uSF2,DE,005,01,0000001,148949,68886,6863,7606,7219,4013,2168,935,902,2570,4467,5083,5379,5086,4203,3552,2577,892,1163,720,909,1116,824,412,227,80063,6774,7178,7018,3898,2269,1155,1125,3247,5566,6589,6975,6529,5550,4310,3087,1046,1369,893,1189,1613,1278,737,668
uSF2,DE,005,01,0000002,125798,58169,5735,6412,6061,3306,1803,789,768,2243,3941,4376,4570,4303,3557,3052,2173,763,970,600,747,877,639,302,182,67629,5722,6034,5851,3231,1872,959,962,2776,4877,5675,5962,5565,4738,3682,2620,856,1177,748,956,1268,991,556,551
uSF2,DE,005,01,0000003,100004,46020,4496,5063,4781,2610,1416,619,582,1737,3177,3537,3669,3451,2843,2419,1702,603,755,448,546,681,504,241,140,53984,4443,4838,4589,2548,1471,718,744,2166,3894,4672,4843,4492,3856,2959,2101,685,935,572,746,1017,796,456,443
uSF2,DE,005,01,0000004,25794,12149,1239,1349,1280,696,387,170,186,506,764,839,901,852,714,633,471,160,215,152,201,196,135,61,42,13645,1279,1196,1262,683,401,241,218,610,983,1003,1119,1073,882,723,519,171,242,176,210,251,195,100,108
uSF2,DE,005,01,0000005,51748,23309,2303,2578,2448,1325,782,374,360,943,1499,1575,1657,1620,1420,1163,843,307,420,294,380,456,332,140,90,28439,2199,2415,2465,1392,810,476,442,1249,1869,2163,2335,2300,1877,1524,1159,419,565,410,533,670,548,312,307
uSF2,DE,005,01,0000006,41040,18416,1772,2051,1961,1067,638,294,277,685,1143,1241,1306,1295,1164,903,663,243,335,235,288,375,291,112,77,22624,1654,1968,1960,1123,649,350,333,906,1408,1730,1885,1847,1492,1217,934,349,468,334,444,572,467,266,268
uSF2,DE,005,01,0000007,10708,4893,531,527,487,258,144,80,83,258,356,334,351,325,256,260,180,64,85,59,92,81,41,28,13,5815,545,447,505,269,161,126,109,343,461,433,450,453,385,307,225,70,97,76,89,98,81,46,39
uSF2,DE,005,01,0000008,74050,34860,3432,3834,3613,1981,1021,415,408,1300,2442,2801,2913,2683,2137,1889,1330,456,550,306,367,421,307,162,92,39190,3523,3619,3386,1839,1062,483,520,1527,3008,3512,3627,3265,2861,2158,1461,437,612,338,423,598,443,244,244
uSF2,DE,005,01,0000009,58964,27604,2724,3012,2820,1543,778,325,305,1052,2034,2296,2363,2156,1679,1516,1039,360,420,213,258,306,213,129,63,31360,2789,2870,2629,1425,822,368,411,1260,2486,2942,2958,2645,2364,1742,1167,336,467,238,302,445,329,190,175
uSF2,DE,005,01,0000010,15086,7256,708,822,793,438,243,90,103,248,408,505,550,527,458,373,291,96,130,93,109,115,94,33,29,7830,734,749,757,414,240,115,109,267,522,570,669,620,497,416,294,101,145,100,121,153,114,54,69
uSF2,DE,005,01,0000011,23151,10717,1128,1194,1158,707,365,146,134,327,526,707,809,783,646,500,404,129,193,120,162,239,185,110,45,12434,1052,1144,1167,667,397,196,163,471,689,914,1013,964,812,628,467,190,192,145,233,345,287,181,117
uSF2,DE,005,01,0000012,2196,1074,79,102,99,60,36,8,10,32,53,81,74,93,65,62,65,16,27,15,22,32,16,18,9,1122,96,86,91,56,32,10,16,28,47,82,97,102,72,78,56,13,32,11,24,34,25,21,13
uSF2,DE,005,01,0000013,25794,12149,1239,1349,1280,696,387,170,186,506,764,839,901,852,714,633,471,160,215,152,201,196,135,61,42,13645,1279,1196,1262,683,401,241,218,610,983,1003,1119,1073,882,723,519,171,242,176,210,251,195,100,108
uSF2,DE,005,01,0000014,2826,1361,151,159,147,100,51,14,18,41,71,96,110,102,93,48,49,17,26,18,24,12,6,2,6,1465,133,157,172,92,63,16,14,48,82,121,139,105,77,58,55,20,22,18,23,16,17,5,12
uSF2,DE,005,01,0000017,395,202,17,31,20,10,9,2,3,7,14,19,17,16,18,7,4,0,1,2,2,1,1,0,1,193,15,24,27,13,5,4,2,6,13,22,15,13,13,6,3,7,0,1,2,0,0,0,2
uSF2,DE,005,01,0000018,395,202,17,31,20,10,9,2,3,7,14,19,17,16,18,7,4,0,1,2,2,1,1,0,1,193,15,24,27,13,5,4,2,6,13,22,15,13,13,6,3,7,0,1,2,0,0,0,2
uSF2,DE,005,01,0000019,122,58,5,9,5,5,0,0,0,2,2,3,7,7,4,3,2,0,0,1,2,1,0,0,0,64,2,5,6,5,1,1,0,3,2,5,9,9,3,6,1,1,0,1,1,2,1,0,0
uSF2,DE,005,01,0000020,122,58,5,9,5,5,0,0,0,2,2,3,7,7,4,3,2,0,0,1,2,1,0,0,0,64,2,5,6,5,1,1,0,3,2,5,9,9,3,6,1,1,0,1,1,2,1,0,0
uSF2,DE,005,01,0000025,660,306,42,36,38,28,15,2,5,7,13,11,25,19,20,7,16,6,6,1,3,2,1,0,3,354,36,55,37,15,21,4,4,16,17,31,35,18,19,12,12,1,6,4,2,5,2,0,2
uSF2,DE,005,01,0000026,660,306,42,36,38,28,15,2,5,7,13,11,25,19,20,7,16,6,6,1,3,2,1,0,3,354,36,55,37,15,21,4,4,16,17,31,35,18,19,12,12,1,6,4,2,5,2,0,2
uSF2,DE,005,01,0000027,1618,779,86,81,79,57,26,10,10,25,41,61,61,58,51,31,25,11,19,14,17,8,4,2,2,839,80,70,100,59,35,7,8,21,50,62,76,65,42,33,39,11,16,12,17,9,14,5,8
uSF2,DE,005,01,0000028,211,116,10,12,10,7,3,0,2,5,10,14,11,4,5,5,2,0,3,3,5,1,3,0,1,95,9,13,11,5,3,1,1,2,3,7,7,7,5,3,5,3,1,0,2,2,3,1,1
uSF2,DE,005,01,0000029,382,165,10,9,11,12,5,4,0,5,6,8,10,19,15,8,8,3,10,8,7,4,0,2,1,217,20,7,27,16,7,2,0,1,9,10,15,15,9,8,16,5,10,7,11,5,7,4,6
uSF2,DE,005,01,0000030,298,132,16,16,19,17,8,3,0,3,3,4,11,7,11,5,2,2,2,1,0,1,1,0,0,166,18,24,19,14,8,1,0,6,9,14,15,13,11,3,3,1,1,2,2,0,1,0,1
uSF2,DE,005,01,0000031,727,366,50,44,39,21,10,3,8,12,22,35,29,28,20,13,13,6,4,2,5,2,0,0,0,361,33,26,43,24,17,3,7,12,29,31,39,30,17,19,15,2,4,3,2,2,3,0,0
uSF2,DE,005,01,0000032,16947,8017,805,874,818,437,250,127,140,388,553,547,587,545,455,449,303,107,141,97,139,115,69,45,26,8930,825,729,780,437,254,179,149,465,679,656,702,725,623,476,352,109,156,113,130,148,119,66,58
uSF2,DE,005,01,0000033,397,186,11,27,23,14,8,2,0,4,11,9,7,18,9,11,8,3,3,3,2,5,5,2,1,211,11,21,18,12,6,6,0,8,15,10,17,21,13,10,6,4,4,4,8,7,5,2,3
uSF2,DE,005,01,0000034,397,186,11,27,23,14,8,2,0,4,11,9,7,18,9,11,8,3,3,3,2,5,5,2,1,211,11,21,18,12,6,6,0,8,15,10,17,21,13,10,6,4,4,4,8,7,5,2,3
uSF2,DE,005,01,0000037,10708,4893,531,527,487,258,144,80,83,258,356,334,351,325,256,260,180,64,85,59,92,81,41,28,13,5815,545,447,505,269,161,126,109,343,461,433,450,453,385,307,225,70,97,76,89,98,81,46,39
uSF2,DE,005,01,0000038,2440,1185,125,119,118,63,36,22,14,67,83,70,111,66,55,72,56,16,27,17,25,14,5,2,2,1255,106,88,113,45,35,32,18,85,88,100,114,100,79,79,53,16,29,19,17,17,9,6,7
uSF2,DE,005,01,0000039,170,88,5,6,7,0,0,2,1,5,9,5,14,7,11,5,2,2,0,0,4,1,1,0,1,82,4,9,6,0,2,1,0,2,6,9,11,4,7,6,4,1,1,4,2,1,0,0,2
uSF2,DE,005,01,0000040,1326,572,66,86,72,41,15,6,9,13,24,28,38,36,35,36,25,9,7,4,8,7,3,1,3,754,68,61,87,49,27,16,10,33,45,57,51,61,52,46,35,11,12,8,8,7,6,1,3
uSF2,DE,005,01,0000041,1197,540,38,38,42,33,18,10,16,31,27,34,43,40,31,35,19,10,15,9,17,17,9,7,1,657,45,39,60,34,20,10,6,28,36,36,54,60,45,36,33,11,9,16,14,21,21,14,9
uSF2,DE,005,01,0000042,311,136,17,12,7,3,4,1,1,9,9,12,9,7,8,8,8,2,1,1,4,2,5,3,3,175,20,17,5,5,3,3,4,14,21,11,9,11,2,5,5,0,3,3,7,9,9,6,3
uSF2,DE,005,01,0000043,1717,793,94,104,84,33,33,9,13,47,73,70,42,48,36,33,27,10,10,7,8,7,4,1,0,924,96,77,72,36,24,23,26,73,97,74,58,63,61,51,39,12,9,6,13,6,4,3,1
uSF2,DE,005,01,0000045,182,78,17,13,18,2,2,2,1,5,6,5,1,0,3,0,2,0,1,0,0,0,0,0,0,104,12,14,8,4,1,4,5,7,12,15,7,4,4,1,2,1,1,0,0,0,2,0,0
uSF2,DE,005,01,0000046,810,347,71,47,26,17,10,4,8,16,29,23,22,20,9,11,4,2,6,4,6,6,4,1,1,463,74,49,35,19,16,9,12,40,47,28,26,29,24,11,9,2,5,3,9,6,4,1,5
uSF2,DE,005,01,0000047,1480,660,51,73,68,30,16,17,10,29,49,51,48,58,32,25,24,6,9,12,15,15,9,11,2,820,76,59,72,45,14,13,13,26,63,57,79,62,59,42,23,8,20,10,14,22,20,15,8
uSF2,DE,005,01,0000048,406,200,22,16,19,18,4,3,3,10,12,9,8,21,10,14,5,4,6,4,5,7,0,0,0,206,17,9,20,15,8,8,1,5,10,15,15,22,16,11,10,5,3,4,3,6,2,0,1
uSF2,DE,005,01,0000049,582,259,24,13,21,16,6,3,6,21,32,23,13,22,23,17,8,3,1,0,0,5,1,1,0,323,22,21,25,15,9,7,13,25,28,25,23,36,35,12,9,3,3,3,2,3,4,0,0
uSF2,DE,005,01,0000051,660,350,53,57,44,12,3,1,8,23,54,45,32,15,2,1,0,0,0,0,0,0,0,0,0,310,62,39,25,6,3,5,9,29,37,45,30,13,4,0,0,0,0,0,1,0,1,1,0
uSF2,DE,005,01,0000052,660,350,53,57,44,12,3,1,8,23,54,45,32,15,2,1,0,0,0,0,0,0,0,0,0,310,62,39,25,6,3,5,9,29,37,45,30,13,4,0,0,0,0,0,1,0,1,1,0
uSF2,DE,005,01,0000053,424,212,10,27,21,12,7,5,2,7,10,7,10,19,17,20,12,5,4,4,9,0,1,2,1,212,16,18,20,10,7,4,4,10,11,9,12,24,22,11,10,4,4,4,4,2,3,1,2
uSF2,DE,005,01,0000054,120,60,3,8,4,3,1,1,0,3,3,3,4,6,5,4,2,0,2,3,3,0,0,1,1,60,5,5,6,0,3,1,1,5,2,3,5,6,5,2,2,2,2,0,2,0,1,1,1
uSF2,DE,005,01,0000055,304,152,7,19,17,9,6,4,2,4,7,4,6,13,12,16,10,5,2,1,6,0,1,1,0,152,11,13,14,10,4,3,3,5,9,6,7,18,17,9,8,2,2,4,2,2,2,0,1
uSF2,DE,005,01,0000056,349,172,21,17,14,15,10,5,1,4,7,6,14,16,11,11,5,4,2,3,3,2,0,0,1,177,12,17,17,15,2,3,3,6,16,8,14,18,16,17,5,1,3,1,0,1,1,0,1
uSF2,DE,005,01,0000057,226,105,17,11,7,6,5,4,0,2,6,6,7,9,6,7,3,1,2,2,2,2,0,0,0,121,9,11,12,7,0,2,2,5,14,7,11,13,11,8,4,1,2,0,0,1,0,0,1
uSF2,DE,005,01,0000058,123,67,4,6,7,9,5,1,1,2,1,0,7,7,5,4,2,3,0,1,1,0,0,0,1,56,3,6,5,8,2,1,1,1,2,1,3,5,5,9,1,0,1,1,0,0,1,0,0
uSF2,DE,005,01,0000065,661,337,32,34,33,20,18,9,15,24,20,17,24,21,28,18,6,3,7,3,0,4,0,1,0,324,24,26,33,25,13,5,3,14,25,24,24,41,26,9,11,4,4,2,5,2,3,1,0
uSF2,DE,005,01,0000066,651,334,31,34,33,19,18,9,15,24,20,17,23,21,28,18,6,3,7,3,0,4,0,1,0,317,23,26,33,23,13,4,3,14,25,24,24,39,25,9,11,4,4,2,5,2,3,1,0
uSF2,DE,005,01,0000067,169,89,6,11,8,8,4,1,1,2,1,2,10,7,11,9,2,0,1,2,0,0,1,1,1,80,3,8,10,4,1,2,0,0,4,7,8,7,6,4,0,1,3,1,0,5,1,2,3
uSF2,DE,005,01,0000069,116,62,5,9,4,6,3,0,1,1,1,1,6,5,4,8,2,0,1,2,0,0,1,1,1,54,3,7,3,3,1,0,0,0,4,5,3,3,3,3,0,1,3,1,0,5,1,2,3
uSF2,DE,005,01,0000070,3486,1724,133,167,180,97,56,24,30,65,91,123,134,118,120,116,89,26,38,22,33,21,21,11,9,1762,148,151,145,94,60,28,20,54,108,116,143,146,149,116,94,23,41,25,21,33,24,13,10
uSF2,DE,005,01,0000072,467,247,19,23,17,15,9,2,4,10,17,22,21,17,18,12,19,3,5,5,2,4,1,2,0,220,33,17,11,5,5,4,6,4,17,14,12,22,20,17,12,4,1,2,4,3,5,1,1
uSF2,DE,005,01,0000075,908,445,52,57,49,21,14,8,7,17,22,36,29,29,23,24,15,7,9,8,7,2,4,3,2,463,43,43,39,30,20,9,3,17,46,27,41,32,32,24,23,2,11,7,4,5,2,1,2
uSF2,DE,005,01,0000076,190,96,6,4,7,9,4,3,1,5,5,5,7,8,8,9,1,0,4,0,5,3,0,0,2,94,6,6,8,4,1,2,0,4,3,6,6,8,8,7,9,3,2,4,0,1,1,4,1
uSF2,DE,005,01,0000077,543,265,10,19,34,23,9,1,10,10,11,22,26,15,17,15,15,5,5,0,6,5,5,1,1,278,12,24,26,21,7,2,1,4,6,16,31,23,25,19,17,3,8,5,6,14,4,2,2
uSF2,DE,005,01,0000078,790,381,27,34,44,17,12,5,5,15,27,25,31,29,25,25,20,7,7,5,9,5,6,1,0,409,33,35,43,22,17,8,9,13,16,37,29,40,34,20,16,6,12,3,3,6,5,1,1
uSF2,DE,005,01,0000079,158,78,3,8,5,6,0,1,2,2,2,1,4,8,9,9,5,1,2,4,2,0,1,1,2,80,5,8,5,4,1,0,0,2,4,2,8,3,11,5,7,0,5,0,2,2,1,3,2
uSF2,DE,005,01,0000080,248,132,8,11,17,5,5,3,1,4,2,7,9,8,16,15,8,2,1,0,2,2,3,2,1,116,6,10,6,5,6,1,1,1,10,3,11,8,12,18,4,3,1,1,1,2,4,1,1
uSF2,DE,005,01,0000081,592,286,25,26,31,19,4,2,1,5,17,24,20,21,18,27,13,8,7,6,1,5,4,1,1,306,26,27,34,16,7,4,3,6,21,24,23,20,21,27,14,2,5,4,6,3,6,4,3
uSF2,DE,005,01,0000084,494,247,23,22,23,18,1,2,1,4,14,20,15,17,18,26,12,8,7,6,1,5,4,0,0,247,12,24,28,16,6,2,2,4,12,20,21,15,19,26,13,2,4,3,6,3,2,4,3
uSF2,DE,005,01,0000085,494,247,23,22,23,18,1,2,1,4,14,20,15,17,18,26,12,8,7,6,1,5,4,0,0,247,12,24,28,16,6,2,2,4,12,20,21,15,19,26,13,2,4,3,6,3,2,4,3
uSF2,DE,005,01,0000086,1528,688,82,83,66,42,26,9,5,18,28,45,49,42,35,40,39,8,13,10,7,15,20,5,1,840,96,79,93,45,19,12,11,24,55,55,77,66,43,41,25,15,13,11,11,21,19,6,3
uSF2,DE,005,01,0000087,723,304,46,44,40,18,10,4,3,10,7,19,20,22,10,7,10,5,8,5,2,5,6,2,1,419,65,35,49,25,11,5,9,14,28,25,39,30,20,9,6,9,7,7,1,9,12,2,2
uSF2,DE,005,01,0000088,723,304,46,44,40,18,10,4,3,10,7,19,20,22,10,7,10,5,8,5,2,5,6,2,1,419,65,35,49,25,11,5,9,14,28,25,39,30,20,9,6,9,7,7,1,9,12,2,2
uSF2,DE,005,01,0000091,765,364,32,35,25,22,16,4,2,8,20,26,25,20,23,33,29,3,5,5,5,9,14,3,0,401,28,41,41,19,8,6,2,10,25,28,35,34,23,32,19,6,6,4,10,12,7,4,1
uSF2,DE,005,01,0000092,539,260,23,23,18,19,10,2,1,5,16,18,19,15,17,21,18,1,4,3,5,8,12,2,0,279,18,26,31,11,6,2,1,4,22,22,28,26,15,19,13,4,4,4,8,9,4,1,1
uSF2,DE,005,01,0000094,131,60,6,8,6,2,2,0,1,1,2,6,3,2,3,7,7,2,0,0,0,0,2,0,0,71,6,12,6,2,0,3,0,3,1,3,4,5,4,8,4,2,0,0,1,3,1,3,0
uSF2,DE,005,01,0000095,362,174,7,14,17,7,5,2,2,2,6,12,11,13,14,22,11,9,3,7,3,5,1,0,1,188,17,12,9,8,3,2,2,3,8,19,12,8,17,21,20,2,6,1,5,5,3,2,3
uSF2,DE,005,01,0000098,354,170,7,14,16,7,5,2,1,2,6,12,10,13,14,21,11,9,3,7,3,5,1,0,1,184,17,12,9,8,3,2,2,2,8,18,12,8,17,20,19,2,6,1,5,5,3,2,3
uSF2,DE,005,01,0000099,354,170,7,14,16,7,5,2,1,2,6,12,10,13,14,21,11,9,3,7,3,5,1,0,1,184,17,12,9,8,3,2,2,2,8,18,12,8,17,20,19,2,6,1,5,5,3,2,3
uSF2,DE,005,01,0000100,1821,827,78,87,112,57,33,6,11,23,37,54,65,65,47,16,32,8,14,9,12,29,22,7,3,994,84,105,102,38,34,13,16,32,62,68,82,79,48,49,29,12,24,13,19,39,19,8,19
uSF2,DE,005,01,0000103,180,81,2,8,7,3,4,0,1,2,3,4,10,8,10,0,6,1,0,0,1,6,3,1,1,99,11,8,8,7,2,0,2,0,2,7,6,13,5,6,1,2,2,1,6,6,1,2,1
uSF2,DE,005,01,0000104,180,81,2,8,7,3,4,0,1,2,3,4,10,8,10,0,6,1,0,0,1,6,3,1,1,99,11,8,8,7,2,0,2,0,2,7,6,13,5,6,1,2,2,1,6,6,1,2,1
uSF2,DE,005,01,0000105,1229,537,55,58,79,38,24,5,8,14,27,38,39,38,25,11,12,5,10,6,6,17,16,6,0,692,64,75,72,26,25,9,13,27,44,53,50,52,34,26,20,8,21,9,10,24,12,6,12
uSF2,DE,005,01,0000106,1055,468,45,50,67,31,20,5,8,10,25,34,35,33,25,11,11,5,7,6,5,15,14,6,0,587,55,58,54,23,22,8,11,23,37,41,41,46,33,23,20,8,18,9,10,22,7,6,12
uSF2,DE,005,01,0000107,174,69,10,8,12,7,4,0,0,4,2,4,4,5,0,0,1,0,3,0,1,2,2,0,0,105,9,17,18,3,3,1,2,4,7,12,9,6,1,3,0,0,3,0,0,2,5,0,0
uSF2,DE,005,01,0000108,390,198,21,18,23,14,4,1,2,7,7,12,16,18,12,5,14,2,4,3,5,5,3,0,2,192,9,21,19,5,6,4,1,5,15,8,23,13,9,17,8,2,1,2,3,9,6,0,6
uSF2,DE,005,01,0000109,145,75,9,7,7,5,0,0,0,2,5,7,6,8,5,2,3,0,3,0,3,3,0,0,0,70,4,9,8,1,5,2,0,2,5,3,6,5,4,6,0,0,1,0,2,4,1,0,2
uSF2,DE,005,01,0000111,116,57,8,8,11,4,1,0,1,4,0,0,7,4,1,0,0,1,0,3,0,1,1,0,2,59,5,7,6,2,1,1,0,3,6,3,11,2,2,4,0,0,0,1,0,1,3,0,1
uSF2,DE,005,01,0000112,118,61,4,3,5,5,3,1,1,1,2,5,3,5,6,2,9,1,1,0,2,1,1,0,0,57,0,4,5,2,0,1,1,0,4,2,6,6,3,6,7,2,0,1,1,3,1,0,2
uSF2,DE,005,01,0000113,1718,796,91,106,89,34,18,10,9,29,52,61,59,64,52,31,24,3,11,5,15,15,13,1,4,922,98,87,72,47,21,15,23,32,76,60,84,70,53,51,24,11,16,16,16,19,12,9,10
uSF2,DE,005,01,0000114,106,56,1,8,4,2,1,0,1,2,4,3,5,9,3,3,3,0,3,0,1,0,2,0,1,50,2,3,6,0,1,2,1,0,4,1,2,7,5,4,1,1,3,1,0,3,1,1,1
uSF2,DE,005,01,0000115,106,56,1,8,4,2,1,0,1,2,4,3,5,9,3,3,3,0,3,0,1,0,2,0,1,50,2,3,6,0,1,2,1,0,4,1,2,7,5,4,1,1,3,1,0,3,1,1,1
uSF2,DE,005,01,0000116,1321,601,81,81,70,26,14,8,8,25,41,49,38,40,37,21,17,3,5,4,9,11,10,1,2,720,80,72,52,35,17,9,17,27,68,50,65,52,39,35,18,7,12,10,15,13,10,8,9
uSF2,DE,005,01,0000117,471,228,25,25,23,6,5,1,6,9,15,27,14,12,15,17,10,2,2,2,1,6,3,0,2,243,24,16,11,12,7,3,2,10,23,16,23,16,11,17,10,4,5,2,8,7,6,6,4
uSF2,DE,005,01,0000118,151,63,9,6,10,1,0,0,0,2,4,6,5,6,5,1,4,0,0,0,1,0,3,0,0,88,6,16,5,1,1,0,2,4,5,4,10,7,9,2,3,0,1,1,3,2,2,1,3
