uSF2,DE,451,01,0000001,552559,268628,16313,18264,18668,10929,5660,3029,3078,8996,16404,19286,22601,22859,20233,18644,15134,5159,7118,4695,7163,10336,7510,4310,2239,283931,15459,17301,17643,10132,5596,3144,3497,9314,17004,19693,23319,23467,21033,19701,16432,5709,8063,5181,7925,12263,10428,6747,4880
uSF2,DE,451,01,0000002,431754,210048,13375,14815,14982,8651,4552,2554,2621,7588,13775,16020,18341,18313,15899,14320,11125,3612,4815,3179,4702,6875,5206,3070,1658,221706,12639,14042,14085,8114,4486,2649,3026,7877,14078,16195,18801,18793,16603,15112,12014,3902,5502,3525,5366,8508,7638,5026,3725
uSF2,DE,451,01,0000003,342057,166513,10385,11508,11554,6767,3525,2094,2107,6068,11099,12793,14524,14651,12876,11484,8852,2847,3721,2435,3623,5495,4242,2498,1365,175544,9756,10893,10694,6188,3445,2146,2529,6293,11158,12896,14827,14978,13412,12186,9607,3051,4239,2760,4252,6831,6224,4113,3066
uSF2,DE,451,01,0000004,89697,43535,2990,3307,3428,1884,1027,460,514,1520,2676,3227,3817,3662,3023,2836,2273,765,1094,744,1079,1380,964,572,293,46162,2883,3149,3391,1926,1041,503,497,1584,2920,3299,3974,3815,3191,2926,2407,851,1263,765,1114,1677,1414,913,659
uSF2,DE,451,01,0000005,56065,26519,1193,1306,1291,791,548,630,874,1838,2382,2173,1925,1993,1841,1807,1421,414,596,414,582,882,755,543,320,29546,1148,1121,1257,756,586,801,1201,1743,2290,2017,1953,1937,1993,1956,1561,486,715,470,739,1354,1448,1119,895
uSF2,DE,451,01,0000006,40193,19076,779,823,846,543,387,548,766,1497,1847,1580,1329,1398,1348,1275,1000,302,396,267,376,595,541,396,237,21117,725,707,785,483,444,718,1087,1399,1741,1454,1302,1303,1396,1392,1067,336,462,315,520,953,1020,848,660
uSF2,DE,451,01,0000007,15872,7443,414,483,445,248,161,82,108,341,535,593,596,595,493,532,421,112,200,147,206,287,214,147,83,8429,423,414,472,273,142,83,114,344,549,563,651,634,597,564,494,150,253,155,219,401,428,271,235
uSF2,DE,451,01,0000008,375689,183529,12182,13509,13691,7860,4004,1924,1747,5750,11393,13847,16416,16320,14058,12513,9704,3198,4219,2765,4120,5993,4451,2527,1338,192160,11491,12921,12828,7358,3900,1848,1825,6134,11788,14178,16848,16856,14610,13156,10453,3416,4787,3055,4627,7154,6190,3907,2830
uSF2,DE,451,01,0000009,301864,147437,9606,10685,10708,6224,3138,1546,1341,4571,9252,11213,13195,13253,11528,10209,7852,2545,3325,2168,3247,4900,3701,2102,1128,154427,9031,10186,9909,5705,3001,1428,1442,4894,9417,11442,13525,13675,12016,10794,8540,2715,3777,2445,3732,5878,5204,3265,2406
uSF2,DE,451,01,0000010,73825,36092,2576,2824,2983,1636,866,378,406,1179,2141,2634,3221,3067,2530,2304,1852,653,894,597,873,1093,750,425,210,37733,2460,2735,2919,1653,899,420,383,1240,2371,2736,3323,3181,2594,2362,1913,701,1010,610,895,1276,986,642,424
uSF2,DE,451,01,0000011,120805,58580,2938,3449,3686,2278,1108,475,457,1408,2629,3266,4260,4546,4334,4324,4009,1547,2303,1516,2461,3461,2304,1240,581,62225,2820,3259,3558,2018,1110,495,471,1437,2926,3498,4518,4674,4430,4589,4418,1807,2561,1656,2559,3755,2790,1721,1155
uSF2,DE,451,01,0000012,19401,9457,361,445,512,295,125,65,41,154,285,422,585,617,659,702,708,323,534,344,581,840,516,240,103,9944,336,402,458,257,129,56,56,164,352,483,652,692,636,781,839,369,619,352,599,754,535,267,156
uSF2,DE,451,01,0000013,89697,43535,2990,3307,3428,1884,1027,460,514,1520,2676,3227,3817,3662,3023,2836,2273,765,1094,744,1079,1380,964,572,293,46162,2883,3149,3391,1926,1041,503,497,1584,2920,3299,3974,3815,3191,2926,2407,851,1263,765,1114,1677,1414,913,659
uSF2,DE,451,01,0000014,14416,7078,519,558,611,328,167,72,89,232,390,539,718,642,480,471,347,109,154,99,172,177,110,68,26,7338,520,594,594,357,183,76,78,249,453,530,692,676,475,441,352,136,182,107,152,202,141,89,59
uSF2,DE,451,01,0000015,191,103,9,7,10,6,0,0,0,5,11,5,7,7,10,3,7,2,2,0,3,4,2,3,0,88,4,5,8,4,2,0,1,4,8,6,8,10,4,6,2,0,3,0,1,3,6,2,1
uSF2,DE,451,01,0000016,191,103,9,7,10,6,0,0,0,5,11,5,7,7,10,3,7,2,2,0,3,4,2,3,0,88,4,5,8,4,2,0,1,4,8,6,8,10,4,6,2,0,3,0,1,3,6,2,1
uSF2,DE,451,01,0000017,1576,762,83,80,72,29,13,11,22,52,71,75,90,48,24,25,20,4,7,4,12,9,6,2,3,814,90,68,73,43,20,11,17,61,78,78,82,52,27,27,25,6,10,4,12,10,10,6,4
uSF2,DE,451,01,0000018,1576,762,83,80,72,29,13,11,22,52,71,75,90,48,24,25,20,4,7,4,12,9,6,2,3,814,90,68,73,43,20,11,17,61,78,78,82,52,27,27,25,6,10,4,12,10,10,6,4
uSF2,DE,451,01,0000019,1385,697,47,46,63,40,14,5,8,21,37,54,69,65,62,64,28,7,13,7,12,18,10,3,4,688,34,50,64,37,19,11,3,22,43,52,61,73,59,56,34,8,13,5,13,13,13,3,2
uSF2,DE,451,01,0000020,1385,697,47,46,63,40,14,5,8,21,37,54,69,65,62,64,28,7,13,7,12,18,10,3,4,688,34,50,64,37,19,11,3,22,43,52,61,73,59,56,34,8,13,5,13,13,13,3,2
uSF2,DE,451,01,0000021,143,74,3,3,8,2,3,1,1,4,3,4,8,7,5,7,4,2,2,3,2,1,0,1,0,69,1,2,4,6,2,0,0,1,1,4,7,4,9,6,9,1,3,0,0,1,2,5,1
uSF2,DE,451,01,0000022,143,74,3,3,8,2,3,1,1,4,3,4,8,7,5,7,4,2,2,3,2,1,0,1,0,69,1,2,4,6,2,0,0,1,1,4,7,4,9,6,9,1,3,0,0,1,2,5,1
uSF2,DE,451,01,0000023,177,82,3,4,7,6,2,0,0,2,6,3,10,9,6,11,3,2,0,2,3,0,1,2,0,95,3,4,8,4,2,1,1,4,4,6,13,9,5,5,3,3,6,1,2,6,1,3,1
uSF2,DE,451,01,0000024,177,82,3,4,7,6,2,0,0,2,6,3,10,9,6,11,3,2,0,2,3,0,1,2,0,95,3,4,8,4,2,1,1,4,4,6,13,9,5,5,3,3,6,1,2,6,1,3,1
uSF2,DE,451,01,0000025,1423,679,53,64,60,36,17,6,7,24,37,55,74,52,43,40,38,7,11,9,17,12,7,8,2,744,54,66,62,40,25,8,15,18,49,59,85,64,35,32,31,18,22,10,16,16,10,5,4
uSF2,DE,451,01,0000026,1423,679,53,64,60,36,17,6,7,24,37,55,74,52,43,40,38,7,11,9,17,12,7,8,2,744,54,66,62,40,25,8,15,18,49,59,85,64,35,32,31,18,22,10,16,16,10,5,4
uSF2,DE,451,01,0000027,9521,4681,321,354,391,209,118,49,51,124,225,343,460,454,330,321,247,85,119,74,123,133,84,49,17,4840,334,399,375,223,113,45,41,139,270,325,436,464,336,309,248,100,125,87,108,153,99,65,46
uSF2,DE,451,01,0000028,2706,1322,93,98,125,62,40,15,16,35,56,97,140,117,102,88,68,17,32,22,36,33,19,5,6,1384,96,115,117,76,30,20,12,52,71,96,114,128,89,99,76,21,34,18,29,37,24,20,10
uSF2,DE,451,01,0000029,2376,1174,67,81,83,53,37,16,18,42,56,75,96,108,103,84,63,30,28,21,39,31,23,17,3,1202,64,92,80,61,34,6,13,34,60,63,93,120,118,75,63,37,32,36,22,38,27,21,13
uSF2,DE,451,01,0000030,1307,642,52,62,51,24,13,4,7,10,31,44,66,61,28,48,42,13,16,13,17,23,7,8,2,665,48,52,53,26,14,3,4,17,44,47,68,62,30,39,47,13,17,13,17,22,15,4,10
uSF2,DE,451,01,0000031,3132,1543,109,113,132,70,28,14,10,37,82,127,158,168,97,101,74,25,43,18,31,46,35,19,6,1589,126,140,125,60,35,16,12,36,95,119,161,154,99,96,62,29,42,20,40,56,33,20,13
uSF2,DE,451,01,0000032,41631,20141,1414,1523,1477,843,449,202,256,799,1321,1498,1720,1657,1358,1304,1034,352,512,358,522,652,452,290,148,21490,1319,1380,1484,851,469,240,254,810,1413,1479,1810,1693,1504,1368,1141,402,608,382,507,807,747,455,367
uSF2,DE,451,01,0000033,1574,755,46,61,66,46,23,5,7,23,47,45,67,71,47,51,39,13,17,12,21,24,12,8,4,819,35,35,66,36,20,9,10,43,56,53,68,77,67,56,34,17,24,20,21,27,17,14,14
uSF2,DE,451,01,0000034,1574,755,46,61,66,46,23,5,7,23,47,45,67,71,47,51,39,13,17,12,21,24,12,8,4,819,35,35,66,36,20,9,10,43,56,53,68,77,67,56,34,17,24,20,21,27,17,14,14
uSF2,DE,451,01,0000035,214,112,8,9,10,7,3,1,3,6,11,7,12,7,8,0,4,1,2,2,4,2,4,1,0,102,5,5,10,8,1,1,2,1,8,13,8,13,6,4,2,1,0,2,3,4,1,2,2
uSF2,DE,451,01,0000036,214,112,8,9,10,7,3,1,3,6,11,7,12,7,8,0,4,1,2,2,4,2,4,1,0,102,5,5,10,8,1,1,2,1,8,13,8,13,6,4,2,1,0,2,3,4,1,2,2
uSF2,DE,451,01,0000037,15872,7443,414,483,445,248,161,82,108,341,535,593,596,595,493,532,421,112,200,147,206,287,214,147,83,8429,423,414,472,273,142,83,114,344,549,563,651,634,597,564,494,150,253,155,219,401,428,271,235
uSF2,DE,451,01,0000038,2707,1293,72,96,78,49,33,14,26,61,101,119,115,93,74,73,48,18,34,30,44,53,36,19,7,1414,79,85,75,41,33,7,30,71,125,96,132,97,88,87,69,21,49,35,39,60,52,27,16
uSF2,DE,451,01,0000039,415,210,24,11,9,1,1,1,2,11,18,32,26,13,9,21,5,1,4,3,4,5,5,3,1,205,19,13,6,6,6,1,2,15,25,25,15,8,12,8,9,3,3,5,4,6,9,3,2
uSF2,DE,451,01,0000040,2732,1263,69,98,118,52,23,5,12,30,55,69,91,105,105,127,112,23,43,15,21,41,20,15,14,1469,79,90,116,72,18,9,14,38,61,94,113,121,139,149,106,25,24,17,24,48,35,29,48
uSF2,DE,451,01,0000041,1299,596,38,29,29,17,21,14,7,30,38,31,55,47,29,38,25,12,23,15,19,20,28,18,13,703,33,28,30,20,19,9,11,28,39,44,47,42,40,36,36,15,26,14,19,39,58,39,31
uSF2,DE,451,01,0000042,1375,582,18,28,22,17,10,9,9,27,50,52,36,36,45,49,42,8,13,16,11,26,26,18,14,793,20,15,27,11,4,6,9,23,50,40,33,39,42,56,49,8,31,17,24,76,83,77,53
uSF2,DE,451,01,0000043,1919,947,56,57,50,24,26,6,18,52,75,100,67,82,62,53,50,15,27,17,27,42,23,17,1,972,54,50,34,29,23,21,12,42,72,81,79,91,63,48,64,17,24,23,24,41,55,13,12
uSF2,DE,451,01,0000044,56,26,1,5,1,2,0,1,0,1,1,2,6,1,3,0,0,0,0,0,0,1,1,0,0,30,2,3,5,1,0,0,1,1,4,2,1,3,2,1,1,0,0,0,1,1,1,0,0
uSF2,DE,451,01,0000045,329,149,9,6,9,6,5,4,1,12,7,9,9,17,12,10,5,1,8,7,6,3,1,1,1,180,7,4,11,7,3,4,5,12,10,13,11,15,15,8,10,7,6,7,7,4,4,8,2
uSF2,DE,451,01,0000046,1127,520,25,35,23,11,6,9,5,35,53,36,41,38,35,31,25,6,10,12,16,17,16,20,15,607,15,22,31,10,7,9,9,35,52,35,45,45,40,37,27,15,19,8,17,30,47,24,28
uSF2,DE,451,01,0000047,1052,505,33,29,17,16,13,4,9,33,45,51,45,47,27,27,19,8,6,4,20,15,19,9,9,547,23,23,23,11,8,8,8,38,44,46,37,49,36,30,24,15,12,7,23,23,20,26,13
uSF2,DE,451,01,0000048,1426,681,15,47,53,29,13,8,6,19,18,33,44,61,47,46,54,16,24,24,27,46,27,19,5,745,17,30,73,47,6,4,4,11,12,25,54,66,53,55,64,16,50,17,28,49,37,14,13
uSF2,DE,451,01,0000049,1280,594,50,39,30,20,10,6,11,26,61,55,53,49,41,50,31,4,8,3,9,17,11,8,2,686,70,48,33,17,11,5,9,22,49,59,78,49,56,46,32,7,9,4,9,23,25,8,17
uSF2,DE,451,01,0000050,155,77,4,3,6,4,0,1,2,4,13,4,8,6,4,7,5,0,0,1,2,1,1,0,1,78,5,3,8,1,4,0,0,8,6,3,6,9,11,3,3,1,0,1,0,1,2,3,0
uSF2,DE,451,01,0000051,2343,1211,216,133,100,26,17,22,32,123,184,163,116,62,11,3,3,0,0,0,0,0,0,0,0,1132,184,134,71,35,34,40,32,110,192,135,94,47,14,5,2,0,2,0,0,1,0,0,0
uSF2,DE,451,01,0000052,2343,1211,216,133,100,26,17,22,32,123,184,163,116,62,11,3,3,0,0,0,0,0,0,0,0,1132,184,134,71,35,34,40,32,110,192,135,94,47,14,5,2,0,2,0,0,1,0,0,0
uSF2,DE,451,01,0000053,2741,1318,57,79,97,72,34,13,9,30,47,59,92,117,106,125,89,40,53,42,47,46,39,19,6,1423,67,86,98,69,25,14,15,36,54,47,113,113,124,122,100,56,60,43,40,53,53,19,16
uSF2,DE,451,01,0000054,1444,681,29,39,46,36,15,5,5,11,30,28,44,58,45,52,47,18,35,29,34,32,23,16,4,763,29,47,44,34,13,12,3,20,26,25,56,49,63,58,51,37,44,25,32,36,35,15,9
uSF2,DE,451,01,0000055,1297,637,28,40,51,36,19,8,4,19,17,31,48,59,61,73,42,22,18,13,13,14,16,3,2,660,38,39,54,35,12,2,12,16,28,22,57,64,61,64,49,19,16,18,8,17,18,4,7
uSF2,DE,451,01,0000056,1183,562,32,49,43,21,10,1,3,11,31,46,53,48,39,33,28,12,14,11,21,21,20,14,1,621,29,37,52,19,12,5,1,16,37,47,51,48,41,36,42,8,28,14,20,33,23,13,9
uSF2,DE,451,01,0000057,727,344,19,34,26,10,5,1,3,7,16,35,36,27,24,21,17,5,10,6,13,10,13,5,1,383,18,28,39,12,5,4,0,11,23,32,38,23,22,28,28,4,17,7,14,13,11,4,2
uSF2,DE,451,01,0000058,456,218,13,15,17,11,5,0,0,4,15,11,17,21,15,12,11,7,4,5,8,11,7,9,0,238,11,9,13,7,7,1,1,5,14,15,13,25,19,8,14,4,11,7,6,20,12,9,7
uSF2,DE,451,01,0000059,185,84,4,7,4,4,0,2,1,2,6,4,11,5,6,8,5,0,4,1,0,6,2,0,2,101,7,5,12,6,1,3,2,3,5,7,10,3,10,3,8,2,3,1,3,2,5,0,0
uSF2,DE,451,01,0000060,185,84,4,7,4,4,0,2,1,2,6,4,11,5,6,8,5,0,4,1,0,6,2,0,2,101,7,5,12,6,1,3,2,3,5,7,10,3,10,3,8,2,3,1,3,2,5,0,0
uSF2,DE,451,01,0000061,172,77,7,7,3,5,1,1,1,0,3,6,8,5,7,3,3,1,0,2,4,7,3,0,0,95,8,12,8,4,1,2,1,3,5,5,9,6,4,5,3,0,3,3,1,6,1,3,2
uSF2,DE,451,01,0000063,213,110,11,7,7,6,4,0,0,6,7,5,8,10,3,8,6,3,3,5,2,6,1,2,0,103,6,5,7,7,2,1,0,1,4,7,13,9,4,10,5,1,6,1,4,3,5,0,2
uSF2,DE,451,01,0000064,213,110,11,7,7,6,4,0,0,6,7,5,8,10,3,8,6,3,3,5,2,6,1,2,0,103,6,5,7,7,2,1,0,1,4,7,13,9,4,10,5,1,6,1,4,3,5,0,2
uSF2,DE,451,01,0000065,711,348,15,22,20,20,17,5,6,17,17,12,25,28,23,27,18,8,9,9,13,17,12,7,1,363,13,10,24,14,14,5,3,10,18,13,27,25,27,27,24,9,12,10,15,24,17,13,9
uSF2,DE,451,01,0000066,703,343,14,21,20,18,17,5,6,17,17,11,25,28,23,27,18,8,9,9,13,17,12,7,1,360,13,10,24,14,14,5,3,10,18,13,27,23,27,27,24,9,12,10,15,24,17,12,9
uSF2,DE,451,01,0000067,886,432,35,22,31,17,11,4,4,17,22,38,31,47,34,21,22,10,12,9,15,11,8,8,3,454,22,24,27,21,9,9,5,12,33,32,39,41,32,31,18,14,14,11,12,16,17,9,6
uSF2,DE,451,01,0000068,146,68,6,1,6,2,4,1,1,1,3,12,7,8,8,1,3,1,0,0,1,0,2,0,0,78,6,6,6,4,1,2,0,0,5,6,11,13,4,3,3,1,0,3,1,1,2,0,0
uSF2,DE,451,01,0000069,740,364,29,21,25,15,7,3,3,16,19,26,24,39,26,20,19,9,12,9,14,11,6,8,3,376,16,18,21,17,8,7,5,12,28,26,28,28,28,28,15,13,14,8,11,15,15,9,6
uSF2,DE,451,01,0000070,15466,7660,566,640,648,368,168,66,81,222,408,518,700,659,580,491,395,152,198,118,189,225,137,83,48,7806,516,611,634,357,206,66,69,231,448,553,720,672,576,503,408,144,202,122,168,237,180,111,72
uSF2,DE,451,01,0000071,590,296,16,22,15,13,4,4,1,13,23,25,32,25,14,20,12,10,6,6,11,14,7,3,0,294,15,20,19,7,9,2,3,11,20,17,26,25,14,22,25,7,12,4,7,11,13,3,2
uSF2,DE,451,01,0000072,1986,996,72,60,56,36,22,9,13,19,62,79,96,59,78,73,57,20,38,23,38,38,26,11,11,990,45,52,55,36,18,9,4,33,75,72,87,78,92,67,69,27,30,21,26,38,30,14,12
uSF2,DE,451,01,0000074,243,112,4,7,5,2,1,0,1,4,6,7,12,14,11,5,7,4,3,3,4,5,5,2,0,131,6,11,6,4,3,1,3,9,7,8,5,9,12,8,4,5,3,5,3,4,9,5,1
uSF2,DE,451,01,0000075,821,403,23,33,27,17,6,2,8,23,22,25,33,26,31,29,28,16,14,5,6,13,9,6,1,418,21,31,35,25,10,7,9,10,22,28,23,41,33,27,32,5,15,4,5,22,6,6,1
uSF2,DE,451,01,0000076,561,273,15,16,20,14,9,2,2,6,14,11,27,27,24,19,16,7,13,9,9,7,3,3,0,288,8,16,30,15,5,4,3,10,12,14,18,29,22,20,20,8,9,7,11,10,8,5,4
uSF2,DE,451,01,0000077,725,364,19,37,50,26,7,4,1,2,9,28,37,45,34,25,15,5,4,5,2,3,3,3,0,361,24,31,43,18,11,3,5,3,12,24,40,52,30,16,19,4,6,2,2,7,3,2,4
uSF2,DE,451,01,0000078,4069,2031,171,188,186,109,45,18,23,55,108,141,186,183,141,107,90,36,43,27,41,55,39,25,14,2038,147,170,160,98,58,16,14,63,123,143,220,164,130,137,84,27,44,37,48,56,54,30,15
uSF2,DE,451,01,0000079,2086,1009,91,93,96,53,28,8,11,22,37,50,91,93,93,70,54,12,21,8,29,20,14,7,8,1077,69,111,106,70,31,9,6,29,38,76,102,90,92,62,56,17,17,13,14,23,20,15,11
uSF2,DE,451,01,0000080,4327,2151,155,183,192,98,46,17,21,78,126,150,184,186,153,141,112,42,54,31,48,68,29,23,14,2176,180,167,178,82,60,15,22,63,138,170,197,183,151,141,94,44,62,28,51,64,35,31,20
uSF2,DE,451,01,0000081,4677,2296,149,162,213,101,49,21,18,49,158,172,196,215,172,153,125,52,64,39,50,67,41,19,11,2381,124,170,190,118,49,22,14,83,163,194,198,223,183,160,119,40,63,34,58,81,39,37,19
uSF2,DE,451,01,0000082,635,297,24,22,26,13,15,1,4,9,26,22,34,21,19,13,10,5,10,2,6,4,3,5,3,338,11,28,32,18,6,3,0,13,30,33,32,35,25,18,8,8,4,3,6,9,9,2,5
uSF2,DE,451,01,0000083,635,297,24,22,26,13,15,1,4,9,26,22,34,21,19,13,10,5,10,2,6,4,3,5,3,338,11,28,32,18,6,3,0,13,30,33,32,35,25,18,8,8,4,3,6,9,9,2,5
uSF2,DE,451,01,0000084,4042,1999,125,140,187,88,34,20,14,40,132,150,162,194,153,140,115,47,54,37,44,63,38,14,8,2043,113,142,158,100,43,19,14,70,133,161,166,188,158,142,111,32,59,31,52,72,30,35,14
uSF2,DE,451,01,0000085,4042,1999,125,140,187,88,34,20,14,40,132,150,162,194,153,140,115,47,54,37,44,63,38,14,8,2043,113,142,158,100,43,19,14,70,133,161,166,188,158,142,111,32,59,31,52,72,30,35,14
uSF2,DE,451,01,0000086,8485,4121,277,312,326,189,108,45,35,117,268,281,332,340,309,275,235,69,110,72,89,148,98,54,32,4364,294,316,329,176,83,42,47,124,266,336,357,363,305,285,220,64,114,76,114,161,144,99,49
uSF2,DE,451,01,0000087,2340,1096,71,97,87,49,35,18,10,48,75,80,71,91,76,62,45,17,27,17,23,38,31,16,12,1244,85,86,108,45,29,10,17,42,74,84,91,86,99,66,49,12,31,20,40,55,53,41,21
uSF2,DE,451,01,0000088,2340,1096,71,97,87,49,35,18,10,48,75,80,71,91,76,62,45,17,27,17,23,38,31,16,12,1244,85,86,108,45,29,10,17,42,74,84,91,86,99,66,49,12,31,20,40,55,53,41,21
uSF2,DE,451,01,0000089,366,183,10,24,20,5,8,4,0,5,14,12,14,13,15,11,4,0,2,1,2,9,2,4,4,183,14,14,12,4,4,1,0,6,13,20,16,17,9,9,9,2,4,2,8,8,3,5,3
uSF2,DE,451,01,0000090,366,183,10,24,20,5,8,4,0,5,14,12,14,13,15,11,4,0,2,1,2,9,2,4,4,183,14,14,12,4,4,1,0,6,13,20,16,17,9,9,9,2,4,2,8,8,3,5,3
uSF2,DE,451,01,0000091,5704,2801,194,189,217,134,65,23,25,63,177,182,245,232,214,199,184,51,81,52,63,98,63,34,16,2903,195,213,207,124,50,30,29,76,178,231,245,258,194,206,161,49,79,54,64,97,86,52,25
uSF2,DE,451,01,0000092,2384,1170,76,86,89,48,29,10,10,29,74,78,100,96,102,81,85,27,26,16,19,46,20,17,6,1214,78,92,83,58,26,15,13,25,76,99,100,109,93,87,59,20,35,13,26,42,32,22,11
uSF2,DE,451,01,0000093,1175,569,39,34,35,31,11,6,4,15,39,28,45,53,41,46,32,7,23,13,20,20,15,7,5,606,36,44,37,30,10,4,4,15,35,41,47,61,37,45,31,15,14,16,18,27,20,16,3
uSF2,DE,451,01,0000094,2145,1062,79,69,93,55,25,7,11,19,64,76,100,83,71,72,67,17,32,23,24,32,28,10,5,1083,81,77,87,36,14,11,12,36,67,91,98,88,64,74,71,14,30,25,20,28,34,14,11
uSF2,DE,451,01,0000095,4781,2422,160,230,219,128,74,36,27,95,120,161,204,220,167,140,145,39,64,27,44,49,41,29,3,2359,160,172,199,115,66,31,19,64,152,179,215,207,174,142,134,37,60,33,50,61,45,30,14
uSF2,DE,451,01,0000096,217,105,3,10,11,7,2,2,0,4,5,8,10,8,7,5,11,1,4,1,1,2,1,2,0,112,7,6,12,5,4,1,3,3,3,11,11,10,4,6,8,4,3,1,1,3,2,2,2
uSF2,DE,451,01,0000097,217,105,3,10,11,7,2,2,0,4,5,8,10,8,7,5,11,1,4,1,1,2,1,2,0,112,7,6,12,5,4,1,3,3,3,11,11,10,4,6,8,4,3,1,1,3,2,2,2
uSF2,DE,451,01,0000098,4564,2317,157,220,208,121,72,34,27,91,115,153,194,212,160,135,134,38,60,26,43,47,40,27,3,2247,153,166,187,110,62,30,16,61,149,168,204,197,170,136,126,33,57,32,49,58,43,28,12
uSF2,DE,451,01,0000099,4564,2317,157,220,208,121,72,34,27,91,115,153,194,212,160,135,134,38,60,26,43,47,40,27,3,2247,153,166,187,110,62,30,16,61,149,168,204,197,170,136,126,33,57,32,49,58,43,28,12
uSF2,DE,451,01,0000100,6315,3005,159,200,216,100,66,37,32,96,151,229,249,231,208,223,164,64,110,76,79,119,104,57,35,3310,183,175,243,104,76,36,32,105,151,218,266,245,220,235,192,72,103,69,90,160,158,102,75
uSF2,DE,451,01,0000101,279,137,5,6,14,2,1,0,3,7,8,12,11,16,9,10,7,1,4,5,6,3,4,2,1,142,6,5,8,3,1,2,1,6,7,20,7,8,5,14,8,8,5,2,5,3,6,9,3
uSF2,DE,451,01,0000102,279,137,5,6,14,2,1,0,3,7,8,12,11,16,9,10,7,1,4,5,6,3,4,2,1,142,6,5,8,3,1,2,1,6,7,20,7,8,5,14,8,8,5,2,5,3,6,9,3
uSF2,DE,451,01,0000103,437,207,16,17,22,8,3,3,4,4,9,23,21,17,13,17,7,1,1,1,1,2,9,5,3,230,15,26,19,7,7,2,4,6,16,11,29,18,16,13,5,3,4,3,1,8,12,4,1
uSF2,DE,451,01,0000104,437,207,16,17,22,8,3,3,4,4,9,23,21,17,13,17,7,1,1,1,1,2,9,5,3,230,15,26,19,7,7,2,4,6,16,11,29,18,16,13,5,3,4,3,1,8,12,4,1
uSF2,DE,451,01,0000105,1308,554,27,40,29,16,8,12,10,35,38,44,41,33,24,45,24,8,17,7,13,34,22,15,12,754,44,38,37,13,12,11,7,39,41,40,57,29,42,40,39,9,16,16,21,60,59,48,36
uSF2,DE,451,01,0000106,1136,493,23,40,29,16,7,10,7,29,37,39,40,33,20,42,21,8,13,6,10,26,18,9,10,643,41,33,33,13,9,9,5,36,36,38,53,27,37,37,36,8,14,10,15,43,42,36,32
uSF2,DE,451,01,0000107,172,61,4,0,0,0,1,2,3,6,1,5,1,0,4,3,3,0,4,1,3,8,4,6,2,111,3,5,4,0,3,2,2,3,5,2,4,2,5,3,3,1,2,6,6,17,17,12,4
uSF2,DE,451,01,0000108,4291,2107,111,137,151,74,54,22,15,50,96,150,176,165,162,151,126,54,88,63,59,80,69,35,19,2184,118,106,179,81,56,21,20,54,87,147,173,190,157,168,140,52,78,48,63,89,81,41,35
uSF2,DE,451,01,0000109,2038,1005,62,64,81,31,28,13,10,32,57,70,89,84,72,68,55,21,32,28,20,34,32,17,5,1033,55,55,81,35,33,11,9,29,46,78,87,93,70,66,58,19,40,20,37,45,34,21,11
uSF2,DE,451,01,0000110,357,165,7,11,9,11,2,0,0,4,5,12,14,13,13,16,9,6,8,3,7,8,5,2,0,192,8,11,16,5,3,0,3,5,4,14,13,23,10,24,13,6,3,4,6,5,9,3,4
uSF2,DE,451,01,0000111,1516,755,30,53,55,29,17,9,5,12,19,54,59,53,58,55,47,22,44,25,25,32,28,11,13,761,42,28,62,34,16,8,6,15,21,43,58,60,60,58,58,22,31,21,16,34,37,14,17
uSF2,DE,451,01,0000112,380,182,12,9,6,3,7,0,0,2,15,14,14,15,19,12,15,5,4,7,7,6,4,5,1,198,13,12,20,7,4,2,2,5,16,12,15,14,17,20,11,5,4,3,4,5,1,3,3
uSF2,DE,451,01,0000113,9392,4472,312,322,366,195,114,47,57,132,268,347,398,357,329,270,223,80,80,73,123,168,118,55,38,4920,283,342,352,205,115,56,53,149,322,363,436,408,330,295,249,100,133,64,143,205,140,101,76
uSF2,DE,451,01,0000114,1139,526,43,40,62,16,14,3,8,18,26,46,48,44,40,30,11,5,6,8,6,21,14,9,8,613,30,40,46,30,12,6,6,17,38,45,53,52,44,43,25,13,12,5,12,36,11,20,17
uSF2,DE,451,01,0000115,1139,526,43,40,62,16,14,3,8,18,26,46,48,44,40,30,11,5,6,8,6,21,14,9,8,613,30,40,46,30,12,6,6,17,38,45,53,52,44,43,25,13,12,5,12,36,11,20,17
uSF2,DE,451,01,0000116,3832,1772,115,119,148,87,52,22,31,53,122,132,164,126,127,105,72,28,31,23,49,66,57,22,21,2060,120,127,157,82,56,25,26,77,141,149,172,156,153,112,78,43,45,25,58,93,78,45,42
uSF2,DE,451,01,0000117,1246,583,48,40,41,30,18,8,16,25,50,45,52,40,42,34,18,11,9,4,10,21,14,3,4,663,48,36,57,18,25,5,7,34,55,59,56,46,56,36,28,12,8,7,12,23,13,9,13
uSF2,DE,451,01,0000118,1786,841,39,54,72,41,24,9,8,19,46,51,85,58,63,54,40,14,19,15,33,31,32,17,17,945,41,55,68,40,18,11,11,29,42,55,79,73,69,57,39,27,29,14,38,48,49,29,24
uSF2,DE,451,01,0000119,800,348,28,25,35,16,10,5,7,9,26,36,27,28,22,17,14,3,3,4,6,14,11,2,0,452,31,36,32,24,13,9,8,14,44,35,37,37,28,19,11,4,8,4,8,22,16,7,5
uSF2,DE,451,01,0000120,4417,2173,154,163,156,92,47,22,18,61,120,169,186,187,162,135,140,47,43,42,68,81,47,24,9,2244,131,175,149,93,47,25,20,55,143,169,211,200,133,140,146,44,76,34,73,76,51,36,17
uSF2,DE,451,01,0000121,345,171,10,16,14,5,5,0,0,2,11,14,21,27,10,8,7,7,2,2,4,3,0,2,1,174,13,18,13,9,4,2,1,4,12,21,13,17,7,4,7,6,4,3,5,5,1,3,2
