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uSF2,DE,100,01,0000002,10654,5297,974,779,592,321,162,84,95,252,350,358,310,285,204,183,115,43,46,33,23,35,23,19,11,5357,978,700,555,289,193,74,85,245,369,352,357,304,217,206,116,32,51,30,42,60,40,27,35
uSF2,DE,100,01,0000003,7921,3956,708,577,425,233,113,65,75,195,278,276,243,216,157,141,85,31,30,21,18,27,18,16,8,3965,713,499,397,213,130,53,66,187,286,278,263,230,168,150,91,19,41,23,30,44,33,24,27
uSF2,DE,100,01,0000004,2733,1341,266,202,167,88,49,19,20,57,72,82,67,69,47,42,30,12,16,12,5,8,5,3,3,1392,265,201,158,76,63,21,19,58,83,74,94,74,49,56,25,13,10,7,12,16,7,3,8
uSF2,DE,100,01,0000005,2529,1204,220,173,129,61,34,30,31,68,83,67,61,63,50,40,26,16,11,9,8,11,7,2,4,1325,200,165,126,62,40,32,29,61,93,87,91,72,59,64,34,10,15,12,12,21,16,10,14
uSF2,DE,100,01,0000006,1757,827,140,118,78,46,21,23,25,46,65,44,45,45,33,29,20,13,7,5,6,7,6,1,4,930,135,107,83,46,29,23,24,40,70,58,63,50,47,42,28,7,12,11,6,15,12,9,13
uSF2,DE,100,01,0000007,772,377,80,55,51,15,13,7,6,22,18,23,16,18,17,11,6,3,4,4,2,4,1,1,0,395,65,58,43,16,11,9,5,21,23,29,28,22,12,22,6,3,3,1,6,6,4,1,1
uSF2,DE,100,01,0000008,8125,4093,754,606,463,260,128,54,64,184,267,291,249,222,154,143,89,27,35,24,15,24,16,17,7,4032,778,535,429,227,153,42,56,184,276,265,266,232,158,142,82,22,36,18,30,39,24,17,21
uSF2,DE,100,01,0000009,6164,3129,568,459,347,187,92,42,50,149,213,232,198,171,124,112,65,18,23,16,12,20,12,15,4,3035,578,392,314,167,101,30,42,147,216,220,200,180,121,108,63,12,29,12,24,29,21,15,14
uSF2,DE,100,01,0000010,1961,964,186,147,116,73,36,12,14,35,54,59,51,51,30,31,24,9,12,8,3,4,4,2,3,997,200,143,115,60,52,12,14,37,60,45,66,52,37,34,19,10,7,6,6,10,3,2,7
uSF2,DE,100,01,0000011,2097,1044,180,164,122,62,37,17,14,30,61,66,53,58,51,30,36,9,13,7,10,11,6,4,3,1053,248,147,112,63,37,14,14,36,55,50,56,45,58,35,22,7,17,9,1,11,7,6,3
uSF2,DE,100,01,0000012,242,119,18,19,14,10,2,0,1,2,1,5,6,7,7,4,8,1,3,1,6,2,2,0,0,123,29,14,5,9,7,2,2,1,5,3,8,11,6,7,3,0,5,4,0,1,0,1,0
uSF2,DE,100,01,0000013,2733,1341,266,202,167,88,49,19,20,57,72,82,67,69,47,42,30,12,16,12,5,8,5,3,3,1392,265,201,158,76,63,21,19,58,83,74,94,74,49,56,25,13,10,7,12,16,7,3,8
uSF2,DE,100,01,0000014,418,207,40,37,22,14,8,3,3,9,18,9,11,11,9,5,3,0,3,1,0,1,0,0,0,211,30,33,29,10,19,2,0,10,10,11,13,15,13,5,3,3,1,0,1,2,1,0,0