uSF2,DE,005,01,0000119,699,310,47,50,37,19,9,7,2,14,22,16,19,22,17,3,3,1,3,2,7,5,4,1,0,389,50,40,36,22,9,6,13,13,40,30,32,29,19,16,5,3,6,7,4,4,2,1,2
uSF2,DE,005,01,0000120,291,139,9,17,15,6,3,2,0,2,7,9,16,15,12,7,4,0,3,1,5,4,1,0,1,152,16,12,14,12,3,4,5,5,4,9,17,11,9,12,5,3,1,5,1,3,1,0,0
uSF2,DE,005,01,0000122,191,91,7,6,11,3,2,1,0,2,4,6,12,11,6,5,3,0,2,1,5,3,0,0,1,100,14,9,7,8,1,3,3,4,4,6,12,4,6,6,5,2,1,2,1,2,0,0,0
uSF2,DE,005,01,0000125,362,174,7,14,17,7,5,2,2,2,6,12,11,13,14,22,11,9,3,7,3,5,1,0,1,188,17,12,9,8,3,2,2,3,8,19,12,8,17,21,20,2,6,1,5,5,3,2,3
uSF2,DE,005,01,0000126,598,296,26,36,28,9,6,1,7,11,20,31,20,21,19,20,14,2,5,2,2,7,6,0,3,302,26,20,18,12,8,5,3,10,27,18,26,24,16,22,11,5,8,4,8,11,8,7,5
uSF2,DE,005,01,0000127,342,154,16,12,21,4,2,1,0,4,8,12,17,17,11,6,7,0,2,1,6,3,3,0,1,188,20,25,12,9,2,3,5,8,9,10,22,11,15,8,8,2,2,3,4,4,2,1,3
uSF2,DE,005,01,0000128,777,345,49,58,40,21,10,7,2,14,24,18,22,26,22,5,3,1,4,2,7,5,4,1,0,432,52,42,42,26,11,7,15,14,40,32,36,35,22,21,5,4,6,9,4,4,2,1,2
uSF2,DE,005,01,0000130,2907,1432,144,142,135,78,45,24,18,77,100,92,132,83,73,84,75,19,32,22,27,18,6,4,2,1475,139,105,124,50,40,36,24,89,105,114,126,122,99,96,65,20,30,21,21,20,14,7,8
uSF2,DE,005,01,0000131,194,100,6,7,7,0,0,2,1,6,9,6,15,9,11,6,2,2,3,0,4,1,1,1,1,94,4,10,6,0,2,1,0,4,6,11,12,6,7,6,5,1,1,7,2,1,0,0,2
uSF2,DE,005,01,0000132,1326,572,66,86,72,41,15,6,9,13,24,28,38,36,35,36,25,9,7,4,8,7,3,1,3,754,68,61,87,49,27,16,10,33,45,57,51,61,52,46,35,11,12,8,8,7,6,1,3
uSF2,DE,005,01,0000133,1197,540,38,38,42,33,18,10,16,31,27,34,43,40,31,35,19,10,15,9,17,17,9,7,1,657,45,39,60,34,20,10,6,28,36,36,54,60,45,36,33,11,9,16,14,21,21,14,9
uSF2,DE,005,01,0000134,311,136,17,12,7,3,4,1,1,9,9,12,9,7,8,8,8,2,1,1,4,2,5,3,3,175,20,17,5,5,3,3,4,14,21,11,9,11,2,5,5,0,3,3,7,9,9,6,3
uSF2,DE,005,01,0000135,1794,829,97,108,90,33,35,9,13,47,77,72,46,51,38,34,28,11,12,7,8,7,5,1,0,965,99,81,76,39,26,24,26,73,102,78,59,67,62,54,42,14,9,6,13,6,5,3,1
uSF2,DE,005,01,0000136,660,350,53,57,44,12,3,1,8,23,54,45,32,15,2,1,0,0,0,0,0,0,0,0,0,310,62,39,25,6,3,5,9,29,37,45,30,13,4,0,0,0,0,0,1,0,1,1,0
uSF2,DE,005,01,0000137,1316,628,86,81,74,29,21,14,8,24,34,47,37,38,32,31,20,8,12,10,9,4,4,3,2,688,64,68,59,41,21,15,10,29,72,49,59,49,47,33,29,4,14,7,4,6,4,1,3
uSF2,DE,005,01,0000138,810,347,71,47,26,17,10,4,8,16,29,23,22,20,9,11,4,2,6,4,6,6,4,1,1,463,74,49,35,19,16,9,12,40,47,28,26,29,24,11,9,2,5,3,9,6,4,1,5
uSF2,DE,005,01,0000139,1480,660,51,73,68,30,16,17,10,29,49,51,48,58,32,25,24,6,9,12,15,15,9,11,2,820,76,59,72,45,14,13,13,26,63,57,79,62,59,42,23,8,20,10,14,22,20,15,8
uSF2,DE,005,01,0000140,1112,563,54,52,57,39,23,13,18,35,32,27,35,44,45,34,11,7,13,7,5,11,0,1,0,549,40,36,60,39,21,14,4,19,35,41,44,65,44,21,21,9,7,6,8,8,5,1,1
uSF2,DE,005,01,0000141,258,131,8,14,12,13,6,2,1,5,4,3,12,13,10,8,4,3,2,4,4,0,0,1,2,127,9,12,12,10,5,3,2,6,5,4,8,13,11,12,3,2,3,1,2,0,2,1,1
uSF2,DE,005,01,0000142,703,344,22,40,34,29,15,5,2,10,17,15,20,31,21,28,11,3,8,5,7,8,6,3,4,359,20,34,29,19,8,8,0,12,22,21,26,32,24,20,15,8,9,9,8,13,7,8,7
uSF2,DE,005,01,0000143,876,434,19,38,51,33,15,5,12,14,20,26,36,30,30,32,25,12,7,1,12,7,6,2,1,442,25,38,42,31,11,5,4,9,16,24,40,42,42,28,25,6,10,9,8,16,6,2,3
uSF2,DE,005,01,0000144,1417,662,53,52,68,33,18,8,11,37,59,52,44,53,48,44,29,10,9,6,9,10,7,2,0,755,57,57,72,38,27,15,23,39,44,63,54,77,71,34,26,10,15,6,7,9,9,1,1
uSF2,DE,005,01,0000145,240,112,4,8,9,8,0,2,3,7,5,5,6,8,12,13,5,1,4,5,2,0,1,2,2,128,10,11,6,6,3,0,1,7,11,8,11,4,12,11,10,0,7,0,2,2,1,3,2
uSF2,DE,005,01,0000146,251,135,8,12,18,5,5,3,1,4,2,7,9,9,16,15,8,2,1,0,2,2,3,2,1,116,6,10,6,5,6,1,1,1,10,3,11,8,12,18,4,3,1,1,1,2,4,1,1
uSF2,DE,005,01,0000147,211,116,10,12,10,7,3,0,2,5,10,14,11,4,5,5,2,0,3,3,5,1,3,0,1,95,9,13,11,5,3,1,1,2,3,7,7,7,5,3,5,3,1,0,2,2,3,1,1
uSF2,DE,005,01,0000148,390,170,10,10,11,12,5,4,0,5,6,10,10,20,15,8,9,3,10,8,7,4,0,2,1,220,20,7,27,16,7,2,0,2,9,11,15,15,9,8,16,5,10,7,12,5,7,4,6
uSF2,DE,005,01,0000149,1353,640,75,83,77,55,32,7,8,17,30,34,53,42,49,19,22,8,9,4,5,4,3,0,4,713,69,103,83,42,34,9,6,28,39,67,65,44,43,21,18,9,7,7,6,5,3,0,5
uSF2,DE,005,01,0000150,872,435,56,54,49,26,11,3,8,14,25,38,36,36,24,16,16,6,4,3,7,3,0,0,0,437,35,34,51,29,19,4,7,16,31,36,52,39,20,26,16,3,4,4,3,4,4,0,0
uSF2,DE,005,01,0000151,167,86,9,10,10,7,1,0,0,2,5,7,6,9,5,2,3,0,3,0,3,4,0,0,0,81,4,10,11,1,6,2,0,2,6,3,9,6,4,6,0,0,1,1,2,4,1,0,2
uSF2,DE,005,01,0000152,1066,473,45,50,67,31,20,5,8,10,25,34,35,34,25,12,13,5,7,6,5,15,15,6,0,593,55,59,54,23,22,8,11,23,37,41,41,46,33,24,21,8,18,9,10,23,8,6,13
uSF2,DE,005,01,0000153,290,126,18,16,23,11,5,0,1,8,2,4,11,9,1,0,1,1,3,3,1,3,3,0,2,164,14,24,24,5,4,2,2,7,13,15,20,8,3,7,0,0,3,1,0,3,8,0,1
uSF2,DE,005,01,0000154,298,142,6,11,12,8,7,1,2,3,5,9,13,13,16,2,15,2,1,0,3,7,4,1,1,156,11,12,13,9,2,1,3,0,6,9,12,19,8,12,8,4,2,2,7,9,2,2,3
uSF2,DE,005,01,0000155,592,286,25,26,31,19,4,2,1,5,17,24,20,21,18,27,13,8,7,6,1,5,4,1,1,306,26,27,34,16,7,4,3,6,21,24,23,20,21,27,14,2,5,4,6,3,6,4,3
uSF2,DE,005,01,0000156,579,280,27,27,19,21,10,3,1,5,17,18,23,15,19,21,18,1,4,3,5,9,12,2,0,299,21,29,34,12,6,3,1,4,24,24,31,28,15,19,13,4,4,4,8,9,4,1,1
uSF2,DE,005,01,0000157,818,348,49,48,41,19,14,6,3,12,9,21,23,25,13,12,14,5,9,7,2,6,6,3,1,470,69,38,53,31,13,6,10,17,30,28,42,33,24,14,8,9,9,7,2,9,14,2,2
uSF2,DE,005,01,0000158,131,60,6,8,6,2,2,0,1,1,2,6,3,2,3,7,7,2,0,0,0,0,2,0,0,71,6,12,6,2,0,3,0,3,1,3,4,5,4,8,4,2,0,0,1,3,1,3,0
uSF2,DE,005,01,0000159,100004,46020,4496,5063,4781,2610,1416,619,582,1737,3177,3537,3669,3451,2843,2419,1702,603,755,448,546,681,504,241,140,53984,4443,4838,4589,2548,1471,718,744,2166,3894,4672,4843,4492,3856,2959,2101,685,935,572,746,1017,796,456,443
uSF2,DE,005,01,0000160,9784,4413,476,507,441,255,102,54,59,162,340,345,346,330,258,248,170,60,71,35,37,48,37,23,9,5371,500,487,458,244,144,63,77,203,538,492,447,419,424,299,202,56,70,34,49,60,57,22,26
uSF2,DE,005,01,0000169,2248,1012,113,113,107,50,28,15,23,51,84,88,90,94,47,41,25,6,14,3,3,7,6,2,2,1236,140,110,114,61,37,20,23,58,126,130,104,104,72,54,22,6,9,7,13,5,11,4,6
uSF2,DE,005,01,0000170,215,105,9,15,12,8,5,1,1,2,5,11,8,8,7,4,0,1,1,0,2,0,3,1,1,110,13,9,10,5,5,0,1,4,7,16,10,9,8,3,0,1,3,1,2,0,1,1,1
uSF2,DE,005,01,0000171,854,375,42,31,34,16,11,2,8,15,39,45,40,35,20,12,11,0,5,0,1,4,3,0,1,479,43,40,35,21,7,3,4,22,67,56,47,41,33,24,12,2,2,5,6,2,4,1,2
uSF2,DE,005,01,0000172,1057,475,60,60,55,20,12,11,13,31,38,30,39,43,17,21,11,3,5,3,0,2,0,1,0,582,80,53,60,32,22,17,17,31,51,55,41,47,27,20,7,2,2,0,5,3,5,2,3
uSF2,DE,005,01,0000173,122,57,2,7,6,6,0,1,1,3,2,2,3,8,3,4,3,2,3,0,0,1,0,0,0,65,4,8,9,3,3,0,1,1,1,3,6,7,4,7,3,1,2,1,0,0,1,0,0
uSF2,DE,005,01,0000174,2071,910,129,132,111,61,17,9,6,19,58,59,57,59,51,45,28,12,15,6,11,11,7,5,2,1161,114,128,106,51,34,19,29,39,130,96,79,94,83,56,37,16,15,10,3,10,10,1,1
uSF2,DE,005,01,0000176,2052,898,129,130,107,61,16,9,6,19,58,59,57,58,50,44,26,12,15,6,11,11,7,5,2,1154,114,128,105,51,34,19,28,39,130,96,78,93,80,56,37,16,15,10,3,10,10,1,1
uSF2,DE,005,01,0000177,5394,2453,234,257,221,142,57,29,29,92,198,192,197,176,157,159,114,41,41,25,22,29,22,14,5,2941,242,247,237,132,73,24,25,106,280,263,259,220,267,185,141,32,46,15,33,43,35,17,19
uSF2,DE,005,01,0000178,1446,616,88,90,62,36,16,7,9,21,62,58,50,30,20,21,15,3,4,5,4,6,8,1,0,830,88,76,76,40,26,10,9,43,100,71,72,54,56,29,24,4,7,1,8,17,11,5,3
uSF2,DE,005,01,0000180,284,145,10,19,21,12,4,0,0,5,3,7,13,14,15,7,5,3,2,2,1,1,0,1,0,139,5,16,19,7,5,2,0,1,2,12,20,12,10,8,6,1,4,1,2,3,1,2,0
uSF2,DE,005,01,0000181,219,94,11,11,8,6,4,1,1,4,10,6,9,3,7,6,2,1,1,2,0,0,0,0,1,125,7,15,10,7,0,3,1,3,12,16,11,12,13,5,4,0,3,0,0,0,1,2,0
uSF2,DE,005,01,0000182,684,317,33,33,30,12,3,4,4,19,42,39,26,16,19,15,7,2,4,4,1,1,0,2,1,367,31,37,12,11,7,2,4,15,55,39,37,27,30,26,13,4,5,0,2,4,4,2,0
uSF2,DE,005,01,0000183,378,175,12,14,12,5,3,2,1,5,11,8,15,20,14,25,8,3,4,1,4,3,2,3,0,203,18,14,12,9,3,0,1,7,15,13,16,13,29,16,13,4,5,3,3,3,3,1,2
uSF2,DE,005,01,0000185,242,114,4,9,10,8,6,2,1,2,5,2,5,12,11,8,11,4,2,3,2,4,2,1,0,128,7,6,10,9,5,1,1,2,2,12,5,8,18,16,9,4,1,3,2,3,2,1,1
uSF2,DE,005,01,0000187,142,61,3,7,3,4,1,2,2,2,4,6,8,2,5,5,2,0,1,1,1,0,1,1,0,81,5,3,8,6,2,1,3,2,11,6,6,3,9,7,3,1,1,1,0,1,1,0,1
uSF2,DE,005,01,0000188,195,97,2,7,6,13,4,1,2,2,1,5,4,8,12,8,8,4,3,1,2,3,1,0,0,98,4,5,9,5,0,1,0,1,2,6,4,16,15,10,11,1,0,2,1,2,3,0,0
uSF2,DE,005,01,0000189,735,324,32,27,30,10,8,0,3,18,40,34,33,24,20,19,12,4,4,1,1,2,0,1,1,411,38,32,36,12,11,1,3,17,52,54,49,24,32,22,13,3,6,0,4,0,0,0,2
uSF2,DE,005,01,0000190,281,133,11,9,12,12,0,2,2,3,7,9,7,13,9,15,9,2,5,2,1,0,2,1,0,148,3,9,18,9,3,0,1,4,12,9,6,18,20,13,8,2,4,1,3,2,3,0,0
uSF2,DE,005,01,0000192,154,70,10,4,7,4,1,1,0,1,1,4,2,8,2,5,10,1,2,1,1,2,3,0,0,84,8,9,5,4,5,2,0,4,1,3,6,9,5,4,6,1,2,0,2,3,3,1,1
uSF2,DE,005,01,0000193,109,46,2,2,4,2,2,2,2,2,2,1,2,5,3,3,7,2,2,0,0,0,0,0,1,63,5,3,2,6,1,0,0,3,4,2,3,7,3,8,7,2,2,0,1,1,1,1,1
uSF2,DE,005,01,0000194,108,55,5,3,0,0,1,1,0,4,4,3,4,3,2,5,6,4,3,2,1,1,0,2,1,53,5,3,4,0,1,0,0,0,5,5,4,1,4,5,6,2,1,2,1,0,1,0,3
uSF2,DE,005,01,0000198,5366,2661,266,288,284,172,74,34,20,75,190,256,256,221,173,141,87,22,31,14,23,17,10,4,3,2705,255,242,236,114,67,21,28,81,207,308,299,270,189,154,80,27,36,12,14,27,15,9,14
uSF2,DE,005,01,0000199,943,458,49,42,49,33,14,7,4,21,42,39,49,39,23,22,14,1,1,1,0,5,2,0,1,485,56,33,47,12,14,6,6,17,35,55,47,54,31,31,13,5,5,0,1,10,4,0,3
uSF2,DE,005,01,0000200,943,458,49,42,49,33,14,7,4,21,42,39,49,39,23,22,14,1,1,1,0,5,2,0,1,485,56,33,47,12,14,6,6,17,35,55,47,54,31,31,13,5,5,0,1,10,4,0,3
uSF2,DE,005,01,0000201,2266,1133,113,131,124,69,34,10,11,23,72,115,112,93,69,63,33,11,17,7,12,6,4,2,2,1133,99,96,82,49,24,6,10,38,99,137,133,108,85,73,28,10,18,9,9,7,2,4,7
uSF2,DE,005,01,0000202,580,304,30,36,33,25,12,3,0,6,20,31,24,27,16,14,8,1,5,2,5,3,1,1,1,276,23,24,16,9,6,3,2,4,27,33,37,27,21,17,8,4,3,4,1,3,2,0,2
uSF2,DE,005,01,0000203,1353,666,71,75,70,36,20,7,9,14,47,66,71,51,41,40,16,8,9,4,5,3,2,1,0,687,64,57,51,27,16,2,5,31,61,84,69,70,50,47,17,5,13,5,5,2,0,2,4
uSF2,DE,005,01,0000204,272,130,10,19,16,4,1,0,2,2,4,16,14,12,9,9,4,1,2,1,2,0,1,0,1,142,12,15,12,12,2,1,3,0,9,17,22,10,10,6,2,1,1,0,3,1,0,2,1
uSF2,DE,005,01,0000206,2157,1070,104,115,111,70,26,17,5,31,76,102,95,89,81,56,40,10,13,6,11,6,4,2,0,1087,100,113,107,53,29,9,12,26,73,116,119,108,73,50,39,12,13,3,4,10,9,5,4
uSF2,DE,005,01,0000207,331,167,14,15,22,12,1,2,0,2,16,17,16,16,17,6,6,1,1,2,0,1,0,0,0,164,16,19,16,5,3,1,2,4,5,24,23,22,10,5,2,0,0,2,1,1,1,1,1
uSF2,DE,005,01,0000208,702,349,27,38,36,26,8,6,1,3,10,23,34,35,29,28,21,3,8,2,5,3,2,1,0,353,27,34,29,18,9,2,3,6,10,30,45,37,31,25,20,7,5,0,3,6,2,2,2
uSF2,DE,005,01,0000209,876,436,55,48,40,26,12,6,3,23,44,45,40,24,28,18,8,4,3,2,3,1,2,1,0,440,48,44,48,26,15,6,7,13,45,48,40,31,24,11,15,3,5,1,0,2,5,2,1
uSF2,DE,005,01,0000210,248,118,8,14,13,6,5,3,1,3,6,17,5,14,7,4,5,2,1,0,3,1,0,0,0,130,9,16,14,4,2,0,0,3,13,14,11,18,8,9,2,2,3,0,0,1,1,0,0
uSF2,DE,005,01,0000211,6003,2841,278,279,253,129,68,63,68,181,280,225,195,233,174,153,104,32,33,17,22,25,19,8,2,3162,296,289,265,156,104,46,64,177,262,249,267,241,218,157,117,19,48,26,37,51,27,22,24
uSF2,DE,005,01,0000212,2377,1092,122,121,106,52,26,15,16,60,100,83,82,94,69,61,32,12,13,3,9,10,6,0,0,1285,141,123,105,61,44,24,25,65,121,92,105,95,97,61,47,6,16,8,9,18,10,7,5
uSF2,DE,005,01,0000213,1066,464,74,61,66,28,16,7,4,16,28,20,29,43,29,19,5,5,7,0,3,2,2,0,0,602,81,63,55,24,22,17,19,37,45,47,44,38,37,26,15,2,8,1,3,4,5,4,5
uSF2,DE,005,01,0000214,558,280,28,26,13,9,5,4,6,27,42,25,25,21,19,13,7,2,3,0,2,3,0,0,0,278,26,26,14,9,11,4,3,16,37,22,24,21,19,14,13,3,3,2,0,9,0,2,0
uSF2,DE,005,01,0000215,753,348,20,34,27,15,5,4,6,17,30,38,28,30,21,29,20,5,3,3,4,5,4,0,0,405,34,34,36,28,11,3,3,12,39,23,37,36,41,21,19,1,5,5,6,5,5,1,0
uSF2,DE,005,01,0000216,1497,701,47,64,61,31,18,28,25,59,67,59,34,43,34,35,33,12,11,8,5,10,8,7,2,796,46,67,71,43,27,7,22,47,48,67,62,48,56,42,36,6,16,8,18,24,10,10,15
uSF2,DE,005,01,0000217,128,59,3,6,2,5,1,3,3,7,9,2,3,4,5,3,2,0,0,0,0,0,1,0,0,69,4,3,8,4,1,0,7,7,1,9,5,3,8,6,2,0,1,0,0,0,0,0,0
uSF2,DE,005,01,0000219,235,103,4,9,5,5,0,2,0,4,2,8,5,3,7,15,13,2,4,2,1,5,4,3,0,132,2,8,8,7,4,1,1,2,3,5,11,7,14,11,8,3,3,2,4,10,5,5,8
uSF2,DE,005,01,0000220,164,83,6,3,4,0,1,0,3,20,11,11,4,3,1,5,3,3,1,2,1,1,0,0,0,81,4,5,2,1,5,1,4,18,9,4,7,3,5,2,6,0,1,0,2,0,0,1,1
uSF2,DE,005,01,0000221,269,140,9,9,19,3,7,11,8,15,22,10,5,7,8,3,1,1,1,0,0,0,0,1,0,129,8,19,12,2,4,2,6,6,9,17,12,6,6,7,4,1,2,3,2,0,0,1,0
uSF2,DE,005,01,0000222,162,78,4,6,7,3,3,2,0,3,8,7,4,12,5,2,4,1,2,3,0,0,0,2,0,84,9,10,6,5,2,1,0,1,6,3,6,9,9,5,4,0,3,1,1,2,0,0,1
uSF2,DE,005,01,0000223,157,48,6,11,8,2,1,2,0,4,2,2,2,1,1,0,3,0,1,0,0,1,0,0,1,109,6,9,16,9,6,2,2,3,6,9,8,4,2,2,1,0,4,1,6,6,2,1,4
uSF2,DE,005,01,0000224,105,53,3,9,1,6,1,6,7,2,2,6,2,3,0,0,1,0,1,0,0,2,0,1,0,52,1,4,7,5,2,0,0,4,3,5,3,4,2,3,2,0,1,0,3,3,0,0,0
uSF2,DE,005,01,0000226,106,50,8,4,5,3,2,1,0,2,5,4,2,2,1,3,1,2,1,0,1,0,2,0,1,56,5,3,6,7,1,0,2,1,6,3,5,5,1,2,5,0,1,0,0,2,0,1,0
uSF2,DE,005,01,0000228,288,148,10,14,10,9,2,0,1,10,16,6,13,16,15,13,5,3,1,1,0,1,1,1,0,140,7,10,10,3,2,0,2,6,12,17,12,15,15,8,10,2,5,2,1,0,0,1,0
uSF2,DE,005,01,0000229,288,148,10,14,10,9,2,0,1,10,16,6,13,16,15,13,5,3,1,1,0,1,1,1,0,140,7,10,10,3,2,0,2,6,12,17,12,15,15,8,10,2,5,2,1,0,0,1,0
uSF2,DE,005,01,0000230,1841,900,99,80,76,37,22,20,26,52,97,77,66,80,56,44,34,5,8,5,8,4,4,0,0,941,102,89,79,49,31,15,15,59,81,73,88,83,50,46,24,5,11,8,9,9,7,4,4
uSF2,DE,005,01,0000232,647,336,45,25,19,5,13,9,8,27,61,30,26,20,20,13,3,1,5,2,3,0,1,0,0,311,47,19,17,17,8,3,8,37,37,26,27,17,14,9,6,4,3,4,2,2,1,1,2
uSF2,DE,005,01,0000234,29,15,1,3,1,0,0,0,0,1,0,3,0,1,1,1,2,0,0,0,0,1,0,0,0,14,0,0,1,0,0,1,0,2,0,0,0,2,0,6,1,0,0,0,0,1,0,0,0
uSF2,DE,005,01,0000237,151,72,4,7,7,2,1,0,1,1,8,4,5,11,5,5,3,1,1,0,1,3,2,0,0,79,2,6,8,5,3,0,3,2,4,4,6,8,6,4,6,1,3,1,2,1,2,1,1
uSF2,DE,005,01,0000238,618,273,29,34,30,22,7,5,7,11,16,21,19,29,14,7,14,2,1,1,3,0,1,0,0,345,39,38,36,18,9,9,3,13,27,20,37,33,20,17,9,0,3,1,4,3,3,2,1
uSF2,DE,005,01,0000239,197,99,14,4,8,2,1,2,3,2,7,10,8,10,11,8,6,1,1,0,1,0,0,0,0,98,7,17,5,4,4,2,0,0,5,16,14,11,1,6,2,0,1,2,0,1,0,0,0
uSF2,DE,005,01,0000240,3966,1840,198,206,200,91,61,25,26,73,137,146,163,134,97,83,51,22,28,20,19,22,14,16,8,2126,186,194,190,96,61,25,26,119,155,190,195,177,147,108,64,21,30,21,28,24,27,21,21