uSF2,DE,451,01,0000122,2566,1250,95,95,81,55,25,16,9,36,62,106,103,87,95,84,79,31,25,26,49,44,27,15,5,1316,74,100,83,51,23,18,14,33,81,93,115,119,80,91,99,17,49,20,42,50,32,23,9
uSF2,DE,451,01,0000123,1345,668,45,47,54,27,16,5,8,22,38,41,59,62,54,36,47,9,14,13,15,31,18,5,2,677,40,48,47,28,20,5,5,13,44,50,80,57,41,39,37,19,19,11,23,21,15,10,5
uSF2,DE,451,01,0000124,161,84,4,5,7,5,1,1,1,1,9,8,3,11,3,7,7,0,2,1,0,3,2,2,1,77,4,9,6,5,0,0,0,5,6,5,3,7,5,6,3,2,4,0,3,0,3,0,1
uSF2,DE,451,01,0000125,4781,2422,160,230,219,128,74,36,27,95,120,161,204,220,167,140,145,39,64,27,44,49,41,29,3,2359,160,172,199,115,66,31,19,64,152,179,215,207,174,142,134,37,60,33,50,61,45,30,14
uSF2,DE,451,01,0000126,2730,1280,101,96,117,51,37,11,24,45,87,105,121,111,92,72,36,23,17,14,20,45,28,14,13,1450,91,94,116,57,41,13,14,55,105,125,122,115,107,83,60,31,24,15,29,64,25,32,32
uSF2,DE,451,01,0000127,4352,2091,134,149,153,96,49,25,17,55,108,157,188,145,158,138,119,45,44,41,82,75,59,32,22,2261,115,155,151,91,41,29,25,62,123,148,194,192,149,148,138,44,78,34,80,98,81,52,33
uSF2,DE,451,01,0000128,2145,1016,73,72,89,43,26,10,15,31,64,77,86,90,76,53,61,12,17,17,21,45,29,7,2,1129,71,84,79,52,33,14,13,27,88,85,117,94,69,58,48,23,27,15,31,43,31,17,10
uSF2,DE,451,01,0000129,1013,500,29,38,28,23,7,8,4,16,39,40,48,43,24,37,25,11,12,9,13,26,12,5,3,513,32,40,39,18,10,6,6,22,33,31,42,37,31,34,37,11,21,6,13,16,21,3,4
uSF2,DE,451,01,0000130,4693,2289,144,156,134,85,55,23,39,80,163,198,211,152,152,146,105,38,72,53,82,91,62,30,18,2404,124,137,130,77,51,16,34,104,200,168,219,175,180,154,138,48,79,56,65,98,82,41,28
uSF2,DE,451,01,0000131,428,215,24,12,9,1,1,1,2,11,18,32,26,14,9,21,7,1,5,3,4,5,5,3,1,213,19,13,7,7,6,1,2,15,25,25,15,9,12,9,10,3,3,6,4,6,9,3,4
uSF2,DE,451,01,0000132,2732,1263,69,98,118,52,23,5,12,30,55,69,91,105,105,127,112,23,43,15,21,41,20,15,14,1469,79,90,116,72,18,9,14,38,61,94,113,121,139,149,106,25,24,17,24,48,35,29,48
uSF2,DE,451,01,0000133,1299,596,38,29,29,17,21,14,7,30,38,31,55,47,29,38,25,12,23,15,19,20,28,18,13,703,33,28,30,20,19,9,11,28,39,44,47,42,40,36,36,15,26,14,19,39,58,39,31
uSF2,DE,451,01,0000134,1375,582,18,28,22,17,10,9,9,27,50,52,36,36,45,49,42,8,13,16,11,26,26,18,14,793,20,15,27,11,4,6,9,23,50,40,33,39,42,56,49,8,31,17,24,76,83,77,53
uSF2,DE,451,01,0000135,2261,1101,62,67,56,30,27,6,19,56,83,110,85,99,79,59,59,19,30,21,33,51,30,19,1,1160,64,67,46,37,27,23,16,51,82,92,90,104,77,58,70,22,28,30,28,48,65,21,14
uSF2,DE,451,01,0000136,2409,1244,217,138,101,28,17,25,32,124,185,166,123,63,15,5,3,0,0,0,0,1,1,0,0,1165,186,137,76,36,34,40,33,111,196,137,95,50,16,7,3,0,4,0,1,2,1,0,0
uSF2,DE,451,01,0000137,1877,896,51,73,62,33,16,7,12,42,45,69,78,70,67,60,50,22,32,18,25,26,23,12,3,981,46,63,85,44,18,15,14,33,55,73,72,79,70,63,70,16,38,18,26,39,21,18,5
uSF2,DE,451,01,0000138,1137,523,25,35,23,11,6,9,5,35,53,37,41,38,35,31,25,6,10,12,16,18,17,20,15,614,15,22,32,11,7,9,9,35,52,35,46,45,40,37,29,15,19,8,17,31,48,24,28
uSF2,DE,451,01,0000139,1052,505,33,29,17,16,13,4,9,33,45,51,45,47,27,27,19,8,6,4,20,15,19,9,9,547,23,23,23,11,8,8,8,38,44,46,37,49,36,30,24,15,12,7,23,23,20,26,13
uSF2,DE,451,01,0000140,2300,1102,35,69,80,49,34,14,13,37,39,56,77,97,78,74,77,25,34,34,42,64,42,26,6,1198,37,48,103,65,22,11,7,21,36,45,93,102,84,86,93,26,64,30,45,75,57,26,22
uSF2,DE,451,01,0000141,1908,904,43,55,63,49,20,5,5,15,45,40,61,79,60,64,58,25,39,34,42,43,30,25,4,1004,40,56,57,41,20,13,4,25,40,40,69,76,82,66,65,41,55,32,38,56,47,25,16
uSF2,DE,451,01,0000142,2875,1392,90,98,111,75,39,10,12,45,80,82,118,137,97,90,74,29,42,30,44,42,21,19,7,1483,59,69,117,68,33,20,18,65,96,93,114,134,117,104,69,38,47,35,43,52,40,28,24
uSF2,DE,451,01,0000143,2235,1111,58,84,108,68,30,12,5,27,33,64,93,114,98,106,63,30,25,23,17,23,20,8,2,1124,68,75,104,60,25,6,17,20,44,53,110,125,95,90,73,24,28,21,14,27,26,6,13
uSF2,DE,451,01,0000144,5563,2737,229,236,226,136,58,25,37,87,180,203,251,239,190,157,125,41,53,32,54,74,54,34,16,2826,222,223,203,123,70,22,25,86,180,215,306,226,192,187,118,35,53,43,60,83,80,40,34
uSF2,DE,451,01,0000145,2241,1086,95,96,102,57,28,9,13,26,50,54,99,99,97,77,59,12,21,9,31,21,15,7,9,1155,74,114,114,71,35,9,6,37,44,79,108,99,103,65,59,18,17,14,14,24,22,18,11
uSF2,DE,451,01,0000146,4398,2180,158,187,195,101,46,17,22,79,129,152,185,189,154,143,113,42,54,31,48,68,29,24,14,2218,184,169,181,84,62,17,22,63,142,174,204,188,153,143,95,44,63,28,52,64,35,31,20
uSF2,DE,451,01,0000147,2706,1322,93,98,125,62,40,15,16,35,56,97,140,117,102,88,68,17,32,22,36,33,19,5,6,1384,96,115,117,76,30,20,12,52,71,96,114,128,89,99,76,21,34,18,29,37,24,20,10
uSF2,DE,451,01,0000148,2696,1330,73,88,98,61,42,17,19,48,65,82,114,124,114,102,70,34,30,26,44,32,24,20,3,1366,68,98,92,71,38,7,14,39,65,73,113,133,132,86,75,41,41,37,24,45,30,29,15
uSF2,DE,451,01,0000149,4306,2083,188,206,183,89,43,21,36,86,139,174,230,161,95,113,100,24,34,26,46,44,20,18,7,2223,192,186,188,109,59,22,36,96,171,184,235,178,92,98,103,37,49,27,45,48,35,15,18
uSF2,DE,451,01,0000150,4708,2343,165,166,205,116,42,19,18,63,130,186,234,240,169,168,109,34,58,25,46,68,47,25,10,2365,164,195,197,101,56,27,16,62,146,177,230,237,162,158,98,37,58,25,54,72,52,25,16
uSF2,DE,451,01,0000151,2317,1142,67,70,95,33,29,13,13,39,65,82,100,100,81,78,62,22,36,33,26,37,36,19,6,1175,61,60,89,38,34,13,10,35,53,98,94,101,75,80,66,27,45,22,42,48,40,30,14
uSF2,DE,451,01,0000152,1493,658,30,51,38,27,9,10,7,33,42,51,54,46,33,58,30,14,21,9,17,34,23,11,10,835,49,44,49,18,12,9,8,41,40,52,66,50,47,61,49,14,17,14,21,48,51,39,36
uSF2,DE,451,01,0000153,1688,816,34,53,55,29,18,11,8,18,20,59,60,53,62,58,50,22,48,26,28,40,32,17,15,872,45,33,66,34,19,10,8,18,26,45,62,62,65,61,61,23,33,27,22,51,54,26,21
uSF2,DE,451,01,0000154,817,389,28,26,28,11,10,3,4,6,24,37,35,32,32,29,22,6,5,8,8,8,13,10,4,428,28,38,39,14,11,4,6,11,32,23,44,32,33,33,16,8,8,6,5,13,13,7,4
uSF2,DE,451,01,0000155,4677,2296,149,162,213,101,49,21,18,49,158,172,196,215,172,153,125,52,64,39,50,67,41,19,11,2381,124,170,190,118,49,22,14,83,163,194,198,223,183,160,119,40,63,34,58,81,39,37,19
uSF2,DE,451,01,0000156,2750,1353,86,110,109,53,37,14,10,34,88,90,114,109,117,92,89,27,28,17,21,55,22,21,10,1397,92,106,95,62,30,16,13,31,89,119,116,126,102,96,68,22,39,15,34,50,35,27,14
uSF2,DE,451,01,0000157,3515,1665,110,131,122,80,46,24,14,63,114,108,116,144,117,108,77,24,50,30,43,58,46,23,17,1850,121,130,145,75,39,14,21,57,109,125,138,147,136,111,80,27,45,36,58,82,73,57,24
uSF2,DE,451,01,0000158,2220,1103,81,71,95,56,25,7,11,20,66,83,102,87,75,75,69,18,32,25,25,35,30,10,5,1117,81,80,89,39,14,12,13,36,68,92,103,90,67,78,72,15,30,25,22,29,36,15,11
uSF2,DE,451,01,0000159,342057,166513,10385,11508,11554,6767,3525,2094,2107,6068,11099,12793,14524,14651,12876,11484,8852,2847,3721,2435,3623,5495,4242,2498,1365,175544,9756,10893,10694,6188,3445,2146,2529,6293,11158,12896,14827,14978,13412,12186,9607,3051,4239,2760,4252,6831,6224,4113,3066
uSF2,DE,451,01,0000160,63429,30518,1704,1929,2066,1216,518,228,196,770,1528,2018,2476,2599,2462,2302,1833,588,847,546,843,1508,1242,710,389,32911,1609,1852,1825,1133,491,198,195,790,1588,2097,2469,2745,2678,2407,2085,688,966,708,977,1798,1680,1035,897
uSF2,DE,451,01,0000161,440,216,9,10,15,10,3,1,1,4,3,11,9,20,29,26,13,3,6,3,8,14,8,8,2,224,4,14,8,6,2,1,0,2,7,15,12,25,25,24,18,8,7,6,6,4,13,5,12
uSF2,DE,451,01,0000162,440,216,9,10,15,10,3,1,1,4,3,11,9,20,29,26,13,3,6,3,8,14,8,8,2,224,4,14,8,6,2,1,0,2,7,15,12,25,25,24,18,8,7,6,6,4,13,5,12
uSF2,DE,451,01,0000163,214,99,3,6,7,1,2,0,0,3,6,9,2,10,8,11,11,2,4,3,5,2,2,1,1,115,7,10,5,4,3,0,1,2,9,5,7,9,16,7,14,6,0,2,1,2,3,1,1
uSF2,DE,451,01,0000164,214,99,3,6,7,1,2,0,0,3,6,9,2,10,8,11,11,2,4,3,5,2,2,1,1,115,7,10,5,4,3,0,1,2,9,5,7,9,16,7,14,6,0,2,1,2,3,1,1
uSF2,DE,451,01,0000165,265,123,2,3,11,6,3,0,0,1,7,7,11,8,9,16,9,5,4,3,7,5,4,1,1,142,2,6,6,3,1,1,0,1,9,10,7,10,23,12,17,1,4,1,5,7,7,4,5
uSF2,DE,451,01,0000166,259,120,2,3,11,6,3,0,0,1,7,6,11,8,8,16,9,5,3,3,7,5,4,1,1,139,1,6,6,3,1,1,0,1,9,10,7,9,23,12,16,1,4,1,5,7,7,4,5
uSF2,DE,451,01,0000167,1191,571,31,42,43,23,10,7,2,10,43,46,63,53,48,32,25,5,12,8,11,17,22,11,7,620,40,36,38,20,7,6,4,15,47,43,59,60,61,32,22,2,16,5,14,25,30,19,19
uSF2,DE,451,01,0000168,1191,571,31,42,43,23,10,7,2,10,43,46,63,53,48,32,25,5,12,8,11,17,22,11,7,620,40,36,38,20,7,6,4,15,47,43,59,60,61,32,22,2,16,5,14,25,30,19,19
uSF2,DE,451,01,0000169,6363,3036,189,208,217,125,64,29,38,81,183,238,296,301,213,186,143,50,77,50,67,125,86,42,28,3327,163,206,212,124,68,32,30,99,193,259,298,314,206,211,160,48,81,61,86,150,147,91,88
uSF2,DE,451,01,0000170,623,320,24,28,28,12,9,4,6,13,22,23,33,24,33,15,16,2,8,6,1,4,5,2,2,303,21,28,33,15,4,7,2,8,26,25,28,32,19,14,10,5,2,6,5,5,6,2,0
uSF2,DE,451,01,0000171,1552,725,33,37,51,23,12,7,9,24,54,67,68,80,62,45,35,7,19,10,14,28,18,10,12,827,26,42,42,27,17,8,8,36,63,58,71,63,56,61,38,11,12,12,25,35,36,28,52
uSF2,DE,451,01,0000172,2726,1279,99,93,88,59,22,14,15,30,76,99,118,124,68,72,62,25,30,21,29,62,44,20,9,1447,70,94,95,49,37,14,16,40,62,122,135,147,85,85,64,21,42,22,40,75,69,38,25
uSF2,DE,451,01,0000173,1462,712,33,50,50,31,21,4,8,14,31,49,77,73,50,54,30,16,20,13,23,31,19,10,5,750,46,42,42,33,10,3,4,15,42,54,64,72,46,51,48,11,25,21,16,35,36,23,11
uSF2,DE,451,01,0000174,3636,1718,100,101,118,64,26,17,10,47,116,153,172,172,139,118,81,24,36,19,30,60,60,33,22,1918,112,107,119,52,31,11,8,60,99,157,173,164,172,125,108,35,41,37,46,81,76,60,44
uSF2,DE,451,01,0000175,682,332,24,19,37,12,1,4,2,5,16,21,37,28,33,22,17,4,5,3,6,16,8,7,5,350,28,23,20,6,4,1,1,6,12,27,46,25,30,17,19,6,6,6,6,22,14,11,14
uSF2,DE,451,01,0000176,2954,1386,76,82,81,52,25,13,8,42,100,132,135,144,106,96,64,20,31,16,24,44,52,26,17,1568,84,84,99,46,27,10,7,54,87,130,127,139,142,108,89,29,35,31,40,59,62,49,30
uSF2,DE,451,01,0000177,51320,24755,1370,1559,1655,987,410,174,145,624,1170,1554,1923,2035,2016,1913,1551,499,708,460,715,1285,1060,614,328,26565,1281,1473,1437,924,379,147,152,611,1224,1608,1913,2163,2175,1996,1746,588,817,596,819,1529,1404,855,728
uSF2,DE,451,01,0000178,1753,778,38,40,37,23,16,10,13,28,69,64,60,71,48,47,34,11,28,21,15,24,37,25,19,975,35,44,26,15,19,11,10,27,90,63,51,46,44,58,55,17,27,23,31,59,79,63,82
uSF2,DE,451,01,0000179,449,221,8,14,10,14,3,2,1,6,13,20,17,22,18,16,6,2,8,5,6,12,11,5,2,228,15,11,11,5,1,1,1,4,14,10,18,17,22,15,10,7,4,5,13,19,10,9,6
uSF2,DE,451,01,0000180,1711,832,49,53,51,36,13,10,4,20,32,72,71,71,63,46,45,19,24,10,25,66,36,15,1,879,49,54,51,36,26,5,6,31,34,80,56,77,57,38,52,23,33,15,25,56,48,19,8
uSF2,DE,451,01,0000181,2441,1197,68,64,77,53,23,10,4,49,117,107,110,113,90,65,66,21,27,16,25,38,28,21,5,1244,61,67,76,36,22,10,8,62,104,111,95,120,81,78,66,22,28,23,21,44,44,40,25
uSF2,DE,451,01,0000182,2781,1347,76,61,75,43,18,13,9,59,105,103,128,114,121,107,66,19,34,25,27,49,50,29,16,1434,73,71,47,35,14,8,13,67,106,109,112,113,129,103,87,23,45,34,36,71,74,30,34
uSF2,DE,451,01,0000183,3657,1713,90,127,102,44,23,11,7,37,71,92,133,158,137,152,138,34,46,30,44,84,79,49,25,1944,92,106,111,61,18,11,11,34,70,103,137,166,165,162,130,36,60,47,64,97,116,90,57
uSF2,DE,451,01,0000184,2515,1194,68,86,55,35,20,6,9,23,29,61,97,110,115,99,68,22,20,15,33,71,79,43,30,1321,79,67,65,46,24,5,5,15,34,70,116,110,123,102,59,27,33,23,57,92,77,55,37
uSF2,DE,451,01,0000185,2808,1325,69,84,82,59,18,9,9,23,47,78,106,102,106,104,82,22,35,34,48,73,73,36,26,1483,65,93,98,55,23,8,12,30,45,88,109,105,128,109,88,32,49,24,34,100,94,44,50
uSF2,DE,451,01,0000186,1585,777,52,43,58,28,14,4,4,9,23,58,49,62,67,67,47,13,14,24,21,48,40,21,11,808,45,41,43,25,6,2,4,5,29,59,59,78,76,55,44,17,32,17,17,64,49,22,19
uSF2,DE,451,01,0000187,1717,870,44,70,61,34,26,3,11,37,50,46,63,60,78,82,57,15,20,4,17,48,34,5,5,847,39,49,44,36,16,5,6,29,49,43,60,69,75,75,54,18,23,16,25,51,35,14,16
uSF2,DE,451,01,0000188,3153,1539,89,104,112,65,32,11,13,44,56,95,103,133,130,140,121,38,48,28,43,67,35,24,8,1614,85,97,83,60,28,8,10,30,74,94,118,139,161,142,125,39,59,38,48,61,67,31,17
uSF2,DE,451,01,0000189,3477,1720,97,101,102,54,28,11,10,89,143,145,145,140,119,106,113,49,61,28,46,71,33,19,10,1757,79,81,84,52,24,11,15,111,155,112,144,132,119,131,148,48,61,33,48,67,57,26,19
uSF2,DE,451,01,0000190,2985,1485,73,94,102,46,25,18,7,41,80,82,119,112,120,115,98,40,59,34,47,66,61,33,13,1500,57,78,87,57,20,11,7,30,57,81,126,117,126,104,132,42,51,47,51,95,69,33,22
uSF2,DE,451,01,0000191,1944,973,62,75,97,47,19,9,3,20,35,57,67,79,68,79,64,25,27,14,27,60,26,12,1,971,55,64,64,45,14,5,10,13,32,62,73,86,85,78,72,24,30,24,39,36,37,11,12
uSF2,DE,451,01,0000192,3828,1842,98,108,139,95,27,11,8,34,52,78,138,135,159,145,141,37,62,38,73,107,95,37,25,1986,87,125,119,101,24,10,5,26,58,95,113,160,175,169,153,53,63,63,69,108,108,53,49
uSF2,DE,451,01,0000193,2047,938,51,59,74,38,16,10,7,14,24,54,88,80,82,70,51,8,22,14,28,43,38,41,26,1109,52,85,58,39,18,4,3,17,27,60,86,109,85,63,60,19,34,18,27,71,51,54,69
uSF2,DE,451,01,0000194,3159,1524,78,94,110,88,26,7,8,18,30,63,92,131,140,123,80,35,44,37,44,98,90,55,33,1635,79,81,117,51,19,7,6,14,36,69,105,139,141,124,97,29,59,30,55,121,101,68,87
uSF2,DE,451,01,0000195,2709,1310,66,86,89,54,20,6,5,22,87,105,98,108,103,89,77,23,31,15,39,75,62,35,15,1399,74,70,77,39,19,8,8,26,87,108,109,118,108,86,83,29,27,35,36,88,82,47,35
uSF2,DE,451,01,0000196,2957,1385,113,72,99,50,17,6,5,30,72,124,115,109,101,107,58,31,33,19,36,64,55,41,28,1572,87,91,72,65,17,12,8,22,89,133,123,110,122,111,91,29,32,30,40,87,90,63,48
uSF2,DE,451,01,0000197,3644,1785,81,124,123,81,26,7,8,21,35,50,124,125,151,154,139,35,65,49,71,121,98,68,29,1859,73,98,104,65,27,5,4,18,34,58,103,152,153,193,140,54,67,51,83,142,116,83,36
uSF2,DE,451,01,0000198,24617,12223,1093,1058,959,534,232,138,108,446,1036,1217,1242,1166,920,776,516,108,157,89,127,163,77,38,23,12394,999,1057,876,498,266,152,146,523,1056,1252,1292,1202,981,776,441,97,167,76,123,184,104,74,52
uSF2,DE,451,01,0000199,2579,1203,104,102,77,44,25,20,13,54,131,131,130,105,80,65,47,10,19,9,10,16,6,4,1,1376,103,115,91,58,31,30,20,72,111,132,145,130,103,94,42,24,12,6,17,24,9,6,1
uSF2,DE,451,01,0000200,2539,1187,103,102,77,43,24,20,13,54,131,131,130,103,78,61,45,9,18,9,9,16,6,4,1,1352,100,112,91,56,31,30,20,72,110,132,139,130,103,91,40,23,11,6,17,24,8,5,1
uSF2,DE,451,01,0000201,9798,4833,389,384,371,232,93,55,43,194,456,488,458,416,393,336,226,40,57,35,50,60,27,21,9,4965,381,407,354,205,117,53,63,248,473,491,468,444,418,322,187,31,65,25,47,65,43,32,26
uSF2,DE,451,01,0000202,2721,1368,119,105,75,56,22,10,13,41,138,156,131,114,107,95,81,15,23,15,15,18,9,10,0,1353,107,95,89,54,19,11,9,50,144,151,128,111,105,100,69,11,26,6,11,20,12,13,12
uSF2,DE,451,01,0000203,5559,2680,199,195,231,152,55,36,23,139,249,246,238,233,231,198,117,19,25,13,23,33,14,7,4,2879,217,231,210,119,89,33,52,175,262,251,252,278,252,192,101,15,29,10,27,38,23,12,11
uSF2,DE,451,01,0000204,1140,594,63,68,50,11,8,5,7,13,61,77,76,51,25,30,15,1,6,4,8,5,3,3,4,546,51,66,37,18,5,4,0,18,64,79,74,28,32,21,8,3,5,6,7,5,6,6,3
uSF2,DE,451,01,0000205,378,191,8,16,15,13,8,4,0,1,8,9,13,18,30,13,13,5,3,3,4,4,1,1,1,187,6,15,18,14,4,5,2,5,3,10,14,27,29,9,9,2,5,3,2,2,2,1,0
uSF2,DE,451,01,0000206,12228,6181,600,572,509,258,114,63,52,198,449,597,654,645,447,374,242,58,80,45,67,87,44,13,13,6047,515,535,431,235,118,69,62,203,472,629,678,628,460,360,211,42,89,44,59,95,52,36,24
uSF2,DE,451,01,0000207,2747,1368,168,156,110,47,17,7,6,28,98,185,164,135,85,71,41,15,13,9,5,3,2,3,0,1379,149,165,103,57,15,8,14,25,109,189,177,127,91,59,37,4,18,3,8,5,10,3,3
uSF2,DE,451,01,0000208,4078,2080,166,188,215,105,38,21,17,32,90,148,209,245,192,142,96,17,37,19,32,39,21,6,5,1998,143,173,171,85,43,15,11,38,115,174,226,236,175,130,81,14,30,19,30,42,20,14,13
uSF2,DE,451,01,0000209,3718,1870,185,159,125,66,37,21,17,108,179,183,199,179,111,112,71,16,18,15,14,31,14,3,7,1848,164,136,106,65,43,35,30,109,162,204,202,169,129,114,55,13,21,16,14,28,16,14,3
uSF2,DE,451,01,0000210,1685,863,81,69,59,40,22,14,12,30,82,81,82,86,59,49,34,10,12,2,16,14,7,1,1,822,59,61,51,28,17,11,7,31,86,62,73,96,65,57,38,11,20,6,7,20,6,5,5
uSF2,DE,451,01,0000211,47351,23242,1295,1460,1471,845,595,678,877,1651,1749,1639,1730,1856,1586,1540,1178,365,490,327,453,620,487,236,114,24109,1197,1328,1297,817,582,835,1197,1498,1565,1554,1803,1782,1678,1684,1240,367,535,373,532,815,677,442,311
uSF2,DE,451,01,0000212,10964,5399,332,402,421,246,153,72,69,213,416,414,509,479,357,358,261,73,110,60,114,146,126,47,21,5565,324,354,334,230,114,69,64,226,408,414,501,498,387,435,278,76,123,91,128,199,171,95,46
uSF2,DE,451,01,0000213,3498,1735,99,147,135,81,51,28,22,47,143,123,166,148,98,110,90,24,39,31,39,50,44,15,5,1763,89,118,107,63,34,24,20,70,139,116,169,158,114,139,100,21,43,32,55,63,56,19,14
uSF2,DE,451,01,0000214,3048,1524,75,99,119,69,44,18,24,59,118,89,138,150,124,89,65,19,39,17,39,49,49,22,10,1524,80,97,83,73,27,19,22,60,78,116,99,140,115,116,72,29,37,31,36,84,65,34,11
uSF2,DE,451,01,0000215,4418,2140,158,156,167,96,58,26,23,107,155,202,205,181,135,159,106,30,32,12,36,47,33,10,6,2278,155,139,144,94,53,26,22,96,191,182,233,200,158,180,106,26,43,28,37,52,50,42,21
uSF2,DE,451,01,0000216,18489,8956,341,420,437,266,253,478,695,1102,690,565,468,552,567,539,406,137,177,111,160,226,211,106,49,9533,320,362,406,239,283,654,1006,893,569,489,492,518,573,570,434,131,200,140,204,336,306,238,170
uSF2,DE,451,01,0000217,1639,798,64,52,42,26,23,16,23,74,62,67,66,63,69,66,41,11,5,9,5,2,8,3,1,841,50,53,49,30,31,30,30,84,66,79,56,57,80,57,40,7,9,7,4,7,8,4,3
uSF2,DE,451,01,0000218,538,275,18,14,11,9,7,2,6,11,19,26,19,23,25,24,9,6,7,11,3,9,9,6,1,263,14,8,16,6,8,2,1,5,16,25,22,21,27,19,11,5,4,5,9,14,12,9,4
uSF2,DE,451,01,0000219,2485,1246,41,88,100,66,42,35,40,53,25,60,69,98,118,132,78,23,34,18,23,40,41,17,5,1239,36,76,91,66,16,24,41,49,29,59,79,99,124,115,71,27,25,22,38,55,40,35,22
uSF2,DE,451,01,0000220,2657,1323,40,28,56,37,39,56,128,192,119,63,60,77,68,86,71,21,37,14,26,35,39,21,10,1334,33,47,54,29,34,56,139,182,96,45,56,55,67,92,80,20,35,29,29,47,57,24,28
uSF2,DE,451,01,0000221,2805,1409,46,49,61,36,39,69,105,217,142,86,62,69,75,60,57,24,21,18,34,52,49,31,7,1396,52,51,56,31,44,83,130,135,94,64,65,73,72,73,70,22,29,26,39,59,59,52,17
uSF2,DE,451,01,0000222,2891,1428,82,116,99,55,30,19,11,79,139,130,100,133,108,89,77,29,30,17,27,35,17,5,1,1463,74,84,91,48,29,12,16,75,132,116,124,134,114,119,86,32,37,21,36,37,28,9,9
uSF2,DE,451,01,0000223,1593,653,4,9,6,5,21,83,144,175,59,33,17,15,20,9,8,4,3,4,7,9,9,3,6,940,6,1,6,3,31,147,291,171,40,13,15,9,14,13,1,2,11,1,8,37,40,45,35
uSF2,DE,451,01,0000224,2294,1095,18,20,15,8,45,191,232,280,69,43,26,19,31,27,15,1,16,4,7,7,15,5,1,1199,13,7,11,4,74,295,351,169,39,35,23,16,22,26,16,2,13,4,9,22,20,11,17
uSF2,DE,451,01,0000225,386,195,9,18,10,7,1,1,1,3,15,26,17,16,12,11,17,3,5,2,1,10,5,5,0,191,11,8,14,6,3,2,1,5,17,19,14,10,12,16,15,3,12,1,4,11,4,3,0
uSF2,DE,451,01,0000226,290,109,2,9,10,5,3,1,1,5,7,6,5,5,11,6,4,2,0,0,3,2,3,7,12,181,6,3,9,3,3,2,3,3,6,4,12,8,7,9,3,1,3,5,7,12,18,28,26
uSF2,DE,451,01,0000227,911,425,17,17,27,12,3,5,4,13,34,25,27,34,30,29,29,13,19,14,24,25,16,3,5,486,25,24,9,13,10,1,3,15,34,30,26,36,34,31,41,10,22,19,21,35,20,18,9
uSF2,DE,451,01,0000228,5054,2538,171,189,173,98,39,28,20,121,235,233,225,242,175,163,151,43,55,39,41,56,25,10,6,2516,138,163,155,87,32,32,29,148,231,204,246,220,201,194,146,50,50,29,44,54,33,19,11
uSF2,DE,451,01,0000229,5054,2538,171,189,173,98,39,28,20,121,235,233,225,242,175,163,151,43,55,39,41,56,25,10,6,2516,138,163,155,87,32,32,29,148,231,204,246,220,201,194,146,50,50,29,44,54,33,19,11
uSF2,DE,451,01,0000230,12844,6349,451,449,440,235,150,100,93,215,408,427,528,583,487,480,360,112,148,117,138,192,125,73,38,6495,415,449,402,261,153,80,98,231,357,447,564,546,517,485,382,110,162,113,156,226,167,90,84
uSF2,DE,451,01,0000231,2901,1408,114,129,131,60,26,6,6,20,38,95,153,131,134,112,78,18,22,22,20,35,22,17,19,1493,109,122,121,55,27,8,12,30,47,117,154,145,135,104,60,20,32,19,30,31,32,38,45
uSF2,DE,451,01,0000232,2536,1242,82,51,69,43,24,24,26,40,122,101,82,113,88,100,62,28,31,29,31,44,30,13,9,1294,80,86,58,60,34,17,16,62,115,76,81,102,107,94,81,24,38,28,31,53,33,10,8
uSF2,DE,451,01,0000233,972,478,32,33,25,16,14,5,6,14,34,43,37,47,35,26,29,6,13,11,17,19,8,5,3,494,35,30,20,22,10,3,4,10,29,37,41,38,44,37,23,14,15,11,13,27,13,7,11
uSF2,DE,451,01,0000234,1113,580,23,35,41,21,15,7,0,13,12,9,27,49,56,70,59,25,17,17,18,32,27,4,3,533,21,27,33,20,8,2,6,8,5,12,40,37,53,67,58,14,21,15,20,37,16,5,8
uSF2,DE,451,01,0000235,217,123,1,2,0,0,11,26,24,28,15,5,5,2,2,1,0,0,0,0,1,0,0,0,0,94,1,2,1,1,16,17,22,20,6,4,1,0,1,0,1,0,0,1,0,0,0,0,0
uSF2,DE,451,01,0000236,230,112,1,5,5,4,1,0,0,1,8,11,7,15,7,6,10,1,6,1,5,4,6,8,0,118,6,5,9,1,2,3,0,5,1,7,7,12,6,9,11,3,4,2,3,5,8,5,4
uSF2,DE,451,01,0000237,1174,570,53,38,54,24,12,2,7,27,33,35,43,43,35,34,27,11,23,16,18,20,10,5,0,604,34,43,43,31,9,6,12,10,38,43,45,56,30,34,65,6,19,12,24,22,16,3,3
uSF2,DE,451,01,0000238,1608,800,77,87,74,41,23,10,8,30,44,62,91,88,57,49,21,3,6,5,7,6,5,5,1,808,77,71,70,37,23,16,12,31,40,81,99,84,58,43,16,6,3,8,6,11,7,7,2
uSF2,DE,451,01,0000239,2093,1036,68,69,41,26,24,20,16,42,102,66,83,95,73,82,74,20,30,16,21,32,17,16,3,1057,52,63,47,34,24,8,14,55,76,70,96,72,83,97,67,23,30,17,29,40,42,15,3
