1,1,6,7,7,8,8,11,8,12,5,3,2,2,1,9,2,0
uSF2,DE,004,01,0000754,250,111,4,6,10,14,3,2,3,3,9,4,5,4,9,7,11,2,3,1,2,7,1,0,1,139,4,16,15,7,4,1,1,6,7,7,8,8,11,8,12,5,3,2,2,1,9,2,0
uSF2,DE,004,01,0000755,250,111,4,6,10,14,3,2,3,3,9,4,5,4,9,7,11,2,3,1,2,7,1,0,1,139,4,16,15,7,4,1,1,6,7,7,8,8,11,8,12,5,3,2,2,1,9,2,0
uSF2,DE,004,01,0000756,174,78,1,7,7,3,4,0,1,2,3,4,10,8,10,0,5,1,0,0,1,6,3,1,1,96,10,7,8,7,2,0,2,0,2,7,6,12,5,6,1,2,2,1,6,6,1,2,1
uSF2,DE,004,01,0000757,174,78,1,7,7,3,4,0,1,2,3,4,10,8,10,0,5,1,0,0,1,6,3,1,1,96,10,7,8,7,2,0,2,0,2,7,6,12,5,6,1,2,2,1,6,6,1,2,1
uSF2,DE,004,01,0000758,174,78,1,7,7,3,4,0,1,2,3,4,10,8,10,0,5,1,0,0,1,6,3,1,1,96,10,7,8,7,2,0,2,0,2,7,6,12,5,6,1,2,2,1,6,6,1,2,1
uSF2,DE,004,01,0000759,912,407,46,49,32,32,26,11,4,16,22,29,25,28,28,12,4,3,10,5,6,4,6,8,1,505,45,60,44,17,27,12,6,21,28,32,32,37,22,30,21,4,5,12,11,13,12,10,4
uSF2,DE,004,01,0000760,912,407,46,49,32,32,26,11,4,16,22,29,25,28,28,12,4,3,10,5,6,4,6,8,1,505,45,60,44,17,27,12,6,21,28,32,32,37,22,30,21,4,5,12,11,13,12,10,4
uSF2,DE,004,01,0000761,903,402,46,49,32,32,25,10,4,16,21,28,25,28,28,11,4,3,10,5,6,4,6,8,1,501,45,59,44,17,27,11,6,21,28,31,32,37,21,30,21,4,5,12,11,13,12,10,4
uSF2,DE,004,01,0000762,2182,1092,100,121,121,65,34,10,11,21,71,113,109,93,68,63,33,11,17,6,11,6,4,2,2,1090,85,92,79,46,21,6,10,34,96,134,130,108,84,72,28,10,17,9,9,7,2,4,7
uSF2,DE,004,01,0000763,2182,1092,100,121,121,65,34,10,11,21,71,113,109,93,68,63,33,11,17,6,11,6,4,2,2,1090,85,92,79,46,21,6,10,34,96,134,130,108,84,72,28,10,17,9,9,7,2,4,7
uSF2,DE,004,01,0000764,566,293,25,34,33,24,12,3,0,6,20,31,23,27,15,14,8,1,5,1,5,3,1,1,1,273,23,24,15,9,6,3,2,4,27,32,37,27,21,16,8,4,3,4,1,3,2,0,2
uSF2,DE,004,01,0000765,1291,639,63,67,69,33,20,7,9,12,46,64,70,51,41,40,16,8,9,4,4,3,2,1,0,652,52,54,49,25,14,2,5,27,58,82,66,70,49,47,17,5,12,5,5,2,0,2,4
uSF2,DE,004,01,0000766,266,129,10,19,16,4,1,0,2,2,4,16,13,12,9,9,4,1,2,1,2,0,1,0,1,137,10,14,12,11,1,1,3,0,9,17,22,10,10,6,2,1,1,0,3,1,0,2,1
uSF2,DE,004,01,0000772,189,89,10,10,8,4,2,1,2,7,3,7,7,6,7,3,1,0,1,1,0,2,4,3,0,100,8,8,10,5,4,4,2,5,6,10,11,3,3,2,3,0,1,3,0,3,4,2,3
uSF2,DE,004,01,0000773,189,89,10,10,8,4,2,1,2,7,3,7,7,6,7,3,1,0,1,1,0,2,4,3,0,100,8,8,10,5,4,4,2,5,6,10,11,3,3,2,3,0,1,3,0,3,4,2,3
uSF2,DE,004,01,0000774,189,89,10,10,8,4,2,1,2,7,3,7,7,6,7,3,1,0,1,1,0,2,4,3,0,100,8,8,10,5,4,4,2,5,6,10,11,3,3,2,3,0,1,3,0,3,4,2,3
uSF2,DE,004,01,0000775,687,290,42,44,38,16,10,4,3,8,7,18,20,22,9,7,9,5,8,5,2,4,6,2,1,397,56,34,46,24,10,5,9,13,27,25,38,28,19,9,6,9,7,7,1,8,12,2,2
uSF2,DE,004,01,0000776,687,290,42,44,38,16,10,4,3,8,7,18,20,22,9,7,9,5,8,5,2,4,6,2,1,397,56,34,46,24,10,5,9,13,27,25,38,28,19,9,6,9,7,7,1,8,12,2,2
uSF2,DE,004,01,0000777,687,290,42,44,38,16,10,4,3,8,7,18,20,22,9,7,9,5,8,5,2,4,6,2,1,397,56,34,46,24,10,5,9,13,27,25,38,28,19,9,6,9,7,7,1,8,12,2,2
uSF2,DE,004,01,0000781,387,197,7,24,19,12,7,4,2,7,8,7,10,18,17,17,12,5,4,4,9,0,1,2,1,190,11,14,19,7,5,4,4,9,10,9,12,22,20,11,9,4,4,4,4,2,3,1,2
uSF2,DE,004,01,0000782,387,197,7,24,19,12,7,4,2,7,8,7,10,18,17,17,12,5,4,4,9,0,1,2,1,190,11,14,19,7,5,4,4,9,10,9,12,22,20,11,9,4,4,4,4,2,3,1,2
uSF2,DE,004,01,0000783,109,56,1,8,4,3,1,1,0,3,2,3,4,6,5,3,2,0,2,3,3,0,0,1,1,53,2,4,6,0,3,1,1,4,1,3,5,6,4,2,2,2,2,0,2,0,1,1,1