uSF2,DE,005,01,0000241,587,294,34,34,28,19,14,1,8,20,26,18,29,22,13,16,4,3,0,0,2,1,1,1,0,293,23,23,31,13,11,5,3,16,22,38,28,29,21,11,11,3,1,2,0,0,1,1,0
uSF2,DE,005,01,0000242,233,123,18,16,8,9,7,1,3,10,9,8,5,8,7,8,2,0,0,0,2,1,0,1,0,110,10,8,9,4,4,2,1,7,11,10,13,12,12,2,4,0,0,1,0,0,0,0,0
uSF2,DE,005,01,0000243,354,171,16,18,20,10,7,0,5,10,17,10,24,14,6,8,2,3,0,0,0,0,1,0,0,183,13,15,22,9,7,3,2,9,11,28,15,17,9,9,7,3,1,1,0,0,1,1,0
uSF2,DE,005,01,0000244,148,72,11,4,5,3,1,4,1,4,6,2,9,8,7,3,4,0,0,0,0,0,0,0,0,76,9,4,8,5,4,0,0,3,6,10,11,4,3,5,2,0,1,0,0,0,1,0,0
uSF2,DE,005,01,0000247,3231,1474,153,168,167,69,46,20,17,49,105,126,125,104,77,64,43,19,28,20,17,21,13,15,8,1757,154,167,151,78,46,20,23,100,127,142,156,144,123,92,51,18,28,19,28,24,25,20,21
uSF2,DE,005,01,0000248,602,292,23,23,23,9,9,2,3,5,20,22,31,23,19,17,9,11,12,6,6,6,4,7,2,310,16,25,25,8,4,2,4,12,13,14,34,27,27,14,15,10,13,6,12,5,10,5,9
uSF2,DE,005,01,0000249,156,76,7,13,7,2,4,3,0,3,2,7,7,9,5,2,0,1,1,2,0,0,0,0,1,80,3,9,9,2,5,1,1,5,7,8,12,3,6,3,2,0,1,0,2,0,0,1,0
uSF2,DE,005,01,0000250,724,347,33,42,52,21,10,4,5,11,31,33,29,24,12,12,9,1,4,1,1,4,5,1,2,377,35,30,41,12,8,5,3,26,34,37,32,38,23,23,15,2,5,2,1,2,1,2,0
uSF2,DE,005,01,0000252,310,135,12,15,18,8,3,1,0,6,10,18,10,11,6,4,6,1,2,1,2,1,0,0,0,175,21,14,12,9,10,4,5,9,12,20,12,14,13,9,4,0,1,2,1,1,2,0,0
uSF2,DE,005,01,0000254,444,188,9,18,18,8,7,1,1,7,6,13,15,7,12,12,14,2,5,9,5,7,4,5,3,256,15,22,20,15,5,1,2,6,8,15,14,17,23,16,10,5,7,5,4,14,10,11,11
uSF2,DE,005,01,0000255,904,389,64,54,40,19,13,9,8,16,33,26,30,26,19,14,5,3,4,1,2,2,0,1,0,515,61,62,41,30,12,7,8,42,50,43,48,39,27,25,4,0,1,3,8,2,1,0,1
uSF2,DE,005,01,0000256,2645,1248,122,125,139,71,41,11,8,34,68,73,99,109,76,87,59,21,23,15,17,22,16,6,6,1397,117,126,112,72,31,21,20,41,58,102,133,113,132,86,61,17,31,15,19,35,22,15,18
uSF2,DE,005,01,0000257,1356,604,74,68,72,36,23,8,7,18,36,38,43,48,36,35,16,4,10,5,2,11,10,2,2,752,72,80,62,39,19,16,11,25,32,59,75,60,62,42,25,6,14,5,10,16,11,7,4
uSF2,DE,005,01,0000258,181,88,12,7,10,6,5,0,1,3,9,10,10,5,1,4,1,0,3,0,0,0,0,0,1,93,15,8,10,1,4,4,1,8,4,12,6,4,10,3,0,0,1,0,0,1,1,0,0
uSF2,DE,005,01,0000259,1163,510,61,61,62,30,18,8,5,15,27,27,33,43,34,30,14,4,7,5,2,11,10,2,1,653,57,72,52,37,15,12,10,17,27,47,69,55,51,39,24,6,13,4,10,15,10,7,4
uSF2,DE,005,01,0000264,1234,617,48,54,61,34,18,3,1,16,31,34,52,58,39,50,41,17,12,10,14,11,6,3,4,617,45,43,47,33,11,5,9,16,26,40,55,52,66,44,34,11,17,9,9,13,11,8,13
uSF2,DE,005,01,0000265,267,129,13,12,14,9,0,1,0,3,6,11,18,8,6,13,10,2,1,0,1,0,1,0,0,138,9,9,12,13,4,2,2,3,6,11,13,8,17,9,8,1,2,1,0,2,4,0,2
uSF2,DE,005,01,0000266,258,131,13,12,15,12,3,1,0,2,4,3,11,24,10,9,3,2,2,0,1,2,2,0,0,127,14,18,9,5,0,0,2,4,2,8,17,15,10,8,3,2,2,2,3,2,0,0,1
uSF2,DE,005,01,0000267,177,104,6,13,9,5,9,0,1,4,6,6,7,5,7,8,10,2,1,1,1,3,0,0,0,73,5,3,7,1,1,0,1,2,6,7,5,4,12,9,7,1,0,1,1,0,0,0,0
uSF2,DE,005,01,0000269,153,73,4,3,9,1,1,0,0,0,8,4,5,5,2,6,6,2,2,4,7,0,1,1,2,80,5,2,5,1,0,1,2,0,2,1,10,4,7,3,7,2,7,4,2,4,2,4,5
uSF2,DE,005,01,0000270,280,129,9,11,10,5,3,0,0,6,3,8,8,11,10,11,9,6,4,3,3,6,2,1,0,151,10,9,11,10,5,1,1,7,7,11,7,13,14,13,5,5,4,1,2,5,2,3,5
uSF2,DE,005,01,0000272,36,18,0,1,1,0,1,1,0,0,0,1,0,3,2,1,1,0,1,2,1,0,0,1,1,18,0,0,0,3,0,0,1,0,1,1,0,1,3,2,3,0,1,0,0,0,2,0,0
uSF2,DE,005,01,0000273,24950,11565,1097,1321,1233,681,355,120,110,409,768,985,1009,809,694,595,459,165,190,95,117,150,105,69,29,13385,1138,1253,1158,621,334,157,168,487,968,1327,1271,1096,1004,723,525,154,199,114,147,224,158,86,73
uSF2,DE,005,01,0000274,4034,1963,216,281,247,131,60,16,17,46,125,202,192,132,102,89,52,11,15,8,10,3,6,2,0,2071,230,245,218,108,48,27,12,49,133,260,221,180,152,82,48,13,13,5,7,7,5,4,4
uSF2,DE,005,01,0000275,2729,1337,158,205,194,89,35,11,12,35,95,132,120,79,57,50,32,8,6,4,9,2,2,2,0,1392,150,171,152,82,33,19,8,34,97,185,138,117,97,50,26,8,6,3,5,5,2,1,3
uSF2,DE,005,01,0000276,479,237,21,30,14,20,9,2,4,7,11,20,21,22,22,10,6,2,8,3,1,1,3,0,0,242,21,28,25,8,7,2,1,5,9,21,28,26,28,7,9,4,5,2,0,0,3,2,1
uSF2,DE,005,01,0000277,826,389,37,46,39,22,16,3,1,4,19,50,51,31,23,29,14,1,1,1,0,0,1,0,0,437,59,46,41,18,8,6,3,10,27,54,55,37,27,25,13,1,2,0,2,2,0,1,0
uSF2,DE,005,01,0000278,1002,452,37,42,50,28,15,4,6,15,24,24,47,35,26,37,19,8,8,6,4,7,4,4,2,550,37,42,50,29,14,4,8,11,37,43,56,42,46,37,28,11,6,5,8,8,12,4,12
uSF2,DE,005,01,0000280,236,117,15,12,13,8,4,0,0,1,10,6,15,11,11,4,2,1,1,3,0,0,0,0,0,119,10,11,10,8,2,0,0,1,13,11,18,11,9,2,4,1,1,2,1,1,2,0,1
uSF2,DE,005,01,0000281,452,194,14,18,22,12,5,3,6,10,9,13,19,12,10,12,9,5,4,1,3,2,3,1,1,258,17,17,23,15,7,1,6,6,17,23,17,20,24,24,11,7,2,1,6,5,3,0,6
uSF2,DE,005,01,0000282,216,94,6,5,11,7,3,1,0,3,4,3,9,9,4,13,4,2,2,1,1,3,0,3,0,122,9,8,14,4,5,3,2,2,4,6,14,8,9,8,8,3,2,2,1,1,5,3,1
uSF2,DE,005,01,0000283,980,463,51,42,41,24,16,4,3,22,32,41,38,33,29,23,23,7,15,6,4,4,1,3,1,517,52,56,36,21,22,10,5,20,31,46,43,43,47,26,23,4,2,4,8,4,8,3,3
uSF2,DE,005,01,0000284,367,165,14,11,17,11,4,0,2,9,11,9,11,13,10,14,10,3,6,2,3,2,0,3,0,202,15,18,10,10,10,3,0,8,12,17,16,12,21,15,14,3,1,0,4,2,8,1,2
uSF2,DE,005,01,0000285,613,298,37,31,24,13,12,4,1,13,21,32,27,20,19,9,13,4,9,4,1,2,1,0,1,315,37,38,26,11,12,7,5,12,19,29,27,31,26,11,9,1,1,4,4,2,0,2,1
uSF2,DE,005,01,0000286,18934,8687,793,956,895,498,264,96,84,326,587,718,732,609,537,446,365,139,152,75,99,136,94,60,26,10247,819,910,854,463,250,116,143,407,767,978,951,831,759,578,426,126,178,100,124,205,133,75,54
uSF2,DE,005,01,0000287,2999,1358,179,181,148,58,33,13,18,62,124,150,135,85,60,53,27,10,10,1,4,3,3,1,0,1641,180,180,123,63,30,20,32,87,161,202,163,128,109,65,39,8,17,7,8,11,4,4,0
uSF2,DE,005,01,0000289,1050,491,39,44,45,31,21,2,5,13,24,39,59,44,38,28,22,9,8,2,3,8,4,2,1,559,44,43,49,25,9,4,8,26,29,51,62,59,42,44,19,5,7,9,6,10,5,2,1
uSF2,DE,005,01,0000290,3276,1406,151,188,159,73,40,15,12,57,128,162,134,95,56,49,32,9,12,7,6,11,4,4,2,1870,190,189,170,67,43,14,26,87,191,212,213,149,119,68,47,13,15,14,10,16,10,4,3
uSF2,DE,005,01,0000291,1339,613,56,61,64,29,17,9,9,41,42,42,52,52,38,41,23,7,15,2,4,1,5,3,0,726,71,57,56,43,23,6,10,43,60,71,69,61,54,49,17,8,9,3,3,4,6,2,1
uSF2,DE,005,01,0000292,34,13,3,1,2,0,0,1,0,0,2,1,1,1,1,0,0,0,0,0,0,0,0,0,0,21,2,2,3,2,0,0,0,0,2,2,2,3,1,0,0,0,0,0,1,1,0,0,0
uSF2,DE,005,01,0000293,2836,1308,86,125,144,91,49,14,7,39,68,66,94,64,95,53,72,29,31,15,31,51,41,28,15,1528,61,126,127,77,37,20,22,36,80,96,112,119,110,81,78,33,40,25,43,82,62,38,23
uSF2,DE,005,01,0000294,1595,762,61,92,68,47,24,8,3,25,39,58,46,40,47,43,40,18,20,17,17,26,11,10,2,833,55,68,76,37,18,12,5,27,51,55,60,55,70,49,48,18,30,14,17,33,18,8,9
uSF2,DE,005,01,0000295,1243,575,35,55,53,36,18,10,10,20,24,29,40,41,35,50,34,19,19,5,15,15,6,4,2,668,38,48,57,34,27,9,11,15,29,47,39,56,64,59,54,13,13,11,10,16,10,1,7
uSF2,DE,005,01,0000297,366,183,10,16,30,12,10,2,2,7,4,9,12,14,17,11,5,2,5,4,5,3,3,0,0,183,12,20,12,8,9,2,0,1,7,12,20,24,13,12,8,5,5,0,4,2,4,3,0
uSF2,DE,005,01,0000298,1134,546,49,40,61,36,19,6,2,16,29,43,35,48,42,35,33,16,10,6,6,5,6,1,2,588,38,53,43,29,13,4,9,25,25,45,61,47,39,50,48,4,14,5,8,16,4,4,4
uSF2,DE,005,01,0000300,1083,480,42,66,50,28,9,1,7,8,31,56,49,42,35,23,13,6,4,2,0,2,4,2,0,603,52,49,67,27,21,7,4,15,46,83,72,57,37,22,16,5,1,4,3,4,3,6,2
uSF2,DE,005,01,0000301,1813,866,72,82,65,48,21,13,9,35,67,57,67,76,70,57,54,14,17,13,8,10,6,4,1,947,71,66,65,43,16,16,16,44,82,92,71,66,95,77,45,13,27,8,11,10,6,3,4
uSF2,DE,005,01,0000302,773,370,27,35,27,19,13,4,2,13,12,18,23,47,36,41,21,4,4,7,6,4,3,1,3,403,28,35,23,21,8,1,2,12,15,28,33,38,47,42,18,7,11,4,1,11,4,7,7
uSF2,DE,005,01,0000306,321,159,13,11,14,7,6,1,1,5,4,6,14,17,15,14,12,3,2,2,4,3,3,1,1,162,9,13,9,6,4,1,1,4,5,8,13,16,16,21,7,2,5,2,0,7,3,5,5
uSF2,DE,005,01,0000308,257,126,11,8,7,6,6,1,0,5,4,5,11,14,12,9,9,3,2,2,3,3,3,1,1,131,7,9,8,4,3,1,1,4,4,6,11,14,11,15,7,1,5,2,0,6,3,4,5
uSF2,DE,005,01,0000309,216,103,9,8,7,6,6,0,1,5,2,5,5,12,12,17,5,1,0,1,1,0,0,0,0,113,10,12,3,10,2,0,1,5,2,8,8,12,18,12,4,0,0,2,1,3,0,0,0
uSF2,DE,005,01,0000310,216,103,9,8,7,6,6,0,1,5,2,5,5,12,12,17,5,1,0,1,1,0,0,0,0,113,10,12,3,10,2,0,1,5,2,8,8,12,18,12,4,0,0,2,1,3,0,0,0
uSF2,DE,005,01,0000311,188,91,3,16,6,6,1,3,0,3,3,7,3,15,7,9,2,0,2,2,1,0,0,0,2,97,8,7,8,5,2,0,0,2,7,8,7,10,11,7,6,0,3,0,0,1,1,2,2
uSF2,DE,005,01,0000315,1981,962,84,77,81,39,21,12,15,54,91,92,83,100,50,65,41,13,14,7,7,9,3,3,1,1019,97,70,64,30,29,7,15,63,89,77,100,102,84,66,44,16,16,10,11,12,10,5,2
uSF2,DE,005,01,0000318,516,246,17,16,19,6,6,5,2,10,21,28,21,27,13,26,16,1,4,3,1,2,1,0,1,270,23,13,13,7,7,4,5,9,20,22,30,26,25,20,16,8,9,4,2,3,3,0,1
uSF2,DE,005,01,0000320,307,150,9,8,12,5,3,0,0,6,17,21,14,12,11,17,8,0,2,2,1,1,0,0,1,157,16,6,4,5,3,2,4,6,14,13,17,13,16,13,8,6,4,4,1,1,1,0,0
uSF2,DE,005,01,0000321,75,33,1,2,3,0,1,3,2,0,2,4,2,5,1,1,4,1,0,0,0,1,0,0,0,42,4,1,3,0,2,1,0,2,3,4,6,4,3,2,2,0,2,0,1,1,1,0,0
uSF2,DE,005,01,0000322,105,51,6,3,3,1,2,2,0,4,1,3,4,8,1,8,3,0,1,0,0,0,1,0,0,54,2,2,5,2,2,1,1,1,3,3,6,8,5,4,5,1,1,0,0,1,0,0,1
uSF2,DE,005,01,0000323,1438,705,67,60,61,33,15,7,13,44,69,63,61,71,37,38,25,11,10,4,6,6,2,2,0,733,72,56,51,21,22,3,10,54,68,55,70,74,58,45,27,8,7,5,9,8,5,4,1
uSF2,DE,005,01,0000325,211,107,15,16,5,3,2,1,3,10,18,6,8,9,4,5,0,2,0,0,0,0,0,0,0,104,13,4,5,3,5,1,0,15,15,7,15,6,6,4,1,1,0,0,1,0,2,0,0
uSF2,DE,005,01,0000326,150,84,6,9,16,5,5,0,0,3,6,7,8,9,2,1,2,1,2,1,1,0,0,0,0,66,3,10,7,2,0,0,0,2,5,9,6,6,7,3,2,2,1,1,0,0,0,0,0
uSF2,DE,005,01,0000329,147,68,4,5,7,2,1,0,2,5,7,6,14,3,3,4,2,0,0,1,2,0,0,0,0,79,8,6,6,3,4,0,1,7,6,6,5,11,6,4,2,1,1,0,0,1,1,0,0
uSF2,DE,005,01,0000330,167,93,9,2,5,2,3,2,6,11,7,4,6,15,4,7,4,1,2,1,0,1,0,1,0,74,6,3,5,3,3,0,2,5,8,6,8,7,5,3,5,1,0,1,0,2,0,1,0
uSF2,DE,005,01,0000331,502,232,19,19,17,12,4,3,1,12,25,31,16,26,19,10,6,5,2,1,0,2,1,1,0,270,30,21,16,4,5,2,2,20,28,21,28,30,21,21,9,1,3,2,3,2,1,0,0
uSF2,DE,005,01,0000332,112,51,6,6,8,2,0,1,1,1,3,3,3,3,1,3,4,1,3,0,1,1,0,0,0,61,4,5,4,1,1,0,2,3,4,4,5,5,5,4,4,1,1,0,3,2,0,3,0
uSF2,DE,005,01,0000333,736,372,43,49,43,17,10,1,1,8,12,29,46,40,19,14,10,10,6,1,2,6,3,1,1,364,31,41,29,21,11,3,1,4,11,41,48,36,24,15,9,8,6,1,4,6,5,4,5
uSF2,DE,005,01,0000334,154,72,4,4,8,2,5,1,0,1,3,4,6,6,3,3,2,6,4,1,0,5,2,1,1,82,4,6,7,5,0,1,1,0,2,4,4,8,6,4,3,6,3,0,2,3,4,4,5
uSF2,DE,005,01,0000335,154,72,4,4,8,2,5,1,0,1,3,4,6,6,3,3,2,6,4,1,0,5,2,1,1,82,4,6,7,5,0,1,1,0,2,4,4,8,6,4,3,6,3,0,2,3,4,4,5
uSF2,DE,005,01,0000336,582,300,39,45,35,15,5,0,1,7,9,25,40,34,16,11,8,4,2,0,2,1,1,0,0,282,27,35,22,16,11,2,0,4,9,37,44,28,18,11,6,2,3,1,2,3,1,0,0
uSF2,DE,005,01,0000337,530,277,37,43,33,13,5,0,1,6,9,22,36,30,16,10,7,4,2,0,2,0,1,0,0,253,25,30,19,14,10,2,0,4,8,32,42,27,17,8,4,2,3,1,2,2,1,0,0
uSF2,DE,005,01,0000338,52,23,2,2,2,2,0,0,0,1,0,3,4,4,0,1,1,0,0,0,0,1,0,0,0,29,2,5,3,2,1,0,0,0,1,5,2,1,1,3,2,0,0,0,0,1,0,0,0
uSF2,DE,005,01,0000339,4257,2033,180,189,180,100,51,29,21,102,203,186,177,176,136,124,70,23,31,10,13,13,11,5,3,2224,187,200,165,93,60,31,32,120,231,195,227,201,151,134,83,17,36,9,10,19,14,9,0
uSF2,DE,005,01,0000340,4257,2033,180,189,180,100,51,29,21,102,203,186,177,176,136,124,70,23,31,10,13,13,11,5,3,2224,187,200,165,93,60,31,32,120,231,195,227,201,151,134,83,17,36,9,10,19,14,9,0
uSF2,DE,005,01,0000341,614,293,25,24,26,18,2,3,0,12,35,24,22,27,14,26,10,7,8,1,2,3,2,1,1,321,26,18,21,15,6,4,5,12,35,26,33,28,26,22,17,4,7,1,2,5,3,5,0
uSF2,DE,005,01,0000342,631,299,23,27,25,10,5,2,2,10,31,35,26,27,19,23,19,4,5,2,2,1,1,0,0,332,33,30,26,12,10,4,0,18,48,29,24,21,22,28,17,1,5,1,0,0,2,1,0
uSF2,DE,005,01,0000343,1960,935,77,94,84,59,31,13,15,41,70,82,88,89,61,60,28,9,11,5,5,5,5,3,0,1025,87,97,83,54,25,10,13,36,80,95,115,112,69,58,37,6,17,5,8,9,7,2,0
uSF2,DE,005,01,0000344,1052,506,55,44,45,13,13,11,4,39,67,45,41,33,42,15,13,3,7,2,4,4,3,1,2,546,41,55,35,12,19,13,14,54,68,45,55,40,34,26,12,6,7,2,0,5,2,1,0
uSF2,DE,005,01,0000345,39543,17715,1725,1987,1900,1036,620,266,252,626,1076,1182,1272,1252,1130,868,630,231,324,227,283,365,283,105,75,21828,1608,1901,1889,1080,622,343,311,859,1360,1663,1823,1799,1436,1175,898,343,452,326,426,548,457,256,253
uSF2,DE,005,01,0000346,39543,17715,1725,1987,1900,1036,620,266,252,626,1076,1182,1272,1252,1130,868,630,231,324,227,283,365,283,105,75,21828,1608,1901,1889,1080,622,343,311,859,1360,1663,1823,1799,1436,1175,898,343,452,326,426,548,457,256,253
uSF2,DE,005,01,0000347,396,208,14,21,7,5,3,1,4,13,27,29,26,24,11,10,5,2,2,0,0,3,1,0,0,188,17,15,5,1,5,2,2,13,19,22,17,19,20,9,1,4,3,2,1,4,3,3,1
uSF2,DE,005,01,0000348,4264,1947,137,190,207,110,77,16,27,51,91,142,143,148,150,133,110,22,44,29,34,39,33,12,2,2317,138,176,185,125,51,32,20,68,132,192,208,219,185,186,136,43,45,31,33,48,36,14,14
uSF2,DE,005,01,0000349,2653,1226,79,121,152,64,54,25,17,45,73,87,90,82,95,85,55,17,22,15,10,17,10,11,0,1427,80,129,121,83,38,21,12,49,76,108,132,129,101,111,68,31,27,25,26,21,20,12,7
uSF2,DE,005,01,0000350,1444,653,50,59,55,23,26,8,11,23,35,48,52,41,41,24,24,19,31,14,15,27,16,10,1,791,53,37,57,34,21,12,9,27,51,62,64,61,53,44,41,13,26,23,22,29,22,18,12
uSF2,DE,005,01,0000351,3279,1506,162,164,146,81,47,17,17,55,85,112,111,109,96,94,66,28,28,19,24,26,12,5,2,1773,143,149,152,89,64,31,29,70,101,110,149,141,130,113,108,34,36,26,23,34,22,10,9
uSF2,DE,005,01,0000352,2250,1006,73,119,107,51,36,20,13,29,55,61,66,90,54,49,33,21,27,17,22,27,24,7,5,1244,87,111,128,47,28,16,11,37,68,80,107,88,76,71,57,22,39,27,41,42,35,12,14
uSF2,DE,005,01,0000353,2783,1228,105,104,111,63,26,18,18,51,52,70,107,93,96,65,55,24,30,19,34,37,32,11,7,1555,84,122,120,74,53,22,21,51,70,89,125,126,103,70,75,30,67,36,47,58,51,35,26
uSF2,DE,005,01,0000354,1557,645,128,148,100,37,19,11,13,23,20,19,30,26,15,11,13,2,8,3,6,7,4,1,1,912,109,106,101,58,24,16,13,61,56,82,58,77,44,26,16,6,14,11,6,11,4,6,7
uSF2,DE,005,01,0000355,468,214,36,20,18,7,7,2,2,3,11,13,24,17,20,9,6,3,3,1,1,8,3,0,0,254,23,24,22,13,12,1,4,11,17,22,26,24,12,14,5,4,1,4,4,6,1,1,3
uSF2,DE,005,01,0000356,2070,916,71,100,92,76,34,14,14,32,68,58,67,72,75,37,22,11,12,10,11,13,16,7,4,1154,75,100,106,64,27,20,20,42,65,100,115,93,89,51,30,20,16,11,19,21,36,18,16
uSF2,DE,005,01,0000357,220,108,8,11,8,4,3,3,1,5,8,12,6,10,6,7,3,1,1,1,2,3,3,1,1,112,5,5,4,5,3,1,1,9,8,12,9,13,8,9,4,0,0,0,5,2,2,2,5
uSF2,DE,005,01,0000358,267,115,4,3,0,2,0,0,0,2,12,17,11,4,15,12,3,2,5,4,7,6,4,1,1,152,2,0,0,2,1,1,1,3,9,10,7,9,14,14,11,6,6,3,8,20,9,7,9
