11A,         0,         0,         0,         0,         0,         0,         0,         0,         0,         0,         0,         0,         0,         0,         0,         0,         0,         0,         0,         0,         0,         0,         0,         0,         0,         0,         0,         0,         0,         0,         0,         0,         0,         0,         0,         0,         0,         0,         0,         0,         0,         0,         0,         0,         0,         0,         0,         0,         0,         0,         0,         0
19X, 343204231,   4213694,   5287972,   2539685,   1763013,  33225068,   2659408,  12430852,   3203268,         0,  11074300,   3665161,   4156806,   1122423,  18233523,   4617738,   1562513,    336964,   6024486,  10628963,   2488657,   7530138,  20955674,   9495768,   3940713,   1412925,   5718932,   1594540,   1595550,   1703880,   4126744,  19039265,   1741777,  50607820,   3489720,    960447,  11616346,   3785986,   6360578,  11246589,   4143675,   4069096,   1753565,   2722644,   7686395,   1900618,   1483356,   6499853,   6519274,   2721704,   6624538,    921627
21A,    183190,         0,         0,         0,         0,         0,         0,         0,         0,         0,         0,         0,         0,         0,         0,         0,         0,         0,         0,         0,         0,         0,     73380,         0,         0,         0,         0,         0,         0,     72310,         0,     37500,         0,         0,         0,         0,         0,         0,         0,         0,         0,         0,         0,         0,         0,         0,         0,         0,         0,         0,         0,         0
21D,      7600,         0,         0,         0,         0,         0,         0,         0,         0,         0,         0,         0,         0,         0,         0,         0,         0,         0,         0,         0,         0,         0,         0,         0,         0,         0,         0,         0,         0,         0,         0,         0,         0,      7600,         0,         0,         0,         0,         0,         0,         0,         0,         0,         0,         0,         0,         0,         0,         0,         0,         0,         0
21F,   1432593,         0,         0,         0,         0,   1079000,         0,    163063,     14150,         0,         0,         0,         0,         0,         0,         0,         0,         0,         0,         0,         0,     76510,         0,         0,     19850,         0,         0,         0,         0,         0,         0,         0,         0,         0,         0,         0,         0,         0,         0,         0,         0,         0,         0,         0,         0,         0,         0,         0,     80020,         0,         0,         0
21G,   1290283,     14405,         0,         0,         0,    251000,         0,     36379,     18209,         0,         0,         0,         0,         0,      8000,         0,         0,         0,         0,      2650,         0,     19079,     67585,         0,         0,         0,         0,         0,         0,     21921,      5517,         0,     22452,         0,         0,         0,    366855,         0,     89555,         0,         0,     21030,         0,       300,    160346,         0,         0,    124000,     61000,         0,         0,         0
21X,  19974895,     32100,    105000,         0,     94620,   2818000,        56,   1421749,     43916,         0,    251850,    933480,    322870,         0,   1035505,         0,         0,         0,         0,    528863,     81415,    243877,   2355776,    765000,    174485,    147570,    192835,    142095,         0,    318330,     89227,    413395,         0,   2678658,    157500,         0,    152030,         0,    135840,    571000,    756680,    198000,         0,         0,    267563,    156600,     83325,         0,   1455710,         0,    849975,         0
24A,     45845,         0,         0,         0,         0,         0,      4000,         0,         0,         0,         0,         0,         0,         0,         0,         0,         0,         0,         0,         0,         0,         0,         0,         0,         0,         0,         0,         0,         0,         0,         0,     41845,         0,         0,         0,         0,         0,         0,         0,         0,         0,         0,         0,         0,         0,         0,         0,         0,         0,         0,         0,         0
24B,   1730103,         0,       598,         0,         0,    649835,         0,         0,         0,         0,         0,         0,         0,         0,         0,         0,         0,         0,         0,         0,         0,         0,         0,         0,         0,         0,         0,         0,         0,         0,         0,         0,         0,    612450,         0,         0,         0,     71020,         0,         0,         0,    396200,         0,         0,         0,         0,         0,         0,         0,         0,         0,         0
24D,    813725,         0,         0,         0,         0,         0,         0,         0,         0,         0,         0,         0,         0,         0,         0,         0,         0,         0,         0,         0,         0,         0,         0,         0,         0,         0,         0,         0,         0,         0,         0,         0,         0,    813725,         0,         0,         0,         0,         0,         0,         0,         0,         0,         0,         0,         0,         0,         0,         0,         0,         0,         0
24F,    751826,         0,         0,         0,         0,         0,         0,         0,         0,         0,         0,         0,         0,         0,         0,         0,         0,         0,    176140,         0,         0,         0,         0,         0,         0,         0,         0,         0,         0,         0,         0,         0,         0,         0,         0,         0,         0,         0,         0,    137711,         0,         0,     37515,         0,         0,         0,         0,    341870,         0,     58590,         0,         0
24G,   5244034,     28227,     14265,     90612,     45658,   1029460,     58526,         0,       167,         0,    669162,         0,         0,     14945,     36308,    186446,     71149,      2761,    246376,         0,         0,    160494,         0,    538934,     45080,     15499,    135077,         0,     13105,     20930,         0,    394914,     40337,    254755,    118616,     14275,     57244,      1000,         0,    286284,         0,     31754,         0,      3512,    461673,     53724,         0,     73265,     14940,         0,         0,     14560
24T,  26780939,    216415,    354450,     80745,    185600,   2340154,    604528,    616883,    329709,         0,    367313,    252844,    119520,    258055,   2110550,    328857,    250587,         0,    159655,    394769,    167063,    772601,   2476983,    671855,    418196,     86400,    684044,    387829,    302965,    116285,    333517,   1574808,    342015,   2077055,    506261,    152485,   1037979,    155330,    246115,   1021900,    415183,    191870,    358232,    196910,    246461,    331520,     66807,   1072465,    365039,    151407,    694860,    187865
24X,  11825500,      5055,     17941,    542385,         0,    288056,     90135,     24215,    220745,         0,    392560,     97470,    419450,         0,     13625,    480820,     96030,    252705,    257010,    158850,    129920,    128441,    163525,    674601,         0,         0,    148500,     34469,      1700,         0,      9570,   2732477,    198990,   2605144,         0,      6263,     87500,     50000,     40000,    540900,    258690,     66817,     10210,     37700,    311698,     15000,     36550,    164823,         0,     14960,         0,         0
31A,     83218,         0,         0,         0,         0,         0,         0,         0,         0,         0,         0,         0,         0,         0,         0,         0,         0,         0,         0,         0,         0,         0,      5866,         0,         0,         0,         0,         0,         0,     68770,         0,      8582,         0,         0,         0,         0,         0,         0,         0,         0,         0,         0,         0,         0,         0,         0,         0,         0,         0,         0,         0,         0
31D,     35800,         0,         0,         0,         0,         0,         0,         0,         0,         0,         0,         0,         0,         0,         0,         0,         0,         0,         0,         0,         0,         0,         0,         0,         0,         0,         0,         0,         0,         0,         0,         0,         0,     35800,         0,         0,         0,         0,         0,         0,         0,         0,         0,         0,         0,         0,         0,         0,         0,         0,         0,         0
31F,    338109,         0,         0,         0,         0,    194545,         0,     27105,      8454,         0,         0,         0,         0,         0,         0,         0,         0,         0,         0,         0,         0,     77900,         0,         0,      3070,      6490,         0,         0,         0,         0,         0,         0,         0,         0,      6500,         0,         0,         0,         0,         0,       405,         0,         0,         0,         0,         0,         0,         0,      5640,      8000,         0,         0
31G,    881406,     38855,         0,         0,         0,     66750,         0,      4500,      7046,         0,         0,         0,         0,         0,     20843,         0,         0,         0,         0,      1962,      1355,      5911,     51845,      9400,       975,      1274,         0,         0,         0,      3776,      4804,      7700,     35570,      5800,         0,         0,    279305,         0,     80126,         0,      1790,      5020,         0,      8684,    100075,         0,         0,     74650,     63390,         0,         0,         0
31X,   9563843,     46765,    115670,         0,      6335,    309915,      5834,    758076,     44455,         0,    115825,    408630,    269170,         0,    709172,         0,         0,         0,     13550,    472031,     45800,    116275,    748836,    234300,    130019,    134175,    168725,     12195,         0,    216624,     46385,    191275,         0,    561627,     74390,         0,    181900,      7400,    303369,    473265,    214297,    166355,         0,     55888,    333535,     64995,     49430,     10990,   1054360,     40400,    650945,       660
34A,     24374,         0,         0,         0,         0,         0,       300,         0,         0,         0,         0,         0,         0,         0,         0,         0,         0,         0,         0,         0,         0,         0,         0,         0,         0,         0,         0,         0,         0,      2380,         0,     21650,         0,         0,         0,         0,         0,        44,         0,         0,         0,         0,         0,         0,         0,         0,         0,         0,         0,         0,         0,         0
34B,   1514092,         0,      1812,      6085,         0,    646210,         0,         0,         0,         0,         0,         0,         0,         0,         0,         0,         0,         0,         0,         0,         0,         0,         0,         0,         0,         0,         0,         0,         0,         0,         0,         0,         0,    676805,         0,         0,         0,     86465,         0,         0,         0,     96715,         0,         0,         0,         0,         0,         0,         0,         0,         0,         0
34C,       355,         0,         0,         0,         0,         0,         0,         0,         0,         0,         0,         0,         0,         0,         0,         0,         0,         0,         0,         0,         0,         0,         0,         0,         0,         0,         0,         0,         0,         0,         0,         0,         0,         0,         0,         0,         0,       355,         0,         0,         0,         0,         0,         0,         0,         0,         0,         0,         0,         0,         0,         0
34D,    399890,         0,         0,         0,         0,         0,         0,         0,         0,         0,         0,         0,         0,         0,         0,         0,         0,         0,         0,         0,         0,         0,         0,         0,         0,         0,         0,         0,         0,         0,         0,         0,         0,    399890,         0,         0,         0,         0,         0,         0,         0,         0,         0,         0,         0,         0,         0,         0,         0,         0,         0,         0
34F,    323669,         0,         0,         0,         0,         0,         0,         0,         0,         0,         0,      8715,         0,         0,         0,         0,         0,         0,     32453,         0,       445,         0,         0,         0,         0,         0,         0,         0,         0,         0,         0,         0,         0,         0,         0,         0,         0,         0,         0,     78890,         0,         0,     37015,         0,         0,         0,         0,    163699,         0,      2452,         0,         0
34G,   3487111,     33527,      3219,     85944,     42253,    412721,     97469,       845,      2986,         0,    361857,         0,       970,      2308,     24006,    171601,     24294,      6802,    107786,      5068,      1069,     52323,         0,    438295,     28297,      6058,     84893,      3191,     29445,      3648,       126,    227426,     11618,    157362,     37660,      3512,     48458,      7970,      5139,    176388,     71053,     17407,      1919,     81023,    460723,     24834,      7232,     89085,     13621,     11205,       596,      1879
34T,  19960023,    249923,    694168,     29821,     98620,   2407089,    301308,   1937929,    215745,         0,    247563,     56936,     82339,     83181,   1925745,    217614,     94671,      7365,    212632,    568258,     91849,    304758,   1377082,    480508,    288760,    122883,    252742,    268191,    115706,     25253,    192610,   1329331,    500316,   1158863,    342562,     94478,    492698,    287744,    156356,    323563,    207618,    103002,    213033,    159069,    228397,    223305,     88979,    358342,    147250,    160182,    208611,    225075
34X,   8353641,     12130,     29755,    282735,      3665,    297785,     37007,     13483,     15601,         0,    148517,      3263,     24607,     17946,     35386,     66223,      2406,    108862,    199317,    739066,     89485,     39242,    175082,    419562,      4000,      1185,    142085,     26844,     14110,        40,      7179,   2617811,    202280,   1481390,       683,      8312,     44863,     15084,     42305,    479470,     84704,     25641,     37352,      2463,     13760,      4516,     15918,    177238,      1165,    130098,     10370,      1650
41A,    559895,         0,         0,         0,         0,         0,         0,         0,         0,         0,         0,         0,         0,         0,         0,         0,         0,         0,         0,         0,         0,         0,    199039,         0,         0,         0,         0,         0,         0,    154920,         0,    205936,         0,         0,         0,         0,         0,         0,         0,         0,         0,         0,         0,         0,         0,         0,         0,         0,         0,         0,         0,         0
41D,    522870,         0,         0,         0,         0,         0,         0,         0,         0,         0,         0,         0,         0,         0,         0,         0,         0,         0,         0,         0,         0,         0,         0,         0,         0,         0,         0,         0,         0,         0,         0,         0,         0,    522870,         0,         0,         0,         0,         0,         0,         0,         0,         0,         0,         0,         0,         0,         0,         0,         0,         0,         0
41F,   4992960,         0,         0,         0,         0,   3704225,         0,    332115,     66612,         0,         0,         0,         0,         0,         0,         0,         0,         0,         0,         0,         0,    528730,         0,         0,     67388,     47910,         0,         0,         0,         0,         0,         0,         0,         0,     25500,         0,         0,         0,         0,         0,       670,         0,         0,         0,         0,         0,         0,         0,    145810,     74000,         0,         0
41G,   6119848,    434048,         0,         0,         0,   1203150,         0,     64729,     83628,         0,         0,         0,         0,         0,    150090,         0,         0,         0,         0,     38093,     12135,     80692,    278729,         0,      7500,      5361,         0,         0,         0,     67415,     63758,     36700,     92591,     62080,         0,         0,   1838290,         0,    285074,         0,       805,     44570,         0,    148893,    411847,         0,         0,    400968,    308702,         0,         0,         0
41X,  84402443,    592391,    595495,         0,    155370,   6609370,     25527,   6169682,    361496,         0,   1415095,   2885970,   2328546,         0,   5551700,         0,         0,         0,     44155,   3489263,    417545,   1573198,  10949953,   1185200,   1559439,    622881,    804225,    205066,         0,    650266,    619936,   3073755,         0,   7703255,    642624,         0,    988430,     16285,   4960516,   4840163,   1181029,    800573,         0,    475497,   3005455,    330900,    426195,    113828,   3981994,    297600,   2752575,         0
44A,    358007,         0,         0,         0,         0,         0,     16350,         0,         0,         0,         0,         0,         0,         0,         0,         0,         0,         0,         0,         0,         0,         0,         0,         0,         0,         0,         0,         0,         0,    187724,         0,    147928,         0,         0,         0,         0,         0,      6005,         0,         0,         0,         0,         0,         0,         0,         0,         0,         0,         0,         0,         0,         0
44B,   8035781,         0,    377307,     40403,         0,    435260,         0,         0,         0,         0,         0,         0,         0,         0,         0,         0,         0,         0,         0,         0,         0,         0,         0,         0,         0,         0,         0,         0,         0,         0,         0,         0,         0,   3571585,         0,         0,         0,   1374020,         0,         0,         0,   2237206,         0,         0,         0,         0,         0,         0,         0,         0,         0,         0
44C,      1796,         0,         0,         0,         0,         0,         0,         0,         0,         0,         0,         0,         0,         0,         0,         0,         0,         0,         0,         0,         0,         0,         0,         0,         0,         0,         0,         0,         0,         0,         0,         0,         0,         0,         0,         0,         0,      1796,         0,         0,         0,         0,         0,         0,         0,         0,         0,         0,         0,         0,         0,         0
44D,   4209080,         0,         0,         0,         0,         0,         0,         0,         0,         0,         0,         0,         0,         0,         0,         0,         0,         0,         0,         0,         0,         0,         0,         0,         0,         0,         0,         0,         0,         0,         0,         0,         0,   4209080,         0,         0,         0,         0,         0,         0,         0,         0,         0,         0,         0,         0,         0,         0,         0,         0,         0,         0
44F,   2466545,         0,         0,         0,         0,         0,         0,         0,         0,         0,         0,     25195,         0,         0,         0,         0,         0,         0,    870075,         0,      1035,         0,         0,         0,         0,         0,         0,         0,         0,         0,         0,         0,         0,         0,         0,         0,         0,         0,         0,    313622,         0,         0,     49565,         0,         0,         0,         0,    876013,         0,    331040,         0,         0
44G,  30398648,    564542,     32434,    670678,    268100,   2465219,    569205,     12465,     42595,         0,   5095487,         0,      4285,     64716,    405267,   1449856,    512630,     55650,   1312826,     69200,     16279,    436772,         0,   1381917,    536458,     54389,    491734,     72687,    117128,     68426,      1460,   1186450,    164245,   6909965,    439333,     60667,    591663,     84237,     29685,    779657,    178336,    223439,     10389,    258536,   1848576,    101704,     62282,    270405,    182550,    193051,      4475,     46598
44T, 173525399,   2236055,   3668354,    458988,   1479811,  18067513,   2226941,   4830070,   2336774,         0,   2956202,   1244515,    648865,   1108018,  11891192,   1958893,   1143891,     10425,   1944439,   3989631,   1390868,   3990759,  11486109,   5916190,   1972418,    893621,   4782129,   1351232,   1394873,    801919,   3484414,  10113936,   1085016,  19787762,   2704976,    819485,   6594458,   1224624,    820630,   5380507,   2946255,   1156863,   1610329,   1683861,   1638452,   1658233,    835289,   4628494,   2557196,   1258149,   4541801,    813974
44X,  53776561,    301661,    262012,   1678773,     34737,   4857696,    139093,    542141,    644764,         0,   2827960,    315101,   1659864,    119253,    735485,   1749674,    216111,    419712,   2447031,   2335569,    799190,   1724530,    820382,   1869900,         0,      1575,    152855,    226323,    242058,      2495,    562356,   5007017,    253935,  12202685,      6669,    147006,   2092626,    949226,    199175,   1134845,    760174,     66626,    218339,     87152,   1096816,     48975,    215555,   1112564,     14175,    440484,         0,     34216
52T,   9976159,     41205,         0,         0,         0,   1478842,      4855,         0,      6265,         0,    131713,         0,         0,     23500,    297020,         0,         0,         0,         0,         0,         0,     26600,    613492,    377435,         0,         0,    289395,         0,         0,    154355,         0,   2169962,    330670,   1546675,    145192,         0,         0,     62385,     87135,    346025,    123240,     23330,     22970,         0,    432023,         0,     23040,     88700,   1051485,         0,         0,     78650
53T,   9764699,     41205,         0,         0,         0,   1428922,      4855,         0,      6265,         0,    123100,         0,         0,     23500,    297020,         0,         0,         0,         0,         0,         0,     26600,    655042,    377435,         0,         0,    289395,         0,         0,    165235,         0,   2158392,    335510,   1478500,    131591,         0,         0,     62385,     81874,    346025,    116035,     23330,     22970,         0,    403758,         0,     20610,     88700,    977795,         0,         0,     78650
61V,   3432907,       148,      3000,         0,      1437,      6212,         0,    575300,     12107,         0,      9342,         0,     44822,         0,      4926,      6255,      9021,         0,         0,     98602,     95989,         0,    152974,      1027,         0,         0,     56410,     16918,       188,      4147,         0,     17254,      9944,   1196400,         0,      3320,     91626,       527,     90000,    393760,    250153,    151350,       166,     67293,       109,     10877,      2518,       401,       444,     47940,         0,         0
64V,   2949303,        27,      6000,         0,      4151,    481276,         0,      5300,      6051,         0,       742,         0,     45203,        35,      7896,     13247,     11355,         0,         0,     72302,         0,         0,    273824,      3376,         0,         0,     70200,     12369,       164,       979,         0,     14479,      9261,    899150,         0,         0,     87687,       429,         0,    513326,     83464,    155350,       600,    152427,        32,     13421,      3250,       369,      1561,         0,         0,         0
71W,  11339600,     73493,    440543,         0,         0,     91164,         0,    900876,     44611,         0,    772460,     54495,      9032,         0,    428270,         0,         0,         0,     44155,    567631,      1309,      7072,    221682,         0,    271020,    128626,     86408,         0,         0,     16245,    154805,      6776,         0,   1842999,      2783,         0,         0,         0,   3389803,     12798,         0,     63343,         0,      9396,   1541540,     17426,         0,         0,     60924,      4181,     73734,         0
74W, 199133338,   2346150,   3857647,    520134,   1572992,  18424469,   2724090,   4842535,   2493600,         0,   4869902,   1411814,   1392497,   1127811,  11937014,   3526284,   1219815,     74786,   2728149,   5053263,   2179448,   4255317,  11554396,   7131948,   2167294,    901077,   5107730,   1425441,   1413320,    835502,   3861239,  10516091,   1177364,  27355951,   2779140,    989953,   7327397,   1739458,    749605,   7162777,   3143568,   1633088,   1688223,   1831536,   1726809,   1671430,   1041506,   6350920,   2633227,   1511647,   4329991,    817993
A01,    650319,         0,     49261,         0,         0,         0,         0,     19315,         0,         0,         0,      1166,    327219,       165,         0,         0,       180,         0,         0,         0,       162,     51784,    159523,       344,      1602,         0,         0,        71,       773,         0,        51,         0,         0,     20995,         0,         0,         0,         0,        47,      7798,      9176,       188,         0,         0,         0,       499,         0,         0,         0,         0,         0,         0
A03,    229991,         0,     64028,         0,         0,         0,         0,       690,         0,         0,         0,         0,         0,        91,         0,         0,      7568,         0,         0,         0,         0,      3189,         0,         0,         0,         0,         0,      2060,         0,         0,         0,         0,         0,         0,         0,    116549,      1922,         0,         0,         0,      1240,         0,     32654,         0,         0,         0,         0,         0,         0,         0,         0,         0
A09,     13978,         0,         0,         0,         0,         0,         0,         0,         0,         0,         0,         0,     12071,         0,         0,         0,         0,         0,         0,         0,         0,         0,         0,         0,         0,         0,         0,         0,         0,         0,         0,      1907,         0,         0,         0,         0,         0,         0,         0,         0,         0,         0,         0,         0,         0,         0,         0,         0,         0,         0,         0,         0
A10,      2145,         0,         0,         0,         0,         0,         0,         0,         0,         0,         0,         0,      2145,         0,         0,         0,         0,         0,         0,         0,         0,         0,         0,         0,         0,         0,         0,         0,         0,         0,         0,         0,         0,         0,         0,         0,         0,         0,         0,         0,         0,         0,         0,         0,         0,         0,         0,         0,         0,         0,         0,         0
A12,      6146,         0,         0,         0,         0,         0,         0,         0,         0,         0,         0,         0,      6139,         0,         0,         0,         0,         0,         0,         0,         0,         0,         0,         0,         0,         0,         0,         0,         0,         0,         0,         0,         0,         0,         0,         0,         0,         0,         0,         0,         7,         0,         0,         0,         0,         0,         0,         0,         0,         0,         0,         0
A16,   8703233,    171429,     16851,    184353,     86726,    633826,    192081,     97715,     54091,         0,    227313,    168758,     45103,     37775,    324056,    422309,    151857,    111765,    131496,    190317,     52498,    192922,    137384,    479751,    184468,    114360,    144600,     43440,     85671,     29306,     57879,    181689,     72419,    322888,    345892,     68568,    389658,    186242,    111345,    394591,     43126,    167267,     24729,    158815,    429008,     94103,     38018,    403331,    219526,     82837,    169323,     29758
A18,  19769756,    401853,     56458,    300899,    264697,   1899905,    522847,    206849,    162548,         0,    339114,    315920,     53974,     69228,    655107,    684848,    273489,    215514,    367026,    429779,    104296,    365969,    546582,   1077039,    454093,    173963,    404251,     65278,    121411,     79239,    140379,    463299,    168249,    654685,    451392,    105669,   1292238,    270262,    206087,   1156364,    108312,    326359,     63496,    294953,   1124200,    293691,    149633,    643467,    484332,    170544,    561218,     28751
A21,    405469,     57108,       280,      2749,      8121,      3488,     10897,      2312,       781,         0,      6345,     31904,      2996,      1248,       476,      8310,        57,      1376,     13923,     11606,         0,      4508,       191,      1335,      1236,      1354,       991,      4984,      2419,      1093,        79,      6314,     16474,     47942,      7130,       602,      2902,      3279,     12938,     58786,     13042,     13834,        49,      4880,      6936,      8076,       113,     15546,       899,       962,      2158,       440