uSF2,DE,100,01,0000027,243,118,23,18,11,7,4,2,3,4,10,7,6,7,7,5,1,0,2,0,0,1,0,0,0,125,23,18,16,5,12,1,0,4,4,4,7,14,10,2,2,1,1,0,0,1,0,0,0
uSF2,DE,100,01,0000031,124,63,18,9,5,5,2,1,2,0,6,3,5,2,3,2,0,0,0,0,0,0,0,0,0,61,13,6,7,0,8,1,0,2,3,3,4,7,4,1,0,1,0,0,0,1,0,0,0
uSF2,DE,100,01,0000032,1642,800,160,127,109,43,28,11,13,35,34,54,35,44,28,20,18,8,10,9,3,4,4,2,1,842,163,121,93,50,33,17,14,39,49,49,53,42,25,43,12,5,5,2,9,9,5,1,3
uSF2,DE,100,01,0000037,772,377,80,55,51,15,13,7,6,22,18,23,16,18,17,11,6,3,4,4,2,4,1,1,0,395,65,58,43,16,11,9,5,21,23,29,28,22,12,22,6,3,3,1,6,6,4,1,1
uSF2,DE,100,01,0000038,182,88,22,15,9,2,2,2,1,7,2,4,7,2,5,2,3,0,0,1,0,2,0,0,0,94,20,13,11,4,4,4,1,7,2,9,4,5,2,3,1,1,0,0,1,2,0,0,0
uSF2,DE,100,01,0000040,106,43,9,6,7,5,0,2,1,1,0,0,1,2,2,3,1,2,0,0,1,0,0,0,0,63,8,8,14,5,2,0,0,1,2,3,4,3,2,6,1,0,1,0,0,1,2,0,0
uSF2,DE,100,01,0000043,138,66,10,11,5,3,5,3,0,5,3,7,3,5,2,0,1,0,2,0,0,0,1,0,0,72,9,18,7,2,1,1,1,4,7,3,7,3,2,4,2,0,0,0,0,1,0,0,0
uSF2,DE,100,01,0000051,180,82,29,21,8,3,0,0,1,4,4,6,3,3,0,0,0,0,0,0,0,0,0,0,0,98,28,17,12,6,1,3,5,4,7,5,4,4,0,0,0,0,0,0,1,1,0,0,0
uSF2,DE,100,01,0000052,180,82,29,21,8,3,0,0,1,4,4,6,3,3,0,0,0,0,0,0,0,0,0,0,0,98,28,17,12,6,1,3,5,4,7,5,4,4,0,0,0,0,0,0,1,1,0,0,0
uSF2,DE,100,01,0000070,372,172,23,28,26,8,6,0,2,6,5,12,10,11,7,6,8,3,4,3,0,0,2,1,1,200,46,24,22,12,11,3,2,5,10,10,15,9,7,12,4,2,2,0,0,2,1,0,1
uSF2,DE,100,01,0000086,160,82,17,6,8,10,3,1,1,4,5,3,6,2,3,4,3,1,1,1,0,2,0,1,0,78,19,11,9,8,1,0,0,2,5,2,4,4,3,0,1,2,1,1,1,3,0,1,0
uSF2,DE,100,01,0000091,102,57,11,5,4,7,2,1,1,2,5,1,4,2,2,4,2,1,1,1,0,1,0,0,0,45,8,9,3,7,0,0,0,0,3,1,2,2,2,0,1,2,1,1,0,2,0,1,0
uSF2,DE,100,01,0000100,196,92,15,9,7,8,7,2,1,4,4,10,5,7,2,5,1,1,1,0,1,0,1,0,1,104,19,14,10,3,4,1,3,4,10,6,7,3,3,4,4,0,2,2,1,0,0,1,3
uSF2,DE,100,01,0000105,116,53,9,6,4,1,3,1,0,3,4,8,4,4,2,2,0,1,0,0,1,0,0,0,0,63,14,12,5,2,2,0,2,2,4,5,4,2,2,2,3,0,1,0,0,0,0,1,0
uSF2,DE,100,01,0000113,177,91,18,16,11,6,1,2,1,4,8,4,5,3,1,5,3,0,1,0,1,1,0,0,0,86,28,11,13,1,4,0,1,1,4,2,8,2,1,2,1,3,0,1,0,1,0,0,2
uSF2,DE,100,01,0000116,120,65,14,14,8,4,1,1,0,3,6,2,3,3,0,4,1,0,0,0,0,1,0,0,0,55,20,9,6,0,3,0,1,0,3,2,5,0,1,0,1,1,0,1,0,1,0,0,1