uSF2,DE,005,01,0000359,125,52,3,5,7,3,0,1,1,0,8,2,3,6,1,0,2,0,0,0,6,2,2,0,0,73,0,12,2,2,1,0,0,1,5,10,5,1,5,5,6,2,3,4,2,3,2,1,1
uSF2,DE,005,01,0000361,648,292,35,25,27,22,9,6,2,14,20,13,24,20,13,14,12,4,3,5,2,8,11,1,2,356,22,24,35,14,15,2,9,10,23,37,32,25,22,14,12,4,11,3,11,14,9,4,4
uSF2,DE,005,01,0000362,1103,507,47,43,53,27,19,6,12,29,40,33,37,31,36,26,24,2,6,7,10,10,6,0,3,596,46,53,57,27,21,5,13,25,41,50,47,50,35,32,24,5,13,0,9,18,12,5,8
uSF2,DE,005,01,0000363,1756,787,76,93,81,53,20,15,20,38,70,48,56,59,53,39,26,7,4,4,6,7,5,5,2,969,72,116,95,45,33,15,15,54,98,75,85,88,67,31,27,8,7,8,7,13,7,3,0
uSF2,DE,005,01,0000364,2752,1141,151,133,120,84,43,10,12,41,49,43,59,47,65,45,23,20,33,16,30,41,39,11,26,1611,104,140,125,69,44,24,26,62,92,83,99,96,87,76,71,24,39,41,54,83,71,41,60
uSF2,DE,005,01,0000365,1651,729,89,101,101,47,32,21,12,18,36,35,62,40,41,22,19,7,11,8,6,10,9,2,0,922,84,76,87,53,38,24,21,21,56,74,75,76,68,37,34,16,9,14,11,22,11,5,10
uSF2,DE,005,01,0000366,511,224,34,34,25,8,7,8,5,12,18,19,7,12,7,6,9,2,4,2,1,3,0,1,0,287,23,32,20,15,6,9,9,22,23,23,15,28,15,13,12,4,3,2,0,3,2,6,2
uSF2,DE,005,01,0000367,1767,718,86,90,63,42,27,9,9,26,59,61,43,50,35,40,26,4,9,8,2,12,7,6,4,1049,94,100,94,37,27,18,24,58,73,82,75,72,54,55,42,15,19,9,28,19,30,15,9
uSF2,DE,005,01,0000368,1562,705,43,74,101,52,28,7,9,25,51,45,44,57,43,32,18,7,13,8,15,17,11,3,2,857,76,91,81,50,32,15,17,27,38,59,80,62,58,33,33,10,16,17,14,21,13,7,7
uSF2,DE,005,01,0000369,1790,819,78,93,90,58,32,15,12,26,40,50,52,67,57,29,29,8,13,11,18,18,15,2,6,971,74,82,92,55,23,20,10,42,50,68,80,85,61,47,29,17,18,16,25,25,27,15,10
uSF2,DE,005,01,0000370,1632,751,69,83,65,36,23,12,12,31,66,68,59,61,34,32,21,6,6,16,11,17,12,8,3,881,69,61,51,43,24,12,14,39,68,65,83,93,52,52,29,13,23,6,14,21,21,9,19
uSF2,DE,005,01,0000371,732,340,34,39,33,27,10,7,5,9,22,28,20,28,22,21,11,5,2,3,4,4,6,0,0,392,32,35,36,14,8,6,0,16,27,39,36,50,22,31,9,5,2,2,9,5,5,3,0
uSF2,DE,005,01,0000372,1251,594,83,78,89,46,30,12,1,13,40,42,42,33,34,18,12,5,4,4,5,1,1,0,1,657,62,66,77,45,18,14,9,32,58,64,66,41,41,22,13,6,6,4,3,4,3,3,0
uSF2,DE,005,01,0000373,544,249,27,35,40,8,7,2,3,10,18,24,29,20,13,7,1,1,1,0,1,1,0,0,1,295,31,35,34,14,5,4,1,8,32,43,28,29,13,6,4,0,2,0,4,0,2,0,0
uSF2,DE,005,01,0000374,396,208,14,21,7,5,3,1,4,13,27,29,26,24,11,10,5,2,2,0,0,3,1,0,0,188,17,15,5,1,5,2,2,13,19,22,17,19,20,9,1,4,3,2,1,4,3,3,1
uSF2,DE,005,01,0000375,4264,1947,137,190,207,110,77,16,27,51,91,142,143,148,150,133,110,22,44,29,34,39,33,12,2,2317,138,176,185,125,51,32,20,68,132,192,208,219,185,186,136,43,45,31,33,48,36,14,14
uSF2,DE,005,01,0000376,2653,1226,79,121,152,64,54,25,17,45,73,87,90,82,95,85,55,17,22,15,10,17,10,11,0,1427,80,129,121,83,38,21,12,49,76,108,132,129,101,111,68,31,27,25,26,21,20,12,7
uSF2,DE,005,01,0000377,1444,653,50,59,55,23,26,8,11,23,35,48,52,41,41,24,24,19,31,14,15,27,16,10,1,791,53,37,57,34,21,12,9,27,51,62,64,61,53,44,41,13,26,23,22,29,22,18,12
uSF2,DE,005,01,0000378,3279,1506,162,164,146,81,47,17,17,55,85,112,111,109,96,94,66,28,28,19,24,26,12,5,2,1773,143,149,152,89,64,31,29,70,101,110,149,141,130,113,108,34,36,26,23,34,22,10,9
uSF2,DE,005,01,0000379,2250,1006,73,119,107,51,36,20,13,29,55,61,66,90,54,49,33,21,27,17,22,27,24,7,5,1244,87,111,128,47,28,16,11,37,68,80,107,88,76,71,57,22,39,27,41,42,35,12,14
uSF2,DE,005,01,0000380,2783,1228,105,104,111,63,26,18,18,51,52,70,107,93,96,65,55,24,30,19,34,37,32,11,7,1555,84,122,120,74,53,22,21,51,70,89,125,126,103,70,75,30,67,36,47,58,51,35,26
uSF2,DE,005,01,0000381,1557,645,128,148,100,37,19,11,13,23,20,19,30,26,15,11,13,2,8,3,6,7,4,1,1,912,109,106,101,58,24,16,13,61,56,82,58,77,44,26,16,6,14,11,6,11,4,6,7
uSF2,DE,005,01,0000382,468,214,36,20,18,7,7,2,2,3,11,13,24,17,20,9,6,3,3,1,1,8,3,0,0,254,23,24,22,13,12,1,4,11,17,22,26,24,12,14,5,4,1,4,4,6,1,1,3
uSF2,DE,005,01,0000383,2070,916,71,100,92,76,34,14,14,32,68,58,67,72,75,37,22,11,12,10,11,13,16,7,4,1154,75,100,106,64,27,20,20,42,65,100,115,93,89,51,30,20,16,11,19,21,36,18,16
uSF2,DE,005,01,0000384,220,108,8,11,8,4,3,3,1,5,8,12,6,10,6,7,3,1,1,1,2,3,3,1,1,112,5,5,4,5,3,1,1,9,8,12,9,13,8,9,4,0,0,0,5,2,2,2,5
uSF2,DE,005,01,0000385,267,115,4,3,0,2,0,0,0,2,12,17,11,4,15,12,3,2,5,4,7,6,4,1,1,152,2,0,0,2,1,1,1,3,9,10,7,9,14,14,11,6,6,3,8,20,9,7,9
uSF2,DE,005,01,0000386,125,52,3,5,7,3,0,1,1,0,8,2,3,6,1,0,2,0,0,0,6,2,2,0,0,73,0,12,2,2,1,0,0,1,5,10,5,1,5,5,6,2,3,4,2,3,2,1,1
uSF2,DE,005,01,0000388,648,292,35,25,27,22,9,6,2,14,20,13,24,20,13,14,12,4,3,5,2,8,11,1,2,356,22,24,35,14,15,2,9,10,23,37,32,25,22,14,12,4,11,3,11,14,9,4,4
uSF2,DE,005,01,0000389,1103,507,47,43,53,27,19,6,12,29,40,33,37,31,36,26,24,2,6,7,10,10,6,0,3,596,46,53,57,27,21,5,13,25,41,50,47,50,35,32,24,5,13,0,9,18,12,5,8
uSF2,DE,005,01,0000390,1756,787,76,93,81,53,20,15,20,38,70,48,56,59,53,39,26,7,4,4,6,7,5,5,2,969,72,116,95,45,33,15,15,54,98,75,85,88,67,31,27,8,7,8,7,13,7,3,0
uSF2,DE,005,01,0000391,2752,1141,151,133,120,84,43,10,12,41,49,43,59,47,65,45,23,20,33,16,30,41,39,11,26,1611,104,140,125,69,44,24,26,62,92,83,99,96,87,76,71,24,39,41,54,83,71,41,60
uSF2,DE,005,01,0000392,1651,729,89,101,101,47,32,21,12,18,36,35,62,40,41,22,19,7,11,8,6,10,9,2,0,922,84,76,87,53,38,24,21,21,56,74,75,76,68,37,34,16,9,14,11,22,11,5,10
uSF2,DE,005,01,0000393,511,224,34,34,25,8,7,8,5,12,18,19,7,12,7,6,9,2,4,2,1,3,0,1,0,287,23,32,20,15,6,9,9,22,23,23,15,28,15,13,12,4,3,2,0,3,2,6,2
uSF2,DE,005,01,0000394,1767,718,86,90,63,42,27,9,9,26,59,61,43,50,35,40,26,4,9,8,2,12,7,6,4,1049,94,100,94,37,27,18,24,58,73,82,75,72,54,55,42,15,19,9,28,19,30,15,9
uSF2,DE,005,01,0000395,1562,705,43,74,101,52,28,7,9,25,51,45,44,57,43,32,18,7,13,8,15,17,11,3,2,857,76,91,81,50,32,15,17,27,38,59,80,62,58,33,33,10,16,17,14,21,13,7,7
uSF2,DE,005,01,0000396,1790,819,78,93,90,58,32,15,12,26,40,50,52,67,57,29,29,8,13,11,18,18,15,2,6,971,74,82,92,55,23,20,10,42,50,68,80,85,61,47,29,17,18,16,25,25,27,15,10
uSF2,DE,005,01,0000397,1632,751,69,83,65,36,23,12,12,31,66,68,59,61,34,32,21,6,6,16,11,17,12,8,3,881,69,61,51,43,24,12,14,39,68,65,83,93,52,52,29,13,23,6,14,21,21,9,19
uSF2,DE,005,01,0000398,732,340,34,39,33,27,10,7,5,9,22,28,20,28,22,21,11,5,2,3,4,4,6,0,0,392,32,35,36,14,8,6,0,16,27,39,36,50,22,31,9,5,2,2,9,5,5,3,0
uSF2,DE,005,01,0000399,1251,594,83,78,89,46,30,12,1,13,40,42,42,33,34,18,12,5,4,4,5,1,1,0,1,657,62,66,77,45,18,14,9,32,58,64,66,41,41,22,13,6,6,4,3,4,3,3,0
uSF2,DE,005,01,0000400,544,249,27,35,40,8,7,2,3,10,18,24,29,20,13,7,1,1,1,0,1,1,0,0,1,295,31,35,34,14,5,4,1,8,32,43,28,29,13,6,4,0,2,0,4,0,2,0,0
uSF2,DE,005,01,0000401,1661,721,97,105,74,44,21,8,10,23,67,69,58,38,27,25,15,4,5,5,6,6,11,2,1,940,101,85,86,45,31,10,10,47,107,87,82,63,64,32,24,5,10,2,10,17,12,6,4
uSF2,DE,005,01,0000402,873,386,42,33,35,16,11,2,8,15,39,46,42,35,21,15,11,0,5,0,2,4,3,0,1,487,43,40,35,21,8,3,4,22,67,58,48,43,33,25,12,2,2,5,7,2,4,1,2
uSF2,DE,005,01,0000403,284,145,10,19,21,12,4,0,0,5,3,7,13,14,15,7,5,3,2,2,1,1,0,1,0,139,5,16,19,7,5,2,0,1,2,12,20,12,10,8,6,1,4,1,2,3,1,2,0
uSF2,DE,005,01,0000404,1057,475,60,60,55,20,12,11,13,31,38,30,39,43,17,21,11,3,5,3,0,2,0,1,0,582,80,53,60,32,22,17,17,31,51,55,41,47,27,20,7,2,2,0,5,3,5,2,3
uSF2,DE,005,01,0000405,341,151,13,18,14,12,4,2,2,7,12,8,12,11,10,10,5,3,4,2,0,1,0,0,1,190,11,23,19,10,3,3,2,4,13,19,17,19,17,12,7,1,5,1,0,0,2,2,0
uSF2,DE,005,01,0000406,734,344,33,39,36,12,4,4,4,19,42,40,27,17,22,16,11,2,5,5,1,1,1,2,1,390,35,38,14,11,7,2,5,15,55,40,43,29,34,26,13,4,5,2,2,4,4,2,0
uSF2,DE,005,01,0000407,2052,898,129,130,107,61,16,9,6,19,58,59,57,58,50,44,26,12,15,6,11,11,7,5,2,1154,114,128,105,51,34,19,28,39,130,96,78,93,80,56,37,16,15,10,3,10,10,1,1
uSF2,DE,005,01,0000408,378,175,12,14,12,5,3,2,1,5,11,8,15,20,14,25,8,3,4,1,4,3,2,3,0,203,18,14,12,9,3,0,1,7,15,13,16,13,29,16,13,4,5,3,3,3,3,1,2
uSF2,DE,005,01,0000410,242,114,4,9,10,8,6,2,1,2,5,2,5,12,11,8,11,4,2,3,2,4,2,1,0,128,7,6,10,9,5,1,1,2,2,12,5,8,18,16,9,4,1,3,2,3,2,1,1
uSF2,DE,005,01,0000412,142,61,3,7,3,4,1,2,2,2,4,6,8,2,5,5,2,0,1,1,1,0,1,1,0,81,5,3,8,6,2,1,3,2,11,6,6,3,9,7,3,1,1,1,0,1,1,0,1
uSF2,DE,005,01,0000413,195,97,2,7,6,13,4,1,2,2,1,5,4,8,12,8,8,4,3,1,2,3,1,0,0,98,4,5,9,5,0,1,0,1,2,6,4,16,15,10,11,1,0,2,1,2,3,0,0
uSF2,DE,005,01,0000414,735,324,32,27,30,10,8,0,3,18,40,34,33,24,20,19,12,4,4,1,1,2,0,1,1,411,38,32,36,12,11,1,3,17,52,54,49,24,32,22,13,3,6,0,4,0,0,0,2
uSF2,DE,005,01,0000415,281,133,11,9,12,12,0,2,2,3,7,9,7,13,9,15,9,2,5,2,1,0,2,1,0,148,3,9,18,9,3,0,1,4,12,9,6,18,20,13,8,2,4,1,3,2,3,0,0
uSF2,DE,005,01,0000417,154,70,10,4,7,4,1,1,0,1,1,4,2,8,2,5,10,1,2,1,1,2,3,0,0,84,8,9,5,4,5,2,0,4,1,3,6,9,5,4,6,1,2,0,2,3,3,1,1
uSF2,DE,005,01,0000418,109,46,2,2,4,2,2,2,2,2,2,1,2,5,3,3,7,2,2,0,0,0,0,0,1,63,5,3,2,6,1,0,0,3,4,2,3,7,3,8,7,2,2,0,1,1,1,1,1
uSF2,DE,005,01,0000419,108,55,5,3,0,0,1,1,0,4,4,3,4,3,2,5,6,4,3,2,1,1,0,2,1,53,5,3,4,0,1,0,0,0,5,5,4,1,4,5,6,2,1,2,1,0,1,0,3
uSF2,DE,005,01,0000424,101,53,4,10,3,1,0,1,0,2,3,5,1,8,4,7,3,0,0,0,1,0,0,0,0,48,7,2,5,0,0,0,0,0,6,7,3,3,6,5,2,0,2,0,0,0,0,0,0
uSF2,DE,005,01,0000425,602,292,23,23,23,9,9,2,3,5,20,22,31,23,19,17,9,11,12,6,6,6,4,7,2,310,16,25,25,8,4,2,4,12,13,14,34,27,27,14,15,10,13,6,12,5,10,5,9
uSF2,DE,005,01,0000426,156,76,7,13,7,2,4,3,0,3,2,7,7,9,5,2,0,1,1,2,0,0,0,0,1,80,3,9,9,2,5,1,1,5,7,8,12,3,6,3,2,0,1,0,2,0,0,1,0
uSF2,DE,005,01,0000427,724,347,33,42,52,21,10,4,5,11,31,33,29,24,12,12,9,1,4,1,1,4,5,1,2,377,35,30,41,12,8,5,3,26,34,37,32,38,23,23,15,2,5,2,1,2,1,2,0
uSF2,DE,005,01,0000428,233,123,18,16,8,9,7,1,3,10,9,8,5,8,7,8,2,0,0,0,2,1,0,1,0,110,10,8,9,4,4,2,1,7,11,10,13,12,12,2,4,0,0,1,0,0,0,0,0
uSF2,DE,005,01,0000429,385,186,18,20,22,10,7,0,5,11,18,12,25,17,6,8,2,3,0,0,0,1,1,0,0,199,15,16,24,10,8,3,2,9,12,29,17,20,9,10,7,3,1,2,0,0,1,1,0
uSF2,DE,005,01,0000430,310,135,12,15,18,8,3,1,0,6,10,18,10,11,6,4,6,1,2,1,2,1,0,0,0,175,21,14,12,9,10,4,5,9,12,20,12,14,13,9,4,0,1,2,1,1,2,0,0
uSF2,DE,005,01,0000432,533,227,16,18,19,8,7,2,1,11,12,14,22,8,17,15,17,2,5,9,5,7,4,5,3,306,21,25,27,18,8,1,2,7,13,21,19,19,23,21,12,5,8,5,4,14,11,11,11
uSF2,DE,005,01,0000433,963,422,68,58,44,22,14,12,9,16,33,27,32,33,21,14,6,3,4,1,2,2,0,1,0,541,64,63,42,32,13,7,8,44,51,47,54,41,30,25,4,0,1,3,8,2,1,0,1
uSF2,DE,005,01,0000435,211,107,15,16,5,3,2,1,3,10,18,6,8,9,4,5,0,2,0,0,0,0,0,0,0,104,13,4,5,3,5,1,0,15,15,7,15,6,6,4,1,1,0,0,1,0,2,0,0
uSF2,DE,005,01,0000436,150,84,6,9,16,5,5,0,0,3,6,7,8,9,2,1,2,1,2,1,1,0,0,0,0,66,3,10,7,2,0,0,0,2,5,9,6,6,7,3,2,2,1,1,0,0,0,0,0
uSF2,DE,005,01,0000439,116,59,2,8,9,4,1,1,1,0,1,3,5,8,4,7,3,0,0,1,1,0,0,0,0,57,2,6,4,7,2,0,0,0,2,3,6,4,6,8,2,1,0,0,0,2,0,2,0
uSF2,DE,005,01,0000440,257,126,11,8,7,6,6,1,0,5,4,5,11,14,12,9,9,3,2,2,3,3,3,1,1,131,7,9,8,4,3,1,1,4,4,6,11,14,11,15,7,1,5,2,0,6,3,4,5
uSF2,DE,005,01,0000441,216,103,9,8,7,6,6,0,1,5,2,5,5,12,12,17,5,1,0,1,1,0,0,0,0,113,10,12,3,10,2,0,1,5,2,8,8,12,18,12,4,0,0,2,1,3,0,0,0
uSF2,DE,005,01,0000442,176,80,5,8,8,2,1,0,2,5,8,6,15,5,3,4,3,0,1,2,2,0,0,0,0,96,9,10,7,3,4,0,1,7,6,8,6,12,7,5,3,2,3,0,0,1,2,0,0
uSF2,DE,005,01,0000443,307,150,9,8,12,5,3,0,0,6,17,21,14,12,11,17,8,0,2,2,1,1,0,0,1,157,16,6,4,5,3,2,4,6,14,13,17,13,16,13,8,6,4,4,1,1,1,0,0
uSF2,DE,005,01,0000444,167,93,9,2,5,2,3,2,6,11,7,4,6,15,4,7,4,1,2,1,0,1,0,1,0,74,6,3,5,3,3,0,2,5,8,6,8,7,5,3,5,1,0,1,0,2,0,1,0
uSF2,DE,005,01,0000445,502,232,19,19,17,12,4,3,1,12,25,31,16,26,19,10,6,5,2,1,0,2,1,1,0,270,30,21,16,4,5,2,2,20,28,21,28,30,21,21,9,1,3,2,3,2,1,0,0
uSF2,DE,005,01,0000446,209,96,4,7,5,11,1,3,3,8,9,4,6,11,7,12,4,0,0,0,0,0,1,0,0,113,5,11,16,7,4,0,7,8,2,13,7,8,14,7,2,0,1,0,0,0,1,0,0
uSF2,DE,005,01,0000447,288,148,10,14,10,9,2,0,1,10,16,6,13,16,15,13,5,3,1,1,0,1,1,1,0,140,7,10,10,3,2,0,2,6,12,17,12,15,15,8,10,2,5,2,1,0,0,1,0
uSF2,DE,005,01,0000448,102,44,1,3,4,0,1,3,2,0,3,5,3,7,1,2,4,2,0,0,0,2,0,1,0,58,6,2,3,2,2,1,0,2,4,4,6,6,4,3,3,0,2,1,1,2,3,1,0
uSF2,DE,005,01,0000449,217,102,12,9,11,3,2,3,1,5,4,6,7,11,2,11,7,1,4,0,1,1,1,0,0,115,6,7,9,3,3,1,3,4,7,7,11,13,10,8,9,2,2,0,3,3,0,3,1
uSF2,DE,005,01,0000450,647,336,45,25,19,5,13,9,8,27,61,30,26,20,20,13,3,1,5,2,3,0,1,0,0,311,47,19,17,17,8,3,8,37,37,26,27,17,14,9,6,4,3,4,2,2,1,1,2
uSF2,DE,005,01,0000451,614,293,25,24,26,18,2,3,0,12,35,24,22,27,14,26,10,7,8,1,2,3,2,1,1,321,26,18,21,15,6,4,5,12,35,26,33,28,26,22,17,4,7,1,2,5,3,5,0
uSF2,DE,005,01,0000452,631,299,23,27,25,10,5,2,2,10,31,35,26,27,19,23,19,4,5,2,2,1,1,0,0,332,33,30,26,12,10,4,0,18,48,29,24,21,22,28,17,1,5,1,0,0,2,1,0
uSF2,DE,005,01,0000453,1960,935,77,94,84,59,31,13,15,41,70,82,88,89,61,60,28,9,11,5,5,5,5,3,0,1025,87,97,83,54,25,10,13,36,80,95,115,112,69,58,37,6,17,5,8,9,7,2,0
uSF2,DE,005,01,0000454,1052,506,55,44,45,13,13,11,4,39,67,45,41,33,42,15,13,3,7,2,4,4,3,1,2,546,41,55,35,12,19,13,14,54,68,45,55,40,34,26,12,6,7,2,0,5,2,1,0
uSF2,DE,005,01,0000455,1066,464,74,61,66,28,16,7,4,16,28,20,29,43,29,19,5,5,7,0,3,2,2,0,0,602,81,63,55,24,22,17,19,37,45,47,44,38,37,26,15,2,8,1,3,4,5,4,5
uSF2,DE,005,01,0000456,107,59,7,7,9,1,0,2,5,3,1,8,3,3,5,1,2,0,0,2,0,0,0,0,0,48,8,4,3,3,1,0,1,5,3,3,3,6,3,2,0,0,1,0,1,1,0,0,0
uSF2,DE,005,01,0000457,264,118,5,12,6,5,0,2,0,5,2,11,5,4,8,16,15,2,4,2,1,6,4,3,0,146,2,8,9,7,4,2,1,4,3,5,11,9,14,17,9,3,3,2,4,11,5,5,8
uSF2,DE,005,01,0000458,164,83,6,3,4,0,1,0,3,20,11,11,4,3,1,5,3,3,1,2,1,1,0,0,0,81,4,5,2,1,5,1,4,18,9,4,7,3,5,2,6,0,1,0,2,0,0,1,1
uSF2,DE,005,01,0000459,313,169,10,12,21,3,7,14,13,22,26,11,8,7,8,3,1,1,1,0,0,0,0,1,0,144,9,19,13,2,7,2,6,7,14,18,14,6,7,7,4,1,2,3,2,0,0,1,0
uSF2,DE,005,01,0000460,169,80,4,6,7,3,3,2,0,3,8,7,4,12,5,2,6,1,2,3,0,0,0,2,0,89,9,10,7,5,2,1,0,2,7,3,6,10,9,6,4,0,3,1,1,2,0,0,1
uSF2,DE,005,01,0000461,157,48,6,11,8,2,1,2,0,4,2,2,2,1,1,0,3,0,1,0,0,1,0,0,1,109,6,9,16,9,6,2,2,3,6,9,8,4,2,2,1,0,4,1,6,6,2,1,4
uSF2,DE,005,01,0000462,105,53,3,9,1,6,1,6,7,2,2,6,2,3,0,0,1,0,1,0,0,2,0,1,0,52,1,4,7,5,2,0,0,4,3,5,3,4,2,3,2,0,1,0,3,3,0,0,0
uSF2,DE,005,01,0000463,225,111,5,8,13,4,2,0,2,2,10,6,9,14,7,7,8,3,1,1,2,4,3,0,0,114,3,8,11,5,3,0,3,4,4,8,7,12,11,6,9,3,3,2,2,2,5,1,2
uSF2,DE,005,01,0000464,664,330,36,30,18,12,7,5,6,29,47,29,27,23,20,16,8,4,4,0,3,3,2,0,1,334,31,29,20,16,12,4,5,17,43,25,29,26,20,16,18,3,4,2,0,11,0,3,0
uSF2,DE,005,01,0000465,753,348,20,34,27,15,5,4,6,17,30,38,28,30,21,29,20,5,3,3,4,5,4,0,0,405,34,34,36,28,11,3,3,12,39,23,37,36,41,21,19,1,5,5,6,5,5,1,0
uSF2,DE,005,01,0000466,618,273,29,34,30,22,7,5,7,11,16,21,19,29,14,7,14,2,1,1,3,0,1,0,0,345,39,38,36,18,9,9,3,13,27,20,37,33,20,17,9,0,3,1,4,3,3,2,1