uSF2,DE,451,01,0000240,28086,13519,765,895,897,554,302,157,123,393,811,988,1204,1208,1018,783,625,228,358,235,401,646,518,268,142,14567,717,818,827,486,325,133,125,399,775,947,1189,1260,1003,899,749,282,433,294,512,813,779,481,321
uSF2,DE,451,01,0000241,4421,2105,117,143,126,94,47,24,17,67,134,154,190,205,135,119,103,34,50,36,77,88,80,46,19,2316,143,135,129,73,46,32,37,70,118,154,173,205,138,144,118,46,74,41,92,113,119,70,46
uSF2,DE,451,01,0000242,1711,795,38,49,48,29,15,10,5,26,57,54,63,84,51,52,45,10,19,10,29,32,33,26,10,916,54,54,50,29,17,18,8,30,42,48,59,86,69,50,54,14,32,13,31,44,55,38,21
uSF2,DE,451,01,0000243,2710,1310,79,94,78,65,32,14,12,41,77,100,127,121,84,67,58,24,31,26,48,56,47,20,9,1400,89,81,79,44,29,14,29,40,76,106,114,119,69,94,64,32,42,28,61,69,64,32,25
uSF2,DE,451,01,0000244,809,410,33,25,38,14,15,8,5,12,28,33,38,39,37,30,9,6,5,6,12,7,4,6,0,399,25,22,24,10,17,4,4,13,31,37,45,37,31,19,14,2,5,10,6,11,13,11,8
uSF2,DE,451,01,0000245,469,242,21,13,20,8,9,5,4,7,21,21,24,20,20,15,4,3,4,6,7,4,4,2,0,227,15,7,11,6,10,4,4,10,24,18,22,22,17,8,6,2,3,7,5,6,6,9,5
uSF2,DE,451,01,0000246,340,168,12,12,18,6,6,3,1,5,7,12,14,19,17,15,5,3,1,0,5,3,0,4,0,172,10,15,13,4,7,0,0,3,7,19,23,15,14,11,8,0,2,3,1,5,7,2,3
uSF2,DE,451,01,0000247,22856,11004,615,727,733,446,240,125,101,314,649,801,976,964,846,634,513,188,303,193,312,551,434,216,123,11852,549,661,674,403,262,97,84,316,626,756,971,1018,834,736,617,234,354,243,414,689,647,400,267
uSF2,DE,451,01,0000248,3174,1594,84,98,107,68,35,20,13,36,88,103,120,144,121,82,79,29,64,36,61,96,73,26,11,1580,68,85,82,44,41,10,14,44,73,82,146,108,115,125,99,34,75,54,54,90,79,31,27
uSF2,DE,451,01,0000249,2416,1208,76,73,80,52,25,6,11,40,70,73,105,92,92,75,65,26,37,18,39,73,41,23,16,1208,56,58,62,49,25,9,4,32,62,74,100,97,99,78,66,31,36,18,56,75,71,27,23
uSF2,DE,451,01,0000250,3275,1572,78,99,117,62,35,22,16,46,92,127,155,150,129,99,80,24,30,27,38,53,61,18,14,1703,85,88,120,73,36,15,13,44,92,107,158,152,141,101,91,34,40,34,43,70,78,53,35
uSF2,DE,451,01,0000251,971,476,20,35,33,25,15,8,4,16,38,37,48,35,46,29,21,5,10,3,12,12,8,10,6,495,36,26,17,15,12,7,2,17,25,43,39,60,35,33,19,6,14,3,11,23,25,17,10
uSF2,DE,451,01,0000252,4413,2093,134,134,142,75,37,22,22,69,136,166,206,195,180,128,66,26,36,31,48,106,73,36,25,2320,111,155,145,66,59,27,16,67,143,178,183,213,153,122,92,44,49,36,69,120,125,85,62
uSF2,DE,451,01,0000253,2552,1228,77,93,91,50,30,6,7,22,60,99,103,112,88,66,68,14,28,8,25,48,71,38,24,1324,61,86,84,58,23,7,12,23,55,85,110,124,93,66,63,16,27,19,46,74,87,65,40
uSF2,DE,451,01,0000254,3693,1734,92,118,93,66,32,25,14,54,83,129,146,146,110,97,74,44,62,45,57,114,74,41,18,1959,82,106,93,59,43,14,13,41,93,117,138,170,115,130,128,45,71,50,96,145,117,59,34
uSF2,DE,451,01,0000255,2362,1099,54,77,70,48,31,16,14,31,82,67,93,90,80,58,60,20,36,25,32,49,33,24,9,1263,50,57,71,39,23,8,10,48,83,70,97,94,83,81,59,24,42,29,39,92,65,63,36
uSF2,DE,451,01,0000256,24366,12271,932,1118,1084,593,275,120,110,290,539,974,1306,1227,994,818,609,234,236,131,169,233,156,72,51,12095,818,1088,1025,486,223,96,94,299,680,1010,1361,1162,914,795,610,196,215,131,175,268,207,136,106
uSF2,DE,451,01,0000257,4406,2101,186,188,166,102,42,22,30,85,163,222,183,175,133,109,83,33,39,15,21,45,39,10,10,2305,178,193,178,74,47,26,23,102,218,199,198,179,149,128,86,49,35,33,33,62,48,29,38
uSF2,DE,451,01,0000258,1294,614,49,53,39,27,12,8,12,27,52,64,48,45,49,25,23,6,11,6,10,21,20,3,4,680,44,53,52,16,13,7,7,40,50,58,56,45,45,32,27,14,8,10,18,32,17,10,26
uSF2,DE,451,01,0000259,3036,1446,134,134,122,75,28,13,18,58,106,155,131,127,84,82,59,25,25,7,10,22,19,6,6,1590,130,140,126,57,34,19,16,58,166,136,140,132,103,93,56,33,26,20,15,29,31,18,12
uSF2,DE,451,01,0000260,266,130,10,6,8,6,3,2,1,4,7,10,12,5,8,9,12,3,2,4,2,1,7,3,5,136,9,9,7,1,3,1,1,2,8,13,7,10,12,16,8,0,6,2,2,8,6,4,1
uSF2,DE,451,01,0000261,266,130,10,6,8,6,3,2,1,4,7,10,12,5,8,9,12,3,2,4,2,1,7,3,5,136,9,9,7,1,3,1,1,2,8,13,7,10,12,16,8,0,6,2,2,8,6,4,1
uSF2,DE,451,01,0000262,291,139,4,12,13,5,3,1,4,3,5,11,15,17,12,9,5,2,2,2,6,3,2,2,1,152,8,9,13,9,3,0,2,7,5,14,17,10,18,5,7,0,3,2,4,4,4,5,3
uSF2,DE,451,01,0000263,291,139,4,12,13,5,3,1,4,3,5,11,15,17,12,9,5,2,2,2,6,3,2,2,1,152,8,9,13,9,3,0,2,7,5,14,17,10,18,5,7,0,3,2,4,4,4,5,3
uSF2,DE,451,01,0000264,19403,9901,732,912,897,480,227,95,75,198,364,731,1096,1030,841,691,509,196,193,110,140,184,108,57,35,9502,623,877,827,402,170,69,68,188,449,784,1139,963,735,646,509,147,171,94,136,194,149,98,64
uSF2,DE,451,01,0000265,3726,1906,184,221,178,80,38,18,13,24,71,153,258,209,139,117,77,28,35,10,18,15,10,5,5,1820,151,195,164,67,31,8,11,29,103,186,257,181,126,97,89,20,22,12,17,21,16,10,7
uSF2,DE,451,01,0000266,4026,2037,170,198,193,81,55,23,14,41,67,160,243,222,191,134,90,32,35,11,26,28,16,4,3,1989,146,227,153,101,40,19,18,39,82,162,252,209,161,132,81,18,30,21,27,32,15,15,9
uSF2,DE,451,01,0000267,3580,1831,146,175,186,108,40,12,15,37,42,115,188,208,169,156,72,34,26,21,17,31,20,8,5,1749,103,161,170,92,35,12,8,37,57,140,211,198,148,109,83,28,26,14,20,36,38,14,9
uSF2,DE,451,01,0000268,207,106,9,7,2,3,1,1,2,3,8,7,7,5,6,6,8,0,2,4,2,8,6,6,3,101,7,2,6,1,0,3,0,1,7,5,6,10,5,8,6,4,3,2,1,12,3,5,4
uSF2,DE,451,01,0000269,2348,1191,61,101,112,69,30,10,8,21,41,84,118,117,113,83,64,33,22,19,19,32,17,12,5,1157,54,93,115,51,19,10,12,22,53,83,115,118,95,88,64,21,27,11,23,31,24,16,12
uSF2,DE,451,01,0000270,2138,1063,63,87,85,46,18,12,5,25,65,101,118,93,87,67,74,20,29,18,13,16,10,10,1,1075,81,92,95,35,17,4,12,29,72,104,132,83,65,79,68,27,17,9,19,13,7,7,8
uSF2,DE,451,01,0000271,2086,1087,53,76,92,62,30,11,9,29,44,61,88,123,78,78,77,32,26,14,29,41,19,9,6,999,51,63,75,32,16,8,4,16,49,62,94,113,88,83,71,20,29,15,18,35,33,18,6
uSF2,DE,451,01,0000272,1292,680,46,47,49,31,15,8,9,18,26,50,76,53,58,50,47,17,18,13,16,13,10,3,7,612,30,44,49,23,12,5,3,15,26,42,72,51,47,50,47,9,17,10,11,14,13,13,9
uSF2,DE,451,01,0000273,48888,23837,1554,1763,1708,946,554,306,261,922,1906,2090,2223,2057,1713,1496,1143,381,475,332,461,631,480,310,125,25051,1544,1648,1588,912,521,297,289,1024,1939,2047,2249,2090,1873,1636,1283,430,594,339,538,823,737,429,221
uSF2,DE,451,01,0000274,8756,4305,372,427,355,191,124,58,45,146,309,406,441,380,289,240,181,50,56,41,57,75,38,18,6,4451,368,367,355,199,105,56,51,144,354,447,460,377,328,264,182,56,76,23,60,78,55,30,16
uSF2,DE,451,01,0000275,3558,1746,158,182,146,89,50,23,19,82,157,182,184,154,91,74,53,18,21,10,16,21,11,3,2,1812,160,167,139,96,47,32,27,65,169,189,189,150,116,93,63,21,26,3,16,18,17,5,4
uSF2,DE,451,01,0000276,3380,1638,129,149,141,60,42,22,20,45,95,115,156,159,135,107,79,25,26,27,33,42,20,9,2,1742,112,129,136,74,42,16,17,66,104,149,169,152,137,114,90,31,41,15,37,49,33,20,9
uSF2,DE,451,01,0000277,1818,921,85,96,68,42,32,13,6,19,57,109,101,67,63,59,49,7,9,4,8,12,7,6,2,897,96,71,80,29,16,8,7,13,81,109,102,75,75,57,29,4,9,5,7,11,5,5,3
uSF2,DE,451,01,0000278,3708,1753,90,84,108,63,33,22,14,61,128,105,142,146,153,154,111,32,52,34,46,75,51,33,16,1955,87,88,111,64,42,20,16,73,108,116,158,129,166,159,146,60,53,40,64,80,82,60,33
uSF2,DE,451,01,0000281,1647,757,28,36,51,20,14,9,7,22,43,39,60,59,66,74,62,20,24,13,21,35,27,20,7,890,34,39,57,24,21,7,2,23,41,44,69,58,78,78,82,31,20,24,27,38,44,25,24
uSF2,DE,451,01,0000282,1966,951,56,44,55,41,19,13,7,38,78,61,75,84,87,77,48,12,27,20,24,39,24,13,9,1015,49,44,54,40,20,12,14,49,57,66,85,64,87,80,60,28,30,15,37,42,38,35,9
uSF2,DE,451,01,0000283,6088,2983,163,191,224,129,65,40,22,90,191,210,228,257,220,204,169,52,66,61,77,115,107,76,26,3105,177,175,191,108,53,32,42,99,177,190,229,258,231,194,180,52,111,57,93,167,160,90,39
uSF2,DE,451,01,0000284,2988,1459,76,98,110,61,32,19,13,41,72,99,111,109,93,96,91,27,38,40,42,76,61,44,10,1529,76,94,87,45,18,18,17,49,69,96,99,113,121,108,97,34,55,34,51,98,77,47,26
uSF2,DE,451,01,0000285,3100,1524,87,93,114,68,33,21,9,49,119,111,117,148,127,108,78,25,28,21,35,39,46,32,16,1576,101,81,104,63,35,14,25,50,108,94,130,145,110,86,83,18,56,23,42,69,83,43,13
uSF2,DE,451,01,0000286,30336,14796,929,1061,1021,563,332,186,180,625,1278,1369,1412,1274,1051,898,682,247,301,196,281,366,284,183,77,15540,912,1018,931,541,321,189,180,708,1300,1294,1402,1326,1148,1019,775,262,354,219,321,498,440,249,133
uSF2,DE,451,01,0000287,5410,2623,226,217,163,91,51,31,31,144,320,332,288,223,168,146,67,19,22,7,17,26,20,9,5,2787,191,186,166,87,51,50,40,167,364,316,290,244,222,144,73,25,33,13,23,35,32,27,8
uSF2,DE,451,01,0000288,325,170,7,18,11,10,7,6,5,7,8,7,17,13,21,20,3,1,2,0,1,1,3,1,1,155,8,15,20,6,7,3,3,3,2,11,18,19,15,9,7,2,1,1,0,1,3,1,0
uSF2,DE,451,01,0000289,3285,1600,91,106,107,53,34,13,16,77,160,162,159,138,119,106,96,18,23,18,28,28,20,20,8,1685,108,104,97,53,29,14,18,106,152,159,156,132,124,148,87,20,30,19,20,43,35,20,11
uSF2,DE,451,01,0000290,4345,2035,121,126,138,71,37,22,21,100,248,237,199,170,134,102,79,32,43,27,36,43,28,16,5,2310,154,141,107,66,42,29,26,148,235,207,197,189,156,126,116,36,62,44,30,61,68,40,30
uSF2,DE,451,01,0000291,3783,1884,97,125,131,80,50,28,29,67,113,156,171,185,117,104,127,61,45,31,47,58,34,23,5,1899,104,138,113,70,56,21,18,68,122,129,168,142,126,136,153,45,56,28,44,67,61,27,7
uSF2,DE,451,01,0000292,459,215,16,12,19,12,3,6,3,6,8,14,24,20,12,12,7,3,7,5,6,6,3,6,5,244,13,21,14,12,6,0,0,7,9,24,21,19,19,12,12,4,7,4,9,9,7,9,6
uSF2,DE,451,01,0000293,153,70,6,6,3,2,0,0,2,4,3,2,2,5,3,5,9,1,1,0,2,5,5,2,2,83,1,3,10,3,1,1,0,1,3,3,7,10,3,4,3,1,3,2,4,7,8,2,3
uSF2,DE,451,01,0000294,988,492,19,32,38,22,11,16,4,17,22,42,52,43,37,29,23,7,14,7,9,15,17,9,7,496,18,31,32,23,14,7,5,10,37,31,50,45,34,27,27,12,10,2,12,20,23,13,13
uSF2,DE,451,01,0000295,901,433,14,27,37,13,10,4,6,11,24,28,32,33,29,25,23,14,16,19,17,18,14,15,4,468,16,22,24,13,4,7,4,14,19,33,32,33,29,43,27,13,14,15,18,35,31,15,7
uSF2,DE,451,01,0000296,1750,870,47,72,85,43,24,8,13,38,54,50,83,74,62,38,33,15,18,11,19,21,32,17,13,880,43,64,55,33,23,15,7,35,45,62,73,86,62,51,41,15,21,17,22,44,41,16,9
uSF2,DE,451,01,0000297,2343,1133,49,89,86,50,24,15,20,34,74,72,89,92,86,66,47,17,23,20,43,68,41,19,9,1210,56,69,80,49,19,7,14,21,71,76,94,104,95,68,52,20,45,27,64,82,52,29,16
uSF2,DE,451,01,0000298,1274,611,34,43,29,19,21,5,4,19,36,37,53,37,43,50,44,21,28,21,19,16,19,10,3,663,37,37,40,25,14,6,6,25,34,37,46,44,53,63,55,30,21,13,25,28,14,8,2
uSF2,DE,451,01,0000299,124,57,3,5,5,3,1,0,0,2,2,3,1,8,10,6,3,0,2,0,0,1,1,1,0,67,2,8,4,4,2,0,2,2,3,3,8,10,8,4,1,1,0,1,0,1,1,2,0
uSF2,DE,451,01,0000300,2345,1192,119,95,79,42,20,13,5,42,108,131,132,102,88,83,41,11,18,10,10,21,10,9,3,1153,94,94,71,49,17,9,13,45,119,116,134,107,78,74,43,13,11,9,16,18,9,7,7
uSF2,DE,451,01,0000301,2851,1411,80,88,90,52,39,19,21,57,98,96,110,131,122,106,80,27,39,20,27,39,37,26,7,1440,67,85,98,48,36,20,24,56,85,87,108,142,124,110,78,25,40,24,34,47,55,33,14
uSF2,DE,451,01,0000302,25904,12701,767,943,994,658,253,94,65,205,344,578,933,1215,1194,1177,947,281,324,215,313,439,317,263,182,13203,791,953,975,575,207,68,78,212,338,679,1031,1301,1213,1174,899,272,312,190,315,457,418,378,367
uSF2,DE,451,01,0000303,2099,961,33,35,42,28,7,4,4,22,54,62,61,72,58,75,77,36,44,31,29,59,48,41,39,1138,48,43,46,29,9,4,4,32,72,59,68,62,77,83,81,37,46,17,41,50,66,67,97
uSF2,DE,451,01,0000304,1151,497,14,13,18,12,4,3,4,18,49,42,38,45,26,38,30,16,9,4,8,20,26,26,34,654,23,22,25,13,5,3,4,30,67,38,37,38,34,35,26,15,11,6,16,19,46,50,91
uSF2,DE,451,01,0000305,948,464,19,22,24,16,3,1,0,4,5,20,23,27,32,37,47,20,35,27,21,39,22,15,5,484,25,21,21,16,4,1,0,2,5,21,31,24,43,48,55,22,35,11,25,31,20,17,6
uSF2,DE,451,01,0000306,10079,4984,278,377,406,286,117,38,29,76,122,207,347,466,487,467,359,96,110,84,135,181,135,106,75,5095,275,354,384,224,73,19,36,83,105,241,389,509,511,456,336,101,124,73,136,180,183,173,130
uSF2,DE,451,01,0000307,3602,1740,86,109,114,85,34,12,8,16,31,54,80,149,168,145,126,35,42,34,65,104,93,82,68,1862,80,107,113,69,17,2,12,22,28,61,106,168,160,154,118,35,53,39,72,111,136,114,85
uSF2,DE,451,01,0000308,6477,3244,192,268,292,201,83,26,21,60,91,153,267,317,319,322,233,61,68,50,70,77,42,24,7,3233,195,247,271,155,56,17,24,61,77,180,283,341,351,302,218,66,71,34,64,69,47,59,45
uSF2,DE,451,01,0000309,7346,3670,269,331,339,208,77,31,20,68,73,155,309,419,371,385,258,79,76,33,45,63,29,24,8,3676,266,358,336,194,68,23,22,43,71,204,357,450,365,348,249,56,55,34,44,64,33,21,15
uSF2,DE,451,01,0000310,7346,3670,269,331,339,208,77,31,20,68,73,155,309,419,371,385,258,79,76,33,45,63,29,24,8,3676,266,358,336,194,68,23,22,43,71,204,357,450,365,348,249,56,55,34,44,64,33,21,15
uSF2,DE,451,01,0000311,6380,3086,187,200,207,136,52,21,12,39,95,154,216,258,278,250,253,70,94,67,104,136,105,92,60,3294,202,198,209,128,57,22,16,54,90,175,217,280,260,287,233,78,87,66,94,163,136,117,125
uSF2,DE,451,01,0000312,2604,1236,67,76,86,43,15,9,3,10,31,58,82,111,120,101,102,36,42,29,38,53,45,42,37,1368,77,81,87,53,18,6,8,27,38,64,76,113,98,120,95,32,37,19,37,65,61,67,89
uSF2,DE,451,01,0000313,1615,790,51,41,47,35,16,2,1,8,33,35,52,47,78,67,81,18,27,13,29,39,24,30,16,825,53,46,47,31,14,2,1,6,22,46,51,66,75,82,67,28,23,20,25,39,41,21,19
uSF2,DE,451,01,0000314,2161,1060,69,83,74,58,21,10,8,21,31,61,82,100,80,82,70,16,25,25,37,44,36,20,7,1101,72,71,75,44,25,14,7,21,30,65,90,101,87,85,71,18,27,27,32,59,34,29,17
uSF2,DE,451,01,0000315,36079,17318,1059,1146,1170,705,392,160,163,505,1065,1272,1546,1541,1408,1153,944,334,412,278,469,710,511,258,117,18761,1005,1050,1193,646,374,145,166,502,1080,1392,1589,1696,1455,1290,1128,337,558,337,594,852,741,421,210
uSF2,DE,451,01,0000316,975,483,59,64,38,21,5,2,0,6,6,34,65,58,41,30,22,9,6,3,4,5,3,1,1,492,45,66,47,22,10,1,1,4,8,51,69,51,50,21,21,6,3,2,4,4,3,2,1
uSF2,DE,451,01,0000317,975,483,59,64,38,21,5,2,0,6,6,34,65,58,41,30,22,9,6,3,4,5,3,1,1,492,45,66,47,22,10,1,1,4,8,51,69,51,50,21,21,6,3,2,4,4,3,2,1
uSF2,DE,451,01,0000318,11761,5554,367,360,371,218,128,38,44,161,441,494,505,537,487,417,314,98,105,72,112,129,89,44,23,6207,358,327,407,241,111,51,43,170,468,530,554,604,532,478,383,91,155,88,140,159,158,108,51
uSF2,DE,451,01,0000319,953,459,35,25,18,27,8,3,4,5,15,28,41,34,38,36,23,18,20,16,24,22,11,5,3,494,31,22,34,16,9,5,1,10,16,34,40,41,44,30,39,10,28,15,22,26,11,7,3
uSF2,DE,451,01,0000320,4904,2263,132,116,106,53,42,10,21,98,281,244,237,188,137,153,136,40,41,30,48,64,50,26,10,2641,140,106,104,79,35,16,23,99,282,249,232,208,174,217,158,44,65,48,74,87,87,76,38
uSF2,DE,451,01,0000321,3944,1898,127,151,170,90,55,16,13,31,85,125,141,200,216,158,119,31,38,19,29,35,26,13,10,2046,108,134,198,100,42,21,13,40,83,152,172,234,218,152,140,28,42,16,38,36,53,19,7
uSF2,DE,451,01,0000322,1960,934,73,68,77,48,23,9,6,27,60,97,86,115,96,70,36,9,6,7,11,8,2,0,0,1026,79,65,71,46,25,9,6,21,87,95,110,121,96,79,46,9,20,9,6,10,7,6,3
uSF2,DE,451,01,0000323,23343,11281,633,722,761,466,259,120,119,338,618,744,976,946,880,706,608,227,301,203,353,576,419,213,93,12062,602,657,739,383,253,93,122,328,604,811,966,1041,873,791,724,240,400,247,450,689,580,311,158
uSF2,DE,451,01,0000324,1769,870,55,55,52,36,21,13,9,31,57,60,67,71,67,43,49,14,16,9,38,58,29,17,3,899,43,48,62,28,17,7,8,20,46,67,66,86,54,53,54,17,32,18,32,59,47,24,11
uSF2,DE,451,01,0000325,2131,1067,56,69,77,48,28,10,14,32,63,94,88,78,79,60,52,24,18,26,39,52,28,20,12,1064,55,54,59,33,26,10,11,35,73,81,87,102,66,63,62,20,28,23,46,43,50,20,17
uSF2,DE,451,01,0000326,2157,1037,60,75,63,46,26,10,9,24,57,54,96,93,88,71,50,19,22,13,29,52,50,20,10,1120,56,65,84,41,28,10,12,26,64,63,90,103,72,72,57,21,24,18,35,68,55,41,15
uSF2,DE,451,01,0000327,1771,828,41,41,46,27,17,9,11,17,40,52,62,64,65,60,37,18,27,25,24,61,51,25,8,943,44,46,51,22,24,8,4,15,34,65,60,67,75,65,59,20,35,21,40,76,63,36,13
uSF2,DE,451,01,0000328,2529,1222,62,72,89,60,25,16,14,35,46,53,118,110,97,80,76,24,29,24,36,60,58,24,14,1307,71,72,84,52,32,13,16,36,35,67,111,121,96,78,81,20,32,31,58,92,65,28,16
uSF2,DE,451,01,0000329,2710,1315,72,113,98,57,34,15,12,39,68,92,114,116,120,77,60,24,27,20,34,69,39,11,4,1395,59,100,105,47,32,12,9,42,73,99,121,133,124,88,71,19,41,21,50,66,46,23,14
uSF2,DE,451,01,0000330,1605,803,63,53,60,29,27,14,11,39,42,56,72,75,69,39,29,12,12,5,25,43,19,6,3,802,56,39,50,28,14,9,14,26,47,55,82,69,48,45,39,10,21,19,36,46,30,9,10
uSF2,DE,451,01,0000331,5744,2684,133,134,171,99,52,25,26,85,186,216,248,215,189,174,155,59,86,51,87,105,99,63,26,3060,137,149,151,69,55,15,27,95,188,222,236,239,210,216,197,71,134,68,101,164,172,97,47
uSF2,DE,451,01,0000332,2927,1455,91,110,105,64,29,8,13,36,59,67,111,124,106,102,100,33,64,30,41,76,46,27,13,1472,81,84,93,63,25,9,21,33,44,92,113,121,128,111,104,42,53,28,52,75,52,33,15
uSF2,DE,451,01,0000333,4385,2254,179,173,175,90,53,37,23,75,148,200,213,197,156,167,124,31,48,35,39,40,30,10,11,2131,124,143,167,66,58,14,20,69,160,187,190,193,171,149,122,40,51,27,40,56,35,23,26
uSF2,DE,451,01,0000334,1260,642,43,43,54,27,16,9,3,19,48,42,52,47,58,48,38,11,16,19,19,16,7,2,5,618,20,39,54,30,13,6,7,16,44,37,37,60,56,42,41,16,26,10,15,22,9,8,10
uSF2,DE,451,01,0000335,1260,642,43,43,54,27,16,9,3,19,48,42,52,47,58,48,38,11,16,19,19,16,7,2,5,618,20,39,54,30,13,6,7,16,44,37,37,60,56,42,41,16,26,10,15,22,9,8,10
uSF2,DE,451,01,0000336,3125,1612,136,130,121,63,37,28,20,56,100,158,161,150,98,119,86,20,32,16,20,24,23,8,6,1513,104,104,113,36,45,8,13,53,116,150,153,133,115,107,81,24,25,17,25,34,26,15,16
uSF2,DE,451,01,0000337,2502,1283,105,100,104,50,26,26,17,47,68,119,129,123,82,98,74,14,25,11,17,18,17,8,5,1219,81,86,92,33,42,8,12,48,77,120,116,111,93,91,65,21,19,15,20,27,17,13,12
uSF2,DE,451,01,0000338,623,329,31,30,17,13,11,2,3,9,32,39,32,27,16,21,12,6,7,5,3,6,6,0,1,294,23,18,21,3,3,0,1,5,39,30,37,22,22,16,16,3,6,2,5,7,9,2,4
uSF2,DE,451,01,0000339,17260,8516,599,620,623,349,217,106,110,416,816,803,790,739,644,537,340,132,156,91,132,136,94,43,23,8744,547,611,542,325,237,144,139,471,805,766,845,762,623,554,418,137,147,111,130,148,132,84,66
uSF2,DE,451,01,0000340,17260,8516,599,620,623,349,217,106,110,416,816,803,790,739,644,537,340,132,156,91,132,136,94,43,23,8744,547,611,542,325,237,144,139,471,805,766,845,762,623,554,418,137,147,111,130,148,132,84,66
uSF2,DE,451,01,0000341,4157,2042,91,122,134,77,54,26,23,98,178,170,186,191,153,138,114,50,47,29,41,51,40,15,14,2115,112,122,138,71,54,35,34,98,144,146,203,182,141,158,141,47,60,33,35,41,53,35,32
uSF2,DE,451,01,0000342,2408,1203,70,78,88,60,32,19,21,59,103,95,100,76,120,89,63,21,34,10,24,24,11,4,2,1205,50,71,78,62,48,24,14,66,96,78,91,99,97,87,85,21,21,17,35,30,15,10,10
uSF2,DE,451,01,0000343,7255,3609,328,319,302,160,93,32,37,152,353,355,364,347,275,215,105,35,32,22,24,24,24,7,4,3646,268,313,237,140,81,52,44,191,386,384,403,343,270,212,109,31,27,19,32,39,31,21,13
uSF2,DE,451,01,0000344,3440,1662,110,101,99,52,38,29,29,107,182,183,140,125,96,95,58,26,43,30,43,37,19,17,3,1778,117,105,89,52,54,33,47,116,179,158,148,138,115,97,83,38,39,42,28,38,33,18,11
uSF2,DE,451,01,0000345,21692,10114,438,403,407,277,134,70,71,395,1157,1014,861,846,781,735,593,165,218,156,216,369,330,290,188,11578,405,345,379,244,161,64,80,506,1172,965,809,785,823,822,632,205,261,174,316,617,714,610,489
uSF2,DE,451,01,0000346,21692,10114,438,403,407,277,134,70,71,395,1157,1014,861,846,781,735,593,165,218,156,216,369,330,290,188,11578,405,345,379,244,161,64,80,506,1172,965,809,785,823,822,632,205,261,174,316,617,714,610,489
uSF2,DE,451,01,0000347,115,47,4,3,1,0,1,2,0,3,6,2,4,2,1,6,4,3,1,3,0,0,0,1,0,68,3,1,0,2,12,4,1,5,5,9,3,3,1,4,8,1,2,0,0,0,3,0,1
uSF2,DE,451,01,0000348,1150,548,28,26,28,14,10,4,5,17,25,38,33,57,51,61,41,7,11,8,6,21,22,18,17,602,22,22,18,19,12,3,3,11,37,40,37,48,52,62,43,11,13,4,7,33,38,40,27
uSF2,DE,451,01,0000349,623,282,11,20,19,13,3,2,0,10,22,20,20,26,33,20,19,2,5,5,6,7,10,5,4,341,14,17,18,10,5,2,2,8,25,30,20,35,30,28,21,4,7,3,8,11,16,13,14
uSF2,DE,451,01,0000350,1375,632,35,20,33,23,11,3,9,14,73,63,52,53,52,49,40,12,19,7,8,21,15,14,6,743,45,24,33,23,10,3,5,34,81,61,55,56,68,57,44,7,16,10,16,35,27,22,11
uSF2,DE,451,01,0000351,303,143,5,3,6,2,1,0,0,3,13,19,14,16,12,18,8,1,2,1,3,7,5,3,1,160,9,1,1,1,1,4,2,8,22,9,17,11,13,12,12,2,4,2,3,8,8,7,3
uSF2,DE,451,01,0000352,90,38,3,3,1,0,2,1,0,0,0,3,2,7,0,2,3,1,0,0,1,5,0,4,0,52,2,3,1,0,1,0,1,3,5,1,4,3,3,1,4,0,1,0,2,3,5,4,5
uSF2,DE,451,01,0000353,239,112,1,3,0,2,0,0,0,3,10,9,6,12,15,6,9,2,3,5,6,12,5,2,1,127,1,1,3,1,1,0,1,3,6,9,9,12,11,13,8,4,3,4,10,11,9,2,5
uSF2,DE,451,01,0000355,26,15,0,1,0,1,1,0,0,2,1,1,0,2,2,1,0,0,1,0,1,0,0,1,0,11,0,0,0,0,0,0,0,0,1,0,0,1,4,2,0,0,0,0,1,1,0,1,0
uSF2,DE,451,01,0000357,368,183,6,3,1,1,1,1,0,8,28,33,24,17,15,16,13,3,2,2,2,4,1,2,0,185,6,3,6,0,5,0,0,8,29,29,12,13,16,20,17,3,2,1,4,5,3,2,1
uSF2,DE,451,01,0000358,2721,1229,12,7,15,10,3,4,6,92,287,171,109,77,70,75,71,19,19,13,19,42,34,45,29,1492,14,12,14,8,3,1,9,132,273,152,71,57,75,80,74,22,24,29,47,116,114,82,83
uSF2,DE,451,01,0000359,1349,628,16,13,12,14,4,0,3,41,155,104,57,44,46,30,25,5,13,3,9,11,12,6,5,721,19,20,18,9,7,7,7,47,156,96,54,50,47,36,27,9,18,5,13,20,22,24,10
uSF2,DE,451,01,0000360,3388,1549,91,63,85,53,22,4,4,30,72,133,124,113,110,151,129,39,53,36,40,71,65,44,17,1839,83,64,76,45,17,6,3,29,102,143,136,120,118,204,131,50,64,36,67,106,111,81,47