A36,  12729177,    586247,         0,         0,    130032,   1696862,     39027,    207625,     29237,         0,     95006,    183985,     90975,      1121,    155020,    337443,    334984,    158254,    196021,    225435,      7764,     30695,    194692,    813000,    318542,    122014,    184131,      2654,    182113,      3734,      2945,    204247,    170453,    989541,    211786,     15049,    698596,    221841,    249035,    785170,      7267,    369254,      3978,    304555,    582917,    197627,      2482,    746453,    232700,     37370,    366709,      2589
A44,    231866,      1101,      4220,       261,     18065,     38315,      6568,       885,      1387,         0,       101,     11229,         0,      3860,      1810,      3201,      1778,       917,      6988,       525,       608,      6622,      3408,      1152,     20260,      3592,      7626,       715,      2842,     11975,      6707,        38,      2731,         0,      1913,      1911,      1025,      6467,      1130,      1690,        77,     22750,       175,      2573,      7721,       917,        89,         0,      3167,       987,      8563,      1224
A45,   2771670,         0,     42789,         0,         0,    131722,         0,       245,     33006,         0,    285470,      1232,         0,         0,    253386,     65122,         0,     40587,     16200,     30139,     37861,    123015,    151900,     14729,         0,         0,         0,         0,         0,         0,     47605,    502260,         0,    329540,      1458,         0,     90592,     68378,      2499,    269602,      8893,         0,         0,         0,     41904,         0,         0,     71415,     69721,     40400,         0,         0
A50,    212856,      1565,      7031,         0,       747,     14015,      4382,      3567,       420,         0,      4119,       192,     36291,      1902,     11958,      1053,        60,         0,       645,       266,      1946,     12504,     20571,      7126,      1048,         0,      1209,        86,       568,      2252,      3080,     14333,       222,     13733,      1564,      1777,      7029,      5848,      1784,      8205,      1824,      2097,         0,      1329,      2989,       265,       934,      1939,      4700,      2513,       282,       886
A54,    504030,      5199,       619,     12394,      3501,    123935,      7366,        43,         0,         0,      5900,      9851,      1292,      3229,      7705,     17355,      7553,     13178,     22114,      6795,      6217,      2774,      2152,      7412,     16539,     10785,      8117,      3353,     11022,      1275,       724,       873,     13666,     10111,     18333,      5432,     16670,      2886,     12050,      4372,       444,      2635,      4327,     54358,      8723,      2636,        84,      4312,      2832,      2459,     18038,       390
A56,    268867,      2560,     11809,         0,      1645,      4463,      1715,       197,        57,         0,      5312,      4309,        23,     26136,         0,      2765,         0,         0,       714,      1644,      2102,      4365,         0,     10134,      5748,      1708,      1015,      2490,         0,       563,       188,        83,         0,         0,      2922,         0,       789,        55,     20853,     10311,         0,      1819,      1102,      1075,      1397,       536,       272,       359,    133286,       428,      1918,         0
A59,    622825,       285,     10031,      1693,       660,    415977,      3079,       159,       907,         0,      1847,      4928,      6092,      1778,         0,      2013,      2738,       638,        70,      6073,       473,      3380,      6502,      3954,      7407,      1464,     13403,      4155,      2666,       606,       109,     33010,      1188,      1337,      1135,       150,      3398,      1032,      5824,     19052,       956,      2925,       778,      1493,      3005,      1357,       475,       156,     14047,       841,     26075,      1504
A61,    787565,     23199,        16,      2292,     11445,     62865,      1586,      3097,      3568,         0,     18146,     84046,     11247,      1376,      4718,     12947,      1581,      2084,     36526,     24164,      2242,      3034,     23386,     15060,      8379,      5461,      1147,      1227,      4467,      1210,      5369,    184184,      2330,     80833,      4885,      1007,      6073,     17101,      9430,     10807,      2917,     13681,      3954,     20030,     12465,      3512,      4830,      4993,      7066,     14728,      6832,        22
A80,     24250,         0,         0,         0,         0,       460,         0,         0,         0,         0,         0,         0,         0,         0,         0,         0,         0,         0,         0,         0,         0,         0,         0,         0,         0,         0,         0,         0,         0,         0,       601,     15681,         0,       629,         0,         0,       380,         0,         0,       461,      5883,         0,         0,         0,         0,         0,         0,         0,         0,       155,         0,         0
A81,    263023,         0,         0,         0,         0,         0,         0,    120802,     35046,         0,     23492,      3242,         0,      1873,         0,         0,      5832,         0,       292,         0,      5400,         0,      6726,        28,         0,         0,         0,         0,         0,      6683,         0,     40149,         0,         0,         0,         0,         0,       619,         0,         0,      2065,      3192,         0,         0,         0,      1210,         0,         0,         0,       580,      5792,         0
A87,    393403,     46103,         0,         0,         0,         0,         0,       182,         0,         0,         0,     66055,     44742,         0,         0,      2846,         0,         0,         0,     37812,         0,     37447,     55610,      2131,         0,      5065,         0,         0,         0,         0,       493,     10407,         0,      4379,     25330,         0,         0,         0,         0,         0,       232,     46821,         0,         0,         0,         0,         0,      7748,         0,         0,         0,         0
A89,   4350455,     51117,     14035,     49726,     26971,    445594,     76870,     37815,     43979,         0,    268881,     60271,     33070,     19984,     22624,    102230,     24505,     38223,     54253,    128891,     15268,     79398,    114780,     92125,    161180,     54749,     49958,     41545,     38363,     38918,     20186,    447352,     22868,    410155,    120399,     12822,     82295,     52800,     92807,     79214,     19191,     71433,     11264,     95428,    296150,     22045,     23261,    110293,     35633,     60202,     64406,     14928
A90,   3055773,    152634,         0,         0,         0,         0,         0,         0,         0,         0,         0,         0,         0,     32701,         0,         0,     84197,         0,         0,         0,     73049,         0,         0,    444441,         0,    122830,         0,     36406,         0,         0,    206017,         0,         0,         0,         0,         0,    373930,         0,    168854,    667257,         0,         0,         0,         0,         0,     69345,     28866,    258211,    259666,     45591,         0,     31778
A91,    123993,         0,         0,         0,         0,         0,         0,         0,         0,         0,         0,         0,         0,         0,         0,         0,         0,         0,         0,         0,         0,         0,     59704,         0,         0,         0,         0,         0,         0,     40523,       100,     19885,         0,         0,         0,         0,         0,      3781,         0,         0,         0,         0,         0,         0,         0,         0,         0,         0,         0,         0,         0,         0
A92,   2256475,         0,     26493,     16669,         0,    178777,         0,         0,         0,         0,         0,         0,         0,         0,         0,         0,         0,         0,         0,         0,         0,         0,         0,         0,         0,         0,         0,         0,         0,     24316,         0,         0,         0,   1238247,         0,         0,         0,    209395,         0,         0,         0,    562578,         0,         0,         0,         0,         0,         0,         0,         0,         0,         0
A93,      5279,         0,         0,         0,         0,         0,         0,         0,         0,         0,         0,         0,         0,         0,         0,         0,         0,         0,         0,         0,         0,         0,         0,         0,         0,         0,         0,         0,         0,         0,         0,         0,         0,         0,         0,         0,         0,      5279,         0,         0,         0,         0,         0,         0,         0,         0,         0,         0,         0,         0,         0,         0
A94,   1125794,         0,         0,         0,         0,         0,         0,     17508,      4392,         0,      4834,         0,         0,         0,         0,         0,         0,         0,         0,         0,         0,     70184,         0,         0,         0,         0,         0,         0,         0,         0,         0,    345907,         0,    676263,         0,         0,         0,         0,        48,         0,      6658,         0,         0,         0,         0,         0,         0,         0,         0,         0,         0,         0
B01,    461166,        96,     54299,       313,       181,        83,         0,         0,         0,         0,         0,         0,     23611,        24,    111334,         0,         0,         0,       289,       252,       109,      7734,     23538,     88774,     18882,         0,         0,       293,     15945,         0,      5232,         0,         0,      3407,     15478,         0,         0,         0,       275,     31773,       689,         0,      8900,         7,         0,     12755,      1239,         0,        83,         0,     26192,      9379
B21,  25866723,    650440,    114280,    437100,    232713,   3457270,    403833,    218135,     60274,         0,   1086840,    739790,    160820,    103202,   1106680,    508332,    326249,    272158,    395780,    516512,    106752,    485601,    471634,   1025977,    495988,    408168,    374151,     85688,    161450,     93627,     89762,    622143,    258658,   1607355,    701072,    105464,    855395,    296708,    352504,   1121958,    101985,    390499,     75958,    473522,   1778422,    310844,     76780,    681747,    648812,    223851,    536486,     57354
B22,   3746532,     62015,     26048,     36268,     36108,    419421,     52901,     75905,      9534,         0,     63168,    112916,     16927,     17419,    204559,     70126,     35884,     26607,     46060,     64063,     23313,     31156,    121526,    180996,     82653,     47666,     76667,      6064,     22651,     27412,     18898,    114474,     47665,    337096,     67669,      6871,    158252,     48834,     42715,    194546,     28095,     81942,     13004,     67581,    212503,     30714,      9038,     66559,     91195,     26201,     75435,     11212
B30,    245458,     58965,         0,         0,         0,         0,         0,         0,         0,         0,         0,         0,         0,         0,         0,         0,         0,         0,      4038,         0,         0,         0,         0,      4630,         0,     12584,         0,         0,         0,       300,         0,         0,         0,         0,         0,         0,         0,         0,         0,         0,         0,         0,         0,    164312,         0,         0,         0,       629,         0,         0,         0,         0
B42,   6825210,     79294,     20608,    106275,     45384,    541647,    121693,    158735,     29417,         0,    395658,    199712,     51753,     45776,    337150,    157727,    153829,     74064,     95683,    166572,     32555,    162910,    118004,    251514,    130849,     81820,    160420,     39852,     49109,     25848,      9769,    211766,     65169,    395301,    168970,     20250,    256202,     68244,    192643,    374588,     27887,    111358,     35794,    121582,    351361,     46691,     35616,     74250,    259827,     52676,     99528,     11880
B46,  14367184,    236403,    185889,    154805,    174522,   1468509,    245274,    455240,     68685,         0,    488673,    354309,    185995,    110019,    493784,    392472,    191894,    139017,    186912,    125250,     72599,    239127,    479068,    418535,    242456,    182134,    319325,    130229,    111615,     61714,     58674,    649704,    117601,    731819,    449450,    118699,    531948,    199127,    176249,    590863,    104675,    190021,     90667,    307093,    810994,    110217,     54184,    298361,    331293,    194490,    241155,     95446
B50,   1500361,         0,     22335,         0,         0,     74207,     17331,     34797,     24462,         0,     60624,     70113,     46031,         0,     43773,     47264,     24901,     13709,     28505,     16869,     10280,     48474,    136950,     24407,     10281,     31006,     47629,     13324,         0,      2582,      6574,    204475,         0,     69421,     56154,     16628,     39684,      8980,     47879,     45511,     14936,     13700,     27107,     24975,         0,      5437,     26052,     26259,         0,     12473,         0,      4262
B54,    693730,     19612,      2978,      4081,     12070,      1807,      4030,      4695,      1166,         0,     33467,     27718,      4938,      4857,     20739,     21067,     16363,     16695,     16077,     18868,      5474,     10522,      7339,     19004,     17037,     24006,     21195,      5035,     15945,      2895,      3841,      8541,      9249,     18998,     40711,     13590,     26929,     20821,      5938,     21167,      2774,     13032,     10020,     21530,     34586,     10866,      4292,     17603,     16975,     10206,     18729,      3652
B59,   1130542,     14581,     50902,     10138,     20077,     56280,     14073,     15815,      5167,         0,     21258,     62231,      3450,     16054,     22470,     11438,     14737,         0,     56087,     10456,      5071,     23165,     18785,     37271,     21584,      8165,     56175,      9514,      5445,      6557,      6095,     15348,     19133,      3455,     30033,     10121,     47073,     21252,     32157,     71101,      9267,     20112,      8290,     13252,     62913,      9265,      5249,     27170,     32485,     30997,     24173,     34655
B79,  91090998,   1389303,    225249,   1000589,   1002354,  11953680,    854771,   1196713,    151752,         0,   2795277,   2025079,    312214,    232561,   2921284,   1761486,    709170,    640474,   1649944,   2574078,    625083,   1350351,   2589019,   3451226,   1461224,   1106993,   1784114,    294493,    444721,    237795,    449123,   2816970,    565703,  12789907,   1970554,    216794,   3946006,   1021779,    785479,   4941337,    589282,   1396027,    239828,   2022888,   4653902,    480047,    242282,   1166248,   1385268,    839771,   1696201,    134605
B80,    427129,         0,         0,         0,         0,    142408,         0,     25698,         0,         0,     57210,         0,         0,         0,         0,         0,         0,         0,         0,         0,         0,         0,    101580,        65,         0,         0,       824,         0,         0,         0,      3594,      3855,      8294,         0,         0,         0,     48793,         0,         0,         0,       539,         0,         0,     22103,         0,         4,         0,      8056,         0,      4106,         0,         0
B89,  11715660,    196722,     59191,    102369,    106580,   3446733,    107894,     84671,     44348,         0,    396683,    124264,     39716,     86234,    287349,    125279,    103792,    158759,    111916,    183303,     47155,    146657,    156165,    393010,    205997,    108892,    104526,     85142,     50583,     65029,     81389,    328486,     24844,    740232,    195285,     49093,    357559,     50674,    398263,    331665,     49935,    130436,     35365,    139678,    609160,     88908,     49067,    196288,    164061,     81157,    201282,    283874
B91,     21594,         0,         0,         0,         0,         0,     21582,         0,         0,         0,         0,         0,         0,         0,         0,         0,         0,         0,        12,         0,         0,         0,         0,         0,         0,         0,         0,         0,         0,         0,         0,         0,         0,         0,         0,         0,         0,         0,         0,         0,         0,         0,         0,         0,         0,         0,         0,         0,         0,         0,         0,         0
B94,    975254,         0,         0,         0,         0,         0,         0,         0,      2125,         0,      7656,      7715,         0,         0,     10247,      3203,      2107,         0,      2212,         0,         0,     82771,      2838,      7834,         0,         0,         0,       836,         0,         0,         0,    154296,         0,    650339,         0,         0,         0,         0,      1690,         0,     12982,         0,         0,      6361,     17463,         0,       690,         0,         0,         0,      1889,         0
D21,    820184,      7613,      4015,      6001,      1037,     61097,     18481,       262,      3600,         0,      3152,     13274,       394,        33,     16773,      1797,       198,      3464,      7137,      2452,       297,     22143,      4461,     10860,      5098,      4621,        88,       930,      3490,       758,      3086,    139165,     57205,    130084,      4245,       662,     23753,     14627,      7211,     56390,       123,     21220,       129,     10869,     33230,     35003,       837,     16129,     38825,      3173,      7063,     13629
D30,     15454,         0,         0,     15454,         0,         0,         0,         0,         0,         0,         0,         0,         0,         0,         0,         0,         0,         0,         0,         0,         0,         0,         0,         0,         0,         0,         0,         0,         0,         0,         0,         0,         0,         0,         0,         0,         0,         0,         0,         0,         0,         0,         0,         0,         0,         0,         0,         0,         0,         0,         0,         0
D42,    460428,       317,       168,     58457,       693,       239,       242,         0,        15,         0,     52390,         2,         0,     24344,         0,      5272,     41401,         0,        43,      5800,         0,      1425,      3616,     98699,     10821,      1482,       230,         0,      1544,       492,         0,      1165,     28508,         0,      2970,         0,     51616,       555,         0,         0,         0,      7082,      2661,      5062,      4259,        12,        24,     47680,         0,         0,       251,       891
D46,    928997,      6923,         0,     19720,      2632,    484731,      8637,         0,         0,         0,     12420,     17281,         0,      1724,     36560,     17406,      1907,     14478,      1272,        46,      2637,     11374,       255,     44408,     18179,      2218,      9589,       490,      9978,      6203,      2867,     12217,         0,         0,      3526,     10218,     17533,      4283,      3714,      7051,       151,       671,       638,     16494,        17,         0,      4394,     73486,      3671,         0,     32460,      4538
D79,   5898597,       713,         0,    153222,         0,   1214224,      5027,         0,         0,         0,    186102,         0,         0,       758,    101608,     65737,     28214,         0,         0,         0,         0,      7477,     53730,      6835,    183096,     52986,        15,     13124,      3066,     10881,     53867,      7961,       411,   3131843,    290164,      8857,     10263,         0,     14288,    221400,         0,     39999,         0,       224,     29303,      3202,         0,         0,         0,         0,         0,         0
D80,    212932,         0,         0,         0,         0,         0,         0,         0,         0,         0,         0,         0,         0,         0,         0,         0,         0,         0,         0,         0,         0,         0,    187821,         0,         0,         0,         0,         0,         0,         0,         0,         0,         0,         0,         0,         0,         0,         0,         0,         0,     25067,         0,         0,         0,         0,        44,         0,         0,         0,         0,         0,         0
D89,   1555548,     14183,      7144,      5564,      1611,    106868,     42805,      4262,     11664,         0,     35487,     16272,      2710,       733,     26407,     15011,       675,         0,      7319,     10734,       531,     26362,     19750,     70408,      5605,      4540,      1428,       559,      1609,      5309,      7038,     38748,       457,    724970,     21315,      2948,     97858,     23574,      1644,      7104,     19875,     27742,       882,      9407,      5874,      6301,         0,     25435,     22209,     10986,     54229,      1402
D91,        21,         0,         0,         0,         0,         0,         0,         0,         0,         0,         0,         0,         0,         0,         0,         0,         0,         0,         0,         0,         0,         0,         0,         0,         0,         0,         0,         0,         0,         0,         0,         0,         0,         0,         0,         0,         0,         0,         0,         0,         0,         0,         0,         0,        21,         0,         0,         0,         0,         0,         0,         0
D94,    968464,         0,         0,         0,         0,         0,         0,         0,         2,         0,     15387,         0,         0,         0,         0,       194,         0,         0,         0,         0,         0,      5193,    130900,         0,         0,         0,         0,         0,         0,         0,         0,      8530,         0,    807776,         0,         0,         0,         0,         0,         0,         0,         0,         0,       217,         0,         0,         0,         0,         0,         0,       265,         0
E01,    348677,       428,     31570,      8364,       379,      1107,         0,     18568,         0,         0,         0,      1179,     87756,      1063,      4531,         0,       847,         0,       538,         0,       738,     35215,     87796,      5332,      1053,         0,        37,       770,      2916,         0,        10,         0,         0,     21965,      1147,        23,       349,        28,         0,      7856,      6153,      2969,       642,         0,         0,       953,         0,     14888,       896,       611,         0,         0
E03,    173334,         0,     41740,         0,         0,         0,         0,       581,         0,         0,         0,         0,         0,      2760,         0,         0,      6579,         0,         0,         0,         0,      2021,         0,         0,         0,         0,         0,      1123,         0,         0,         0,         0,         0,         0,       308,     88609,      1045,      1127,         0,         0,      2540,         0,     24901,         0,         0,         0,         0,         0,         0,         0,         0,         0
E04,  13290202,    136123,    116271,    266624,     95321,   2116708,    130538,    228466,     62907,         0,    701370,    318675,     78970,     38213,    503618,    242169,     98481,    109953,    137639,    179157,     46802,    317968,    305254,    711413,    121772,     73294,    156523,     28596,     38978,     93050,     36779,    490261,     96750,   1347506,    384085,     12789,    494085,    119231,    105792,    465648,     85160,    225632,     21599,    201731,    793677,     70407,     23969,    379733,    215404,     26975,    218151,     19985
E05,   2834589,     35416,     11123,     25794,      4881,    408072,     79549,     57479,     15940,         0,    276975,    156988,     15441,     10895,     46088,     13288,      4890,     44672,     27030,     53586,     11772,    183203,     59569,    126062,     30790,     11378,     34334,      7573,     32213,     17811,      7510,     68152,     27586,    207543,     89569,      1385,     86611,     70092,     40932,     27559,      9998,     32297,      7880,     51301,    113604,     24848,      7033,     22996,     80379,      8403,     43656,      2443
E12,   1810740,     24693,    200717,         0,         0,    136161,         0,         0,         0,         0,         0,         0,    703447,         0,         0,         0,         0,         0,         0,     21256,      8402,    130128,         0,         0,         0,         0,         0,         0,         0,         0,         0,    404107,         0,         0,     24696,         0,         0,     14571,         0,      1167,         0,     49400,         0,         0,     91995,         0,         0,         0,         0,         0,         0,         0
E16,   7672967,    136372,     15581,    155488,     80924,    636318,    150456,     62290,     44281,         0,    205439,    144493,     42452,     47814,    274564,    320631,    121316,     97690,    114495,    178884,     44671,    152997,    118665,    408596,    170194,    110052,    130694,     38737,     75957,     28221,     47921,    137415,     72391,    271887,    273874,     63264,    327370,    175935,     96604,    344375,     41025,    149078,     23772,    126412,    487281,     83502,     30506,    319974,    222236,     84328,    157151,     28394
E18,  55023169,   1174360,    247795,    871889,    586547,   6258427,   1107155,    687524,    317495,         0,   1446034,   1231461,    413720,    243329,   1770004,   1616987,    743234,    619420,    959207,    955884,    272920,   1024696,   1054518,   2536293,   1254058,    446435,    840395,    191717,    427791,    288562,    225171,   1387578,    554166,   3115691,   1530102,    265146,   2468707,    834652,    619125,   2364564,    229070,    931942,    144892,   1068285,   3685509,    710864,    221294,   1586349,   1600423,    434880,   1340011,    116891
E19,   5727060,     64703,      3239,     74828,     36316,    758994,     56857,     48312,     22987,         0,    220848,     40720,      4179,     10361,    361791,    160599,    101753,     44655,     72775,     69819,     20054,    112422,     89480,    262729,    151302,     40764,     72481,     14417,     25725,      8143,     20693,    210140,     26207,    774309,     76853,     14927,    315543,     57802,     53309,    354595,     26566,     46146,      5212,     53643,    209038,     25907,     30286,    135282,    152184,     25916,    143636,     17613
E21,   7178227,    338106,     58092,     69625,    154952,    712940,     35176,    118008,     54650,         0,    353587,    252077,     10275,     42697,    297298,    108078,     57366,     70520,    263649,    187382,     36187,    131036,    158308,     99253,    105391,     97748,    105775,     53569,     45380,     25087,     12922,    105831,     49945,    383475,    177525,     27772,    152953,     84281,     63854,    592718,     75971,    115467,     30114,    219561,    284491,     58192,     27416,    237619,    202246,     76484,    142407,     14771
E22,   3542938,     60693,     27469,     39638,     35368,    398445,     52899,     76007,      7919,         0,     44664,     98114,     11321,     13291,    204504,     84201,     46342,     19771,     39485,     63955,     24155,     29840,     96894,    175789,     80620,     41153,     65030,      8819,     22530,     24358,     18238,     92604,     44790,    315365,     65056,      6521,    162282,     42568,     43107,    155981,     25217,     51307,     13472,     68516,    227137,     30242,      9234,     73537,    103188,     23708,     65838,     11756
E23,   9383511,    109258,    103113,    176084,     71843,   1504593,    127615,    184866,     56942,         0,    419150,    109932,     69340,     35832,    399340,    178533,     82418,     94599,    139506,    113223,     52712,    216726,    388072,    303872,    177470,     40636,    119417,     62916,     42154,     87007,     35213,    276119,     66269,    815004,    114713,     21302,    487754,    140789,    219922,    392023,     41284,    114750,     23348,     96446,    311806,     71606,     29487,    236966,    177805,     87890,    122121,     33725
E25,   6107183,    113382,     95226,     64001,     26784,    299194,    107624,    176932,     43963,         0,    445887,     48987,    100085,     24504,    180225,     49273,    106353,     81094,    129294,     85149,     36054,    200009,    289039,    144940,     85198,     21962,    112886,     26834,     26931,     15168,     56932,    248805,     73166,    982842,    231522,     15845,    108749,     73874,    129790,    171169,     64084,     37269,     14923,     82486,    219373,     51838,     26486,    146226,     50745,     38795,    122578,     22708
E26,   1525758,     14010,     23765,     17282,     14127,    164533,     12772,     27555,      6100,         0,    106872,     18091,     20059,      5231,     51899,     18119,     15592,     12562,     22937,     22516,     11999,     23565,     40835,     81324,     40819,     12195,     20439,      6838,     10340,      5965,      7693,     46771,      9590,    162505,     16938,      3176,     32508,     20660,     14169,    131394,     12185,     21172,      4549,     14895,     59680,      9506,      4673,     22584,     46827,     12093,     40694,      3155
E29,    924378,     10466,     13544,     14643,      5227,     51889,     19201,     19704,      5955,         0,     40549,     20778,     17307,      2834,     17751,     11676,     10801,     11949,     12251,     51905,      9258,     24691,     16095,     65288,     28917,     12186,      7821,      4636,      7098,      7366,      4371,     54532,      8852,     90724,     23897,      2918,     24534,      7628,      9066,     35533,     15193,      7157,      6246,     14719,     25646,      5340,      4508,      8791,     33633,      9225,      5390,      4689