uSF2,DE,100,01,0000130,241,118,31,18,12,3,4,2,2,8,2,8,10,2,6,2,3,1,0,1,0,2,1,0,0,123,31,15,12,6,7,4,2,9,3,9,4,7,3,6,1,1,0,0,1,2,0,0,0
uSF2,DE,100,01,0000132,106,43,9,6,7,5,0,2,1,1,0,0,1,2,2,3,1,2,0,0,1,0,0,0,0,63,8,8,14,5,2,0,0,1,2,3,4,3,2,6,1,0,1,0,0,1,2,0,0
uSF2,DE,100,01,0000135,143,66,10,11,5,3,5,3,0,5,3,7,3,5,2,0,1,0,2,0,0,0,1,0,0,77,10,18,7,2,1,1,1,4,7,4,7,5,3,4,2,0,0,0,0,1,0,0,0
uSF2,DE,100,01,0000136,185,87,29,23,10,3,0,0,1,4,5,6,3,3,0,0,0,0,0,0,0,0,0,0,0,98,28,17,12,6,1,3,5,4,7,5,4,4,0,0,0,0,0,0,1,1,0,0,0
uSF2,DE,100,01,0000137,122,55,11,7,7,4,1,0,1,1,1,5,1,4,2,1,2,1,2,2,0,0,1,1,0,67,15,7,6,5,2,1,1,2,8,4,5,2,4,3,1,0,0,0,0,1,0,0,0
uSF2,DE,100,01,0000140,131,70,12,7,13,6,5,0,3,3,2,4,4,3,4,0,1,0,3,0,0,0,0,0,0,61,5,9,9,6,7,2,0,2,1,5,3,5,0,3,1,1,0,0,0,1,0,0,1
uSF2,DE,100,01,0000144,156,74,11,14,10,3,1,0,1,3,7,4,2,3,4,3,6,0,0,0,0,1,0,0,1,82,13,9,11,6,4,2,2,5,5,4,5,1,4,6,0,1,1,0,0,1,2,0,0
uSF2,DE,100,01,0000149,181,89,18,22,10,6,4,1,0,4,6,1,4,4,3,0,3,0,2,1,0,0,0,0,0,92,8,20,18,4,7,1,0,6,4,6,5,3,4,2,2,1,0,0,0,1,0,0,0
uSF2,DE,100,01,0000150,149,77,20,12,7,6,2,1,2,1,8,4,7,2,3,2,0,0,0,0,0,0,0,0,0,72,13,7,7,1,10,1,0,2,5,4,5,7,4,2,0,2,0,0,0,1,1,0,0
uSF2,DE,100,01,0000159,7921,3956,708,577,425,233,113,65,75,195,278,276,243,216,157,141,85,31,30,21,18,27,18,16,8,3965,713,499,397,213,130,53,66,187,286,278,263,230,168,150,91,19,41,23,30,44,33,24,27
uSF2,DE,100,01,0000160,940,452,77,53,50,36,7,5,12,25,35,33,35,27,18,17,10,1,3,0,0,4,1,3,0,488,86,52,52,30,14,4,9,20,31,46,30,29,16,26,11,6,2,1,7,3,3,8,2
uSF2,DE,100,01,0000169,203,100,19,17,12,2,1,1,3,10,6,7,7,5,3,3,3,0,0,0,0,1,0,0,0,103,19,13,10,5,4,2,2,5,9,8,7,5,1,4,1,0,1,1,2,1,1,2,0
uSF2,DE,100,01,0000172,101,53,8,10,7,2,1,0,2,7,3,1,3,3,2,3,1,0,0,0,0,0,0,0,0,48,9,6,6,4,2,2,0,2,2,2,3,4,0,1,0,0,0,0,2,1,1,1,0
uSF2,DE,100,01,0000174,108,43,6,5,3,5,0,1,2,3,3,2,2,3,1,4,2,0,0,0,0,1,0,0,0,65,5,10,10,4,2,0,1,2,5,5,3,4,2,3,4,3,0,0,1,0,0,1,0
uSF2,DE,100,01,0000176,104,42,6,4,3,5,0,1,2,3,3,2,2,3,1,4,2,0,0,0,0,1,0,0,0,62,5,10,8,4,2,0,1,2,5,5,3,4,1,3,4,3,0,0,1,0,0,1,0
uSF2,DE,100,01,0000177,608,300,48,30,35,29,6,3,7,11,25,24,26,17,14,10,5,1,3,0,0,2,1,3,0,308,61,29,30,21,8,2,6,13,16,32,19,19,13,17,6,1,1,0,4,2,2,4,2
uSF2,DE,100,01,0000178,109,56,12,6,7,8,3,0,1,1,6,5,1,2,2,1,0,0,1,0,0,0,0,0,0,53,8,2,7,6,2,0,1,1,4,9,5,3,1,0,3,0,0,0,1,0,0,0,0