uSF2,DE,451,01,0000361,1147,511,28,13,20,11,11,1,5,12,58,50,41,38,41,32,19,10,9,7,21,33,22,11,18,636,20,12,18,10,7,3,0,22,60,45,37,39,44,41,30,8,12,15,29,48,53,41,42
uSF2,DE,451,01,0000362,925,425,11,13,8,3,2,2,2,25,60,46,38,35,29,33,17,6,7,3,13,8,17,20,27,500,9,8,13,7,3,1,11,34,56,34,30,16,36,17,19,11,8,8,6,16,44,46,67
uSF2,DE,451,01,0000363,332,190,6,7,2,3,2,3,1,13,34,28,19,10,12,13,13,4,4,2,3,5,3,0,3,142,4,1,1,1,2,0,4,11,29,19,8,9,12,8,13,1,2,0,3,7,3,3,1
uSF2,DE,451,01,0000367,137,68,3,2,1,0,0,1,1,2,2,6,4,6,9,9,2,1,4,3,3,5,2,2,0,69,1,1,0,0,2,0,1,1,5,5,1,6,8,3,6,0,2,1,3,7,7,5,4
uSF2,DE,451,01,0000368,127,68,0,1,1,1,4,0,1,1,5,6,4,13,6,5,5,2,3,0,2,0,3,3,2,59,1,1,0,1,0,1,0,10,5,2,4,5,4,3,6,1,1,1,0,3,4,4,2
uSF2,DE,451,01,0000369,366,173,6,8,7,5,5,2,3,11,10,13,12,17,12,13,16,5,4,5,3,5,5,4,2,193,5,2,6,7,7,2,2,7,12,9,12,18,16,11,10,3,6,1,8,15,13,11,10
uSF2,DE,451,01,0000370,2387,1123,60,60,58,48,13,12,16,35,135,117,106,90,85,71,47,14,17,15,24,30,25,25,20,1264,55,42,46,27,21,11,11,48,110,112,118,93,96,79,57,22,24,15,26,53,79,65,54
uSF2,DE,451,01,0000371,1786,810,42,43,36,30,15,10,4,23,65,58,59,78,63,51,46,7,19,19,15,30,39,41,17,976,35,40,46,37,19,8,6,40,74,66,60,62,71,60,43,13,37,14,24,57,56,63,45
uSF2,DE,451,01,0000372,1505,725,28,47,37,23,12,9,9,28,46,46,69,83,58,37,46,14,9,6,15,32,33,22,16,780,25,39,34,17,12,5,4,18,43,48,62,65,59,48,34,13,11,8,22,45,72,67,29
uSF2,DE,451,01,0000373,1041,516,34,40,30,16,9,5,2,18,45,44,54,43,49,31,15,5,12,11,14,13,9,14,3,525,29,27,26,18,14,3,2,21,26,41,56,49,35,25,20,18,4,15,16,16,19,25,20
uSF2,DE,451,01,0000374,115,47,4,3,1,0,1,2,0,3,6,2,4,2,1,6,4,3,1,3,0,0,0,1,0,68,3,1,0,2,12,4,1,5,5,9,3,3,1,4,8,1,2,0,0,0,3,0,1
uSF2,DE,451,01,0000375,1150,548,28,26,28,14,10,4,5,17,25,38,33,57,51,61,41,7,11,8,6,21,22,18,17,602,22,22,18,19,12,3,3,11,37,40,37,48,52,62,43,11,13,4,7,33,38,40,27
uSF2,DE,451,01,0000376,623,282,11,20,19,13,3,2,0,10,22,20,20,26,33,20,19,2,5,5,6,7,10,5,4,341,14,17,18,10,5,2,2,8,25,30,20,35,30,28,21,4,7,3,8,11,16,13,14
uSF2,DE,451,01,0000377,1375,632,35,20,33,23,11,3,9,14,73,63,52,53,52,49,40,12,19,7,8,21,15,14,6,743,45,24,33,23,10,3,5,34,81,61,55,56,68,57,44,7,16,10,16,35,27,22,11
uSF2,DE,451,01,0000378,303,143,5,3,6,2,1,0,0,3,13,19,14,16,12,18,8,1,2,1,3,7,5,3,1,160,9,1,1,1,1,4,2,8,22,9,17,11,13,12,12,2,4,2,3,8,8,7,3
uSF2,DE,451,01,0000379,90,38,3,3,1,0,2,1,0,0,0,3,2,7,0,2,3,1,0,0,1,5,0,4,0,52,2,3,1,0,1,0,1,3,5,1,4,3,3,1,4,0,1,0,2,3,5,4,5
uSF2,DE,451,01,0000380,239,112,1,3,0,2,0,0,0,3,10,9,6,12,15,6,9,2,3,5,6,12,5,2,1,127,1,1,3,1,1,0,1,3,6,9,9,12,11,13,8,4,3,4,10,11,9,2,5
uSF2,DE,451,01,0000382,26,15,0,1,0,1,1,0,0,2,1,1,0,2,2,1,0,0,1,0,1,0,0,1,0,11,0,0,0,0,0,0,0,0,1,0,0,1,4,2,0,0,0,0,1,1,0,1,0
uSF2,DE,451,01,0000384,368,183,6,3,1,1,1,1,0,8,28,33,24,17,15,16,13,3,2,2,2,4,1,2,0,185,6,3,6,0,5,0,0,8,29,29,12,13,16,20,17,3,2,1,4,5,3,2,1
uSF2,DE,451,01,0000385,2721,1229,12,7,15,10,3,4,6,92,287,171,109,77,70,75,71,19,19,13,19,42,34,45,29,1492,14,12,14,8,3,1,9,132,273,152,71,57,75,80,74,22,24,29,47,116,114,82,83
uSF2,DE,451,01,0000386,1349,628,16,13,12,14,4,0,3,41,155,104,57,44,46,30,25,5,13,3,9,11,12,6,5,721,19,20,18,9,7,7,7,47,156,96,54,50,47,36,27,9,18,5,13,20,22,24,10
uSF2,DE,451,01,0000387,3388,1549,91,63,85,53,22,4,4,30,72,133,124,113,110,151,129,39,53,36,40,71,65,44,17,1839,83,64,76,45,17,6,3,29,102,143,136,120,118,204,131,50,64,36,67,106,111,81,47
uSF2,DE,451,01,0000388,1147,511,28,13,20,11,11,1,5,12,58,50,41,38,41,32,19,10,9,7,21,33,22,11,18,636,20,12,18,10,7,3,0,22,60,45,37,39,44,41,30,8,12,15,29,48,53,41,42
uSF2,DE,451,01,0000389,925,425,11,13,8,3,2,2,2,25,60,46,38,35,29,33,17,6,7,3,13,8,17,20,27,500,9,8,13,7,3,1,11,34,56,34,30,16,36,17,19,11,8,8,6,16,44,46,67
uSF2,DE,451,01,0000390,332,190,6,7,2,3,2,3,1,13,34,28,19,10,12,13,13,4,4,2,3,5,3,0,3,142,4,1,1,1,2,0,4,11,29,19,8,9,12,8,13,1,2,0,3,7,3,3,1
uSF2,DE,451,01,0000394,137,68,3,2,1,0,0,1,1,2,2,6,4,6,9,9,2,1,4,3,3,5,2,2,0,69,1,1,0,0,2,0,1,1,5,5,1,6,8,3,6,0,2,1,3,7,7,5,4
uSF2,DE,451,01,0000395,127,68,0,1,1,1,4,0,1,1,5,6,4,13,6,5,5,2,3,0,2,0,3,3,2,59,1,1,0,1,0,1,0,10,5,2,4,5,4,3,6,1,1,1,0,3,4,4,2
uSF2,DE,451,01,0000396,366,173,6,8,7,5,5,2,3,11,10,13,12,17,12,13,16,5,4,5,3,5,5,4,2,193,5,2,6,7,7,2,2,7,12,9,12,18,16,11,10,3,6,1,8,15,13,11,10
uSF2,DE,451,01,0000397,2387,1123,60,60,58,48,13,12,16,35,135,117,106,90,85,71,47,14,17,15,24,30,25,25,20,1264,55,42,46,27,21,11,11,48,110,112,118,93,96,79,57,22,24,15,26,53,79,65,54
uSF2,DE,451,01,0000398,1786,810,42,43,36,30,15,10,4,23,65,58,59,78,63,51,46,7,19,19,15,30,39,41,17,976,35,40,46,37,19,8,6,40,74,66,60,62,71,60,43,13,37,14,24,57,56,63,45
uSF2,DE,451,01,0000399,1505,725,28,47,37,23,12,9,9,28,46,46,69,83,58,37,46,14,9,6,15,32,33,22,16,780,25,39,34,17,12,5,4,18,43,48,62,65,59,48,34,13,11,8,22,45,72,67,29
uSF2,DE,451,01,0000400,1041,516,34,40,30,16,9,5,2,18,45,44,54,43,49,31,15,5,12,11,14,13,9,14,3,525,29,27,26,18,14,3,2,21,26,41,56,49,35,25,20,18,4,15,16,16,19,25,20
uSF2,DE,451,01,0000401,2376,1098,62,68,65,35,25,14,19,41,91,87,93,95,81,62,50,13,36,27,16,28,42,27,21,1278,56,72,59,30,23,18,12,35,116,88,79,78,63,72,65,22,29,29,36,64,85,65,82
uSF2,DE,451,01,0000402,2001,946,41,51,61,37,15,9,10,30,67,87,85,102,80,61,41,9,27,15,20,40,29,15,14,1055,41,53,53,32,18,9,9,40,77,68,89,80,78,76,48,18,16,17,38,54,46,37,58
uSF2,DE,451,01,0000403,1711,832,49,53,51,36,13,10,4,20,32,72,71,71,63,46,45,19,24,10,25,66,36,15,1,879,49,54,51,36,26,5,6,31,34,80,56,77,57,38,52,23,33,15,25,56,48,19,8
uSF2,DE,451,01,0000404,2726,1279,99,93,88,59,22,14,15,30,76,99,118,124,68,72,62,25,30,21,29,62,44,20,9,1447,70,94,95,49,37,14,16,40,62,122,135,147,85,85,64,21,42,22,40,75,69,38,25
uSF2,DE,451,01,0000405,3903,1909,101,114,127,84,44,14,12,63,148,156,187,186,140,119,96,37,47,29,48,69,47,31,10,1994,107,109,118,69,32,13,12,77,146,165,159,192,127,129,114,33,53,44,37,79,80,63,36
uSF2,DE,451,01,0000406,4654,2250,131,122,155,78,29,24,13,74,164,170,228,195,202,161,108,28,51,36,44,82,80,47,28,2404,141,130,105,61,25,15,18,88,165,179,217,198,220,152,128,31,67,45,56,118,118,60,67
uSF2,DE,451,01,0000407,2954,1386,76,82,81,52,25,13,8,42,100,132,135,144,106,96,64,20,31,16,24,44,52,26,17,1568,84,84,99,46,27,10,7,54,87,130,127,139,142,108,89,29,35,31,40,59,62,49,30
uSF2,DE,451,01,0000408,3657,1713,90,127,102,44,23,11,7,37,71,92,133,158,137,152,138,34,46,30,44,84,79,49,25,1944,92,106,111,61,18,11,11,34,70,103,137,166,165,162,130,36,60,47,64,97,116,90,57
uSF2,DE,451,01,0000409,2515,1194,68,86,55,35,20,6,9,23,29,61,97,110,115,99,68,22,20,15,33,71,79,43,30,1321,79,67,65,46,24,5,5,15,34,70,116,110,123,102,59,27,33,23,57,92,77,55,37
uSF2,DE,451,01,0000410,2808,1325,69,84,82,59,18,9,9,23,47,78,106,102,106,104,82,22,35,34,48,73,73,36,26,1483,65,93,98,55,23,8,12,30,45,88,109,105,128,109,88,32,49,24,34,100,94,44,50
uSF2,DE,451,01,0000411,2498,1212,66,62,91,45,22,5,5,17,39,84,71,100,112,120,80,23,27,33,41,69,54,31,15,1286,57,71,62,38,12,4,5,10,54,89,85,121,140,98,92,32,43,26,29,77,72,32,37
uSF2,DE,451,01,0000412,1717,870,44,70,61,34,26,3,11,37,50,46,63,60,78,82,57,15,20,4,17,48,34,5,5,847,39,49,44,36,16,5,6,29,49,43,60,69,75,75,54,18,23,16,25,51,35,14,16
uSF2,DE,451,01,0000413,3153,1539,89,104,112,65,32,11,13,44,56,95,103,133,130,140,121,38,48,28,43,67,35,24,8,1614,85,97,83,60,28,8,10,30,74,94,118,139,161,142,125,39,59,38,48,61,67,31,17
uSF2,DE,451,01,0000414,3477,1720,97,101,102,54,28,11,10,89,143,145,145,140,119,106,113,49,61,28,46,71,33,19,10,1757,79,81,84,52,24,11,15,111,155,112,144,132,119,131,148,48,61,33,48,67,57,26,19
uSF2,DE,451,01,0000415,2991,1488,73,94,102,46,25,18,7,41,80,83,119,112,121,115,98,40,60,34,47,66,61,33,13,1503,58,78,87,57,20,11,7,30,57,81,126,118,126,104,133,42,51,47,51,95,69,33,22
uSF2,DE,451,01,0000416,1944,973,62,75,97,47,19,9,3,20,35,57,67,79,68,79,64,25,27,14,27,60,26,12,1,971,55,64,64,45,14,5,10,13,32,62,73,86,85,78,72,24,30,24,39,36,37,11,12
uSF2,DE,451,01,0000417,3828,1842,98,108,139,95,27,11,8,34,52,78,138,135,159,145,141,37,62,38,73,107,95,37,25,1986,87,125,119,101,24,10,5,26,58,95,113,160,175,169,153,53,63,63,69,108,108,53,49
uSF2,DE,451,01,0000418,2047,938,51,59,74,38,16,10,7,14,24,54,88,80,82,70,51,8,22,14,28,43,38,41,26,1109,52,85,58,39,18,4,3,17,27,60,86,109,85,63,60,19,34,18,27,71,51,54,69
uSF2,DE,451,01,0000419,3159,1524,78,94,110,88,26,7,8,18,30,63,92,131,140,123,80,35,44,37,44,98,90,55,33,1635,79,81,117,51,19,7,6,14,36,69,105,139,141,124,97,29,59,30,55,121,101,68,87
uSF2,DE,451,01,0000420,2709,1310,66,86,89,54,20,6,5,22,87,105,98,108,103,89,77,23,31,15,39,75,62,35,15,1399,74,70,77,39,19,8,8,26,87,108,109,118,108,86,83,29,27,35,36,88,82,47,35
uSF2,DE,451,01,0000421,2957,1385,113,72,99,50,17,6,5,30,72,124,115,109,101,107,58,31,33,19,36,64,55,41,28,1572,87,91,72,65,17,12,8,22,89,133,123,110,122,111,91,29,32,30,40,87,90,63,48
uSF2,DE,451,01,0000422,3644,1785,81,124,123,81,26,7,8,21,35,50,124,125,151,154,139,35,65,49,71,121,98,68,29,1859,73,98,104,65,27,5,4,18,34,58,103,152,153,193,140,54,67,51,83,142,116,83,36
uSF2,DE,451,01,0000423,3755,1733,81,89,104,55,19,12,7,28,80,100,120,156,146,139,132,52,51,33,46,73,71,68,71,2022,100,103,112,66,23,9,12,57,105,102,113,151,132,155,121,47,48,25,53,84,107,117,180
uSF2,DE,451,01,0000424,2563,1254,70,63,71,51,19,3,1,12,38,55,75,74,110,104,128,38,62,40,50,78,46,45,21,1309,78,67,68,47,18,3,1,8,27,67,82,90,118,130,122,50,58,31,50,70,61,38,25
uSF2,DE,451,01,0000425,3174,1594,84,98,107,68,35,20,13,36,88,103,120,144,121,82,79,29,64,36,61,96,73,26,11,1580,68,85,82,44,41,10,14,44,73,82,146,108,115,125,99,34,75,54,54,90,79,31,27
uSF2,DE,451,01,0000426,2416,1208,76,73,80,52,25,6,11,40,70,73,105,92,92,75,65,26,37,18,39,73,41,23,16,1208,56,58,62,49,25,9,4,32,62,74,100,97,99,78,66,31,36,18,56,75,71,27,23
uSF2,DE,451,01,0000427,3275,1572,78,99,117,62,35,22,16,46,92,127,155,150,129,99,80,24,30,27,38,53,61,18,14,1703,85,88,120,73,36,15,13,44,92,107,158,152,141,101,91,34,40,34,43,70,78,53,35
uSF2,DE,451,01,0000428,1711,795,38,49,48,29,15,10,5,26,57,54,63,84,51,52,45,10,19,10,29,32,33,26,10,916,54,54,50,29,17,18,8,30,42,48,59,86,69,50,54,14,32,13,31,44,55,38,21
uSF2,DE,451,01,0000429,3681,1786,99,129,111,90,47,22,16,57,115,137,175,156,130,96,79,29,41,29,60,68,55,30,15,1895,125,107,96,59,41,21,31,57,101,149,153,179,104,127,83,38,56,31,72,92,89,49,35
uSF2,DE,451,01,0000430,4413,2093,134,134,142,75,37,22,22,69,136,166,206,195,180,128,66,26,36,31,48,106,73,36,25,2320,111,155,145,66,59,27,16,67,143,178,183,213,153,122,92,44,49,36,69,120,125,85,62
uSF2,DE,451,01,0000431,2552,1228,77,93,91,50,30,6,7,22,60,99,103,112,88,66,68,14,28,8,25,48,71,38,24,1324,61,86,84,58,23,7,12,23,55,85,110,124,93,66,63,16,27,19,46,74,87,65,40
uSF2,DE,451,01,0000432,4162,1976,113,131,113,74,41,30,18,61,104,150,170,166,130,112,78,47,66,51,64,118,78,43,18,2186,97,113,104,65,53,18,17,51,117,135,160,192,132,138,134,47,74,57,101,151,123,68,39
uSF2,DE,451,01,0000433,2702,1267,66,89,88,54,37,19,15,36,89,79,107,109,97,73,65,23,37,25,37,52,33,28,9,1435,60,72,84,43,30,8,10,51,90,89,120,109,97,92,67,24,44,32,40,97,72,65,39
uSF2,DE,451,01,0000434,1769,870,55,55,52,36,21,13,9,31,57,60,67,71,67,43,49,14,16,9,38,58,29,17,3,899,43,48,62,28,17,7,8,20,46,67,66,86,54,53,54,17,32,18,32,59,47,24,11
uSF2,DE,451,01,0000435,2131,1067,56,69,77,48,28,10,14,32,63,94,88,78,79,60,52,24,18,26,39,52,28,20,12,1064,55,54,59,33,26,10,11,35,73,81,87,102,66,63,62,20,28,23,46,43,50,20,17
uSF2,DE,451,01,0000436,2157,1037,60,75,63,46,26,10,9,24,57,54,96,93,88,71,50,19,22,13,29,52,50,20,10,1120,56,65,84,41,28,10,12,26,64,63,90,103,72,72,57,21,24,18,35,68,55,41,15
uSF2,DE,451,01,0000437,1771,828,41,41,46,27,17,9,11,17,40,52,62,64,65,60,37,18,27,25,24,61,51,25,8,943,44,46,51,22,24,8,4,15,34,65,60,67,75,65,59,20,35,21,40,76,63,36,13
uSF2,DE,451,01,0000438,2529,1222,62,72,89,60,25,16,14,35,46,53,118,110,97,80,76,24,29,24,36,60,58,24,14,1307,71,72,84,52,32,13,16,36,35,67,111,121,96,78,81,20,32,31,58,92,65,28,16
uSF2,DE,451,01,0000439,5763,2800,155,192,188,143,55,22,16,37,62,115,162,249,248,227,196,51,67,59,102,148,129,102,75,2963,152,178,188,113,42,16,19,43,58,126,196,269,247,239,189,53,80,66,104,170,170,143,102
uSF2,DE,451,01,0000440,6477,3244,192,268,292,201,83,26,21,60,91,153,267,317,319,322,233,61,68,50,70,77,42,24,7,3233,195,247,271,155,56,17,24,61,77,180,283,341,351,302,218,66,71,34,64,69,47,59,45
uSF2,DE,451,01,0000441,7346,3670,269,331,339,208,77,31,20,68,73,155,309,419,371,385,258,79,76,33,45,63,29,24,8,3676,266,358,336,194,68,23,22,43,71,204,357,450,365,348,249,56,55,34,44,64,33,21,15
uSF2,DE,451,01,0000442,3663,1774,107,138,116,84,42,18,16,44,83,120,155,150,158,113,83,42,47,36,58,91,50,16,7,1889,90,122,139,63,41,17,10,52,89,133,161,174,168,118,110,29,69,36,72,92,57,30,17
uSF2,DE,451,01,0000443,4904,2263,132,116,106,53,42,10,21,98,281,244,237,188,137,153,136,40,41,30,48,64,50,26,10,2641,140,106,104,79,35,16,23,99,282,249,232,208,174,217,158,44,65,48,74,87,87,76,38
uSF2,DE,451,01,0000444,1605,803,63,53,60,29,27,14,11,39,42,56,72,75,69,39,29,12,12,5,25,43,19,6,3,802,56,39,50,28,14,9,14,26,47,55,82,69,48,45,39,10,21,19,36,46,30,9,10
uSF2,DE,451,01,0000445,5744,2684,133,134,171,99,52,25,26,85,186,216,248,215,189,174,155,59,86,51,87,105,99,63,26,3060,137,149,151,69,55,15,27,95,188,222,236,239,210,216,197,71,134,68,101,164,172,97,47
uSF2,DE,451,01,0000446,4540,2206,178,181,173,86,49,22,29,94,100,162,219,194,203,178,119,29,27,31,25,37,30,20,20,2334,159,175,170,85,58,38,42,114,113,196,210,202,215,161,100,27,41,26,34,38,40,42,48
uSF2,DE,451,01,0000447,5054,2538,171,189,173,98,39,28,20,121,235,233,225,242,175,163,151,43,55,39,41,56,25,10,6,2516,138,163,155,87,32,32,29,148,231,204,246,220,201,194,146,50,50,29,44,54,33,19,11
uSF2,DE,451,01,0000448,4919,2381,186,215,208,111,60,18,13,37,91,159,206,258,257,188,141,40,44,22,33,40,29,14,11,2538,153,200,245,122,52,22,14,44,91,203,241,285,268,173,161,34,45,18,42,40,56,21,8
uSF2,DE,451,01,0000449,4887,2389,164,178,182,112,52,17,19,63,119,164,197,239,202,172,136,42,70,37,52,84,48,27,13,2498,160,149,164,109,50,18,27,54,131,187,223,242,224,190,150,51,73,37,58,85,59,39,18
uSF2,DE,451,01,0000450,2536,1242,82,51,69,43,24,24,26,40,122,101,82,113,88,100,62,28,31,29,31,44,30,13,9,1294,80,86,58,60,34,17,16,62,115,76,81,102,107,94,81,24,38,28,31,53,33,10,8
uSF2,DE,451,01,0000451,4157,2042,91,122,134,77,54,26,23,98,178,170,186,191,153,138,114,50,47,29,41,51,40,15,14,2115,112,122,138,71,54,35,34,98,144,146,203,182,141,158,141,47,60,33,35,41,53,35,32
uSF2,DE,451,01,0000452,2408,1203,70,78,88,60,32,19,21,59,103,95,100,76,120,89,63,21,34,10,24,24,11,4,2,1205,50,71,78,62,48,24,14,66,96,78,91,99,97,87,85,21,21,17,35,30,15,10,10
uSF2,DE,451,01,0000453,7255,3609,328,319,302,160,93,32,37,152,353,355,364,347,275,215,105,35,32,22,24,24,24,7,4,3646,268,313,237,140,81,52,44,191,386,384,403,343,270,212,109,31,27,19,32,39,31,21,13
uSF2,DE,451,01,0000454,3440,1662,110,101,99,52,38,29,29,107,182,183,140,125,96,95,58,26,43,30,43,37,19,17,3,1778,117,105,89,52,54,33,47,116,179,158,148,138,115,97,83,38,39,42,28,38,33,18,11
uSF2,DE,451,01,0000455,3498,1735,99,147,135,81,51,28,22,47,143,123,166,148,98,110,90,24,39,31,39,50,44,15,5,1763,89,118,107,63,34,24,20,70,139,116,169,158,114,139,100,21,43,32,55,63,56,19,14
uSF2,DE,451,01,0000456,1510,753,50,47,36,25,21,7,12,25,53,69,56,70,60,50,38,12,20,22,20,28,17,11,4,757,49,38,36,28,18,5,5,15,45,62,63,59,71,56,34,19,19,16,22,41,25,16,15
uSF2,DE,451,01,0000457,3598,1826,64,123,141,87,57,42,40,66,37,69,96,147,174,202,137,48,51,35,41,72,68,21,8,1772,57,103,124,86,24,26,47,57,34,71,119,136,177,182,129,41,46,37,58,92,56,40,30
uSF2,DE,451,01,0000458,2657,1323,40,28,56,37,39,56,128,192,119,63,60,77,68,86,71,21,37,14,26,35,39,21,10,1334,33,47,54,29,34,56,139,182,96,45,56,55,67,92,80,20,35,29,29,47,57,24,28
uSF2,DE,451,01,0000459,3022,1532,47,51,61,36,50,95,129,245,157,91,67,71,77,61,57,24,21,18,35,52,49,31,7,1490,53,53,57,32,60,100,152,155,100,68,66,73,73,73,71,22,29,27,39,59,59,52,17
uSF2,DE,451,01,0000460,3121,1540,83,121,104,59,31,19,11,80,147,141,107,148,115,95,87,30,36,18,32,39,23,13,1,1581,80,89,100,49,31,15,16,80,133,123,131,146,120,128,97,35,41,23,39,42,36,14,13
uSF2,DE,451,01,0000461,1593,653,4,9,6,5,21,83,144,175,59,33,17,15,20,9,8,4,3,4,7,9,9,3,6,940,6,1,6,3,31,147,291,171,40,13,15,9,14,13,1,2,11,1,8,37,40,45,35
uSF2,DE,451,01,0000462,2294,1095,18,20,15,8,45,191,232,280,69,43,26,19,31,27,15,1,16,4,7,7,15,5,1,1199,13,7,11,4,74,295,351,169,39,35,23,16,22,26,16,2,13,4,9,22,20,11,17
uSF2,DE,451,01,0000463,1560,765,62,56,64,31,13,3,8,30,48,61,60,59,47,45,44,14,28,18,19,30,15,10,0,795,45,51,57,37,12,8,13,15,55,62,59,66,42,50,80,9,31,13,28,33,20,6,3
uSF2,DE,451,01,0000464,3338,1633,77,108,129,74,47,19,25,64,125,95,143,155,135,95,69,21,39,17,42,51,52,29,22,1705,86,100,92,76,30,21,25,63,84,120,111,148,122,125,75,30,40,36,43,96,83,62,37
uSF2,DE,451,01,0000465,4418,2140,158,156,167,96,58,26,23,107,155,202,205,181,135,159,106,30,32,12,36,47,33,10,6,2278,155,139,144,94,53,26,22,96,191,182,233,200,158,180,106,26,43,28,37,52,50,42,21
uSF2,DE,451,01,0000466,1608,800,77,87,74,41,23,10,8,30,44,62,91,88,57,49,21,3,6,5,7,6,5,5,1,808,77,71,70,37,23,16,12,31,40,81,99,84,58,43,16,6,3,8,6,11,7,7,2
uSF2,DE,451,01,0000467,3004,1461,85,86,68,38,27,25,20,55,136,91,110,129,103,111,103,33,49,30,45,57,33,19,8,1543,77,87,56,47,34,9,17,70,110,100,122,108,117,128,108,33,52,36,50,75,62,33,12
uSF2,DE,451,01,0000468,5468,2736,287,261,185,103,39,17,19,69,236,341,295,249,192,166,122,30,36,24,20,21,11,13,0,2732,256,260,192,111,34,19,23,75,253,340,305,238,196,159,106,15,44,9,19,25,22,16,15
uSF2,DE,451,01,0000469,9677,4776,366,383,446,258,94,57,40,171,339,394,447,480,425,344,215,37,63,32,56,72,35,13,9,4901,363,407,381,206,132,48,63,213,378,425,484,514,427,325,184,30,60,29,57,80,44,27,24
uSF2,DE,451,01,0000470,4870,2470,248,227,177,77,45,26,24,121,240,261,275,230,136,143,87,17,25,19,22,36,17,6,11,2400,215,202,143,83,48,39,31,127,226,283,277,197,161,135,64,16,27,23,21,33,22,20,7
uSF2,DE,451,01,0000471,4602,2241,192,187,151,96,54,38,25,85,221,221,225,207,167,123,92,24,33,14,29,34,14,6,3,2361,165,188,160,98,52,46,29,108,199,204,226,253,197,157,87,36,36,15,26,46,16,11,6
uSF2,DE,451,01,0000472,5410,2623,226,217,163,91,51,31,31,144,320,332,288,223,168,146,67,19,22,7,17,26,20,9,5,2787,191,186,166,87,51,50,40,167,364,316,290,244,222,144,73,25,33,13,23,35,32,27,8
uSF2,DE,451,01,0000473,3883,1916,165,200,157,99,57,29,24,89,165,189,201,167,112,94,56,19,23,10,17,22,14,4,3,1967,168,182,159,102,54,35,30,68,171,200,207,169,131,102,70,23,27,4,16,19,20,6,4
uSF2,DE,451,01,0000474,3285,1600,91,106,107,53,34,13,16,77,160,162,159,138,119,106,96,18,23,18,28,28,20,20,8,1685,108,104,97,53,29,14,18,106,152,159,156,132,124,148,87,20,30,19,20,43,35,20,11
uSF2,DE,451,01,0000475,4345,2035,121,126,138,71,37,22,21,100,248,237,199,170,134,102,79,32,43,27,36,43,28,16,5,2310,154,141,107,66,42,29,26,148,235,207,197,189,156,126,116,36,62,44,30,61,68,40,30
uSF2,DE,451,01,0000476,3783,1884,97,125,131,80,50,28,29,67,113,156,171,185,117,104,127,61,45,31,47,58,34,23,5,1899,104,138,113,70,56,21,18,68,122,129,168,142,126,136,153,45,56,28,44,67,61,27,7
uSF2,DE,451,01,0000477,2988,1459,76,98,110,61,32,19,13,41,72,99,111,109,93,96,91,27,38,40,42,76,61,44,10,1529,76,94,87,45,18,18,17,49,69,96,99,113,121,108,97,34,55,34,51,98,77,47,26
uSF2,DE,451,01,0000478,3559,1739,103,105,133,80,36,27,12,55,127,125,141,168,139,120,85,28,35,26,41,45,49,38,21,1820,114,102,118,75,41,14,25,57,117,118,151,164,129,98,95,22,63,27,51,78,90,52,19
uSF2,DE,451,01,0000479,153,70,6,6,3,2,0,0,2,4,3,2,2,5,3,5,9,1,1,0,2,5,5,2,2,83,1,3,10,3,1,1,0,1,3,3,7,10,3,4,3,1,3,2,4,7,8,2,3
uSF2,DE,451,01,0000480,988,492,19,32,38,22,11,16,4,17,22,42,52,43,37,29,23,7,14,7,9,15,17,9,7,496,18,31,32,23,14,7,5,10,37,31,50,45,34,27,27,12,10,2,12,20,23,13,13
uSF2,DE,451,01,0000481,901,433,14,27,37,13,10,4,6,11,24,28,32,33,29,25,23,14,16,19,17,18,14,15,4,468,16,22,24,13,4,7,4,14,19,33,32,33,29,43,27,13,14,15,18,35,31,15,7
uSF2,DE,451,01,0000482,1760,874,47,73,85,43,24,8,13,38,54,50,84,74,62,39,33,15,19,11,19,21,32,17,13,886,43,64,55,33,23,15,7,35,47,62,73,88,62,51,42,15,21,18,22,44,41,16,9
uSF2,DE,451,01,0000483,2428,1174,55,92,88,52,24,15,20,35,81,77,95,95,86,68,48,17,23,21,44,69,41,19,9,1254,60,74,80,49,20,8,14,22,79,82,98,109,96,69,55,21,48,27,64,82,52,29,16
uSF2,DE,451,01,0000484,1274,611,34,43,29,19,21,5,4,19,36,37,53,37,43,50,44,21,28,21,19,16,19,10,3,663,37,37,40,25,14,6,6,25,34,37,46,44,53,63,55,30,21,13,25,28,14,8,2
uSF2,DE,451,01,0000485,1647,757,28,36,51,20,14,9,7,22,43,39,60,59,66,74,62,20,24,13,21,35,27,20,7,890,34,39,57,24,21,7,2,23,41,44,69,58,78,78,82,31,20,24,27,38,44,25,24
uSF2,DE,451,01,0000486,1966,951,56,44,55,41,19,13,7,38,78,61,75,84,87,77,48,12,27,20,24,39,24,13,9,1015,49,44,54,40,20,12,14,49,57,66,85,64,87,80,60,28,30,15,37,42,38,35,9
uSF2,DE,451,01,0000487,3504,1695,132,154,146,63,43,22,20,47,97,118,157,167,145,113,82,25,28,27,33,43,21,10,2,1809,114,137,140,78,44,16,19,68,107,152,177,162,145,118,91,32,41,16,37,50,34,22,9