E31,    749966,       883,     30191,     12737,      3074,      1546,      6135,      3470,      8500,         0,     45494,     30172,     30471,       370,     13208,     13806,      3943,      2231,       399,     14682,      6278,     28210,     19359,     18578,      8606,      6060,     20225,       673,      2550,         0,      1201,     31641,      6158,    123374,     15125,      2575,     56064,     13671,         0,     20793,     14185,     14821,      4843,      8964,     38723,      2438,     18985,     22512,       958,     13708,      2499,      4877
E32,  15122319,    369853,     98863,    309080,    121596,   1587551,    175227,    276453,    101096,         0,   1316043,    215685,    203450,     54026,    863222,    288296,     73058,     82273,    107478,    333595,     98102,    320852,    781235,    720073,    258149,    122112,    319847,     72613,     44842,     53564,    100040,    399035,    179224,   1060738,    195525,     21479,    393291,    187376,    123463,    306741,    137293,    375949,     43358,    314290,    501893,     60826,     41587,    441302,    629375,     97000,    110197,     34103
E36,  24707111,    736011,     33817,     60313,    174489,   2393654,    143800,    729035,     42685,         0,    474522,    490570,    164156,     31084,    604057,    489398,    423887,    280675,    259776,    715527,     62847,    334889,    760214,   1049855,    537123,    235861,    369304,     38128,    225305,     50006,     37326,    804422,    224206,   3265200,    616024,     54690,   1039984,    320823,    364672,   1333012,     98719,    524230,     41232,    416776,   1518034,    223002,     22184,    920498,    474387,     87692,    374857,     34153
E38,    101057,         0,         0,     10378,       125,         0,      3434,         0,         0,         0,      7844,         0,      4652,         0,     29263,         0,         0,         0,     18070,         0,         0,         0,         0,         0,       935,         0,      1153,         0,         0,         0,         0,     21094,         0,         0,         0,         0,         0,         0,         0,      4109,         0,         0,         0,         0,         0,         0,         0,         0,         0,         0,         0,         0
E44,  11325946,    161327,    252109,    141382,    155567,   1483365,    133933,    142261,     30928,         0,    495920,    122740,     82565,     43982,    469666,    190142,    140973,    173728,    181716,    204178,    102426,    279333,    124201,    148709,    167997,    100643,    276444,     71138,     61434,     54838,     63984,    116460,    347960,    355074,    590848,     56198,    316610,    122869,     72728,    834629,     18638,    162615,     62503,    130426,    800845,     88794,     91081,    546310,    177576,    214200,    100998,     60955
E45,   1394325,         0,     70530,         0,         0,     46549,         0,      3550,      6995,         0,    150864,       731,         0,         0,     78560,     19428,         0,     18803,      6827,     17867,     23839,     32466,     69147,      6650,         0,         0,         0,         0,         0,         0,     13086,    290112,         0,    190535,     17202,         0,     45979,     25262,       338,     76509,      2273,         0,         0,         0,     10014,         0,         0,     58209,     96648,     15352,         0,         0
E47,    189484,         0,         0,         0,         0,        77,         0,     60222,         0,         0,         0,         0,         0,         0,     14831,     20272,      8808,         0,         0,         0,         0,      9964,         0,     41878,      2915,         0,      3570,         0,         0,         0,         0,         0,         0,         0,         0,         0,         0,         0,       252,         0,     25154,         0,         0,         0,         0,         0,      1541,         0,         0,         0,         0,         0
E50,   1522124,      3658,     28361,      3416,      2252,     70335,     27429,     77570,     27176,         0,     44988,     39380,     49882,      3838,     26005,     43564,      2255,      1225,      5777,       889,     24798,     55672,    173308,     39124,      9731,      1309,     38682,     14652,      2037,      6889,      7015,    132411,      3139,    157987,     32320,     18971,     50056,      7176,     57323,     10950,     19478,     18952,      6485,     13569,      5978,     26128,     29439,     38399,     27854,      9624,     17928,      6740
E52,    246062,      2254,      4321,      4274,      2924,     12454,      4969,      9271,       755,         0,      5186,         0,     18906,      1969,     10745,      4107,      2741,      1392,      7459,      3500,      3063,     10916,      3970,     17562,         0,      2149,      1218,      1787,      1940,      1755,      2265,      5128,      2470,     22814,      4070,      1193,      7326,      3664,      2566,      8875,      3843,      3068,      2111,      3365,      6427,      4331,      2093,      6300,      7385,      3825,         0,      1356
E54,   3918180,     85532,     14280,     84396,     64903,    546535,     36486,     13353,      3692,         0,    284709,    136171,     50313,     34589,    115760,     66754,     98942,     82853,    106842,    105124,     33784,     71444,     11293,     95210,    105173,     70081,     76575,     24773,     76658,     14182,      4965,     37921,     39941,     81905,    152269,     44526,    107886,     61464,     70984,     75710,      3709,     53827,     31520,     87153,    201630,     33248,     15921,     76354,     95173,     32404,     82215,     17048
E55,   1454108,     12698,    111200,     23205,     20374,    129254,     36470,     12046,      3157,         0,     51930,     23800,      3594,     29143,     18767,     21149,      9607,     10893,     16725,     29627,     23195,     41361,     15917,     27726,     54343,     16193,     17339,     26033,     12683,     12206,      8956,     24469,     17641,     34432,     32486,      8385,     23281,     15985,     58986,     64610,      2990,     35248,     13378,     28293,     60511,     21550,      7751,     28741,     83371,     13045,     35644,     23720
E56,    915558,     24276,     28395,      1452,     12350,    301354,      4974,      8280,       727,         0,     34173,     34399,      6039,     14764,      6125,      6492,      2380,         0,      8043,      9694,      8295,     13872,      2641,         0,     28684,     21310,     10375,     15262,         0,      5262,      1603,      6344,      2431,     20835,     29286,         0,      8642,      1003,     58948,     27070,      1677,     20903,      3423,     16857,     15653,      4449,      3376,     16825,     36596,      3787,     24377,      1855
E59,   2137657,     21161,     73827,     20609,      4609,    186922,     25965,     22794,     15745,         0,    155099,     34484,     19451,     12399,     68175,     22293,     48253,     17890,     74963,     46479,     11479,     92655,     46887,     87745,     50157,      8768,     69881,     21250,      5206,      7023,     12480,     71319,      8428,    110482,     42358,      7298,     51041,      6802,     17044,    128639,      9935,     11947,     13135,      9350,     95709,     17534,     13522,     29735,    126271,     29521,     42879,     10059
E61,   1945685,      8032,     10055,     13348,     28124,    138901,     15599,     11350,      9763,         0,     79841,     96614,     30721,     10463,     67046,     19523,     15657,      7480,     75434,     66969,     10688,     40538,     51880,     50654,     54668,     22463,     19231,      3813,     16017,      7865,      9245,    218793,     25206,    206101,     28211,      7832,     38877,     41206,     18529,     67106,      5555,     27563,      9276,     45469,     49447,     14771,      8218,     39627,     27927,     34801,     24437,     14751
E62,   4581238,     64857,     45554,     94858,     34355,    729055,     43207,     72331,     32056,         0,    211098,     90313,      3030,     23627,    201873,     82103,     43232,     32459,     85860,     91618,     24924,    137629,    110365,    191206,     56830,     34595,     62615,     15391,     28283,     25699,     21196,    195626,     44276,    257100,    138555,      7808,    141979,     41514,     65651,    289472,     21546,     72620,     12275,     59877,    192692,     28302,     24412,    121884,     94527,     22046,     48488,     10369
E66,   3925673,     26519,     30255,     64250,     35312,    919010,     36819,     45996,     20751,         0,    201604,     49483,     20525,     28362,    141440,     31232,     25169,     28610,     44087,     22057,     22832,     65103,     41611,    102209,     92271,     44701,     42878,     10031,     24468,     36176,     17943,    215854,     34485,    301251,     46561,     13834,    119654,     45286,     74610,    109605,     20349,     37010,      6363,     45906,    196988,     18123,     13742,     72061,    196481,     19709,     58470,      7627
E67,  13512854,    208347,    100358,    254672,     64384,         0,         0,    443657,     36010,         0,    839630,    427262,    116824,     32204,    999690,      3870,    164829,    144545,    224582,    207817,    146385,    415984,    741426,   1085445,    476071,     64561,    248159,     44923,     66798,     39372,     62636,         0,    106063,         0,    347467,     24917,   1176533,    171794,    201740,    879642,    131055,    122251,     27869,    203045,    800537,     92765,     67354,    421096,    528483,    118922,    403669,     27211
E68,   1269184,         0,      3242,     18434,     24573,         0,         0,      2161,      2565,         0,         0,         0,     28438,         0,    187729,        12,      1699,         0,         0,         0,      2554,         0,    118078,     78570,         0,         0,       672,         0,       710,      2601,         0,         0,      3389,         0,     84826,         0,         0,      4256,       373,    331356,         0,     53530,         0,     33334,    204737,     18215,      4599,         0,     52451,      2239,      3222,       619
E74,  92637487,   1423708,    208641,   1019329,    882602,   9041462,    948199,   1498438,    152536,         0,   3692827,   2427200,    334797,    234813,   3481424,   2014846,    781704,    569022,   1537255,   2000986,    685814,   1836824,   3305709,   2883210,   1929753,    898192,   1885820,    229693,    414251,    325620,    720070,   4301168,    396353,  12360880,   1985718,    201805,   3978612,    987062,    754272,   5004254,    461193,   1422458,    187122,   1931339,   4982114,    411507,    212986,   1343396,   1465637,    825823,   1945200,    113843
E75,    965952,         0,      7672,         0,      1004,         0,     41314,     17466,       188,         0,    131244,         0,      1000,      1068,     56253,     44030,     18880,         0,     26801,         0,     27456,     23824,     28393,     85581,       947,         0,     25278,         0,     31566,         0,         0,         0,     37237,         0,     14488,      8819,     41789,         0,         0,    103791,      8260,     13454,      5464,     38812,     40580,     16766,       212,         0,      3397,         0,     52580,     10338
E77,    570190,         0,     32311,      3534,         0,     44478,     10205,     19598,     30716,         0,         0,         0,         0,      3346,     30282,     21985,     26326,      3530,         0,         0,       564,      3007,     25801,     29278,     23788,         0,     10376,      5828,     24760,         0,      8806,     35851,     15739,      8695,         0,      1964,     23164,     37902,         0,     25988,      9805,         0,      2340,         0,         0,         0,      6966,         0,     16716,      1655,     23160,      1726
E79,  16697902,    207659,     51879,    283911,    201598,   1198644,     77736,    256308,     67744,         0,    607722,    458322,    103088,     74976,   1145112,    233424,    271519,    148080,    582768,    272117,    114090,    394563,    773082,   1101759,     51642,    181679,    326339,     47943,    159446,     69926,     90817,    439748,    151678,    384397,    146468,     97927,    331595,    279011,    367096,   1846340,    110731,    277072,     65614,    336609,   1137092,    123386,     76966,     55306,    684216,    144653,     53443,     34661
E80,    374825,         0,         0,         0,      2579,     76450,         0,       366,         0,         0,         0,         0,         0,      6230,     15639,      5214,         0,         0,         0,         0,       286,     24506,    108492,         0,      3061,         0,      6770,         0,         0,         0,      6107,      6652,      7300,     17008,       183,         0,      2852,         0,       127,         0,     18861,         0,         0,      1589,         0,         0,         2,     57410,         0,      1979,      5162,         0
E81,   1164398,         0,         0,      2728,         0,    394956,      4723,    109777,     37983,         0,      8298,      3489,         0,       475,     24111,      7650,      2434,         0,      8080,      9846,     18288,     12144,     12461,     24591,      5531,         0,      3995,         0,         0,      4819,      5001,     95644,         0,     48909,      8556,         0,     12278,       537,      6524,     27714,     19893,      4459,         0,      7843,    149536,      3936,      7223,      7688,     35548,      7562,     14202,      4966
E84,      1932,         0,         0,         0,         0,         0,         0,         0,         0,         0,         0,         0,         0,         0,        19,         0,         0,         0,         0,         0,         0,         0,        19,         0,         0,         0,         0,         0,         0,         0,         0,         0,         0,         0,         0,         0,         0,         0,         0,      1893,         1,         0,         0,         0,         0,         0,         0,         0,         0,         0,         0,         0
E85,    139143,      5788,       400,      1137,      2367,     20849,         0,         0,       162,         0,      5757,      4295,       748,       875,      6236,       440,         0,      1519,      1374,      5575,      1054,      2429,      3590,       606,      2223,      3347,      1672,       536,      1311,       604,       189,      3342,      1097,      4988,      2645,       322,       609,         0,     26394,         0,         0,       621,       666,      1674,      9013,        78,        81,      2157,      2676,       866,      6831,         0
E87,    311715,     28549,         0,         0,         0,         0,         0,       712,         0,         0,      2066,     42969,     15950,         0,         0,      2580,         0,         0,         0,     34111,       117,     41889,     52578,       868,         0,      4111,         0,         0,         0,         0,       295,      9459,         0,     15188,     19771,         0,         0,         0,         0,         1,       807,     28269,         0,         0,         0,         0,         0,     11425,         0,         0,         0,         0
E89,  19850749,     91973,    708872,    146380,     69504,   3876750,     58713,    632891,     52968,         0,    485586,    317593,    409897,     56804,    810431,    231902,    114372,     81761,    114194,    227651,    106365,    360499,    738948,    369000,    336058,    112621,    128693,     58948,     36288,     84166,     50802,   1987997,     49243,   1957837,    189509,     48422,    429301,     73392,    138918,   1377668,    612473,    165228,     25813,    216167,    634564,     65482,     81747,    110759,    319134,    173869,    310177,     12419
E90,   2566719,    136329,         0,         0,         0,         0,         0,         0,         0,         0,         0,         0,         0,     34829,         0,         0,     58323,         0,         0,         0,     50551,         0,         0,    380605,         0,     98885,         0,     33872,         0,         0,    160892,         0,         0,         0,         0,         0,    295649,         0,    103266,    632247,         0,         0,         0,         0,         0,     51836,     27611,    211698,    222957,     40244,         0,     26925
E91,     88076,         0,         0,         0,         0,         0,       786,         0,         0,         0,         0,         0,         0,         0,         0,         0,         0,         0,         0,         0,         0,         0,     51214,         0,         0,         0,         0,         0,         0,     24795,       139,      8928,         0,         0,         0,         0,         0,      2214,         0,         0,         0,         0,         0,         0,         0,         0,         0,         0,         0,         0,         0,         0
E92,   1552459,         0,     19340,     17632,         0,     51989,         0,         0,         0,         0,         0,         0,         0,         0,         0,         0,         0,         0,         0,         0,         0,         0,         0,         0,         0,         0,         0,         0,         0,     24133,         0,         0,         0,    965701,         0,         0,         0,    133793,         0,         0,         0,    339871,         0,         0,         0,         0,         0,         0,         0,         0,         0,         0
E93,      3085,         0,         0,         0,         0,         0,         0,         0,         0,         0,         0,         0,         0,         0,         0,         0,         0,         0,         0,         0,         0,         0,         0,         0,         0,         0,         0,         0,         0,         0,         0,         0,         0,         0,         0,         0,         0,      3085,         0,         0,         0,         0,         0,         0,         0,         0,         0,         0,         0,         0,         0,         0
E94,   2322481,         0,         0,         0,         0,         0,         0,     48570,     14607,         0,     19880,         0,         0,         0,         0,         0,         0,         0,      2983,         0,         0,    175935,         0,         0,         0,         0,         0,         0,         0,         0,         0,    724597,         0,   1308931,         0,         0,         0,         0,         0,         0,     26286,         0,         0,         0,         0,         0,       692,         0,         0,         0,         0,         0
F01,    541146,        39,     53350,        26,         0,         0,         0,      6839,         0,         0,         0,      1790,    302965,         0,         0,         0,         0,         0,     44246,      2564,         0,     15195,     53877,       354,         0,         0,       239,       237,         0,         0,       146,         0,         0,     10017,         0,         0,         0,         0,         0,      4549,      5184,        36,         0,         0,         0,      2611,       110,         0,         0,         0,     36772,         0
F03,      7768,         0,         0,         0,         0,         0,         0,       602,         0,         0,         0,         0,         0,         0,         0,         0,         0,         0,         0,         0,         0,       323,         0,         0,         0,         0,         0,         0,         0,         0,         0,         0,         0,         0,         0,      1440,      1184,      1884,         0,         0,         0,         0,      2335,         0,         0,         0,         0,         0,         0,         0,         0,         0
F04,   1813393,       260,      2842,     17992,      1165,    336965,     17163,    131088,     29387,         0,     55144,      5828,      7974,      2131,     35815,     13626,       799,     19467,     12726,       485,      8418,       169,    115110,      3849,      8145,         3,      3245,       448,       872,     14418,       911,     26018,      2496,    153726,     56088,      1796,     41373,      1548,     25286,     55375,      2619,     37273,        40,     61624,    231958,       128,      1929,      3940,    239759,         0,     22794,      1178
F05,    168804,      6330,         0,         5,         0,         0,      2230,         0,       237,         0,         0,     90539,         0,         0,      1185,         0,         0,         9,         0,         7,         0,     37915,        34,        69,        10,        23,         0,         0,       192,       264,         0,      1703,         0,      8400,         0,         0,     12688,         7,         1,         0,      3174,         0,         0,         3,      2867,         0,         0,        23,        14,       875,         0,         0
F12,    372005,         0,      9994,         0,         0,         0,         0,         0,         0,         0,         0,         0,     87645,         0,       118,         0,         0,         0,         0,         0,        50,         0,         0,         0,         0,         0,         0,         0,         0,         0,         0,     10134,         0,         0,      7376,         0,         0,         0,         0,     68468,         0,         0,         0,         0,         0,         0,         0,         0,    188220,         0,         0,         0
F16,    558046,       262,      1591,      3116,      9176,     46362,     38556,       592,        15,         0,      3104,      6303,       235,      6607,     55938,     28238,      1887,      1801,      6820,      2836,      6985,      2367,     31009,     13617,     12281,         0,     22054,       296,     10490,       308,         0,     22691,      2777,     27220,     19917,      1307,     31547,      2663,     18145,     12127,         6,     24184,         0,       337,      9840,      1520,       954,     49600,      7408,       194,     12763,         0
F18,   3756305,     62460,     22268,     56054,     66041,    229003,     47542,      4021,     20403,         0,    208307,     98908,     29355,     10405,     93131,    108028,     35761,    211811,     51851,     25699,     17944,    111466,     39858,    135726,     28913,     28806,     28311,      2363,     15460,     47638,         0,     97223,     19229,    378951,     79348,     25142,    364769,     23542,     56505,    160322,      8806,     90663,      4555,    256680,    127615,     36260,      3145,     43521,     63123,      3417,     66571,      9385
F21,    182553,         6,         3,       527,       824,         0,       106,      3398,         0,         0,      4413,     10700,      3369,      1015,     11640,       677,         0,        15,      9019,       300,         0,       162,         0,        40,     23137,       255,       548,      1456,       237,        89,     10079,      1242,       259,     17947,       580,       113,     50234,       862,        56,     14638,       111,      5769,         3,      5377,       354,       171,         0,      1003,       673,         0,      1146,         0
F22,     37083,         0,         0,         0,       108,      3520,         0,        14,         0,         0,         0,         0,         0,         0,         0,       125,         0,         0,         0,         0,        79,         0,        22,        36,         0,         0,       722,         0,        48,         0,         0,         0,       327,     28180,         0,        53,         0,         0,         0,         0,       587,       442,         0,         0,      1589,        29,         0,      1202,         0,         0,         0,         0
F23,     37742,       387,        13,       638,       239,      1018,       823,       195,         4,         0,      2081,      1551,         0,       106,         5,        16,         0,         0,         4,         0,        32,         3,        18,         0,         0,         0,         9,        19,         8,         5,       258,      1290,         0,     25655,       912,         0,         0,        22,      1417,         1,         0,         0,        37,         0,       719,       146,         0,        94,        17,         0,         0,         0
F25,    124226,     15075,       987,       270,        21,         0,        29,      3064,         0,         0,       106,         0,       623,        26,      2297,         0,         0,         0,         0,         0,         0,       371,      9616,         0,       227,         0,         0,        13,         1,      5565,      1746,        54,         0,     79425,         0,         2,         0,       116,         4,         0,         0,         0,         0,         0,        51,      3556,       563,         6,        58,         0,         0,       354
F26,     14702,       338,       125,         9,        15,         0,       142,       128,         0,         0,         0,         0,         0,        12,         6,         7,         0,         0,         0,         0,         0,        11,       110,       863,         5,         0,         0,         0,         0,         0,         0,      3682,         0,      8644,         0,         0,         0,         1,       458,        86,         0,         0,        22,         5,        10,        19,         0,         4,         0,         0,         0,         0
F29,      5379,         0,        11,       108,         0,         0,      1204,         0,        62,         0,         0,         0,         0,        23,         0,         0,         0,         0,         0,         0,         0,        38,        26,       258,         0,         0,         0,         0,         0,         0,         9,         0,         0,      2159,         0,      1298,         0,        45,         1,         0,         0,         0,         0,         0,       137,         0,         0,         0,         0,         0,         0,         0
F31,    529468,      6097,         0,       280,         0,     18417,       715,     23783,     11625,         0,     11848,      2394,     11364,      4464,     29997,     62487,         0,      1214,         0,      1994,      4510,      1995,     10484,      4001,      2778,     32464,      3442,      1224,       636,       162,      2033,     13599,     15534,     10700,     19952,         0,     45541,      1515,     18907,     16992,       429,      7157,     11406,     14341,     23124,        16,      9359,     10788,     58574,        37,         0,      1089
F32,    360654,      9870,       152,       148,         0,       443,       785,      8030,      3899,         0,         0,         0,      1884,       306,       562,       249,         0,         0,      1743,      1034,         3,     15817,      7724,     34111,       989,       215,       291,         3,        26,         0,         5,       518,         0,    233989,        27,       360,        20,       251,        51,       693,      7546,      1466,         8,      3131,       410,        30,         0,      1740,     21876,         0,       172,        77
F36,    677574,     20639,         3,         0,      2822,    102283,       112,     22824,       611,         0,     23617,      9014,     12404,      1171,     20926,     18126,     37882,      3672,      5247,      3025,        91,       203,     12555,     50336,       307,      1086,      3642,        93,      5362,         0,         3,      6323,      5097,     81916,      7231,       502,     74326,      2664,      6353,     40387,      5250,     16709,        34,        33,     26414,      3771,         0,     13739,     20007,         0,      4961,      3801
F44,  23747784,    321618,    158319,    412517,    260584,   1176887,    313966,    615044,    172009,         0,    833509,    662752,    260390,    168032,   1292422,    489343,    504656,    302043,    592466,    556538,    109338,    281096,    565893,    538212,    505192,    333568,    445854,    195497,    259800,    185935,     77962,   1227950,    209810,   1631804,    692564,    125640,   1068761,    298124,    306531,    595137,    153014,    328634,    126961,    667967,   1368263,    171076,     56823,    762051,    521747,    258972,    368193,    216320
F45,   1538558,         0,     16352,         0,         0,     14096,         0,         0,      3046,         0,    285252,         0,         0,         0,    114854,      9280,         0,     14606,     15626,     21706,     12536,     42402,     61354,       561,         0,         0,         0,         0,         0,         0,      4603,    155268,         0,    178685,      2741,         0,     50562,    159329,         0,    312277,         0,         0,         0,         0,     15743,         0,         0,         0,     41706,      5973,         0,         0
F50,     67777,         0,      6298,         0,         0,         0,         0,         0,      2095,         0,         0,         0,     32023,         0,         0,         0,         0,         2,         0,         0,         0,      4188,         0,         0,         0,         0,         0,         0,         0,         0,         0,     10565,         0,      8090,         0,         0,         0,         0,         0,         0,         0,         0,         0,         0,         0,         0,         0,        85,      4431,         0,         0,         0
F52,     29311,         0,         0,       515,         0,         0,       246,       144,       475,         0,      2894,        41,     12730,        79,       191,         0,         0,         0,         0,         0,         0,         0,         0,         0,         0,         0,         0,         0,         0,     11172,         0,       109,         0,        42,       348,         0,       134,         0,         0,         0,         0,       101,         0,         0,        53,        37,         0,         0,         0,         0,         0,         0
F54,     96237,      3096,         2,     10213,      2683,     10537,        38,         0,         0,         0,     11600,      1807,      2726,       110,     10518,       847,       173,       224,       681,       163,         4,      4190,         0,       725,         0,      1482,      2291,         1,       447,         0,         0,     12545,       206,      2476,      1679,      1010,      1517,         1,       241,      3537,         0,        35,        54,       629,      1096,       310,         0,       961,       523,         0,      4654,       205
F55,     98098,       196,       417,      2702,      1381,     17976,      3425,         0,       206,         0,      2534,      2355,       175,      1712,      3602,       791,      1464,      3665,      1165,       632,       210,         5,       838,      1156,       587,         0,      5904,      3409,      1222,      1690,       253,      6924,         2,      1159,       727,      1472,         4,       445,      1889,       537,       158,      1791,       153,      1915,      3172,      2569,      1205,       649,     10484,      1243,         0,      1928