uSF2,DE,004,01,0000784,278,141,6,16,15,9,6,3,2,4,6,4,6,12,12,14,10,5,2,1,6,0,1,1,0,137,9,10,13,7,2,3,3,5,9,6,7,16,16,9,7,2,2,4,2,2,2,0,1
uSF2,DE,004,01,0000785,323,156,11,11,11,5,6,1,1,5,4,7,15,17,15,13,12,4,2,2,4,4,3,2,1,167,10,11,9,7,3,1,1,4,5,8,12,18,14,22,8,2,5,3,0,8,5,6,5
uSF2,DE,004,01,0000786,323,156,11,11,11,5,6,1,1,5,4,7,15,17,15,13,12,4,2,2,4,4,3,2,1,167,10,11,9,7,3,1,1,4,5,8,12,18,14,22,8,2,5,3,0,8,5,6,5
uSF2,DE,004,01,0000788,245,117,9,7,6,5,6,1,0,5,3,5,11,12,12,8,9,3,2,2,3,3,3,1,1,128,7,8,8,4,3,1,1,4,4,6,10,14,10,15,7,1,5,2,0,6,3,4,5
uSF2,DE,004,01,0000793,325,159,14,15,13,14,10,5,1,4,6,6,14,15,11,11,5,4,2,3,3,2,0,0,1,166,8,15,16,14,2,3,3,6,15,8,14,18,14,17,5,1,3,1,0,1,1,0,1
uSF2,DE,004,01,0000794,325,159,14,15,13,14,10,5,1,4,6,6,14,15,11,11,5,4,2,3,3,2,0,0,1,166,8,15,16,14,2,3,3,6,15,8,14,18,14,17,5,1,3,1,0,1,1,0,1
uSF2,DE,004,01,0000795,203,93,10,9,6,6,5,4,0,2,5,6,7,8,6,7,3,1,2,2,2,2,0,0,0,110,5,9,11,6,0,2,2,5,13,7,11,13,9,8,4,1,2,0,0,1,0,0,1
uSF2,DE,004,01,0000796,122,66,4,6,7,8,5,1,1,2,1,0,7,7,5,4,2,3,0,1,1,0,0,0,1,56,3,6,5,8,2,1,1,1,2,1,3,5,5,9,1,0,1,1,0,0,1,0,0
uSF2,DE,004,01,0000800,1446,624,109,64,79,53,27,5,12,14,36,50,32,32,26,21,9,5,7,6,7,15,6,7,2,822,83,77,88,34,44,29,25,33,50,54,67,43,39,21,17,9,10,13,17,30,16,16,7
uSF2,DE,004,01,0000801,1446,624,109,64,79,53,27,5,12,14,36,50,32,32,26,21,9,5,7,6,7,15,6,7,2,822,83,77,88,34,44,29,25,33,50,54,67,43,39,21,17,9,10,13,17,30,16,16,7
uSF2,DE,004,01,0000802,388,153,44,23,27,7,8,1,6,3,8,9,0,5,2,4,3,0,0,0,0,1,0,2,0,235,28,19,23,6,25,16,15,13,8,13,16,12,4,3,5,0,5,3,3,8,3,6,1
uSF2,DE,004,01,0000803,1058,471,65,41,52,46,19,4,6,11,28,41,32,27,24,17,6,5,7,6,7,14,6,5,2,587,55,58,65,28,19,13,10,20,42,41,51,31,35,18,12,9,5,10,14,22,13,10,6
uSF2,DE,004,01,0000807,263,104,14,6,9,7,3,0,2,3,2,4,11,9,10,1,4,2,1,1,4,6,4,0,1,159,14,13,7,10,2,0,3,9,15,6,9,13,3,13,8,0,5,2,4,10,7,4,2
uSF2,DE,004,01,0000808,263,104,14,6,9,7,3,0,2,3,2,4,11,9,10,1,4,2,1,1,4,6,4,0,1,159,14,13,7,10,2,0,3,9,15,6,9,13,3,13,8,0,5,2,4,10,7,4,2
uSF2,DE,004,01,0000809,263,104,14,6,9,7,3,0,2,3,2,4,11,9,10,1,4,2,1,1,4,6,4,0,1,159,14,13,7,10,2,0,3,9,15,6,9,13,3,13,8,0,5,2,4,10,7,4,2
uSF2,DE,004,01,0000819,1310,579,61,66,69,36,23,8,7,18,33,38,42,46,35,35,16,4,10,5,2,11,10,2,2,731,66,77,61,37,17,16,11,25,31,59,73,60,61,41,24,6,14,4,10,16,11,7,4
uSF2,DE,004,01,0000820,1310,579,61,66,69,36,23,8,7,18,33,38,42,46,35,35,16,4,10,5,2,11,10,2,2,731,66,77,61,37,17,16,11,25,31,59,73,60,61,41,24,6,14,4,10,16,11,7,4
uSF2,DE,004,01,0000821,175,83,11,6,9,6,5,0,1,3,8,10,10,4,1,4,1,0,3,0,0,0,0,0,1,92,15,8,10,1,4,4,1,8,4,12,6,4,9,3,0,0,1,0,0,1,1,0,0
uSF2,DE,004,01,0000822,1125,491,50,60,60,30,18,8,5,15,25,27,32,42,33,30,14,4,7,5,2,11,10,2,1,634,51,69,51,35,13,12,10,17,26,47,67,55,51,38,23,6,13,4,10,15,10,7,4
uSF2,DE,004,01,0000823,1493,666,70,70,91,46,27,8,13,19,32,41,56,54,34,18,17,6,10,7,5,19,16,7,0,827,65,83,79,36,32,14,20,42,55,62,61,63,40,36,25,8,21,10,11,27,17,8,12
uSF2,DE,004,01,0000824,1148,497,47,54,76,37,21,5,8,11,24,32,36,35,24,10,12,5,10,6,5,17,16,6,0,651,53,66,68,26,24,9,12,26,41,49,47,52,33,25,19,8,20,9,10,24,12,6,12
