11A,         0,         0,         0,         0,         0,         0,         0,         0,         0,         0,         0,         0,         0,         0,         0,         0,         0,         0,         0,         0,         0,         0,         0,         0,         0,         0,         0,         0,         0,         0,         0,         0,         0,         0,         0,         0,         0,         0,         0,         0,         0,         0,         0,         0,         0,         0,         0,         0,         0,         0,         0,         0
11F,    193031,         0,         0,     20525,         0,      1625,         0,         0,         0,         0,      2270,         0,         0,         0,         0,         0,         0,       325,         0,         0,         0,         0,         0,         0,      1442,         0,         0,         0,      1016,         0,         0,       372,         0,         0,         0,         0,     89981,         0,         0,         0,         0,         0,         0,         0,     59409,     16066,         0,         0,         0,         0,         0,         0
11G,      5900,         0,         0,         0,         0,         0,         0,         0,         0,         0,         0,         0,         0,         0,         0,         0,         0,         0,         0,         0,         0,         0,         0,         0,      5900,         0,         0,         0,         0,         0,         0,         0,         0,         0,         0,         0,         0,         0,         0,         0,         0,         0,         0,         0,         0,         0,         0,         0,         0,         0,         0,         0
14G,   1407961,         0,         0,     29935,         0,    151874,     10337,         0,         0,         0,     49006,         0,         0,      1670,     71942,         0,     43915,     40526,         0,         0,         0,         0,         0,    173346,      6619,     45657,     35465,      1009,      6212,         0,         0,         0,     18545,         0,         0,         0,      3028,         0,     19484,    169896,         0,         0,         0,         0,    436155,         0,         0,         0,         0,         0,     70700,     22640
19H,  50558577,    439755,         0,   2248552,    562822,   1115117,   1396948,     29366,     18048,         0,   3230441,   1229340,         0,    185792,   2586030,    341407,    367939,    576077,   1000649,   1283849,    211903,         0,     39796,   3432339,   1507911,    393048,   1003601,    161180,    312758,    852414,    298302,   1058168,    272923,   2470592,         0,     77106,   1554217,    365429,    504483,   5765540,     27460,   1153848,    106921,     25498,   8095088,    456806,     80203,         0,   2382273,    230680,    956399,    149559
21F,  12468533,    138372,         0,    397369,     97628,    325307,    202681,         0,     28446,         0,    700735,    568774,         0,     40855,    976424,     57602,    106816,     62450,     92570,    206108,     23521,         0,     12000,    930652,    414516,     34695,    233975,     26105,     80155,         0,     17304,    169783,     92223,    706871,         0,     13387,    349740,    107120,    205654,   1924235,         0,    229620,     23009,      8000,   1555896,     60841,     19001,         0,    744060,     39425,    426858,     17750
29G,     22990,         0,         0,         0,         0,         0,         0,         0,         0,         0,         0,         0,         0,         0,         0,         0,         0,         0,         0,         0,         0,         0,         0,     22990,         0,         0,         0,         0,         0,         0,         0,         0,         0,         0,         0,         0,         0,         0,         0,         0,         0,         0,         0,         0,         0,         0,         0,         0,         0,         0,         0,         0
31F,   6637466,     44266,         0,    165598,     38817,     75103,     64226,      4633,      1055,         0,    286011,    173970,         0,     16284,    597359,     46603,     30155,     49753,     57947,    195685,     19413,         0,      8867,    487082,    107411,     38828,    101812,     12577,     73398,     29961,     29489,    123934,     34226,    281500,         0,     19170,    236206,     75282,     89730,   1310958,      1300,    131912,      9267,      2208,   1241087,     65097,      8450,         0,    127248,     17885,     89674,     16029
39G,    143373,         0,         0,      1578,         0,      8952,      1531,         0,         0,         0,      8249,         0,         0,        75,     12754,         0,      7142,      6128,         0,         0,         0,         0,         0,     29406,      2159,      3367,      2200,        88,       622,         0,         0,         0,      2395,         0,         0,         0,       454,         0,      1487,      6121,         0,         0,         0,         0,     30916,         0,         0,         0,         0,         0,     10991,      6758
41F,  56544412,    533863,         0,   2500782,    623128,   1366938,   1536600,     24784,     45440,         0,   3647436,   1623809,         0,    210363,   2965097,    352401,    445676,    589100,   1035302,   1294362,    216225,         0,     43333,   3898499,   1816368,    388969,   1135765,    173489,    320531,    822453,    286144,   1104373,    330598,   2895964,         0,     71321,   1676826,    397267,    620407,   6385409,     26160,   1251839,    121350,     31290,   8469308,    468615,     88492,         0,   3010760,    252220,   1294076,    151280
41G,      5900,         0,         0,         0,         0,         0,         0,         0,         0,         0,         0,         0,         0,         0,         0,         0,         0,         0,         0,         0,         0,         0,         0,         0,      5900,         0,         0,         0,         0,         0,         0,         0,         0,         0,         0,         0,         0,         0,         0,         0,         0,         0,         0,         0,         0,         0,         0,         0,         0,         0,         0,         0
44G,   1407961,         0,         0,     29935,         0,    151874,     10337,         0,         0,         0,     49006,         0,         0,      1670,     71942,         0,     43915,     40526,         0,         0,         0,         0,         0,    173346,      6619,     45657,     35465,      1009,      6212,         0,         0,         0,     18545,         0,         0,         0,      3028,         0,     19484,    169896,         0,         0,         0,         0,    436155,         0,         0,         0,         0,         0,     70700,     22640
61V,   3342058,         0,         0,         0,     15615,         0,         0,         0,         0,         0,         0,         0,         0,      8797,    104670,    142538,     67947,     10318,         0,         0,         0,         0,         0,     68584,    318226,         0,      2394,         0,     16295,         0,         0,     72339,         0,   1427096,         0,         0,    230915,         0,         0,    135973,         0,         0,         0,         0,    239337,         0,      8004,         0,         0,         0,    473010,         0
64V,   2971352,         0,         0,         0,     20627,         0,         0,         0,         0,         0,         0,         0,         0,      5434,    121615,    682011,    118284,      5409,         0,         0,         0,         0,         0,     76423,    328750,         0,     34187,         0,     10458,         0,         0,     50639,         0,    556679,         0,      7571,    193103,         0,         0,     52095,         0,         0,         0,         0,    161099,         6,     24440,         0,         0,         0,    522522,         0
66V,   2971352,         0,         0,         0,     20627,         0,         0,         0,         0,         0,         0,         0,         0,      5434,    121615,    682011,    118284,      5409,         0,         0,         0,         0,         0,     76423,    328750,         0,     34187,         0,     10458,         0,         0,     50639,         0,    556679,         0,      7571,    193103,         0,         0,     52095,         0,         0,         0,         0,    161099,         6,     24440,         0,         0,         0,    522522,         0
A07,    827108,         0,         0,      1154,       669,    437197,      3651,       130,         0,         0,     18767,      9503,         0,       278,      4459,      7755,      4105,      3031,      2431,      9891,      1100,         0,      5917,     45840,     60976,      3228,     11320,       915,       973,       697,      4428,         0,        11,     27706,         0,      1547,     45915,     22543,       825,     20009,         0,      5273,       511,       191,     35828,      5484,      3068,         0,     16878,      2745,         0,       159
A08,     39745,         0,         0,         0,        85,     15778,       912,         0,         0,         0,       745,         0,         0,       285,      5531,         0,      1106,         0,       620,       755,       141,         0,        82,      3155,       297,       357,       323,       329,        62,         0,       185,         0,         0,         0,         0,       359,      2664,         0,       128,       145,         0,       219,        20,         0,      3345,       592,        31,         0,      1455,         1,         0,        38
A09,   3116774,     80047,         0,     52938,     33223,    317839,     48069,      2473,     10231,         0,    180907,    112071,         0,     15920,    143588,    121339,     57860,     49249,     45452,     41595,      5633,         0,     15609,    131832,     91050,     31898,     81716,     11022,     29031,     14651,     15913,     99873,     18572,    164078,         0,     11568,    192605,     43825,     40872,    191188,         0,     51332,     13326,      2600,    336941,     32354,      8806,         0,     65022,     20727,     72526,      9403
A10,    917066,         0,         0,      1154,       754,    452975,      4563,       130,         0,         0,     19512,      9503,         0,       563,     12863,     28244,      5211,      3031,      3051,     10646,      1241,         0,      5999,     48995,     61273,      3585,     11643,      2195,      1035,       697,      4613,         0,     10939,     27706,         0,      1906,     48579,     22543,       953,     20154,         0,      5492,       531,       191,     39173,      6076,      3099,         0,     18333,      2746,     14972,       197
A11,    106819,         0,         0,       727,        41,         0,       820,         0,         0,         0,      1680,         0,         0,         0,     37419,     40526,      4259,      9580,         0,         0,         0,         0,         0,         0,         0,         0,         0,         0,         0,         0,         0,         0,         0,       111,         0,         0,     11438,         0,        14,         0,         0,         0,        35,         0,         0,         0,         9,         0,         0,       160,         0,         0
A12,   1599637,      8947,         0,     28253,     52789,     17013,     64318,       109,       800,         0,    296278,      6771,         0,       732,     69729,     41843,    101745,     11094,      1716,      4647,       352,         0,      2141,     36456,     13827,     31089,     84903,      1374,     77752,       273,       286,         0,      2940,     16063,         0,     17623,    217151,      5083,     35492,      7582,         0,     73429,      3014,       183,    172774,      5880,      1247,         0,     70152,      2396,     12966,       425