F56,      9498,        59,         2,         0,        41,      1845,         0,         0,         0,         0,      2838,       110,         7,       179,       577,         4,         0,         0,         0,         0,       139,       827,       458,         0,       397,         0,       415,         0,         0,       299,         0,        38,         8,        98,       102,         0,         3,         3,       176,       530,         0,       295,         0,         0,         0,         8,         0,        37,         3,         0,         0,         0
F59,    606203,         0,        12,        20,      1250,    223938,      3609,       925,       343,         0,     35968,      1227,     13025,       581,     14946,      1810,      1837,         0,     19271,     28477,       180,     10170,     20040,         9,      2242,         0,      5424,         0,         0,         2,      2141,      4054,      6173,     13994,      2192,      1926,     29742,         0,        25,      2790,      1862,        82,         0,       447,      4028,       538,        43,      1553,    124116,     19068,      2199,      3924
F61,    591721,      1394,      1573,      1485,      1434,     10149,      2190,      2978,      2228,         0,      5911,    142677,     68922,      3294,     18054,      3848,        36,         0,     26668,     18817,       450,       234,     10909,     21106,      4035,        60,      7943,       654,      1117,       418,      5254,      5790,      1854,     53044,     11474,      1368,       266,       835,      1053,     37767,     73260,      4921,      1944,      5118,      2073,      7516,         0,      2284,      8146,      2358,      5123,      1689
F62,     37872,        39,         9,       321,        13,      1034,         0,       491,      2237,         0,      1200,      3109,        23,       383,       767,       169,         0,        78,       315,       734,         0,       434,       439,        74,         0,         0,      1061,         0,       371,       112,      1869,      1041,       582,      4259,       227,        29,      1711,         0,         3,         0,         0,       771,        49,         1,      4234,      3150,      1102,        97,      5327,         0,         0,         7
F66,     69423,      1260,         9,        14,         0,       140,       307,         0,       387,         0,      3700,         0,         0,         1,         5,        11,         0,      1581,        45,         0,         0,        55,         0,         0,         0,        98,         0,         0,         0,         0,         0,       274,         2,     19789,         0,         3,       780,        21,        89,         4,        19,         0,         0,         0,       634,        77,         0,     12189,     27852,         0,         0,        77
F77,     32674,         0,        80,         0,         0,      8658,       639,        62,       108,         0,         0,         0,         0,      3933,        32,       780,         0,       108,         0,         0,         0,         0,       210,         0,       974,         0,      1481,        67,        61,         0,       367,       302,         0,        26,         0,       831,       464,       465,         0,      9871,        64,         0,         0,         0,         0,         0,        77,         0,       756,         0,      2248,        10
F79,     16426,         0,       695,       493,        52,         0,        52,       815,       301,         0,         0,         0,        24,        48,        76,        10,         0,       246,      1648,         0,        25,         0,         0,        22,      4352,         0,        41,         9,       246,      2974,         0,         0,         0,       175,         0,       293,         0,       850,         3,         0,       605,         0,         7,      2101,        80,       137,         0,         6,        11,         0,         0,        29
F80,    525671,         0,         0,         0,         0,         0,         0,         0,         0,         0,     66942,         0,      4043,         0,         0,         0,         0,         0,         0,         0,         0,      6126,    336628,         0,         0,         0,       969,         0,         0,         0,       136,         0,         0,         0,         0,         0,     80991,         0,         0,         0,     29829,         0,         0,         0,         0,         0,         0,         7,         0,         0,         0,         0
F81,    138684,         0,         0,         1,         0,         0,         0,     21960,      3775,         0,      1690,      5040,         2,         0,         0,         0,         0,         0,         0,         0,        35,         0,       213,         0,         0,         0,         0,         0,         0,         0,      1202,      1883,         0,     39303,     10654,         0,         0,       346,         0,         0,      3303,         0,         0,         0,     26530,         0,         0,         0,         0,         0,         0,     22747
F85,     20276,        23,         0,        48,         0,         0,         0,         0,         0,         0,         0,         0,      7634,         0,      1703,         0,         0,         0,         0,         0,         0,         0,         0,         0,         0,        10,         0,        23,         0,        47,         0,        16,         0,      2883,         0,        22,         0,         0,         0,         0,         0,         0,         0,         0,        18,         0,         0,      6054,       741,         0,      1054,         0
F87,    153175,      7152,         0,         0,         0,         0,         0,       274,         0,         0,         0,      3235,     18234,         0,         0,      2456,         0,         0,         0,     51539,       884,      3348,     12288,       265,         0,         0,       280,         0,         0,         0,         1,      1605,         0,      7401,      1380,         0,         0,         0,         0,      5662,      1313,     19664,         0,         0,         0,         0,         0,     16053,         0,         0,       141,         0
F89,    650325,      7413,         9,      1903,      6041,     19873,      5701,     19065,       827,         0,      7914,      7956,     31443,      6076,     14568,       612,     19953,       157,     31954,      2441,      1565,     40471,      3326,      9417,      8612,         0,      1679,      3585,       558,      7041,       989,     60092,      2716,     22410,      8555,      6132,     23069,       170,      2646,    118601,      1528,      5612,       547,      3616,     70113,      3609,         0,       899,     10378,         0,     48437,        46
F90,        78,         0,         0,         0,         0,         0,         0,         0,         0,         0,         0,         0,         0,         0,         0,         0,         0,         0,         0,         0,         0,         0,         0,         0,         0,         0,         0,         0,         0,         0,         0,         0,         0,         0,         0,         0,         0,         0,        23,         0,         0,         0,         0,         0,         0,         8,         0,         1,        46,         0,         0,         0
F91,     86025,         0,         0,         0,         0,         0,      1693,         0,         0,         0,         0,         0,         0,         0,         0,         0,         0,         0,         0,         0,         0,         0,     56573,         0,         0,         0,         0,         0,         0,      5202,         0,     22557,         0,         0,         0,         0,         0,         0,         0,         0,         0,         0,         0,         0,         0,         0,         0,         0,         0,         0,         0,         0
F92,    385151,         0,     33525,         0,         0,         0,         0,         0,         0,         0,         0,         0,         0,         0,         0,         0,         0,         0,         0,         0,         0,         0,         0,         0,         0,         0,         0,         0,         0,         0,         0,         0,         0,    222886,         0,         0,         0,      5582,         0,         0,         0,    123158,         0,         0,         0,         0,         0,         0,         0,         0,         0,         0
F94,    912722,         0,         0,         0,         0,         0,         0,     63615,         0,         0,      1746,         0,         0,         0,         0,         0,         0,         0,      1021,         0,         0,    164354,         0,         0,         0,         0,         0,         0,         0,         0,         0,    190095,         0,    486280,         0,         0,         0,         0,         0,         0,      5611,         0,         0,         0,         0,         0,         0,         0,         0,         0,         0,         0
G01,     73382,         2,      4417,       139,         3,      1884,         0,       164,         0,         0,         0,       813,     51897,         5,       129,         0,         0,         0,         0,       182,         0,      1157,      3358,       356,       105,         0,         1,         8,        91,         0,         0,         0,         0,        23,         8,         0,         0,        19,         0,       360,      6593,       216,         0,         0,         0,         0,         0,        64,       172,       246,       970,         0
G03,     19323,         0,     14395,         0,         0,         0,         0,         1,         0,         0,         0,         0,         0,      1625,         0,         0,        93,         0,         0,         0,         0,        24,         0,         0,         0,         0,         0,         0,         0,         0,         0,         0,         0,         0,        13,      2320,         5,         0,         0,         0,         0,         0,       847,         0,         0,         0,         0,         0,         0,         0,         0,         0
G04,    243990,       317,       659,      4039,      1751,     35296,     28317,      3238,       375,         0,      2602,      2462,      1474,       678,      5267,     31791,       842,      1568,      3535,       782,       308,      2619,     13691,      1470,      1940,       438,      5508,       715,       116,      1053,       206,      2383,       338,     17072,      7871,        92,     12498,      3493,      1734,      3756,        58,      1772,       298,      2045,     16762,      1514,       638,      6400,      7762,       131,      4048,       268
G05,     50208,       149,         9,        43,        51,      3261,      3881,       544,       294,         0,       520,      4842,       796,       847,       909,       401,         8,      3434,       144,       429,        39,      3711,       358,      4145,       549,        13,      1442,       147,       965,       204,        22,      2082,       320,      1642,      2770,        19,      1632,      1341,      1321,       124,        13,       251,        76,       594,      3744,        54,        75,       177,      1452,       107,       220,        37
G12,     38915,         0,      5830,         0,         0,         0,         0,         0,         0,         0,         0,         0,     23057,         0,         0,         0,         0,         0,         0,         0,       182,         0,         0,         0,         0,         0,         0,         0,         0,         0,         0,      7723,         0,         0,      1162,         0,         0,         0,         0,        93,         0,       868,         0,         0,         0,         0,         0,         0,         0,         0,         0,         0
G16,    850806,      4162,       501,      3096,      1954,     35204,      7299,       807,        54,         0,     10112,      2200,       878,       639,     11917,     21323,      1793,      2318,      1640,      2811,      1959,      2342,       791,      9205,      3430,      1441,      3859,       358,     11335,       564,         3,      9937,      2941,      1943,     10437,      1089,      8446,      8622,      1978,    626668,       405,      2850,       264,       934,      8605,      1320,       419,     10638,      3754,      1939,      2561,      1061
G18,   3043061,     60161,      8458,     30287,     21791,    425575,     44513,     10457,      7071,         0,    182298,     72472,     24833,     16871,    166481,     91557,     41987,     45033,     57736,     64770,     12010,     34447,     38657,     93641,     65688,     21077,     28246,      8667,     20640,     11759,      1018,     73520,     33562,    105866,     77657,     14304,    133122,     39646,     40825,    107878,      9085,     59115,     10198,     55307,    196150,     46559,     12290,     76025,    126287,     26514,     85153,      5797
G21,    163136,      6109,      1040,      1000,      3826,      3267,      1589,      3873,       620,         0,      3427,      5195,       570,       976,      2517,      5962,       286,       904,     16925,      1745,       333,      2945,       799,       887,      2167,      2500,      3415,      1215,      3035,        88,       185,      1269,      1791,      1447,      4401,       458,      2507,      2412,      1991,     11343,      1325,      7206,      1125,      2005,      8348,        12,       341,      4146,     14893,     13545,      4726,       445
G22,    122350,      2308,       331,         0,       142,     11180,      1459,      2010,       609,         0,      2210,      2521,       563,       329,      7520,      2031,       399,       711,      2751,         0,      2503,       715,      1853,      7223,      2023,       205,      5699,        22,       545,       988,       963,      1377,       562,     20100,      1637,       455,      4708,      2790,       811,        43,      2432,      3008,       702,       690,      9412,      3477,       131,      3318,      3436,       802,      2646,         0
G23,    227748,      2213,      6241,      4478,      1279,     23226,      2264,      1516,      1609,         0,      8760,      1107,      9020,      2400,     10157,      1456,       804,      2431,      1516,       893,       712,      3429,     18690,      2337,      2687,       931,      2218,      2177,      1313,       963,      1084,      1379,      1257,      6487,     22383,       376,     14521,      8138,      3373,      8223,       542,      5417,       273,       934,     17485,         0,       466,     10337,      4163,      2475,      1183,       425
G25,     94756,      1332,      1972,      1022,       698,      4457,      2118,       551,       862,         0,      3595,       314,      4169,       958,      1235,       839,       498,       473,      2316,       710,       491,      5902,      3503,      4219,      2601,       307,      1151,       399,       406,       302,      1374,      2308,      1600,      8499,      1126,       695,      2661,       556,      2074,      2236,      1565,      3586,       225,       458,      7896,         1,       965,      3091,      1300,      1052,      3591,       497
G26,     41252,       208,       417,       606,       306,      2976,       259,       815,       280,         0,      5096,       122,       672,       135,      1349,       445,       145,       157,       810,      2026,        10,       146,       900,      2654,       684,        51,       655,       219,       131,       559,        51,       849,       604,      5491,       195,        21,       618,       613,        86,      1404,        73,      1051,        82,         5,      5440,         0,        19,       812,       327,       558,        96,        24
G29,     19553,       334,        55,       406,       137,       426,       693,       233,       137,         0,       431,       372,       372,       720,       109,       115,        19,       641,       177,       321,        64,       374,       582,      1525,      1212,       282,       127,       218,       130,        99,         5,       842,       101,       947,       949,        43,       903,       252,       100,      2994,        56,        36,       116,        51,       780,         0,       143,       101,       269,       339,       152,        63
G31,     89844,       105,        36,       170,       127,      2959,       122,        25,       580,         0,      3416,       253,     13514,         5,       256,      2356,         3,       100,         9,         0,         3,       503,       221,       104,        36,      3458,      1954,        23,        33,         0,      2283,        37,      2805,      2319,       610,         0,      4100,        68,      8894,       587,        30,       174,        58,      6082,      1745,     26362,      1264,      1788,       129,       113,         0,        25
G32,    155491,      3172,      1560,      2075,      2680,     11990,      3521,      2109,      2688,         0,      8513,       665,      3827,      1464,      5990,      1009,       268,      1757,      1050,      5615,       458,      2945,      3398,      5447,      3382,      2755,      4611,       405,       182,       539,       406,      3076,       755,     16395,      4109,       370,      2990,      3898,      2533,      2597,      1429,      5860,       966,       471,     11124,       706,       638,      5255,      3664,      1858,      1682,       634
G36,    519557,     24165,       321,       162,      3049,    113421,      1378,      3336,       174,         0,      1292,     21262,      2676,       422,     13183,     12390,     11543,      5857,      7500,     10981,       226,      1533,      8868,      4020,      4484,      4829,     12527,       226,      5315,       250,        41,     14152,      3868,     30387,     15587,       317,     27800,      6920,     11653,     24427,       834,     23698,      1065,       299,     33393,      5632,       153,     25237,      4779,      1585,     12149,       191
G44,   2331314,     63639,     16293,     77497,     38501,    466380,     15694,     31582,     16034,         0,    174616,     77486,     16294,      3723,     66223,     27938,     37592,     25169,     46598,     38029,      4077,     51862,     98052,     60146,     46292,     23936,     65615,      2621,     11774,     13528,      9766,     36139,     22704,      7795,      6384,      4167,     41887,     25257,      3651,     56220,      7487,     37635,      5963,     85302,    269402,     14879,      6904,       493,     27813,     15133,     19126,     10016
G45,    139842,         0,       314,         0,         0,         0,         0,         0,         0,         0,     69583,         0,         0,         0,      1078,       593,         0,      1628,         0,       111,       699,      3449,        77,       787,         0,         0,         0,         0,         0,         0,      2273,      9115,         0,     31491,       269,         0,      1754,     10304,         0,      5513,         0,         0,         0,         0,       232,         0,         0,         0,       200,       372,         0,         0
G50,     15652,         0,        35,         1,       163,       606,        15,        42,       396,         0,        38,         1,      6743,       378,         1,        94,        64,        14,       278,         0,         0,       835,       142,         0,       150,        56,       182,        46,         0,         0,        97,         3,        30,      1011,        27,        87,       351,        51,       593,        10,        16,         0,         0,        61,         0,        12,       111,       209,        36,         9,       932,      1726
G52,     12801,         6,       221,       147,        38,         0,       266,         0,        39,         0,       142,         0,      5148,       389,       262,       440,         0,         5,       251,        21,        10,        11,        49,       838,         0,        10,        57,       245,       157,        40,        19,        41,        40,       399,       245,        12,        82,       294,       228,        15,        55,        22,       641,        43,       350,         0,        34,      1179,       168,       107,         0,        35
G54,    142704,      2104,       214,      2527,      1231,      3616,      1401,      4141,       144,         0,      5314,      3010,      2764,      1479,      7710,      6448,       643,      4493,      2943,      3220,       688,      1690,      3947,       396,      2063,      1936,      1955,       794,      2274,       621,        72,      5641,      1304,       308,      8068,      2226,      2036,      7727,      1876,     24178,      1215,      1832,       921,       461,      5002,      1636,       299,      1658,      1713,       980,      3607,       178
G55,    147593,      1362,      3589,      1970,      2215,     17732,      4653,       186,       225,         0,      6349,      3303,       383,      3081,      1747,      2566,      1834,      2403,      1700,      1382,       990,      2629,      4216,       817,      3657,      2363,      6215,       902,      1723,      1061,       793,       658,       983,      1570,      2403,       383,      1685,      2714,      2819,      6836,      1051,      4531,      2010,      7997,      6567,        58,       331,      2265,     10282,      1012,      1403,      7989
G56,     49153,       482,       413,        45,        76,     12601,       145,         0,        86,         0,       598,       325,       487,       909,       295,       173,        95,         0,       830,        83,        43,       503,       305,         0,       686,      1047,      6578,       671,         0,       631,         0,       266,       235,     13204,      1472,         0,       175,        87,       778,       132,         0,      1314,       139,        73,         0,         0,       135,      1635,       270,       100,      1016,        15
G59,    346886,       466,       991,      1083,       178,     16831,      1906,       407,       482,         0,    148020,      2877,     22615,       460,      7858,      3053,      1914,       223,      2242,     12377,       687,      7485,      7523,      2566,     10894,       881,      3608,       436,       344,      4488,       613,     19358,       434,      9918,      1466,       261,      3916,      1513,       627,      5478,       512,      1138,       239,        69,      4739,        77,       546,      1240,      9613,      1755,     20317,       162
G61,    150245,       302,       148,       771,      1316,     17706,      4073,      8276,      6565,         0,      8886,      3069,      2250,       848,      3851,       690,       117,       518,      3523,      4632,       294,      2064,      2752,     10045,      1867,       721,      4838,       174,       910,      2531,       110,      3722,       912,      6782,      3209,       229,       878,      2679,       858,       981,       452,      1512,       673,       551,      1850,        44,       461,      2569,     25238,      1338,      1341,       119
G62,    244021,      1426,       830,      5262,      2571,     30868,      4646,      6662,      1591,         0,     10113,      5766,       563,      2968,     11238,      6076,      1001,      1571,      4675,      1924,       796,      5425,      3743,      6128,      2629,      1798,      9298,      1458,      1482,      2602,       513,      7049,      3126,     13204,      9924,       181,      4039,      2256,      5433,     10630,        91,      8128,      1150,      1651,     18266,        33,      1334,      8131,      8183,      1804,      2292,      1493
G66,     88060,       728,       838,      1422,       543,      6309,       912,       327,       467,         0,      8546,       753,       659,      1240,      3074,       497,       339,       290,      1045,       812,      1566,      1113,       786,       416,      2089,      1016,      1261,       463,      1071,       514,       708,      1557,       435,      8285,      1547,       244,      1830,      1032,      2539,       802,       140,       851,       110,       193,      7659,         0,       267,      2225,     17208,       612,       627,        93
G77,     14015,         0,       590,        27,         0,       926,      8009,       156,        99,         0,         0,         0,         0,       203,       633,       303,        25,        52,         0,         0,         0,        16,       117,        36,       290,         0,       187,        16,       248,         0,        91,        66,        67,        34,         0,       208,       199,       377,         0,       512,        85,         0,        23,         0,         0,         0,        90,         0,        52,        13,       265,         0
G79,    191655,      3643,      1552,      3549,      1772,      3885,      1465,       451,       683,         0,      3212,       420,      3241,      1724,      5524,      1394,       146,      9667,      2696,     14165,      2058,      2898,      1658,     11090,      2911,      2961,      2620,       439,       789,       705,       183,      1689,       304,     35588,      1436,       537,      6234,      2767,      3128,      5762,      1999,      1533,      1388,        57,     25540,      1523,       467,      2695,     10071,       763,       427,       246
G80,      7552,         0,         0,         0,       106,       839,         0,         0,         0,         0,         0,         0,         0,       238,       648,        14,         0,         0,         0,         0,         0,       742,      2075,         0,        95,         0,       132,         0,         0,         0,       110,        64,       636,       148,         5,         0,         0,         0,       127,         0,       304,         0,         0,         4,         0,         0,         8,       954,         0,        63,       240,         0
G81,     17776,         0,         0,        15,         0,      1258,        78,      3868,      1048,         0,        17,        18,         0,        85,       470,       258,        60,         0,       306,       276,       499,       288,        64,       804,        76,         0,       100,         0,         0,        60,        20,      1081,         0,       995,       276,         0,       286,         0,       138,       114,       778,       620,         0,        83,      1666,         0,       139,       254,       849,       464,       267,        98
G85,      8663,        63,         0,        43,        13,       238,         0,         0,         0,         0,        36,        36,       145,         0,        34,         9,         0,         0,         0,        71,         0,        11,        53,         3,         0,        14,        27,         3,         6,        25,         0,         2,         0,         0,        18,         9,         0,         0,      4959,         0,         0,         9,        39,       187,       727,         0,         0,      1749,        13,         1,       120,         0
G87,     39320,      8260,         0,         0,         0,         0,         0,         0,         0,         0,      1077,      5902,      5440,         0,         0,         0,         0,         0,         0,      5229,      2169,       313,       639,         0,         0,         0,         0,         0,         0,         0,         1,       157,         0,       246,       773,         0,         0,         0,         0,         0,         4,      6998,         0,         0,         0,         0,         0,      2112,         0,         0,         0,         0
G89,    588647,     12476,      8073,     42642,      4466,     23339,      3855,     13777,      1360,         0,     20266,     14760,    111324,      1654,     13488,      6947,      4939,      2037,     10742,     19207,      1689,     22381,      3009,      7717,     21529,      4402,      2564,      1484,      3099,      4159,      9213,     10924,       517,     34018,     11249,      3985,     30751,      3244,      1594,      2977,      1355,     20477,      5271,      2706,     16794,      7193,      3272,      7384,      2770,      2357,     23119,        92
G90,     10326,      1041,         0,         0,         0,         0,         0,         0,         0,         0,         0,         0,         0,       300,         0,         0,         0,         0,         0,         0,         0,         0,         0,        23,         0,         0,         0,         0,         0,         0,       150,         0,         0,         0,         0,         0,       438,         0,       592,      6194,         0,         0,         0,         0,         0,       616,        57,       550,       347,         0,         0,        18
G91,      2184,         0,         0,         0,         0,         0,         3,         0,         0,         0,         0,         0,         0,         0,         0,         0,         0,         0,         0,         0,         0,         0,       178,         0,         0,         0,         0,         0,         0,      1798,         1,         0,         0,         0,         0,         0,         0,       204,         0,         0,         0,         0,         0,         0,         0,         0,         0,         0,         0,         0,         0,         0
G92,     23161,         0,       698,      4775,         0,         0,         0,         0,         0,         0,         0,         0,         0,         0,         0,         0,         0,         0,         0,         0,         0,         0,         0,         0,         0,         0,         0,         0,         0,         0,         0,         0,         0,         0,         0,         0,         0,      1419,         0,         0,         0,     16269,         0,         0,         0,         0,         0,         0,         0,         0,         0,         0
G94,    800061,         0,         0,         0,         0,         0,         0,     22234,       791,         0,      5398,         0,         0,         0,         0,         0,         0,         0,         0,         0,         0,     12050,         0,         0,         0,         0,         0,         0,         0,         0,         0,     56000,         0,    695309,         0,         0,         0,         0,         0,         0,      8085,         0,         0,         0,         0,         0,       194,         0,         0,         0,         0,         0