uSF2,DE,005,01,0000467,254,125,14,6,9,3,2,2,3,2,11,15,10,14,13,10,6,2,1,0,2,0,0,0,0,129,10,18,7,6,6,2,0,0,8,23,15,14,4,8,3,0,1,2,0,1,0,1,0
uSF2,DE,005,01,0000468,911,471,44,51,55,37,13,5,0,8,36,48,40,43,33,20,14,2,6,4,5,4,1,1,1,440,39,43,32,14,9,4,4,8,32,57,60,49,31,22,10,4,3,6,2,4,3,1,3
uSF2,DE,005,01,0000469,2055,1015,98,113,106,62,28,13,10,17,57,89,105,86,70,68,37,11,17,6,10,6,4,2,0,1040,91,91,80,45,25,4,8,37,71,114,114,107,81,72,37,12,18,5,8,8,2,4,6
uSF2,DE,005,01,0000470,1148,566,65,67,56,30,13,6,5,25,48,61,54,36,37,27,12,5,5,3,5,1,3,1,1,582,60,59,60,38,17,7,10,13,54,65,62,41,34,17,17,4,6,1,3,3,5,4,2
uSF2,DE,005,01,0000471,1252,609,59,57,67,43,20,10,5,25,49,58,57,56,33,26,24,4,3,1,3,6,2,0,1,643,65,49,64,17,16,6,6,23,50,72,63,73,43,43,16,7,9,0,1,12,5,0,3
uSF2,DE,005,01,0000472,2999,1358,179,181,148,58,33,13,18,62,124,150,135,85,60,53,27,10,10,1,4,3,3,1,0,1641,180,180,123,63,30,20,32,87,161,202,163,128,109,65,39,8,17,7,8,11,4,4,0
uSF2,DE,005,01,0000473,2764,1358,159,206,195,91,36,12,12,37,96,132,121,80,58,52,36,8,7,4,9,2,2,2,1,1406,150,172,152,82,33,19,8,34,98,187,138,119,98,52,30,9,6,3,5,5,2,1,3
uSF2,DE,005,01,0000474,1050,491,39,44,45,31,21,2,5,13,24,39,59,44,38,28,22,9,8,2,3,8,4,2,1,559,44,43,49,25,9,4,8,26,29,51,62,59,42,44,19,5,7,9,6,10,5,2,1
uSF2,DE,005,01,0000475,3276,1406,151,188,159,73,40,15,12,57,128,162,134,95,56,49,32,9,12,7,6,11,4,4,2,1870,190,189,170,67,43,14,26,87,191,212,213,149,119,68,47,13,15,14,10,16,10,4,3
uSF2,DE,005,01,0000476,1339,613,56,61,64,29,17,9,9,41,42,42,52,52,38,41,23,7,15,2,4,1,5,3,0,726,71,57,56,43,23,6,10,43,60,71,69,61,54,49,17,8,9,3,3,4,6,2,1
uSF2,DE,005,01,0000477,367,165,14,11,17,11,4,0,2,9,11,9,11,13,10,14,10,3,6,2,3,2,0,3,0,202,15,18,10,10,10,3,0,8,12,17,16,12,21,15,14,3,1,0,4,2,8,1,2
uSF2,DE,005,01,0000478,647,311,40,32,26,13,12,5,1,13,23,33,28,21,20,9,13,4,9,4,1,2,1,0,1,336,39,40,29,13,12,7,5,12,21,31,29,34,27,11,9,1,1,4,5,3,0,2,1
uSF2,DE,005,01,0000479,2836,1308,86,125,144,91,49,14,7,39,68,66,94,64,95,53,72,29,31,15,31,51,41,28,15,1528,61,126,127,77,37,20,22,36,80,96,112,119,110,81,78,33,40,25,43,82,62,38,23
uSF2,DE,005,01,0000480,1595,762,61,92,68,47,24,8,3,25,39,58,46,40,47,43,40,18,20,17,17,26,11,10,2,833,55,68,76,37,18,12,5,27,51,55,60,55,70,49,48,18,30,14,17,33,18,8,9
uSF2,DE,005,01,0000481,1243,575,35,55,53,36,18,10,10,20,24,29,40,41,35,50,34,19,19,5,15,15,6,4,2,668,38,48,57,34,27,9,11,15,29,47,39,56,64,59,54,13,13,11,10,16,10,1,7
uSF2,DE,005,01,0000482,191,91,8,11,7,7,5,1,0,2,2,4,8,6,3,9,8,0,1,2,0,3,2,1,1,100,6,11,9,9,3,2,0,3,6,5,12,6,9,3,6,0,1,0,0,1,3,1,4
uSF2,DE,005,01,0000483,602,300,25,28,43,20,14,2,2,8,14,15,27,25,28,15,7,3,6,7,5,3,3,0,0,302,22,31,22,16,11,2,0,2,20,23,38,35,22,14,12,6,6,2,5,3,6,3,1
uSF2,DE,005,01,0000484,1134,546,49,40,61,36,19,6,2,16,29,43,35,48,42,35,33,16,10,6,6,5,6,1,2,588,38,53,43,29,13,4,9,25,25,45,61,47,39,50,48,4,14,5,8,16,4,4,4
uSF2,DE,005,01,0000485,452,194,14,18,22,12,5,3,6,10,9,13,19,12,10,12,9,5,4,1,3,2,3,1,1,258,17,17,23,15,7,1,6,6,17,23,17,20,24,24,11,7,2,1,6,5,3,0,6
uSF2,DE,005,01,0000486,216,94,6,5,11,7,3,1,0,3,4,3,9,9,4,13,4,2,2,1,1,3,0,3,0,122,9,8,14,4,5,3,2,2,4,6,14,8,9,8,8,3,2,2,1,1,5,3,1
uSF2,DE,005,01,0000487,517,258,24,30,16,21,9,2,4,7,14,24,24,25,22,10,8,2,8,3,1,1,3,0,0,259,21,31,25,9,8,2,1,5,9,27,30,28,28,7,11,4,5,2,0,0,3,2,1
uSF2,DE,005,01,0000488,1909,869,79,112,89,50,25,4,8,12,50,106,100,73,58,52,27,7,5,3,0,2,5,2,0,1040,111,95,108,45,29,13,7,25,73,137,127,94,64,47,29,6,3,4,5,6,3,7,2
uSF2,DE,005,01,0000489,1813,866,72,82,65,48,21,13,9,35,67,57,67,76,70,57,54,14,17,13,8,10,6,4,1,947,71,66,65,43,16,16,16,44,82,92,71,66,95,77,45,13,27,8,11,10,6,3,4
uSF2,DE,005,01,0000490,530,277,37,43,33,13,5,0,1,6,9,22,36,30,16,10,7,4,2,0,2,0,1,0,0,253,25,30,19,14,10,2,0,4,8,32,42,27,17,8,4,2,3,1,2,2,1,0,0
uSF2,DE,005,01,0000491,206,95,6,6,10,4,5,1,0,2,3,7,10,10,3,4,3,6,4,1,0,6,2,1,1,111,6,11,10,7,1,1,1,0,3,9,6,9,7,7,5,6,3,0,2,4,4,4,5
uSF2,DE,005,01,0000492,448,217,25,19,24,15,5,1,1,6,15,21,28,13,7,17,11,2,4,0,1,0,1,0,1,231,24,17,22,14,8,6,3,11,10,23,19,12,27,12,8,1,3,1,0,3,5,0,2
uSF2,DE,005,01,0000493,258,131,13,12,15,12,3,1,0,2,4,3,11,24,10,9,3,2,2,0,1,2,2,0,0,127,14,18,9,5,0,0,2,4,2,8,17,15,10,8,3,2,2,2,3,2,0,0,1
uSF2,DE,005,01,0000494,177,104,6,13,9,5,9,0,1,4,6,6,7,5,7,8,10,2,1,1,1,3,0,0,0,73,5,3,7,1,1,0,1,2,6,7,5,4,12,9,7,1,0,1,1,0,0,0,0
uSF2,DE,005,01,0000495,1189,523,61,61,64,31,18,8,5,15,27,28,33,46,35,32,16,4,7,5,2,11,10,2,2,666,57,72,53,37,15,13,10,17,27,48,69,55,53,39,25,6,14,4,10,20,10,8,4
uSF2,DE,005,01,0000496,205,99,5,6,14,2,1,0,1,0,9,5,9,6,4,8,7,2,3,4,8,0,1,2,2,106,5,5,8,2,1,1,2,0,3,3,13,6,11,3,9,2,7,6,2,5,2,4,6
uSF2,DE,005,01,0000497,280,129,9,11,10,5,3,0,0,6,3,8,8,11,10,11,9,6,4,3,3,6,2,1,0,151,10,9,11,10,5,1,1,7,7,11,7,13,14,13,5,5,4,1,2,5,2,3,5
uSF2,DE,005,01,0000499,36,18,0,1,1,0,1,1,0,0,0,1,0,3,2,1,1,0,1,2,1,0,0,1,1,18,0,0,0,3,0,0,1,0,1,1,0,1,3,2,3,0,1,0,0,0,2,0,0
uSF2,DE,005,01,0000500,23151,10717,1128,1194,1158,707,365,146,134,327,526,707,809,783,646,500,404,129,193,120,162,239,185,110,45,12434,1052,1144,1167,667,397,196,163,471,689,914,1013,964,812,628,467,190,192,145,233,345,287,181,117
uSF2,DE,005,01,0000501,1912,890,102,98,105,48,29,10,5,26,44,63,77,64,51,47,28,11,9,12,10,19,20,8,4,1022,90,110,90,51,29,16,13,40,56,95,79,66,49,55,25,16,13,18,20,27,32,17,15
uSF2,DE,005,01,0000502,461,200,35,25,16,12,8,1,1,2,9,11,12,16,12,9,9,2,1,3,4,7,3,2,0,261,28,30,16,9,9,4,4,15,18,22,21,10,13,12,5,1,3,6,5,11,10,4,5
uSF2,DE,005,01,0000503,461,200,35,25,16,12,8,1,1,2,9,11,12,16,12,9,9,2,1,3,4,7,3,2,0,261,28,30,16,9,9,4,4,15,18,22,21,10,13,12,5,1,3,6,5,11,10,4,5
uSF2,DE,005,01,0000504,195,93,11,11,8,4,2,1,2,7,3,7,7,6,7,3,1,0,1,3,0,2,4,3,0,102,9,8,11,5,4,4,2,5,6,10,11,3,3,2,3,0,1,3,0,3,4,2,3
uSF2,DE,005,01,0000505,195,93,11,11,8,4,2,1,2,7,3,7,7,6,7,3,1,0,1,3,0,2,4,3,0,102,9,8,11,5,4,4,2,5,6,10,11,3,3,2,3,0,1,3,0,3,4,2,3
uSF2,DE,005,01,0000506,1256,597,56,62,81,32,19,8,2,17,32,45,58,42,32,35,18,9,7,6,6,10,13,3,4,659,53,72,63,37,16,8,7,20,32,63,47,53,33,41,17,15,9,9,15,13,18,11,7
uSF2,DE,005,01,0000507,599,287,21,21,34,20,7,5,2,8,15,14,23,21,20,18,14,4,4,5,5,9,12,2,3,312,23,26,31,13,7,5,5,8,5,23,17,16,20,21,12,13,6,9,12,13,11,9,7
uSF2,DE,005,01,0000508,657,310,35,41,47,12,12,3,0,9,17,31,35,21,12,17,4,5,3,1,1,1,1,1,1,347,30,46,32,24,9,3,2,12,27,40,30,37,13,20,5,2,3,0,3,0,7,2,0
uSF2,DE,005,01,0000509,1555,712,72,85,63,54,37,13,8,25,38,57,49,52,50,27,13,5,19,8,9,8,9,9,2,843,73,92,84,47,45,15,10,30,47,59,61,61,50,46,29,5,9,14,19,14,16,12,5
uSF2,DE,005,01,0000510,979,438,50,54,34,35,26,11,5,16,25,32,28,32,28,13,5,3,10,5,6,5,6,8,1,541,55,63,49,19,30,12,6,22,30,33,35,40,23,30,22,4,5,12,11,13,13,10,4
uSF2,DE,005,01,0000511,969,433,50,54,34,35,25,10,5,16,24,31,28,32,28,12,5,3,10,5,6,5,6,8,1,536,55,61,49,19,30,11,6,22,30,32,35,40,22,30,22,4,5,12,11,13,13,10,4
uSF2,DE,005,01,0000512,576,274,22,31,29,19,11,2,3,9,13,25,21,20,22,14,8,2,9,3,3,3,3,1,1,302,18,29,35,28,15,3,4,8,17,26,26,21,27,16,7,1,4,2,8,1,3,2,1
uSF2,DE,005,01,0000513,300,140,12,10,17,6,6,1,1,6,10,10,9,11,13,9,3,1,8,1,1,2,1,1,1,160,8,14,19,18,8,2,2,3,11,12,13,9,17,9,4,1,2,2,5,0,0,1,0
uSF2,DE,005,01,0000514,276,134,10,21,12,13,5,1,2,3,3,15,12,9,9,5,5,1,1,2,2,1,2,0,0,142,10,15,16,10,7,1,2,5,6,14,13,12,10,7,3,0,2,0,3,1,3,1,1
uSF2,DE,005,01,0000515,2926,1317,184,146,151,90,51,12,27,32,74,94,88,81,68,52,36,17,18,18,17,25,15,16,5,1609,163,143,158,90,65,36,26,56,95,115,129,110,90,56,54,22,19,23,29,53,35,29,13
uSF2,DE,005,01,0000518,285,128,19,17,14,12,5,2,3,7,9,6,6,7,5,2,4,2,0,4,0,1,0,3,0,157,27,18,7,7,4,2,0,9,16,14,11,17,4,2,6,1,1,0,2,5,0,2,2
uSF2,DE,005,01,0000519,285,128,19,17,14,12,5,2,3,7,9,6,6,7,5,2,4,2,0,4,0,1,0,3,0,157,27,18,7,7,4,2,0,9,16,14,11,17,4,2,6,1,1,0,2,5,0,2,2
uSF2,DE,005,01,0000520,1518,655,119,73,82,53,27,5,12,15,36,52,34,35,26,21,10,5,7,6,7,15,6,7,2,863,94,84,96,37,46,29,25,33,51,56,71,44,40,21,18,9,10,13,17,30,16,16,7
uSF2,DE,005,01,0000521,402,158,46,24,28,7,8,1,6,4,8,9,0,5,2,4,3,0,0,0,0,1,0,2,0,244,33,19,24,6,26,16,15,13,9,13,17,12,4,3,5,0,5,3,3,8,3,6,1
uSF2,DE,005,01,0000522,1116,497,73,49,54,46,19,4,6,11,28,43,34,30,24,17,7,5,7,6,7,14,6,5,2,619,61,65,72,31,20,13,10,20,42,43,54,32,36,18,13,9,5,10,14,22,13,10,6
uSF2,DE,005,01,0000523,1118,531,45,56,55,25,18,5,12,10,28,36,48,39,37,29,22,10,11,8,10,9,9,6,3,587,42,41,55,46,15,4,1,14,27,45,47,49,46,33,30,12,8,10,10,18,19,11,4
uSF2,DE,005,01,0000524,211,103,11,11,9,8,3,2,3,0,7,6,15,11,4,5,1,0,2,1,3,1,0,0,0,108,10,9,16,7,2,1,1,4,7,13,9,11,6,3,4,0,2,1,0,0,0,2,0
uSF2,DE,005,01,0000525,299,152,8,11,21,7,4,1,3,5,8,14,12,9,12,10,7,5,1,6,2,3,1,1,1,147,12,12,15,9,1,0,0,6,6,10,11,9,15,10,8,4,3,2,5,3,3,3,0
uSF2,DE,005,01,0000526,118,59,6,9,0,0,3,0,0,2,5,5,9,4,5,3,2,0,3,0,1,1,1,0,0,59,4,5,1,5,3,1,0,1,5,6,6,7,3,1,4,2,0,0,1,0,2,1,1
uSF2,DE,005,01,0000528,425,185,16,20,23,9,4,1,6,3,7,11,9,12,15,9,10,5,5,1,4,4,5,4,2,240,14,14,20,25,9,2,0,2,5,15,14,20,18,18,13,6,3,6,3,15,10,5,3
uSF2,DE,005,01,0000529,1367,635,74,67,53,44,20,6,9,13,27,48,43,49,34,32,26,12,10,11,14,20,12,8,3,732,67,63,56,40,17,6,9,25,49,57,46,61,35,48,31,6,19,3,15,30,28,9,12
uSF2,DE,005,01,0000534,267,107,14,6,10,8,3,0,2,3,2,4,11,9,10,1,5,2,1,1,4,6,4,0,1,160,14,13,7,10,2,0,3,9,15,6,10,13,3,13,8,0,5,2,4,10,7,4,2
uSF2,DE,005,01,0000535,267,107,14,6,10,8,3,0,2,3,2,4,11,9,10,1,5,2,1,1,4,6,4,0,1,160,14,13,7,10,2,0,3,9,15,6,10,13,3,13,8,0,5,2,4,10,7,4,2
uSF2,DE,005,01,0000538,1090,521,60,61,43,35,17,6,7,10,24,43,31,40,24,30,20,10,9,9,10,14,8,8,2,569,53,50,49,29,15,6,6,16,33,51,36,48,32,35,23,5,14,1,11,20,21,5,10
uSF2,DE,005,01,0000540,393,211,26,18,23,10,9,1,1,5,5,16,10,24,7,13,14,2,5,4,7,6,2,2,1,182,12,12,10,7,7,3,5,4,7,19,7,19,18,15,5,0,8,0,7,7,9,1,0
uSF2,DE,005,01,0000542,526,224,30,31,18,21,3,3,5,5,14,19,15,12,10,5,5,5,4,4,1,5,4,4,1,302,35,34,32,17,7,3,1,10,21,27,20,23,10,13,13,5,3,1,2,11,9,2,3
uSF2,DE,005,01,0000544,3088,1455,139,156,157,100,51,27,26,49,54,88,147,110,80,63,55,18,21,17,18,33,32,8,6,1633,109,162,163,95,47,20,30,60,80,110,157,136,99,85,63,30,29,16,33,47,33,17,12
uSF2,DE,005,01,0000545,126,63,5,10,8,2,0,0,2,2,1,4,7,4,1,4,3,1,2,0,2,1,3,0,1,63,3,4,8,2,2,0,1,1,3,4,6,4,5,5,4,3,2,2,3,0,1,0,0
uSF2,DE,005,01,0000546,126,63,5,10,8,2,0,0,2,2,1,4,7,4,1,4,3,1,2,0,2,1,3,0,1,63,3,4,8,2,2,0,1,1,3,4,6,4,5,5,4,3,2,2,3,0,1,0,0
uSF2,DE,005,01,0000547,386,195,32,18,18,9,7,3,5,10,11,11,22,20,11,8,5,1,0,1,0,2,0,1,0,191,21,19,11,11,8,5,8,17,16,13,14,11,7,11,6,0,1,1,1,3,5,2,0
uSF2,DE,005,01,0000549,369,186,31,16,14,9,7,3,5,10,11,11,20,20,11,8,5,1,0,1,0,2,0,1,0,183,21,17,10,9,8,4,8,17,16,12,13,11,7,11,6,0,1,1,1,3,5,2,0
uSF2,DE,005,01,0000552,2576,1197,102,128,131,89,44,24,19,37,42,73,118,86,68,51,47,16,19,16,16,30,29,7,5,1379,85,139,144,82,37,15,21,42,61,93,137,121,87,69,53,27,26,13,29,44,27,15,12
uSF2,DE,005,01,0000553,185,97,5,9,13,6,7,2,1,2,1,4,13,10,7,1,4,1,2,2,0,4,3,0,0,88,4,6,8,6,2,2,2,1,1,6,10,7,10,10,4,1,1,1,2,4,0,0,0
uSF2,DE,005,01,0000554,1362,631,49,75,80,41,20,11,11,17,17,45,61,48,34,24,25,9,11,7,7,14,19,4,2,731,45,87,71,43,14,3,7,26,28,56,67,67,41,32,28,15,17,8,13,26,16,12,9
uSF2,DE,005,01,0000555,136,64,5,7,4,4,3,0,2,4,3,5,6,1,7,6,3,1,0,0,0,1,1,1,0,72,4,5,7,7,8,0,0,1,5,6,4,4,9,3,3,0,1,0,3,2,0,0,0
uSF2,DE,005,01,0000556,893,405,43,37,34,38,14,11,5,14,21,19,38,27,20,20,15,5,6,7,9,11,6,2,3,488,32,41,58,26,13,10,12,14,27,25,56,43,27,24,18,11,7,4,11,12,11,3,3
uSF2,DE,005,01,0000557,2698,1240,99,129,100,75,32,14,10,43,69,98,90,105,83,63,60,14,34,11,19,37,21,27,7,1458,144,118,131,80,35,12,23,56,69,98,116,137,93,81,59,25,22,14,37,34,30,27,17
uSF2,DE,005,01,0000560,459,175,24,31,12,7,4,1,2,6,15,13,9,8,8,6,5,2,6,2,1,4,3,6,0,284,38,24,25,12,3,3,5,19,22,19,18,23,11,16,8,5,1,0,8,7,7,4,6
uSF2,DE,005,01,0000561,459,175,24,31,12,7,4,1,2,6,15,13,9,8,8,6,5,2,6,2,1,4,3,6,0,284,38,24,25,12,3,3,5,19,22,19,18,23,11,16,8,5,1,0,8,7,7,4,6
uSF2,DE,005,01,0000562,2223,1059,75,98,86,68,28,13,8,37,54,85,80,97,73,57,54,12,28,9,18,33,18,21,7,1164,104,93,104,67,32,9,18,37,47,79,97,112,82,64,51,20,21,14,29,27,23,23,11
uSF2,DE,005,01,0000563,412,188,17,12,8,17,7,3,0,7,7,18,19,20,14,13,7,1,6,0,3,4,3,2,0,224,22,18,27,15,3,1,3,14,6,16,16,26,31,5,7,3,1,0,3,2,2,2,1
uSF2,DE,005,01,0000564,355,163,6,17,11,8,7,2,0,7,12,12,16,12,15,8,8,0,2,2,7,5,3,3,0,192,16,16,15,13,4,3,2,7,9,14,11,18,10,11,4,6,6,5,9,2,2,7,2
uSF2,DE,005,01,0000565,811,399,32,35,41,21,7,5,5,10,20,21,28,34,24,21,24,8,12,6,4,20,9,7,5,412,25,29,32,18,14,2,8,11,19,23,32,40,27,31,21,9,9,6,12,13,13,12,6
uSF2,DE,005,01,0000566,645,309,20,34,26,22,7,3,3,13,15,34,17,31,20,15,15,3,8,1,4,4,3,9,2,336,41,30,30,21,11,3,5,5,13,26,38,28,14,17,19,2,5,3,5,10,6,2,2
uSF2,DE,005,01,0000567,1562,737,67,82,69,42,25,9,5,17,46,44,65,50,46,32,39,10,19,11,18,15,20,3,3,825,86,69,60,29,21,10,4,35,53,55,59,62,65,45,41,9,24,13,13,24,18,18,12
uSF2,DE,005,01,0000568,413,180,26,32,12,9,5,4,2,4,13,12,4,6,9,14,5,2,2,3,4,4,7,0,1,233,35,15,16,7,8,7,1,16,20,13,11,11,17,16,11,2,5,1,4,5,5,5,2
uSF2,DE,005,01,0000569,341,144,23,27,10,9,5,3,1,4,10,10,2,5,7,6,3,2,2,3,3,4,5,0,0,197,33,13,14,6,6,7,0,16,19,11,10,8,13,11,9,1,3,1,3,5,4,4,0
uSF2,DE,005,01,0000571,1149,557,41,50,57,33,20,5,3,13,33,32,61,44,37,18,34,8,17,8,14,11,13,3,2,592,51,54,44,22,13,3,3,19,33,42,48,51,48,29,30,7,19,12,9,19,13,13,10
uSF2,DE,005,01,0000573,593,284,17,28,30,14,13,1,1,6,18,17,26,21,16,8,21,4,12,5,10,7,7,1,1,309,27,28,25,8,4,2,2,11,19,26,23,24,27,16,17,3,13,2,4,11,5,7,5
uSF2,DE,005,01,0000574,459,223,19,19,18,16,6,4,1,4,13,12,29,19,17,8,12,4,4,2,4,4,5,2,1,236,19,22,15,12,7,1,1,5,11,12,23,23,16,13,11,4,6,8,5,6,7,5,4
uSF2,DE,005,01,0000575,5851,2709,313,336,338,172,98,39,33,90,120,164,193,211,153,129,95,28,29,15,35,48,41,20,9,3142,265,291,315,169,101,58,41,133,179,245,271,239,252,150,103,45,30,27,44,73,57,36,18
uSF2,DE,005,01,0000576,225,110,12,15,16,3,6,2,1,3,5,14,6,10,6,2,7,0,2,0,0,0,0,0,0,115,11,13,9,3,4,2,1,3,6,10,12,6,10,10,3,1,2,2,2,1,1,2,1
uSF2,DE,005,01,0000577,225,110,12,15,16,3,6,2,1,3,5,14,6,10,6,2,7,0,2,0,0,0,0,0,0,115,11,13,9,3,4,2,1,3,6,10,12,6,10,10,3,1,2,2,2,1,1,2,1
uSF2,DE,005,01,0000578,2038,868,155,128,109,43,27,10,10,30,46,37,60,61,39,33,19,3,7,5,10,15,11,4,6,1170,127,112,107,54,43,28,24,73,72,90,97,71,83,35,33,19,13,6,18,26,17,14,8