uSF2,DE,451,01,0000488,4163,2113,204,191,147,84,52,26,11,61,165,240,233,169,151,142,90,18,27,14,18,33,17,15,5,2050,190,165,151,78,33,17,20,58,200,225,236,182,153,131,72,17,20,14,23,29,14,12,10
uSF2,DE,451,01,0000489,2851,1411,80,88,90,52,39,19,21,57,98,96,110,131,122,106,80,27,39,20,27,39,37,26,7,1440,67,85,98,48,36,20,24,56,85,87,108,142,124,110,78,25,40,24,34,47,55,33,14
uSF2,DE,451,01,0000490,2502,1283,105,100,104,50,26,26,17,47,68,119,129,123,82,98,74,14,25,11,17,18,17,8,5,1219,81,86,92,33,42,8,12,48,77,120,116,111,93,91,65,21,19,15,20,27,17,13,12
uSF2,DE,451,01,0000491,1883,971,74,73,71,40,27,11,6,28,80,81,84,74,74,69,50,17,23,24,22,22,13,2,6,912,43,57,75,33,16,6,8,21,83,67,74,82,78,58,57,19,32,12,20,29,18,10,14
uSF2,DE,451,01,0000492,5020,2520,233,274,217,107,50,26,25,51,123,217,306,254,188,142,100,34,46,16,28,36,30,8,9,2500,195,248,216,83,44,15,18,69,153,244,313,226,171,129,116,34,30,22,35,53,33,20,33
uSF2,DE,451,01,0000493,4032,2040,170,198,195,81,55,23,14,41,67,160,243,223,191,134,90,32,35,11,26,28,16,4,3,1992,146,227,153,101,40,19,18,39,82,162,253,210,161,132,81,19,30,21,27,32,15,15,9
uSF2,DE,451,01,0000494,3580,1831,146,175,186,108,40,12,15,37,42,115,188,208,169,156,72,34,26,21,17,31,20,8,5,1749,103,161,170,92,35,12,8,37,57,140,211,198,148,109,83,28,26,14,20,36,38,14,9
uSF2,DE,451,01,0000495,3509,1682,153,147,132,84,32,16,21,65,121,172,150,137,98,97,79,28,29,15,14,31,32,15,14,1827,146,151,139,59,37,23,17,61,181,154,153,152,120,117,70,37,35,24,18,49,40,27,17
uSF2,DE,451,01,0000496,2709,1368,68,114,128,74,35,12,12,24,51,98,137,136,125,94,70,37,27,23,26,37,19,15,6,1341,66,102,128,61,22,10,14,33,60,102,133,129,114,96,74,22,31,16,27,36,28,22,15
uSF2,DE,451,01,0000497,2138,1063,63,87,85,46,18,12,5,25,65,101,118,93,87,67,74,20,29,18,13,16,10,10,1,1075,81,92,95,35,17,4,12,29,72,104,132,83,65,79,68,27,17,9,19,13,7,7,8
uSF2,DE,451,01,0000498,2086,1087,53,76,92,62,30,11,9,29,44,61,88,123,78,78,77,32,26,14,29,41,19,9,6,999,51,63,75,32,16,8,4,16,49,62,94,113,88,83,71,20,29,15,18,35,33,18,6
uSF2,DE,451,01,0000499,1292,680,46,47,49,31,15,8,9,18,26,50,76,53,58,50,47,17,18,13,16,13,10,3,7,612,30,44,49,23,12,5,3,15,26,42,72,51,47,50,47,9,17,10,11,14,13,13,9
uSF2,DE,451,01,0000500,120805,58580,2938,3449,3686,2278,1108,475,457,1408,2629,3266,4260,4546,4334,4324,4009,1547,2303,1516,2461,3461,2304,1240,581,62225,2820,3259,3558,2018,1110,495,471,1437,2926,3498,4518,4674,4430,4589,4418,1807,2561,1656,2559,3755,2790,1721,1155
uSF2,DE,451,01,0000501,6888,3348,239,263,238,129,80,32,26,112,203,221,278,271,243,221,203,73,81,58,91,121,83,49,33,3540,204,250,294,162,79,37,35,123,212,231,292,255,246,228,205,65,93,62,87,154,96,68,62
uSF2,DE,451,01,0000502,732,345,24,26,18,12,5,4,2,10,19,22,23,23,21,28,28,5,9,9,14,24,11,3,5,387,19,21,22,12,9,3,3,13,22,22,24,17,22,39,20,9,13,10,15,23,14,23,12
uSF2,DE,451,01,0000503,732,345,24,26,18,12,5,4,2,10,19,22,23,23,21,28,28,5,9,9,14,24,11,3,5,387,19,21,22,12,9,3,3,13,22,22,24,17,22,39,20,9,13,10,15,23,14,23,12
uSF2,DE,451,01,0000504,615,298,29,38,28,6,5,5,3,14,22,27,22,22,13,17,14,5,4,1,3,4,9,4,3,317,25,22,30,14,7,2,7,13,28,29,18,17,17,13,8,6,4,3,6,20,16,4,8
uSF2,DE,451,01,0000505,612,297,29,38,28,6,5,5,3,14,22,27,22,22,13,16,14,5,4,1,3,4,9,4,3,315,25,22,29,14,7,2,7,13,28,29,18,16,17,13,8,6,4,3,6,20,16,4,8
uSF2,DE,451,01,0000506,5541,2705,186,199,192,111,70,23,21,88,162,172,233,226,209,176,161,63,68,48,74,93,63,42,25,2836,160,207,242,136,63,32,25,97,162,180,250,221,207,176,177,50,76,49,66,111,66,41,42
uSF2,DE,451,01,0000507,2592,1259,85,100,84,46,33,11,5,42,67,79,111,119,93,70,81,26,25,30,40,47,29,22,14,1333,76,98,114,69,30,13,9,45,77,87,119,102,93,77,85,24,35,23,28,53,34,23,19
uSF2,DE,451,01,0000508,2949,1446,101,99,108,65,37,12,16,46,95,93,122,107,116,106,80,37,43,18,34,46,34,20,11,1503,84,109,128,67,33,19,16,52,85,93,131,119,114,99,92,26,41,26,38,58,32,18,23
uSF2,DE,451,01,0000509,6370,3142,175,207,225,147,66,38,31,105,150,196,249,276,231,234,209,68,77,56,90,128,95,62,27,3228,157,196,188,126,87,30,26,94,151,213,261,262,258,228,192,76,86,67,91,162,128,83,66
uSF2,DE,451,01,0000510,1956,917,41,56,62,39,27,11,6,28,43,58,64,82,67,61,59,20,21,14,32,39,45,26,16,1039,47,46,61,36,30,8,12,38,48,50,74,74,76,70,59,25,29,22,36,60,59,45,34
uSF2,DE,451,01,0000511,1875,884,41,56,60,39,25,11,6,27,42,56,63,77,64,60,59,16,20,14,32,34,44,24,14,991,45,46,61,33,28,8,11,37,48,49,70,73,71,67,55,25,28,20,34,56,54,40,32
uSF2,DE,451,01,0000512,4414,2225,134,151,163,108,39,27,25,77,107,138,185,194,164,173,150,48,56,42,58,89,50,36,11,2189,110,150,127,90,57,22,14,56,103,163,187,188,182,158,133,51,57,45,55,102,69,38,32
uSF2,DE,451,01,0000513,2270,1129,57,78,76,52,19,12,12,39,55,70,86,115,88,86,85,23,27,23,33,42,25,21,5,1141,53,74,62,50,35,14,8,31,49,70,101,96,97,80,71,29,37,25,30,51,32,20,26
uSF2,DE,451,01,0000514,2144,1096,77,73,87,56,20,15,13,38,52,68,99,79,76,87,65,25,29,19,25,47,25,15,6,1048,57,76,65,40,22,8,6,25,54,93,86,92,85,78,62,22,20,20,25,51,37,18,6
uSF2,DE,451,01,0000515,16710,8168,538,585,584,363,185,85,83,241,472,546,647,731,631,558,491,148,222,153,220,287,221,122,55,8542,520,552,575,326,219,100,76,256,527,575,697,685,610,545,513,182,228,153,232,363,279,194,135
uSF2,DE,451,01,0000516,176,82,6,6,5,1,1,0,1,2,3,6,4,10,5,11,7,0,2,0,4,3,3,2,0,94,3,6,7,2,3,2,0,3,3,4,5,7,11,9,4,1,1,0,2,6,2,6,7
uSF2,DE,451,01,0000517,176,82,6,6,5,1,1,0,1,2,3,6,4,10,5,11,7,0,2,0,4,3,3,2,0,94,3,6,7,2,3,2,0,3,3,4,5,7,11,9,4,1,1,0,2,6,2,6,7
uSF2,DE,451,01,0000518,956,428,35,35,30,14,8,5,4,13,17,27,39,25,32,26,32,9,10,8,18,13,18,8,2,528,30,29,35,21,12,6,2,14,41,34,39,32,29,29,41,5,14,10,13,27,33,20,12
uSF2,DE,451,01,0000519,946,423,35,35,30,14,8,5,4,13,16,26,38,24,32,26,32,8,10,8,18,13,18,8,2,523,30,29,35,21,12,5,2,14,40,34,38,31,29,29,40,5,14,10,13,27,33,20,12
uSF2,DE,451,01,0000520,2013,954,90,77,79,40,21,15,11,37,72,51,68,65,73,62,51,8,11,27,21,24,23,20,8,1059,72,56,58,47,31,12,13,43,77,60,72,86,61,62,65,16,23,19,31,49,46,40,20
uSF2,DE,451,01,0000521,220,85,14,7,10,3,4,2,0,2,8,3,5,2,5,7,8,0,0,0,0,1,2,2,0,135,15,7,8,3,7,1,3,10,7,4,9,11,4,7,6,0,3,4,0,9,6,8,3
uSF2,DE,451,01,0000522,1793,869,76,70,69,37,17,13,11,35,64,48,63,63,68,55,43,8,11,27,21,23,21,18,8,924,57,49,50,44,24,11,10,33,70,56,63,75,57,55,59,16,20,15,31,40,40,32,17
uSF2,DE,451,01,0000523,13565,6704,407,467,470,308,155,65,67,189,380,462,536,631,521,459,401,131,199,118,177,247,177,92,45,6861,415,461,475,256,173,80,61,196,406,477,581,560,509,445,403,160,190,124,186,281,198,128,96
uSF2,DE,451,01,0000524,3109,1560,105,107,102,78,40,15,19,43,91,97,118,155,128,112,82,31,48,28,44,51,44,14,8,1549,103,106,123,58,38,14,7,43,95,126,121,127,117,88,88,33,47,37,40,59,38,21,20
uSF2,DE,451,01,0000525,4401,2143,104,142,161,101,60,10,16,58,120,163,178,208,182,141,142,44,54,42,42,79,63,22,11,2258,135,162,163,97,56,33,26,58,131,150,213,184,157,148,136,49,53,34,62,85,62,33,31
uSF2,DE,451,01,0000526,3079,1510,101,117,104,59,26,25,13,55,94,110,117,133,105,96,82,27,50,22,43,57,37,22,15,1569,98,92,107,42,44,22,18,54,100,109,135,121,103,98,88,44,50,27,43,78,49,26,21
uSF2,DE,451,01,0000527,852,421,23,15,24,23,6,5,6,14,21,18,28,35,31,25,29,11,16,7,24,27,17,13,3,431,16,20,21,14,10,0,2,15,18,22,26,31,39,28,29,13,12,16,21,25,25,19,9
uSF2,DE,451,01,0000528,2124,1070,74,86,79,47,23,10,13,19,54,74,95,100,75,85,66,18,31,19,24,33,16,21,8,1054,63,81,61,45,25,11,8,26,62,70,86,97,93,83,62,21,28,10,20,34,24,29,15
uSF2,DE,451,01,0000529,19072,9155,357,354,450,288,114,55,46,151,308,448,593,641,741,731,697,319,464,291,496,712,515,264,120,9917,333,360,387,241,104,50,45,185,368,431,620,696,696,797,872,328,536,351,504,766,628,389,230
uSF2,DE,451,01,0000530,270,141,3,1,0,2,2,0,1,7,13,6,14,9,17,7,13,3,7,8,5,8,10,2,3,129,5,1,2,0,0,1,3,0,9,6,2,9,10,6,14,6,10,5,6,11,9,9,5
uSF2,DE,451,01,0000531,270,141,3,1,0,2,2,0,1,7,13,6,14,9,17,7,13,3,7,8,5,8,10,2,3,129,5,1,2,0,0,1,3,0,9,6,2,9,10,6,14,6,10,5,6,11,9,9,5
uSF2,DE,451,01,0000532,134,59,1,2,1,2,0,0,0,1,0,1,0,5,5,4,4,5,3,3,3,5,9,5,0,75,3,1,2,2,1,0,1,0,2,1,2,3,4,2,9,2,6,5,1,14,5,6,3
uSF2,DE,451,01,0000533,134,59,1,2,1,2,0,0,0,1,0,1,0,5,5,4,4,5,3,3,3,5,9,5,0,75,3,1,2,2,1,0,1,0,2,1,2,3,4,2,9,2,6,5,1,14,5,6,3
uSF2,DE,451,01,0000534,2301,1065,30,29,48,30,13,3,2,17,38,40,56,61,105,84,100,40,61,34,68,89,66,33,18,1236,28,34,50,36,14,3,2,13,32,47,73,72,96,104,131,59,60,55,73,101,75,54,24
uSF2,DE,451,01,0000535,2301,1065,30,29,48,30,13,3,2,17,38,40,56,61,105,84,100,40,61,34,68,89,66,33,18,1236,28,34,50,36,14,3,2,13,32,47,73,72,96,104,131,59,60,55,73,101,75,54,24
uSF2,DE,451,01,0000536,1414,681,17,12,24,8,4,3,5,12,27,31,41,41,75,65,56,18,28,20,32,57,55,28,22,733,10,6,15,12,3,2,1,21,21,31,34,34,53,70,62,20,40,22,36,69,70,61,40
uSF2,DE,451,01,0000537,1414,681,17,12,24,8,4,3,5,12,27,31,41,41,75,65,56,18,28,20,32,57,55,28,22,733,10,6,15,12,3,2,1,21,21,31,34,34,53,70,62,20,40,22,36,69,70,61,40
uSF2,DE,451,01,0000538,14953,7209,306,310,377,246,95,49,38,114,230,370,482,525,539,571,524,253,365,226,388,553,375,196,77,7744,287,318,318,191,86,44,38,151,304,346,509,578,533,615,656,241,420,264,388,571,469,259,158
uSF2,DE,451,01,0000539,2054,943,33,34,55,36,15,3,8,9,39,42,64,76,82,86,70,31,41,32,30,72,44,30,11,1111,29,42,44,38,14,5,6,26,55,37,63,90,101,81,76,29,43,34,42,86,84,55,31
uSF2,DE,451,01,0000540,4646,2200,96,105,135,82,28,23,11,31,58,113,171,139,136,145,122,51,113,72,153,202,125,67,22,2446,99,115,111,58,30,11,13,39,88,118,171,188,152,176,178,74,152,91,137,194,138,65,48
uSF2,DE,451,01,0000541,4936,2425,107,88,100,69,30,14,10,38,59,123,140,176,187,209,204,101,135,83,143,192,136,58,23,2511,97,87,85,53,23,14,7,45,92,110,167,160,170,215,266,86,144,94,144,187,147,66,52
uSF2,DE,451,01,0000542,2476,1212,60,74,70,52,20,8,8,25,54,70,81,97,98,90,83,52,49,30,41,67,48,26,9,1264,51,64,65,36,16,13,10,32,52,60,84,111,80,99,95,40,56,29,51,79,69,52,20
uSF2,DE,451,01,0000543,841,429,10,9,17,7,2,1,1,11,20,22,26,37,36,41,45,18,27,9,21,20,22,15,12,412,11,10,13,6,3,1,2,9,17,21,24,29,30,44,41,12,25,16,14,25,31,21,7
uSF2,DE,451,01,0000544,12283,6001,315,406,462,297,144,53,54,140,292,355,506,542,462,463,368,122,166,106,170,221,194,89,74,6282,307,429,444,242,114,56,60,157,339,354,511,528,470,491,341,161,179,124,178,306,223,154,114
uSF2,DE,451,01,0000545,177,81,3,5,7,4,5,0,1,1,6,4,3,9,7,2,8,1,2,2,1,3,4,0,3,96,6,8,6,3,4,0,2,2,3,5,8,6,11,8,5,0,1,1,6,3,6,2,0
uSF2,DE,451,01,0000546,177,81,3,5,7,4,5,0,1,1,6,4,3,9,7,2,8,1,2,2,1,3,4,0,3,96,6,8,6,3,4,0,2,2,3,5,8,6,11,8,5,0,1,1,6,3,6,2,0
uSF2,DE,451,01,0000547,2873,1375,81,98,105,69,32,14,10,43,70,98,105,115,106,90,70,23,31,22,32,50,51,26,34,1498,66,105,94,65,28,21,28,39,98,78,106,123,100,108,63,22,36,32,44,76,72,48,46
uSF2,DE,451,01,0000548,99,48,7,3,5,2,2,0,1,1,2,3,2,4,3,4,1,0,1,0,0,2,2,1,2,51,3,6,3,2,1,0,1,1,3,4,3,4,1,4,1,0,1,1,1,3,4,2,2
uSF2,DE,451,01,0000549,2774,1327,74,95,100,67,30,14,9,42,68,95,103,111,103,86,69,23,30,22,32,48,49,25,32,1447,63,99,91,63,27,21,27,38,95,74,103,119,99,104,62,22,35,31,43,73,68,46,44
uSF2,DE,451,01,0000550,197,92,3,1,0,1,0,1,0,1,0,2,4,10,7,9,16,7,8,7,4,4,5,1,1,105,0,1,2,0,1,0,0,0,3,5,4,6,10,6,19,6,10,7,4,7,3,8,3
uSF2,DE,451,01,0000551,197,92,3,1,0,1,0,1,0,1,0,2,4,10,7,9,16,7,8,7,4,4,5,1,1,105,0,1,2,0,1,0,0,0,3,5,4,6,10,6,19,6,10,7,4,7,3,8,3
uSF2,DE,451,01,0000552,9036,4453,228,302,350,223,107,38,43,95,216,251,394,408,342,362,274,91,125,75,133,164,134,62,36,4583,235,315,342,174,81,35,30,116,235,266,393,393,349,369,254,133,132,84,124,220,142,96,65
uSF2,DE,451,01,0000553,2825,1372,83,92,106,68,41,18,12,27,65,82,112,123,110,103,77,28,41,20,39,53,41,19,12,1453,72,93,115,52,29,11,6,45,76,72,118,135,100,121,87,37,44,20,35,77,44,35,29
uSF2,DE,451,01,0000554,2800,1377,75,96,115,73,24,9,13,28,60,82,120,137,102,114,87,25,42,26,43,41,34,20,11,1423,75,113,111,61,24,11,10,31,65,95,124,114,116,96,80,39,34,34,44,57,46,22,21
uSF2,DE,451,01,0000555,1937,976,36,61,64,48,20,5,9,19,50,43,67,83,77,93,71,26,29,17,29,51,50,18,10,961,45,50,56,34,15,3,4,18,50,51,77,75,77,108,57,38,29,17,24,55,41,27,10
uSF2,DE,451,01,0000556,1474,728,34,53,65,34,22,6,9,21,41,44,95,65,53,52,39,12,13,12,22,19,9,5,3,746,43,59,60,27,13,10,10,22,44,48,74,69,56,44,30,19,25,13,21,31,11,12,5
uSF2,DE,451,01,0000557,15352,7376,317,416,394,256,119,39,45,161,300,358,491,490,479,506,525,207,366,265,410,620,363,173,76,7976,298,352,413,221,132,58,62,152,350,417,564,537,532,578,597,282,452,255,430,579,384,203,128
uSF2,DE,451,01,0000558,1599,772,20,21,30,18,7,5,3,12,20,13,27,41,34,36,65,27,63,37,62,112,67,31,21,827,19,14,24,11,9,2,3,9,17,25,28,43,32,61,75,38,87,38,54,109,69,40,20
uSF2,DE,451,01,0000559,1599,772,20,21,30,18,7,5,3,12,20,13,27,41,34,36,65,27,63,37,62,112,67,31,21,827,19,14,24,11,9,2,3,9,17,25,28,43,32,61,75,38,87,38,54,109,69,40,20
uSF2,DE,451,01,0000560,1596,688,32,31,30,23,8,2,5,26,37,46,56,47,49,42,40,19,23,22,37,42,40,24,7,908,49,42,46,15,11,4,6,28,52,39,57,57,62,48,70,18,31,24,43,81,62,28,35
uSF2,DE,451,01,0000561,1596,688,32,31,30,23,8,2,5,26,37,46,56,47,49,42,40,19,23,22,37,42,40,24,7,908,49,42,46,15,11,4,6,28,52,39,57,57,62,48,70,18,31,24,43,81,62,28,35
uSF2,DE,451,01,0000562,12157,5916,265,364,334,215,104,32,37,123,243,299,408,402,396,428,420,161,280,206,311,466,256,118,48,6241,230,296,343,195,112,52,53,115,281,353,479,437,438,469,452,226,334,193,333,389,253,135,73
uSF2,DE,451,01,0000563,2869,1423,97,110,88,60,30,13,15,45,99,96,123,127,96,99,95,16,31,29,45,65,25,14,5,1446,82,87,95,49,38,18,19,47,87,108,145,103,127,104,91,36,43,31,38,46,22,19,11
uSF2,DE,451,01,0000564,1049,489,22,40,32,27,17,3,3,14,16,28,35,43,42,43,30,4,13,11,18,19,16,7,6,560,24,33,40,34,13,4,2,6,37,32,49,55,35,49,22,13,25,14,12,30,14,9,8
uSF2,DE,451,01,0000565,1722,854,27,63,60,42,16,6,5,12,29,41,68,77,68,59,53,17,30,27,37,50,37,18,12,868,35,46,57,31,15,7,9,9,35,52,82,86,65,48,59,24,37,20,37,49,38,18,9
uSF2,DE,451,01,0000566,6517,3150,119,151,154,86,41,10,14,52,99,134,182,155,190,227,242,124,206,139,211,332,178,79,25,3367,89,130,151,81,46,23,23,53,122,161,203,193,211,268,280,153,229,128,246,264,179,89,45
uSF2,DE,451,01,0000567,8424,4018,199,247,247,159,77,43,28,101,178,236,286,323,296,314,270,83,149,90,175,247,146,87,37,4406,222,233,253,150,76,29,26,102,229,256,321,379,310,324,280,127,156,112,179,262,189,108,83
uSF2,DE,451,01,0000568,1079,461,30,27,29,15,7,7,8,18,29,30,34,37,32,44,18,6,13,4,16,21,18,7,11,618,37,28,28,13,14,6,6,23,44,30,46,46,39,46,32,10,18,12,20,37,40,28,15
uSF2,DE,451,01,0000569,842,349,25,24,23,11,5,4,8,17,24,24,26,26,24,28,13,4,11,3,5,16,14,5,9,493,34,21,22,8,10,5,6,20,36,26,34,36,31,31,25,9,13,9,15,32,33,23,14
uSF2,DE,451,01,0000570,219,102,5,2,5,3,0,3,0,1,5,5,8,10,7,16,5,2,1,1,11,5,3,2,2,117,3,6,6,5,4,1,0,2,7,2,12,10,8,14,7,1,5,3,5,3,7,5,1
uSF2,DE,451,01,0000571,7345,3557,169,220,218,144,70,36,20,83,149,206,252,286,264,270,252,77,136,86,159,226,128,80,26,3788,185,205,225,137,62,23,20,79,185,226,275,333,271,278,248,117,138,100,159,225,149,80,68
uSF2,DE,451,01,0000572,1126,559,36,47,37,20,13,3,3,16,29,29,49,52,36,39,33,10,16,9,29,23,20,8,2,567,27,31,42,22,10,4,2,15,31,37,53,48,42,33,37,17,29,10,18,27,18,7,7
uSF2,DE,451,01,0000573,2247,1087,47,76,75,49,20,14,7,23,57,67,86,92,101,85,75,24,33,18,38,44,31,18,7,1160,52,79,79,54,22,7,6,23,53,79,85,122,85,83,73,33,26,22,41,52,39,22,23
uSF2,DE,451,01,0000574,3972,1911,86,97,106,75,37,19,10,44,63,110,117,142,127,146,144,43,87,59,92,159,77,54,17,2061,106,95,104,61,30,12,12,41,101,110,137,163,144,162,138,67,83,68,100,146,92,51,38
uSF2,DE,451,01,0000575,14973,7216,398,509,545,333,169,83,75,187,372,437,542,582,576,547,441,153,211,125,177,287,230,163,74,7757,395,444,538,296,180,70,78,199,390,507,616,638,559,569,453,173,209,128,242,362,316,247,148
uSF2,DE,451,01,0000576,640,293,20,26,25,15,6,3,2,10,21,27,22,30,20,17,11,6,12,3,3,10,3,1,0,347,14,17,35,17,17,6,4,8,18,22,36,35,24,26,18,5,8,3,7,15,1,7,4
uSF2,DE,451,01,0000577,640,293,20,26,25,15,6,3,2,10,21,27,22,30,20,17,11,6,12,3,3,10,3,1,0,347,14,17,35,17,17,6,4,8,18,22,36,35,24,26,18,5,8,3,7,15,1,7,4
uSF2,DE,451,01,0000578,3727,1680,86,106,102,74,46,18,18,62,107,92,127,99,102,138,72,34,48,38,47,84,79,64,37,2047,102,87,110,51,44,19,26,66,113,127,109,118,150,131,95,49,68,42,77,136,131,127,69
uSF2,DE,451,01,0000579,136,49,5,6,8,1,4,1,1,1,1,1,2,2,6,3,0,0,0,0,2,4,1,0,0,87,9,10,4,0,1,2,0,7,3,15,4,2,6,2,4,0,0,1,1,8,4,1,3
uSF2,DE,451,01,0000580,3591,1631,81,100,94,73,42,17,17,61,106,91,125,97,96,135,72,34,48,38,45,80,78,64,37,1960,93,77,106,51,43,17,26,59,110,112,105,116,144,129,91,49,68,41,76,128,127,126,66
uSF2,DE,451,01,0000581,10606,5243,292,377,418,244,117,62,55,115,244,318,393,453,454,392,358,113,151,84,127,193,148,98,37,5363,279,340,393,228,119,45,48,125,259,358,471,485,385,412,340,119,133,83,158,211,184,113,75
uSF2,DE,451,01,0000582,2550,1307,75,112,101,56,22,14,11,29,53,87,107,112,112,101,92,30,37,17,29,53,32,18,7,1243,66,86,73,42,26,9,12,29,57,103,119,108,83,109,91,28,27,21,38,39,38,24,15
uSF2,DE,451,01,0000583,1555,753,28,48,66,41,17,11,8,18,21,36,41,65,69,65,51,18,19,18,21,32,37,17,6,802,30,34,71,37,17,5,4,16,33,43,62,81,60,53,48,18,31,10,24,44,37,24,20
uSF2,DE,451,01,0000584,1430,679,44,43,48,32,20,10,7,11,36,50,45,55,49,70,48,11,8,10,13,29,17,12,11,751,37,45,64,41,20,7,8,22,33,53,67,52,61,63,36,7,14,12,24,36,25,15,9
uSF2,DE,451,01,0000585,5071,2504,145,174,203,115,58,27,29,57,134,145,200,221,224,156,167,54,87,39,64,79,62,51,13,2567,146,175,185,108,56,24,24,58,136,159,223,244,181,187,165,66,61,40,72,92,84,50,31
uSF2,DE,451,01,0000586,20733,10156,400,462,541,306,154,47,69,210,354,469,668,690,675,750,805,374,567,372,632,838,457,231,85,10577,384,443,466,254,119,65,63,169,360,514,636,694,749,829,965,413,622,404,616,801,547,275,189
uSF2,DE,451,01,0000587,876,411,5,8,18,11,4,1,1,7,10,14,9,29,27,27,36,10,24,17,39,57,27,22,8,465,8,18,11,8,2,2,3,7,10,16,14,32,28,33,41,18,32,25,35,55,41,14,12
uSF2,DE,451,01,0000588,876,411,5,8,18,11,4,1,1,7,10,14,9,29,27,27,36,10,24,17,39,57,27,22,8,465,8,18,11,8,2,2,3,7,10,16,14,32,28,33,41,18,32,25,35,55,41,14,12
uSF2,DE,451,01,0000589,470,218,16,11,11,13,3,1,3,13,10,20,17,14,16,20,15,4,5,6,2,11,2,5,0,252,12,11,17,10,3,3,1,7,18,17,16,18,12,31,14,3,5,3,9,13,13,12,4
uSF2,DE,451,01,0000590,470,218,16,11,11,13,3,1,3,13,10,20,17,14,16,20,15,4,5,6,2,11,2,5,0,252,12,11,17,10,3,3,1,7,18,17,16,18,12,31,14,3,5,3,9,13,13,12,4
uSF2,DE,451,01,0000591,333,157,0,2,7,2,1,0,0,0,5,3,3,6,13,13,19,4,17,7,10,22,15,6,2,176,2,3,1,2,1,4,1,2,3,4,6,6,11,16,22,9,10,5,16,24,13,12,3
uSF2,DE,451,01,0000592,333,157,0,2,7,2,1,0,0,0,5,3,3,6,13,13,19,4,17,7,10,22,15,6,2,176,2,3,1,2,1,4,1,2,3,4,6,6,11,16,22,9,10,5,16,24,13,12,3
uSF2,DE,451,01,0000593,295,139,12,11,11,3,3,1,2,4,8,8,12,7,7,14,7,1,2,2,4,14,2,4,0,156,5,8,17,4,2,2,2,4,8,11,11,13,11,6,5,3,3,2,6,14,5,10,4
uSF2,DE,451,01,0000594,295,139,12,11,11,3,3,1,2,4,8,8,12,7,7,14,7,1,2,2,4,14,2,4,0,156,5,8,17,4,2,2,2,4,8,11,11,13,11,6,5,3,3,2,6,14,5,10,4
uSF2,DE,451,01,0000595,250,125,9,4,7,2,6,1,2,2,11,9,12,8,7,10,6,5,3,2,4,7,8,0,0,125,6,8,3,5,3,1,2,2,7,9,7,11,9,8,10,3,3,3,1,11,8,2,3
uSF2,DE,451,01,0000596,241,119,8,3,7,2,6,1,2,2,11,9,10,7,7,10,6,4,3,2,4,7,8,0,0,122,6,8,3,5,3,1,2,2,7,8,6,11,9,8,10,3,3,3,1,10,8,2,3
uSF2,DE,451,01,0000597,972,469,27,21,28,12,10,4,2,14,12,24,34,28,32,20,35,12,31,19,28,33,28,11,4,503,16,21,18,7,5,1,2,9,18,22,40,30,39,26,52,18,25,23,37,44,23,14,13
uSF2,DE,451,01,0000598,972,469,27,21,28,12,10,4,2,14,12,24,34,28,32,20,35,12,31,19,28,33,28,11,4,503,16,21,18,7,5,1,2,9,18,22,40,30,39,26,52,18,25,23,37,44,23,14,13
uSF2,DE,451,01,0000599,1023,517,38,38,29,17,8,3,2,16,28,25,30,49,34,39,37,15,12,15,20,18,24,11,9,506,25,21,22,13,7,1,2,8,28,31,41,26,38,40,33,14,19,14,25,26,25,27,20
uSF2,DE,451,01,0000600,1023,517,38,38,29,17,8,3,2,16,28,25,30,49,34,39,37,15,12,15,20,18,24,11,9,506,25,21,22,13,7,1,2,8,28,31,41,26,38,40,33,14,19,14,25,26,25,27,20
uSF2,DE,451,01,0000601,488,238,2,3,3,4,2,1,0,2,5,5,11,16,14,16,30,14,22,17,20,27,13,9,2,250,3,13,10,4,1,2,1,1,3,7,8,13,20,16,30,11,22,13,25,18,12,12,5
uSF2,DE,451,01,0000602,488,238,2,3,3,4,2,1,0,2,5,5,11,16,14,16,30,14,22,17,20,27,13,9,2,250,3,13,10,4,1,2,1,1,3,7,8,13,20,16,30,11,22,13,25,18,12,12,5
uSF2,DE,451,01,0000603,16026,7882,291,364,427,242,117,35,57,152,265,361,540,533,525,591,620,309,451,287,505,649,338,163,60,8144,307,340,367,201,95,49,49,129,265,397,493,545,581,653,758,334,503,316,462,596,407,172,125
uSF2,DE,451,01,0000604,2359,1153,30,41,43,17,9,5,3,11,27,45,51,67,69,97,116,70,92,59,95,112,60,27,7,1206,31,33,49,18,6,4,7,13,22,41,55,64,83,117,146,78,80,55,86,94,72,29,23
uSF2,DE,451,01,0000605,3756,1813,67,72,101,50,27,5,12,27,53,84,124,118,111,132,144,77,112,72,127,151,91,39,17,1943,86,84,89,44,26,14,9,24,68,74,110,130,133,153,210,88,118,81,101,152,99,28,22
uSF2,DE,451,01,0000606,2166,1093,55,60,84,51,19,6,14,32,45,63,80,80,119,76,63,25,43,28,41,58,32,15,4,1073,57,62,60,37,19,7,8,23,45,72,84,88,82,76,62,23,46,22,54,59,51,16,20
uSF2,DE,451,01,0000607,1482,728,40,35,35,23,8,3,4,22,38,25,61,47,39,64,52,26,39,28,41,53,24,14,7,754,26,31,30,25,10,1,2,22,34,32,45,50,64,57,70,36,40,32,45,40,35,21,6
uSF2,DE,451,01,0000608,3463,1688,46,54,61,40,20,3,8,22,38,73,98,104,87,125,141,76,117,71,149,204,98,42,11,1775,44,50,63,23,10,10,8,15,47,77,83,95,115,156,159,70,162,97,133,186,90,50,32