I89,  24621220,    280179,    449430,    186950,    130387,   2457151,    225113,    724969,    227957,         0,    740022,    280715,    276544,     98592,   1260329,    354703,    132253,     40908,    434180,    733312,    185569,    471998,   1420544,    637860,    294517,    115741,    394592,    113806,    127914,    115597,    297469,   1385961,    103474,   3246942,    273409,     74478,    854526,    170574,    804793,   1074788,    305880,    241042,    139731,    202680,    615624,    150072,    113052,    478499,    434223,    172304,    498978,     70889
I91,     32840,         0,         0,         0,         0,         0,       992,         0,         0,         0,         0,         0,         0,         0,         0,         0,         0,         0,         0,         0,         0,         0,      9828,         0,         0,         0,         0,         0,         0,     12810,         9,      8794,         0,         0,         0,         0,         0,       407,         0,         0,         0,         0,         0,         0,         0,         0,         0,         0,         0,         0,         0,         0
I92,    571148,         0,     22684,      6348,         0,     36400,         0,         0,         0,         0,         0,         0,         0,         0,         0,         0,         0,         0,         0,         0,         0,         0,         0,         0,         0,         0,         0,         0,         0,         0,         0,         0,         0,    258158,         0,         0,         0,     90660,         0,         0,         0,    156898,         0,         0,         0,         0,         0,         0,         0,         0,         0,         0
I93,       136,         0,         0,         0,         0,         0,         0,         0,         0,         0,         0,         0,         0,         0,         0,         0,         0,         0,         0,         0,         0,         0,         0,         0,         0,         0,         0,         0,         0,         0,         0,         0,         0,         0,         0,         0,         0,       136,         0,         0,         0,         0,         0,         0,         0,         0,         0,         0,         0,         0,         0,         0
I94,    256618,         0,         0,         0,         0,         0,         0,         0,         0,         0,         0,         0,         0,         0,         0,         0,         0,         0,         0,         0,         0,         0,         0,         0,         0,         0,         0,         0,         0,         0,         0,         0,         0,    256604,         0,         0,         0,         0,         0,         0,        14,         0,         0,         0,         0,         0,         0,         0,         0,         0,         0,         0
I99,   4800093,     63458,     12015,     62166,     34698,    633326,     65365,     85642,     14154,         0,    252146,    115473,     24045,     15935,    239293,     96365,     48347,     45706,     58027,     63970,     21548,    107836,    137924,    174750,     84769,     34545,     92470,     12673,     28220,     25398,     24038,    199181,     22665,    405765,    113536,      9903,    194384,     49340,     51353,    230917,     19291,     55055,     11303,     81651,    298928,     25890,     10198,    126237,     97766,     25754,     88891,      7783
K01,     15205,         2,      3086,       139,         3,      1884,         0,       164,         0,         0,         0,       813,      4108,         5,       129,         0,         0,         0,         0,         0,         0,       131,      2250,       356,       105,         0,         1,         8,        91,         0,         0,         0,         0,        23,         8,         0,         0,        19,         0,       360,        14,       216,         0,         0,         0,         0,         0,        64,        10,       246,       970,         0
K03,     18937,         0,     14395,         0,         0,         0,         0,         1,         0,         0,         0,         0,         0,      1625,         0,         0,        93,         0,         0,         0,         0,        24,         0,         0,         0,         0,         0,         0,         0,         0,         0,         0,         0,         0,        13,      2265,         5,         0,         0,         0,         0,         0,       516,         0,         0,         0,         0,         0,         0,         0,         0,         0
K04,    176890,       317,       659,      4012,      1751,     31784,      7047,      3238,       360,         0,      2406,      2462,      1474,       678,      5267,      8449,       842,      1568,      3535,       782,       308,      2619,      9999,      1470,      1940,       438,      4258,       715,       116,      1053,       206,      2279,       338,     17062,      7869,        92,      2808,      3484,      1734,      3107,        58,      1695,       298,      1687,     16653,      1514,       638,      6369,      5132,       131,      3921,       268
K05,     48052,       149,         9,        43,        51,      3261,      1726,       544,       294,         0,       520,      4842,       796,       847,       909,       400,         8,      3434,       144,       429,        39,      3711,       358,      4145,       549,        13,      1442,       147,       965,       204,        22,      2082,       320,      1642,      2770,        19,      1632,      1341,      1321,       124,        13,       251,        76,       594,      3744,        54,        75,       177,      1452,       107,       220,        37
K12,     33047,         0,      5830,         0,         0,         0,         0,         0,         0,         0,         0,         0,     23057,         0,         0,         0,         0,         0,         0,         0,       182,         0,         0,         0,         0,         0,         0,         0,         0,         0,         0,      1855,         0,         0,      1162,         0,         0,         0,         0,        93,         0,       868,         0,         0,         0,         0,         0,         0,         0,         0,         0,         0
K16,    811740,      4162,       501,      3096,      1195,     17602,      6593,       807,        54,         0,     10112,      1994,       878,       636,      7962,     21204,      1689,      2107,      1527,      2763,      1959,      2274,       791,      9205,      3430,      1441,      3526,       358,     10598,       564,         3,      2452,      2941,         0,      9653,      1089,      8050,      8223,      1978,    624668,       405,      2753,       264,       934,      8602,      1120,       415,     10273,      3734,      1939,      2155,      1061
K18,   2578893,     53841,      8399,     28985,     21006,    211033,     44423,     10457,      7061,         0,    172450,     70873,     24833,     16648,    164448,     84853,     41934,     44969,     47473,     62200,     11837,     33838,     23432,     93042,     63840,     20861,     26543,      8576,     20366,     11577,      1018,     70139,     30986,     96950,     75432,     14304,    119500,     36282,     40825,    105322,      9085,     49347,     10152,     49074,    191100,     45823,     10669,     74093,      2714,     25509,     85143,      5628
K21,    154667,      6109,      1040,       915,      3796,      3267,      1510,      3873,       607,         0,      3427,      5195,       570,       974,      2517,      5962,       286,       904,     16925,      1745,       333,      2945,       799,       887,      2158,      2500,      3415,      1215,      2965,        88,       185,      1269,      1716,      1447,      4401,       458,      2507,      2412,      1990,     11343,      1325,      5092,      1125,      2005,      8346,        12,       341,      4146,      8906,     13545,      4724,       445
K22,    122072,      2308,       331,         0,       142,     11180,      1459,      2010,       609,         0,      2210,      2521,       563,       329,      7520,      2031,       399,       711,      2751,         0,      2503,       715,      1853,      7223,      2023,       205,      5545,        22,       545,       988,       963,      1377,       562,     20100,      1637,       455,      4708,      2790,       811,        43,      2432,      3008,       702,       690,      9412,      3477,       131,      3318,      3436,       802,      2522,         0
K23,    213924,      2213,      6241,      4478,      1279,     23226,      2151,      1516,      1609,         0,         0,      1107,      9020,      2400,     10157,      1456,       804,      2431,      1516,       893,       712,      3427,     18690,      2337,      2687,       931,      2218,      2177,      1313,       963,      1084,      1379,      1257,      6487,     21673,       376,     14521,      7764,      2785,      8223,       542,      2140,       273,       934,     17485,         0,       466,     10337,      4163,      2475,      1183,       425
K25,     94039,      1332,      1972,      1022,       698,      4457,      2109,       551,       862,         0,      3595,       314,      4169,       958,      1235,       839,       498,       473,      2316,       710,       491,      5902,      3288,      4219,      2601,       307,      1151,       399,       406,       302,      1374,      2308,      1600,      8499,      1126,       695,      2661,       556,      2074,      2236,      1565,      3586,       225,       458,      7896,         1,       472,      3091,      1300,      1052,      3591,       497
K26,     41233,       208,       417,       606,       306,      2976,       241,       815,       280,         0,      5096,       122,       672,       135,      1349,       445,       145,       157,       810,      2026,        10,       146,       899,      2654,       684,        51,       655,       219,       131,       559,        51,       849,       604,      5491,       195,        21,       618,       613,        86,      1404,        73,      1051,        82,         5,      5440,         0,        19,       812,       327,       558,        96,        24
K29,     19553,       334,        55,       406,       137,       426,       693,       233,       137,         0,       431,       372,       372,       720,       109,       115,        19,       641,       177,       321,        64,       374,       582,      1525,      1212,       282,       127,       218,       130,        99,         5,       842,       101,       947,       949,        43,       903,       252,       100,      2994,        56,        36,       116,        51,       780,         0,       143,       101,       269,       339,       152,        63
K31,     59162,       105,        36,       170,       127,         0,       122,        25,       446,         0,      2521,       253,      3300,         5,       256,       115,         3,        31,         9,         0,         3,       503,       221,       104,        36,      3439,      1517,        23,        33,         0,       646,        37,      2805,      2005,       495,         0,        32,        68,      7626,       587,        30,       174,        58,        25,      1745,     26362,      1058,      1739,       129,       113,         0,        25
K32,    149916,      2805,      1560,      2075,      2680,     11990,      3506,      2109,      2682,         0,      8513,       665,      3827,      1464,      5662,      1009,       268,      1757,      1050,      5615,       458,      2945,      3324,      5447,      3382,      2755,      4118,       405,       182,       539,       406,      3076,       755,     12765,      4109,       370,      2990,      3898,      2533,      2597,       814,      5860,       966,       471,     11080,       706,       638,      5252,      3664,      1858,      1682,       634
K36,    452359,     23825,       321,       162,      3049,     56227,      1082,      3336,       174,         0,      1292,     21262,      2676,       422,     13183,     11270,     11543,      5857,      7500,     10981,       226,      1533,      8868,      4020,      4484,      4710,     12527,       226,      5315,       250,        41,     14152,      3868,     23438,     15115,       317,     27798,      6920,     11649,     24425,       401,     23431,      1065,       299,     33393,      5632,       153,     25237,      4779,      1585,     12149,       191
K44,    552719,     10205,      8760,      8784,     22864,     79800,      3997,      5438,      2567,         0,     14225,      7681,      1796,      3723,     24563,     16470,     13369,     13191,     12148,         0,       608,       110,      2231,      9197,     15232,      8214,     20425,      2621,      5407,      9584,      1727,       148,     11725,      7499,      5100,      2831,     23973,     12230,       975,     28098,      1771,     15198,      5865,      7379,     29666,      4785,      4601,       493,     23225,     15133,     18697,      8390
K45,     65821,         0,       210,         0,         0,         0,         0,         0,         0,         0,      7194,         0,         0,         0,      1048,       593,         0,      1628,         0,       111,       699,      3059,        77,       787,         0,         0,         0,         0,         0,         0,       761,      2000,         0,     31491,       269,         0,      1754,      7823,         0,      5513,         0,         0,         0,         0,       232,         0,         0,         0,       200,       372,         0,         0
K50,     11558,         0,        35,         1,       163,       606,        15,        42,       396,         0,        38,         1,      3018,       378,         1,        94,        64,        14,       278,         0,         0,       835,       142,         0,       150,        56,       182,        46,         0,         0,        97,         3,        28,      1011,        27,        87,       351,        51,       226,        10,        16,         0,         0,        61,         0,        12,       111,       209,        36,         9,       932,      1726
K52,     12801,         6,       221,       147,        38,         0,       266,         0,        39,         0,       142,         0,      5148,       389,       262,       440,         0,         5,       251,        21,        10,        11,        49,       838,         0,        10,        57,       245,       157,        40,        19,        41,        40,       399,       245,        12,        82,       294,       228,        15,        55,        22,       641,        43,       350,         0,        34,      1179,       168,       107,         0,        35
K54,    105258,      2104,       214,      2527,      1231,      3616,       423,       194,       144,         0,      4806,      3008,      2764,      1479,      4126,      6448,       643,      4493,      2943,      3220,       688,      1632,       284,       396,      2061,      1936,      1955,       794,      2274,       621,        22,      5641,      1304,       307,      8068,      2226,      2036,      7727,      1876,      1276,       151,      1832,       921,       461,      5002,      1636,       299,      1658,      1713,       980,      2938,       160
K55,     84799,      1362,      3243,      1970,      1671,      7151,      3952,       186,       225,         0,      5241,      2683,       313,      1641,      1166,      2090,       177,      1471,      1133,      1382,       509,      2629,       489,       703,       889,      2363,      1470,       797,       959,       669,       631,       565,       961,      1570,      1511,       377,      1674,      1268,      2098,      3887,       164,      2566,       872,      1505,      5013,        36,       331,      1470,      5671,       345,      1113,      2637
K56,     42767,       482,       413,        45,        30,     12601,       144,         0,        86,         0,       308,       325,       487,       903,       295,       172,        95,         0,       830,        83,        43,       503,       305,         0,       343,      1047,       996,       671,         0,       631,         0,       266,       232,     13204,      1468,         0,       175,        87,       777,       132,         0,      1314,       139,        73,         0,         0,       135,      1634,       270,       100,       908,        15
K59,     82657,       466,       991,      1083,       178,      8293,       523,       156,       482,         0,      3835,      2144,      1223,       460,      1955,       756,       444,       223,      2128,     12377,       568,      3178,       755,      2566,      6064,       881,      3258,       433,       344,       204,       413,       574,       377,      1397,       783,       246,      1836,       336,       474,      3674,        72,       450,       239,        69,      2971,        77,       445,      1240,      3605,      1754,      5495,       162
K61,     61992,       253,       148,       427,      1194,      1274,       777,         7,       654,         0,      1766,      5173,      1131,       792,      1577,       647,       117,       518,      3317,      4632,       238,      2047,       758,       957,       889,       719,      1988,       174,       910,      2531,        98,      3720,       714,      4786,      1571,       229,       876,      2138,       858,       969,       203,       801,       599,       172,      1089,        44,       361,      2098,      2721,      1338,       873,       119
K62,    241898,      1426,       830,      5096,      2571,     30868,      4646,      6662,      1591,         0,     10113,      5766,       563,      2968,     10479,      5517,      1001,      1571,      4594,      1924,       796,      5425,      3743,      6128,      2629,      1798,      9298,      1458,      1482,      2602,       513,      7049,      3126,     13204,      9924,       163,      4039,      2256,      5433,     10630,        91,      8128,      1150,      1651,     17992,        33,      1334,      8130,      7918,      1804,      2292,      1493
K66,     87620,       728,       838,      1422,       543,      6309,       912,       327,       467,         0,      8546,       753,       659,      1240,      2764,       497,       339,       290,      1045,       812,      1566,      1113,       786,       416,      2089,      1016,      1261,       463,      1071,       514,       708,      1557,       434,      8285,      1547,       244,      1830,      1032,      2411,       802,       140,       851,       110,       193,      7659,         0,       267,      2225,     17207,       612,       627,        93
K77,      6014,         0,       590,        27,         0,       926,        49,       156,        99,         0,         0,         0,         0,       203,       633,       303,        25,        52,         0,         0,         0,        16,       117,        36,       290,         0,       187,        16,       248,         0,        91,        66,        67,        34,         0,       208,       199,       377,         0,       512,        85,         0,        23,         0,         0,         0,        90,         0,        52,        13,       224,         0
K79,    190944,      3643,      1552,      3549,      1772,      3885,      1458,       451,       679,         0,      3212,       420,      2800,      1724,      5524,      1394,       146,      9667,      2696,     14165,      2058,      2898,      1658,     11090,      2858,      2961,      2620,       439,       583,       705,       183,      1689,       304,     35588,      1436,       537,      6234,      2767,      3128,      5762,      1999,      1533,      1388,        57,     25540,      1523,       467,      2695,     10071,       763,       427,       246
K80,      7204,         0,         0,         0,       106,       839,         0,         0,         0,         0,         0,         0,         0,       238,       648,        14,         0,         0,         0,         0,         0,       742,      2075,         0,        95,         0,       132,         0,         0,         0,       110,        64,       341,       148,         5,         0,         0,         0,       127,         0,       251,         0,         0,         4,         0,         0,         8,       954,         0,        63,       240,         0
K81,     15598,         0,         0,        15,         0,      1258,        78,      3368,      1048,         0,        17,        18,         0,        85,       470,       258,        60,         0,       306,       276,       466,       288,        64,       804,        76,         0,       100,         0,         0,        60,        20,      1081,         0,       986,       276,         0,       286,         0,       138,       114,        58,       620,         0,        83,       750,         0,       139,       254,       849,       464,       267,        98
K85,      8115,        63,         0,        43,        13,       238,         0,         0,         0,         0,        36,        36,       145,         0,        25,         9,         0,         0,         0,        71,         0,        11,        53,         3,         0,        14,        27,         3,         6,        25,         0,         2,         0,         0,        18,         9,         0,         0,      4959,         0,         0,         9,        39,       187,       198,         0,         0,      1749,        13,         1,       110,         0
K87,     17404,      6376,         0,         0,         0,         0,         0,         0,         0,         0,       319,      2904,       635,         0,         0,         0,         0,         0,         0,       952,      2169,       313,       592,         0,         0,         0,         0,         0,         0,         0,         1,         0,         0,       144,       773,         0,         0,         0,         0,         0,         4,       854,         0,         0,         0,         0,         0,      1368,         0,         0,         0,         0
K89,    403249,     12476,      8073,      4366,      3747,     23315,         0,     13777,      1325,         0,     20266,     14760,      7701,      1654,     13465,      6947,      4935,      2037,     10542,     15207,       688,     21461,      2809,      7614,     21390,       667,      2564,      1484,      3099,       649,       417,     10924,       501,     33799,     11110,      3971,     30751,      3244,      1369,      2977,       326,     20002,      5271,      2706,      5309,      7193,      3271,      7384,      2770,      2353,     20491,        92
K90,     10319,      1041,         0,         0,         0,         0,         0,         0,         0,         0,         0,         0,         0,       300,         0,         0,         0,         0,         0,         0,         0,         0,         0,        23,         0,         0,         0,         0,         0,         0,       150,         0,         0,         0,         0,         0,       438,         0,       585,      6194,         0,         0,         0,         0,         0,       616,        57,       550,       347,         0,         0,        18
K91,      2184,         0,         0,         0,         0,         0,         3,         0,         0,         0,         0,         0,         0,         0,         0,         0,         0,         0,         0,         0,         0,         0,       178,         0,         0,         0,         0,         0,         0,      1798,         1,         0,         0,         0,         0,         0,         0,       204,         0,         0,         0,         0,         0,         0,         0,         0,         0,         0,         0,         0,         0,         0
K92,     20218,         0,       698,      4775,         0,         0,         0,         0,         0,         0,         0,         0,         0,         0,         0,         0,         0,         0,         0,         0,         0,         0,         0,         0,         0,         0,         0,         0,         0,         0,         0,         0,         0,         0,         0,         0,         0,      1318,         0,         0,         0,     13427,         0,         0,         0,         0,         0,         0,         0,         0,         0,         0
K94,    281687,         0,         0,         0,         0,         0,         0,     20789,       791,         0,      5398,         0,         0,         0,         0,         0,         0,         0,         0,         0,         0,     12049,         0,         0,         0,         0,         0,         0,         0,         0,         0,     56000,         0,    178381,         0,         0,         0,         0,         0,         0,      8085,         0,         0,         0,         0,         0,       194,         0,         0,         0,         0,         0
M01,     64525,       790,         0,         0,      1885,         0,         0,         0,         0,         0,     34296,         0,         0,         0,         0,         0,         0,         0,      1455,         0,       168,         0,      3453,         0,     12251,         0,       278,         0,         0,         0,         0,         0,         0,         0,         0,         0,         0,         0,         0,         0,         0,         0,      9433,         0,         0,         0,         0,         0,       516,         0,         0,         0
M05,      7816,         0,      4900,         0,      1316,         0,         0,         0,         0,         0,         0,         0,         0,         0,         0,         0,         0,         0,         0,         0,         0,         0,         0,         0,       393,         0,         0,         0,         0,         0,       270,         0,       937,         0,         0,         0,         0,         0,         0,         0,         0,         0,         0,         0,         0,         0,         0,         0,         0,         0,         0,         0
M12,    741889,         0,       404,         0,         0,         0,         0,         0,         0,         0,         0,         0,         0,         0,         0,         0,         0,         0,         0,         0,    579342,         0,         0,         0,         0,      1415,         0,         0,         0,         0,    128967,     29359,         0,         0,         0,         0,         0,         0,         0,         0,         0,         0,         0,      2402,         0,         0,         0,         0,         0,         0,         0,         0
M18,      2194,         0,         0,         0,         0,         0,         0,         0,         0,         0,         0,         0,         0,         0,         0,         0,         0,         0,        65,         0,      2129,         0,         0,         0,         0,         0,         0,         0,         0,         0,         0,         0,         0,         0,         0,         0,         0,         0,         0,         0,         0,         0,         0,         0,         0,         0,         0,         0,         0,         0,         0,         0
M21,     17450,         0,         0,         0,         0,         0,         0,         0,         0,         0,         0,         0,         0,         0,         0,         0,         0,         0,         0,         0,      1735,         0,         0,         0,     10520,       160,         0,         0,      4681,         0,         0,         0,         0,         0,         0,         0,         0,         0,         0,         0,         0,         0,         0,         0,         0,         0,         0,         0,         0,         0,       354,         0
M23,      5826,         0,       135,         0,         0,      2719,         0,         0,         0,         0,         0,         0,         0,         0,         0,         0,       302,         0,         0,        19,         0,         0,         0,         0,         0,         0,         0,         0,         0,         0,         0,         0,         0,         0,         0,         0,      1186,         0,       107,         0,         0,         0,         0,         0,         0,         0,         0,         0,         0,      1057,       301,         0
M25,     17304,         0,         0,         0,         0,         0,         0,         0,         0,         0,       131,         0,      3926,         0,         0,         0,         0,       126,         0,         0,         0,         0,         0,      6215,         0,         0,         0,         0,         0,         0,      2396,         0,      2710,         0,         0,         0,         0,         0,         0,       130,         0,         0,       497,         0,         0,       116,         0,         0,         0,         0,      1057,         0
M29,      6961,         0,       135,         0,         0,      5127,         0,         0,         0,         0,         0,         0,         0,         0,         0,         0,         0,      1291,         0,         0,         0,         0,         0,         0,         0,         0,         0,         0,         0,         0,       264,         0,         0,         0,       134,         0,         0,         0,         0,         0,         0,         0,         0,         0,         0,         0,         0,         0,         0,         0,         0,        10
M30,   1810315,         0,       674,         0,         0,         0,         0,     66046,         0,         0,         0,         0,         0,         0,         0,    495740,         0,         0,         0,         0,     55366,         0,         0,     12122,     24391,         0,         0,         0,    121139,         0,         0,         0,         0,         0,         0,       213,   1034624,         0,         0,         0,         0,         0,         0,         0,         0,         0,         0,         0,         0,         0,         0,         0
M32,   1072461,         0,     53240,     35967,         0,     12583,         0,       100,         0,         0,     83499,         0,         0,         0,      7423,         0,     18030,     14237,         0,      2462,      5566,      7531,         0,      2826,      9960,         0,       125,      6955,     98419,         0,       626,      4482,         0,         0,      1622,         0,         0,     50144,         0,         0,         0,         0,         0,         0,    324283,         0,         0,         0,      6132,         0,    326161,        88