A13,   1202477,         0,         0,     10749,     52748,         0,     63498,       109,         0,         0,    267694,      1606,         0,       330,     31071,      1317,     87326,      1175,       255,         0,       259,         0,      2141,     36456,     13827,     30488,     75312,      1193,     77752,       272,       224,         0,      2940,      3622,         0,     17457,    146846,         0,     32902,      3416,         0,     73429,      2949,         0,     83454,      2710,       877,         0,     66625,      1886,      7137,       425
A15,     50213,         0,         0,         0,         0,         0,         0,         0,         0,         0,         0,         0,         0,         0,      2873,     20489,         0,         0,         0,         0,         0,         0,         0,         0,         0,         0,         0,       951,         0,         0,         0,         0,     10928,         0,         0,         0,         0,         0,         0,         0,         0,         0,         0,         0,         0,         0,         0,         0,         0,         0,     14972,         0
A18,   2663744,         0,         0,     81284,         0,    499951,     16453,         0,         0,         0,    276705,      2371,         0,     12375,    305572,         0,    130001,     77244,         0,      3416,         0,         0,         0,    278350,     37165,     74125,     82579,      1355,     34138,         0,         0,         0,     12325,      8525,         0,         0,     73025,         0,     96768,    147381,         0,         0,         0,         0,    323440,         0,         0,         0,         0,         0,     70123,     19073
A20,    290333,      8947,         0,     16777,         0,     17013,         0,         0,       800,         0,     26904,      5165,         0,       402,      1239,         0,     10160,       339,      1461,      4647,        93,         0,         0,         0,         0,       601,      9590,       181,         0,         1,        62,         0,         0,     12330,         0,       166,     58867,      5083,      2574,      4166,         0,         0,        30,       183,     89315,      3170,       361,         0,      3527,       350,      5829,         0
B10,    505885,      6532,         0,     68793,      2426,     72276,     11337,         0,      6290,         0,     15760,     11517,         0,      4865,     11520,      3015,       299,     11987,      1375,      5599,       440,         0,        60,      7658,      6381,      1004,      6723,     22788,     18097,      3656,         0,     14515,     30143,     11159,         0,      4780,         0,     23562,      3039,      5626,         0,      8148,     16533,        39,     34258,      8293,       157,         0,     28199,         0,      9127,      7909
B11,     21253,         0,         0,      4138,         0,      2075,         0,         0,         0,         0,         0,         0,         0,         0,      2463,         0,         0,        51,         0,      1135,         0,         0,       192,         0,       684,         0,         0,         0,         0,        20,         0,         0,      4771,         0,         0,       716,         0,       105,         0,         0,         0,         0,         0,         8,      4040,         0,         0,         0,       855,         0,         0,         0
B12,     38890,      1187,         0,      4870,         0,       203,         0,         0,         0,         0,         0,         0,         0,       334,         0,         0,         0,         0,         0,         0,         0,         0,         0,         0,      1609,         0,         0,      2426,       326,       459,         0,         0,     13217,         0,         0,      2273,         0,      7450,      1004,         0,         0,         0,      1337,         0,         0,         0,         0,         0,      2195,         0,         0,         0
B13,    396871,      4045,         0,      3561,      3637,     49817,      9432,         0,         0,         0,     48408,      9359,         0,      1414,     35873,      7944,      6816,         0,     17333,     23074,       221,         0,         2,     17120,      6154,     13415,      2443,      2719,      1065,       981,      1690,         0,       907,         0,         0,      3306,      2848,       138,     35298,     14653,         5,      1347,      3674,        87,     25585,      2153,       292,         0,     27729,      2895,      9215,       216
B21,   1354366,     11764,         0,     94187,      6063,    247795,     21570,         0,      6290,         0,     97773,     20876,         0,     10273,     81596,     10959,     25767,     22632,     18708,     30691,       661,         0,       254,     43595,     22585,     30260,     13658,     28613,     24237,      5116,      1690,     14515,     53384,     11159,         0,     11075,      5815,     31255,     65780,     32586,         5,      9495,     21544,       134,    109318,     10446,       460,         0,     58978,      2895,     28603,      9306
B25,    391033,         0,         0,     12825,         0,    123424,       801,         0,         0,         0,     33605,         0,         0,      3660,     31740,         0,     18520,     10594,         0,       883,         0,         0,         0,     18817,      7757,     15841,      4492,       680,      4749,         0,         0,         0,      4346,         0,         0,         0,      2967,         0,     26148,     12307,         0,         0,         0,         0,     45435,         0,         0,         0,         0,         0,     10261,      1181
B26,       995,         0,         0,         0,         0,         0,         0,         0,         0,         0,         0,         0,         0,         0,         0,         0,       132,         0,         0,         0,         0,         0,         0,         0,         0,         0,         0,         0,         0,         0,         0,         0,         0,         0,         0,         0,       532,         0,       291,         0,         0,         0,         0,         0,         0,        29,        11,         0,         0,         0,         0,         0
C01,  63387295,    742808,         0,   1331493,    837754,  10929665,   1182307,     20072,    333057,         0,   2722076,   2355659,         0,    366325,   2062149,   2169061,   1026724,    738836,   1451940,   1666937,    250783,         0,    114338,   2075363,   1738637,    826782,    813014,    301049,    374752,    401226,     37286,   1615560,    908570,   4051657,         0,    194419,   2896542,   1366350,    638589,   2952432,     19314,    530383,    118062,     18647,   5271062,    439793,    145569,         0,   2729835,    769291,   1553416,    297711
C04,   1648805,    299933,         0,         0,         0,     71753,         0,         0,         0,         0,     12292,         0,         0,     37241,         0,      1147,    107187,         0,         0,         0,         1,         0,         0,         0,      9476,         0,     27024,         0,         0,     11735,         0,      2868,         0,         0,         0,         0,         0,      2763,      2595,    217622,         0,    345615,       655,      5539,    284523,    207663,       100,         0,         0,         0,         0,      1073
C05,   5620726,    129063,         0,      1061,      4459,   1225444,     45629,      7467,      1192,         0,    520028,         0,         0,     33601,    253869,      3705,         0,     97469,         0,      5557,        88,         0,         0,      5619,    156019,       246,    151676,      1044,     81128,         0,         0,    397701,         0,         0,         0,      9379,    201478,         0,     15646,    405511,        51,    147109,     24441,         0,    985412,     97365,     33906,         0,    351785,         0,    225673,       905
C06,   1690577,         0,         0,     10301,      8468,         0,      1783,         0,         0,         0,    169278,         0,         0,         0,     98004,      9759,         0,      1684,         0,       695,         0,         0,     13489,     20889,     98898,       829,         0,         0,         0,         0,         0,    264545,         0,         0,         0,         0,    106671,      2246,         0,     20286,         0,     65133,         0,         0,    689487,      1729,         0,         0,    105521,         0,         0,       882
C07,    289675,         0,         0,         0,         0,         0,         0,         0,         0,         0,    123466,         0,         0,         0,     46012,         0,         0,       473,         0,         0,         0,         0,         0,         0,      3817,         0,         0,         0,         0,         0,         0,     35707,         0,         0,         0,         0,         0,         0,         0,         0,         0,         0,         0,         0,     65245,         0,         0,         0,     14955,         0,         0,         0
C08,    196755,         0,         0,       951,       163,     32005,         0,         0,     13938,         0,     62026,         0,         0,         0,      8277,      4991,         0,         0,         0,         0,         0,         0,         0,         0,        13,         0,         0,       195,         0,         0,         0,         0,         0,         0,         0,         0,         0,         0,       197,         0,        19,     21446,      1139,         0,     44670,      1465,         0,         0,      5024,         0,         0,       236
C09,   1302007,     81687,         0,      5210,      7203,      2764,     26140,       297,         0,         0,    316604,         0,         0,      3779,     18125,      3435,      3509,         0,      2484,       915,         0,         0,      8704,     16999,      8952,     22384,     25706,       788,       104,      1258,     10791,         0,         0,         0,         0,      3860,    173113,     65777,       408,     14618,       206,    121737,      1785,        12,    324471,     21097,      7085,         0,         0,         0,         0,         0
C10,    200673,         0,         0,         0,         0,     49249,         0,         1,         0,         0,     10094,     23375,         0,         0,     11063,         0,      2759,      2959,         0,     10518,         0,         0,       799,         0,      4831,      1215,      2755,       360,       501,       162,      1590,      4590,         0,      9490,         0,      1641,      6912,      7180,      2135,     13516,         0,       910,       395,       695,     13272,      8227,       873,         0,      3109,      1636,      3861,         0
C11,   1594934,     11586,         0,         0,         0,     96353,         0,      8308,     29358,         0,    532989,    115060,         0,         0,         0,         0,        92,       641,     56774,         0,     31281,         0,     24670,     27321,    160502,         0,         0,         0,       431,         0,     13232,     67133,     11186,         0,         0,      2500,     19181,      1033,         0,    166541,      4368,     23100,         0,       225,         0,     10154,      8791,         0,    158881,         0,         0,     13243
C12,   2212533,         0,         0,       697,     49729,    284826,     32632,      2652,     32529,         0,    234040,         0,         0,     27190,    216056,     37793,      5845,     44404,         0,         0,         0,         0,     28026,     84967,    118601,         0,    106807,     10003,         0,         0,         0,    219643,     64131,         0,         0,     17549,     57476,         0,         0,    251743,         0,     25625,         0,       271,    201020,     28082,         0,         0,     12468,         0,     17728,         0