uSF2,DE,100,01,0000198,532,265,53,48,34,19,3,2,2,16,20,17,15,8,7,5,6,1,1,3,2,1,1,1,0,267,68,34,27,9,13,2,3,16,17,19,23,8,14,4,0,1,1,0,2,4,1,0,1
uSF2,DE,100,01,0000199,99,52,6,7,11,2,2,0,0,4,9,1,3,0,0,2,2,0,1,1,0,0,1,0,0,47,13,6,6,2,2,0,0,4,2,1,2,3,3,1,0,1,0,0,0,1,0,0,0
uSF2,DE,100,01,0000200,99,52,6,7,11,2,2,0,0,4,9,1,3,0,0,2,2,0,1,1,0,0,1,0,0,47,13,6,6,2,2,0,0,4,2,1,2,3,3,1,0,1,0,0,0,1,0,0,0
uSF2,DE,100,01,0000201,176,92,24,19,10,7,0,0,1,3,4,11,5,2,3,0,0,0,0,1,2,0,0,0,0,84,20,7,10,3,5,0,0,8,7,9,5,0,5,2,0,0,1,0,2,0,0,0,0
uSF2,DE,100,01,0000203,120,60,13,14,5,5,0,0,1,3,4,8,2,1,2,0,0,0,0,0,2,0,0,0,0,60,15,3,6,2,4,0,0,7,5,5,5,0,4,1,0,0,1,0,2,0,0,0,0
uSF2,DE,100,01,0000206,257,121,23,22,13,10,1,2,1,9,7,5,7,6,4,3,4,1,0,1,0,1,0,1,0,136,35,21,11,4,6,2,3,4,8,9,16,5,6,1,0,0,0,0,0,3,1,0,1
uSF2,DE,100,01,0000209,118,58,14,8,4,6,0,1,0,8,3,3,3,1,2,0,3,0,0,1,0,1,0,0,0,60,19,10,5,2,2,2,2,1,4,4,4,2,3,0,0,0,0,0,0,0,0,0,0
uSF2,DE,100,01,0000211,1138,592,107,80,51,32,20,21,25,42,56,36,36,17,24,14,8,9,0,2,4,6,0,2,0,546,103,75,41,22,19,12,13,35,53,27,28,31,22,16,12,2,7,4,4,6,4,2,8
uSF2,DE,100,01,0000212,347,177,36,25,22,15,8,3,4,5,15,12,9,5,7,5,0,4,0,0,0,1,0,1,0,170,33,31,15,7,7,3,1,8,9,6,10,14,3,7,2,0,3,1,1,2,3,1,3
uSF2,DE,100,01,0000213,143,65,18,14,9,5,4,1,1,1,2,2,2,1,3,1,0,0,0,0,0,0,0,1,0,78,17,15,9,4,3,0,0,5,1,2,4,4,1,1,1,0,2,0,1,2,2,1,3
uSF2,DE,100,01,0000215,122,69,11,5,9,6,2,2,1,3,9,4,5,4,2,2,0,3,0,0,0,1,0,0,0,53,9,9,5,1,3,1,1,1,7,2,4,4,1,3,1,0,0,0,0,0,1,0,0
uSF2,DE,100,01,0000216,365,188,24,25,17,7,8,13,15,19,19,11,7,2,4,4,6,4,0,1,1,0,0,1,0,177,23,18,10,3,8,6,9,14,22,12,9,7,10,7,7,1,1,2,1,3,0,1,3
uSF2,DE,100,01,0000224,39,20,2,2,2,1,2,2,3,2,0,2,0,1,1,0,0,0,0,0,0,0,0,0,0,19,0,3,1,0,0,2,3,1,3,1,1,1,1,1,0,0,0,0,0,1,0,0,0
uSF2,DE,100,01,0000230,341,180,41,23,8,8,4,5,6,13,17,12,19,6,6,4,0,1,0,0,3,4,0,0,0,161,42,23,11,8,2,2,3,13,16,7,7,9,6,2,2,1,1,0,2,1,1,0,2
uSF2,DE,100,01,0000232,167,102,22,17,5,4,2,3,2,6,13,10,10,4,1,1,0,0,0,0,2,0,0,0,0,65,17,7,1,4,1,0,3,6,7,5,3,2,3,0,1,1,1,0,1,0,0,0,2
uSF2,DE,100,01,0000240,681,355,62,53,34,16,14,6,5,14,22,36,21,20,20,14,7,0,1,0,2,1,3,3,1,326,59,45,31,24,9,3,5,20,24,31,17,21,13,10,2,0,1,0,1,1,5,2,2