uSF2,DE,005,01,0000579,405,146,37,23,26,10,4,1,2,3,7,9,14,4,0,0,1,0,0,0,3,2,0,0,0,259,33,28,28,9,12,11,8,14,16,27,27,7,20,4,5,1,0,2,4,3,0,0,0
uSF2,DE,005,01,0000580,1633,722,118,105,83,33,23,9,8,27,39,28,46,57,39,33,18,3,7,5,7,13,11,4,6,911,94,84,79,45,31,17,16,59,56,63,70,64,63,31,28,18,13,4,14,23,17,14,8
uSF2,DE,005,01,0000581,3588,1731,146,193,213,126,65,27,22,57,69,113,127,140,108,94,69,25,20,10,25,33,30,16,3,1857,127,166,199,112,54,28,16,57,101,145,162,162,159,105,67,25,15,19,24,46,39,20,9
uSF2,DE,005,01,0000582,192,104,8,14,11,7,5,0,1,4,2,7,9,9,9,2,6,0,1,1,4,1,1,0,2,88,4,9,12,3,2,3,0,3,5,5,6,10,9,1,4,0,0,2,4,1,4,0,1
uSF2,DE,005,01,0000583,199,99,10,19,17,3,2,2,2,2,6,8,8,3,6,6,1,1,0,2,0,0,0,1,0,100,7,13,12,7,0,1,1,1,6,12,9,8,6,3,4,2,1,2,0,0,5,0,0
uSF2,DE,005,01,0000584,443,205,26,20,20,6,11,5,3,9,8,23,10,16,18,8,4,3,2,0,3,7,2,1,0,238,21,18,24,15,14,8,4,14,14,21,13,26,11,17,4,3,1,3,2,4,0,1,0
uSF2,DE,005,01,0000585,2754,1323,102,140,165,110,47,20,16,42,53,75,100,112,75,78,58,21,17,7,18,25,27,14,1,1431,95,126,151,87,38,16,11,39,76,107,134,118,133,84,55,20,13,12,18,41,30,19,8
uSF2,DE,005,01,0000586,2192,1022,78,95,122,82,22,16,11,32,54,51,57,61,81,55,52,14,34,17,22,34,15,11,6,1170,55,96,110,66,37,23,7,36,61,80,95,92,79,62,62,32,27,17,23,43,38,16,13
uSF2,DE,005,01,0000593,265,118,4,7,14,14,3,2,3,3,9,4,7,4,9,7,11,2,3,1,2,7,1,0,1,147,6,18,16,8,4,1,1,6,7,7,9,9,11,8,12,5,3,2,2,1,9,2,0
uSF2,DE,005,01,0000594,265,118,4,7,14,14,3,2,3,3,9,4,7,4,9,7,11,2,3,1,2,7,1,0,1,147,6,18,16,8,4,1,1,6,7,7,9,9,11,8,12,5,3,2,2,1,9,2,0
uSF2,DE,005,01,0000599,259,119,11,10,18,10,1,1,0,2,2,7,9,6,7,5,4,0,3,7,4,5,2,2,3,140,4,7,13,6,5,2,1,4,4,4,10,13,11,5,5,9,6,2,4,10,6,6,3
uSF2,DE,005,01,0000600,259,119,11,10,18,10,1,1,0,2,2,7,9,6,7,5,4,0,3,7,4,5,2,2,3,140,4,7,13,6,5,2,1,4,4,4,10,13,11,5,5,9,6,2,4,10,6,6,3
uSF2,DE,005,01,0000603,1606,756,58,77,88,58,18,13,7,23,39,38,39,50,64,43,36,12,24,9,16,21,12,9,2,850,44,67,78,49,27,19,5,24,46,65,74,68,57,46,43,18,17,13,17,32,23,8,10
uSF2,DE,005,01,0000606,221,96,5,6,7,7,1,0,2,2,2,5,7,11,10,7,8,1,3,1,2,5,1,2,1,125,6,10,10,8,6,3,0,2,8,8,11,6,9,8,6,2,3,2,5,4,4,1,3
uSF2,DE,005,01,0000609,482,231,22,34,43,20,7,3,1,8,8,7,11,11,11,9,9,6,7,1,5,4,2,1,1,251,15,26,29,12,6,5,2,9,17,24,23,17,17,7,11,6,8,2,4,7,1,1,2
uSF2,DE,005,01,0000610,721,335,28,29,32,29,10,8,4,10,19,19,15,22,32,16,16,5,10,5,7,7,6,6,0,386,19,26,29,28,12,8,3,13,17,26,34,34,22,24,22,10,4,8,7,16,13,6,5
uSF2,DE,005,01,0000611,202,106,6,11,17,6,7,2,1,2,1,4,15,10,7,1,4,1,2,2,0,4,3,0,0,96,4,8,9,8,2,3,2,1,1,7,11,7,10,10,4,1,1,1,2,4,0,0,0
uSF2,DE,005,01,0000612,1731,817,80,91,94,50,27,14,16,27,28,56,81,68,45,32,30,10,11,8,7,16,19,5,2,914,66,104,81,52,22,7,15,43,44,68,80,78,48,43,34,15,18,9,14,29,21,14,9
uSF2,DE,005,01,0000613,136,64,5,7,4,4,3,0,2,4,3,5,6,1,7,6,3,1,0,0,0,1,1,1,0,72,4,5,7,7,8,0,0,1,5,6,4,4,9,3,3,0,1,0,3,2,0,0,0
uSF2,DE,005,01,0000614,1019,468,48,47,42,40,14,11,7,16,22,23,45,31,21,24,18,6,8,7,11,12,9,2,4,551,35,45,66,28,15,10,13,15,30,29,62,47,32,29,22,14,9,6,14,12,12,3,3
uSF2,DE,005,01,0000615,1255,580,67,57,58,36,17,7,5,17,27,32,42,43,39,30,24,6,6,11,9,18,19,7,3,675,60,64,58,27,20,13,11,28,29,55,49,29,36,35,20,14,10,18,17,27,25,15,15
uSF2,DE,005,01,0000616,657,310,35,41,47,12,12,3,0,9,17,31,35,21,12,17,4,5,3,1,1,1,1,1,1,347,30,46,32,24,9,3,2,12,27,40,30,37,13,20,5,2,3,0,3,0,7,2,0
uSF2,DE,005,01,0000617,597,250,45,37,37,17,9,1,3,7,9,16,23,13,9,2,7,0,1,1,7,3,1,0,2,347,37,37,40,12,14,14,8,17,21,32,33,17,29,5,9,1,0,4,8,4,4,0,1
uSF2,DE,005,01,0000618,1832,821,128,124,100,36,25,11,10,29,45,36,54,60,45,39,19,4,7,7,7,13,11,5,6,1011,101,97,91,52,31,18,17,60,62,75,79,72,69,34,32,20,14,6,14,23,22,14,8
uSF2,DE,005,01,0000619,668,315,38,35,36,9,17,7,4,12,13,37,16,26,24,10,11,3,4,0,3,7,2,1,0,353,32,31,33,18,18,10,5,17,20,31,25,32,21,27,7,4,3,5,4,5,1,3,1
uSF2,DE,005,01,0000620,2754,1323,102,140,165,110,47,20,16,42,53,75,100,112,75,78,58,21,17,7,18,25,27,14,1,1431,95,126,151,87,38,16,11,39,76,107,134,118,133,84,55,20,13,12,18,41,30,19,8
uSF2,DE,005,01,0000621,310,145,12,10,17,6,7,2,1,6,11,11,9,11,13,10,3,1,8,1,1,2,1,1,1,165,8,16,19,18,8,3,2,3,11,13,13,9,18,9,4,1,2,2,5,0,0,1,0
uSF2,DE,005,01,0000622,1245,567,60,75,46,48,30,11,7,19,27,46,40,41,37,17,10,4,11,7,8,6,8,8,1,678,65,76,65,29,37,12,8,27,36,46,48,52,32,37,25,4,7,12,14,14,16,11,5
uSF2,DE,005,01,0000623,412,188,17,12,8,17,7,3,0,7,7,18,19,20,14,13,7,1,6,0,3,4,3,2,0,224,22,18,27,15,3,1,3,14,6,16,16,26,31,5,7,3,1,0,3,2,2,2,1
uSF2,DE,005,01,0000624,814,338,30,48,23,15,11,3,2,13,27,25,25,20,23,14,13,2,8,4,8,9,6,9,0,476,54,40,40,25,7,6,7,26,31,33,29,41,21,27,12,11,7,5,17,9,9,11,8
uSF2,DE,005,01,0000625,811,399,32,35,41,21,7,5,5,10,20,21,28,34,24,21,24,8,12,6,4,20,9,7,5,412,25,29,32,18,14,2,8,11,19,23,32,40,27,31,21,9,9,6,12,13,13,12,6
uSF2,DE,005,01,0000626,811,399,32,35,41,21,7,5,5,10,20,21,28,34,24,21,24,8,12,6,4,20,9,7,5,412,25,29,32,18,14,2,8,11,19,23,32,40,27,31,21,9,9,6,12,13,13,12,6
uSF2,DE,005,01,0000627,661,315,20,34,28,22,7,3,3,13,15,34,18,31,22,15,16,3,8,1,4,4,3,9,2,346,43,31,32,22,11,3,5,5,13,26,39,30,14,18,19,2,5,3,5,10,6,2,2
uSF2,DE,005,01,0000628,661,315,20,34,28,22,7,3,3,13,15,34,18,31,22,15,16,3,8,1,4,4,3,9,2,346,43,31,32,22,11,3,5,5,13,26,39,30,14,18,19,2,5,3,5,10,6,2,2
uSF2,DE,005,01,0000629,438,194,28,30,19,12,6,3,2,7,12,13,8,9,11,8,4,2,3,4,3,4,6,0,0,244,38,17,18,8,8,7,0,19,22,15,12,12,18,11,11,1,3,3,3,7,5,5,1
uSF2,DE,005,01,0000630,656,314,18,33,32,14,13,2,2,6,21,19,26,22,18,16,23,4,12,5,11,7,7,1,2,342,29,30,27,9,5,2,3,11,20,28,24,27,31,21,19,4,14,2,5,11,5,8,7
uSF2,DE,005,01,0000631,421,199,10,19,22,9,11,0,0,6,13,14,20,15,11,6,16,2,4,3,9,5,2,1,1,222,22,20,17,8,3,2,1,8,10,20,18,19,16,12,12,2,11,2,3,6,2,5,3
uSF2,DE,005,01,0000632,468,229,21,19,18,16,6,4,1,4,13,12,31,19,17,8,12,4,4,2,4,4,7,2,1,239,19,22,15,12,8,1,1,5,11,12,23,23,16,13,11,4,7,8,5,6,8,5,4
uSF2,DE,005,01,0000633,341,143,16,12,12,10,4,2,2,3,2,8,14,11,12,1,6,4,1,1,6,9,5,1,1,198,18,13,9,11,3,0,3,9,17,8,15,16,4,14,11,0,8,2,6,11,9,4,7
uSF2,DE,005,01,0000634,393,211,26,18,23,10,9,1,1,5,5,16,10,24,7,13,14,2,5,4,7,6,2,2,1,182,12,12,10,7,7,3,5,4,7,19,7,19,18,15,5,0,8,0,7,7,9,1,0
uSF2,DE,005,01,0000635,207,112,15,8,8,6,7,0,1,3,1,8,5,11,3,8,9,2,3,4,5,3,1,0,1,95,4,2,5,4,4,3,2,2,2,10,4,10,12,11,2,0,7,0,4,4,3,0,0
uSF2,DE,005,01,0000638,526,224,30,31,18,21,3,3,5,5,14,19,15,12,10,5,5,5,4,4,1,5,4,4,1,302,35,34,32,17,7,3,1,10,21,27,20,23,10,13,13,5,3,1,2,11,9,2,3
uSF2,DE,005,01,0000643,221,96,5,6,7,7,1,0,2,2,2,5,7,11,10,7,8,1,3,1,2,5,1,2,1,125,6,10,10,8,6,3,0,2,8,8,11,6,9,8,6,2,3,2,5,4,4,1,3
uSF2,DE,005,01,0000646,741,350,33,44,61,30,8,4,1,10,10,14,20,17,18,14,13,6,10,8,9,9,4,3,4,391,19,33,42,18,11,7,3,13,21,28,33,30,28,12,16,15,14,4,8,17,7,7,5
uSF2,DE,005,01,0000647,1022,473,35,37,47,43,13,10,7,16,32,24,24,26,41,23,28,7,17,6,9,14,7,6,1,549,25,44,47,38,16,10,4,19,27,36,43,44,33,34,35,15,8,10,9,17,22,8,5
uSF2,DE,005,01,0000648,211,103,11,11,9,8,3,2,3,0,7,6,15,11,4,5,1,0,2,1,3,1,0,0,0,108,10,9,16,7,2,1,1,4,7,13,9,11,6,3,4,0,2,1,0,0,0,2,0
uSF2,DE,005,01,0000649,299,152,8,11,21,7,4,1,3,5,8,14,12,9,12,10,7,5,1,6,2,3,1,1,1,147,12,12,15,9,1,0,0,6,6,10,11,9,15,10,8,4,3,2,5,3,3,3,0
uSF2,DE,005,01,0000650,525,220,53,33,28,7,12,1,6,6,14,14,9,9,7,7,5,0,3,0,1,2,1,2,0,305,37,24,25,11,29,18,15,14,15,19,23,19,7,4,9,2,5,3,4,8,5,7,2
uSF2,DE,005,01,0000651,1181,529,77,54,56,47,23,5,6,11,29,43,37,33,25,19,9,5,7,6,7,14,8,6,2,652,63,66,75,31,20,13,10,21,46,44,61,34,40,19,14,9,5,11,15,22,17,10,6
uSF2,DE,005,01,0000652,710,313,35,37,37,21,9,3,9,10,16,17,15,19,20,11,14,7,5,5,4,5,5,7,2,397,41,32,27,32,13,4,0,11,21,29,25,37,22,20,19,7,4,6,5,20,10,7,5
uSF2,DE,005,01,0000662,4977,2421,265,323,296,164,74,23,21,67,167,241,241,171,125,111,66,12,16,9,10,8,8,2,1,2556,286,278,265,120,62,33,18,66,168,315,268,234,183,113,61,18,18,5,8,17,9,4,7
uSF2,DE,005,01,0000663,4977,2421,265,323,296,164,74,23,21,67,167,241,241,171,125,111,66,12,16,9,10,8,8,2,1,2556,286,278,265,120,62,33,18,66,168,315,268,234,183,113,61,18,18,5,8,17,9,4,7
uSF2,DE,005,01,0000664,943,458,49,42,49,33,14,7,4,21,42,39,49,39,23,22,14,1,1,1,0,5,2,0,1,485,56,33,47,12,14,6,6,17,35,55,47,54,31,31,13,5,5,0,1,10,4,0,3
uSF2,DE,005,01,0000665,2729,1337,158,205,194,89,35,11,12,35,95,132,120,79,57,50,32,8,6,4,9,2,2,2,0,1392,150,171,152,82,33,19,8,34,97,185,138,117,97,50,26,8,6,3,5,5,2,1,3
uSF2,DE,005,01,0000666,479,237,21,30,14,20,9,2,4,7,11,20,21,22,22,10,6,2,8,3,1,1,3,0,0,242,21,28,25,8,7,2,1,5,9,21,28,26,28,7,9,4,5,2,0,0,3,2,1
uSF2,DE,005,01,0000667,826,389,37,46,39,22,16,3,1,4,19,50,51,31,23,29,14,1,1,1,0,0,1,0,0,437,59,46,41,18,8,6,3,10,27,54,55,37,27,25,13,1,2,0,2,2,0,1,0
uSF2,DE,005,01,0000677,225,110,12,15,16,3,6,2,1,3,5,14,6,10,6,2,7,0,2,0,0,0,0,0,0,115,11,13,9,3,4,2,1,3,6,10,12,6,10,10,3,1,2,2,2,1,1,2,1
uSF2,DE,005,01,0000678,225,110,12,15,16,3,6,2,1,3,5,14,6,10,6,2,7,0,2,0,0,0,0,0,0,115,11,13,9,3,4,2,1,3,6,10,12,6,10,10,3,1,2,2,2,1,1,2,1
uSF2,DE,005,01,0000679,225,110,12,15,16,3,6,2,1,3,5,14,6,10,6,2,7,0,2,0,0,0,0,0,0,115,11,13,9,3,4,2,1,3,6,10,12,6,10,10,3,1,2,2,2,1,1,2,1
uSF2,DE,005,01,0000683,461,200,35,25,16,12,8,1,1,2,9,11,12,16,12,9,9,2,1,3,4,7,3,2,0,261,28,30,16,9,9,4,4,15,18,22,21,10,13,12,5,1,3,6,5,11,10,4,5
uSF2,DE,005,01,0000684,461,200,35,25,16,12,8,1,1,2,9,11,12,16,12,9,9,2,1,3,4,7,3,2,0,261,28,30,16,9,9,4,4,15,18,22,21,10,13,12,5,1,3,6,5,11,10,4,5
uSF2,DE,005,01,0000685,461,200,35,25,16,12,8,1,1,2,9,11,12,16,12,9,9,2,1,3,4,7,3,2,0,261,28,30,16,9,9,4,4,15,18,22,21,10,13,12,5,1,3,6,5,11,10,4,5
uSF2,DE,005,01,0000686,2377,1092,122,121,106,52,26,15,16,60,100,83,82,94,69,61,32,12,13,3,9,10,6,0,0,1285,141,123,105,61,44,24,25,65,121,92,105,95,97,61,47,6,16,8,9,18,10,7,5
uSF2,DE,005,01,0000687,2377,1092,122,121,106,52,26,15,16,60,100,83,82,94,69,61,32,12,13,3,9,10,6,0,0,1285,141,123,105,61,44,24,25,65,121,92,105,95,97,61,47,6,16,8,9,18,10,7,5
uSF2,DE,005,01,0000688,1066,464,74,61,66,28,16,7,4,16,28,20,29,43,29,19,5,5,7,0,3,2,2,0,0,602,81,63,55,24,22,17,19,37,45,47,44,38,37,26,15,2,8,1,3,4,5,4,5
uSF2,DE,005,01,0000689,558,280,28,26,13,9,5,4,6,27,42,25,25,21,19,13,7,2,3,0,2,3,0,0,0,278,26,26,14,9,11,4,3,16,37,22,24,21,19,14,13,3,3,2,0,9,0,2,0
uSF2,DE,005,01,0000690,753,348,20,34,27,15,5,4,6,17,30,38,28,30,21,29,20,5,3,3,4,5,4,0,0,405,34,34,36,28,11,3,3,12,39,23,37,36,41,21,19,1,5,5,6,5,5,1,0
uSF2,DE,005,01,0000691,397,186,11,27,23,14,8,2,0,4,11,9,7,18,9,11,8,3,3,3,2,5,5,2,1,211,11,21,18,12,6,6,0,8,15,10,17,21,13,10,6,4,4,4,8,7,5,2,3
uSF2,DE,005,01,0000692,397,186,11,27,23,14,8,2,0,4,11,9,7,18,9,11,8,3,3,3,2,5,5,2,1,211,11,21,18,12,6,6,0,8,15,10,17,21,13,10,6,4,4,4,8,7,5,2,3
uSF2,DE,005,01,0000693,397,186,11,27,23,14,8,2,0,4,11,9,7,18,9,11,8,3,3,3,2,5,5,2,1,211,11,21,18,12,6,6,0,8,15,10,17,21,13,10,6,4,4,4,8,7,5,2,3
uSF2,DE,005,01,0000697,2248,1012,113,113,107,50,28,15,23,51,84,88,90,94,47,41,25,6,14,3,3,7,6,2,2,1236,140,110,114,61,37,20,23,58,126,130,104,104,72,54,22,6,9,7,13,5,11,4,6
uSF2,DE,005,01,0000698,2248,1012,113,113,107,50,28,15,23,51,84,88,90,94,47,41,25,6,14,3,3,7,6,2,2,1236,140,110,114,61,37,20,23,58,126,130,104,104,72,54,22,6,9,7,13,5,11,4,6
uSF2,DE,005,01,0000699,215,105,9,15,12,8,5,1,1,2,5,11,8,8,7,4,0,1,1,0,2,0,3,1,1,110,13,9,10,5,5,0,1,4,7,16,10,9,8,3,0,1,3,1,2,0,1,1,1
uSF2,DE,005,01,0000700,854,375,42,31,34,16,11,2,8,15,39,45,40,35,20,12,11,0,5,0,1,4,3,0,1,479,43,40,35,21,7,3,4,22,67,56,47,41,33,24,12,2,2,5,6,2,4,1,2
uSF2,DE,005,01,0000701,1057,475,60,60,55,20,12,11,13,31,38,30,39,43,17,21,11,3,5,3,0,2,0,1,0,582,80,53,60,32,22,17,17,31,51,55,41,47,27,20,7,2,2,0,5,3,5,2,3
uSF2,DE,005,01,0000702,122,57,2,7,6,6,0,1,1,3,2,2,3,8,3,4,3,2,3,0,0,1,0,0,0,65,4,8,9,3,3,0,1,1,1,3,6,7,4,7,3,1,2,1,0,0,1,0,0
uSF2,DE,005,01,0000703,106,56,1,8,4,2,1,0,1,2,4,3,5,9,3,3,3,0,3,0,1,0,2,0,1,50,2,3,6,0,1,2,1,0,4,1,2,7,5,4,1,1,3,1,0,3,1,1,1
uSF2,DE,005,01,0000704,106,56,1,8,4,2,1,0,1,2,4,3,5,9,3,3,3,0,3,0,1,0,2,0,1,50,2,3,6,0,1,2,1,0,4,1,2,7,5,4,1,1,3,1,0,3,1,1,1
uSF2,DE,005,01,0000705,106,56,1,8,4,2,1,0,1,2,4,3,5,9,3,3,3,0,3,0,1,0,2,0,1,50,2,3,6,0,1,2,1,0,4,1,2,7,5,4,1,1,3,1,0,3,1,1,1
uSF2,DE,005,01,0000709,154,72,4,4,8,2,5,1,0,1,3,4,6,6,3,3,2,6,4,1,0,5,2,1,1,82,4,6,7,5,0,1,1,0,2,4,4,8,6,4,3,6,3,0,2,3,4,4,5
uSF2,DE,005,01,0000710,154,72,4,4,8,2,5,1,0,1,3,4,6,6,3,3,2,6,4,1,0,5,2,1,1,82,4,6,7,5,0,1,1,0,2,4,4,8,6,4,3,6,3,0,2,3,4,4,5
uSF2,DE,005,01,0000711,154,72,4,4,8,2,5,1,0,1,3,4,6,6,3,3,2,6,4,1,0,5,2,1,1,82,4,6,7,5,0,1,1,0,2,4,4,8,6,4,3,6,3,0,2,3,4,4,5
uSF2,DE,005,01,0000712,285,128,19,17,14,12,5,2,3,7,9,6,6,7,5,2,4,2,0,4,0,1,0,3,0,157,27,18,7,7,4,2,0,9,16,14,11,17,4,2,6,1,1,0,2,5,0,2,2
uSF2,DE,005,01,0000713,285,128,19,17,14,12,5,2,3,7,9,6,6,7,5,2,4,2,0,4,0,1,0,3,0,157,27,18,7,7,4,2,0,9,16,14,11,17,4,2,6,1,1,0,2,5,0,2,2
uSF2,DE,005,01,0000714,285,128,19,17,14,12,5,2,3,7,9,6,6,7,5,2,4,2,0,4,0,1,0,3,0,157,27,18,7,7,4,2,0,9,16,14,11,17,4,2,6,1,1,0,2,5,0,2,2
uSF2,DE,005,01,0000718,10708,4893,531,527,487,258,144,80,83,258,356,334,351,325,256,260,180,64,85,59,92,81,41,28,13,5815,545,447,505,269,161,126,109,343,461,433,450,453,385,307,225,70,97,76,89,98,81,46,39
uSF2,DE,005,01,0000719,10708,4893,531,527,487,258,144,80,83,258,356,334,351,325,256,260,180,64,85,59,92,81,41,28,13,5815,545,447,505,269,161,126,109,343,461,433,450,453,385,307,225,70,97,76,89,98,81,46,39
uSF2,DE,005,01,0000720,2440,1185,125,119,118,63,36,22,14,67,83,70,111,66,55,72,56,16,27,17,25,14,5,2,2,1255,106,88,113,45,35,32,18,85,88,100,114,100,79,79,53,16,29,19,17,17,9,6,7
uSF2,DE,005,01,0000721,170,88,5,6,7,0,0,2,1,5,9,5,14,7,11,5,2,2,0,0,4,1,1,0,1,82,4,9,6,0,2,1,0,2,6,9,11,4,7,6,4,1,1,4,2,1,0,0,2
uSF2,DE,005,01,0000722,1326,572,66,86,72,41,15,6,9,13,24,28,38,36,35,36,25,9,7,4,8,7,3,1,3,754,68,61,87,49,27,16,10,33,45,57,51,61,52,46,35,11,12,8,8,7,6,1,3
uSF2,DE,005,01,0000723,1197,540,38,38,42,33,18,10,16,31,27,34,43,40,31,35,19,10,15,9,17,17,9,7,1,657,45,39,60,34,20,10,6,28,36,36,54,60,45,36,33,11,9,16,14,21,21,14,9
uSF2,DE,005,01,0000724,311,136,17,12,7,3,4,1,1,9,9,12,9,7,8,8,8,2,1,1,4,2,5,3,3,175,20,17,5,5,3,3,4,14,21,11,9,11,2,5,5,0,3,3,7,9,9,6,3
uSF2,DE,005,01,0000725,1717,793,94,104,84,33,33,9,13,47,73,70,42,48,36,33,27,10,10,7,8,7,4,1,0,924,96,77,72,36,24,23,26,73,97,74,58,63,61,51,39,12,9,6,13,6,4,3,1
uSF2,DE,005,01,0000727,182,78,17,13,18,2,2,2,1,5,6,5,1,0,3,0,2,0,1,0,0,0,0,0,0,104,12,14,8,4,1,4,5,7,12,15,7,4,4,1,2,1,1,0,0,0,2,0,0