M38,      4892,         0,         0,         0,         0,         0,         0,         0,         0,         0,         0,         0,         0,         0,         0,         0,         0,         0,         0,         0,         0,         0,         0,         0,         0,         0,         0,         0,         0,         0,         0,         0,         0,         0,         0,         0,         0,         0,         0,      4892,         0,         0,         0,         0,         0,         0,         0,         0,         0,         0,         0,         0
M44,    348683,         0,         0,         0,         0,       845,         0,         0,         0,         0,       667,         0,         0,     65018,     10977,         0,         0,         0,         0,         0,     19726,         0,         0,     91146,      2491,         0,     34694,         0,         0,         0,         0,         0,         0,         0,         0,         0,    123106,         0,         0,         0,         0,         0,         0,         0,        13,         0,         0,         0,         0,         0,         0,         0
M50,    394069,         0,         0,         0,         0,       803,         0,         0,         0,         0,         0,     36277,         0,         0,      1105,         0,     24320,     14415,         0,         0,         0,         0,    164851,     23573,      2158,         0,     23489,         0,         0,         0,         0,         0,       160,     51977,         0,         0,     40887,      9940,         0,         0,         0,         0,         0,         0,         0,         0,         0,         0,         0,         0,         0,       114
M52,     74721,      1759,      1443,         0,         0,         0,       157,         0,         0,         0,      3390,         0,         0,         0,     42899,         0,      2684,      2793,         0,         0,         0,         0,         0,         0,      6604,         0,         0,       474,         0,       490,       247,         0,       489,         0,         0,       144,         0,      2564,         0,         0,      1550,         0,         0,      7034,         0,         0,         0,         0,         0,         0,         0,         0
M54,     12561,         0,         0,         0,         0,         0,         0,         0,         0,         0,         0,         0,         0,         0,         0,       378,         0,         0,         0,       633,         0,         0,         0,         0,        94,         0,         0,         0,       173,         0,         0,      6090,         0,         0,         0,         0,         0,         0,         0,      1666,         0,         0,       368,         0,         0,         0,         0,         0,         0,         0,      2894,       265
M55,      5002,         0,         0,         0,         0,         0,         0,         0,         0,         0,         0,         0,         0,         0,         0,      1333,         0,       147,         0,         0,         0,         0,         0,         0,         1,       370,         0,         0,         0,         0,         0,         0,       521,         0,         0,         0,         0,       485,         0,         0,         0,         0,         0,         0,        21,         0,         0,         0,         0,         0,      1927,       197
M56,      5061,         0,       104,         0,       109,         0,         0,         0,         0,         0,         0,         0,         0,         0,         0,         0,       732,         0,        51,         0,         0,         0,         0,         0,       361,         0,         0,         0,         0,       356,        82,         0,       204,         0,         0,         0,         0,         0,         0,         0,         0,         0,        98,         0,         0,         0,         0,         0,         0,         0,      2937,        27
M59,    121042,         0,      1767,         0,         0,      2243,         0,         0,         0,         0,         0,         0,         0,         0,         0,         7,      7761,        87,       285,        28,         0,     18171,      3539,         0,      9869,       272,      1656,         0,         0,       829,         0,     23865,       340,         0,         0,         0,      1335,      1661,         0,     12898,       176,         0,         0,         0,     14709,         0,         0,         0,      5308,       123,     12432,      1681
M61,     61226,         0,       740,         0,      1314,         0,         0,     20295,         0,         0,       754,      2643,         0,         0,      9904,         0,       152,         1,         0,      1174,       283,         0,         0,         0,      7509,         0,         0,         0,       195,         0,       405,       825,         0,         0,         0,         0,         0,      4509,         1,      2009,         0,         0,         0,         0,       714,         0,         0,         0,         0,         0,      7673,       126
M62,     50796,         0,         0,      9610,       796,         0,         0,         0,         0,         0,         0,         0,      3066,         0,     18508,       465,       102,         0,         0,         0,       173,         0,         0,         0,       698,         0,     11159,       423,      5510,         0,         0,         0,         0,         0,         0,         0,         0,         0,         0,         0,         0,         0,         0,         0,         0,       286,         0,         0,         0,         0,         0,         0
M66,     26996,         0,       112,         0,         0,         0,      2327,         0,         0,         0,         0,         0,         0,         0,       402,         0,         0,      1088,     17106,         0,         0,         0,         0,         0,       982,         0,         0,         0,        46,         0,         0,      2643,         2,         0,         0,         0,      1500,         0,         0,         0,         0,         0,        27,         0,         0,         0,         0,         0,         0,         0,       761,         0
M67,    220567,         0,         0,         0,         0,         0,         0,         0,         0,         0,         0,         0,         0,         0,      1683,         0,         0,         0,         0,         0,         0,         0,         0,         0,        81,         0,         0,         0,         0,         0,         0,         0,         0,         0,         0,         0,       203,         0,         0,         0,         0,         0,         0,         0,    218600,         0,         0,         0,         0,         0,         0,         0
M79,    167016,         0,         0,         0,         0,         0,         0,         0,         0,         0,         0,         0,         0,         0,     69250,         0,     16197,     15123,         0,     46346,         0,         0,         0,         0,     14143,         0,         0,         0,      2246,         0,         0,         0,         0,         0,         0,         0,      3711,         0,         0,         0,         0,         0,         0,         0,         0,         0,         0,         0,         0,         0,         0,         0
M80,    304226,         0,         0,         0,         0,         0,         0,         0,         0,         0,      6148,         0,         0,         0,    155617,         0,       190,         0,         0,         0,      8610,     12035,     13313,         0,       508,         0,       637,         0,         0,         0,         0,         0,         0,         0,         0,         0,     35761,         0,         0,         0,         0,         0,         0,         0,         0,         0,         0,         0,         0,         0,     71407,         0
M81,     43727,         0,         0,         0,         0,         0,         0,         0,         0,         0,         8,         0,         0,         0,         0,         0,         0,         0,         0,         0,       483,         0,       104,         0,      3139,         0,         0,         0,         0,         0,       371,         0,         0,         0,         0,         0,      2204,         0,         0,     22288,         0,         0,         0,         0,         0,         0,         0,         0,         0,      1159,     13971,         0
M87,      4437,         0,         0,         0,         0,         0,         0,         0,         0,         0,         0,         0,         0,         0,         0,         0,         0,         0,         0,         0,       259,         0,         0,       300,         0,         0,         0,         0,         0,         0,         0,      1850,         0,         0,         0,         0,         0,         0,         0,         0,       100,         0,         0,         0,      1928,         0,         0,         0,         0,         0,         0,         0
M89,   1184925,         0,     20309,         0,     43345,    236950,         0,     79725,         0,         0,     37009,      2915,     11999,         0,     26153,       161,     42254,      6321,     13698,      2687,      7029,       219,         0,     35328,     13197,         9,    114769,      5259,     29195,         0,      2407,      9860,      8711,     12049,       746,         0,      8925,         0,       762,    174199,         0,      3480,        66,         0,     93646,      5969,         0,         0,     34120,      9118,     84505,      7831
M91,     20650,         0,         0,         0,         0,         0,         0,         0,         0,         0,         0,         0,         0,         0,         0,         0,         0,         0,         0,         0,         0,         0,         0,         0,         0,         0,         0,         0,         0,         0,         0,         0,         0,         0,         0,         0,     20650,         0,         0,         0,         0,         0,         0,         0,         0,         0,         0,         0,         0,         0,         0,         0
M94,    137351,         0,         0,         0,         0,     22155,         0,         0,         0,         0,     68380,         0,         0,         0,       419,         0,         0,         0,         0,         0,         0,         0,         0,      2123,      1227,         0,      1820,       963,      1518,         0,         0,         0,         0,         0,         0,         0,     36753,         0,         0,         0,         0,         0,         0,         0,         0,         0,         0,         0,        85,         0,      1908,         0
N01,    284316,         0,      6064,      9650,         0,      4481,         0,         0,         0,         0,         0,         0,         0,         0,     56588,      1899,      1974,         0,         0,         0,       401,       519,         0,    114992,     19076,        91,         0,       203,      1385,         0,      3559,         0,         0,      1701,     15306,       170,      2064,      1403,         0,      7496,         0,      1055,         0,        15,         0,     17693,         0,         0,         0,         0,      7565,      8966
N05,   1680777,      4103,         0,     29461,      1106,    325954,      3767,         0,         0,         0,         0,     21739,         0,      4907,     32530,     19750,     31731,     10357,     28800,     41546,         0,     10050,    151362,      7820,     30233,      2161,       821,         0,         0,      1167,         0,     68475,         0,    272285,     11028,        37,     42455,      5077,     33960,     35707,         0,         0,        35,     62730,    173668,         0,        20,    166322,         0,         0,     49610,         3
N12,  20063461,         0,    625477,         0,         0,   1201011,         0,   1544454,         0,         0,         0,         0,         0,         0,         0,         0,         0,         0,         0,         0,      5209,   1674252,   1493356,         0,         0,      2254,         0,         0,         0,         0,         0,    986594,         0,   4624578,   3622085,         0,    132087,         0,         0,         0,    382651,         0,         0,   1301852,         0,         0,         0,   2466025,         0,         0,         0,      1576
N18,    885440,         0,         0,         0,         0,         0,         0,         0,         0,         0,         0,         0,         0,         0,         0,         0,         0,         0,         0,         0,         0,     69494,         0,         0,         0,         0,         0,         0,         0,         0,         0,    104101,         0,    304951,    406894,         0,         0,         0,         0,         0,         0,         0,         0,         0,         0,         0,         0,         0,         0,         0,         0,         0
N21,    247262,         0,         0,         0,         0,         0,       184,       501,       294,         0,         0,         0,         0,         0,         0,         0,         0,         0,       200,         0,         0,         0,         0,         0,       461,         0,         0,         0,         0,         0,         0,         0,         0,    215045,         0,       116,         0,       391,      1402,     15842,         0,         0,         0,         0,       686,         0,        12,       585,      2100,         0,      9443,         0
N23,     96166,         0,         0,       338,      3456,      1681,         1,         0,       516,         0,       555,      2327,         0,         0,      3229,         0,         0,         0,     21750,         0,         0,         0,         0,        56,       420,         0,     13192,      1260,         0,         0,         0,         0,        75,      2059,       364,        27,         0,         0,       646,         3,         0,      1338,         0,         0,      7300,         0,         0,     32187,         0,      3386,         0,         0
N25,   1157051,         0,         0,      7164,      2362,    640603,        74,         0,      2417,         0,         0,       294,         0,         0,      7128,         0,       173,         0,     11904,         0,         0,       127,     27551,     37665,     21102,         0,      7486,      3224,         0,        99,         0,     44878,         0,    155079,      1479,       835,     17444,      9811,      1572,     87062,         0,      2422,       792,      4243,     12218,       930,         0,     47978,       336,         0,         0,       599
N29,      9880,         0,         0,      2257,         0,         0,         1,         0,         0,         0,         0,         0,         0,       117,         0,         0,         0,      3729,      1082,         0,         0,        53,         0,         0,         0,        44,         0,         0,         0,         0,         0,         0,         0,         0,      1403,       333,         0,         0,         0,         0,         0,        72,         0,        30,       603,         0,         0,         0,         0,         0,         0,       156
N30,  14425265,    101752,     72592,    607224,     46427,   2327065,     24954,     61623,         0,         0,   1409682,         0,     77390,     67364,    700564,    163928,    147354,     86882,         0,    150566,         0,    109737,    822569,    928623,    659442,    279100,      7114,     45679,     24586,    335751,     31427,    963929,    398631,    889567,    468987,     50561,     11373,     19407,     96484,    150097,     20805,    265822,     24543,    235746,     50417,         0,     10316,     26093,     86152,     13279,   1214344,    139317
N32,   6769926,     11224,     17070,     13070,     55085,   2540935,     25688,     16334,     12779,         0,      8435,    277752,     17458,      5947,     58487,     43765,     25117,     50651,     92905,         0,         0,    224338,        35,    580614,    120204,     28894,      8284,      4660,         0,      1595,         0,     67737,      1620,    667568,    312373,     17175,    340517,     20658,    155252,    683122,         0,     19345,       688,       876,     56858,     48522,         0,      6818,    101972,      8957,       954,     17588
N38,    109491,         0,       270,         0,         0,         0,     17820,         0,         0,         0,       239,      4813,         0,         0,      1363,         0,         0,         0,        38,         0,         0,         0,         0,         0,         0,         0,      1557,         0,         0,         0,         0,     75104,         0,         0,      1176,         0,         0,      2621,         0,         0,         0,         0,         0,         0,      3999,         0,         0,        29,         0,         0,        58,       404
N44,   8129693,    148290,     33245,    322964,    121983,   1186826,    186905,     30331,      4766,         0,    165049,     11774,         0,      9874,    427846,    341751,    266126,    113182,     90727,     41548,        28,    281024,    102112,    636185,    321028,     80602,    135611,     14021,    109535,     40786,     21294,       168,     14976,     83069,    138085,     42273,    638144,    174540,    289115,    311140,         0,      1260,     15192,    250769,      7742,     49509,     21505,    154384,    288632,         0,    365310,     38467
N50,    623619,         0,         0,         0,         0,     68893,     14363,     31059,         0,         0,     27074,         0,         0,         0,     28905,         0,         0,         0,     22435,     26277,       192,     11167,         0,         0,     23881,     31516,         0,         0,         0,         0,      6121,     15090,         0,     89474,     38925,         0,         0,         0,         0,    106587,         0,         0,      6525,     31188,         0,         0,         0,     24669,      5104,     12133,         0,      2041
N52,    306718,      4103,       269,      1389,      2827,     30941,         0,      2322,      1236,         0,     18070,     19023,         0,       195,      2430,         0,         0,         0,      4257,         0,         0,     16162,     19163,      9890,         0,      3336,      2783,         0,      1551,         0,         0,     14179,         0,     69812,     12401,       501,         0,         0,       901,     23189,         0,      4325,       273,       677,     11041,       632,         0,     12014,      1067,      5237,     10479,        43
N54,     52852,         0,       135,         0,       530,     23905,        77,        16,        39,         0,         0,         0,         0,        16,         0,         6,       727,         0,         8,         0,         0,       646,         0,     13333,         0,         0,         0,       870,         0,         0,         0,         0,         0,         0,       711,       326,      2918,        50,         0,         0,         0,         0,        53,       212,        19,         0,         0,      1163,      6203,         0,         0,       889
N55,      7491,         0,         0,         0,         0,         0,       753,         0,         0,         0,         0,         0,         0,         0,         0,       236,       652,         0,         0,         0,         0,         0,         2,       165,      1290,         0,         0,         0,         0,       484,         0,         1,         0,         0,         0,       183,        27,         0,         0,       811,         0,       417,         0,       242,       349,         0,         0,       445,      1087,         0,       109,       238
N56,    115326,         0,         0,         0,         0,     23800,         0,         0,        28,         0,       729,       127,         0,         0,       227,       409,         0,         0,         0,         0,         0,       391,         0,        14,       844,        52,         0,         0,         0,        10,         0,         0,         0,     39386,        98,         0,       143,      1105,         0,      4710,         0,       332,         0,       775,         0,       164,        48,       143,     41766,         0,         0,        25
N59,    132688,         0,      1078,       429,         0,       239,     30415,         0,      3311,         0,      4940,       117,         0,       124,      1134,      1195,      3623,         0,       731,         0,         0,       945,      5473,      7692,     10948,       616,       361,       265,         0,      3591,       217,      5359,       558,      2851,      4309,      1720,      2887,         0,      1244,      3222,         0,         0,      1320,       357,      1592,      9954,     12505,        14,      3905,         0,         0,      3447
N61,    176955,         0,      4313,      6832,        10,     48821,       481,         0,      1403,         0,      2097,       866,         0,      1093,      2339,      2041,      1846,         0,        28,         0,       478,      2828,      6673,     12389,      3028,       525,         0,        79,         0,      5650,         0,      4945,      1070,     24160,       889,        20,     15107,         0,       676,         0,         0,      1739,       267,       294,     10141,       537,        66,       268,     12248,         0,       684,        24
N62,    579635,     11467,      5899,      1033,       777,    133837,         0,       132,      1851,         0,      2283,      2261,      1821,      1804,       198,      1913,         0,         0,     14588,     25164,         0,     36317,     16705,      8256,     34695,       501,     13313,      5768,         0,       100,       618,     30035,      3503,     25606,       106,         0,      5738,       471,         0,      8625,      1876,        72,        17,      3809,         0,      1094,       477,    128559,     44096,         0,      2292,      1958
N66,     59733,         0,         0,         0,         0,         0,      5722,         0,         0,         0,         0,         0,         0,         0,       960,         0,         0,         0,         0,         0,         0,         0,         0,      4937,      2601,         2,         0,     21202,       395,       540,         0,      1912,         0,      8561,         0,        98,       189,         0,      1277,         0,         0,         0,         0,         0,         0,        70,         0,     11267,         0,         0,         0,         0
N67,  15632459,         0,         0,    227926,         0,   8550952,    169524,         0,         0,         0,    184470,         0,         0,         0,    223644,    187776,         0,         0,         0,         0,         0,         0,    146316,         0,    140257,     56579,         0,         0,         0,         0,     51873,    701848,         0,   4500567,         0,         0,     10060,         0,         0,    221400,         0,         0,         0,    245961,         0,         0,         0,     13306,         0,         0,         0,         0
N68,    791915,         0,         0,         0,         0,         0,         0,         0,         0,         0,         0,         0,         0,         0,     37243,        31,         0,         0,         0,         0,     16704,         0,         0,         0,         0,         0,         0,         0,         0,         0,         0,         0,         0,    737937,         0,         0,         0,         0,         0,         0,         0,         0,         0,         0,         0,         0,         0,         0,         0,         0,         0,         0
N79,   9130274,     10079,         0,         0,       634,   2667723,    180426,    194928,         8,         0,      1045,         0,         0,         0,     22781,     98247,      3543,         0,      7085,      3390,         0,         0,     14250,    244173,    377030,      6524,     15511,      4915,         0,      4846,      2365,    477841,         0,   1838624,    368591,       955,    921097,     16391,         0,   1077047,     32883,      9779,       616,     25400,       993,      2336,        85,    258341,     21651,         0,    215356,      2785
N80,    386494,         0,     51797,         0,         0,     16320,         0,      6015,         0,         0,         0,         0,         0,      6873,      5608,     14936,         0,         0,         0,         0,         0,      1086,         0,      2352,      6834,         0,     74570,         0,         0,         0,     18239,      3500,      9610,    112132,      5112,         0,         0,         0,         0,     18483,      2754,         0,         0,     26033,         0,         0,      3638,       602,         0,         0,         0,         0
N81,    109379,         0,         0,         0,         0,         0,       665,         3,         0,         0,     33018,         0,         0,         0,      1362,         0,         0,         0,         0,         0,         0,       166,         0,         0,       524,         4,         0,         0,         0,       439,         0,        90,         0,      8005,         0,         0,      8381,         0,         0,         0,      2555,         0,         0,         0,         0,         0,      5473,         0,     48677,         0,         0,        17
N87,     21480,         0,      3907,         0,         0,         0,         0,         0,         0,         0,       935,         0,         0,         0,         0,         0,         0,         0,         0,         0,       111,      1335,         0,      2585,         0,         0,         0,         0,         0,         0,        30,         0,         0,         0,         0,         0,         0,         0,         0,     12577,         0,         0,         0,         0,         0,         0,         0,         0,         0,         0,         0,         0
N89,   3257578,    150615,     34656,     57589,     14038,    123475,     47750,     14935,     23676,         0,     38305,      7315,      1467,      9241,     84422,     94097,         0,     12572,     45058,    116761,       361,     11340,     49543,    189494,     78679,     29803,      4179,     17256,         0,      3513,       401,    695482,     18921,    399167,    110395,     10838,     18193,     21002,     31156,    104698,      2295,    131528,      9166,     46163,    192490,     14968,      5585,     44448,     57549,      8712,     52047,     22234
N92,      7490,         0,      7490,         0,         0,         0,         0,         0,         0,         0,         0,         0,         0,         0,         0,         0,         0,         0,         0,         0,         0,         0,         0,         0,         0,         0,         0,         0,         0,         0,         0,         0,         0,         0,         0,         0,         0,         0,         0,         0,         0,         0,         0,         0,         0,         0,         0,         0,         0,         0,         0,         0
N94,   1904683,         0,         0,         0,         0,     52797,         0,         0,     15811,         0,         0,         0,         0,         0,     53961,         0,         0,         0,         0,         0,         0,     68556,         0,     88509,      2821,         0,         0,         0,      1091,         0,         0,         0,         0,   1373778,         0,         0,         0,         0,      5326,     78288,         0,         0,         0,     19549,      5608,         0,         0,     84601,       413,         0,     53574,         0
Q12,  97668377,   1699130,         0,   1577385,   1160554,  15097113,   1204342,     22113,    321619,         0,   5457840,   3319732,         0,    593459,   3996158,   2190681,   1453622,   1058830,   2018033,   2175623,         0,         0,    245856,   3626273,   2728781,   1174638,   2228411,    473384,    584703,    702636,     20835,   3390408,   1136640,   7748696,         0,    270128,   4437190,   1780682,    888180,   4895000,     38428,   1587925,    210382,      7798,   7615636,    986214,    236061,         0,   3640590,   1085976,   2225351,    355341
Q18,   5312952,         0,         0,     86591,         0,   2744623,     15460,         0,         0,         0,    718952,         0,         0,     12500,    253452,         0,     90181,     44867,         0,         0,         0,         0,         0,    229372,         0,     65621,     65123,      3662,     33506,         0,         0,     38620,     19397,         0,         0,      1382,     64555,         0,     93384,    130322,         0,         0,         0,         0,    557640,         0,         0,         0,         0,         0,         0,     43742
R01,     74867,         0,         0,         0,         0,         0,         0,         0,         0,         0,         0,         0,         0,         0,     59322,         0,         0,         0,         0,         0,         0,         0,         0,         0,         0,         0,         0,         0,     15545,         0,         0,         0,         0,         0,         0,         0,         0,         0,         0,         0,         0,         0,         0,         0,         0,         0,         0,         0,         0,         0,         0,         0
R30,    132559,         0,         0,         0,         0,     60746,      1015,         0,         0,         0,         0,         0,         0,         0,     62327,         0,         0,      1603,         0,         0,         0,         0,         0,         0,         0,         0,       959,         0,         0,         0,        90,         0,         0,         0,         0,         0,         0,         0,       302,         0,         0,         0,         0,         0,         0,         0,         0,         0,      5517,         0,         0,         0
R32,     21290,         0,         0,         0,         0,         0,       807,         0,         0,         0,         0,         0,         0,         0,         0,         0,         0,         0,         0,         0,         0,         0,         0,         0,         0,         0,         0,         0,         0,         0,         0,         0,         0,         0,         0,         0,      2010,         0,      8856,         0,         0,         0,         0,         0,         0,         0,         0,      9617,         0,         0,         0,         0