C13,   7723215,    165183,         0,     14070,     41472,   3100914,     12711,       121,     10868,         0,    981056,     68267,         0,     21086,     66065,    158747,     20837,     16733,    114987,    111452,      4433,         0,     97150,    102986,     42435,     46802,    374366,     19535,     35244,     19547,      8086,     88554,      6750,   1049053,         0,      3586,     60013,     25167,    128739,     56606,       102,     66357,      1357,      1575,     83740,     43672,      1062,         0,     86201,    250876,    114486,       166
C14,   4250506,    116194,         0,     67118,     67389,    537524,     40328,       967,     14798,         0,    245547,    185576,         0,     19235,    278281,     85699,     42686,     43284,    103072,    130925,     13969,         0,      5412,    217778,     61918,    107934,     87153,     14676,     22862,     12345,      6245,    133537,     42376,    176129,         0,     12439,    229862,     60674,     52965,    294981,       607,     84579,     16630,      2634,    388039,     19258,      3184,         0,     69705,     49163,     78408,      6421
C15,   1171335,     42063,         0,     19961,     14311,    171778,     17275,      1255,      5271,         0,     84681,     43511,         0,     10209,     30496,     39042,         0,     13040,     34999,     26119,      6881,         0,      6590,       173,     25815,     22930,     35870,      4067,     12204,      6649,      3355,     52674,     11375,     47850,         0,      3525,     69935,     28982,     11979,      2355,       263,     32726,      5622,      1310,    125444,     16778,       882,         0,     31722,     15917,     31056,      2395
C16,     99481,      2610,         0,      1602,       876,     13151,      1422,        55,       384,         0,      6969,      4513,         0,       618,      5610,      2649,       569,       935,      2764,      3465,       423,         0,       367,      3301,      1269,      1931,      2887,       808,       858,       661,       558,      2977,       915,      5995,         0,       682,      4278,      1786,       437,      5300,        27,      2343,       421,        73,      5552,      1044,       174,         0,      1801,      1074,      2763,       584
C17,    271255,      6012,         0,      5038,      2594,     38000,      3410,       134,      1632,         0,     16380,      7726,         0,      1500,     16869,      8430,      3585,      2548,      6749,      7694,       977,         0,       750,      5434,      5140,      5418,      7802,      1815,      2651,      1802,       828,      9685,      3288,     12279,         0,      1950,     13701,      4644,      2387,     11835,        62,      5363,      1853,       166,     21255,      3126,       529,         0,      6891,      2621,      6925,      1777
C18,    283939,      6413,         0,      5789,      3920,     40472,      4437,       104,      1739,         0,     15504,     10117,         0,      1807,     16211,      8807,      3734,      3661,      6252,      7656,       842,         0,       641,      9869,      5644,      4212,      6030,      1775,      1841,      1950,       869,      7884,      2284,      6196,         0,      1976,     15165,      4880,      4191,     13781,        40,      5346,      1754,       157,     27827,      3426,       426,         0,      7173,      2270,      6860,      2007
C19,    318658,      9439,         0,      8547,      3423,     32756,      2457,       135,      3603,         0,     22917,      9808,         0,      1702,      9387,      5520,      1598,      2225,      6074,      7188,       753,         0,      6452,      7929,      3689,      6504,     11589,      2251,      1051,      2535,      1568,      5462,       606,      2138,         0,      4204,     31128,     12082,      3252,     13179,       196,      9475,       878,       259,     42905,      2976,      3140,         0,      5285,      5325,      3557,      1511
C20,    637870,     15246,         0,     30586,      8877,    147617,     14698,        26,      3961,         0,     78195,       530,         0,      6119,     24560,     26819,      1253,      1530,         0,     13046,       229,         0,      1004,     49586,      7422,     10048,     20043,      2347,      3540,       905,      1108,     12211,     14390,      3959,         0,      3746,      6127,      1750,      8282,     19407,        70,     13992,       883,       240,     30890,     11317,      1189,         0,     20298,     10549,      7210,      2065
C21, 103084179,   1722679,         0,   1653046,   1108911,  19430546,   1440701,     41938,    460597,         0,   7015873,   3213703,         0,    565432,   3916396,   2621485,   1379921,   1072971,   1915579,   2143345,    319884,         0,    311407,   2977563,   2590753,   1266197,   2232947,    374071,    603024,    763934,     90274,   2974953,   1133796,   5478354,         0,    269553,   4313234,   1650783,   1015260,   4719057,     25325,   1586078,    186752,     34047,   9622793,    954518,    212299,         0,   3672165,   1149246,   2468853,    383936
C22,   4711858,         0,         0,     81150,         0,   1943064,     17230,         0,         0,         0,    607687,      5395,         0,     14690,    297882,         0,    119948,     60730,         0,      9434,         0,         0,         0,    247152,     83904,    105729,     81980,      1759,     40164,         0,         0,         0,     30885,      7085,         0,         0,     85941,         0,     89009,    118807,         0,         0,         0,         0,    553129,         0,         0,         0,         0,         0,     62947,     46157
C23,    319676,         0,         0,         0,         0,         0,         0,         0,         0,         0,         0,         0,         0,         0,         0,         0,       507,         0,         0,         0,         0,         0,         0,         0,      1210,         0,       255,         0,      1098,         0,         0,      4272,         0,         0,         0,         0,    290494,         0,      9516,         0,         0,         0,         0,         0,       141,     12132,        51,         0,         0,         0,         0,         0
C24,    984964,         0,         0,         0,         0,         0,         0,         0,         0,         0,         0,         0,         0,         0,    293084,         0,         0,         0,         0,         0,         0,         0,         0,         0,         0,         0,    401776,         0,         0,    290104,         0,         0,         0,         0,         0,         0,         0,         0,         0,         0,         0,         0,         0,         0,         0,         0,         0,         0,         0,         0,         0,         0
C25,   3520558,     94442,         0,     69472,     58273,    568590,     38242,       344,      8267,         0,    254044,    143975,         0,     19378,    164396,     55881,     39066,     41819,     88949,    141744,      9224,         0,      3015,    102034,     53726,    103233,     76205,     11599,     20441,     13055,      4758,     54012,     35754,     80500,         0,      8097,    136351,     65469,     38857,    140537,         0,     84839,     10877,      2244,    464698,     36287,      5338,         0,     61511,     40524,     63688,      6803
C26,     53388,         0,         0,         0,         0,         0,         0,         0,         0,         0,         0,         0,         0,         0,         0,         0,        23,         0,         0,         0,         0,         0,         0,         0,        45,         0,         9,         0,      5077,         0,         0,       210,         0,         0,         0,         0,     40880,         0,      6075,         0,         0,         0,         0,         0,        10,      1059,         0,         0,         0,         0,         0,         0
C27,      1009,         0,         0,         0,         0,         0,         0,         0,         0,         0,         0,         0,         0,         0,         0,         0,         0,         0,         0,         0,         0,         0,         0,         0,         0,         0,         0,         0,         0,         0,         0,         0,         0,         0,         0,         0,      1009,         0,         0,         0,         0,         0,         0,         0,         0,         0,         0,         0,         0,         0,         0,         0
C35,    635192,         0,         0,         0,         0,         0,         0,         0,         0,         0,         0,    217676,         0,         0,         0,         0,         0,         0,     16924,         0,         0,         0,         0,         0,         0,         0,         0,         0,         0,         0,         0,         0,         0,         0,         0,         0,    110317,         0,         0,         0,         0,         0,         0,         0,         0,         0,         0,         0,         0,         0,    290275,         0
C36,    267334,         0,         0,         0,         0,    144621,         0,         0,         0,         0,         0,     22515,         0,       952,         0,         0,         0,         0,     23611,         0,         0,         0,         0,       163,         0,         0,         0,         0,         0,         0,         0,         0,      1286,     26023,         0,         0,     48163,         0,         0,         0,         0,         0,         0,         0,         0,         0,         0,         0,         0,         0,         0,         0
C38,   1263857,    216285,         0,         0,         0,         0,         0,         0,         0,         0,         0,         0,         0,     42690,         0,    176542,         0,         0,         0,     48670,         0,         0,         0,         0,         0,         0,         0,         0,         0,         0,         0,    775921,         0,         0,         0,         0,         0,         0,         0,         0,         0,         0,         0,      3749,         0,         0,         0,         0,         0,         0,         0,         0
C39,     23176,     12483,         0,         0,         0,         0,         0,         0,         0,         0,         0,         0,         0,         0,         0,      6687,         0,         0,         0,      3990,         0,         0,         0,         0,         0,         0,         0,         0,         0,         0,         0,         0,        16,         0,         0,         0,         0,         0,         0,         0,         0,         0,         0,         0,         0,         0,         0,         0,         0,         0,         0,         0
D11,   1224957,      3391,         0,     19524,     11252,     76664,      4002,      3052,     13417,         0,      1593,     12953,         0,       744,    112093,     98342,     60730,     16057,      1468,      1334,     18207,         0,      9645,    132026,     66971,      1728,     30013,      3470,     28052,      2376,     35040,         0,         0,    138869,         0,     14993,     31355,      1227,     23661,     24206,       863,      2677,      3425,      1129,     17295,       886,    144646,         0,     13917,       969,     38932,      1763
D21,   2721596,    269827,         0,    116593,      2411,    316641,      1796,    146534,         0,         0,      2576,     61389,         0,        78,     11133,     51379,      3673,    135827,         0,     12068,         0,         0,    394077,    235973,    130330,      8027,    107087,     64881,     80892,         4,       270,         0,         0,     65774,         0,      7577,     11515,     44434,     52057,     65509,     21597,    124557,      8834,     24536,     46803,        88,       265,         0,       942,      1655,     41646,     50341