uSF2,DE,451,01,0000609,669,334,14,31,31,16,5,2,1,9,15,13,29,31,27,25,23,8,4,5,9,12,13,4,7,335,19,22,16,10,5,1,2,9,11,36,32,28,23,30,19,4,8,6,7,21,14,6,6
uSF2,DE,451,01,0000610,2131,1073,39,71,72,45,29,11,15,29,49,58,97,86,73,72,81,27,44,24,43,59,20,22,7,1058,44,58,60,44,19,12,13,23,38,65,84,90,81,64,92,35,49,23,36,44,46,22,16
uSF2,DE,451,01,0000611,2924,1420,90,95,111,70,43,18,13,28,67,85,114,127,113,107,78,28,42,20,39,55,43,20,14,1504,75,99,118,54,30,11,7,46,79,76,121,139,101,125,88,37,45,21,36,80,48,37,31
uSF2,DE,451,01,0000612,5574,2704,149,191,215,140,54,23,22,70,128,177,223,248,205,200,156,48,72,48,75,89,83,45,43,2870,138,212,202,124,51,32,37,69,160,169,227,233,215,200,142,61,69,65,87,130,114,68,65
uSF2,DE,451,01,0000613,2134,1068,39,62,64,49,20,6,9,20,50,45,71,93,84,102,87,33,37,24,33,55,55,19,11,1066,45,51,58,34,16,3,4,18,53,56,81,81,87,114,76,44,39,24,28,62,44,35,13
uSF2,DE,451,01,0000614,1651,809,37,58,72,38,27,6,10,22,47,48,98,74,60,54,47,13,15,14,23,22,13,5,6,842,49,67,66,30,17,10,12,24,47,53,82,75,67,52,35,19,26,14,27,34,17,14,5
uSF2,DE,451,01,0000615,3936,1901,138,164,130,64,43,20,10,66,108,128,156,164,127,114,123,36,38,40,57,75,49,29,22,2035,120,141,165,95,46,18,19,71,127,138,161,135,132,129,113,39,52,36,49,96,64,50,39
uSF2,DE,451,01,0000616,2952,1447,101,99,108,65,37,12,16,46,95,93,122,107,116,107,80,37,43,18,34,46,34,20,11,1505,84,109,129,67,33,19,16,52,85,93,131,120,114,99,92,26,41,26,38,58,32,18,23
uSF2,DE,451,01,0000617,2686,1356,80,118,109,57,26,15,12,30,54,88,109,114,118,104,92,30,37,17,31,57,33,18,7,1330,75,96,77,42,27,11,12,36,60,118,123,110,89,111,95,28,27,22,39,47,42,25,18
uSF2,DE,451,01,0000618,5146,2384,109,148,160,114,59,28,25,79,127,127,166,162,165,200,123,52,67,56,66,112,115,81,43,2762,123,111,177,88,60,22,30,75,143,155,167,197,204,182,139,67,99,51,100,172,164,150,86
uSF2,DE,451,01,0000619,2070,972,64,69,73,47,26,13,9,21,57,77,67,85,69,87,59,17,20,13,16,39,20,13,11,1098,51,62,99,58,37,13,12,30,51,75,103,87,85,89,54,12,22,15,31,51,26,22,13
uSF2,DE,451,01,0000620,5071,2504,145,174,203,115,58,27,29,57,134,145,200,221,224,156,167,54,87,39,64,79,62,51,13,2567,146,175,185,108,56,24,24,58,136,159,223,244,181,187,165,66,61,40,72,92,84,50,31
uSF2,DE,451,01,0000621,2351,1162,57,78,78,52,21,12,12,40,56,72,87,120,91,87,85,27,28,23,33,47,26,23,7,1189,55,74,62,53,37,14,9,32,49,71,105,97,102,83,75,29,38,27,32,55,37,25,28
uSF2,DE,451,01,0000622,4019,1980,118,129,147,95,45,26,19,65,94,124,162,156,140,147,124,41,49,33,57,81,69,39,20,2039,102,122,126,73,50,16,17,62,102,142,156,165,156,145,117,47,48,40,59,107,91,58,38
uSF2,DE,451,01,0000623,2869,1423,97,110,88,60,30,13,15,45,99,96,123,127,96,99,95,16,31,29,45,65,25,14,5,1446,82,87,95,49,38,18,19,47,87,108,145,103,127,104,91,36,43,31,38,46,22,19,11
uSF2,DE,451,01,0000624,2645,1177,54,71,62,50,25,5,8,40,53,74,91,90,91,85,70,23,36,33,55,61,56,31,13,1468,73,75,86,49,24,8,8,34,89,71,106,112,97,97,92,31,56,38,55,111,76,37,43
uSF2,DE,451,01,0000625,1722,854,27,63,60,42,16,6,5,12,29,41,68,77,68,59,53,17,30,27,37,50,37,18,12,868,35,46,57,31,15,7,9,9,35,52,82,86,65,48,59,24,37,20,37,49,38,18,9
uSF2,DE,451,01,0000626,1722,854,27,63,60,42,16,6,5,12,29,41,68,77,68,59,53,17,30,27,37,50,37,18,12,868,35,46,57,31,15,7,9,9,35,52,82,86,65,48,59,24,37,20,37,49,38,18,9
uSF2,DE,451,01,0000627,8116,3922,139,172,184,104,48,15,17,64,119,147,209,196,224,263,307,151,269,176,273,444,245,110,46,4194,108,144,175,92,55,25,26,62,139,186,231,236,243,329,355,191,316,166,300,373,248,129,65
uSF2,DE,451,01,0000628,8116,3922,139,172,184,104,48,15,17,64,119,147,209,196,224,263,307,151,269,176,273,444,245,110,46,4194,108,144,175,92,55,25,26,62,139,186,231,236,243,329,355,191,316,166,300,373,248,129,65
uSF2,DE,451,01,0000629,1968,908,61,71,60,31,18,7,11,33,53,53,75,78,60,67,46,14,27,12,34,39,34,13,11,1060,61,52,64,30,20,9,8,35,67,63,87,84,73,64,62,26,42,19,33,59,51,30,21
uSF2,DE,451,01,0000630,2466,1189,52,78,80,52,20,17,7,24,62,72,94,102,108,101,80,26,34,19,49,49,34,20,9,1277,55,85,85,59,26,8,6,25,60,81,97,132,93,97,80,34,31,25,46,55,46,27,24
uSF2,DE,451,01,0000631,1381,664,27,48,57,30,12,11,3,14,33,35,56,56,68,52,37,9,18,8,24,28,20,14,4,717,37,51,55,33,13,5,5,18,32,50,56,76,49,51,43,19,10,15,28,29,26,9,7
uSF2,DE,451,01,0000632,3990,1921,86,98,107,76,39,19,10,44,63,111,117,143,128,146,144,43,88,59,92,159,78,54,17,2069,106,96,104,61,30,12,12,42,102,112,137,163,144,163,138,67,83,68,100,148,92,51,38
uSF2,DE,451,01,0000633,4355,2008,63,63,103,66,28,6,10,26,77,82,120,137,187,170,170,71,102,66,98,161,110,63,29,2347,57,76,94,74,28,8,8,39,87,84,136,162,197,185,207,88,103,89,115,187,159,109,55
uSF2,DE,451,01,0000634,4646,2200,96,105,135,82,28,23,11,31,58,113,171,139,136,145,122,51,113,72,153,202,125,67,22,2446,99,115,111,58,30,11,13,39,88,118,171,188,152,176,178,74,152,91,137,194,138,65,48
uSF2,DE,451,01,0000635,2708,1321,56,68,99,47,18,18,5,18,33,59,95,91,90,94,75,34,64,43,89,115,65,33,12,1387,53,67,78,42,21,4,7,25,40,70,102,113,90,107,89,44,94,45,81,106,60,30,19
uSF2,DE,451,01,0000636,4936,2425,107,88,100,69,30,14,10,38,59,123,140,176,187,209,204,101,135,83,143,192,136,58,23,2511,97,87,85,53,23,14,7,45,92,110,167,160,170,215,266,86,144,94,144,187,147,66,52
uSF2,DE,451,01,0000637,4936,2425,107,88,100,69,30,14,10,38,59,123,140,176,187,209,204,101,135,83,143,192,136,58,23,2511,97,87,85,53,23,14,7,45,92,110,167,160,170,215,266,86,144,94,144,187,147,66,52
uSF2,DE,451,01,0000638,2476,1212,60,74,70,52,20,8,8,25,54,70,81,97,98,90,83,52,49,30,41,67,48,26,9,1264,51,64,65,36,16,13,10,32,52,60,84,111,80,99,95,40,56,29,51,79,69,52,20
uSF2,DE,451,01,0000639,2659,1310,31,24,42,19,8,4,7,31,60,60,81,92,133,117,118,44,65,40,61,90,96,50,37,1349,29,18,32,20,7,4,7,30,49,59,62,75,97,122,126,40,81,48,57,119,115,97,55
uSF2,DE,451,01,0000640,538,271,5,6,12,3,1,1,1,8,12,17,17,21,22,25,32,11,18,7,15,11,13,7,6,267,6,7,8,6,2,1,2,5,14,15,14,21,19,31,27,5,18,12,9,10,16,15,4
uSF2,DE,451,01,0000641,4056,1959,37,54,71,34,16,7,4,20,47,67,74,118,123,153,201,98,155,100,164,218,115,64,19,2097,44,67,71,32,10,12,12,23,38,68,83,115,142,182,239,116,144,98,162,191,138,67,43
uSF2,DE,451,01,0000642,3765,1819,68,73,101,50,27,5,12,27,53,84,126,119,111,132,144,78,112,72,127,151,91,39,17,1946,86,84,89,44,26,14,9,24,68,75,111,130,133,153,210,88,118,81,101,153,99,28,22
uSF2,DE,451,01,0000643,2166,1093,55,60,84,51,19,6,14,32,45,63,80,80,119,76,63,25,43,28,41,58,32,15,4,1073,57,62,60,37,19,7,8,23,45,72,84,88,82,76,62,23,46,22,54,59,51,16,20
uSF2,DE,451,01,0000644,2695,1316,75,59,70,37,24,8,8,38,61,58,105,82,78,94,93,42,73,49,73,93,60,25,11,1379,48,60,51,37,18,3,6,33,59,62,91,91,112,91,132,57,68,58,83,94,66,37,22
uSF2,DE,451,01,0000645,3463,1688,46,54,61,40,20,3,8,22,38,73,98,104,87,125,141,76,117,71,149,204,98,42,11,1775,44,50,63,23,10,10,8,15,47,77,83,95,115,156,159,70,162,97,133,186,90,50,32
uSF2,DE,451,01,0000646,1692,851,52,69,60,33,13,5,3,25,43,38,59,80,61,64,60,23,16,20,29,30,37,15,16,841,44,43,38,23,12,2,4,17,39,67,73,54,61,70,52,18,27,20,32,47,39,33,26
uSF2,DE,451,01,0000647,2896,1430,67,93,94,61,35,13,20,46,67,86,126,107,96,106,103,32,51,32,49,84,24,31,7,1466,61,77,94,58,24,17,16,34,64,93,111,121,104,101,111,41,57,28,51,71,64,44,24
uSF2,DE,451,01,0000648,3109,1560,105,107,102,78,40,15,19,43,91,97,118,155,128,112,82,31,48,28,44,51,44,14,8,1549,103,106,123,58,38,14,7,43,95,126,121,127,117,88,88,33,47,37,40,59,38,21,20
uSF2,DE,451,01,0000649,4411,2148,104,142,161,101,60,10,16,58,121,164,179,209,182,141,142,45,54,42,42,79,63,22,11,2263,135,162,163,97,56,34,26,58,132,150,214,185,157,148,137,49,53,34,62,85,62,33,31
uSF2,DE,451,01,0000650,3475,1677,121,130,119,63,31,27,14,59,105,119,126,145,115,114,97,27,52,22,47,61,42,26,15,1798,116,105,122,47,54,25,21,67,110,117,149,139,118,114,98,45,54,31,45,93,57,40,31
uSF2,DE,451,01,0000651,2645,1290,99,85,93,60,23,18,17,49,85,66,91,98,99,80,72,19,27,34,45,50,38,31,11,1355,73,69,71,58,34,11,12,48,88,78,89,106,96,83,88,29,32,31,52,65,65,51,26
uSF2,DE,451,01,0000652,3070,1493,109,121,109,61,31,15,17,32,70,100,133,124,107,111,98,26,41,27,42,46,34,29,10,1577,93,110,96,66,37,16,10,40,102,104,124,128,122,112,102,26,42,20,33,61,57,49,27
uSF2,DE,451,01,0000653,440,216,9,10,15,10,3,1,1,4,3,11,9,20,29,26,13,3,6,3,8,14,8,8,2,224,4,14,8,6,2,1,0,2,7,15,12,25,25,24,18,8,7,6,6,4,13,5,12
uSF2,DE,451,01,0000654,440,216,9,10,15,10,3,1,1,4,3,11,9,20,29,26,13,3,6,3,8,14,8,8,2,224,4,14,8,6,2,1,0,2,7,15,12,25,25,24,18,8,7,6,6,4,13,5,12
uSF2,DE,451,01,0000655,440,216,9,10,15,10,3,1,1,4,3,11,9,20,29,26,13,3,6,3,8,14,8,8,2,224,4,14,8,6,2,1,0,2,7,15,12,25,25,24,18,8,7,6,6,4,13,5,12
uSF2,DE,451,01,0000656,214,99,3,6,7,1,2,0,0,3,6,9,2,10,8,11,11,2,4,3,5,2,2,1,1,115,7,10,5,4,3,0,1,2,9,5,7,9,16,7,14,6,0,2,1,2,3,1,1
uSF2,DE,451,01,0000657,214,99,3,6,7,1,2,0,0,3,6,9,2,10,8,11,11,2,4,3,5,2,2,1,1,115,7,10,5,4,3,0,1,2,9,5,7,9,16,7,14,6,0,2,1,2,3,1,1
uSF2,DE,451,01,0000658,214,99,3,6,7,1,2,0,0,3,6,9,2,10,8,11,11,2,4,3,5,2,2,1,1,115,7,10,5,4,3,0,1,2,9,5,7,9,16,7,14,6,0,2,1,2,3,1,1
uSF2,DE,451,01,0000659,265,123,2,3,11,6,3,0,0,1,7,7,11,8,9,16,9,5,4,3,7,5,4,1,1,142,2,6,6,3,1,1,0,1,9,10,7,10,23,12,17,1,4,1,5,7,7,4,5
uSF2,DE,451,01,0000660,265,123,2,3,11,6,3,0,0,1,7,7,11,8,9,16,9,5,4,3,7,5,4,1,1,142,2,6,6,3,1,1,0,1,9,10,7,10,23,12,17,1,4,1,5,7,7,4,5
uSF2,DE,451,01,0000661,259,120,2,3,11,6,3,0,0,1,7,6,11,8,8,16,9,5,3,3,7,5,4,1,1,139,1,6,6,3,1,1,0,1,9,10,7,9,23,12,16,1,4,1,5,7,7,4,5
uSF2,DE,451,01,0000662,11335,5508,476,529,432,235,149,78,58,200,440,537,571,485,369,305,228,60,75,50,67,91,44,22,7,5827,471,482,446,257,136,86,71,216,465,579,605,507,431,358,224,80,88,29,77,102,64,36,17
uSF2,DE,451,01,0000663,11335,5508,476,529,432,235,149,78,58,200,440,537,571,485,369,305,228,60,75,50,67,91,44,22,7,5827,471,482,446,257,136,86,71,216,465,579,605,507,431,358,224,80,88,29,77,102,64,36,17
uSF2,DE,451,01,0000664,2539,1187,103,102,77,43,24,20,13,54,131,131,130,103,78,61,45,9,18,9,9,16,6,4,1,1352,100,112,91,56,31,30,20,72,110,132,139,130,103,91,40,23,11,6,17,24,8,5,1
uSF2,DE,451,01,0000665,3558,1746,158,182,146,89,50,23,19,82,157,182,184,154,91,74,53,18,21,10,16,21,11,3,2,1812,160,167,139,96,47,32,27,65,169,189,189,150,116,93,63,21,26,3,16,18,17,5,4
uSF2,DE,451,01,0000666,3380,1638,129,149,141,60,42,22,20,45,95,115,156,159,135,107,79,25,26,27,33,42,20,9,2,1742,112,129,136,74,42,16,17,66,104,149,169,152,137,114,90,31,41,15,37,49,33,20,9
uSF2,DE,451,01,0000667,1818,921,85,96,68,42,32,13,6,19,57,109,101,67,63,59,49,7,9,4,8,12,7,6,2,897,96,71,80,29,16,8,7,13,81,109,102,75,75,57,29,4,9,5,7,11,5,5,3
uSF2,DE,451,01,0000668,1191,571,31,42,43,23,10,7,2,10,43,46,63,53,48,32,25,5,12,8,11,17,22,11,7,620,40,36,38,20,7,6,4,15,47,43,59,60,61,32,22,2,16,5,14,25,30,19,19
uSF2,DE,451,01,0000669,1191,571,31,42,43,23,10,7,2,10,43,46,63,53,48,32,25,5,12,8,11,17,22,11,7,620,40,36,38,20,7,6,4,15,47,43,59,60,61,32,22,2,16,5,14,25,30,19,19
uSF2,DE,451,01,0000670,1191,571,31,42,43,23,10,7,2,10,43,46,63,53,48,32,25,5,12,8,11,17,22,11,7,620,40,36,38,20,7,6,4,15,47,43,59,60,61,32,22,2,16,5,14,25,30,19,19
uSF2,DE,451,01,0000671,876,411,5,8,18,11,4,1,1,7,10,14,9,29,27,27,36,10,24,17,39,57,27,22,8,465,8,18,11,8,2,2,3,7,10,16,14,32,28,33,41,18,32,25,35,55,41,14,12
uSF2,DE,451,01,0000672,876,411,5,8,18,11,4,1,1,7,10,14,9,29,27,27,36,10,24,17,39,57,27,22,8,465,8,18,11,8,2,2,3,7,10,16,14,32,28,33,41,18,32,25,35,55,41,14,12
uSF2,DE,451,01,0000673,876,411,5,8,18,11,4,1,1,7,10,14,9,29,27,27,36,10,24,17,39,57,27,22,8,465,8,18,11,8,2,2,3,7,10,16,14,32,28,33,41,18,32,25,35,55,41,14,12
uSF2,DE,451,01,0000674,176,82,6,6,5,1,1,0,1,2,3,6,4,10,5,11,7,0,2,0,4,3,3,2,0,94,3,6,7,2,3,2,0,3,3,4,5,7,11,9,4,1,1,0,2,6,2,6,7
uSF2,DE,451,01,0000675,176,82,6,6,5,1,1,0,1,2,3,6,4,10,5,11,7,0,2,0,4,3,3,2,0,94,3,6,7,2,3,2,0,3,3,4,5,7,11,9,4,1,1,0,2,6,2,6,7
uSF2,DE,451,01,0000676,176,82,6,6,5,1,1,0,1,2,3,6,4,10,5,11,7,0,2,0,4,3,3,2,0,94,3,6,7,2,3,2,0,3,3,4,5,7,11,9,4,1,1,0,2,6,2,6,7
uSF2,DE,451,01,0000677,640,293,20,26,25,15,6,3,2,10,21,27,22,30,20,17,11,6,12,3,3,10,3,1,0,347,14,17,35,17,17,6,4,8,18,22,36,35,24,26,18,5,8,3,7,15,1,7,4
uSF2,DE,451,01,0000678,640,293,20,26,25,15,6,3,2,10,21,27,22,30,20,17,11,6,12,3,3,10,3,1,0,347,14,17,35,17,17,6,4,8,18,22,36,35,24,26,18,5,8,3,7,15,1,7,4
uSF2,DE,451,01,0000679,640,293,20,26,25,15,6,3,2,10,21,27,22,30,20,17,11,6,12,3,3,10,3,1,0,347,14,17,35,17,17,6,4,8,18,22,36,35,24,26,18,5,8,3,7,15,1,7,4
uSF2,DE,451,01,0000680,279,137,5,6,14,2,1,0,3,7,8,12,11,16,9,10,7,1,4,5,6,3,4,2,1,142,6,5,8,3,1,2,1,6,7,20,7,8,5,14,8,8,5,2,5,3,6,9,3
uSF2,DE,451,01,0000681,279,137,5,6,14,2,1,0,3,7,8,12,11,16,9,10,7,1,4,5,6,3,4,2,1,142,6,5,8,3,1,2,1,6,7,20,7,8,5,14,8,8,5,2,5,3,6,9,3
uSF2,DE,451,01,0000682,279,137,5,6,14,2,1,0,3,7,8,12,11,16,9,10,7,1,4,5,6,3,4,2,1,142,6,5,8,3,1,2,1,6,7,20,7,8,5,14,8,8,5,2,5,3,6,9,3
uSF2,DE,451,01,0000683,732,345,24,26,18,12,5,4,2,10,19,22,23,23,21,28,28,5,9,9,14,24,11,3,5,387,19,21,22,12,9,3,3,13,22,22,24,17,22,39,20,9,13,10,15,23,14,23,12
uSF2,DE,451,01,0000684,732,345,24,26,18,12,5,4,2,10,19,22,23,23,21,28,28,5,9,9,14,24,11,3,5,387,19,21,22,12,9,3,3,13,22,22,24,17,22,39,20,9,13,10,15,23,14,23,12
uSF2,DE,451,01,0000685,732,345,24,26,18,12,5,4,2,10,19,22,23,23,21,28,28,5,9,9,14,24,11,3,5,387,19,21,22,12,9,3,3,13,22,22,24,17,22,39,20,9,13,10,15,23,14,23,12
uSF2,DE,451,01,0000686,10964,5399,332,402,421,246,153,72,69,213,416,414,509,479,357,358,261,73,110,60,114,146,126,47,21,5565,324,354,334,230,114,69,64,226,408,414,501,498,387,435,278,76,123,91,128,199,171,95,46
uSF2,DE,451,01,0000687,10964,5399,332,402,421,246,153,72,69,213,416,414,509,479,357,358,261,73,110,60,114,146,126,47,21,5565,324,354,334,230,114,69,64,226,408,414,501,498,387,435,278,76,123,91,128,199,171,95,46
uSF2,DE,451,01,0000688,3498,1735,99,147,135,81,51,28,22,47,143,123,166,148,98,110,90,24,39,31,39,50,44,15,5,1763,89,118,107,63,34,24,20,70,139,116,169,158,114,139,100,21,43,32,55,63,56,19,14
uSF2,DE,451,01,0000689,3048,1524,75,99,119,69,44,18,24,59,118,89,138,150,124,89,65,19,39,17,39,49,49,22,10,1524,80,97,83,73,27,19,22,60,78,116,99,140,115,116,72,29,37,31,36,84,65,34,11
uSF2,DE,451,01,0000690,4418,2140,158,156,167,96,58,26,23,107,155,202,205,181,135,159,106,30,32,12,36,47,33,10,6,2278,155,139,144,94,53,26,22,96,191,182,233,200,158,180,106,26,43,28,37,52,50,42,21
uSF2,DE,451,01,0000691,1574,755,46,61,66,46,23,5,7,23,47,45,67,71,47,51,39,13,17,12,21,24,12,8,4,819,35,35,66,36,20,9,10,43,56,53,68,77,67,56,34,17,24,20,21,27,17,14,14
uSF2,DE,451,01,0000692,1574,755,46,61,66,46,23,5,7,23,47,45,67,71,47,51,39,13,17,12,21,24,12,8,4,819,35,35,66,36,20,9,10,43,56,53,68,77,67,56,34,17,24,20,21,27,17,14,14
uSF2,DE,451,01,0000693,1574,755,46,61,66,46,23,5,7,23,47,45,67,71,47,51,39,13,17,12,21,24,12,8,4,819,35,35,66,36,20,9,10,43,56,53,68,77,67,56,34,17,24,20,21,27,17,14,14
uSF2,DE,451,01,0000694,214,112,8,9,10,7,3,1,3,6,11,7,12,7,8,0,4,1,2,2,4,2,4,1,0,102,5,5,10,8,1,1,2,1,8,13,8,13,6,4,2,1,0,2,3,4,1,2,2
uSF2,DE,451,01,0000695,214,112,8,9,10,7,3,1,3,6,11,7,12,7,8,0,4,1,2,2,4,2,4,1,0,102,5,5,10,8,1,1,2,1,8,13,8,13,6,4,2,1,0,2,3,4,1,2,2
uSF2,DE,451,01,0000696,214,112,8,9,10,7,3,1,3,6,11,7,12,7,8,0,4,1,2,2,4,2,4,1,0,102,5,5,10,8,1,1,2,1,8,13,8,13,6,4,2,1,0,2,3,4,1,2,2
uSF2,DE,451,01,0000697,6363,3036,189,208,217,125,64,29,38,81,183,238,296,301,213,186,143,50,77,50,67,125,86,42,28,3327,163,206,212,124,68,32,30,99,193,259,298,314,206,211,160,48,81,61,86,150,147,91,88
uSF2,DE,451,01,0000698,6363,3036,189,208,217,125,64,29,38,81,183,238,296,301,213,186,143,50,77,50,67,125,86,42,28,3327,163,206,212,124,68,32,30,99,193,259,298,314,206,211,160,48,81,61,86,150,147,91,88
uSF2,DE,451,01,0000699,623,320,24,28,28,12,9,4,6,13,22,23,33,24,33,15,16,2,8,6,1,4,5,2,2,303,21,28,33,15,4,7,2,8,26,25,28,32,19,14,10,5,2,6,5,5,6,2,0
uSF2,DE,451,01,0000700,1552,725,33,37,51,23,12,7,9,24,54,67,68,80,62,45,35,7,19,10,14,28,18,10,12,827,26,42,42,27,17,8,8,36,63,58,71,63,56,61,38,11,12,12,25,35,36,28,52
uSF2,DE,451,01,0000701,2726,1279,99,93,88,59,22,14,15,30,76,99,118,124,68,72,62,25,30,21,29,62,44,20,9,1447,70,94,95,49,37,14,16,40,62,122,135,147,85,85,64,21,42,22,40,75,69,38,25
uSF2,DE,451,01,0000702,1462,712,33,50,50,31,21,4,8,14,31,49,77,73,50,54,30,16,20,13,23,31,19,10,5,750,46,42,42,33,10,3,4,15,42,54,64,72,46,51,48,11,25,21,16,35,36,23,11
uSF2,DE,451,01,0000703,1139,526,43,40,62,16,14,3,8,18,26,46,48,44,40,30,11,5,6,8,6,21,14,9,8,613,30,40,46,30,12,6,6,17,38,45,53,52,44,43,25,13,12,5,12,36,11,20,17
uSF2,DE,451,01,0000704,1139,526,43,40,62,16,14,3,8,18,26,46,48,44,40,30,11,5,6,8,6,21,14,9,8,613,30,40,46,30,12,6,6,17,38,45,53,52,44,43,25,13,12,5,12,36,11,20,17
uSF2,DE,451,01,0000705,1139,526,43,40,62,16,14,3,8,18,26,46,48,44,40,30,11,5,6,8,6,21,14,9,8,613,30,40,46,30,12,6,6,17,38,45,53,52,44,43,25,13,12,5,12,36,11,20,17
uSF2,DE,451,01,0000706,470,218,16,11,11,13,3,1,3,13,10,20,17,14,16,20,15,4,5,6,2,11,2,5,0,252,12,11,17,10,3,3,1,7,18,17,16,18,12,31,14,3,5,3,9,13,13,12,4
uSF2,DE,451,01,0000707,470,218,16,11,11,13,3,1,3,13,10,20,17,14,16,20,15,4,5,6,2,11,2,5,0,252,12,11,17,10,3,3,1,7,18,17,16,18,12,31,14,3,5,3,9,13,13,12,4
uSF2,DE,451,01,0000708,470,218,16,11,11,13,3,1,3,13,10,20,17,14,16,20,15,4,5,6,2,11,2,5,0,252,12,11,17,10,3,3,1,7,18,17,16,18,12,31,14,3,5,3,9,13,13,12,4
uSF2,DE,451,01,0000709,1260,642,43,43,54,27,16,9,3,19,48,42,52,47,58,48,38,11,16,19,19,16,7,2,5,618,20,39,54,30,13,6,7,16,44,37,37,60,56,42,41,16,26,10,15,22,9,8,10
uSF2,DE,451,01,0000710,1260,642,43,43,54,27,16,9,3,19,48,42,52,47,58,48,38,11,16,19,19,16,7,2,5,618,20,39,54,30,13,6,7,16,44,37,37,60,56,42,41,16,26,10,15,22,9,8,10
uSF2,DE,451,01,0000711,1260,642,43,43,54,27,16,9,3,19,48,42,52,47,58,48,38,11,16,19,19,16,7,2,5,618,20,39,54,30,13,6,7,16,44,37,37,60,56,42,41,16,26,10,15,22,9,8,10
uSF2,DE,451,01,0000712,956,428,35,35,30,14,8,5,4,13,17,27,39,25,32,26,32,9,10,8,18,13,18,8,2,528,30,29,35,21,12,6,2,14,41,34,39,32,29,29,41,5,14,10,13,27,33,20,12
uSF2,DE,451,01,0000713,956,428,35,35,30,14,8,5,4,13,17,27,39,25,32,26,32,9,10,8,18,13,18,8,2,528,30,29,35,21,12,6,2,14,41,34,39,32,29,29,41,5,14,10,13,27,33,20,12
uSF2,DE,451,01,0000714,946,423,35,35,30,14,8,5,4,13,16,26,38,24,32,26,32,8,10,8,18,13,18,8,2,523,30,29,35,21,12,5,2,14,40,34,38,31,29,29,40,5,14,10,13,27,33,20,12
uSF2,DE,451,01,0000715,270,141,3,1,0,2,2,0,1,7,13,6,14,9,17,7,13,3,7,8,5,8,10,2,3,129,5,1,2,0,0,1,3,0,9,6,2,9,10,6,14,6,10,5,6,11,9,9,5
uSF2,DE,451,01,0000716,270,141,3,1,0,2,2,0,1,7,13,6,14,9,17,7,13,3,7,8,5,8,10,2,3,129,5,1,2,0,0,1,3,0,9,6,2,9,10,6,14,6,10,5,6,11,9,9,5
uSF2,DE,451,01,0000717,270,141,3,1,0,2,2,0,1,7,13,6,14,9,17,7,13,3,7,8,5,8,10,2,3,129,5,1,2,0,0,1,3,0,9,6,2,9,10,6,14,6,10,5,6,11,9,9,5
uSF2,DE,451,01,0000718,15872,7443,414,483,445,248,161,82,108,341,535,593,596,595,493,532,421,112,200,147,206,287,214,147,83,8429,423,414,472,273,142,83,114,344,549,563,651,634,597,564,494,150,253,155,219,401,428,271,235
uSF2,DE,451,01,0000719,15872,7443,414,483,445,248,161,82,108,341,535,593,596,595,493,532,421,112,200,147,206,287,214,147,83,8429,423,414,472,273,142,83,114,344,549,563,651,634,597,564,494,150,253,155,219,401,428,271,235
uSF2,DE,451,01,0000720,2707,1293,72,96,78,49,33,14,26,61,101,119,115,93,74,73,48,18,34,30,44,53,36,19,7,1414,79,85,75,41,33,7,30,71,125,96,132,97,88,87,69,21,49,35,39,60,52,27,16
uSF2,DE,451,01,0000721,415,210,24,11,9,1,1,1,2,11,18,32,26,13,9,21,5,1,4,3,4,5,5,3,1,205,19,13,6,6,6,1,2,15,25,25,15,8,12,8,9,3,3,5,4,6,9,3,2
uSF2,DE,451,01,0000722,2732,1263,69,98,118,52,23,5,12,30,55,69,91,105,105,127,112,23,43,15,21,41,20,15,14,1469,79,90,116,72,18,9,14,38,61,94,113,121,139,149,106,25,24,17,24,48,35,29,48
uSF2,DE,451,01,0000723,1299,596,38,29,29,17,21,14,7,30,38,31,55,47,29,38,25,12,23,15,19,20,28,18,13,703,33,28,30,20,19,9,11,28,39,44,47,42,40,36,36,15,26,14,19,39,58,39,31
uSF2,DE,451,01,0000724,1375,582,18,28,22,17,10,9,9,27,50,52,36,36,45,49,42,8,13,16,11,26,26,18,14,793,20,15,27,11,4,6,9,23,50,40,33,39,42,56,49,8,31,17,24,76,83,77,53
uSF2,DE,451,01,0000725,1919,947,56,57,50,24,26,6,18,52,75,100,67,82,62,53,50,15,27,17,27,42,23,17,1,972,54,50,34,29,23,21,12,42,72,81,79,91,63,48,64,17,24,23,24,41,55,13,12
uSF2,DE,451,01,0000726,56,26,1,5,1,2,0,1,0,1,1,2,6,1,3,0,0,0,0,0,0,1,1,0,0,30,2,3,5,1,0,0,1,1,4,2,1,3,2,1,1,0,0,0,1,1,1,0,0
uSF2,DE,451,01,0000727,329,149,9,6,9,6,5,4,1,12,7,9,9,17,12,10,5,1,8,7,6,3,1,1,1,180,7,4,11,7,3,4,5,12,10,13,11,15,15,8,10,7,6,7,7,4,4,8,2
uSF2,DE,451,01,0000728,1127,520,25,35,23,11,6,9,5,35,53,36,41,38,35,31,25,6,10,12,16,17,16,20,15,607,15,22,31,10,7,9,9,35,52,35,45,45,40,37,27,15,19,8,17,30,47,24,28
uSF2,DE,451,01,0000729,1052,505,33,29,17,16,13,4,9,33,45,51,45,47,27,27,19,8,6,4,20,15,19,9,9,547,23,23,23,11,8,8,8,38,44,46,37,49,36,30,24,15,12,7,23,23,20,26,13
uSF2,DE,451,01,0000730,1426,681,15,47,53,29,13,8,6,19,18,33,44,61,47,46,54,16,24,24,27,46,27,19,5,745,17,30,73,47,6,4,4,11,12,25,54,66,53,55,64,16,50,17,28,49,37,14,13
uSF2,DE,451,01,0000731,1280,594,50,39,30,20,10,6,11,26,61,55,53,49,41,50,31,4,8,3,9,17,11,8,2,686,70,48,33,17,11,5,9,22,49,59,78,49,56,46,32,7,9,4,9,23,25,8,17