R38,      5504,         0,         0,         0,         0,         0,         0,         0,         0,         0,         0,      5504,         0,         0,         0,         0,         0,         0,         0,         0,         0,         0,         0,         0,         0,         0,         0,         0,         0,         0,         0,         0,         0,         0,         0,         0,         0,         0,         0,         0,         0,         0,         0,         0,         0,         0,         0,         0,         0,         0,         0,         0
R44,      2495,         0,         0,         0,         0,         0,      1964,         0,         0,         0,         0,         0,         0,         0,         0,         0,         0,         0,         0,         0,         0,         0,         0,         0,         0,         0,         0,         0,         0,         0,         0,         0,         0,         0,         0,         0,         0,         0,         0,         0,         0,         0,         0,         0,       531,         0,         0,         0,         0,         0,         0,         0
R50,     44332,         0,         0,         0,         0,     44137,         1,         0,         0,         0,         0,         0,         0,         0,         0,         0,         0,         0,         0,         0,         0,         0,         0,         0,         0,         0,         0,         0,         0,         0,         0,         0,         0,         0,         0,         0,         0,         0,         0,         0,         0,         0,         0,       194,         0,         0,         0,         0,         0,         0,         0,         0
R52,     14267,         0,         0,         0,         0,      6037,         0,         0,         0,         0,         0,         0,         0,       112,         0,      2836,         0,         0,         0,         0,         0,         0,         0,         0,         0,         0,         0,         0,         0,         0,         0,         0,         0,         0,         0,         0,      5282,         0,         0,         0,         0,         0,         0,         0,         0,         0,         0,         0,         0,         0,         0,         0
R54,        13,         0,         0,         0,         0,         0,         0,         0,         0,         0,         0,         0,         0,         0,         0,         0,         0,         0,         0,         0,         0,         0,         0,         0,         0,         0,         0,         0,         0,         0,         0,         0,         0,         0,         0,         0,         0,         0,        13,         0,         0,         0,         0,         0,         0,         0,         0,         0,         0,         0,         0,         0
R55,      1343,         0,         0,         0,         0,         0,       853,         0,         0,         0,         0,         0,         0,         0,         0,         0,         0,         0,         0,         0,         0,         0,         0,         0,         0,         0,         0,         0,       348,         0,         0,         0,         0,         0,         0,         2,         0,         0,       135,         0,         0,         0,         0,         0,         5,         0,         0,         0,         0,         0,         0,         0
R59,    145410,         0,         0,         0,      5220,         0,      7197,         0,         0,         0,     95589,         6,         0,      1218,      4023,         0,         0,      2516,         0,         0,         0,         0,         0,      1136,         0,         0,      4833,         0,      6876,         0,         0,         0,         0,         0,         0,      1324,      4585,      4762,       478,         0,         0,         0,        42,         6,      1810,         0,         0,         0,      3789,         0,         0,         0
R61,     90338,         0,         0,         0,         0,      8884,         0,         0,         0,         0,         0,         0,         0,        52,     78350,         0,         0,         0,         0,         0,         0,         0,         0,         0,         0,         0,         0,         0,         0,         0,         0,         0,         0,         0,         0,       107,      1904,         0,       135,         0,         0,         0,         0,         0,         0,         0,         0,         0,       906,         0,         0,         0
R62,       810,         0,         0,         0,         0,         0,         0,         0,         0,         0,         0,         0,         0,         0,         0,         0,         0,         0,         0,         0,         0,         0,         0,         0,         0,         0,         0,         0,         0,         0,         0,         0,         0,         0,         0,         0,       777,         0,         0,         0,         0,         0,        33,         0,         0,         0,         0,         0,         0,         0,         0,         0
R66,      3351,         0,         0,         0,         0,         0,       534,         0,         0,         0,         0,         0,         0,         0,      1420,         0,         0,         0,         0,         0,         0,         0,         0,         0,         0,         0,         0,         0,         0,         0,         0,         0,         0,         0,         0,         0,         0,         0,      1397,         0,         0,         0,         0,         0,         0,         0,         0,         0,         0,         0,         0,         0
R79,         3,         0,         0,         0,         0,         0,         3,         0,         0,         0,         0,         0,         0,         0,         0,         0,         0,         0,         0,         0,         0,         0,         0,         0,         0,         0,         0,         0,         0,         0,         0,         0,         0,         0,         0,         0,         0,         0,         0,         0,         0,         0,         0,         0,         0,         0,         0,         0,         0,         0,         0,         0
R80,     18423,         0,         0,         0,         0,      4932,         0,         0,         0,         0,         0,         0,         0,       284,         0,         0,         0,         0,         0,         0,         0,         0,         0,       150,         0,         0,         0,         0,         0,         0,       564,         0,         0,         0,         0,         0,         0,         0,         0,     12493,         0,         0,         0,         0,         0,         0,         0,         0,         0,         0,         0,         0
R81,       205,         0,         0,         0,         0,         0,         0,         0,         0,         0,         0,         0,         0,         0,         0,         0,         0,         0,         0,         0,         0,         0,         0,         0,         0,         0,         0,         0,         0,         0,         0,         0,         0,         0,         0,         0,         0,         0,       205,         0,         0,         0,         0,         0,         0,         0,         0,         0,         0,         0,         0,         0
R87,      2926,         0,         0,         0,         0,         0,         0,         0,         0,         0,         0,         0,         0,         0,         0,         0,         0,         0,         0,       750,         0,         0,         0,       804,         0,         0,       278,         0,         0,         0,         0,         0,         0,         0,         0,         0,      1094,         0,         0,         0,         0,         0,         0,         0,         0,         0,         0,         0,         0,         0,         0,         0
R89,     35658,         0,         0,         0,         0,         0,      9267,         0,         0,         0,         0,         0,         0,         0,         0,         0,         0,         0,         0,         0,         0,         0,         0,         0,         0,         0,         0,         0,         0,         0,         0,         0,         0,     12258,         0,      3259,       197,         0,        85,         0,         0,       919,         0,      9243,         0,         0,         0,         0,        71,       359,         0,         0
R92,      1106,         0,         0,         0,         0,         0,         0,         0,         0,         0,         0,         0,         0,         0,         0,         0,         0,         0,         0,         0,         0,         0,         0,         0,         0,         0,         0,         0,         0,      1106,         0,         0,         0,         0,         0,         0,         0,         0,         0,         0,         0,         0,         0,         0,         0,         0,         0,         0,         0,         0,         0,         0
R94,   1551181,         0,         0,         0,         0,    299964,         0,         0,         0,         0,         0,      8017,         0,         0,    152261,         0,         0,         0,         0,         0,         0,         0,    613762,         0,     28629,         0,         0,         0,         0,         0,         0,         0,         0,         0,         0,         0,         0,         0,       283,    316478,         0,         0,         0,         0,       155,         0,         0,        34,    131598,         0,         0,         0
S67,   3569734,         0,    100635,         0,         0,   2379063,         3,         0,       788,         0,         0,         0,     10513,         0,         0,     14312,     20781,         0,         0,         0,      7385,       102,    147957,     55388,         0,         0,         0,         0,      4901,      3131,         0,     89964,         0,    440500,         0,         0,         0,     38662,         0,     93641,     14594,         0,        12,         0,         0,       932,     11002,         0,     25602,         0,    109866,         0
S89,     39177,         0,         0,         0,      1286,      6907,     15865,         0,         0,         0,      2211,         0,         0,       544,      2061,         0,       365,        18,         0,         0,        60,         0,         0,        17,         0,         0,         0,         0,         0,       488,         0,         0,         0,         0,         0,         0,      2136,         0,         0,         0,         0,         0,         0,      5351,         0,       288,         0,         0,      1395,         0,         0,       185
T01,   7363812,     98027,     69048,    288356,     11089,   2946074,      7382,        12,         0,         0,    490073,     27758,         0,        12,    223973,      4431,         0,     34043,    338548,     42584,     41453,    193770,       195,    321346,      7961,     22617,     12896,    182204,       207,     41099,       319,     14158,     21400,         0,    112183,      1908,     11581,         0,       136,    210818,     17858,     12585,         0,         0,         0,       271,      9754,     15351,   1386622,      2053,     53960,     87697
T09, 108712128,   1115516,         0,   2088288,   1032536,  16089973,    913599,   2090143,         0,         0,   8325978,   2687346,   1294723,    441601,   4241572,   2590600,   1010228,    958165,   1366872,   1268695,    573418,   1579785,   1978654,   3665541,   2190676,   1182356,   1916680,         0,    663159,    892721,         0,   4049282,    982572,   6005503,   2171041,    232720,   3751523,    971331,         0,   4499734,    388987,   1452014,    289325,   2514798,   8575890,    802439,    157030,   1570789,   5031574,    796889,   2127315,    182547
T10,   3590510,    110997,     12034,     41091,     27441,    296811,     21520,     43443,     10875,         0,    525717,    114867,     41492,      5459,     59434,     33419,     12631,     54791,     54163,     62112,     36400,     25277,     64675,    122309,     53368,     34207,     23570,     14853,     15725,     14854,     11181,     80547,     17425,    235004,    155515,      4905,     64205,     56744,     10741,    144665,      9131,    109870,      9381,     63234,    386848,     17090,     13961,     97155,    119885,      8582,     39664,      1242
T11,    816194,       103,      1479,       884,         0,         0,      1179,     20120,         0,         0,      2336,         0,         0,         0,     26361,         0,     14706,       899,       278,      2495,         0,      2120,      9353,         0,     55327,      1540,         0,         0,      8333,    366136,      1895,    257023,       810,       696,         0,      5701,         0,         0,        28,       382,       152,     19796,         0,         0,     15427,         0,         0,        65,        21,        41,       508,         0
T12,   7834971,    221685,     25451,    115857,     51952,   1173297,     90513,    160843,     44686,         0,    311977,    166827,     61551,     46108,    197720,    122788,     97447,     88613,    206917,    208193,     46376,    138719,    284809,    178304,    130617,     90154,    182969,     27768,     35892,     67107,     37747,    206458,     41000,    610046,    202157,     18745,    281301,    109998,     59506,    404806,     33751,     66733,     28566,    155160,    516081,     31085,     16723,    174788,    110016,     55964,     88306,     10894
T13,  22252877,    330895,     43247,    369946,    307534,   2248089,    360498,    361770,     72874,         0,   1084611,    449782,     72106,    132019,   1030266,    542470,    333425,    250999,    360058,    470116,    143483,    462777,    541069,    745000,    464916,    317098,    384342,    121493,    222145,    139131,     92534,    410625,    182739,    495208,    861487,     75245,   1128832,    340208,    271561,    694408,     94074,    287393,     82685,    656573,   1953453,    136352,     55854,    629104,    627136,    207992,    568929,     38326
T14,    606289,      4698,         0,      8085,     18634,    121255,     19328,     53838,       144,         0,     93540,         0,         0,      1000,     44046,         0,      4754,         0,      6852,     10464,      1070,      2843,     26089,     19972,      1797,         0,         0,       142,       567,         0,      7810,      6955,      1135,     76770,         0,         0,     13955,      7261,      4406,     11799,      9408,         0,       569,         0,         0,         0,       207,         0,      5899,      8650,     12093,       254
T15,   7764969,    299164,      2101,    105152,         0,     40222,      5260,    159639,     21057,         0,    391380,         0,     82255,      1616,    717660,      3412,         0,       355,         0,     21826,       477,    122240,         0,         0,     17941,         0,      1395,     13983,      1855,      5085,     27376,   1701161,      6327,   1572830,    248274,     12824,    605503,     14004,      4859,    660117,     60673,     37418,       694,      5587,    217599,      4893,     14614,    100917,    190610,     11319,    253295,         0
T16,   6118679,     67346,     16972,     52548,     65948,    717624,     61599,    118713,     19662,         0,    435947,     84261,     27384,     22995,    310187,    111196,     97433,     55549,     14045,     86783,     52127,     91867,    139856,    245937,    164767,     51778,     79683,     13397,     38751,     48292,     38140,    269465,     18408,    593580,     40363,     13770,    224199,     68854,     87528,    336244,     36545,     28461,     13952,     80105,    582793,     26100,     13996,     15315,    146930,     32088,    153564,      5632
T19,   6438667,     68480,         2,         0,     13743,     26594,     10224,     64846,     26043,         0,    205774,         0,     79982,      2000,    112158,         0,         0,      9220,    218801,     30968,         0,    314057,     55863,     11516,    279429,         0,         0,     10521,     12486,      5302,    470057,     26034,     56348,   1069214,    294144,     24180,         0,      7816,         0,    513740,     34448,     50145,     24065,    372621,   1355505,         0,     95338,    269519,    116861,    100623,         0,         0
T20,    259997,      2323,      1689,      2167,      1025,     31267,      3347,      5766,       671,         0,     24925,      1930,         0,       924,      2868,      9677,      8234,      2696,      1819,      2433,      2399,       327,      1176,     11516,       476,      2269,      2467,      1503,       208,        20,      2828,      3238,       470,     29812,      4727,       237,     24600,      2889,      1586,     13663,       239,      9099,       231,      1627,     17885,       529,       362,      5983,      7746,      5934,       182,         8
T21,    226272,         0,       109,        27,       303,        70,       254,       564,        87,         0,      8525,         0,         0,         0,       936,         0,      2506,       179,       433,         0,       644,        14,       794,       603,       399,         0,       985,     32685,         0,     64870,       543,     57203,       154,        31,      5003,      1217,         0,      4185,      1773,        72,       217,     26672,       180,         0,      6197,         0,       161,        11,      4313,         0,      3353,         0
T22,   4104183,    121586,       930,      4000,      8122,     50200,       981,      9829,    297004,         0,     48832,     23748,      1815,       283,     82947,      3954,     30600,     14437,     82087,    265035,      2087,      3982,     18576,     14506,      3013,     46920,     63436,       849,     10077,      8455,      7713,     98451,      1191,     23655,    161398,         0,    180364,     35131,      4013,    943904,      5973,     27446,       564,    230776,   1116796,         0,       648,     23799,      9015,      5356,      7397,      2302
T23,    884301,     17452,     11459,     13510,     17111,     62678,     51576,      2538,       901,         0,     15181,     18014,       247,     19054,     15248,     12976,     14506,      9590,     11766,     11769,      8426,      9364,      4295,     38968,     35773,      8889,     19902,     22325,      8071,      7456,      5940,      9766,      8463,     31594,     13644,      9247,     22557,     12854,     26854,     43272,      1054,     11341,      8916,     20353,     44639,     16624,      4783,     15436,     27156,     13512,     45929,     21322
T24,  10652964,    145769,     24219,    193389,    115316,   1358935,    103328,    173429,     18441,         0,    533357,     84135,     39540,     48878,    612073,    155642,    226548,    109739,    148517,     86569,     50845,    151855,    250986,    514341,    393416,     62691,    200840,     40943,     54631,     67740,     51514,    315419,    106314,    561678,    279959,     25226,    481465,    298009,    244920,    447173,     50787,     79127,     25176,    158693,    692888,     45472,     38218,    255805,    203538,     79462,    207498,     38511
T25,   1006263,     14142,       680,      8828,      8659,     97207,     13195,     23595,      1500,         0,     97250,     19773,         0,      4332,     44507,         0,     16471,      9465,      5221,      6315,      6642,     16998,     63577,     37486,     19998,      9057,     16481,      3092,      4636,      6904,      7678,     25218,      4954,     54200,     55159,      3382,     21359,      7397,     14349,     55484,      1244,     14703,      2063,     27117,     71259,      8991,      4532,     23956,     20040,      4383,     21667,      1117
T27,    292432,      2647,         0,         0,      8517,     66023,         0,         0,      2382,         0,     22517,         0,      2996,     16612,         0,        40,      5447,      2687,      1950,      3511,         0,         0,         0,     17085,         0,      1491,     12190,      1345,         0,         0,      4461,        16,       101,     35969,         0,         0,       442,         4,      7485,     35713,         0,         0,         0,      4081,      7535,         0,         0,         0,     15399,     12333,        20,      1433
T28,   3908813,     91283,     41568,     32299,     36079,    614857,     57863,     63880,    127337,         0,    223136,     37823,     10066,     23791,     39996,     22369,     52377,     24428,     27186,     35621,     26309,     82062,     69426,     76483,    109380,     24488,     82274,     17196,     31427,     58424,     24145,     60539,     13421,    202792,     79800,     18919,    165586,     37312,    106970,    223502,     13456,     83570,     18029,     56419,    295707,      9863,      7718,     62108,    140941,     19861,    126937,      1790
T29,    258264,         0,        50,     25480,       502,      6627,      9978,      5162,       573,         0,     23742,     26020,       167,      1478,      2133,      1418,      1419,      1754,      2027,      1172,       876,      1700,      3216,     19616,     10785,       107,      8821,       145,     13317,      3500,      2154,      3235,       542,      2822,      1460,       975,      3559,       337,      2064,      6819,       887,     27501,       551,      1810,     13174,       575,      2242,      3144,      2674,       215,      9390,       349
T40, 104921882,   1233824,         0,   1240372,    850111,  17029575,   1611954,   1865711,    497589,         0,         0,   3081708,    906982,    462472,   4582387,   2588916,   1410926,    833756,   1678526,    867478,    591487,   2907450,   5336957,   3241549,   2999091,    439577,   1844004,    321538,    652638,         0,     34958,   4101895,    445303,  14913380,   3583018,    119497,   4407036,   1218181,   2221297,   4689139,    478461,   1410893,         0,     93360,         0,    781383,    271430,   3321243,         0,    612619,   3142211,         0
T41,  21841433,    164779,    200025,    210824,    125525,   4518418,    123458,    593720,    128737,         0,    695114,    375286,     67768,     58368,    970531,    672100,    192818,    198998,    271027,    232061,     69921,    216946,    756781,   1729549,    422812,    146308,    229730,     57683,    103617,         0,     95635,    845823,     77786,   2518790,    643865,     38610,    641701,    149142,    152161,   1623774,     48502,    141895,     35222,    295266,         0,     76375,     30954,    273258,         0,    182081,    437689,         0
T50,   4455707,     30279,      1029,     25652,      8587,    447844,     34325,    190659,     38297,         0,    281368,     37584,     16416,     21706,    120553,     86969,     78030,     52540,     77355,     46158,      8551,     80331,    260215,    207774,     22312,     10851,     46711,     11338,      6619,      8433,     26275,    224854,     11623,    747639,     94924,      2394,     75877,     46873,     20427,    537731,     17730,     26145,     18996,     42414,    141007,      3975,      6948,     48791,     34456,      7410,     57664,      3068
T51,   1918060,     15057,         0,         0,      7070,         0,         0,     51119,     30728,         0,    595927,     14023,      4028,         0,     25879,         0,      5938,         0,      3194,         0,      7497,     60261,     36684,         0,     63488,         0,         0,         0,      2885,         0,     34472,     35297,         0,    331920,         0,         0,         0,      4485,     15835,    173029,      3351,     12693,        99,     54204,         0,         0,     10209,     82962,    211325,      3658,     20743,         0
T53,   4647479,     61864,   1150605,         0,     14996,     29309,     16046,         0,         0,         0,     67000,         0,         0,       792,         0,       762,         0,     88789,    203329,    487887,         0,         0,         0,     41331,      2045,     41994,       109,    123795,      2631,     17847,        40,         0,    239170,         0,      1621,     83305,      9143,    354988,     63788,         0,         0,         0,      5768,      1199,   1013811,     25776,         0,      1426,     64768,    180833,      1275,    249437
T99,    219864,         0,       240,         0,     17492,         0,     14291,         0,      1417,         0,         0,     16096,         0,      1700,         0,         0,         0,         0,         0,         0,         0,     37749,         0,     18438,         0,         0,      1875,     16078,         0,         0,         0,         0,         0,         0,         0,         0,         0,     17269,         0,         0,       183,         0,         0,     22701,         0,         0,     10290,     34420,         7,         0,      9618,         0
U01,    127359,         0,         0,         0,         0,     58125,         0,         0,         0,         0,      1180,         0,      3878,         0,         0,         0,         0,      5343,         0,         0,         0,         0,         0,      5560,         0,         0,         0,         0,         0,      5218,         0,     21505,         0,      1728,      7229,         0,      5226,         0,         0,         0,         0,         0,         0,         0,         0,         0,         0,         0,         0,         0,     12367,         0
U11,    182562,      5211,      4446,     15323,        16,     18144,      1198,      2223,     20935,         0,      7884,         0,      7481,      4684,       937,      3505,      1478,       686,      2073,      9567,       209,      2054,       138,      5269,      2954,       243,      1158,       678,      1121,       935,         0,       110,      2677,      7979,         0,      1631,       646,       663,      2413,      3086,       419,         0,       708,         0,     29131,      2172,         0,      1089,      3431,         0,       814,      5043
U20,  26601986,    398721,   1675147,    168336,    174163,   2326507,    323360,    471805,    228377,         0,    882050,    229648,    246854,    154250,   1096136,    499516,    178324,    113468,    433417,    600896,    189284,    389314,    938498,    762452,    431971,    127330,    437445,    209398,    198501,    111039,    276567,   1207824,    571224,   2678527,    333942,     99458,    680720,    330453,    933430,    725127,    307157,    289458,    191563,    238051,   1573652,    201398,    105124,    549787,    352541,    177055,    512327,    270394
U30,   1779676,     16764,      4804,     32191,      2570,    439503,     15618,     53474,      6219,         0,     62361,      2831,     21968,      6407,     40243,      9383,     34505,     14556,     42524,         0,     29045,     93984,     29557,      3135,     24121,     15000,      2033,      4063,      1354,      9984,     17819,    108478,     13092,    156745,         0,      4058,     32766,      5134,     50898,     82073,      5394,     33205,      2274,     27162,     62870,     18148,      8828,     46462,     51652,      3559,     29386,      1476
U40,    511781,      3859,     34998,     18791,         0,     20624,      9616,         0,       652,         0,     13266,      5759,     24533,      3554,       820,       119,       706,      2009,      2754,     28583,      1745,       247,      1562,      2290,      2218,      6086,         0,     14787,     18375,      7623,       886,     12714,    118260,     14134,     10867,      4083,         0,     13729,      9434,      5861,      4791,      2182,      2216,       125,     42327,      6942,       523,      1359,     23987,       426,       374,     10985
U41,   1729779,     26853,    854969,     10370,       633,    235286,     55693,      9023,         0,         0,         0,         0,         0,         5,         0,       328,        44,      1463,         0,    199224,         6,         0,      2281,     45804,      5789,       495,         0,      5101,       719,         0,         0,         0,    101747,         0,         0,     13357,         0,     12984,         0,       279,         0,        63,       941,         0,    110669,      9508,         0,         0,         0,         0,         0,     26145
U50,   4410390,    128829,      7437,     77058,     24973,    369887,     91701,     54118,     16594,         0,    206527,    105249,     13163,     22506,    261137,    141314,     66774,     26140,     38877,     41594,     16814,     51022,     50447,    241898,    167075,     31799,     53300,     11081,     49064,     24335,     14403,     91244,     21322,    250705,    164035,     16510,    174276,     42337,     71429,    178142,      5724,     80445,      5591,     75880,    312761,     35083,     22915,    156786,    129091,     19173,    138984,     12841
U95,   8988973,         0,         0,    114119,         0,    608115,     99895,    227368,     33035,         0,    980494,         0,         0,     23849,    660714,    143490,     58049,     35773,    134136,    163976,     52641,    376507,    541605,    522682,    107325,         0,     92263,     12761,         0,         0,     41450,    615071,         0,    912275,         0,         0,    812367,         0,    103666,    692035,     25366,         0,     48206,         0,         0,         0,     20770,    371689,    151181,     39376,    166724,         0
U99,  10422792,     27216,    107235,     47818,     51169,    294042,    100710,    283570,     33536,         0,     93892,     49045,     18515,     27949,    402287,    124974,    114274,     24747,     31666,    279176,    189687,    320248,    716538,    551159,     65353,     42630,    381901,     54633,     17281,     14161,      9739,   1096996,      3867,   1251071,    243335,      6308,    106598,     45095,     24106,   1079571,    155668,     32791,      6157,    390648,   1030470,     22202,     49731,    198152,     51871,     62082,     88137,      2785
V98,  49620634,    664748,    389682,    698704,    444873,   3501400,    585807,   1051739,    302293,         0,   2146652,   1289555,   1225593,    258447,   2077624,   1001243,    711905,    674153,    996454,    911795,    199041,    922492,   1574666,   1054712,    789399,    452201,    712495,    233948,    365268,    333472,    142341,   2263038,    349303,   5082799,   1123760,    203827,   2192738,    641984,    547176,   1638994,    352347,    886120,    183017,   1192638,   2600803,    349000,    107501,   1113277,   1643209,    370284,    771504,    294613
W01, 210472938,   2419643,   4298190,    520134,   1572992,  18515633,   2724090,   5743411,   2538211,         0,   5642362,   1466309,   1401529,   1127811,  12365284,   3526284,   1219815,     74786,   2772304,   5620894,   2180757,   4262389,  11776078,   7131948,   2438314,   1029703,   5194138,   1425441,   1413320,    851747,   4016044,  10522867,   1177364,  29198950,   2781923,    989953,   7327397,   1739458,   4139408,   7175575,   3143568,   1696431,   1688223,   1840932,   3268349,   1688856,   1041506,   6350920,   2694151,   1515828,   4403725,    817993