D22,    406294,         0,         0,      1886,         0,    249129,       349,         0,         0,         0,      2576,      4125,         0,        72,      1463,         0,      2690,     11746,         0,      1007,         0,         0,         0,     25677,      1312,      4523,      2088,         0,         0,         0,         0,         0,         0,      5621,         0,         0,       994,         0,      5208,     62044,         0,         0,         0,         0,     21384,         0,         0,         0,         0,         0,         0,      2400
D23,   2315302,    269827,         0,    114707,      2411,     67512,      1447,    146534,         0,         0,         0,     57264,         0,         6,      9670,     51379,       983,    124081,         0,     11061,         0,         0,    394077,    210296,    129018,      3504,    104999,     64881,     80892,         4,       270,         0,         0,     60153,         0,      7577,     10521,     44434,     46849,      3465,     21597,    124557,      8834,     24536,     25419,        88,       265,         0,       942,      1655,     41646,     47941
E07,   5881915,     87953,         0,         0,     58797,    140318,     94187,      5831,      9061,         0,    529715,    234534,         0,     22422,    273715,    124776,     71379,     69580,    247364,    109915,         0,         0,      9332,    311616,    177611,     50730,    138695,     21792,     43946,     31881,     17456,    454725,     57283,    370702,         0,      9227,    360227,     75686,    128619,    268967,      1029,    140734,     15928,       181,    587647,     50833,     15654,         0,    219289,     40354,    185425,     16799
E08,   3959824,     47104,         0,    105071,     47750,    275440,     49098,      4420,      7601,         0,    131214,     78136,         0,     19312,    275097,     80114,     69071,     74737,     69549,     76110,       672,         0,     20619,    165920,     89193,     57178,    114522,     26581,     46149,     17348,     32423,       346,     40289,    368079,         0,     27155,    153359,     96497,     54824,    209473,      1330,     49154,     16151,      1754,    692169,     14419,     23025,         0,     96316,     33288,     89827,     11940
E09,   9168829,    126893,         0,         0,     85324,   1355415,    176658,     10517,     33472,         0,    650403,    299597,         0,     42179,    462502,    234465,    120641,    124926,     99289,    174897,     26583,         0,     27365,    499590,    177634,     81366,    211450,     37235,     67362,     69239,     41220,    265386,     45480,    588248,         0,     23601,    583874,    123651,    170796,    460638,      2333,    161621,     28667,      3272,    738543,     76598,     34416,         0,    273537,     84740,    233322,     33884
E10,     37003,         0,         0,         0,         0,         0,         0,         0,         0,         0,         0,         0,         0,         0,         0,         0,         8,         0,         0,         0,         0,         0,         0,         0,       159,         0,         6,         0,         0,         0,         0,       654,         0,         0,         0,         0,     35726,         0,       218,         0,         0,         0,         0,         0,         0,       231,         1,         0,         0,         0,         0,         0
E11,   6960177,    200346,         0,    117696,     95394,    809477,     89119,      3131,     21199,         0,    468352,    277633,         0,     36014,    318972,    168555,     96065,     94599,    134392,    243967,     21825,         0,     20459,    251806,    153365,    127407,    157214,     28719,     52473,     30294,     23182,    162609,     53938,    273260,         0,     21476,    338484,    117955,     87110,    369482,        29,    137454,     24428,      4364,    847579,     76636,     16221,         0,    138571,     90099,    139507,     19320
E12, 166386207,   2219025,         0,   2578076,   1520323,  23148810,   2715539,    173238,    593422,         0,   9382851,   4877040,         0,    716260,   8542087,   4252344,   2189701,   2003109,   2321461,   3088405,    500813,         0,    649261,   8241409,   4166197,   1534103,   3585717,    696141,   1351201,    941369,    709856,   6924487,   1182426,  12577112,         0,    473636,   8582563,   2288671,   2636775,   9327372,     41535,   2547259,    516428,     57439,  13700040,   1352408,    556616,         0,   4326012,   1412816,   4638257,    546597
E13,  99175148,   1339428,         0,   1428522,    952161,  13611730,   1606118,    103011,    372722,         0,   5166374,   3027410,         0,    447037,   4994845,   2561841,   1414706,   1165593,   1343438,   1837411,    319785,         0,    373070,   4512909,   2446590,    952058,   2157313,    409342,    904915,    572623,    440088,   4193984,    683253,   7966504,         0,    303393,   5172782,   1283577,   1556742,   5802318,     27622,   1526649,    320289,     39021,   7961247,    841553,    358412,         0,   2587181,    835186,   2914442,    339953
E17,   6431357,     72491,         0,         0,     59671,    762043,    111082,     10382,     25344,         0,    414213,    162451,         0,     33104,    416974,    164411,     71767,     86250,     27362,    109779,       326,         0,     31462,    430484,    108756,     50559,    138635,     23074,     48560,     41176,     35931,    126579,     61673,    567429,         0,      9590,    400009,     94660,    114614,    402014,      1965,    100233,     19108,      1086,    578561,     33735,     27322,         0,    220791,     40747,    171700,     23254
E18,   9752547,         0,         0,    332431,         0,   3221393,     57339,         0,         0,         0,    908744,     14029,         0,     35756,    914782,         0,    281968,    228025,         0,      9152,         0,         0,         0,    678120,     97758,    224770,    218194,      4785,    117802,         0,         0,         0,     60983,     23169,         0,         0,    201943,         0,    323763,    351002,         0,         0,         0,         0,   1108532,         0,         0,         0,         0,         0,    261008,     77099
E27,    185726,         0,         0,         0,         0,         0,         0,         0,         0,         0,         0,         0,         0,         0,         0,         0,       158,         0,         0,         0,         0,         0,         0,         0,       311,         0,        33,         0,     10236,         0,         0,      2433,         0,         0,         0,         0,    150281,         0,     18160,         0,         0,         0,         0,         0,       126,      3868,       120,         0,         0,         0,         0,         0
F12,  11794790,    126857,         0,    480248,     95166,   1216965,    272192,         0,     23980,         0,   1234416,    368841,         0,     90511,    492468,    289196,     34703,     53284,     45908,     67951,     24051,         0,     17603,    439330,    183009,     85621,    339456,     39068,     86593,    204101,     44709,    153197,    129537,    691129,         0,      8924,    510885,    113603,     26041,    833473,         0,    190272,      2777,      5268,   1617847,     82599,     13082,         0,    626548,     73796,    320522,     39063
F18,    428367,         0,         0,     12610,         0,    108537,      1722,         0,         0,         0,     81836,         0,         0,         0,     25651,         0,     14403,      4998,         0,         0,         0,         0,         0,     18783,     10782,     14568,     13884,        12,      5186,         0,         0,         0,      4650,      1013,         0,         0,      9514,         0,      4422,     17290,         0,         0,         0,         0,     64634,         0,         0,         0,         0,         0,     10144,      3728
G12,   5562408,     47196,         0,    127858,     49046,    786155,     91361,      2661,      6615,         0,    433410,    156068,         0,     20842,    235390,    244956,    178152,    104421,     90786,     67354,     34060,         0,      4843,    358505,    275532,     45688,    135097,     24776,     45625,     45088,     12665,    227278,      9669,    184433,         0,     25409,    231492,     80478,    204423,    110867,       475,     69544,     62787,      3311,    215395,     71448,     12140,         0,    229211,     82219,     95927,     21752
G15,   1400677,      4852,         0,     16897,      5598,    355871,      5897,        99,         0,         0,    100375,     18162,         0,         0,         0,     25766,    124133,     12732,     10821,     21780,     14174,         0,         0,     14610,    167745,         0,     38198,      1464,      6518,         0,      4406,    128818,       279,     13454,         0,         0,     35201,        20,    131494,      3807,         0,      2194,         0,      1683,         0,      8093,      5110,         0,     65631,     46972,      7706,       117
G18,    362959,         0,         0,     11952,         0,    105742,      2718,         0,         0,         0,     24887,         0,         0,      2698,     37628,         0,      8651,     12128,         0,         0,         0,         0,         0,     41145,      7368,      4724,      3828,       393,      5993,         0,         0,         0,       326,         0,         0,         0,     10487,         0,     12914,      8217,         0,         0,         0,         0,     45155,         0,         0,         0,         0,         0,     14006,      1999
I86,   3603241,     31930,         0,    169651,     38051,     72844,    110660,      3294,      1668,         0,    254965,     77602,         0,     15858,    192552,     23892,     32330,     38873,     57660,     89528,     14226,         0,      3568,    212397,    111576,     20181,     81451,     11085,     19196,     61093,     21927,     81769,     18197,    213904,         0,      4869,    126617,     26606,     43384,    318929,      2033,     79047,      6708,      1733,    572974,     35883,      6990,         0,    169178,     16500,     97936,     11926
I88,     96277,         0,         0,      3499,         0,      9029,       622,         0,         0,         0,      3064,         0,         0,        89,      7874,         0,      2779,      2655,         0,         0,         0,         0,         0,     11915,       753,      2773,      2681,        46,       564,         0,         0,         0,      1269,         0,         0,         0,       152,         0,      1000,     11240,         0,         0,         0,         0,     27842,         0,         0,         0,         0,         0,      3976,      2455
I89,   3699518,     31930,         0,    173150,     38051,     81873,    111282,      3294,      1668,         0,    258029,     77602,         0,     15947,    200426,     23892,     35109,     41528,     57660,     89528,     14226,         0,      3568,    224312,    112329,     22954,     84132,     11131,     19760,     61093,     21927,     81769,     19466,    213904,         0,      4869,    126769,     26606,     44384,    330169,      2033,     79047,      6708,      1733,    600816,     35883,      6990,         0,    169178,     16500,    101912,     14381