uSF2,DE,100,01,0000241,107,61,18,11,2,2,1,0,1,1,4,4,3,2,4,4,2,0,0,0,0,0,0,1,1,46,4,11,5,5,0,1,1,2,2,3,1,5,4,0,1,0,0,0,0,0,1,0,0
uSF2,DE,100,01,0000247,506,262,37,39,32,12,11,5,3,12,10,30,17,18,14,8,5,0,1,0,2,1,3,2,0,244,43,34,26,19,5,1,3,15,15,25,15,12,9,10,1,0,1,0,1,1,4,2,2
uSF2,DE,100,01,0000255,132,55,10,6,7,2,0,2,1,2,3,5,2,3,7,1,1,0,0,0,0,0,2,1,0,77,17,9,12,6,0,0,2,8,2,7,2,5,2,4,0,0,0,0,0,0,1,0,0
uSF2,DE,100,01,0000256,267,147,35,17,12,4,4,2,2,6,7,6,13,12,11,7,4,2,1,2,0,0,0,0,0,120,24,13,11,7,5,1,1,0,9,8,11,9,8,2,3,2,1,1,1,0,1,2,0
uSF2,DE,100,01,0000264,177,98,16,13,7,4,4,2,2,3,2,4,10,9,9,5,4,1,1,2,0,0,0,0,0,79,15,8,9,4,3,1,0,0,4,6,8,6,7,1,1,2,1,0,1,0,0,2,0
uSF2,DE,100,01,0000273,1584,790,145,133,90,35,26,8,9,35,53,66,40,46,27,31,15,6,6,8,0,4,4,2,1,794,145,96,94,43,25,8,15,40,63,52,56,37,27,29,19,1,10,6,6,14,3,1,4
uSF2,DE,100,01,0000274,295,149,35,37,22,6,3,1,1,4,4,14,9,3,2,3,2,1,1,1,0,0,0,0,0,146,37,15,16,9,5,2,4,4,9,11,10,7,5,3,2,0,3,1,1,1,0,0,1
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uSF2,DE,100,01,0000981,2733,1341,266,202,167,88,49,19,20,57,72,82,67,69,47,42,30,12,16,12,5,8,5,3,3,1392,265,201,158,76,63,21,19,58,83,74,94,74,49,56,25,13,10,7,12,16,7,3,8
uSF2,DE,100,01,0000982,7921,3956,708,577,425,233,113,65,75,195,278,276,243,216,157,141,85,31,30,21,18,27,18,16,8,3965,713,499,397,213,130,53,66,187,286,278,263,230,168,150,91,19,41,23,30,44,33,24,27
uSF2,DE,100,01,0000983,365,188,24,25,17,7,8,13,15,19,19,11,7,2,4,4,6,4,0,1,1,0,0,1,0,177,23,18,10,3,8,6,9,14,22,12,9,7,10,7,7,1,1,2,1,3,0,1,3
uSF2,DE,100,01,0000984,1392,639,116,93,61,39,13,10,10,27,46,33,38,43,29,25,14,9,7,4,5,7,6,0,4,753,112,89,73,43,21,17,15,26,48,46,54,43,37,35,21,6,11,9,5,12,12,8,10
uSF2,DE,100,01,0000985,7921,3956,708,577,425,233,113,65,75,195,278,276,243,216,157,141,85,31,30,21,18,27,18,16,8,3965,713,499,397,213,130,53,66,187,286,278,263,230,168,150,91,19,41,23,30,44,33,24,27
uSF2,DE,100,01,0000986,7921,3956,708,577,425,233,113,65,75,195,278,276,243,216,157,141,85,31,30,21,18,27,18,16,8,3965,713,499,397,213,130,53,66,187,286,278,263,230,168,150,91,19,41,23,30,44,33,24,27
uSF2,DE,100,01,0000987,7921,3956,708,577,425,233,113,65,75,195,278,276,243,216,157,141,85,31,30,21,18,27,18,16,8,3965,713,499,397,213,130,53,66,187,286,278,263,230,168,150,91,19,41,23,30,44,33,24,27