W31,  20490059,    379370,     53766,    294641,     13902,   4553931,    126858,    585557,     84899,         0,    996881,   1018841,    664007,      4494,    292205,    196674,    156437,    146570,    785830,     49360,     49288,    120545,    201525,    111191,    110931,     79917,     53487,     21873,      6534,    341511,     52570,   2131958,     88083,   2640110,    196514,      3206,    498191,    182042,     71673,    624151,    191680,    280251,      6588,     12662,    974606,    153929,     82516,    320133,     77401,    344997,     40768,     15005
W61, 131665528,   1407941,  15086797,   1179104,   1124132,  10844013,   1487499,    945012,    842457,         0,   6575158,   1324180,   2005003,    837105,   2796750,   3997005,    879285,   1153368,   1712933,   1678063,    164477,    982181,   2439471,   3416237,   3692555,    845214,   1374202,   1129889,   1267394,    604017,    200432,   2946224,   5424793,   3392307,   2479964,    679794,   3187775,   2263856,   2937062,   5217875,    361511,   1513514,    528786,   1117113,  16180421,   1059823,    221936,   2696951,   2862345,    678483,   1297426,   2625695
X01,   8413233,    135016,     69527,     78774,       796,   1777103,    143864,    132255,       275,         0,     20978,    191138,     27698,     39478,    460159,    122926,     22543,     84273,    208405,     34065,     55784,         0,    150448,    222371,    205332,     97514,    187081,     22547,     43978,     13461,     29156,    505415,    124049,    221343,    319172,     19967,    651096,    159441,    152950,    362016,     47933,     55169,     23313,     23620,    774252,     22680,     10940,     56231,    281216,      8825,      9752,      6908
X02,   4829317,     82958,     52208,     21085,     37280,    634153,    112224,     33942,     17832,         0,         0,    103627,     38249,     20692,    309487,     38943,     91797,     31135,     79522,    294003,     22695,    109041,    200646,      7936,     79116,     68695,       620,     51911,       899,      4730,     25356,    139775,     39922,    125359,    155098,      8305,    663563,     28640,     80872,    189844,     29201,    221196,     15812,     75620,    270628,      9455,      2504,      2373,    118312,     74845,      5158,      2053
X05,  11145703,     56128,     99288,     83702,     23009,   1125728,    269679,     22641,       867,         0,   1752024,    145230,     43233,         0,    328331,    123386,    132224,     13263,     88841,     48666,         0,     24605,     14400,    397579,    297217,    127475,    211456,     58662,     45318,    238633,     14168,    292956,    135757,    767396,    110501,     20964,   1094392,     64028,    284065,    492171,     54236,     66578,     22230,     32495,    251790,    134264,      2685,    455944,    468566,     18837,    542593,     47502
X06,  13373263,    310584,    114560,     23280,    158236,    811509,    179192,    393359,     67063,         0,    584087,    595412,     77194,    112826,    474284,    304885,     42601,     78284,    370103,    247174,    172090,    622477,    694358,    636470,     92232,    252314,    181139,     25870,     59931,     90855,     29151,    473507,     68007,     21396,    421198,      9336,    960232,    271026,    142886,    492171,     20791,    270054,     15032,    254494,   1132862,     66577,     32159,    239262,    262438,    162721,    221591,     34003
X08,  62101937,    978086,    591764,    836682,    421725,   9545570,    941688,    519919,    195631,         0,   1974090,   1430681,    540865,    103549,   2249146,    681819,    431094,    392443,    635096,    468583,    137770,   1317211,    264253,   1310051,   1634530,    331983,    980554,    172293,     76200,    402392,     68367,   2008982,    439205,   6928943,   1672170,     89653,   3951912,    601930,   1458744,   3078709,    302852,    829020,    161962,    986220,   2952715,    363850,     87437,   1135967,   1198863,    155153,   3898405,    165210
X11,  33573711,    428806,    230239,    371483,    182520,   4927049,    487288,    615458,    123739,         0,    909970,    648408,    249240,    111548,   1395479,    433015,    206920,    150809,    482189,    743214,    201825,    638240,    695369,   1375905,    590842,    243869,    381698,    134508,     30026,    164304,     59650,   1509285,    252178,   3235050,    771679,     40927,   2935248,    525281,    465488,   1660931,    205369,    437382,     54688,    331777,   1403862,    168281,     38878,    597148,    642933,    252296,    764600,     66820
X12,   2054678,     29264,     14542,     38356,      4862,    266986,     31810,     11912,      1444,         0,      2668,     60194,     34954,         0,     78836,     26505,     24223,     22577,     18845,     70122,     12515,     49779,    122072,      6347,     35035,     35948,     25710,     12068,      5949,      5876,     12638,     60371,     33846,    104954,     68545,      6056,    119027,     24378,     29406,     26897,      5498,     40455,      5662,     23696,    254360,     14466,       670,     35345,     89319,     12599,     27536,      9555
X21,  39182811,   1126514,     22746,    922381,    394218,   4669336,    340924,    549308,    154569,         0,    731578,    398611,    389275,     65980,   1436842,    758369,     90702,     51769,   1121877,    785877,    152350,    164280,     86736,   4004328,    116653,    789059,   1113279,     50087,     68148,    250637,    119903,        31,    247653,   1537935,   5453109,     12647,   1829930,    456383,    824819,   1230386,     36283,   1539906,    249824,    620054,    443758,    274146,     89035,   1207626,   2022202,     45435,    118173,     17140
X30, 167560826,    160565,   1315238,   4256544,   1164879,  19756356,    928865,    760053,    191688,         0,   5783014,   5607326,    663862,    622432,   1968335,   3672612,     18630,    547774,   1819114,   3083367,    124434,         0,     55825,   3480571,    264950,   2220723,   3479784,     37930,    312792,   1434783,    156887,    861824,   1590061,  17169183,   5523715,       322,  30279284,   1560926,   1291703,   8545341,   1502514,   8629122,    366860,   2707898,  12448033,   1102232,     79528,   1359184,   2745019,   1591559,   4017893,    299292
X40, 134777508,   4981680,   1268022,    411091,    896987,  20023356,   2955095,   1906536,    271485,         0,   3784849,   2313498,    557609,         0,   6181594,   2538167,   2158351,    814950,   1546240,   1930593,     73472,         0,   1257546,   3331281,    222450,    651799,   3265165,   1180507,    147457,    401957,    160956,  13985859,   1647927,  12169325,   5254355,    247298,   5786423,    788161,   1261620,   2552524,         0,   2512860,    236273,   2813317,   7167150,    548880,    149267,   2495996,   1099923,    123370,   7799440,    904847
X41, 203273564,    905313,   1816529,   3600744,   2122553,  31801460,   3696767,   2172628,    375741,         0,  11002737,   7485133,   1251204,    702550,   8550117,         0,   1330908,   1467880,   3244526,   2444427,    937603,         0,    972911,   7321471,    443201,   1514280,   2991598,    371764,    404969,    833185,    598103,  10348144,   1350884,  28590087,   2694517,    250101,  14375436,   2435265,   1203972,  11703342,    910108,         0,    725746,   2762060,   9022257,   1845106,    334879,   3061974,    877850,         0,  10000000,    421534
X42,  22224185,   2671004,    142289,    239771,    118741,   7754332,    404499,     64489,         0,         0,         0,     13647,         0,    147910,     56105,       584,     11500,         0,    354360,       212,         0,         0,         0,    821410,         0,         0,     21059,    118604,         0,         0,     88994,         0,      2563,   4283239,         0,         0,     31580,         0,    600536,    905296,         0,         0,         0,         0,   2116849,     14448,      2468,     18213,    907112,      5120,    307251,         0
X44,  56636092,         0,    304312,    497581,     16485,  11319846,   2040814,   2603488,         0,         0,    618134,     19866,   1248409,      2046,    668688,     20993,   1289595,    412825,         0,    456518,    748526,    103448,   1840740,     42822,  10673400,      6800,     84199,     86961,     78290,    928955,    168429,   1047658,         0,   2050542,     97239,    465640,   2371231,    116302,   1314750,   1834205,         0,         0,     62447,    805354,   1015552,         0,     36925,   3755976,   5208537,     24519,     23635,    123410
X47,  33106470,         0,         0,         0,       942,    575102,    314724,    219479,    912534,         0,         0,     21704,    350652,         0,   1526276,         0,    967080,    164155,         0,    111702,     12809,  12224419,   3676522,    672599,   2680812,         0,    141746,     69677,         0,    380602,     10365,         0,         0,   2170983,    254714,     13380,   1114097,    115979,   1318427,   1134099,         0,         0,     21217,         0,     31712,    149809,     48615,    662476,   1009526,     27535,         0,         0
Y01,  15785312,    122267,     97581,    100613,    132975,   1902520,    162647,    236056,     48215,         0,    406826,    287192,     37606,     48565,    922050,    180130,    150395,    170456,    189488,    206279,     77993,    317017,    709051,   1113232,    283552,     79318,    233379,     38122,     45673,     71160,     43317,    964785,     66374,   1254688,    225300,     22490,    802245,    102213,    308850,   1137793,    115344,    159299,      8532,    218155,    674276,     73492,     36889,    158214,    542729,    110135,    359042,     30792
Y02,   2195912,     37839,     14315,     38208,      9162,    299783,     19485,         0,     18663,         0,    115538,     62358,     26563,     15204,    101506,     73861,     48195,     35374,     23384,     44970,      6532,     20297,      3386,      2060,     20353,     14101,     11353,      7245,      9160,     19775,      9040,    219414,     13588,     98297,     87640,      3111,     45688,     35332,     63784,         0,     13591,     29771,      3058,     51915,     68822,     26234,     12264,     39399,    138536,     11933,    118003,      7822
Y04,   8940103,     60909,     32186,     61864,     48086,    852704,     48872,    611353,     73037,         0,    376419,    163587,     16486,     20016,    383625,      3918,     39421,     45368,     80201,     50806,     68361,    148572,    787225,    428483,     88834,     45702,    118479,     13658,      5553,     43294,     17950,    615363,     19575,   1269485,    113175,      8366,    400010,     54078,     85180,    550747,     90531,     62118,      2262,    114143,    420819,     20448,     15589,     98597,    129111,     49476,     80231,      5830
Y05,  24278358,    206024,    110377,    200850,    178943,   3603069,    165650,    590004,     72633,         0,    843556,    400352,     98093,     78833,   1316991,    185147,    184992,    182935,    232331,    185045,    155074,    476950,   1106856,   1304614,    383732,    120292,    374124,     42397,     46614,    155677,     68909,   1543282,     69923,   2503909,    420373,     27856,    975923,    135014,    375277,   1678566,    212498,    223839,     11060,    299617,   1066513,     78019,     66860,    282892,    603611,    147806,    457147,     27309
Y06,   8482323,     60680,     33344,     59909,     49115,    888827,     48182,    254419,     12841,         0,    377639,    163580,     16423,     19713,    393773,      3918,     40336,     45361,     80073,     51725,     69832,    154151,    483035,    499995,     88704,     46204,    118473,     13517,      5534,     43083,     18084,    710948,     19965,   1285599,    113773,      8470,    276672,     54026,     89242,    556452,     98351,     64027,      2264,    117509,    424789,     20936,     16041,     98937,    246476,     51065,     80385,      5926
Y07,  27676791,    544459,    223474,    402055,     80474,   3553490,    316143,      2990,    218043,         0,   1559669,    930175,    383466,    219792,    991679,    905541,    568136,    576180,    344744,    582344,     34667,    198993,       703,    214000,    195987,    337021,     58290,     85966,    145926,    239905,    126648,   2327729,    217202,    752689,   1282707,     42256,    606787,    417128,    984593,    990653,    101051,    428902,     46857,    594246,    774015,    321266,    173556,    513614,   1672422,    141923,   1147930,     98305
Y08,   -286483,     -2167,     -3318,      4881,     -1556,   -112573,     -1951,    -16380,      -979,         0,    -30552,      -543,       249,      -519,     -3050,      2795,     -1803,        18,       961,     -4831,      2014,    -11214,    -19303,    -27081,     24899,     -1065,     -7189,      -874,      2796,      5697,      -623,     39451,     -1363,    -61517,       290,      -752,    -21429,     -3133,     -5424,       482,     -2874,     -2019,       -74,     -7226,    -12813,      -556,       778,      3110,      2594,     -2628,     -7617,      -502
Y10,    513102,         0,         0,         0,         0,     20123,         0,         0,         0,         0,    110233,         0,         0,      3840,         0,         0,         0,         0,      1103,     15582,         0,     20516,         0,      4032,      3574,         0,     35100,     12013,         0,     12055,     75745,         0,     10262,     10648,         0,        88,     57982,     17255,         0,         0,         0,     28767,      1111,         0,         0,      5551,         0,         0,         0,         0,         0,     67522
Y11,   8941184,        14,      1449,    248630,         0,   1607308,    281980,     72148,      8708,         0,         0,         0,         0,     80320,      7001,         0,       815,     35961,    112841,         0,       176,    138097,     31402,    233538,    132808,         0,      3900,    126790,         0,    319985,         0,    108860,         0,   1584898,         0,     73158,   1822128,    137663,    108118,    280554,     14686,     46667,       409,         0,       408,    115243,         0,         0,    868672,    331382,      2379,      2088
Y12,   2799285,         0,         0,     89683,       874,    468704,     50792,       894,         7,         0,      5276,         0,         0,     13988,        50,         0,        20,         0,         0,         0,        18,     58217,       752,     57809,      1869,         0,       140,     10888,        62,     54003,     10724,      3899,       559,    353639,         0,     15851,    917653,     35990,     16554,     80805,       580,      3358,         0,         0,       300,     21555,         0,         0,    434106,     87392,       450,      1824
Y13,      9525,         0,         0,         0,         0,         0,         0,         0,         0,         0,      2829,         0,         0,         0,         0,         0,         0,         0,         0,         0,         0,         0,         0,      1457,         0,         0,         0,      1949,         6,      1324,         0,         0,         0,         0,         0,         0,         0,        24,         0,         0,         0,         0,         0,         0,         0,         0,         0,         0,      1936,         0,         0,         0
Y14,   7844385,        78,      2049,    160587,      1399,   1333018,    243098,     63550,      7443,         0,     77379,         0,         0,     43172,      7218,       767,       677,     30689,    101539,     16778,        60,    191262,     30995,    114538,    106323,         0,     32801,    115181,       353,    435266,     97771,     84725,      2423,    960865,         0,     83632,   1715539,    144032,     73342,    195191,      3329,     62592,      1675,         0,       477,     89129,         0,         0,    786290,    362111,      1842,     63200
Y15,   1356349,         0,         0,     48470,        97,    338895,     25772,      4700,         0,         0,     27462,         0,         0,     10770,         0,         0,       156,      4049,      5104,       356,         0,     26431,       280,     94424,     15542,         0,      6946,     19392,        32,      6625,       462,      9692,      6659,    189044,         0,      6653,    168436,     21076,     46047,     55428,       348,      4685,       194,         0,         0,     17257,         0,         0,    168620,     22919,         0,      3326
Y21,  30313662,         0,       957,    980662,     12140,   5161095,    567047,     14014,      2002,         0,     98188,         0,         0,    176071,      1273,       509,       519,      1588,      7301,      6020,         0,    541904,      6709,    681154,     16413,         0,      4083,    189288,       824,    590025,    141203,     73898,     15959,   4204420,         0,    175368,   8892788,    455844,    214754,   1005998,     11614,     68054,       471,         0,      4778,    282321,        20,         0,   4687778,    996193,      7956,     14459
Y50,      4799,         0,         0,         0,         0,         0,         0,         0,         0,         0,         0,         0,         0,         0,         0,         0,         0,         0,         0,         0,         0,         0,         0,         0,         0,         0,         0,         0,         0,         0,         0,      4799,         0,         0,         0,         0,         0,         0,         0,         0,         0,         0,         0,         0,         0,         0,         0,         0,         0,         0,         0,         0
Y51,   2924532,         0,         0,         0,         0,   2340489,     29229,         0,         0,         0,         0,         0,         0,         0,         0,         0,         0,         0,         0,         0,         0,    181932,         0,         0,         0,         0,         0,         0,         0,         0,         0,    287056,         0,         0,         0,         0,         0,         0,         0,         0,     82744,         0,         0,         0,         0,         0,         0,         0,         0,         0,      3082,         0
Y52,     63923,         0,         0,         0,         0,     22016,      2092,         0,         0,         0,         0,         0,         0,         0,         0,         0,         0,         0,         0,         0,         0,     25108,         0,         0,         0,         0,         0,         0,         0,         0,         0,      9221,         0,         0,         0,         0,         0,         0,         0,         0,       939,         0,         0,         0,         0,         0,         0,         0,         0,         0,      4547,         0
Y53,   3125064,         0,         0,         0,         0,   2611674,     18653,         0,         0,         0,         0,         0,         0,         0,         0,         0,         0,         0,         0,         0,         0,    129862,         0,         0,         0,         0,         0,         0,         0,         0,         0,    287236,         0,         0,         0,         0,         0,         0,         0,         0,     71609,         0,         0,         0,         0,         0,         0,         0,         0,         0,      6030,         0
Y54,    192581,         0,         0,         0,         0,    116687,      1632,         0,         0,         0,         0,         0,         0,         0,         0,         0,         0,         0,         0,         0,         0,     41151,         0,         0,         0,         0,         0,         0,         0,         0,         0,     27655,         0,         0,         0,         0,         0,         0,         0,         0,      4873,         0,         0,         0,         0,         0,         0,         0,         0,         0,       583,         0
Y61,    735259,         0,         0,         0,         0,    145364,     41986,         0,         0,         0,         0,         0,         0,         0,         0,         0,         0,         0,         0,         0,         0,    335452,         0,         0,         0,         0,         0,         0,         0,         0,         0,    135409,         0,         0,         0,         0,         0,         0,         0,         0,     23946,         0,         0,         0,         0,         0,         0,         0,         0,         0,     53102,         0
Z00, 112685119,   2097747,    880018,   1282892,   1084056,  12003701,   1618721,   2096748,    573586,         0,   5270941,   2387790,   1518237,    467534,   3532678,   2154978,   1638938,   1187891,   2009040,   2438250,    603582,   2330900,   2823466,   4498828,   2503110,    986032,   1914685,    427380,    836290,    586980,    476190,   4285141,    908125,   9744357,   2707150,    434720,   4529244,   1600527,   1558880,   4576908,    586047,   2107818,    337902,   1829908,   4994814,    944010,    362453,   3032098,   2832003,    734489,   2043091,    304245
Z41,   3042339,    152634,         0,         0,         0,         0,         0,         0,         0,         0,         0,         0,         0,     41202,         0,         0,     84141,         0,         0,         0,     72459,         0,         0,    444368,         0,    122830,         0,     36406,         0,         0,    204651,         0,         0,         0,         0,         0,    354717,         0,    168672,    667257,         0,         0,         0,         0,         0,     69345,     28309,    258992,    259448,     45130,         0,     31778
Z42,   2084323,    108519,         0,         0,         0,         0,         0,         0,         0,         0,         0,         0,         0,     26562,         0,         0,     55634,         0,         0,         0,     41614,         0,         0,    351750,         0,     95894,         0,     28101,         0,         0,    144949,         0,         0,         0,         0,         0,    219444,         0,     85508,    442451,         0,         0,         0,         0,         0,     43195,     23320,    170934,    183270,     36150,         0,     27028
Z43,    483705,     26943,         0,         0,         0,         0,         0,         0,         0,         0,         0,         0,         0,      7310,         0,         0,      2689,         0,         0,         0,      9902,         0,         0,     30037,         0,      1439,         0,      6005,         0,         0,     18144,         0,         0,         0,         0,         0,     53986,         0,     18765,    183650,         0,         0,         0,         0,         0,      9169,      4624,     53613,     52385,      4094,         0,       950
Z44,      8877,       932,         0,         0,         0,         0,         0,         0,         0,         0,         0,         0,         0,       229,         0,         0,        56,         0,         0,         0,       590,         0,         0,         0,         0,        17,         0,        50,         0,         0,      1366,         0,         0,         0,         0,         0,       523,         0,       182,      3281,         0,         0,         0,         0,         0,         0,       551,       882,       218,         0,         0,         0
Z46,   1249327,    123869,         0,         0,         0,         0,         0,         0,         0,         0,         0,         0,         0,     12999,         0,         0,     47384,         0,         0,         0,     36433,         0,         0,    192367,         0,     47134,         0,     19100,         0,         0,     55703,         0,         0,         0,         0,         0,     96713,         0,     71335,    216720,         0,         0,         0,         0,         0,     29551,      9855,    125771,    152051,      6553,         0,      5789
Z47,     67220,      7846,         0,         0,         0,         0,         0,         0,         0,         0,         0,         0,         0,         0,         0,         0,         0,         0,         0,         0,       178,         0,         0,      8319,         0,      1163,         0,       713,         0,         0,       933,         0,         0,         0,         0,         0,      7771,         0,      4992,     19356,         0,         0,         0,         0,         0,         0,       926,      7429,      7136,       458,         0,         0
Z48,    797132,    113321,         0,         0,         0,         0,         0,         0,         0,         0,         0,         0,         0,      4946,         0,         0,      5786,         0,         0,         0,     15095,         0,         0,    133837,         0,     21683,         0,     16359,         0,         0,     13933,         0,         0,         0,         0,         0,     19642,         0,     12741,    175720,         0,         0,         0,         0,         0,     13612,      9928,    108219,    129280,      1856,         0,      1174
Z51,  19733008,         0,         0,    234150,         0,   1278103,    224920,    515826,     74513,         0,   2071868,         0,         0,     51980,   1475813,    359491,    150988,     73077,    401850,    355965,    114055,    770780,   1610939,   1120927,    279934,         0,    207516,     26312,         0,         0,     99378,   1287001,         0,   1880983,         0,         0,   1700595,         0,    244417,   1315054,     57512,         0,     60538,         0,         0,         0,     48608,    825964,    302190,     85861,    425900,         0
Z52,  10744035,         0,         0,    120031,         0,    669988,    125025,    288458,     41478,         0,   1091374,         0,         0,     28131,    815099,    216001,     92939,     37304,    267714,    191989,     61414,    394273,   1069334,    598245,    172609,         0,    115253,     13551,         0,         0,     57928,    671930,         0,    968708,         0,         0,    888228,         0,    140751,    623019,     32146,         0,     12332,         0,         0,         0,     27838,    454275,    151009,     46485,    259176,         0
Z53,   1192076,         0,         0,     22974,         0,    138932,     23677,     22960,      5374,         0,    115302,         0,         0,      9938,     51477,     27268,     18337,     16057,     29985,     24302,     11319,     28971,     58877,     49429,     52563,         0,     25304,      7035,         0,         0,      5183,     41263,         0,     54320,         0,         0,     82733,         0,     54237,     42049,      2788,         0,      4667,         0,         0,         0,      4104,     82053,     41977,     10736,     25885,         0
Z54,   7796897,         0,         0,     91145,         0,    469183,     76218,    204408,     27661,         0,    865192,         0,         0,     13911,    609237,    116222,     39712,     19716,    104151,    139674,     41322,    347536,    482728,    473253,     54762,         0,     66959,      5726,         0,         0,     36267,    573808,         0,    857955,         0,         0,    729634,         0,     49429,    649986,     22578,         0,     43539,         0,         0,         0,     16666,    289636,    109204,     28640,    140839,         0
Z61,    750716,         0,         0,         0,         0,         0,         0,         0,      8647,         0,         0,         0,         0,         0,         0,         0,         0,         0,         0,         0,         0,         0,         0,         0,         0,         0,         0,         0,         0,         0,         0,    375085,         0,    366984,         0,         0,         0,         0,         0,         0,         0,         0,         0,         0,         0,         0,         0,         0,         0,         0,         0,         0
Z81, 656761456,   9845076,   4869136,   9928112,   4714805,  95899788,  10681688,   8275981,   1906017,         0,  21920312,  15859785,   4461011,   1540918,  20387957,   6990725,   5866766,   3459353,   8086117,   8812696,   2049194,  12492147,   7890280,  19674482,  14401466,   5182661,  11096830,   1915530,   1011656,   4230119,   1303637,  26243516,   4839088,  67971294,  19277649,    989388,  55787981,   5473016,   7815827,  27905193,   2448905,  12681888,   1662367,   9708683,  32245311,   3934621,    740717,  12561445,  13870169,   1817538,  22266392,   1766223
Z82,  33106470,         0,         0,         0,       942,    575102,    314724,    219479,    912534,         0,         0,     21704,    350652,         0,   1526276,         0,    967080,    164155,         0,    111702,     12809,  12224419,   3676522,    672599,   2680812,         0,    141746,     69677,         0,    380602,     10365,         0,         0,   2170983,    254714,     13380,   1114097,    115979,   1318427,   1134099,         0,         0,     21217,         0,     31712,    149809,     48615,    662476,   1009526,     27535,         0,         0
Z83,  56636092,         0,    304312,    497581,     16485,  11319846,   2040814,   2603488,         0,         0,    618134,     19866,   1248409,      2046,    668688,     20993,   1289595,    412825,         0,    456518,    748526,    103448,   1840740,     42822,  10673400,      6800,     84199,     86961,     78290,    928955,    168429,   1047658,         0,   2050542,     97239,    465640,   2371231,    116302,   1314750,   1834205,         0,         0,     62447,    805354,   1015552,         0,     36925,   3755976,   5208537,     24519,     23635,    123410
Z88,  39182811,   1126514,     22746,    922381,    394218,   4669336,    340924,    549308,    154569,         0,    731578,    398611,    389275,     65980,   1436842,    758369,     90702,     51769,   1121877,    785877,    152350,    164280,     86736,   4004328,    116653,    789059,   1113279,     50087,     68148,    250637,    119903,        31,    247653,   1537935,   5453109,     12647,   1829930,    456383,    824819,   1230386,     36283,   1539906,    249824,    620054,    443758,    274146,     89035,   1207626,   2022202,     45435,    118173,     17140
Z89, 167560826,    160565,   1315238,   4256544,   1164879,  19756356,    928865,    760053,    191688,         0,   5783014,   5607326,    663862,    622432,   1968335,   3672612,     18630,    547774,   1819114,   3083367,    124434,         0,     55825,   3480571,    264950,   2220723,   3479784,     37930,    312792,   1434783,    156887,    861824,   1590061,  17169183,   5523715,       322,  30279284,   1560926,   1291703,   8545341,   1502514,   8629122,    366860,   2707898,  12448033,   1102232,     79528,   1359184,   2745019,   1591559,   4017893,    299292