J10,      2905,      2738,         0,         0,         0,         0,         0,         0,         0,         0,         0,         0,         0,         0,         0,         0,         0,         0,         0,         0,         0,         0,       167,         0,         0,         0,         0,         0,         0,         0,         0,         0,         0,         0,         0,         0,         0,         0,         0,         0,         0,         0,         0,         0,         0,         0,         0,         0,         0,         0,         0,         0
J11,     41754,         0,         0,         0,         0,         0,      8209,         0,         0,         0,         0,      3341,         0,         0,      8710,         0,       578,       100,         0,         0,         0,         0,         0,         0,      9172,         0,      9305,         0,      2339,         0,         0,         0,         0,         0,         0,         0,         0,         0,         0,         0,         0,         0,         0,         0,         0,         0,         0,         0,         0,         0,         0,         0
J12,     69214,         0,         0,         0,         0,         0,     15699,         0,         0,         0,         0,      4805,         0,         0,     14961,         0,      1069,       156,         0,         0,         0,         0,         0,         0,     17438,         0,     10822,         0,      4264,         0,         0,         0,         0,         0,         0,         0,         0,         0,         0,         0,         0,         0,         0,         0,         0,         0,         0,         0,         0,         0,         0,         0
J13,    971250,    142275,         0,         0,         0,         0,         0,         0,         0,         0,         0,         0,         0,         0,         0,         0,         0,         0,         0,     50938,         0,         0,        55,         0,         0,         0,         0,         0,         0,         0,         0,    775921,         0,         0,         0,         0,         0,         0,         0,         0,         0,         0,         0,      2061,         0,         0,         0,         0,         0,         0,         0,         0
J15,     87190,     83777,         0,         0,         0,         0,         0,         0,         0,         0,         0,         0,         0,         0,         0,         0,         0,         0,         0,      1721,         0,         0,        14,         0,         0,         0,         0,         0,         0,         0,         0,         0,         0,         0,         0,         0,         0,         0,         0,         0,         0,         0,         0,      1678,         0,         0,         0,         0,         0,         0,         0,         0
K09,   1050918,     18533,         0,         0,     18291,         0,     19906,       922,      3051,         0,     17428,     49843,         0,      9978,     81152,     20863,     18636,     29512,     39867,     25834,      3135,         0,         0,     59451,     27008,      9378,     14988,      9134,     12535,     19994,      3516,      1973,         0,     36570,         0,      6901,     56519,     38398,     17497,     39650,       159,     23399,      7779,       968,    215392,     23493,      2951,         0,     44650,     14165,       389,      7110
K10,   2180564,     23811,         0,         0,     25157,         0,     27377,      1640,      3564,         0,    315607,     72401,         0,     10551,    154238,    142002,     35373,     62177,     40098,     19740,      4702,         0,      1089,    124591,     80779,     36310,     81910,      9997,     15894,     25094,      4743,     91630,      2649,    134409,         0,     10860,    105538,     42060,     55432,     67410,       316,     26310,     55008,       660,         0,     39862,      4039,         0,    118930,     21082,     70999,     14525
K11,    930160,         0,         0,    110961,         0,    430284,     38181,         0,         0,         0,         0,     15662,         0,       313,         0,     56325,         0,         0,         0,         0,     12049,         0,      3754,    159853,         0,         0,         0,      4181,     10643,         0,         0,      4857,      6741,         0,         0,      7648,     34234,         0,         0,         0,         0,     17641,         0,         0,         0,         0,         0,         0,         0,         0,     16833,         0
K12,     11203,         0,         0,         0,         0,         0,         0,         0,         0,         0,         0,         0,         0,         0,         0,         0,        10,         0,         0,         0,         0,         0,         0,         0,        99,         0,         1,         0,      2926,         0,         0,       148,         0,         0,         0,         0,      6488,         0,         0,         0,         0,         0,         0,         0,         3,      1488,        40,         0,         0,         0,         0,         0
K18,    320151,         0,         0,     11511,         0,     89417,      2427,         0,         0,         0,     20583,         0,         0,      2698,     34057,         0,      8626,     12059,         0,         0,         0,         0,         0,     34043,      5592,      4724,      3828,       393,      5972,         0,         0,         0,         0,         0,         0,         0,     10342,         0,     11750,      7321,         0,         0,         0,         0,     39441,         0,         0,         0,         0,         0,     13630,      1737
L12,    261732,         0,         0,         0,         0,     97822,         0,         0,         0,         0,         0,         0,         0,         0,         0,         0,         0,         0,         0,         0,         0,         0,         0,         0,      7417,         0,         0,         0,         0,         0,         0,     40194,         0,         0,         0,      2243,     10754,         0,         0,    102295,         0,       974,         0,         0,         0,         0,         0,         0,         0,         0,        33,         0
M12,    280032,         0,         0,         0,         0,    105062,         0,         0,         0,         0,         0,         0,         0,         0,         0,    172298,         0,         0,         0,        20,         0,         0,         0,         0,         0,         0,         0,         0,         0,         0,         0,         0,         0,         0,         0,         0,         0,         0,         0,         0,         0,         0,         0,         0,         0,         0,         0,         0,         0,         0,      2652,         0
Q11,   2246753,         0,         0,     29670,     13832,     86989,     11756,      7434,     13099,         0,         0,      7161,         0,         0,    362893,    138109,    182933,     34972,      2267,      1059,     13251,         0,      4210,     78439,     84366,         0,     35792,      1399,     24868,         0,     50684,    382876,         0,    154520,         0,     17948,     21001,      5914,      5933,    250069,       440,      9905,      3961,         0,     12813,         0,    151921,         0,      9885,      2637,     26144,      5603
T01,  74345724,    281701,         0,   1403427,    436681,   5843794,   1391416,         0,    137123,         0,   4248473,   1950080,         0,    229263,   5722905,   1701732,    971862,    986185,    420589,    404449,    209729,         0,         0,   5645518,   1495682,    411562,   1353530,    278305,    758358,    270131,    677689,   4820756,    123607,   7217648,         0,    177673,   4259102,    502583,   1700699,   4737266,         0,    899737,    285719,         0,   7723813,    443164,    364465,         0,    861532,    359366,   2416458,    221952
T02,       182,         0,         0,         0,         0,         0,         0,         0,         0,         0,         0,         0,         0,         0,         0,         0,         0,         0,         0,         0,         0,         0,         0,         0,         0,         0,         0,         0,         0,         0,         0,         0,         0,         0,         0,         0,         0,         0,         0,         0,         0,         0,         0,       182,         0,         0,         0,         0,         0,         0,         0,         0
T04,   2200960,         0,         0,    167031,         0,    591635,     24711,         0,         0,         0,     44442,         0,         0,      6334,    357385,         0,     33638,     86498,         0,       438,         0,         0,         0,    173237,      1553,     31506,     56316,      1673,     57334,         0,         0,         0,     18516,         0,         0,         0,     53109,         0,    118793,      2932,         0,         0,         0,         0,    221373,         0,         0,         0,         0,         0,    137948,     14558
T05,      2525,         0,         0,         0,         0,         0,         0,         0,         0,         0,         0,         0,         0,         0,         0,         0,         0,         0,         0,         0,         0,         0,         0,         0,         0,         0,         0,         0,         0,         0,         0,         0,         0,         0,         0,         0,         0,         0,         0,         0,         0,         0,         0,         0,      2525,         0,         0,         0,         0,         0,         0,         0
T06,  72144764,    281701,         0,   1236396,    436681,   5252159,   1366705,         0,    137123,         0,   4204031,   1950080,         0,    222929,   5365520,   1701732,    938224,    899687,    420589,    404011,    209729,         0,         0,   5472281,   1494129,    380056,   1297214,    276632,    701024,    270131,    677689,   4820756,    105091,   7217648,         0,    177673,   4205993,    502583,   1581906,   4734334,         0,    899737,    285719,         0,   7502440,    443164,    364465,         0,    861532,    359366,   2278510,    207394
T09,    543003,         0,         0,         0,         0,         0,         0,         0,         0,         0,         0,         0,         0,         0,         0,         0,         0,         0,         0,    534835,         0,         0,         0,         0,         0,         0,         0,         0,         0,         0,         0,         0,         0,         0,         0,         0,         0,         0,         0,         0,         0,         0,      8168,         0,         0,         0,         0,         0,         0,         0,         0,         0
T15,    104984,         0,         0,         0,         0,         0,         0,         0,         0,         0,         0,         0,         0,         0,         0,         0,         0,         0,     81251,         0,         0,         0,         0,         0,         0,         0,         0,         0,         0,       901,         0,         0,         0,     22451,         0,         0,         0,         0,         0,         0,         0,         0,         0,         0,         0,         0,         0,         0,       381,         0,         0,         0
T40,    606758,         0,         0,         0,         0,         0,         0,         0,         0,         0,         0,         0,         0,         0,         0,         0,      5726,         0,     76057,         0,         0,         0,         0,         0,         0,         0,         0,         0,         0,         0,         0,         0,         0,         0,         0,         0,     26854,         0,         0,    498121,         0,         0,         0,         0,         0,         0,         0,         0,         0,         0,         0,         0