uSF2,DE,004,01,0000825,982,434,41,47,64,30,17,5,8,8,22,28,32,30,24,10,11,5,7,6,4,15,14,6,0,548,45,49,50,23,21,8,11,22,34,37,38,46,32,22,19,8,17,9,10,22,7,6,12
uSF2,DE,004,01,0000826,166,63,6,7,12,7,4,0,0,3,2,4,4,5,0,0,1,0,3,0,1,2,2,0,0,103,8,17,18,3,3,1,1,4,7,12,9,6,1,3,0,0,3,0,0,2,5,0,0
uSF2,DE,004,01,0000827,345,169,23,16,15,9,6,3,5,8,8,9,20,19,10,8,5,1,0,1,0,2,0,1,0,176,12,17,11,10,8,5,8,16,14,13,14,11,7,11,6,0,1,1,1,3,5,2,0
uSF2,DE,004,01,0000829,328,160,22,14,11,9,6,3,5,8,8,9,18,19,10,8,5,1,0,1,0,2,0,1,0,168,12,15,10,8,8,4,8,16,14,12,13,11,7,11,6,0,1,1,1,3,5,2,0
uSF2,DE,004,01,0000830,442,171,23,29,12,7,4,1,2,6,15,12,9,8,8,6,5,2,6,2,1,4,3,6,0,271,33,22,25,12,3,2,5,18,20,18,18,22,11,16,8,5,1,0,8,7,7,4,6
uSF2,DE,004,01,0000831,442,171,23,29,12,7,4,1,2,6,15,12,9,8,8,6,5,2,6,2,1,4,3,6,0,271,33,22,25,12,3,2,5,18,20,18,18,22,11,16,8,5,1,0,8,7,7,4,6
uSF2,DE,004,01,0000832,442,171,23,29,12,7,4,1,2,6,15,12,9,8,8,6,5,2,6,2,1,4,3,6,0,271,33,22,25,12,3,2,5,18,20,18,18,22,11,16,8,5,1,0,8,7,7,4,6
uSF2,DE,004,01,0000836,391,172,22,29,12,8,5,4,2,4,13,12,4,6,9,14,5,2,2,3,4,4,7,0,1,219,29,15,16,7,7,7,1,14,18,12,11,11,16,15,11,2,5,1,4,5,5,5,2
uSF2,DE,004,01,0000837,391,172,22,29,12,8,5,4,2,4,13,12,4,6,9,14,5,2,2,3,4,4,7,0,1,219,29,15,16,7,7,7,1,14,18,12,11,11,16,15,11,2,5,1,4,5,5,5,2
uSF2,DE,004,01,0000838,321,136,19,24,10,8,5,3,1,4,10,10,2,5,7,6,3,2,2,3,3,4,5,0,0,185,28,13,14,6,5,7,0,14,18,10,10,8,12,10,9,1,3,1,3,5,4,4,0
uSF2,DE,004,01,0000840,1392,651,39,55,55,29,16,23,21,53,65,57,34,43,34,34,31,12,11,8,5,10,8,6,2,741,35,58,68,42,23,5,20,41,45,64,58,46,54,42,36,6,16,7,18,23,10,9,15
uSF2,DE,004,01,0000841,1392,651,39,55,55,29,16,23,21,53,65,57,34,43,34,34,31,12,11,8,5,10,8,6,2,741,35,58,68,42,23,5,20,41,45,64,58,46,54,42,36,6,16,7,18,23,10,9,15
uSF2,DE,004,01,0000842,110,52,2,4,1,5,1,3,2,6,9,2,3,4,5,3,1,0,0,0,0,0,1,0,0,58,3,1,7,4,1,0,5,6,1,8,2,3,8,6,2,0,1,0,0,0,0,0,0
uSF2,DE,004,01,0000844,234,102,4,9,5,5,0,2,0,3,2,8,5,3,7,15,13,2,4,2,1,5,4,3,0,132,2,8,8,7,4,1,1,2,3,5,11,7,14,11,8,3,3,2,4,10,5,5,8
uSF2,DE,004,01,0000845,146,74,4,2,3,0,1,0,3,17,11,11,4,3,1,4,2,3,1,2,1,1,0,0,0,72,3,4,1,1,4,1,4,15,9,3,7,3,4,2,6,0,1,0,2,0,0,1,1
uSF2,DE,004,01,0000846,241,129,9,8,18,3,7,6,7,14,22,9,5,7,8,3,1,1,1,0,0,0,0,0,0,112,4,15,11,2,2,1,6,5,8,16,11,6,6,7,4,1,2,3,2,0,0,0,0
uSF2,DE,004,01,0000847,155,75,4,6,7,2,3,2,0,3,7,6,4,12,5,2,4,1,2,3,0,0,0,2,0,80,7,10,6,5,2,1,0,1,5,3,6,9,9,5,4,0,3,1,1,1,0,0,1
uSF2,DE,004,01,0000848,152,46,5,11,7,2,1,2,0,4,2,2,2,1,1,0,3,0,1,0,0,1,0,0,1,106,6,9,16,9,5,1,2,3,6,9,8,4,2,2,1,0,4,0,6,6,2,1,4
uSF2,DE,004,01,0000849,94,47,1,8,1,5,0,6,6,2,2,6,2,3,0,0,1,0,1,0,0,2,0,1,0,47,1,2,7,5,2,0,0,3,3,5,3,3,1,3,2,0,1,0,3,3,0,0,0
uSF2,DE,004,01,0000851,100,46,6,4,5,3,1,1,0,2,4,4,2,2,1,3,1,2,1,0,1,0,2,0,1,54,4,3,6,7,1,0,2,1,6,3,5,4,1,2,5,0,1,0,0,2,0,1,0
uSF2,DE,004,01,0000853,982,448,37,42,48,28,15,4,6,15,24,24,46,34,26,37,19,8,8,6,4,7,4,4,2,534,31,41,47,27,12,4,8,11,37,43,54,42,46,37,28,11,6,5,8,8,12,4,12
uSF2,DE,004,01,0000854,982,448,37,42,48,28,15,4,6,15,24,24,46,34,26,37,19,8,8,6,4,7,4,4,2,534,31,41,47,27,12,4,8,11,37,43,54,42,46,37,28,11,6,5,8,8,12,4,12
uSF2,DE,004,01,0000856,234,116,15,12,12,8,4,0,0,1,10,6,15,11,11,4,2,1,1,3,0,0,0,0,0,118,10,11,9,8,2,0,0,1,13,11,18,11,9,2,4,1,1,2,1,1,2,0,1