uSF2,DE,451,01,0000732,155,77,4,3,6,4,0,1,2,4,13,4,8,6,4,7,5,0,0,1,2,1,1,0,1,78,5,3,8,1,4,0,0,8,6,3,6,9,11,3,3,1,0,1,0,1,2,3,0
uSF2,DE,451,01,0000733,2343,1211,216,133,100,26,17,22,32,123,184,163,116,62,11,3,3,0,0,0,0,0,0,0,0,1132,184,134,71,35,34,40,32,110,192,135,94,47,14,5,2,0,2,0,0,1,0,0,0
uSF2,DE,451,01,0000734,2343,1211,216,133,100,26,17,22,32,123,184,163,116,62,11,3,3,0,0,0,0,0,0,0,0,1132,184,134,71,35,34,40,32,110,192,135,94,47,14,5,2,0,2,0,0,1,0,0,0
uSF2,DE,451,01,0000735,2343,1211,216,133,100,26,17,22,32,123,184,163,116,62,11,3,3,0,0,0,0,0,0,0,0,1132,184,134,71,35,34,40,32,110,192,135,94,47,14,5,2,0,2,0,0,1,0,0,0
uSF2,DE,451,01,0000736,3636,1718,100,101,118,64,26,17,10,47,116,153,172,172,139,118,81,24,36,19,30,60,60,33,22,1918,112,107,119,52,31,11,8,60,99,157,173,164,172,125,108,35,41,37,46,81,76,60,44
uSF2,DE,451,01,0000737,3636,1718,100,101,118,64,26,17,10,47,116,153,172,172,139,118,81,24,36,19,30,60,60,33,22,1918,112,107,119,52,31,11,8,60,99,157,173,164,172,125,108,35,41,37,46,81,76,60,44
uSF2,DE,451,01,0000738,682,332,24,19,37,12,1,4,2,5,16,21,37,28,33,22,17,4,5,3,6,16,8,7,5,350,28,23,20,6,4,1,1,6,12,27,46,25,30,17,19,6,6,6,6,22,14,11,14
uSF2,DE,451,01,0000739,2954,1386,76,82,81,52,25,13,8,42,100,132,135,144,106,96,64,20,31,16,24,44,52,26,17,1568,84,84,99,46,27,10,7,54,87,130,127,139,142,108,89,29,35,31,40,59,62,49,30
uSF2,DE,451,01,0000740,177,81,3,5,7,4,5,0,1,1,6,4,3,9,7,2,8,1,2,2,1,3,4,0,3,96,6,8,6,3,4,0,2,2,3,5,8,6,11,8,5,0,1,1,6,3,6,2,0
uSF2,DE,451,01,0000741,177,81,3,5,7,4,5,0,1,1,6,4,3,9,7,2,8,1,2,2,1,3,4,0,3,96,6,8,6,3,4,0,2,2,3,5,8,6,11,8,5,0,1,1,6,3,6,2,0
uSF2,DE,451,01,0000742,177,81,3,5,7,4,5,0,1,1,6,4,3,9,7,2,8,1,2,2,1,3,4,0,3,96,6,8,6,3,4,0,2,2,3,5,8,6,11,8,5,0,1,1,6,3,6,2,0
uSF2,DE,451,01,0000743,4421,2105,117,143,126,94,47,24,17,67,134,154,190,205,135,119,103,34,50,36,77,88,80,46,19,2316,143,135,129,73,46,32,37,70,118,154,173,205,138,144,118,46,74,41,92,113,119,70,46
uSF2,DE,451,01,0000744,4421,2105,117,143,126,94,47,24,17,67,134,154,190,205,135,119,103,34,50,36,77,88,80,46,19,2316,143,135,129,73,46,32,37,70,118,154,173,205,138,144,118,46,74,41,92,113,119,70,46
uSF2,DE,451,01,0000745,1711,795,38,49,48,29,15,10,5,26,57,54,63,84,51,52,45,10,19,10,29,32,33,26,10,916,54,54,50,29,17,18,8,30,42,48,59,86,69,50,54,14,32,13,31,44,55,38,21
uSF2,DE,451,01,0000746,2710,1310,79,94,78,65,32,14,12,41,77,100,127,121,84,67,58,24,31,26,48,56,47,20,9,1400,89,81,79,44,29,14,29,40,76,106,114,119,69,94,64,32,42,28,61,69,64,32,25
uSF2,DE,451,01,0000747,635,297,24,22,26,13,15,1,4,9,26,22,34,21,19,13,10,5,10,2,6,4,3,5,3,338,11,28,32,18,6,3,0,13,30,33,32,35,25,18,8,8,4,3,6,9,9,2,5
uSF2,DE,451,01,0000748,635,297,24,22,26,13,15,1,4,9,26,22,34,21,19,13,10,5,10,2,6,4,3,5,3,338,11,28,32,18,6,3,0,13,30,33,32,35,25,18,8,8,4,3,6,9,9,2,5
uSF2,DE,451,01,0000749,635,297,24,22,26,13,15,1,4,9,26,22,34,21,19,13,10,5,10,2,6,4,3,5,3,338,11,28,32,18,6,3,0,13,30,33,32,35,25,18,8,8,4,3,6,9,9,2,5
uSF2,DE,451,01,0000750,333,157,0,2,7,2,1,0,0,0,5,3,3,6,13,13,19,4,17,7,10,22,15,6,2,176,2,3,1,2,1,4,1,2,3,4,6,6,11,16,22,9,10,5,16,24,13,12,3
uSF2,DE,451,01,0000751,333,157,0,2,7,2,1,0,0,0,5,3,3,6,13,13,19,4,17,7,10,22,15,6,2,176,2,3,1,2,1,4,1,2,3,4,6,6,11,16,22,9,10,5,16,24,13,12,3
uSF2,DE,451,01,0000752,333,157,0,2,7,2,1,0,0,0,5,3,3,6,13,13,19,4,17,7,10,22,15,6,2,176,2,3,1,2,1,4,1,2,3,4,6,6,11,16,22,9,10,5,16,24,13,12,3
uSF2,DE,451,01,0000753,295,139,12,11,11,3,3,1,2,4,8,8,12,7,7,14,7,1,2,2,4,14,2,4,0,156,5,8,17,4,2,2,2,4,8,11,11,13,11,6,5,3,3,2,6,14,5,10,4
uSF2,DE,451,01,0000754,295,139,12,11,11,3,3,1,2,4,8,8,12,7,7,14,7,1,2,2,4,14,2,4,0,156,5,8,17,4,2,2,2,4,8,11,11,13,11,6,5,3,3,2,6,14,5,10,4
uSF2,DE,451,01,0000755,295,139,12,11,11,3,3,1,2,4,8,8,12,7,7,14,7,1,2,2,4,14,2,4,0,156,5,8,17,4,2,2,2,4,8,11,11,13,11,6,5,3,3,2,6,14,5,10,4
uSF2,DE,451,01,0000756,437,207,16,17,22,8,3,3,4,4,9,23,21,17,13,17,7,1,1,1,1,2,9,5,3,230,15,26,19,7,7,2,4,6,16,11,29,18,16,13,5,3,4,3,1,8,12,4,1
uSF2,DE,451,01,0000757,437,207,16,17,22,8,3,3,4,4,9,23,21,17,13,17,7,1,1,1,1,2,9,5,3,230,15,26,19,7,7,2,4,6,16,11,29,18,16,13,5,3,4,3,1,8,12,4,1
uSF2,DE,451,01,0000758,437,207,16,17,22,8,3,3,4,4,9,23,21,17,13,17,7,1,1,1,1,2,9,5,3,230,15,26,19,7,7,2,4,6,16,11,29,18,16,13,5,3,4,3,1,8,12,4,1
uSF2,DE,451,01,0000759,1956,917,41,56,62,39,27,11,6,28,43,58,64,82,67,61,59,20,21,14,32,39,45,26,16,1039,47,46,61,36,30,8,12,38,48,50,74,74,76,70,59,25,29,22,36,60,59,45,34
uSF2,DE,451,01,0000760,1956,917,41,56,62,39,27,11,6,28,43,58,64,82,67,61,59,20,21,14,32,39,45,26,16,1039,47,46,61,36,30,8,12,38,48,50,74,74,76,70,59,25,29,22,36,60,59,45,34
uSF2,DE,451,01,0000761,1875,884,41,56,60,39,25,11,6,27,42,56,63,77,64,60,59,16,20,14,32,34,44,24,14,991,45,46,61,33,28,8,11,37,48,49,70,73,71,67,55,25,28,20,34,56,54,40,32
uSF2,DE,451,01,0000762,9798,4833,389,384,371,232,93,55,43,194,456,488,458,416,393,336,226,40,57,35,50,60,27,21,9,4965,381,407,354,205,117,53,63,248,473,491,468,444,418,322,187,31,65,25,47,65,43,32,26
uSF2,DE,451,01,0000763,9798,4833,389,384,371,232,93,55,43,194,456,488,458,416,393,336,226,40,57,35,50,60,27,21,9,4965,381,407,354,205,117,53,63,248,473,491,468,444,418,322,187,31,65,25,47,65,43,32,26
uSF2,DE,451,01,0000764,2721,1368,119,105,75,56,22,10,13,41,138,156,131,114,107,95,81,15,23,15,15,18,9,10,0,1353,107,95,89,54,19,11,9,50,144,151,128,111,105,100,69,11,26,6,11,20,12,13,12
uSF2,DE,451,01,0000765,5559,2680,199,195,231,152,55,36,23,139,249,246,238,233,231,198,117,19,25,13,23,33,14,7,4,2879,217,231,210,119,89,33,52,175,262,251,252,278,252,192,101,15,29,10,27,38,23,12,11
uSF2,DE,451,01,0000766,1140,594,63,68,50,11,8,5,7,13,61,77,76,51,25,30,15,1,6,4,8,5,3,3,4,546,51,66,37,18,5,4,0,18,64,79,74,28,32,21,8,3,5,6,7,5,6,6,3
uSF2,DE,451,01,0000767,378,191,8,16,15,13,8,4,0,1,8,9,13,18,30,13,13,5,3,3,4,4,1,1,1,187,6,15,18,14,4,5,2,5,3,10,14,27,29,9,9,2,5,3,2,2,2,1,0
uSF2,DE,451,01,0000768,2099,961,33,35,42,28,7,4,4,22,54,62,61,72,58,75,77,36,44,31,29,59,48,41,39,1138,48,43,46,29,9,4,4,32,72,59,68,62,77,83,81,37,46,17,41,50,66,67,97
uSF2,DE,451,01,0000769,2099,961,33,35,42,28,7,4,4,22,54,62,61,72,58,75,77,36,44,31,29,59,48,41,39,1138,48,43,46,29,9,4,4,32,72,59,68,62,77,83,81,37,46,17,41,50,66,67,97
uSF2,DE,451,01,0000770,1151,497,14,13,18,12,4,3,4,18,49,42,38,45,26,38,30,16,9,4,8,20,26,26,34,654,23,22,25,13,5,3,4,30,67,38,37,38,34,35,26,15,11,6,16,19,46,50,91
uSF2,DE,451,01,0000771,948,464,19,22,24,16,3,1,0,4,5,20,23,27,32,37,47,20,35,27,21,39,22,15,5,484,25,21,21,16,4,1,0,2,5,21,31,24,43,48,55,22,35,11,25,31,20,17,6
uSF2,DE,451,01,0000772,615,298,29,38,28,6,5,5,3,14,22,27,22,22,13,17,14,5,4,1,3,4,9,4,3,317,25,22,30,14,7,2,7,13,28,29,18,17,17,13,8,6,4,3,6,20,16,4,8
uSF2,DE,451,01,0000773,615,298,29,38,28,6,5,5,3,14,22,27,22,22,13,17,14,5,4,1,3,4,9,4,3,317,25,22,30,14,7,2,7,13,28,29,18,17,17,13,8,6,4,3,6,20,16,4,8
uSF2,DE,451,01,0000774,612,297,29,38,28,6,5,5,3,14,22,27,22,22,13,16,14,5,4,1,3,4,9,4,3,315,25,22,29,14,7,2,7,13,28,29,18,16,17,13,8,6,4,3,6,20,16,4,8
uSF2,DE,451,01,0000775,2340,1096,71,97,87,49,35,18,10,48,75,80,71,91,76,62,45,17,27,17,23,38,31,16,12,1244,85,86,108,45,29,10,17,42,74,84,91,86,99,66,49,12,31,20,40,55,53,41,21
uSF2,DE,451,01,0000776,2340,1096,71,97,87,49,35,18,10,48,75,80,71,91,76,62,45,17,27,17,23,38,31,16,12,1244,85,86,108,45,29,10,17,42,74,84,91,86,99,66,49,12,31,20,40,55,53,41,21
uSF2,DE,451,01,0000777,2340,1096,71,97,87,49,35,18,10,48,75,80,71,91,76,62,45,17,27,17,23,38,31,16,12,1244,85,86,108,45,29,10,17,42,74,84,91,86,99,66,49,12,31,20,40,55,53,41,21
uSF2,DE,451,01,0000778,134,59,1,2,1,2,0,0,0,1,0,1,0,5,5,4,4,5,3,3,3,5,9,5,0,75,3,1,2,2,1,0,1,0,2,1,2,3,4,2,9,2,6,5,1,14,5,6,3
uSF2,DE,451,01,0000779,134,59,1,2,1,2,0,0,0,1,0,1,0,5,5,4,4,5,3,3,3,5,9,5,0,75,3,1,2,2,1,0,1,0,2,1,2,3,4,2,9,2,6,5,1,14,5,6,3
uSF2,DE,451,01,0000780,134,59,1,2,1,2,0,0,0,1,0,1,0,5,5,4,4,5,3,3,3,5,9,5,0,75,3,1,2,2,1,0,1,0,2,1,2,3,4,2,9,2,6,5,1,14,5,6,3
uSF2,DE,451,01,0000781,2741,1318,57,79,97,72,34,13,9,30,47,59,92,117,106,125,89,40,53,42,47,46,39,19,6,1423,67,86,98,69,25,14,15,36,54,47,113,113,124,122,100,56,60,43,40,53,53,19,16
uSF2,DE,451,01,0000782,2741,1318,57,79,97,72,34,13,9,30,47,59,92,117,106,125,89,40,53,42,47,46,39,19,6,1423,67,86,98,69,25,14,15,36,54,47,113,113,124,122,100,56,60,43,40,53,53,19,16
uSF2,DE,451,01,0000783,1444,681,29,39,46,36,15,5,5,11,30,28,44,58,45,52,47,18,35,29,34,32,23,16,4,763,29,47,44,34,13,12,3,20,26,25,56,49,63,58,51,37,44,25,32,36,35,15,9
uSF2,DE,451,01,0000784,1297,637,28,40,51,36,19,8,4,19,17,31,48,59,61,73,42,22,18,13,13,14,16,3,2,660,38,39,54,35,12,2,12,16,28,22,57,64,61,64,49,19,16,18,8,17,18,4,7
uSF2,DE,451,01,0000785,11054,5467,337,441,444,307,122,40,29,82,128,241,412,524,528,497,381,105,116,87,139,186,138,107,76,5587,320,420,431,246,83,20,37,87,113,292,458,560,561,477,357,107,127,75,140,184,186,175,131
uSF2,DE,451,01,0000786,11054,5467,337,441,444,307,122,40,29,82,128,241,412,524,528,497,381,105,116,87,139,186,138,107,76,5587,320,420,431,246,83,20,37,87,113,292,458,560,561,477,357,107,127,75,140,184,186,175,131
uSF2,DE,451,01,0000787,3602,1740,86,109,114,85,34,12,8,16,31,54,80,149,168,145,126,35,42,34,65,104,93,82,68,1862,80,107,113,69,17,2,12,22,28,61,106,168,160,154,118,35,53,39,72,111,136,114,85
uSF2,DE,451,01,0000788,6477,3244,192,268,292,201,83,26,21,60,91,153,267,317,319,322,233,61,68,50,70,77,42,24,7,3233,195,247,271,155,56,17,24,61,77,180,283,341,351,302,218,66,71,34,64,69,47,59,45
uSF2,DE,451,01,0000789,975,483,59,64,38,21,5,2,0,6,6,34,65,58,41,30,22,9,6,3,4,5,3,1,1,492,45,66,47,22,10,1,1,4,8,51,69,51,50,21,21,6,3,2,4,4,3,2,1
uSF2,DE,451,01,0000790,366,183,10,24,20,5,8,4,0,5,14,12,14,13,15,11,4,0,2,1,2,9,2,4,4,183,14,14,12,4,4,1,0,6,13,20,16,17,9,9,9,2,4,2,8,8,3,5,3
uSF2,DE,451,01,0000791,366,183,10,24,20,5,8,4,0,5,14,12,14,13,15,11,4,0,2,1,2,9,2,4,4,183,14,14,12,4,4,1,0,6,13,20,16,17,9,9,9,2,4,2,8,8,3,5,3
uSF2,DE,451,01,0000792,366,183,10,24,20,5,8,4,0,5,14,12,14,13,15,11,4,0,2,1,2,9,2,4,4,183,14,14,12,4,4,1,0,6,13,20,16,17,9,9,9,2,4,2,8,8,3,5,3
uSF2,DE,451,01,0000793,1183,562,32,49,43,21,10,1,3,11,31,46,53,48,39,33,28,12,14,11,21,21,20,14,1,621,29,37,52,19,12,5,1,16,37,47,51,48,41,36,42,8,28,14,20,33,23,13,9
uSF2,DE,451,01,0000794,1183,562,32,49,43,21,10,1,3,11,31,46,53,48,39,33,28,12,14,11,21,21,20,14,1,621,29,37,52,19,12,5,1,16,37,47,51,48,41,36,42,8,28,14,20,33,23,13,9
uSF2,DE,451,01,0000795,727,344,19,34,26,10,5,1,3,7,16,35,36,27,24,21,17,5,10,6,13,10,13,5,1,383,18,28,39,12,5,4,0,11,23,32,38,23,22,28,28,4,17,7,14,13,11,4,2
uSF2,DE,451,01,0000796,456,218,13,15,17,11,5,0,0,4,15,11,17,21,15,12,11,7,4,5,8,11,7,9,0,238,11,9,13,7,7,1,1,5,14,15,13,25,19,8,14,4,11,7,6,20,12,9,7
uSF2,DE,451,01,0000797,217,105,3,10,11,7,2,2,0,4,5,8,10,8,7,5,11,1,4,1,1,2,1,2,0,112,7,6,12,5,4,1,3,3,3,11,11,10,4,6,8,4,3,1,1,3,2,2,2
uSF2,DE,451,01,0000798,217,105,3,10,11,7,2,2,0,4,5,8,10,8,7,5,11,1,4,1,1,2,1,2,0,112,7,6,12,5,4,1,3,3,3,11,11,10,4,6,8,4,3,1,1,3,2,2,2
uSF2,DE,451,01,0000799,217,105,3,10,11,7,2,2,0,4,5,8,10,8,7,5,11,1,4,1,1,2,1,2,0,112,7,6,12,5,4,1,3,3,3,11,11,10,4,6,8,4,3,1,1,3,2,2,2
uSF2,DE,451,01,0000800,2013,954,90,77,79,40,21,15,11,37,72,51,68,65,73,62,51,8,11,27,21,24,23,20,8,1059,72,56,58,47,31,12,13,43,77,60,72,86,61,62,65,16,23,19,31,49,46,40,20
uSF2,DE,451,01,0000801,2013,954,90,77,79,40,21,15,11,37,72,51,68,65,73,62,51,8,11,27,21,24,23,20,8,1059,72,56,58,47,31,12,13,43,77,60,72,86,61,62,65,16,23,19,31,49,46,40,20
uSF2,DE,451,01,0000802,220,85,14,7,10,3,4,2,0,2,8,3,5,2,5,7,8,0,0,0,0,1,2,2,0,135,15,7,8,3,7,1,3,10,7,4,9,11,4,7,6,0,3,4,0,9,6,8,3
uSF2,DE,451,01,0000803,1793,869,76,70,69,37,17,13,11,35,64,48,63,63,68,55,43,8,11,27,21,23,21,18,8,924,57,49,50,44,24,11,10,33,70,56,63,75,57,55,59,16,20,15,31,40,40,32,17
uSF2,DE,451,01,0000804,189,85,4,7,4,4,1,2,1,2,6,4,11,5,6,8,5,0,4,1,0,6,2,0,2,104,9,5,12,6,1,3,3,3,5,7,10,3,10,3,8,2,3,1,3,2,5,0,0
uSF2,DE,451,01,0000805,189,85,4,7,4,4,1,2,1,2,6,4,11,5,6,8,5,0,4,1,0,6,2,0,2,104,9,5,12,6,1,3,3,3,5,7,10,3,10,3,8,2,3,1,3,2,5,0,0
uSF2,DE,451,01,0000806,189,85,4,7,4,4,1,2,1,2,6,4,11,5,6,8,5,0,4,1,0,6,2,0,2,104,9,5,12,6,1,3,3,3,5,7,10,3,10,3,8,2,3,1,3,2,5,0,0
uSF2,DE,451,01,0000807,2301,1065,30,29,48,30,13,3,2,17,38,40,56,61,105,84,100,40,61,34,68,89,66,33,18,1236,28,34,50,36,14,3,2,13,32,47,73,72,96,104,131,59,60,55,73,101,75,54,24
uSF2,DE,451,01,0000808,2301,1065,30,29,48,30,13,3,2,17,38,40,56,61,105,84,100,40,61,34,68,89,66,33,18,1236,28,34,50,36,14,3,2,13,32,47,73,72,96,104,131,59,60,55,73,101,75,54,24
uSF2,DE,451,01,0000809,2301,1065,30,29,48,30,13,3,2,17,38,40,56,61,105,84,100,40,61,34,68,89,66,33,18,1236,28,34,50,36,14,3,2,13,32,47,73,72,96,104,131,59,60,55,73,101,75,54,24
uSF2,DE,451,01,0000810,172,77,7,7,3,5,1,1,1,0,3,6,8,5,7,3,3,1,0,2,4,7,3,0,0,95,8,12,8,4,1,2,1,3,5,5,9,6,4,5,3,0,3,3,1,6,1,3,2
uSF2,DE,451,01,0000811,172,77,7,7,3,5,1,1,1,0,3,6,8,5,7,3,3,1,0,2,4,7,3,0,0,95,8,12,8,4,1,2,1,3,5,5,9,6,4,5,3,0,3,3,1,6,1,3,2
uSF2,DE,451,01,0000813,1599,772,20,21,30,18,7,5,3,12,20,13,27,41,34,36,65,27,63,37,62,112,67,31,21,827,19,14,24,11,9,2,3,9,17,25,28,43,32,61,75,38,87,38,54,109,69,40,20
uSF2,DE,451,01,0000814,1599,772,20,21,30,18,7,5,3,12,20,13,27,41,34,36,65,27,63,37,62,112,67,31,21,827,19,14,24,11,9,2,3,9,17,25,28,43,32,61,75,38,87,38,54,109,69,40,20
uSF2,DE,451,01,0000815,1599,772,20,21,30,18,7,5,3,12,20,13,27,41,34,36,65,27,63,37,62,112,67,31,21,827,19,14,24,11,9,2,3,9,17,25,28,43,32,61,75,38,87,38,54,109,69,40,20
uSF2,DE,451,01,0000816,191,103,9,7,10,6,0,0,0,5,11,5,7,7,10,3,7,2,2,0,3,4,2,3,0,88,4,5,8,4,2,0,1,4,8,6,8,10,4,6,2,0,3,0,1,3,6,2,1
uSF2,DE,451,01,0000817,191,103,9,7,10,6,0,0,0,5,11,5,7,7,10,3,7,2,2,0,3,4,2,3,0,88,4,5,8,4,2,0,1,4,8,6,8,10,4,6,2,0,3,0,1,3,6,2,1
uSF2,DE,451,01,0000818,191,103,9,7,10,6,0,0,0,5,11,5,7,7,10,3,7,2,2,0,3,4,2,3,0,88,4,5,8,4,2,0,1,4,8,6,8,10,4,6,2,0,3,0,1,3,6,2,1
uSF2,DE,451,01,0000819,4406,2101,186,188,166,102,42,22,30,85,163,222,183,175,133,109,83,33,39,15,21,45,39,10,10,2305,178,193,178,74,47,26,23,102,218,199,198,179,149,128,86,49,35,33,33,62,48,29,38
uSF2,DE,451,01,0000820,4406,2101,186,188,166,102,42,22,30,85,163,222,183,175,133,109,83,33,39,15,21,45,39,10,10,2305,178,193,178,74,47,26,23,102,218,199,198,179,149,128,86,49,35,33,33,62,48,29,38
uSF2,DE,451,01,0000821,1294,614,49,53,39,27,12,8,12,27,52,64,48,45,49,25,23,6,11,6,10,21,20,3,4,680,44,53,52,16,13,7,7,40,50,58,56,45,45,32,27,14,8,10,18,32,17,10,26
uSF2,DE,451,01,0000822,3036,1446,134,134,122,75,28,13,18,58,106,155,131,127,84,82,59,25,25,7,10,22,19,6,6,1590,130,140,126,57,34,19,16,58,166,136,140,132,103,93,56,33,26,20,15,29,31,18,12
uSF2,DE,451,01,0000823,4181,1929,108,138,134,85,40,26,20,78,108,142,146,148,130,135,94,31,48,29,45,84,73,41,46,2252,110,143,131,78,40,32,35,78,139,118,163,152,142,148,102,31,52,48,65,136,131,96,82
uSF2,DE,451,01,0000824,1308,554,27,40,29,16,8,12,10,35,38,44,41,33,24,45,24,8,17,7,13,34,22,15,12,754,44,38,37,13,12,11,7,39,41,40,57,29,42,40,39,9,16,16,21,60,59,48,36
uSF2,DE,451,01,0000825,1136,493,23,40,29,16,7,10,7,29,37,39,40,33,20,42,21,8,13,6,10,26,18,9,10,643,41,33,33,13,9,9,5,36,36,38,53,27,37,37,36,8,14,10,15,43,42,36,32
uSF2,DE,451,01,0000826,172,61,4,0,0,0,1,2,3,6,1,5,1,0,4,3,3,0,4,1,3,8,4,6,2,111,3,5,4,0,3,2,2,3,5,2,4,2,5,3,3,1,2,6,6,17,17,12,4
uSF2,DE,451,01,0000827,2873,1375,81,98,105,69,32,14,10,43,70,98,105,115,106,90,70,23,31,22,32,50,51,26,34,1498,66,105,94,65,28,21,28,39,98,78,106,123,100,108,63,22,36,32,44,76,72,48,46
uSF2,DE,451,01,0000828,99,48,7,3,5,2,2,0,1,1,2,3,2,4,3,4,1,0,1,0,0,2,2,1,2,51,3,6,3,2,1,0,1,1,3,4,3,4,1,4,1,0,1,1,1,3,4,2,2
uSF2,DE,451,01,0000829,2774,1327,74,95,100,67,30,14,9,42,68,95,103,111,103,86,69,23,30,22,32,48,49,25,32,1447,63,99,91,63,27,21,27,38,95,74,103,119,99,104,62,22,35,31,43,73,68,46,44
uSF2,DE,451,01,0000830,1596,688,32,31,30,23,8,2,5,26,37,46,56,47,49,42,40,19,23,22,37,42,40,24,7,908,49,42,46,15,11,4,6,28,52,39,57,57,62,48,70,18,31,24,43,81,62,28,35
uSF2,DE,451,01,0000831,1596,688,32,31,30,23,8,2,5,26,37,46,56,47,49,42,40,19,23,22,37,42,40,24,7,908,49,42,46,15,11,4,6,28,52,39,57,57,62,48,70,18,31,24,43,81,62,28,35
uSF2,DE,451,01,0000832,1596,688,32,31,30,23,8,2,5,26,37,46,56,47,49,42,40,19,23,22,37,42,40,24,7,908,49,42,46,15,11,4,6,28,52,39,57,57,62,48,70,18,31,24,43,81,62,28,35
uSF2,DE,451,01,0000833,250,125,9,4,7,2,6,1,2,2,11,9,12,8,7,10,6,5,3,2,4,7,8,0,0,125,6,8,3,5,3,1,2,2,7,9,7,11,9,8,10,3,3,3,1,11,8,2,3
uSF2,DE,451,01,0000834,250,125,9,4,7,2,6,1,2,2,11,9,12,8,7,10,6,5,3,2,4,7,8,0,0,125,6,8,3,5,3,1,2,2,7,9,7,11,9,8,10,3,3,3,1,11,8,2,3
uSF2,DE,451,01,0000835,241,119,8,3,7,2,6,1,2,2,11,9,10,7,7,10,6,4,3,2,4,7,8,0,0,122,6,8,3,5,3,1,2,2,7,8,6,11,9,8,10,3,3,3,1,10,8,2,3
uSF2,DE,451,01,0000836,1079,461,30,27,29,15,7,7,8,18,29,30,34,37,32,44,18,6,13,4,16,21,18,7,11,618,37,28,28,13,14,6,6,23,44,30,46,46,39,46,32,10,18,12,20,37,40,28,15
uSF2,DE,451,01,0000837,1079,461,30,27,29,15,7,7,8,18,29,30,34,37,32,44,18,6,13,4,16,21,18,7,11,618,37,28,28,13,14,6,6,23,44,30,46,46,39,46,32,10,18,12,20,37,40,28,15
uSF2,DE,451,01,0000838,842,349,25,24,23,11,5,4,8,17,24,24,26,26,24,28,13,4,11,3,5,16,14,5,9,493,34,21,22,8,10,5,6,20,36,26,34,36,31,31,25,9,13,9,15,32,33,23,14
uSF2,DE,451,01,0000839,219,102,5,2,5,3,0,3,0,1,5,5,8,10,7,16,5,2,1,1,11,5,3,2,2,117,3,6,6,5,4,1,0,2,7,2,12,10,8,14,7,1,5,3,5,3,7,5,1
uSF2,DE,451,01,0000840,18501,8962,341,420,439,266,253,478,695,1102,690,566,468,552,567,540,407,137,178,111,160,226,211,106,49,9539,320,362,406,239,283,654,1007,893,569,489,493,518,573,570,435,131,201,141,204,336,306,238,171
uSF2,DE,451,01,0000841,18501,8962,341,420,439,266,253,478,695,1102,690,566,468,552,567,540,407,137,178,111,160,226,211,106,49,9539,320,362,406,239,283,654,1007,893,569,489,493,518,573,570,435,131,201,141,204,336,306,238,171
uSF2,DE,451,01,0000842,1639,798,64,52,42,26,23,16,23,74,62,67,66,63,69,66,41,11,5,9,5,2,8,3,1,841,50,53,49,30,31,30,30,84,66,79,56,57,80,57,40,7,9,7,4,7,8,4,3
uSF2,DE,451,01,0000843,538,275,18,14,11,9,7,2,6,11,19,26,19,23,25,24,9,6,7,11,3,9,9,6,1,263,14,8,16,6,8,2,1,5,16,25,22,21,27,19,11,5,4,5,9,14,12,9,4
uSF2,DE,451,01,0000844,2485,1246,41,88,100,66,42,35,40,53,25,60,69,98,118,132,78,23,34,18,23,40,41,17,5,1239,36,76,91,66,16,24,41,49,29,59,79,99,124,115,71,27,25,22,38,55,40,35,22
uSF2,DE,451,01,0000845,2657,1323,40,28,56,37,39,56,128,192,119,63,60,77,68,86,71,21,37,14,26,35,39,21,10,1334,33,47,54,29,34,56,139,182,96,45,56,55,67,92,80,20,35,29,29,47,57,24,28
uSF2,DE,451,01,0000846,2805,1409,46,49,61,36,39,69,105,217,142,86,62,69,75,60,57,24,21,18,34,52,49,31,7,1396,52,51,56,31,44,83,130,135,94,64,65,73,72,73,70,22,29,26,39,59,59,52,17
uSF2,DE,451,01,0000847,2891,1428,82,116,99,55,30,19,11,79,139,130,100,133,108,89,77,29,30,17,27,35,17,5,1,1463,74,84,91,48,29,12,16,75,132,116,124,134,114,119,86,32,37,21,36,37,28,9,9
uSF2,DE,451,01,0000848,1593,653,4,9,6,5,21,83,144,175,59,33,17,15,20,9,8,4,3,4,7,9,9,3,6,940,6,1,6,3,31,147,291,171,40,13,15,9,14,13,1,2,11,1,8,37,40,45,35
uSF2,DE,451,01,0000849,2294,1095,18,20,15,8,45,191,232,280,69,43,26,19,31,27,15,1,16,4,7,7,15,5,1,1199,13,7,11,4,74,295,351,169,39,35,23,16,22,26,16,2,13,4,9,22,20,11,17
uSF2,DE,451,01,0000850,386,195,9,18,10,7,1,1,1,3,15,26,17,16,12,11,17,3,5,2,1,10,5,5,0,191,11,8,14,6,3,2,1,5,17,19,14,10,12,16,15,3,12,1,4,11,4,3,0
uSF2,DE,451,01,0000851,290,109,2,9,10,5,3,1,1,5,7,6,5,5,11,6,4,2,0,0,3,2,3,7,12,181,6,3,9,3,3,2,3,3,6,4,12,8,7,9,3,1,3,5,7,12,18,28,26
uSF2,DE,451,01,0000852,911,425,17,17,27,12,3,5,4,13,34,25,27,34,30,29,29,13,19,14,24,25,16,3,5,486,25,24,9,13,10,1,3,15,34,30,26,36,34,31,41,10,22,19,21,35,20,18,9
uSF2,DE,451,01,0000853,3708,1753,90,84,108,63,33,22,14,61,128,105,142,146,153,154,111,32,52,34,46,75,51,33,16,1955,87,88,111,64,42,20,16,73,108,116,158,129,166,159,146,60,53,40,64,80,82,60,33
uSF2,DE,451,01,0000854,3708,1753,90,84,108,63,33,22,14,61,128,105,142,146,153,154,111,32,52,34,46,75,51,33,16,1955,87,88,111,64,42,20,16,73,108,116,158,129,166,159,146,60,53,40,64,80,82,60,33
uSF2,DE,451,01,0000857,1647,757,28,36,51,20,14,9,7,22,43,39,60,59,66,74,62,20,24,13,21,35,27,20,7,890,34,39,57,24,21,7,2,23,41,44,69,58,78,78,82,31,20,24,27,38,44,25,24
uSF2,DE,451,01,0000858,1966,951,56,44,55,41,19,13,7,38,78,61,75,84,87,77,48,12,27,20,24,39,24,13,9,1015,49,44,54,40,20,12,14,49,57,66,85,64,87,80,60,28,30,15,37,42,38,35,9
uSF2,DE,451,01,0000859,809,410,33,25,38,14,15,8,5,12,28,33,38,39,37,30,9,6,5,6,12,7,4,6,0,399,25,22,24,10,17,4,4,13,31,37,45,37,31,19,14,2,5,10,6,11,13,11,8
uSF2,DE,451,01,0000860,809,410,33,25,38,14,15,8,5,12,28,33,38,39,37,30,9,6,5,6,12,7,4,6,0,399,25,22,24,10,17,4,4,13,31,37,45,37,31,19,14,2,5,10,6,11,13,11,8
uSF2,DE,451,01,0000861,469,242,21,13,20,8,9,5,4,7,21,21,24,20,20,15,4,3,4,6,7,4,4,2,0,227,15,7,11,6,10,4,4,10,24,18,22,22,17,8,6,2,3,7,5,6,6,9,5
uSF2,DE,451,01,0000862,340,168,12,12,18,6,6,3,1,5,7,12,14,19,17,15,5,3,1,0,5,3,0,4,0,172,10,15,13,4,7,0,0,3,7,19,23,15,14,11,8,0,2,3,1,5,7,2,3
uSF2,DE,451,01,0000863,7346,3670,269,331,339,208,77,31,20,68,73,155,309,419,371,385,258,79,76,33,45,63,29,24,8,3676,266,358,336,194,68,23,22,43,71,204,357,450,365,348,249,56,55,34,44,64,33,21,15