T99,    727470,         0,         0,         0,         0,         0,         0,         0,         0,         0,         0,         0,         0,         0,         0,      2280,      3420,         0,     46594,       592,         0,         0,         0,     32799,      1207,      1334,    121814,         0,      1027,         0,         0,         0,         0,    103050,         0,       500,     19108,      5202,      1271,    367913,         0,      3591,      3133,         0,      8474,         0,         0,         0,       215,         0,         0,      3946
U20,   3016657,     20724,         0,     55930,     16817,    512576,     72393,         0,      5211,         0,    200388,     64537,         0,     11317,    272589,     42420,     34198,     50366,     16911,     42853,      2364,         0,      5314,    176198,     63294,     17374,     77909,     19203,     34204,     31683,      4133,     14202,     16439,    171904,         0,      9562,    131666,     30215,     68630,    166875,       274,     29998,     11859,       945,    324168,     22358,      8349,         0,     64388,     18302,     64580,     11037
U21,    248239,         0,         0,      4999,         0,     53568,      1436,         0,         0,         0,     19861,        53,         0,       599,     39619,         0,      7274,      7831,         0,         0,         0,         0,         0,     20891,      1790,      3050,      5856,       105,      2227,         0,         0,         0,      1533,       346,         0,         0,     10300,         0,      6013,      8416,         0,         0,         0,         0,     45762,         0,         0,         0,         0,         0,      5341,      1369
U22,   2768418,     20724,         0,     50931,     16817,    459008,     70957,         0,      5211,         0,    180527,     64484,         0,     10718,    232970,     42420,     26924,     42535,     16911,     42853,      2364,         0,      5314,    155307,     61504,     14324,     72053,     19098,     31977,     31683,      4133,     14202,     14906,    171558,         0,      9562,    121366,     30215,     62617,    158459,       274,     29998,     11859,       945,    278406,     22358,      8349,         0,     64388,     18302,     59239,      9668
U97,   3455528,     51043,         0,     84091,     15168,    889308,    131448,        75,     11564,         0,    151082,    110949,         0,      6667,    131141,     91813,     16190,     74790,     16802,     73123,     10287,         0,     16169,    139129,    109282,     35556,     81010,     41723,     13649,      7310,      5179,    132178,     25470,    248402,         0,     11148,    312825,     59450,     28487,     63805,       252,     35323,      4840,      3045,     16119,     66653,      5810,         0,     45118,     27018,     51956,      3081
U98,     62229,         0,         0,      6008,         0,     10092,        86,         0,         0,         0,      6797,         0,         0,       577,      2949,         0,      1198,      2823,         0,         0,         0,         0,         0,      5129,       225,       611,      1921,        50,       644,         0,         0,         0,        66,         0,         0,         0,      3071,         0,      4838,      5266,         0,         0,         0,         0,      8700,         0,         0,         0,         0,         0,       191,       987
U99,   3517757,     51043,         0,     90099,     15168,    899400,    131534,        75,     11564,         0,    157879,    110949,         0,      7244,    134090,     91813,     17388,     77613,     16802,     73123,     10287,         0,     16169,    144258,    109507,     36167,     82931,     41773,     14293,      7310,      5179,    132178,     25536,    248402,         0,     11148,    315896,     59450,     33325,     69071,       252,     35323,      4840,      3045,     24819,     66653,      5810,         0,     45118,     27018,     52147,      4068
V10,  16624836,    112276,         0,    219421,     71689,   2388261,    247123,     13169,     83870,         0,   1196871,    560107,         0,     62871,    580856,    435563,    228213,    145763,    240719,    454797,     34343,         0,     17896,    674524,    410245,    135087,    296006,     83427,    145361,    115627,     56831,    568235,    126064,   1664965,         0,     51773,   1011077,    161058,    389344,   1101251,      5517,    264335,     48037,      2361,    544564,    205325,     52293,         0,    554366,    144308,    654342,     64705
V11,   4811798,     59059,         0,         0,     49765,    508954,     88636,      8327,     16582,         0,    300048,    121245,         0,     26051,    342158,    127153,     55345,     69611,     23324,     80066,       238,         0,     24718,    350357,     83429,     39810,    108990,     17141,     34260,     31462,     26806,     85545,     42772,    413668,         0,      6719,    284147,     69383,     69826,    293969,      1426,     75185,     14338,       767,    488788,     23325,     19340,         0,    158027,     29551,    125426,     16061
V12,   1197371,      5174,         0,         0,      4424,    202332,     17978,      1260,      5712,         0,     95552,     29401,         0,      4451,     50862,     28105,     12404,     11418,      1545,     23373,        46,         0,      2077,     63213,     18779,      7026,     21870,      4675,      7952,      8184,      4737,     23299,     11126,    115554,         0,      1745,     74625,     11163,     27433,    130459,       398,     17144,      2957,       257,     37755,      8184,      3803,         0,     47460,      6658,     40586,      4215
V13,   4020460,     69552,         0,         0,     44596,     95317,     66963,      3335,      5839,         0,    340636,    162364,         0,     13675,    180726,     80783,     47600,     44660,    186409,     76899,         0,         0,      6503,    216680,    116475,     29652,     77254,     13355,     24265,     19636,      9833,    416167,     25006,    245170,         0,      5349,    237231,     42741,     65379,    170998,       652,     92402,     10118,        81,    437369,     28958,      9683,         0,    145670,     25217,    120552,      8710
V14,    883712,      4883,         0,         0,      4250,     28156,     13273,       659,      2001,         0,    106856,     36820,         0,      2571,     29999,     16705,     10425,      6215,     31568,     24035,         0,         0,      1329,     39805,     25325,      5513,     29488,      3643,      6029,      5028,      3108,     35850,     14547,     68355,         0,      1490,     70869,      6667,     27325,     48011,       196,     22853,      1957,        75,     45600,      9581,      2307,         0,     42016,      5652,     40314,      2363
V15,   2042542,     36857,         0,     74988,     31907,    208588,     23381,      2174,      3941,         0,     57931,     44752,         0,     10891,    130062,     50593,     40825,     41542,     49341,     12984,       433,         0,     12432,     92543,     39028,     36869,     67923,     14330,     25749,      8152,      7668,         0,     25707,    142825,         0,     15381,     86643,     58026,     24531,    100250,       535,     18443,      9360,      1143,    296536,      5687,      3900,         0,     52402,     19714,     50160,      5415
V16,    507363,      3253,         0,     13987,      5494,     34530,      4745,       529,      1317,         0,     22842,     11149,         0,      1992,     34732,     12034,      8987,      8842,      4469,     12419,        73,         0,      2990,     18174,      9614,      6918,     15422,      3907,      6669,      2573,      4140,         0,      7714,     40307,         0,      6780,     26658,     11812,     10135,     27162,       163,     15587,      2101,       244,     67950,      2607,       934,         0,     13849,      4419,     15522,      1618
V17,   7039726,    112353,         0,         0,     76030,    963398,    140589,      7745,     23485,         0,    472531,    234999,         0,     34615,    375752,    192639,     94443,    101645,     98621,    131551,     21292,         0,     23696,    397240,    137042,     65390,    161915,     29702,     52225,     54486,     31043,    193458,     33021,    441696,         0,     17771,    416068,    103899,    114240,    337794,      1646,    127139,     22236,      2818,    654715,     54014,     24972,         0,    202346,     68545,    163772,     25149
V18,   1693778,     11384,         0,         0,      6390,    304707,     29017,      1354,      7949,         0,    152263,     55700,         0,      6113,     66457,     36967,     21259,     14840,     10301,     38058,      2780,         0,      1344,     79421,     30231,     11498,     40500,      8097,     13104,     13857,      5843,     54532,      7714,    123457,         0,      3031,    132931,     15511,     45703,     97354,       484,     29492,      5026,       454,     47419,     19611,      4991,         0,     58823,     15351,     55715,      6745
V19,    852552,         0,         0,         0,      7715,         0,     26650,      2037,     12776,         0,     44011,     33270,         0,      4201,     77603,     22454,     11492,         0,       339,     19021,         0,         0,         0,     70476,     34284,     10997,         0,      7472,      7959,      8045,       976,         0,         0,    123586,         0,      2418,     80102,         0,     21305,     80699,       261,     17657,      6825,        78,         0,      6581,      2401,         0,     56349,      9088,     36972,      6452
V20,    268193,         0,         0,         0,       803,         0,      7535,       686,      4411,         0,     14868,      9354,         0,      1021,     22995,      4665,      2809,         0,       154,      8362,         0,         0,         0,     27107,      7496,      1981,         0,      2035,      2795,      2239,       193,         0,         0,     34676,         0,       600,     25936,         0,     14720,     24504,        71,      5753,      1685,        80,         5,      2416,       584,         0,     16198,      2032,     13057,      4367
V21,   7189475,     74225,         0,    148140,     35774,   1028058,    128634,      6375,     22968,         0,    423410,    179560,         0,     27626,    436486,    208086,     89288,    107487,    104389,    108264,     18145,         0,     25932,    434707,    145912,     36946,    152694,     29516,     49510,     52743,     22839,    351070,     54883,    527215,         0,     16911,    264076,     96785,    107905,    410260,      1485,     75909,     18960,      1487,    655245,     49405,     17819,         0,    175782,     64772,    175339,     26453
V22,   1888944,      6511,         0,     35519,     10643,    330900,     28337,      2035,      7828,         0,    155671,     35546,         0,      6626,    115720,     39417,     20877,     18672,     25749,     27763,      5183,         0,      6165,    108361,     33326,      6809,     34756,      8043,     13466,     14084,      5052,     45223,     12842,    147007,         0,      3592,     76402,     14791,     50929,    135124,       471,     19186,      4485,       487,    112469,     17775,      5160,         0,     55249,     14513,     62410,      7770
V23,   2841917,     60224,         0,     48119,     33206,    273328,     52540,       668,      7646,         0,    194795,    110378,         0,     14280,     93534,    111937,     43475,     29287,     85347,    102940,     14444,         0,      2273,    202962,     54952,     32567,     57653,      8415,     15676,     24741,      3892,     94385,     10974,    254821,         0,      8176,    159569,     44267,     29485,     89482,         0,     35232,      5560,       385,    215293,     20300,      4544,         0,     93925,     61443,     22280,     12517