uSF2,DE,004,01,0000857,448,194,14,18,22,12,5,3,6,10,9,13,19,12,10,12,9,5,4,1,3,2,3,1,1,254,15,17,23,14,6,1,6,6,17,23,17,20,24,24,11,7,2,1,6,5,3,0,6
uSF2,DE,004,01,0000858,202,91,6,5,10,7,3,1,0,3,4,3,8,8,4,13,4,2,2,1,1,3,0,3,0,111,5,7,12,3,4,3,2,2,4,6,12,8,9,8,8,3,2,2,1,1,5,3,1
uSF2,DE,004,01,0000859,119,61,6,4,5,3,1,4,1,4,2,1,9,8,6,3,4,0,0,0,0,0,0,0,0,58,2,4,8,5,1,0,0,2,2,9,11,2,3,5,2,0,1,0,0,0,1,0,0
uSF2,DE,004,01,0000860,119,61,6,4,5,3,1,4,1,4,2,1,9,8,6,3,4,0,0,0,0,0,0,0,0,58,2,4,8,5,1,0,0,2,2,9,11,2,3,5,2,0,1,0,0,0,1,0,0
uSF2,DE,004,01,0000863,207,97,6,8,5,6,6,0,1,5,2,5,5,11,12,17,5,1,0,1,1,0,0,0,0,110,9,10,3,10,2,0,1,5,2,8,8,12,18,12,4,0,0,2,1,3,0,0,0
uSF2,DE,004,01,0000864,207,97,6,8,5,6,6,0,1,5,2,5,5,11,12,17,5,1,0,1,1,0,0,0,0,110,9,10,3,10,2,0,1,5,2,8,8,12,18,12,4,0,0,2,1,3,0,0,0
uSF2,DE,004,01,0000865,207,97,6,8,5,6,6,0,1,5,2,5,5,11,12,17,5,1,0,1,1,0,0,0,0,110,9,10,3,10,2,0,1,5,2,8,8,12,18,12,4,0,0,2,1,3,0,0,0
uSF2,DE,004,01,0000872,741,363,23,23,27,14,6,5,3,17,33,33,33,43,25,39,19,4,5,4,1,2,2,1,1,378,24,21,14,8,9,4,7,15,30,39,38,39,39,28,25,10,13,5,3,3,2,1,1
uSF2,DE,004,01,0000873,741,363,23,23,27,14,6,5,3,17,33,33,33,43,25,39,19,4,5,4,1,2,2,1,1,378,24,21,14,8,9,4,7,15,30,39,38,39,39,28,25,10,13,5,3,3,2,1,1
uSF2,DE,004,01,0000875,284,140,9,5,11,5,3,0,0,4,16,20,13,12,10,17,8,0,2,2,1,1,0,0,1,144,12,6,2,4,3,2,4,6,13,13,15,12,16,13,8,6,3,4,1,1,0,0,0
uSF2,DE,004,01,0000876,260,132,7,11,9,8,2,0,1,9,13,6,13,16,13,13,4,3,1,1,0,0,1,1,0,128,5,9,7,2,2,0,2,6,11,17,11,15,14,8,9,2,5,1,1,0,0,1,0
uSF2,DE,004,01,0000877,68,30,1,1,3,0,0,3,2,0,2,4,2,5,1,1,3,1,0,0,0,1,0,0,0,38,4,0,1,0,2,1,0,2,3,4,5,4,3,2,2,0,2,0,1,1,1,0,0
uSF2,DE,004,01,0000878,100,49,5,3,3,1,1,2,0,4,1,3,4,8,1,8,3,0,1,0,0,0,1,0,0,51,2,2,3,2,2,1,1,1,3,3,6,7,5,4,5,1,1,0,0,1,0,0,1
uSF2,DE,004,01,0000882,383,198,17,24,18,10,9,1,3,6,15,18,21,17,19,8,3,0,1,1,2,3,1,0,1,185,14,22,27,12,3,4,2,4,13,21,17,14,11,6,3,7,0,1,2,0,0,0,2
uSF2,DE,004,01,0000883,383,198,17,24,18,10,9,1,3,6,15,18,21,17,19,8,3,0,1,1,2,3,1,0,1,185,14,22,27,12,3,4,2,4,13,21,17,14,11,6,3,7,0,1,2,0,0,0,2
uSF2,DE,004,01,0000885,356,183,15,24,18,9,9,1,3,6,13,18,17,15,18,7,3,0,1,1,2,1,1,0,1,173,12,21,25,12,3,4,2,4,12,19,15,13,11,6,3,6,0,1,2,0,0,0,2
uSF2,DE,004,01,0000886,115,53,4,8,5,5,0,0,0,1,1,3,6,7,4,3,2,0,0,1,2,1,0,0,0,62,2,5,6,5,0,1,0,3,2,5,9,9,3,6,1,0,0,1,1,2,1,0,0
uSF2,DE,004,01,0000887,115,53,4,8,5,5,0,0,0,1,1,3,6,7,4,3,2,0,0,1,2,1,0,0,0,62,2,5,6,5,0,1,0,3,2,5,9,9,3,6,1,0,0,1,1,2,1,0,0
uSF2,DE,004,01,0000888,115,53,4,8,5,5,0,0,0,1,1,3,6,7,4,3,2,0,0,1,2,1,0,0,0,62,2,5,6,5,0,1,0,3,2,5,9,9,3,6,1,0,0,1,1,2,1,0,0
uSF2,DE,004,01,0000889,605,304,25,30,29,16,17,9,13,24,19,14,22,19,25,18,6,3,7,3,0,4,0,1,0,301,20,22,30,21,10,5,3,13,24,24,24,39,26,8,11,4,4,2,5,2,3,1,0
uSF2,DE,004,01,0000890,605,304,25,30,29,16,17,9,13,24,19,14,22,19,25,18,6,3,7,3,0,4,0,1,0,301,20,22,30,21,10,5,3,13,24,24,24,39,26,8,11,4,4,2,5,2,3,1,0
uSF2,DE,004,01,0000891,595,301,24,30,29,15,17,9,13,24,19,14,21,19,25,18,6,3,7,3,0,4,0,1,0,294,19,22,30,19,10,4,3,13,24,24,24,37,25,8,11,4,4,2,5,2,3,1,0
uSF2,DE,004,01,0000892,1947,826,139,118,107,42,23,10,10,30,43,36,60,59,39,31,19,3,6,5,10,15,11,4,6,1121,109,107,104,52,41,27,24,70,69,88,96,70,81,30,33,19,13,6,18,26,17,14,7