uSF2,DE,005,01,0000728,810,347,71,47,26,17,10,4,8,16,29,23,22,20,9,11,4,2,6,4,6,6,4,1,1,463,74,49,35,19,16,9,12,40,47,28,26,29,24,11,9,2,5,3,9,6,4,1,5
uSF2,DE,005,01,0000729,1480,660,51,73,68,30,16,17,10,29,49,51,48,58,32,25,24,6,9,12,15,15,9,11,2,820,76,59,72,45,14,13,13,26,63,57,79,62,59,42,23,8,20,10,14,22,20,15,8
uSF2,DE,005,01,0000730,406,200,22,16,19,18,4,3,3,10,12,9,8,21,10,14,5,4,6,4,5,7,0,0,0,206,17,9,20,15,8,8,1,5,10,15,15,22,16,11,10,5,3,4,3,6,2,0,1
uSF2,DE,005,01,0000731,582,259,24,13,21,16,6,3,6,21,32,23,13,22,23,17,8,3,1,0,0,5,1,1,0,323,22,21,25,15,9,7,13,25,28,25,23,36,35,12,9,3,3,3,2,3,4,0,0
uSF2,DE,005,01,0000733,660,350,53,57,44,12,3,1,8,23,54,45,32,15,2,1,0,0,0,0,0,0,0,0,0,310,62,39,25,6,3,5,9,29,37,45,30,13,4,0,0,0,0,0,1,0,1,1,0
uSF2,DE,005,01,0000734,660,350,53,57,44,12,3,1,8,23,54,45,32,15,2,1,0,0,0,0,0,0,0,0,0,310,62,39,25,6,3,5,9,29,37,45,30,13,4,0,0,0,0,0,1,0,1,1,0
uSF2,DE,005,01,0000735,660,350,53,57,44,12,3,1,8,23,54,45,32,15,2,1,0,0,0,0,0,0,0,0,0,310,62,39,25,6,3,5,9,29,37,45,30,13,4,0,0,0,0,0,1,0,1,1,0
uSF2,DE,005,01,0000736,2071,910,129,132,111,61,17,9,6,19,58,59,57,59,51,45,28,12,15,6,11,11,7,5,2,1161,114,128,106,51,34,19,29,39,130,96,79,94,83,56,37,16,15,10,3,10,10,1,1
uSF2,DE,005,01,0000737,2071,910,129,132,111,61,17,9,6,19,58,59,57,59,51,45,28,12,15,6,11,11,7,5,2,1161,114,128,106,51,34,19,29,39,130,96,79,94,83,56,37,16,15,10,3,10,10,1,1
uSF2,DE,005,01,0000739,2052,898,129,130,107,61,16,9,6,19,58,59,57,58,50,44,26,12,15,6,11,11,7,5,2,1154,114,128,105,51,34,19,28,39,130,96,78,93,80,56,37,16,15,10,3,10,10,1,1
uSF2,DE,005,01,0000740,126,63,5,10,8,2,0,0,2,2,1,4,7,4,1,4,3,1,2,0,2,1,3,0,1,63,3,4,8,2,2,0,1,1,3,4,6,4,5,5,4,3,2,2,3,0,1,0,0
uSF2,DE,005,01,0000741,126,63,5,10,8,2,0,0,2,2,1,4,7,4,1,4,3,1,2,0,2,1,3,0,1,63,3,4,8,2,2,0,1,1,3,4,6,4,5,5,4,3,2,2,3,0,1,0,0
uSF2,DE,005,01,0000742,126,63,5,10,8,2,0,0,2,2,1,4,7,4,1,4,3,1,2,0,2,1,3,0,1,63,3,4,8,2,2,0,1,1,3,4,6,4,5,5,4,3,2,2,3,0,1,0,0
uSF2,DE,005,01,0000743,587,294,34,34,28,19,14,1,8,20,26,18,29,22,13,16,4,3,0,0,2,1,1,1,0,293,23,23,31,13,11,5,3,16,22,38,28,29,21,11,11,3,1,2,0,0,1,1,0
uSF2,DE,005,01,0000744,587,294,34,34,28,19,14,1,8,20,26,18,29,22,13,16,4,3,0,0,2,1,1,1,0,293,23,23,31,13,11,5,3,16,22,38,28,29,21,11,11,3,1,2,0,0,1,1,0
uSF2,DE,005,01,0000745,233,123,18,16,8,9,7,1,3,10,9,8,5,8,7,8,2,0,0,0,2,1,0,1,0,110,10,8,9,4,4,2,1,7,11,10,13,12,12,2,4,0,0,1,0,0,0,0,0
uSF2,DE,005,01,0000746,354,171,16,18,20,10,7,0,5,10,17,10,24,14,6,8,2,3,0,0,0,0,1,0,0,183,13,15,22,9,7,3,2,9,11,28,15,17,9,9,7,3,1,1,0,0,1,1,0
uSF2,DE,005,01,0000753,265,118,4,7,14,14,3,2,3,3,9,4,7,4,9,7,11,2,3,1,2,7,1,0,1,147,6,18,16,8,4,1,1,6,7,7,9,9,11,8,12,5,3,2,2,1,9,2,0
uSF2,DE,005,01,0000754,265,118,4,7,14,14,3,2,3,3,9,4,7,4,9,7,11,2,3,1,2,7,1,0,1,147,6,18,16,8,4,1,1,6,7,7,9,9,11,8,12,5,3,2,2,1,9,2,0
uSF2,DE,005,01,0000755,265,118,4,7,14,14,3,2,3,3,9,4,7,4,9,7,11,2,3,1,2,7,1,0,1,147,6,18,16,8,4,1,1,6,7,7,9,9,11,8,12,5,3,2,2,1,9,2,0
uSF2,DE,005,01,0000756,180,81,2,8,7,3,4,0,1,2,3,4,10,8,10,0,6,1,0,0,1,6,3,1,1,99,11,8,8,7,2,0,2,0,2,7,6,13,5,6,1,2,2,1,6,6,1,2,1
uSF2,DE,005,01,0000757,180,81,2,8,7,3,4,0,1,2,3,4,10,8,10,0,6,1,0,0,1,6,3,1,1,99,11,8,8,7,2,0,2,0,2,7,6,13,5,6,1,2,2,1,6,6,1,2,1
uSF2,DE,005,01,0000758,180,81,2,8,7,3,4,0,1,2,3,4,10,8,10,0,6,1,0,0,1,6,3,1,1,99,11,8,8,7,2,0,2,0,2,7,6,13,5,6,1,2,2,1,6,6,1,2,1
uSF2,DE,005,01,0000759,979,438,50,54,34,35,26,11,5,16,25,32,28,32,28,13,5,3,10,5,6,5,6,8,1,541,55,63,49,19,30,12,6,22,30,33,35,40,23,30,22,4,5,12,11,13,13,10,4
uSF2,DE,005,01,0000760,979,438,50,54,34,35,26,11,5,16,25,32,28,32,28,13,5,3,10,5,6,5,6,8,1,541,55,63,49,19,30,12,6,22,30,33,35,40,23,30,22,4,5,12,11,13,13,10,4
uSF2,DE,005,01,0000761,969,433,50,54,34,35,25,10,5,16,24,31,28,32,28,12,5,3,10,5,6,5,6,8,1,536,55,61,49,19,30,11,6,22,30,32,35,40,22,30,22,4,5,12,11,13,13,10,4
uSF2,DE,005,01,0000762,2266,1133,113,131,124,69,34,10,11,23,72,115,112,93,69,63,33,11,17,7,12,6,4,2,2,1133,99,96,82,49,24,6,10,38,99,137,133,108,85,73,28,10,18,9,9,7,2,4,7
uSF2,DE,005,01,0000763,2266,1133,113,131,124,69,34,10,11,23,72,115,112,93,69,63,33,11,17,7,12,6,4,2,2,1133,99,96,82,49,24,6,10,38,99,137,133,108,85,73,28,10,18,9,9,7,2,4,7
uSF2,DE,005,01,0000764,580,304,30,36,33,25,12,3,0,6,20,31,24,27,16,14,8,1,5,2,5,3,1,1,1,276,23,24,16,9,6,3,2,4,27,33,37,27,21,17,8,4,3,4,1,3,2,0,2
uSF2,DE,005,01,0000765,1353,666,71,75,70,36,20,7,9,14,47,66,71,51,41,40,16,8,9,4,5,3,2,1,0,687,64,57,51,27,16,2,5,31,61,84,69,70,50,47,17,5,13,5,5,2,0,2,4
uSF2,DE,005,01,0000766,272,130,10,19,16,4,1,0,2,2,4,16,14,12,9,9,4,1,2,1,2,0,1,0,1,142,12,15,12,12,2,1,3,0,9,17,22,10,10,6,2,1,1,0,3,1,0,2,1
uSF2,DE,005,01,0000772,195,93,11,11,8,4,2,1,2,7,3,7,7,6,7,3,1,0,1,3,0,2,4,3,0,102,9,8,11,5,4,4,2,5,6,10,11,3,3,2,3,0,1,3,0,3,4,2,3
uSF2,DE,005,01,0000773,195,93,11,11,8,4,2,1,2,7,3,7,7,6,7,3,1,0,1,3,0,2,4,3,0,102,9,8,11,5,4,4,2,5,6,10,11,3,3,2,3,0,1,3,0,3,4,2,3
uSF2,DE,005,01,0000774,195,93,11,11,8,4,2,1,2,7,3,7,7,6,7,3,1,0,1,3,0,2,4,3,0,102,9,8,11,5,4,4,2,5,6,10,11,3,3,2,3,0,1,3,0,3,4,2,3
uSF2,DE,005,01,0000775,723,304,46,44,40,18,10,4,3,10,7,19,20,22,10,7,10,5,8,5,2,5,6,2,1,419,65,35,49,25,11,5,9,14,28,25,39,30,20,9,6,9,7,7,1,9,12,2,2
uSF2,DE,005,01,0000776,723,304,46,44,40,18,10,4,3,10,7,19,20,22,10,7,10,5,8,5,2,5,6,2,1,419,65,35,49,25,11,5,9,14,28,25,39,30,20,9,6,9,7,7,1,9,12,2,2
uSF2,DE,005,01,0000777,723,304,46,44,40,18,10,4,3,10,7,19,20,22,10,7,10,5,8,5,2,5,6,2,1,419,65,35,49,25,11,5,9,14,28,25,39,30,20,9,6,9,7,7,1,9,12,2,2
uSF2,DE,005,01,0000781,424,212,10,27,21,12,7,5,2,7,10,7,10,19,17,20,12,5,4,4,9,0,1,2,1,212,16,18,20,10,7,4,4,10,11,9,12,24,22,11,10,4,4,4,4,2,3,1,2
uSF2,DE,005,01,0000782,424,212,10,27,21,12,7,5,2,7,10,7,10,19,17,20,12,5,4,4,9,0,1,2,1,212,16,18,20,10,7,4,4,10,11,9,12,24,22,11,10,4,4,4,4,2,3,1,2
uSF2,DE,005,01,0000783,120,60,3,8,4,3,1,1,0,3,3,3,4,6,5,4,2,0,2,3,3,0,0,1,1,60,5,5,6,0,3,1,1,5,2,3,5,6,5,2,2,2,2,0,2,0,1,1,1
uSF2,DE,005,01,0000784,304,152,7,19,17,9,6,4,2,4,7,4,6,13,12,16,10,5,2,1,6,0,1,1,0,152,11,13,14,10,4,3,3,5,9,6,7,18,17,9,8,2,2,4,2,2,2,0,1
uSF2,DE,005,01,0000785,348,170,13,12,15,7,6,1,1,5,5,7,15,19,15,15,12,4,2,2,4,4,3,2,1,178,11,14,9,8,4,1,1,4,6,8,13,18,17,22,8,2,5,3,0,8,5,6,5
uSF2,DE,005,01,0000786,348,170,13,12,15,7,6,1,1,5,5,7,15,19,15,15,12,4,2,2,4,4,3,2,1,178,11,14,9,8,4,1,1,4,6,8,13,18,17,22,8,2,5,3,0,8,5,6,5
uSF2,DE,005,01,0000788,257,126,11,8,7,6,6,1,0,5,4,5,11,14,12,9,9,3,2,2,3,3,3,1,1,131,7,9,8,4,3,1,1,4,4,6,11,14,11,15,7,1,5,2,0,6,3,4,5
uSF2,DE,005,01,0000793,349,172,21,17,14,15,10,5,1,4,7,6,14,16,11,11,5,4,2,3,3,2,0,0,1,177,12,17,17,15,2,3,3,6,16,8,14,18,16,17,5,1,3,1,0,1,1,0,1
uSF2,DE,005,01,0000794,349,172,21,17,14,15,10,5,1,4,7,6,14,16,11,11,5,4,2,3,3,2,0,0,1,177,12,17,17,15,2,3,3,6,16,8,14,18,16,17,5,1,3,1,0,1,1,0,1
uSF2,DE,005,01,0000795,226,105,17,11,7,6,5,4,0,2,6,6,7,9,6,7,3,1,2,2,2,2,0,0,0,121,9,11,12,7,0,2,2,5,14,7,11,13,11,8,4,1,2,0,0,1,0,0,1
uSF2,DE,005,01,0000796,123,67,4,6,7,9,5,1,1,2,1,0,7,7,5,4,2,3,0,1,1,0,0,0,1,56,3,6,5,8,2,1,1,1,2,1,3,5,5,9,1,0,1,1,0,0,1,0,0
uSF2,DE,005,01,0000800,1518,655,119,73,82,53,27,5,12,15,36,52,34,35,26,21,10,5,7,6,7,15,6,7,2,863,94,84,96,37,46,29,25,33,51,56,71,44,40,21,18,9,10,13,17,30,16,16,7
uSF2,DE,005,01,0000801,1518,655,119,73,82,53,27,5,12,15,36,52,34,35,26,21,10,5,7,6,7,15,6,7,2,863,94,84,96,37,46,29,25,33,51,56,71,44,40,21,18,9,10,13,17,30,16,16,7
uSF2,DE,005,01,0000802,402,158,46,24,28,7,8,1,6,4,8,9,0,5,2,4,3,0,0,0,0,1,0,2,0,244,33,19,24,6,26,16,15,13,9,13,17,12,4,3,5,0,5,3,3,8,3,6,1
uSF2,DE,005,01,0000803,1116,497,73,49,54,46,19,4,6,11,28,43,34,30,24,17,7,5,7,6,7,14,6,5,2,619,61,65,72,31,20,13,10,20,42,43,54,32,36,18,13,9,5,10,14,22,13,10,6
uSF2,DE,005,01,0000807,267,107,14,6,10,8,3,0,2,3,2,4,11,9,10,1,5,2,1,1,4,6,4,0,1,160,14,13,7,10,2,0,3,9,15,6,10,13,3,13,8,0,5,2,4,10,7,4,2
uSF2,DE,005,01,0000808,267,107,14,6,10,8,3,0,2,3,2,4,11,9,10,1,5,2,1,1,4,6,4,0,1,160,14,13,7,10,2,0,3,9,15,6,10,13,3,13,8,0,5,2,4,10,7,4,2
uSF2,DE,005,01,0000809,267,107,14,6,10,8,3,0,2,3,2,4,11,9,10,1,5,2,1,1,4,6,4,0,1,160,14,13,7,10,2,0,3,9,15,6,10,13,3,13,8,0,5,2,4,10,7,4,2
uSF2,DE,005,01,0000819,1356,604,74,68,72,36,23,8,7,18,36,38,43,48,36,35,16,4,10,5,2,11,10,2,2,752,72,80,62,39,19,16,11,25,32,59,75,60,62,42,25,6,14,5,10,16,11,7,4
uSF2,DE,005,01,0000820,1356,604,74,68,72,36,23,8,7,18,36,38,43,48,36,35,16,4,10,5,2,11,10,2,2,752,72,80,62,39,19,16,11,25,32,59,75,60,62,42,25,6,14,5,10,16,11,7,4
uSF2,DE,005,01,0000821,181,88,12,7,10,6,5,0,1,3,9,10,10,5,1,4,1,0,3,0,0,0,0,0,1,93,15,8,10,1,4,4,1,8,4,12,6,4,10,3,0,0,1,0,0,1,1,0,0
uSF2,DE,005,01,0000822,1163,510,61,61,62,30,18,8,5,15,27,27,33,43,34,30,14,4,7,5,2,11,10,2,1,653,57,72,52,37,15,12,10,17,27,47,69,55,51,39,24,6,13,4,10,15,10,7,4
uSF2,DE,005,01,0000823,1615,732,87,76,97,47,31,8,13,24,38,49,61,58,36,19,17,6,10,7,6,19,16,7,0,883,85,94,83,37,33,14,21,44,60,66,64,63,41,37,26,8,22,10,11,27,17,8,12
uSF2,DE,005,01,0000824,1229,537,55,58,79,38,24,5,8,14,27,38,39,38,25,11,12,5,10,6,6,17,16,6,0,692,64,75,72,26,25,9,13,27,44,53,50,52,34,26,20,8,21,9,10,24,12,6,12
uSF2,DE,005,01,0000825,1055,468,45,50,67,31,20,5,8,10,25,34,35,33,25,11,11,5,7,6,5,15,14,6,0,587,55,58,54,23,22,8,11,23,37,41,41,46,33,23,20,8,18,9,10,22,7,6,12
uSF2,DE,005,01,0000826,174,69,10,8,12,7,4,0,0,4,2,4,4,5,0,0,1,0,3,0,1,2,2,0,0,105,9,17,18,3,3,1,2,4,7,12,9,6,1,3,0,0,3,0,0,2,5,0,0
uSF2,DE,005,01,0000827,386,195,32,18,18,9,7,3,5,10,11,11,22,20,11,8,5,1,0,1,0,2,0,1,0,191,21,19,11,11,8,5,8,17,16,13,14,11,7,11,6,0,1,1,1,3,5,2,0
uSF2,DE,005,01,0000829,369,186,31,16,14,9,7,3,5,10,11,11,20,20,11,8,5,1,0,1,0,2,0,1,0,183,21,17,10,9,8,4,8,17,16,12,13,11,7,11,6,0,1,1,1,3,5,2,0
uSF2,DE,005,01,0000830,459,175,24,31,12,7,4,1,2,6,15,13,9,8,8,6,5,2,6,2,1,4,3,6,0,284,38,24,25,12,3,3,5,19,22,19,18,23,11,16,8,5,1,0,8,7,7,4,6
uSF2,DE,005,01,0000831,459,175,24,31,12,7,4,1,2,6,15,13,9,8,8,6,5,2,6,2,1,4,3,6,0,284,38,24,25,12,3,3,5,19,22,19,18,23,11,16,8,5,1,0,8,7,7,4,6
uSF2,DE,005,01,0000832,459,175,24,31,12,7,4,1,2,6,15,13,9,8,8,6,5,2,6,2,1,4,3,6,0,284,38,24,25,12,3,3,5,19,22,19,18,23,11,16,8,5,1,0,8,7,7,4,6
uSF2,DE,005,01,0000836,413,180,26,32,12,9,5,4,2,4,13,12,4,6,9,14,5,2,2,3,4,4,7,0,1,233,35,15,16,7,8,7,1,16,20,13,11,11,17,16,11,2,5,1,4,5,5,5,2
uSF2,DE,005,01,0000837,413,180,26,32,12,9,5,4,2,4,13,12,4,6,9,14,5,2,2,3,4,4,7,0,1,233,35,15,16,7,8,7,1,16,20,13,11,11,17,16,11,2,5,1,4,5,5,5,2
uSF2,DE,005,01,0000838,341,144,23,27,10,9,5,3,1,4,10,10,2,5,7,6,3,2,2,3,3,4,5,0,0,197,33,13,14,6,6,7,0,16,19,11,10,8,13,11,9,1,3,1,3,5,4,4,0
uSF2,DE,005,01,0000840,1497,701,47,64,61,31,18,28,25,59,67,59,34,43,34,35,33,12,11,8,5,10,8,7,2,796,46,67,71,43,27,7,22,47,48,67,62,48,56,42,36,6,16,8,18,24,10,10,15
uSF2,DE,005,01,0000841,1497,701,47,64,61,31,18,28,25,59,67,59,34,43,34,35,33,12,11,8,5,10,8,7,2,796,46,67,71,43,27,7,22,47,48,67,62,48,56,42,36,6,16,8,18,24,10,10,15
uSF2,DE,005,01,0000842,128,59,3,6,2,5,1,3,3,7,9,2,3,4,5,3,2,0,0,0,0,0,1,0,0,69,4,3,8,4,1,0,7,7,1,9,5,3,8,6,2,0,1,0,0,0,0,0,0
uSF2,DE,005,01,0000844,235,103,4,9,5,5,0,2,0,4,2,8,5,3,7,15,13,2,4,2,1,5,4,3,0,132,2,8,8,7,4,1,1,2,3,5,11,7,14,11,8,3,3,2,4,10,5,5,8
uSF2,DE,005,01,0000845,164,83,6,3,4,0,1,0,3,20,11,11,4,3,1,5,3,3,1,2,1,1,0,0,0,81,4,5,2,1,5,1,4,18,9,4,7,3,5,2,6,0,1,0,2,0,0,1,1
uSF2,DE,005,01,0000846,269,140,9,9,19,3,7,11,8,15,22,10,5,7,8,3,1,1,1,0,0,0,0,1,0,129,8,19,12,2,4,2,6,6,9,17,12,6,6,7,4,1,2,3,2,0,0,1,0
uSF2,DE,005,01,0000847,162,78,4,6,7,3,3,2,0,3,8,7,4,12,5,2,4,1,2,3,0,0,0,2,0,84,9,10,6,5,2,1,0,1,6,3,6,9,9,5,4,0,3,1,1,2,0,0,1
uSF2,DE,005,01,0000848,157,48,6,11,8,2,1,2,0,4,2,2,2,1,1,0,3,0,1,0,0,1,0,0,1,109,6,9,16,9,6,2,2,3,6,9,8,4,2,2,1,0,4,1,6,6,2,1,4
uSF2,DE,005,01,0000849,105,53,3,9,1,6,1,6,7,2,2,6,2,3,0,0,1,0,1,0,0,2,0,1,0,52,1,4,7,5,2,0,0,4,3,5,3,4,2,3,2,0,1,0,3,3,0,0,0
uSF2,DE,005,01,0000851,106,50,8,4,5,3,2,1,0,2,5,4,2,2,1,3,1,2,1,0,1,0,2,0,1,56,5,3,6,7,1,0,2,1,6,3,5,5,1,2,5,0,1,0,0,2,0,1,0
uSF2,DE,005,01,0000853,1002,452,37,42,50,28,15,4,6,15,24,24,47,35,26,37,19,8,8,6,4,7,4,4,2,550,37,42,50,29,14,4,8,11,37,43,56,42,46,37,28,11,6,5,8,8,12,4,12
uSF2,DE,005,01,0000854,1002,452,37,42,50,28,15,4,6,15,24,24,47,35,26,37,19,8,8,6,4,7,4,4,2,550,37,42,50,29,14,4,8,11,37,43,56,42,46,37,28,11,6,5,8,8,12,4,12
uSF2,DE,005,01,0000856,236,117,15,12,13,8,4,0,0,1,10,6,15,11,11,4,2,1,1,3,0,0,0,0,0,119,10,11,10,8,2,0,0,1,13,11,18,11,9,2,4,1,1,2,1,1,2,0,1
uSF2,DE,005,01,0000857,452,194,14,18,22,12,5,3,6,10,9,13,19,12,10,12,9,5,4,1,3,2,3,1,1,258,17,17,23,15,7,1,6,6,17,23,17,20,24,24,11,7,2,1,6,5,3,0,6
uSF2,DE,005,01,0000858,216,94,6,5,11,7,3,1,0,3,4,3,9,9,4,13,4,2,2,1,1,3,0,3,0,122,9,8,14,4,5,3,2,2,4,6,14,8,9,8,8,3,2,2,1,1,5,3,1
uSF2,DE,005,01,0000859,148,72,11,4,5,3,1,4,1,4,6,2,9,8,7,3,4,0,0,0,0,0,0,0,0,76,9,4,8,5,4,0,0,3,6,10,11,4,3,5,2,0,1,0,0,0,1,0,0
uSF2,DE,005,01,0000860,148,72,11,4,5,3,1,4,1,4,6,2,9,8,7,3,4,0,0,0,0,0,0,0,0,76,9,4,8,5,4,0,0,3,6,10,11,4,3,5,2,0,1,0,0,0,1,0,0
uSF2,DE,005,01,0000863,216,103,9,8,7,6,6,0,1,5,2,5,5,12,12,17,5,1,0,1,1,0,0,0,0,113,10,12,3,10,2,0,1,5,2,8,8,12,18,12,4,0,0,2,1,3,0,0,0
uSF2,DE,005,01,0000864,216,103,9,8,7,6,6,0,1,5,2,5,5,12,12,17,5,1,0,1,1,0,0,0,0,113,10,12,3,10,2,0,1,5,2,8,8,12,18,12,4,0,0,2,1,3,0,0,0
uSF2,DE,005,01,0000865,216,103,9,8,7,6,6,0,1,5,2,5,5,12,12,17,5,1,0,1,1,0,0,0,0,113,10,12,3,10,2,0,1,5,2,8,8,12,18,12,4,0,0,2,1,3,0,0,0
uSF2,DE,005,01,0000872,804,394,27,30,29,15,8,5,3,20,37,34,34,43,28,39,21,4,5,4,1,3,2,1,1,410,30,23,23,10,9,4,7,15,32,39,42,41,40,28,26,10,14,6,3,3,3,1,1
uSF2,DE,005,01,0000873,804,394,27,30,29,15,8,5,3,20,37,34,34,43,28,39,21,4,5,4,1,3,2,1,1,410,30,23,23,10,9,4,7,15,32,39,42,41,40,28,26,10,14,6,3,3,3,1,1
uSF2,DE,005,01,0000875,307,150,9,8,12,5,3,0,0,6,17,21,14,12,11,17,8,0,2,2,1,1,0,0,1,157,16,6,4,5,3,2,4,6,14,13,17,13,16,13,8,6,4,4,1,1,1,0,0
uSF2,DE,005,01,0000876,288,148,10,14,10,9,2,0,1,10,16,6,13,16,15,13,5,3,1,1,0,1,1,1,0,140,7,10,10,3,2,0,2,6,12,17,12,15,15,8,10,2,5,2,1,0,0,1,0
uSF2,DE,005,01,0000877,75,33,1,2,3,0,1,3,2,0,2,4,2,5,1,1,4,1,0,0,0,1,0,0,0,42,4,1,3,0,2,1,0,2,3,4,6,4,3,2,2,0,2,0,1,1,1,0,0
uSF2,DE,005,01,0000878,105,51,6,3,3,1,2,2,0,4,1,3,4,8,1,8,3,0,1,0,0,0,1,0,0,54,2,2,5,2,2,1,1,1,3,3,6,8,5,4,5,1,1,0,0,1,0,0,1
uSF2,DE,005,01,0000882,424,219,19,31,20,11,9,2,3,7,16,19,21,18,19,8,4,2,1,2,2,3,1,0,1,205,17,25,29,13,5,4,2,6,14,24,17,14,13,6,3,8,0,1,2,0,0,0,2