V24,    722326,      6511,         0,     11223,      3446,     90021,     11283,       102,      2267,         0,     79278,     23992,         0,      3428,     22243,     22483,      8733,      3558,     19225,     22818,      4361,         0,       330,     45048,     11695,      5864,     11401,      2284,      3231,      6508,       742,     15403,      6959,     70773,         0,      1032,     44212,      6731,     15263,     28557,         0,      7576,       919,       193,     40048,      8152,      1095,         0,     30283,     13779,      5886,      3390
V25,    550158,         0,         0,         0,      2930,         0,     22484,         0,         0,         0,    123180,     32368,         0,       693,     42132,     13462,      2140,         0,         0,     12530,         0,         0,         0,     45485,     18662,      3502,         0,      1200,         0,      7199,        13,         0,         0,     55646,         0,       398,     42583,       675,     20390,     33126,         0,     17683,       475,         0,     29461,      5099,       577,         0,         0,      3873,     11162,      1030
V26,    192827,         0,         0,         0,       330,         0,      5757,         0,         0,         0,     44274,      9157,         0,       167,     15834,      3247,       771,         0,         0,      3545,         0,         0,         0,     12746,      3753,       617,         0,       326,         0,      3695,         7,         0,         0,     15277,         0,        91,     37880,       126,     11202,      9858,         0,      4465,        93,         0,      2016,      1738,        65,         0,         0,       868,      4517,       405
V27,     83712,       242,         0,         0,       808,         0,       802,         0,         0,         0,         0,      2495,         0,       277,      3705,         0,         0,         0,         0,         0,         0,         0,         0,      5205,     36437,         0,         0,         0,         0,      3698,      1747,         0,         0,         0,         0,       887,         0,       113,      6307,       678,         0,         0,       196,         0,     10427,      3276,       211,         0,       876,         0,      5068,       257
V28,     75719,         0,         0,         0,       106,         0,      1604,         0,         0,         0,         0,       464,         0,        72,      3933,         0,         0,         0,         0,         0,         0,         0,         0,      6026,      9190,         0,         0,         0,         0,      1215,     14882,         0,         0,         0,         0,       165,         0,        20,      3108,       237,         0,         0,        43,         0,       902,     18755,        81,         0,       263,         0,     14483,       170
V29,   2623304,     77921,         0,     45620,     40404,    305885,     37649,      1217,      5177,         0,    154236,    111954,         0,     13627,    102633,     75966,     42372,     36426,     44358,     96661,     10311,         0,      6383,     93158,     57639,     40208,     58341,     10702,     23621,     12292,      9260,     84936,     28348,     88365,         0,      8597,    125954,     74573,     25268,    123936,         0,     52423,      9525,      1558,    313734,     28082,      6118,         0,     45236,     38293,     46585,      7752
V30,    720904,     11384,         0,      9198,     13101,     79589,      7406,      1345,      1603,         0,     64676,     23988,         0,      3752,     32157,     13013,      6286,      5397,      2753,     33236,       724,         0,      1318,     17705,     11947,      7661,     13704,      3375,      7098,      3390,      1598,     58914,      7117,     22041,         0,      1255,     46576,      4714,     13999,     43005,         0,     13557,      2209,       191,     73476,     10861,      1408,         0,     16559,      8576,     16526,      2516
V32,     27923,         0,         0,         0,         0,         0,         0,        87,         0,         0,         0,       101,         0,         0,         0,         0,         0,         0,         0,         0,         5,         0,         0,         0,         0,         0,         0,         5,         0,         0,         0,         0,         0,         0,         0,       125,        47,        24,         0,         0,         0,         0,        51,         0,     26850,       504,       107,         0,         0,        17,         0,         0
V33,  35052870,    725695,         0,    651324,    436800,   5037449,    592807,     21710,    102694,         0,   1936949,   1177358,         0,    225673,   1831129,    951354,    491624,    437033,    634098,    759465,    104686,         0,    106188,   1618471,    770331,    496277,    825058,    155430,    278450,    211810,    130485,    928061,    304802,   1532574,         0,    118738,   1813327,    587756,    497414,   1658305,      6391,    625839,    128728,     19776,   3464397,    456484,     95006,         0,    869327,    320249,    814331,    101017
V34,   2014170,         0,         0,    109997,         0,    615564,      7014,         0,         0,         0,    198527,         0,         0,      4385,    244376,         0,     40534,     42929,         0,         0,         0,         0,         0,    141639,     15773,     44636,     44890,       981,     28194,         0,         0,         0,      5355,         0,         0,         0,     35845,         0,     53663,     73625,         0,         0,        96,         0,    243262,         0,         0,         0,         0,         0,     50447,     12438
V35,   1855047,         0,         0,         0,     13680,         0,     52313,      4797,     28881,         0,     69306,     60654,         0,      7181,    147446,     92087,     16756,         0,       496,     38495,         0,         0,         0,    182099,     88378,     15839,         0,     13177,     24227,     12867,      2014,         0,         0,    268892,         0,      4152,    277178,         0,     49903,    131368,       387,     32927,     11265,       196,       159,     10063,      5893,         0,    104880,     12784,     60146,     14161
V40,  16155326,    188932,         0,    367040,    137010,   1534021,    267886,     19198,     54636,         0,   1030789,    447933,         0,     70822,   1030473,    498403,    222605,    236268,    228394,    278261,     54053,         0,     70748,    960110,    323736,    120275,    344658,     77040,    122555,    104402,     60630,    760815,    129232,   1146887,         0,     44727,    620495,    254594,    283834,   1005737,      3499,    206221,     50694,      4895,   1558628,    124620,     49045,         0,    425685,    154178,    420161,     60501
V45,   7120613,     91773,         0,     85093,     57676,    857880,     86643,      9940,     35920,         0,    359368,    183353,         0,     35681,    425241,    236100,     81306,     83408,    135272,    178351,     29983,         0,     39432,    356603,    208843,     61373,    190313,     32190,     39626,     37897,     36345,    340866,     71813,    732884,         0,     22126,    284737,     81271,     96270,    505666,      3078,     45399,     20908,      1085,    373839,     37188,     20703,         0,    175382,     93728,    214962,     23098
V50,   1297215,         0,         0,         0,      5312,         0,     51304,         0,         0,         0,    225432,     54578,         0,       982,     92226,     30563,      7868,         0,      5653,     23080,         0,         0,         0,     88371,     36412,      6544,         0,      5404,         0,     13460,       306,         0,         0,    108962,         0,      1002,    279097,      4570,     47326,     62081,        25,     27812,      1266,         0,     64446,      9926,      1281,         0,         0,      5610,     34553,      1763
V55,    408017,       349,         0,         0,      4999,         0,     81124,         0,         0,         0,         0,      7566,         0,       541,     15830,         0,      2081,         0,         0,         0,         0,         0,         0,     22114,     81511,         0,         0,         0,         0,      6415,     18579,         0,         0,      3268,         0,      2561,         0,       758,     20884,     15386,        16,         0,      5659,         0,     19883,     34992,       340,         0,      2641,         0,     59990,       530
V60,    328011,         0,         0,     14596,         0,         0,      2370,      1866,         0,         0,         0,      2837,         0,         0,         0,         0,     10504,         0,         0,         0,        76,         0,         0,         0,         0,         0,         0,      3529,         0,         0,         0,         0,         0,         0,         0,      1223,      5263,      5906,         0,         0,         0,         0,       897,         0,    209598,      3241,      1225,         0,     64691,       189,         0,         0
V65,    914605,      8170,         0,         0,         0,    407560,         0,         0,         0,         0,         0,     32383,         0,         0,      8500,         0,         0,     16941,     20391,         0,       145,         0,     36672,    144023,         0,      3753,      2962,     17724,         0,         0,         0,         0,         0,         0,         0,         0,      7631,     19401,         0,         0,       191,     80346,         0,         0,         0,     36571,         0,         0,         0,         0,     71241,         0
V70,    823378,     10123,         0,     14737,      2549,         0,      6765,         0,        49,         0,     82511,      6680,         0,       687,     65987,     36066,      3303,     14963,      1946,      9474,        78,         0,      1217,     80524,    111263,       915,     29959,       334,       433,        24,       438,     41158,      2009,     15538,         0,       922,     93639,      2799,      6034,     60146,         0,     28032,       403,       439,     41450,      2033,      1354,         0,     17021,      5709,     22652,      1015
V75,   1327008,      5873,         0,         0,         0,    509033,         0,       145,      4537,         0,    255174,         0,         0,       288,     14279,     19984,      1482,      2405,      3423,      8665,      4962,         0,         0,    234474,     16719,      3171,     26138,         0,       918,      3743,      1244,     57800,         0,         0,         0,      2411,      3269,     71475,      1440,     17984,        31,     10677,       765,       118,     26168,         0,      1603,         0,        27,     16204,         0,       379
V80,    421979,      3826,         0,         0,         0,         0,         0,         0,         0,         0,         0,         0,         0,         0,         0,      4979,         0,       136,         0,         0,         0,         0,       255,        52,    146186,      2935,         0,         0,         0,         0,         0,     62412,     10834,    166459,         0,         0,        63,      7730,         0,     16112,         0,         0,         0,         0,         0,         0,         0,         0,         0,         0,         0,         0
V85,   4138891,     35764,         0,    445321,         0,   2885893,     40872,         0,         0,         0,         0,      1295,         0,        10,         0,         0,         0,     33303,      4492,         0,     42325,         0,     18630,       714,         0,         0,     73819,         0,         0,         0,         0,    457807,     26622,         0,         0,        70,      2456,     48141,         0,         0,         0,         0,         0,      1028,         0,         0,         0,         0,         0,         0,     20329,         0