uSF2,DE,004,01,0000893,1947,826,139,118,107,42,23,10,10,30,43,36,60,59,39,31,19,3,6,5,10,15,11,4,6,1121,109,107,104,52,41,27,24,70,69,88,96,70,81,30,33,19,13,6,18,26,17,14,7
uSF2,DE,004,01,0000894,383,137,32,22,25,9,3,1,2,3,7,9,14,4,0,0,1,0,0,0,3,2,0,0,0,246,24,26,27,9,12,11,8,14,16,26,27,7,20,4,5,1,0,2,4,3,0,0,0
uSF2,DE,004,01,0000895,1564,689,107,96,82,33,20,9,8,27,36,27,46,55,39,31,18,3,6,5,7,13,11,4,6,875,85,81,77,43,29,16,16,56,53,62,69,63,61,26,28,18,13,4,14,23,17,14,7
uSF2,DE,004,01,0000896,253,116,10,10,17,10,1,1,0,2,2,7,9,6,7,5,3,0,3,7,4,5,2,2,3,137,4,7,13,6,5,2,1,4,4,4,9,13,10,5,5,9,5,2,4,10,6,6,3
uSF2,DE,004,01,0000897,253,116,10,10,17,10,1,1,0,2,2,7,9,6,7,5,3,0,3,7,4,5,2,2,3,137,4,7,13,6,5,2,1,4,4,4,9,13,10,5,5,9,5,2,4,10,6,6,3
uSF2,DE,004,01,0000898,253,116,10,10,17,10,1,1,0,2,2,7,9,6,7,5,3,0,3,7,4,5,2,2,3,137,4,7,13,6,5,2,1,4,4,4,9,13,10,5,5,9,5,2,4,10,6,6,3
uSF2,DE,004,01,0000902,1233,554,68,69,62,25,13,8,8,23,38,49,36,38,37,19,16,3,5,4,9,11,10,1,2,679,63,66,48,35,14,9,17,27,66,49,60,52,39,35,17,6,12,9,15,13,10,8,9
uSF2,DE,004,01,0000903,1233,554,68,69,62,25,13,8,8,23,38,49,36,38,37,19,16,3,5,4,9,11,10,1,2,679,63,66,48,35,14,9,17,27,66,49,60,52,39,35,17,6,12,9,15,13,10,8,9
uSF2,DE,004,01,0000904,429,204,20,18,19,5,4,1,6,9,14,27,13,11,15,15,9,2,2,2,1,6,3,0,2,225,17,14,9,12,6,3,2,10,22,15,20,16,11,17,10,3,5,2,8,7,6,6,4
uSF2,DE,004,01,0000905,133,57,7,5,9,1,0,0,0,1,3,6,5,6,5,1,4,0,0,0,1,0,3,0,0,76,2,14,4,1,0,0,2,4,4,4,9,7,9,2,2,0,1,0,3,2,2,1,3
uSF2,DE,004,01,0000906,671,293,41,46,34,19,9,7,2,13,21,16,18,21,17,3,3,1,3,2,7,5,4,1,0,378,44,38,35,22,8,6,13,13,40,30,31,29,19,16,5,3,6,7,4,4,2,1,2
uSF2,DE,004,01,0000916,38589,17286,1644,1909,1852,1009,609,261,246,609,1049,1171,1245,1232,1110,849,623,226,321,223,282,361,277,105,73,21303,1510,1833,1834,1050,606,331,305,845,1327,1634,1788,1773,1415,1155,882,341,447,321,423,540,447,251,245
uSF2,DE,004,01,0000917,38589,17286,1644,1909,1852,1009,609,261,246,609,1049,1171,1245,1232,1110,849,623,226,321,223,282,361,277,105,73,21303,1510,1833,1834,1050,606,331,305,845,1327,1634,1788,1773,1415,1155,882,341,447,321,423,540,447,251,245
uSF2,DE,004,01,0000918,381,201,14,21,6,5,2,1,4,12,26,28,26,23,11,10,4,2,2,0,0,3,1,0,0,180,14,13,5,1,5,2,2,13,19,19,17,19,20,9,1,4,3,2,1,4,3,3,1
uSF2,DE,004,01,0000919,4176,1911,133,181,199,110,77,16,27,51,89,140,141,147,147,130,109,22,44,28,34,39,33,12,2,2265,128,167,177,125,49,32,20,68,129,189,204,217,180,180,136,43,45,31,33,48,36,14,14
uSF2,DE,004,01,0000920,2605,1208,74,121,149,64,53,25,16,43,72,87,88,81,95,85,54,16,22,15,10,17,10,11,0,1397,78,126,118,77,37,21,12,48,75,108,129,128,99,109,64,31,26,25,26,21,20,12,7
uSF2,DE,004,01,0000921,1408,640,48,56,55,21,26,8,11,23,34,48,52,41,41,24,24,17,31,13,14,26,16,10,1,768,47,36,56,32,21,12,9,27,49,60,61,61,53,44,40,13,26,23,22,28,21,17,10
uSF2,DE,004,01,0000922,3208,1476,158,158,145,81,45,16,17,51,83,111,109,108,94,92,65,28,28,19,24,26,11,5,2,1732,136,141,151,86,62,31,29,66,101,108,146,135,130,112,106,34,35,26,23,34,21,10,9
uSF2,DE,004,01,0000923,2205,986,71,115,106,51,33,19,13,29,54,60,65,87,53,48,33,20,27,17,22,27,24,7,5,1219,83,108,123,45,27,16,11,37,65,79,106,86,75,71,56,22,39,26,41,42,35,12,14