uSF2,DE,005,01,0000883,424,219,19,31,20,11,9,2,3,7,16,19,21,18,19,8,4,2,1,2,2,3,1,0,1,205,17,25,29,13,5,4,2,6,14,24,17,14,13,6,3,8,0,1,2,0,0,0,2
uSF2,DE,005,01,0000885,395,202,17,31,20,10,9,2,3,7,14,19,17,16,18,7,4,0,1,2,2,1,1,0,1,193,15,24,27,13,5,4,2,6,13,22,15,13,13,6,3,7,0,1,2,0,0,0,2
uSF2,DE,005,01,0000886,122,58,5,9,5,5,0,0,0,2,2,3,7,7,4,3,2,0,0,1,2,1,0,0,0,64,2,5,6,5,1,1,0,3,2,5,9,9,3,6,1,1,0,1,1,2,1,0,0
uSF2,DE,005,01,0000887,122,58,5,9,5,5,0,0,0,2,2,3,7,7,4,3,2,0,0,1,2,1,0,0,0,64,2,5,6,5,1,1,0,3,2,5,9,9,3,6,1,1,0,1,1,2,1,0,0
uSF2,DE,005,01,0000888,122,58,5,9,5,5,0,0,0,2,2,3,7,7,4,3,2,0,0,1,2,1,0,0,0,64,2,5,6,5,1,1,0,3,2,5,9,9,3,6,1,1,0,1,1,2,1,0,0
uSF2,DE,005,01,0000889,661,337,32,34,33,20,18,9,15,24,20,17,24,21,28,18,6,3,7,3,0,4,0,1,0,324,24,26,33,25,13,5,3,14,25,24,24,41,26,9,11,4,4,2,5,2,3,1,0
uSF2,DE,005,01,0000890,661,337,32,34,33,20,18,9,15,24,20,17,24,21,28,18,6,3,7,3,0,4,0,1,0,324,24,26,33,25,13,5,3,14,25,24,24,41,26,9,11,4,4,2,5,2,3,1,0
uSF2,DE,005,01,0000891,651,334,31,34,33,19,18,9,15,24,20,17,23,21,28,18,6,3,7,3,0,4,0,1,0,317,23,26,33,23,13,4,3,14,25,24,24,39,25,9,11,4,4,2,5,2,3,1,0
uSF2,DE,005,01,0000892,2038,868,155,128,109,43,27,10,10,30,46,37,60,61,39,33,19,3,7,5,10,15,11,4,6,1170,127,112,107,54,43,28,24,73,72,90,97,71,83,35,33,19,13,6,18,26,17,14,8
uSF2,DE,005,01,0000893,2038,868,155,128,109,43,27,10,10,30,46,37,60,61,39,33,19,3,7,5,10,15,11,4,6,1170,127,112,107,54,43,28,24,73,72,90,97,71,83,35,33,19,13,6,18,26,17,14,8
uSF2,DE,005,01,0000894,405,146,37,23,26,10,4,1,2,3,7,9,14,4,0,0,1,0,0,0,3,2,0,0,0,259,33,28,28,9,12,11,8,14,16,27,27,7,20,4,5,1,0,2,4,3,0,0,0
uSF2,DE,005,01,0000895,1633,722,118,105,83,33,23,9,8,27,39,28,46,57,39,33,18,3,7,5,7,13,11,4,6,911,94,84,79,45,31,17,16,59,56,63,70,64,63,31,28,18,13,4,14,23,17,14,8
uSF2,DE,005,01,0000896,259,119,11,10,18,10,1,1,0,2,2,7,9,6,7,5,4,0,3,7,4,5,2,2,3,140,4,7,13,6,5,2,1,4,4,4,10,13,11,5,5,9,6,2,4,10,6,6,3
uSF2,DE,005,01,0000897,259,119,11,10,18,10,1,1,0,2,2,7,9,6,7,5,4,0,3,7,4,5,2,2,3,140,4,7,13,6,5,2,1,4,4,4,10,13,11,5,5,9,6,2,4,10,6,6,3
uSF2,DE,005,01,0000898,259,119,11,10,18,10,1,1,0,2,2,7,9,6,7,5,4,0,3,7,4,5,2,2,3,140,4,7,13,6,5,2,1,4,4,4,10,13,11,5,5,9,6,2,4,10,6,6,3
uSF2,DE,005,01,0000902,1321,601,81,81,70,26,14,8,8,25,41,49,38,40,37,21,17,3,5,4,9,11,10,1,2,720,80,72,52,35,17,9,17,27,68,50,65,52,39,35,18,7,12,10,15,13,10,8,9
uSF2,DE,005,01,0000903,1321,601,81,81,70,26,14,8,8,25,41,49,38,40,37,21,17,3,5,4,9,11,10,1,2,720,80,72,52,35,17,9,17,27,68,50,65,52,39,35,18,7,12,10,15,13,10,8,9
uSF2,DE,005,01,0000904,471,228,25,25,23,6,5,1,6,9,15,27,14,12,15,17,10,2,2,2,1,6,3,0,2,243,24,16,11,12,7,3,2,10,23,16,23,16,11,17,10,4,5,2,8,7,6,6,4
uSF2,DE,005,01,0000905,151,63,9,6,10,1,0,0,0,2,4,6,5,6,5,1,4,0,0,0,1,0,3,0,0,88,6,16,5,1,1,0,2,4,5,4,10,7,9,2,3,0,1,1,3,2,2,1,3
uSF2,DE,005,01,0000906,699,310,47,50,37,19,9,7,2,14,22,16,19,22,17,3,3,1,3,2,7,5,4,1,0,389,50,40,36,22,9,6,13,13,40,30,32,29,19,16,5,3,6,7,4,4,2,1,2
uSF2,DE,005,01,0000916,39543,17715,1725,1987,1900,1036,620,266,252,626,1076,1182,1272,1252,1130,868,630,231,324,227,283,365,283,105,75,21828,1608,1901,1889,1080,622,343,311,859,1360,1663,1823,1799,1436,1175,898,343,452,326,426,548,457,256,253
uSF2,DE,005,01,0000917,39543,17715,1725,1987,1900,1036,620,266,252,626,1076,1182,1272,1252,1130,868,630,231,324,227,283,365,283,105,75,21828,1608,1901,1889,1080,622,343,311,859,1360,1663,1823,1799,1436,1175,898,343,452,326,426,548,457,256,253
uSF2,DE,005,01,0000918,396,208,14,21,7,5,3,1,4,13,27,29,26,24,11,10,5,2,2,0,0,3,1,0,0,188,17,15,5,1,5,2,2,13,19,22,17,19,20,9,1,4,3,2,1,4,3,3,1
uSF2,DE,005,01,0000919,4264,1947,137,190,207,110,77,16,27,51,91,142,143,148,150,133,110,22,44,29,34,39,33,12,2,2317,138,176,185,125,51,32,20,68,132,192,208,219,185,186,136,43,45,31,33,48,36,14,14
uSF2,DE,005,01,0000920,2653,1226,79,121,152,64,54,25,17,45,73,87,90,82,95,85,55,17,22,15,10,17,10,11,0,1427,80,129,121,83,38,21,12,49,76,108,132,129,101,111,68,31,27,25,26,21,20,12,7
uSF2,DE,005,01,0000921,1444,653,50,59,55,23,26,8,11,23,35,48,52,41,41,24,24,19,31,14,15,27,16,10,1,791,53,37,57,34,21,12,9,27,51,62,64,61,53,44,41,13,26,23,22,29,22,18,12
uSF2,DE,005,01,0000922,3279,1506,162,164,146,81,47,17,17,55,85,112,111,109,96,94,66,28,28,19,24,26,12,5,2,1773,143,149,152,89,64,31,29,70,101,110,149,141,130,113,108,34,36,26,23,34,22,10,9
uSF2,DE,005,01,0000923,2250,1006,73,119,107,51,36,20,13,29,55,61,66,90,54,49,33,21,27,17,22,27,24,7,5,1244,87,111,128,47,28,16,11,37,68,80,107,88,76,71,57,22,39,27,41,42,35,12,14
uSF2,DE,005,01,0000924,2783,1228,105,104,111,63,26,18,18,51,52,70,107,93,96,65,55,24,30,19,34,37,32,11,7,1555,84,122,120,74,53,22,21,51,70,89,125,126,103,70,75,30,67,36,47,58,51,35,26
uSF2,DE,005,01,0000925,1557,645,128,148,100,37,19,11,13,23,20,19,30,26,15,11,13,2,8,3,6,7,4,1,1,912,109,106,101,58,24,16,13,61,56,82,58,77,44,26,16,6,14,11,6,11,4,6,7
uSF2,DE,005,01,0000926,468,214,36,20,18,7,7,2,2,3,11,13,24,17,20,9,6,3,3,1,1,8,3,0,0,254,23,24,22,13,12,1,4,11,17,22,26,24,12,14,5,4,1,4,4,6,1,1,3
uSF2,DE,005,01,0000927,2070,916,71,100,92,76,34,14,14,32,68,58,67,72,75,37,22,11,12,10,11,13,16,7,4,1154,75,100,106,64,27,20,20,42,65,100,115,93,89,51,30,20,16,11,19,21,36,18,16
uSF2,DE,005,01,0000928,220,108,8,11,8,4,3,3,1,5,8,12,6,10,6,7,3,1,1,1,2,3,3,1,1,112,5,5,4,5,3,1,1,9,8,12,9,13,8,9,4,0,0,0,5,2,2,2,5
uSF2,DE,005,01,0000929,267,115,4,3,0,2,0,0,0,2,12,17,11,4,15,12,3,2,5,4,7,6,4,1,1,152,2,0,0,2,1,1,1,3,9,10,7,9,14,14,11,6,6,3,8,20,9,7,9
uSF2,DE,005,01,0000930,125,52,3,5,7,3,0,1,1,0,8,2,3,6,1,0,2,0,0,0,6,2,2,0,0,73,0,12,2,2,1,0,0,1,5,10,5,1,5,5,6,2,3,4,2,3,2,1,1
uSF2,DE,005,01,0000932,648,292,35,25,27,22,9,6,2,14,20,13,24,20,13,14,12,4,3,5,2,8,11,1,2,356,22,24,35,14,15,2,9,10,23,37,32,25,22,14,12,4,11,3,11,14,9,4,4
uSF2,DE,005,01,0000933,1103,507,47,43,53,27,19,6,12,29,40,33,37,31,36,26,24,2,6,7,10,10,6,0,3,596,46,53,57,27,21,5,13,25,41,50,47,50,35,32,24,5,13,0,9,18,12,5,8
uSF2,DE,005,01,0000934,1756,787,76,93,81,53,20,15,20,38,70,48,56,59,53,39,26,7,4,4,6,7,5,5,2,969,72,116,95,45,33,15,15,54,98,75,85,88,67,31,27,8,7,8,7,13,7,3,0
uSF2,DE,005,01,0000935,2752,1141,151,133,120,84,43,10,12,41,49,43,59,47,65,45,23,20,33,16,30,41,39,11,26,1611,104,140,125,69,44,24,26,62,92,83,99,96,87,76,71,24,39,41,54,83,71,41,60
uSF2,DE,005,01,0000936,1651,729,89,101,101,47,32,21,12,18,36,35,62,40,41,22,19,7,11,8,6,10,9,2,0,922,84,76,87,53,38,24,21,21,56,74,75,76,68,37,34,16,9,14,11,22,11,5,10
uSF2,DE,005,01,0000937,511,224,34,34,25,8,7,8,5,12,18,19,7,12,7,6,9,2,4,2,1,3,0,1,0,287,23,32,20,15,6,9,9,22,23,23,15,28,15,13,12,4,3,2,0,3,2,6,2
uSF2,DE,005,01,0000938,1767,718,86,90,63,42,27,9,9,26,59,61,43,50,35,40,26,4,9,8,2,12,7,6,4,1049,94,100,94,37,27,18,24,58,73,82,75,72,54,55,42,15,19,9,28,19,30,15,9
uSF2,DE,005,01,0000939,1562,705,43,74,101,52,28,7,9,25,51,45,44,57,43,32,18,7,13,8,15,17,11,3,2,857,76,91,81,50,32,15,17,27,38,59,80,62,58,33,33,10,16,17,14,21,13,7,7
uSF2,DE,005,01,0000940,1790,819,78,93,90,58,32,15,12,26,40,50,52,67,57,29,29,8,13,11,18,18,15,2,6,971,74,82,92,55,23,20,10,42,50,68,80,85,61,47,29,17,18,16,25,25,27,15,10
uSF2,DE,005,01,0000941,1632,751,69,83,65,36,23,12,12,31,66,68,59,61,34,32,21,6,6,16,11,17,12,8,3,881,69,61,51,43,24,12,14,39,68,65,83,93,52,52,29,13,23,6,14,21,21,9,19
uSF2,DE,005,01,0000942,732,340,34,39,33,27,10,7,5,9,22,28,20,28,22,21,11,5,2,3,4,4,6,0,0,392,32,35,36,14,8,6,0,16,27,39,36,50,22,31,9,5,2,2,9,5,5,3,0
uSF2,DE,005,01,0000943,1251,594,83,78,89,46,30,12,1,13,40,42,42,33,34,18,12,5,4,4,5,1,1,0,1,657,62,66,77,45,18,14,9,32,58,64,66,41,41,22,13,6,6,4,3,4,3,3,0
uSF2,DE,005,01,0000944,544,249,27,35,40,8,7,2,3,10,18,24,29,20,13,7,1,1,1,0,1,1,0,0,1,295,31,35,34,14,5,4,1,8,32,43,28,29,13,6,4,0,2,0,4,0,2,0,0
uSF2,DE,005,01,0000945,980,463,51,42,41,24,16,4,3,22,32,41,38,33,29,23,23,7,15,6,4,4,1,3,1,517,52,56,36,21,22,10,5,20,31,46,43,43,47,26,23,4,2,4,8,4,8,3,3
uSF2,DE,005,01,0000946,980,463,51,42,41,24,16,4,3,22,32,41,38,33,29,23,23,7,15,6,4,4,1,3,1,517,52,56,36,21,22,10,5,20,31,46,43,43,47,26,23,4,2,4,8,4,8,3,3
uSF2,DE,005,01,0000947,367,165,14,11,17,11,4,0,2,9,11,9,11,13,10,14,10,3,6,2,3,2,0,3,0,202,15,18,10,10,10,3,0,8,12,17,16,12,21,15,14,3,1,0,4,2,8,1,2
uSF2,DE,005,01,0000948,613,298,37,31,24,13,12,4,1,13,21,32,27,20,19,9,13,4,9,4,1,2,1,0,1,315,37,38,26,11,12,7,5,12,19,29,27,31,26,11,9,1,1,4,4,2,0,2,1
uSF2,DE,005,01,0000952,660,306,42,36,38,28,15,2,5,7,13,11,25,19,20,7,16,6,6,1,3,2,1,0,3,354,36,55,37,15,21,4,4,16,17,31,35,18,19,12,12,1,6,4,2,5,2,0,2
uSF2,DE,005,01,0000953,660,306,42,36,38,28,15,2,5,7,13,11,25,19,20,7,16,6,6,1,3,2,1,0,3,354,36,55,37,15,21,4,4,16,17,31,35,18,19,12,12,1,6,4,2,5,2,0,2
uSF2,DE,005,01,0000954,660,306,42,36,38,28,15,2,5,7,13,11,25,19,20,7,16,6,6,1,3,2,1,0,3,354,36,55,37,15,21,4,4,16,17,31,35,18,19,12,12,1,6,4,2,5,2,0,2
uSF2,DE,005,01,0000955,169,89,6,11,8,8,4,1,1,2,1,2,10,7,11,9,2,0,1,2,0,0,1,1,1,80,3,8,10,4,1,2,0,0,4,7,8,7,6,4,0,1,3,1,0,5,1,2,3
uSF2,DE,005,01,0000956,169,89,6,11,8,8,4,1,1,2,1,2,10,7,11,9,2,0,1,2,0,0,1,1,1,80,3,8,10,4,1,2,0,0,4,7,8,7,6,4,0,1,3,1,0,5,1,2,3
uSF2,DE,005,01,0000958,116,62,5,9,4,6,3,0,1,1,1,1,6,5,4,8,2,0,1,2,0,0,1,1,1,54,3,7,3,3,1,0,0,0,4,5,3,3,3,3,0,1,3,1,0,5,1,2,3
uSF2,DE,005,01,0000959,2196,1074,79,102,99,60,36,8,10,32,53,81,74,93,65,62,65,16,27,15,22,32,16,18,9,1122,96,86,91,56,32,10,16,28,47,82,97,102,72,78,56,13,32,11,24,34,25,21,13
uSF2,DE,005,01,0000960,2196,1074,79,102,99,60,36,8,10,32,53,81,74,93,65,62,65,16,27,15,22,32,16,18,9,1122,96,86,91,56,32,10,16,28,47,82,97,102,72,78,56,13,32,11,24,34,25,21,13
uSF2,DE,005,01,0000961,303,161,17,14,8,8,11,0,2,3,5,12,8,13,8,20,9,3,3,5,5,3,2,1,1,142,6,6,10,8,4,3,2,4,5,13,8,13,15,17,4,0,7,0,4,5,4,2,2
uSF2,DE,005,01,0000962,303,161,17,14,8,8,11,0,2,3,5,12,8,13,8,20,9,3,3,5,5,3,2,1,1,142,6,6,10,8,4,3,2,4,5,13,8,13,15,17,4,0,7,0,4,5,4,2,2
uSF2,DE,005,01,0000963,1472,714,52,69,69,43,14,8,8,23,35,55,46,65,46,36,40,11,20,7,8,24,12,16,7,758,68,60,64,40,25,5,13,16,32,49,71,70,41,49,40,11,14,9,17,23,19,14,8
uSF2,DE,005,01,0000965,1456,708,52,69,67,43,14,8,8,23,35,55,45,65,44,36,39,11,20,7,8,24,12,16,7,748,66,59,62,39,25,5,13,16,32,49,70,68,41,48,40,11,14,9,17,23,19,14,8
uSF2,DE,005,01,0000966,421,199,10,19,22,9,11,0,0,6,13,14,20,15,11,6,16,2,4,3,9,5,2,1,1,222,22,20,17,8,3,2,1,8,10,20,18,19,16,12,12,2,11,2,3,6,2,5,3
uSF2,DE,005,01,0000967,421,199,10,19,22,9,11,0,0,6,13,14,20,15,11,6,16,2,4,3,9,5,2,1,1,222,22,20,17,8,3,2,1,8,10,20,18,19,16,12,12,2,11,2,3,6,2,5,3
uSF2,DE,005,01,0000968,2196,1074,79,102,99,60,36,8,10,32,53,81,74,93,65,62,65,16,27,15,22,32,16,18,9,1122,96,86,91,56,32,10,16,28,47,82,97,102,72,78,56,13,32,11,24,34,25,21,13
uSF2,DE,005,01,0000969,2196,1074,79,102,99,60,36,8,10,32,53,81,74,93,65,62,65,16,27,15,22,32,16,18,9,1122,96,86,91,56,32,10,16,28,47,82,97,102,72,78,56,13,32,11,24,34,25,21,13
uSF2,DE,005,01,0000970,303,161,17,14,8,8,11,0,2,3,5,12,8,13,8,20,9,3,3,5,5,3,2,1,1,142,6,6,10,8,4,3,2,4,5,13,8,13,15,17,4,0,7,0,4,5,4,2,2
uSF2,DE,005,01,0000971,303,161,17,14,8,8,11,0,2,3,5,12,8,13,8,20,9,3,3,5,5,3,2,1,1,142,6,6,10,8,4,3,2,4,5,13,8,13,15,17,4,0,7,0,4,5,4,2,2
uSF2,DE,005,01,0000972,1472,714,52,69,69,43,14,8,8,23,35,55,46,65,46,36,40,11,20,7,8,24,12,16,7,758,68,60,64,40,25,5,13,16,32,49,71,70,41,49,40,11,14,9,17,23,19,14,8
uSF2,DE,005,01,0000974,1456,708,52,69,67,43,14,8,8,23,35,55,45,65,44,36,39,11,20,7,8,24,12,16,7,748,66,59,62,39,25,5,13,16,32,49,70,68,41,48,40,11,14,9,17,23,19,14,8
uSF2,DE,005,01,0000975,421,199,10,19,22,9,11,0,0,6,13,14,20,15,11,6,16,2,4,3,9,5,2,1,1,222,22,20,17,8,3,2,1,8,10,20,18,19,16,12,12,2,11,2,3,6,2,5,3
uSF2,DE,005,01,0000976,421,199,10,19,22,9,11,0,0,6,13,14,20,15,11,6,16,2,4,3,9,5,2,1,1,222,22,20,17,8,3,2,1,8,10,20,18,19,16,12,12,2,11,2,3,6,2,5,3
uSF2,DE,005,01,0000977,2196,1074,79,102,99,60,36,8,10,32,53,81,74,93,65,62,65,16,27,15,22,32,16,18,9,1122,96,86,91,56,32,10,16,28,47,82,97,102,72,78,56,13,32,11,24,34,25,21,13
uSF2,DE,005,01,0000978,2196,1074,79,102,99,60,36,8,10,32,53,81,74,93,65,62,65,16,27,15,22,32,16,18,9,1122,96,86,91,56,32,10,16,28,47,82,97,102,72,78,56,13,32,11,24,34,25,21,13
uSF2,DE,005,01,0000979,25794,12149,1239,1349,1280,696,387,170,186,506,764,839,901,852,714,633,471,160,215,152,201,196,135,61,42,13645,1279,1196,1262,683,401,241,218,610,983,1003,1119,1073,882,723,519,171,242,176,210,251,195,100,108
uSF2,DE,005,01,0000980,10708,4893,531,527,487,258,144,80,83,258,356,334,351,325,256,260,180,64,85,59,92,81,41,28,13,5815,545,447,505,269,161,126,109,343,461,433,450,453,385,307,225,70,97,76,89,98,81,46,39
uSF2,DE,005,01,0000981,25794,12149,1239,1349,1280,696,387,170,186,506,764,839,901,852,714,633,471,160,215,152,201,196,135,61,42,13645,1279,1196,1262,683,401,241,218,610,983,1003,1119,1073,882,723,519,171,242,176,210,251,195,100,108
uSF2,DE,005,01,0000982,100004,46020,4496,5063,4781,2610,1416,619,582,1737,3177,3537,3669,3451,2843,2419,1702,603,755,448,546,681,504,241,140,53984,4443,4838,4589,2548,1471,718,744,2166,3894,4672,4843,4492,3856,2959,2101,685,935,572,746,1017,796,456,443
uSF2,DE,005,01,0000983,1497,701,47,64,61,31,18,28,25,59,67,59,34,43,34,35,33,12,11,8,5,10,8,7,2,796,46,67,71,43,27,7,22,47,48,67,62,48,56,42,36,6,16,8,18,24,10,10,15
uSF2,DE,005,01,0000984,39543,17715,1725,1987,1900,1036,620,266,252,626,1076,1182,1272,1252,1130,868,630,231,324,227,283,365,283,105,75,21828,1608,1901,1889,1080,622,343,311,859,1360,1663,1823,1799,1436,1175,898,343,452,326,426,548,457,256,253
uSF2,DE,005,01,0000985,100004,46020,4496,5063,4781,2610,1416,619,582,1737,3177,3537,3669,3451,2843,2419,1702,603,755,448,546,681,504,241,140,53984,4443,4838,4589,2548,1471,718,744,2166,3894,4672,4843,4492,3856,2959,2101,685,935,572,746,1017,796,456,443
uSF2,DE,005,01,0000986,100004,46020,4496,5063,4781,2610,1416,619,582,1737,3177,3537,3669,3451,2843,2419,1702,603,755,448,546,681,504,241,140,53984,4443,4838,4589,2548,1471,718,744,2166,3894,4672,4843,4492,3856,2959,2101,685,935,572,746,1017,796,456,443
uSF2,DE,005,01,0000987,100004,46020,4496,5063,4781,2610,1416,619,582,1737,3177,3537,3669,3451,2843,2419,1702,603,755,448,546,681,504,241,140,53984,4443,4838,4589,2548,1471,718,744,2166,3894,4672,4843,4492,3856,2959,2101,685,935,572,746,1017,796,456,443