uSF2,DE,451,01,0000864,7346,3670,269,331,339,208,77,31,20,68,73,155,309,419,371,385,258,79,76,33,45,63,29,24,8,3676,266,358,336,194,68,23,22,43,71,204,357,450,365,348,249,56,55,34,44,64,33,21,15
uSF2,DE,451,01,0000865,7346,3670,269,331,339,208,77,31,20,68,73,155,309,419,371,385,258,79,76,33,45,63,29,24,8,3676,266,358,336,194,68,23,22,43,71,204,357,450,365,348,249,56,55,34,44,64,33,21,15
uSF2,DE,451,01,0000866,972,469,27,21,28,12,10,4,2,14,12,24,34,28,32,20,35,12,31,19,28,33,28,11,4,503,16,21,18,7,5,1,2,9,18,22,40,30,39,26,52,18,25,23,37,44,23,14,13
uSF2,DE,451,01,0000867,972,469,27,21,28,12,10,4,2,14,12,24,34,28,32,20,35,12,31,19,28,33,28,11,4,503,16,21,18,7,5,1,2,9,18,22,40,30,39,26,52,18,25,23,37,44,23,14,13
uSF2,DE,451,01,0000868,972,469,27,21,28,12,10,4,2,14,12,24,34,28,32,20,35,12,31,19,28,33,28,11,4,503,16,21,18,7,5,1,2,9,18,22,40,30,39,26,52,18,25,23,37,44,23,14,13
uSF2,DE,451,01,0000869,266,130,10,6,8,6,3,2,1,4,7,10,12,5,8,9,12,3,2,4,2,1,7,3,5,136,9,9,7,1,3,1,1,2,8,13,7,10,12,16,8,0,6,2,2,8,6,4,1
uSF2,DE,451,01,0000870,266,130,10,6,8,6,3,2,1,4,7,10,12,5,8,9,12,3,2,4,2,1,7,3,5,136,9,9,7,1,3,1,1,2,8,13,7,10,12,16,8,0,6,2,2,8,6,4,1
uSF2,DE,451,01,0000871,266,130,10,6,8,6,3,2,1,4,7,10,12,5,8,9,12,3,2,4,2,1,7,3,5,136,9,9,7,1,3,1,1,2,8,13,7,10,12,16,8,0,6,2,2,8,6,4,1
uSF2,DE,451,01,0000872,16815,8092,538,549,544,316,167,66,64,282,676,727,730,779,662,580,465,141,160,111,153,185,114,54,29,8723,496,490,562,328,143,83,72,318,699,734,800,824,733,672,529,141,205,117,184,213,191,127,62
uSF2,DE,451,01,0000873,16815,8092,538,549,544,316,167,66,64,282,676,727,730,779,662,580,465,141,160,111,153,185,114,54,29,8723,496,490,562,328,143,83,72,318,699,734,800,824,733,672,529,141,205,117,184,213,191,127,62
uSF2,DE,451,01,0000874,953,459,35,25,18,27,8,3,4,5,15,28,41,34,38,36,23,18,20,16,24,22,11,5,3,494,31,22,34,16,9,5,1,10,16,34,40,41,44,30,39,10,28,15,22,26,11,7,3
uSF2,DE,451,01,0000875,4904,2263,132,116,106,53,42,10,21,98,281,244,237,188,137,153,136,40,41,30,48,64,50,26,10,2641,140,106,104,79,35,16,23,99,282,249,232,208,174,217,158,44,65,48,74,87,87,76,38
uSF2,DE,451,01,0000876,5054,2538,171,189,173,98,39,28,20,121,235,233,225,242,175,163,151,43,55,39,41,56,25,10,6,2516,138,163,155,87,32,32,29,148,231,204,246,220,201,194,146,50,50,29,44,54,33,19,11
uSF2,DE,451,01,0000877,3944,1898,127,151,170,90,55,16,13,31,85,125,141,200,216,158,119,31,38,19,29,35,26,13,10,2046,108,134,198,100,42,21,13,40,83,152,172,234,218,152,140,28,42,16,38,36,53,19,7
uSF2,DE,451,01,0000878,1960,934,73,68,77,48,23,9,6,27,60,97,86,115,96,70,36,9,6,7,11,8,2,0,0,1026,79,65,71,46,25,9,6,21,87,95,110,121,96,79,46,9,20,9,6,10,7,6,3
uSF2,DE,451,01,0000879,1414,681,17,12,24,8,4,3,5,12,27,31,41,41,75,65,56,18,28,20,32,57,55,28,22,733,10,6,15,12,3,2,1,21,21,31,34,34,53,70,62,20,40,22,36,69,70,61,40
uSF2,DE,451,01,0000880,1414,681,17,12,24,8,4,3,5,12,27,31,41,41,75,65,56,18,28,20,32,57,55,28,22,733,10,6,15,12,3,2,1,21,21,31,34,34,53,70,62,20,40,22,36,69,70,61,40
uSF2,DE,451,01,0000881,1414,681,17,12,24,8,4,3,5,12,27,31,41,41,75,65,56,18,28,20,32,57,55,28,22,733,10,6,15,12,3,2,1,21,21,31,34,34,53,70,62,20,40,22,36,69,70,61,40
uSF2,DE,451,01,0000882,1789,872,94,87,79,35,17,11,22,58,78,80,98,58,27,33,26,7,10,9,14,15,7,4,3,917,96,73,80,50,22,12,17,62,82,85,95,61,31,37,30,7,16,5,16,13,15,6,6
uSF2,DE,451,01,0000883,1789,872,94,87,79,35,17,11,22,58,78,80,98,58,27,33,26,7,10,9,14,15,7,4,3,917,96,73,80,50,22,12,17,62,82,85,95,61,31,37,30,7,16,5,16,13,15,6,6
uSF2,DE,451,01,0000884,213,110,11,7,7,6,4,0,0,6,7,5,8,10,3,8,6,3,3,5,2,6,1,2,0,103,6,5,7,7,2,1,0,1,4,7,13,9,4,10,5,1,6,1,4,3,5,0,2
uSF2,DE,451,01,0000885,1576,762,83,80,72,29,13,11,22,52,71,75,90,48,24,25,20,4,7,4,12,9,6,2,3,814,90,68,73,43,20,11,17,61,78,78,82,52,27,27,25,6,10,4,12,10,10,6,4
uSF2,DE,451,01,0000886,1385,697,47,46,63,40,14,5,8,21,37,54,69,65,62,64,28,7,13,7,12,18,10,3,4,688,34,50,64,37,19,11,3,22,43,52,61,73,59,56,34,8,13,5,13,13,13,3,2
uSF2,DE,451,01,0000887,1385,697,47,46,63,40,14,5,8,21,37,54,69,65,62,64,28,7,13,7,12,18,10,3,4,688,34,50,64,37,19,11,3,22,43,52,61,73,59,56,34,8,13,5,13,13,13,3,2
uSF2,DE,451,01,0000888,1385,697,47,46,63,40,14,5,8,21,37,54,69,65,62,64,28,7,13,7,12,18,10,3,4,688,34,50,64,37,19,11,3,22,43,52,61,73,59,56,34,8,13,5,13,13,13,3,2
uSF2,DE,451,01,0000889,711,348,15,22,20,20,17,5,6,17,17,12,25,28,23,27,18,8,9,9,13,17,12,7,1,363,13,10,24,14,14,5,3,10,18,13,27,25,27,27,24,9,12,10,15,24,17,13,9
uSF2,DE,451,01,0000890,711,348,15,22,20,20,17,5,6,17,17,12,25,28,23,27,18,8,9,9,13,17,12,7,1,363,13,10,24,14,14,5,3,10,18,13,27,25,27,27,24,9,12,10,15,24,17,13,9
uSF2,DE,451,01,0000891,703,343,14,21,20,18,17,5,6,17,17,11,25,28,23,27,18,8,9,9,13,17,12,7,1,360,13,10,24,14,14,5,3,10,18,13,27,23,27,27,24,9,12,10,15,24,17,12,9
uSF2,DE,451,01,0000892,3727,1680,86,106,102,74,46,18,18,62,107,92,127,99,102,138,72,34,48,38,47,84,79,64,37,2047,102,87,110,51,44,19,26,66,113,127,109,118,150,131,95,49,68,42,77,136,131,127,69
uSF2,DE,451,01,0000893,3727,1680,86,106,102,74,46,18,18,62,107,92,127,99,102,138,72,34,48,38,47,84,79,64,37,2047,102,87,110,51,44,19,26,66,113,127,109,118,150,131,95,49,68,42,77,136,131,127,69
uSF2,DE,451,01,0000894,136,49,5,6,8,1,4,1,1,1,1,1,2,2,6,3,0,0,0,0,2,4,1,0,0,87,9,10,4,0,1,2,0,7,3,15,4,2,6,2,4,0,0,1,1,8,4,1,3
uSF2,DE,451,01,0000895,3591,1631,81,100,94,73,42,17,17,61,106,91,125,97,96,135,72,34,48,38,45,80,78,64,37,1960,93,77,106,51,43,17,26,59,110,112,105,116,144,129,91,49,68,41,76,128,127,126,66
uSF2,DE,451,01,0000896,1023,517,38,38,29,17,8,3,2,16,28,25,30,49,34,39,37,15,12,15,20,18,24,11,9,506,25,21,22,13,7,1,2,8,28,31,41,26,38,40,33,14,19,14,25,26,25,27,20
uSF2,DE,451,01,0000897,1023,517,38,38,29,17,8,3,2,16,28,25,30,49,34,39,37,15,12,15,20,18,24,11,9,506,25,21,22,13,7,1,2,8,28,31,41,26,38,40,33,14,19,14,25,26,25,27,20
uSF2,DE,451,01,0000898,1023,517,38,38,29,17,8,3,2,16,28,25,30,49,34,39,37,15,12,15,20,18,24,11,9,506,25,21,22,13,7,1,2,8,28,31,41,26,38,40,33,14,19,14,25,26,25,27,20
uSF2,DE,451,01,0000899,197,92,3,1,0,1,0,1,0,1,0,2,4,10,7,9,16,7,8,7,4,4,5,1,1,105,0,1,2,0,1,0,0,0,3,5,4,6,10,6,19,6,10,7,4,7,3,8,3
uSF2,DE,451,01,0000900,197,92,3,1,0,1,0,1,0,1,0,2,4,10,7,9,16,7,8,7,4,4,5,1,1,105,0,1,2,0,1,0,0,0,3,5,4,6,10,6,19,6,10,7,4,7,3,8,3
uSF2,DE,451,01,0000901,197,92,3,1,0,1,0,1,0,1,0,2,4,10,7,9,16,7,8,7,4,4,5,1,1,105,0,1,2,0,1,0,0,0,3,5,4,6,10,6,19,6,10,7,4,7,3,8,3
uSF2,DE,451,01,0000902,3832,1772,115,119,148,87,52,22,31,53,122,132,164,126,127,105,72,28,31,23,49,66,57,22,21,2060,120,127,157,82,56,25,26,77,141,149,172,156,153,112,78,43,45,25,58,93,78,45,42
uSF2,DE,451,01,0000903,3832,1772,115,119,148,87,52,22,31,53,122,132,164,126,127,105,72,28,31,23,49,66,57,22,21,2060,120,127,157,82,56,25,26,77,141,149,172,156,153,112,78,43,45,25,58,93,78,45,42
uSF2,DE,451,01,0000904,1246,583,48,40,41,30,18,8,16,25,50,45,52,40,42,34,18,11,9,4,10,21,14,3,4,663,48,36,57,18,25,5,7,34,55,59,56,46,56,36,28,12,8,7,12,23,13,9,13
uSF2,DE,451,01,0000905,1786,841,39,54,72,41,24,9,8,19,46,51,85,58,63,54,40,14,19,15,33,31,32,17,17,945,41,55,68,40,18,11,11,29,42,55,79,73,69,57,39,27,29,14,38,48,49,29,24
uSF2,DE,451,01,0000906,800,348,28,25,35,16,10,5,7,9,26,36,27,28,22,17,14,3,3,4,6,14,11,2,0,452,31,36,32,24,13,9,8,14,44,35,37,37,28,19,11,4,8,4,8,22,16,7,5
uSF2,DE,451,01,0000907,488,238,2,3,3,4,2,1,0,2,5,5,11,16,14,16,30,14,22,17,20,27,13,9,2,250,3,13,10,4,1,2,1,1,3,7,8,13,20,16,30,11,22,13,25,18,12,12,5
uSF2,DE,451,01,0000908,488,238,2,3,3,4,2,1,0,2,5,5,11,16,14,16,30,14,22,17,20,27,13,9,2,250,3,13,10,4,1,2,1,1,3,7,8,13,20,16,30,11,22,13,25,18,12,12,5
uSF2,DE,451,01,0000909,488,238,2,3,3,4,2,1,0,2,5,5,11,16,14,16,30,14,22,17,20,27,13,9,2,250,3,13,10,4,1,2,1,1,3,7,8,13,20,16,30,11,22,13,25,18,12,12,5
uSF2,DE,451,01,0000910,291,139,4,12,13,5,3,1,4,3,5,11,15,17,12,9,5,2,2,2,6,3,2,2,1,152,8,9,13,9,3,0,2,7,5,14,17,10,18,5,7,0,3,2,4,4,4,5,3
uSF2,DE,451,01,0000911,291,139,4,12,13,5,3,1,4,3,5,11,15,17,12,9,5,2,2,2,6,3,2,2,1,152,8,9,13,9,3,0,2,7,5,14,17,10,18,5,7,0,3,2,4,4,4,5,3
uSF2,DE,451,01,0000912,291,139,4,12,13,5,3,1,4,3,5,11,15,17,12,9,5,2,2,2,6,3,2,2,1,152,8,9,13,9,3,0,2,7,5,14,17,10,18,5,7,0,3,2,4,4,4,5,3
uSF2,DE,451,01,0000913,143,74,3,3,8,2,3,1,1,4,3,4,8,7,5,7,4,2,2,3,2,1,0,1,0,69,1,2,4,6,2,0,0,1,1,4,7,4,9,6,9,1,3,0,0,1,2,5,1
uSF2,DE,451,01,0000914,143,74,3,3,8,2,3,1,1,4,3,4,8,7,5,7,4,2,2,3,2,1,0,1,0,69,1,2,4,6,2,0,0,1,1,4,7,4,9,6,9,1,3,0,0,1,2,5,1
uSF2,DE,451,01,0000915,143,74,3,3,8,2,3,1,1,4,3,4,8,7,5,7,4,2,2,3,2,1,0,1,0,69,1,2,4,6,2,0,0,1,1,4,7,4,9,6,9,1,3,0,0,1,2,5,1
uSF2,DE,451,01,0000916,21692,10114,438,403,407,277,134,70,71,395,1157,1014,861,846,781,735,593,165,218,156,216,369,330,290,188,11578,405,345,379,244,161,64,80,506,1172,965,809,785,823,822,632,205,261,174,316,617,714,610,489
uSF2,DE,451,01,0000917,21692,10114,438,403,407,277,134,70,71,395,1157,1014,861,846,781,735,593,165,218,156,216,369,330,290,188,11578,405,345,379,244,161,64,80,506,1172,965,809,785,823,822,632,205,261,174,316,617,714,610,489
uSF2,DE,451,01,0000918,115,47,4,3,1,0,1,2,0,3,6,2,4,2,1,6,4,3,1,3,0,0,0,1,0,68,3,1,0,2,12,4,1,5,5,9,3,3,1,4,8,1,2,0,0,0,3,0,1
uSF2,DE,451,01,0000919,1150,548,28,26,28,14,10,4,5,17,25,38,33,57,51,61,41,7,11,8,6,21,22,18,17,602,22,22,18,19,12,3,3,11,37,40,37,48,52,62,43,11,13,4,7,33,38,40,27
uSF2,DE,451,01,0000920,623,282,11,20,19,13,3,2,0,10,22,20,20,26,33,20,19,2,5,5,6,7,10,5,4,341,14,17,18,10,5,2,2,8,25,30,20,35,30,28,21,4,7,3,8,11,16,13,14
uSF2,DE,451,01,0000921,1375,632,35,20,33,23,11,3,9,14,73,63,52,53,52,49,40,12,19,7,8,21,15,14,6,743,45,24,33,23,10,3,5,34,81,61,55,56,68,57,44,7,16,10,16,35,27,22,11
uSF2,DE,451,01,0000922,303,143,5,3,6,2,1,0,0,3,13,19,14,16,12,18,8,1,2,1,3,7,5,3,1,160,9,1,1,1,1,4,2,8,22,9,17,11,13,12,12,2,4,2,3,8,8,7,3
uSF2,DE,451,01,0000923,90,38,3,3,1,0,2,1,0,0,0,3,2,7,0,2,3,1,0,0,1,5,0,4,0,52,2,3,1,0,1,0,1,3,5,1,4,3,3,1,4,0,1,0,2,3,5,4,5
uSF2,DE,451,01,0000924,239,112,1,3,0,2,0,0,0,3,10,9,6,12,15,6,9,2,3,5,6,12,5,2,1,127,1,1,3,1,1,0,1,3,6,9,9,12,11,13,8,4,3,4,10,11,9,2,5
uSF2,DE,451,01,0000926,26,15,0,1,0,1,1,0,0,2,1,1,0,2,2,1,0,0,1,0,1,0,0,1,0,11,0,0,0,0,0,0,0,0,1,0,0,1,4,2,0,0,0,0,1,1,0,1,0
uSF2,DE,451,01,0000928,368,183,6,3,1,1,1,1,0,8,28,33,24,17,15,16,13,3,2,2,2,4,1,2,0,185,6,3,6,0,5,0,0,8,29,29,12,13,16,20,17,3,2,1,4,5,3,2,1
uSF2,DE,451,01,0000929,2721,1229,12,7,15,10,3,4,6,92,287,171,109,77,70,75,71,19,19,13,19,42,34,45,29,1492,14,12,14,8,3,1,9,132,273,152,71,57,75,80,74,22,24,29,47,116,114,82,83
uSF2,DE,451,01,0000930,1349,628,16,13,12,14,4,0,3,41,155,104,57,44,46,30,25,5,13,3,9,11,12,6,5,721,19,20,18,9,7,7,7,47,156,96,54,50,47,36,27,9,18,5,13,20,22,24,10
uSF2,DE,451,01,0000931,3388,1549,91,63,85,53,22,4,4,30,72,133,124,113,110,151,129,39,53,36,40,71,65,44,17,1839,83,64,76,45,17,6,3,29,102,143,136,120,118,204,131,50,64,36,67,106,111,81,47
uSF2,DE,451,01,0000932,1147,511,28,13,20,11,11,1,5,12,58,50,41,38,41,32,19,10,9,7,21,33,22,11,18,636,20,12,18,10,7,3,0,22,60,45,37,39,44,41,30,8,12,15,29,48,53,41,42
uSF2,DE,451,01,0000933,925,425,11,13,8,3,2,2,2,25,60,46,38,35,29,33,17,6,7,3,13,8,17,20,27,500,9,8,13,7,3,1,11,34,56,34,30,16,36,17,19,11,8,8,6,16,44,46,67
uSF2,DE,451,01,0000934,332,190,6,7,2,3,2,3,1,13,34,28,19,10,12,13,13,4,4,2,3,5,3,0,3,142,4,1,1,1,2,0,4,11,29,19,8,9,12,8,13,1,2,0,3,7,3,3,1
uSF2,DE,451,01,0000938,137,68,3,2,1,0,0,1,1,2,2,6,4,6,9,9,2,1,4,3,3,5,2,2,0,69,1,1,0,0,2,0,1,1,5,5,1,6,8,3,6,0,2,1,3,7,7,5,4
uSF2,DE,451,01,0000939,127,68,0,1,1,1,4,0,1,1,5,6,4,13,6,5,5,2,3,0,2,0,3,3,2,59,1,1,0,1,0,1,0,10,5,2,4,5,4,3,6,1,1,1,0,3,4,4,2
uSF2,DE,451,01,0000940,366,173,6,8,7,5,5,2,3,11,10,13,12,17,12,13,16,5,4,5,3,5,5,4,2,193,5,2,6,7,7,2,2,7,12,9,12,18,16,11,10,3,6,1,8,15,13,11,10
uSF2,DE,451,01,0000941,2387,1123,60,60,58,48,13,12,16,35,135,117,106,90,85,71,47,14,17,15,24,30,25,25,20,1264,55,42,46,27,21,11,11,48,110,112,118,93,96,79,57,22,24,15,26,53,79,65,54
uSF2,DE,451,01,0000942,1786,810,42,43,36,30,15,10,4,23,65,58,59,78,63,51,46,7,19,19,15,30,39,41,17,976,35,40,46,37,19,8,6,40,74,66,60,62,71,60,43,13,37,14,24,57,56,63,45
uSF2,DE,451,01,0000943,1505,725,28,47,37,23,12,9,9,28,46,46,69,83,58,37,46,14,9,6,15,32,33,22,16,780,25,39,34,17,12,5,4,18,43,48,62,65,59,48,34,13,11,8,22,45,72,67,29
uSF2,DE,451,01,0000944,1041,516,34,40,30,16,9,5,2,18,45,44,54,43,49,31,15,5,12,11,14,13,9,14,3,525,29,27,26,18,14,3,2,21,26,41,56,49,35,25,20,18,4,15,16,16,19,25,20
uSF2,DE,451,01,0000945,6088,2983,163,191,224,129,65,40,22,90,191,210,228,257,220,204,169,52,66,61,77,115,107,76,26,3105,177,175,191,108,53,32,42,99,177,190,229,258,231,194,180,52,111,57,93,167,160,90,39
uSF2,DE,451,01,0000946,6088,2983,163,191,224,129,65,40,22,90,191,210,228,257,220,204,169,52,66,61,77,115,107,76,26,3105,177,175,191,108,53,32,42,99,177,190,229,258,231,194,180,52,111,57,93,167,160,90,39
uSF2,DE,451,01,0000947,2988,1459,76,98,110,61,32,19,13,41,72,99,111,109,93,96,91,27,38,40,42,76,61,44,10,1529,76,94,87,45,18,18,17,49,69,96,99,113,121,108,97,34,55,34,51,98,77,47,26
uSF2,DE,451,01,0000948,3100,1524,87,93,114,68,33,21,9,49,119,111,117,148,127,108,78,25,28,21,35,39,46,32,16,1576,101,81,104,63,35,14,25,50,108,94,130,145,110,86,83,18,56,23,42,69,83,43,13
uSF2,DE,451,01,0000949,177,82,3,4,7,6,2,0,0,2,6,3,10,9,6,11,3,2,0,2,3,0,1,2,0,95,3,4,8,4,2,1,1,4,4,6,13,9,5,5,3,3,6,1,2,6,1,3,1
uSF2,DE,451,01,0000950,177,82,3,4,7,6,2,0,0,2,6,3,10,9,6,11,3,2,0,2,3,0,1,2,0,95,3,4,8,4,2,1,1,4,4,6,13,9,5,5,3,3,6,1,2,6,1,3,1
uSF2,DE,451,01,0000951,177,82,3,4,7,6,2,0,0,2,6,3,10,9,6,11,3,2,0,2,3,0,1,2,0,95,3,4,8,4,2,1,1,4,4,6,13,9,5,5,3,3,6,1,2,6,1,3,1
uSF2,DE,451,01,0000952,1423,679,53,64,60,36,17,6,7,24,37,55,74,52,43,40,38,7,11,9,17,12,7,8,2,744,54,66,62,40,25,8,15,18,49,59,85,64,35,32,31,18,22,10,16,16,10,5,4
uSF2,DE,451,01,0000953,1423,679,53,64,60,36,17,6,7,24,37,55,74,52,43,40,38,7,11,9,17,12,7,8,2,744,54,66,62,40,25,8,15,18,49,59,85,64,35,32,31,18,22,10,16,16,10,5,4
uSF2,DE,451,01,0000954,1423,679,53,64,60,36,17,6,7,24,37,55,74,52,43,40,38,7,11,9,17,12,7,8,2,744,54,66,62,40,25,8,15,18,49,59,85,64,35,32,31,18,22,10,16,16,10,5,4
uSF2,DE,451,01,0000955,886,432,35,22,31,17,11,4,4,17,22,38,31,47,34,21,22,10,12,9,15,11,8,8,3,454,22,24,27,21,9,9,5,12,33,32,39,41,32,31,18,14,14,11,12,16,17,9,6
uSF2,DE,451,01,0000956,886,432,35,22,31,17,11,4,4,17,22,38,31,47,34,21,22,10,12,9,15,11,8,8,3,454,22,24,27,21,9,9,5,12,33,32,39,41,32,31,18,14,14,11,12,16,17,9,6
uSF2,DE,451,01,0000957,146,68,6,1,6,2,4,1,1,1,3,12,7,8,8,1,3,1,0,0,1,0,2,0,0,78,6,6,6,4,1,2,0,0,5,6,11,13,4,3,3,1,0,3,1,1,2,0,0
uSF2,DE,451,01,0000958,740,364,29,21,25,15,7,3,3,16,19,26,24,39,26,20,19,9,12,9,14,11,6,8,3,376,16,18,21,17,8,7,5,12,28,26,28,28,28,28,15,13,14,8,11,15,15,9,6
uSF2,DE,451,01,0000959,19401,9457,361,445,512,295,125,65,41,154,285,422,585,617,659,702,708,323,534,344,581,840,516,240,103,9944,336,402,458,257,129,56,56,164,352,483,652,692,636,781,839,369,619,352,599,754,535,267,156
uSF2,DE,451,01,0000960,19401,9457,361,445,512,295,125,65,41,154,285,422,585,617,659,702,708,323,534,344,581,840,516,240,103,9944,336,402,458,257,129,56,56,164,352,483,652,692,636,781,839,369,619,352,599,754,535,267,156
uSF2,DE,451,01,0000961,8182,4017,168,162,211,119,49,33,16,64,104,199,252,288,299,328,311,146,217,133,247,318,214,98,41,4165,156,161,171,101,46,19,16,75,146,195,283,294,279,353,382,135,256,151,234,303,223,111,75
uSF2,DE,451,01,0000962,8182,4017,168,162,211,119,49,33,16,64,104,199,252,288,299,328,311,146,217,133,247,318,214,98,41,4165,156,161,171,101,46,19,16,75,146,195,283,294,279,353,382,135,256,151,234,303,223,111,75
uSF2,DE,451,01,0000963,9838,4776,166,235,244,146,64,21,22,76,148,188,277,273,292,322,360,168,299,203,310,494,282,128,58,5062,143,190,232,123,70,32,35,71,174,238,313,322,308,377,414,215,353,186,337,422,286,147,74
uSF2,DE,451,01,0000964,1599,772,20,21,30,18,7,5,3,12,20,13,27,41,34,36,65,27,63,37,62,112,67,31,21,827,19,14,24,11,9,2,3,9,17,25,28,43,32,61,75,38,87,38,54,109,69,40,20
uSF2,DE,451,01,0000965,8239,4004,146,214,214,128,57,16,19,64,128,175,250,232,258,286,295,141,236,166,248,382,215,97,37,4235,124,176,208,112,61,30,32,62,157,213,285,279,276,316,339,177,266,148,283,313,217,107,54
uSF2,DE,451,01,0000966,1381,664,27,48,57,30,12,11,3,14,33,35,56,56,68,52,37,9,18,8,24,28,20,14,4,717,37,51,55,33,13,5,5,18,32,50,56,76,49,51,43,19,10,15,28,29,26,9,7
uSF2,DE,451,01,0000967,1381,664,27,48,57,30,12,11,3,14,33,35,56,56,68,52,37,9,18,8,24,28,20,14,4,717,37,51,55,33,13,5,5,18,32,50,56,76,49,51,43,19,10,15,28,29,26,9,7
uSF2,DE,451,01,0000968,19401,9457,361,445,512,295,125,65,41,154,285,422,585,617,659,702,708,323,534,344,581,840,516,240,103,9944,336,402,458,257,129,56,56,164,352,483,652,692,636,781,839,369,619,352,599,754,535,267,156
uSF2,DE,451,01,0000969,19401,9457,361,445,512,295,125,65,41,154,285,422,585,617,659,702,708,323,534,344,581,840,516,240,103,9944,336,402,458,257,129,56,56,164,352,483,652,692,636,781,839,369,619,352,599,754,535,267,156
uSF2,DE,451,01,0000970,8182,4017,168,162,211,119,49,33,16,64,104,199,252,288,299,328,311,146,217,133,247,318,214,98,41,4165,156,161,171,101,46,19,16,75,146,195,283,294,279,353,382,135,256,151,234,303,223,111,75
uSF2,DE,451,01,0000971,8182,4017,168,162,211,119,49,33,16,64,104,199,252,288,299,328,311,146,217,133,247,318,214,98,41,4165,156,161,171,101,46,19,16,75,146,195,283,294,279,353,382,135,256,151,234,303,223,111,75
uSF2,DE,451,01,0000972,9838,4776,166,235,244,146,64,21,22,76,148,188,277,273,292,322,360,168,299,203,310,494,282,128,58,5062,143,190,232,123,70,32,35,71,174,238,313,322,308,377,414,215,353,186,337,422,286,147,74
uSF2,DE,451,01,0000973,1599,772,20,21,30,18,7,5,3,12,20,13,27,41,34,36,65,27,63,37,62,112,67,31,21,827,19,14,24,11,9,2,3,9,17,25,28,43,32,61,75,38,87,38,54,109,69,40,20
uSF2,DE,451,01,0000974,8239,4004,146,214,214,128,57,16,19,64,128,175,250,232,258,286,295,141,236,166,248,382,215,97,37,4235,124,176,208,112,61,30,32,62,157,213,285,279,276,316,339,177,266,148,283,313,217,107,54
uSF2,DE,451,01,0000975,1381,664,27,48,57,30,12,11,3,14,33,35,56,56,68,52,37,9,18,8,24,28,20,14,4,717,37,51,55,33,13,5,5,18,32,50,56,76,49,51,43,19,10,15,28,29,26,9,7
uSF2,DE,451,01,0000976,1381,664,27,48,57,30,12,11,3,14,33,35,56,56,68,52,37,9,18,8,24,28,20,14,4,717,37,51,55,33,13,5,5,18,32,50,56,76,49,51,43,19,10,15,28,29,26,9,7
uSF2,DE,451,01,0000977,19401,9457,361,445,512,295,125,65,41,154,285,422,585,617,659,702,708,323,534,344,581,840,516,240,103,9944,336,402,458,257,129,56,56,164,352,483,652,692,636,781,839,369,619,352,599,754,535,267,156
uSF2,DE,451,01,0000978,19401,9457,361,445,512,295,125,65,41,154,285,422,585,617,659,702,708,323,534,344,581,840,516,240,103,9944,336,402,458,257,129,56,56,164,352,483,652,692,636,781,839,369,619,352,599,754,535,267,156
uSF2,DE,451,01,0000979,89697,43535,2990,3307,3428,1884,1027,460,514,1520,2676,3227,3817,3662,3023,2836,2273,765,1094,744,1079,1380,964,572,293,46162,2883,3149,3391,1926,1041,503,497,1584,2920,3299,3974,3815,3191,2926,2407,851,1263,765,1114,1677,1414,913,659
uSF2,DE,451,01,0000980,15872,7443,414,483,445,248,161,82,108,341,535,593,596,595,493,532,421,112,200,147,206,287,214,147,83,8429,423,414,472,273,142,83,114,344,549,563,651,634,597,564,494,150,253,155,219,401,428,271,235
uSF2,DE,451,01,0000981,89697,43535,2990,3307,3428,1884,1027,460,514,1520,2676,3227,3817,3662,3023,2836,2273,765,1094,744,1079,1380,964,572,293,46162,2883,3149,3391,1926,1041,503,497,1584,2920,3299,3974,3815,3191,2926,2407,851,1263,765,1114,1677,1414,913,659
uSF2,DE,451,01,0000982,342057,166513,10385,11508,11554,6767,3525,2094,2107,6068,11099,12793,14524,14651,12876,11484,8852,2847,3721,2435,3623,5495,4242,2498,1365,175544,9756,10893,10694,6188,3445,2146,2529,6293,11158,12896,14827,14978,13412,12186,9607,3051,4239,2760,4252,6831,6224,4113,3066
uSF2,DE,451,01,0000983,18501,8962,341,420,439,266,253,478,695,1102,690,566,468,552,567,540,407,137,178,111,160,226,211,106,49,9539,320,362,406,239,283,654,1007,893,569,489,493,518,573,570,435,131,201,141,204,336,306,238,171
uSF2,DE,451,01,0000984,21692,10114,438,403,407,277,134,70,71,395,1157,1014,861,846,781,735,593,165,218,156,216,369,330,290,188,11578,405,345,379,244,161,64,80,506,1172,965,809,785,823,822,632,205,261,174,316,617,714,610,489
uSF2,DE,451,01,0000985,342057,166513,10385,11508,11554,6767,3525,2094,2107,6068,11099,12793,14524,14651,12876,11484,8852,2847,3721,2435,3623,5495,4242,2498,1365,175544,9756,10893,10694,6188,3445,2146,2529,6293,11158,12896,14827,14978,13412,12186,9607,3051,4239,2760,4252,6831,6224,4113,3066
uSF2,DE,451,01,0000986,342057,166513,10385,11508,11554,6767,3525,2094,2107,6068,11099,12793,14524,14651,12876,11484,8852,2847,3721,2435,3623,5495,4242,2498,1365,175544,9756,10893,10694,6188,3445,2146,2529,6293,11158,12896,14827,14978,13412,12186,9607,3051,4239,2760,4252,6831,6224,4113,3066
uSF2,DE,451,01,0000987,342057,166513,10385,11508,11554,6767,3525,2094,2107,6068,11099,12793,14524,14651,12876,11484,8852,2847,3721,2435,3623,5495,4242,2498,1365,175544,9756,10893,10694,6188,3445,2146,2529,6293,11158,12896,14827,14978,13412,12186,9607,3051,4239,2760,4252,6831,6224,4113,3066