uSF2,DE,004,01,0000924,2720,1203,104,100,107,63,26,17,18,50,51,69,105,92,92,63,54,24,30,19,34,37,30,11,7,1517,78,119,116,73,52,22,21,51,68,88,122,123,102,68,73,30,67,36,47,55,48,34,24
uSF2,DE,004,01,0000925,1547,640,127,148,98,37,19,11,13,23,20,19,29,25,15,11,13,2,8,3,6,7,4,1,1,907,106,106,101,58,24,16,13,61,56,81,58,76,44,26,16,6,14,11,6,11,4,6,7
uSF2,DE,004,01,0000926,467,213,36,20,18,7,7,2,2,3,11,13,23,17,20,9,6,3,3,1,1,8,3,0,0,254,23,24,22,13,12,1,4,11,17,22,26,24,12,14,5,4,1,4,4,6,1,1,3
uSF2,DE,004,01,0000927,2032,897,68,96,88,76,34,14,12,32,66,57,67,72,75,36,22,11,12,10,11,12,15,7,4,1135,72,96,103,63,26,20,20,42,64,97,114,92,89,51,30,20,16,11,18,21,36,18,16
uSF2,DE,004,01,0000928,213,104,5,10,8,4,3,3,1,5,8,12,6,10,6,7,3,1,1,1,2,3,3,1,1,109,4,5,4,5,3,1,1,9,8,11,9,13,8,9,4,0,0,0,5,2,2,1,5
uSF2,DE,004,01,0000929,253,107,1,2,0,2,0,0,0,1,11,17,10,4,14,12,3,2,5,4,7,6,4,1,1,146,2,0,0,2,1,1,0,3,8,9,6,8,14,14,11,6,6,3,8,20,9,7,8
uSF2,DE,004,01,0000930,115,50,3,3,7,3,0,1,1,0,8,2,3,6,1,0,2,0,0,0,6,2,2,0,0,65,0,10,1,0,0,0,0,1,5,10,5,1,4,5,6,2,3,4,2,3,2,0,1
uSF2,DE,004,01,0000932,627,275,33,23,23,20,9,6,1,12,20,12,24,19,13,13,12,4,3,5,2,8,11,1,1,352,21,23,34,14,15,2,9,10,23,36,32,25,22,14,12,4,11,3,11,14,9,4,4
uSF2,DE,004,01,0000933,1093,504,47,43,52,26,19,6,12,29,40,33,37,31,36,26,24,2,6,7,10,10,6,0,2,589,46,53,57,26,19,4,13,25,40,49,47,50,35,32,24,5,13,0,9,18,11,5,8
uSF2,DE,004,01,0000934,1693,761,71,90,77,48,20,15,19,37,68,48,54,58,52,38,26,7,4,4,6,7,5,5,2,932,68,111,93,41,33,12,14,52,94,74,82,88,63,30,27,8,7,7,6,12,7,3,0
uSF2,DE,004,01,0000935,2712,1122,150,129,118,82,43,10,12,40,47,42,59,46,64,43,23,20,32,16,30,41,38,11,26,1590,104,139,120,69,43,23,26,62,92,82,97,95,86,73,71,24,39,41,53,82,69,40,60
uSF2,DE,004,01,0000936,1620,715,86,98,97,46,32,21,12,18,35,35,62,40,40,21,19,7,11,8,6,10,9,2,0,905,83,72,84,53,38,23,20,21,56,74,74,75,67,37,31,16,9,13,11,22,11,5,10
uSF2,DE,004,01,0000937,497,215,32,33,25,8,7,8,5,11,16,19,6,11,7,6,9,2,4,2,1,2,0,1,0,282,23,32,20,14,6,8,9,21,22,23,15,28,15,12,12,4,3,2,0,3,2,6,2
uSF2,DE,004,01,0000938,1739,707,85,88,63,38,27,9,9,26,59,59,43,50,35,39,26,4,9,7,2,12,7,6,4,1032,91,98,93,37,27,18,24,58,70,80,75,72,54,55,42,15,19,8,28,18,28,15,7
uSF2,DE,004,01,0000939,1492,676,39,68,101,46,27,7,9,25,48,45,42,54,41,31,18,7,12,8,15,17,11,3,2,816,67,85,77,48,31,14,15,27,36,57,75,61,56,32,31,10,16,16,14,21,13,7,7
uSF2,DE,004,01,0000940,1741,795,72,86,89,58,32,15,11,26,39,50,48,65,57,29,28,8,13,11,18,17,15,2,6,946,68,78,92,53,22,20,9,39,48,68,80,82,61,47,29,16,17,16,25,25,27,15,9
uSF2,DE,004,01,0000941,1556,717,57,75,62,35,22,12,12,29,64,68,58,60,32,31,21,6,6,16,11,17,12,8,3,839,57,55,49,41,22,10,14,38,65,64,80,91,50,50,28,13,22,6,14,21,21,9,19
uSF2,DE,004,01,0000942,688,320,28,37,30,26,10,6,5,8,21,28,19,28,22,20,11,4,2,2,4,4,5,0,0,368,26,34,30,14,8,4,0,14,25,38,36,50,21,30,9,4,2,2,9,4,5,3,0
uSF2,DE,004,01,0000943,1209,570,74,76,88,44,28,11,1,13,39,42,41,32,32,17,11,5,4,4,5,1,1,0,1,639,54,64,73,44,18,14,9,32,57,63,66,40,41,22,13,6,6,4,3,4,3,3,0
uSF2,DE,004,01,0000944,527,239,25,32,39,8,7,2,3,10,18,24,26,20,13,7,1,1,0,0,1,1,0,0,1,288,29,35,33,14,5,4,1,8,31,43,26,29,13,6,4,0,1,0,4,0,2,0,0