W01,   3542804,     16058,         0,    185386,     10000,     48776,    115227,       623,      2817,         0,    253595,    121260,         0,     11747,    303980,     99682,     19227,     42312,         0,    360165,         0,         0,     14685,    167326,    211372,     23404,    167195,     15359,     39159,         0,         0,     28406,     41789,     37185,         0,      8656,    169066,     80548,     31954,    179981,         0,     44814,      7583,         0,    400123,     10695,      9745,         0,    128047,     29437,     88196,     17224
W31,  10992836,    137952,         0,    387573,    125982,     34455,    285479,     11257,      8025,         0,    587565,     68700,         0,     47412,    598780,     32371,    114902,     12782,     17500,         0,     22882,         0,      5485,   1169300,      1560,     36572,    381038,     50123,     97382,         0,         0,    347997,     95401,    572968,         0,     30071,    480376,     81141,      5478,   1584468,         0,    145192,      7584,         0,   1669549,    102277,      3601,         0,   1128928,    137395,    353945,     11388
W61,  34037535,    240391,         0,    404547,    197262,   6767798,    603504,     11042,     14776,         0,   2268460,   1740541,         0,     82377,   3136191,    696683,    294322,    568757,    183438,    452556,     33115,         0,     96592,   1560762,   1091774,    277984,    510995,    270411,    357671,    438935,     42439,    696775,    104111,   1812121,         0,    115946,   1155429,    572560,    420983,   1727971,         0,    246885,    131097,     21127,   2929181,    197518,     64170,         0,    341918,    130333,    837062,    189025
X01,    142491,         0,         0,         0,         0,         0,     12189,         0,         0,         0,         0,      1637,         0,         0,     83950,         0,         0,         7,         0,         0,         0,         0,         0,         0,     20252,         0,     17122,         0,      7334,         0,         0,         0,         0,         0,         0,         0,         0,         0,         0,         0,         0,         0,         0,         0,         0,         0,         0,         0,         0,         0,         0,         0
X04,    109332,         0,         0,         0,         0,         0,     23908,         0,         0,         0,         0,      8146,         0,         0,     23671,         0,         0,       267,         0,         0,         0,         0,         0,         0,     26610,         0,     20127,         0,      6603,         0,         0,         0,         0,         0,         0,         0,         0,         0,         0,         0,         0,         0,         0,         0,         0,         0,         0,         0,         0,         0,         0,         0
X05,     66562,         0,         0,         0,         0,         0,         0,         0,         0,         0,         0,         0,         0,         0,     64857,         0,         0,         0,         0,         0,         0,         0,         0,         0,         0,         0,        34,         0,      1671,         0,         0,         0,         0,         0,         0,         0,         0,         0,         0,         0,         0,         0,         0,         0,         0,         0,         0,         0,         0,         0,         0,         0
X08,    613276,         0,         0,         0,         0,         0,    107652,         0,         0,         0,         0,      6129,         0,         0,    298089,         0,         0,       153,         0,         0,         0,         0,         0,         0,     99039,         0,     79533,         0,     22681,         0,         0,         0,         0,         0,         0,         0,         0,         0,         0,         0,         0,         0,         0,         0,         0,         0,         0,         0,         0,         0,         0,         0
X11,    345633,         0,         0,         0,         0,         0,     59163,         0,         0,         0,         0,     12951,         0,         0,    164662,         0,         0,       347,         0,         0,         0,         0,         0,         0,     65611,         0,     32385,         0,     10514,         0,         0,         0,         0,         0,         0,         0,         0,         0,         0,         0,         0,         0,         0,         0,         0,         0,         0,         0,         0,         0,         0,         0
X12,     15011,         0,         0,         0,         0,         0,      1901,         0,         0,         0,         0,       229,         0,         0,      7127,         0,         0,       108,         0,         0,         0,         0,         0,         0,      1440,         0,      3478,         0,       728,         0,         0,         0,         0,         0,         0,         0,         0,         0,         0,         0,         0,         0,         0,         0,         0,         0,         0,         0,         0,         0,         0,         0
X21,    818015,         0,         0,         0,         0,         0,    187703,         0,         0,         0,         0,      4875,         0,         0,    441139,         0,         0,      1315,         0,         0,         0,         0,         0,         0,     96866,         0,     76753,         0,      9364,         0,         0,         0,         0,         0,         0,         0,         0,         0,         0,         0,         0,         0,         0,         0,         0,         0,         0,         0,         0,         0,         0,         0
X30,    679555,         0,         0,         0,         0,         0,    146077,         0,         0,         0,         0,     72803,         0,         0,         0,         0,         0,       699,         0,         0,         0,         0,         0,         0,    233185,         0,    167135,         0,     59656,         0,         0,         0,         0,         0,         0,         0,         0,         0,         0,         0,         0,         0,         0,         0,         0,         0,         0,         0,         0,         0,         0,         0
X40,   2850319,         0,         0,         0,         0,         0,    497299,         0,         0,         0,         0,         0,         0,         0,   1973211,         0,         0,         0,         0,         0,         0,         0,         0,         0,    176685,         0,    130312,         0,     72812,         0,         0,         0,         0,         0,         0,         0,         0,         0,         0,         0,         0,         0,         0,         0,         0,         0,         0,         0,         0,         0,         0,         0
X41,   2358562,         0,         0,         0,         0,         0,     37638,         0,         0,         0,         0,         0,         0,         0,   1554978,         0,         0,         0,         0,         0,         0,         0,         0,         0,    288703,         0,    354609,         0,    122634,         0,         0,         0,         0,         0,         0,         0,         0,         0,         0,         0,         0,         0,         0,         0,         0,         0,         0,         0,         0,         0,         0,         0
X42,     63558,         0,         0,         0,         0,         0,     56273,         0,         0,         0,         0,         0,         0,         0,         0,         0,         0,         0,         0,         0,         0,         0,         0,         0,      2154,         0,      5131,         0,         0,         0,         0,         0,         0,         0,         0,         0,         0,         0,         0,         0,         0,         0,         0,         0,         0,         0,         0,         0,         0,         0,         0,         0
X44,     69608,         0,         0,         0,         0,         0,     16111,         0,         0,         0,         0,         0,         0,         0,         0,         0,         0,         0,         0,         0,         0,         0,         0,         0,     49992,         0,      3505,         0,         0,         0,         0,         0,         0,         0,         0,         0,         0,         0,         0,         0,         0,         0,         0,         0,         0,         0,         0,         0,         0,         0,         0,         0
X47,     88802,         0,         0,         0,         0,         0,     39559,         0,         0,         0,         0,         0,         0,         0,         0,         0,         0,         0,         0,         0,         0,         0,         0,         0,      6086,         0,     43157,         0,         0,         0,         0,         0,         0,         0,         0,         0,         0,         0,         0,         0,         0,         0,         0,         0,         0,         0,         0,         0,         0,         0,         0,         0
Z00, 117327886,   1699013,         0,   1995394,   1100232,  17149457,   1870653,    116947,    348698,         0,   6521168,   3359793,         0,    513284,   6521633,   2979355,   1606104,   1510620,   1861950,   2004117,    348705,         0,    409208,   6149605,   2635347,   1179661,   2576561,    454504,    884904,    656825,    435987,   4695283,    798324,   8387699,         0,    298460,   5779668,   1601838,   1677895,   5920548,     25215,   1722577,    330271,     42885,  10821206,    850974,    343626,         0,   2799968,    977367,   2970236,    394121
Z18,   5687786,         0,         0,    194858,         0,   2033588,     26437,         0,         0,         0,    527161,      9493,         0,     15999,    539680,         0,    139932,    119308,         0,      3637,         0,         0,         0,    352941,     56935,    120151,    125827,      2630,     62051,         0,         0,         0,     33142,     11457,         0,         0,    104533,         0,    154238,    198411,         0,         0,         0,         0,    668416,         0,         0,         0,         0,         0,    149525,     37436
Z32, 111568036,   1699013,         0,   1799000,   1100232,  15101321,   1843475,    116947,    348698,         0,   5994007,   3350300,         0,    496837,   5973249,   2979355,   1462232,   1387971,   1861950,   2000480,    348705,         0,    409208,   5791949,   2576483,   1056146,   2449055,    451801,    821077,    656825,    435987,   4695283,    763711,   8376242,         0,    298460,   5675135,   1601838,   1519518,   5717939,     25215,   1722577,    330271,     42885,  10142577,    850974,    343613,         0,   2799968,    977367,   2816523,    355637
Z33,  75543580,   1178388,         0,   1185253,    772652,  10080825,   1250281,     83809,    250288,         0,   3673295,   2289332,         0,    350294,   4133321,   2044164,   1031876,    946632,   1215702,   1345858,    251047,         0,    302197,   3612823,   1800396,    756888,   1666259,    310753,    579266,    430324,    321237,   3127084,    515810,   5975477,         0,    213556,   3751242,   1027222,   1011601,   3950970,     19042,   1182868,    230929,     34153,   7015955,    593340,    253356,         0,   1857983,    645109,   2029931,    244792
Z34,  26101863,    162720,         0,    363571,    121032,   3710387,    373192,     21243,    116977,         0,   1933151,    803028,         0,     93215,    986436,    615626,    321362,    231408,    314524,    650283,     52213,         0,     32979,   1116658,    634031,    189468,    468020,    129833,    205876,    176417,     96814,   1551115,    194198,   2302339,         0,     72013,   1626327,    240834,    611537,   1629769,      7306,    405562,     68932,      4404,    996110,    312460,     72364,         0,    838966,    216157,    932865,     98141