uSF2,DE,004,01,0000945,905,427,41,32,40,22,16,4,3,17,29,40,38,32,28,22,22,7,15,6,4,4,1,3,1,478,39,46,32,21,22,9,5,19,29,43,41,43,46,25,22,4,2,4,8,4,8,3,3
uSF2,DE,004,01,0000946,905,427,41,32,40,22,16,4,3,17,29,40,38,32,28,22,22,7,15,6,4,4,1,3,1,478,39,46,32,21,22,9,5,19,29,43,41,43,46,25,22,4,2,4,8,4,8,3,3
uSF2,DE,004,01,0000947,347,155,12,8,16,10,4,0,2,8,10,9,11,12,10,14,10,3,6,2,3,2,0,3,0,192,13,17,9,10,10,2,0,8,10,16,15,12,21,15,13,3,1,0,4,2,8,1,2
uSF2,DE,004,01,0000948,558,272,29,24,24,12,12,4,1,9,19,31,27,20,18,8,12,4,9,4,1,2,1,0,1,286,26,29,23,11,12,7,5,11,19,27,26,31,25,10,9,1,1,4,4,2,0,2,1
uSF2,DE,004,01,0000952,614,287,37,30,37,26,13,2,5,6,13,11,25,18,19,7,16,6,6,1,3,2,1,0,3,327,33,46,34,14,19,3,4,13,17,29,34,18,18,12,11,1,6,4,2,5,2,0,2
uSF2,DE,004,01,0000953,614,287,37,30,37,26,13,2,5,6,13,11,25,18,19,7,16,6,6,1,3,2,1,0,3,327,33,46,34,14,19,3,4,13,17,29,34,18,18,12,11,1,6,4,2,5,2,0,2
uSF2,DE,004,01,0000954,614,287,37,30,37,26,13,2,5,6,13,11,25,18,19,7,16,6,6,1,3,2,1,0,3,327,33,46,34,14,19,3,4,13,17,29,34,18,18,12,11,1,6,4,2,5,2,0,2
uSF2,DE,004,01,0000955,152,81,5,9,5,7,4,1,1,2,1,2,10,6,11,9,2,0,1,2,0,0,1,1,1,71,2,4,9,4,1,2,0,0,4,7,6,6,6,4,0,1,3,1,0,5,1,2,3
uSF2,DE,004,01,0000956,152,81,5,9,5,7,4,1,1,2,1,2,10,6,11,9,2,0,1,2,0,0,1,1,1,71,2,4,9,4,1,2,0,0,4,7,6,6,6,4,0,1,3,1,0,5,1,2,3
uSF2,DE,004,01,0000958,104,55,4,7,2,5,3,0,1,1,1,1,6,4,4,8,2,0,1,2,0,0,1,1,1,49,2,4,3,3,1,0,0,0,4,5,2,3,3,3,0,1,3,1,0,5,1,2,3
uSF2,DE,004,01,0000959,2052,1004,63,88,89,52,35,8,9,31,53,79,71,93,63,60,62,15,26,15,20,31,14,18,9,1048,70,79,87,50,28,9,15,28,46,80,92,98,70,74,54,13,30,9,24,34,25,20,13
uSF2,DE,004,01,0000960,2052,1004,63,88,89,52,35,8,9,31,53,79,71,93,63,60,62,15,26,15,20,31,14,18,9,1048,70,79,87,50,28,9,15,28,46,80,92,98,70,74,54,13,30,9,24,34,25,20,13
uSF2,DE,004,01,0000961,278,143,12,9,8,6,11,0,2,3,5,11,8,13,8,19,8,3,2,5,3,3,2,1,1,135,6,6,10,8,4,3,2,4,5,12,7,12,15,16,3,0,5,0,4,5,4,2,2
uSF2,DE,004,01,0000962,278,143,12,9,8,6,11,0,2,3,5,11,8,13,8,19,8,3,2,5,3,3,2,1,1,135,6,6,10,8,4,3,2,4,5,12,7,12,15,16,3,0,5,0,4,5,4,2,2
uSF2,DE,004,01,0000963,1373,669,41,63,60,38,13,8,7,22,35,54,44,65,44,35,38,11,20,7,8,23,10,16,7,704,48,55,61,34,21,4,12,16,32,48,68,67,40,46,40,11,14,7,17,23,19,13,8
uSF2,DE,004,01,0000965,1366,667,41,63,60,38,13,8,7,22,35,54,44,65,43,35,37,11,20,7,8,23,10,16,7,699,48,54,60,34,21,4,12,16,32,48,67,66,40,45,40,11,14,7,17,23,19,13,8
uSF2,DE,004,01,0000966,401,192,10,16,21,8,11,0,0,6,13,14,19,15,11,6,16,1,4,3,9,5,2,1,1,209,16,18,16,8,3,2,1,8,9,20,17,19,15,12,11,2,11,2,3,6,2,5,3
uSF2,DE,004,01,0000967,401,192,10,16,21,8,11,0,0,6,13,14,19,15,11,6,16,1,4,3,9,5,2,1,1,209,16,18,16,8,3,2,1,8,9,20,17,19,15,12,11,2,11,2,3,6,2,5,3
uSF2,DE,004,01,0000968,2052,1004,63,88,89,52,35,8,9,31,53,79,71,93,63,60,62,15,26,15,20,31,14,18,9,1048,70,79,87,50,28,9,15,28,46,80,92,98,70,74,54,13,30,9,24,34,25,20,13
uSF2,DE,004,01,0000969,2052,1004,63,88,89,52,35,8,9,31,53,79,71,93,63,60,62,15,26,15,20,31,14,18,9,1048,70,79,87,50,28,9,15,28,46,80,92,98,70,74,54,13,30,9,24,34,25,20,13
uSF2,DE,004,01,0000970,278,143,12,9,8,6,11,0,2,3,5,11,8,13,8,19,8,3,2,5,3,3,2,1,1,135,6,6,10,8,4,3,2,4,5,12,7,12,15,16,3,0,5,0,4,5,4,2,2
uSF2,DE,004,01,0000971,278,143,12,9,8,6,11,0,2,3,5,11,8,13,8,19,8,3,2,5,3,3,2,1,1,135,6,6,10,8,4,3,2,4,5,12,7,12,15,16,3,0,5,0,4,5,4,2,2
uSF2,DE,004,01,0000972,1373,669,41,63,60,38,13,8,7,22,35,54,44,65,44,35,38,11,20,7,8,23,10,16,7,704,48,55,61,34,21,4,12,16,32,48,68,67,40,46,40,11,14,7,17,23,19,13,8
uSF2,DE,004,01,0000974,1366,667,41,63,60,38,13,8,7,22,35,54,44,65,43,35,37,11,20,7,8,23,10,16,7,699,48,54,60,34,21,4,12,16,32,48,67,66,40,45,40,11,14,7,17,23,19,13,8
uSF2,DE,004,01,0000975,401,192,10,16,21,8,11,0,0,6,13,14,19,15,11,6,16,1,4,3,9,5,2,1,1,209,16,18,16,8,3,2,1,8,9,20,17,19,15,12,11,2,11,2,3,6,2,5,3
uSF2,DE,004,01,0000976,401,192,10,16,21,8,11,0,0,6,13,14,19,15,11,6,16,1,4,3,9,5,2,1,1,209,16,18,16,8,3,2,1,8,9,20,17,19,15,12,11,2,11,2,3,6,2,5,3
uSF2,DE,004,01,0000977,2052,1004,63,88,89,52,35,8,9,31,53,79,71,93,63,60,62,15,26,15,20,31,14,18,9,1048,70,79,87,50,28,9,15,28,46,80,92,98,70,74,54,13,30,9,24,34,25,20,13
uSF2,DE,004,01,0000978,2052,1004,63,88,89,52,35,8,9,31,53,79,71,93,63,60,62,15,26,15,20,31,14,18,9,1048,70,79,87,50,28,9,15,28,46,80,92,98,70,74,54,13,30,9,24,34,25,20,13
uSF2,DE,004,01,0000979,24344,11432,1044,1224,1189,649,361,166,179,480,728,810,877,824,691,618,456,155,210,144,198,194,134,59,42,12912,1096,1069,1178,646,369,231,210,580,946,970,1076,1040,863,704,506,164,238,175,206,245,192,100,108
uSF2,DE,004,01,0000980,10248,4678,468,493,454,251,135,79,81,246,347,324,348,317,248,256,179,63,84,55,90,80,40,27,13,5570,495,406,480,258,153,122,107,330,450,416,435,439,379,294,220,69,95,76,87,95,79,46,39
uSF2,DE,004,01,0000981,24344,11432,1044,1224,1189,649,361,166,179,480,728,810,877,824,691,618,456,155,210,144,198,194,134,59,42,12912,1096,1069,1178,646,369,231,210,580,946,970,1076,1040,863,704,506,164,238,175,206,245,192,100,108
uSF2,DE,004,01,0000982,96210,44227,4062,4718,4556,2507,1366,596,549,1663,3073,3462,3585,3386,2788,2373,1676,594,747,439,542,675,497,236,137,51983,3991,4529,4360,2442,1406,688,717,2076,3787,4558,4723,4397,3788,2903,2061,682,919,564,739,999,779,446,429
uSF2,DE,004,01,0000983,1392,651,39,55,55,29,16,23,21,53,65,57,34,43,34,34,31,12,11,8,5,10,8,6,2,741,35,58,68,42,23,5,20,41,45,64,58,46,54,42,36,6,16,7,18,23,10,9,15
uSF2,DE,004,01,0000984,38589,17286,1644,1909,1852,1009,609,261,246,609,1049,1171,1245,1232,1110,849,623,226,321,223,282,361,277,105,73,21303,1510,1833,1834,1050,606,331,305,845,1327,1634,1788,1773,1415,1155,882,341,447,321,423,540,447,251,245
uSF2,DE,004,01,0000985,96210,44227,4062,4718,4556,2507,1366,596,549,1663,3073,3462,3585,3386,2788,2373,1676,594,747,439,542,675,497,236,137,51983,3991,4529,4360,2442,1406,688,717,2076,3787,4558,4723,4397,3788,2903,2061,682,919,564,739,999,779,446,429
uSF2,DE,004,01,0000986,96210,44227,4062,4718,4556,2507,1366,596,549,1663,3073,3462,3585,3386,2788,2373,1676,594,747,439,542,675,497,236,137,51983,3991,4529,4360,2442,1406,688,717,2076,3787,4558,4723,4397,3788,2903,2061,682,919,564,739,999,779,446,429
uSF2,DE,004,01,0000987,96210,44227,4062,4718,4556,2507,1366,596,549,1663,3073,3462,3585,3386,2788,2373,1676,594,747,439,542,675,497,236,137,51983,3991,4529,4360,2442,1406,688,717,2076,3787,4558,4723,4397,3788,2903,2061,682,919,564,739,999,779,446,429